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WO2020040468A1 - Appareil et procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique - Google Patents

Appareil et procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique Download PDF

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Publication number
WO2020040468A1
WO2020040468A1 PCT/KR2019/010229 KR2019010229W WO2020040468A1 WO 2020040468 A1 WO2020040468 A1 WO 2020040468A1 KR 2019010229 W KR2019010229 W KR 2019010229W WO 2020040468 A1 WO2020040468 A1 WO 2020040468A1
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WIPO (PCT)
Prior art keywords
image
mixed color
lens
light emitting
organic light
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Ceased
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PCT/KR2019/010229
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English (en)
Korean (ko)
Inventor
김동석
김도헌
황인욱
이준수
지현구
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K Mac Inc
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K Mac Inc
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Priority to CN201980029314.5A priority Critical patent/CN112041999A/zh
Publication of WO2020040468A1 publication Critical patent/WO2020040468A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/70—Testing, e.g. accelerated lifetime tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0628—Organic LED [OLED]

Definitions

  • the present invention relates to a mixed color failure detection device and a detection method of the organic light emitting device for effectively detecting the color abnormality such as the mixed color phenomenon caused by the mask failure in the process of depositing the organic light emitting device.
  • OLEDs are self-luminous organic materials that emit light by themselves using electroluminescent phenomena that emit light when a current flows through a fluorescent organic compound.
  • the organic light emitting diode can be driven at low voltage, can be made thin, and has a wide viewing angle and fast response speed.
  • Organic light emitting devices are classified into three colors (Red, Green, Blue) independent pixel method, color conversion method (CCM), color filter method, etc., depending on the color implementation method. Accordingly, the OLED may be classified into a low molecular OLED and a polymer OLED, and may be classified into a passive matrix (PM) and an active matrix (AM) according to a driving method.
  • PM passive matrix
  • AM active matrix
  • a mask In the process of manufacturing a three-color independent pixel type organic light emitting device, a mask is generally used to ensure that organic materials of R, G, and B are correctly deposited at predetermined predetermined positions. However, in this process, if the position of the mask is misaligned or there is a defect in the mask itself, a color mix phenomenon occurs while other colors are buried in the original color position.
  • Korean Patent Publication No. 2008-0002024 shadow mask and manufacturing method of the organic electroluminescent device using the same", 2008.01.04, hereinafter 'prior literature'
  • a mask structure is disclosed that improves the reduction.
  • the incidence of mixed color development can be reduced by using the mask of the improved structure according to the prior art, it is difficult to completely exclude the occurrence of the mixed color phenomenon. Therefore, even if the manufacturing process is improved, it is necessary to detect the color mixing defect of the manufactured organic light emitting display.
  • Conventional detectors for detecting mixed color defects are obtained by acquiring an image from the front of the organic light emitting device, and checking the presence or absence of color abnormality by determining and sampling several measurement points in one cell.
  • an object of the present invention is to detect a mixed color defect of the organic light emitting device and a detection method that can effectively detect the mixed color defect at various viewing angles In providing.
  • Another object of the present invention is to provide an apparatus and a method for detecting a mixed color defect of an organic light emitting device, which enables to perform an inspection quickly and effectively on the entire region of a cell to be inspected.
  • the apparatus 100 for detecting a color failure of an organic light emitting diode is a color mixing defect of an organic light emitting diode that inspects a cell having a planar shape in which a plurality of organic light emitting diodes are two-dimensionally arranged.
  • a detection apparatus (100) comprising: a lens unit (120) formed to be disposed parallel to or inclined to the surface of the cell; A plurality of image sensors are formed in a planar form arranged in two dimensions to sense the image of the cell obtained through the lens, and the sensor unit is formed to be arranged parallel or inclined to the surface of the lens unit 120 130; Control unit for adjusting the angle of the lens unit 120 or the sensor unit 130; It may include.
  • the control unit, the surface of the cell is called the object surface (1)
  • the center surface of the lens included in the lens unit 120 is called the lens surface (2)
  • the surface of the sensor unit 130 When the sensor surface 3 is referred to as the sensor unit 3, the lens unit 120 is satisfied so that the schimp plug condition that the extension line of the object surface 1, the extension line of the lens surface 2 and the extension line of the sensor surface 3 coincide with each other is satisfied. Or the angle of the sensor unit 130 may be adjusted.
  • the control unit the center point of the lens is called a lens center point (Q)
  • the center point of the sensor unit 130 is called a sensor center point (P)
  • the lens center point (Q) and the sensor center point (P) is connected
  • a point where a straight line meets the object plane 1 is referred to as a reference point T
  • a point that satisfies the Scheimpplug condition is called a Scheimpplug point S.
  • the object plane 1 and the lens surface 2 The angle formed is called an optical system inclination angle ⁇
  • the sensor unit 130 is satisfied so as to satisfy the Scheimpplug condition according to the optical system inclination angle ⁇ from the parallel state of the lens surface 2 and the sensor surface 3.
  • the Scheimpplug angle ⁇ can be calculated by the following equation.
  • ⁇ Scheimpplug angle
  • ⁇ Optical tilt angle
  • C Distance between reference point (T) and sensor center point
  • R Distance between reference point (T) and Scheimpplug point
  • the mixed color failure detection device 100 of the organic light emitting device, the zoom motor 125 for adjusting the distance between the lens unit 120 and the sensor unit 130; may include.
  • the lens surface 2 may be determined as a center plane of the lens disposed closest to the object surface 1.
  • the optical system tilt angle ⁇ is A reference image sensing step of sensing a reference image which is 0 and an image of the entire area of the cell in a state in which the lens plane 2 and the sensor plane 3 are in parallel;
  • a mixed color detection step of detecting a mixed color defect by analyzing the reference image and the inclined image It may include.
  • the mixed color detection step the image conversion step of converting the outer shape of the inclined image to be the same as the outer shape of the reference image to generate a converted image;
  • a partition classification step of dividing the reference image and the converted image into a plurality of predetermined sections;
  • a detection information acquisition step of obtaining detection information including an average color and light intensity for each of said sections; It may include.
  • the mixed color detection step of detecting the reference image defect determination step of determining whether the mixed color failure is generated according to a predetermined reference by comparing the detection information for each section of the reference image;
  • a converted image defect determining step of comparing detected information of each section of the converted image with each other to determine whether a mixed color defect has occurred according to a predetermined criterion;
  • An image comparison failure determination step of comparing the detection information between the selected section of the reference image and the section of the converted image corresponding thereto to determine whether a mixed color defect has occurred according to a predetermined criterion; It may include at least one selected from.
  • the image conversion step may be made to generate the transform image using affine transformation (affine transformation).
  • the present invention it is possible to detect only when viewed from the front (that is, when the viewing angle is vertical), thereby overcoming the limitation of not being able to detect fine mixed color defects, and applying the Scheimpplug principle to tilt the detection optical system.
  • the viewing angle By realizing the viewing angle, there is a great effect that detection of mixed color defects for various viewing angles can be performed.
  • the present invention unlike the conventional sampling and detection of only a few points of the whole cell area, by detecting the color failure by acquiring the image of the entire cell, the color mixture for the entire cell area quickly and effectively There is a great effect that can perform a defect detection.
  • 1 is a state in which an object plane, a focal plane, a lens plane, and a sensor plane are formed.
  • 5 illustrates an example of a focused image.
  • FIG. 6 is an explanatory diagram illustrating a principle for calculating a camera tilt angle.
  • FIG. 11 is a flowchart of a detection method of the present invention.
  • lens unit 125 zoom motor
  • FIG. 1 shows various examples of the formation state of an object plane, a focal plane, a lens plane and a sensor plane.
  • FIG. 1 it is assumed that an object surface 1 is photographed using a camera 10 having a lens.
  • the lens surface 2 formed by the lens of the camera 10 the focal plane 1 'formed by the lens, and the sensor surface 3 on which the image obtained from the focal plane 1' are formed are shown in FIG. As shown, they are always formed essentially parallel. If the object plane 1 and the focal plane 1 'coincide, the image obtained at the sensor plane 3 is well focused in all areas.
  • FIG. 2 illustrates a defocus state according to the inclination of the focal plane when the optical system is tilted.
  • AB corresponds to the focal plane 1 'when the object plane 1 and the camera viewing angle are vertical
  • A'-B' corresponds to the focal plane 1 'when the camera viewing angle is tilted. do.
  • the focal plane 1 is focused on the object plane 1.
  • the surface 1 ' is inclined, as shown in Fig. 3, an image is obtained which is out of focus (ie defocused) in some parts but not in another part.
  • FIG. 3 it is well illustrated that an image in focus is obtained in the middle part, whereas an image is not in focus in the outer part.
  • the detection was performed with information acquired at several points sampled in the front view.
  • the degree of mixing is not severe, it is difficult to determine that the mixing is bad from the front, but when viewed from a slightly inclined side it can be seen that the mixing failure occurs.
  • the optical system is designed based on the observation from the front, only the defocused image can be obtained as described in FIG. 2 when the optical system is inclined, and thus it is difficult to obtain a reliable detection result.
  • the Scheimpflug condition means that when the object plane 1 and the lens plane 2 are not parallel and form an inclination angle, the extension lines of the object plane 1, the lens plane 2, and the sensor plane 3 are always at one point.
  • the object surface 1 is a fixed surface, and accordingly, the chime plug condition can be satisfied by tilting the lens surface 2 or the sensor surface 3 appropriately.
  • the Scheimpflug condition is satisfied, even if the object surface 1 and the lens surface 2 are inclined, a well-focused image can be obtained.
  • FIG. 4 shows the optical system adjusted to satisfy the Scheimpplug condition.
  • the lens surface 2 is inclined at an angle with respect to the object surface 1.
  • the initial sensor surface 3 ' is formed in parallel with the lens surface 2 as shown in FIG. In this state, however, a defocused image is obtained as shown in the example of FIG. 3.
  • the focused image may be obtained as described above.
  • 5 shows an example of the focused image even though the viewing angle is formed to be inclined as such. In comparison with FIGS. 3 and 5, in FIG. 3, the image is blurred due to out of focus in the outer part, whereas in FIG. 5, the middle and both outer parts are well-focused. .
  • FIG. 6 is an explanatory diagram illustrating a principle for calculating a camera tilt angle. 6 illustrates the principle of the detection apparatus of the present invention in more detail.
  • the parts for explaining the principle are as follows.
  • the surface of the cell is called an object plane 1
  • the center plane of the lens included in the lens unit 120 is called a lens plane 2
  • the surface of the sensor unit 130 is called a sensor plane. It is called (3).
  • an initial sensor surface 3 ' is shown when the lens and sensor are initially parallel, and a sensor surface 3 is shown when the Scheimpplug condition is satisfied.
  • the center point of the lens is called a lens center point (Q)
  • the center point of the sensor unit 130 is called a sensor center point (P)
  • a straight line connecting the lens center point (Q) and the sensor center point (P) is
  • the point where the object surface 1 meets is called the reference point T
  • the point that satisfies the Scheimpplug condition is called the Scheimpplug point S.
  • the angle formed by the object surface 1 and the lens surface 2 is called an optical system inclination angle ⁇
  • the optical system inclination angle ⁇ is obtained from the parallel state of the lens surface 2 and the sensor surface 3.
  • the angle at which the sensor unit 130 is to be rotated to satisfy the Scheimpplug condition is referred to as a Scheimpplug angle ⁇ .
  • the distance between the sensor center point (P) and the Scheimpplug point (S) When the distance between the reference point (T) and the sensor center point (P) is C, The value may be represented by Equation 2 according to the second cosine law.
  • Equation 4 Substituting Equation 2 into Equation 3 and arranging for ⁇ , Equation 4 below can be obtained.
  • Equation 5 if the chime plug angle ⁇ is represented by ⁇ , it can be expressed as shown in Equation 5 below.
  • Equation 4 Substituting Equation 4 into Equation 5 and arranging ⁇ , the Scheimpplug angle ⁇ value can be obtained through Equation 6 below.
  • FIG. 7 to 10 show an embodiment of the detection device of the present invention, as shown in the mixed color failure detection device 100 of the organic light emitting device of the present invention, the lens unit 120, the sensor unit 130 And a controller (not shown), and inspects a planar cell in which a plurality of organic light emitting diodes are two-dimensionally arranged.
  • the mixed color failure detection device 100 of the organic light emitting device of the present invention also, so that the lens unit 120, the sensor unit 130 and the like can be accommodated and modularized, as shown in the case 110 It may further include.
  • the lens unit 120 is formed to be disposed parallel to or inclined to the surface of the cell. At this time, since the lens unit 120 and the like are stably supported by the case 110, the modular detection device 100 itself is attached to a separate moving device to move the lens surface of the lens unit 120 ( 2) can be arranged parallel to or inclined to the face of the cell.
  • the lens surface 2 is obviously determined as a single lens center plane. Meanwhile, when the lens unit 120 is formed by stacking a plurality of lenses, the lens unit 120 may be determined to be the center plane of the lens disposed closest to the object plane 1.
  • the sensor unit 130 is formed in a planar shape in which a plurality of image sensors are two-dimensionally arranged to serve to sense an image of the cell acquired through the lens.
  • the sensor unit 130 is formed to be disposed parallel or inclined to the surface of the lens unit 120, so that the sensor unit 130, even if the detection device 100 is disposed at any optical tilt angle ( ⁇ ) It can be moved separately to satisfy the Scheimpplug condition.
  • the detection device 100 may further include a tilt motor 135 to adjust the angle of the sensor unit 130.
  • the controller controls the angle of the lens unit 120 or the sensor unit 130.
  • the controller may control the tilt motor 135.
  • the control unit wants to adjust the angle of the lens unit 120, the detection device 100 is modular as shown, so that the detection device 100 itself is formed to form a certain optical system inclination angle ( ⁇ )
  • the control unit may control the mobile device.
  • the controller After the controller adjusts the angle of the lens unit 120 to a certain optical tilt angle ⁇ , the controller is an extension line of the object surface 1, an extension line of the lens surface 2 and the sensor surface (3).
  • the angle of the sensor unit 130 may be adjusted so that the Scheimpplug condition that the extension line of the I) is satisfied is satisfied.
  • the controller may be configured to adjust the angle of the lens unit 120 according to the angle of the sensor unit 130.
  • the controller can calculate the Scheimpflug angle ⁇ by the following equation (according to the principles described above).
  • ⁇ Scheimpplug angle
  • ⁇ Optical tilt angle
  • C Distance between reference point and sensor center point
  • R Distance between reference point and Scheimpplug point
  • the detection apparatus 100 may further include a zoom motor 125 that adjusts the distance between the lens unit 120 and the sensor unit 130.
  • the lens magnification may be adjusted by adjusting the distance between the lens unit 120 and the sensor unit 130, and by adjusting the lens magnification, images of the cells of various sizes may be easily and effectively obtained.
  • the mixed color detection method of the organic light emitting device of the present invention includes a reference image sensing step, a viewing angle tilt control step, a saim plug condition satisfaction step, a gradient image sensing step, and a mixed color defect detection step.
  • a reference image which is an image of the entire cell area in the state where the optical system tilt angle ⁇ is 0 and the lens surface 2 and the sensor surface 3 are in parallel is sensed.
  • the optical system tilt angle ⁇ is 0 and the lens surface 2 and the sensor surface 3 are in a parallel state
  • the object surface, the lens surface, and the sensor surface are both in parallel, and thus the relationship with the schimp plug condition is achieved.
  • image acquisition is performed with the lens facing the object in front, an image without shape distortion can be obtained. For example, if the cell as an object has a rectangular shape, the reference image obtained in the reference image sensing step also comes out in a rectangular shape.
  • the optical system tilt angle ⁇ is adjusted to a non-zero angle.
  • the mixed color defect inspection is performed by using the image photographed from the front, there is a case that the mixed color defect that is not severe enough may not be caught. In this case, it is possible to detect such a mixed color defect by tilting the viewing angle.
  • the angle of the sensor surface 3 is adjusted to the Scheimpplug angle ⁇ so that the Scheimpplug condition is satisfied.
  • the focal plane and the object plane are greatly displaced, thereby obtaining an unfocused image. If the detection image is not in focus, the mixed color defect detection of the organic light emitting device will not be performed correctly even if the image is analyzed. Therefore, the focused image should be obtained even when the viewing angle is tilted.
  • the detection apparatus 100 of the present invention is configured to be able to adjust the angle between the lens surface and the sensor surface in order to obtain a focused image even in this inclined viewing angle.
  • an inclined image that is an image of the entire area of the cell in a state after the same plug condition satisfaction step is sensed.
  • the extension lines of the object plane, the lens plane, and the sensor plane meet at one point, and the Scheimpplug condition is satisfied, a well-focused image can be obtained. Therefore, by analyzing the inclined image, it is possible to detect a mixed color defect in a state in which the viewing angle is oblique.
  • the inclined image obtained in the inclined image sensing step comes out in a trapezoidal shape which is a distorted shape.
  • the reference image and the inclined image are analyzed to detect a mixed color defect.
  • the mixed color defect detection step may include an image conversion step, a partition classification step, and a detection information acquisition step.
  • the outline shape of the inclined image is converted to be the same as the outline shape of the reference image to generate a converted image.
  • the reference image is in a rectangular shape (without distortion)
  • the inclined image is in trapezoidal shape (as it is distorted).
  • the tilted image may be easily generated as the transformed image by using a method of coordinate transformation corresponding to each point of the reference image and the tilted image, that is, an affine transformation. Since the affine transformation is only a spatial transformation, it does not affect the brightness of the image. Thus, there is no problem in checking mixed color defects using the converted image made using the affine transformation.
  • the reference image and the converted image are divided into a plurality of predetermined sections.
  • the cell when the cell has a rectangular shape, the cell may be divided into M ⁇ N partitions by M rows and N columns, and M and N values may be appropriately determined as desired by the user.
  • detection information acquisition step detection information including an average color and light intensity is obtained for each of the partitions.
  • the mixed color defect may be inspected using the acquired detection information.
  • At least one of the reference image defect determination step, the conversion image defect determination step, and the image comparison failure determination step may be performed according to the inspection method.
  • the detection information for each section of the reference image is compared with each other, and it is determined whether a mixed color defect has occurred according to a predetermined criterion. For example, when the reference image is acquired while the R color is turned on for the entire cell, the detection information obtained in all M ⁇ N partitions will all be identical if the ideal case in which the mixed color defect does not occur. On the other hand, when mixed color defects occur in one compartment, that is, as an example, when G or B organic light emitting material is mixed at a position where the R organic light emitting material should be printed, the R value is lower than that of the other compartments and the G Or B value will be high.
  • the mixed color defect is determined by determining that the detected information in each section is within a range of a predetermined appropriate level, and determining that the defect is out of the range.
  • the converted image defective determination step similar to the reference image defective determination step, mixed color defect occurrence is determined using the converted image. That is, the detection information of each section of the converted image is compared with each other, and it is determined whether a mixed color defect occurs according to a predetermined criterion.
  • a mixed color defect occurs according to a predetermined criterion.
  • the detection information between the selected section of the reference image and the section of the converted image corresponding thereto is compared with each other, and it is determined whether a mixed color defect has occurred according to a predetermined criterion.
  • mixed color failure is determined solely by the reference image or the converted image.
  • the mixed color defect is determined by comparing the converted image based on the reference image, it is not necessary to unnecessarily widen the defect determination reference range. In this way, a mixed color defect that is not detected when viewed from the front but can be detected when tilted can be detected more effectively.
  • the mixed color detection step it is not necessary to perform all of the reference image determination step, the conversion image failure determination step, and the image comparison failure determination step as described above. For example, if the mixed color defect is detected in the reference image by first performing the reference image defective determination step, the mixed color defect has already been detected, and the remaining two steps do not need to be performed. On the other hand, if the mixed color defect is not detected in the reference image, it is necessary to check whether the mixed color defect is detected in the converted image, and at this time, the converted image defect determination step and the image comparison failure determination step are performed by any one of the two steps. Detection may be performed or both steps may be performed.
  • multiple oblique images may be acquired by changing the inclination angle of the optical system to detect mixed color defects. For example, after one reference image is acquired, when the optical system tilt angle is 45 degrees to the right, when the angle is 45 degrees to the left, two tilted images are obtained as described above. Detection can be performed. In this case, the steps related to the tilt image described above may of course be repeatedly performed as many as the number of the tilt image when acquiring and detecting each tilt image.
  • the tilted viewing angle is realized in the detection optical system, whereby mixed color defect detection for various viewing angles can be performed.
  • mixed color defect detection by acquiring an image of the entire cell, the mixed color defect detection of the entire cell area can be performed quickly and effectively.

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Abstract

La présente invention concerne un appareil et un procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique. La présente invention concerne un appareil et un procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique qui permettent de détecter efficacement un défaut de mélange de couleurs à divers angles de visualisation. L'invention concerne également un appareil et un procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique qui permettent d'inspecter rapidement et efficacement la région entière d'une cellule d'inspection.
PCT/KR2019/010229 2018-08-20 2019-08-12 Appareil et procédé de détection d'un défaut de mélange de couleurs d'une diode électroluminescente organique Ceased WO2020040468A1 (fr)

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CN201980029314.5A CN112041999A (zh) 2018-08-20 2019-08-12 有机发光二极管的混色不良检测装置及检测方法

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