WO2018120743A1 - Metamaterial manufacturing method - Google Patents

Abstract

The present invention relates to a metamaterial manufacturing method, comprising the following steps: a. preparing a soft template which is provided with a pattern which is opposite to a micro-structure of a metamaterial; b. forming an octadecyltrichlorosilane (OTS) self-assembled monolayer, which is provided with a pattern which is the same as the micro-structure, on the soft template; c. preparing a composite substrate and carrying out processing which increases surface energy on the composite substrate; d. tightly attaching a side of the OTS self-assembled monolayer of the soft template which is provided with the OTS self-assembled monolayer and which is formed in step b to a processed surface of the composite substrate in step c, and maintaining for a certain period of time until the OTS self-assembled monolayer is transferred from the soft template to the composite substrate, then detaching the soft template to manufacture and obtain a patterned composite substrate; e. depositing gold nano-particles within a non-patterned region of the patterned composite substrate. The metamaterial manufacturing method is easy to implement, has high manufacturing efficiency, and the obtained micro-structures have precise dimensions and have excellent corresponding electromagnetic features.

Description

 Title of Invention: Method for manufacturing supermaterials

 Technical field

 [0001] The present invention relates to the field of metamaterial technology, and more particularly to a method of manufacturing a metamaterial.

 Background technique

 [0002] At present, metamaterial processing mainly relies on lithography and other flat etching processes (such as ion beam etching, electron beam etching, X-ray etching, etc.). Compared with these technologies, screen printing, inkjet printing, etc. are prepared by solution processing to prepare metamaterials, which are compatible with the roll-to-roll process, and are potential metamaterial manufacturers.

[0003] Metamaterials consist of a dielectric substrate and a microstructure. The key technology for the manufacture of metamaterials is the processing of microstructures. The defects of the existing manufacturing processes are as follows:

[0004] (1) Photolithography and flat etching processes have high processing precision, but are costly and complicated in process. In addition, lithography is difficult to process ultra-material microstructures on flexible substrates, thus limiting the use of supermaterials in specific areas such as curved surfaces and special surfaces.

[0005] (2) Screen printing and inkjet printing technology can realize large-area super material preparation, but also requires high-cost instruments (high-precision screen printing machine, high-precision inkjet printer).

 technical problem

 [0006] In summary, the existing super material manufacturing processes have disadvantages such as high processing cost, poor implementability, and low processing precision, and cannot meet the requirements of metamaterial technology.

 Problem solution

 Technical solution

 In view of the above, an object of the present invention is to provide a method for producing a metamaterial having high performance, high manufacturing efficiency, and accurate microstructural structure and excellent electromagnetic corresponding characteristics.

[0008] According to the present invention, there is provided a method of manufacturing a metamaterial comprising the steps of:

[0009] a, preparing a soft template having an opposite pattern to the microstructure of the metamaterial;

[0010] b forming an OTS self-assembled monolayer having the same microstructure pattern as the soft template on the soft template [0011] c, preparing a composite substrate, and performing a process for improving the surface energy of the composite substrate;

[0012] d, the OTS self-assembled single layer side of the soft template with the OTS self-assembled monolayer formed in step b is closely attached to the surface of the composite substrate after the process in step c, and maintains a certain daytime And the OT s self-assembled monolayer is transferred from the soft template to the composite substrate, and then the soft template is removed to prepare a patterned composite substrate;

 [0013] e, depositing gold nanoparticles in the non-patterned region of the patterned composite substrate to form the microstructure pattern;

 [0014] the surface of the substrate corresponding to the soft template after the surface energy treatment process is improved has higher surface energy

Thus, in step d, an OTS self-assembled monolayer can be transferred from the soft template to the composite substrate.

[0015] Preferably, the soft template is a PDMS template.

[0016] Preferably, the step b further includes the following steps:

[0017] preparing an OTS-n-hexane solution;

 [0018] A formulated OTS-n-hexane solution is applied to the soft template and the solvent component is completely volatilized to form an OTS self-assembled monolayer on the soft template.

[0019] Preferably, in the preparation of OTS-n-hexane solution, the volume ratio of OTS to n-hexane is 0.5: 1000-2:100

0.

 [0020] Preferably, the step c further includes the following steps:

 [0021] In preparing the composite substrate, the epoxy resin and the glass fiber prepreg are sequentially stacked in multiple layers, and the epoxy resin and the glass fiber prepreg of the adjacent layer are laid at a 90-degree angle;

[0022] The laid multilayer epoxy resin and glass fiber prepreg are cured.

 [0023] Preferably, the laid multilayer epoxy resin and the glass fiber prepreg are cured, at 100 ° C -14

Curing was carried out continuously for 3-7 hours at a temperature of 0 °C.

[0024] Preferably, in the step c, after the surface treatment of the composite substrate is performed, the surface to be patterned of the composite substrate is processed by a plasma treatment technique.

[0025] Preferably, in the step d,

 [0026] After attaching the OTS self-assembled single layer side of the soft template with the OTS self-assembled single layer to the surface of the composite substrate after the process, it is necessary to maintain the 3-5 minute attachment time. Then remove the soft template.

[0027] Preferably, the step e further includes the following steps: [0028] Weigh a certain amount of gold nanoparticles, add it to acetone, make a gold nanoparticle-acetone solution, and perform ultrasonic dispersion of a certain length;

[0029] The obtained gold nano-dispersion is applied to the surface of the composite substrate, and the solvent component is completely volatilized, thereby depositing gold nanoparticles in the non-patterned region of the patterned composite substrate.

[0030] Preferably, the gold nanoparticle-acetone solution has a mass concentration of 0.05-3 g/ml.

[0031] Preferably, the prepared gold nano-dispersion is applied to the surface of the composite substrate by spin coating or dripping.

 Advantageous effects of the invention

 Beneficial effect

 [0032] The method for manufacturing a metamaterial in the present application, the process for preparing a metamaterial by making a large surface energy difference between a soft template and a composite substrate, and between the OTS assembly layer and the composite substrate during the process It has strong implementability, high manufacturing efficiency, and the obtained microstructure structure is accurate in size and has excellent electromagnetic corresponding characteristics.

 Brief description of the drawing

 DRAWINGS

 The above and other objects, features and advantages of the present invention will become apparent from

 1 is a schematic view showing the structure of a pre-coupling of a metamaterial and a soft template for preparing a metamaterial, respectively, according to an embodiment of the present invention.

 2 shows a schematic structural view of a metamaterial according to an embodiment of the present invention.

 3 shows a schematic structural diagram of a soft template according to an embodiment of the present invention.

 4 shows a flow chart of a method of manufacturing a metamaterial according to an embodiment of the present invention.

 [0038] In the figure: metamaterial 1, soft template 2, substrate 11, microstructure layer 12, mouth resonance ring 131, groove 21.

Embodiments of the invention

[0039] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In the various figures, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, the various parts of the drawing are not Draw proportionally.

 [0040] As shown in FIGS. 1-3, the metamaterial 1 includes a substrate 11 and a microstructure layer 12 disposed on the substrate 11. The microstructure layer 12 includes a metal microstructure pattern. The microstructure pattern includes a plurality of pattern units, and the plurality of pattern units are arranged in accordance with a predetermined rule to form a structure having a specific electromagnetic response characteristic. In this embodiment, the plurality of pattern elements are respectively the mouth ring resonance ring 131.

 4 shows a flow chart of a method of manufacturing a metamaterial according to an embodiment of the present invention. As shown in Fig. 4, the preparation process of the metamaterial 1 is as shown in steps S01-S05. Referring to the drawings 1-3, the following detailed description will be given in detail with reference to Embodiment 1 to Embodiment 3.

 Embodiment 1 :

 [0043] In step S01, referring to FIG. 1, a soft template 2 having a pattern opposite to the microstructure of the metamaterial 1 is prepared.

[0044] Specifically, the soft template 2 is a PDMS template, which is made of PDMS, that is, a polydimethylsiloxane material, has good flexibility, and has a low surface energy, such that its surface pair is, for example. Materials such as octadecyltrichlorosilane (OTS) have less adhesion. The soft template 2 is prepared by using a photolithography method to form a pattern opposite to the microstructure on the surface of the hard substrate. The pattern opposite to the microstructure in this embodiment means that patterned light is disposed on the surface of the hard substrate. The engraving is performed, wherein a portion corresponding to the microstructure is left blank, and the other portion is provided as a photoresist. As shown in Fig. 3, the pattern formed on the surface of the rigid substrate is a plurality of groove-shaped recesses 21 defined by the photoresist, which are matched to the shape of the mouthpiece resonance ring 131. After obtaining the hard substrate with the patterned photoresist, it was used as the original template for imprint transfer. The organic PDMS material is then applied to the surface of the rigid substrate with the patterned photoresist and dried under vacuum.

 [0045] In step S02, an OTS self-assembled monolayer having the same microstructure pattern as the soft template is formed on the soft template 2.

 [0046] Specifically, the step further includes the following steps:

 [0047] S021), according to the ratio of OTS to n-hexane volume ratio of 0.5: 1000 to prepare OTS-n-hexane solution

[0221] S022), the formulated OTS-n-hexane solution is applied, for example, to the pattern of the soft template 2, which in this embodiment is the groove 21 of the weir-removing ring shown in FIG. Other parts outside. The solvent component is completely volatilized to form an OTS self-assembled monolayer on the soft template 2.

[0049] In step S03, the composite substrate 11 is prepared, and the surface of the composite substrate 11 is improved. deal with.

 [0050] Specifically, the method further includes the following steps:

 [0051] S031), in preparing the composite substrate 11吋, alternately stacking epoxy resin and glass fiber prepreg, and forming an angle of 90 degrees between the epoxy resin and the glass fiber prepreg of the adjacent layer Laying, that is, the laying of the epoxy resin and the glass fiber prepreg of the adjacent layers in a crisscross manner; placing the laid multilayer epoxy resin and the glass fiber prepreg in a vacuum environment, such as a vacuum bag, And curing at a temperature of 100 ° C for 3 hours;

 [0052] S032), after the surface treatment of the composite substrate 11 is performed, the surface to be patterned of the composite substrate 11 is processed by a plasma treatment technique to improve the surface of the composite substrate 11. Can, thereby increasing the adhesion of its surface, such as adhesion to OTS. After the treatment, the surface energy of the composite substrate 11 is greatly improved, and the surface of the soft template 2 is more distinguished.

 [0053] In step S04, the OTS self-assembled single layer side of the soft template 2 having the OTS self-assembled single layer formed in step S02 is closely attached to the surface of the composite substrate 11 after the process in step S03, And maintaining for 3 minutes until the OTS self-assembled monolayer is transferred from the soft template 2 onto the composite substrate 11, and then the soft template 2 is removed to prepare a patterned composite substrate 11.

 [0054] In this step, since the soft template 2 and the composite substrate 11 have a large difference in surface energy, the OT S self-assembled monolayer is transferred from the soft template 2 to the composite substrate 11, and then compared. It is easy to separate from the soft template 2 so that blocking does not occur.

 [0055] In step S05, gold nanoparticles are deposited in the non-pattern area of the patterned composite substrate 11 to form the microstructure pattern.

 [0056] Specifically, the step further includes the following steps:

 [0511] S051), weigh a certain amount of gold nanoparticles, added to acetone, to make a gold nanoparticle-acetone solution with a concentration of 0.05g / ml, and a certain length of ultrasonic dispersion;

[0058] S052), the prepared gold nano-dispersion is applied to the surface of the composite substrate 11, and the solvent component is completely volatilized, thereby depositing gold nanoparticles on the surface of the composite substrate 11. The coating process may specifically be spin coating or dispensing.

[0059] In this step, due to the large difference in the surface energy of the self-assembled monolayer of the composite substrate 11 and the OTS, the gold particles spontaneously deposit in the patterned groove 21 with a patterning compound having a strong surface energy. Table of substrate 11 After the gold nanoparticles are deposited in the patterned grooves 21 of the patterned composite substrate 11, a microstructure layer 12 formed of a gold material as shown in FIG. 2 is formed in the deposition region. The pattern structure is precisely dimensioned, so that the metamaterial 1 has a superb material 1 having excellent electromagnetic corresponding characteristics. In this embodiment, the microstructure pattern is specifically a plurality of mouth-resonant resonant ring 131 patterns.

Example 2:

 [0061] In step S01, a soft template 2 having a pattern opposite to the microstructure of the metamaterial 1 is prepared.

 [0062] Specifically, the soft template 2 is a PDMS template, which is made of PDMS, that is, a polydimethylsiloxane material, has good flexibility, and has a low surface energy, such that its surface pair is, for example. Materials such as octadecyltrichlorosilane (OTS) have less adhesion. The soft template 2 is prepared by using a photolithography method to form a pattern opposite to the microstructure on the surface of the hard substrate. The pattern opposite to the microstructure in this embodiment means that patterned light is disposed on the surface of the hard substrate. Engraving, wherein a portion corresponding to the microstructure is left blank, and other portions are provided as a photoresist. In this embodiment, a pattern formed on the surface of the hard substrate is matched with the shape and size of the mouth ring resonance ring 131. A plurality of grooved annular grooves 21 defined by the photoresist. After obtaining the hard substrate with the patterned photoresist, it was used as the original template for imprint transfer. The organic PDMS material is then applied to the surface of the rigid substrate with the patterned photoresist and dried under vacuum.

 [0063] In step S02, an OTS self-assembled monolayer having the same microstructure pattern as the soft template is formed on the soft template 2.

[0064] Specifically, the step further includes the following steps:

 [0215] S021), according to the ratio of OTS and n-hexane volume fraction of 1: 1000 to prepare OTS-n-hexane solution

[0221] S022), applying the formulated OTS-n-hexane solution to, for example, dropping onto the soft template 2 pattern.

 In this embodiment, the portion other than the annular groove 21 shown in Fig. 3 and the solvent component are completely volatilized, thereby forming an OTS self-assembled monolayer on the soft template 2.

 [0067]

 [0068] In step S03, the composite substrate 11 is prepared, and the composite substrate 11 is subjected to a process for improving surface energy.

[0069] Specifically, the method further includes the following steps: [0070] S031), in preparing the composite substrate 11吋, alternately stacking epoxy resin and glass fiber prepreg, and forming an angle of 90 degrees between the epoxy resin and the glass fiber prepreg of the adjacent layer Laying, that is, the laying of the epoxy resin and the glass fiber prepreg of the adjacent layers in a crisscross manner; placing the laid multilayer epoxy resin and the glass fiber prepreg in a vacuum environment, such as a vacuum bag, And curing at 5 ° C for 5 hours;

 [0321] S032), after the surface treatment of the composite substrate 11 is performed, the surface to be patterned of the composite substrate 11 is processed by a plasma treatment technique to increase the surface of the composite substrate 11. Can, thereby increasing the adhesion of its surface, such as adhesion to OTS. After the treatment, the surface energy of the composite substrate 11 is greatly improved, and the surface of the soft template 2 is more distinguished.

 [0072] In step S04, the OTS self-assembled single layer side of the soft template 2 having the OTS self-assembled single layer formed in step S02 is closely attached to the surface of the composite substrate 11 after the process in step S03, And maintaining for 5 minutes until the OTS self-assembled monolayer is transferred from the soft template 2 onto the composite substrate 11, and then the soft template 2 is removed to prepare a patterned composite substrate 11.

 [0073] In this step, since the soft template 2 and the composite substrate 11 have a large difference in surface energy, the OT S self-assembled monolayer is transferred from the soft template 2 to the composite substrate 11, and then compared. It is easy to separate from the soft template 2 so that blocking does not occur.

 [0074] In step S05, gold nanoparticles are deposited in the non-pattern area of the patterned composite substrate 11 to form the microstructure pattern.

 [0075] Specifically, the step further includes the following steps:

 [0516] S051), weigh a certain amount of gold nanoparticles, add it to acetone, to make a gold nanoparticle-acetone solution with a concentration of 1.5g / ml, and perform ultrasonic dispersion of a certain length;

[0077] S052), the obtained gold nano-dispersion is applied to the surface of the composite substrate 11, and the solvent component is completely volatilized, thereby depositing gold nanoparticles on the surface of the composite substrate 11. The coating process may specifically be spin coating or dispensing.

[0078] In this step, due to the large difference in surface energy between the composite substrate 11 and the OTS self-assembled monolayer, the gold particles spontaneously deposit in the patterned groove 21 and have a strong surface energy patterning. After the surface of the composite substrate 11, that is, the gold nanoparticles are deposited in the patterned recess 21 of the patterned composite substrate 11, a microstructure layer 12 formed of a gold material as shown in FIG. 2 is formed in the deposition region. The pattern structure is accurate in size. Thus, a metamaterial 1 having excellent electromagnetic corresponding characteristics is obtained. In this embodiment, the microstructure pattern is specifically a plurality of mouth-resonant resonant ring 131 patterns.

Example 3:

 [0080] In step S01, a soft template 2 having a pattern opposite to the microstructure of the metamaterial 1 is prepared.

 [0081] Specifically, the soft template 2 is a PDMS template, which is made of PDMS, that is, a polydimethylsiloxane material, has good flexibility, and has a low surface energy, such that its surface pair is, for example. Materials such as octadecyltrichlorosilane (OTS) have less adhesion. The soft template 2 is prepared by using a photolithography method to form a pattern opposite to the microstructure on the surface of the hard substrate. The pattern opposite to the microstructure in this embodiment means that patterned light is disposed on the surface of the hard substrate. Engraving, wherein the portion corresponding to the microstructure is left blank, and the other portions are provided as photoresist. As shown in FIG. 3, the pattern processed on the surface of the hard substrate matches the shape of the mouth resonant ring 131. A plurality of grooved annular grooves 21 defined by the photoresist. After obtaining the hard substrate with the patterned photoresist, it was used as the original template for imprint transfer. The organic PDMS material is then applied to the surface of the hard substrate with the patterned photoresist and dried under vacuum.

[0082] In step S02, an OTS self-assembled monolayer having the same microstructure pattern as the soft template is formed on the soft template. Specifically, the step further includes the following steps:

[0083] S021), according to the ratio of OTS and n-hexane volume fraction of 2: 1000 to prepare OTS-n-hexane solution

[0224] S022), applying the formulated OTS-n-hexane solution to, for example, dropping onto the pattern of the soft template 2. In this embodiment, it is the portion other than the groove-shaped recess 21 shown in Fig. 3. The solvent component is completely volatilized to form an OTS self-assembled monolayer on the soft template 2.

 [0085] In step S03, the composite substrate 11 is prepared, and the composite substrate 11 is subjected to a process of improving surface energy.

 [0086] Specifically, the method further includes the following steps:

[0087] S031), in preparing the composite substrate 11 交替, alternately stacking epoxy resin and glass fiber prepreg, and having an angle of 90 degrees between the epoxy resin and the glass fiber prepreg of the adjacent layer Laying, that is, the laying of the epoxy resin and the glass fiber prepreg of the adjacent layers in a crisscross manner; placing the laid multilayer epoxy resin and the glass fiber prepreg in a vacuum environment, such as a vacuum bag, And at a temperature of 140 ° C, 7 Curing treatment of small defects;

 [0088] S032), after the surface treatment of the composite substrate 11 is performed, the surface to be patterned of the composite substrate 11 is processed by a plasma treatment technique to increase the surface of the composite substrate 11. Can, thereby increasing the adhesion of its surface, such as adhesion to OTS. After the treatment, the surface energy of the composite substrate 11 is greatly improved, and the surface of the soft template 2 is more distinguished.

 [0089] In step S04, the OTS self-assembled single layer side of the soft template 2 having the OTS self-assembled single layer formed in step S02 is closely attached to the surface of the composite substrate 11 after the process in step S03, And maintaining for 7 minutes until the OTS self-assembled monolayer is transferred from the soft template 2 onto the composite substrate 11, and then the soft template 2 is removed to prepare a patterned composite substrate 11.

 [0090] In this step, since the soft template 2 and the composite substrate 11 have a large difference in surface energy, the OT S self-assembled monolayer is transferred from the soft template 2 to the composite substrate 11, and then compared. It is easy to separate from the soft template 2 so that blocking does not occur.

 [0091] In step S05, gold nanoparticles are deposited in the non-pattern area of the patterned composite substrate 11 to form the microstructure pattern.

 [0092] Specifically, the step further includes the following steps:

 [0093] S051), weigh a certain amount of gold nanoparticles, add it to acetone, to make a gold nanoparticle-acetone solution with a concentration of 2g / ml, and perform ultrasonic dispersion of a certain length;

[0094] S052), the prepared gold nano-dispersion is applied to the surface of the composite substrate 11, and the solvent component is completely volatilized, thereby depositing gold nanoparticles on the surface of the composite substrate 11. The coating process may specifically be spin coating or dispensing.

 [0095] In this step, due to the large difference in the surface energy of the self-assembled monolayer of the composite substrate 11 and the OTS, the gold particles spontaneously deposit in the patterned groove 21 and have a patterning compound with strong surface energy. After the surface of the substrate 11, that is, the gold nanoparticles are deposited in the patterned recess 21 of the patterned composite substrate 11, a microstructure layer 12 formed of a gold material as shown in FIG. 2 is formed in the deposition region. Thereby, a metamaterial 1 having excellent electromagnetic corresponding characteristics is obtained. In this embodiment, the microstructure pattern is specifically a plurality of mouth-resonant ring 131 patterns.

[0096] The method for manufacturing a metamaterial in the present application, by making a large surface energy difference between the soft template 2 and the composite substrate 11 and between the OTS assembly layer and the composite substrate 11 during the process, so that the metamaterial 1 The preparation process is strong in implementation, high in manufacturing efficiency, and the obtained microstructure structure is accurate in size and has excellent electromagnetic corresponding characteristics.

 [0097] It should be noted that, in this context, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these entities. There is any such actual relationship or order between operations. Furthermore, the terms "including", "comprising" or "comprising" or "comprising" are intended to encompass a non-exclusive inclusion, such that a process, method, article, or device that includes a plurality of elements includes not only those elements but also Other elements, or elements that are inherent to such a process, method, item, or device. In the absence of more limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or device that comprises the element.

[0098] It should be noted that the above-described embodiments are merely illustrative of the invention and are not intended to limit the embodiments. Other variations or modifications of the various forms may be made by those skilled in the art in light of the above description. There is no need and no way to exhaust all implementations. Obvious changes or variations resulting therefrom are still within the scope of the invention. .

Claims

Claim A method for manufacturing a metamaterial, comprising the steps of: a. preparing a soft template having a pattern opposite to the microstructure of the metamaterial; b. forming an OTS self-assembled monolayer having the same microstructure pattern as the soft template on the soft template; c. preparing a composite substrate, and performing surface treatment on the composite substrate; d. attaching the OTS self-assembled single layer side of the soft template having the OTS self-assembled single layer formed in step b to the step Passing on the surface of the composite substrate in c, and maintaining a certain period of time until the OTS self-assembled monolayer is transferred from the soft template to the composite substrate, and then removing the soft template to prepare a pattern Composite substrate; e. depositing gold nanoparticles in the non-patterned regions of the patterned composite substrate to form the microstructure pattern. The method of manufacturing a metamaterial according to claim 1, wherein the soft template is a P DMS template. The method of manufacturing a metamaterial according to claim 1, wherein the step b further comprises the following steps: Preparing an OTS-n-hexane solution; A formulated OTS-n-hexane solution is applied to the soft template and the solvent component is completely volatilized to form an OTS self-assembled monolayer on the soft template. The method for producing a metamaterial according to claim 3, wherein in the preparation of the OTS-n-hexane solution, the volume ratio of OTS to n-hexane is from 0.5:1000 to 2:1000. The method of manufacturing a metamaterial according to claim 1, wherein the step c further comprises the following steps: After preparing the composite substrate, the epoxy resin and the glass fiber prepreg are alternately stacked in multiple layers, and the epoxy resin and the glass fiber prepreg of the adjacent layer are laid at a 90-degree angle; The layer of epoxy resin and the glass fiber prepreg are cured. The method of manufacturing a metamaterial according to claim 5, wherein the laid multilayer epoxy resin and the glass fiber prepreg are cured, at a temperature of from 100 ° C to 140 ° C. , Continuous curing of 3-7 hours. [Claim 7] The method for manufacturing a metamaterial according to claim 1, wherein in the step c, the surface treatment is performed on the composite substrate, and the plasma treatment technique is used to The surface of the composite substrate to be patterned is processed. [Claim 8] The method for manufacturing a metamaterial according to claim 1, wherein in the step d, the OTS self-assembled single layer side of the soft template having the OTS self-assembled single layer is closely attached to the After the composite substrate was subjected to the process-treated surface, the enamel was held for 3-5 minutes, and the soft template was removed.  [Claim 9] The method of manufacturing a metamaterial according to claim 1, wherein the step e further comprises the following steps:  Weigh a certain amount of gold nanoparticles, add it to acetone, make a gold nanoparticle-acetone solution, and perform ultrasonic dispersion with a certain length;  Applying the prepared gold nano-dispersion to the surface of the composite substrate, and completely evaporating the solvent component, thereby depositing gold nanoparticles in the non-pattern area of the patterned composite substrate [Claim 10] The method for producing a metamaterial according to claim 9, wherein the gold nanoparticle-acetone solution has a mass concentration of 0.05 to 3 g/ml. [Claim 11] The method for producing a metamaterial according to claim 9, wherein the obtained gold nanoparticle dispersion is applied to the surface of the composite substrate by spin coating or dispensing.