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WO2018168783A1 - Guide d'ondes optiques en polymère - Google Patents

Guide d'ondes optiques en polymère Download PDF

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Publication number
WO2018168783A1
WO2018168783A1 PCT/JP2018/009533 JP2018009533W WO2018168783A1 WO 2018168783 A1 WO2018168783 A1 WO 2018168783A1 JP 2018009533 W JP2018009533 W JP 2018009533W WO 2018168783 A1 WO2018168783 A1 WO 2018168783A1
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WIPO (PCT)
Prior art keywords
core
optical waveguide
polymer optical
polymer
prepolymer
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Ceased
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PCT/JP2018/009533
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English (en)
Japanese (ja)
Inventor
健太 小林
盛輝 大原
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AGC Inc
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Asahi Glass Co Ltd
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Priority to JP2019506016A priority Critical patent/JP7036108B2/ja
Publication of WO2018168783A1 publication Critical patent/WO2018168783A1/fr
Anticipated expiration legal-status Critical
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/34—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
    • C08G65/38—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind

Definitions

  • the present invention relates to a polymer optical waveguide.
  • Patent Document 1 The polymer optical waveguide can pass a large volume of signal, and can realize noiseless, space saving, and ease of assembly.
  • An object of the present invention is to provide a polymer optical waveguide that can reduce propagation loss.
  • the present invention is a polymer optical waveguide having a core and a clad having a refractive index lower than that of the core,
  • the polymer optical waveguide has a sheet shape, and in the core cross-sectional shape perpendicular to the light propagation direction of the core, when the thickness direction of the sheet shape is the core height and the direction perpendicular to the thickness direction is the core width
  • the core height is 1.0-10 ⁇ m
  • the core width is 1.0-15 ⁇ m
  • Provided is a polymer optical waveguide characterized in that the depth of a dent existing on the upper surface and / or the side surface of the core in the core cross-sectional shape is 0.33 ⁇ m or less.
  • the polymer optical waveguide of the present invention has a propagation loss ratio X / Y of 0.2 to 2 obtained by dividing the propagation loss value X [dB / cm] at a wavelength of 1550 nm by the propagation loss value Y [dB / cm] at a wavelength of 1310 nm. Preferably there is.
  • the core is obtained by curing a composition containing a fluorinated polyarylene prepolymer (A) having a crosslinkable functional group, and the clad is the fluorinated polyarylene prepolymer.
  • A It is preferable that the composition (B) containing a compound having a crosslinkable functional group having a lower refractive index is cured.
  • the composition (B) comprises the fluorine-containing polyarylene prepolymer (A) and a compound (C) having a crosslinkable functional group and having a molecular weight of 140 to 5000 and having no fluorine atom.
  • a compound (C) having a crosslinkable functional group and having a molecular weight of 140 to 5000 and having no fluorine atom are preferably included.
  • the fluorine-containing polyarylene prepolymer (A) preferably has an absorbance at a wavelength of 365 nm at a polymer thickness of 10 mm and a polymer concentration of 100 wt% of 7.5 or less.
  • the polymer optical waveguide of the present invention is preferably a single mode polymer optical waveguide.
  • the polymer optical waveguide of the present invention preferably has a coupling portion where at least a part of the core is exposed on one end side.
  • the present invention also provides a composite optical waveguide having the polymer optical waveguide of the present invention and a connector that accommodates the optical waveguide portion of the polymer optical waveguide.
  • the polymer optical waveguide of the present invention can reduce single-mode propagation loss.
  • FIG. 1 is a perspective view showing one structural example of the polymer optical waveguide of the present invention.
  • FIG. 2 is a perspective view showing an example of a usage pattern of the polymer optical waveguide of FIG.
  • FIG. 3 is a side view of FIG.
  • FIG. 4 is a perspective view showing an example of another usage pattern of the polymer optical waveguide of the present invention.
  • FIG. 5 is a side view of FIG.
  • FIG. 6 is a cross-sectional view of the polymer optical waveguide taken along line AA in FIG.
  • FIG. 7 is a diagram showing another example of the core cross-sectional shape.
  • FIG. 8 is a diagram showing still another example of the core cross-sectional shape.
  • FIG. 1 is a perspective view showing one structural example of the polymer optical waveguide of the present invention.
  • FIG. 2 is a perspective view showing an example of a usage pattern of the polymer optical waveguide of FIG.
  • FIG. 3 is a side view of FIG.
  • FIG. 4 is a perspective
  • FIG. 9 is a graph showing the absorbance of the prepolymer A used in the core material in Examples 1 and 4 near a wavelength of 400 nm.
  • FIG. 10 is a plan view of the polymer optical waveguides of Examples 1 to 4.
  • FIG. 11 is a diagram showing a core cross-sectional shape of Example 1.
  • FIG. 12 is a diagram showing the core cross-sectional shape of Example 2.
  • FIG. 13 is a diagram showing the core cross-sectional shape of Example 3.
  • FIG. 14 is a diagram showing the core cross-sectional shape of Example 4.
  • FIG. 1 is a perspective view showing one structural example of the polymer optical waveguide of the present invention.
  • a polymer optical waveguide 10 shown in FIG. 1 has a core 20 and a clad 30 having a refractive index lower than that of the core 20.
  • the clad 30 includes an under clad 31 disposed below the core 20 and an over clad 32 disposed above the core 20.
  • the polymer optical waveguide 10 has a flat sheet shape and is used as an optical interconnection or an optical waveguide device.
  • the optical interconnection include an intra-chip optical interconnection, an inter-chip optical interconnection, an intra-board optical interconnection (substrate with built-in optical circuit), and an intra-casing optical interconnection (optical backplane).
  • FIG. 2 is a perspective view showing an example of a usage pattern of the polymer optical waveguide 10 of FIG. 1, and FIG. 3 is a side view of FIG.
  • the polymer optical waveguide 10 is turned upside down, and the core exposed portion 40 is located below. 2 and 3, the polymer optical waveguide 10 is adiabatically coupled to the silicon optical waveguide 100 through a core exposed portion provided on one end side. The other end side of the polymer optical waveguide 10 is butt-coupled with the single-mode optical fiber 200 (face-to-face coupling).
  • FIG. 4 is a perspective view showing another example of usage of the polymer optical waveguide of the present invention
  • FIG. 5 is a side view of FIG. 4 and 5
  • a core exposed portion 42 is provided on one end side of the polymer optical waveguide 12, and the polymer optical waveguide 12 and the silicon optical waveguide 100 are adiabatically coupled by the core exposed portion 42.
  • the point is the same as in FIGS.
  • the number of the cores 20 is one for the clad 30, whereas in the polymer optical waveguide 12 shown in FIG. 4, a plurality of cores 22 are arrayed along one direction. A bending region is provided to widen the interval between the cores 22.
  • the other end of the polymer optical waveguide 12 is accommodated in a connector 300 for butt coupling (facing coupling) with a single mode optical fiber or the like.
  • a structure having the polymer optical waveguide 12 and the connector 300 that accommodates the optical waveguide portion of the polymer optical waveguide 12 is referred to as a composite optical waveguide in this specification.
  • the structure at both ends of the polymer optical waveguide can be appropriately selected according to the coupling method when the polymer optical waveguide is used.
  • the coupling method on one end side is an adiabatic coupling and the coupling method on the other end side is a butt coupling (face-to-face coupling)
  • a core is placed on one end side of the polymer optical waveguide.
  • An exposed part is provided.
  • core exposed portions are provided at both ends of the polymer optical waveguide.
  • the coupling method at both ends is a butt coupling (facing coupling)
  • the core exposed portion is not provided in the polymer optical waveguide.
  • the core in the polymer optical waveguide may have various structures (couplers, directional couplers, pitch changers, TO switches, etc.) according to the wiring pattern.
  • FIG. 6 is a cross-sectional view of the polymer optical waveguide cut along line AA in FIG. 1, and is a cross-sectional view of the core 20 in the direction perpendicular to the light propagation direction.
  • the cross-sectional shape of the polymer optical waveguide or the cross-sectional shape of the core or the clad constituting the polymer optical waveguide means the cross-sectional shape in the direction perpendicular to the light propagation direction of the core.
  • the cross-sectional shape of the core 20 is a shape having a recess on the rectangular upper surface.
  • the cross-sectional shape of the core is not limited to this.
  • it may be a trapezoid, a circle, an ellipse, or a shape having a dent in a part of a polygon that is a pentagon or more.
  • the corners may be rounded.
  • the thickness t direction of the sheet shape formed by the polymer optical waveguide 10 is the core height, and the direction perpendicular to the thickness direction (that is, the width w of the sheet shape formed by the polymer optical waveguide 10). (Direction) is the core width, the core height is 1.0 to 10 ⁇ m, and the core width is 1.0 to 15 ⁇ m.
  • the core height and the core width are within the above ranges, propagation loss at a wavelength of 1310 nm and a wavelength of 1550 nm, which are typical as a single mode band, is suppressed.
  • the core height is preferably 1 to 9 ⁇ m, more preferably 1 to 7 ⁇ m, further preferably 1 to 5 ⁇ m, and particularly preferably 1 to 3 ⁇ m.
  • the core width is preferably 1 to 10 ⁇ m, and more preferably 1 to 9.5 ⁇ m.
  • the core width and core height can be specified using a white light interferometer, an optical microscope, a laser microscope, and a scanning electron microscope (SEM). In the case of a core exposed part, it can be specified by directly observing the cross-sectional shape of the core. In the case of a polymer optical waveguide without a core exposed part, the polymer optical waveguide is cut and the cross-sectional shape of the core is observed. Can be specified.
  • the polymer optical waveguide of the present invention may have portions with different core heights as long as the above range is satisfied.
  • the core height may be different between one end and the other end of the polymer optical waveguide.
  • the core height may be different between both ends of the polymer optical waveguide and the intermediate portion in the light propagation direction of the core.
  • the core height may be different between the exposed core portion of the polymer optical waveguide and the other portion.
  • the polymer optical waveguide of the present invention may have a portion having a different core width as long as the above range is satisfied.
  • the core width may be different between one end and the other end of the polymer optical waveguide.
  • the core width may be different between both ends of the polymer optical waveguide and the intermediate portion in the light propagation direction of the core.
  • the core width may be different between the exposed core portion of the polymer optical waveguide and the other portions.
  • the core height and the core width must satisfy the above ranges for all of the plurality of cores.
  • core height and core width may not satisfy
  • the core 20 cross-sectional shape shown in FIG. 6 has a dent 60 on its upper surface.
  • a dent is generated on the upper surface and / or the side surface of the core cross-sectional shape. It has been conventionally considered that the recess of about 1 ⁇ m existing on the upper surface and / or the side surface in the core cross-sectional shape does not cause propagation loss in the polymer optical waveguide.
  • the depressions present on the upper surface and / or the side surface in the cross-sectional shape of the core can cause propagation loss at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode. It has also been found that if there is a recess having a specific depth or more, significant propagation loss occurs at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode.
  • the depth of the dent present on the upper surface and / or the side surface of the core in the core cross-sectional shape is 0.33 ⁇ m or less. That is, when a dent exists on the upper surface of the core, the depth of the dent is 0.33 ⁇ m or less. When a dent exists on the side surface of the core, the depth of the dent is 0.33 ⁇ m or less. When there are dents on the core upper surface and the core side surface, the depths of these dents are each 0.33 ⁇ m or less.
  • the depth of the dent present on the upper surface and / or the side surface of the core is 0.33 ⁇ m or less, the propagation loss is reduced at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode.
  • the case where there is a dent on the upper surface of the core refers to the case where there are at least two convex portions on the upper surface of the core and there are concave portions between the convex portions.
  • FIG. 7 shows another configuration example in which the recess 60 is present on the upper surface of the core.
  • the depth of the dent present on the upper surface of the core can be obtained by the following procedure.
  • FIG. 8 shows an example of a configuration in which a dent exists on the side surface of the core.
  • the depth of the dent existing on the side surface of the core can be obtained by the following procedure.
  • the maximum value of the distance between the tangential profile defined above and the core side surface is defined as the depth of the recess existing on the core side surface.
  • the depth of the dent existing on the upper surface and / or the side surface of the core can be specified by observing the cross-sectional shape of the core in the procedure described above.
  • the cross-sectional shape of the core is observed only at one point in the light propagation direction of the polymer optical waveguide.
  • the depression on the upper surface of the core and / or the side surface of the core occurs when the polymer optical waveguide is manufactured. Therefore, when there is a recess in the core upper surface and / or the core side surface at one place in the light propagation direction of the polymer optical waveguide, the core upper surface and / or the core side surface also in other portions of the polymer optical waveguide. There is a high possibility that a recess having substantially the same depth exists.
  • the depth of the dent present on the upper surface and / or the side surface of the core in the cross-sectional shape of the core is preferably 0.30 ⁇ m or less, more preferably 0.25 ⁇ m or less. It is particularly preferably 15 ⁇ m or less.
  • the depth of the recesses existing on the top surface and / or the side surface of the core is 0.33 ⁇ m or less.
  • the depth of the dent which exists in a core upper surface and / or a core side surface does not need to be 0.33 micrometer or less.
  • the polymer optical waveguide of the present invention has a propagation loss ratio X / Y of 0.2 to 2 obtained by dividing the propagation loss value X [dB / cm] at a wavelength of 1550 nm by the propagation loss value Y [dB / cm] at a wavelength of 1310 nm. Preferably there is. If the transmission loss value X / Y satisfies the above range, the design freedom of the polymer optical waveguide is increased. Further, the productivity of the polymer optical waveguide is increased.
  • polymer optical waveguides of the same design can be used for the propagation of signals in both the 1310 nm and 1550 nm wavelength bands. Further, signals in the 1310 nm and 1550 nm wavelength bands can be propagated in one polymer optical waveguide.
  • the constituent materials of the core and the clad are not particularly limited as long as the refractive index difference is such that the clad refractive index is lower than the core refractive index.
  • acrylic resins methacrylic resins such as polymethyl methacrylate (PMMA), epoxy resins, oxetane resins, phenoxy resins, benzocyclobutene resins, norbornene resins, fluorine resins, silicone resins, phenolic resins Resin, polyester resin, polycarbonate resin, polystyrene resin, polyamide resin, polyimide resin, poly (imide / isoindoloquinazolinedioneimide) resin, polyetherimide resin, polyetherketone resin, polyesterimide resin, etc.
  • fluororesins are suitable as materials for cores and clads because of their low water absorption or moisture absorption, excellent resistance to high temperature and high humidity, and high chemical stability.
  • a polymer optical waveguide using a fluororesin has stable characteristics with a small change in refractive index due to a change in external environment, particularly a change in humidity, and has high transparency in an optical communication wavelength band.
  • the polymer optical waveguide preferably has good heat resistance.
  • the adhesion between the core and the clad is good so that peeling, cracking or the like does not occur at the interface between the core and the clad due to heating, bending, temperature change or the like.
  • the core in the polymer optical waveguide of the present invention may be referred to as a fluorine-containing polyarylene prepolymer (A) (hereinafter, simply referred to as prepolymer (A)). ) Is preferably cured.
  • the clad in the polymer optical waveguide of the present invention is preferably formed by curing a composition (B) containing a compound having a crosslinkable functional group having a refractive index lower than that of the prepolymer (A).
  • the prepolymer (A) has a polyarylene structure in which a plurality of aromatic rings are bonded via a single bond or a linking group, a fluorine atom, and a crosslinkable functional group.
  • the linking group in the polyarylene structure include an ether bond (—O—), a sulfide bond (—S—), a carbonyl group (—CO—), and a divalent group (—SO 2 —) obtained by removing a hydroxyl group from a sulfonic acid group. Etc.
  • a fluorinated polyarylene ether prepolymer (A1) those having a structure in which aromatic rings are bonded with a linking group containing an ether bond (—O—) are referred to as a fluorinated polyarylene ether prepolymer (A1).
  • the prepolymer (A) in the present invention is a concept including a fluorine-containing polyarylene ether prepolymer (A1).
  • Specific examples of the linking group containing an ether bond include an ether bond (—O—) consisting only of an etheric oxygen atom, and an alkylene group containing an etheric oxygen atom in the carbon chain.
  • the crosslinkable functional group of the prepolymer (A) does not substantially react during the production of the prepolymer, reacts by applying external energy, and causes a high molecular weight by crosslinking or chain extension between prepolymer molecules. It is a group. Examples of the external energy include heat, light, and electron beam. These may be used in combination. When heat is used as external energy, a reactive functional group that reacts at a reaction temperature of 40 ° C. to 500 ° C. is preferable. If the reaction temperature is too low, stability during storage of the prepolymer or the composition containing the prepolymer cannot be ensured, and if it is too high, thermal decomposition of the prepolymer itself occurs during the reaction. It is preferable.
  • the reaction temperature is more preferably 60 ° C. to 300 ° C., further preferably 70 ° C. to 200 ° C., and particularly preferably 120 ° C. to 250 ° C.
  • light actinic radiation
  • a coating liquid curable composition
  • a photosensitizer By selectively irradiating only a desired part with actinic radiation in the exposure step, only the exposed part can be made to have a high molecular weight, and the unexposed part can be dissolved in the developer and removed. Further, if necessary, after the exposure and development, external energy such as actinic radiation or heat can be applied to further increase the molecular weight.
  • crosslinkable functional group examples include vinyl group, allyl group, allyloxy group, methacryloyl (oxy) group, acryloyl (oxy) group, vinyloxy group, trifluorovinyl group, trifluorovinyloxy group, ethynyl group, 1- Examples thereof include an oxocyclopenta-2,5-dien-3-yl group, a cyano group, an alkoxysilyl group, a diarylhydroxymethyl group, a hydroxyfluorenyl group, a cyclobutalene ring, and an oxirane ring.
  • Vinyl groups, methacryloyl (oxy) groups, acryloyl (oxy) groups, trifluorovinyloxy groups, ethynyl groups, cyclobutalene rings, and oxirane rings are preferred because of their high reactivity and high crosslink density.
  • a vinyl group and an ethynyl group are the most preferable from the viewpoint of later good heat resistance.
  • the methacryloyl (oxy) group means a methacryloyl group or a methacryloyloxy group. The same applies to the acryloyl (oxy) group.
  • the prepolymer (A) Since the prepolymer (A) has an aromatic ring, the heat resistance is good.
  • the fluorine-containing polyarylene ether prepolymer (A1) has an etheric oxygen atom, so that the molecular structure is flexible and the cured product has good flexibility. This is preferable.
  • the prepolymer (A) has a fluorine atom. That is, since the prepolymer (A) has a C—F bond in which a hydrogen atom of a C—H bond is substituted with a fluorine atom, the proportion of the C—H bond is small.
  • the prepolymer (A) having few C—H bonds can suppress light absorption in the optical communication wavelength band. Further, since the prepolymer (A) has a fluorine atom, the water absorption or hygroscopicity is low, the resistance to high temperature and high humidity is excellent, and the chemical stability is also high. Therefore, the optical waveguide using the prepolymer (A) has small refractive index fluctuation due to changes in the external environment, particularly humidity change, and has stable characteristics, and has high transparency in the optical communication wavelength band.
  • the cured product of the prepolymer (A) has high transparency in the vicinity of a wavelength of 1310 nm, an optical waveguide having good compatibility with existing optical elements can be obtained. That is, in general, in an optical transmission device using a silica-based optical fiber, a wavelength of 1310 nm is often used, so that many optical elements such as a light receiving element suitable for this wavelength are manufactured, and the reliability is high. .
  • Examples of preferred prepolymer (A) include fluorine-containing aromatic compounds such as perfluoro (1,3,5-triphenylbenzene) and perfluorobiphenyl; 1,3,5-trihydroxybenzene, 1,1,1 Reacting a phenolic compound such as tris (4-hydroxyphenyl) ethane with a crosslinkable compound such as pentafluorostyrene, acetoxystyrene or chloromethylstyrene in the presence of a dehydrohalogenating agent such as potassium carbonate; Examples include the resulting polymer.
  • fluorine-containing aromatic compounds such as perfluoro (1,3,5-triphenylbenzene) and perfluorobiphenyl
  • 1,3,5-trihydroxybenzene 1,1,1 Reacting a phenolic compound such as tris (4-hydroxyphenyl) ethane with a crosslinkable compound such as pentafluorostyrene, acetoxystyrene or chloromethyls
  • the content of the crosslinkable functional group in the prepolymer (A) is preferably 0.1 to 4 mmol, more preferably 0.2 to 3 mmol with respect to 1 g of the prepolymer.
  • the prepolymer (A) preferably has an absorbance of 7.5 or less at a wavelength of 365 nm at a polymer thickness of 10 mm and a polymer concentration of 100 wt%.
  • the absorbance at a polymer concentration of 100 wt% refers to an actually measured value of absorbance at 100 wt% polymer or an assumed value of absorbance at 100 wt% polymer.
  • a photolithography process may be used when forming the core of the polymer optical waveguide during the production of the polymer optical waveguide. For exposure in this photolithography process, i-line having a wavelength of 365 nm is usually used.
  • the prepolymer (A) When the absorbance at a wavelength of 365 nm is high, the prepolymer (A) absorbs i-line during exposure in the photolithography process, and there is a possibility that a dent will be formed in the formed core. If the prepolymer (A) has a polymer thickness of 10 mm, a polymer concentration of 100 wt% and an absorbance at a wavelength of 365 nm of 7.5 nm or less, the prepolymer (A) is less likely to be dented. As a result, propagation loss is reduced at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode.
  • the prepolymer (A) preferably has an absorbance at a wavelength of 365 nm at a polymer thickness of 10 mm and a polymer concentration of 100 wt% of 7.5 or less, more preferably 6.5 or less, and 6.0 or less. Is more preferable and 5.5 or less is particularly preferable.
  • the prepolymer (A) preferably has an absorbance peak value of 0.045 or less at a wavelength of 1400 nm to 1460 nm at a polymer thickness of 10 mm and a polymer concentration of 100 wt%.
  • the prepolymer (A) contains moisture, in the core formed using the prepolymer (A), propagation loss may occur at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode.
  • absorption at a wavelength of 1400 nm to 1460 nm increases.
  • the prepolymer (A) contains very little water, and the prepolymer (A) is used.
  • propagation loss is reduced at 1310 nm and 1550 nm, which are typical wavelength bands in the single mode.
  • composition (B) The composition (B) preferably contains a prepolymer (A) and a compound (C) having a crosslinkable functional group and having a molecular weight of 140 to 5000 and having no fluorine atom.
  • the prepolymer (A) contained in the composition (B) may be the same or different from the prepolymer (A) used for forming the core. The same is preferable from the viewpoint of adhesiveness, adhesion, crack suppression, or reduction in expansion coefficient difference.
  • the compound (C) has a molecular weight of 140 to 5000, has a crosslinkable functional group, and does not have a fluorine atom. Since there are no fluorine atoms, good embedding flatness is easily obtained. If the embedded flatness is good, the surface of the clad tends to be flat. Further, the cost is likely to be lower than that of the fluorine-containing compound.
  • the molecular weight of the compound (C) is 5000 or less, the viscosity of the compound (C) is suppressed low, and a uniform composition is easily obtained when mixed with the prepolymer (A). Also, good flatness can be easily obtained.
  • the molecular weight of the compound (C) is 140 or more, good heat resistance is obtained, and decomposition and volatilization due to heating hardly occur.
  • the molecular weight range of the compound (C) is preferably 250 to 3000, particularly preferably 250 to 2500.
  • the crosslinkable functional group of the compound (C) does not contain a fluorine atom, and a reactive functional group that reacts in the same step as the step of reacting the crosslinkable functional group of the prepolymer (A) is preferable.
  • the crosslinkable functional group of compound (C) reacts with at least compound (C) to cause crosslinking or chain extension. It is preferable that the crosslinkable functional group of the compound (C) reacts with both the prepolymer (A) and the compound (C) to cause crosslinking or chain extension.
  • the crosslinkable functional group of the compound (C) is preferably a double bond or triple bond at a carbon atom-carbon atom. However, aromatic double bonds and triple bonds are not included.
  • the double bond and triple bond as the crosslinkable functional group may exist inside the molecular chain or may exist at the terminal, but preferably exist at the terminal because of high reactivity. In the case of a double bond, it may be an internal olefin or a terminal olefin, but a terminal olefin is preferred.
  • Being inside a molecular chain includes being present in a part of an aliphatic ring such as cycloolefins.
  • a vinyl group an allyl group, an ethynyl group, a vinyloxy group, an allyloxy group, an acryloyl group, an acryloyloxy group, a methacryloyl group, and a methacryloyloxy group.
  • an acryloyl group and an acryloyloxy group are preferable in that a reaction is caused by light irradiation even in the absence of a photosensitizer.
  • the compound (C) preferably has 2 or more crosslinkable functional groups, more preferably 2 to 20, more preferably 2 to 8.
  • crosslinkable functional groups more preferably 2 to 20, more preferably 2 to 8.
  • the molecules can be cross-linked, so that the heat resistance of the cured film can be improved, and the film thickness reduction due to heating in the cured film can be satisfactorily suppressed.
  • the compound (C) include dipentaerythritol triacrylate triundecylate, dipentaerythritol pentaacrylate monoundecylate, ethoxylated isocyanuric acid triacrylate, ⁇ -caprolactone modified tris- (2-acryloxyethyl) Isocyanurate, dipentaerythritol polyacrylate, 9,9-bis [4- (2-acryloyloxyethoxy) phenyl] fluorene, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, polypropylene glycol diacrylate, polypropylene glycol dimethacrylate, ethoxylation Bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, propoxylated bisphenol A diacrylate Propoxylated bisphenol A dimethacrylate, 1,10-decanediol diacrylate, 1,6-hexanediol diacrylate, 1,6-
  • polyester acrylate (compound obtained by modifying both ends of the condensate of dihydric alcohol and dibasic acid with acrylic acid: manufactured by Toagosei Co., Ltd., trade name Aronix (M-6100, M-6200, M-6250, M-6500) ); Compound obtained by modifying the hydroxyl terminal of the condensate of polyhydric alcohol and polybasic acid with acrylic acid: manufactured by Toagosei Co., Ltd., trade name Aronix (M-7100, M-7300K, M-8030, M-8060, M -8100, M-8530, M-8560, M-9050)) can also be used. These can be obtained from commercial products. Among those listed above, polypropylene glycol dimethacrylate and 1,10-decanediol diacrylate are preferable because of good moldability of the cured film.
  • the clad constituent material needs to have a lower refractive index than the core constituent material.
  • the core constituent material is a prepolymer (A) and the clad constituent material is a polymer composition including the prepolymer (A) and the compound (C)
  • the polymer is more preferable than the cured product of the prepolymer (A). What is necessary is just to adjust the mixing ratio of the kind of compound (C) and the prepolymer (A) in a polymer composition, and a compound (C) so that the refractive index of the hardened
  • the refractive index of the cured product was obtained by curing the prepolymer (A) alone.
  • the refractive index of the cladding can be made lower than the refractive index of the core.
  • the under clad 31 and the over clad 32 may be made of the same material or different materials.
  • the light confinement state in the polymer optical waveguide 10 can be controlled.
  • the method for producing the polymer optical waveguide of the present invention is not particularly limited, and various methods can be used. Specifically, replication (stamper) method, direct exposure method, method combining reactive ion etching (RIE) and photolithography process, method based on injection molding, photo bleaching method, direct drawing method, self-formation The law etc. can be used.
  • a coating solution containing the composition (B) is applied on a substrate by spin coating. Subsequently, the composition (B) is cured to form the underclad 31. Next, a coating solution containing the prepolymer (A) is applied on the underclad 31 by spin coating. Subsequently, the prepolymer (A) is patterned by a photolithography process, and the core 20 is formed on the underclad 31.
  • the core 20 can be formed. Moreover, after forming the core 20, you may post-bake as needed. Next, the coating liquid containing the composition (B) is applied onto the underclad 31 and the core 20 by spin coating. Subsequently, the composition (B) is cured to form the overclad 32. When the over clad 32 is formed, the exposed core portion 40 where the over clad 32 does not exist and the core 20 is exposed can be formed by a photolithography process.
  • the polymer optical waveguide 10 can be manufactured by the above method.
  • coating the coating liquid containing a composition (B) or the coating liquid containing a prepolymer (A) should be left still and defoamed and then applied. preferable.
  • the polymer optical waveguide 10 in which no bubble defect exists in the core 20 or in the vicinity of the interface between the core 20 and the clad 30 can be manufactured.
  • the substrate it is preferable to clean the substrate before applying the coating solution. Thereby, the foreign material on the surface of the substrate can be removed.
  • these operations are preferably performed in a clean room, and in order to prevent foreign matter from adhering to static electricity, it is more preferable to use an electrostatic remover (ionizer).
  • Examples 1 to 3 are Examples
  • Example 4 is a Comparative Example.
  • the prepolymer (A) used for forming the core was prepared by the following procedure.
  • a N, N-dimethylacetamide (hereinafter referred to as DMAc) solvent perfluorobiphenyl (67% by mass) and 1,3,5-trihydroxybenzene (12% by mass) in the presence of potassium carbonate are added to 35 to 35%.
  • DMAc N, N-dimethylacetamide
  • 4-acetoxystyrene (21% by mass) was subsequently reacted in the presence of an aqueous potassium hydroxide solution to synthesize a prepolymer.
  • the obtained DMAc solution of the prepolymer was poured into an aqueous hydrochloric acid solution for reprecipitation purification and vacuum dried to obtain a powdery prepolymer (A).
  • the light absorbency in wavelength 365nm was measured in the following procedures. It was measured with a spectrophotometer (manufactured by Shimadzu Corporation, product type: SolidSpec3700DUV). Using a quartz cell with an optical path length of 10 mm, the absorbance of three or more solutions with a prepolymer (A) concentration stepwise changed from 10 wt% to 40 wt% is measured, and the value at the time of 100% extrapolation is converted to the least square method. And approximated.
  • the measurement wavelength range was 300 to 2500 nm, the scan speed was medium, and the sampling pitch was 5 nm.
  • the detector unit measured by direct light reception. Deuterated chloroform was used as the solvent.
  • the absorbance of the prepolymer (A) is determined by subtracting the solvent absorption as a baseline.
  • FIG. 9 shows the absorbance of the prepolymer (A) obtained by the above procedure in the vicinity of a wavelength of 400 nm. Absorbance at a wavelength of 365 nm (polymer thickness: 10 mm, concentration: 100% equivalent) was 3.98. The absorbance peak value at a wavelength of 1400 nm to 1460 nm (polymer thickness 10 mm, concentration 100% conversion) was determined by the above procedure. The absorbance peak value at a wavelength of 1400 nm to 1460 nm (polymer thickness 10 mm, concentration 100% conversion) was 0.06.
  • a composition (B) used for forming the clad was prepared by the following procedure. 50 parts by mass of the prepolymer (A) obtained by the above procedure, 25 parts by mass of 1,10-decanediol diacrylate (molecular weight: 282) as the compound (C), 25 parts by mass of polypropylene glycol dimethacrylate, was put in a container and mixed at room temperature for 55 hours to obtain a composition (B).
  • a polymer optical waveguide was produced by the following procedure.
  • a silicon wafer was used as the substrate.
  • the composition (B) was applied onto the substrate by spin coating, and heated at 190 ° C. for 1 hour to form an underclad.
  • a prepolymer (A) is applied thereon, and the coating film is exposed with an ultrahigh pressure mercury lamp at an irradiation energy of 2000 mJ / cm 2 in a state where light is shielded with a metal foil except for the core portion of the coating film. did.
  • FIG. 10 is a plan view of the polymer optical waveguide obtained by the above procedure.
  • reference numeral 120 denotes a core
  • reference numeral 132 denotes a clad (over clad).
  • the symbol a is a core in a region where no overcladding exists. In Examples 1 to 4, the core was observed at the position of the symbol a.
  • Reference numeral b denotes an overclad in which the optical measurement core on the input side exists below
  • reference numeral c denotes an overclad in which the optical measurement core on the output side exists below.
  • the core exposed portion (input side) indicated by symbol a has a core height of 2.5 ⁇ m and a core width of 7.5 ⁇ m.
  • the core for optical measurement (input side) indicated by symbol b has a core height of 2.5 ⁇ m and a core width of 2.5 ⁇ m.
  • the core for optical measurement (output side) indicated by symbol c has a core height of 2.5 ⁇ m and a core width of 2.5 ⁇ m.
  • the thickness of the underclad is 25 ⁇ m, and the thickness of the overclad is 25 ⁇ m.
  • the cross-sectional shape of the core was measured at a point of about 1300 ⁇ m from the input side end portion.
  • a white interferometer manufactured by ZYGO, product type: three-dimensional optical profiler system Newview 7300 was used to measure the cross-sectional shape of the core. The objective lens used 50 times.
  • plot data of the core shape with a white interferometer create data with the undercladding part corrected horizontally, and draw a baseline at the height of the undercladding part at a distance of 25 ⁇ m on both sides from the core center. Using the baseline as the origin, the highest value of the core protrusions was defined as the core height.
  • FIG. 11 is a diagram showing a core cross-sectional shape in the core exposed portion. As shown in the figure, a recess is present on the upper surface of the core. When a tangent line is drawn between two adjacent convex portions existing on the core upper surface, the maximum height difference in the core thickness direction between the tangent line and the concave portion located between the two convex portions exists on the core upper surface. The depth of the dent to be. The depth of the dent existing on the upper surface of the core was 0.07 ⁇ m.
  • Propagation loss measurement was performed using the optical measurement core (input side) indicated by symbol b and the optical measurement core indicated by symbol c (output side).
  • the propagation loss measurement was performed using the method described in the JPCA standard (2008) 4.6.2.1 cutback method.
  • the mode combination of the incident side optical fiber and the optical waveguide is a combination corresponding to the combination number 6 described in the JPCA standard, Table 4.6.1-1.
  • a mode fiber was used.
  • the fiber used for the insertion loss measurement was a single mode fiber (manufactured by Corning, product number: SMF-28, NA 0.14, core diameter 8.2 um) on both the incident side and the outgoing side.
  • a unit (product name: AQ2140, manufactured by Ando Electric Co., Ltd.) having an LD light source (product name: AQ4213) was used.
  • a power meter manufactured by Advantest, product name: Q8221 unit
  • a sensor unit manufactured by Advantest, product name: Q82208
  • the propagation loss value X at a wavelength of 1550 nm was 0.32 [dB / cm]
  • the propagation loss value Y at a wavelength of 1310 nm was 0.61 [dB / cm]
  • the propagation loss ratio X / Y was 0.52.
  • Example 2 In the polymer optical waveguide shown in FIG. 10, the core exposed portion (input side) indicated by symbol a has a core height of 2.5 ⁇ m, a core width of 9.3 ⁇ m, and optical measurement indicated by symbol b in the polymer optical waveguide shown in FIG. Core (input side) is 2.5 ⁇ m in core height and 2.5 ⁇ m in core width, and the core for optical measurement (output side) indicated by symbol c is 2.5 ⁇ m in core height, 2.5 ⁇ m in core width, and under cladding
  • the same procedure as in Example 1 was performed except that the thickness of the overcladding was 25 ⁇ m and the thickness of the overclad was 25 ⁇ m.
  • FIG. 12 is a diagram showing a core cross-sectional shape in the core exposed portion. As shown in the figure, a recess is present on the upper surface of the core. The depth of the recess existing on the upper surface of the core was 0.15 ⁇ m.
  • Propagation loss measurement was performed in the same procedure as in Example 1 using the optical measurement core (input side) indicated by symbol b and the optical measurement core (output side) indicated by symbol c.
  • the propagation loss value X at 1550 nm was 0.29 [dB / cm]
  • the propagation loss value Y at 1310 nm was 0.61 [dB / cm]
  • the propagation loss ratio X / Y was 0.47.
  • the heat resistance of the polymer optical waveguide obtained in Example 2 was evaluated by the following three methods.
  • the measurement apparatus, measurement procedure, measurement conditions, and the like were performed under the same conditions as the above-described propagation loss measurement.
  • the measurement result of the insertion loss was within the range of measurement error before and after the temperature cycle test, and the change in insertion loss before and after the temperature cycle test was 0.1 dB or less.
  • Heat resistance (high temperature storage test) A high temperature storage test described in the JPCA standard (2008), 6.2.1 was performed to evaluate heat resistance. Assuming that the optical waveguide is soldered, it is preferable that the optical waveguide is stable against heating at 200 ° C. or higher. In this test, the sample was placed in an oven, heated from room temperature to 260 ° C. over 5 minutes, held at 260 ° C. for 30 seconds, and then allowed to stand naturally until the temperature reached room temperature. In the evaluation, the difference in insertion loss was measured before and after being put into the oven. The difference in insertion loss was as small as 0.1 dB or less, and the heat resistance was good.
  • Heat resistance high temperature and high humidity storage test
  • the test condition was “Test condition 3”. That is, in this test, after being put in a high temperature and high humidity condition of 85 ° C. and 85% RH for 140 hours, it was allowed to stand until the temperature naturally reached room temperature. The difference in insertion loss before and after charging under high temperature and high humidity conditions was measured. As a result, the change in insertion loss due to being held under high temperature and high humidity conditions was 0.2 dB or less.
  • Prepolymer A used for core formation was prepared by the following procedure.
  • DMAc N-dimethylacetamide
  • perfluorobiphenyl 67% by mass
  • 1,3,5-trihydroxybenzene 12% by mass
  • potassium carbonate a solvent of N
  • 4-acetoxystyrene 21% by mass was subsequently reacted in the presence of an aqueous potassium hydroxide solution to synthesize a prepolymer.
  • the obtained DMAc solution of the prepolymer was poured into an aqueous hydrochloric acid solution for reprecipitation purification and vacuum dried to obtain a powdery prepolymer A.
  • the absorbance at a wavelength of 365 nm (polymer thickness: 10 mm, converted to 100% concentration) is 4.86
  • the absorbance peak value at a wavelength of 1400 nm to 1460 nm (polymer thickness: 10 mm, converted to 100% concentration) is 0.12.
  • the same procedure as in Example 1 was carried out except that it was used.
  • the core exposed portion (input side) indicated by symbol a is 2.5 ⁇ m in core height
  • the core width is 7.4 ⁇ m
  • the optical measurement core indicated by symbol b (input side) is the core height.
  • the thickness is 2.5 ⁇ m and the core width is 2.5 ⁇ m.
  • the core for optical measurement (output side) indicated by symbol c has a core height of 2.5 ⁇ m, a core width of 2.5 ⁇ m, an underclad thickness of 25 ⁇ m, and an overclad thickness of 25 ⁇ m.
  • the cross-sectional shape of the core was measured in the same procedure as in Example 1 at a point of about 1300 ⁇ m from the input side end.
  • FIG. 13 is a diagram showing a core cross-sectional shape in the core exposed portion. As shown in the figure, a recess is present on the upper surface of the core. The depth of the dent existing on the upper surface of the core was 0.13 ⁇ m.
  • Propagation loss measurement was performed in the same procedure as in Example 1 using the optical measurement core (input side) indicated by symbol b and the optical measurement core (output side) indicated by symbol c.
  • the propagation loss value X at 1550 nm was 0.40 [dB / cm]
  • the propagation loss value Y at 1310 nm was 0.61 [dB / cm]
  • the propagation loss ratio X / Y was 0.66.
  • Prepolymer A used for core formation was prepared by the following procedure.
  • DMAc N-dimethylacetamide
  • perfluorobiphenyl 67% by mass
  • 1,3,5-trihydroxybenzene 12% by mass
  • potassium carbonate a solvent of N
  • 4-acetoxystyrene 21% by mass was subsequently reacted in the presence of an aqueous potassium hydroxide solution to synthesize a prepolymer.
  • Prepolymer A having an absorbance at a wavelength of 365 nm (polymer thickness of 10 mm, converted to 100% concentration) of 7.9, and an absorbance peak value at a wavelength of 1400 nm to 1460 nm (polymer thickness of 10 mm, converted to a concentration of 100%) of 0.26
  • the exposed core portion (input side) indicated by reference symbol a has a core height of 2.5 ⁇ m, a core width of 9.4 ⁇ m, and reference symbol b. 1.
  • An optical measurement core (input side) shown in FIG. 2 has a core height of 2.5 ⁇ m and a core width of 2.5 ⁇ m
  • an optical measurement core shown by reference c (output side) has a core height of 2.5 ⁇ m, and a core width of 2.
  • the same procedure as in Example 1 was performed except that the thickness was 5 ⁇ m.
  • FIG. 9 shows the absorbance of the prepolymer (A) used in Example 4 around a wavelength of 400 nm.
  • the cross-sectional shape of the core was measured in the same procedure as in Example 1 at a point of about 1300 ⁇ m from the input side end.
  • FIG. 14 is a diagram showing a core cross-sectional shape in the core exposed portion.
  • a recess is present on the upper surface of the core.
  • the depth of the dent existing on the upper surface of the core was 0.36 ⁇ m.
  • Propagation loss measurement was performed in the same procedure as in Example 1 using the optical measurement core (input side) indicated by symbol b and the optical measurement core (output side) indicated by symbol c.
  • the propagation loss value X at 1550 nm was 0.69 [dB / cm]
  • the propagation loss value Y at 1310 nm was 0.82 [dB / cm]
  • the propagation loss ratio X / Y was 0.83.
  • Examples 1 to 3 in which the depth of the dent existing on the upper surface of the core is 0.33 ⁇ m or less, are representative of wavelength bands in the single mode compared to Example 4 in which the depth of the dent existing on the upper surface of the core is greater than 0.33 ⁇ m.
  • Propagation losses X and Y at 1310 nm and 1550 nm are reduced.
  • the propagation loss ratio X / Y is in the range of 0.2 to 2, the design freedom of the polymer optical waveguide is high, and the productivity of the polymer optical waveguide is high.
  • Example 4 since the prepolymer A used for core formation had an absorbance at a wavelength of 365 nm (concentration of 100%) of 7.5 or less, 1310 nm, which is a typical wavelength band in a single mode, And propagation losses X and Y at 1550 nm are reduced. Moreover, it is estimated that it has influenced that the depth of the dent which exists in a core upper surface is 0.33 micrometer or less.
  • Example 4 as the prepolymer A used for core formation, one having an absorbance at a wavelength of 365 nm (polymer thickness 10 mm, concentration 100% equivalent) of more than 7.5 is representative of the wavelength band in the single mode. The propagation losses X and Y at the typical 1310 nm and 1550 nm are increased. Further, it is assumed that the depth of the dent existing on the upper surface of the core is affected by being over 0.33 ⁇ m.

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Abstract

La présente invention concerne un guide d'ondes optiques en polymère qui comprend un centre et un revêtement qui a un indice de réfraction inférieur à celui du centre, et qui est caractérisé comme suit : le guide d'ondes optiques en polymère a une forme de feuille; si la direction de l'épaisseur de la forme de feuille est considérée comme la hauteur de centre et une direction perpendiculaire à la direction de l'épaisseur est considérée comme la largeur de centre dans une section transversale du centre dans une direction perpendiculaire à la direction de propagation de la lumière, la hauteur de centre est de 0,5 à 10 µm et la largeur de centre est de 0,5 à 15 µm; et la profondeur d'un creux qui est présent dans la surface supérieure de centre et/ou la surface latérale de centre de la section transversale du centre est inférieure ou égale à 0,33 µm.
PCT/JP2018/009533 2017-03-15 2018-03-12 Guide d'ondes optiques en polymère Ceased WO2018168783A1 (fr)

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JPWO2020226120A1 (fr) * 2019-05-09 2020-11-12
JP2021134250A (ja) * 2020-02-25 2021-09-13 Ａｇｃ株式会社 硬化性樹脂組成物、ポリマー光導波路、ポリマー光導波路の製造方法
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JPWO2020226120A1 (fr) * 2019-05-09 2020-11-12
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JP2023124451A (ja) * 2022-02-25 2023-09-06 国立大学法人福井大学 光合波器及びその製造方法

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