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WO2018138349A3 - Device for tilting an optical element, particularly a mirror - Google Patents

Device for tilting an optical element, particularly a mirror Download PDF

Info

Publication number
WO2018138349A3
WO2018138349A3 PCT/EP2018/052155 EP2018052155W WO2018138349A3 WO 2018138349 A3 WO2018138349 A3 WO 2018138349A3 EP 2018052155 W EP2018052155 W EP 2018052155W WO 2018138349 A3 WO2018138349 A3 WO 2018138349A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical element
tilting
mirror
pivoting
relates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2018/052155
Other languages
French (fr)
Other versions
WO2018138349A2 (en
Inventor
Stephan SMOLKA
Manuel Aschwanden
David Andreas NIEDERER
Pit Gebbers
Roman Patscheider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optotune AG
Original Assignee
Optotune AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optotune AG filed Critical Optotune AG
Publication of WO2018138349A2 publication Critical patent/WO2018138349A2/en
Publication of WO2018138349A3 publication Critical patent/WO2018138349A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/02—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures
    • G01C11/025—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures by scanning the object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention relates to a device (1, 2) for pivoting an optical element (10).
PCT/EP2018/052155 2017-01-27 2018-01-29 Device for tilting an optical element, particularly a mirror Ceased WO2018138349A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17153637.8 2017-01-27
EP17153637 2017-01-27

Publications (2)

Publication Number Publication Date
WO2018138349A2 WO2018138349A2 (en) 2018-08-02
WO2018138349A3 true WO2018138349A3 (en) 2018-10-04

Family

ID=57944299

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/052155 Ceased WO2018138349A2 (en) 2017-01-27 2018-01-29 Device for tilting an optical element, particularly a mirror

Country Status (1)

Country Link
WO (1) WO2018138349A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3903137A2 (en) * 2018-12-28 2021-11-03 Optotune AG Tiltable fold mirror for an optical imaging system
US11487127B2 (en) 2019-10-23 2022-11-01 Microsoft Technology Licensing, Llc Magnetic seesaw scanner
US12135466B2 (en) 2020-08-26 2024-11-05 Nidec Corporation Actuator
CN112305032B (en) * 2020-10-27 2022-09-30 湖南有色金属职业技术学院 Spherical nanosensor in-situ measuring device of electrochemistry improved electrode
CN113640939B (en) * 2021-07-29 2023-06-23 长光卫星技术股份有限公司 Two-dimensional angle precise adjustment device for large-caliber plane mirror
DE102021127874A1 (en) 2021-10-26 2023-04-27 Behr-Hella Thermocontrol Gmbh Device for receiving radiation from a detection area in the interior of a vehicle or in the area surrounding a vehicle
CN116148867A (en) * 2021-11-23 2023-05-23 华为技术有限公司 A processing system and related equipment
CN114384664B (en) * 2021-12-03 2023-10-31 西安应用光学研究所 Reflecting mirror pose adjusting device
CN116893489A (en) * 2022-04-06 2023-10-17 奥普托图尼瑞士股份公司 Carrier arrangement for an optical device
CN114988907B (en) * 2022-05-31 2023-01-06 华中科技大学 A high ratio graded aluminum-based silicon carbide composite mirror and its preparation method
WO2024193986A1 (en) * 2023-03-23 2024-09-26 Asml Netherlands B.V. Euv radiation source and position-controllable mirror
WO2025109769A1 (en) * 2023-11-24 2025-05-30 株式会社ニコン Imaging system and display method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003065080A2 (en) * 2002-02-01 2003-08-07 Terabeam Corporation Fast steering mirror
WO2011047911A1 (en) * 2009-10-23 2011-04-28 Leica Microsystems Cms Gmbh Device and method for deflecting a light beam in two different directions and scanning microscope
US8752969B1 (en) * 2007-10-15 2014-06-17 Arete Associates Method of operating a fast scanning mirror

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003065080A2 (en) * 2002-02-01 2003-08-07 Terabeam Corporation Fast steering mirror
US8752969B1 (en) * 2007-10-15 2014-06-17 Arete Associates Method of operating a fast scanning mirror
WO2011047911A1 (en) * 2009-10-23 2011-04-28 Leica Microsystems Cms Gmbh Device and method for deflecting a light beam in two different directions and scanning microscope

Also Published As

Publication number Publication date
WO2018138349A2 (en) 2018-08-02

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