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WO2018198427A1 - Dispositif de nettoyage au laser et procédé de nettoyage au laser - Google Patents

Dispositif de nettoyage au laser et procédé de nettoyage au laser Download PDF

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Publication number
WO2018198427A1
WO2018198427A1 PCT/JP2017/045588 JP2017045588W WO2018198427A1 WO 2018198427 A1 WO2018198427 A1 WO 2018198427A1 JP 2017045588 W JP2017045588 W JP 2017045588W WO 2018198427 A1 WO2018198427 A1 WO 2018198427A1
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WO
WIPO (PCT)
Prior art keywords
cleaned
laser
laser cleaning
cleaning apparatus
blowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/045588
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English (en)
Japanese (ja)
Inventor
伸緒 横村
上山　幸嗣
道雄 小川
遥平 佐々木
亮介 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2018519885A priority Critical patent/JP6463556B1/ja
Priority to CN201780089820.4A priority patent/CN110730694B/zh
Publication of WO2018198427A1 publication Critical patent/WO2018198427A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Definitions

  • the present invention relates to a laser cleaning apparatus that degreases metal parts by irradiating laser light, and a laser cleaning method using the laser cleaning apparatus.
  • rust prevention oil is applied to the surface when shipped from the manufacturer. Further, when machining metal parts, since cutting oil or press oil is used, oil adheres to the surface of the metal parts. The adhesive is easily peeled off from the surface of the metal part to which oil has adhered. Therefore, when bonding to a metal part to which oil has adhered, it is necessary to go through a degreasing and cleaning process that removes the oil that has adhered to the surface of the metal part.
  • wet cleaning using a cleaning liquid has been widely used as a degreasing cleaning technique.
  • the method of using a cleaning liquid has a large burden such as an increase in manufacturing cost, an increase in manufacturing steps, and environmental measures. Therefore, laser cleaning is used as a dry cleaning technique that does not use a cleaning liquid.
  • Laser cleaning is a cleaning method that utilizes a phenomenon called laser ablation, in which constituent materials are explosively emitted when a material is irradiated with high energy density laser light.
  • laser cleaning has a problem of redeposition of scattered oil.
  • an apparatus that suppresses the reattachment of the oil scattered with the irradiation of the laser beam by causing the suction unit and the blowing unit to follow the scanning portion of the laser beam (see, for example, Patent Document 1).
  • the present invention has been made to solve the above-described problems, and suppresses the reattachment of the removed oil and the uneven cleaning of the oil, and also prevents the distortion of the metal part that is the part to be cleaned. It is possible to obtain a laser cleaning device that can be used.
  • a laser cleaning apparatus includes a work stage that holds a component to be cleaned, a heating device that heats the component to be cleaned, a blower mechanism that blows gas to the surface of the component to be cleaned, and a surface of the component to be cleaned. And a laser beam irradiating section for irradiating the laser beam and a moving mechanism for moving the spot of the laser beam irradiated on the surface of the component to be cleaned relative to the component to be cleaned.
  • the present invention provides a laser cleaning apparatus capable of preventing uneven cleaning of a part to be cleaned by increasing the temperature of the oil component adhering to the part to be cleaned and improving fluidity.
  • FIG. 3 is a diagram for explaining a cleaning process using the laser cleaning apparatus of the first embodiment. It is a figure which shows the 1st modification of the laser cleaning apparatus of Embodiment 1. FIG. It is a figure which shows the 2nd modification of the laser cleaning apparatus of Embodiment 1. FIG. It is a figure which shows the 3rd modification of the laser cleaning apparatus of Embodiment 1.
  • FIG. 1 is a figure which shows the 1st modification of the laser cleaning apparatus of Embodiment 1.
  • FIG. It is a figure which shows the 2nd modification of the laser cleaning apparatus of Embodiment 1.
  • FIG. It is a figure which shows the 3rd modification of the laser cleaning apparatus of Embodiment 1.
  • FIG. It is a figure which shows the 4th modification of the laser cleaning apparatus of Embodiment 1.
  • FIG. It is a figure which shows the outline of the laser cleaning apparatus by Embodiment 2 of this invention. It is a schematic diagram explaining the effect
  • FIG. It is a figure which shows the 2nd modification of the laser cleaning apparatus of Embodiment 2.
  • FIG. It is a figure which shows the outline of the laser cleaning apparatus by Embodiment 3 of this invention. It is a figure which shows the outline of the laser cleaning apparatus by Embodiment 4 of this invention.
  • FIG. 1 is a diagram schematically showing a laser cleaning apparatus 100 according to Embodiment 1 of the present invention.
  • FIG. 2 is a schematic view of the operation of the laser cleaning apparatus 100 as viewed from the front
  • FIG. 3 is a schematic view of the operation of the laser cleaning apparatus 100 as viewed from the side.
  • the laser cleaning apparatus 100 includes a base 11, a laser unit 1, a column 13, a work stage 12, and an XY stage 15.
  • a column 13 and an XY stage 15 are attached to the base 11.
  • the laser unit 1 is supported by the column 13.
  • the work stage 12 is fixed on the XY stage 15.
  • the laser unit 1 irradiates a metal part 23A, which is a part to be cleaned, held on the work stage 12 with a laser beam 21.
  • the laser light source and the laser driving device of the laser unit 1 are disposed outside the laser cleaning device 100.
  • a YAG laser (wavelength 1064 nm) is used as the laser light source.
  • the laser light source may be a carbon dioxide laser (wavelength 10.6 ⁇ m).
  • the laser unit 1 has a deflection mechanism using a galvano mirror that reciprocally scans the spot S of the laser light 21 at a constant angle.
  • the diameter of the spot S of the laser beam 21 can be changed by exchanging lenses used in the laser optical system.
  • the deflection mechanism of the laser light 21 is not limited to the scanning method, and may be a diffusion method.
  • the work stage 12 has a holding mechanism (not shown) that holds the metal part 23A. Further, the XY stage 15 can be moved in the X and Y directions indicated by arrows in FIG. 1 by a driving device (not shown). The work stage 12 can move the metal part 23 ⁇ / b> A in the XY direction by moving with the movement of the XY stage 15. The moving speed of the XY stage 15 is set to a speed at which cleaning unevenness does not occur.
  • the laser beam 21 is placed in a rectangular range of the metal component 23A held on the work stage 12. Irradiation can be performed.
  • the column 13 has an elevating mechanism that moves the laser unit 1 up and down.
  • the laser unit 1 is movable in the vertical direction with respect to the parts to be cleaned on the work stage 12 by the lifting mechanism of the column 13. Thereby, even if the metal part 23A has an uneven shape, the laser beam 21 can be focused on the surface of the metal part 23A.
  • the laser cleaning device 100 has a blower mechanism 3 and a suction mechanism 5.
  • the blower unit 3 is supported on the base 11 by the blower unit holding mechanism 4.
  • the suction unit 5 is supported on the base 11 by the suction unit holding mechanism 6.
  • the blowing unit holding mechanism 4 can adjust the position and blowing angle of the blowing unit 3.
  • the suction unit holding mechanism 6 can adjust the position of the suction unit 5 and the air blowing angle.
  • FIG. 2 and 3 show a state where the gas 22 is blown from the blower unit 3 to the oil component 24 attached to the surface of the metal part 23A held on the work stage 12 and the laser beam 21 is irradiated. It is a schematic diagram.
  • FIG. 2 shows a state seen from the side with respect to the traveling direction of the laser light
  • FIG. 3 shows a state seen from the front side with respect to the traveling direction of the laser light.
  • the blower unit 3 blows the gas 22 to the surface of the metal part 23 ⁇ / b> A held on the work stage 12.
  • the blower unit 3 has a heat source (not shown), and the gas 22 is blown after being heated in the blower unit 3.
  • the temperature at which the gas 22 is heated is the flash point of the oil 24 attached to the metal part 23A from around 40 ° C. at which the oil 24 attached to the metal part 23A starts flowing when the gas 22 is blown.
  • the range is less than (approximately 200 ° C.).
  • the temperature at which the oil component 24 starts to flow is referred to as a flow start temperature.
  • the flow start temperature is a temperature obtained by utilizing the method described in the rust prevention oil pour point test method described in JIS 2246.
  • the oil component 24 whose fluidity is increased by the heated gas 22 sent from the blower unit 3 is scattered.
  • the oil component 24 is removed in the order of irradiating the laser beam 21 to the oil component 24 remaining on the surface of the metal part 23A.
  • the oil component 24 can be efficiently and uniformly removed from the surface of the metal part 23A. If this order is reversed, unevenness occurs in the removal of the oil component 24, so adjustment of the position of the blower unit 3 and the blower direction is important.
  • the cleaning efficiency is deteriorated depending on the shape of the metal part 23A. Therefore, in the laser cleaning apparatus 100 of the first embodiment, as shown in FIG. 2, the gas 22 sent from the blower unit 3 irradiates the oil component 24 attached to the metal part 23A across the optical path of the laser light 21. As a result, the blower unit holding mechanism 4 is adjusted. Here, the influence on the power of the laser beam 21 and the shape of the spot S due to the gas 22 crossing the optical path of the laser beam 21 is negligibly small.
  • the range in which the gas 22 blown from the blower unit 3 hits is set to be wider than the range in which the spot S of the laser light 21 scans.
  • the range in which the gas 22 is blown in the direction perpendicular to the surface of the metal part 23A is set to be higher than the height from the surface of the metal part 23A to the thickness of the oil component 24 attached to the metal part 23A.
  • the angle formed by the direction of the gas 22 blown from the blower unit 3 and the surface of the metal part 23A is set to 70 ° or less. This is to prevent the oil component 24 from scattering and reattaching the oil component 24 to the rear of the traveling direction of the spot S of the laser light 21.
  • the suction unit 5 sucks the scattered matter 25 such as the oil 24 scattered from the surface of the metal part 23A.
  • the suction unit 5 is disposed above the work stage 12 as shown in FIG.
  • the suction unit 5 is adjusted by the suction unit holding mechanism 6 to a position and posture at which the scattered matter 25 can be sucked.
  • the suction unit holding mechanism 6 has a pipe for collecting the sucked scattered matter 25.
  • the laser cleaning apparatus 100 of the first embodiment configured as described above, the column 13 fixed to the base 11, the laser unit 1 supported by the column 13, the XY stage 15, and the XY stage 15 are fixed.
  • the working stage 12, the air blowing unit 3 for heating and blowing the gas 22, and the suction unit 5 are provided.
  • the laser cleaning apparatus 100 according to the first embodiment blows the gas 22 heated from the blower unit 3 to the oil 24 attached to the surface of the metal part 23A, thereby heating and scattering the oil 24.
  • the metal part 23A is moved by the XY stage 15, and the laser unit 21 irradiates the oil component 24 remaining on the surface of the metal component 23A by the laser unit 1 to scatter the oil component 24 from the surface of the metal component 23A. Yes.
  • the scattered matter 25 such as the oil 24 scattered from the surface of the metal part 23 ⁇ / b> A is sucked and collected by the suction unit 5. Therefore, it is possible to remove the oil component 24 without causing the scattered oil component 24 to adhere to the surface of the metal part 23 ⁇ / b> A and without causing unevenness. Furthermore, it is possible to suppress the occurrence of distortion of the metal part 23A due to a temperature difference between the portion irradiated with the laser light 21 and other portions.
  • the focal point of the laser unit 1, the positions and angles of the blower unit 3 and the suction unit 5 are adjusted.
  • the metal part 23A is held on the work stage 12 by a holder (not shown) (S1).
  • the gas 22 heated from the blower unit 3 is blown to the metal part 23A to raise the temperature of the metal part 23A and the oil component 24 (S2).
  • the temperature at this time is set based on the type of oil component 24 adhering to the metal part 23A.
  • the temperature is set low, and when the oil component 24 having low fluidity at normal temperature is set, the temperature is set high. . However, it is kept below the flash point of oil 24.
  • the movement of the XY stage 15 is started and the irradiation of the laser light 21 from the laser unit 1 is started (S5).
  • the spot S of the laser beam 21 finishes scanning the surface of the metal part 23A, the blowing of the gas 22 by the blowing unit 3 and the suction of the scattered matter 25 by the suction unit 5 are continued (S6).
  • the cleaned metal part 23A is transported to the next process (S7).
  • the cleaning of the oil component 24 attached to the surface of the metal part 23A is completed.
  • the irradiation angle of the laser beam 21 to the work stage 12 when the laser beam 21 is not deflected is vertical, This is not a limitation.
  • the irradiation angle of the laser beam 21 to the work stage 12 when the laser beam 21 is not polarized may be set within a range where the effect of laser ablation can be obtained.
  • blower unit 3 and the suction unit 5 are arranged one by one, but the present invention is not limited to this.
  • two or more blower units 3 and suction units 5 may be arranged according to the arrangement of the laser unit 1, or two or more of only one of the blower unit 3 and the suction unit 5 may be arranged. .
  • the metal part 23A and the oil component 24 are heated by the heated gas 22 blown from the blower unit 3.
  • the heating method is not limited to this. Absent.
  • the heater unit 16 may be disposed above the work stage 12 to heat the metal part 23 ⁇ / b> A and the oil component 24.
  • the heater unit 16 heats the metal part 23A and the oil component 24 by far infrared radiation heat.
  • the heater unit 16 has a rectangular parallelepiped shape, and as shown in FIG. 5, the longitudinal direction is arranged along the X direction in which the XY stage 15 is moved when the metal component 23A is cleaned. Further, as shown in FIG. 5, two heater units 16 may be arranged so that their longitudinal directions are parallel to each other.
  • the number of heater units 16 is not limited to two, and the shape is not limited to a rectangular parallelepiped.
  • the number of heater units 16 may be three or more, and the shape may be any shape as long as the surface of the metal part 23A can be efficiently heated.
  • the heater unit 16 may be disposed. Thereby, even if it takes time to increase the temperature of the oil component 24 in the heated gas 22 depending on the type of the oil component 24, the heater unit 16 can accelerate the temperature increase of the oil component 24, and the cleaning process is performed. Time can be shortened.
  • a heater unit 17 may be arranged on the work stage 12 itself, as in the laser cleaning device 120 of the second modification shown in FIG.
  • the heater unit 17 has a heater that can simultaneously heat the entire range of the work stage 12 that holds the metal part 23A. Thereby, the whole metal part 23A and the oil component 24 can be heated without unevenness, and further, the laser beam 21 can be irradiated in a state where the heating to the oil component 24 is maintained. Therefore, the oil component 24 can be removed from the surface of the metal part 23A without unevenness.
  • the robot arm 18 may be arranged as a transport mechanism for the metal part 23A.
  • the robot arm 18 has a plurality of axes and joints, and the tip can move in a three-dimensional direction. By attaching an attachment according to the application, the tip of the robot arm can be gripped / released / carried like a human arm and hand.
  • the metal part 23A can be processed automatically and continuously.
  • the robot arm 18 holds the metal part 23 ⁇ / b> A by a holding mechanism (not shown) and transports the metal part 23 ⁇ / b> A to an arbitrary position on the work stage 12.
  • a foreign matter removing mechanism 7 composed of a spatula, a brush, a cloth, or the like may be arranged.
  • the foreign matter 26 that adheres to the surface of the metal part 23 ⁇ / b> A and is difficult to remove by air blowing and laser irradiation other than oil can be removed by the foreign matter removing mechanism 7.
  • FIG. FIG. 9 is a schematic diagram of a laser cleaning apparatus 200 according to the second embodiment.
  • the laser cleaning device 200 according to the second embodiment has a rotating device 14 that does not scan the laser light 21 but rotates and holds the cylindrical metal part 23B to be cleaned. 1 different from the laser cleaning apparatus 100 of FIG. Other configurations are the same as those in the first embodiment.
  • 10 is a schematic view of the operation of the laser cleaning apparatus 200 as viewed from the front
  • FIG. 11 is a schematic view of the operation of the laser cleaning apparatus 200 as viewed from the side.
  • the laser cleaning device 200 has a rotating device 14 that is detachably fixed on the work stage 12.
  • the rotating device 14 has a function of holding the cylindrical metal part 23B by a holding mechanism (not shown) and rotating the metal part 23B around the rotation axis.
  • the holding mechanism of the rotating device 14 has the same mechanism as a lathe chuck.
  • the laser cleaning device 200 rotates the metal part 23B in the direction of the arrow R by the rotating device 14.
  • the gas 22 heated by the oil component 24 adhering to the surface of the cylindrical metal component 23B is ventilated by the blower unit 3, and the metal component 23B and the oil component 24 are heated.
  • the gas 22 which blows from the ventilation unit 3 causes the oil component 24 to scatter from the surface of the metal component 23B by the temperature of the metal component 23B and the oil component 24 rising.
  • suction of the scattered matter 25 is started by the suction unit 5.
  • the XY stage 15 is moved in the direction of arrow D, and the laser unit 21 irradiates the oil component 24 of the metal part 23B with the laser beam 21.
  • the direction in which the metal part 23 ⁇ / b> B is rotated by the rotating device 14 may be the direction opposite to the arrow R.
  • the gas 22 can be blown uniformly to the oil component 24 on the surface of the cylindrical metal part 23B, and the oil component 24 can be scattered and sucked.
  • the oil component 24 of the metal part 23B can be irradiated with the laser beam 21 without unevenness. Therefore, the oil component 24 can be removed from the metal component 23B without unevenness, and the oil component 24 scattered from the metal component 23B can be prevented from reattaching to the metal component 23B. Furthermore, it is possible to suppress the occurrence of distortion of the metal part 23B due to the temperature difference between the part irradiated with the laser light 21 and the other part in the metal part 23B.
  • the heated gas 22 is blown from the blower unit 3 to heat the metal part 23B and the oil component 24.
  • the present invention is not limited to this.
  • the heater unit 16 may be disposed above the work stage 12 to heat the metal part 23B and the oil component 24. Furthermore, you may heat using both ventilation of the heated gas 22 and the heater unit 16. FIG.
  • the robot arm 18 may be arranged as a transport mechanism for the metal part 23B according to the second embodiment, as in the laser cleaning device 220 of the second modification shown in FIG.
  • FIG. 14 is a schematic diagram showing a laser cleaning apparatus 300 according to the third embodiment.
  • the laser cleaning apparatus 300 according to the third embodiment is different from the first embodiment in that the laser unit 1 is supported by the robot arm 19.
  • the configuration of the robot arm 19 is the same as that of the robot arm 18 shown in the second modification of the second embodiment. Other configurations are the same as those in the first embodiment.
  • the robot arm 19 holds the laser unit 1 by a holding mechanism (not shown). And the laser unit 1 can be rotated centering
  • the laser unit 1 can be moved in the XYZ directions by the robot arm 19. Therefore, instead of the column 13 and the XY stage 15, the robot arm 19 may be used as a moving mechanism.
  • FIG. FIG. 15 is a schematic diagram of a laser cleaning apparatus 400 according to the fourth embodiment.
  • the laser cleaning device 400 according to the fourth embodiment is different from the laser cleaning device 300 according to the third embodiment in that the laser cleaning device 400 according to the fourth embodiment includes the rotating device 14 that holds and rotates the cylindrical metal part 23B to be cleaned. Different. Other configurations are the same as those of the third embodiment.
  • the laser light is also irradiated to the metal part 23A having a shape such as a step, which could not be irradiated with the laser light in the second embodiment. can do.
  • the gas 22 is blown evenly to the oil component 24 on the surface of the cylindrical metal part 23B, similarly to the laser cleaning device 200 according to the second embodiment.
  • the oil component 24 can be scattered and sucked.
  • the oil component 24 of the metal part 23B can be irradiated with the laser beam 21 without unevenness. Therefore, the oil component 24 can be removed from the metal component 23B without unevenness, and the oil component 24 scattered from the metal component 23B can be prevented from reattaching to the metal component 23B. Furthermore, it is possible to suppress the occurrence of distortion of the metal part 23B due to the temperature difference between the part irradiated with the laser light 21 and the other part in the metal part 23B.
  • 1 laser unit laser light irradiation unit
  • 3 air blowing unit air blowing mechanism, heating device
  • 4 air blowing unit holding mechanism 5 suction unit (suction mechanism), 6 suction unit holding mechanism, 7 foreign matter removing mechanism, 11 base, 12 Work stage, 13 columns (movement mechanism), 14 rotation device (movement mechanism), 15 XY stage (movement mechanism), 16, 17 heater unit (heating device), 18, 19 robot arm (conveyance mechanism), 21 laser light, 22 gas, 23A, 23B metal parts (parts to be cleaned), 24 oils (attachments), 25 scattered objects, 100, 110, 120, 130, 140, 200, 210, 220, 300, 400 laser cleaning equipment, S spot .

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  • Cleaning In General (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un dispositif de nettoyage au laser (100) comportant : un étage de travail (12) pour maintenir un composant (23A) à nettoyer ; un dispositif de chauffage pour chauffer le composant (23A) à nettoyer ; un mécanisme de soufflage (3) pour souffler un gaz (22) sur la surface du composant (23A) à nettoyer ; une unité d'irradiation de faisceau laser (1) pour irradier la surface du composant (23A) à nettoyer avec un faisceau laser (21) ; et un mécanisme de déplacement (15) qui déplace, par rapport au composant (23A) à nettoyer, un point (S) du faisceau laser (21) irradié sur la surface du composant (23A) à nettoyer.
PCT/JP2017/045588 2017-04-25 2017-12-19 Dispositif de nettoyage au laser et procédé de nettoyage au laser Ceased WO2018198427A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018519885A JP6463556B1 (ja) 2017-04-25 2017-12-19 金属部品のレーザ洗浄装置及び金属部品のレーザ洗浄方法
CN201780089820.4A CN110730694B (zh) 2017-04-25 2017-12-19 激光清洗装置及激光清洗方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-086541 2017-04-25
JP2017086541 2017-04-25

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WO2018198427A1 true WO2018198427A1 (fr) 2018-11-01

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JP (1) JP6463556B1 (fr)
CN (1) CN110730694B (fr)
WO (1) WO2018198427A1 (fr)

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JP2020163275A (ja) * 2019-03-29 2020-10-08 一般財団法人電力中央研究所 付着油の除去方法
JP7296758B2 (ja) 2019-03-29 2023-06-23 一般財団法人電力中央研究所 付着油の除去方法
CN115430662A (zh) * 2021-06-02 2022-12-06 大族激光科技产业集团股份有限公司 激光清洗方法及清洗装置
JP7317420B1 (ja) 2023-03-09 2023-07-31 小▲柳▼津 清 アニロックスロールのレーザ洗浄装置
WO2024185187A1 (fr) * 2023-03-09 2024-09-12 株式会社 キヨシ・ネットワーク Dispositif de nettoyage laser pour rouleau anilox
JP2024127394A (ja) * 2023-03-09 2024-09-20 小▲柳▼津 清 アニロックスロールのレーザ洗浄装置

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