WO2019186649A1 - Recipe creation method, semiconductor device manufacturing method, processing device, and program - Google Patents

Abstract

According to one embodiment, provided is technology that includes: a step for displaying a recipe editing screen which includes a recipe editing area in which is displayed a subject recipe including a plurality of steps, a sub-area in which is displayed at least file information relating to the subject recipe, and a command selection area in which are displayed icons for editing, on the sub-area and/or the recipe editing area, each file used in recipe editing; a step for, upon reception of a file information selection instruction in the sub-area, reading the subject recipe and the file relating to the subject recipe and dividing the sub-area into a plurality of sub-screens to open and display the read file relating to the subject recipe; and a step for editing the subject recipe displayed in the recipe editing area in accordance with an instruction received in one of the recipe editing area, the sub-area or the command selection area.

Description

Recipe creation method, semiconductor device manufacturing method, processing apparatus, and program

The present invention relates to a recipe creation method, a semiconductor device manufacturing method, a processing apparatus, and a program.

In a substrate processing apparatus such as a vertical film forming apparatus, a boat loaded with a plurality (tens to hundreds of substrates) of substrates (wafers) is accommodated in a processing chamber, supplied with processing gas, heated, and processed. Various processes are performed on the substrate surface by setting the pressure and temperature of the substrate to predetermined values. When a thin film generation process is performed on a substrate in the substrate processing apparatus, a recipe is created to set the process conditions, and the apparatus operates according to the recipe.

In order to perform desired processing on the product substrate, it is necessary to create at least an optimum recipe (in this case, particularly a process recipe). For example, Patent Document 1 below describes that recipe editing is performed while sequentially switching between a recipe editing screen and a soft gas pattern screen. Further, for example, Patent Document 2 below describes a technique for specifying and copying a designated step number when creating a recipe by displaying a recipe editing screen. Further, for example, the following Patent Documents 3 and 4 describe that a recipe is efficiently created using a common parameter.

However, if you want to change the table that is being combined during recipe editing, you must save and save the recipe you are editing, open and edit the table file you want to modify, and then restart recipe editing again. Had to stop editing. Also, since other recipes cannot be opened simultaneously while editing a recipe, the recipes could not be created while referring to the contents of the other recipes. Furthermore, although copying can be performed in units of one step, a continuous series of steps could not be copied at once. Accordingly, there is a concern that the work efficiency in the recipe editing may be reduced or an editing error may occur.

JP 2006-093494 A JP 2000-077288 A JP 2000-133595 A JP 2014-075754 A

An object of the present invention is to provide a configuration that enables recipe editing with greatly improved operability by expanding and improving the recipe editing function.

According to one aspect of the present invention, a recipe editing area that displays a target recipe including a plurality of steps, a subarea that displays at least file information related to the target recipe, and each file used for recipe editing is a subarea. And a process for displaying a recipe edit screen including an icon for editing on at least one of the recipe edit areas, and a process for displaying a file information selection instruction in the sub area. A process for reading a recipe and a file related to the target recipe, dividing a sub area into a plurality of sub screens, opening and displaying a file related to the read target recipe, a recipe editing area, a sub area, and a command Recipe according to instructions received on any one of the selected areas A step of editing the target recipe displayed in the current area, techniques with are provided.

According to the present invention, it is possible to improve the efficiency of editing work on the recipe editing screen and reduce editing errors.

1 is a perspective view of a substrate processing apparatus according to an embodiment of the present invention. It is side surface perspective drawing of the substrate processing apparatus which concerns on embodiment of this invention. It is a structural example of the control part and memory | storage part of the substrate processing apparatus which concerns on embodiment of this invention. It is an example of illustration of a process recipe creation main flow concerning an embodiment of the present invention. It is an example of the process recipe edit screen which concerns on embodiment of this invention. It is another example of the process recipe edit screen which concerns on embodiment of this invention. It is an example of illustration of the command selection area which concerns on embodiment of this invention. It is an example of the process recipe edit screen of the step copy of the embodiment of the present invention. It is an illustration example of the recipe preservation | save sequence which concerns on embodiment of this invention. It is a figure which shows the recipe edit example which concerns on embodiment of this invention. It is a figure which shows the recipe edit example which concerns on embodiment of this invention. It is a figure which shows the recipe edit example which concerns on embodiment of this invention. It is a figure which shows the recipe edit example which concerns on embodiment of this invention. It is an illustration example of the process recipe which concerns on embodiment of this invention. It is an illustration example of the recipe start sequence which concerns on embodiment of this invention.

Hereinafter, a substrate processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. In the present embodiment, as an example, the substrate processing apparatus is configured as a semiconductor manufacturing apparatus that performs processing steps in a method of manufacturing a semiconductor device. In the following description, a case where a batch type vertical semiconductor manufacturing apparatus (hereinafter simply referred to as a processing apparatus) that performs oxidation, diffusion processing, CVD processing or the like is applied to a substrate as the substrate processing apparatus will be described.

As shown in FIGS. 1 and 2, the processing apparatus 100 of this embodiment uses a pod 110 as a wafer carrier for storing a wafer (substrate) 200 made of silicon or the like, and includes a casing 111. A pod loading / unloading port 112 is opened on the front wall 111a of the casing 111 so as to communicate with the inside and outside of the casing 111. The pod loading / unloading port 112 is opened and closed by a front shutter 113. A load port 114 is installed on the front front side of the pod loading / unloading port 112, and the pod 110 is placed on the load port 114. The pod 110 is loaded onto the load port 114 by an in-process conveyance device (not shown), and also unloaded from the load port 114.

A rotating shelf 105 is installed at an upper portion of the casing 111 in a substantially central portion in the front-rear direction. The rotating shelf 105 rotates around a support column 116 and stores a plurality of pods 110 on a shelf plate 117. . As shown in FIG. 2, a pod transfer device 118 is installed between the load port 114 and the rotating shelf 105 in the housing 111. The pod transfer device 118 includes a pod elevator 118 a that can move up and down while holding the pod 110, and a pod transfer mechanism 118 b as a horizontal transfer mechanism. Between the load port 114, the rotating shelf 105, and the pod opener 121. Then, the pod 110 is conveyed.

As shown in FIG. 2, a sub-housing 119 is constructed across the rear end at a lower portion of the housing 111 at a substantially central portion in the front-rear direction. On the front wall 119a of the sub housing 119, a pair of wafer loading / unloading ports 120 for loading / unloading the wafer 200 into / from the sub housing 119 are arranged in two vertical rows in the vertical direction. A pair of pod openers 121 are respectively installed in the upper and lower wafer loading / unloading ports 120. The pod opener 121 includes a mounting table 122 on which the pod 110 is mounted, and a cap attaching / detaching mechanism 123 that attaches / detaches a cap (lid) of the pod 110. The pod opener 121 opens and closes the wafer loading / unloading port of the pod 110 by attaching / detaching the cap of the pod 110 mounted on the mounting table 122 by the cap attaching / detaching mechanism 123. The mounting table 122 is a transfer shelf on which a substrate container is mounted when a substrate is transferred.

As shown in FIG. 2, the sub-housing 119 constitutes a transfer chamber 124 that is isolated from the atmosphere of the installation space of the pod transfer device 118 and the rotating shelf 105. A wafer transfer mechanism 125 is installed in the front region of the transfer chamber 124. The wafer transfer mechanism 125 includes a wafer transfer device 125a that can place the wafer 200 on the tweezer 125c and can rotate or move in the horizontal direction, and a wafer transfer device elevator 125b for moving the wafer transfer device 125a up and down. It consists of The wafer 200 is loaded and unloaded from the boat 217 as a substrate holder by the continuous operation of the wafer transfer device elevator 125b and the wafer transfer device 125a.

As shown in FIG. 1, a clean unit 134 composed of a supply fan and a dustproof filter is installed in the transfer chamber 124 so as to supply a clean atmosphere or clean air 133 that is an inert gas. . As shown in FIG. 2, a processing furnace 202 is provided above the boat 217. The processing furnace 202 includes a processing chamber inside, and a heater (not shown) for heating the processing chamber is provided around the processing chamber. The lower end portion of the processing furnace 202 is opened and closed by a furnace port gate valve 147.

As shown in FIG. 1, a boat elevator 115 for raising and lowering the boat 217 is installed. A seal cap 219 is horizontally installed on the arm 128 connected to the boat elevator 115, and the seal cap 219 is configured to support the boat 217 vertically and to close the lower end portion of the processing furnace 202. ing. The boat 217 includes a plurality of holding members so that a plurality of (for example, about 50 to 175) wafers 200 are horizontally held with their centers aligned and vertically aligned. It is configured.

Next, the configuration of the control unit and the storage unit of the substrate processing apparatus will be described with reference to FIG. As shown in FIG. 3, the controller 10 as a controller includes a main controller 11, a temperature controller 12, a gas flow rate controller 13, a pressure controller 14, and a transport controller 15. The main control unit 11 includes a temperature control unit 12, a gas flow rate control unit 13, a pressure control unit 14, a transfer control unit 15, an operation unit 31 that receives instructions from an operator (operator), information such as an operation screen and various data. The components constituting the substrate processing apparatus 100 are electrically connected, such as the display unit 32 for displaying the information and the storage unit 20 for storing the processing recipe which is the substrate processing sequence of the substrate processing apparatus 100. In addition, the operation part 31 and the display part 32 can be comprised integrally, for example in the case of a touch panel etc.

The main control unit 11 includes a CPU (Central Processing Unit) and a memory for storing an operation program of the main control unit 11 as a hardware configuration. The CPU is based on an instruction from the operation unit 31 to an operator, for example. In accordance with the operation program, the file stored in the storage unit 20 is downloaded to the memory and executed. At this time, the main control unit 11 controls the temperature, pressure, gas flow rate, etc. in the processing chamber to each sub-control unit such as the temperature control unit 12, the gas flow rate control unit 13, the pressure control unit 14, and the transfer control unit 15. Based on the measurement data, a control signal is output to each sub-control unit, and each sub-control unit is controlled to operate according to a file.

The control unit 10, the operation unit 31, the display unit 32, and the storage unit 20 do not have to be dedicated to the substrate processing apparatus, and can be realized using a general computer system such as a personal computer. it can. For example, by installing the program from a recording medium (a flexible disk, a CD-ROM, a USB memory, or the like) that stores the program for executing the above-described process in a general-purpose computer, a control unit that executes the above-described process, An operation unit, a display unit, and a storage unit can be configured.

In addition, means for supplying a program for executing the above-described processing can be arbitrarily selected. In addition to being supplied via a predetermined recording medium as described above, for example, it can be supplied via a communication line, a communication network, a communication system, or the like. In this case, for example, the program may be posted on a bulletin board of a communication network and supplied via the network. Then, the above-described processing can be executed by starting the program provided in this way and executing it in the same manner as other application programs under the control of the OS (Operating System) of the substrate processing apparatus.

The cocoon storage unit 20 includes an EEPROM, a flash memory, a hard disk, and the like, and includes a storage medium that stores an operation program for the CPU and a storage medium that stores a recipe. The operation program stored in the storage unit 20 is transferred to the memory of the main control unit 11 and operates, for example, when the substrate processing apparatus starts up.

As shown in FIG. 3, the storage unit 20 includes a recipe storage unit 21, a process parameter file storage unit 22 including a VP (variable parameter) and a CP (condition parameter), a process condition storage unit 23, And a program storage unit 24.

The recipe storage unit 21 stores a process recipe for substrate processing and a file (also referred to as a combination file) related to the process recipe. One recipe is usually composed of a plurality of processing steps, and each processing step includes a plurality of process parameters for processing the substrate. A series of substrate processing steps in which a plurality of product substrates are mounted on the boat 217, loaded into the processing furnace 202, processed in the processing furnace 202, and then unloaded from the processing furnace 202 and taken out of the boat 217. This process is performed by executing the recipe.

The process parameter file storage unit 22 can also store a combination file in which execution conditions defined outside such as a sub-recipe, an alarm condition table, and a temperature correction table are combined in a process recipe.

The process condition storage unit 23 uses process conditions such as the number of product substrates to be mounted on the boat 217 and the accumulated film thickness deposited on the furnace walls and dummy substrates of the boat 217 and the processing furnace 202 as process condition management information. Store in the storage unit 23. The process condition management information can be input and set by the operator from the operation unit 31, for example.

The program storage unit 24 is a program file such as a recipe editing program to be described later and various programs related thereto (shared parameter editing sequence, snippet registration sequence, snippet editing sequence, recipe storage sequence, recipe start sequence), or Various screen files for displaying the recipe editing area, sub area, command selection area, etc. on the screen are stored.

In this embodiment, for example, when the substrate processing apparatus starts up, the recipe editing program shown in FIG. 4 is started. When the device starts up, the main menu screen is displayed. On this menu screen, for example, when the recipe edit button is selected to create a recipe, the recipe file list screen is opened. When a recipe file for creating a recipe is opened (selected), the contents of the target recipe file are displayed at least on the recipe editing screen.

Further, the controller 10 is configured such that when a recipe to be edited is selected, the recipe editing screen shown in FIG. 5 is displayed by the execution of the recipe editing program by the function as a computer. The recipe editing screen shown in FIG. 5 is configured to include a recipe editing area for displaying a target recipe to be edited, a command area for selecting an editing command for the target recipe, and a sub area for displaying file information related to the target recipe. ing.

Here, the controller 10 is configured to acquire not only information related to the target recipe but also information related to the combination file as a file related to the editing target recipe from the storage unit 20. Furthermore, it is configured to acquire other recipe files.

In addition, the recipe file displayed in the recipe edit area is a step list edit that displays the steps of the target recipe in a list format in addition to the step individual edit screen that edits the setting values such as temperature and flow rate in conventional steps. It is configured to display a screen.

When the target recipe to be edited is selected on the recipe file list screen, the function as a computer displays the recipe edit area that displays the target recipe including multiple steps and the file information related to the target recipe. Display a recipe editing screen that includes a sub-area to be edited and a command selection area that displays icons for editing each file used for recipe editing in either the sub-area or the recipe editing area. And when the file information selection instruction is received in the sub area, the target recipe and the file related to the target recipe are read, and the sub area is divided into a plurality of sub screens and related to the read target recipe. Procedure for opening and displaying the file, recipe editing area, sub area, command selection Configured so that the procedure for editing the target recipe displayed in the recipe editing area, the controller 10 executes in accordance with the instruction received by one of the area for the area.

As shown in FIG. 4, in a procedure for editing a recipe by a function as a computer, in a procedure for editing a target recipe displayed in the recipe editing area, (Step 1) a file related to the target recipe displayed in the sub area When is selected, the file related to the target recipe is read and the sub area is divided into multiple sub screens to display the file information related to the read target file recipe and the file displayed on the sub screen. While referring to the information, the step displayed in the recipe edit area is edited, the procedure for correcting the content of the predetermined step, and (Step 2) the button for displaying the shared parameter selection screen arranged in the command selection area is selected. And display a dialog for selecting a shared parameter on the recipe edit screen and share it. When parameters are edited, the procedure to replace the shared parameters of the recipe displayed in the recipe editing area with the edited shared parameters, and (Step 3) buttons arranged in the command selection area for displaying other recipes on the sub-screen Is selected, a process for editing a predetermined step of the target recipe displayed in the recipe editing area while referring to another recipe, a predetermined step of the other recipe is selected, and the predetermined step of the selected target recipe is selected. The controller 10 is further configured to execute at least one of the procedures including the copying process.

When the file name icon arranged in the command selection area indicating the step pattern common to a plurality of recipes is selected in the procedure for editing the recipe by the function as a computer, the controller 10 selects the step selected on the sub screen. And a step of displaying a pattern and copying a step pattern to a recipe displayed in the recipe editing area, and executing at least one of the steps.

In addition, the controller 10 is configured to repeatedly execute at least one of the procedures including (Step 1) to (Step 3) in the procedure of editing the recipe by the function as a computer. Further, the controller 10 is configured to be executed by combining the procedures including the above (Step 1) to (Step 3) in the procedure of editing the recipe by the function as a computer.

Further, as shown in FIG. 9, the controller 10 is configured to execute a recipe storing procedure for checking the consistency of the recipe by a function as a computer.
The recipe saving procedure is further configured to execute one of a procedure for saving a recipe according to the result of the consistency check and a procedure for prompting re-creation by displaying a recipe editing screen. ing.
Further, as shown in FIG. 12, the controller 10 causes the substrate processing apparatus 100 to execute a procedure for executing the created process recipe by a function as a computer.

Next, the present embodiment will be described with reference to the drawings, particularly with reference to FIG.

(S300) When the recipe editing program is started, the process recipe editing screen shown in FIG. 5 is displayed. The controller 10 is configured to read the recipe information and acquire the combination information related to the recipe file when displaying the process recipe editing screen for editing the recipe. This process recipe editing screen selects a recipe editing area 302 for editing a recipe file step, a sub area 301 for displaying a combination file associated with a recipe, and selects a recipe editing command or performs an actual editing action. The screen configuration includes a command selection area 303.

(S310) The controller 10 receives a predetermined editing instruction while displaying the process recipe editing screen. If there is no instruction even after a predetermined time has elapsed, for example, a screen saver screen is displayed. (S320) When a predetermined instruction is received, it is confirmed whether it is a screen switching instruction. Even when there is a save instruction in the previous instruction, a save confirmation screen is displayed when a screen switching instruction is given, and a save is prompted. If it is not a screen switching instruction, it is a process recipe editing instruction, and therefore it is determined whether it corresponds to one of the following four steps (S410 to S710).

(S410) The controller 10 determines that the step displayed in the recipe edit area 302 has been selected.
(S420) This is parameter editing in which a predetermined step is directly selected and input to the recipe to be edited to change the processing conditions. For example, the parameter is set using a cell for inputting a numerical value provided in the command selection area. Enter. Since the input form is not particularly limited, when a step displayed in the recipe editing area 302 is selected, the controller 10 displays an input screen for inputting a predetermined parameter in the selected step on a dialog screen. It may be configured such that a predetermined parameter can be directly input to a selected step. This is mainly done when parameters are finely corrected. Specifically, after a recipe consistency check described later, when a recipe is re-created, a step in which an abnormality (inconsistency) has occurred is preferentially displayed on the recipe editing screen. In this case, a step in which an abnormality (mismatch) is displayed on the recipe editing screen is selected (S420), and the parameters of the step are edited (corrected).

(S510) It is determined that each file displayed in the subarea displaying the combination information has been selected.
(S520) The contents of the selected file are displayed on the screen on which the combination information was displayed. Hereinafter, the screen on which the combination information is displayed may be referred to as a sub screen. In addition, this sub-screen may be divided. Hereinafter, this will be described in detail with reference to FIG.

FIG. 6 is an example of a screen in which a combination file is displayed on the sub-screen of the process recipe editing screen. When the instruction to select the file name displayed on the screen on which the combination information is displayed as shown in FIG. 6 is received, specifically, when the name (for example, AAA) cell 301c is selected, the controller 10 The selected target file is acquired from the storage unit 20 and the file is read. Then, this screen (sub-screen) is divided so that, for example, the selected combination file is displayed on the sub-screen 301b (sub-screen 2). The gas flow pattern diagram displayed on the sub-screen 301a (sub-screen 1) displays parameters such as temperature conditions, gas flow rate conditions (such as opening and closing of gas valves), and pressure conditions specified in the process recipe. The contents of the combination file and the gas flow pattern diagram displayed on these sub-screens are “reference only” in the displayed state.

If it is necessary to change the alarm condition table 301b during recipe editing, it is possible to edit the recipe after switching the alarm condition table 301b to the edit mode. For example, when the alarm condition table 301b screen is selected, a mode switching screen may be displayed as a dialog screen on the process recipe edit screen so that the edit mode and the reference mode can be selected. In other words, any method may be used for switching between the edit mode and the reference mode.

In addition, when the alarm condition table 301b is edited and saved, the combination file may be combined with other recipes, so it is possible to specify which recipe the file is combined with as needed. You may make it display on the edit area 302. FIG. Moreover, the step displayed in the recipe edit area 302 can be confirmed by selecting the main recipe as necessary.

In FIG. 6, only the sub-recipe, the alarm condition table, and the wafer transfer parameters are described as the combination file. However, not only this but other combination files are simply omitted. Further, although there is only one sub recipe, it is possible to have a plurality of sub recipes. These files have a combination file name displayed in the cell 301c. This cell 301c is an icon, and by selecting this cell 301c, a combination file to be displayed on the sub-screen 301b is selected. In addition, according to the present embodiment, the sub screen 301a is a gas flow pattern diagram. However, for example, when two cells 301c are selected on the sub screen 301, they are displayed on the sub screens 301a and 301b, respectively. It may be configured.

(S610) For example, when the shared parameter set in the step displayed in the recipe edit area 302 is selected, the controller 10 determines that the shared parameter selection instruction has been given.
(S620) The controller 10 determines whether the selected shared parameter is the variable parameter VP or the condition parameter CP, and then determines which parameter is the shared parameter. Then, the shared parameter editing screen relating to the determined parameter stored in the storage unit 20 is configured to be displayed on the process recipe editing screen.
(S630) The controller 10 is configured to reflect the parameter change selected on the shared parameter editing screen in the step where the shared parameter is to be set. Further, this parameter change is reflected in all the steps set in the selected shared parameter. It is mainly used for steps such as a film forming process in a process recipe. This parameter change may be reflected in other recipes.

Next, the command selection area 303 having a clip boat used for the copy operation will be described in brief with reference to FIG.

The command selection area 303 is provided with various icons for editing the recipe. For example, a “copy” icon 303 b for recording a predetermined step and a “paste” icon 303 c for pasting the copied content are provided. Is set. In addition, icons for “overwriting” and “inserting” predetermined data are provided. Further, a “comparison” icon 303f for comparing files with other recipes is also provided in the command selection area. A pattern display unit 303a as a clipboard, which will be described later, is provided above the command selection area 303, and these patterns are used to create a recipe to be edited.

(S710) The controller 10 is configured to display a dialog for selecting a recipe file when a comparison icon 303f shown in FIG. 7 is selected.
(S720) The controller 10 is configured to display the selected recipe file on the sub-screen 301c when a recipe file is selected on the recipe selection screen. That is, the selected recipe file is configured to be switched from the file displayed on the sub screen. The selected recipe file may be referred to as a master recipe.
(S730) Even when the contents of this other recipe file are displayed on the sub-screen 301c, “only reference” is displayed in the displayed state. Since this file is for reference, data cannot be rewritten as in the above-described alarm condition table, but a step can be selected.

(S730) Further, the controller 10 can execute not only a reference to another recipe but also a program that enables an operation of copying a predetermined step shown in FIG.

First, in the sub-screen 301c that displays the contents of another recipe file, when an instruction to select another recipe step is given and the copy icon 303b shown in the clipboard 303a in FIG. 7 is pressed, the controller 10 displays the recipe editing area 302. It is configured to select the copy destination step above. The copy destination may be selected by the operator on the recipe editing area. When the copy icon 303b is pressed, the controller 10 is configured to hold the step information of the selected recipe on the clipboard 303a.

When the paste icon 303c shown in the command selection area 303 in FIG. 7 is pressed, the controller 10 puts the content (pattern 1 in FIG. 7) at the top of the command selection area 303 (the top of the pattern display section 303a). It is configured to display. Then, when the overwrite icon 303d or the insert icon 303e is continuously pressed, the controller 10 is configured to affix the selected step content to the editing target recipe displayed in the recipe editing area 302.

The copy contents (buffer contents) when the copy operation shown in FIG. 8 is performed are held in the memory of the controller 10 being edited, and are always displayed at the top (first line) of the clipboard 303a. It is configured as follows. The buffer contents are configured to display the copy source recipe name and the copied step number.

The contents of this buffer exist for each login user unit. When the editing of the recipe in the recipe editing area 302 is completed, the controller 10 is configured to delete the contents of this buffer. The contents of this buffer can be given a name by using the snippet function described later. In that case, it is added to the second line and below of the clipboard 303a shown in FIG.

This makes it possible to copy not only the steps in the same recipe file but also the steps in a different file so far, and there are no editing mistakes and work efficiency can be improved.

(S740) Here, a plurality of steps displayed on the clipboard 303a by executing copying at the time of recipe editing are referred to as snippets. The controller 10 can perform a snippet by executing a snippet registration sequence, which will be described later, by naming and saving the plurality of steps. This snippet is configured to be displayed on the pattern display section 303a of the command selection area 303 shown in FIG.

(Snippet registration sequence)
First, when a selection of a predetermined step is accepted on the sub-screen 301c displaying the contents of another recipe file and the copy icon 303b and the paste icon 303c shown in the command selection area 303 of FIG. The contents (a plurality of step patterns) copied at the top of the clipboard 303a in FIG. 7 are displayed.

When the clipboard 303a on the process recipe edit screen is selected and the store button is pressed, the controller 10 can be configured to display a save screen and save it with a name. And if it preserve | saves, the controller 10 will be comprised so that the display of a snippet list may be updated by displaying the preserve | saved name 2nd from the top of the clipboard 303a.

(S750) The を controller 10 can copy the snippet (a plurality of step patterns) registered in the clipboard 303a to the recipe to be edited by executing a snippet registration sequence described later. Snippets are also available from all main recipes or sub-recipes, and can be affixed to any step pattern on the recipe being edited.

(Snippet Copy Sequence) First, when the selection of the copy destination step is accepted on the recipe editing area 302 and the paste icon 303c shown in the command selection area 303 in FIG. 7 is pressed, the controller 10 displays the pattern shown in FIG. A list of snippets registered in the display unit 313a is displayed.

Then, when the snippet to be used is selected and the overwrite icon 303d or the insert icon 303e shown in the command selection area 303 in FIG. 7 is continuously pressed, the controller 10 displays the selected snippet (a plurality of step patterns). A plurality of steps selected in the recipe editing area 302 are pasted.

By using such a snippet, a series of steps (step pattern) for applications that are commonly set in each recipe. For example, it is now possible to edit the flow of procedures to perform certain valve and flow setting operations such as returning the interior of the furnace from a reduced pressure state to the atmosphere after the film formation step is completed, using only a combination of snippets. You will be able to do the contents of step editing.

Also, the number of snippets that can be registered in the clipboard 303a in the command selection area 303 in FIG. 7 is determined. In the present embodiment, there are five, but the present invention is not limited to this. In addition, the registered snippet is configured so that it cannot be edited directly or another setting can be overwritten on the existing setting. The registered snippet can be deleted as necessary.

As described above, when the recipe editing starting from the next four steps (S410 to S710) is performed, the controller 10 receives the next instruction (S310). When the controller 10 receives the next instruction on the process recipe editing screen, the controller 10 is configured to execute one of the four editing steps (S410 to S710) as described above.

The controller 10 is configured to execute at least one of the four editing steps (S410 to S710) until the creation of the process recipe is completed.

Furthermore, the controller 10 is configured to repeatedly execute at least one editing step while combining the four editing steps (S410 to S710).

Next, after creating a process recipe on the process recipe editing screen, a save icon 303g placed in the command selection area 303 is pressed to save the recipe contents. The controller 10 is configured to execute a recipe saving sequence shown in FIG. 9 when the save icon 303g is pressed.

(Recipe validity check function)
The controller 10 confirms whether the validity check (also referred to as consistency check) function is set, and if it is set, whether the valve open / close state is inconsistent (valve interlock check) or the combination of steps. It is configured to perform validity checks such as whether there is no inconsistency (infinite loop check of steps).

If there is no abnormality (inconsistency) as a result of the validity check, the controller 10 can execute the storage. Specifically, the process recipe is stored in the storage unit 20. On the other hand, when an abnormality (inconsistency) is found, a step having an abnormality (inconsistency) is displayed in the recipe editing area 302 on the process recipe editing screen.

Thereafter, the flow shown in FIG. 4 is re-executed. In this case, a step in which an abnormality (mismatch) has occurred is selected (S410), and parameter re-editing (S420) is performed.

Note that, according to the present embodiment, the controller 10 is configured to display a save confirmation screen when a process recipe is created and saved and then switched from the process recipe edit screen to another screen. As a result, even if you have forgotten to press the save icon 303g (save process) after creating the process recipe, you can confirm the save when you move from the process recipe edit screen to another screen. Mistakes can be reduced.

Next, an example of the process recipe editing step will be described with reference to the drawings.

(Embodiment 1) Externally defined execution conditions such as a sub-recipe table, an alarm condition table, and a temperature correction table can be combined with a process recipe. There are also recipe-specific parameters such as variable parameters such as VP.

As shown in FIG. 10A, while the variable parameter VP, which is a recipe-specific parameter, is displayed on the process recipe editing screen while the recipe is being edited, the VP can be edited and the VP-set steps can be corrected.

When editing a process recipe, if it is necessary to modify the table settings to match the execution conditions, the conventional method would like to save the current recipe editing status, close it, and then modify it It is necessary to open the table and variable parameter editing screen, and it took time to finish editing and return to recipe editing, which was very inefficient, but according to this embodiment, without interrupting recipe editing, Since another table can be edited while the screen is opened, the work efficiency can be greatly improved without closing or opening the recipe.

(Embodiment 2) Parameters such as temperature conditions and flow rate setting values can be changed from the host according to variable parameters according to the target film thickness, etc., for example, pressure command, transfer command, etc. This command cannot be changed with variable parameters.

As shown in FIG. 10B, the contents of other process recipes can be referred to while being displayed on the process recipe editing screen during the process recipe editing. Further, as shown in FIG. 10C and FIG. 10D, a predetermined step of another process recipe can be copied to the process recipe being edited.

It is necessary to edit different conditions for each process recipe. Conventionally, after editing the recipe, compare the file with the base recipe, check whether there is a problem with editing according to the difference, and if there is a problem, display the recipe edit screen again. It is necessary to open and edit the recipe, and it is not possible to edit while referring to the original process recipe, so it is easy to make mistakes and the work efficiency is poor due to screen switching with the comparison screen, etc.In this embodiment, the original Editing with reference to the process recipe can eliminate editing mistakes and poor work efficiency. In addition, since a plurality of steps can be selected and copied from the master using a plurality of recipe step patterns, work efficiency is improved.

(Embodiment 3) FIG. 11 shows an example of a process recipe formed by a plurality of steps. The horizontal axis is time, and the vertical axis is pressure. It can also be seen that a plurality of steps are formed along the horizontal axis (time axis) to construct a process recipe.

In the case of a vertical heat treatment apparatus, the wafer 200 is loaded into the furnace, and then the process is performed after removing the impurities present in the air by reducing the pressure in the furnace to a vacuum state. At this time, the evacuation sequence is often the same step order even for different recipes, and the set value parameters are used without change. Also, a step of returning from the vacuum state to the atmosphere (slow purge), a step of loading (loading) the boat 217 loaded with the wafers 200 into the furnace, a step of raising the furnace temperature to the process temperature, and the boat in the furnace There are steps that must be used in the process recipe, such as a step of unloading.

In the conventional method, instead of creating a new recipe, it is common to select another recipe as a base, copy the recipe, and then edit the recipe. In this case, since the setting values are already entered in the base recipe, when an operator who is not familiar with recipe editing operates, there is a mistake that forgets to edit the steps that should originally be edited. It is thought that it will occur. Furthermore, when a new recipe is created, there is a problem in that copying in units of one step takes time, and thus there is a problem that the efficiency is low. In this embodiment, multiple step copying between recipes (FIG. 10C) and steps are performed. By using a snippet (FIG. 10D), a recipe can be edited while combining a plurality of consecutive steps in a newly created recipe. Thereby, it becomes possible to create a recipe easily.

In this embodiment, for example, by registering a step pattern indicating a slow purge step, a load step, an unload step, a temperature rising step, etc. as a snippet in the pattern display section 303a of the command selection area 303, Only the copy operation shown in FIG. 10C or FIG. 10D is required, and it is not necessary to perform the edit operation, thereby saving the labor of editing. In addition, it is only necessary to repeat the copying operation by registering it as a snippet for the other steps as well. However, in the film forming step (this process in the figure), the step is directly selected and edited in S420, the unique parameter is edited as shown in the first embodiment, the four steps S420 to S710 are combined, or at least A process recipe is created by repeating one step.

As described above, in this embodiment, as long as it is a step that is always used in a process recipe other than the film formation step (this process in the figure), it is often the same regardless of the process type. Using step copy saves editing time and reduces the time required to create a process recipe.

In particular, even when there are a plurality of steps (auxiliary steps) in one step, such as a evacuation step including a slow evacuation step, a main evacuation step, and a leak check step, it is often edited by copying. Since labor can be saved, not only the efficiency of recipe creation is improved, but also human errors such as setting errors can be reduced. Further, the present invention can be applied by copying the purge step before the temperature raising step and the purge step after this process step.

FIG. 12 shows a flow until the substrate processing is started by executing the recipe after storing the process recipe. This flow presupposes that no other automatic operation job exists in the substrate processing apparatus 100 and that the job start method is automatic.

First, it is checked whether the target process recipe is authenticated. If it is not authenticated, the automatic operation job is not generated and this flow ends. Further, if it is authenticated, an automatic operation job is generated. At this time, if the automatic operation job generation fails, this flow ends. When the automatic operation job is successfully generated, the automatic operation job is started and the process recipe is started.

Depending on the customer, only the recipes that have been further authenticated by the authentication function can be executed. In this case, the unauthenticated recipe cannot be executed by the automatic operation job, and only the authenticated recipe can be executed by the automatic operation job. Here, the automatic operation job is a command for operating the apparatus for transferring the wafer from the cassette to the boat 217 in accordance with an instruction from the customer host or the apparatus screen in order to process the wafer, and executing the recipe. That is.

Next, a description will be given of an operation procedure in the case where the substrate processing apparatus 100 according to the present embodiment is used to execute the created process recipe and perform processing on the wafer 200 as one process of semiconductor device manufacturing.

(Pod Transporting Step) As shown in FIGS. 1 and 2, when the pod 110 is supplied to the load port 114, the pod loading / unloading port 112 is opened by the front shutter 113 and loaded from the pod loading / unloading port 112. The pod 110 carried in is automatically conveyed and delivered to the designated shelf plate 117 of the rotating shelf 105 by the pod conveying device 118.

(Wafer Supplying Step) The pod pod 110 is temporarily stored on the rotating shelf 105 and then transferred from the shelf plate 117 to one pod opener 121 and transferred to the mounting table 122 or directly from the load port 114. Then, it is transported to the pod opener 121 and transferred to the mounting table 122. At this time, the wafer loading / unloading port 120 of the pod opener 121 is closed by the cap attaching / detaching mechanism 123, and clean air 133 is circulated and filled in the transfer chamber 124.

(Wafer Transfer Process) As shown in FIG. 2, the cap of the pod 110 mounted on the mounting table 122 is removed by the cap attaching / detaching mechanism 123, and the wafer loading / unloading port of the pod 110 is opened. The wafer 200 is picked up from the pod 110 by the wafer transfer device 125a, transferred to the boat 217, and loaded. The wafer transfer device 125 a that has transferred the wafer 200 to the boat 217 returns to the pod 110 and loads the next wafer 110 into the boat 217.

During the loading operation of the wafer 200 to the boat 217 by the wafer transfer device 125a in one (upper or lower) pod opener 121, the other (lower or upper) pod opener 121 is connected to the rotating shelf 105 or the load port 114. Another pod 110 is transported by the pod transport device 118, and the opening operation of the pod 110 by the pod opener 121 proceeds simultaneously. In this way, a predetermined number of wafers 200 are loaded into the boat 217 (wafer charging process).

(Loading Step) と When a predetermined number of wafers 200 are loaded into the boat 217, the lower end of the processing furnace 202 is opened by the furnace port gate valve 147. Subsequently, the seal cap 219 is raised by the boat elevator 115, and the boat 217 supported by the seal cap 219 is loaded into the processing chamber in the processing furnace 202 (wafer loading step).

After loading the boat, a predetermined process is performed on the unprocessed wafer 200 held by the boat 217 loaded into the processing chamber after the boat loading. Specifically, for example, when a film formation process by a thermal CVD reaction is performed, exhaust is performed using an exhaust apparatus so that the processing chamber has a desired pressure (degree of vacuum). And while heating a process chamber using a heater unit, the rotation mechanism is operated and the boat 217 is rotated, and the wafer 200 is also rotated in connection with this. The rotation of the wafer 200 continues until the boat 217 is unloaded. Further, a raw material gas, a purge gas or the like is supplied to the processing chamber through a gas introduction pipe. As a result, a thin film is formed on the surface of the unprocessed wafer 200 held by the boat 217 using a thermal decomposition reaction or chemical reaction.

After the processing, the boat 217 is pulled out by the boat elevator 115 (wafer unloading process). Thereafter, the wafer 200 and the pod 110 are discharged to the outside of the casing 111 in the reverse order of the above-described procedure.

As described above, according to the present embodiment, at least one of the following effects is achieved.

(1) According to the present embodiment, the recipe has a function of combining external information files necessary for recipe execution, such as sub-recipes and alarm conditions. Until now, the contents of the combination file are referred to when editing the recipe. I was able to edit the combination file along with the recipe step editing.

(2) According to the present embodiment, other recipes can be displayed on the same screen during recipe editing, recipes can be created while referring to the contents of other recipes, and steps between different recipes Copying can be performed while checking the copy source and the copy destination, so that work efficiency can be improved and editing mistakes can be reduced.

(3) According to this embodiment, since a plurality of steps can be copied between recipes, editing operations can be greatly reduced. Therefore, editing operations by humans can be largely omitted, and editing mistakes can be reduced.

(4) According to this embodiment, when a created recipe is stored, a check function is provided, and an abnormal part discovered as a result of the check can be immediately re-edited. Even if it exists, it is possible to suppress the lot-out by executing the recipe as it is (with a setting error).

(5) According to this embodiment, in a process recipe composed of a plurality of steps, even if there is a case where a plurality of auxiliary steps are included in this one step, all the auxiliary steps are copied between recipes. And the operation on the recipe edit screen can be omitted. Thereby, artificial mistakes such as setting mistakes can be reduced.

(6) According to the present embodiment, in a process recipe composed of a plurality of steps, a step of returning from a vacuum state to the atmosphere (slow purge) and a step of loading (loading) a boat loaded with wafers into the furnace In response to the step of raising the furnace temperature to the process temperature and the step of unloading the boat from the furnace (unloading), multiple step patterns are repeatedly copied between recipes to make the process recipe Time to create can be shortened.

It goes without saying that the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the invention.

The present invention can be applied not only to a semiconductor manufacturing apparatus but also to an apparatus for processing a glass substrate, such as an LCD manufacturing apparatus, and other substrate processing apparatuses. The contents of the substrate processing include CVD, PVD, ALD, epitaxial growth film, oxide film, nitride film, metal-containing film, etc., as well as annealing treatment, oxidation treatment, diffusion treatment, etching treatment, exposure treatment, Lithography, coating processing, mold processing, development processing, dicing processing, wire bonding processing, inspection processing, and the like may be used.

In addition, other types other than the vertical type may be used, and for example, a single-wafer type or multi-wafer type processing apparatus may be used. In particular, the present invention is preferably applied to a multi-wafer processing apparatus including a substrate placement portion (susceptor) on which a plurality of substrates are placed.

It can be applied to all processing apparatuses connected to an operation unit such as a PC having a function of editing a recipe for processing a substrate such as a semiconductor wafer.

DESCRIPTION OF SYMBOLS 20 ... Memory | storage part, 31 ... Operation part, 32 ... Control part, 100 ... Substrate processing apparatus, 200 ... Wafer (substrate), 202 ... Processing furnace

Claims (16)

A recipe editing area for displaying a target recipe including a plurality of steps, a subarea for displaying at least file information related to the target recipe, and each file used for recipe editing in the subarea and the recipe editing area A command editing area that displays an icon for editing on at least one area; and a recipe editing screen that includes the command selection area. When the file information selection instruction is received in the sub-area, Reading the file associated with the target recipe and dividing the subarea into a plurality of sub-screens to open and display the file associated with the read target recipe; the recipe editing area; the subarea; The finger received on any one of the command selection areas Recipe creation method having a step of editing the target recipe displayed on the recipe editing area in accordance with the. The step of editing the target recipe includes (1) editing the step of the target recipe using an icon displayed in the command selection area while referring to a file related to the target recipe displayed on the sub-screen. And (2) a process for displaying a dialog for selecting the shared parameter on the recipe editing screen upon receiving an instruction for selecting the shared parameter set in the step of the target recipe, and editing the shared parameter. And a process of replacing the shared parameter set in the target recipe displayed in the recipe edit area with the edited shared parameter, and (3) another recipe on the sub-screen. When receiving an instruction to select an icon arranged in the command selection area to be displayed, the other recipe is displayed. A process of editing a predetermined step of the target recipe displayed in the recipe editing area while shining, and a process of selecting a predetermined step of the other recipe and copying it to the predetermined step of the target recipe; The recipe creation method according to claim 1, wherein at least one step is executed. The recipe creation method of Claim 2 comprised so that a several process may be combined and performed among the processes of said (1) thru | or (3). The recipe creation method of Claim 2 comprised so that at least 1 or more process may be repeatedly performed among the processes of said (1) thru | or (3). An instruction to select a file name icon arranged in the command selection area indicating a step pattern common to a plurality of recipes is received, an instruction to select an icon for copying the step pattern is received, and displayed in the recipe editing area The recipe creation method according to claim 1, further comprising a step of accepting an instruction to select the step pattern of the target recipe to be overwritten and overwriting the step pattern on the target recipe with a step pattern common to the plurality of recipes. 6. The recipe creation method according to claim 5, further comprising a step of registering a step pattern common to the plurality of recipes in the command selection area. A step of accepting a switching instruction from the recipe editing screen to another screen;
The recipe creation method according to claim 1, further comprising: displaying a save confirmation screen for confirming whether the recipe edited on the recipe edit screen is saved. Furthermore, it has a recipe storage process to check the consistency of the created recipe,
In the recipe storing step, either one of the step of storing the recipe according to the result of the consistency check and the step of displaying the recipe editing screen and prompting re-creation is executed. The recipe creation method of Claim 1 comprised by these. In the step of prompting the re-creation, a step of preferentially displaying a step in which inconsistency has occurred on the recipe editing screen and a step in which the inconsistency has occurred are selected, and step parameters are edited. The recipe preparation method of Claim 8 which has a process. A recipe editing area for displaying a target recipe including a plurality of steps, a subarea for displaying the target recipe information or file information related to the target recipe, and each file used for recipe editing in the subarea or the recipe A step of displaying a recipe editing screen including a command selection area for displaying an icon for editing on the editing area, and when the file information is selected in the sub-area, the target recipe and the target recipe A process of reading a related file and dividing the sub-area into a plurality of sub-screens to open and display a file related to the read target recipe; and the recipe editing area, the sub-area, and the command selection Recipe editing according to instructions received on any one of the areas A process for editing the target recipe displayed on the rear, and a recipe execution process for processing the substrate by executing the recipe created in the recipe creation process. Method. 11. The method of manufacturing a semiconductor device according to claim 10, further comprising a recipe storing step for checking consistency of the created recipe. A recipe editing area for displaying a target recipe including a plurality of steps, a subarea for displaying the target recipe information or file information related to the target recipe, and each file used for recipe editing in the subarea or the recipe A command selection area that displays an icon for editing on the editing area; an operation unit that displays a recipe editing screen on the operation screen; and an instruction to select the file information in the sub-area; And the file related to the target recipe is read and the sub area is divided into a plurality of sub screens, the file related to the read target recipe is opened and displayed on the operation unit, and the recipe editing area is also displayed. , The sub-area, and the command selection area. Processing apparatus and a control unit for editing the target recipe displayed on the recipe edit area in response to the digit indicated. The control unit is (1) editing a step of the target recipe using an icon displayed in the command selection area while referring to a file associated with the target recipe displayed on the sub-screen; (2) Upon receiving an instruction to select a shared parameter set in the step of the target recipe, a process for displaying a dialog for selecting the shared parameter on the recipe editing screen, a process for editing the shared parameter, A process including a process of replacing the shared parameter set in the target recipe displayed in the recipe editing area with the edited shared parameter, and (3) another recipe arranged in the command selection area. When an instruction to select an icon to be displayed on the sub-screen is received, the recipe is referred to while referring to the other recipe. At least one of a process including: editing a predetermined step of the target recipe displayed in the editing area; and selecting a predetermined step of the other recipe and copying the predetermined step of the target recipe. The processing apparatus according to claim 12, wherein the processing apparatus is configured to perform one or more steps. The control unit is configured to display a recipe selection screen on the recipe editing screen and display a selected recipe on the sub-screen when receiving an instruction to select a predetermined icon displayed in the command selection area. The processing apparatus according to claim 12. The processing apparatus according to claim 12, wherein the control unit is configured to display a save confirmation screen when receiving an instruction to switch from the recipe editing screen to another screen. A recipe editing area for displaying a target recipe including a plurality of steps, a subarea for displaying the target recipe information or file information related to the target recipe, and each file used for recipe editing in the subarea or the recipe A procedure for displaying a recipe editing screen including a command selection area for displaying an icon for editing in the editing area, and when receiving an instruction to select the file information in the sub-area, the target recipe and the target recipe A procedure for reading a file related to the target and dividing the sub-area into a plurality of sub-screens to open and display a file related to the read target recipe, the recipe editing area, the sub-area, and the command According to instructions received on any one of the selected areas Program for executing a procedure for editing the target recipe displayed in the recipe editing area, the controller.

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