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WO2020110319A1 - Substrate working machine - Google Patents

Substrate working machine Download PDF

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Publication number
WO2020110319A1
WO2020110319A1 PCT/JP2018/044317 JP2018044317W WO2020110319A1 WO 2020110319 A1 WO2020110319 A1 WO 2020110319A1 JP 2018044317 W JP2018044317 W JP 2018044317W WO 2020110319 A1 WO2020110319 A1 WO 2020110319A1
Authority
WO
WIPO (PCT)
Prior art keywords
negative pressure
pipe
base
external
internal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/044317
Other languages
French (fr)
Japanese (ja)
Inventor
太志 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Priority to JP2020557529A priority Critical patent/JP7097988B2/en
Priority to PCT/JP2018/044317 priority patent/WO2020110319A1/en
Publication of WO2020110319A1 publication Critical patent/WO2020110319A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components

Definitions

  • the present specification discloses a technique related to a work machine for a board.
  • the substrate fixing mechanism described in Patent Document 1 includes a vacuum pump and a backup pin.
  • the backup pin is arranged below the substrate arranged at the mounting position and sucks and holds the lower surface of the substrate by the suction force of the vacuum pump.
  • the board-to-board working system described in Patent Document 2 includes a system base and a board-to-board working device.
  • the board working device is arranged on the system base in a state of being aligned along the board transport direction, and performs a predetermined work for the circuit board on the circuit board.
  • the negative pressure supply passage described in Patent Document 2 is connected via a joint that can be connected or disconnected with one touch on the back side of the work system for a board.
  • Patent Document 1 does not disclose a board-to-board working machine including a base and a work module that is provided on the base so as to be drawn out.
  • Patent Document 2 does not disclose a specific configuration of the negative pressure supply passage.
  • a work machine for a board including a base and a work module which is provided on the base so as to be drawn out
  • the work module can be drawn out from the base.
  • the length of the pipe for supplying the negative pressure tends to be long.
  • the present specification can suppress the decrease in the supply amount of the negative pressure supplied to the supply target inside the work module that can be drawn out on the base during the production of the substrate product.
  • Disclosed is a board-to-board working machine.
  • the present specification discloses a board-to-board working machine that includes a base, a work module that is provided on the base so as to be pulled out, and an external negative pressure supply device.
  • the external negative pressure supply device is provided outside the base, and supplies a negative pressure to an object to be supplied inside the work module without going through the inside of the base.
  • an external negative pressure supply device provided outside the base. Further, the external negative pressure supply device supplies a negative pressure to the supply target inside the work module without passing through the inside of the base. Due to these, in the above-described work machine for a board, it is easier to shorten the pipe length of the pipe for supplying the negative pressure, as compared with the case where the negative pressure is supplied to the work module from the inside of the base. It is easy to increase the cross-sectional area. As a result, the above-described work machine for substrates can suppress a decrease in the supply amount of the negative pressure supplied to the supply target inside the work module during the production of the board product.
  • FIG. 6 is a side view showing an example of a state of the external pipe 41 when the work module 20 is pulled out from the base 10 at the maximum work amount WA0 during maintenance of the work module 20. It is a schematic diagram which shows the example of arrangement of the external piping 41.
  • First embodiment 1-1 Example of Configuration of Work Line for Substrate WML
  • a predetermined work for the substrate is performed on the substrate 90.
  • the type and number of the work machine WM for forming the work line for substrate WML There is no limitation on the type and number of the work machine WM for forming the work line for substrate WML.
  • a work line WML for a board of the present embodiment is a plurality (five) work for a board of a printing machine WM1, a printing inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5. Equipped with machine WM.
  • a plurality of (five) work machines WM for a substrate are arranged in this order from the upstream side, a printing machine WM1, a printing inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5.
  • the board 90 is carried into the printing machine WM1 located at the head of the board-to-board work line WML. Then, the substrate 90 is transported to the downstream side by a substrate transport device (not shown) on the work line for working with the substrate WML, and is unloaded from the visual inspection machine WM5 located at the end of the work line for working with the substrate WML.
  • the printing machine WM1 prints solder on the mounting positions of the plurality of components on the board 90.
  • the solder printed on the substrate 90 is in a paste form and has a predetermined viscosity.
  • the solder functions as a joining material that joins the board 90 and a plurality of components mounted on the board 90.
  • the printing inspection machine WM2 inspects the printing state of the solder printed by the printing machine WM1.
  • the component mounting machine WM3 mounts a plurality of components on the solder printed by the printing machine WM1.
  • the number of component mounting machines WM3 may be one or more. When a plurality of component mounting machines WM3 are provided, the plurality of component mounting machines WM3 can share and mount a plurality of components.
  • the reflow furnace WM4 heats the board 90 on which a plurality of components are mounted by the component mounting machine WM3, melts the solder, and performs soldering.
  • the appearance inspection machine WM5 inspects the mounting state of the plurality of components mounted by the component mounting machine WM3. Specifically, the appearance inspection machine WM5 recognizes the suitability of each of the plurality of components mounted on the board 90, the mounting state (X-axis coordinate, Y-axis coordinate, and mounting angle) of each of the plurality of components, It is sent to the management device WMC. In this way, the to-board work line WML uses a plurality of (five) to-to-board work machines WM to sequentially transfer the substrates 90 and execute the production process including the inspection process to produce the board product 900. You can
  • the work-to-board work line WML can be provided with, for example, a function inspection machine that is the work-to-board machine WM.
  • the function inspection machine performs a function inspection of the soldered substrate 90 by the reflow furnace WM4.
  • the work-to-board work line WML can appropriately add the configuration of the work-to-board work line WML, and can appropriately change the configuration, for example, according to the type of the board product 900 to be produced.
  • the work line for substrate WML can also be provided with a work device for substrate WM such as a buffer device, a substrate supply device, a substrate reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device.
  • a plurality of (five) anti-board working machines WM and a management device WMC forming the anti-board working line WML are electrically connected by a communication unit LC.
  • the communication unit LC may be wired or wireless. Also, various communication methods can be used.
  • a plurality of (five) anti-board working machines WM and a management device WMC constitute a local information communication network (LAN: Local Area Network). Accordingly, the plurality (five) of the board-working machines WM can communicate with each other via the communication unit LC. Further, a plurality (five) of the board-working machines WM can communicate with the management device WMC via the communication unit LC.
  • the management device WMC controls a plurality of (five) to-board work machines WM that form the to-board work line WML, and monitors the operating status of the to-board work line WML.
  • the management device WMC stores various control data for controlling a plurality of (five) work machines WM for a board.
  • the management device WMC transmits the control data to each of the plurality (five) of the board working machines WM. Further, each of the plurality (five) of the board working machines WM transmits the operation status and the production status to the management device WMC.
  • the management device WMC can be provided with various data servers such as an image storage server and a production information server (all not shown).
  • the image storage server can store various image data captured by the work machine WM.
  • the production information server can store various production information regarding the production of the board 90.
  • the component data included in the production information includes information about the shape of each type of component, information about electrical characteristics, information about how to handle the component, and the like.
  • the inspection result by the inspection machine such as the print inspection machine WM2 and the appearance inspection machine WM5 is included in the production information.
  • the component mounting machine WM3 mounts a plurality of components on the board 90.
  • the component mounting machine WM3 includes a base 10 and at least one (two in the figure) work module 20 provided on the base 10 so as to be drawn out.
  • a guide rail (not shown) is provided on the upper surface of the base 10 along the pull-out direction of the work module 20 (arrow Y direction), and the lower portion of the work module 20 is rolled along the guide rail of the base 10.
  • Movable wheels (not shown) are provided. With these, when the worker pulls out the work module 20, the work module 20 is pulled out in the pull-out direction (arrow Y direction) with respect to the base 10.
  • Each of the plurality (two) of work modules 20 includes a board transfer device 21, a component supply device 22, a component transfer device 23, a component camera 24, and a control device 25, which are mounted on a base 26.
  • the substrate transfer device 21 is configured by, for example, a belt conveyor, and transfers the substrate 90 in the transfer direction (arrow X direction).
  • the board 90 is a circuit board on which at least one of an electronic circuit and an electric circuit is formed.
  • the board transfer device 21 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position in the machine.
  • the board transfer device 21 carries the board 90 out of the component mounter WM3 after the component mounter WM3 finishes mounting the plurality of components.
  • the component supply device 22 supplies a plurality of components mounted on the board 90.
  • the component supply device 22 includes a plurality of feeders 22a provided along the conveyance direction of the substrate 90 (direction of arrow X).
  • Each of the plurality of feeders 22a feeds a carrier tape (not shown) accommodating a plurality of components at a pitch so that the components can be collected at a supply position 22b located on the tip end side of the feeder 22a.
  • the component supply device 22 can also supply a relatively large electronic component (for example, a lead component) compared to a chip component or the like in a state of being arranged on the tray.
  • the component transfer device 23 includes a head drive device 23a.
  • the head drive device 23a includes a linear movement mechanism, and can move the movable table in the conveyance direction of the substrate 90 (direction of arrow X) and the drawing direction of the work module 20 (direction of arrow Y).
  • a mounting head 23b is detachably (replaceable) provided on the movable table by a clamp member (not shown).
  • the mounting head 23b uses at least one holding member to collect and hold the component supplied by the component supply device 22, and mounts the component on the substrate 90 positioned by the substrate transport device 21.
  • As the holding member for example, a suction nozzle or a chuck can be used.
  • a digital image pickup device having an image pickup element can be used.
  • an image sensor for example, an image sensor such as a charge coupled device (CCD: Charge Coupled Device) or a complementary metal oxide semiconductor (CMOS: Complementary Metal Oxide Semiconductor) can be used.
  • CCD Charge Coupled Device
  • CMOS complementary metal oxide semiconductor
  • the component camera 24 takes an image based on a control signal sent from the control device 25.
  • the image data captured by the component camera 24 is transmitted to the control device 25.
  • the component camera 24 is fixed to the base 26 of the component mounting machine WM3 so that the optical axis is upward in the Z-axis direction (vertical upward direction).
  • the component camera 24 can image the component held by the holding member from below.
  • the work module 20 can also include a board camera.
  • As the board camera an imaging device similar to that of the component camera 24 can be used. However, the board camera is provided on the moving base of the component transfer device 23 so that the optical axis is downward in the Z-axis direction (downward in the vertical direction).
  • the board camera can take an image of the board 90 from above.
  • the control device 25 includes a well-known central processing unit and a storage device, and a control circuit is configured (all are not shown).
  • a central processing unit CPU: Central Processing Unit
  • the storage device includes a first storage device and a second storage device.
  • the first storage device is a volatile storage device (RAM: Random Access Memory), and the second storage device is a non-volatile storage device (ROM: Read Only Memory).
  • Information and image data output from various sensors provided in the component mounting machine WM3 are input to the control device 25.
  • the control device 25 sends a control signal to each device based on a control program and a predetermined mounting condition set in advance.
  • control device 25 causes the holding member to collect and hold the component supplied by the component supply device 22, and causes the component camera 24 to image the component held by the holding member.
  • the control device 25 performs image processing on the image captured by the component camera 24 to recognize the holding posture of the component.
  • the control device 25 can recognize the holding posture of the component by grasping, for example, a characteristic portion of the appearance of the component by image processing.
  • the control device 25 moves the holding member toward the upper side of the expected mounting position preset by the control program or the like. Further, the control device 25 corrects the planned mounting position based on the positioning state of the board 90, the holding posture of the component, and the like, and sets the mounting position where the component is actually mounted.
  • the planned mounting position and the mounting position include a rotation angle in addition to the position (X-axis coordinate and Y-axis coordinate).
  • the controller 25 corrects the target position (X-axis coordinate and Y-axis coordinate) and the rotation angle of the holding member according to the mounting position.
  • the controller 25 lowers the holding member at the corrected target position at the corrected rotation angle, and mounts the component on the board 90.
  • the controller 25 executes the mounting process for mounting a plurality of components on the board 90 by repeating the above-mentioned pick and place cycle.
  • FIG. 3 is a schematic view of the work module 20 provided on the base 10 as viewed from the transfer direction (arrow X direction) of the substrate 90.
  • a pipe for supplying the negative pressure (the first described later
  • the pipe length of the second internal pipe 42b and the base internal pipe 51) tends to be long.
  • the resistance in the pipe may increase, and the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 may decrease during the production of the board product 900.
  • the component mounting machine WM3 which is the working machine WM for a board, includes the external negative pressure supply device 30.
  • the external negative pressure supply device 30 is provided outside the base 10 and supplies a negative pressure to the supply target VS0 inside the work module 20 without going through the inside of the base 10.
  • the negative pressure hereinafter referred to as “external negative pressure” supplied from the external negative pressure supply device 30 shown in FIG. 3 is directly supplied to the supply target VS0 via the pipe 40.
  • the pipe 40 for example, a known air hose can be used.
  • the pipe 40 provided outside the work module 20 is referred to as an external pipe 41
  • the pipe 40 provided inside the work module 20 is referred to as an internal pipe 42.
  • the component mounting machine WM3 of the present embodiment allows the negative pressure to be supplied from the inside of the base 10 to the work module 20 by a pipe (a first internal pipe 42a and a third internal pipe 42a described later) for supplying the negative pressure. It is easy to shorten the pipe length of the pipe 42c), and it is easy to increase the flow passage cross-sectional area of the pipe (for example, the external pipe 41). As a result, the component mounter WM3 of the present embodiment can suppress a decrease in the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 during the production of the board product 900.
  • the work module 20 is provided on the base 10 so as to be drawn out.
  • the work module 20 shown by the broken line in FIG. 3 schematically shows that it can be pulled out from the base 10. It is difficult to pull out the work module 20 when there is no margin in the pipe length of the external pipe 41.
  • the pipe length of the external pipe 41 is made to have a margin, the pipe length of the external pipe 41 becomes long and the resistance in the pipe increases.
  • the supply amount of the negative pressure supplied to the supply target VS0 may be smaller than that at the time of producing the substrate product 900.
  • the component mounting machine WM3, which is the working machine WB further includes the internal negative pressure supply device 50, the pipe attaching/detaching portion 61, and the negative pressure changing device 70.
  • the internal negative pressure supply device 50 is provided inside the base 10 and supplies a negative pressure to the supply target VS0 via the internal pipe 42. Specifically, the negative pressure (hereinafter, referred to as “internal negative pressure”) supplied from the internal negative pressure supply device 50 is supplied to the inside of the work module 20 via the in-base pipe 51 provided inside the base 10. Supplied. The internal negative pressure supplied to the inside of the work module 20 is supplied to the supply target VS0 via the internal pipe 42 (corresponding to the second internal pipe 42b and the third internal pipe 42c described later).
  • the pipe attaching/detaching portion 61 is provided on the back surface 60 of the work module 20, and the external pipe 41 and the internal pipe 42 are detachably connected.
  • the back surface 60 is a portion on the base end side in the drawing direction (arrow Y direction) when the work module 20 is drawn out from the base 10.
  • the pipe attaching/detaching portion 61 may take various forms as long as it can detachably connect the external pipe 41 and the internal pipe 42, and the pipe attaching/detaching portion 61 is preferably an air coupler. Further, it is preferable that the air coupler is a one-touch type joint that is easily attached and detached as compared with a screw-in type, for example. Further, the air coupler preferably includes a check valve.
  • the check valve is preferably provided on the side connected to the external pipe 41 and at least the side connected to the external pipe 41 among the sides connected to the internal pipe 42.
  • the air coupler including the check valve can easily regulate the outflow of air when the external pipe 41 and the internal pipe 42 are separated.
  • the negative pressure changing device 70 of the present embodiment when the work module 20 is pulled out from the base 10 and the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61, the internal negative pressure is supplied from the external negative pressure supply. Switch to negative pressure supply.
  • the negative pressure changing device 70 may take various forms as long as it can switch the supply state of the negative pressure, and the negative pressure changing device 70 preferably includes the valve device 71.
  • the valve device 71 switches the selective supply to the supply target VS0, which is one of the external negative pressure and the internal negative pressure.
  • the valve device 71 shown in FIG. 3 is a pilot-type solenoid valve (solenoid valve) with three ports and two positions.
  • the first port 71a of the valve device 71 is connected to one end side of the first internal pipe 42a, and the other end side of the first internal pipe 42a is connected to the pipe attaching/detaching portion 61.
  • an external negative pressure can be supplied to the first internal pipe 42a.
  • the second port 71b of the valve device 71 is connected to one end side of the second internal pipe 42b, and the other end side of the second internal pipe 42b is connected to the in-base pipe 51. Thereby, the internal negative pressure can be supplied to the second internal pipe 42b.
  • the third port 71c of the valve device 71 is connected to one end side of the third internal pipe 42c, and the other end side of the third internal pipe 42c is connected to the supply target VS0.
  • the first port 71a and the third port 71c communicate with each other and the second port 71b is sealed.
  • the first internal pipe 42a and the third internal pipe 42c are communicated with each other, so that the external negative pressure can be supplied to the supply target VS0, and the supply of the internal negative pressure is regulated.
  • the valve device 71 when the solenoid coil is excited, the first port 71a is sealed and the second port 71b and the third port 71c are in communication. In this case, the second internal pipe 42b and the third internal pipe 42c are communicated with each other, the internal negative pressure can be supplied to the supply target VS0, and the supply of the external negative pressure is restricted. As described above, since the negative pressure changing device 70 of the present embodiment includes the valve device 71, one of the external negative pressure and the internal negative pressure is supplied depending on whether or not the solenoid coil is excited. It can be selectively supplied to VS0, and the switching control can be simplified.
  • the negative pressure changing device 70 is provided with, for example, a proximity sensor or the like on the upper surface of the base 10 facing the work module 20, and based on the detection result of the proximity sensor, whether or not the work module 20 is pulled out from the base 10. It is possible to recognize whether or not there is a connection between the external pipe 41 and the internal pipe 42.
  • the negative pressure changing device 70 stops the excitation of the solenoid coil of the valve device 71 while recognizing that the external pipe 41 and the internal pipe 42 are connected. Conversely, the negative pressure changing device 70 excites the solenoid coil of the valve device 71 while recognizing that the external pipe 41 and the internal pipe 42 are separated.
  • the negative pressure changing device 70 monitors whether or not a maintenance button (not shown) provided on the work module 20 is operated by an operator, for example. When the operator operates the maintenance button, the negative pressure changing device 70 recognizes that the work module 20 may be pulled out from the base 10 and the external pipe 41 and the internal pipe 42 may be separated at the pipe attaching/detaching portion 61. To do. At this time, the negative pressure changing device 70 drives the internal negative pressure supply device 50 to make it possible to supply the internal negative pressure, and permits the work module 20 to be pulled out.
  • a maintenance button not shown
  • the negative pressure changing device 70 supplies the external negative pressure when the work module 20 is pulled out with respect to the base 10 and there is a possibility that the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61. Can also be switched to the supply of internal negative pressure. Also in this case, the negative pressure changing device 70 can recognize the possibility that the external pipe 41 and the internal pipe 42 are separated, for example, depending on whether or not the operator operates the maintenance button. In the embodiment shown in FIG. 3, when the negative pressure changing device 70 recognizes the possibility that the outer pipe 41 and the inner pipe 42 are separated from each other, the negative pressure changing device 70 drives the inner negative pressure supply device 50 to bring the inner negative pressure into a state where it can be supplied. After that, the solenoid coil of the valve device 71 is excited. Then, the negative pressure changing device 70 can permit withdrawal of the work module 20 after switching from the supply of the external negative pressure to the supply of the internal negative pressure.
  • the negative pressure changing device 70 has both the external negative pressure and the internal negative pressure. It is also possible to switch from the supply of to the supply of the internal negative pressure. Further, the negative pressure changing device 70 is configured such that when the work module 20 is pulled out with respect to the base 10 and there is a possibility that the external pipe 41 and the internal pipe 42 are separated from each other at the pipe attaching/detaching portion 61, the external negative pressure and the internal pressure are changed. It is also possible to switch from both negative pressure supplies to internal negative pressure supplies. In these cases, the valve device 71 described above is unnecessary.
  • the negative pressure changing device 70 has a possibility that, when the work module 20 is pulled out from the base 10 and the external pipe 41 and the internal pipe 42 are separated from each other in the pipe attaching/detaching portion 61, they may be separated. At this time, at least the external negative pressure of the external negative pressure and the internal negative pressure is switched to the internal negative pressure supply. As a result, the component mounting machine WM3, which is the work machine WM for a board, can easily minimize the pipe length of the external pipe 41.
  • each of the plurality of work modules 20 includes an internal pipe 42, a pipe attaching/detaching part 61, and a negative pressure changing device 70 including a valve device 71.
  • FIG. 4 is a schematic diagram viewed from the back surface 60 side of the work module 20, and shows an arrangement example of the external pipe 41 and the in-base pipe 51.
  • the internal negative pressure supply device 50 is provided inside one base 10, and a branch pipe branched from a branch portion 51 a provided in the base internal pipe 51 is an internal pipe 42 ( It is suitable if each is connected to the second internal pipe 42b).
  • branch pipes branched from the external pipe 41 connected to one external negative pressure supply device 30 are connected to the pipe attaching/detaching portions 61 of the respective work modules 20. Further, in the case where the pipe attaching/detaching portion 61 does not have a check valve on the side connected to the external pipe 41, it is preferable that the branch pipe branched from the external pipe 41 has a check valve.
  • the external negative pressure supply device 30 and the internal negative pressure supply device 50 may take various forms as long as they can supply negative pressure.
  • the external negative pressure supply device 30 and the internal negative pressure supply device 50 for example, known vacuum pumps can be used.
  • the internal negative pressure supplied when the work module 20 is pulled out with respect to the base 10 and the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61, compared to when the substrate product 900 is produced.
  • the supply amount (for example, flow rate) per unit time may be small. Therefore, it is preferable that the internal negative pressure supply device 50 has a smaller supply amount of negative pressure per unit time than the external negative pressure supply device 30.
  • the component mounting machine WM3 which is the working machine WM for a board, secures a minimum negative pressure supply amount (for example, a flow rate) necessary for maintenance or the like, and the internal negative pressure supply device 50 has a large size. Can be suppressed. The same applies to the internal negative pressure supplied when there is a possibility that the external pipe 41 and the internal pipe 42 may be separated.
  • Second Embodiment The configuration example of the to-board work line WML and the configuration example of the component mounting machine WM3 described in the first embodiment can be similarly applied to this embodiment.
  • the component mounting machine WM3 of the present embodiment differs from the first embodiment in the negative pressure supply method.
  • FIG. 5 is a schematic view of the work module 20 provided on the base 10 as viewed from the transfer direction (arrow X direction) of the substrate 90.
  • the component mounting machine WM3 which is the working machine WM for a board, includes the external negative pressure supply device 30.
  • the external negative pressure supply device 30 is provided outside the base 10 and supplies a negative pressure to the supply target VS0 inside the work module 20 without going through the inside of the base 10.
  • the external negative pressure which is the negative pressure supplied from the external negative pressure supply device 30, is directly supplied to the supply object VS0 via the pipe 40.
  • a known air hose can be used, and for the external negative pressure supply device 30, for example, a known vacuum pump can be used.
  • the component mounting machine WM3 of the present embodiment can obtain the same effects as the effects already described in the first embodiment.
  • the work module 20 is provided on the base 10 so as to be drawn out. Therefore, it is conceivable to expand and contract the pipe 40 in accordance with the pulling out of the work module 20.
  • the pipe 40 for example, a spiral hose formed in a spiral shape can be used.
  • the spiral hose is unlikely to increase the flow passage cross-sectional area of the pipe 40. Therefore, as shown in FIG. 5, it is preferable that the component mounting machine WM3, which is the working machine WM for a board, further includes a support member 80 installed in the middle of the external pipe 41.
  • the support member 80 allows the first external pipe 41a, which is a portion of the external pipe 41 on the work module 20 side, to rotate about a horizontal axis 81 that is orthogonal to the drawing direction (arrow Y direction) of the base 10. To support. As a result, the component mounting machine WM3 can continue to supply the external negative pressure to the supply object VS0 when the work module 20 is pulled out from the base 10.
  • the horizontal axis 81 shown in FIG. 5 is an axis extending along a direction perpendicular to the paper surface.
  • the supporting member 80 may take various forms as long as it can rotatably support the first external pipe 41a around the horizontal shaft 81, and the supporting member 80 is preferably a rotary joint.
  • the rotary joint is easier to rotatably support the first external pipe 41a than, for example, a pulley device.
  • the swivel joint is included in the rotary joint, and the above description regarding the rotary joint can be similarly applied to the swivel joint.
  • the component mounting machine WM3 which is the work machine WM for a board, further includes a pipe fixing portion 62.
  • the pipe fixing portion 62 is provided on the back surface 60 of the work module 20, and fixes the internal pipe 42 and the external pipe 41.
  • a known joint can be used for the pipe fixing portion 62.
  • FIG. 6 shows an external pipe 41 (first external pipe) when one of the plurality of (two) work modules 20 (work module 20 on the front side of the drawing) is pulled out from the base 10. 41a) shows an example of the state.
  • This figure is a side view of the substrate 90 as viewed in the transport direction (arrow X direction).
  • the work module 20 is pulled out from the base 10 by the maximum work amount WA0 during maintenance of the work module 20.
  • the pipe length L11, the height H11, and the height H12 are set such that when the withdrawal amount of the work module 20 from the base 10 is the maximum withdrawal amount WA0 of the work module 20 during maintenance, the first external pipe 41a. Is preferably set so as to be separated from the upper surface of the base 10 by a predetermined height H13.
  • the pipe length L11 is the pipe length of the first external pipe 41a, and refers to the length of the air circulation path in the first external pipe 41a.
  • the height H11 is the height of the support member 80 from the upper surface of the base 10, and the height H12 is the height of the pipe fixing portion 62 from the upper surface of the base 10.
  • the predetermined height H13 may be set so that the first external pipe 41a is arranged in an arc shape (not in a straight line shape) when the withdrawal amount of the work module 20 from the base 10 is the maximum withdrawal amount WA0.
  • the component mounting machine WM3 can suppress the occurrence of excessive tension in the first external pipe 41a when the work module 20 is pulled out.
  • the component mounting machine WM3 causes the first external pipe 41a to be wound when the work module 20 moves with respect to the base 10. Can be suppressed.
  • each of the plurality of work modules 20 includes an internal pipe 42, a pipe fixing portion 62, and a support member 80.
  • FIG. 7 is a schematic view of the work module 20 as viewed from the back surface 60 side, and shows an example of the arrangement of the external pipe 41. As shown in the figure, when the branch pipes branched from the external pipe 41 connected to one external negative pressure supply device 30 are respectively connected to the pipe fixing portion 62 via the support member 80 of each work module 20. It is suitable.
  • the flow passage cross-sectional area CS1 of the external pipe 41 is preferably set to be larger than the flow passage cross-sectional area CS2 of the internal pipe 42.
  • the component mounting machine WM3 which is the working machine WM for a board, can reduce the resistance in the external pipe 41 and suppress the decrease in the supply amount of the negative pressure supplied to the supply target VS0.
  • the external pipe 41 a plurality of pipes can be used as the external pipe 41.
  • the flow passage cross-sectional area CS1 of the external pipe 41 corresponds to the sum of the flow passage cross-sectional areas of the plurality of pipes.
  • negative pressure refers to negative pressure air.
  • the supply target VS0 may be provided in the work module 20 and supplied with negative pressure, and may take various forms.
  • the mounting head 23b described above is included in the supply target VS0.
  • the supply target VS0 is preferably a substrate holding device that sucks and holds the back surface of the positioned substrate 90.
  • the substrate holding device is provided in, for example, the substrate transfer device 21 shown in FIG. 2, and includes a planar backup plate having a plurality of suction ports on the upper surface. The substrate holding device supplies a negative pressure while the substrate 90 is arranged on the upper surface of the backup plate, and sucks and holds the back surface of the substrate 90 on the backup plate.
  • the work module 20 may be pulled out for maintenance.
  • the production of the board product 900 is temporarily stopped, it is necessary to maintain the holding state of the board 90. In such cases, it is useful to apply the matters described in this specification.
  • the board working machine WM is not limited to the component mounting machine WM3.
  • the substrate working machine WM may be the printing machine WM1, the printing inspection machine WM2, the reflow oven WM4, the appearance inspection machine WM5, and the like, as described above. Further, the above-mentioned substrate holding device can be used for the substrate transfer device provided therein.
  • the external negative pressure supply device 30 provided outside the base 10 is provided. Further, the external negative pressure supply device 30 supplies a negative pressure to the supply target VS0 inside the work module 20 without passing through the inside of the base 10. As a result, the to-board working machine WM can easily shorten the pipe length of the pipe that supplies the negative pressure, as compared with the case where the negative pressure is supplied to the work module 20 from the inside of the base 10. It is easy to increase the road cross-sectional area. As a result, the to-board working machine WM can suppress a decrease in the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 during the production of the board product 900.
  • 10 base
  • 20 work module
  • 30 external negative pressure supply device
  • 40 piping
  • 41 external piping
  • 41a first external piping
  • 42 internal piping
  • 50 Internal negative pressure supply device
  • 60 back surface
  • 61 pipe attaching/detaching portion
  • 62 pipe fixing portion
  • 70 Negative pressure changing device
  • 71 Valve device
  • 80 support member
  • 81 horizontal axis
  • 90 substrate
  • CS1, CS2 flow path cross-sectional area
  • L11 pipe length
  • H11, H12 height
  • H13 predetermined height
  • WA0 maximum withdrawal amount
  • VS0 supply target
  • WM work machine for board
  • Arrow Y direction Drawout direction.

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Abstract

This substrate working machine is provided with a base, a work module drawably provided on the base, and an external negative pressure supplying device. The external negative pressure supplying device is provided outside the base and supplies a negative pressure to a supply destination object inside the work module without passing through the inside of the base.

Description

対基板作業機Board-to-board working machine

 本明細書は、対基板作業機に関する技術を開示する。 The present specification discloses a technique related to a work machine for a board.

 特許文献1に記載の基板固定機構は、真空ポンプとバックアップピンとを備えている。バックアップピンは、実装位置に配置される基板の下方に配置され、真空ポンプの吸引力によって基板の下面を吸着保持する。また、特許文献2に記載の対基板作業システムは、システムベースと対基板作業装置とを備えている。対基板作業装置は、基板搬送方向に沿って整列する状態でシステムベース上に配置され、回路基板に対して所定の対回路基板作業を行う。さらに、特許文献2に記載の負圧供給路は、対基板作業システムの背面側において、ワンタッチで接続または分離が可能な継手を介して接続される。 The substrate fixing mechanism described in Patent Document 1 includes a vacuum pump and a backup pin. The backup pin is arranged below the substrate arranged at the mounting position and sucks and holds the lower surface of the substrate by the suction force of the vacuum pump. Further, the board-to-board working system described in Patent Document 2 includes a system base and a board-to-board working device. The board working device is arranged on the system base in a state of being aligned along the board transport direction, and performs a predetermined work for the circuit board on the circuit board. Further, the negative pressure supply passage described in Patent Document 2 is connected via a joint that can be connected or disconnected with one touch on the back side of the work system for a board.

特開平8-18293号公報JP-A-8-18293 特開2004-104075号公報Japanese Patent Laid-Open No. 2004-104075

 しかしながら、特許文献1は、ベースと、ベースの上に引き出し可能に設けられる作業モジュールとを備える対基板作業機を開示するものではない。また、特許文献2は、負圧供給路の具体的な構成を開示するものではない。ベースと、ベースの上に引き出し可能に設けられる作業モジュールとを備える対基板作業機において、負圧をベースの内部から作業モジュールに供給する場合、作業モジュールをベースに対して引き出し可能とするために、負圧を供給する配管の配管長が長くなり易い。また、ベースに収容される収容物のために、配管の流路断面積を増加させ難い。これらの結果、配管における抵抗が増大して、作業モジュールの内部の供給対象物に供給される負圧の供給量が低下する可能性がある。 However, Patent Document 1 does not disclose a board-to-board working machine including a base and a work module that is provided on the base so as to be drawn out. Further, Patent Document 2 does not disclose a specific configuration of the negative pressure supply passage. In a work machine for a board including a base and a work module which is provided on the base so as to be drawn out, when a negative pressure is supplied to the work module from the inside of the base, the work module can be drawn out from the base. The length of the pipe for supplying the negative pressure tends to be long. In addition, it is difficult to increase the flow passage cross-sectional area of the pipe due to the contents stored in the base. As a result, the resistance in the piping may increase, and the amount of negative pressure supplied to the object to be supplied inside the work module may decrease.

 このような事情に鑑みて、本明細書は、ベースの上に引き出し可能に設けられる作業モジュールの内部の供給対象物に供給される負圧の供給量の基板製品の生産時における低下を抑制可能な対基板作業機を開示する。 In view of such circumstances, the present specification can suppress the decrease in the supply amount of the negative pressure supplied to the supply target inside the work module that can be drawn out on the base during the production of the substrate product. Disclosed is a board-to-board working machine.

 本明細書は、ベースと、前記ベースの上に引き出し可能に設けられる作業モジュールと、外部負圧供給装置とを備える対基板作業機を開示する。前記外部負圧供給装置は、前記ベースの外部に設けられ、かつ、前記ベースの内部を介さずに前記作業モジュールの内部の供給対象物に負圧を供給する。 The present specification discloses a board-to-board working machine that includes a base, a work module that is provided on the base so as to be pulled out, and an external negative pressure supply device. The external negative pressure supply device is provided outside the base, and supplies a negative pressure to an object to be supplied inside the work module without going through the inside of the base.

 上記の対基板作業機によれば、ベースの外部に設けられる外部負圧供給装置を備える。また、外部負圧供給装置は、ベースの内部を介さずに作業モジュールの内部の供給対象物に負圧を供給する。これらにより、上記の対基板作業機は、負圧をベースの内部から作業モジュールに供給する場合と比べて、負圧を供給する配管の配管長を短縮することが容易であり、配管の流路断面積を増加させることが容易である。その結果、上記の対基板作業機は、作業モジュールの内部の供給対象物に供給される負圧の供給量の基板製品の生産時における低下を抑制することができる。 According to the above-mentioned work machine for a board, an external negative pressure supply device provided outside the base is provided. Further, the external negative pressure supply device supplies a negative pressure to the supply target inside the work module without passing through the inside of the base. Due to these, in the above-described work machine for a board, it is easier to shorten the pipe length of the pipe for supplying the negative pressure, as compared with the case where the negative pressure is supplied to the work module from the inside of the base. It is easy to increase the cross-sectional area. As a result, the above-described work machine for substrates can suppress a decrease in the supply amount of the negative pressure supplied to the supply target inside the work module during the production of the board product.

対基板作業ラインWMLの構成例を示す構成図である。It is a block diagram which shows the structural example of the to-substrate work line WML. 部品装着機WM3の構成例を示す斜視図である。It is a perspective view which shows the structural example of the component mounting machine WM3. 第一実施形態の負圧供給方法の一例を示す模式図である。It is a schematic diagram which shows an example of the negative pressure supply method of 1st embodiment. 外部配管41およびベース内配管51の配策例を示す模式図である。It is a schematic diagram which shows the example of arrangement of the external piping 41 and the piping 51 in a base. 第二実施形態の負圧供給方法の一例を示す模式図である。It is a schematic diagram which shows an example of the negative pressure supply method of 2nd embodiment. 作業モジュール20のベース10に対する引き出し量が作業モジュール20のメンテナンス時の最大引き出し量WA0のときの外部配管41の状態の一例を示す側面図である。FIG. 6 is a side view showing an example of a state of the external pipe 41 when the work module 20 is pulled out from the base 10 at the maximum work amount WA0 during maintenance of the work module 20. 外部配管41の配策例を示す模式図である。It is a schematic diagram which shows the example of arrangement of the external piping 41.

 1.第一実施形態
 1-1.対基板作業ラインWMLの構成例
 対基板作業ラインWMLでは、基板90に所定の対基板作業を行う。対基板作業ラインWMLを構成する対基板作業機WMの種類および数は、限定されない。図1に示すように、本実施形態の対基板作業ラインWMLは、印刷機WM1、印刷検査機WM2、部品装着機WM3、リフロー炉WM4および外観検査機WM5の複数(5つ)の対基板作業機WMを備えている。複数(5つ)の対基板作業機WMは、上流側から、印刷機WM1、印刷検査機WM2、部品装着機WM3、リフロー炉WM4、外観検査機WM5の順に配置されている。基板90は、対基板作業ラインWMLの先頭に位置する印刷機WM1に搬入される。そして、基板90は、対基板作業ラインWMLの基板搬送装置(図示略)によって下流側へ搬送され、対基板作業ラインWMLの末尾に位置する外観検査機WM5から搬出される。
1. First embodiment 1-1. Example of Configuration of Work Line for Substrate WML In the work line for Substrate WML, a predetermined work for the substrate is performed on the substrate 90. There is no limitation on the type and number of the work machine WM for forming the work line for substrate WML. As shown in FIG. 1, a work line WML for a board of the present embodiment is a plurality (five) work for a board of a printing machine WM1, a printing inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5. Equipped with machine WM. A plurality of (five) work machines WM for a substrate are arranged in this order from the upstream side, a printing machine WM1, a printing inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5. The board 90 is carried into the printing machine WM1 located at the head of the board-to-board work line WML. Then, the substrate 90 is transported to the downstream side by a substrate transport device (not shown) on the work line for working with the substrate WML, and is unloaded from the visual inspection machine WM5 located at the end of the work line for working with the substrate WML.

 印刷機WM1は、基板90において、複数の部品の各々の装着位置に、はんだを印刷する。基板90に印刷されるはんだは、ペースト状であり、所定の粘性を備える。はんだは、基板90と、基板90に装着される複数の部品とを接合する接合材として機能する。印刷検査機WM2は、印刷機WM1によって印刷されたはんだの印刷状態を検査する。部品装着機WM3は、印刷機WM1によって印刷されたはんだの上に複数の部品を装着する。部品装着機WM3は、一つであっても良く、複数であっても良い。部品装着機WM3が複数設けられる場合は、複数の部品装着機WM3が分担して、複数の部品を装着することができる。 The printing machine WM1 prints solder on the mounting positions of the plurality of components on the board 90. The solder printed on the substrate 90 is in a paste form and has a predetermined viscosity. The solder functions as a joining material that joins the board 90 and a plurality of components mounted on the board 90. The printing inspection machine WM2 inspects the printing state of the solder printed by the printing machine WM1. The component mounting machine WM3 mounts a plurality of components on the solder printed by the printing machine WM1. The number of component mounting machines WM3 may be one or more. When a plurality of component mounting machines WM3 are provided, the plurality of component mounting machines WM3 can share and mount a plurality of components.

 リフロー炉WM4は、部品装着機WM3によって複数の部品が装着された基板90を加熱し、はんだを溶融させて、はんだ付けを行う。外観検査機WM5は、部品装着機WM3によって装着された複数の部品の装着状態などを検査する。具体的には、外観検査機WM5は、基板90に装着された複数の部品の各々の適否、複数の部品の各々の装着状態(X軸座標、Y軸座標および装着角度)などを認識し、管理装置WMCに送出する。このように、対基板作業ラインWMLは、複数(5つ)の対基板作業機WMを用いて、基板90を順に搬送し、検査処理を含む生産処理を実行して基板製品900を生産することができる。 The reflow furnace WM4 heats the board 90 on which a plurality of components are mounted by the component mounting machine WM3, melts the solder, and performs soldering. The appearance inspection machine WM5 inspects the mounting state of the plurality of components mounted by the component mounting machine WM3. Specifically, the appearance inspection machine WM5 recognizes the suitability of each of the plurality of components mounted on the board 90, the mounting state (X-axis coordinate, Y-axis coordinate, and mounting angle) of each of the plurality of components, It is sent to the management device WMC. In this way, the to-board work line WML uses a plurality of (five) to-to-board work machines WM to sequentially transfer the substrates 90 and execute the production process including the inspection process to produce the board product 900. You can

 なお、対基板作業ラインWMLは、例えば、対基板作業機WMである機能検査機を備えることができる。機能検査機は、リフロー炉WM4によって、はんだ付けされた基板90の機能検査を行う。また、対基板作業ラインWMLは、例えば、生産する基板製品900の種類などに応じて、対基板作業ラインWMLの構成を適宜追加することができ、構成を適宜変更することができる。対基板作業ラインWMLは、例えば、バッファ装置、基板供給装置、基板反転装置、シールド装着装置、接着剤塗布装置、紫外線照射装置などの対基板作業機WMを備えることもできる。 Note that the work-to-board work line WML can be provided with, for example, a function inspection machine that is the work-to-board machine WM. The function inspection machine performs a function inspection of the soldered substrate 90 by the reflow furnace WM4. Further, the work-to-board work line WML can appropriately add the configuration of the work-to-board work line WML, and can appropriately change the configuration, for example, according to the type of the board product 900 to be produced. The work line for substrate WML can also be provided with a work device for substrate WM such as a buffer device, a substrate supply device, a substrate reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device.

 対基板作業ラインWMLを構成する複数(5つ)の対基板作業機WMおよび管理装置WMCは、通信部LCによって電気的に接続されている。通信部LCは、有線であっても良く、無線であっても良い。また、通信方法は、種々の方法をとり得る。本実施形態では、複数(5つ)の対基板作業機WMおよび管理装置WMCによって、構内情報通信網(LAN:Local Area Network)が構成されている。これにより、複数(5つ)の対基板作業機WMは、通信部LCを介して、互いに通信することができる。また、複数(5つ)の対基板作業機WMは、通信部LCを介して、管理装置WMCと通信することができる。 A plurality of (five) anti-board working machines WM and a management device WMC forming the anti-board working line WML are electrically connected by a communication unit LC. The communication unit LC may be wired or wireless. Also, various communication methods can be used. In the present embodiment, a plurality of (five) anti-board working machines WM and a management device WMC constitute a local information communication network (LAN: Local Area Network). Accordingly, the plurality (five) of the board-working machines WM can communicate with each other via the communication unit LC. Further, a plurality (five) of the board-working machines WM can communicate with the management device WMC via the communication unit LC.

 管理装置WMCは、対基板作業ラインWMLを構成する複数(5つ)の対基板作業機WMの制御を行い、対基板作業ラインWMLの動作状況を監視する。管理装置WMCには、複数(5つ)の対基板作業機WMを制御する種々の制御データが記憶されている。管理装置WMCは、複数(5つ)の対基板作業機WMの各々に制御データを送信する。また、複数(5つ)の対基板作業機WMの各々は、管理装置WMCに動作状況および生産状況を送信する。 The management device WMC controls a plurality of (five) to-board work machines WM that form the to-board work line WML, and monitors the operating status of the to-board work line WML. The management device WMC stores various control data for controlling a plurality of (five) work machines WM for a board. The management device WMC transmits the control data to each of the plurality (five) of the board working machines WM. Further, each of the plurality (five) of the board working machines WM transmits the operation status and the production status to the management device WMC.

 管理装置WMCには、例えば、画像保存サーバ、生産情報サーバなどの種々のデータサーバを設けることができる(いずれも図示略)。画像保存サーバは、対基板作業機WMによって撮像された種々の画像データを保存することができる。生産情報サーバは、基板90の生産に関する種々の生産情報を保存することができる。例えば、生産情報に含まれる部品データは、部品の種類毎の形状に関する情報、電気的特性に関する情報、部品の取り扱い方法に関する情報などを含んでいる。また、印刷検査機WM2、外観検査機WM5などの検査機による検査結果は、生産情報に含まれる。 The management device WMC can be provided with various data servers such as an image storage server and a production information server (all not shown). The image storage server can store various image data captured by the work machine WM. The production information server can store various production information regarding the production of the board 90. For example, the component data included in the production information includes information about the shape of each type of component, information about electrical characteristics, information about how to handle the component, and the like. In addition, the inspection result by the inspection machine such as the print inspection machine WM2 and the appearance inspection machine WM5 is included in the production information.

 1-2.部品装着機WM3の構成例
 部品装着機WM3は、基板90に複数の部品を装着する。図2に示すように、部品装着機WM3は、ベース10と、ベース10の上に引き出し可能に設けられる少なくとも一つ(同図では、2つ)の作業モジュール20とを備えている。ベース10の上面には、作業モジュール20の引き出し方向(矢印Y方向)に沿ってガイドレール(図示略)が設けられており、作業モジュール20の下部には、ベース10のガイドレールに沿って転動可能な車輪(図示略)が設けられている。これらにより、作業者によって作業モジュール20が引き出されたときに、作業モジュール20は、ベース10に対して、引き出し方向(矢印Y方向)に引き出される。
1-2. Configuration Example of Component Mounting Machine WM3 The component mounting machine WM3 mounts a plurality of components on the board 90. As shown in FIG. 2, the component mounting machine WM3 includes a base 10 and at least one (two in the figure) work module 20 provided on the base 10 so as to be drawn out. A guide rail (not shown) is provided on the upper surface of the base 10 along the pull-out direction of the work module 20 (arrow Y direction), and the lower portion of the work module 20 is rolled along the guide rail of the base 10. Movable wheels (not shown) are provided. With these, when the worker pulls out the work module 20, the work module 20 is pulled out in the pull-out direction (arrow Y direction) with respect to the base 10.

 複数(2つ)の作業モジュール20の各々は、基板搬送装置21、部品供給装置22、部品移載装置23、部品カメラ24および制御装置25を備えており、これらは基台26に組み付けられている。基板搬送装置21は、例えば、ベルトコンベアなどにより構成され、基板90を搬送方向(矢印X方向)に搬送する。基板90は、回路基板であり、電子回路および電気回路のうちの少なくとも一方が形成される。基板搬送装置21は、部品装着機WM3の機内に基板90を搬入すると共に、機内の所定位置に基板90を位置決めする。基板搬送装置21は、部品装着機WM3による複数の部品の装着処理が終了した後に、基板90を部品装着機WM3の機外に搬出する。 Each of the plurality (two) of work modules 20 includes a board transfer device 21, a component supply device 22, a component transfer device 23, a component camera 24, and a control device 25, which are mounted on a base 26. There is. The substrate transfer device 21 is configured by, for example, a belt conveyor, and transfers the substrate 90 in the transfer direction (arrow X direction). The board 90 is a circuit board on which at least one of an electronic circuit and an electric circuit is formed. The board transfer device 21 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position in the machine. The board transfer device 21 carries the board 90 out of the component mounter WM3 after the component mounter WM3 finishes mounting the plurality of components.

 部品供給装置22は、基板90に装着される複数の部品を供給する。部品供給装置22は、基板90の搬送方向(矢印X方向)に沿って設けられる複数のフィーダ22aを備えている。複数のフィーダ22aの各々は、複数の部品が収納されるキャリアテープ(図示略)をピッチ送りさせて、フィーダ22aの先端側に位置する供給位置22bにおいて部品を採取可能に供給する。また、部品供給装置22は、チップ部品などと比べて比較的大型の電子部品(例えば、リード部品など)を、トレイ上に配置した状態で供給することもできる。 The component supply device 22 supplies a plurality of components mounted on the board 90. The component supply device 22 includes a plurality of feeders 22a provided along the conveyance direction of the substrate 90 (direction of arrow X). Each of the plurality of feeders 22a feeds a carrier tape (not shown) accommodating a plurality of components at a pitch so that the components can be collected at a supply position 22b located on the tip end side of the feeder 22a. In addition, the component supply device 22 can also supply a relatively large electronic component (for example, a lead component) compared to a chip component or the like in a state of being arranged on the tray.

 部品移載装置23は、ヘッド駆動装置23aを備えている。ヘッド駆動装置23aは、直動機構を備えており、基板90の搬送方向(矢印X方向)および作業モジュール20の引き出し方向(矢印Y方向)に移動台を移動させることができる。移動台には、クランプ部材(図示略)によって装着ヘッド23bが着脱可能(交換可能)に設けられている。装着ヘッド23bは、少なくとも一つの保持部材を用いて、部品供給装置22によって供給された部品を採取し保持して、基板搬送装置21によって位置決めされた基板90に部品を装着する。保持部材は、例えば、吸着ノズル、チャックなどを用いることができる。 The component transfer device 23 includes a head drive device 23a. The head drive device 23a includes a linear movement mechanism, and can move the movable table in the conveyance direction of the substrate 90 (direction of arrow X) and the drawing direction of the work module 20 (direction of arrow Y). A mounting head 23b is detachably (replaceable) provided on the movable table by a clamp member (not shown). The mounting head 23b uses at least one holding member to collect and hold the component supplied by the component supply device 22, and mounts the component on the substrate 90 positioned by the substrate transport device 21. As the holding member, for example, a suction nozzle or a chuck can be used.

 部品カメラ24は、例えば、撮像素子を有するデジタル式の撮像装置を用いることができる。撮像素子は、例えば、電荷結合素子(CCD:Charge Coupled Device)または相補型金属酸化膜半導体(CMOS:Complementary Metal Oxide Semiconductor)などのイメージセンサを用いることができる。部品カメラ24は、制御装置25から送出される制御信号に基づいて撮像を行う。部品カメラ24によって撮像された画像データは、制御装置25に送信される。 As the component camera 24, for example, a digital image pickup device having an image pickup element can be used. As the image sensor, for example, an image sensor such as a charge coupled device (CCD: Charge Coupled Device) or a complementary metal oxide semiconductor (CMOS: Complementary Metal Oxide Semiconductor) can be used. The component camera 24 takes an image based on a control signal sent from the control device 25. The image data captured by the component camera 24 is transmitted to the control device 25.

 部品カメラ24は、光軸がZ軸方向の上向き(鉛直上方方向)になるように、部品装着機WM3の基台26に固定されている。部品カメラ24は、保持部材によって保持されている部品を下方から撮像することができる。なお、作業モジュール20は、基板カメラを備えることもできる。基板カメラは、部品カメラ24と同様の撮像装置を用いることができる。但し、基板カメラは、光軸がZ軸方向の下向き(鉛直下方方向)になるように、部品移載装置23の移動台に設けられる。基板カメラは、基板90を上方から撮像することができる。 The component camera 24 is fixed to the base 26 of the component mounting machine WM3 so that the optical axis is upward in the Z-axis direction (vertical upward direction). The component camera 24 can image the component held by the holding member from below. The work module 20 can also include a board camera. As the board camera, an imaging device similar to that of the component camera 24 can be used. However, the board camera is provided on the moving base of the component transfer device 23 so that the optical axis is downward in the Z-axis direction (downward in the vertical direction). The board camera can take an image of the board 90 from above.

 制御装置25は、公知の中央演算装置および記憶装置を備えており、制御回路が構成されている(いずれも図示略)。中央演算装置(CPU:Central Processing Unit)は、種々の演算処理を行うことができる。記憶装置は、第一記憶装置および第二記憶装置を備えている。第一記憶装置は、揮発性の記憶装置(RAM:Random Access Memory)であり、第二記憶装置は、不揮発性の記憶装置(ROM:Read Only Memory)である。制御装置25には、部品装着機WM3に設けられている各種センサから出力される情報、画像データなどが入力される。制御装置25は、制御プログラムおよび予め設定されている所定の装着条件などに基づいて、各装置に対して制御信号を送出する。 The control device 25 includes a well-known central processing unit and a storage device, and a control circuit is configured (all are not shown). A central processing unit (CPU: Central Processing Unit) can perform various arithmetic processing. The storage device includes a first storage device and a second storage device. The first storage device is a volatile storage device (RAM: Random Access Memory), and the second storage device is a non-volatile storage device (ROM: Read Only Memory). Information and image data output from various sensors provided in the component mounting machine WM3 are input to the control device 25. The control device 25 sends a control signal to each device based on a control program and a predetermined mounting condition set in advance.

 例えば、制御装置25は、部品供給装置22によって供給された部品を保持部材に採取させ保持させて、保持部材に保持されている部品を部品カメラ24に撮像させる。制御装置25は、部品カメラ24によって撮像された画像を画像処理して、部品の保持姿勢を認識する。制御装置25は、例えば、部品の外観で特徴的な部位などを画像処理によって把握して、部品の保持姿勢を認識することができる。 For example, the control device 25 causes the holding member to collect and hold the component supplied by the component supply device 22, and causes the component camera 24 to image the component held by the holding member. The control device 25 performs image processing on the image captured by the component camera 24 to recognize the holding posture of the component. The control device 25 can recognize the holding posture of the component by grasping, for example, a characteristic portion of the appearance of the component by image processing.

 制御装置25は、制御プログラムなどによって予め設定される装着予定位置の上方に向かって、保持部材を移動させる。また、制御装置25は、基板90の位置決め状態、部品の保持姿勢などに基づいて、装着予定位置を補正して、実際に部品を装着する装着位置を設定する。装着予定位置および装着位置は、位置(X軸座標およびY軸座標)の他に回転角度を含む。制御装置25は、装着位置に合わせて、保持部材の目標位置(X軸座標およびY軸座標)および回転角度を補正する。制御装置25は、補正された目標位置において補正された回転角度で保持部材を下降させて、基板90に部品を装着する。制御装置25は、上記のピックアンドプレースサイクルを繰り返すことによって、基板90に複数の部品を装着する装着処理を実行する。 The control device 25 moves the holding member toward the upper side of the expected mounting position preset by the control program or the like. Further, the control device 25 corrects the planned mounting position based on the positioning state of the board 90, the holding posture of the component, and the like, and sets the mounting position where the component is actually mounted. The planned mounting position and the mounting position include a rotation angle in addition to the position (X-axis coordinate and Y-axis coordinate). The controller 25 corrects the target position (X-axis coordinate and Y-axis coordinate) and the rotation angle of the holding member according to the mounting position. The controller 25 lowers the holding member at the corrected target position at the corrected rotation angle, and mounts the component on the board 90. The controller 25 executes the mounting process for mounting a plurality of components on the board 90 by repeating the above-mentioned pick and place cycle.

 1-3.負圧供給方法
 図3は、ベース10の上に設けられる作業モジュール20を、基板90の搬送方向(矢印X方向)から視た模式図である。破線の曲線に示すように、負圧をベース10の内部から作業モジュール20に供給する場合、作業モジュール20をベース10に対して引き出し可能とするために、負圧を供給する配管(後述する第二内部配管42bおよびベース内配管51に相当)の配管長が長くなり易い。また、ベース10に収容される収容物(例えば、作業モジュール20の駆動電源など)のために、配管(ベース内配管51に相当)の流路断面積を増加させ難い。これらの結果、配管における抵抗が増大して、作業モジュール20の内部の供給対象物VS0に供給される負圧の供給量が、基板製品900の生産時に低下する可能性がある。
1-3. Negative Pressure Supply Method FIG. 3 is a schematic view of the work module 20 provided on the base 10 as viewed from the transfer direction (arrow X direction) of the substrate 90. As shown by the broken line curve, when a negative pressure is supplied to the work module 20 from the inside of the base 10, a pipe for supplying the negative pressure (the first described later The pipe length of the second internal pipe 42b and the base internal pipe 51) tends to be long. Further, it is difficult to increase the flow passage cross-sectional area of the pipe (corresponding to the pipe 51 in the base) due to the contents (for example, the driving power source of the work module 20) housed in the base 10. As a result, the resistance in the pipe may increase, and the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 may decrease during the production of the board product 900.

 そこで、本実施形態では、対基板作業機WMである部品装着機WM3は、外部負圧供給装置30を備えている。外部負圧供給装置30は、ベース10の外部に設けられており、ベース10の内部を介さずに作業モジュール20の内部の供給対象物VS0に負圧を供給する。具体的には、図3に示す外部負圧供給装置30から供給される負圧(以下、「外部負圧」という。)は、配管40を介して、供給対象物VS0に直接供給される。配管40は、例えば、公知のエアホースを用いることができる。なお、本明細書では、説明の便宜上、作業モジュール20の外部に設けられる配管40を外部配管41といい、作業モジュール20の内部に設けられる配管40を内部配管42という。 Therefore, in the present embodiment, the component mounting machine WM3, which is the working machine WM for a board, includes the external negative pressure supply device 30. The external negative pressure supply device 30 is provided outside the base 10 and supplies a negative pressure to the supply target VS0 inside the work module 20 without going through the inside of the base 10. Specifically, the negative pressure (hereinafter referred to as “external negative pressure”) supplied from the external negative pressure supply device 30 shown in FIG. 3 is directly supplied to the supply target VS0 via the pipe 40. As the pipe 40, for example, a known air hose can be used. In this specification, for convenience of description, the pipe 40 provided outside the work module 20 is referred to as an external pipe 41, and the pipe 40 provided inside the work module 20 is referred to as an internal pipe 42.

 これらにより、本実施形態の部品装着機WM3は、負圧をベース10の内部から作業モジュール20に供給する場合と比べて、負圧を供給する配管(後述する第一内部配管42aおよび第三内部配管42cに相当)の配管長を短縮することが容易であり、配管(例えば、外部配管41)の流路断面積を増加させることが容易である。その結果、本実施形態の部品装着機WM3は、作業モジュール20の内部の供給対象物VS0に供給される負圧の供給量の基板製品900の生産時における低下を抑制することができる。 As a result, the component mounting machine WM3 of the present embodiment allows the negative pressure to be supplied from the inside of the base 10 to the work module 20 by a pipe (a first internal pipe 42a and a third internal pipe 42a described later) for supplying the negative pressure. It is easy to shorten the pipe length of the pipe 42c), and it is easy to increase the flow passage cross-sectional area of the pipe (for example, the external pipe 41). As a result, the component mounter WM3 of the present embodiment can suppress a decrease in the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 during the production of the board product 900.

 また、既述したように、作業モジュール20は、ベース10の上に引き出し可能に設けられる。図3の破線で示す作業モジュール20は、ベース10に対して引き出し可能であることを模式的に示している。外部配管41の配管長に余裕がない場合、作業モジュール20を引き出すことが困難である。逆に、外部配管41の配管長に余裕をもたせると、外部配管41の配管長が長くなり、配管における抵抗が増大する。また、作業モジュール20がベース10に対して引き出されるとき(例えば、メンテナンス時など)は、基板製品900の生産時と比べて、供給対象物VS0に供給する負圧の供給量は、少なく済む場合が多い。そこで、対基板作業機WMである部品装着機WM3は、内部負圧供給装置50と、配管着脱部61と、負圧変更装置70とをさらに備えると好適である。 Also, as described above, the work module 20 is provided on the base 10 so as to be drawn out. The work module 20 shown by the broken line in FIG. 3 schematically shows that it can be pulled out from the base 10. It is difficult to pull out the work module 20 when there is no margin in the pipe length of the external pipe 41. On the other hand, if the pipe length of the external pipe 41 is made to have a margin, the pipe length of the external pipe 41 becomes long and the resistance in the pipe increases. Further, when the work module 20 is pulled out from the base 10 (for example, at the time of maintenance), the supply amount of the negative pressure supplied to the supply target VS0 may be smaller than that at the time of producing the substrate product 900. There are many. Therefore, it is preferable that the component mounting machine WM3, which is the working machine WB, further includes the internal negative pressure supply device 50, the pipe attaching/detaching portion 61, and the negative pressure changing device 70.

 内部負圧供給装置50は、ベース10の内部に設けられており、内部配管42を介して供給対象物VS0に負圧を供給する。具体的には、内部負圧供給装置50から供給される負圧(以下、「内部負圧」という。)は、ベース10の内部に設けられるベース内配管51を介して作業モジュール20の内部に供給される。作業モジュール20の内部に供給された内部負圧は、内部配管42(後述する第二内部配管42bおよび第三内部配管42cに相当)を介して、供給対象物VS0に供給される。 The internal negative pressure supply device 50 is provided inside the base 10 and supplies a negative pressure to the supply target VS0 via the internal pipe 42. Specifically, the negative pressure (hereinafter, referred to as “internal negative pressure”) supplied from the internal negative pressure supply device 50 is supplied to the inside of the work module 20 via the in-base pipe 51 provided inside the base 10. Supplied. The internal negative pressure supplied to the inside of the work module 20 is supplied to the supply target VS0 via the internal pipe 42 (corresponding to the second internal pipe 42b and the third internal pipe 42c described later).

 配管着脱部61は、作業モジュール20の背面60に設けられており、外部配管41と内部配管42とが着脱可能に接続される。背面60は、作業モジュール20がベース10に対して引き出されるときの引き出し方向(矢印Y方向)における基端側の部位をいう。配管着脱部61は、外部配管41と内部配管42とを着脱可能に接続することができれば良く、種々の形態をとり得るが、配管着脱部61は、エアカプラであると好適である。また、エアカプラは、例えば、ねじ込み型と比べて着脱が容易なワンタッチ型の継手であると好適である。さらに、エアカプラは、逆止弁を備えると好適である。逆止弁は、外部配管41と接続される側、および、内部配管42と接続される側のうちの少なくとも外部配管41と接続される側に設けられていると好適である。逆止弁を備えるエアカプラは、外部配管41と内部配管42とが切り離されたときに、エアの流出を容易に規制することができる。 The pipe attaching/detaching portion 61 is provided on the back surface 60 of the work module 20, and the external pipe 41 and the internal pipe 42 are detachably connected. The back surface 60 is a portion on the base end side in the drawing direction (arrow Y direction) when the work module 20 is drawn out from the base 10. The pipe attaching/detaching portion 61 may take various forms as long as it can detachably connect the external pipe 41 and the internal pipe 42, and the pipe attaching/detaching portion 61 is preferably an air coupler. Further, it is preferable that the air coupler is a one-touch type joint that is easily attached and detached as compared with a screw-in type, for example. Further, the air coupler preferably includes a check valve. The check valve is preferably provided on the side connected to the external pipe 41 and at least the side connected to the external pipe 41 among the sides connected to the internal pipe 42. The air coupler including the check valve can easily regulate the outflow of air when the external pipe 41 and the internal pipe 42 are separated.

 本実施形態の負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離されたときに、外部負圧の供給から内部負圧の供給に切り替える。負圧変更装置70は、負圧の供給状態を切り換えることができれば良く、種々の形態をとり得るが、負圧変更装置70は、バルブ装置71を備えると好適である。 The negative pressure changing device 70 of the present embodiment, when the work module 20 is pulled out from the base 10 and the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61, the internal negative pressure is supplied from the external negative pressure supply. Switch to negative pressure supply. The negative pressure changing device 70 may take various forms as long as it can switch the supply state of the negative pressure, and the negative pressure changing device 70 preferably includes the valve device 71.

 バルブ装置71は、外部負圧および内部負圧のうちのいずれか一つの供給対象物VS0に対する選択的な供給を切り換える。図3に示すバルブ装置71は、三ポート二位置のパイロット式の電磁弁(ソレノイドバルブ)を示している。バルブ装置71の第一ポート71aは、第一内部配管42aの一端側と接続されており、第一内部配管42aの他端側は、配管着脱部61と接続されている。これにより、配管着脱部61において第一内部配管42aと外部配管41とが接続されているときに、第一内部配管42aに外部負圧を供給可能である。また、バルブ装置71の第二ポート71bは、第二内部配管42bの一端側と接続されており、第二内部配管42bの他端側は、ベース内配管51と接続されている。これにより、第二内部配管42bに内部負圧を供給可能である。 The valve device 71 switches the selective supply to the supply target VS0, which is one of the external negative pressure and the internal negative pressure. The valve device 71 shown in FIG. 3 is a pilot-type solenoid valve (solenoid valve) with three ports and two positions. The first port 71a of the valve device 71 is connected to one end side of the first internal pipe 42a, and the other end side of the first internal pipe 42a is connected to the pipe attaching/detaching portion 61. Thereby, when the first internal pipe 42a and the external pipe 41 are connected to each other in the pipe attaching/detaching portion 61, an external negative pressure can be supplied to the first internal pipe 42a. The second port 71b of the valve device 71 is connected to one end side of the second internal pipe 42b, and the other end side of the second internal pipe 42b is connected to the in-base pipe 51. Thereby, the internal negative pressure can be supplied to the second internal pipe 42b.

 バルブ装置71の第三ポート71cは、第三内部配管42cの一端側と接続されており、第三内部配管42cの他端側は、供給対象物VS0と接続されている。同図に示すバルブ装置71は、ソレノイドコイルが励磁されていないときに、第一ポート71aと第三ポート71cとが連通し、第二ポート71bが封止される。この場合、第一内部配管42aと第三内部配管42cとが連通されて、供給対象物VS0に外部負圧を供給可能となり、内部負圧の供給が規制される。また、バルブ装置71は、ソレノイドコイルが励磁されているときに、第一ポート71aが封止され、第二ポート71bと第三ポート71cとが連通する。この場合、第二内部配管42bと第三内部配管42cとが連通されて、供給対象物VS0に内部負圧を供給可能となり、外部負圧の供給が規制される。このように、本実施形態の負圧変更装置70は、バルブ装置71を備えているので、ソレノイドコイルの励磁の有無によって、外部負圧および内部負圧のうちのいずれか一つを供給対象物VS0に選択的に供給することができ、切り換え制御を簡素化することができる。 The third port 71c of the valve device 71 is connected to one end side of the third internal pipe 42c, and the other end side of the third internal pipe 42c is connected to the supply target VS0. In the valve device 71 shown in the figure, when the solenoid coil is not excited, the first port 71a and the third port 71c communicate with each other and the second port 71b is sealed. In this case, the first internal pipe 42a and the third internal pipe 42c are communicated with each other, so that the external negative pressure can be supplied to the supply target VS0, and the supply of the internal negative pressure is regulated. Further, in the valve device 71, when the solenoid coil is excited, the first port 71a is sealed and the second port 71b and the third port 71c are in communication. In this case, the second internal pipe 42b and the third internal pipe 42c are communicated with each other, the internal negative pressure can be supplied to the supply target VS0, and the supply of the external negative pressure is restricted. As described above, since the negative pressure changing device 70 of the present embodiment includes the valve device 71, one of the external negative pressure and the internal negative pressure is supplied depending on whether or not the solenoid coil is excited. It can be selectively supplied to VS0, and the switching control can be simplified.

 負圧変更装置70は、例えば、作業モジュール20と対向するベース10の上面などに近接センサなどを設けて、近接センサの検出結果に基づいて、作業モジュール20がベース10に対して引き出されたか否か(外部配管41と内部配管42との接続の有無)を認識することができる。負圧変更装置70は、外部配管41と内部配管42とが接続されていることを認識している間、バルブ装置71のソレノイドコイルの励磁を停止する。逆に、負圧変更装置70は、外部配管41と内部配管42とが切り離されていることを認識している間、バルブ装置71のソレノイドコイルを励磁する。 The negative pressure changing device 70 is provided with, for example, a proximity sensor or the like on the upper surface of the base 10 facing the work module 20, and based on the detection result of the proximity sensor, whether or not the work module 20 is pulled out from the base 10. It is possible to recognize whether or not there is a connection between the external pipe 41 and the internal pipe 42. The negative pressure changing device 70 stops the excitation of the solenoid coil of the valve device 71 while recognizing that the external pipe 41 and the internal pipe 42 are connected. Conversely, the negative pressure changing device 70 excites the solenoid coil of the valve device 71 while recognizing that the external pipe 41 and the internal pipe 42 are separated.

 なお、作業モジュール20がベース10に対して引き出された(外部配管41と内部配管42とが切り離された)後に、ソレノイドコイルの励磁状態を切り換えると、供給対象物VS0に負圧が供給されていない期間が生じる可能性がある。そのため、負圧変更装置70は、内部負圧を供給可能な状態にした後に、作業モジュール20の引き出しを許可すると好適である。負圧変更装置70は、例えば、作業モジュール20に設けられているメンテナンスボタン(図示略)の作業者による操作の有無を監視する。作業者によってメンテナンスボタンが操作された場合、負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離される可能性を認識する。このとき、負圧変更装置70は、内部負圧供給装置50を駆動して内部負圧を供給可能な状態にして、作業モジュール20の引き出しを許可する。 Note that when the excitation state of the solenoid coil is switched after the work module 20 is pulled out from the base 10 (the external pipe 41 and the internal pipe 42 are separated), a negative pressure is supplied to the supply target VS0. There may be no period. Therefore, it is preferable that the negative pressure changing device 70 allow the work module 20 to be pulled out after the internal negative pressure is ready to be supplied. The negative pressure changing device 70 monitors whether or not a maintenance button (not shown) provided on the work module 20 is operated by an operator, for example. When the operator operates the maintenance button, the negative pressure changing device 70 recognizes that the work module 20 may be pulled out from the base 10 and the external pipe 41 and the internal pipe 42 may be separated at the pipe attaching/detaching portion 61. To do. At this time, the negative pressure changing device 70 drives the internal negative pressure supply device 50 to make it possible to supply the internal negative pressure, and permits the work module 20 to be pulled out.

 また、負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離される可能性が生じたときに、外部負圧の供給から内部負圧の供給に切り替えることもできる。この場合も、負圧変更装置70は、例えば、作業者によるメンテナンスボタンの操作の有無によって、外部配管41と内部配管42とが切り離される可能性を認識することができる。図3に示す形態では、負圧変更装置70は、外部配管41と内部配管42とが切り離される可能性を認識すると、内部負圧供給装置50を駆動して内部負圧を供給可能な状態にした後に、バルブ装置71のソレノイドコイルを励磁する。そして、負圧変更装置70は、外部負圧の供給から内部負圧の供給に切り替えた後に、作業モジュール20の引き出しを許可することができる。 Further, the negative pressure changing device 70 supplies the external negative pressure when the work module 20 is pulled out with respect to the base 10 and there is a possibility that the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61. Can also be switched to the supply of internal negative pressure. Also in this case, the negative pressure changing device 70 can recognize the possibility that the external pipe 41 and the internal pipe 42 are separated, for example, depending on whether or not the operator operates the maintenance button. In the embodiment shown in FIG. 3, when the negative pressure changing device 70 recognizes the possibility that the outer pipe 41 and the inner pipe 42 are separated from each other, the negative pressure changing device 70 drives the inner negative pressure supply device 50 to bring the inner negative pressure into a state where it can be supplied. After that, the solenoid coil of the valve device 71 is excited. Then, the negative pressure changing device 70 can permit withdrawal of the work module 20 after switching from the supply of the external negative pressure to the supply of the internal negative pressure.

 さらに、負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離されたときに、外部負圧および内部負圧の両方の供給から内部負圧の供給に切り替えることもできる。また、負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離される可能性が生じたときに、外部負圧および内部負圧の両方の供給から内部負圧の供給に切り替えることもできる。これらの場合、既述したバルブ装置71は、不要である。 Further, when the work module 20 is pulled out from the base 10 and the external pipe 41 and the internal pipe 42 are separated from each other in the pipe attaching/detaching portion 61, the negative pressure changing device 70 has both the external negative pressure and the internal negative pressure. It is also possible to switch from the supply of to the supply of the internal negative pressure. Further, the negative pressure changing device 70 is configured such that when the work module 20 is pulled out with respect to the base 10 and there is a possibility that the external pipe 41 and the internal pipe 42 are separated from each other at the pipe attaching/detaching portion 61, the external negative pressure and the internal pressure are changed. It is also possible to switch from both negative pressure supplies to internal negative pressure supplies. In these cases, the valve device 71 described above is unnecessary.

 このように、負圧変更装置70は、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離されたとき、または、切り離される可能性が生じたときに、外部負圧および内部負圧のうちの少なくとも外部負圧の供給から、内部負圧の供給に切り替える。これにより、対基板作業機WMである部品装着機WM3は、外部配管41の配管長を最短化することが容易である。 As described above, the negative pressure changing device 70 has a possibility that, when the work module 20 is pulled out from the base 10 and the external pipe 41 and the internal pipe 42 are separated from each other in the pipe attaching/detaching portion 61, they may be separated. At this time, at least the external negative pressure of the external negative pressure and the internal negative pressure is switched to the internal negative pressure supply. As a result, the component mounting machine WM3, which is the work machine WM for a board, can easily minimize the pipe length of the external pipe 41.

 なお、一つのベース10に複数の作業モジュール20が設けられる場合、複数の作業モジュール20の各々は、内部配管42と、配管着脱部61と、バルブ装置71を含む負圧変更装置70とを備えると好適である。また、図4は、作業モジュール20の背面60側から視た模式図であり、外部配管41およびベース内配管51の配策例を示している。同図に示すように、内部負圧供給装置50は、一つのベース10の内部に設けられ、ベース内配管51に設けられる分岐部51aから分岐した分岐配管が各作業モジュール20の内部配管42(第二内部配管42b)とそれぞれ接続されると好適である。さらに、一つの外部負圧供給装置30と接続される外部配管41から分岐した分岐配管が、各作業モジュール20の配管着脱部61とそれぞれ接続されると好適である。また、配管着脱部61において、外部配管41と接続される側に逆止弁を具備しない場合、外部配管41から分岐した分岐配管に逆止弁を備えると好適である。 When a plurality of work modules 20 are provided on one base 10, each of the plurality of work modules 20 includes an internal pipe 42, a pipe attaching/detaching part 61, and a negative pressure changing device 70 including a valve device 71. Is suitable. Further, FIG. 4 is a schematic diagram viewed from the back surface 60 side of the work module 20, and shows an arrangement example of the external pipe 41 and the in-base pipe 51. As shown in the figure, the internal negative pressure supply device 50 is provided inside one base 10, and a branch pipe branched from a branch portion 51 a provided in the base internal pipe 51 is an internal pipe 42 ( It is suitable if each is connected to the second internal pipe 42b). Further, it is preferable that branch pipes branched from the external pipe 41 connected to one external negative pressure supply device 30 are connected to the pipe attaching/detaching portions 61 of the respective work modules 20. Further, in the case where the pipe attaching/detaching portion 61 does not have a check valve on the side connected to the external pipe 41, it is preferable that the branch pipe branched from the external pipe 41 has a check valve.

 また、外部負圧供給装置30および内部負圧供給装置50は、負圧を供給することができれば良く、種々の形態をとり得る。外部負圧供給装置30および内部負圧供給装置50は、例えば、公知の真空ポンプを用いることができる。さらに、作業モジュール20がベース10に対して引き出されて配管着脱部61において外部配管41と内部配管42とが切り離されたときに供給される内部負圧は、基板製品900の生産時と比べて、単位時間あたりの供給量(例えば、流量)が少なく済む場合が多い。そのため、内部負圧供給装置50は、単位時間あたりの負圧の供給量が外部負圧供給装置30と比べて少ないと好適である。これにより、対基板作業機WMである部品装着機WM3は、例えば、メンテナンス時などに必要な最小限の負圧の供給量(例えば、流量)を確保しつつ、内部負圧供給装置50の大型化を抑制することができる。上述したことは、外部配管41と内部配管42とが切り離される可能性が生じたときに供給される内部負圧についても同様に言える。 Moreover, the external negative pressure supply device 30 and the internal negative pressure supply device 50 may take various forms as long as they can supply negative pressure. As the external negative pressure supply device 30 and the internal negative pressure supply device 50, for example, known vacuum pumps can be used. Further, the internal negative pressure supplied when the work module 20 is pulled out with respect to the base 10 and the external pipe 41 and the internal pipe 42 are separated at the pipe attaching/detaching portion 61, compared to when the substrate product 900 is produced. In many cases, the supply amount (for example, flow rate) per unit time may be small. Therefore, it is preferable that the internal negative pressure supply device 50 has a smaller supply amount of negative pressure per unit time than the external negative pressure supply device 30. As a result, the component mounting machine WM3, which is the working machine WM for a board, secures a minimum negative pressure supply amount (for example, a flow rate) necessary for maintenance or the like, and the internal negative pressure supply device 50 has a large size. Can be suppressed. The same applies to the internal negative pressure supplied when there is a possibility that the external pipe 41 and the internal pipe 42 may be separated.

 2.第二実施形態
 第一実施形態で既述した対基板作業ラインWMLの構成例および部品装着機WM3の構成例は、本実施形態についても同様に言える。本実施形態の部品装着機WM3は、第一実施形態と比べて、負圧供給方法が異なる。
2. Second Embodiment The configuration example of the to-board work line WML and the configuration example of the component mounting machine WM3 described in the first embodiment can be similarly applied to this embodiment. The component mounting machine WM3 of the present embodiment differs from the first embodiment in the negative pressure supply method.

 図5は、ベース10の上に設けられる作業モジュール20を、基板90の搬送方向(矢印X方向)から視た模式図である。同図に示すように、本実施形態においても、対基板作業機WMである部品装着機WM3は、外部負圧供給装置30を備えている。外部負圧供給装置30は、ベース10の外部に設けられており、ベース10の内部を介さずに作業モジュール20の内部の供給対象物VS0に負圧を供給する。具体的には、外部負圧供給装置30から供給される負圧である外部負圧は、配管40を介して、供給対象物VS0に直接供給される。配管40は、例えば、公知のエアホースを用いることができ、外部負圧供給装置30は、例えば、公知の真空ポンプを用いることができる。これにより、本実施形態の部品装着機WM3は、第一実施形態で既述した効果と同様の効果を得ることができる。 FIG. 5 is a schematic view of the work module 20 provided on the base 10 as viewed from the transfer direction (arrow X direction) of the substrate 90. As shown in the figure, also in the present embodiment, the component mounting machine WM3, which is the working machine WM for a board, includes the external negative pressure supply device 30. The external negative pressure supply device 30 is provided outside the base 10 and supplies a negative pressure to the supply target VS0 inside the work module 20 without going through the inside of the base 10. Specifically, the external negative pressure, which is the negative pressure supplied from the external negative pressure supply device 30, is directly supplied to the supply object VS0 via the pipe 40. For the pipe 40, for example, a known air hose can be used, and for the external negative pressure supply device 30, for example, a known vacuum pump can be used. As a result, the component mounting machine WM3 of the present embodiment can obtain the same effects as the effects already described in the first embodiment.

 また、既述したように、作業モジュール20は、ベース10の上に引き出し可能に設けられる。そのため、作業モジュール20の引き出しに応じて、配管40を伸縮させることが考えられる。この場合、配管40は、例えば、螺旋状に形成されたスパイラルホースを用いることができる。しかしながら、スパイラルホースは、配管40の流路断面積を増加させ難い。そこで、図5に示すように、対基板作業機WMである部品装着機WM3は、外部配管41の途中に設置される支持部材80をさらに備えると好適である。支持部材80は、外部配管41のうちの作業モジュール20の側の部位である第一外部配管41aを、ベース10の引き出し方向(矢印Y方向)と直交する水平軸81を中心にして回転可能に支持する。これにより、部品装着機WM3は、作業モジュール20がベース10に対して引き出されたときに、供給対象物VS0に対する外部負圧の供給を継続することができる。なお、図5に示す水平軸81は、紙面に垂直な方向に沿って延びる軸である。 Also, as described above, the work module 20 is provided on the base 10 so as to be drawn out. Therefore, it is conceivable to expand and contract the pipe 40 in accordance with the pulling out of the work module 20. In this case, for the pipe 40, for example, a spiral hose formed in a spiral shape can be used. However, the spiral hose is unlikely to increase the flow passage cross-sectional area of the pipe 40. Therefore, as shown in FIG. 5, it is preferable that the component mounting machine WM3, which is the working machine WM for a board, further includes a support member 80 installed in the middle of the external pipe 41. The support member 80 allows the first external pipe 41a, which is a portion of the external pipe 41 on the work module 20 side, to rotate about a horizontal axis 81 that is orthogonal to the drawing direction (arrow Y direction) of the base 10. To support. As a result, the component mounting machine WM3 can continue to supply the external negative pressure to the supply object VS0 when the work module 20 is pulled out from the base 10. The horizontal axis 81 shown in FIG. 5 is an axis extending along a direction perpendicular to the paper surface.

 支持部材80は、水平軸81を中心にして第一外部配管41aを回転可能に支持することができれば良く、種々の形態をとり得るが、支持部材80は、ロータリージョイントであると好適である。ロータリージョイントは、例えば、滑車装置などと比べて、第一外部配管41aの回転可能な支持が容易である。なお、スイベルジョイントは、ロータリージョイントに含まれ、ロータリージョイントについて上述したことは、スイベルジョイントについても同様に言える。 The supporting member 80 may take various forms as long as it can rotatably support the first external pipe 41a around the horizontal shaft 81, and the supporting member 80 is preferably a rotary joint. The rotary joint is easier to rotatably support the first external pipe 41a than, for example, a pulley device. It should be noted that the swivel joint is included in the rotary joint, and the above description regarding the rotary joint can be similarly applied to the swivel joint.

 また、対基板作業機WMである部品装着機WM3は、配管固定部62をさらに備えると好適である。配管固定部62は、作業モジュール20の背面60に設けられており、内部配管42と外部配管41とを固定する。配管固定部62は、公知の継手を用いることができる。図6は、複数(2つ)の作業モジュール20のうちの一の作業モジュール20(紙面手前側の作業モジュール20)が、ベース10に対して引き出されたときの外部配管41(第一外部配管41a)の状態の一例を示している。同図は、基板90の搬送方向(矢印X方向)から視た側面図であり、作業モジュール20のベース10に対する引き出し量は、作業モジュール20のメンテナンス時の最大引き出し量WA0である。 Further, it is preferable that the component mounting machine WM3, which is the work machine WM for a board, further includes a pipe fixing portion 62. The pipe fixing portion 62 is provided on the back surface 60 of the work module 20, and fixes the internal pipe 42 and the external pipe 41. A known joint can be used for the pipe fixing portion 62. FIG. 6 shows an external pipe 41 (first external pipe) when one of the plurality of (two) work modules 20 (work module 20 on the front side of the drawing) is pulled out from the base 10. 41a) shows an example of the state. This figure is a side view of the substrate 90 as viewed in the transport direction (arrow X direction). The work module 20 is pulled out from the base 10 by the maximum work amount WA0 during maintenance of the work module 20.

 図6に示すように、配管長L11、高さH11および高さH12は、作業モジュール20のベース10に対する引き出し量が作業モジュール20のメンテナンス時の最大引き出し量WA0のときに、第一外部配管41aがベース10の上面から所定高さH13分、離間するように設定されていると好適である。配管長L11は、第一外部配管41aの配管長であり、第一外部配管41aにおけるエアの流通経路の長さをいう。高さH11は、支持部材80のベース10の上面からの高さであり、高さH12は、配管固定部62のベース10の上面からの高さである。 As shown in FIG. 6, the pipe length L11, the height H11, and the height H12 are set such that when the withdrawal amount of the work module 20 from the base 10 is the maximum withdrawal amount WA0 of the work module 20 during maintenance, the first external pipe 41a. Is preferably set so as to be separated from the upper surface of the base 10 by a predetermined height H13. The pipe length L11 is the pipe length of the first external pipe 41a, and refers to the length of the air circulation path in the first external pipe 41a. The height H11 is the height of the support member 80 from the upper surface of the base 10, and the height H12 is the height of the pipe fixing portion 62 from the upper surface of the base 10.

 所定高さH13は、作業モジュール20のベース10に対する引き出し量が最大引き出し量WA0のときに、第一外部配管41aが弧状に配置されるように(直線状にならないように)設定すると良い。これにより、部品装着機WM3は、作業モジュール20が引き出されるときに、第一外部配管41aに過度の張力が生じることを抑制することができる。また、第一外部配管41aがベース10の上面から所定高さH13分、離間しているので、部品装着機WM3は、ベース10に対する作業モジュール20の移動の際に生じる第一外部配管41aの巻き込みを抑制することができる。 The predetermined height H13 may be set so that the first external pipe 41a is arranged in an arc shape (not in a straight line shape) when the withdrawal amount of the work module 20 from the base 10 is the maximum withdrawal amount WA0. Thereby, the component mounting machine WM3 can suppress the occurrence of excessive tension in the first external pipe 41a when the work module 20 is pulled out. Further, since the first external pipe 41a is separated from the upper surface of the base 10 by the predetermined height H13, the component mounting machine WM3 causes the first external pipe 41a to be wound when the work module 20 moves with respect to the base 10. Can be suppressed.

 なお、一つのベース10に複数の作業モジュール20が設けられる場合、複数の作業モジュール20の各々は、内部配管42と、配管固定部62と、支持部材80とを備えると好適である。図7は、作業モジュール20の背面60側から視た模式図であり、外部配管41の配策例を示している。同図に示すように、一つの外部負圧供給装置30と接続される外部配管41から分岐した分岐配管が、各作業モジュール20の支持部材80を介して配管固定部62とそれぞれ接続されると好適である。 When a plurality of work modules 20 are provided on one base 10, it is preferable that each of the plurality of work modules 20 includes an internal pipe 42, a pipe fixing portion 62, and a support member 80. FIG. 7 is a schematic view of the work module 20 as viewed from the back surface 60 side, and shows an example of the arrangement of the external pipe 41. As shown in the figure, when the branch pipes branched from the external pipe 41 connected to one external negative pressure supply device 30 are respectively connected to the pipe fixing portion 62 via the support member 80 of each work module 20. It is suitable.

 3.共通事項
 第一実施形態および第二実施形態のいずれの実施形態においても、以下に示す事項を適用することができる。外部配管41の流路断面積CS1は、内部配管42の流路断面積CS2と比べて、大きく設定されていると好適である。これにより、対基板作業機WMである部品装着機WM3は、外部配管41における抵抗を低減して、供給対象物VS0に供給される負圧の供給量の低下を抑制することができる。また、外部配管41は、複数の配管を用いることもできる。この場合、外部配管41の流路断面積CS1は、複数の配管の各々の流路断面積を合算した合算値に相当する。なお、本明細書では、「負圧」は、負圧エアのことをいう。
3. Common Matters The following matters can be applied to any of the first and second embodiments. The flow passage cross-sectional area CS1 of the external pipe 41 is preferably set to be larger than the flow passage cross-sectional area CS2 of the internal pipe 42. As a result, the component mounting machine WM3, which is the working machine WM for a board, can reduce the resistance in the external pipe 41 and suppress the decrease in the supply amount of the negative pressure supplied to the supply target VS0. Further, as the external pipe 41, a plurality of pipes can be used. In this case, the flow passage cross-sectional area CS1 of the external pipe 41 corresponds to the sum of the flow passage cross-sectional areas of the plurality of pipes. In the present specification, "negative pressure" refers to negative pressure air.

 供給対象物VS0は、作業モジュール20の内部に設けられ、負圧が供給されるものではあれば良く、種々の形態をとり得る。例えば、既述した装着ヘッド23bは、供給対象物VS0に含まれる。また、供給対象物VS0は、位置決めされた基板90の裏面を吸着して保持する基板保持装置であると好適である。基板保持装置は、例えば、図2に示す基板搬送装置21に設けられ、上面に複数の吸引口が設けられている平面状のバックアッププレートを備えている。基板保持装置は、バックアッププレートの上面に基板90を配置した状態で負圧を供給して、基板90の裏面をバックアッププレートに吸着して保持する。例えば、基板製品900の生産中に異常が発生すると、作業モジュール20を引き出してメンテナンスを行う場合がある。この場合、基板製品900の生産を一時的に停止している状態であるので、基板90の保持状態を維持する必要がある。このような場合に本明細書に記載されている事項を適用すると有益である。 The supply target VS0 may be provided in the work module 20 and supplied with negative pressure, and may take various forms. For example, the mounting head 23b described above is included in the supply target VS0. Further, the supply target VS0 is preferably a substrate holding device that sucks and holds the back surface of the positioned substrate 90. The substrate holding device is provided in, for example, the substrate transfer device 21 shown in FIG. 2, and includes a planar backup plate having a plurality of suction ports on the upper surface. The substrate holding device supplies a negative pressure while the substrate 90 is arranged on the upper surface of the backup plate, and sucks and holds the back surface of the substrate 90 on the backup plate. For example, if an abnormality occurs during the production of the board product 900, the work module 20 may be pulled out for maintenance. In this case, since the production of the board product 900 is temporarily stopped, it is necessary to maintain the holding state of the board 90. In such cases, it is useful to apply the matters described in this specification.

 4.その他
 対基板作業機WMは、部品装着機WM3に限定されるものではない。対基板作業機WMは、既述したように、印刷機WM1、印刷検査機WM2、リフロー炉WM4および外観検査機WM5などであっても良い。また、上述した基板保持装置は、これらに設けられる基板搬送装置に用いることができる。
4. Others The board working machine WM is not limited to the component mounting machine WM3. The substrate working machine WM may be the printing machine WM1, the printing inspection machine WM2, the reflow oven WM4, the appearance inspection machine WM5, and the like, as described above. Further, the above-mentioned substrate holding device can be used for the substrate transfer device provided therein.

 5.実施形態の効果の一例
 対基板作業機WMによれば、ベース10の外部に設けられる外部負圧供給装置30を備える。また、外部負圧供給装置30は、ベース10の内部を介さずに作業モジュール20の内部の供給対象物VS0に負圧を供給する。これらにより、対基板作業機WMは、負圧をベース10の内部から作業モジュール20に供給する場合と比べて、負圧を供給する配管の配管長を短縮することが容易であり、配管の流路断面積を増加させることが容易である。その結果、対基板作業機WMは、作業モジュール20の内部の供給対象物VS0に供給される負圧の供給量の基板製品900の生産時における低下を抑制することができる。
5. Example of Effect of Embodiment According to the substrate working machine WM, the external negative pressure supply device 30 provided outside the base 10 is provided. Further, the external negative pressure supply device 30 supplies a negative pressure to the supply target VS0 inside the work module 20 without passing through the inside of the base 10. As a result, the to-board working machine WM can easily shorten the pipe length of the pipe that supplies the negative pressure, as compared with the case where the negative pressure is supplied to the work module 20 from the inside of the base 10. It is easy to increase the road cross-sectional area. As a result, the to-board working machine WM can suppress a decrease in the supply amount of the negative pressure supplied to the supply target VS0 inside the work module 20 during the production of the board product 900.

10:ベース、20:作業モジュール、30:外部負圧供給装置、
40:配管、41:外部配管、41a:第一外部配管、42:内部配管、
50:内部負圧供給装置、
60:背面、61:配管着脱部、62:配管固定部、
70:負圧変更装置、71:バルブ装置、
80:支持部材、81:水平軸、90:基板、
CS1,CS2:流路断面積、L11:配管長、
H11,H12:高さ、H13:所定高さ、WA0:最大引き出し量、
VS0:供給対象物、WM:対基板作業機、
矢印Y方向:引き出し方向。
10: base, 20: work module, 30: external negative pressure supply device,
40: piping, 41: external piping, 41a: first external piping, 42: internal piping,
50: Internal negative pressure supply device,
60: back surface, 61: pipe attaching/detaching portion, 62: pipe fixing portion,
70: Negative pressure changing device, 71: Valve device,
80: support member, 81: horizontal axis, 90: substrate,
CS1, CS2: flow path cross-sectional area, L11: pipe length,
H11, H12: height, H13: predetermined height, WA0: maximum withdrawal amount,
VS0: supply target, WM: work machine for board,
Arrow Y direction: Drawout direction.

Claims (10)

 ベースと、
 前記ベースの上に引き出し可能に設けられる作業モジュールと、
 前記ベースの外部に設けられ、かつ、前記ベースの内部を介さずに前記作業モジュールの内部の供給対象物に負圧を供給する外部負圧供給装置と、
を備える対基板作業機。
Base,
A work module provided on the base so as to be able to be pulled out,
An external negative pressure supply device that is provided outside the base and that supplies a negative pressure to a supply target inside the work module without going through the inside of the base;
To-board working machine.
 前記ベースの内部に設けられ、かつ、前記作業モジュールの内部に設けられる配管である内部配管を介して前記供給対象物に負圧を供給する内部負圧供給装置と、
 前記作業モジュールの背面に設けられ、かつ、前記作業モジュールの外部に設けられる配管である外部配管と前記内部配管とが着脱可能に接続される配管着脱部と、
 前記作業モジュールが前記ベースに対して引き出されて前記配管着脱部において前記外部配管と前記内部配管とが切り離されたとき、または、前記切り離される可能性が生じたときに、前記外部負圧供給装置から前記供給対象物に供給される負圧である外部負圧、および、前記内部負圧供給装置から前記供給対象物に供給される負圧である内部負圧のうちの少なくとも前記外部負圧の供給から、前記内部負圧の供給に切り替える負圧変更装置と、
をさらに備える請求項1に記載の対基板作業機。
An internal negative pressure supply device that is provided inside the base and that supplies a negative pressure to the supply target through an internal pipe that is a pipe provided inside the working module,
A pipe attachment/detachment portion that is provided on the back surface of the work module and that detachably connects the external pipe and the internal pipe that are pipes provided outside the work module,
The external negative pressure supply device when the work module is pulled out with respect to the base and the external pipe and the internal pipe are separated from each other in the pipe attaching/detaching portion, or when the possibility of disconnection occurs. Of at least the external negative pressure of an external negative pressure that is a negative pressure supplied to the supply target from the internal negative pressure and an internal negative pressure that is a negative pressure supplied to the supply target from the internal negative pressure supply device. A negative pressure changing device that switches from supply to supply of the internal negative pressure;
The board-to-board working machine according to claim 1, further comprising:
 前記負圧変更装置は、前記外部負圧および前記内部負圧のうちのいずれか一つの前記供給対象物に対する選択的な供給を切り換えるバルブ装置を備える請求項2に記載の対基板作業機。 The work machine for a board according to claim 2, wherein the negative pressure changing device includes a valve device that selectively switches the supply of the external negative pressure or the internal negative pressure to the supply target.  前記配管着脱部は、エアカプラである請求項2または請求項3に記載の対基板作業機。 The work machine for a board according to claim 2 or 3, wherein the pipe attaching/detaching portion is an air coupler.  前記内部負圧供給装置は、単位時間あたりの負圧の供給量が前記外部負圧供給装置と比べて少ない請求項2~請求項4のいずれか一項に記載の対基板作業機。 The anti-board working machine according to any one of claims 2 to 4, wherein the internal negative pressure supply device has a smaller supply amount of negative pressure per unit time than the external negative pressure supply device.  前記作業モジュールの外部に設けられる配管である外部配管の途中に設置される支持部材をさらに備え、
 前記支持部材は、前記外部配管のうちの前記作業モジュールの側の部位である第一外部配管を、前記ベースの引き出し方向と直交する水平軸を中心にして回転可能に支持する請求項1に記載の対基板作業機。
Further comprising a support member installed in the middle of an external pipe which is a pipe provided outside the work module,
The support member rotatably supports a first external pipe, which is a portion of the external pipe on the working module side, rotatably around a horizontal axis orthogonal to the drawing direction of the base. Board working machine.
 前記作業モジュールの背面に設けられ、かつ、前記作業モジュールの内部に設けられる配管である内部配管と前記外部配管とが固定される配管固定部をさらに備え、
 前記第一外部配管の配管長、前記支持部材の前記ベースの上面からの高さ、および、前記配管固定部の前記ベースの上面からの高さは、前記作業モジュールの前記ベースに対する引き出し量が前記作業モジュールのメンテナンス時の最大引き出し量のときに、前記第一外部配管が前記ベースの上面から所定高さ分、離間するように設定されている請求項6に記載の対基板作業機。
Further provided on the back surface of the work module, and further includes a pipe fixing portion for fixing the internal pipe and the external pipe, which are pipes provided inside the work module,
The pipe length of the first external pipe, the height of the support member from the upper surface of the base, and the height of the pipe fixing portion from the upper surface of the base are such that the withdrawal amount of the work module from the base is the above. The work machine for a board according to claim 6, wherein the first external pipe is set so as to be separated from the upper surface of the base by a predetermined height when the work module has a maximum withdrawal amount during maintenance.
 前記支持部材は、ロータリージョイントである請求項6または請求項7に記載の対基板作業機。 The work machine for a board according to claim 6 or 7, wherein the support member is a rotary joint.  前記作業モジュールの外部に設けられる配管である外部配管の流路断面積は、前記作業モジュールの内部に設けられる配管である内部配管の流路断面積と比べて、大きく設定されている請求項1~請求項8のいずれか一項に記載の対基板作業機。 The flow passage cross-sectional area of an external pipe that is a pipe provided outside the work module is set to be larger than the flow passage cross-sectional area of an internal pipe that is a pipe provided inside the work module. The work machine for a board according to any one of claims 8 to 8.  前記供給対象物は、位置決めされた基板の裏面を吸着して保持する基板保持装置である請求項1~請求項9のいずれか一項に記載の対基板作業機。 The work machine for a substrate according to any one of claims 1 to 9, wherein the supply target is a substrate holding device that sucks and holds a back surface of a positioned substrate.
PCT/JP2018/044317 2018-11-30 2018-11-30 Substrate working machine Ceased WO2020110319A1 (en)

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JPH0818293A (en) * 1994-06-28 1996-01-19 Sony Corp Board fixing mechanism for component mounting
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