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WO2018123354A1 - Élément piézoélectrique - Google Patents

Élément piézoélectrique Download PDF

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Publication number
WO2018123354A1
WO2018123354A1 PCT/JP2017/041775 JP2017041775W WO2018123354A1 WO 2018123354 A1 WO2018123354 A1 WO 2018123354A1 JP 2017041775 W JP2017041775 W JP 2017041775W WO 2018123354 A1 WO2018123354 A1 WO 2018123354A1
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WO
WIPO (PCT)
Prior art keywords
lead wire
external electrode
reaction layer
piezoelectric element
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/041775
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English (en)
Japanese (ja)
Inventor
康弘 浅倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2018558905A priority Critical patent/JP6923560B2/ja
Publication of WO2018123354A1 publication Critical patent/WO2018123354A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present disclosure relates to a piezoelectric element used as a pressure sensor element.
  • a piezoelectric element can be used as the pressure sensor element.
  • the piezoelectric element includes, for example, a laminated body in which piezoelectric bodies and internal electrodes are alternately laminated, an external electrode that is provided on a side surface of the laminated body and is electrically connected to the internal electrode, and an electrical electrode electrically connected to the external electrode. Connected lead wires.
  • a reaction layer of an external electrode and a lead wire is provided at a joint portion between the external electrode and the lead wire is known (see, for example, Patent Documents 1 and 2).
  • the piezoelectric element of the present disclosure includes a laminated body in which piezoelectric bodies and internal electrodes are alternately laminated, an external electrode that is provided on a side surface of the laminated body and is electrically connected to the internal electrode, and an electrical electrode connected to the external electrode. Connected lead wires. Furthermore, it has a reaction layer of the external electrode and the lead wire at a joint portion between the external electrode and the lead wire, and the reaction layer is a cross section perpendicular to the axial direction of the lead wire, While having a width along the lead wire, the thickness of the central portion of the width is the largest.
  • FIG. 2 is an enlarged view of a main part of a cross section taken along line II-II shown in FIG.
  • FIG. 5 is an enlarged view of a main part of a cross section taken along line VV shown in FIG. 4.
  • An object of the present invention is to provide a piezoelectric element having excellent stability over a long period of time in an environment.
  • FIG. 1 is a schematic perspective view showing an example of an embodiment of a piezoelectric element
  • FIG. 2 is an enlarged view of a main part of a cross section taken along line II-II shown in FIG.
  • the piezoelectric element 1 shown in FIGS. 1 and 2 includes a laminated body 2 in which piezoelectric bodies 21 and internal electrodes 22 are alternately laminated, and an external body that is provided on a side surface of the laminated body 2 and is electrically connected to the internal electrodes 22.
  • An electrode 3 and a lead wire 4 electrically connected to the external electrode 3 are provided.
  • the reaction layer 5 of the external electrode 3 and the lead wire 4 is provided at the joint portion between the external electrode 3 and the lead wire 4, and the reaction layer 5 is viewed in a cross section perpendicular to the axial direction of the lead wire 4.
  • the thickness of the central portion of the width is the thickest.
  • the laminated body 2 has a portion where the piezoelectric bodies 21 and the internal electrodes 22 are alternately stacked, and a portion where only the piezoelectric bodies 21 provided at both ends in the stacking direction are stacked.
  • the laminated body 2 has a rectangular column shape (rectangular shape) having a length of 0.5 to 10 mm, a width of 0.5 to 10 mm, and a height of 1 to 100 mm, for example.
  • the laminated body 2 may have a hexagonal prism shape, an octagonal prism shape, a cylindrical shape, or the like.
  • the piezoelectric body 21 constituting the laminate 2 is made of ceramics having piezoelectric characteristics.
  • a ceramic for example, a perovskite oxide made of lead zirconate titanate (PbZrO 3 —PbTiO 3 ), lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ), or the like can be used.
  • the thickness of the piezoelectric body 21 is 3 to 250 ⁇ m, for example.
  • the internal electrode 22 constituting the laminate 2 is fired at the same time as the ceramic that becomes the piezoelectric body 21.
  • a conductor mainly composed of a silver-palladium alloy or a conductor containing copper, platinum, or the like can be used.
  • the internal electrode 22 includes first internal electrodes 221 and second internal electrodes 222 that are alternately arranged.
  • the first internal electrode 221 and the second internal electrode 222 are each a laminated body. 2 are alternately drawn to a pair of opposing side surfaces, and are electrically connected to a pair of external electrodes 3 provided on the side surfaces of the laminate 2 described later.
  • the thickness of the first internal electrode 221 and the second internal electrode 222 is, for example, 0.1 to 5 ⁇ m.
  • the laminate 2 may include a metal layer that is a layer for relaxing stress and does not function as an internal electrode.
  • external electrodes 3 are respectively provided on the pair of side surfaces of the stacked body 2 that one of the end surfaces of the first internal electrode 221 and the second internal electrode 222 reaches, and the first internal electrode 221 or the second internal electrode 222 It is electrically connected to the internal electrode 222.
  • the external electrode 3 can be produced by baking a conductive paste containing a metal such as Ag or Cu.
  • the thickness of the external electrode 3 is set to 5 to 70 ⁇ m.
  • the lead wire 4 is joined to the external electrode 3 and is electrically connected.
  • the external electrode 3 is electrically connected to an external circuit via the lead wire 4.
  • the lead wire 4 for example, a metal wire made of copper or the like having a cross-sectional shape such as a polygon such as a quadrangle, a circle or an ellipse can be used.
  • a copper wire having a diameter of 50 to 500 ⁇ m and having a surface plated with Ni, or a copper wire having a surface enamel-coated can be used.
  • reaction layer 5 of the external electrode 3 and the lead wire 4 at a joint portion between the external electrode 3 and the lead wire 4. Further, the reaction layer 5 has a width along the lead wire 4 when viewed in a cross section perpendicular to the axial direction of the lead wire 4, and the thickness of the central portion of the width is the largest.
  • the stress caused by the difference in thermal expansion between the reaction layer 5 of the external electrode 3 and the lead wire 4 and the member (external electrode 3 or lead wire 4) adjacent thereto is applied to the central portion (lead of the width of the reaction layer 5).
  • the central portion where the reaction layer 5 is thick has a large amount of thermal expansion and is subjected to thermal stress, but the end portion where the reaction layer 5 is thin has a small amount of thermal expansion and can hardly be subjected to thermal stress.
  • the reaction layer 5 is a layer formed by melting at least one of the external electrode 3 and the lead wire 4 when they are joined.
  • the reaction layer 5 shown in the figure has a shape in which the thickness gradually increases from the end in the width direction toward the center when viewed in a cross section perpendicular to the axial direction of the lead wire 4. The shape may be such that the thickness is increased.
  • the reaction layer 5 is a layer formed by a reaction of a part of the external electrode 3 and a part of the lead wire 4, and it cannot be said that it is a part of the external electrode 3 or a part of the lead wire 4.
  • the reaction layer 5, the external electrode 3, and the lead wire 4 are different members.
  • the thickness of the thickest part of the reaction layer 5 is, for example, 5 to 50 ⁇ m.
  • the width of the reaction layer 5 is appropriately determined according to the shape and width of the lead wire 4.
  • Convex shape convex toward the electrode 3 for example, convex curve shape
  • convex shape where the boundary between the reaction layer 5 and the lead wire 4 is convex toward the lead wire 4 side convex shape that is convex at either side boundary, etc.
  • convex shape here is convex curve shape, for example.
  • the reaction layer 5 when viewed in a cross section perpendicular to the axial direction of the lead wire 4, the reaction layer 5 may have a convex curve shape on both the external electrode 3 side and the lead wire 4 side. That is, when viewed in a cross section perpendicular to the axial direction of the lead wire 4, the boundary between the reaction layer 5 and the external electrode 3 has a convex curve shape that protrudes toward the external electrode 3, and the reaction layer 5 and the lead wire 4.
  • the boundary may be a convex curve shape that protrudes toward the lead wire 4.
  • FIG. 5 which is an enlarged view of the main part of the cross section taken along the line VV shown in FIGS. 3, 4 and 4, the joint portion 41 with the external electrode 3 in the lead wire 4 You may swell in the width direction rather than the site
  • a joint portion 41 to be joined to the external electrode as the lead wire 4 is processed into a shape swelled in the width direction in advance.
  • the lead wire 4 when the lead wire 4 is joined to the external electrode 3 by pressing a heat source against the lead wire 4, the lead wire 4 is crushed and swells in the width direction simultaneously with this joining.
  • An elliptical joining portion 41 is provided.
  • a heat source made of a metal rod whose tip is heated to 700 to 1200 ° C. or a ceramic rod such as alumina is pressed onto the lead wire 4 made of enamel-coated copper wire, so that the copper constituting the lead wire 4 is made. While melting, the heat source is joined by applying more pressure.
  • the joining portion 41 of the lead wire 4 has a shape swelled in the width direction.
  • the lead wire 4 while the copper of the lead wire 4 reacts with the silver of the external electrode 3, the lead wire 4 has a width along the lead wire 4 and the reaction layer 5 having the thickest central portion of the width is formed. Is joined to the external electrode 3.
  • the width of the lead wire 4 when viewed from the front is, for example, 0.2 to 2 mm
  • the joint portion with the external electrode 3 is, for example, 1.5 to 2.5 times.
  • the outer peripheral shape when the reaction layer 5 is viewed from the front approaches a circular shape, and the central portion that is the thickest part of the reaction layer 5 where stress is concentrated is the entire outer periphery (end). Therefore, the stress on the edge of the interface can be further reduced.
  • the cross-sectional shape obtained by cutting at least a portion of the lead wire 4 excluding the joint portion 41 with the external electrode 3 with a cross section perpendicular to the axial direction may be circular. With such a shape, there is no edge on the outer periphery of the portion of the lead wire 4 excluding the joint portion with the external electrode 3, and there is no portion where the vibration is concentrated. Can contribute to attenuation. In addition, since noise easily propagates to the space outside the lead wire 4, vibration noise of the electric signal transmitted through the lead is reduced.
  • the external electrode 3 contains a lot of glass on the laminated body 2 side in the thickness direction.
  • the layer on the laminate 2 side can be a layer containing a large amount of glass
  • the layer on the outer surface side can be a layer having a small amount of glass.
  • the reaction layer 5 can be formed only at the portion where the lead wire 4 and the external electrode 3 are in contact with each other.
  • the reaction proceeds so that the reaction layer 5 can be provided also on the portion of the lead wire 4 that is not in contact with the external electrode 3.
  • a ceramic green sheet to be the piezoelectric body 21 is produced. Specifically, a calcined powder of piezoelectric ceramic, a binder made of an acrylic or butyral organic polymer, and a plasticizer are mixed to prepare a slurry. And a green sheet is produced using this slurry by using tape molding methods, such as a doctor blade method and a calender roll method.
  • the piezoelectric ceramic any material having piezoelectric characteristics may be used.
  • a perovskite oxide made of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) can be used.
  • the plasticizer dibutyl phthalate (DBP), dioctyl phthalate (DOP), or the like can be used.
  • a conductive paste to be the internal electrode 22 is produced.
  • a conductive paste is prepared by adding and mixing a binder and a plasticizer to a metal powder of a silver-palladium alloy. This conductive paste is applied on the green sheet in the pattern of the internal electrodes 22 using a screen printing method. Further, a plurality of green sheets on which this conductive paste is printed are stacked, debindered at a predetermined temperature, fired at a temperature of 900 to 1200 ° C., and then a predetermined shape using a surface grinder or the like.
  • the laminated body 2 including the piezoelectric bodies 21 and the internal electrodes 22 that are alternately laminated is manufactured by performing a grinding process.
  • the laminate 2 is not limited to the one produced by the above manufacturing method, and any production method can be used as long as the laminate 2 formed by laminating a plurality of piezoelectric bodies 21 and internal electrodes 22 can be produced. It may be produced.
  • the external electrode 3 is formed on the side surface of the multilayer body 2 in order to perform electrical exchange between the internal electrode 22 and the outside.
  • the external electrode 3 can be formed by the method described below.
  • a conductive paste is produced by, for example, admixing silver powder, copper powder and a plasticizer.
  • a pattern of the external electrode 3 is formed by controlling the predetermined thickness and width of the conductive paste at a position where the internal electrode 22 on the side surface of the laminate 2 is exposed using a screen printing method or a dispensing method. For example, a thickness of 5 to 70 ⁇ m is applied and baked at a temperature of 500 to 800 ° C.
  • the conductive paste may contain glass powder, or may be applied in two stages with different amounts of glass powder.
  • a lead wire 4 is formed by pressing a heat source made of a metal rod whose tip is heated to 700 to 1200 ° C. or a ceramic rod such as alumina from the lead wire 4 made of enamel-coated copper wire.
  • the heat source is further pressure-bonded while melting copper.
  • the reaction layer 5 having a width along the lead wire 4 and the thickest central portion of the width can be formed. Can be produced.
  • the reaction layer 5 is unlikely to protrude toward the external electrode 3 and tends to protrude toward the lead wire 4.
  • the joint portion 41 of the lead wire 4 is not crushed, and only the central portion of the reaction layer 5 is thickened.
  • the lead wire 4 plated with Ni on the surface of the copper wire is used and only the joint portion 41 is stripped of the Ni plating to expose the copper, only that portion becomes easy to react and only the central portion of the reaction layer 5 is exposed. Can be made thicker.
  • the piezoelectric element of the example was manufactured as follows.
  • a ceramic slurry was prepared by mixing calcined powder of a piezoelectric ceramic mainly composed of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) having an average particle size of 0.4 ⁇ m, a binder and a plasticizer. Using this ceramic slurry, a ceramic green sheet serving as a piezoelectric body having a thickness of 50 ⁇ m was prepared by a doctor blade method.
  • a piezoelectric ceramic mainly composed of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) having an average particle size of 0.4 ⁇ m, a binder and a plasticizer.
  • a binder was added to the silver-palladium alloy to produce a conductive paste to be an internal electrode.
  • a conductive paste serving as an internal electrode was printed on one side of the ceramic green sheet by a screen printing method, and 50 layers of ceramic green sheets on which the conductive paste was printed were formed. A total of 10 ceramic green sheets not printed with the conductive paste serving as the internal electrode were laminated on the top and bottom of the 50 ceramic green sheets printed with the conductive paste serving as the internal electrode. Then, it was fired at 980 to 1100 ° C. and ground to a predetermined shape using a surface grinder to obtain a 3 mm square laminate.
  • an external electrode was formed by screen printing a conductive paste containing Ag on the side surface of the laminate.
  • a reaction layer shown in FIG. 2 was prepared as an example (sample 1).
  • the lead wire is an enamel-coated copper wire with a diameter of 150 ⁇ m
  • an alumina ceramic rod whose tip is heated to 800 to 900 ° C. is pressed against the lead wire, and copper and silver Bonding was performed while forming the reaction layer.
  • the lead wire starts to melt, it is pressed against the external electrode with a force of 5 to 10 N and reacted for 15 to 30 seconds while spreading the lead wire, so that it gradually increases from the end in the width direction toward the center.
  • a reaction layer having a large thickness was formed.
  • a reaction layer having an end in the width direction thicker than the central portion was prepared. Specifically, a laser welding method was used to melt from the outside of the reaction layer, thereby increasing the thickness of the end in the width direction.
  • the pressure sensor output was measured by applying an external force and extracting the charge.
  • an external force of about 1,000 N was applied, a charge of about 15 mC was obtained.
  • the piezoelectric element of Sample 1 as an example was free from cracks around the end of the reaction layer. Furthermore, when the output signal of this piezoelectric element was evaluated, a value equivalent to that before the durability test was obtained, and the characteristics were not deteriorated.
  • the piezoelectric element of Sample 2 as a comparative example has a crack at the end of the reaction layer as a result of SEM analysis, and when the cross section near the end is observed, the crack at the end is inside the reaction layer. It was progressing to. Furthermore, when the output signal of the sample 2 was measured, a value 30% lower than that before the reliability test was obtained, which was deteriorated.
  • the piezoelectric element of the present disclosure has reduced stress due to the difference in thermal expansion between the reaction layer of the external electrode and the lead wire and a member adjacent to the reaction layer, and cracks are suppressed. It turns out that it is excellent.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

La présente invention concerne un élément piézoélectrique (1) qui est pourvu d'un stratifié (2) dans lequel un corps piézoélectrique (21) et une électrode interne (22) sont stratifiés en alternance, d'une électrode externe (3) qui est disposée sur une face latérale du stratifié (2) et qui est électriquement connectée à l'électrode interne (22), et un fil conducteur (4) qui est électriquement connecté à l'électrode externe (3). En outre, une couche de réaction (5) de l'électrode externe (3) et du fil conducteur (4) est disposée à l'endroit où l'électrode externe (3) et le fil conducteur (4) se rejoignent. La couche de réaction (5) a une épaisseur qui correspond au fil conducteur (4) lorsqu'elle est observée dans une section transversale perpendiculaire à la direction axiale du fil conducteur (4), l'épaisseur de la section centrale de la largeur étant la plus grande. La contrainte provoquée par une différence de dilatation thermique entre la couche de réaction (5) de l'électrode externe (3) et du fil conducteur (4) et les éléments voisins est ainsi réduite, permettant de supprimer les fissures.
PCT/JP2017/041775 2016-12-26 2017-11-21 Élément piézoélectrique Ceased WO2018123354A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018558905A JP6923560B2 (ja) 2016-12-26 2017-11-21 圧電素子

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016251284 2016-12-26
JP2016-251284 2016-12-26

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WO2018123354A1 true WO2018123354A1 (fr) 2018-07-05

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JP (1) JP6923560B2 (fr)
WO (1) WO2018123354A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113161475A (zh) * 2021-03-30 2021-07-23 广东奥迪威传感科技股份有限公司 一种微小的阵列压电传感器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0383952U (fr) * 1989-09-29 1991-08-26
JPH08316394A (ja) * 1995-05-12 1996-11-29 Hitachi Ltd 半導体装置
WO2007097460A1 (fr) * 2006-02-27 2007-08-30 Kyocera Corporation Procede de production d'un element en ceramique, element en ceramique, element de detection de gaz, element de pile a combustible, element filtrant, element piezoelectrique forme de couches, injecteur et systeme d'injection de combustible
JP2012049426A (ja) * 2010-08-30 2012-03-08 Kyocera Corp 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2013211417A (ja) * 2012-03-30 2013-10-10 Kyocera Corp 積層型圧電素子および圧電アクチュエータ、噴射装置、燃料噴射システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012115230A1 (fr) * 2011-02-24 2012-08-30 京セラ株式会社 Élément piézoélectrique stratifié, appareil d'injection pourvu dudit élément et système d'injection de carburant pourvu dudit élément
JP2012179630A (ja) * 2011-03-01 2012-09-20 Nippon Steel Corp アルミニウム板またはアルミニウム合金板と鋼板との溶接継手及びアルミニウム板またはアルミニウム合金板と鋼板との溶接方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0383952U (fr) * 1989-09-29 1991-08-26
JPH08316394A (ja) * 1995-05-12 1996-11-29 Hitachi Ltd 半導体装置
WO2007097460A1 (fr) * 2006-02-27 2007-08-30 Kyocera Corporation Procede de production d'un element en ceramique, element en ceramique, element de detection de gaz, element de pile a combustible, element filtrant, element piezoelectrique forme de couches, injecteur et systeme d'injection de combustible
JP2012049426A (ja) * 2010-08-30 2012-03-08 Kyocera Corp 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2013211417A (ja) * 2012-03-30 2013-10-10 Kyocera Corp 積層型圧電素子および圧電アクチュエータ、噴射装置、燃料噴射システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113161475A (zh) * 2021-03-30 2021-07-23 广东奥迪威传感科技股份有限公司 一种微小的阵列压电传感器

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JP6923560B2 (ja) 2021-08-18

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