WO2018106079A1 - Highly transmissive nanowire-grid polarizer, and method for producing same - Google Patents

Abstract

Disclosed are a transmissive nanowire-grid polarizer, and a method for producing same, the transmissive nanowire-grid polarizer reflecting one and transmitting the other from among the linearly polarized TM-polarized light, which is one type of the two types of characteristic linear polarizations, and linearly polarized TE-polarized light, which is the other type.

Description

Highly Permeable Nanowire Grid Polarizers and Manufacturing Method Thereof

The present invention relates to a high permeability wire grid polarizer and a method of manufacturing the high permeability wire grid polarizer, and specifically, a high permeability wire grid polarizer using impedance matching conditions and a high permeability wire grid polarizer using the principles of electromagnetic wave cancellation and constructive interference, and these It relates to a method for producing.

In recent years, research on polarizers has been conducted on wire grid polarizers (WGPs) that operate at long wavelengths, and on the usable wire grid polarizers for large angles of incidence.

In order to improve the performance of polarizers by focusing on the arrangement and size of wire gratings, studies on dielectric properties of substrate materials to improve transmission performance with grating structure or dielectric properties of dielectrics forming polarizers with gratings There is a problem in that the performance of the polarizer is limited inadequate.

US Patent 2015-0077851 discloses a multilayer absorbent wire grid polarizer.

The present invention relates to a highly transparent wire grid polarizer using impedance matching conditions and a highly transparent wire grid polarizer using the principles of electromagnetic wave canceling and constructive interference and a method of manufacturing the same.

However, the problem to be solved by the present invention is not limited to the above-mentioned problem, another task that is not mentioned will be clearly understood by those skilled in the art from the following description.

A first aspect of the present disclosure includes a first layer and a second layer comprising a first dielectric and spaced apart from each other; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. Wherein the dielectric constant of the second dielectric is less than the dielectric constant of the first dielectric.

A second aspect of the present disclosure includes a first layer comprising a first 'dielectric; A second layer comprising a third 'dielectric; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. And a wire grid polarizer.

A third aspect of the present application is a method of manufacturing a wire grid polarizer according to claim 1, wherein the polarizer comprises: a first layer and a second layer comprising a first dielectric and spaced apart from each other; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. The dielectric constant of the second dielectric is smaller than that of the first dielectric, and the manufacturing method of the polarizer includes the steps of: (1) calculating a TM direction effective volume ratio and a TE direction effective volume ratio according to the geometric characteristics of the polarizing layer; ; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first transmission coefficient calculated using the TM direction impedance; And (7) calculating a second transmission coefficient calculated using the TE direction impedance, and repeating steps (1) to (7), wherein the first transmission coefficient is close to 1, and A second transmission coefficient provides a method of manufacturing the wire grid polarizer according to claim 1, wherein the wire grid polarizer is manufactured by an impedance matching method by adjusting the geometric characteristics of the polarizing layer to be close to zero.

A fourth aspect of the present application is a method of manufacturing a wire grid polarizer according to claim 9, wherein the polarizer comprises: a first layer comprising a first ′ dielectric; A second layer comprising a third 'dielectric; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. The manufacturing method of the polarizer may include the steps of: (1) calculating the TM direction effective volume ratio and the TE direction effective volume ratio according to the geometrical characteristics of the polarizing layer; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first 'transmission coefficient calculated using the TM direction impedance; And (7) calculating a second 'transmission coefficient calculated using the TE direction impedance, and repeating steps (1) to (7), wherein the first' transmission coefficient is close to one. The method of manufacturing the wire grid polarizer according to claim 8, wherein the wire grid polarizer is manufactured by an impedance matching method by adjusting the geometric characteristics of the polarizing layer such that the second 'transmission coefficient is close to zero. to provide.

Provided herein is a highly transparent wire grid polarizer using impedance matching conditions and a highly transparent wire grid polarizer using the principles of electromagnetic canceling and constructive interference and methods of manufacturing the same.

According to the embodiments of the present invention, by applying a polarization technology using a metal lattice structure, it is possible to obtain improved transmission performance for one linear polarization, and to obtain excellent polarization performance irrespective of the incident angle.

According to embodiments of the present disclosure, an improved polarizer technology through impedance matching is provided by controlling a low-index dielectric and controlling an array period between dielectrics in relation to amplification of an effective dielectric constant and an independent control concept of permittivity and permeability.

According to embodiments herein, an improved polarizer is provided that uses a method of impedance matching of dielectric layers having different refractive indices through adjusting the arrangement period of the wires between the dielectrics.

According to embodiments of the present invention, an effective impedance control and impedance matching technique is provided through a three-dimensional periodic arrangement, which can improve permeability without an antireflective coating layer.

According to the embodiments of the present invention, an improved polarizer technique using impedance control of dielectric layers with different refractive indices by adjusting the arrangement period between dielectrics by applying the concept of amplification of effective permittivity of material and independent control of permittivity and permeability This is provided.

According to the embodiments of the present invention, the improvement in transmission is achieved regardless of whether the effective impedance of the intermediate layer (nanowire structure) is larger or smaller than the impedance of the upper and lower layers, regardless of whether the upper and lower impedances are larger or smaller than the impedance of the dielectric of the intermediate layer. As a possible technique, there is provided a highly transparent wire grid polarizer capable of improving transmission in accordance with the principles of cancellation and constructive interference of electromagnetic waves.

According to embodiments herein, the highly transmissive wire grid polarizer can be used in a variety of optical devices such as displays, microscopes, projectors and projectors.

1 is a structural diagram of a wire grid polarizer showing good polarization performance in a wide wavelength region including a visible light region in the prior art.

FIG. 2 is a graph showing transmittance and attenuation ratio of TM polarized light and TE polarized light using the polarizer of FIG. 1 according to one embodiment of the present application.

3 is a schematic diagram of a wire grid polarizer in one embodiment of the present application.

4 is a schematic diagram of a wire grid polarizer in one embodiment of the present application.

5 is a schematic diagram showing a single grating (unit cell) of a wire grid polarizer in one embodiment of the present application.

FIG. 6 is a schematic diagram showing TM polarization and TE polarization of a wire grid polarizer in one embodiment of the present application. FIG.

FIG. 7 illustrates an exemplary diagram for describing a TM polarization transmission performance according to an incident angle of a wire grid polarizer in one embodiment of the present application.

FIG. 8 illustrates an exemplary diagram for describing a TM polarization transmission performance according to an incident angle of a wire grid polarizer in an embodiment of the present disclosure.

9 is a schematic diagram of a wire grid polarizer in one embodiment of the present application.

FIG. 10 illustrates an exemplary diagram for describing a TM polarization transmission performance according to an incident angle of a wire grid polarizer in one embodiment of the present application.

FIG. 11 illustrates an exemplary diagram for describing a TM polarization transmission performance according to an incident angle of a wire grid polarizer in an embodiment of the present disclosure.

FIG. 12 shows a graph for explaining transmission characteristics independent of the incident angle of the wire grid polarizer in one embodiment of the present application.

FIG. 13 shows a graph for explaining transmission characteristics independent of an incident angle of a wire grid polarizer in one embodiment of the present application.

FIG. 14 shows an exemplary view for explaining an optical characteristic of a wire grid polarizer in one embodiment of the present application.

FIG. 15 shows an exemplary view for explaining the optical characteristics of the wire grid polarizer in one embodiment of the present application.

FIG. 16 shows an exemplary view for explaining the optical characteristics of the wire grid polarizer in one embodiment of the present application.

FIG. 17 shows a graph for comparing and explaining optical characteristics of a wire grid polarizer in one embodiment of the present application.

18 illustrates a graph for comparing and explaining optical characteristics of a wire grid polarizer in one embodiment of the present application.

19 illustrates a graph for comparing and explaining optical characteristics of a wire grid polarizer in one embodiment of the present application.

FIG. 20 shows a graph for comparing and explaining optical characteristics of a wire grid polarizer in one embodiment of the present application.

21 is a process flow diagram illustrating a method of manufacturing a wire grid polarizer in one embodiment of the present application.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present disclosure. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted for simplicity of explanation, and like reference numerals designate like parts throughout the specification.

Throughout this specification, when a part is said to be "connected" with another part, this includes not only the "directly connected" but also the "electrically connected" between other elements in between. do.

Throughout this specification, when a member is located “on” another member, this includes not only when one member is in contact with another member but also when another member exists between the two members.

Throughout this specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding the other components unless otherwise stated. As used throughout this specification, the terms “about”, “substantially”, and the like, are used at, or in close proximity to, numerical values when manufacturing and material tolerances inherent in the meanings indicated are provided, and an understanding of the present application may occur. Accurate or absolute figures are used to assist in the prevention of unfair use by unscrupulous infringers. As used throughout this specification, the term “step of” or “step of” does not mean “step for”.

Throughout this specification, the term "combination (s) thereof" included in the expression of a makushi form refers to one or more mixtures or combinations selected from the group consisting of components described in the expression of makushi form, It means to include one or more selected from the group consisting of the above components.

Throughout this specification, the description of “A and / or B” means “A or B, or A and B”.

Throughout this specification, "skin depth" refers to the depth indicating how far electromagnetic waves can penetrate the surface of the medium. In the medium, depending on the skin effect, the current density tends to be close to the surface of the medium and decreases as it penetrates into the conductor. The current flows mainly at the "surface" of the conductor, which is between the outer surface and the level called the skin depth, so that the penetration depth is more specifically 1 / e (such as current density or electric field at the surface). 37%).

Throughout this specification, "index of refraction" refers to the rate of velocity of waves traveling in two media as light travels from one media to another. The refractive index varies with wavelength, and at the interface of the media with different refractive indices, the light bends according to Snell's law and some reflects according to the angle of incidence. The index of refraction can be expressed as the square root of the product of relative permittivity and relative permeability, as the resolution increases because the refractive index value increases, the ability of the optical device to distinguish two objects from each other. Increases.

Impedance is an inherent amount of electromagnetic waves propagating in the medium, and can be expressed as the square root of the ratio of absolute permeability and absolute permittivity, but throughout this specification, "impedance" is defined as the The square root of the ratio of relative permeability and relative permittivity, which is the impedance of the medium when the vacuum's impedance is 1, not the ratio:

(n=굴절률, ε=상대 유전율, μ=상대 투자율)

(n = refractive index, ε = relative permittivity, μ = relative permeability)

(n=굴절률, ε=상대 유전율, μ=상대 투자율)

(n = refractive index, ε = relative permittivity, μ = relative permeability)

Throughout this specification, the direction of intrinsic polarization of the wire grid polarizer according to one embodiment of the present application may be divided into "polarization direction (TE polarization)" parallel to the wire and "polarization direction (TM polarization)" perpendicular to the wire. have.

Hereinafter, with reference to the accompanying drawings will be described embodiments and embodiments of the present application; However, the present disclosure may not be limited to these embodiments, examples, and drawings.

A first aspect of the present disclosure includes a first layer and a second layer comprising a first dielectric and spaced apart from each other; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. Wherein the dielectric constant of the second dielectric is less than the dielectric constant of the first dielectric.

In one embodiment of the present application, the wire grid polarizer is a polarization technology that reflects one of two inherent linear polarizations, a linear polarization TM polarization wave and the other linear polarization TE polarization wave, and transmits the other It is about.

In one embodiment of the present application, the wire grid polarizer relates to a polarization technology using a nanowire structure, it is possible to obtain an improved transmission performance for one linear polarization of the two inherent linear polarization, affecting the incident angle It can be reduced to provide a polarizer with good performance for various angles of incidence, especially for wide angles of incidence.

Conventional polarizer techniques tend to have a 1: 1 ratio of the periodic arrangement between the wire and the second dielectric. In contrast, the wire grid polarizer according to an embodiment of the present application uses the low refractive index second dielectric by adjusting the period of arrangement between the second dielectrics in relation to the amplification of the effective dielectric constant and the independent control concept of permittivity and permeability. It may be to provide an improved polarizer technique using a matching method.

In addition, while conventional polarizer technologies improve the electromagnetic wave transmission performance of a specific polarization (TM wave) through an antireflection coating, the wire grid polarizer according to an embodiment of the present application, an antireflection coating layer by using an impedance matching condition Permeation performance can be improved without.

1 is a structural diagram of a wire lattice polarizer showing good polarization performance in a wide wavelength region including a visible light region in the prior art.

The period is p, the height of the photoresist is h, the width of the photoresist is a, the thickness of the metal is t, d = h-t, and the duty cycle f = a / p of the photoresist.

FIG. 2 is a graph showing transmittance and attenuation ratio of TM polarized light and TE polarized light using the polarizer of FIG. 1.

P = 100 nm, h = 94 nm, t = 60 nm and f = 0.36 were used using the polarizer of FIG. Based on the attenuation ratio, it shows improved polarization performance in the wavelength range from 600 nm to 900 nm.

As a prior art, wire grid polarizers have been devised that operate at longer wavelengths as well as in the visible region, and are usable at large angles of incidence. However, the wire grid polarizer in the prior art focuses on adjusting the arrangement and size of the wire grid in order to improve the performance of the polarizer, as shown in FIG. 1. However, in order to improve the transmission performance of the polarizer, studies on the dielectric properties of the substrate material and the dielectric material constituting the polarizer together with the wire grid have been insufficient.

Thus, in the first aspect of the present application, the dielectric properties of the dielectric of the wire grid polarizer and the arrangement of the wire gratings are simultaneously considered. When the electromagnetic wave is incident on the incident structure, the transmission and reflection of the electromagnetic wave is affected by the effective impedance of the incident structure, so that the effective impedance can be controlled according to the structural arrangement of the incident structure and the selection of the constituent material. It is possible to control the characteristics of the transmission and reflection.

In one embodiment of the present application, the wire grid polarizer polarizes light of a wide wavelength range, and may exhibit high transparency, but may not be limited thereto.

In one embodiment of the present application, the principle of the wire grid polarizer is to amplify the effective dielectric constant of the material, and to control the dielectric constant and permeability independently.

In one embodiment of the present application, the wire grid polarizer forms a structure of a polarizing layer comprising a wire and a second dielectric, and a first layer and a second layer including a first dielectric surrounding the polarizing layer. It may be, but is not limited thereto.

In one embodiment of the present application, in the polarization layer of the wire grid polarizer, a wire structure (unit cell of FIG. 5) including each wire and the second dielectric is arranged and sized between the wire and the second dielectric. By controlling the, it is possible to control the effective impedance, thereby satisfying the impedance matching conditions with the first layer and the second layer, and consequently to improve the transmittance. The transmittance is a description of one polarization of TM polarization and TE polarization, which are two intrinsic polarizations of electromagnetic waves, and blocks the other polarization.

In one embodiment of the present application, the first dielectric of the first layer and the second layer may have the same impedance to each other, and may have a smaller value than the impedance of the second dielectric of the polarizing layer.

In one embodiment of the present application, the effective impedance of the first layer and the second layer and the effective impedance of the polarizing layer may be the same to satisfy the impedance matching conditions.

4 shows a schematic diagram of a wire grid polarizer according to an embodiment of the present application, wherein electromagnetic waves traveling in a first layer (medium) having an effective impedance of η ₁ (effective impedance of a first dielectric) in the wire grid polarizer When the incident light enters the polarizing layer (medium) whose effective impedance is η ₂ (the effective impedance of the second dielectric), the reflection coefficient r at the interface follows the following equation:

[Equation 1]

By controlling the effective impedance η ₂ , the reflection coefficient r can be controlled, and when applied to the wire grid polarizer, the transmission performance can be improved. For example, by considering the relationship between the periodic arrangement of a size smaller than the wavelength (subwavelength scale) and the relative magnitude between the dielectric constants of the first and second dielectrics, the transmission performance is improved by satisfying the impedance matching conditions. Wire grid polarizer can be produced. In this regard, the period has a subwavelength scale, the thickness of the wire (eg, the size of the cross section of the wire) and / or the width, the size of the unit cell being the skin of the material or material forming the wire. It can be determined at a level below the skin depth.

For example, the period in the visible light region having a wavelength length of about 400 nm to about 700 nm may be on the order of about 10 nm to about 100 nm on the subwavelength scale, in which case the thickness and / or width of the wire It may be determined to a level below the skin depth of the material or material selected for the wire formation. The skin thickness is then determined by the material or material selected for the wire formation, for example gold in the visible region (about 30 nm to about 35 nm), aluminum (about 12 nm to about 15 nm), or In the case of a material such as silver (about 25 nm to about 35 nm), the skin thickness may be about 10 nm to about 35 nm, but is not limited thereto.

Through the schematic diagram of the wire grid polarizer according to Figures 3 to 6, it can be described for the highly transparent nanowire grid polarizer according to an embodiment of the present application.

In one embodiment of the present application, the direction of intrinsic polarization of the wire grid polarizer may be divided into a polarization direction (TE polarization) parallel to the wire, and a vertical polarization direction (TM polarization), and for each polarization It may be a polarizer exhibiting anisotropic properties, having a different intrinsic impedance.

In one embodiment of the present application, the method for controlling the effective impedance of the highly transparent nanowire grid polarizer may be achieved by precisely adjusting the geometric characteristics of the wire structure. For example, when a polarized electromagnetic wave is incident of a linear polarization of two TM polarizations and a TE polarization, which is perpendicular to a wire smaller than a wavelength, the effective impedance is determined by the size, period, Or it may be controlled according to the spacing between the wires.

In one embodiment of the present application, the effective impedance of the wire grid polarizer can be controlled according to the electromagnetic properties of the material constituting the wire grid polarizer, and the material properties of the second dielectric between the wire and the wire.

In one embodiment of the present application, the thickness of the wire for controlling the effective impedance is less than the skin depth (skin depth) level, the second dielectric surrounding the wire may have a low refractive index.

In one embodiment of the present application, since the thickness of the wire affects the permeability with the effective dielectric constant, by using a wire thinner than the skin thickness of the wire, by precisely controlling the effective dielectric constant of the wire grid polarizer, The impedance matching condition of the wire grid polarizer may be found, but may not be limited thereto.

In one embodiment of the present application, by adjusting the size and period of the wire grid polarizer, it is possible to find an effective impedance matching condition according to the combination of the first dielectric and the second dielectric, but may not be limited thereto.

In one embodiment of the present application, the geometric parameters of the wire structure satisfying the impedance matching conditions of the wire grid polarizer may be selected according to the respective materials of the first layer and the second layer of the wire grid polarizer. For example, depending on the impedance matching condition between the wire structure and the substrate, the reflectance at the interface may be reduced and the transmittance may be improved, but the present invention may not be limited thereto.

In one embodiment of the present application, the wire may include a nanowire, but may not be limited thereto.

In one embodiment of the present application, the wire or nanowires can be used without limitation as long as the absolute value of the complex dielectric constant is large, and as a non-limiting example, may include a material having an absolute value of the complex dielectric constant of 10 or more. For example, the wire or nanowire may include, but is not limited to, one selected from the group consisting of metal compounds such as metals, alloys, oxides of metals, and combinations thereof. As a specific non-limiting example, the wire or nanowire may comprise a metal or alloy having a relatively low light absorption in the visible light region, for example, gold, silver, aluminum, copper, nickel, platinum, chromium, palladium, Iron, brass, zinc, bronze, and combinations thereof may include, but may not be limited to.

In one embodiment of the present application, an effective impedance matching condition according to an incident angle may be found using the wire grid polarizer, but may not be limited thereto.

In one embodiment of the present application, the wire grid polarizer has an effective impedance independent of two inherent linear polarization TM polarization and TE polarization, and has a constant effective impedance independent of the incident angle for the two intrinsic linear polarization Can be.

In one embodiment of the present application, through the three-dimensional periodic arrangement of the nanowire structure, it is possible to provide a free wire grid polarizer at the incident angle by satisfying the impedance matching conditions with the effective impedance control.

As shown in the schematic diagram of the wire grid polarizer of FIGS. 3 to 6, in one embodiment of the present application, it may be confirmed that nanowires are periodically arranged in each wire grid polarizer. The wire and the second dielectric surrounding the wire may be thought of as a lattice structure, that is, a unit cell, the lattice structure being C3 symmetric or C4 symmetrical and three-dimensionally arranged perpendicular to the nanowires. Since it is isotropic in the direction, the wide-angle impedance matching condition can be satisfied. For example, the C3 symmetry arrangement may include a hexagonal arrangement or a triangular arrangement, and the C4 symmetry may include a square arrangement, a rectangular arrangement, and the like.

In one embodiment of the present application, the cross section of the nanowires in the lattice structure of the wire grid polarizer may also be C3 symmetry or C4 symmetry at the same time, but may not be limited thereto.

In one embodiment of the present application, when the cross-sectional area of the wire is relatively small compared to the overall cross-sectional area of a single grating, the impedance matching condition may be satisfied even if the shape of the cross-sectional area is not C3 symmetry or C4 symmetry, but is not limited thereto. You may not.

In one embodiment of the present application, even if the three-dimensional array of the single grating is a random arrangement, it may be able to achieve the performance corresponding to the impedance matching conditions. Implementing the wire as designed at subwavelength size is a fairly difficult task, but making it a random arrangement is relatively easy.

In one embodiment of the present application, the periodically arranged wire may be surrounded by a second dielectric having a dielectric constant of ε _d , as shown in FIG. 5, wherein ε _d is a first layer and a second layer. It may have a value smaller than the dielectric constant of the first dielectric to form a, but may not be limited thereto.

In one embodiment of the present application, the second dielectric may be formed of a synthetic material such as a porous dielectric material having a low effective permittivity, as well as a dielectric consisting of a single material, but may not be limited thereto. For example, the second dielectric may include a material selected from the group consisting of a porous dielectric material, SiO ₂ , MgF ₂ , NaF, Si, Teflon, PMSSQ, PS-PEG, and combinations thereof, This may not be limited. Accordingly, the first dielectric forming the first layer and the second layer may use a material having a dielectric constant greater than that of the second dielectric without particular limitation. Non-limiting examples of the second dielectric, GaP, Si ₃ N ₄ , AlN, TiO ₂ , HfO _{2 ,} but is not limited thereto.

In one embodiment of the present application, the effective impedance of the wire structure having a cross-sectional area smaller than the wavelength may be controlled according to the size of the wire, the arrangement period, or the spacing between the wires.

In one embodiment of the present application, the wire grid polarizer may improve the transmission performance for the TM polarized light by achieving the impedance matching condition for the TM polarized light, and induces impedance mismatch for the TE polarized light to secure a blocking rate It may be, but may not be limited thereto.

In one embodiment of the present application, the effective impedance of the wire grid polarizer is controlled by the dielectric constant ε _m of the material constituting the wire, the dielectric constant ε _d of the second dielectric, the arrangement period p, the cross-sectional area A of the wire It may be, but may not be limited thereto.

Since the effective permittivity as well as the permeability change according to the dielectric properties of the wire and the size of the relative cross-sectional area, there is a problem that the conventional wire grid structure in which the effective permeability changes does not satisfy the impedance matching condition.

In one embodiment of the present application, the thickness of the wire may be less than the skin depth level (skin depth level) of the material forming the wire, but may not be limited thereto.

In one embodiment of the present application, the wire grid polarizer because the cross-sectional area of the wire is less than the skin depth (skin depth) of the wire material, it is possible to control only the effective dielectric constant independently, thereby meeting the impedance matching conditions But may not be limited thereto.

In one embodiment of the present application, since the effective impedance of the unit cell including the wire and the second dielectric is affected by the impedance of the second dielectric, the first wrapping the wire to satisfy the impedance matching conditions; The dielectric constant of the second dielectric should be lower than that of the first dielectric.

In one embodiment of the present application, by controlling the size and period of the wire grid structure, to achieve an effective impedance according to the specific dielectric, and considering the characteristics of the substrate, by matching the impedance between the wire grid structure and the substrate Conditions may be met but may not be limited thereto.

In one embodiment of the present application, the aspect ratio of the wire is not particularly limited. For example, the aspect ratio of the wire may be one or more or less than one, but is not limited thereto.

In one embodiment of the invention, the wire may be a nanowire, for example, the aspect ratio of the wire is about 0.1 to about 1,000, about 0.1 to about 500, about 0.1 to about 100, about 0.1 to about 50, About 1 to about 1,000, about 1 to about 500, about 1 to about 100, or about 1 to about 50, but is not limited thereto.

In one embodiment of the present application, since the effective impedance of the first layer and the second layer and the effective impedance of the polarizing layer may be the same, an impedance matching condition may be satisfied, but may not be limited thereto.

In one embodiment of the present application, the polarization layer including the wire and the TM polarization reflectance at the interface can be lowered according to the impedance matching between the first layer and the second layer, and the transmittance may be increased, but is not limited thereto. Can be.

In one embodiment of the present application, according to the impedance matching between the polarizing layer comprising a wire and the first layer and the second layer, it lowers the TM polarized light reflectance, increases the transmittance, and blocks the transmission of TE polarized light, The wire grid structure may represent a polarizer function, but may not be limited thereto.

In one embodiment of the present application, the effective impedance for the TM polarized wave and the TE polarized wave may be calculated using an effective permeability and an effective dielectric constant, but may not be limited thereto. The magnitude of the electric field component of the electromagnetic wave propagating inside the effective material can be said to have a uniform value on average based on the quasi-static assumption, and the effective dielectric constant according to the quasi-static assumption can be calculated.

In one embodiment of the present application, the thickness of the wire may be below the skin depth level of the material forming the wire, but may not be limited thereto.

In one embodiment of the present application, the thickness of the wire may be equal to or less than the skin depth level of the material forming the wire, the wire may comprise a nanowire. That is, as the wire has a thickness less than the skin thickness, the effective permeability may be viewed as 1, but may not be limited thereto.

Referring to FIG. 4, using the electric field size having an average value uniformly, the dielectric constant according to the polarization direction of the active material follows Equations 2 to 3:

[Equation 2]

[Equation 3]

In the above equation, ε _{eff, TM} Is the effective dielectric constant for the TM polarized wave, and ε _{eff, TE} is the effective dielectric constant for the TE polarized wave. The f _TM and f _TE are the effective volume ratios of the wires for a single lattice (unit cell) forming a periodic arrangement. The effective volume ratio is a value different from the geometric volume ratio, and the effective volume ratio may be determined according to the shape, size, arrangement period, or arrangement shape of the cross-sectional area of the wire.

In one embodiment of the present application, the shape of the wire cross-sectional area may be isotropic or anisotropic, for example, may be a variety of polygons, such as spherical, oval, triangular, square, pentagonal, hexagonal, or octagonal, but is not limited thereto. Can be.

In Equations 2 and 3, the wires may be independent of the incident angle because they form a periodic arrangement.

In one embodiment of the present application, the wire may have a cross-sectional area of a length smaller than the skin depth (skin depth), and thus the effective permeability can be viewed as 1, but may not be limited thereto. The effective impedance can be calculated using the effective permeability (= 1) and the effective permittivity according to Equations 2 and 3 above. The calculated effective impedance may be used to satisfy impedance matching conditions of the first and second layers.

In one embodiment of the present application, the thickness of the polarizing layer may be thicker than the thickness of the light incident layer of the first layer and the second layer, but may not be limited thereto.

In one embodiment of the present application, the wire grid polarizer may be formed on a transparent substrate or a transparent substrate, but may not be limited thereto.

In one embodiment of the present application, the substrate of the wire grid polarizer may be a high heat-resistant inorganic material having high transparency when the heat resistance is required, for example, may include glass, but is not limited thereto. Can be.

In one embodiment of the present application, the substrate of the wire grid polarizer may be transparent and / or flexible plastics for applications where heat resistance is not so required, for example, polymethyl methacrylate (PMMA), polycarbonate (PC), polystyrene (PS), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), diethylene glycol biscarbonate (CR-39), styrene / acrylonitrile copolymer (SAN), styrene / methacrylic acid It may include, but is not limited to, one selected from the group consisting of a copolymer (MS), an alicyclic acrylic resin, an alicyclic polyolefin resin, and combinations thereof.

A second aspect of the present disclosure includes a first layer comprising a first 'dielectric; A second layer comprising a third 'dielectric; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. And a wire grid polarizer (see FIG. 4B).

With respect to the wire grid polarizer according to the second aspect of the present application, detailed descriptions of portions overlapping with the first side of the present application have been omitted, but the contents described in the first side of the present application are described in the second aspect of the present application even if the description is omitted. The same applies to.

In one embodiment of the present application, the polarizer according to the principle of electromagnetic wave cancellation and constructive interference, regardless of whether the effective impedance of the second dielectric of the polarizing layer is greater or less than the impedance of the first layer and the second layer. Polarization transmission may be improved, but may not be limited thereto.

In one embodiment of the present application, the impedance of the first layer and the second layer is equal to each other, the impedance of the polarizing layer is greater or less than the impedance of the first layer and the second layer, the polarizing layer The thickness of may be an integer multiple of 1/2 of the wavelength of the incident light, but may not be limited thereto. For example, the impedance η ₁ of the first layer and the impedance η ₃ of the second layer are the same, and the impedance η _{2, eff} of the polarizing layer is the impedance of the first layer and the second layer. When smaller (η ₁ > η _{2, eff} ), the thickness of the polarizing layer may be an integer multiple of 1/2 of the wavelength according to the principle of cancellation and constructive interference of the electromagnetic waves, thereby improving the polarization transmission. It may be, but may not be limited thereto.

In one embodiment of the present application, the impedance η ₁ of the first layer and the impedance η ₃ of the second layer are the same, and the impedance η _{2, eff} of the polarizing layer is the first layer and the first layer. When greater than the impedance of two layers (η ₁ <η _{2, eff} ), the thickness of the polarizing layer may be an integer multiple of 1/2 of the wavelength according to the principle of cancellation and constructive interference of the electromagnetic waves, thereby transmitting the polarized light. May be to be improved, but may not be limited thereto.

In one embodiment of the present application, the impedance η ₁ of the first layer and the impedance η ₃ of the second layer are different from each other, and the impedance η _{2, eff} of the polarizing layer is different from the first layer. It is larger than the impedance of any one of the second layer and smaller than the impedance of the other layer, the thickness of the polarizing layer may be an odd multiple of 1/4 of the wavelength of the incident light, but may not be limited thereto.

For example, the impedance η ₁ of the first layer and the impedance η ₃ of the second layer are different from each other, and the impedance η _{2, eff} of the polarizing layer is the impedance η ₁ of the first layer. Greater than) and less than the impedance η ₃ of the second layer (η ₁ > η _{2, eff} > η ₃ ), the thickness of the polarizing layer according to the principles of cancellation and constructive interference of the electromagnetic waves is 1 It may be an odd multiple of / 4, and thus the polarization transmission may be improved, but may not be limited thereto.

In one embodiment of the present application, the impedance (η ₁ ) of the first layer and the impedance (η ₃ ) of the second layer are different from each other, and the impedance (η _{2, eff} ) of the polarizing layer is If less than the impedance η ₁ and greater than the impedance η ₃ of the second layer (η ₃ > η _{2, eff} > η ₁ ), the thickness of the polarizing layer according to the principle of cancellation and constructive interference of the electromagnetic waves May be an odd multiple of 1/4 of the wavelength, and thus the polarization transmission may be improved, but may not be limited thereto.

A third aspect of the present application is a method of manufacturing a wire grid polarizer according to claim 1, wherein the polarizer comprises: a first layer and a second layer comprising a first dielectric and spaced apart from each other; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. The dielectric constant of the second dielectric is smaller than that of the first dielectric, and the manufacturing method of the polarizer includes the steps of: (1) calculating a TM direction effective volume ratio and a TE direction effective volume ratio according to the geometric characteristics of the polarizing layer; ; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first transmission coefficient calculated using the TM direction impedance; And (7) calculating a second transmission coefficient calculated using the TE direction impedance, and repeating steps (1) to (7), wherein the first transmission coefficient is close to 1, and A method of manufacturing the wire grid polarizer according to the first aspect of the present application is to manufacture the wire grid polarizer by an impedance matching method by adjusting the geometrical characteristics of the polarizing layer such that the second transmission coefficient is close to zero. to provide.

For the method of manufacturing the wire grid polarizer according to the third aspect of the present application, detailed descriptions of the overlapping portions of the first side of the present application have been omitted, but the contents described in the first aspect of the present application may be The same can be applied to the third aspect of.

In one embodiment of the present application, step (1) may be to calculate the effective volume ratio from the geometric volume ratio, but may not be limited thereto.

A fourth aspect of the present application is a method of manufacturing a wire grid polarizer according to the third aspect of the present application, the polarizer comprising: a first layer comprising a first 'dielectric; A second layer comprising a third 'dielectric; And a polarization layer formed between the first layer and the second layer, wherein the polarization layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. The manufacturing method of the polarizer may include the steps of: (1) calculating the TM direction effective volume ratio and the TE direction effective volume ratio according to the geometrical characteristics of the polarizing layer; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first 'transmission coefficient calculated using the TM direction impedance; And (7) calculating a second 'transmission coefficient calculated using the TE direction impedance, and repeating steps (1) to (7), wherein the first' transmission coefficient is close to one. The method of manufacturing the wire grid polarizer according to claim 8, wherein the wire grid polarizer is manufactured by an impedance matching method by adjusting the geometric characteristics of the polarizing layer such that the second 'transmission coefficient is close to zero. to provide.

With respect to the method for manufacturing the wire grid polarizer according to the fourth aspect of the present application, detailed descriptions of portions overlapping with the first side of the present application or the second side of the present application are omitted, although the description thereof is omitted. The content described in the aspects or the second aspect of the present application is equally applicable to the fourth aspect of the present application.

In one embodiment of the present application, step (1) may be to calculate the effective volume ratio from the geometric volume ratio, but may not be limited thereto.

Hereinafter, the present invention will be described in more detail with reference to examples of the present application, but the following examples are merely illustrated to aid the understanding of the present application, and the content of the present application is not limited to the following examples.

EXAMPLE

Simulation condition

In the present embodiment, a wire grid polarizer was implemented using a first layer, a second layer, and a polarizing layer having a refractive index of 1.5. For both embodiments, the polarizing layer had a NaF having a refractive index of 1.33 in the visible region. Each embodiment using a dielectric consisting of a dielectric material consisting of a porous material having a dielectric constant of 1.14. The wire is made of aluminum and has a structure size (period, wire cross-sectional area, height of polarizing layer) that satisfies the impedance matching condition for each embodiment. The wavelength range is 400 nm to 1000 nm, and the performance for the incidence angle of 0 to 60 ° as well as the vertical incidence was confirmed. The structure was calculated under periodic boundary conditions in the form of infinite arrays in the horizontal direction.

TM polarization transmission performance according to the incident angle of wire grid polarizer

4, 7, 8, and 9 to 11 are exemplary views for explaining the TM polarization transmission performance according to the incident angle of the nanowire grid polarizer and the lattice polarizer according to the present invention.

Using a grating structure, even when the angle of incidence is zero, like the nanowire array structure, an impedance matching condition may be satisfied and improved transmission performance may be obtained. However, it is impossible to obtain the same transmission performance with respect to the incident angle because no isotropic arrangement is made for the vertical cross section. Since the nanowires form an isotropic array irrespective of the direction of the incident angle, the transmission performance may be improved independently of the incident angle by satisfying the impedance matching condition of the TM polarized light.

Transmission Performance Independent of Incident Angle of Wire Grid Polarizer

12 and 13 are graphs for explaining the transmission characteristics independent of the incident angle of the nanowire grid polarizer according to the present invention.

As another embodiment according to the present invention, when the material surrounding the nanowire has a smaller refractive index, the thickness of the polarizer may be reduced by Equation 2, and for this purpose, a SiO ₂ porous material having a refractive index of about 1.14 is assumed. The simulation results of the improvement of the TM transmission performance and the wide-angle performance were calculated.

For example, FIGS. 12 and 13 assume a square cross-sectional structure using aluminum as the nanowire and having a width of 15 nm at the skin depth level. In order to satisfy the impedance matching condition by the effective volume ratio, the arrangement period of the nanowires and the porous material surrounding them is 25 nm, and the C4 symmetrical arrangement is performed. When the refractive index of the upper substrate and the lower substrate is 1.5, the TM transmission performance could be achieved 90%, and the transmission performance independent of the angular component is shown in FIG. 12.

Optical Properties of Wire Grid Polarizers-(1)

14, 15, and 16 are exemplary views for explaining optical characteristics of the wire grid polarizer having the structure of FIG. 6. Specifically, FIGS. 14 to 16 are structures in which nanowires made of aluminum are stacked side by side in C4 symmetry, and have a structure similar to that of FIG. 6. Using the structure of FIG. 6, the performance of the wire grid polarizer may be improved by using impedance matching in the visible light region.

For example, the skin thickness of aluminum in the visible region is 15 nm, the width and height of the nanowire cross-sectional area a _metal may be 15 nm, and the second dielectric surrounding the nanowire is 1.33 in the visible region, such as NaF. Has a refractive index of. The first layer and the second layer are commonly used and may have a refractive index of 1.5.

Usually, the refractive index n of the dielectric is the square root of the relative permittivity and the permeability, and the relative permeability of the nonmagnetic material can be set to 1, so that the relative permittivity E _d of the second dielectric surrounding the nanowire among the first and second dielectrics is 1.7689. The dielectric constant of the first layer and the second layer may be 2.25.

When the impedance in air with a refractive index of 1 is 1, the impedance of a nonmagnetic material having a dielectric constant of 1.5 is 1 / √1.5. According to one embodiment of the present application, the cross-sectional area of the nanowire is a square having a width and height of 15 nm, a single lattice unit comprising the same assumes a C4 symmetric array structure having a square period array having a 40 nm period.

As shown in FIG. 6, graphs showing optical characteristics when the TE polarized light and the TM polarized light are incident along the z axis direction are FIGS. 14 and 16. Fig. 16 shows the transmission performance of TM polarized light and shows a transmittance of 90% or more in the visible light region. 14 shows the extinction ratio. The attenuation ratio is the ratio of the transmittance of the TM polarized light and the transmittance of the TE polarized light. 15 is a graph for explaining an impedance matching method using transmission characteristics. Background values of the first and second layers are close to the effective impedance values of the polarizer (MWP layer).

By adjusting the effective dielectric constant with respect to the effective volume ratio, the effective impedance can be matched to achieve a desired transmission performance and a polarization performance, and attenuation ratio of a certain level or more can be obtained.

As described above, the effective dielectric constant follows the above formulas (2) to (3), and the effective volume ratio f can be obtained as a function of the geometric ratio (a / p). The function of the effective volume ratio is influenced by the area of the nanowires relative to the thickness of the skin and also by the cross-sectional structure of the nanowires.

Optical Properties of Wire Grid Polarizers-(2)

17 and 18 are graphs for comparing and explaining the optical characteristics of the nanowire grid polarizer according to the present invention. Specifically, the relationship between the geometric ratio (a / p) and the effective volume ratio (f) according to the cross-sectional structure of the nanowire.

17 is the length (square cross section) or diameter (circular cross section) of one side of the cross-sectional area of the nanowire, and the geometric ratio refers to the ratio of the relative length a of the wire to the period p. The relationship between the effective volume ratio and the geometric ratio is shown. FIG. 17 graphically shows the relation with respect to the rectangular cross section and FIG. 18 the relation with respect to the circular cross section. For example, a = 15 nm.

The effective volume ratio to be applied to Equations 2 to 3 can be obtained through Equations 4 and 5 using geometric ratios (a / p, ratio).

[Equation 4]

f _{TM, Squre} = 1.2 × ratio-0.16

[Equation 5]

f _{TM, circle} = 1.1 × ratio-0.17

Optical Properties of Wire Grid Polarizers-(3)

19 and 20 are graphs for comparing and explaining the optical characteristics of the nanowire grid polarizer according to the present invention. Specifically, FIGS. 19 and 20 are graphs showing a relationship between an effective volume ratio and a volume ratio of nanowires having a rectangular cross section and a circular cross section for a TE polarized wave.

The effective volume ratios of the equations (2) to (3) can be confirmed as follows for the nanowires of the square cross section and the nanowires of the circular cross section with respect to the geometric ratio.

[Equation 6]

f _{TE, Squre} = 0.74 × volume ratio-0.0071

[Equation 7]

f _{TE, circle} = 0.74 × volume ratio-0.0038

When the geometry of the nanowires is determined, the effective volume ratio can be obtained according to Equation 6 and Equation 7, Equation 4 and Equation 5, and substituted in Equation 2 to Equation 3 to the TM direction and TE. It can be used to calculate the effective dielectric constant of the direction.

Manufacture of wire grid polarizer

Figure 21 is a procedure flow diagram illustrating a method of making a highly transparent nanowire grid polarizer in accordance with the present invention.

Method for producing a highly transparent nanowire grid polarizer according to the present invention, calculating the effective volume ratio of the TM direction and TE direction according to the geometric characteristics of the polarizing layer; Calculating effective dielectric constants in the TM and TE directions using the effective volume ratio, the permittivity of the wire and the dielectric; Calculating impedance in a TM direction and a TE direction using the effective dielectric constant; Calculating a transmission coefficient using the calculated impedance; And calculating geometric characteristics in a recursive method of matching impedance.

Method for producing a highly transparent nanowire grid polarizer by the impedance matching method according to the present invention comprises the steps of (1) calculating the effective volume ratio of the TM direction and the effective volume ratio of the TE direction according to the geometric characteristics of the polarizing layer; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first transmission coefficient calculated using the TM direction impedance; And (7) calculating a second transmission coefficient using the TE directional impedance; repeating steps (1) to (7), wherein the first transmission coefficient is set to 1 in a recursive manner. Closely, the second reflection coefficient is characterized by finding the geometric characteristic of the polarizing layer to be close to zero.

The effective volume ratio may be calculated using Equations 3 to 7 using geometric ratios (a / p) or geometric volume ratios. Using the calculated effective volume ratio, the TM direction effective dielectric constant and TE direction effective dielectric constant can be calculated (Equations 2 to 3). The calculated effective permittivity may be used to calculate impedance in each direction (TM direction or TE direction), and the transmission coefficient may be calculated using impedances of the first dielectrics of the first and second layers. A series of calculations can be calculated by the computer, and the reflection coefficient can be recalculated by varying the geometric ratio or geometric volume fraction. By repeating this, the impedance can be matched to calculate a geometric ratio or geometric volume ratio having a high TM direction transmittance and a high TE direction reflectance.

At this time, the thickness of the wire should be thinner than the skin depth of the metal constituting the wire, but since the thickness of the wire is difficult to make thinner than the thickness of the metal, the thickness of the wire is made at the skin thickness level. By changing the frequency the effective volume fraction will be changed. By changing the period, the impedances are matched to calculate geometric ratios or geometric volume ratios having high TM-direction transmittance and high TE-direction reflectivity.

The above description of the present application is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present application is indicated by the following claims rather than the above description, and it should be construed that all changes or modifications derived from the meaning and scope of the claims and their equivalents are included in the scope of the present application.

[Description of the code]

100: first layer

200: second layer

300: polarizing layer

310: second dielectric

320: wire

400: first layer

500: second layer

600: polarizing layer

610: second dielectric

620: wire

Claims (20)

A first layer and a second layer comprising a first dielectric and spaced apart from each other; And A polarization layer formed between the first layer and the second layer; Including; The polarizing layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. The dielectric constant of the second dielectric is less than that of the first dielectric, Wire grid polarizer. The method of claim 1, Wherein the wire comprises a material having an absolute value of a complex dielectric constant of 10 or more, Wire grid polarizer. The method of claim 1, Wherein the wire comprises nanowires, Wire grid polarizer. The method of claim 1, Wherein the second dielectric comprises a porous dielectric material, Wire grid polarizer. The method of claim 1, The thickness of the polarizing layer is thicker than the thickness of the light incident layer of the first layer and the second layer, Wire grid polarizer. The method of claim 1, The thickness of the wire is less than or equal to the skin depth level of the material forming the wire. Wire grid polarizer. The method of claim 1, Since the effective impedance of the first layer and the second layer and the effective impedance of the polarizing layer is the same, an impedance matching condition is satisfied. Wire grid polarizer. A first layer comprising a first 'dielectric; A second layer comprising a third 'dielectric; And Polarization layer formed between the first layer and the second layer Including; The polarizing layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. Wire grid polarizer. The method of claim 8, The polarizer is the polarization transmission is improved according to the principle of electromagnetic wave cancellation and constructive interference, Wire grid polarizer. The method of claim 8, The impedance of the first layer and the second layer is equal to each other, An impedance of the polarizing layer is larger or smaller than an impedance of the first layer and the second layer, The thickness of the polarizing layer is an integer multiple of 1/2 of the wavelength of the incident light,  Wire grid polarizer. The method of claim 8, The impedances of the first layer and the second layer are different from each other, The impedance of the polarizing layer is greater than the impedance of the layer in which light is incident between the first layer and the second layer is smaller than the impedance of the remaining layers, The thickness of the polarizing layer is an odd multiple of 1/4 of the wavelength of the incident light, Wire grid polarizer. The method of claim 8, Wherein the wire comprises a material having an absolute value of a complex dielectric constant of 10 or more, Wire grid polarizer. The method of claim 8, Wherein the wire comprises nanowires, Wire grid polarizer. The method of claim 8, Wherein the second 'dielectric comprises a porous dielectric material, Wire grid polarizer. The method of claim 8, The thickness of the wire is less than or equal to the skin depth level of the material forming the wire. Wire grid polarizer. The method of claim 8, Wherein the wire has an aspect ratio of greater than 1, Wire grid polarizer. A method of manufacturing the wire grid polarizer according to claim 1, The polarizer, A first layer and a second layer comprising a first dielectric and spaced apart from each other; And A polarization layer formed between the first layer and the second layer; Including; The polarizing layer includes a second dielectric and a plurality of wires inserted into the second dielectric and arranged in parallel with each other. The dielectric constant of the second dielectric is smaller than that of the first dielectric, The manufacturing method of the said polarizer, (1) calculating a TM direction effective volume ratio and a TE direction effective volume ratio according to the geometric characteristics of the polarizing layer; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first transmission coefficient calculated using the TM direction impedance; And (7) calculating a second transmission coefficient calculated using the TE direction impedance; Including; Repeat steps (1) to (7) above, Wherein the wire grid polarizer is manufactured by an impedance matching method by adjusting the geometric characteristics of the polarizing layer such that the first transmission coefficient is close to 1 and the second transmission coefficient is close to zero. A method of manufacturing the wire grid polarizer according to claim 1. The method of claim 17, Step (1), A method for producing a grid polarizer, wherein the effective volume ratio is calculated from the geometric volume ratio. A method of manufacturing the wire grid polarizer according to claim 8, The polarizer, A first layer comprising a first 'dielectric; A second layer comprising a third 'dielectric; And Polarization layer formed between the first layer and the second layer Including; The polarizing layer includes a second 'dielectric and a plurality of wires inserted into the second' dielectric and arranged in parallel with each other. The manufacturing method of the said polarizer, (1) calculating a TM direction effective volume ratio and a TE direction effective volume ratio according to the geometric characteristics of the polarizing layer; (2) calculating a TM direction effective dielectric constant using the TM direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (3) calculating the TE direction effective dielectric constant using the TE direction effective volume ratio, the dielectric constant of the wire and the dielectric constant of the second dielectric; (4) calculating a TM direction impedance using the TM direction effective dielectric constant; (5) calculating a TE direction impedance using the TE direction effective dielectric constant; (6) calculating a first 'transmission coefficient calculated using the TM direction impedance; And (7) calculating a second 'transmission coefficient calculated using the TE direction impedance; Including; Repeat steps (1) to (7) above, The wire grid polarizer is manufactured on the basis of electromagnetic cancellation and constructive interference by adjusting the geometrical characteristics of the polarizing layer such that the first 'transmission coefficient is close to 1 and the second' transmission coefficient is close to zero. , A method of manufacturing the wire grid polarizer according to claim 9. The method of claim 19, Step (1), A method for producing a grid polarizer, wherein the effective volume ratio is calculated from the geometric volume ratio.

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