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WO2018133555A1 - Dispositif de déplacement - Google Patents

Dispositif de déplacement Download PDF

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Publication number
WO2018133555A1
WO2018133555A1 PCT/CN2017/113580 CN2017113580W WO2018133555A1 WO 2018133555 A1 WO2018133555 A1 WO 2018133555A1 CN 2017113580 W CN2017113580 W CN 2017113580W WO 2018133555 A1 WO2018133555 A1 WO 2018133555A1
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WO
WIPO (PCT)
Prior art keywords
magnet
array
sub
plane
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/113580
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English (en)
Chinese (zh)
Inventor
丁晨阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Jixun Precision Equipment Co Ltd
Original Assignee
Guangdong Jixun Precision Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Jixun Precision Equipment Co Ltd filed Critical Guangdong Jixun Precision Equipment Co Ltd
Publication of WO2018133555A1 publication Critical patent/WO2018133555A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Definitions

  • the invention relates to the field of precision motion systems, and in particular to a displacement device.
  • a multi-degree-of-freedom displacement device called a maglev plane motor is used in a workpiece stage and a mask table of a lithography machine, which is based on the Lorentz force principle.
  • the electromagnetic force is applied directly to the workpiece table to provide multi-axis motion.
  • the magnetic floating plane motor generally comprises two parts of a magnet array and a coil winding unit.
  • the magnet array units in the magnet array are arranged in an alternating manner, which is very convenient for expansion, and effectively solves the technical bottleneck in the large stroke design.
  • the displacement device can not only realize the movement of six degrees of freedom, but also save the intermediate transmission link, compact structure, high overall rigidity, and has the characteristics of direct drive, no mechanical friction and no backlash, which is beneficial to realize more.
  • the high acceleration performance and positioning accuracy are beneficial to improve the motion efficiency of the motion stage, and can achieve higher positioning accuracy and motion acceleration.
  • through the magnetic floating technology the constraint on the moving surface type is reduced, and the working process has no contact wear, which is very suitable for the requirements of large stroke, vacuum, ultra-clean and ultra-precision positioning in the microelectronic equipment.
  • the displacement device can be widely used in precision motion systems of lithography, wafer cutting, wafer inspection, chip packaging, precision machine tools, etc. to achieve displacement of target objects (such as wafers) in at least two directions.
  • the magnet mover can perform movement in at least two directions (X and Y) with respect to the coil stator.
  • the area of the stator determines the working range of the motor.
  • To increase the working range of the motor it is necessary to increase the number of coils.
  • Each coil requires separate power supply and separate control, and an increased number of coils increases cost and control difficulty.
  • the number of the second coils 12 needs to be increased to n times before; if the length in the Y-axis direction is increased to n times before, the first The number of coils 11 needs to be increased by n times. The cost is high and it is difficult to achieve compactness and miniaturization.
  • the present invention has been made in view of the above problems, and an innovative magnet moving plane motor is designed, requiring only one set of coils in the Y-axis direction. If it is necessary to increase the length of the stator in the Y-axis direction by n times, the number of coils remains unchanged; if it is necessary to increase the length of the stator in the X-axis direction to n times before, the number of second coils needs to be increased to N times before. The number of coils is significantly reduced compared to the patent application CN103891114A, which reduces cost and control difficulty.
  • the present invention discloses a displacement device having: a stator including a first coil linearly extending in a first direction and a second coil linearly extending in a second direction disposed in a first plane, the first coil And the second coil overlapping in a third direction substantially orthogonal to the first direction and the second direction; and a mover platform disposed in a second plane substantially parallel to the first plane and An array of mover magnets, the magnetic field of the array of mover magnets interacting with the first coil and the second coil to produce a relative displacement, the array of mover magnets comprising at least: a first array of magnets, including a plurality of first magnet columns parallel to each other formed by a first magnet extending periodically in a second plane, the magnetization directions of the first magnet being substantially perpendicular to the second plane; the second magnet An array comprising a plurality of second magnet columns parallel to each other formed by a second magnet periodically extending in a second plane, the magnetization directions of the second magnets being substantially perpendicular to the second plane
  • the displacement device of the present invention further includes: a fourth magnet sub-array including a plurality of fourth magnet columns which are formed by extending the fourth magnet periodically in the second plane and are parallel to each other;
  • the magnetization directions of the fourth magnet are both substantially perpendicular to the second plane, and the first magnet sub-array and the fourth magnet sub-array are separated by a certain distance along the second direction in the second plane.
  • the second magnet sub-array and the third magnet sub-array are located in a spaced position formed by the first magnet sub-array and the fourth magnet sub-array being separated by a certain distance. Configured in the first direction.
  • an extending direction of each of the first magnet array and each of the fourth magnet columns in the second plane is inclined with respect to the first direction, each of the The second magnet row and each of the third magnet columns are inclined in the second plane with respect to the first direction.
  • a magnetization direction of the first magnet, the second magnet, and the fourth magnet overlapping with a certain coil of the second coil in the third direction
  • the magnetization directions of the first magnet, the third magnet, and the fourth magnet overlapping with a certain coil of the second coil in the third direction are the same, and the second coil Each turn is connected in series with each other and its current is controlled by a three-phase driver.
  • an extending direction of each of the first magnet array and each of the fourth magnet columns in the second plane is inclined with respect to the first direction, each of the An extending direction of the second magnet array in the second plane is substantially perpendicular to the first direction direction, and an extending direction of each of the third magnet columns in the second plane is opposite to the first direction Roughly vertical.
  • the magnetization directions of the first magnet and the fourth magnet overlapping with a certain coil of the second coil in the third direction are the same, the second coil Each turn is connected in series with each other and its current is controlled by a single driver.
  • the first magnet sub-array includes a first-direction magnet column extending in the first direction and a second-direction magnet column extending in the second direction
  • the fourth The magnet sub-array includes a first direction magnet column extending in the first direction and a second direction magnet column extending in the second direction, each of the second magnet column and the third magnet column being The second in-plane extending direction is substantially perpendicular to the first direction.
  • a certain coil of the second coil is in the The magnetization directions of the first magnet in the first direction magnet row of the first magnet sub-array and the fourth magnet in the first direction magnet column of the fourth magnet sub-array overlap in the three directions, Each turn of the second coil is connected in series with each other, the current of which is controlled by a three-phase driver.
  • the first magnet sub-array, the second magnet sub-array, the third magnet sub-array, and the fourth magnet sub-array have magnets having a magnetization direction parallel to the first plane.
  • the first magnet, the fourth magnet, the second magnet, and the third magnet are parallel to the first plane and have a rectangular, square, or circular cross section. Elliptical, or regular polygon.
  • FIG. 1 is a schematic plan view showing a configuration of a magnet array and a stator coil of a displacement device according to a first embodiment of the present invention
  • FIG. 2 is a schematic plan view showing a configuration of a magnet array of a displacement device according to a second embodiment of the present invention
  • FIG. 3 is a schematic plan view showing a configuration of a magnet array of a displacement device according to a third embodiment of the present invention.
  • FIG. 4 is a schematic plan view showing a configuration of a magnet array of a displacement device according to a fourth embodiment of the present invention.
  • stator 11: first coil; 12: second coil; 2: mover platform; 20, 30, 40, 50: magnet array; A21, A31, A41, A51: first magnet sub-array; A22, A32 , A42, A52: second magnet sub-array; A23, A33, A43, A53: third magnet sub-array; A24, A34, A44, A54: fourth magnet sub-array; M21, M31, M41, M51: first magnet M22, M32, M42, M52: second magnet; M23, M33, M43, M53: third magnet; M24, M34, M44, M54: fourth magnet, L21, L31: first magnet column, L22, L32, L43: second magnet row, L23, L33, L44: third magnet row, L24, L34: fourth magnet row, L41, L45: X-axis direction magnet row, L42, L46: Y-axis direction magnet row.
  • the displacement device 10 of the present invention has a stator 1 including a first coil 11 linearly extending in a first direction (X-axis direction) disposed in a first plane and in a second direction (Y a second coil 12 extending linearly in the axial direction, the first coil 11 and the second coil 12 overlapping in a third direction (Z-axis direction) substantially orthogonal to the first direction and the second direction; and the mover stage 2, Arranging in a second plane substantially parallel to the first plane and including a mover magnet array 21, the magnetic field of the mover magnet array 21 interacting with the first coil 11 and the second coil 12 to generate a relative displacement,
  • the mover magnet array includes at least: a first magnet sub-array A21 including a plurality of first magnet columns L21 formed in parallel with
  • the displacement device of the first embodiment of the present invention may further include: a fourth magnet sub-array A24 including a plurality of fourth magnet columns parallel to each other formed by the fourth magnet M24 being periodically extended in the second plane. L24, the magnetization direction of the fourth magnet M24 is substantially perpendicular to the second plane. As shown in FIG. 1, the magnetization directions of the adjacent magnets in the first magnet row L21, the second magnet row L22, the third magnet row L23, and the fourth magnet row L24 may be opposite.
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 are disposed apart from each other in the second plane by a distance in the Y-axis direction, and the second magnet sub-array A22 and the third magnet sub-array A23 are in the first magnet sub-array A21
  • the fourth magnet sub-array A24 is disposed along the X-axis direction in a spaced position formed by a predetermined distance.
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 are in the second plane at an intermediate point of the line connecting the centers of the two and extending along the first direction (X-axis direction).
  • Axisymmetric configuration is preferably, the second magnet sub-array A22 and the third magnet sub-array A23 are arranged in a 180-degree rotationally symmetric configuration centering on an axis connecting the centers of the first magnet sub-array A21 and the fourth magnet sub-array A24 in the second plane. That is, after the first magnet sub-array A21 is rotated about the central axis in the Y-axis direction, the first magnet sub-array A21 and the fourth magnet sub-array A24 overlap, and the magnetization directions are the same.
  • each of the first magnet arrays L21 and each of the fourth magnet arrays L24 may be disposed to be inclined with respect to the X-axis direction in the second plane.
  • the extending direction of each of the first magnet columns L21 in the second plane forms an angle with the -X direction at an angle (for example, 45 degrees), and the extending direction of each of the fourth magnet columns L24 in the second plane An angle formed at a certain angle (for example, 45 degrees) with the +X direction.
  • Each of the second magnet arrays L22 and each of the third magnet arrays L23 is also disposed obliquely with respect to the X-axis direction in the second plane.
  • the extending direction of each of the second magnet columns L22 in the second plane forms an angle with the -X direction at an angle (for example, 45 degrees), and the extending direction of each of the third magnet columns L23 in the second plane An angle formed at a certain angle (for example, 45 degrees) with the +X direction.
  • the stator is a layered coil array that linearly extends in the X-axis direction and the Y-axis direction to constitute a working region of the motor.
  • the stator has at least two layers, in Z The axes overlap and can be set to more than two layers.
  • the mover is a magnet array comprising four magnet sub-arrays (A21, A22, A23, A24), the magnets in each of the magnet sub-arrays are arranged in a periodic fashion, in accordance with the Halbach design.
  • the N-pole magnet (the pattern is a dot) and the S-pole magnet (the pattern is a fork) are linearly arranged and magnetized in a vertical direction perpendicular to the plane (first plane) where the coil is located.
  • the magnets with arrows are magnetized in the direction of the arrow in the horizontal direction (in the second plane). There may also be no magnets magnetized in the horizontal direction in the magnet sub-array.
  • the magnet arrays in which the N-pole magnets and the S-pole magnets are alternately arranged in the magnet array form an angle of 45 degrees with respect to the positive or negative direction of the X-axis.
  • the positions of the second magnet sub-array A22 and the third magnet sub-array A23 are symmetrical, and the magnetization directions are opposite, that is, the arrangement patterns of the magnets M22 and M23 in the two magnet arrays are axisymmetric, but the magnetization directions are opposite, that is, After the second magnet sub-array A22 is rotated 180 degrees about its axis of symmetry with respect to the third magnet sub-array A23 in the Y-axis direction, the second magnet sub-array A22 overlaps with each of the magnets in the third magnet sub-array A23, and is magnetized. The same direction.
  • the second magnet sub-array A22 and the third magnet sub-array A23 act on the first coil 11 to generate a completely opposite force, thereby generating a moment, which in turn can drive the mover to rotate within a certain angle.
  • the second magnet sub-array A22 and the third magnet sub-array A23 interact with the lower first coil 11, and the same one of the first coils 11 passes through the second magnet sub-array A22 and passes through Below the third magnet sub-array A23, since the current is the same, a force of the same magnitude is generated, but since the polarity of the second magnet M22 in the second magnet sub-array A22 above the turns coil wire is equal to that above the turn coil wire The polarity of the third magnet M23 in the third magnet sub-array A23 is extremely opposite, so the direction of the generated force is opposite.
  • a certain coil wire in the first coil 11 passes through the magnet represented by the fork in the second magnet sub-array A22 and also passes through the magnet represented as a black point in the third magnet sub-array A23, wherein the current direction is From the -X direction to the +X direction, according to the Lorentz principle, the second magnet sub-array A22 generates a force in the +Y direction, and the third magnet sub-array A23 generates a force in the -Y direction, which are opposite forces At the same time, the action produces a moment about the Z-axis, which further produces the effect of rotating the mover platform 2 about the Z-axis.
  • the second magnet sub-array A22 and the third magnet sub-array A22 generate a periodically distributed magnetic field
  • the second magnet sub-array A22 and the first coil 11 in the first coil 11 also generate a force in the +Z direction, that is, a map.
  • the second magnet sub-array A22 and the third magnet sub-array A23 generate a periodically distributed magnetic field, in addition to the Y-axis direction, and a Z-axis direction.
  • the second magnet sub-array A22 and the first coil below it can generate the force in the Y-axis direction.
  • the force in the Z-axis direction can be generated.
  • the third magnet sub-array A23 and the first coil below it can generate both the force in the Y-axis direction and the force in the Z-axis direction.
  • the magnetization directions are opposite. Therefore, the forces generated by the second magnet sub-array A22 and the third magnet sub-array A23 in the Y-axis direction or the Z-axis direction are the same in magnitude and opposite in direction.
  • the second magnet sub-array A22 and the third magnet sub-array A23 cooperate to generate two moments, one being a moment of rotation about the Z-axis and the other being a moment of rotation about the Y-axis.
  • This is not possible with the prior art.
  • the second sub-array A22 magnet sub-array produces a force in the +Z direction
  • the third magnet sub-array A23 produces a force in the -Z direction
  • the action of the two forces produces a moment of rotation about the Y-axis.
  • a small angle of rotation is produced. Although the angle of rotation is small, the moment is present.
  • the interaction of the second magnet sub-array A22 and the third magnet sub-array A23 with the first coil 11 on the mover platform 2 is not a force but a moment.
  • the design of the first magnet sub-array A21 and the fourth magnet sub-array A24 is characterized in that since the first coil 11 can directly generate torque in two directions, the first coil 11 can be The respective coil wires of the second coil 12 arranged orthogonally are connected in series.
  • the first magnet sub-array A21 and the first coil 11 generate a force in the Y-axis direction and the Z-axis direction.
  • the fourth magnet sub-array A24 also generates a force in the Y-axis direction and the Z-axis direction with the first coil 11. Since the coils passing under the first magnet sub-array A21 are different from the coils passing under the fourth magnet sub-array A24, the currents of the two coils can be independently controlled.
  • the first magnet sub-array A21 interacts with the first coil 11 below it to generate a force in the +Y-axis direction
  • the fourth magnet sub-array A24 interacts with the first coil 11 below it to generate the +Y-axis.
  • the force of the direction it can also be controlled that the first magnet sub-array A21 interacts with the first coil 11 below it to generate a force in the -Y direction. That is, by separately controlling separately, the force generated by the interaction of the fourth magnet sub-array A24 and the first coil 11 below it can be generated by the force generated by the interaction between the fourth magnet sub-array A24 and the first coil 11 below it. Same or different.
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 are separately controlled, respectively, it is possible to generate a force in the Y-axis direction and a force in the Z-axis direction. If the directions of the forces in the Z-axis direction generated by the first magnet sub-array A21 and the fourth magnet sub-array A24 are the same, A force is generated along the Z-axis direction. If the directions are the same and the same size, the torque can be generated.
  • the two magnet sub-arrays of the first magnet sub-array A21 and the fourth magnet sub-array A24 cooperate to generate a moment of rotation about the X-axis, and can also generate a force along the Y-axis direction and along the Z-axis direction. Force, the force in both directions and a moment. Specifically, a moment about the X axis and a force along the Y and Z axes can be generated.
  • the displacement device of the present invention is capable of generating six degrees of freedom of motion in space: translation along the X, Y, and Z axes and rotation about the X, Y, and Z axes.
  • the second magnet sub-array A22 and the fourth magnet sub-array A23 act together with the energized coil to generate a moment of rotation about the Y-axis and a moment of rotation about the Z-axis;
  • the first magnet sub-array The A21 and fourth magnet sub-arrays A24 interact with the first coil to generate a moment about the X-axis and a force along the Y- and Z-axis directions;
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 interact with the second coil to generate The force along the X and Z axes.
  • the magnet sub-arrays interact with the second coil 12 to generate a force in the X-axis direction or a force in the Z-axis direction, but the force in the Z-axis direction is a superposition effect (which can be separately oriented)
  • the size is controlled separately and will not be considered here).
  • one of the coil wires of the second coil 12 passes through the magnets marked as black dots in the first magnet sub-array A21, the second magnet sub-array A22, and the fourth magnet sub-array A24 (ie, the N-pole faces the outside of the paper surface).
  • the direction of the magnetic field line is +Z direction, wherein the coils adjacent to the turns of the turn (not adjacent in the figure) pass through the first magnet sub-array A21, the second magnet sub-array A22, and the fourth magnet sub-array A24
  • the direction of the magnetic field line is the -Z direction.
  • the second coils 12 can all be connected in series as a set of three-phase commutating coils whose current is driven by a single three-phase motor. This is not possible with the displacement device of the prior art.
  • the first magnet sub-array A21, the second magnet sub-array A22, and the fourth magnet sub-array A24 generate the same X-axis force
  • the first magnet sub-array A21, the third magnet sub-array A23, and the fourth magnet sub-array A24 are also Produces the same force in the X-axis direction. Therefore, the first magnet sub-array A21, the second magnet sub-array A22, the third magnet sub-array A23, and the fourth magnet sub-array A24 interact with the second coil 12 to generate only the force in the X-axis direction, and do not generate the Z-axis direction. The torque.
  • the present invention can achieve the following effects by configuring the first magnet sub-array A21, the second magnet sub-array A22, the third magnet sub-array A23, and the fourth magnet sub-array A24 in the above manner: (1) The magnet sub-array A22 and the third magnet sub-array A23 cooperate to generate a torque; (2) all of the second coils 12 can be connected in series and controlled by a set of three-phase electric drives. Each of the second coils 12 passes through the magnetic field lines toward the underside of the magnets inside the paper or through the magnetic field lines toward the magnets outside the plane of the paper, thereby causing the same by connecting the turns of the second coil 12 in series Direction of force.
  • the coil can be a PCB board coil or a winding set.
  • the second coils 12 in the prior art displacement devices are not connected in series, but must be divided into groups, each of which is individually controlled and costly. If it is desired to double the range of movement of the planar motor as the displacement device, the number of coils in the X-axis direction must be doubled, and the number of controllers that drive the coil must also be doubled. In the planar motor of the mobile device of the present invention, if it is desired to double the range of movement of the mover, the number of drives does not change. This makes it possible to reduce the cost and to achieve miniaturization and compactness of the displacement device.
  • the law is powered.
  • the four magnet sub-arrays A21, A22, A23, A24 and the second coil 12 on the stator 1 interact to generate a force of the mover platform 2 in the X-axis direction and the Z-axis direction, and generate the mover platform 2 on the X-axis. Translation in the direction and direction of the Z axis.
  • the first coils 11 are divided into a plurality of groups, and each group is separately supplied with power according to the 3-phase commutation law.
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 respectively interact with the first coil 11 of the lower (-Z direction), respectively, and can generate forces in the Y-axis direction and the Z-axis direction, respectively, to generate a mover along the Y-axis. Direction and translation in the Z-axis direction.
  • the first magnet sub-array A21 and the fourth magnet sub-array A24 can be caused to generate the +Z direction and The force in the -Z direction, thereby producing a rotation about the X-axis direction.
  • the first magnet sub-array A22 and the third magnet sub-array A23 interact with the lower (-Z-direction) first coil 11 to generate equal and opposite directions of the mover in the Y-axis direction to generate a Z-axis.
  • the torque of rotation Similarly, the second magnet sub-array A22 and the third magnet The sub-array A23 interacts with the first coil 11 below it (-Z direction) to generate a force of equal magnitude and opposite direction of the mover in the Z-axis direction to generate a moment of rotation about the Y-axis.
  • the second magnet sub-array A22 and the third magnet sub-array A23 respectively interact with the lower (-Z-direction) first coil 11 to generate rotation of the mover about the Y-axis and around the Z-axis. In this way, the movement of the 6 degrees of freedom of the mover (XYZ translation and XYZ rotation) can be produced.
  • the magnetization directions of the first magnet M21, the second magnet M22, and the fourth magnet M24 which overlap with one of the turns of the second coil 12 in the Z-axis direction are the same. Further, the magnetization directions of the first magnet M21, the third magnet M23, and the fourth magnet M24 overlapping with one of the turns of the second coil 12 in the Z-axis direction are the same, and each turn of the second coil 12 is connected in series to each other. Its current is controlled by a single driver. Since the second coils 12 can be connected in series to each other in a group of coils, they can be powered by a single three-phase motor, thereby saving both cost and control complexity.
  • FIG. 2 is a schematic plan view showing a configuration of a magnet array of a displacement device according to a second embodiment of the present invention.
  • the arrangement of the first coil 11 and the second coil 12 of the stator 1 is the same as that of the first embodiment
  • the magnet array 30 also includes the first magnet sub-array A31 and the second magnet sub-array A32. a third magnet sub-array A33, and a fourth magnet sub-array A34.
  • the arrangement of the first magnet sub-array A31 and the fourth magnet sub-array A34 is the same as that of the first magnet sub-array A21 and the fourth magnet sub-array A24 in the first embodiment.
  • each of the first magnet columns L31 and each of the fourth magnet columns L34 are disposed obliquely with respect to the X-axis direction in the second plane, that is, the extending direction of each of the first magnet columns L31 in the second plane is -
  • the X direction has an angle of a certain angle (for example, 45 degrees), and the direction in which the fourth magnet array L34 extends in the second plane is at an angle (for example, 45 degrees) to the +X direction.
  • Each of the second magnet columns L32 and each of the third magnet columns L33 are vertically disposed in the second plane with respect to the X-axis direction, that is, each of the second magnet columns L32 and each of the third magnet columns L33 are in the second plane
  • the angle between the extending direction and the X-axis direction is about 90 degrees.
  • the second magnet sub-array A32 and the third magnet sub-array A33 are magnet sub-arrays in which the magnets are arranged perpendicular to the X-axis direction, but function The same as the functions of the second magnet sub-array A22 and the third magnet sub-array A23 in the first embodiment, the same two moments as in the first embodiment are produced. Since the configurations of the second magnet sub-array A32 and the third magnet sub-array A33 also have a rotationally symmetric relationship, that is, the positions are symmetrical and the magnetization directions are opposite.
  • the second magnet sub-array A32 and the third magnet sub-array A33 are overlapped, and the magnetization directions are the same.
  • the difference is that, in the first embodiment shown in FIG. 1, the second magnet sub-array A22 and the third magnet sub-array A23 can interact with the second coil 12 to generate a force along the X-axis direction, and the first embodiment shown in FIG.
  • the resultant force in the X-axis direction generated by the second magnet sub-array A32 and the third magnet sub-array A33 respectively acting on the second coil 12 is substantially zero.
  • the magnet array includes a first magnet sub-array A41, a second magnet sub-array A42, a third magnet sub-array A43, and a fourth magnet sub-array A44.
  • the first magnet sub-array A41 includes an X-axis direction magnet array L41 extending in the X-axis direction and a Y-axis direction magnet array L42 extending in the Y-axis direction, and the X-axis direction magnet array L41 is disposed on the Y-axis direction magnet array L42.
  • the fourth magnet sub-array A44 includes an X-axis direction magnet array L45 extending in the X-axis direction and a Y-axis direction magnet column L46 extending in the Y-axis direction, and the X-axis direction magnet array L45 is larger than the Y-axis direction magnet Column L46 is placed closer to the center.
  • the extending direction of the second magnet array L43 included in the second plane of the second magnet sub-array A42 forms an angle of about 90 degrees with the X-axis direction
  • the third magnet sub-array A43 The extending direction of the included third magnet row L44 in the second plane forms an angle of about 90 degrees with the X-axis direction.
  • each of the second magnet array L43 and the third magnet array L44 is disposed substantially perpendicularly with respect to the first direction in the second plane, and likewise, the configurations of the second magnet sub-array A42 and the third magnet sub-array A43 are also rotated.
  • the symmetrical relationship that is, the positional symmetry and the magnetization direction are opposite, the second magnet sub-array A42 is rotated 180 degrees along the central axis of the Y-axis direction, completely overlaps with the magnet sub-array A43, and the magnetization directions are the same.
  • the Y-axis direction magnet array L42 and the Y-axis direction magnet array L46 of the fourth magnet sub-array A44 in the first magnet sub-array A41 respectively act on the first coil 11 below each of them, and can be generated. Forces along the Y-axis direction and along the Z-axis, two Z-axis forces Together, it is possible to generate a moment about the X axis. The resultant force of the Y-axis direction magnet array L42 and the Y-axis direction magnet array L46 and the second coil 12 in the fourth magnet sub-array A41 interacting with each other is zero.
  • the X-axis direction magnet array L41 in the first magnet sub-array A41 and the X-axis direction magnet array L45 in the fourth magnet sub-array A44 respectively act on the second coil 12 below (-Z direction), and can be generated along the X-axis direction. And a force in the Z-axis direction; the X-axis direction magnet array L41 in the first magnet sub-array A41 and the X-axis direction magnet array L45 in the fourth magnet sub-array A44 and the first coil in the lower (-Z direction) The resultant force after 11 action is zero.
  • the second magnet sub-array A42 and the third magnet sub-array A43 respectively interact with the first coil 11 below, respectively, to generate moments in the Y-axis direction and the Z-axis direction, and the second magnet sub-array A42 and the third magnet sub-array A43
  • the resultant force interacting with the second coil 12 below each is zero. Therefore, the entire mover and coil array can produce forces and moments in three directions of XYZ, which in turn can generate six degrees of freedom of motion of the mover.
  • the Y-axis direction magnet array L42 in the first magnet sub-array A41 and the Y-axis direction magnet array L46 in the fourth magnet sub-array A44 respectively act on the first coil 11 below the respective ones, and can generate the Y-axis direction.
  • the force in the Z-axis direction, and if the Y-axis direction magnet array L42 in the first magnet sub-array A41 generates a force in the +Z direction, the Y-axis direction magnet array L46 in the fourth magnet sub-array A44 is generated - The force in the Z direction, the two forces are equal in magnitude and opposite in direction, thereby generating a moment of rotation about the X axis.
  • the positions of the Y-axis direction magnet array L42 in the first magnet sub-array A41 and the Y-axis direction magnet array L46 in the fourth magnet sub-array A44 are different, and the lower first coil 11 is also different, and can be separately controlled separately, so that the coil is passed through the coil.
  • the current can be different, so that two forces and one moment can be generated.
  • the X-axis direction magnet array L41 in the first magnet sub-array A41 and the X-axis direction magnet array L45 in the fourth magnet sub-array A44 and the second coil 12 in the lower side thereof generate a force in the X-axis direction, and may also generate a Z-axis direction. Force, but does not produce torque.
  • the magnetization direction of the fourth magnet M45 in the X-direction magnet array L45 of A44 is the same, and each turn of the second coil 12 is connected in series with each other, and its current is controlled by a three-phase driver.
  • one turn of the coil wire of the second coil 12 simultaneously passes through the X-axis direction magnetic field in the first magnet sub-array A41
  • the force is always the same. Therefore, the second coils 12 can also be connected in series and controlled by a single drive.
  • the magnet array includes a first magnet sub-array A51, a second magnet sub-array A52, a third magnet sub-array A53, and a fourth magnet sub-array A54.
  • the arrangement of the first magnet sub-array A51 and the fourth magnet sub-array A54 is the same as that of the first magnet sub-array A21 and the fourth magnet sub-array A24 in the first embodiment.
  • each of the first magnet columns L51 and each of the fourth magnet columns L54 are disposed obliquely with respect to the X-axis direction in the second plane, that is, each of the first magnet columns L51 and each of the fourth magnet columns L54 is at the The direction of extension in the two planes is at an angle to the X (for example, 45 degrees).
  • the magnets having different magnetization directions in the second magnet sub-array A52 and the third magnet sub-array A33 are alternately arranged along the X direction and the Y direction.
  • the configurations of the second magnet sub-array A52 and the third magnet sub-array A53 also have a rotationally symmetric relationship, that is, the position is symmetrical and the magnetization directions are opposite, and the second magnet sub-array A52 is rotated by 180 degrees along the central axis of the Y-axis direction of the two. Thereafter, it completely overlaps with the magnet sub-array A53, and the magnetization directions are the same.
  • the displacement device of the fourth embodiment of the present invention can also achieve the partial technical effect of the first embodiment described above, that is, the second magnet sub-array A52 and the third magnet sub-array A53 cooperate to generate a moment.
  • the first magnet sub-arrays A21 to A51, the second magnet sub-arrays A22 to A52, the third magnet sub-arrays A23 to A53, and the fourth magnet sub-array A24 to A magnet having a magnetization direction parallel to the first plane may also be present in A54, and its magnetization direction is indicated by arrows in Figs.
  • the cross section of the first magnet M21, the second magnet M22, the third magnet M23, and the fourth magnet M24 parallel to the first plane may be a rectangle, a square, a circle, an ellipse, or a regular polygon.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un dispositif de déplacement comprenant : un stator (1) comprenant une première bobine (11) et une seconde bobine (12) ; et une plateforme de moteur (2) comprenant un réseau d'aimants de moteur (21). Le réseau d'aimants de moteur (21) comprend au moins : un premier sous-réseau d'aimants (A21), comprenant une pluralité de premières rangées d'aimants (L21) mutuellement parallèles constituées de premiers aimants (M21) ; un deuxième sous-réseau d'aimants (A22) comprenant une pluralité de deuxièmes rangées d'aimants (L22) mutuellement parallèles constituées de deuxièmes aimants (M22) ; et un troisième sous-réseau d'aimants (A23) comprenant une pluralité de troisièmes rangées d'aimants (L23) mutuellement parallèles constituées de troisièmes aimants (M23), les directions magnétiques des premiers aimants (M21), des deuxièmes aimants (M22) et des troisièmes aimants (M23) étant toutes sensiblement perpendiculaires au deuxième plan. Des aimants ayant des directions magnétiques inverses existent dans le deuxième sous-réseau d'aimants (A22) ou le troisième sous-réseau d'aimants (A23) empilés avec un conducteur d'un certain tour de bobine de la première bobine (11) dans la troisième direction, de telle sorte que la plate-forme de moteur (2) et le stator (1) agissent ensemble pour générer un couple dans la deuxième direction et un couple dans la troisième direction.
PCT/CN2017/113580 2017-01-19 2017-11-29 Dispositif de déplacement Ceased WO2018133555A1 (fr)

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CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置

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US6777896B2 (en) * 2002-07-09 2004-08-17 Nikon Corporation Methods and apparatus for initializing a planar motor
US20070046221A1 (en) * 2005-08-29 2007-03-01 Canon Kabushiki Kaisha Method for controlling stage apparatus
CN101214617A (zh) * 2007-12-28 2008-07-09 清华大学 动圈式大范围移动磁浮六自由度工作台
CN103066894A (zh) * 2012-12-12 2013-04-24 清华大学 一种六自由度磁悬浮工件台
CN104753306A (zh) * 2013-12-31 2015-07-01 上海微电子装备有限公司 磁钢阵列以及磁浮平面电机

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