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WO2019083949A3 - Methods of treating a surface of a polymer material by atmospheric pressure plasma - Google Patents

Methods of treating a surface of a polymer material by atmospheric pressure plasma Download PDF

Info

Publication number
WO2019083949A3
WO2019083949A3 PCT/US2018/057023 US2018057023W WO2019083949A3 WO 2019083949 A3 WO2019083949 A3 WO 2019083949A3 US 2018057023 W US2018057023 W US 2018057023W WO 2019083949 A3 WO2019083949 A3 WO 2019083949A3
Authority
WO
WIPO (PCT)
Prior art keywords
treating
atmospheric pressure
pressure plasma
methods
polymer material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2018/057023
Other languages
French (fr)
Other versions
WO2019083949A2 (en
Inventor
Jiangwei Feng
Wageesha Senaratne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to JP2020523457A priority Critical patent/JP7374086B2/en
Priority to EP18799970.1A priority patent/EP3700491A2/en
Priority to CN201880070185.XA priority patent/CN111295170B/en
Priority to US16/758,130 priority patent/US11170980B2/en
Publication of WO2019083949A2 publication Critical patent/WO2019083949A2/en
Publication of WO2019083949A3 publication Critical patent/WO2019083949A3/en
Anticipated expiration legal-status Critical
Priority to US17/500,073 priority patent/US11830707B2/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32798Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816Pressure
    • H01J37/32825Working under atmospheric pressure or higher
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32733Means for moving the material to be treated
    • H01J37/32752Means for moving the material to be treated for moving the material across the discharge
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12Chemical modification
    • C08J7/123Treatment by wave energy or particle radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082Radio frequency generated discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192Microwave generated discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/3244Gas supply means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32733Means for moving the material to be treated
    • H01J37/32752Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761Continuous moving
    • H01J37/3277Continuous moving of continuous material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61JCONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICAL PURPOSES; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGING PHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL OR ADMINISTERING FORMS; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; BABY COMFORTERS; DEVICES FOR RECEIVING SPITTLE
    • A61J1/00Containers specially adapted for medical or pharmaceutical purposes
    • A61J1/05Containers specially adapted for medical or pharmaceutical purposes for collecting, storing or administering blood, plasma or medical fluids ; Infusion or perfusion containers
    • A61J1/10Bag-type containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C2059/145Atmospheric plasma
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2323/00Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
    • C08J2323/02Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment
    • C08J2323/04Homopolymers or copolymers of ethene
    • C08J2323/06Polyethene
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32Processing objects by plasma generation
    • H01J2237/33Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338Changing chemical properties of treated surfaces
    • H01J2237/3382Polymerising

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Plasma Technology (AREA)

Abstract

A method for treating a flexible plastic substrate is provided herein. The method includes establishing an atmospheric pressure plasma beam from an inert gas using a power of greater than about 90W, directing the plasma beam toward a surface of the flexible polymer substrate, and scanning the plasma beam across the surface of the polymer substrate to form a treated substrate surface.
PCT/US2018/057023 2017-10-27 2018-10-23 Methods of treating a surface of a polymer material by atmospheric pressure plasma Ceased WO2019083949A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020523457A JP7374086B2 (en) 2017-10-27 2018-10-23 Method for treating the surface of polymeric materials with atmospheric pressure plasma
EP18799970.1A EP3700491A2 (en) 2017-10-27 2018-10-23 Methods of treating a surface of a polymer material by atmospheric pressure plasma
CN201880070185.XA CN111295170B (en) 2017-10-27 2018-10-23 Method for treating the surface of a polymer material by atmospheric pressure plasma
US16/758,130 US11170980B2 (en) 2017-10-27 2018-10-23 Methods of treating a surface of a polymer material by atmospheric pressure plasma
US17/500,073 US11830707B2 (en) 2017-10-27 2021-10-13 Methods of treating a surface of a polymer material by atmospheric pressure plasma

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762578020P 2017-10-27 2017-10-27
US62/578,020 2017-10-27

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US16/758,130 A-371-Of-International US11170980B2 (en) 2017-10-27 2018-10-23 Methods of treating a surface of a polymer material by atmospheric pressure plasma
US17/500,073 Continuation US11830707B2 (en) 2017-10-27 2021-10-13 Methods of treating a surface of a polymer material by atmospheric pressure plasma

Publications (2)

Publication Number Publication Date
WO2019083949A2 WO2019083949A2 (en) 2019-05-02
WO2019083949A3 true WO2019083949A3 (en) 2020-02-20

Family

ID=64184240

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2018/057023 Ceased WO2019083949A2 (en) 2017-10-27 2018-10-23 Methods of treating a surface of a polymer material by atmospheric pressure plasma

Country Status (5)

Country Link
US (2) US11170980B2 (en)
EP (1) EP3700491A2 (en)
JP (1) JP7374086B2 (en)
CN (1) CN111295170B (en)
WO (1) WO2019083949A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117276086A (en) * 2023-09-20 2023-12-22 液化空气(中国)投资有限公司 a surface treatment method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5456972A (en) * 1993-05-28 1995-10-10 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
JP2003062451A (en) * 2001-08-23 2003-03-04 Ulvac Japan Ltd Thin film plasma treatment method and apparatus
US20130022752A1 (en) * 2011-07-20 2013-01-24 U.S. Government As Represented By The Secretary Of The Army Methods for treating a surface of a substrate by atmospheric plasma processing

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5224441A (en) 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5955161A (en) 1996-01-30 1999-09-21 Becton Dickinson And Company Blood collection tube assembly
JPH1017687A (en) * 1996-07-03 1998-01-20 Kawasumi Lab Inc Inner surface treatment method for bags
JP4075237B2 (en) 1999-08-17 2008-04-16 松下電工株式会社 Plasma processing system and plasma processing method
JP4154838B2 (en) 2000-07-26 2008-09-24 松下電工株式会社 Plasma processing method
JP2003007497A (en) 2001-06-19 2003-01-10 Pearl Kogyo Kk Atmospheric pressure plasma processing equipment
WO2006049794A2 (en) 2004-10-29 2006-05-11 Dow Global Technologies Inc. Abrasion resistant coatings by plasma enhanced chemical vapor deposition
KR20070072899A (en) 2004-10-29 2007-07-06 다우 글로벌 테크놀로지스 인크. Improved deposition rate plasma enhanced chemical vapor process
JP2008058336A (en) 2004-12-14 2008-03-13 Matsushita Electric Ind Co Ltd Optical element
US20070113867A1 (en) * 2005-11-22 2007-05-24 The Regents Of The University Of California Polymer treatment using a plasma brush
US8632651B1 (en) * 2006-06-28 2014-01-21 Surfx Technologies Llc Plasma surface treatment of composites for bonding
KR20090108874A (en) * 2008-04-14 2009-10-19 한국기초과학지원연구원 Biodegradation rate and hydrophilicity improvement method of biodegradable polymer resin by plasma surface treatment
GB0919274D0 (en) 2009-11-03 2009-12-16 Univ The Glasgow Plasma generation apparatus and use of plasma generation apparatus
JP5616657B2 (en) 2010-03-12 2014-10-29 富士フイルム株式会社 Surface treatment method
US9969965B2 (en) 2011-01-11 2018-05-15 Ge Healthcare Bio-Sciences Corp. Linearly scalable single use bioreactor system
JP5849308B2 (en) 2011-08-31 2016-01-27 住友ゴム工業株式会社 Method for producing surface-modified fluororesin film and surface-modified fluororesin film
US8722164B2 (en) 2012-05-11 2014-05-13 Cryovac, Inc. Polymeric film for use in bioprocessing applications
CN103483610B (en) 2012-06-13 2015-04-15 中国科学院理化技术研究所 Preparation method of blood-compatible medical high polymer material
JP6493927B2 (en) 2014-05-30 2019-04-03 フィネッセ ソリューションズ、インコーポレイテッド Aseptic connectors for bioprocess containers
JPWO2016009801A1 (en) 2014-07-14 2017-04-27 コニカミノルタ株式会社 Gas barrier film and electronic device
WO2016154190A1 (en) 2015-03-26 2016-09-29 Corning Incorporated Glass composite for use in extreme ultra-violet lithography
US20160329193A1 (en) * 2015-05-05 2016-11-10 Eastman Kodak Company Atmospheric-pressure plasma treatment system
EP3558887B1 (en) 2016-12-20 2023-01-18 Corning Incorporated Glass-based articles having crack mitigating single- and multi-layer films for retained article strength and scratch resistance

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5456972A (en) * 1993-05-28 1995-10-10 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
JP2003062451A (en) * 2001-08-23 2003-03-04 Ulvac Japan Ltd Thin film plasma treatment method and apparatus
US20130022752A1 (en) * 2011-07-20 2013-01-24 U.S. Government As Represented By The Secretary Of The Army Methods for treating a surface of a substrate by atmospheric plasma processing

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
HUANG C ET AL: "Contact angle analysis of low-temperature cyclonic atmospheric pressure plasma modified polyethylene terephthalate", THIN SOLID FILMS, ELSEVIER, AMSTERDAM, NL, vol. 518, no. 13, 30 April 2010 (2010-04-30), pages 3575 - 3580, XP026969144, ISSN: 0040-6090, [retrieved on 20091201] *
M J SHENTON ET AL: "Surface modification of polymer surfaces: atmospheric plasma versus vacuum plasma treatments", JOURNAL OF PHYSICS D: APPLIED PHYSICS, 21 September 2001 (2001-09-21), pages 2761 - 2768, XP055545383, Retrieved from the Internet <URL:http://iopscience.iop.org/article/10.1088/0022-3727/34/18/308/pdf> [retrieved on 20190121], DOI: 10.1088/0022-3727/34/18/308 *

Also Published As

Publication number Publication date
JP7374086B2 (en) 2023-11-06
WO2019083949A2 (en) 2019-05-02
US20220068618A1 (en) 2022-03-03
EP3700491A2 (en) 2020-09-02
CN111295170A (en) 2020-06-16
CN111295170B (en) 2024-07-02
US11170980B2 (en) 2021-11-09
JP2021501236A (en) 2021-01-14
US11830707B2 (en) 2023-11-28
US20200343079A1 (en) 2020-10-29

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