WO2018116872A1 - 含窒素環状化合物及びその製造方法 - Google Patents
含窒素環状化合物及びその製造方法 Download PDFInfo
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- WO2018116872A1 WO2018116872A1 PCT/JP2017/044198 JP2017044198W WO2018116872A1 WO 2018116872 A1 WO2018116872 A1 WO 2018116872A1 JP 2017044198 W JP2017044198 W JP 2017044198W WO 2018116872 A1 WO2018116872 A1 WO 2018116872A1
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D487/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
- C07D487/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
- C07D487/04—Ortho-condensed systems
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/02—Polycondensates containing more than one epoxy group per molecule
Definitions
- the present invention relates to novel glycolurils having two glycidyl groups and two methoxymethyl groups in one molecule, and a method for producing the same.
- Glycolurils are heterocyclic compounds having four urea nitrogen atoms in the ring structure. Glycolurils having various substituents on the urea nitrogen atoms are produced and used as functional compounds. ing.
- 1,3,4,6-tetrakis (methoxymethyl) glycoluril having four methoxymethyl groups in one molecule is well known as a crosslinking agent for epoxy resins (see Patent Document 1).
- Patent Document 2 discloses a method of introducing four methoxymethyl groups into one glycoluril molecule having no substituent.
- Patent Document 3 discloses a glycidyl glycoluril in which at least one hydrogen atom among hydrogen atoms bonded to four nitrogen atoms of the glycoluril is substituted with a glycidyl group. However, among the four nitrogen atoms of glycolurils, hydrogen atoms bonded to two nitrogen atoms are replaced with glycidyl groups, and hydrogen atoms bonded to the remaining two nitrogen atoms are replaced with methoxymethyl groups. These compounds are not only described in Patent Documents 1, 2, and 3, but also are not suggested.
- JP 2013-33276 A Japanese Patent No. 3154819 Japanese Patent Laying-Open No. 2015-54856
- a chain polymer is polymerized using a compound having two glycidyl groups in one molecule and a compound having two hydroxy groups or carboxy groups in one molecule as raw material monomers.
- a polymer solution in which a polymerized polymer is dissolved in a suitable solvent is applied onto a substrate, and then baked at a predetermined temperature to form a film on the substrate.
- the cross-linking agent is added to the polymer solution because the cross-linking between the polymers is weak and the film is insufficiently cured.
- a polymer having a crosslinkable group such as a methoxymethyl group introduced in the molecule, a desired cured film can be obtained without using a crosslinking agent.
- the present invention has been made based on the above background, and an object thereof is to provide novel glycolurils having two glycidyl groups and two methoxymethyl groups in one molecule.
- the present invention is a nitrogen-containing cyclic compound represented by the following formula (1).
- any two of R 1 , R 2 , R 3 and R 4 represent a glycidyl group, and the remaining two represent a methoxymethyl group.
- the nitrogen-containing cyclic compound represented by the formula (1) is represented, for example, by the following formula (1A) or formula (1B).
- the present invention is a first step of obtaining a compound represented by the following formula (b) by reacting a compound represented by the following formula (a) with formaldehyde in a basic aqueous solution, represented by the above formula (b).
- the present invention is also represented by the above-mentioned formula (e), the first step of obtaining a compound represented by the following formula (e) by reacting a compound represented by the following formula (d) with formaldehyde in a basic aqueous solution.
- the glycoluril according to the present invention is a nitrogen-containing cyclic compound having two glycidyl groups and two methoxymethyl groups in one molecule, and the glycidyl group and the methoxymethyl group are bonded to different nitrogen atoms. . Since this compound has two methoxymethyl groups which are crosslinkable groups, it can be used as a crosslinking agent.
- the nitrogen-containing cyclic compound of the present invention further has two glycidyl groups
- a chain polymer can be polymerized using the compound and a compound having two hydroxy groups or carboxy groups in one molecule as raw material monomers. it can. Since the polymerized polymer has a methoxymethyl group derived from the nitrogen-containing cyclic compound, a desired cured film having solvent resistance can be obtained without using a crosslinking agent in addition to the polymer.
- the glycolurils of the present invention are nitrogen-containing cyclic compounds represented by the following formula (1).
- R 1 and R 4 each represent a glycidyl group
- R 2 and R 3 each represent a methoxymethyl group
- R 2 and R 3 each represent a glycidyl group
- R 1 and R 4 When each represents a methoxymethyl group, it is a nitrogen-containing cyclic compound represented by the following formula (1A).
- R 1 and R 2 each represent a glycidyl group
- R 3 and R 4 each represent a methoxymethyl group
- R 3 and R 4 each represent a glycidyl group
- R 1 and R 4 When 2 represents a methoxymethyl group, it is a nitrogen-containing cyclic compound represented by the following formula (1B).
- any two of R 1 , R 2 , R 3 and R 4 represent a glycidyl group, and the remaining two represent a methoxymethyl group.
- the nitrogen-containing cyclic compound represented by the formula (1A) is obtained by reacting a compound represented by the following formula (a) with formaldehyde in a basic aqueous solution to obtain a compound represented by the following formula (b).
- the nitrogen-containing cyclic compound represented by the formula (1B) is obtained by reacting a compound represented by the following formula (d) with formaldehyde in a basic aqueous solution to obtain a compound represented by the following formula (e).
- the compound represented by the above formula (a) can be synthesized, for example, based on Reference Example 3 (synthesis of 1,4-diallylglycoluril) described in JP-A-2016-138051. If the compound represented by the above formula (a) is finally obtained, it may be synthesized by a method different from that in Reference Example 3.
- the compound represented by the above formula (d) is described in, for example, Reference Example 1 (synthesis of 1,3-diallylglycoluril) described in Patent Document 3 or JP-A-2016-138051. Can be synthesized based on Reference Example 2 (synthesis of 1,3-diallylglycoluril). If the compound represented by the above formula (d) is finally obtained, the compound may be synthesized by a method different from Reference Example 1 and Reference Example 2.
- examples of the basic aqueous solution include a sodium hydroxide aqueous solution, a potassium hydroxide aqueous solution, and a sodium hydrogen carbonate aqueous solution.
- examples of the acid in the acidic solution of methanol include nitric acid, sulfuric acid, formic acid, and hydrochloric acid.
- examples of the organic solvent include halogenated hydrocarbons such as chloroform, dichloromethane, carbon tetrachloride and 1,2-dichloroethane, alcohols such as methanol, ethanol and isopropyl alcohol, and aliphatic hydrocarbons such as hexane and heptane.
- Amides such as N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, N-methylpyrrolidinone, and sulfoxides such as dimethyl sulfoxide.
- the oxidizing agent include metachloroperbenzoic acid, hydrogen peroxide, oxone [registered trademark] (potassium peroxymonosulfate), and peracetic acid.
- It has a repeating unit structure represented by the following formula (2) by polymerizing a nitrogen-containing cyclic compound represented by the formula (1A) and a compound having two carboxy groups or hydroxy groups in one molecule. A polymer is obtained. Instead of the nitrogen-containing cyclic compound represented by the formula (1A), the nitrogen-containing cyclic compound represented by the formula (1B) and a compound having two carboxy groups or hydroxy groups in one molecule are polymerized. Gives a polymer having a repeating unit structure represented by the following formula (3). Instead of the compound having two carboxy groups or hydroxy groups in one molecule, a compound having at least one carboxy group and hydroxy group in one molecule may be used. (In the formula, Q represents a divalent organic group having 1 to 16 carbon atoms which may have at least one hetero atom, and m and n each independently represents 0 or 1.)
- HPLC high performance liquid chromatography
- the weight average molecular weight shown in the following synthesis examples in this specification is a measurement result by gel permeation chromatography (hereinafter abbreviated as GPC in this specification).
- GPC gel permeation chromatography
- HPC-8320GPC a GPC device manufactured by Tosoh Corporation was used, and the measurement conditions and the like were as follows.
- Solvent tetrahydrofuran (THF)
- Flow rate 0.5 mL / min
- Standard sample Polystyrene (manufactured by Showa Denko KK)
- the ⁇ value in the 1 H-NMR spectrum (DMSO-d6) of the obtained 1,4-diallylglycoluril was as follows. 7.63 (s, 2H), 5.73 (m, 2H), 5.19 (dd, 4H), 5.18 (s, 2H), 3.90 (dd, 2H), 3.49 (dd , 2H)
- the ⁇ value in the 1 H-NMR spectrum (DMSO-d6) of the obtained 1,4-diallyl-3,6-dimethylolglycoluril was as follows. 5.93 (t, 2H), 5.76 (m, 2H), 5.37 (s, 2H), 5.17 (dd, 4H), 4.63 (m, 4H), 4.02 (dd , 2H), 3.86 (dd, 2H)
- the ⁇ value in the 1 H-NMR spectrum (DMSO-d6) of the obtained 1,4-diallyl-3,6-di (methoxymethyl) glycoluril was as follows. 5.74 (m, 2H), 5.35 (s, 2H), 5.19 (m, 4H), 4.61 (dd, 4H), 4.09 (dd, 2H), 3.76 (dd , 2H), 3.17 (s, 6H)
- Propylene glycol monomethyl ether (4.0 kg) was added to the cation exchange resin (2.0 kg), and the mixture was stirred for 4 hours and then filtered. Propylene glycol monomethyl ether (2.0 kg) was added to the cation exchange resin and the mixture was stirred for 8 hours. I had. Further, propylene glycol monomethyl ether (2.0 kg) was added to the cation exchange resin, and the mixture was stirred for 4 hours and stored. The cation exchange resin stored by adding this propylene glycol monomethyl ether was filtered immediately before use in the following synthesis example.
- Example 1 To 1.838 g of a solution containing 0.364 g of the reaction product obtained in Synthesis Example 5, 8.158 g of propylene glycol monomethyl ether, 0.013 g of pyridinium paratoluenesulfonate, and a surfactant (DIC Corporation, product) (Name: R-40-LM) was added to give a solution. The solution was filtered using a polyethylene microfilter having a pore diameter of 0.45 ⁇ m to prepare a film-forming composition.
- Example 1 As is apparent from the results shown in Table 1, the film-forming composition of Example 1 containing the reaction product obtained in Synthesis Example 5 and containing no cross-linking agent is used to cure with solvent resistance. A membrane was obtained. On the other hand, when the film-forming composition of Comparative Example 1 containing the reaction product obtained in Synthesis Example 6 and containing no crosslinking agent was used, a cured film having solvent resistance could not be obtained. This result shows that the reaction product obtained in Synthesis Example 5 used in Example 1 has self-crosslinking properties.
- the nitrogen-containing cyclic compound produced by the present invention includes, for example, an antireflection film forming composition for lithography, a resist underlayer film forming composition, a resist upper layer film forming composition, a photocurable resin composition, and a thermosetting resin composition.
- the present invention can be applied to a planarizing film forming composition, an adhesive composition, and other compositions.
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- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Epoxy Resins (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Polyesters Or Polycarbonates (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
HPLCカラム:Inertsil[登録商標]ODS-3(ジーエルサイエンス(株))
カラム温度:40℃
溶媒:アセトニトリル/10mMギ酸アンモニウム水溶液=3/7(v/v)(0分~10分),3/7(v/v)から7/3(v/v)へ組成比を変更(10分~15分),7/3(v/v)(15分~25分),7/3(v/v)から3/7(v/v)へ組成比を変更(25分~30分),3/7(v/v)(30分~35分)
流量:1.0mL/分
GPCカラム:KF-403HQ,KF-402HQ,KF-401HQ(昭和電工(株)製)
カラム温度:40℃
溶媒:テトラヒドロフラン(THF)
流量:0.5mL/分
標準試料:ポリスチレン(昭和電工(株)製)
(1,4-ジアリルグリコールウリルの合成)
7.63(s,2H),5.73(m,2H),5.19(dd,4H),5.18(s,2H),3.90(dd,2H),3.49(dd,2H)
(1,4-ジアリル-3,6-ジメチロールグリコールウリルの合成)
5.93(t,2H),5.76(m,2H),5.37(s,2H),5.17(dd,4H),4.63(m,4H),4.02(dd,2H),3.86(dd,2H)
(1,4-ジアリル-3,6-ジ(メトキシメチル)グリコールウリルの合成)
5.74(m,2H),5.35(s,2H),5.19(m,4H),4.61(dd,4H),4.09(dd,2H),3.76(dd,2H),3.17(s,6H)
(1,4-ジグリシジル-3,6-ジ(メトキシメチル)グリコールウリルの合成)
陰イオン交換樹脂(2.0kg)にプロピレングリコールモノメチルエーテル(2.0kg)を加え4時間撹拌後ろ過し、再度その陰イオン交換樹脂にプロピレングリコールモノメチルエーテル(2.0kg)を加え8時間撹拌後ろ過した。更に、前記陰イオン交換樹脂にプロピレングリコールモノメチルエーテル(2.0kg)を加え4時間撹拌後保管した。このプロピレングリコールモノメチルエーテルを加えて保管した陰イオン交換樹脂を、下記合成例で使用する直前にろ過した。
前記合成例4で得られた1,4-ジグリシジル-3,6-ジ(メトキシメチル)グリコールウリル2.01g、3,3’-ジチオジプロピオン酸(堺化学工業(株)、商品名:DTDPA)1.29g、及び触媒として第4級ホスホニウム塩であるトリフェニルモノエチルホスホニウムブロミド0.11gを、プロピレングリコールモノメチルエーテル13.60gに溶解させた後、105℃に加温し、窒素雰囲気下で24.5時間撹拌した。得られた反応生成物に、前記前処理を経た陰イオン交換樹脂(製品名:ダウエックス[登録商標]MONOSPHERE[登録商標]550A、ムロマチテクノス(株))2.86gと前記前処理を経た陽イオン交換樹脂(製品名:アンバーリスト[登録商標]15JWET、オルガノ(株))2.86gを加え、25℃乃至30℃で4時間撹拌後ろ過した。イオン交換処理後のワニス溶液のGPC分析を行ったところ、標準ポリスチレン換算にて重量平均分子量は6630であった。この反応生成物は、下記式(2A)で表される繰り返し単位構造を有する。
モノアリルジグリシジルイソシアヌル酸(四国化成工業(株)、商品名:MADGIC)2.0g、3,3’-ジチオジプロピオン酸(堺化学工業(株)、商品名:DTDPA)1.56g、及び触媒として第4級ホスホニウム塩であるトリフェニルモノエチルホスホニウムブロミド0.13gを、プロピレングリコールモノメチルエーテル14.82gに溶解させた後、105℃に加温し、窒素雰囲気下で24.5時間撹拌した。得られた反応生成物に、前記合成例5で用いた陰イオン交換樹脂3.22gと前記合成例5で用いた陽イオン交換樹脂3.22gを加え、25℃乃至30℃で4時間撹拌後ろ過した。イオン交換処理後のワニス溶液のGPC分析を行ったところ、標準ポリスチレン換算にて重量平均分子量は6165であった。この反応生成物は、下記式(4)で表される繰り返し単位構造を有する。
前記合成例5で得られた反応生成物0.364gを含む溶液1.838gに、プロピレングリコールモノメチルエーテル8.158g、パラトルエンスルホン酸ピリジニウム0.013g、及び界面活性剤(DIC(株)、商品名:R-40-LM)0.004gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
前記合成例6で得られた反応生成物0.364gを含む溶液1.898gに、プロピレングリコールモノメチルエーテル8.087g、パラトルエンスルホン酸ピリジニウム0.013g、及び界面活性剤(DIC(株)、商品名:R-40-LM)0.004gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
前記合成例6で得られた反応生成物0.283gを含む溶液1.475gに、プロピレングリコールモノメチルエーテル8.424g、パラトルエンスルホン酸ピリジニウム0.010g、架橋剤としてテトラメトキシメチルグリコールウリル(日本サイテックインダストリーズ(株)、商品名:POWDERLINK[登録商標]1174)0.085g、及び界面活性剤(DIC(株)、商品名:R-40-LM)0.003gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
本明細書に記載の実施例1並びに比較例1及び比較例2で調製された膜形成用組成物を、それぞれスピンコーターによりシリコンウエハー上に塗布した。このシリコンウエハーをホットプレート上に配置し、215℃で1分間ベークし、該シリコンウエハー上に薄膜を成膜した(膜厚約100nm)。そして、形成されたこれらの薄膜を溶剤(プロピレングリコールモノメチルエーテル/プロピレングリコールモノメチルエーテルアセタート=7/3)に1分間浸漬させた(ストリッピング)後、スピナーにより前記溶剤を除去した。前記薄膜を乾燥させるため、ホットプレート上、100℃で30秒間ベークした後、該薄膜の膜厚を測定し、下記表1に示す結果を得た。
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| Application Number | Priority Date | Filing Date | Title |
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| US16/473,172 US10683301B2 (en) | 2016-12-22 | 2017-12-08 | Nitrogen-containing cyclic compounds and methods for producing the same |
| JP2018557674A JP6875660B2 (ja) | 2016-12-22 | 2017-12-08 | 含窒素環状化合物及びその製造方法 |
| CN201780073389.4A CN110023317B (zh) | 2016-12-22 | 2017-12-08 | 含氮环状化合物及其制造方法 |
| KR1020197012863A KR102191326B1 (ko) | 2016-12-22 | 2017-12-08 | 함질소환상 화합물 및 그 제조방법 |
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| JP (1) | JP6875660B2 (ja) |
| KR (1) | KR102191326B1 (ja) |
| CN (1) | CN110023317B (ja) |
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| WO (1) | WO2018116872A1 (ja) |
Citations (5)
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|---|---|---|---|---|
| JPH05262772A (ja) * | 1991-06-25 | 1993-10-12 | American Cyanamid Co | 単量体のテトラメトキシメチルグリコールウリルの製法 |
| JP2015054856A (ja) * | 2013-09-13 | 2015-03-23 | 四国化成工業株式会社 | グリシジルグリコールウリル類とその利用 |
| WO2015163352A1 (ja) * | 2014-04-23 | 2015-10-29 | 株式会社ダイセル | 硬化性樹脂組成物及びその硬化物 |
| JP2015194748A (ja) * | 2014-03-27 | 2015-11-05 | 四国化成工業株式会社 | レジスト下層膜形成組成物および半導体素子の作製方法 |
| JP2016138051A (ja) * | 2015-01-27 | 2016-08-04 | 四国化成工業株式会社 | 新規なグリコールウリル類とその利用 |
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| JP5218785B2 (ja) | 2008-01-30 | 2013-06-26 | 日産化学工業株式会社 | 硫黄原子を含有するレジスト下層膜形成用組成物及びレジストパターンの形成方法 |
| JP3154819U (ja) | 2009-06-22 | 2009-10-29 | 敏子 森部 | ゴミ保護カバー |
| CN108164534A (zh) * | 2013-11-25 | 2018-06-15 | 四国化成工业株式会社 | 具有官能团的甘脲类及其利用 |
| TW201638668A (zh) * | 2015-04-22 | 2016-11-01 | 奇美實業股份有限公司 | 感光性樹脂組成物、畫素層、保護膜、間隙體、薄膜電晶體、彩色濾光片及液晶顯示裝置 |
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- 2017-12-08 CN CN201780073389.4A patent/CN110023317B/zh active Active
- 2017-12-08 JP JP2018557674A patent/JP6875660B2/ja active Active
- 2017-12-08 KR KR1020197012863A patent/KR102191326B1/ko active Active
- 2017-12-08 US US16/473,172 patent/US10683301B2/en active Active
- 2017-12-08 WO PCT/JP2017/044198 patent/WO2018116872A1/ja not_active Ceased
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05262772A (ja) * | 1991-06-25 | 1993-10-12 | American Cyanamid Co | 単量体のテトラメトキシメチルグリコールウリルの製法 |
| JP2015054856A (ja) * | 2013-09-13 | 2015-03-23 | 四国化成工業株式会社 | グリシジルグリコールウリル類とその利用 |
| JP2015194748A (ja) * | 2014-03-27 | 2015-11-05 | 四国化成工業株式会社 | レジスト下層膜形成組成物および半導体素子の作製方法 |
| WO2015163352A1 (ja) * | 2014-04-23 | 2015-10-29 | 株式会社ダイセル | 硬化性樹脂組成物及びその硬化物 |
| JP2016138051A (ja) * | 2015-01-27 | 2016-08-04 | 四国化成工業株式会社 | 新規なグリコールウリル類とその利用 |
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| Publication number | Publication date |
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| TW201840565A (zh) | 2018-11-16 |
| JPWO2018116872A1 (ja) | 2019-10-24 |
| CN110023317B (zh) | 2022-05-10 |
| CN110023317A (zh) | 2019-07-16 |
| US10683301B2 (en) | 2020-06-16 |
| TWI727127B (zh) | 2021-05-11 |
| KR102191326B1 (ko) | 2020-12-15 |
| JP6875660B2 (ja) | 2021-05-26 |
| KR20190094147A (ko) | 2019-08-12 |
| US20200087308A1 (en) | 2020-03-19 |
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