WO2019064366A1 - Bonding method and bonding device, and manufacturing method and manufacturing device for display device - Google Patents

Abstract

In a phase where the display film (2) is disposed between the concave surface of the concave substrate (30) and the pressing surface of the elastic pressing portion (60), in plan view in a state where the concave and the display film (2) are separated, The elastic pressing portion (60) overlaps the entire concave surface of the concave substrate (30).

Description

Bonding method and bonding apparatus, and manufacturing method and manufacturing apparatus for display device

The present invention relates to a bonding method and a bonding apparatus for bonding substrates.

When the display substrate provided in the display device is a flexible display substrate made of, for example, an EL element, it is attached to a protective substrate having a concave surface (including a protective substrate having a concavely bent flexible substrate). Is desired.

Japan Re-issue Patent Gazette "WO 2014/021192 (internationally published February 6, 2014)"

An object of the present invention is to improve the uniformity of the force for pressing a thin substrate against the concave surface of a concave substrate.

The bonding method according to an aspect of the present invention is a bonding method in which a flexible substrate is bonded to a concave surface of a concave substrate via an adhesive, and between the concave surface and the pressing surface of the elastic pressing portion, The first step of arranging the flexible substrate, and the second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion, the elastic pressing The portion is supported by the rigid pressing portion on the bottom surface opposite to the pressing surface, and in the first step, the elastic pressing portion in a plan view in which the concave surface and the flexible substrate are separated. Is a method of overlapping with the entire surface of the concave surface.

The bonding method according to another aspect of the present invention is a bonding method in which a flexible substrate is bonded to a concave surface of a concave substrate via an adhesive, and it is between the concave surface and the pressing surface of the elastic pressing portion. A first step of arranging the flexible substrate, and a second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion, The elastic pressing portion is supported by the rigid pressing portion on the bottom surface opposite to the pressing surface, and (i) inside the elastic pressing portion and (ii) between the elastic pressing portion and the rigid pressing portion A cavity is provided in at least one side, and the cavity is a collapsing method in the second step.

A bonding apparatus according to another aspect of the present invention is a bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive, and (i) a pressing surface and an opposite side of the pressing surface And (ii) an elastic pressing portion for pressing the flexible substrate disposed between the concave surface and the pressing surface against the concave surface while being elastically deformed, and the elastic pressing portion The elastic pressing portion is configured to overlap the entire surface of the concave surface in a plan view including a rigid pressing portion supported by the bottom surface and the concave surface and the flexible substrate being separated.

A bonding apparatus according to another aspect of the present invention is a bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive, and (i) a pressing surface and an opposite side of the pressing surface And (ii) an elastic pressing portion for pressing the flexible substrate disposed between the concave surface and the pressing surface against the concave surface while being elastically deformed, and the elastic pressing portion A hollow portion is provided in at least one of (i) the inside of the elastic pressing portion and (ii) between the elastic pressing portion and the rigid pressing portion, including a rigid pressing portion supported by the bottom surface; When the elastic pressing portion presses the flexible substrate against the concave surface while being elastically deformed, the cavity is crushed.

According to one aspect of the present invention, the uniformity of the force pressing the thin substrate against the concave surface of the concave substrate can be improved.

It is a figure which shows the outline | summary of the display apparatus which concerns on some embodiment of this invention. It is a figure which shows an example of schematic structure of the cover glass shown in FIG. (A) of FIG. 2 is a perspective view, and (b) of FIG. 2 is an XY sectional view. It is a figure which shows an example of schematic structure of the display film shown in FIG. (A) of FIG. 3 is a perspective view, and (b) of FIG. 3 is an XY sectional view. It is a flowchart which shows an example of the manufacturing method of the display film shown in FIG. (A) of FIG. 5 is a cross-sectional view showing an example of the configuration during formation of the display film shown in FIG. 1, and (b) of FIG. 5 is a cross-sectional view showing an example of configuration of the display film shown in FIG. It is. Fig.6 (a) is a figure which shows the aspect by which the elastic pressing part, the cover glass, and the display film in-between were aligned with an example of schematic structure of the bonding apparatus which concerns on one Embodiment of this invention, 6 (b) is a top view which shows the positional relationship of the elastic press part in (a) of FIG. 6, a display film, and a cover glass. A phase of arranging a display film between the concave surface 32 and the pressing surface 61 of the elastic pressing portion 60 in a state where the elastic pressing portion is not elastically deformed as an example of the schematic configuration of the bonding apparatus shown in FIG. It is a figure which shows 1st process. It is a figure which shows the aspect (2nd process) which the display film is pressed on a concave surface, the elastic press part being elastically deformed according to a concave surface as an example of schematic structure of the bonding apparatus shown in FIG. It is a figure which shows an example of schematic structure of the elastic press part shown in FIG. (A) of FIG. 9 is a perspective view, and (b) of FIG. 9 is an XY sectional view. It is a flowchart which shows the bonding method which concerns on the said one Embodiment of this invention. (A) of FIG. 11 is a figure which shows the aspect by which the elastic press part, the display film, and the cover glass were aligned with one example of schematic structure of the bonding apparatus which concerns on another embodiment of this invention, (B) of FIG. 11 is an example of the schematic configuration of the bonding apparatus according to another embodiment, in which the elastic pressing portion presses the display film concavely while being elastically deformed following the concave surface. It is a figure which shows (2nd process). It is a figure which shows an example of schematic structure of the elastic press part shown in FIG. (A) of FIG. 12 is a perspective view, and (b) of FIG. 12 is an XY sectional view. It is a figure which shows the aspect by which the elastic pressing part, the cover glass, and the display film in-between were aligned with one example of schematic structure of the bonding apparatus which concerns on another one Embodiment of this invention. A phase of arranging a display film between the concave surface 32 and the pressing surface 61 of the elastic pressing portion 60 in a state where the elastic pressing portion is not elastically deformed as an example of the schematic configuration of the bonding apparatus shown in FIG. It is a figure which shows 1st process. The elastic press part of an example of schematic structure of the bonding apparatus shown in FIG. 13 is a figure which shows the aspect (2nd process) which is pressing a display film concavely, elastically deforming according to a concave surface. It is a figure which shows an example of schematic structure of the elastic press part shown in FIG. (A) of FIG. 16 is a perspective view, and (b) of FIG. 16 is an XY sectional view. Fig.17 (a) is a figure which shows the aspect by which the elastic press part, the display film, and the cover glass were aligned with one example of schematic structure of the bonding apparatus which concerns on another embodiment of this invention, (B) of FIG. 17 is an example of the schematic configuration of the bonding apparatus according to the another embodiment, in which the elastic pressing portion presses the display film concavely while being elastically deformed following the concave surface. It is a figure which shows (2nd process). It is a figure which shows an example of schematic structure of the elastic press part shown in FIG. (A) of FIG. 18 is a perspective view, and (b) of FIG. 18 is an XY sectional view. It is a perspective view which shows the example of a schematic structure which combined the structure of the elastic press part which concerns on some embodiment of this invention. (A) of FIG. 20 is a figure which shows the aspect by which the elastic press part, the display film, and the cover glass were aligned with one example of schematic structure of the bonding apparatus which concerns on a comparative example, and (b) of FIG. These are figures which show the aspect which the display film is pressed on a concave surface, the elastic press part being elastically deformed according to a concave surface as an example of schematic structure of the bonding apparatus which concerns on the said comparative example.

Embodiment 1
FIG. 1 is a view showing an outline of a display device 1 according to the present embodiment.

As shown in FIG. 1, the display device 1 according to the present embodiment includes a cover glass 30 which is a concave substrate, a display film 2 which is a flexible substrate, an adhesive between the cover glass 30 and the display film 2. 40 and a housing 80. The display device 1 may include a touch sensor film between the cover glass 30 and the display film 2 depending on the situation.

The housing 80 supports the cover glass 30 and the display film 2. The housing 80 may incorporate a power supply such as a battery, a storage device, or an arithmetic device, depending on the situation.

(cover glass)
The cover glass 30 will be described below.

FIG. 2 is a view showing an example of a schematic configuration of the cover glass 30 shown in FIG. (A) of FIG. 2 is a perspective view, and (b) of FIG. 2 is an XY sectional view.

The cover glass 30 is (i) rigid and shaped concavely or (ii) flexible and held so as to be concave. The cover glass 30 is a transparent substrate formed of a transparent material capable of transmitting visible light, such as inorganic glass or transparent plastic.

As shown in FIG. 2, one main surface 31 of the cover glass 30 is a convex surface, and the other main surface 32 on the opposite side is a concave surface. Hereinafter, the major surface 31 is referred to as a convex surface 31 and the major surface 32 is referred to as a concave surface 32.

The cover glass 30 may have any shape as long as it is concave. For example, the shape of the cover glass 30 may be substantially rectangular, substantially circular, or any other shape. For example, the central portion 33 of the cover glass 30 may be substantially flat or curved. For example, even if any one or several ends 34 of the plurality of ends 34 of the cover glass 30 stand up with respect to the central part 33, all of the all ends 34 with respect to the central part 33 You may stand up. The rising end 34 may be curved and stood up, even if it is bent up and stood up. The starting line of the rising end 34 may be parallel, oblique, straight or curved to the edge of the end.

In the shape shown in FIG. 2, (i) the even shape of the cover glass 30 is substantially rectangular, (ii) the central portion 33 is substantially flat, and (iii) the two end portions 34 facing each other start to rise Curved and standing so that the line is a straight line parallel to the edge of the end and the standing heights H1 are identical to each other, and (iv) two other ends 34 facing each other are standing up Absent.

The edges of the plurality of ends 34 span the interface 37. The interface 37 is one or more planes and / or curved surfaces including the edge, and includes, for example, two XY planes and one ZY plane in the shape shown in FIG. The concave surface 32 defines a concave space 36 surrounded by the boundary surface 37 and the concave surface 32. The length (width) of the concave space 36 in the Y-axis direction is W1, and the length (height) in the X-axis direction is H1.

Although an example in which the present invention is applied to the cover glass 30 having the shape shown in FIG. 2 will be described in this specification, this does not limit the scope of the present invention. It will be clear to the person skilled in the art with reference to the present specification and the attached drawings how the invention can be applied to a cover glass 30 other than the one shown in FIG.

In the present specification and the attached drawings, an XYZ orthogonal coordinate system defined as follows is used.
X axis: An axis orthogonal to the convex surface 31 and the concave surface 32 in the central portion 33, with the direction in which the convex surface 31 faces is positive (+), and the direction in which the concave surface 32 faces is negative (−).
Y axis: axis parallel to the edge of the non-rising end 34.
Z axis: axis parallel to the edge of the rising end 34.

(Display film)
The display film 2 will be described below.

FIG. 3 is a view showing an example of a schematic configuration of the display film 2 shown in FIG. (A) of FIG. 3 is a perspective view, and (b) of FIG. 3 is an XY sectional view.

The EL film 2 is a display substrate having flexibility capable of being along the concave surface 32 of the cover glass 30.

As shown in FIG. 3, one main surface 41 of the display film 2 is a light emitting surface that emits light, and the other main surface 42 on the opposite side is a non-lighting wiring, a circuit element, etc. It is a light emitting surface. Hereinafter, the main surface 41 is referred to as a light emitting surface 41, and the main surface 42 is referred to as a non-light emitting surface 42. In the display device 1 shown in FIG. 1, the display film 2 is disposed so that the light emitting surface 41 faces the cover glass 30 and the non-light emitting surface 42 faces the housing 80.

The shape of the light emitting surface 41 of the display film 2 generally corresponds substantially to or slightly smaller than the shape of the concave surface 32 of the cover glass 30. The length (thickness) of the display film 2 in the X-axis direction is D1. Since the thickness D1 of the display film 2 is relatively small relative to the concave space 36, it may be ignored (considered about 0).

FIG. 4 is a flow chart showing an example of a method of manufacturing a flexible organic electroluminescent display film 2 (hereinafter abbreviated as EL display film 2) as an example of the display film 2 shown in FIG. FIG. 5 is a cross-sectional view showing an example of a schematic configuration of an EL display film 2 as an example of the display film 2 shown in FIG. (A) of FIG. 5 is a cross-sectional view showing a configuration example during formation, and (b) of FIG. 5 is a cross-sectional view showing a configuration example.

When manufacturing the EL display film 2, as shown in FIG. 4 and FIG. 5, approximately the following steps S1 to S13 are performed.

Step S1: The resin layer 12 is formed on a translucent mother substrate 50 such as a glass substrate.

Step S2: The inorganic barrier film 3 is formed.

Step S3: A TFT layer 4 including a plurality of inorganic insulating films 16, 18 and 20 and a planarization film 21 is formed.

Step S4: A light emitting element layer 5 such as an OLED element layer is formed.

Step S5: The sealing layer 6 including the inorganic sealing films 26 and 28 and the organic sealing film 27 is formed.

Step S6: The protective material 9 such as a PET film is attached on the sealing layer 6 via the adhesive layer 8.

Step S7: The resin layer 12 is irradiated with a laser beam. Here, when the resin layer 12 absorbs the irradiated laser light, the lower surface of the resin layer 12 which is an interface with the mother substrate 50 is degraded by ablation. Thereby, a peeling layer is formed, and the bonding force between the resin layer 12 and the mother substrate 50 is reduced.

Step S8: The mother substrate 50 is peeled off from the resin layer 12. Thereby, the laminate 7 is peeled off from the mother substrate 50. Here, the laminate 7 refers to the entire multilayer formed on the mother substrate 50, and in the example shown in FIG. 5A, the resin layer 12 formed on the mother substrate 50 The layer to the protective material 9 which is an outer layer is shown.

Step S9: A support material 10 such as a PET film is attached to the lower surface of the resin layer 12 via the adhesive layer 11.

Step S10: The mother substrate 50 is divided, the protective material 9 is cut, and a plurality of EL display portions are cut out.

Step S11: The protective material 9 on the terminal portion of the TFT layer 4 is peeled off, and the terminal is taken out.

Step S12: Affix the functional film 39.

Step S13: The electronic circuit board is mounted on the terminal portion using ACF or the like.

Thus, the EL display film 2 as an example of the display film 2 is formed. The above steps are performed by the manufacturing apparatus.

5 (a) and 5 (b), 4 is a TFT layer, 15 is a semiconductor film, 16 is a gate insulating film, 22 is an anode electrode, 23b is a bank, 23c is a partition wall, 24 is an EL layer , 25 is a cathode electrode, 26 is a first inorganic sealing film, 27 is an organic sealing film, 28 is a second inorganic sealing film, G is a gate electrode, S is a source electrode, D is a drain electrode, DA is an active region , NA indicates a non-active area.

The active area DA corresponds to the area where the light emitting element layer 5 is formed (the area where the semiconductor film 15, the gate electrode G, the source electrode S and the drain electrode D are formed), and is also expressed as a display area. it can. On the other hand, the non-active area NA is an area other than the active area DA, and is an area where a terminal used for connection with an electronic circuit board or the like is formed.

(adhesive)
The adhesive 40 constitutes an adhesive layer for adhering the light emitting surface 41 of the display film 2 to the concave surface 32 of the cover glass 30. The adhesive 40 is preferably colorless and transparent after curing. The adhesive 40 is preferably insulating. The adhesive 40 may be applied to either the concave surface 32 or the light emitting surface 41.

(Pasting device)
Below, the bonding apparatus 70 which bonds the display film 2 to the concave surface 32 of the cover glass 30 via the adhesive agent 40 based on this embodiment is demonstrated.

(A) of FIG. 6 is a figure which shows the aspect by which the elastic press part 60, the cover glass 30, and the display film 2 in-between were aligned with an example of schematic structure of the bonding apparatus 70 which concerns on this embodiment. . (B) of FIG. 6 is a top view which shows the positional relationship of the elastic press part 60, the display film 2, and the cover glass 30 in (a) of FIG.

FIG. 7 is a view showing an example of the schematic configuration of the bonding apparatus 70 shown in FIG. 6 between the concave surface 32 and the pressing surface 61 of the elastic pressing portion 60 in a state where the elastic pressing portion 60 is not elastically deformed. It is a figure which shows the aspect (1st process) which arrange | positions the film 2. FIG. FIG. 8 shows an example of the schematic configuration of the bonding apparatus 70 shown in FIG. 6 in which the elastic pressing portion 60 presses the display film 2 against the concave surface 32 while elastically deforming along the concave surface 32 It is a figure which shows 2 processes.

As shown in FIGS. 6 to 8, the bonding apparatus 70 includes an elastic pressing unit 60, a cover glass holding unit 71, a display film holding unit 72, a rigid pressing unit 73, a driving unit 74, and the like. The bonding apparatus 70 may be provided with a sensor mechanism such as a position sensor or a distance measurement sensor, a transport mechanism for transporting the cover glass 30 or the display film 2, or other mechanism depending on the situation. The bonding apparatus 70 is preferably used in a vacuum environment such as a vacuum chamber.

The cover glass holding unit 71 holds the cover glass 30 by a chuck mechanism such as an electrostatic chuck, a mechanical chuck, a vacuum chuck, and an adhesive chuck. The cover glass holding portion 71 holds the cover glass 30 so that the concave surface 32 of the cover glass 30 faces the elastic pressing portion 60.

The display film holding unit 72 holds the display film 2 by any of various similar chucks (which may be the same as or different from the cover glass holding unit 71). The display film holding unit 72 holds the display film 2 such that the light emitting surface 41 of the display film 2 faces the concave surface 32 of the cover glass 30. The display film holding portion 72 preferably bends such that (i) the light emitting surface 41 is a convex surface, and (ii) the width of the light emitting surface 41 in the Y direction is the width of the concave space 36 in plan view as viewed from the X axis direction. The display film 2 is held in a bent state narrower than W1. 6 to 7 by holding the display film 2 in such a bent state, when the display film 2 is pushed into the concave space 36, the display film 2 becomes concave 32 It is because it can prevent rubbing. Further, the display film holding unit 72 releases the display film 2 at an appropriate time from FIG. 6 to FIG. 8 in order to prevent the elastic deformation of the elastic pressing unit 60. The point in time when the display film holding portion 72 separates from the display film 2 may be before, after or simultaneously with the phase as shown in FIG.

The elastic pressing portion 60 is an elastic member for pressing the display film 2 to the concave surface 32 while elastically deforming along the concave surface 32 of the cover glass 30, which will be described in detail later.

The rigid pressing portion 73 holds the elastic pressing portion 60 by any of various similar chucks (which may be the same as or different from the cover glass holding portion 71 and / or the display film holding portion 72). The rigid pressing portion holds the resilient pressing portion 60 such that the pressing surface 61 of the resilient pressing portion 60 faces the concave surface 32 of the cover glass 30. As shown in FIG. 7 to FIG. 8, the rigid pressing portion 73 can press the elastic pressing portion 60 toward the cover glass 30.

The driving unit 74 drives the cover glass holding unit 71 and / or the rigid pressing unit 73 to move the cover glass holding unit 71 and the rigid pressing unit 73 closer to or away from each other.

(Elastic pressing part)
The elastic pressing portion 60 shown in FIG. 6 will be described below.

FIG. 9 is a view showing an example of a schematic configuration of the elastic pressing portion 60 shown in FIG. (A) of FIG. 6 is a perspective view, and (b) of FIG. 6 is an XY sectional view.

The resilient pressing portion 60 has a resiliently deformable elasticity along the concave surface 32 of the cover glass 30.

The elastic pressing portion 60 is shown in FIG. 9 in a state where it is elastically deformed by its own weight but not elastically deformed by an external force. In this specification, such a state in which only elastic deformation is caused by its own weight is simply referred to as "non-elastically deformed state". Moreover, the state which is also elastically deformed by external force is only called "the state which is elastically deformed."

As shown in FIG. 9, the elastic pressing portion 60 according to the present embodiment includes a pressing surface 61 and a bottom surface 62, and includes an upper portion 65 on the pressing surface 61 side and a lower portion 66 on the bottom surface 62 side. The resilient pressing portion 60 is preferably a block of a resilient material such as silicone rubber. As shown in FIGS. 7 to 8, the resilient pressing portion 60 can press the display film 2 against the concave surface 32 of the cover glass 30 by being pressed by the rigid pressing portion 73.

The pressing surface 61 is a surface in contact with the non-light emitting surface 42 of the display film 2, and when the display film 2 is pressed against the concave surface 32 of the cover glass 30, it conforms to the concave surface 32 (to be complementary) It is a surface that deforms. The bottom surface 62 is a surface supported by a rigid pressing portion 73 described later.

The upper portion 65 is a portion of the elastic pressing portion 60 which can enter the concave space 36 while sandwiching the display film 2 between the concave surface 32 and the pressing surface 61 in a state where the elastic pressing portion 60 is not elastically deformed. Specifically, the elastic pressing portion (between the concave surface 32 and the boundary surface 37) intruding into the concave space 36 (see FIG. 2) together with a part of the display film 2 in the phase as shown in FIG. It is a part of 60. For this reason, the upper portion 65 is smaller than the concave space 36 in the aspect as shown in FIG.

The lower portion 66 is a portion of the resilient pressing portion 60 other than the upper portion 65. The lower portion 66 includes a main lower portion 66a and a protruding lower portion 66b. The main lower portion 66 a is a portion of the lower portion 66 completely overlapping with the upper portion 65 in a plan view seen from the X-axis direction in a state where it is not elastically deformed. The protruding lower portion 66b is a portion of the lower portion 66 located outside the upper portion 65 in a plan view as viewed in the X-axis direction in a state where it is not elastically deformed.

D1 + W2 + D1 <W1 <W3 (Equation 1)
H 2 + D 1 = H 1 ...... (Equation 2)
In a state where the elastic pressing portion 60 is not elastically deformed, the length (width) of the upper portion 65 in the Y-axis direction is W2, the length (height) in the X-axis direction is H2, and the lower portion 66 in the Y-axis direction The length (width) is W3 and the length (height) in the X-axis direction is H3. Here, when the change in the thickness D1 of the display film 2 due to the deflection is ignored, the above (formula 1) and (formula 2) hold.

Further, it is preferable that the height H3 of the lower portion 66 be larger than the height H2 of the upper portion 65 so that the pressing surface 61 can be elastically deformed following the concave surface 32. For example, if the height H2 of the upper portion 65 is about 5 mm, the height H3 of the lower portion 66 is preferably about 15 mm.

The interface 67 is an interface between the upper portion 65 and the lower portion 66. Also, in the phase as shown in FIG. 7, the boundary surface 67 coincides with the boundary surface 37 stretched by the edge of the end 34 of the cover glass 30.

It is preferable that the pressing surface 61 and the portion (e.g., the upper portion 65) of the elastic pressing portion 60 close to the pressing surface 61 be flexible so that the pressing surface 61 easily elastically deforms following the concave surface 32. The bottom surface 62 and the portion (for example, the lower portion 66) of the elastic pressing portion 60 near the bottom surface 62 can easily transmit the pressure applied from the rigid pressing portion 73 from the bottom surface 62 to the pressing surface 61. Hardness is preferable in the range which does not prevent the elastic deformation of the portion of the elastic pressing portion 60 near 61. Therefore, for example, the elasticity of the resilient pressing portion 60 is preferably changed so that the resilient pressing portion 60 becomes harder from the pressing surface 61 toward the bottom surface 62.

The elastic pressing portion 60 elastically deforms each time the display film 2 and the cover glass 30 are attached. For this reason, since the elastic pressing portion 60 is usually a consumable having a relatively short service life among the components of the bonding apparatus 70, it is preferable that the cost be low. Therefore, for example, it is preferable that the elasticity of the resilient pressing portion 60 be uniform so that the resilient pressing portion 60 can be easily produced.

(Pasting method)
Below, the bonding method which concerns on this embodiment is demonstrated.

The process of manufacturing the display device 1 shown in FIG. 1 includes, as shown in FIG. 10, a bonding method in which the next steps S21 to S24 are performed in this order.

Step S21: As shown in FIG. 6, the elastic pressing portion 60, the cover glass 30, and the display film 2 between them are aligned.

Step S22: As shown in FIG. 7, the elastic pressing portion 60 causes a portion of the display film 2 to enter the concave space 36 without being elastically deformed, thereby displaying a display between the concave surface 32 and the pressing surface 61. The film 2 is placed (first step).

Step S23: As shown in FIG. 8, the elastic pressing portion 60 presses the display film 2 against the concave surface 32 while being elastically deformed (second step).

Step S24: The elastic pressing portion 60 is separated from the cover glass 30 (third step).

A part of display 1 is manufactured by the above. In addition, the bonding device 70 performs each of the steps 21 to 23.

In steps 21 to 23, the drive unit 74 moves one or both of the cover glass holding unit 71 and the rigid pressing unit 73 so as to approach each other. Specifically, the drive unit 74 moves the cover glass holding unit 71 in the −X direction and / or the rigid pressing unit 73 in the + X direction.

In step 22, a portion of the display film 2 is inserted into the concave space 36 until a portion of the display film 2 contacts the concave surface 32 in a range where the elastic pressing portion 60 does not elastically deform.

The pressing in step 23 is preferably continued until the adhesive 40 between the display film 2 and the concave surface 32 is sufficiently hardened.

In step 24, the drive unit 74 moves one or both of the cover glass holding unit 71 and the rigid pressing unit 73 so as to be separated from each other. Specifically, the cover glass holding portion 71 is moved in the + X direction, and / or the rigid pressing portion 73 is moved in the −X direction.

The shape and position of the boundary surface 67 between the upper portion 65 and the lower portion 66 in step S23 depends on the shape of the concave surface 32, the shape of the resilient pressing portion 60, and the magnitude of the force pressing the resilient pressing portion 60 by the rigid pressing portion 73 Do. For this reason, the shape and position of the boundary surface 67 shown in FIG. 8 are merely illustrative.

(Example of comparison)
Below, the bonding apparatus 170 of a comparative example is demonstrated.

(A) of FIG. 20 is a figure which shows the aspect by which the elastic press part 160, the display film 2, and the cover glass 30 were aligned with one example of schematic structure of the bonding apparatus 170 of a comparative example. FIG. 20B shows an example of the schematic configuration of the bonding apparatus 170 according to the comparative example, in which the elastic pressing portion 160 presses the display film 2 against the concave surface 32 while elastically deforming following the concave surface 32. FIG.

Unlike the lower portion 66 of the elastic pressing portion 60 according to the present embodiment, the lower portion 166 of the elastic pressing portion 160 in the comparative example completely overlaps the upper portion 165 in a plan view seen from the X-axis direction in a non-elastically deformed state. Contains only the part that For this reason, in the aspect as shown in FIG. 20B, the portion of the elastic pressing portion 160 which presses the display film 2 by the rising end 34 of the cover glass 30 is like a cantilever. Float in the air. Since the pressure applied to the floating part is likely to escape from the concave space 36, the pressure acting as the pressing force at the end 34 is small. On the other hand, the portion of the elastic pressing portion 60 which presses the display film 2 at the central portion 33 of the cover glass 30 is directly supported by the rigid pressing portion 173. Since the pressure applied to the directly supported portion is unlikely to escape from the concave space 36, the pressure acting as the pressing force at the central portion 33 is large.

Therefore, in the bonding apparatus 170 of the comparative example, although the pressing force at the central portion 33 of the cover glass 30 is large, the pressing force at the rising end portion 34 is small. Such nonuniformity makes it difficult to keep the pressing force within the appropriate range over the entire surface of the display film 2.

For example, in a part, when the pressing force is excessive (larger than the upper limit of the appropriate range), the adhesive 140 between the display film 2 and the concave surface 32 is pushed away from the part and moved. The movement of the adhesive 140 causes a portion where the amount of the adhesive 140 is out of the appropriate range (a portion where the adhesive 140 is lost, decreased, or increased). The display film 2 may be such that (i) the adhesion between the display film 2 and the cover glass 30 is weak, and (ii) the display film 2 and the cover glass 30 do not adhere, etc. And the concave surface 32 may cause adhesion failure. Due to the movement of the adhesive 140, the adhesive 140 pushed out between the display film 2 and the concave surface 32 may cause unnecessary adhesion (in some cases, it may cause an adverse effect such as a short circuit).

For example, if the pressing force is too small (less than the lower limit of the appropriate range) in a part, (i) the display film 2 may be wrinkled, or (ii) the display film 2 and the concave surface 32. The adhesion between the display film 2 and the concave surface 32 may be poor, for example, air bubbles may enter between the two.

(effect)
According to the bonding apparatus 70 and the bonding method according to the present embodiment, the elastic pressing portion 60 (in particular, the lower portion 66) has the concave surface 32 and the display film 2 in a phase (first step) as shown in FIG. It overlaps with the entire surface of the concave surface 32 in a plan view viewed from the X-axis direction in a separated state. The pressure of the resilient pressing portion 60 hardly escapes from the concave space 36 in the aspect as shown in FIG. 8 in the entire cover glass 30 by such a resilient pressing portion 60. For this reason, the pressure which acts as a force which presses with end 34 can be enlarged in pasting device 70 concerning this embodiment rather than pasting device 170 of a comparative example. Therefore, the uniformity of the pressing force can be improved, so that the pressing force can be easily contained in an appropriate range over the entire surface of the display film 2, and the display film 2 can be easily adhered to the concave surface 32 of the cover glass 30. Become.

In addition, the movable mechanism may not be provided inside the resilient pressing portion 60 and the rigid pressing portion 73. For this reason, since the bonding apparatus 70 and the bonding method are simple, the display film 2 can be bonded to the concave surface 32 of the cover glass 30 at low cost.

Preferably, the bottom surface 62 is larger than the concave surface 32 in a plan view as viewed from the X-axis direction. For this reason, the pressure of the elastic pressing portion 60 is less likely to escape from the concave space 36 in the situation as shown in FIG.

Preferably, the bottom surface 62 of the resilient pressing portion 60 is larger than the concave surface 32 of the cover glass 30 in a plan view as viewed from the X-axis direction. Therefore, the portion pressing the display film 2 at the rising end 34 of the cover glass 30 does not float in the air like a cantilever. For this reason, the pressure of the elastic pressing portion 60 is less likely to escape from the concave space 36 in the situation as shown in FIG. For example, it is preferable that the shape of the XY cross section of the lower portion 66 be a shape that gradually increases toward the bottom surface 62, such as a trapezoidal shape.

Second Embodiment
Other embodiments of the present invention are described below. In addition, about the member which has the same function as the member demonstrated in the said embodiment for convenience of explanation, the same code | symbol is appended, and the description is not repeated.

(Pasting device)
Below, the bonding apparatus 70 which concerns on this embodiment is demonstrated.

(A) of FIG. 11 is a figure which shows the aspect by which the elastic press part 60, the display film 2, and the cover glass 30 were aligned with one example of schematic structure of the bonding apparatus 70 which concerns on this embodiment. (B) of FIG. 11 presses the display film 2 against the concave surface 32 while the elastic pressing portion 60 of an example of the schematic configuration of the bonding apparatus 70 according to the present embodiment elastically deforms following the concave surface 32. Showing a situation where

Although the configuration of the bonding apparatus 70 according to the present embodiment is different from the configuration of the bonding apparatus 70 according to the above-mentioned Embodiment 1 with respect to the elastic pressing section 60 (and the rigid pressing section 73 depending on the situation) used. In addition, about the composition of pasting device 70 concerning the above-mentioned Embodiment 1 about the others, it is substantially the same.

(Elastic pressing part)
The elastic pressing portion 60 shown in FIG. 11 will be described below.

FIG. 12 is a view showing an example of a schematic configuration of the elastic pressing portion 60 shown in FIG. (A) of FIG. 12 is a perspective view, and (b) of FIG. 12 is an XY sectional view.

In the resilient pressing portion 60 (see FIG. 9) according to the above-described first embodiment, the lower portion 66 gradually increases toward the bottom surface 62. On the other hand, the elastic pressing portion 60 (FIG. 12) according to the present embodiment becomes smaller after the lower portion 66 becomes larger toward the bottom surface 62, and the bottom surface 62 has the same size as the upper portion 65 in a plan view seen from the X-axis direction. is there. For this reason, in the above-mentioned Embodiment 1, although projection lower part 66b contacts rigid pressure part 73, projection lower part 66b 'is estranged from rigid pressure part 73 in this embodiment.

The protrusion lower portion 66b 'according to the present embodiment may have any shape. For example, the shape of the XY cross section of the protruding lower portion 66b 'may be substantially semicircular, substantially rectangular, or substantially trapezoidal.

The bottom surface 62 of the elastic pressing portion 60 according to the present embodiment has the same size as the upper portion 65 in a plan view as viewed from the X-axis direction, similarly to the bottom surface of the elastic pressing portion 160 of the comparative example (see FIG. 20). For this reason, it is easy to use the rigid pressing portion 173 of the comparative example as the rigid pressing portion 73 according to the present embodiment. On the other hand, the bottom surface 62 (see FIG. 9) of the resilient pressing portion 60 according to the first embodiment described above is larger than the upper portion 65 in a plan view seen from the X-axis direction. For this reason, it may be difficult to use the rigid pressing portion 173 of the comparative example as the rigid pressing portion 73 according to the first embodiment. Therefore, it is easy to introduce the pasting device 70 and the pasting method concerning this embodiment into the existing manufacturing device and manufacturing process. The bottom surface 62 is not limited to the same size as the upper portion 65 in plan view, but may be the same size as the concave surface 32 in plan view or smaller than the concave surface 32.

In the aspect as shown in FIG. 12B, the portion of the elastic pressing portion 60 which presses the display film 2 at the rising end 34 of the cover glass 30 is supported by the projecting lower portion 66b '. . Therefore, even if the elastic pressing portion 60 according to the present embodiment is used, the uniformity of the pressing force can be improved. However, since the protrusion lower part 66b 'floats in the air like a cantilever, the bonding apparatus 70 and the bonding method according to the above-mentioned Embodiment 1 have the effect of improving the uniformity of the pressing force. Are better.

The protruding lower portion 66b 'is preferably harder than the main lower portion 66a in order to support the portion pressing the display film 2 at the rising end 34 of the cover glass 30.

Further, the configuration according to the second embodiment may be combined with the configuration according to the first embodiment described above.

Third Embodiment
Other embodiments of the present invention are described below. In addition, about the member which has the same function as the member demonstrated in the said embodiment for convenience of explanation, the same code | symbol is appended, and the description is not repeated.

(Pasting device)
Below, the bonding apparatus 70 which concerns on this embodiment is demonstrated.

FIG. 13: is a figure which shows the aspect by which the elastic press part 60, the display film 2, and the cover glass 30 were aligned with one example of schematic structure of the bonding apparatus 70 which concerns on this embodiment. FIG. 14 shows an example of a schematic configuration of the bonding apparatus 70 shown in FIG. 13, in a state where the elastic pressing portion 60 is not elastically deformed, a display is made between the concave surface 32 and the pressing surface 61 of the elastic pressing portion 60 It is a figure which shows the aspect (1st process) which arrange | positions the film 2. FIG. FIG. 15 shows a phase in which the display film 2 is pressed against the concave surface 32 while the elastic pressing unit 60 elastically deforms following the concave surface 32 as an example of the schematic configuration of the bonding apparatus 70 shown in FIG. It is a figure which shows 2 processes.

About the structure of the bonding apparatus 70 which concerns on this embodiment about the elastic press part 60 (and the rigid press part 73 according to a condition) to be used, from the structure of the bonding apparatus 70 which concerns on above-mentioned Embodiment 1, 2 Although it differs, it is substantially the same as the structure of the bonding apparatus 70 which concerns on the above-mentioned Embodiment 1, 2 about others.

(Elastic pressing part)
The elastic pressing portion 60 shown in FIG. 13 will be described below.

FIG. 16 is a view showing an example of a schematic configuration of the elastic pressing portion 60 shown in FIG. (A) of FIG. 16 is a perspective view, and (b) of FIG. 16 is an XY sectional view.

In the resilient pressing portion 60 (see FIGS. 9 and 11) according to the first and second embodiments described above, the lower portion 66 includes a main lower portion 66a and projecting lower portions 66b and 66b '. On the other hand, in the elastic pressing portion 60 (FIG. 16) according to the present embodiment, the lower portion 66 does not include the protruding lower portion, but a cavity 76 is provided inside the lower portion 66.

The cavity 76 can be (i) collapsible, (ii) recoverable to its original shape, and (iii) optional opening inside the resilient pressing portion 60 if it does not open to the pressing surface 61 contacting the display film 2 In any position, any number may be provided. For example, the shape of the XY cross section of the cavity 76 may be substantially elliptical or substantially perfect circle. For example, the cavity 76 may be open or closed on the side surface and the bottom surface 62 of the resilient pressing portion 60 not in contact with the display film 2. For example, the cavity 76 may be located at the upper portion 65, at the lower portion 66, or across the interface 67. For example, a plurality of cavities 76 may be provided.

The cavity 76 shown in FIG. 16 is (i) opened on both side faces of the elastic pressing portion 60 in the Z-axis direction, (ii) a substantially elliptic cylinder, and (iii) the plane of symmetry of the cavity 76 It is disposed so as to coincide with the plane of symmetry of the resilient pressing portion 60, and (iv) is located at the lower portion 66.

Although this embodiment explains an example of pasting device 70 and pasting method using elastic press part 60 in which hollow 76 shown in Drawing 16 was provided, this does not limit the range of the present invention. Those skilled in the art can apply the present invention to a bonding apparatus 70 and a bonding method using an elastic pressing portion 60 provided with a cavity other than that shown in FIG. 16 with reference to the present specification and the attached drawings. It is obvious.

(effect)
According to the bonding apparatus 70 and the bonding method according to the present embodiment, the cavity 76 is provided inside the elastic pressing portion 60. For this reason, in the phase as shown in FIG. 15, the hollow 76 is crushed to partially release the pressure applied to the portion of the resilient pressing portion 60 pressing the display film 2 at the central portion 33 of the cover glass 30. be able to. For this reason, the pressure which acts as a force which presses with center part 33 can be made small in pasting device 70 concerning this embodiment rather than pasting device 170 of a comparative example. Therefore, the uniformity of the pressing force can be improved, so that the pressing force can be easily contained in an appropriate range over the entire surface of the display film 2, and the display film 2 can be easily adhered to the concave surface 32 of the cover glass 30. Become.

In addition, the movable mechanism may not be provided inside the resilient pressing portion 60 and the rigid pressing portion 73. For this reason, since the bonding apparatus 70 and the bonding method are simple, the display film 2 can be bonded to the concave surface 32 of the cover glass 30 at low cost.

Preferably, the cavity 76 can recover from the collapsed state to the original, uncollapsed state only by the elastic force of the resilient pressing portion 60 when the external force that collapses the cavity 76 is removed. Therefore, the cavity 76 can be restored to its original shape only by the cover glass holding portion 71 and the rigid pressing portion 73 being separated from each other. For this reason, since the operation | work for returning the cavity 76 to original shape is unnecessary, the cover glass 30 and the display film 2 can be bonded together efficiently.

Preferably, the upper portion 65 of the resilient pressing portion 60 overlaps with at least a part of the cavity 76 in a plan view as viewed in the X-axis direction in a phase as shown in FIG. For this reason, the cavity 76 easily releases the pressure of the upper portion 65.

Preferably, the cavity 76 is opened (for example, on the side surface of the elastic pressing portion 60 not in contact with the display film 2) so as to communicate with the outside of the elastic pressing portion 60 and the rigid pressing portion 73. Therefore, the cavity 76 is easy to deform.

The configuration according to the third embodiment may be combined with the configuration according to the first and second embodiments described above.

Embodiment 4
Other embodiments of the present invention are described below. In addition, about the member which has the same function as the member demonstrated in the said embodiment for convenience of explanation, the same code | symbol is appended, and the description is not repeated.

(Pasting device)
Below, the bonding apparatus 70 which concerns on this embodiment is demonstrated.

(A) of FIG. 17 is a figure which shows the aspect by which the elastic press part 60, the display film 2, and the cover glass 30 were aligned with one example of schematic structure of the bonding apparatus 70 which concerns on this embodiment. (B) of FIG. 17 presses the display film 2 against the concave surface 32 while the elastic pressing portion 60 of an example of the schematic configuration of the bonding apparatus 70 according to the present embodiment elastically deforms following the concave surface 32. Showing a situation where

Although the structure of the bonding apparatus 70 which concerns on this embodiment differs from the structure of the bonding apparatus 70 which concerns on the above-mentioned Embodiment 3 about the elastic press part 60 and the rigid press part 73, it is in the above-mentioned Embodiment 3 about others. It is substantially the same as the structure of the bonding apparatus 70 which concerns.

(Elastic pressing part and rigid pressing part)
The elastic pressing portion 60 and the rigid pressing portion 73 shown in FIG. 17 will be described below.

FIG. 18 is a view showing an example of a schematic configuration of the elastic pressing portion 60 and the rigid pressing portion 73 shown in FIG. (A) of FIG. 18 is a perspective view, and (b) of FIG. 18 is an XY sectional view.

The cavity 76 according to the above-described third embodiment is provided inside the elastic pressing portion 60 (see FIG. 16). On the other hand, the cavity 77 according to the present embodiment is provided between the elastic pressing portion 60 and the rigid pressing portion 73, and more specifically, provided on the main surface of the rigid pressing portion 73 on the elastic pressing portion 60 side. It is a ditch.

The cavity moved in the −X direction until the cavity 76 shown in FIG. 16 penetrates into the rigid pressing portion 73 beyond the bottom surface 62 is substantially the same as the cavity 77 shown in FIG. Therefore, the bonding apparatus 70 and the bonding method which concern on this embodiment have an effect similar to the bonding apparatus 70 and the bonding method which concern on above-mentioned Embodiment 3. FIG.

Further, the cavity 76 may be provided inside the elastic pressing portion 60, and the cavity 77 may be provided between the elastic pressing portion 60 and the rigid pressing portion 73.

Further, the configuration according to the fourth embodiment may be combined with the configuration according to the first to third embodiments described above.

[Summary]
The bonding method according to aspect 1 of the present invention is a bonding method in which a flexible substrate is bonded to a concave surface of a concave substrate via an adhesive, and between the concave surface and the pressing surface of the elastic pressing portion, The first step of arranging the flexible substrate, and the second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion, the elastic pressing The portion is supported by the rigid pressing portion on the bottom surface opposite to the pressing surface, and in the first step, the elastic pressing portion in a plan view in which the concave surface and the flexible substrate are separated. Is a method of overlapping with the entire surface of the concave surface.

The bonding method according to aspect 2 of the present invention is a bonding method in which a flexible substrate is bonded to a concave surface of a concave substrate via an adhesive, and between the concave surface and the pressing surface of the elastic pressing portion, The first step of arranging the flexible substrate, and the second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion, the elastic pressing The portion is supported by the rigid pressing portion on the bottom surface opposite to the pressing surface, and (i) at least one of the inside of the elastic pressing portion and (ii) between the elastic pressing portion and the rigid pressing portion In the second step, the cavity is collapsed.

In the bonding method according to aspect 3 of the present invention, in the aspect 1, the bottom surface may be larger than the concave surface in the first step in a plan view of the state.

In the bonding method according to aspect 4 of the present invention, in the aspect 1, the bottom surface of the elastic pressing portion has the same size as the concave surface or the concave surface in plan view of the state in the first step. It may be a small method.

The bonding method according to aspect 5 of the present invention is the method according to any one of aspects 1 and 3 to 4, wherein the elastic pressing portion is provided inside the concave surface in plan view of the state in the first step. It may be a method in which the located portion is more flexible than the portion located outside the concave surface.

In the bonding method according to aspect 6 of the present invention, in any one of the aspects 1 and 3 to 5, (i) the inside of the elastic pressing portion and (ii) the elastic pressing portion and the rigid pressing portion A cavity may be provided in at least one of the two, and the cavity may be crushed in the second step.

In the bonding method according to aspect 7 of the present invention, in the above-mentioned aspect 2 or 6, at least a part of the cavity is a plan view in a state in which the concave surface and the flexible substrate are separated in the first step. The method may be superimposed on the concave surface.

The bonding method according to aspect 8 of the present invention is the method according to any one of aspects 2 and 6 to 7, further including the third step in which the pressing surface is separated from the flexible substrate after the second step. In the third step, the hollow may be restored to the shape in the state in the first step by the elasticity of the elastic pressing portion.

The bonding method according to aspect 9 of the present invention may be a method according to any one of the above aspects 2 and 6 to 8, wherein the cavity is opened to the outside of the elastic pressing portion and the rigid pressing portion. .

In the bonding method according to aspect 10 of the present invention, in any one of the above aspects 1 to 9, the elastic pressing portion has a portion located on the pressing surface side from a portion located on the bottom surface Also, the method may be flexible.

In the bonding method according to aspect 11 of the present invention, in any one of the aspects 1 to 10, the elastic pressing portion may be a lump formed by molding an elastic material.

In the bonding method according to aspect 12 of the present invention, in any one of the above aspects 1 and 3 to 7, in plan view, the elastic pressing portion moves relative to the concave substrate in the first step. It is good also as a method of being a plane view seen from the move direction to move.

A method of manufacturing a display device according to aspect 13 of the present invention includes the method according to any one of aspects 1 to 12, the concave substrate is a transparent substrate through which visible light can be transmitted, and the flexible substrate May be a display substrate.

The bonding apparatus according to aspect 14 of the present invention is a bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive, and (i) a pressing surface and a bottom surface opposite to the pressing surface And (ii) an elastic pressing portion for pressing the flexible substrate disposed between the concave surface and the pressing surface to the concave surface while being elastically deformed, and the elastic pressing portion on the bottom surface The elastic pressing portion is configured to overlap the entire surface of the concave surface in a plan view including a rigid pressing portion to be supported and the space between the concave surface and the flexible substrate being separated.

A bonding apparatus according to aspect 15 of the present invention is a bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive, and (i) a pressing surface and a bottom surface opposite to the pressing surface And (ii) an elastic pressing portion for pressing the flexible substrate disposed between the concave surface and the pressing surface to the concave surface while being elastically deformed, and the elastic pressing portion on the bottom surface A hollow is provided in at least one of (i) the inside of the elastic pressing part and (ii) between the elastic pressing part and the rigid pressing part, including a rigid pressing part to support the elastic pressing; The cavity is configured to collapse when the portion presses the flexible substrate against the concave surface while being elastically deformed.

A method of manufacturing a display device according to aspect 16 of the present invention includes the configuration according to aspect 14 or 15, the concave substrate is a transparent substrate through which visible light can be transmitted, and the flexible substrate is a display substrate. It may be a certain configuration.

[Items to be added]
The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the different embodiments. Is also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

For example, the configurations according to Embodiments 1 and 2 and the configuration according to Embodiment 3 may be combined as shown in FIG.

FIG. 19 is a perspective view showing some schematic configuration examples in which the configurations of the elastic pressing portion 60 according to some embodiments of the present invention are combined. 19 (a) shows a schematic configuration in which the cavity 16 is provided as shown in FIG. 16 in the resilient pressing portion 60 shown in FIG. 9, and FIG. 19 (b) shows the resilient pressing portion shown in FIG. 60 shows a schematic configuration in which the cavity 16 is provided as shown in FIG.

1 Display device 2 Display film (flexible substrate)
Reference Signs List 3 inorganic barrier film 4 TFT layer 5 light emitting element layer 6 sealing layer 7 laminated body 8, 11 adhesive layer 9 protective material 10 support material 12 resin layer 15 semiconductor film 16 gate insulating film 16, 18, 20 inorganic insulating film 21 planarization Film 22 Anode electrode 23 b Bank 23 c Partition wall 24 EL layer 25 Cathode electrode 26 First inorganic sealing film 26, 28 inorganic sealing film 27 organic sealing film 28 second inorganic sealing film 30 cover glass (concave substrate)
31, 32, 41, 42 main surface 31 convex surface 32 concave surface 33 central portion of cover glass 34 end portion of cover glass 36 concave surface space 37 interface surface 39 functional film 40, 140 adhesive 41 light emitting surface 42 non-light emitting surface 50 mother substrate 60 , 160 elastic pressing portion 61 pressing surface 62 bottom surface 65, 165 upper portion 66, 166 lower portion 66a main lower portion 66b, 66b 'protruding lower portion 67 boundary surface 70, 170 bonding device 71 cover glass holding portion 72 display film holding portion 73, 173 rigidity Pressing part 74 Drive part 76, 77 Cavity 80 Housing D1 Thickness of flexible display film H1 Concave space height of cover glass H2 Height of upper part of elastic pressing part H3 Height of lower part of elastic pressing part Cover W1 Width W2 of concave space of glass Width W3 of upper part of elastic pressing part Width of lower part of elastic pressing part

Claims (16)

A bonding method of bonding a flexible substrate to a concave surface of a concave substrate via an adhesive,
A first step of arranging the flexible substrate between the concave surface and the pressing surface of the elastic pressing portion;
A second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion;
The elastic pressing portion is supported by the rigid pressing portion on a bottom surface opposite to the pressing surface,
In the first step, in a plan view in which the concave surface and the flexible substrate are separated, the elastic pressing portion overlaps the entire surface of the concave surface. A bonding method of bonding a flexible substrate to a concave surface of a concave substrate via an adhesive,
A first step of arranging the flexible substrate between the concave surface and the pressing surface of the elastic pressing portion;
A second step of pressing the flexible substrate against the concave surface by the elastic pressing portion while elastically deforming the elastic pressing portion;
The elastic pressing portion is supported by the rigid pressing portion on a bottom surface opposite to the pressing surface,
(I) A cavity is provided in the inside of the resilient pressing portion and (ii) at least one between the resilient pressing portion and the rigid pressing portion,
In the second step, the cavity is collapsed. The bonding method according to claim 1, wherein the bottom surface is larger than the concave surface in plan view of the state in the first step. The bonding method according to claim 1, wherein the bottom surface of the elastic pressing portion has the same size as the concave surface or is smaller than the concave surface in a plan view of the state in the first step. The elastic pressing portion is characterized in that, in the first step, the portion located inside the concave surface is softer than the portion located outside the concave surface in a plan view of the state. The bonding method according to any one of Items 1 to 3. (I) A cavity is provided in the inside of the resilient pressing portion and (ii) at least one between the resilient pressing portion and the rigid pressing portion,
The bonding method according to any one of claims 1 and 3, wherein the cavity is collapsed in the second step. 7. The method according to claim 2, wherein, in the first step, at least a part of the cavity overlaps the concave surface in a plan view in which the concave surface and the flexible substrate are separated. How to paste. After the second step, further including a third step in which the pressing surface is separated from the flexible substrate,
In the third step, the cavity is restored to a shape in a state in which the concave surface and the flexible substrate in the first step are separated by an elastic force of the elastic pressing portion. The bonding method according to any one of 2 and 6 to 7. The bonding method according to any one of claims 2, 6 to 8, wherein the cavity is opened to the outside of the elastic pressing portion and the rigid pressing portion. The said elastic press part is more flexible than the part located in the side of the said bottom face in the part located in the side of the said press surface, The sticking in any one of the Claims 1-9 characterized by the above-mentioned Right way. The bonding method according to any one of claims 1 to 10, wherein the elastic pressing portion is a mass obtained by molding an elastic material. The plane view is a plane view seen from the moving direction in which the elastic pressing portion moves relative to the concave substrate in the first step. The bonding method as described in. The concave substrate is a transparent substrate capable of transmitting visible light,
The flexible substrate is a display substrate,
A method of manufacturing a display device, comprising the bonding method according to any one of claims 1 to 12. A bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive,
(I) has a pressing surface and a bottom opposite to the pressing surface, and (ii) presses the flexible substrate disposed between the concave surface and the pressing surface against the concave surface while being elastically deformed An elastic pressing portion,
A rigid pressing portion supporting the resilient pressing portion on the bottom surface,
The elastic pressing portion is overlapped with the entire surface of the concave surface in a plan view in which the concave surface and the flexible substrate are separated from each other. A bonding apparatus for bonding a flexible substrate to a concave surface of a concave substrate via an adhesive,
(I) has a pressing surface and a bottom opposite to the pressing surface, and (ii) presses the flexible substrate disposed between the concave surface and the pressing surface against the concave surface while being elastically deformed An elastic pressing portion,
A rigid pressing portion supporting the resilient pressing portion on the bottom surface,
(I) A cavity is provided in the inside of the resilient pressing portion and (ii) at least one between the resilient pressing portion and the rigid pressing portion,
When the said elastic press part presses the said flexible substrate to the said concave surface, elastically deforming, the said cavity collapses, The bonding apparatus characterized by the above-mentioned. The concave substrate is a transparent substrate capable of transmitting visible light,
The flexible substrate is a display substrate,
The manufacturing apparatus of the display apparatus characterized by including the bonding apparatus of Claim 14 or 15.

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