WO2020019263A1 - Chip packaging structure, method and terminal device - Google Patents
Chip packaging structure, method and terminal device Download PDFInfo
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- WO2020019263A1 WO2020019263A1 PCT/CN2018/097273 CN2018097273W WO2020019263A1 WO 2020019263 A1 WO2020019263 A1 WO 2020019263A1 CN 2018097273 W CN2018097273 W CN 2018097273W WO 2020019263 A1 WO2020019263 A1 WO 2020019263A1
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- H10W74/117—
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
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- H10W70/635—
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- H10W90/701—
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Definitions
- optical fingerprint recognition technology has extremely high requirements on key optical path parameters such as object distance and image distance, and the allowable tolerance range is extremely small.
- Existing optical fingerprint recognition products have too many design stacks and large cumulative tolerances, resulting in blurred imaging effects, which greatly affects their recognition speed and user experience, thereby limiting their wide-scale promotion and application.
- chip on board (COB) or integrated package solutions the stacking design is to stick the lens mount on the chip mount substrate, subject to the deformation of the bracket, the substrate, the adhesive, and the chip And tolerance values, image distance tolerances are large and unstable.
- a chip packaging structure including: a substrate having a groove structure formed on an upper surface of the substrate; a fingerprint identification chip located in the groove structure; and the fingerprint identification chip A first pad is provided; a conductive layer is located above the substrate, and the first pad is electrically connected to a connection end of the chip package structure for electrical connection with the outside through the conductive layer.
- the chip package structure further includes: a bracket and a lens; the lens is fixed above the fingerprint recognition chip through the bracket, and the lens is aligned with the fingerprint recognition chip. .
- the chip packaging structure further includes: a filter, and the filter is attached to an upper surface of the fingerprint identification chip.
- the method further includes: setting a bracket and a lens above the substrate; wherein the lens is fixed above the fingerprint recognition chip through the bracket, and the lens and the The fingerprint identification chip is aligned.
- the terminal device further includes a screen, and the chip package structure is disposed below the screen.
- the conductive layer 104 may be designed as a redistribution layer (RDL), thereby not only reallocating the first pad 106 on the fingerprint identification chip 101 to the redistribution layer (RDL).
- RDL redistribution layer
- the position of the edge of the substrate does not change the layout structure of the first pads 106 of the fingerprint identification chip 101.
- the first pad of each chip may be electrically connected to the connection terminal 107 of the chip package structure 100 through a respective conductive unit.
- the chip package structure 101 may not include the insulating layer 103.
- connection manner between the conductive layer 104 shown in FIG. 2 and the first pad of the fingerprint identification chip 101 is merely an example, and the embodiment of the present application is not limited thereto.
- the first pad 106 is disposed on the fingerprint identification chip 101, and the upper surface of the fingerprint identification chip 101 is a flat surface.
- the insulating layer 103 may have conductive holes at the relative positions of the first pads 106.
- the conductive layer 104 may pass through the conductive holes of the insulating layer 103 and the first pads 106 on the fingerprint identification chip 101. connection.
- connection end 107 shown in FIGS. 1 to 3 on the upper surface of the chip packaging structure 100 is merely an example, and the embodiment of the present application is not limited thereto.
- the connection end 107 may also be disposed on a lower surface of the chip package structure.
- a fan-out advanced packaging process and a fan-in advanced packaging process are used to briefly describe the connection terminal setting method in the embodiment of the present application.
- the so-called Fan-out That is, the pin of the fingerprint identification chip 101 (that is, the first pad 106) is pulled to a via pad through a Through Silicon Via (TSV).
- TSV Through Silicon Via
- Fan-out advanced packaging process shown in FIG. 4 is only an example of pulling the first pad 106 on the fingerprint identification chip 101 to the lower surface of the substrate 102, but the embodiment of the present application is not It is limited to this packaging process and the specific structure shown in FIG. 4.
- the upper surface of the fingerprint identification chip 301 may include a plurality of first pads 306, and the first pads 306 may be evenly or unevenly distributed on the upper surface of the fingerprint identification chip 301.
- the chip package structure 300 ie, the lower surface of the fingerprint identification chip 301
- the TSV may be configured to connect the The one or more first pads 306 are electrically connected to one or more of the plurality of connection terminals 307.
- the connection end in the embodiment of the present application may be a solder ball generated on the third pad 310 as shown in FIG. 6, or may be the third pad 310 directly.
- the embodiments of the present application are not specifically limited.
- the method shown in FIG. 9 may further include: removing the conductive layer directly above the fingerprint identification chip to The conductive layer is divided into a plurality of conductive units, and each one or more first pads are connected to one or more connection terminals through one or more conductive units.
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Abstract
Description
本申请实施例涉及芯片封装领域,并且更具体地,涉及一种芯片封装结构、方法和终端设备。The embodiments of the present application relate to the field of chip packaging, and more particularly, to a chip packaging structure, method, and terminal device.
随着手机行业的发展,传统的电容型指纹识别技术因其穿透能力有限,芯片结构复杂、模组尺寸偏厚、摆放位置受限等弊端,已经逐渐不能满足新兴手机市场的需求,光学指纹识别技术因其穿透能力强、支持全屏摆放等特点,将逐渐成为指纹识别技术的主流。With the development of the mobile phone industry, traditional capacitive fingerprint recognition technology has gradually failed to meet the needs of the emerging mobile phone market due to its limited penetration capabilities, complex chip structure, thick module size, and limited placement. Fingerprint recognition technology will gradually become the mainstream of fingerprint recognition technology due to its strong penetrability and support for full-screen placement.
但是,光学指纹识别技术对物距、像距等关键光路参数有着极高的要求,允许的公差范围极小。现有的光学指纹识别产品,因设计叠层过多、累计公差较大,导致其成像效果较模糊,极大影响其识别速度和使用体验,从而限制其大范围推广应用。例如,板上芯片封装(Chips on Board,COB)或者一体封装方案,其叠层设计均为将搭载镜头的支架粘贴在搭载芯片的基板上,受支架、基板、贴合胶、芯片的形变量和公差值的影响,像距公差很大且不稳定。However, optical fingerprint recognition technology has extremely high requirements on key optical path parameters such as object distance and image distance, and the allowable tolerance range is extremely small. Existing optical fingerprint recognition products have too many design stacks and large cumulative tolerances, resulting in blurred imaging effects, which greatly affects their recognition speed and user experience, thereby limiting their wide-scale promotion and application. For example, chip on board (COB) or integrated package solutions, the stacking design is to stick the lens mount on the chip mount substrate, subject to the deformation of the bracket, the substrate, the adhesive, and the chip And tolerance values, image distance tolerances are large and unstable.
因此,如何减小像距公差,进而达到优化光学指纹成像的清晰度、提升识别速度和使用体验是芯片封装领域中一项亟需解决的问题。Therefore, how to reduce the image distance tolerance, and then optimize the definition of optical fingerprint imaging, improve the recognition speed and use experience is an urgent problem in the field of chip packaging.
发明内容Summary of the Invention
提供了一种芯片封装结构、方法和终端设备,能够有效减小像距公差,进而达到优化光学指纹成像的清晰度、提升识别速度和使用体验。Provided are a chip packaging structure, a method and a terminal device, which can effectively reduce the image distance tolerance, and then optimize the definition of optical fingerprint imaging, improve recognition speed and use experience.
第一方面,提供了一种芯片封装结构,包括:基板,所述基板的上表面形成有凹槽结构;指纹识别芯片,所述指纹识别芯片位于所述凹槽结构内,所述指纹识别芯片设置有第一焊盘;导电层,所述导电层位于所述基板的上方,所述第一焊盘通过所述导电层电连接至所述芯片封装结构的用于与外界电连接的连接端。According to a first aspect, a chip packaging structure is provided, including: a substrate having a groove structure formed on an upper surface of the substrate; a fingerprint identification chip located in the groove structure; and the fingerprint identification chip A first pad is provided; a conductive layer is located above the substrate, and the first pad is electrically connected to a connection end of the chip package structure for electrical connection with the outside through the conductive layer. .
本申请实施例中,通过凹槽结构将指纹识别芯片内嵌在基板中,使得封装后的芯片的上表面可以为平整表面,进而搭载镜头的支架可以直接粘贴在 平整表面上,有效减去了基板、芯片、贴合胶对像距公差的影响,达到了优化光学指纹成像的清晰度、提升识别速度和使用体验的目的。进一步地,通过导电层将所述指纹识别芯片的第一焊盘通过导电层牵引至所述基板的边缘位置,到达封装所述指纹识别芯片的目的。In the embodiment of the present application, the fingerprint recognition chip is embedded in the substrate through the groove structure, so that the upper surface of the packaged chip can be a flat surface, and the lens mount can be directly pasted on the flat surface, effectively subtracting The influence of the substrate, chip, and adhesive on the image distance tolerance has achieved the purpose of optimizing the definition of the optical fingerprint imaging, improving the recognition speed and the user experience. Further, the first pad of the fingerprint identification chip is pulled to the edge position of the substrate through the conductive layer through the conductive layer, and the purpose of packaging the fingerprint identification chip is reached.
在一些可能的实现方式中,所述指纹识别芯片设置有多个所述第一焊盘,所述芯片封装结构设置有多个所述连接端,所述导电层在所述指纹识别芯片的正上方形成有开口,使得所述导电层划分为多个导电单元,每一个或多个所述第一焊盘通过一个或多个所述导电单元连接至一个或多个所述连接端。In some possible implementation manners, the fingerprint identification chip is provided with a plurality of the first pads, the chip packaging structure is provided with a plurality of the connection ends, and the conductive layer is on a positive side of the fingerprint identification chip. An opening is formed above, so that the conductive layer is divided into a plurality of conductive units, and each one or more of the first pads are connected to one or more of the connection ends through one or more of the conductive units.
在一些可能的实现方式中,所述芯片封装结构还包括:保护层,形成于所述导电层的上表面,所述保护层形成有开窗,所述连接端设置于所述导电层上的所述开窗内。In some possible implementation manners, the chip package structure further includes: a protective layer formed on an upper surface of the conductive layer, the protective layer is formed with an opening window, and the connection end is disposed on the conductive layer. Inside the window.
在一些可能的实现方式中,所述保护层在所述指纹识别芯片的正上方形成有开口,以便经过手指反射而形成的反射光穿过所述保护层的开口并被所述指纹识别芯片接收。In some possible implementation manners, the protective layer is formed with an opening directly above the fingerprint identification chip, so that the reflected light formed by finger reflection passes through the opening of the protective layer and is received by the fingerprint identification chip. .
在一些可能的实现方式中,所述导电层和所述基板的下表面之间形成有硅通孔TSV,所述连接端设置于所述基板的下表面的TSV孔口处,所述导电层通过所述TSV电连接至所述连接端。In some possible implementation manners, a TSV TSV is formed between the conductive layer and the lower surface of the substrate, and the connection end is disposed at a TSV opening on the lower surface of the substrate. The conductive layer The TSV is electrically connected to the connection terminal.
在一些可能的实现方式中,所述芯片封装结构还包括:绝缘层,所述绝缘层设置在所述基板和所述导电层之间,所述指纹识别芯片的正上方形成有开口,以便经过手指反射而形成的反射光穿过所述绝缘层的开口并被所述指纹识别芯片接收。In some possible implementation manners, the chip package structure further includes: an insulating layer disposed between the substrate and the conductive layer, and an opening is formed directly above the fingerprint identification chip so as to pass through The reflected light formed by the finger reflection passes through the opening of the insulating layer and is received by the fingerprint recognition chip.
在一些可能的实现方式中,所述指纹识别芯片通过液态或固态胶固定在所述凹槽结构内,所述凹槽结构的深度为所述指纹识别芯片的厚度和所述胶水的厚度的总和。In some possible implementation manners, the fingerprint recognition chip is fixed in the groove structure by liquid or solid glue, and the depth of the groove structure is the sum of the thickness of the fingerprint recognition chip and the thickness of the glue. .
在一些可能的实现方式中,所述芯片封装结构还包括:滤光片,所述滤光片与所述指纹识别芯片的上表面贴合。In some possible implementation manners, the chip packaging structure further includes: a filter, and the filter is attached to an upper surface of the fingerprint identification chip.
在一些可能的实现方式中,所述连接端为第二焊盘或锡球。In some possible implementation manners, the connection end is a second pad or a solder ball.
在一些可能的实现方式中,所述指纹识别芯片包括沿所述基板的上表面的平行方向和/或垂直方向排列的多个芯片。In some possible implementation manners, the fingerprint identification chip includes a plurality of chips arranged along a parallel direction and / or a vertical direction of an upper surface of the substrate.
在一些可能的实现方式中,所述芯片封装结构还包括:支架和镜头;所 述镜头通过所述支架固定在所述指纹识别芯片的上方,且所述镜头与所述指纹识别芯片对准设置。In some possible implementation manners, the chip package structure further includes: a bracket and a lens; the lens is fixed above the fingerprint recognition chip through the bracket, and the lens is aligned with the fingerprint recognition chip. .
在一些可能的实现方式中,所述镜头和所述支架一体设置或分离设置。In some possible implementation manners, the lens and the bracket are provided integrally or separately.
第二方面,提供了一种芯片封装结构,包括:In a second aspect, a chip packaging structure is provided, including:
指纹识别芯片,所述指纹识别芯片的上表面设置有第一焊盘,所述指纹识别芯片的上表面和下表面之间设置有硅通孔TSV,所述指纹识别芯片的下表面设置有导电层,所述第一焊盘通过所述硅通孔TSV电连接至所述导电层的一端,所述导电层的另一端与所述芯片封装结构的用于与外界电连接的连接端电连接。A fingerprint recognition chip having a first pad provided on an upper surface thereof, a through-silicon via TSV provided between an upper surface and a lower surface of the fingerprint recognition chip, and a conductive surface provided on the lower surface of the fingerprint recognition chip Layer, the first pad is electrically connected to one end of the conductive layer through the TSV TSV, and the other end of the conductive layer is electrically connected to a connection end of the chip package structure for electrical connection with the outside .
本申请实施例中,通过TSV将指纹识别芯片的第一焊盘牵引至所述指纹识别相片的下表面,使得封装后的芯片的上表面可以为平整表面,进而搭载镜头的支架可以直接粘贴在平整表面上,有效减去了基板、芯片、贴合胶对像距公差的影响,达到了优化光学指纹成像的清晰度、提升识别速度和使用体验的目的。并进一步地,通过导电层将所述指纹识别芯片的下表面的TSV孔口处通过导电层牵引至所述指纹识别芯片201的边缘位置,到达封装所述指纹识别芯片的目的。In the embodiment of the present application, the first pad of the fingerprint identification chip is pulled to the lower surface of the fingerprint identification photo by TSV, so that the upper surface of the packaged chip can be a flat surface, and the bracket carrying the lens can be directly attached to the On the flat surface, the influence of the substrate, chip, and adhesive on the image distance tolerance is effectively subtracted, and the purposes of optimizing the definition of the optical fingerprint imaging, improving the recognition speed, and the user experience are effectively achieved. Furthermore, the TSV aperture on the lower surface of the fingerprint identification chip is pulled to the edge position of the
在一些可能的实现方式中,所述指纹识别芯片设置有多个所述第一焊盘,所述芯片封装结构设置有多个所述连接端,所述指纹识别芯片的上表面和下表面之间设置有多个TSV,所述导电层形成有开口,使得所述导电层划分为多个导电单元,每个或多个所述第一焊盘通过一个或多个所述TSV和一个或多个所述导电单元电连接至一个所述连接端。In some possible implementation manners, the fingerprint identification chip is provided with a plurality of the first pads, the chip packaging structure is provided with a plurality of the connection ends, and an upper surface and a lower surface of the fingerprint identification chip are provided. A plurality of TSVs are arranged between the conductive layers, and the conductive layer is formed with an opening, so that the conductive layer is divided into a plurality of conductive units, and each or more of the first pads pass one or more of the TSVs and one or more Each of the conductive units is electrically connected to one of the connection terminals.
在一些可能的实现方式中,所述指纹识别芯片的下表面为倒梯形或多台阶倒梯形,所述连接端设置于所述倒梯形或所述多台阶倒梯形的下表面。In some possible implementation manners, the lower surface of the fingerprint identification chip is an inverted trapezoid or a multi-step inverted trapezoid, and the connection end is disposed on the lower surface of the inverted trapezoid or the multi-step inverted trapezoid.
在一些可能的实现方式中,所述芯片封装结构还包括:滤光片,所述滤光片与所述指纹识别芯片的上表面贴合。In some possible implementation manners, the chip packaging structure further includes: a filter, and the filter is attached to an upper surface of the fingerprint identification chip.
第三方面,提供了一种封装芯片的方法,包括:在基板中形成凹槽结构;将指纹识别芯片固定在所述凹槽结构内;采用镀膜工艺在所述基板的上方形成导电层,所述指纹识别芯片的第一焊盘通过所述导电层电连接至所述芯片封装结构的用于与外界电连接的连接端。According to a third aspect, a method for packaging a chip is provided, which includes: forming a groove structure in a substrate; fixing a fingerprint recognition chip in the groove structure; and forming a conductive layer over the substrate by using a plating process. The first pad of the fingerprint identification chip is electrically connected to the connection end of the chip packaging structure for electrical connection with the outside through the conductive layer.
在一些可能的实现方式中,所述指纹识别芯片设置有多个所述第一焊盘,所述芯片封装结构设置有多个所述连接端,所述方法还包括:去除所述 指纹识别芯片的正上方的所述导电层,以将所述导电层划分为多个导电单元,每一个或多个所述第一焊盘通过一个或多个所述导电单元连接至一个或多个所述连接端。In some possible implementation manners, the fingerprint identification chip is provided with a plurality of the first pads, the chip packaging structure is provided with a plurality of the connection ends, and the method further includes: removing the fingerprint identification chip. The conductive layer directly above to divide the conductive layer into a plurality of conductive units, and each or more of the first pads are connected to one or more of the conductive pads through one or more of the conductive units. Connection end.
在一些可能的实现方式中,所述方法还包括:采用镀膜工艺在所述导电层的上表面形成保护层;在所述保护层形成开窗,并在所述导电层上的所述开窗内生成所述连接端。In some possible implementation manners, the method further includes: forming a protective layer on an upper surface of the conductive layer by using a coating process; forming a window on the protective layer, and opening the window on the conductive layer. The connection ends are generated inside.
在一些可能的实现方式中,所述方法还包括:去除所述指纹识别芯片的正上方的所述保护层,以形成开口,以便经过手指反射而形成的反射光穿过所述保护层的开口并被所述指纹识别芯片接收。In some possible implementation manners, the method further includes: removing the protective layer directly above the fingerprint identification chip to form an opening, so that the reflected light formed by finger reflection passes through the opening of the protective layer. And received by the fingerprint identification chip.
在一些可能的实现方式中,所述方法还包括:采用硅通孔TSV工艺在所述导电层和所述基板的下表面之间设置TSV;在所述基板的下表面的TSV孔口处,生成所述连接端。In some possible implementation manners, the method further includes: setting a TSV between the conductive layer and a lower surface of the substrate by using a TSV TSV process; at a TSV aperture of the lower surface of the substrate, Generating said connecting end.
在一些可能的实现方式中,所述采用镀膜工艺在所述基板的上方形成导电层之前,所述方法还包括:采用镀膜工艺在所述基板的上表面形成绝缘层,以便在所述绝缘层的上表面形成所述导电层;去除所述指纹识别芯片的正上方的所述绝缘层,以形成开口,以便经过手指反射而形成的反射光穿过所述绝缘层的开口并被所述指纹识别芯片接收。In some possible implementation manners, before the forming a conductive layer over the substrate by using a coating process, the method further includes: forming an insulating layer on an upper surface of the substrate by using a coating process, so that the insulating layer is formed on the insulating layer. The conductive layer is formed on the upper surface of the substrate; the insulating layer directly above the fingerprint identification chip is removed to form an opening, so that the reflected light formed by finger reflection passes through the opening of the insulating layer and is fingerprinted by the fingerprint. Recognize chip reception.
在一些可能的实现方式中,所述将指纹识别芯片固定在所述凹槽结构内,包括:通过液态或固态胶将所述指纹识别芯片固定在所述凹槽结构内;其中,所述凹槽结构的深度为所述指纹识别芯片的厚度和所述胶水的厚度的总和。In some possible implementation manners, the fixing the fingerprint identification chip in the groove structure includes: fixing the fingerprint identification chip in the groove structure by liquid or solid glue; wherein the concave The depth of the groove structure is the sum of the thickness of the fingerprint identification chip and the thickness of the glue.
在一些可能的实现方式中,所述方法还包括:在所述指纹识别芯片的上表面贴合滤光片。In some possible implementation manners, the method further includes: attaching a filter on an upper surface of the fingerprint identification chip.
在一些可能的实现方式中,所述连接端为第二焊盘或锡球。In some possible implementation manners, the connection end is a second pad or a solder ball.
在一些可能的实现方式中,所述指纹识别芯片包括沿所述基板的上表面的平行方向和/或垂直方向排列的多个芯片。In some possible implementation manners, the fingerprint identification chip includes a plurality of chips arranged along a parallel direction and / or a vertical direction of an upper surface of the substrate.
在一些可能的实现方式中,所述方法还包括:在所述基板的上方,设置支架和镜头;其中,所述镜头通过所述支架固定在所述指纹识别芯片的上方,且所述镜头与所述指纹识别芯片对准设置。In some possible implementation manners, the method further includes: setting a bracket and a lens above the substrate; wherein the lens is fixed above the fingerprint recognition chip through the bracket, and the lens and the The fingerprint identification chip is aligned.
在一些可能的实现方式中,所述镜头和所述支架一体设置或分离设置。In some possible implementation manners, the lens and the bracket are provided integrally or separately.
第四方面,提供了一种封装芯片的方法,包括:In a fourth aspect, a method for packaging a chip is provided, including:
采用硅通孔TSV工艺在指纹识别芯片的上表面和下表面之间设置硅通孔TSV;采用镀膜工艺在所述指纹识别芯片的下表面形成导电层,所述指纹识别芯片的第一焊盘通过TSV电连接至所述导电层的一端;在所述导电层的另一端,生成用于与外界电连接的连接端。A TSV TSV process is used to set a TSV TSV between the upper and lower surfaces of the fingerprint identification chip; a coating process is used to form a conductive layer on the lower surface of the fingerprint identification chip, and the first pad of the fingerprint identification chip It is electrically connected to one end of the conductive layer through TSV; at the other end of the conductive layer, a connection end for electrical connection with the outside is generated.
在一些可能的实现方式中,所述指纹识别芯片设置有多个所述第一焊盘,所述芯片封装结构设置有多个所述连接端,所述指纹识别芯片的上表面和下表面之间设置有多个TSV,所述方法还包括:通过在所述导电层形成开孔,将所述导电层划分为多个导电单元,每个或多个所述第一焊盘通过一个或多个所述TSV和一个或多个所述导电单元电连接至一个或多个所述连接端。In some possible implementation manners, the fingerprint identification chip is provided with a plurality of the first pads, the chip packaging structure is provided with a plurality of the connection ends, and an upper surface and a lower surface of the fingerprint identification chip are provided. A plurality of TSVs are provided between the two, and the method further includes: dividing the conductive layer into a plurality of conductive units by forming an opening in the conductive layer, and each or more of the first pads are passed through one or more The TSVs and one or more of the conductive units are electrically connected to one or more of the connection terminals.
在一些可能的实现方式中,所述指纹识别芯片的下表面为倒梯形或多台阶倒梯形,所述连接端设置于所述倒梯形或所述台阶倒梯形的下表面。In some possible implementation manners, the lower surface of the fingerprint identification chip is an inverted trapezoid or a multi-step inverted trapezoid, and the connection end is disposed on the lower surface of the inverted trapezoid or the step inverted trapezoid.
在一些可能的实现方式中,所述方法还包括:在所述指纹识别芯片的上表面贴合滤光片。In some possible implementation manners, the method further includes: attaching a filter on an upper surface of the fingerprint identification chip.
第五方面,提供了一种终端设备,包括:根据第二方面所述的封装芯片的方法制备的芯片封装结构。According to a fifth aspect, a terminal device is provided, including a chip packaging structure prepared according to the method for packaging a chip according to the second aspect.
在一些可能的实现方式中,所述终端设备还包括屏幕,所述芯片封装结构设置于所述屏幕的下方。In some possible implementation manners, the terminal device further includes a screen, and the chip package structure is disposed below the screen.
第六方面,提供了一种终端设备,包括:根据第三方面所述的封装芯片的方法制备的芯片封装结构。According to a sixth aspect, a terminal device is provided, including a chip packaging structure prepared according to the method for packaging a chip according to the third aspect.
在一些可能的实现方式中,所述终端设备还包括屏幕,所述芯片封装结构设置于所述屏幕的下方。In some possible implementation manners, the terminal device further includes a screen, and the chip package structure is disposed below the screen.
本申请实施例中,指纹识别芯片避免采用传统的打线方式进行封装,而是通过金属层和/或TSV将指纹识别芯片的第一焊盘牵引至所述芯片封装结构的边缘位置,使得封装后的芯片的上表面可以为平整表面,减小了像距公差。并进一步地将搭载镜头的支架可以直接粘贴在平整表面上,有效减去了基板、芯片、贴合胶对像距公差的影响,极大优化了光学指纹成像的清晰度,提升识别速度和使用体验。In the embodiment of the present application, the fingerprint identification chip is avoided from being packaged by a conventional wire bonding method. Instead, the first pad of the fingerprint identification chip is pulled to the edge position of the chip packaging structure through a metal layer and / or TSV, so that the package The upper surface of the rear chip can be a flat surface, which reduces the image distance tolerance. Furthermore, the lens-mounted bracket can be directly pasted on a flat surface, effectively reducing the influence of the substrate, chip, and adhesive on the image distance tolerance, greatly optimizing the definition of optical fingerprint imaging, improving the recognition speed and use. Experience.
图1是本申请实施例的芯片封装结构的示意性结构图。FIG. 1 is a schematic structural diagram of a chip package structure according to an embodiment of the present application.
图2是集成有保护层和绝缘层的芯片封装结构的示意性框图。FIG. 2 is a schematic block diagram of a chip package structure integrated with a protective layer and an insulating layer.
图3是集成有滤光片的芯片封装结构的示意性框图。FIG. 3 is a schematic block diagram of a chip package structure integrated with a filter.
图4是连接端置于芯片封装结构的下表面的示意性结构图。FIG. 4 is a schematic structural diagram of a connection end placed on a lower surface of a chip package structure.
图5是集成有镜头和支架的芯片封装结构的示意性框图。FIG. 5 is a schematic block diagram of a chip package structure integrated with a lens and a holder.
图6是本申请的实施例的芯片封装结构的另一示意性结构图。FIG. 6 is another schematic structural diagram of a chip package structure according to an embodiment of the present application.
图7是集成有滤光片的芯片封装结构的另一示意性框图。FIG. 7 is another schematic block diagram of a chip package structure with an integrated filter.
图8是集成有镜头和支架的芯片封装结构的另一示意性框图。FIG. 8 is another schematic block diagram of a chip packaging structure integrated with a lens and a holder.
图9是本申请实施例的封装芯片的方法的示意性流程图。FIG. 9 is a schematic flowchart of a chip packaging method according to an embodiment of the present application.
图10是本申请实施例的封装芯片的方法的另一示意性流程图。FIG. 10 is another schematic flowchart of a chip packaging method according to an embodiment of the present application.
图11是本申请实施例的终端设备的示意性框图。FIG. 11 is a schematic block diagram of a terminal device according to an embodiment of the present application.
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚地描述。The technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application.
以下,结合图1至图8,详细介绍本申请实施例的芯片封装结构。Hereinafter, the chip package structure according to the embodiment of the present application will be described in detail with reference to FIGS. 1 to 8.
需要说明的是,为便于说明,在本申请的实施例中,相同的附图标记表示相同的部件,并且为了简洁,在不同实施例中,省略对相同部件的详细说明。It should be noted that, for ease of description, in the embodiments of the present application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments.
应理解,附图示出的本申请实施例中的各种部件的厚度、长宽等尺寸,以及芯片封装结构的整体厚度、长宽等尺寸仅为示例性说明,而不应对本申请构成任何限定。It should be understood that the dimensions, such as the thickness, length, and width of various components, and the overall thickness, length, and width of the chip package structure shown in the embodiments of the application shown in the drawings are only illustrative, and should not constitute any limited.
图1是本申请的一个实施例的芯片封装结构100的示意性结构图。如图1所示,所述芯片封装结构100包括:指纹识别芯片101、基板102以及导电层104,其中,基板102的上表面形成有凹槽结构;指纹识别芯片101位于凹槽结构内,指纹识别芯片101设置有第一焊盘106;导电层104位于基板102的上方。FIG. 1 is a schematic structural diagram of a
本申请实施例中,通过凹槽结构将指纹识别芯片101内嵌在基板102中,使得封装后的芯片的上表面可以为平整表面,进而搭载镜头的支架可以直接粘贴在平整表面上,有效减去了基板102、指纹识别芯片101以及贴合胶对像距公差的影响,达到了优化光学指纹成像的清晰度、提升识别速度和使用体验的目的。并进一步地,通过导电层104将所述指纹识别芯片的第一焊盘 106通过导电层104牵引至所述基板102的表面位置,到达封装所述指纹识别芯片101的目的。In the embodiment of the present application, the
需要说明的是,在指纹识别芯片101在进入封装工厂之前已经在其一表面制备有焊盘(Pad),例如,如图1所示的第一焊盘106,所述第一焊盘106通过导电层104电连接至芯片封装结构的用于与外界电连接的连接端107。所述第一焊盘106可以理解为指纹识别芯片101与外界连接的管脚。在本申请实施例中,指纹识别芯片101的上表面即为进入封装工厂之前表面已制备有焊盘的一面,与所述指纹识别芯片101相对的一面即为指纹识别芯片101的下表面,所述指纹识别芯片101的下表面在进入封装工厂之前未制备焊盘,用于与基板102中凹槽的上表面贴合。It should be noted that before the
所述指纹识别芯片101例如可以为光学指纹识别芯片,可以具体包括具有光学感应阵列的光学生物特征传感器,比如光学指纹传感器;所述光学感应阵列可以包括多个光学感应单元,用于实现生物特征感应操作。所述指纹识别芯片101的光学感应阵列具体也可以为光探测器(Photo detector)阵列,其包括多个呈阵列式分布的光探测器,所述光探测器可以作为如上所述的光学感应单元。The
以屏下指纹识别技术为例,所述光学感应阵列的所在区域为所述指纹识别芯片101的感应区域。所述感应区域可以位于显示屏的显示区域的下方,由此,用户在需要对所述终端设备进行解锁或者其他生物特征验证的时候,只需要将手指按压在位于所述显示屏上,位于所述感应区域的光学感应阵列就可以进行指纹感应操作。Taking the fingerprint recognition technology under the screen as an example, the area where the optical sensing array is located is the sensing area of the
应理解,所述指纹识别芯片101为光学指纹传感器仅为示例,在其他可替代实施例中,所述指纹识别芯片101也可以采用超声波或者其他类型的指纹识别模组,例如,所述光学生物特征传感器可以采用超声波指纹传感器或者其他类型的指纹传感器代替。本申请对指纹识别芯片101的类型和具体结构不作特殊限制,只要上述指纹识别芯片101可以满足进行指纹识别的性能要求便可。It should be understood that the
所述指纹识别芯片101还可以是包括沿基板102的上表面的平行方向和/或垂直方向排列的多个芯片。即可以将沿基板102的上表面的平行方向和/或垂直方向排列的多个芯片封装在一个封装结构中,所述多个芯片之间可以通过电连接的方式实现信号的传输。The
所述连接端107可以是第二焊盘或锡球,或者用于实现与外界的电连接的其他连接件,本申请实施例对此不作限定。比如所述连接端107可以是用于与软性电路板(Flexible Printed Circuit,FPC)电连接的焊点或者焊盘或者任何形式的连接端,所述指纹识别芯片101可以通过连接端107电连接到所述FPC。比如,所述连接端107为第二焊盘时,所述指纹识别芯片101可以通过所述第二焊盘焊接到所述FPC。由此,所述指纹识别芯片101可以通过所述FPC实现与其他外围电路或者所述指纹识别芯片101所属设备的其他元件的电性互连和信号传输。比如,所述指纹识别芯片101可以通过所述FPC接收所述指纹识别芯片101所属设备的处理单来的控制信号,并且还可以通过所述FPC将所述指纹图像输出给所述指纹识别芯片101所属设备的处理单元或者控制单元等。The
所述指纹识别芯片101可以通过液态或固态胶固定在凹槽结构内,以胶水为例,所述凹槽结构的深度可以为指纹识别芯片101的厚度和胶水的厚度的总和。但本申请实施例不限于此,例如,在其他实施例中,凹槽结构的深度可以大于或者小于指纹识别芯片101的厚度和胶水的厚度的总和。所述胶水可以实现为例如水胶。所述水胶可以包括单组份或者多组份。在其具体实现中,可以基于水胶的物理过程和/或化学过程将所述指纹识别芯片101的下表面和所述凹槽结构内的上表面进行固定连接。The
应理解,图1所示的芯片封装结构中的第一焊盘106的数量和位置仅为示例而非限定。It should be understood that the number and positions of the
例如,所述指纹识别芯片101的上表面可以包括多个第一焊盘106,第一焊盘106可以均匀地或者不均匀地分布在指纹识别芯片101的上表面。相应的,所述芯片封装结构100可以包括多个连接端107,所述导电层104可以被配置为将所述多个第一焊盘106中的一个或多个第一焊盘106与所述多个连接端107中的一个或多个连接端107进行电连接。For example, the upper surface of the
又例如,图1所示的第一焊盘106直接从指纹识别芯片101表面凸出与导电层104相同的厚度,且位于导电层104的边缘,并且第一焊盘106的侧面是暴露在外。但本申请实施例不限于此。例如,在其他可替代实施例中,所述第一焊盘106设置在所述指纹识别芯片101上,并且所述指纹识别芯片101的上表面是平整表面。For another example, the
以所述指纹识别芯片101设置有多个第一焊盘106,且所述芯片封装结 构100设置有多个连接端107为例。在一种实现中,所述导电层104可以在指纹识别芯片101的正上方可以形成有开口,以使得导电层104可以被划分为多个导电单元,其中,一个或多个第一焊盘106通过一个或多个导电单元连接至一个或多个连接端107,由此,即可确保将多个第一焊盘106分别与所述芯片封装结构100的多个连接端107进行电连接。在另一种实现中,所述导电层104可以设计为重布线层(Redistribution Layer,RDL),由此,不仅能够实现将所述指纹识别芯片101上的第一焊盘106重新分配到所述基板的边缘位置,也不会改变所述指纹识别芯片101的第一焊盘106的布局结构。相应的,在所述指纹识别芯片101包括多个芯片时,每个芯片的所述第一焊盘可以通过各自的导电单元与所述芯片封装结构100的连接端107进行电连接。Take the
图2是集成有保护层105和绝缘层103的芯片封装结构100的示意性框图。如图2所示,所述芯片封装结构101还可以包括保护层105,所述保护层105形成于导电层104的上表面,用于避免搬运安装过程中所述指纹识别芯片101发生损坏,采用本申请实施例的芯片封装结构100进行屏下指纹识别时,手指按压显示屏,由所述显示屏发出的并经由手指反射而形成的反射光需要穿过所述保护层105才能到达指纹识别芯片101,即所述指纹识别芯片101实际接收的光信号是经由手指反射的并且穿过所述保护层105的光信号。因此,为了避免经由手指反射的光信号在穿过所述保护层105时产生过多的消耗,本申请实施例中,针对所述保护层105,还可以在指纹识别芯片101的正上方形成开口,以便经过手指反射而形成的反射光穿过保护层105的开口并被指纹识别芯片101接收。FIG. 2 is a schematic block diagram of a
由于保护层可以使用任何保护类型材料,例如,绝缘材料。为了保证所述芯片封装结构100的连接端107能够实现与外界进行电连接,本申请实施例中,还可以在所述保护层105还可以形成有开窗,所述连接端107可以设置于所述导电层104上的开窗内。Since the protective layer can use any protective type material, for example, an insulating material. In order to ensure that the
请参见图2,所述芯片封装结构101还可以包括绝缘层103,所述绝缘层103设置在基板102和导电层104之间,所述绝缘层103能够降低基板102对导电层104中电信号的影响,比如,指纹识别芯片101和连接端107进行信号交互时,避免导电层104电流流向基板102,保证了指纹识别芯片101和连接端107在进行信号传输时的可靠度。相应的,为了避免经由手指反射 的光信号在穿过所述绝缘层103时产生过多的消耗,本申请实施例中,类似保护层105,针对绝缘层103,在所述指纹识别芯片101的正上方也可以形成开口,以便经过手指反射而形成的反射光穿过绝缘层103的开口并被指纹识别芯片101接收。Referring to FIG. 2, the
应当理解,图2所示的结构仅为示例,本申请实施例不限于此。It should be understood that the structure shown in FIG. 2 is only an example, and the embodiment of the present application is not limited thereto.
例如,在其他可替代实施例中,所述芯片封装结构101可以不包括绝缘层103。For example, in other alternative embodiments, the
又例如,图2所示的导电层104与指纹识别芯片101的第一焊盘的连接方式仅为示例,本申请实施例不限于此。For another example, the connection manner between the
例如,在其他可替代实施例中,所述第一焊盘106设置在所述指纹识别芯片101上,并且所述指纹识别芯片101的上表面是平整表面。这种情况下,绝缘层103可以在第一焊盘106的相对位置留有导电孔,其中,导电层104可以通过绝缘层103的导电孔与所述指纹识别芯片101上的第一焊盘106连接。For example, in other alternative embodiments, the
图3是集成有滤光片109的芯片封装结构100的示意性框图。如图3所示,所述芯片封装结构100还可以包括滤光片109,所述滤光片109与指纹识别芯片101的上表面贴合,用于来减少指纹感应中的不期望的背景光,以提高指纹识别芯片101对接收到的光的光学感应。所述滤光片109具体可以用于过滤掉环境光波长,例如,近红外光和部分的红光等。例如,人类手指吸收波长低于~580nm的光的能量中的大部分,如果一个或多个光学过滤器或光学过滤涂层可以设计为过滤波长从580nm至红外的光,则可以大大减少环境光对指纹感应中的光学检测的影响。FIG. 3 is a schematic block diagram of a
所述滤光片109具体地可以包括一个或多个光学过滤器,该一个或多个光学过滤器可以配置为例如带通过滤器,以允许OLED像素发射的光的传输,同时阻挡太阳光中的红外光等其他光组分。当在室外使用该设备时,这种光学过滤可以有效地减少由太阳光造成的背景光。该一个或多个光学过滤器可以实现为例如光学过滤涂层,该光学过滤涂层形成在一个或多个连续界面上,或可以实现为一个或多个离散的界面上。应理解,所述滤光片109可以制作在任何光学部件的表面上,或者沿着到经由手指反射形成的反射光至指纹识别芯片101的光学路径上。本申请实施例仅以所述滤光片109的上表面上为例,但本申请不限于此。例如,所述滤光片109可以贴合在包括显示 器底面、棱镜表面或所述指纹识别芯片101的内部等。The
应理解,图2所示的保护层105和绝缘层103以及图3所示的滤光片109的数量、位置以及具体结构仅为示例性描述,本申请实施例对此不做限定。例如,可以根据所述指纹识别芯片101的实际需求确定是否添加一个或者多个所述保护层105、绝缘层103以及所述滤光片109。It should be understood that the number, position, and specific structure of the
还应理解,图1至图3所示的连接端107位于芯片封装结构100的上表面仅为示例,本申请实施例不限于此。例如,所述连接端107还可以设于所述芯片封装结构的下表面。下面结合扇出式(Fan-out)先进封装工艺和扇入式(Fan-in)先进封装工艺对本申请实施例的连接端的设置方式进行简单的说明,本申请实施例中,所谓的Fan-out就是将所述指纹识别芯片101的引脚(即所述第一焊盘106)通过硅通孔(Through Silicon Via,TSV)牵引至过孔焊盘,具体地,可以通过导电层104将所述第一焊盘106牵引出一段距离,并在所述第一焊盘106的牵引位置打一个TSV,这个TSV可以将所述导电层104电连接到所述基板102的下表面。由此,实现将所述指纹识别芯片101上表面的第一焊盘106牵引至所述基板102的下表面,并形成连接端107。所谓的Fan-in就是将所述指纹识别芯片101的引脚(即所述第一焊盘106)通过硅通孔(Through Silicon Via,TSV)牵引至所述指纹识别芯片101的边缘位置,具体地,可以直接在所述第一焊盘106的位置打一个TSV,这个TSV可以将所述第一焊盘106电连接到所述指纹识别芯片101的下表面。由此,实现将所述指纹识别芯片101上表面的第一焊盘106牵引至所述指纹识别芯片101的下表面,并形成连接端107。It should also be understood that the
图4是连接端107置于芯片封装结构100的下表面(即Fan-out先进封装工艺)的示意性结构图。如图4所示,导电层104和基板102的下表面之间形成有硅通孔(Through Silicon Via,TSV),连接端107设置于基板102的下表面的TSV孔口处,导电层104通过TSV电连接至连接端107。在一些实现中,如图4所示,所述硅通孔中可以设置有导电材料,所述导电层104可以通过所述硅通孔中的导电材料电连接至所述TSV孔口处的第三焊盘110,所述第三焊盘110上可以生成类似锡球形式的连接端107。FIG. 4 is a schematic structural diagram of the
应理解,本申请实施例旨在说明导电层104可以通过硅通孔电连接至设置在基板102下表面的连接端107,图4所示的硅通孔的数量、位置以及具体实现仅为示例而非限定。例如,所述指纹识别芯片101的上表面可以包括 多个第一焊盘106,相应的,所述芯片封装结构100(即所述基板102的下表面)可以包括多个连接端107,所述硅通孔可以被配置为将所述多个第一焊盘106中的一个或多个第一焊盘106与所述多个连接端107中的一个或多个连接端107进行电连接。It should be understood that the embodiments of the present application are intended to illustrate that the
以所述芯片封装结构100设置有多个连接端107为例,在一种实现中,所述芯片封装结构设置有多个TSV,使得一个或多个第一焊盘106能够通过一个TSV与一个或多个连接端107进行电连接。在另一种实现中,所述芯片封装结构可以将TSV设置在每一个焊盘106背部,并且所述硅通孔中的导电材料可以设计为RDL,由此,不仅能够实现将所述指纹识别芯片101上的第一焊盘106重新分配到所述基板102的下表面上,也不会改变所述指纹识别芯片101上的第一焊盘106的布局结构。Taking the
还应理解,图4所示的Fan-out先进封装工艺仅为将所述指纹识别芯片101上的第一焊盘106牵引至所述基板102的下表面的示例,但本申请实施例并不限于这种封装工艺以及图4所示的具体结构。It should also be understood that the Fan-out advanced packaging process shown in FIG. 4 is only an example of pulling the
图5是集成有镜头201和支架202的芯片封装结构100的示意性框图。如图5所示,所述芯片封装结构100还可以包括支架202和镜头201;镜头201通过支架202固定在指纹识别芯片101的上方,且镜头201与指纹识别芯片101对准设置。FIG. 5 is a schematic block diagram of a
本申请实施例中,镜头201和支架202可以一体设置也可以分离设置。所谓一体设置就是镜头201和支架202是一个整体。比如,镜头201通过不可拆卸的方式固定在所述支架202上。所谓分离设置就是镜头201和支架202通过可拆卸的方式固定在所述支架202上。一体设置可以使加工和组装变得简单,优化模组良率。而分离设置可以使原本受多叠层影响的像距公差,只受镜头本身的形变量和公差值影响,进一步减小了像距公差,优化了光学指纹成像的清晰度,提升识别速度和使用体验,同时也降低了镜头201的更换难度,能够有效降低成本。In the embodiment of the present application, the
所述镜头201可以是任何用于进行光路调制的器件或元件,例如1P或者多P镜头的球面或者非球面镜头。具体地也可以是透射型或反射型透镜。所述镜头201用于实现期望的高成像分辨率。在实践中,所述芯片封装结构100应用于屏下指纹识别时,所述镜头201将接收到的经由手指反射形成的反射光,并将所述反射光反射到所述指纹识别芯片101上。以所述镜头201 为透镜为例,所述镜头201的有效孔径可以被设计为大于OLED显示层中的孔的孔径,后者允许光透射穿过OLED显示层来进行光学指纹感应。这种设计可以减少OLED显示模块中的布线结构和其他散射物体的所造成不期望的影响。The
所述支架202可以是用于支撑或固定所述镜头201的器件或元件,例如,所述支架202可以是用于将所述镜头201固定在所述芯片封装结构100所属的终端设备的其他元件或器件上,例如,所述芯片封装结构100安装到可以进行屏下指纹识别的手机时,该支架202可以与所述手机的部分器件或元件固定连接,例如,所述支架202可以固定到所述手机的中框、后盖、主板以及电池等易拆卸的器件。甚至,该支架202还可以固定到所述手机的显示屏的下表面。The
图6是本申请的另一个实施例的芯片封装结构300(即采用Fan-in先进封装工艺将连接端307设在指纹识别芯片301的下表面)的示意性结构图。如图6所示,所述芯片封装结构300包括指纹识别芯片301,指纹识别芯片301的上表面设置有第一焊盘306,指纹识别芯片301的上表面和下表面之间设置有TSV,指纹识别芯片301的下表面设置有导电层304,第一焊盘306通过TSV电连接至导电层304的一端,导电层304的另一端与芯片封装结构300的用于与外界电连接的连接端307电连接。在一些实现中,图6所示的硅通孔中可以设置有导电材料,所述第一焊盘306可以通过所述硅通孔中的导电材料电连接至所述TSV孔口处的第三焊盘310,所述第三焊盘310上可以生成类似锡球形式的连接端307。FIG. 6 is a schematic structural diagram of a
本申请实施例中,通过TSV将指纹识别芯片301的第一焊盘306牵引至所述指纹识别相片301的下表面,使得封装后的芯片的上表面可以为平整表面,使得搭载镜头的支架可以直接粘贴在平整表面上,有效减去了基板、芯片、贴合胶对像距公差的影响,达到了优化光学指纹成像的清晰度、提升识别速度和使用体验的目的。并进一步地,通过导电层304将所述指纹识别芯片301的下表面的TSV孔口处通过导电层304牵引至所述指纹识别芯片201的边缘位置,到达封装所述指纹识别芯片301的目的。In the embodiment of the present application, the
需要说明的是,本申请实施例中,所述第一焊盘306可以理解为在指纹识别芯片301在进入封装工厂之前已经在其一表面制备的焊盘(Pad),例如,如图1所示的第一焊盘106,所述第一焊盘306通过TSV电连接至芯片封装 结构300的用于与外界电连接的连接端307。在本申请实施例中,指纹识别芯片301的上表面即为进入封装工厂之前表面已制备有焊盘的一面,与所述指纹识别芯片301相对的一面即为指纹识别芯片301的下表面,所述指纹识别芯片301的下表面在进入封装工厂之前未制备连接端307。换句话说,所述指纹识别芯片301的连接端307是所述指纹识别芯片301进入封装工厂之后制备的。具体的,可以首先采用TSV工艺使所述第一焊盘306从所述指纹识别芯片301的下表面露出,然后在所述指纹识别芯片301的下表面露出的位置生成所述连接端307,或者也可以将所述第一焊盘306引导至所述指纹识别芯片301的下表面的特定位置,在所述特定位置生成所述连接端307,本申请实施例并不特别限定所述连接端307在指纹识别芯片301的下表面上的具体位置,只要将所述指纹识别芯片301的上表面上的第一焊盘306电连接至所述指纹识别芯片301的下表面都落入本申请实施例的保护范围。It should be noted that, in the embodiment of the present application, the
请参见图6,所述指纹识别芯片301的下表面可以为倒梯形或多台阶倒梯形,连接端307可以设置在倒梯形或多台阶倒梯形的下表面。但本身实施例不限于此。例如,在其他可替代实施例中,所述所述指纹识别芯片301的下表面还可以呈现为多个台阶,或者凸台,还可以为多边形的一部分或者圆形的一部分等等。Referring to FIG. 6, the lower surface of the
应当理解,图6所示的硅通孔的数量、位置以及具体实现仅为示例而非限定。例如,所述指纹识别芯片301的上表面可以包括多个第一焊盘306,第一焊盘306可以均匀地或者不均匀地分布在指纹识别芯片301的上表面。相应的,所述芯片封装结构300(即所述指纹识别芯片301的下表面)可以包括多个连接端307,所述硅通孔可以被配置为将所述多个第一焊盘306中的一个或多个第一焊盘306与所述多个连接端307中的一个或多个连接端307进行电连接。又例如,本申请实施例中的连接端可以是如图6所示在第三焊盘310上生成的锡球,也可以直接为所述第三焊盘310。本申请实施例不做具体限定。It should be understood that the number, locations, and specific implementations of the TSVs shown in FIG. 6 are merely examples and are not limiting. For example, the upper surface of the
以所述指纹识别芯片301设置有多个第一焊盘306,且所述芯片封装结构300设置有多个连接端307为例。在一种实现中,所述指纹识别芯片301的上表面和下表面之间设置有多个TSV,所述导电层304形成有开口,使得所述导电层304划分为多个导电单元,一个或多个所述第一焊盘306通过一个或多个所述TSV和一个或多个所述导电单元电连接至一个或多个所述连 接端307,由此,即可确保将多个第一焊盘306分别与多个连接端307进行电连接。Take the
还应理解,图6所示的Fan-in先进封装工艺仅为将所述指纹识别芯片101上的第一焊盘106牵引至所述指纹识别芯片101的下表面的示例,但本申请实施例并不限于这种封装工艺以及图6所示的具体结构。It should also be understood that the Fan-in advanced packaging process shown in FIG. 6 is only an example of pulling the
图7是集成有滤光片309的芯片封装结构300的示意性框图。如图7所示,如图7所示,所述芯片封装结构300还可以包括滤光片309,所述滤光片309与指纹识别芯片301的上表面贴合。如图7所示,所述滤光片309与指纹识别芯片301的上表面通过胶水308贴合。图8是集成有镜头401和支架402的芯片封装结构300的示意性框图。如图8所示,所述镜头401固定在所述支架402上,所述支架贴合在所述滤光片309的上表面。FIG. 7 is a schematic block diagram of a
应当理解,图6至图8中所示的指纹识别芯片301、导电层304、第一焊盘306、第三焊盘310、连接端307、滤光片309镜头401和支架402可以分别参见图1至图5所示的指纹识别芯片101、导电层104、第一焊盘106、第三焊盘110、连接端107、滤光片109镜头201和支架202对应的说明,为避免重复,此处不再赘述。It should be understood that the
综上所述,本申请实施例的指纹识别芯片避免采用传统的打线方式进行封装,而是通过金属层和/或TSV将指纹识别芯片的第一焊盘牵引至所述芯片封装结构的边缘位置,使得封装后的芯片的上表面可以为平整表面,减小了像距公差。并进一步地将搭载镜头的支架集成到所述芯片封装结构,使原本受多叠层影响的像距公差,只受支架本身的形变量和公差值影响,从而减小了像距公差,极大优化了光学指纹成像的清晰度,提升识别速度和使用体验。In summary, the fingerprint identification chip in the embodiment of the present application avoids traditional wire bonding for packaging. Instead, the first pad of the fingerprint identification chip is pulled to the edge of the chip packaging structure through a metal layer and / or TSV. The position allows the upper surface of the packaged chip to be a flat surface, reducing the image distance tolerance. Furthermore, the lens mount is further integrated into the chip package structure, so that the image distance tolerance originally affected by multi-layers is only affected by the deformation and tolerance of the bracket itself, thereby reducing the image distance tolerance. Greatly optimized the clarity of optical fingerprint imaging, improving recognition speed and user experience.
上文结合图1至图8,详细描述了本申请的芯片封装结构的具体实施例,下文结合图9和图10,详细描述本申请的用于制备如图1至图5所示的芯片封装结构100以及制备如图6至图8所示的芯片封装结构300的方法。The specific embodiments of the chip packaging structure of the present application are described in detail above with reference to FIGS. 1 to 8, and the following is a detailed description of the chip packaging structure shown in FIG. 1 to FIG. 5 with reference to FIGS. 9 and 10. The
图9是本申请实施例的封装芯片的方法500的示意性流程图。所述方法500可以用于制备如图1至图5所示的芯片封装结构100。所述方法500包括以下部分或全部内容:FIG. 9 is a schematic flowchart of a
S510,在基板中形成凹槽结构。S510, a groove structure is formed in the substrate.
S520,将指纹识别芯片固定在凹槽结构内。S520. The fingerprint identification chip is fixed in the groove structure.
S530,采用镀膜工艺在基板的上方形成导电层,指纹识别芯片的第一焊盘通过导电层电连接至芯片封装结构的用于与外界电连接的连接端。S530, a conductive layer is formed on the substrate by a coating process, and the first pad of the fingerprint identification chip is electrically connected to the connection end of the chip packaging structure for electrical connection with the outside through the conductive layer.
在S510中,可以先将基本研磨至需要的尺寸(例如厚度),再通过蚀刻,激光,或者机钻孔等工艺加工出工艺所需的所述凹槽结构,例如所述凹槽结构的形状可以和所述指纹识别芯片的形状相似或者相同,又例如所述凹槽结构需要容纳或至少容纳所述指纹识别芯片和安装所述指纹识别芯片的材料(例如胶水),其中,所述基板可以指硅片、玻璃或者陶瓷等无机材料形成的元件或器件,所述指纹识别芯片可以通过研磨或切割等方式制成与所述凹槽结构相匹配的元件或器件。In S510, the basic structure can be first ground to a required size (such as thickness), and then the groove structure required by the process, such as the shape of the groove structure, can be processed by etching, laser, or machine drilling. It may be similar to or the same as the shape of the fingerprint identification chip, and for example, the groove structure needs to accommodate or at least accommodate the fingerprint identification chip and a material (such as glue) for mounting the fingerprint identification chip, wherein the substrate may be Refers to an element or device made of an inorganic material such as silicon wafer, glass, or ceramic. The fingerprint identification chip can be made into an element or device that matches the groove structure by grinding or cutting.
在S520中,可以用水胶或者固态胶等具有粘合性能的物质将所述指纹识别芯片固定在所述凹槽结构内。所述水胶可以包括单组份或者多组份。在其具体实现中,可以基于水胶的物理过程和/或化学过程将所述指纹识别芯片的下表面和所述凹槽结构内的上表面进行固定连接。在一些实现中,可以通过液态或固态胶将指纹识别芯片固定在凹槽结构内;其中,凹槽结构的深度为指纹识别芯片的厚度和胶水的厚度的总和。In S520, the fingerprint identification chip may be fixed in the groove structure by using a substance with adhesive properties such as water glue or solid glue. The hydrogel may include a single component or multiple components. In a specific implementation thereof, a lower surface of the fingerprint identification chip and an upper surface in the groove structure may be fixedly connected based on a physical process and / or a chemical process of a hydrogel. In some implementations, the fingerprint recognition chip can be fixed in the groove structure by liquid or solid glue; wherein the depth of the groove structure is the sum of the thickness of the fingerprint recognition chip and the thickness of the glue.
在S530中,所述导电层的加工工艺可以使用溅镀、电镀、蒸镀等金属镀膜工艺,其材料可使用铝、铜、镍、银、金等有良好导电性的任意金属。在一些实现中,所述导电层为微米级涂层In S530, the processing process of the conductive layer can use metal plating processes such as sputtering, electroplating, and evaporation, and the material can be any metal with good conductivity, such as aluminum, copper, nickel, silver, and gold. In some implementations, the conductive layer is a micro-scale coating
应理解,图9仅为本申请实施例的制备芯片封装结构的方法的示例,本申请实施例不限于此。It should be understood that FIG. 9 is only an example of a method for preparing a chip package structure in the embodiment of the present application, and the embodiment of the present application is not limited thereto.
例如,为了降低降低基板对导电层中的电信号的影响,图9所示的方法还可以包括:在基板的上方形成导电层之前,采用镀膜工艺在基板的上表面形成绝缘层,以便在绝缘层的上表面形成导电层。其中,所述绝缘层的镀膜工艺可以使用喷涂、旋涂、贴膜、丝印等镀有机膜工艺,所述绝缘层的材料可使用任何绝缘类材料。所述绝缘层可为微米级涂层。For example, in order to reduce the influence of the substrate on the electrical signals in the conductive layer, the method shown in FIG. 9 may further include: before forming the conductive layer over the substrate, forming an insulating layer on the upper surface of the substrate by a plating process so as to insulate the substrate. The upper surface of the layer forms a conductive layer. Wherein, the coating process of the insulating layer may use organic coating processes such as spray coating, spin coating, film coating, and silk screen printing, and the insulating layer may be made of any insulating material. The insulating layer may be a micro-scale coating.
又例如,为了避免搬运安装过程中所述指纹识别芯片发生损坏,图9所示的方法还可以包括:采用镀膜工艺在导电层的上表面形成保护层。其中,所述保护层的镀膜工艺可以使用可以使用喷涂、旋涂、贴膜、丝印等镀有机膜工艺,所述保护层的材料可使用任何绝保护材料。所述保护层可为微米级涂层。在一种实现中,为了实现所述连接端位于所述导电层的上表面的设计,可以在保护层形成开窗,并在导电层上的开窗内生成连接端。具体地,可以 是所述基板上的指定位置形成所述开窗,并通过植球、印锡、镀锡、镀铜柱等工艺做在开窗处的所述导电层的上表面生成所述连接端,以用于后续模组组装使用。在另一种实现中,为了实现所述连接端位于所述基板的下表面,可以采用TSV工艺在导电层和基板的下表面之间设置TSV;并在基板的下表面的TSV孔口处,生成连接端。其中,所述TSV工艺可以包括但不限于蚀刻、激光、机钻孔等工艺。For another example, in order to avoid damage to the fingerprint identification chip during the transportation and installation process, the method shown in FIG. 9 may further include: forming a protective layer on the upper surface of the conductive layer by using a plating process. The coating process of the protective layer may use an organic film plating process such as spray coating, spin coating, film coating, and silk screen printing. The material of the protective layer may be any insulating material. The protective layer may be a micro-scale coating. In one implementation, in order to realize the design that the connection end is located on the upper surface of the conductive layer, a window may be formed in the protective layer, and the connection end may be generated in the window on the conductive layer. Specifically, the window opening may be formed at a specified position on the substrate, and the upper surface of the conductive layer at the window opening is generated by using a process such as ball implantation, tin printing, tin plating, and copper plating pillars to generate the window. Connection end for subsequent module assembly. In another implementation, in order to realize that the connection end is located on the lower surface of the substrate, a TSV process may be used to set a TSV between the conductive layer and the lower surface of the substrate; and at the TSV aperture of the lower surface of the substrate, Generate the connection end. The TSV process may include, but is not limited to, processes such as etching, laser, and machine drilling.
又例如,为了避免经由手指反射的光信号在穿过所述保护层105时产生过多的消耗,提高所述指纹识别芯片的采光效果,本申请实施例中,图9所示的方法还可以包括:去除指纹识别芯片的正上方的绝缘层,以形成开口,以便经过手指反射而形成的反射光穿过绝缘层的开口并被指纹识别芯片接收。类似地,图9所示的方法还可以包括:去除指纹识别芯片的正上方的保护层,以形成开口,以便经过手指反射而形成的反射光穿过保护层的开口并被指纹识别芯片接收。For another example, in order to avoid excessive consumption of the optical signal reflected by a finger when passing through the
又例如,为了减少所述指纹识别芯片在指纹感应中接收到的不期望的背景光,以提高指纹识别芯片对接收到的光的光学感应。例如,图9所示的方法还可以包括:在指纹识别芯片的上表面贴合滤光片。所述滤光片可使用通过镀膜来滤掉指定波长光线的光学玻璃或者蓝宝石片等透光材料。For another example, in order to reduce the undesired background light received by the fingerprint recognition chip during fingerprint sensing, to improve the optical sensing of the received light by the fingerprint recognition chip. For example, the method shown in FIG. 9 may further include: attaching a filter on an upper surface of the fingerprint identification chip. The optical filter may be a light-transmitting material such as optical glass or a sapphire chip that filters out light of a specified wavelength by coating.
又例如,图9所示的方法还可以包括:在基板的上方,设置支架和镜头;其中,镜头通过支架固定在指纹识别芯片的上方,且镜头与指纹识别芯片对准设置。在具体实现中,与所述支架贴合的接触面,可以是RDL(例如导电层)的上表面,也可以是钝化层(例如保护层)保护层的上表面,也可以是在硅材料表面(例如基板)的上表面,也可以是滤光片的上表面。本申请实施例对此不做具体限定。所述镜头和所述支架可以一体设置也可以分离设置。一体设置可以使加工和组装变得简单,优化模组良率。而分离设置可以使原本受多叠层影响的像距公差,只受镜头本身的形变量和公差值影响,进一步减小了像距公差,优化了光学指纹成像的清晰度,提升识别速度和使用体验。同时也降低了镜头的更换难度,能够有效降低成本。所述镜头可以是1P或者多P镜头的球面或者非球面镜头。设置支架和镜头的制备工艺可选用注塑、光刻或者晶圆级封装(Wafer Level Optics,WLO)工艺等。As another example, the method shown in FIG. 9 may further include: setting a bracket and a lens above the substrate; wherein the lens is fixed above the fingerprint recognition chip through the bracket, and the lens is aligned with the fingerprint recognition chip. In a specific implementation, the contact surface bonded to the bracket may be an upper surface of an RDL (for example, a conductive layer), or an upper surface of a passivation layer (for example, a protective layer) and a protective layer, or may be a silicon material The upper surface of the surface (for example, the substrate) may be the upper surface of the filter. This embodiment of the present application does not specifically limit this. The lens and the bracket may be provided integrally or separately. The integrated setting can simplify processing and assembly, and optimize module yield. The separation setting can make the image distance tolerance originally affected by multi-layers affected only by the deformation and tolerance value of the lens itself, further reducing the image distance tolerance, optimizing the clarity of optical fingerprint imaging, improving the recognition speed and Use experience. It also reduces the difficulty of lens replacement, which can effectively reduce costs. The lens may be a spherical or aspherical lens of a 1P or multiple P lens. The preparation process for setting the bracket and the lens may be injection molding, photolithography, or wafer-level packaging (WLO) processes.
此外,所述指纹识别芯片设置有多个第一焊盘,芯片封装结构需要设置有多个连接端时,图9所示的方法还可以包括:去除指纹识别芯片的正上方 的导电层,以将导电层划分为多个导电单元,每一个或多个第一焊盘通过一个或多个导电单元连接至一个或多个连接端。In addition, when the fingerprint identification chip is provided with a plurality of first pads, and the chip packaging structure needs to be provided with multiple connection terminals, the method shown in FIG. 9 may further include: removing the conductive layer directly above the fingerprint identification chip to The conductive layer is divided into a plurality of conductive units, and each one or more first pads are connected to one or more connection terminals through one or more conductive units.
图10是本申请实施例的封装芯片的方法600的示意性流程图。如图10所示,所述方法600包括全部或部分以下内容:FIG. 10 is a schematic flowchart of a
S610,采用TSV工艺在指纹识别芯片的上表面和下表面之间设置TSV;S610, a TSV process is used to set a TSV between the upper and lower surfaces of the fingerprint recognition chip;
S620,采用镀膜工艺在指纹识别芯片的下表面形成导电层,指纹识别芯片的第一焊盘通过TSV电连接至导电层的一端;S620, a conductive layer is formed on the lower surface of the fingerprint identification chip by a coating process, and the first pad of the fingerprint identification chip is electrically connected to one end of the conductive layer through TSV;
S630,在导电层的另一端,生成用于与外界电连接的连接端。S630. At the other end of the conductive layer, a connection terminal for generating electrical connection with the outside is generated.
应理解,图10仅为本申请实施例的制备芯片封装结构的方法的示例,本申请实施例不限于此。It should be understood that FIG. 10 is merely an example of a method for preparing a chip package structure in the embodiment of the present application, and the embodiment of the present application is not limited thereto.
例如,为了减少所述指纹识别芯片在指纹感应中接收到的不期望的背景光,以提高指纹识别芯片对接收到的光的光学感应。例如,图10所示的方法还可以包括:在指纹识别芯片的上表面贴合滤光片。所述滤光片可使用通过镀膜来滤掉指定波长光线的光学玻璃或者蓝宝石片等透光材料。For example, in order to reduce the undesired background light received by the fingerprint recognition chip during fingerprint sensing, to improve the optical sensing of the received light by the fingerprint recognition chip. For example, the method shown in FIG. 10 may further include: attaching a filter on an upper surface of the fingerprint identification chip. The optical filter may be a light-transmitting material such as optical glass or a sapphire chip that filters out light of a specified wavelength by coating.
又例如,图10所示的方法还可以包括:在基板的上方,设置支架和镜头;其中,镜头通过支架固定在指纹识别芯片的上方,且镜头与指纹识别芯片对准设置。具体地,可以使用硅通孔的作业方式将所述指纹识别芯片的第一焊盘引向所述指纹识别芯片的下表面,最后在滤光片表面粘贴光路支架镜头。所述镜头和所述支架可以一体设置也可以分离设置。一体设置可以使加工和组装变得简单,优化模组良率。而分离设置可以使原本受多叠层影响的像距公差,只受镜头本身的形变量和公差值影响,进一步减小了像距公差,优化了光学指纹成像的清晰度,提升识别速度和使用体验。同时也降低了镜头201的更换难度,能够有效降低成本。所述镜头可以是1P或者多P镜头的球面或者非球面镜头。设置支架和镜头的工艺可选用注塑、光刻或者晶圆级封装(Wafer Level Optics,WLO)工艺。As another example, the method shown in FIG. 10 may further include: setting a bracket and a lens above the substrate; wherein the lens is fixed above the fingerprint recognition chip through the bracket, and the lens is aligned with the fingerprint recognition chip. Specifically, the first pad of the fingerprint identification chip may be guided to the lower surface of the fingerprint identification chip by using a through-silicon via operation method, and an optical path bracket lens may be pasted on the surface of the filter. The lens and the bracket may be provided integrally or separately. The integrated setting can simplify processing and assembly, and optimize module yield. The separation setting can make the image distance tolerance originally affected by multi-layers affected only by the deformation and tolerance value of the lens itself, further reducing the image distance tolerance, optimizing the clarity of optical fingerprint imaging, improving the recognition speed and Use experience. At the same time, the replacement difficulty of the
此外,所述指纹识别芯片设置有多个第一焊盘,芯片封装结构需要设置有多个连接端时,图10所示的方法还可以包括:在指纹识别芯片的上表面和下表面之间设置多个TSV,并通过在导电层形成开孔,将导电层划分为多个导电单元,每个或多个第一焊盘通过一个或多个TSV和一个或多个导电单元电连接至一个或多个连接端。在一些实现中,指纹识别芯片的下表面为倒梯形或多台阶倒梯形,连接端设置于倒梯形或多台阶倒梯形的下表面。In addition, when the fingerprint identification chip is provided with a plurality of first pads and the chip packaging structure needs to be provided with multiple connection terminals, the method shown in FIG. 10 may further include: between the upper surface and the lower surface of the fingerprint identification chip. Set multiple TSVs and divide the conductive layer into multiple conductive units by forming openings in the conductive layer. Each or more first pads are electrically connected to one through one or more TSVs and one or more conductive units. Or multiple connections. In some implementations, the lower surface of the fingerprint recognition chip is an inverted trapezoid or a multi-step inverted trapezoid, and the connection end is disposed on the lower surface of the inverted trapezoid or a multi-step inverted trapezoid.
应理解,方法实施例与芯片封装结构地实施例可以相互对应,类似的描述可以参照芯片封装结构的具体实施例。为了简洁,在此不再赘述。It should be understood that the method embodiment and the chip package structure embodiment may correspond to each other, and similar descriptions may refer to specific embodiments of the chip package structure. For brevity, I will not repeat them here.
还应理解,上述列举的芯片封装方法的各实施例,可以通过机器人或者数控加工方式来执行,用于执行芯片封装方法的设备软件或工艺可以通过执行保存在存储器中的计算机程序代码来执行上述芯片封装方法。It should also be understood that the embodiments of the chip packaging method listed above can be executed by robots or numerically controlled machining methods, and the device software or process for performing the chip packaging method can be executed by executing computer program code stored in a memory Chip packaging method.
本申请实施例提供了一种终端设备,图11为本申请实施例的终端设备700的侧视图,如图11所示,该终端设备可以包括芯片封装结构701和屏幕702,所述芯片封装结构701设置于屏幕702的下方,所述芯片封装结构701可以为上文所述的芯片封装结构100或者300,或根据上文所述的芯片封装方法500或方法600制备的芯片封装结构。An embodiment of the present application provides a terminal device. FIG. 11 is a side view of the
在一些实现中,所述终端设备700可以为手机、平板电脑、电子书等终端设备。In some implementations, the
应理解,在本申请的各种实施例中,上述各过程的序号的大小并不意味着执行顺序的先后,各过程的执行顺序应以其功能和内在逻辑确定,而不应对本申请实施例的实施过程构成任何限定。It should be understood that, in the various embodiments of the present application, the size of the sequence numbers of the above processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not deal with the embodiments of the present application. The implementation process constitutes any limitation.
本领域普通技术人员可以意识到,结合本文中所公开的实施例描述的各示例的单元及算法步骤,能够以电子硬件、或者计算机软件和电子硬件的结合来实现。这些功能究竟以硬件还是软件方式来执行,取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每个特定的应用来使用不同方法来实现所描述的功能,但是这种实现不应认为超出本申请的范围。Those of ordinary skill in the art may realize that the units and algorithm steps of each example described in connection with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this application.
所属领域的技术人员可以清楚地了解到,为描述的方便和简洁,上述描述的系统、装置和单元的具体工作过程,可以参考前述方法实施例中的对应过程,在此不再赘述。Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices, and units described above can refer to the corresponding processes in the foregoing method embodiments, and are not repeated here.
在本申请所提供的几个实施例中,应该理解到,所揭露的系统、装置和方法,可以通过其它的方式实现。例如,以上所描述的装置实施例仅仅是示意性的,例如,所述单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成到另一个系统,或一些特征可以忽略,或不执行。另一点,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口,装置或单元的间接耦合或通信连接,可以是电性,机械或其它的形式。In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods may be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the unit is only a logical function division. In actual implementation, there may be another division manner. For example, multiple units or components may be combined or Can be integrated into another system, or some features can be ignored or not implemented. In addition, the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, which may be electrical, mechanical or other forms.
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的,作 为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the objective of the solution of this embodiment.
另外,在本申请各个实施例中的各功能单元可以集成在一个处理单元中,也可以是各个单元单独物理存在,也可以两个或两个以上单元集成在一个单元中。In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each of the units may exist separately physically, or two or more units may be integrated into one unit.
以上所述,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above is only a specific implementation of this application, but the scope of protection of this application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in this application. It should be covered by the protection scope of this application. Therefore, the protection scope of this application shall be subject to the protection scope of the claims.
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| CN201880001314.XA CN109075141B (en) | 2018-07-26 | 2018-07-26 | Chip packaging structure, method and terminal equipment |
| PCT/CN2018/097273 WO2020019263A1 (en) | 2018-07-26 | 2018-07-26 | Chip packaging structure, method and terminal device |
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| PCT/CN2018/097273 WO2020019263A1 (en) | 2018-07-26 | 2018-07-26 | Chip packaging structure, method and terminal device |
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| WO2020019263A1 true WO2020019263A1 (en) | 2020-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2018/097273 Ceased WO2020019263A1 (en) | 2018-07-26 | 2018-07-26 | Chip packaging structure, method and terminal device |
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| Country | Link |
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| CN (1) | CN109075141B (en) |
| WO (1) | WO2020019263A1 (en) |
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| EP3696716A4 (en) * | 2018-12-29 | 2020-10-21 | Shenzhen Goodix Technology Co., Ltd. | FINGERPRINT IDENTIFICATION DEVICE AND ELECTRONIC DEVICE |
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| US11917763B2 (en) | 2018-12-13 | 2024-02-27 | Shenzhen GOODIX Technology Co., Ltd. | Fingerprint identification apparatus and electronic device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11917763B2 (en) | 2018-12-13 | 2024-02-27 | Shenzhen GOODIX Technology Co., Ltd. | Fingerprint identification apparatus and electronic device |
| EP3696716A4 (en) * | 2018-12-29 | 2020-10-21 | Shenzhen Goodix Technology Co., Ltd. | FINGERPRINT IDENTIFICATION DEVICE AND ELECTRONIC DEVICE |
| EP3699809A4 (en) * | 2018-12-29 | 2020-11-04 | Shenzhen Goodix Technology Co., Ltd. | Fingerprint identification device and electronic device |
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| CN111611916B (en) * | 2020-05-20 | 2023-09-22 | 上海思立微电子科技有限公司 | Thin optical fingerprint chip module and production method thereof, electronic equipment |
| CN112903176A (en) * | 2021-03-30 | 2021-06-04 | 明晶芯晟(成都)科技有限责任公司 | Array type pressure measuring device based on packaging substrate |
| CN115458512A (en) * | 2022-10-12 | 2022-12-09 | 长电科技(滁州)有限公司 | Packaging structure and packaging method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109075141A (en) | 2018-12-21 |
| CN109075141B (en) | 2020-02-07 |
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