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WO2019080230A1 - 柔性显示面板的分离装置和分离方法 - Google Patents

柔性显示面板的分离装置和分离方法

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Publication number
WO2019080230A1
WO2019080230A1 PCT/CN2017/112249 CN2017112249W WO2019080230A1 WO 2019080230 A1 WO2019080230 A1 WO 2019080230A1 CN 2017112249 W CN2017112249 W CN 2017112249W WO 2019080230 A1 WO2019080230 A1 WO 2019080230A1
Authority
WO
WIPO (PCT)
Prior art keywords
display panel
flexible display
vacuum adsorption
rigid substrate
adsorption block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/112249
Other languages
English (en)
French (fr)
Inventor
陶强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US15/579,352 priority Critical patent/US10518521B2/en
Publication of WO2019080230A1 publication Critical patent/WO2019080230A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • B32B38/105—Removing layers, or parts of layers, mechanically or chemically on edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/162—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using laser ablation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/221—Changing the shape of the active layer in the devices, e.g. patterning by lift-off techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2310/00—Treatment by energy or chemical effects
    • B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
    • B32B2310/0806—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation
    • B32B2310/0843—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation using laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H10K77/111—Flexible substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/918—Delaminating processes adapted for specified product, e.g. delaminating medical specimen slide
    • Y10S156/93—Semiconductive product delaminating, e.g. delaminating emiconductive wafer from underlayer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/934—Apparatus having delaminating means adapted for delaminating a specified article
    • Y10S156/941—Means for delaminating semiconductive product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1126—Using direct fluid current against work during delaminating
    • Y10T156/1132—Using vacuum directly against work during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1126—Using direct fluid current against work during delaminating
    • Y10T156/1137—Using air blast directly against work during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1153—Temperature change for delamination [e.g., heating during delaminating, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1911—Heating or cooling delaminating means [e.g., melting means, freezing means, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1928—Differential fluid pressure delaminating means
    • Y10T156/1944—Vacuum delaminating means [e.g., vacuum chamber, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a separation device and a separation method for a flexible display panel.
  • the flexible display panel is a display device formed based on a flexible substrate material. Since the flexible display panel has the characteristics of being curlable, wide viewing angle, and convenient to carry, it has broad application prospects and good market potential in some application fields such as portable products.
  • the flexible display panel has its own drawbacks while bringing a series of advantages. Due to the flexibility and thermal expansion of the flexible substrate, the processing of the display device is inconvenient, and the substrate is prone to sagging or even wrinkles or breakage. It is difficult to accurately carry out the subsequent film preparation process. In order to solve this problem, it is necessary to connect a flexible substrate to a rigid substrate such as a glass substrate to support and fix the flexible substrate to facilitate film formation. After the layers of the display panel are formed on the flexible substrate, the rigid substrate is peeled off from the flexible substrate by a lift-off process, thereby completing the preparation work of the flexible display panel.
  • a laser lift-off (LLO) process is generally used to ablate the adhesive layer between the flexible substrate and the rigid substrate, and the rigid substrate is also attached to the flexible substrate. How to peel the rigid substrate from the flexible substrate after the LLO process is a problem to be solved.
  • a blade is usually inserted between the bonding interface of the rigid substrate and the flexible substrate, and then the blade is moved to completely separate the rigid substrate and the flexible substrate. This method is relatively inefficient and can easily cause damage to rigid substrates and flexible substrates due to the use of blades.
  • the present invention provides a separation device and a separation method for a flexible display panel for peeling a rigid substrate from a flexible substrate after performing a laser lift-off process, which not only can effectively avoid a rigid substrate And the flexible substrate is damaged during the separation process, and can also improve work efficiency.
  • a separating device for a flexible display panel for peeling off a rigid substrate and a flexible display panel attached to each other comprising a support column, a power mechanism and a vacuum adsorption block; wherein the support column is for separating the separation
  • the device is supported on the opposite side of the rigid substrate to be separated;
  • the vacuum adsorption block is in communication with the support column and is configured to adsorb and connect the rigid substrate to be separated;
  • one end of the power mechanism is connected to the support column, and the other end is connected Rotatablely coupled to the vacuum adsorption block and used to control the vacuum adsorption block to be separated from the flexible display panel along with the rigid substrate to be separated.
  • the power mechanism includes a power output device and a drive shaft, the drive shaft extends in a first direction, and the power output device is dynamically coupled to the drive shaft to drive the drive shaft in the first direction
  • the vacuum adsorption block is rotatably coupled to the drive shaft; the first direction forms an angle with a normal direction of the rigid substrate to be separated.
  • the angle of the included angle is 5° to 30°.
  • the power output device is a cylinder
  • the power output device is connected to the first end of the drive shaft
  • the vacuum adsorption block is connected to the second end of the drive shaft.
  • vacuum adsorption block is connected to the second end of the drive shaft through a universal joint.
  • the separating device further includes: a blowing mechanism for blowing a gas into a bonding interface between the flexible display panel and the rigid substrate.
  • the vacuum adsorption block is further connected with a heating mechanism for heating the rigid substrate through the vacuum adsorption block.
  • the vacuum adsorption block is provided with a suction nozzle, and the suction nozzle is connected to the external vacuum adsorption device through the air pipe; the air pipe extends in the support column.
  • the present invention provides a method for separating a flexible display panel for separating a rigid substrate and a flexible display panel bonded to each other, the separation method comprising:
  • the flexible display panel is adsorbed and fixed on the vacuum adsorption platform toward the vacuum adsorption platform;
  • the power mechanism is controlled to continue pulling the vacuum adsorption block to extend the opening until the rigid substrate is completely peeled off from the flexible display panel.
  • the separation method further includes blowing a gas into the bonding interface through the opening when the vacuum adsorption block is pulled.
  • the speed of pulling the vacuum adsorption block by the power mechanism is 0.1-0.3 mm/s.
  • the separating method further comprises: heating the rigid substrate by conduction of the vacuum adsorption block when the vacuum adsorption block is pulled.
  • the temperature at which the rigid substrate is heated is 50 to 80 °C.
  • the separation device and the separation method of the flexible display panel applied a pulling force to the edge of the upper surface of the rigid substrate by suction and connect the direction toward the central axis of the rigid substrate, so that the flexible display panel and the flexible display panel
  • the bonding interface of the rigid substrate forms an opening portion that gradually extends toward the inside, and finally effectively and stably peels the rigid substrate from the flexible display panel, thereby improving work efficiency.
  • the contact fixation of the separation device with the rigid substrate and the flexible substrate is by vacuum adsorption to avoid damage to the rigid substrate and the flexible substrate during the separation process due to the use of a sharp tool such as a blade.
  • FIG. 1 is a schematic structural view of a separating device for a flexible display panel according to an embodiment of the present invention, and further showing a vacuum adsorption platform for carrying and adsorbing and fixing a flexible display panel;
  • FIGS. 2a-2f are exemplary diagrams corresponding to respective process steps in a process flow of a method for separating a flexible display panel according to an embodiment of the present invention.
  • the separation device 100 includes a support column 1, a power mechanism 2, and a vacuum adsorption block 3.
  • the support column 1 is used for supporting the separation device 100 above the rigid substrate 4 to be separated, and the vacuum adsorption block 3 is in communication with the support column 1 and is used for adsorbing and connecting the rigid substrate to be separated.
  • One end of the power mechanism 2 is connected to the support column 1, and the other end is rotatably connected to the vacuum adsorption block 3, and is used for controlling the vacuum adsorption block 3 together with the rigid substrate 4 to be separated.
  • the flexible display panel 5 is separated.
  • the power mechanism 2 is coupled to the support column 1.
  • the power mechanism 2 includes a power output device 21 and a drive shaft 22, and the drive shaft 22 is in a first direction (as shown in the figure).
  • the X direction of 1 extends, and the power output apparatus 21 is dynamically coupled to the drive shaft 22 to drive the drive shaft 22 to reciprocate in the first direction.
  • the vacuum adsorption block 3 is rotatably coupled to the drive shaft 22 for adsorbing and connecting the rigid substrate 4 to be separated.
  • the vacuum adsorption block 3 is provided with a suction nozzle 31, and the suction nozzle 31 is connected to the external vacuum adsorption device 6 through the air pipe 32, and the vacuum adsorption block 3 is placed.
  • the vacuum adsorption device 6 is controlled to evacuate through the air tube 32, so that the suction nozzle 31 is suction-bonded to the rigid substrate 4.
  • the air pipe 32 is fitted in the support column 1 to prevent the air pipe 32 from being scattered.
  • the first direction forms an angle ⁇ with the normal direction of the rigid substrate 4 to be separated (such as the Z direction in FIG. 1).
  • the angle of the included angle is preferably 5 to 30.
  • a vacuum adsorption platform 200 is first provided, and the flexible display panel 5 is adsorbed and fixed on the vacuum adsorption platform 200 toward the vacuum adsorption platform 200 , and the rigid substrate 4 is relatively flexible.
  • a fixed frame 300 is disposed above the vacuum adsorption platform 200, and the support column 1 is fixedly coupled to the fixed frame 300, whereby the support column 1 supports the separation device 100 on a rigid substrate to be separated 4 is relatively above.
  • the power mechanism 2 It may be attached to the support column 1 by a threaded fastener. Wherein, after setting the required angle ⁇ , the power mechanism 2 is fixed to the support column 1 by a threaded fastener.
  • the support column 1 is disposed in the vertical direction (the normal direction Z of the rigid substrate 4).
  • a laser stripping process is first performed by using a laser stripping device to ablate and fuse the adhesive layer between the flexible display panel 5 and the rigid substrate 4.
  • the bonding layer between the flexible display panel 5 and the rigid substrate 4 is ablated by irradiating a laser from above the rigid substrate 4.
  • the separating device 100 is fixedly connected to the fixing frame 300 through the support column 1, and then the vacuum adsorption block 3 is controlled to be attached to the upper surface of the rigid substrate 4, and then the power mechanism is controlled.
  • the power output device 21 is a cylinder, and the power output device 21 is connected to the first end of the drive shaft 22, the vacuum adsorption block 3 and the drive shaft.
  • the second end of 22 is connected.
  • the vacuum adsorption block 3 is coupled to the second end of the drive shaft 22 through a universal joint 7, whereby the rigidity is maintained with the movement direction of the drive shaft 22 unchanged.
  • the substrate 4 is peeled off, and the angle between the vacuum suction block 3 and the drive shaft 22 can be automatically adjusted by the connection of the universal joint 7, so that the bending stress is prevented from causing the rigid substrate 4 to be broken.
  • the separating device further includes a blowing mechanism 8 for bonding the flexible display panel 5 to the rigid substrate 4 . Blow in the gas.
  • gas is blown into the bonding interface by the air blowing mechanism 8, so that the flexible display panel 5 and the rigid substrate 4 can be better. Separate faster.
  • the vacuum adsorption block 3 is further connected with a heating mechanism 9 for heating the rigid substrate 4 through the vacuum adsorption block 3.
  • the heating mechanism 9 heats the rigid substrate 4 by conduction of the vacuum adsorption block 3, so that the rigid substrate 4 can be made easier from the The flexible display panel 5 is peeled off.
  • the separating device of the flexible display panel provided by the above embodiment is applied to peeling after performing the LLO process
  • the rigid substrate and the flexible display panel attached to each other are connected by vacuum suction, and the power mechanism provides a rigid substrate in a first direction forming an angle with the normal direction, which can effectively and stably peel the rigid substrate from the flexible display panel. Damage to the flexible display panel and the rigid substrate can also be avoided during the peeling process.
  • the separation device is simple in structure, easy to implement, and simple in operation, and is advantageous for application in large-scale industrial production.
  • the embodiment further provides a separation method of the flexible display panel for separating the rigid substrate and the flexible display panel bonded to each other.
  • the separation method will be described in detail below with reference to FIGS. 2a-2f. Specifically, the separation method includes the steps of:
  • a vacuum adsorption platform 200 is provided, and the flexible display panel 5 is adsorbed and fixed on the vacuum adsorption platform 200 toward the vacuum adsorption platform 200, above the vacuum adsorption platform 200.
  • a fixed frame 300 is provided. Specifically, after the flexible display panel 5 is formed on the rigid substrate 4, the flexible display panel 5 is directed toward the bearing surface of the vacuum adsorption platform 200, and the vacuum adsorption platform 200 is controlled to be vacuumed. The flexible display panel 5 is adsorbed and fixed on the vacuum adsorption platform 200. At this time, the rigid substrate 4 is relatively located above the flexible display panel 5.
  • a bonding process between the flexible display panel 5 and the rigid substrate 5 is ablated by applying a laser lift-off process. Specifically, by using the laser stripping apparatus 400, ablation is performed between the flexible display panel 5 and the rigid substrate 4 by irradiating laser light from above the rigid substrate 4 (the dotted arrow in the drawing indicates laser light). Layered. After the bonding layer is blown, the flexible display panel 5 and the rigid substrate 4 are attached to each other only, and the bonding force between the bonding interfaces is much smaller than the bonding force before the bonding layer is blown.
  • a separation device 100 for a flexible display panel according to the foregoing embodiment of the present invention is provided, and the separation device 100 is fixed above the rigid substrate 4. Specifically, the separation device 100 is fixedly coupled to the fixed frame 300 through the support column 1, and the support column 1 supports the separation device 100 above the rigid substrate 4.
  • two of the separating devices 100 are provided, and the two separating devices 100 are respectively fixed on the fixing frame 300, and the two separating devices 100 are respectively disposed at The opposite ends of the rigid substrate 4 need to simultaneously peel the rigid substrate 4 from opposite ends.
  • only one separation device 100 may be disposed, or a larger number of the separation devices 100 may be disposed.
  • the number of the separation devices 100 may be set according to actual needs. For example, when the size of the rigid substrate 4 to be separated is large, In order to provide a larger number of the separation device 100, the rigid substrate 4 is simultaneously peeled off from different positions.
  • the fixing frame 300 may be provided as a rail structure, and the support post 1 is disposed to be slidably coupled to the fixing frame 300 and configured with a locking member, which can be passed before the separating device 100 is positioned The support post 1 slides to adjust the position of the separating device 100, and after the position to be fixed is determined, the position of the support post 1 attached to the fixed frame 300 is locked and fixed by a locking member.
  • the vacuum adsorption block 3 that controls the separation device 100 is suction-bonded to the rigid substrate 4, and the vacuum adsorption block 3 is attached to the edge of the rigid substrate 4 at a position where it is attached. Specifically, the vacuum adsorption block 3 is attached to the surface of the rigid substrate 4, and then the vacuum adsorption device 6 is controlled to evacuate, so that the vacuum adsorption block 3 is suction-bonded to the rigid substrate 4.
  • the power mechanism 2 that controls the separation device 100 pulls the vacuum adsorption block 3 to separate the bonding interface of the flexible display panel 5 and the rigid substrate 4 to form an opening 4a. 4b.
  • the power absorbing device 21 drives the drive shaft 22 to pull the vacuum adsorption block 3 obliquely upward (in the first direction X), and the two sides of the rigid substrate 4 are bent. The both sides of the bonding interface of the flexible display panel 5 and the rigid substrate 4 are separated, and the openings 4a and 4b are formed.
  • the power output device 21 drives the drive shaft 22 to pull the vacuum adsorption block 3 obliquely upward (in the first direction) such that the opening portions 4a, 4b face the The center of the bonding interface extends until the opening portions 4a, 4b on both sides communicate with each other, thereby completely separating the rigid substrate 4 from the flexible display panel 5.
  • the speed at which the power mechanism 2 pulls the vacuum adsorption block 3 in the first direction should be controlled to be slow and At a constant speed, it is preferable that the moving speed is controlled to be between 0.1 and 0.3 mm/s, and the moving speed can be controlled by the power output device 21.
  • the separating device 100 further comprises a blowing mechanism 8, whereby in the above separating method, after the opening portions 4a, 4b are formed, the blowing mechanism 8 passes through the opening The portions 4a, 4b blow gas into the bonding interface of the flexible display panel 5 and the rigid substrate 4, whereby the flexible display panel 5 and the rigid substrate 4 can be separated better and faster.
  • the separation device 100 further comprises a heating mechanism 9 connected to the vacuum adsorption block 3, so in the above separation method, when the vacuum adsorption block 3 is absorbing and connecting the rigidity After the substrate 4, the rigid substrate 4 is heated by the heating mechanism 9, so that the rigid substrate 4 can be more easily peeled off from the flexible display panel 5.
  • Heating of the rigid substrate 4 should prevent heat from causing damage to the rigid substrate 4 and the flexible display panel 5, and thus the temperature of heating is preferably in the range of 50 ° C to 80 ° C.
  • the separation method of the flexible display panel provided by the above embodiment is to apply a pulling force to the edge of the upper surface of the rigid substrate by suction and to apply a pulling force toward the central axis of the rigid substrate, so that the bonding interface of the flexible display panel and the rigid substrate is gradually extended to the inside.
  • the opening portion finally effectively and stably peels the rigid substrate from the flexible display panel, thereby improving work efficiency.
  • the contact fixing of the separating device with the rigid substrate and the flexible substrate is by vacuum adsorption, thereby avoiding damage of the rigid substrate and the flexible substrate during the separation process due to the use of a sharp tool.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

本发明公开了一种柔性显示面板的分离装置，其包括支撑柱、动力机构和真空吸附块；其中，所述支撑柱用于将所述分离装置支撑在待分离的刚性基板的相对上方；所述真空吸附块与支撑柱连通，并用于吸附连接所述待分离的刚性基板；所述动力机构的一端连接在所述支撑柱上，另一端可转动地与所述真空吸附块连接，并用于控制所述真空吸附块连同待分离的刚性基板一起与所述柔性显示面板分离。本发明还公开了一种柔性显示面板的分离方法，首先应用激光剥离工艺烧蚀熔断柔性显示面板与刚性基板之间的粘结层，然后再应用前述的分离装置将刚性基板从所述柔性显示面板上剥离。

Description

柔性显示面板的分离装置和分离方法 技术领域
本发明涉及显示技术领域，尤其涉及一种柔性显示面板的分离装置和分离方法。
背景技术
柔性显示面板是一种基于柔性基底材料制作形成的显示装置。由于柔性显示面板具有可卷曲、宽视角、便于携带等特点，因此，在便携产品等一些应用领域中具有广阔的应用前景以及良好的市场潜力。
柔性显示面板在带来一系列优点的同时也具有其本身的缺陷，由于柔性基板具有挠性和热膨胀性等问题，给显示器件的加工带来不便，容易出现基板下垂，甚至产生褶皱或断裂，很难精准的进行后续膜层的制备工序。为了解决该问题，需要将柔性基板连接于刚性的基板如玻璃基板上，用以支撑和固定柔性基板以利于薄膜的形成。在柔性基板上制备形成显示面板的各层元件之后，再通过剥离工艺，将刚性基板从柔性基板上剥离开来，从而完成柔性显示面板的制备工作。
对于刚性基板和柔性基板的分离，通常采用激光剥离(Laser Lift-Off，LLO)工艺，烧蚀熔断柔性基板与刚性基板之间的粘结层，此时刚性基板还是贴合在柔性基板上。在进行LLO工艺之后，如何将刚性基板从柔性基板上剥离，是需要解决的问题。现有技术中，通常是使用刀片插入到刚性基板和柔性基板的贴合界面之间，然后移动刀片使得刚性基板和柔性基板完全分离。这种方法的工作效率比较低，并且由于使用刀片，极易造成刚性基板和柔性基板损伤。
发明内容
鉴于现有技术存在的不足，本发明提供了一种柔性显示面板的分离装置和分离方法，用于在进行激光剥离工艺之后，将刚性基板从柔性基板上剥离，其不仅可以有效地避免刚性基板和柔性基板在分离过程中受损，并且还可以提高工作效率。
为了达到上述的目的，本发明采用了如下的技术方案：
一种柔性显示面板的分离装置，用于剥离相互贴附的刚性基板与柔性显示面板，所述分离装置包括支撑柱、动力机构和真空吸附块；其中，所述支撑柱用于将所述分离装置支撑在待分离的刚性基板的相对上方；所述真空吸附块与支撑柱连通，并用于吸附连接所述待分离的刚性基板；所述动力机构的一端连接在所述支撑柱上，另一端可转动地与所述真空吸附块连接，并用于控制所述真空吸附块连同待分离的刚性基板一起与所述柔性显示面板分离。
其中，所述动力机构包括动力输出设备和驱动轴，所述驱动轴且沿第一方向延伸，所述动力输出设备与所述驱动轴动力连接以驱动所述驱动轴在所述第一方向上往复动作，所述真空吸附块可转动地连接在所述驱动轴上；所述第一方向与所述待分离的刚性基板的法线方向之间形成夹角。
其中，所述夹角的角度为5°～30°。
其中，所述动力输出设备为气缸，所述动力输出设备与所述驱动轴的第一端连接，所述真空吸附块与所述驱动轴的第二端连接。
其中，所述真空吸附块通过万向接头连接在所述驱动轴的第二端。
其中，所述分离装置还包括：吹气机构，所述吹气机构用于向所述柔性显示面板与所述刚性基板的贴合界面吹入气体。
其中，所述真空吸附块上还连接有加热机构，所述加热机构用于通过所述真空吸附块向所述刚性基板加热。
其中，所述真空吸附块中设置有吸嘴，所述吸嘴通过气管连通到外部的真空吸附设备；所述气管在所述支撑柱中延伸。
本发明提供了一种柔性显示面板的分离方法，用于分离相互粘接的刚性基板和柔性显示面板，所述分离方法包括：
提供一真空吸附平台，将所述柔性显示面板朝向所述真空吸附平台吸附固定在所述真空吸附平台上；
应用激光剥离工艺，烧蚀熔断所述柔性显示面板与所述刚性基板之间的粘结层；
提供如上所述的柔性显示面板的分离装置，将所述分离装置固定在所述刚 性基板的上方；
控制所述分离装置的真空吸附块吸附连接所述刚性基板，所述真空吸附块吸附连接的位置邻近于所述刚性基板的边缘；
控制所述分离装置的动力机构提拉所述真空吸附块，使所述柔性显示面板与所述刚性基板的贴合界面分离开形成开口部；
控制所述动力机构继续提拉所述真空吸附块，使所述开口部延伸直至所述刚性基板完全从所述柔性显示面板上剥离。
其中，所述分离方法还包括：在提拉所述真空吸附块时，通过所述开口部向所述贴合界面吹入气体。
其中，所述动力机构提拉所述真空吸附块的速度为0.1～0.3mm/s。
其中，所述分离方法还包括：在提拉所述真空吸附块时，通过所述真空吸附块的传导向所述刚性基板加热。
其中，向所述刚性基板加热的温度为50℃～80℃。
相比于现有技术，本发明实施例提供的柔性显示面板的分离装置和分离方法，通过吸附连接刚性基板上表面的边缘处，并朝向刚性基板中心轴的方向施加拉力，使得柔性显示面板与刚性基板的贴合界面形成逐渐向内部延伸的开口部，最终有效且稳定地将刚性基板从柔性显示面板上剥离，提高工作效率。在分离的过程中，分离装置与刚性基板和柔性基板的接触固定是通过真空吸附的方式，避免由于使用锐利的工具(例如刀片)造成刚性基板和柔性基板在分离过程中受损。
附图说明
图1是本发明实施例提供的柔性显示面板的分离装置的结构示意图，图中还示出了用于承载并吸附固定柔性显示面板的真空吸附平台；
图2a-图2f是本发明实施例提供的柔性显示面板的分离方法的工艺流程中，各个工艺步骤对应的示例性图示。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚，下面结合附图对本发明的 具体实施方式进行详细说明。这些优选实施方式的示例在附图中进行了例示。附图中所示和根据附图描述的本发明的实施方式仅仅是示例性的，并且本发明并不限于这些实施方式。
在此，还需要说明的是，为了避免因不必要的细节而模糊了本发明，在附图中仅仅示出了与根据本发明的方案密切相关的结构和/或处理步骤，而省略了与本发明关系不大的其他细节。
本实施例首先提供了一种柔性显示面板的分离装置，用于剥离相互贴附的刚性基板与柔性显示面板。如图1所示，所述分离装置100包括支撑柱1、动力机构2和真空吸附块3。所述支撑柱1用于将所述分离装置100支撑在待分离的刚性基板4的相对上方，所述真空吸附块3与所述支撑柱1连通，并用于吸附连接所述待分离的刚性基板4。所述动力机构2的一端连接在所述支撑柱1上，另一端可转动地与所述真空吸附块3连接，并用于控制所述真空吸附块3连同待分离的刚性基板4一起与所述柔性显示面板5分离。
具体地，如图1所示，所述动力机构2连接在所述支撑柱1上，所述动力机构2包括动力输出设备21和驱动轴22，所述驱动轴22沿第一方向(如图1中的X方向)延伸，所述动力输出设备21与所述驱动轴22动力连接以驱动所述驱动轴22在所述第一方向上往复动作。所述真空吸附块3可转动地连接在所述驱动轴22上，所述真空吸附块3用于吸附连接所述待分离的刚性基板4。
在本实施例中，如图1所示，所述真空吸附块3中设置有吸嘴31，所述吸嘴31通过气管32连通到外部的真空吸附设备6，将所述真空吸附块3放置在所述刚性基板4的表面上时，控制真空吸附设备6通过气管32抽真空，使得吸嘴31吸附连接所述刚性基板4。本实施例中，所述气管32装配在所述支撑柱1中，防止所述气管32散落。
其中，参阅图1，所述第一方向与所述待分离的刚性基板4的法线方向(如图1中的Z方向)之间形成夹角α。所述夹角的角度优选为5°～30°。
在具体地应用中，如图1所示，首先提供真空吸附平台200，将柔性显示面板5朝向所述真空吸附平台200吸附固定在所述真空吸附平台200上，此时刚性基板4相对位于柔性显示面板5上。所述真空吸附平台200的上方设置有固定框架300，所述支撑柱1固定连接到所述固定框架300上，由此，所述支撑柱1将所述分离装置100支撑在待分离的刚性基板4的相对上方。所述动力机构2 可以是通过螺纹紧固件连接在所述支撑柱1上。其中，在设定所需要的夹角α之后，通过螺纹紧固件将所述动力机构2固定在所述支撑柱1上。本实施例中，所述支撑柱1沿竖直方向(刚性基板4的法线方向Z)设置。
其中，所述柔性显示面板5和所述刚性基板4之间首先是采用激光剥离设备进行激光剥离工艺，以烧蚀熔断所述柔性显示面板5与所述刚性基板4之间的粘结层。通过从所述刚性基板4的上方照射激光，烧蚀熔断所述柔性显示面板5和所述刚性基板4之间的粘结层。在粘结层熔断之后，所述柔性显示面板5和所述刚性基板4还是相互贴合在一起，此时再使用所述的分离装置100将所述刚性基板4从所述柔性显示面板5上剥离。具体地，将所述分离装置100通过所述支撑柱1固定连接到所述固定框架300上，然后控制所述真空吸附块3吸附连接所述刚性基板4的上表面，再控制所述动力机构2沿所述第一方向提拉所述真空吸附块3，使所述柔性显示面板5与所述刚性基板4的贴合界面分离开形成开口部，继续提拉所述真空吸附块3，直至所述刚性基板4完全从所述柔性显示面板5上剥离。
在本实施例中，如图1所示，所述动力输出设备21为气缸，所述动力输出设备21与所述驱动轴22的第一端连接，所述真空吸附块3与所述驱动轴22的第二端连接。具体地，所述真空吸附块3通过万向接头7连接在所述驱动轴22的第二端，由此，在保持所述驱动轴22的移动方向不变的情况下，随着所述刚性基板4被剥离开，通过万向接头7的连接，所述真空吸附块3与所述驱动轴22之间的角度可以自动调整，避免产生弯折应力使得所述刚性基板4破损。
进一步地，本实施例中，如图1所示，所述分离装置还包括吹气机构8，所述吹气机构8用于向所述柔性显示面板5与所述刚性基板4的贴合界面吹入气体。在使用所述真空吸附块3吸附剥离所述刚性基板4时，通过所述吹气机构8向贴合界面吹入气体，可以使得所述柔性显示面板5和所述刚性基板4之间更好更快地分离。
进一步地，本实施例中，如图1所示，所述真空吸附块3上还连接有加热机构9，所述加热机构9用于通过所述真空吸附块3向所述刚性基板4加热。在使用所述真空吸附块3吸附剥离所述刚性基板4时，通过真空吸附块3的传导，所述加热机构9对所述刚性基板4加热，可以使得所述刚性基板4更易于从所述柔性显示面板5上剥离。
如上实施例提供的柔性显示面板的分离装置，应用于进行LLO工艺之后剥 离相互贴附的刚性基板与柔性显示面板，采用真空吸附连接，并动力机构沿与法线方向形成夹角的第一方向提供刚性基板，可以有效且稳定地将刚性基板从柔性显示面板上剥离，在剥离的过程中也可以避免对柔性显示面板和刚性基板造成损伤。另外，所述分离装置结构简单，易于实现，并且其操作简单，有利于应用于大规模的工业化生产中。
基于同一发明构思，本实施例还提供了一种柔性显示面板的分离方法，用于分离相互粘接的刚性基板和柔性显示面板。下面结合附附图2a-2f对所述分离方法进行详细说明，具体地，所述分离方法包括步骤：
S1、如图2a所示，首先是提供一真空吸附平台200，将所述柔性显示面板5朝向所述真空吸附平台200吸附固定在所述真空吸附平台200上，所述真空吸附平台200的上方设置有固定框架300。具体地，在所述刚性基板4上制备形成所述柔性显示面板5之后，将所述柔性显示面板5朝向所述真空吸附平台200的承载面，控制所述真空吸附平台200抽真空，将所述柔性显示面板5吸附固定在所述真空吸附平台200上，此时，所述刚性基板4相对位于所述柔性显示面板5的上方。
S2、如图2b所示，应用激光剥离工艺，烧蚀熔断所述柔性显示面板5与所述刚性基板5之间的粘结层。具体地，采用激光剥离设备400，通过从所述刚性基板4的上方照射激光(附图中的虚线箭头表示激光)，烧蚀熔断所述柔性显示面板5和所述刚性基板4之间的粘结层。在粘结层熔断之后，所述柔性显示面板5和所述刚性基板4仅是相互贴附在一起，贴合界面之间的贴附作用力远小于粘结层熔断之前的粘接作用力。
S3、如图2c所示，提供本发明前述实施例中所述的柔性显示面板的分离装置100，将所述分离装置100固定在所述刚性基板4的上方。具体地，将所述分离装置100通过所述支撑柱1固定连接到所述固定框架300上，所述支撑柱1将所述分离装置100支撑在所述刚性基板4的相对上方。
在本实施例的剥离工艺中，参阅图2c，设置了两个所述分离装置100，两个所述分离装置100分别固定在所述固定框架300上，且该两个分离装置100分别设置在所述刚性基板4上方的相对两端，需要从相对两端同时剥离所述刚性基板4。需要说明是，在另外的一些实施例中，也可以是仅仅设置一个所述分离装置100，也可以是设置更多数量的所述分离装置100，所述分离装置100的数量可以根据实际需要设定，例如，当待分离的刚性基板4的尺寸较大时，可 以设置较多数量的所述分离装置100，从不同的位置同时剥离所述刚性基板4。
进一步地，所述固定框架300可以设置为导轨结构，所述支撑柱1设置为可滑动地连接在所述固定框架300上并配置有锁紧部件，在所述分离装置100定位之前，可以通过所述支撑柱1滑动调整所述分离装置100的位置，在确定需要固定的位置之后，在由锁紧部件锁紧固定所述支撑柱1连接在所述固定框架300上的位置。
S4、如图2d所示，控制所述分离装置100的真空吸附块3吸附连接所述刚性基板4，所述真空吸附块3吸附连接的位置邻近于所述刚性基板4的边缘。具体地，将所述真空吸附块3贴附在所述刚性基板4的表面上，然后控制真空吸附设备6抽真空，使得所述真空吸附块3吸附连接所述刚性基板4。
S5、如图2e所示，控制所述分离装置100的动力机构2提拉所述真空吸附块3，使所述柔性显示面板5与所述刚性基板4的贴合界面分离开形成开口部4a、4b。具体地，本实施例中，由所述动力输出设备21驱动所述驱动轴22向斜上方(沿第一方向X)提拉所述真空吸附块3，所述刚性基板4的两侧边缘弯曲翘起，所述柔性显示面板5与所述刚性基板4的贴合界面的两侧边缘被分离，形成开口部4a、4b。
S6、参阅图2e和2f所示，控制所述动力机构2继续提拉所述真空吸附块3，使所述开口部4a、4b延伸直至所述刚性基板4完全从所述柔性显示面板5上剥离。具体地，本实施例中，由所述动力输出设备21驱动所述驱动轴22向斜上方(沿第一方向)提拉所述真空吸附块3，使所述开口部4a、4b朝向所述贴合界面的中心延伸，直至两侧的开口部4a、4b相互连通，从而将所述刚性基板4从所述柔性显示面板5上完全分离。
其中，为了避免所述真空吸附块3提拉的过程中造成所述刚性基板4弯曲断裂，所述动力机构2沿所述第一方向提拉所述真空吸附块3的速度应当控制为缓慢且匀速的，优选的是，所述移动速度控制为0.1～0.3mm/s之间，可以通过所述动力输出设备21控制所述移动速度。
在优选的方案中，参阅图2e，所述分离装置100还包括吹气机构8，因此在以上分离方法中，在形成所述开口部4a、4b之后，所述吹气机构8通过所述开口部4a、4b向所述柔性显示面板5与所述刚性基板4的贴合界面吹入气体，由此可以使得所述柔性显示面板5和所述刚性基板4之间更好更快地分离。
在优选的方案中，参阅图2e，所述分离装置100还包括连接在所述真空吸附块3上的加热机构9，因此在以上分离方法中，当所述真空吸附块3吸附连接所述刚性基板4之后，通过所述加热机构9对所述刚性基板4加热，可以使得所述刚性基板4更易于从所述柔性显示面板5上剥离。对所述刚性基板4的加热应当避免热量导致所述刚性基板4和所述柔性显示面板5受到损伤，因此加热的温度优选的范围是50℃～80℃。
如上实施例提供的柔性显示面板的分离方法，通过吸附连接刚性基板上表面的边缘处，并朝向刚性基板中心轴的方向施加拉力，使得柔性显示面板与刚性基板的贴合界面形成逐渐向内部延伸的开口部，最终有效且稳定地将刚性基板从柔性显示面板上剥离，提高工作效率。在分离的过程中，分离装置与刚性基板和柔性基板的接触固定是通过真空吸附的方式，避免由于使用锐利的工具造成刚性基板和柔性基板在分离过程中受损。
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个......”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (18)

  1. 一种柔性显示面板的分离装置，用于剥离相互贴附的刚性基板与柔性显示面板，其中，所述分离装置包括支撑柱、动力机构和真空吸附块；其中，
    所述支撑柱用于将所述分离装置支撑在待分离的刚性基板的相对上方；
    所述真空吸附块与支撑柱连通，并用于吸附连接所述待分离的刚性基板；
    所述动力机构的一端连接在所述支撑柱上，另一端可转动地与所述真空吸附块连接，并用于控制所述真空吸附块连同待分离的刚性基板一起与所述柔性显示面板分离。
  2. 根据权利要求1所述的柔性显示面板的分离装置，其中，所述动力机构包括动力输出设备和驱动轴，所述驱动轴沿第一方向延伸，所述动力输出设备与所述驱动轴动力连接以驱动所述驱动轴在所述第一方向上往复动作，所述真空吸附块可转动地连接在所述驱动轴上；其中，所述第一方向与所述待分离的刚性基板的法线方向之间形成夹角。
  3. 根据权利要求2所述的柔性显示面板的分离装置，其中，所述夹角的角度为5°～30°。
  4. 根据权利要求2所述的柔性显示面板的分离装置，其中，所述动力输出设备为气缸，所述动力输出设备与所述驱动轴的第一端连接，所述真空吸附块与所述驱动轴的第二端连接。
  5. 根据权利要求4所述的柔性显示面板的分离装置，其中，所述真空吸附块通过万向接头连接在所述驱动轴的第二端。
  6. 根据权利要求1所述的柔性显示面板的分离装置，其中，所述分离装置还包括：
    吹气机构，所述吹气机构用于向所述柔性显示面板与所述刚性基板的贴合界面吹入气体。
  7. 根据权利要求1所述的柔性显示面板的分离装置，其中，所述真空吸附块上还连接有加热机构，所述加热机构用于通过所述真空吸附块向所述刚性基板加热。
  8. 根据权利要求1所述的柔性显示面板的分离装置，其中，所述真空吸附块中设置有吸嘴，所述吸嘴通过气管连通到外部的真空吸附设备；所述气管在所述支撑柱中延伸。
  9. 一种柔性显示面板的分离方法，用于分离相互粘接的刚性基板和柔性显示面板，其中，所述分离方法包括：
    提供一真空吸附平台，将所述柔性显示面板朝向所述真空吸附平台吸附固定在所述真空吸附平台上；
    应用激光剥离工艺，烧蚀熔断所述柔性显示面板与所述刚性基板之间的粘结层；
    提供柔性显示面板的分离装置，将所述分离装置固定在所述刚性基板的上方；其中，所述分离装置包括支撑柱、动力机构和真空吸附块；所述支撑柱用于将所述分离装置支撑在待分离的刚性基板的相对上方，所述真空吸附块与支撑柱连通，并用于吸附连接所述待分离的刚性基板，所述动力机构的一端连接在所述支撑柱上，另一端可转动地与所述真空吸附块连接；
    控制所述分离装置的真空吸附块吸附连接所述刚性基板，所述真空吸附块吸附连接的位置邻近于所述刚性基板的边缘；
    控制所述分离装置的动力机构提拉所述真空吸附块，使所述柔性显示面板与所述刚性基板的贴合界面分离开形成开口部；
    控制所述动力机构继续提拉所述真空吸附块，使所述开口部延伸直至所述刚性基板完全从所述柔性显示面板上剥离。
  10. 根据权利要求9所述的柔性显示面板的分离方法，其中，所述动力机构提拉所述真空吸附块的速度为0.1～0.3mm/s。
  11. 根据权利要求9所述的柔性显示面板的分离方法，其中，所述动力机构包括动力输出设备和驱动轴，所述驱动轴沿第一方向延伸，所述动力输出设备与所述驱动轴动力连接以驱动所述驱动轴在所述第一方向上往复动作，所述真空吸附块可转动地连接在所述驱动轴上；
    其中，所述第一方向与所述待分离的刚性基板的法线方向之间形成夹角，所述动力机构沿所述第一方向提拉所述真空吸附块，使所述柔性显示面板与所述刚性基板的贴合界面分离开形成开口部。
  12. 根据权利要求11所述的柔性显示面板的分离方法，其中，所述夹角的角度为5°～30°。
  13. 根据权利要求11所述的柔性显示面板的分离方法，其中，所述动力输出设备为气缸，所述动力输出设备与所述驱动轴的第一端连接，所述真空吸附块与所述驱动轴的第二端连接。
  14. 根据权利要求13所述的柔性显示面板的分离方法，其中，所述真空吸附块通过万向接头连接在所述驱动轴的第二端。
  15. 根据权利要求9所述的柔性显示面板的分离方法，其中，所述分离装置还包括吹气机构，所述吹气机构用于向所述柔性显示面板与所述刚性基板的贴合界面吹入气体；
    所述分离方法还包括：在提拉所述真空吸附块时，通过所述开口部向所述贴合界面吹入气体。
  16. 根据权利要求9所述的柔性显示面板的分离方法，其中，所述真空吸附块上还连接有加热机构，所述加热机构用于通过所述真空吸附块向所述刚性基板加热；
    所述分离方法还包括：在提拉所述真空吸附块时，通过所述真空吸附块的传导向所述刚性基板加热。
  17. 根据权利要求16所述的柔性显示面板的分离方法，其中，向所述刚性基板加热的温度为50℃～80℃。
  18. 根据权利要求9所述的柔性显示面板的分离方法，其中，所述真空吸附块中设置有吸嘴，所述吸嘴通过气管连通到外部的真空吸附设备；所述气管在所述支撑柱中延伸。
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