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WO2018163101A8 - Microfluidic sensor and method for obtaining such a sensor - Google Patents

Microfluidic sensor and method for obtaining such a sensor Download PDF

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Publication number
WO2018163101A8
WO2018163101A8 PCT/IB2018/051517 IB2018051517W WO2018163101A8 WO 2018163101 A8 WO2018163101 A8 WO 2018163101A8 IB 2018051517 W IB2018051517 W IB 2018051517W WO 2018163101 A8 WO2018163101 A8 WO 2018163101A8
Authority
WO
WIPO (PCT)
Prior art keywords
microfluidic
dry film
film resist
microelectronic
pcb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2018/051517
Other languages
French (fr)
Other versions
WO2018163101A1 (en
Inventor
David Vincent BONZON
Marc Lany
Georges Henri MULLER
Philippe Renaud
Luc AEBERLI
Niklas VAN NEYGHEM
Thomas Braschler
Jonas CHOPPE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Polytechnique Federale de Lausanne EPFL
Original Assignee
Ecole Polytechnique Federale de Lausanne EPFL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytechnique Federale de Lausanne EPFL filed Critical Ecole Polytechnique Federale de Lausanne EPFL
Priority to EP18718502.0A priority Critical patent/EP3592695A1/en
Publication of WO2018163101A1 publication Critical patent/WO2018163101A1/en
Anticipated expiration legal-status Critical
Publication of WO2018163101A8 publication Critical patent/WO2018163101A8/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention describes a method for producing hybrid microelectronic/microfluidic sensors at industrial scale. The method is characterized in that it comprises the following steps for obtaining said microfluidic channel: a) a first lamination step of a dry film resist onto a PCB panel; b) a photostructuration step of the dry film resist on the PCB panel; and c) a closure step of the photostructured dry film resist to obtain the microfluidic channel. The method adapts standard PCB manufacturing processes used at industrial level by repeating some of the passages thereof, in order to produce microfluidic channels built-in with the microelectronic components in the form of a photostructured dry film resist laminated on a previously obtained PCB panel. The microchannels are moreover simply integrated in the final sensors via standardized design rules and tools used in industrial PCB manufacturing. Microelectronic/microfluidic sensors obtainable by the presently invented method are also herein disclosed.
PCT/IB2018/051517 2017-03-09 2018-03-08 Microfluidic sensor and method for obtaining such a sensor Ceased WO2018163101A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP18718502.0A EP3592695A1 (en) 2017-03-09 2018-03-08 Microfluidic sensor and method for obtaining such a sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IBPCT/IB2017/051385 2017-03-09
IB2017051385 2017-03-09

Publications (2)

Publication Number Publication Date
WO2018163101A1 WO2018163101A1 (en) 2018-09-13
WO2018163101A8 true WO2018163101A8 (en) 2019-11-14

Family

ID=62002689

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2018/051517 Ceased WO2018163101A1 (en) 2017-03-09 2018-03-08 Microfluidic sensor and method for obtaining such a sensor

Country Status (2)

Country Link
EP (1) EP3592695A1 (en)
WO (1) WO2018163101A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12032286B2 (en) 2019-06-17 2024-07-09 Asahi Kasei Kabushiki Kaisha Method for producing multi-layered type microchannel device using photosensitive resin laminate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2656508A (en) 1949-08-27 1953-10-20 Wallace H Coulter Means for counting particles suspended in a fluid
US20060006141A1 (en) * 2001-11-16 2006-01-12 Stefan Ufer Biomedical electrochemical sensor array and method of fabrication
EP1984723B1 (en) 2006-02-01 2019-05-15 Ecole Polytechnique Federale de Lausanne (EPFL) Impedance measurement device for characterizing particles in a micro channel
EP2265923A4 (en) 2008-04-07 2016-05-04 El Spectra Llc Method for manufacturing a microfluidic sensor

Also Published As

Publication number Publication date
EP3592695A1 (en) 2020-01-15
WO2018163101A1 (en) 2018-09-13

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