WO2019202690A1 - Cell for laser ablation and analysis apparatus - Google Patents

Abstract

A cell (11) for laser ablation is provided with: a storage part (41) in which a sample (S) is stored; an inflow part (42) into which carrier gas for carrying an ablated sample flows; an outflow part (43) from which the carrier gas flows out together with the ablated sample; and a dispersion part (44) which is disposed between the inflow part (42) and the storage part (41) and with which the carrier gas having flowed in from the inflow part (42) comes into contact so that the carrier gas is dispersed in a direction (Y direction) intersecting a direction (X direction) connecting the inflow part (42) to the outflow part (43). Thus, a cell for enabling ablation of a wider area, compared with conventional cases, while preventing an increase of the diameter of an ablated sample, is provided.

Description

Laser ablation cell and analyzer

The present invention relates to a cell containing a sample to be ablated by a laser and an inductively coupled plasma type analyzer having the cell, and more particularly to a cell and an analyzer suitable for a case where the sample is solid.

As a technique for qualitative and quantitative analysis of elements by observing and analyzing light from excited atoms by applying high voltage to an ionic or particulate sample, inductively coupled plasma (ICP: Inductively (Coupled (Plasma)) analysis technology is known. Regarding the ICP analysis method, the technique described in Non-Patent Document 1 below is known.

Non-Patent Document 1 (Fernandez et al.) Describes a technique that uses mass spectrometry (MS) in an inductively coupled plasma method to identify multiple elements of copper, zinc, tin, and lead contained in soil. Is described. In Non-Patent Document 1, when a solid sample is ablated and aerosolized, a femtosecond laser is used to reduce the time required for the entire analysis.

Beatriz Fernandez, 4 others, “Direct Determination of Trace Elements in Powdered Samples by In-Cell Isotope Dilution Femtosecond Lase Ablation ICPMS”, Anal.Chem., 2008,80,6981-6994

(Problems of conventional technology)
In the technique described in Non-Patent Document 1, the sample ablated in the cell is conveyed toward the mass spectrometer with helium (He) gas as a carrier gas.
In general, a carrier gas having a smaller particle diameter (atomic weight, molecular weight) has better thermal conductivity and lower viscosity. The fine particles of the ablated sample are hot immediately after ablation, but if the carrier gas has a large molecular weight and poor thermal conductivity, the high-temperature fine particles are bonded to each other before being transported by the carrier gas. The particle size of the aerosol sample increases. When the particle size of the sample increases, there is a problem that a signal such as noise is observed with a mass spectrometer. Therefore, the carrier gas is preferably a gas having a small atomic weight and molecular weight. Hydrogen (H ₂ ) gas can also be used, but if oxygen is present in the cell, there is a risk of explosion due to heat at the time of ablation, so that He which is an inert gas is preferably used.

However, since the He gas has a low viscosity, the He gas introduced into the cell hardly diffuses on a straight line from the inlet to the outlet of the cell. Therefore, if ablation is performed on the straight line from the inlet to the outlet of the cell, the gas is transported by the carrier gas. However, if the position shifted from the straight line is ablated, there is a problem that analysis is not performed because the material is hardly transported to the mass spectrometer.
Therefore, in the cell of the conventional configuration, it is necessary to set the position of the sample analysis target on the He gas flow path, there is a restriction on the position where the sample is set, and only a narrow region on the He gas flow path can be analyzed. There's a problem.

The present invention has a technical problem to provide a cell capable of ablating a wider area than before while suppressing an increase in the diameter of the ablated sample.

In order to solve the technical problem, the cell for laser ablation according to claim 1 comprises:
A storage section for storing a sample to be ablated by irradiation with a laser beam;
An introduction part into which a carrier gas for carrying the ablated sample is introduced;
A deriving unit from which the carrier gas is derived together with the ablated sample;
The carrier gas, which is arranged between the introduction part and the storage part, contacts the carrier gas introduced from the introduction part, and diffuses the carrier gas in a direction intersecting the direction connecting the introduction part and the lead-out part. A diffusion section;
It is provided with.

The invention according to claim 2 is the cell for laser ablation according to claim 1,
The diffusing section configured to be filled with a plurality of beads,
It is provided with.

The invention according to claim 3 is the cell for laser ablation according to claim 1 or 2,
The carrier gas composed of helium gas;
It is provided with.

In order to solve the technical problem, the analysis device according to claim 4 comprises:
The laser ablation cell according to any one of claims 1 to 3, wherein a sample is accommodated,
A laser ablation device for ablating the sample;
A sample that is ablated and delivered from the cell is introduced, and an analyzer that analyzes the introduced sample by an inductively coupled plasma method;
It is provided with.

According to the first and fourth aspects of the present invention, the carrier gas can flow in a wide range of the accommodating portion even when the carrier gas is diffused in the direction in which the carrier gas intersects in the diffusion portion and has a low viscosity. Therefore, it is possible to provide a cell capable of ablating a wider area than the conventional one while suppressing an increase in the diameter of the ablated sample.
According to invention of Claim 2, a carrier gas can be diffused because carrier gas passes a bead.
According to the third aspect of the present invention, helium gas having low viscosity and good thermal conductivity is diffused in the diffusion section, and ablation over a wider area than before can be performed while suppressing the increase in diameter of the ablated sample. A cell can be provided.

FIG. 1 is an overall explanatory view of an analyzer according to a first embodiment of the present invention. FIG. 2 is an explanatory diagram of a main part of the laser ablation apparatus according to the first embodiment. FIG. 3 is an explanatory diagram of the cell according to the first embodiment. FIG. 4 is a block diagram illustrating the functions of the computer device according to the first embodiment. FIG. 5 is an explanatory diagram of an analysis mode that can be performed by the analyzer of the first embodiment, FIG. 5A is an explanatory diagram of the integrated analysis mode, FIG. 5B is an explanatory diagram of the mixed analysis mode, and FIG. 5C is an explanatory diagram of the imaging analysis mode; FIG. 5D is an explanatory diagram of the quantitative analysis mode. FIG. 6 is an explanatory diagram of the distribution of the ablated sample contained in the aerosol derived from the cell. FIG. 7 is an explanatory diagram of a gas flow region in a conventional cell. FIG. 8 is an explanatory diagram of a modified example of the cell diffusion unit, FIG. 8A is an explanatory diagram of the modified example 1, and FIG. 8B is an explanatory diagram of the modified example 2.

Next, examples which are specific examples of embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples.
In the following description using the drawings, illustrations other than members necessary for the description are omitted as appropriate for easy understanding.

FIG. 1 is an overall explanatory view of an analyzer according to Embodiment 1 of the present invention.
In FIG. 1, the analyzer 1 of Example 1 has the mass spectrometer 2 as an example of an analyzer. The mass spectrometer 2 of Example 1 is composed of an inductively coupled plasma-mass spectrometer (ICP-MS). Note that the analyzer is not limited to ICP-MS, and for example, an inductively coupled plasma-optical emission spectrometer (ICP-OES) may be used. As ICP-MS and ICP-OES, conventionally known ones can be used, and are described in, for example, Japanese Patent Application Laid-Open No. 2013-130492, etc., and thus are not described in detail.

The mass spectrometer 2 is connected to a downstream end of a connection tube 3 as an example of a connection portion. A junction joint 4 is connected to the upstream end of the connection tube 3. The junction joint 4 is connected to the downstream end of an additional gas tube 6 as an example of an additional gas supply unit. In the first embodiment, the additional gas tube 6 is supplied with argon (Ar) gas as an example of additional gas (make-up gas). In Example 1, argon gas is supplied at a flow rate of about 0.5 to 1.2 L / min as an example.

The merging joint 4 is connected to the downstream end of a cell connection tube 7 as an example of a cell connection part. A cell 11 is connected to the upstream end of the cell connection tube 7. The cell 11 is configured to accommodate the sample S therein. A carrier gas tube 12 as an example of a carrier gas supply unit is connected to the cell 11. In the first embodiment, the carrier gas tube 12 is supplied with helium (He) gas as an example of carrier gas (carrier gas). In Example 1, as an example, the carrier gas is supplied at a flow rate of about 0.2 to 1 L / min.

A laser ablation device 21 is disposed above the cell 11. The laser ablation apparatus 21 ablate the sample S by irradiating the sample S of the cell 11 with laser light.
The analysis device 1 according to the first embodiment includes a computer device 31 as an example of an information processing device. The computer device 31 includes a computer main body 32, a display 33 as an example of a display unit, a keyboard 34 and a mouse 35 as examples of an input unit. The computer main body 32 can output a signal for controlling the drive of the laser ablation device 21 and can receive a detection result from the mass spectrometer 2 and display it on the display 33.

(Description of laser ablation equipment)
FIG. 2 is an explanatory diagram of a main part of the laser ablation apparatus according to the first embodiment.
In FIG. 2, the laser ablation apparatus 21 according to the first embodiment includes a femtosecond laser 22 as an example of a laser light source. The femtosecond laser 22 outputs femtosecond laser light 22a having a pulse width of femtosecond order as an example of laser light. As an example, the femtosecond laser 22 of the first embodiment outputs the femtosecond laser light 22a having a pulse width of 230 fs, but the pulse width is not limited to the exemplified numerical values and can be changed.
The femtosecond laser 22 of the first embodiment has a shutter (not shown) disposed therein, and is configured to be able to control the frequency at which the femtosecond laser light 22a is output (the reciprocal of the interval at which the femtosecond laser light 22a is output). ing. In the first embodiment, as an example, the frequency can be controlled between 100 Hz and 1000 Hz. That is, the femtosecond laser 22 outputs the femtosecond laser light 22a at 1000 Hz, the shutter is always opened in the case of 1000 Hz, and the femtosecond laser light 22a of 9 out of 10 in the case of 100 Hz. It is possible to obtain an output of 100 Hz by blocking with a shutter.

The femtosecond laser light 22a is introduced into a galvano optical system 23 as an example of an optical system. The galvano optical system 23 according to the first embodiment includes a first galvano mirror 24 as an example of a first mirror and a second galvano mirror 25 as an example of a second mirror. The first galvanomirror 24 reflects the femtosecond laser light 22a from the femtosecond laser 22 toward the second galvanomirror 25, and the second galvanomirror 25 samples the femtosecond laser light 22a from the first galvanomirror 24. Reflects toward S.
The first galvanometer mirror 24 is supported so as to be rotatable about the first mirror shaft 24a. Driving is transmitted to the first mirror shaft 24a from a first galvano motor 24b as an example of a first driving source. Accordingly, in response to the drive from the first galvano motor 24b, the first galvano mirror 24 rotates and tilts about the first mirror shaft 24a to change the reflection direction of the femtosecond laser light 22a.

Similarly to the first galvanometer mirror 24, the second galvanometer mirror 25 also has a second mirror shaft 25a and a second galvanometer motor 25b as an example of a second drive source, and reflects the reflection direction of the femtosecond laser beam 22a. Change. In the first embodiment, as an example, the first galvanometer mirror 24 controls the irradiation position in the X direction mainly along the gas flow direction on the surface of the sample S, and the second galvanometer mirror 25 mainly controls the gas flow direction. The irradiation position in the Y direction intersecting with is controlled. Therefore, it is possible to scan the femtosecond laser light 22a two-dimensionally by controlling the two galvanometer mirrors 24 and 25. In the first embodiment, as an example, the femtosecond laser beam 22a can be irradiated in a range of 20 cm × 20 cm.
A lens 26 as an example of an optical member is disposed between the second galvanometer mirror 25 and the cell 11. The lens 26 condenses the passing femtosecond laser light 22a so that the focal position of the femtosecond laser light 22a becomes the surface of the sample S.

(Cell description)
FIG. 3 is an explanatory diagram of the cell according to the first embodiment.
In FIG. 3, the cell 11 according to the first embodiment includes a storage portion 41 in which the sample S is stored. Further, the cell 11 is formed with a gas inflow portion 42 as an example of an introduction portion and an aerosol outflow portion 43 as an example of a lead-out portion. The gas inflow portion 42 is connected to the carrier gas tube 12, and the aerosol outflow portion 43 is connected to the cell connection tube 7. A diffusion part 44 is formed between the gas inflow part 42 and the accommodating part 41. The diffusion unit 44 includes fences 44a and 44b as an example of a partition member. The fences 44 a and 44 b are disposed on the gas inflow portion 42 side and the accommodating portion 41 side of the diffusion portion 44. In addition, the fences 44a and 44b of Example 1 are comprised by the net-like member.

Between the fences 44a and 44b, glass beads 44c, which are glass balls, are filled. The glass beads 44c having a particle size of about 0.5 mm to 2 mm can be preferably used. Therefore, when the carrier gas flowing in from the gas inflow portion 42 passes through the diffusion portion 44, it continuously collides with the glass beads 44c and diffuses in the direction (Y direction) intersecting the gas flow direction (X direction). Is done.

(Description of the control part of Example 1)
FIG. 4 is a block diagram illustrating the functions of the computer device according to the first embodiment.
In FIG. 4, a computer main body 32 as an example of a control unit has an input / output interface I / O for performing input / output of signals with the outside. The computer main body 32 has a ROM (read only memory) in which programs and information for performing necessary processes are stored. The computer main body 32 has a random access memory (RAM) for temporarily storing necessary data. The computer main body 32 has a central processing unit (CPU) that performs processing according to a program stored in a ROM or the like. Therefore, the computer main body 32 can implement various functions by executing a program stored in a ROM or the like.

(Function of the computer main body 32)
The computer main body 32 executes processing corresponding to input signals from signal output elements such as a keyboard 34, a mouse 35, a mass spectrometer 2, and other sensors (not shown), so that the galvano motors 24b and 25b and the femtosecond laser 22 are processed. It has a function of outputting a control signal to each control element such as a shutter. That is, the computer main body 32 has the following functions.

FIG. 5 is an explanatory diagram of an analysis mode that can be performed by the analyzer of the first embodiment, FIG. 5A is an explanatory diagram of the integrated analysis mode, FIG. 5B is an explanatory diagram of the mixed analysis mode, and FIG. FIG. 5D is an explanatory diagram of the quantitative analysis mode.
C1: Analysis Mode Discriminating Unit The analysis mode discriminating unit C1 discriminates the analysis mode based on the input from the keyboard 34 or the mouse 35. 5, the analysis apparatus 1 according to the first embodiment can perform the integrated analysis mode illustrated in FIG. 5A, the mixed analysis mode illustrated in FIG. 5B, the imaging analysis mode illustrated in FIG. 5C, and the quantitative analysis mode illustrated in FIG. 5D. It is configured.

In FIG. 5A, in the integration analysis mode, the chemical composition of the entire ablated region of the sample S is integrated by ablating a predetermined position of the sample S at high speed, and the analysis is performed by the mass spectrometer 2. Do. Therefore, the average amount of chemical composition in the ablated area is measured.
In FIG. 5B, in the mixing analysis mode, the chemical compositions of two samples S or a plurality of locations are mixed and measured by alternately ablating a plurality of locations of a plurality of samples S or one sample at a high speed. Is done. In the mixed analysis mode, when two samples S are mixed, the mixing ratio can be changed by changing the number of times of ablation (number of spots) between one sample and the other sample. That is, each time one sample is ablated five times, the other sample is ablated once, and mixing can be performed at a ratio of 5: 1. This can be used particularly suitably when the other sample uses a standard sample (a sample whose chemical composition is known in advance), since the standard sample serves as a measurement reference.

In FIG. 5C, in the elemental imaging analysis mode, each chemical composition of the ablated position (spot, analysis position) of the sample S is individually ablated by sequentially ablating a predetermined region of the sample S at a low speed. It is possible to measure and analyze. That is, it is possible to analyze and measure the distribution of chemical composition in a predetermined region in a map form.
In FIG. 5D, in the quantitative imaging analysis mode, the chemical composition of each spot in the analysis region is analyzed at a ratio to the standard sample by alternately ablating the analysis region of the sample S1 to be analyzed and the standard sample S2. And quantitative analysis is possible.

C2: Laser light output interval control means The laser light output interval control means C2 controls the output interval (frequency) of the femtosecond laser light 22a in accordance with the analysis mode. In the first embodiment, when the integrated analysis mode and the mixed analysis mode are selected, the femtosecond laser light 22a is output at a high speed (high frequency, 1000 Hz), and when the imaging analysis mode or the quantitative analysis mode is selected, The femtosecond laser beam 22a is output at a low speed (low frequency, 10 to 500 Hz).

C3: Irradiation control means The irradiation control means C3 has a control means C3A for the first galvano motor and a control means C3B for the second galvano motor, and controls the galvano motors 24b, 25b to control each galvano mirror 24, The reflection angle of 25 is changed, and the target analysis position of the sample S is irradiated with the femtosecond laser light 22a.
The control unit C3A for the first galvano motor controls the first galvano motor 24b based on the X coordinate of the analysis position of the sample S to control the reflection angle of the first galvano mirror 24. Based on the Y coordinate of the analysis position of the sample S, the second galvano motor control means C3B controls the second galvano motor 25b to control the reflection angle of the second galvano mirror 25. In addition, when each galvano motor 24b, 25b is driven according to the analysis position, the control means C3A, C3B of each galvano motor drives the galvano motor 24b, 25b toward the stop position and then moves to the stop position. When stopping, driving in the direction opposite to the direction of moving toward the stop position (counter drive) is performed to stop the galvanometer mirrors 24 and 25 at the stop position. The galvano motors 24b and 25b can change the irradiation position at a high speed (1000 Hz) corresponding to the output interval (frequency) of the femtosecond laser light 22a.

C4: Analysis Result Processing Unit The analysis result processing unit C4 processes the signal from the mass spectrometer 2 and displays it on the display 33. The analysis result processing means C4 of the first embodiment displays the analysis result of the measured chemical composition in the integrated analysis mode and the mixed analysis mode, and in the imaging analysis mode and the quantitative analysis mode, the map image of the ablated region is displayed. When each analysis position on the map is selected, an image displaying the chemical composition is displayed.

(Operation of Example 1)
In the analysis apparatus 1 of the first embodiment having the above-described configuration, when the target analysis position is ablated in the sample S, the position where the femtosecond laser light 22a is irradiated by the galvano optical system 23 is controlled. Here, in the galvano optical system 23 of the first embodiment, the two galvanometer mirrors 24 and 25 are independently controlled by the galvano motors 24b and 25b (biaxial control). Therefore, it is possible to measure and analyze by ablating an arbitrary position on the sample S in two dimensions. Therefore, it is not necessary to arrange the samples along a straight line as in the prior art. Therefore, the analyzer 1 according to the first embodiment can widen the position where the sample S is installed and the position where analysis is possible, as compared with the conventional configuration.
In addition, in the conventional technique, when the position to be analyzed cannot be arranged on a straight line, it is necessary to re-analyze the target position to be analyzed at a position where the laser can be irradiated (on the straight line). There was a problem of becoming longer. On the other hand, in the first embodiment, femtosecond laser light 22a can be irradiated to an arbitrary two-dimensional position, the sample S can be reduced, and the entire analysis time can be shortened.

FIG. 6 is an explanatory diagram of the distribution of the ablated sample contained in the aerosol derived from the cell.
Moreover, in the analyzer 1 of Example 1, the space | interval which irradiates the femtosecond laser beam 22a is changed according to an analysis mode. The ablated sample is derived from the cell 11 as an aerosol by the carrier gas, but when the irradiation interval of the femtosecond laser light 22a is short, the galvano optical system 23 also moves at a high speed, and a plurality of analysis positions are obtained. Ablation in a short time. Therefore, in FIG. 6, when the derived aerosol is divided into the regions 51 along the gas flow direction, the samples ablated at the same time are mixed in each region 51. Therefore, samples ablated from a plurality of regions are sent to the mass spectrometer 2 in a mixed state, and detected as an average value (integrated analysis mode) or mixed (mixed analysis mode).
On the other hand, when the irradiation interval of the femtosecond laser light 22a is long, a plurality of analysis positions are ablated at a certain time interval. Therefore, each region 51 is sent to the mass spectrometer 2 with the sample ablated at each analysis position individually present. Therefore, the chemical composition at each analysis position can be individually measured and analyzed (imaging analysis mode, quantitative analysis mode).

Therefore, in the first embodiment, various analyzes can be performed with one analyzer 1 by changing the interval and frequency of irradiation with the femtosecond laser light 22a.
Furthermore, in the analysis apparatus 1 of the first embodiment, in the mixed analysis mode, the mixing ratio can be changed by changing the ratio of the spots irradiated on one sample and the other sample. Therefore, the analysis can be performed at an arbitrary mixing ratio that the user wants to analyze as compared with the conventional technique in which the mixing ratio cannot be changed.
In the analyzer 1 of the first embodiment, when the galvanometer mirrors 24 and 25 are stopped at the stop position corresponding to the analysis position, counter driving is performed by the galvano motors 24b and 25b. If the galvano motors 24b and 25b are stopped without performing the counter drive, the position of the galvano mirrors 24 and 25 may go too far (overshoot) from the stop position due to inertia. When overshoot occurs, the femtosecond laser light 22a is not accurately irradiated to the analysis position, and there is a problem that the analysis accuracy is lowered. On the other hand, in Example 1, the galvanometer mirrors 24 and 25 can be accurately stopped at the stop position by counter driving. Therefore, the analysis accuracy can be improved as compared with the case where counter driving is not performed.

FIG. 7 is an explanatory diagram of a gas flow region in a conventional cell.
In FIG. 7, in the prior art in which the diffusion portion 44 is not provided in the cell 11, if a He gas having a low viscosity is used for the sample 02 supported by the accommodating portion 01, it is difficult to diffuse and the introduction portion 01a. The carrier gas flows only from the substantially linear region 03 toward the lead-out part 01b. Therefore, in the region 04 outside the region 03 through which the gas flows, even if the sample 02 is ablated, it is hardly sent by the carrier gas, and measurement is difficult. Therefore, conventionally, it is necessary to set the sample 02 so that the analysis target position of the sample 02 comes on the region 03. Therefore, the conventional technique cannot measure a wide range of the sample 02, and there is a problem that it takes time to analyze if the sample 02 is replaced to change the position of the sample 02.
On the other hand, in the analyzer 1 according to the first embodiment, the diffusion unit 44 is provided in the cell 11. Therefore, even if He gas with low viscosity is introduced as the carrier gas, as shown in FIG. 3, it diffuses in the width direction (Y direction) intersecting the gas flow direction (X direction) and flows almost uniformly. Therefore, it is possible to send the ablated sample S to the downstream side over a wide range of the sample S. Therefore, it is not necessary to replace the sample S and the time required for analysis can be shortened.

(Example of changing the diffuser)
FIG. 8 is an explanatory diagram of a modified example of the cell diffusion unit, FIG. 8A is an explanatory diagram of the modified example 1, and FIG. 8B is an explanatory diagram of the modified example 2.
In the above embodiment, the diffusion part 44 using the glass beads 44c is illustrated as shown in FIG. 3, but the present invention is not limited to this. As shown in FIG. 8A, it is possible to adopt a configuration in which a plurality of partition-shaped diffusion walls 44d that are divergent at the downstream side in the gas flow direction are arranged as the diffusion portion 44. Further, as shown in FIG. 8B, a carrier gas is allowed to pass therethrough, but a plurality of filter members 44e serving as channel resistances may be installed.
In addition to the configuration illustrated in FIG. 8, any configuration that can diffuse the gas flow in the width direction (Y direction) by disposing a member that becomes the flow resistance of the introduced carrier gas is adopted. Is possible.

(Example of change)
As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. Modification examples (H01) to (H08) of the present invention are exemplified below.
(H01) In the above-described embodiment, the sample S is exemplified by one sample or two samples, but may be three or more.
(H02) In the above-described embodiment, the galvano optical system 23 is exemplified by the configuration of two-axis control, but it may be configured by three or more axes.

(H03) In the above embodiment, the specific shape can be arbitrarily changed according to the design, specifications, and the like. For example, the shape of the accommodating part 41 of the cell 11 can be arbitrarily changed.
(H04) In the above embodiment, it is preferable to use the glass beads 44c for the diffusion part 44, but it is also possible to use materials other than glass. For example, metal particles (beads) or plastic beads can be used. When plastic beads are used, it is desirable to use glass beads because mercury (Hg) attached to the plastic beads is easily detected by a mass spectrometer.
(H05) In the above embodiment, it is preferable to use He gas as the carrier gas, but the present invention is not limited to this. It can be changed to, for example, hydrogen gas, neon gas, argon gas, or the like according to the type of sample to be analyzed and the required accuracy.

(H06) In the above-described embodiment, the configuration in which four analysis modes are possible is illustrated, but the present invention is not limited to this. The analysis mode may have one, two, or three configurations, or may have five or more modes. Therefore, when there is only one analysis mode or when the irradiation interval of the laser light 22a is common in the executable analysis mode, the irradiation interval is not adjusted, that is, the shutter of the femtosecond laser 22 is not provided. Is also possible.
(H07) In the above embodiment, the configuration using the shutter is exemplified as the configuration for adjusting the irradiation interval of the laser beam 22a, but the configuration is not limited to this. For example, between the femtosecond laser 22 and the galvano optical system 23, a shielding optical system that reflects the laser light 22a in a direction not irradiated on the sample S is disposed, or in a direction that the galvano optical system 23 does not irradiate the sample S. It is not impossible to configure it to reflect.
(H08) In the above embodiment, the illustrated cell 11 can be suitably used in the analyzer 1 having the laser ablation device 21 capable of scanning in two dimensions. It is also possible to use it.

1 ... Analyzer,
2 ... Inductively coupled plasma mass spectrometer,
11 ... cell,
21 ... Laser ablation device,
22a ... Laser light,
41 ... accommodating part,
42 ... introduction part,
43 ... Deriving part,
44 ... diffusion part,
44c ... glass beads,
S: Sample.

Claims (4)

A storage section for storing a sample to be ablated by irradiation with a laser beam;
An introduction part into which a carrier gas for carrying the ablated sample is introduced;
A deriving unit from which the carrier gas is derived together with the ablated sample;
The carrier gas, which is arranged between the introduction part and the storage part, contacts the carrier gas introduced from the introduction part, and diffuses the carrier gas in a direction intersecting the direction connecting the introduction part and the lead-out part. A diffusion section;
A cell for laser ablation characterized by comprising: The diffusing section configured to be filled with a plurality of beads,
The laser ablation cell according to claim 1, comprising: The carrier gas composed of helium gas;
The cell for laser ablation according to claim 1 or 2, characterized by comprising: The laser ablation cell according to any one of claims 1 to 3, wherein a sample is accommodated,
A laser ablation device for ablating the sample;
A sample that is ablated and delivered from the cell is introduced, and an analyzer that analyzes the introduced sample by an inductively coupled plasma method;
An analyzer characterized by comprising:

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