WO2018038334A1 - Tilting stage system - Google Patents

Abstract

Disclosed is a tilting stage system. The present invention comprises: a first support unit; a second support unit which is arranged to be spaced apart from the first support unit; a moving unit which is arranged between the first support unit and the second support unit so as to be movable; a mounting stage which is arranged within the second support unit and is connected to the moving unit to be rotatable; a driving unit which is connected to the moving unit and moves the moving unit in a first direction; a first tilting operation unit which is installed on the moving unit and loads a first portion of the mounting stage, which is eccentric from the center of the mounting stage, to the first direction; and a second tilting operation unit which is installed on the moving unit so as to form a predetermined angle with respect to the first tilting operation unit and loads a second portion of the mounting stage, which is eccentric from the center of the mounting stage, to the first direction.

Description

Tilting stage system

The present invention relates to an apparatus and, more particularly, to a tilting stage system.

Tilting stage systems can be installed in a variety of industrial equipment. For example, the tilting stage system may be used in die-bonder equipment, flip-chip mounter equipment, flip chip bonder equipment, fan-out wafer level packaging equipment, CVD, exposure equipment, and other pre-process equipment.

These teaching stage systems can be divided into two types of chucks: vacuum chucks using vacuum and electrostatic chucks, and metal chucks using aluminum and steel and ceramic chucks using ceramics. have. Ceramics are mainly used alumina porous ceramics, aluminum nitride ceramics (AlN), Si / SiC ceramics.

In the case of such a chuck stage may include a heating function, in this case by using a ceramic to minimize the thermal deformation. The reason is that the deformation due to heat does not satisfy the specifications given in the manufacturing process, such as the floor plan of the stage, or it acts as a defect in the product itself.

In the case of precision equipment, the mechanical properties of the tilting stage system, such as flatness, straightness, parallelism, tilt, and deformation of the chuck, are directly linked to high productivity and high precision, so that the set values are continuously corrected during plant construction or initial plant setup. It is important to maintain quality

Such a tilting stage system is specifically disclosed in Korean Patent Application Publication No. 2016-0011354 (name of the invention: a stage leveling device, Applicant: Semes Corporation).

Embodiments of the present invention seek to provide a tilting stage system.

According to an aspect of the present invention, a first support part, a second support part disposed to be spaced apart from the first support part, a moving part disposed to be movable between the first support part and the second support part, and the second support part It is disposed in the interior of the mounting stage is rotatably connected to the moving part in the center, the driving part connected to the moving part to move the moving part in the first direction, and installed in the moving part is the center of the mounting stage A first tilting driving part for biasing the seating stage first portion eccentric from the first direction, and the moving part installed to form a predetermined angle with the first tilting driving part, and eccentric from a center of the seating stage A tilting stage system may include a second tilting driver configured to force the seating stage second portion in the first direction.

Embodiments of the present invention can adjust the balance of the mounting stage through a simple structure by having a mounting stage rotated to one center.

In addition, embodiments of the present invention can stably fix the member by sensing the tilting degree of the seating stage in real time, it is possible to improve the precision of the system.

1 is a perspective view showing a tilting stage system according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating the first support part and the driving part illustrated in FIG. 1.

3 is a front view illustrating the first support part and the driving part illustrated in FIG. 2.

4 is a perspective view illustrating a moving part, a first tilting driver, a second tilting driver, a first stopper part, and a second stopper part shown in FIG. 1.

FIG. 5 is a perspective view illustrating the first tilting driver illustrated in FIG. 4.

FIG. 6 is a perspective view illustrating a first stopper unit illustrated in FIG. 4.

7 is a perspective view showing the mounting stage shown in FIG.

FIG. 8 is a cross-sectional view illustrating a seating stage illustrated in FIG. 7.

According to an aspect of the present invention, a first support part, a second support part disposed to be spaced apart from the first support part, a moving part disposed to be movable between the first support part and the second support part, and the second support part It is disposed in the interior of the mounting stage is rotatably connected to the moving part in the center, the driving part connected to the moving part to move the moving part in the first direction, and installed in the moving part is the center of the mounting stage A first tilting driving part for biasing the seating stage first portion eccentric from the first direction, and the moving part installed to form a predetermined angle with the first tilting driving part, and eccentric from a center of the seating stage A tilting stage system may include a second tilting driver configured to force the seating stage second portion in the first direction.

The apparatus may further include a first tilting sensing unit installed on the first tilting driving unit to measure an amount of movement of the first portion in the first direction.

In addition, the first tilting driver may tilt the seating stage based on the value measured by the first tilting sensor.

The display device may further include a second tilting detection part installed on the second tilting driving part to measure an amount of movement of the second part in the second direction.

In addition, the second tilting driver may operate to tilt the seating stage based on the value measured by the second tilting sensing unit.

The apparatus may further include a first stopper part disposed in the moving part so as to face the first tilting driving part.

The first stopper part may include a first stopper driver, a first stopper coupling connected to the first stopper driver, and a first stopper eccentric cam connected to the first stopper coupling to be eccentric.

The first stopper part may further include a first stopper brake connected to the first stopper eccentric cam.

The first stopper part may further include a first stopper cam follower guide part installed in the moving part.

The moving part may include a first stopper cam follower in contact with the first stopper part.

The apparatus may further include a second stopper part disposed in the moving part so as to face the second tilting driving part.

The second stopper part may include a second stopper driver, a second stopper coupling connected to the second stopper driver, and a second stopper eccentric cam connected to the second stopper coupling to be eccentric.

The second stopper part may further include a second stopper brake connected to the second stopper eccentric cam.

The second stopper part may further include a second stopper cam follower guide part installed in the moving part.

The moving part may include a first stopper cam follower in contact with the first stopper part.

In addition, the mobile unit may further include an elastic unit disposed between the seating stage.

The first tilting driving unit may include a first tilting power generating unit, a first tilting coupling connected to the first tilting power generating unit, and a first tilting cam connected to the first tilting coupling. Can be.

The first tilting driving part may include a first tilting cam adjusting part connected to the first tilting cam.

The second tilting driving unit may include a second tilting power generating unit, a second tilting coupling connected to the second tilting power generating unit, and a second tilting cam connected to the second tilting coupling. Can be.

The second tilting driving part may include a second tilting cam adjusting part connected to the second tilting cam.

The invention will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention, and the general knowledge in the art to which the present invention pertains. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Meanwhile, the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions. Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are only used to distinguish one component from another.

1 is a perspective view showing a tilting stage system according to an embodiment of the present invention.

Referring to FIG. 1, the tilting stage system 100 includes a first support part 111, a second support part 112, a moving part 120, a driving part 130, a seating stage 140, and a first tilting driving part 150a. ), The second tilting drive (not shown), the first stopper (not shown), the second stopper (160b), the first tilting detection (not shown), the second tilting detection (not shown), the elastic portion (Not shown), the sensor unit 182 and the lift unit 190 may be included.

The first support 111 may support the entire tilting stage system 100. The second support part 112 may be disposed to be spaced apart from the first support part 111. In this case, a lifting linear guide 113 for guiding the moving part 120 when the moving part 120 moves may be disposed between the first support part 111 and the second support part 112.

The second support part 112 may have a hole formed in the center portion thereof. In this case, the seating stage 140 may be disposed in the hole of the second support part 112. The sensor unit 182 may be disposed on the second support part 112. In this case, the sensor unit 182 may detect a component attached to a head unit (not shown) disposed on the seating stage 140 or a wafer supplied from the outside and disposed on the seating stage 140.

Hereinafter, the first support part 111 and the driver 130 will be described in detail.

FIG. 2 is a perspective view illustrating a first support part, a driving part, and a lift part shown in FIG. 1. FIG. 3 is a front view illustrating the first support part, the driving part, and the lift part shown in FIG. 2.

2 and 3, the first support part 111 may be formed in a plate shape. The first support part 111 may be installed in an external device or the like.

The driver 130 may be installed on the first support part 111. In this case, the driving unit 130 may be connected to the moving unit 120 to linearly move the moving unit 120 in a first direction (eg, Z direction of FIG. 2). In particular, the driving unit 130 may reciprocate the moving unit 120 in the first direction.

The driving unit 130 may include a power generation unit 131, a linear guide unit 132, a first moving block 133, a connection bracket 134, a second moving block 135, and a lifting block 136. Can be. The power generation unit 131 may include a motor or a cylinder. Hereinafter, for convenience of description, the power generating unit 131 will be described in detail with reference to the case of a motor.

The linear guide unit 132 may guide the movement of the first moving block 133 is seated on the first moving block 133. In this case, the linear guide part 132 may be formed in various forms. For example, the linear guide unit 132 may include a linear motion guide. In another embodiment, the linear guide part 132 may include a ball screw. In this case, the linear guide part 132 may be connected to the power generation unit 131 and rotate according to the operation of the power generation unit 131. Hereinafter, for convenience of description, the linear guide unit 132 will be described in detail with reference to a case including a ball screw.

The first moving block 133 may be installed to linearly move in the linear guide part 132. In this case, the first moving block 133 may move as the linear guide part 132 rotates or the position thereof changes.

The connection bracket 134 may connect the first moving block 133 and the second moving block 135. In this case, a plurality of connection brackets 134 may be provided on both side surfaces of the first moving block 133.

The second moving block 135 is connected to the connection bracket 134 may move during the movement of the first moving block 133. In this case, the second moving block 135 may be disposed to be movable on the first support 111. In particular, a separate guide may be installed between the second moving block 135 and the first support 111. For example, a linear motion guide may be installed between the second moving block 135 and the first support 111.

The lifting block 136 may be disposed on the second moving block 135. In this case, the lifting block 136 may be inclined to the surface in contact with the second moving block 135. In addition, a separate guide may be installed between the lifting block 136 and the second moving block 135. In this case, when the second moving block 135 moves linearly, the lifting block 136 may move up or down along the inclined surface of the second moving block 135. In particular, the elevating block 136 may be connected to the moving unit 120 to raise and lower the moving unit 120. In addition, the moving part 120 may move along a separate lifting linear guide part 113 installed between the first support part 111 and the second support part 112. At this time, the elevating block 136 is limited to the moving unit 120 may perform only the lifting movement.

Looking at the operation of the drive unit 130 as described above, when the power generation unit 131 operates, the linear guide unit 132 may rotate to linearly move the first moving block 133. In this case, when the first moving block 133 is close to the power generating unit 131, the moving unit 120 may descend. On the other hand, when the first moving block 133 is spaced apart from the power generation unit 131, the moving unit 120 may move up and down.

In detail, when the moving unit 120 is elevated, the power generation unit 131 operates to rotate the linear guide unit 132, and the first moving block 133 may be spaced apart from the power generation unit 131.

According to the movement of the first moving block 133, the connecting bracket 134 and the second moving block 135 may move simultaneously in the same direction as the first moving block 133. In this case, the second moving block 135 may linearly move along the bottom surface of the first support 111.

When the second moving block 135 moves, the second moving block 135 may exert the lifting block 136 upward. At this time, the elevating block 136 may be connected to the moving unit 120, since the moving unit 120 is restrained by the elevating linear guide unit 113, the elevating block 136 is a second moving block ( It can only move in the direction perpendicular to the movement direction of 135).

When the moving unit 120 is elevated as described above, the seating stage 140 connected to the moving unit 120 may rise.

On the other hand, when the moving unit 120 is lowered, the power generation unit 131 may operate in the reverse of the above. In detail, when the power generation unit 131 operates, the linear guide unit 132 may rotate to bring the first moving block 133 closer to the power generation unit 131. In this case, the connection bracket 134 and the second moving block 135 together with the first moving block 133 may move in the moving direction of the first moving block 133. In this case, the lifting block 136 on the second moving block 135 may descend. In addition, the moving unit 120 and the seating stage 140 may descend with the lifting block 136.

The lift unit 190 may be connected to the moving unit 120 to be lowered. In this case, the lift unit 190 may be formed in various forms. For example, the lift unit 190 may include a repeat pin and a lift pin driver (for example, a motor or a cylinder) connected to the lift pin. In another embodiment, the lift unit 190 may include a lift pin, a belt connected to the lift pin, a motor connected to the belt, a pulley disposed between the lift pin and the belt, and the motor and the belt. In another embodiment, the lift unit 190 may include a motor, a gear connected to the motor, and a lift pin connected to the gear. In another embodiment, the lift unit 190 may include a first lift body unit 191, a second lift body unit 192, and a lift pin unit 193. Hereinafter, the lift unit 190 will be described in detail with reference to a case in which the lift unit 190 includes the first lift body unit 191, the second lift body unit 192, and the lift pin unit 193.

The first lift body 191 may be formed with a hole such that the seating stage 140 is disposed therein. The second lift body 192 may be connected to the first lift body 191 to be bent to the lower surface of the first lift body 191. In this case, the second lift body 192 may be partially bent to be parallel to the moving part 120. The lift pin unit 193 may be disposed on the second lift body unit 192. In this case, the lift pin unit 193 may be disposed to protrude from the second lift body unit 192 to the lower side of the mounting stage 140 to penetrate the mounting stage 140. The second lift body 192 and the lift pin 193 may be provided in plurality. In this case, the plurality of lift pins 193 may be arranged to form the same angle with each other.

The lift pin unit 193 as described above may be provided with a sensor to detect when the member is seated on the lift pin unit 193. In this case, the sensor may generate a signal according to direct contact, and may be configured in the form of a dog sensor to detect a member.

4 is a perspective view illustrating a moving part, a first tilting driver, a second tilting driver, a first stopper part, and a second stopper part shown in FIG. 1. FIG. 5 is a perspective view illustrating the first tilting driver illustrated in FIG. 4. FIG. 6 is a perspective view illustrating a first stopper unit illustrated in FIG. 4. 7 is a perspective view showing the mounting stage shown in FIG. FIG. 8 is a cross-sectional view illustrating a seating stage illustrated in FIG. 7.

4 to 8, the moving part 120 may be disposed to move up and down between the first support part 111 and the first support part 111. The moving part 120 may be connected to the seating stage 140 at one point. For example, the moving unit 120 may be connected to the mounting stage 140 at the center of the mounting stage 140. In this case, the first tilting driving part 150a, the second tilting driving part 150b, the first stopper part 160a, the second stopper part 160b, and the lift driving part may be disposed between the moving part 120 and the seating stage 140. 183 may be deployed.

The moving unit 120 may be provided with a lift driving unit 183 for raising and lowering the lift unit 190. In this case, the lift driving unit 183 may include a motor or a cylinder. However, hereinafter, the lift driving unit 183 will be described in detail with reference to a case including a motor for convenience of description.

When the lift driving unit 183 includes a motor, the motor and the lift unit 190 may be connected through a ball screw or a gear unit. In this case, the gear unit may include a spur gear connected to the motor, a lift unit 190 and a rack gear connected to the spur gear. In another embodiment, when the lift driver 183 includes a motor, the lift driver 183 may include a linear motor connected to the lift unit 190.

The first tilting driver 150a and the second tilting driver 150b may tilt the seating stage 140. In this case, the first tilting driving part 150a and the second tilting driving part 150b may form a predetermined angle with respect to the point where the seating stage 140 and the moving part 120 are connected to each other. In particular, the first tilting driving part 150a and the second tilting driving part 150b may form a right angle with respect to the point where the seating stage 140 and the moving part 120 are connected. At this time, since the first tilting driver 150a and the second tilting driver 150b are the same or similar to each other, the first tilting driver 150a will be described in detail with reference to the first tilting driver 150a.

The first tilting driving unit 150a includes a first tilting power generating unit 151a, a first tilting gear unit 152a, a first tilting coupling 153a, a first tilting cam 154a and a first tilting cam adjusting unit. 155a.

The first tilting power generation unit 151a may include a motor or a rotary cylinder. Hereinafter, for convenience of description, the first tilting power generation unit 151a will be described in detail with reference to a case including a motor.

The first tilting power generation unit 151a as described above may include a brake. In this case, when the first tilting power generation unit 151a does not operate, the first tilting power generation unit 151a may prevent the opposite operation by using a brake and maintain a constant state.

The first tilting gear unit 152a may be connected to the first tilting power generating unit 151a to transmit power to the outside or change the rotation speed (or torque). In this case, the first tilting gear unit 152a may include a speed reducer and may include a plurality of gears.

The first tilting coupling 153a may connect the first tilting gear unit 152a and the first tilting cam 154a. The first tilting cam 154a may be eccentrically rotated and connected to the first tilting coupling 153a. For example, the first tilting cam 154a may have a center and a rotation center spaced apart by about several mm.

The first tilting cam control unit 155a may be connected to the first tilting cam 154a. In this case, the first tilting cam adjusting unit 155a may manually adjust the initial position of the first tilting cam 154a.

The first tilting detection unit 171 may detect the position of the lower surface of the mounting stage 140. In this case, the first tilting detection unit 171 may have various forms. For example, the first tilting detection unit 171 may include a sensor for measuring the distance to the bottom surface of the seating stage 140 through a laser, light, or the like. In another embodiment, the first tilting detection unit 171 may include a contact sensor in contact with the seating stage 140. Hereinafter, for convenience of description, the first tilting detection unit 171 will be described in detail with reference to a case including a contact sensor.

The first tilting detection unit 171 may contact the seating stage 140. At this time, the first tilting detection unit 171 may be in a state in which the seating stage 140 is pressed. In this case, even if the seating stage 140 moves, the contact with the first tilting sensing unit 171 may not be separated, thereby detecting whether the seating stage 140 is tilted or not.

The first stopper part 160a and the second stopper part 160b may be disposed to face the first tilting driver 150a and the second tilting driver 150b, respectively. For example, the first stopper part 160a may be arranged in parallel with the first tilting driving part 150a, and the second stopper part 160b may be arranged in parallel with the second tilting driving part 150b.

The first stopper part 160a and the second stopper part 160b may prevent the seating stage 140 from moving. In this case, the first stopper part 160a applies a force to the seating stage 140 in a direction opposite to the force applied by the first tilting driver 150a to the seating stage 140 according to the operation of the first tilting driver 150a. Can be. In addition, the second stopper 160b may apply a force to the seating stage 140 in a direction opposite to the force applied by the second tilting driver 150b to the seating stage 140 according to the operation of the second tilting driver 150b. Can be.

Since the first stopper part 160a and the second stopper part 160b are the same or similar to each other, the first stopper part 160a will be described in detail with reference to the first stopper part 160a.

The first stopper part 160a includes a first stopper driving part 161a, a first stopper coupling 162a, a first stopper eccentric cam 163a, a first stopper brake 164a, and a first stopper cam follower guide part 161a. 165a).

The first stopper driver 161a may include a motor or a rotary cylinder. Hereinafter, for convenience of description, the first stopper driver 161a will be described in detail with reference to a case including a rotary cylinder.

The first stopper coupling 162a may be connected to the first stopper driver 161a and the first stopper eccentric cam 163a. The first stopper eccentric cam 163a may be connected to be eccentric to the first stopper coupling 162a. In this case, the rotation center of the first stopper eccentric cam 163a and the center of the first stopper eccentric cam 163a may be spaced apart by several mm. In addition, the rotation center of the first stopper eccentric cam 163a may be connected to the first stopper coupling 162a.

The first stopper brake 164a may be connected to the rotation center of the first stopper eccentric cam 163a. At this time, the first stopper brake 164a may prevent the first stopper eccentric cam 163a from further rotating. In particular, the first stopper brake 164a may have various forms such as an electromagnetic brake, a hydraulic brake, a pneumatic brake, a pad type brake, and the like.

The first stopper cam follower guide part 165a may be installed to be fixed to the moving part 120. In this case, the first stopper cam follower 147 may be disposed in the first stopper cam follower guide part 165a. The first stopper cam follower guide unit 165a may limit the movement of the first stopper cam follower 147 while guiding the movement of the first stopper cam follower 147. For example, the first stopper cam follower 147 may contact one of the inner side surfaces of the first stopper cam follower guide part 165a. In this case, the first stopper cam follower 147 may move up and down along the first stopper cam follower guide part 165a according to the operation of the first tilting driver 150a and the first stopper driver 161a. While the first stopper cam follower 147 is exercising as described above, the first stopper cam follower 147 may only move up and down due to the first stopper cam follower guide part 165a. In particular, in this case, the seating stage 140 may not be rotated about the Z axis of FIG. 4 by being connected to the first stopper cam follower 147.

The seating stage 140 may include a seating plate 141, a seating stage body 142, a temperature measuring unit 143, a connecting portion 144, a first tilting cam follower 145, a second tilting cam follower 146, The first stopper cam follower 147 and the second stopper cam follower 148 may be included.

The seating plate 141 may be formed in a plate shape so that an object such as a wafer is seated. At this time, the seating plate 141 may be formed in a circular shape. The suction plate 141 may have a suction hole 141a for fixing a wafer or the like. In this case, the suction hole 141a may be connected to an external vacuum pump (not shown), and the wafer or the like may be fixed to the seating plate 141 by selectively maintaining the inside of the suction hole 141a in a vacuum.

The mounting stage body 142 may be connected to the mounting plate 141. Inside the seating stage body portion 142 may be provided with a separate heater (not shown). In this case, the heater may heat at least one of the seating stage body portion 142 and the seating plate 141.

The temperature measuring part 143 may be installed to be inserted into the seating stage body part 142. In this case, the temperature measuring unit 143 may measure at least one temperature of the mounting stage body 142 and the mounting plate 141.

The connection part 144 may connect the moving part 120 and the seating stage body part 142. At this time, the connecting portion 144 may include a self-aligning bearing.

The first tilting cam follower 145 may be disposed to correspond to the first tilting driving part 150a. In this case, the first tilting cam follower 145 may be in contact with the first tilting cam 154a and may rotate in a direction opposite to the rotation direction of the first tilting cam 154a when the first tilting cam 154a is operated. Can be.

Each of the second tilting cam follower 146, the first stopper cam follower 147, and the second stopper cam follower 148 is respectively the second tilting cam 154b, the first stopper eccentric cam 163a, and the second stopper eccentric cam. It may be arranged to correspond to (not shown). In this case, each of the second tilting cam follower 146, the first stopper cam follower 147, and the second stopper cam follower 148 is a second tilting cam 154b, a first stopper eccentric cam 163a, and the second stopper cam follower 148. Can be rotated when the stopper eccentric cam is rotated.

The elastic part 181 may be disposed between the moving part 120 and the seating stage body part 142 to connect the moving part 120 and the seating stage body part 142. At this time, the elastic portion 181 may be in a state in which a tensile force is applied to pull the moving portion 120 and the seating stage body portion 142 to each other.

The elastic portion 181 may be provided in plurality. In this case, the plurality of elastic parts 181 may form a pair, and the two elastic parts 181 constituting the pair may be disposed to face each other. In this case, a first tilting cam follower 145, a second tilting cam follower 146, a first stopper cam follower 147, and a second stopper cam follower 148 may be disposed between the two elastic parts 181, respectively. Can be. In this case, the elastic part 181 may always maintain contact between the first tilting cam 154a and the first tilting cam follower 145. In addition, the elastic part 181 may include a second tilting cam 154b, a second tilting cam follower 146, a first stopper eccentric cam 163a, a first stopper cam follower 147, and the second stopper eccentric cam. The contact of each of the second stopper cam followers 148 may be maintained at all times.

On the other hand, looking at the operation of the seating stage 140 as described above, the seating stage 140 may set the initial position. In more detail, the preset position of the seating stage 140 may be checked through the sensor unit 182 or the like. At this time, when it is determined that the position of the seating stage 140 is not a preset position, the second tilting cam adjustment of the first tilting cam adjusting unit 155a and the second tilting driving unit 150b of the first tilting driving unit 150a is performed. The position of the mounting stage 140 may be finely adjusted through the unit 155b. In particular, the lower surface of the seating stage body 142 may maintain the first tilting detection unit 171 and the second tilting detection unit 172 by fully pressing as described above.

When the above process is completed, the moving unit 120 may be raised or lowered or the lift unit 190 may be raised and lowered to seat the wafer on the seating plate 141. Thereafter, the wafer (not shown) may be fixed to the seating plate 141 through the suction hole 141a.

After the fixing of the wafer as described above, the operation such as picking up the component on the wafer can be performed. In particular, the seating stage 140 may not have a flatness initially set during this operation.

In this case, the first tilting detection unit 171 and the second tilting detection unit 172 may detect the flatness of the seating stage 140. Specifically, the first tilting detection unit 171 and the second tilting detection unit 172 may measure the degree of pressing the seating stage 140. For example, when the first tilting detection unit 171 initially sets the amount of pressing of the seating stage 140 to zero, the seating stage 140 indicates a negative value when pressed further than the initial stage, and the seating stage 140 If you press less than the initial value, it can represent a positive value.

The tilting degree of the seating stage 140 may be determined based on the values of the first tilting sensing unit 171 and the second tilting sensing unit 172 measured as described above. At this time, the determination of the tilted degree of the seating stage 140 may be provided with a separate controller (not shown) may be calculated in the controller. For example, the control unit presets the tilting degree of the seating stage 140 based on the difference between the value measured by the first tilting sensing unit 171 and the value measured by the second tilting sensing unit 172. It can be calculated by substituting on or by comparing with a previously stored table.

After the tilting degree of the seating stage 140 is calculated as described above, the upper surface of the seating stage 140 may be flattened by operating at least one of the first tilting driving part 150a and the second tilting driving part 150b. In this case, when the first tilting driver 150a or the second tilting driver 150b is driven, the first stopper 160a or the second stopper 160b corresponding thereto may also be driven. In this case, since the case in which the first tilting driver 150a operates and the case in which the second tilting driver 150b operates are the same or similar, the first tilting driver 150a will be described in detail.

When the first tilting power generating unit 151a is operated, the rotational force of the first tilting power generating unit 151a is sequentially transmitted to the first tilting gear unit 152a and the first tilting coupling 153a, thereby providing the first tilting. The cam 154a can be rotated. In this case, as the first tilting cam follower 145 rotates according to the movement of the first tilting cam 154a, the height of the seating stage body portion 142 on which the first tilting cam follower 145 is disposed may vary.

In the case of operating as described above, the first stopper driver 161a may also operate to rotate the first stopper coupling 162a to rotate the first stopper eccentric cam 163a. In this case, the rotation direction, the degree of rotation, and the like of the first stopper eccentric cam 163a may be determined by the operation degree of the first stopper driver 161a preset in response to the operation of the first tilting power generation unit 151a.

As described above, after the operation of the first tilting power generating unit 151a and the first stopper driving unit 161a is completed by a predetermined value, the operation of the first tilting power generating unit 151a and the first stopper driving unit 161a is stopped. Can be. At this time, the first tilting power generating unit 151a may be prevented from operating through the brake provided in the first tilting power generating unit 151a.

As described above, when the operation of the first tilting power generating unit 151a is stopped, the first stopper driving unit 161a is operated to move the seating stage body unit 142 with the first stopper eccentric cam 163a to the first tilting cam ( Force may be exerted slightly to the side of 154a).

In detail, the first stopper eccentric cam 163a may be rotated through the first stopper driver 161a to allow the first stopper eccentric cam 163a to exert the first stopper cam follower 147. At this time, the first stopper cam follower 147 is applied while the seating stage body portion 142 may be applied upward. In this case, since the first tilting power generating unit 151a is in a stopped state, the first tilting cam 154a no longer moves, and the first tilting cam 154a moves the seating stage body 142 upward. The first stopper eccentric cam 163a may be fixed so that the seating stage body portion 142 does not rotate about the connecting portion 144 by applying the seating stage body portion 142 upward.

As described above, after the fine adjustment of the first stopper eccentric cam 163a, the operation of the first stopper driver 161a may be stopped. In addition, when the operation of the first stopper driver 161a is stopped, the first stopper brake 164a may be operated to fix the position of the first stopper eccentric cam 163a.

As described above, while the first tilting driving unit 150a and the first stopper unit 160a are operated, the second tilting driving unit 150b and the second stopper unit 160b may also operate in the same or similar manner.

The first tilting detection unit 171 and the second tilting detection unit 172 may continuously detect the tilting degree of the seating stage 140 and based on the detected value, the first tilting driving unit 150a and the first tilting detection unit 171. The stopper part 160a, the second tilting driving part 150b, and the second stopper part 160b may continuously operate. Thereafter, the first tilting driver 150a and the second tilting driver 150b may be operated until the values sensed by the first tilting detector 171 and the second tilting detector 172 reach a preset value. have. In addition, when the values detected by the first tilting detector 171 and the second tilting detector 172 reach a preset value, the first stopper 160a and the second stopper 160b are operated as described above. The fixing stage 140 can be fixed.

While the above operation is in progress, the elastic part 181 may include the first tilting cam 154a, the first tilting cam follower 145, the second tilting cam 154b, the second tilting cam follower 146, and the first. The stopper eccentric cam 163a, the first stopper cam follower 147, and the second stopper eccentric cam and the second stopper cam follower 148 may be prevented from falling from each other.

In addition to the above, the tilting stage system 100 may further include an alarm unit (not shown) that displays an alarm to the outside when the seating stage 140 is determined to be different from the preset tilting degree. In this case, the alarm unit may display an alarm to the outside through light, an image, a sound, and the like.

Therefore, the tilting stage system 100 can adjust the balance of the mounting stage 140 through a simple structure by having a mounting stage 140 rotated to one center.

In addition, the tilting stage system 100 may stably fix the member by sensing the tilting degree of the seating stage 140 in real time, and may improve the precision of the system.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications or variations without departing from the spirit and scope of the invention. Accordingly, the appended claims will include such modifications and variations as long as they fall within the spirit of the invention.

The invention will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention, and the general knowledge in the art to which the present invention pertains. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Meanwhile, the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions. Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are only used to distinguish one component from another.

1 is a perspective view showing a tilting stage system according to an embodiment of the present invention.

Referring to FIG. 1, the tilting stage system 100 includes a first support part 111, a second support part 112, a moving part 120, a driving part 130, a seating stage 140, and a first tilting driving part 150a. ), The second tilting drive (not shown), the first stopper (not shown), the second stopper (160b), the first tilting detection (not shown), the second tilting detection (not shown), the elastic portion (Not shown), the sensor unit 182 and the lift unit 190 may be included.

The first support 111 may support the entire tilting stage system 100. The second support part 112 may be disposed to be spaced apart from the first support part 111. In this case, a lifting linear guide 113 for guiding the moving part 120 when the moving part 120 moves may be disposed between the first support part 111 and the second support part 112.

The second support part 112 may have a hole formed in the center portion thereof. In this case, the seating stage 140 may be disposed in the hole of the second support part 112. The sensor unit 182 may be disposed on the second support part 112. In this case, the sensor unit 182 may detect a component attached to a head unit (not shown) disposed on the seating stage 140 or a wafer supplied from the outside and disposed on the seating stage 140.

Hereinafter, the first support part 111 and the driver 130 will be described in detail.

FIG. 2 is a perspective view illustrating a first support part, a driving part, and a lift part shown in FIG. 1. FIG. 3 is a front view illustrating the first support part, the driving part, and the lift part shown in FIG. 2.

2 and 3, the first support part 111 may be formed in a plate shape. The first support part 111 may be installed in an external device or the like.

The driver 130 may be installed on the first support part 111. In this case, the driving unit 130 may be connected to the moving unit 120 to linearly move the moving unit 120 in a first direction (eg, Z direction of FIG. 2). In particular, the driving unit 130 may reciprocate the moving unit 120 in the first direction.

The driving unit 130 may include a power generation unit 131, a linear guide unit 132, a first moving block 133, a connection bracket 134, a second moving block 135, and a lifting block 136. Can be. The power generation unit 131 may include a motor or a cylinder. Hereinafter, for convenience of description, the power generating unit 131 will be described in detail with reference to the case of a motor.

The linear guide unit 132 may guide the movement of the first moving block 133 is seated on the first moving block 133. In this case, the linear guide part 132 may be formed in various forms. For example, the linear guide unit 132 may include a linear motion guide. In another embodiment, the linear guide part 132 may include a ball screw. In this case, the linear guide part 132 may be connected to the power generation unit 131 and rotate according to the operation of the power generation unit 131. Hereinafter, for convenience of description, the linear guide unit 132 will be described in detail with reference to a case including a ball screw.

The first moving block 133 may be installed to linearly move in the linear guide part 132. In this case, the first moving block 133 may move as the linear guide part 132 rotates or the position thereof changes.

The connection bracket 134 may connect the first moving block 133 and the second moving block 135. In this case, a plurality of connection brackets 134 may be provided on both side surfaces of the first moving block 133.

The second moving block 135 is connected to the connection bracket 134 may move during the movement of the first moving block 133. In this case, the second moving block 135 may be disposed to be movable on the first support 111. In particular, a separate guide may be installed between the second moving block 135 and the first support 111. For example, a linear motion guide may be installed between the second moving block 135 and the first support 111.

The lifting block 136 may be disposed on the second moving block 135. In this case, the lifting block 136 may be inclined to the surface in contact with the second moving block 135. In addition, a separate guide may be installed between the lifting block 136 and the second moving block 135. In this case, when the second moving block 135 moves linearly, the lifting block 136 may move up or down along the inclined surface of the second moving block 135. In particular, the elevating block 136 may be connected to the moving unit 120 to raise and lower the moving unit 120. In addition, the moving part 120 may move along a separate lifting linear guide part 113 installed between the first support part 111 and the second support part 112. At this time, the elevating block 136 is limited to the moving unit 120 may perform only the lifting movement.

Looking at the operation of the drive unit 130 as described above, when the power generation unit 131 operates, the linear guide unit 132 may rotate to linearly move the first moving block 133. In this case, when the first moving block 133 is close to the power generating unit 131, the moving unit 120 may descend. On the other hand, when the first moving block 133 is spaced apart from the power generation unit 131, the moving unit 120 may move up and down.

In detail, when the moving unit 120 is elevated, the power generation unit 131 operates to rotate the linear guide unit 132, and the first moving block 133 may be spaced apart from the power generation unit 131.

According to the movement of the first moving block 133, the connecting bracket 134 and the second moving block 135 may move simultaneously in the same direction as the first moving block 133. In this case, the second moving block 135 may linearly move along the bottom surface of the first support 111.

When the second moving block 135 moves, the second moving block 135 may exert the lifting block 136 upward. At this time, the elevating block 136 may be connected to the moving unit 120, since the moving unit 120 is restrained by the elevating linear guide unit 113, the elevating block 136 is a second moving block ( It can only move in the direction perpendicular to the movement direction of 135).

When the moving unit 120 is elevated as described above, the seating stage 140 connected to the moving unit 120 may rise.

On the other hand, when the moving unit 120 is lowered, the power generation unit 131 may operate in the reverse of the above. In detail, when the power generation unit 131 operates, the linear guide unit 132 may rotate to bring the first moving block 133 closer to the power generation unit 131. In this case, the connection bracket 134 and the second moving block 135 together with the first moving block 133 may move in the moving direction of the first moving block 133. In this case, the lifting block 136 on the second moving block 135 may descend. In addition, the moving unit 120 and the seating stage 140 may descend with the lifting block 136.

The lift unit 190 may be connected to the moving unit 120 to be lowered. In this case, the lift unit 190 may be formed in various forms. For example, the lift unit 190 may include a repeat pin and a lift pin driver (for example, a motor or a cylinder) connected to the lift pin. In another embodiment, the lift unit 190 may include a lift pin, a belt connected to the lift pin, a motor connected to the belt, a pulley disposed between the lift pin and the belt, and the motor and the belt. In another embodiment, the lift unit 190 may include a motor, a gear connected to the motor, and a lift pin connected to the gear. In another embodiment, the lift unit 190 may include a first lift body unit 191, a second lift body unit 192, and a lift pin unit 193. Hereinafter, the lift unit 190 will be described in detail with reference to a case in which the lift unit 190 includes the first lift body unit 191, the second lift body unit 192, and the lift pin unit 193.

The first lift body 191 may be formed with a hole such that the seating stage 140 is disposed therein. The second lift body 192 may be connected to the first lift body 191 to be bent to the lower surface of the first lift body 191. In this case, the second lift body 192 may be partially bent to be parallel to the moving part 120. The lift pin unit 193 may be disposed on the second lift body unit 192. In this case, the lift pin unit 193 may be disposed to protrude from the second lift body unit 192 to the lower side of the mounting stage 140 to penetrate the mounting stage 140. The second lift body 192 and the lift pin 193 may be provided in plurality. In this case, the plurality of lift pins 193 may be arranged to form the same angle with each other.

The lift pin unit 193 as described above may be provided with a sensor to detect when the member is seated on the lift pin unit 193. In this case, the sensor may generate a signal according to direct contact, and may be configured in the form of a dog sensor to detect a member.

4 is a perspective view illustrating a moving part, a first tilting driver, a second tilting driver, a first stopper part, and a second stopper part shown in FIG. 1. FIG. 5 is a perspective view illustrating the first tilting driver illustrated in FIG. 4. FIG. 6 is a perspective view illustrating a first stopper unit illustrated in FIG. 4. 7 is a perspective view showing the mounting stage shown in FIG. FIG. 8 is a cross-sectional view illustrating a seating stage illustrated in FIG. 7.

4 to 8, the moving part 120 may be disposed to move up and down between the first support part 111 and the first support part 111. The moving part 120 may be connected to the seating stage 140 at one point. For example, the moving unit 120 may be connected to the mounting stage 140 at the center of the mounting stage 140. In this case, the first tilting driving part 150a, the second tilting driving part 150b, the first stopper part 160a, the second stopper part 160b, and the lift driving part may be disposed between the moving part 120 and the seating stage 140. 183 may be deployed.

The moving unit 120 may be provided with a lift driving unit 183 for raising and lowering the lift unit 190. In this case, the lift driving unit 183 may include a motor or a cylinder. However, hereinafter, the lift driving unit 183 will be described in detail with reference to a case including a motor for convenience of description.

When the lift driving unit 183 includes a motor, the motor and the lift unit 190 may be connected through a ball screw or a gear unit. In this case, the gear unit may include a spur gear connected to the motor, a lift unit 190 and a rack gear connected to the spur gear. In another embodiment, when the lift driver 183 includes a motor, the lift driver 183 may include a linear motor connected to the lift unit 190.

The first tilting driver 150a and the second tilting driver 150b may tilt the seating stage 140. In this case, the first tilting driving part 150a and the second tilting driving part 150b may form a predetermined angle with respect to the point where the seating stage 140 and the moving part 120 are connected to each other. In particular, the first tilting driving part 150a and the second tilting driving part 150b may form a right angle with respect to the point where the seating stage 140 and the moving part 120 are connected. At this time, since the first tilting driver 150a and the second tilting driver 150b are the same or similar to each other, the first tilting driver 150a will be described in detail with reference to the first tilting driver 150a.

The first tilting driving unit 150a includes a first tilting power generating unit 151a, a first tilting gear unit 152a, a first tilting coupling 153a, a first tilting cam 154a and a first tilting cam adjusting unit. 155a.

The first tilting power generation unit 151a may include a motor or a rotary cylinder. Hereinafter, for convenience of description, the first tilting power generation unit 151a will be described in detail with reference to a case including a motor.

The first tilting power generation unit 151a as described above may include a brake. In this case, when the first tilting power generation unit 151a does not operate, the first tilting power generation unit 151a may prevent the opposite operation by using a brake and maintain a constant state.

The first tilting gear unit 152a may be connected to the first tilting power generating unit 151a to transmit power to the outside or change the rotation speed (or torque). In this case, the first tilting gear unit 152a may include a speed reducer and may include a plurality of gears.

The first tilting coupling 153a may connect the first tilting gear unit 152a and the first tilting cam 154a. The first tilting cam 154a may be eccentrically rotated and connected to the first tilting coupling 153a. For example, the first tilting cam 154a may have a center and a rotation center spaced apart by about several mm.

The first tilting cam control unit 155a may be connected to the first tilting cam 154a. In this case, the first tilting cam adjusting unit 155a may manually adjust the initial position of the first tilting cam 154a.

The first tilting detection unit 171 may detect the position of the lower surface of the mounting stage 140. In this case, the first tilting detection unit 171 may have various forms. For example, the first tilting detection unit 171 may include a sensor for measuring the distance to the bottom surface of the seating stage 140 through a laser, light, or the like. In another embodiment, the first tilting detection unit 171 may include a contact sensor in contact with the seating stage 140. Hereinafter, for convenience of description, the first tilting detection unit 171 will be described in detail with reference to a case including a contact sensor.

The first tilting detection unit 171 may contact the seating stage 140. At this time, the first tilting detection unit 171 may be in a state in which the seating stage 140 is pressed. In this case, even if the seating stage 140 moves, the contact with the first tilting sensing unit 171 may not be separated, thereby detecting whether the seating stage 140 is tilted or not.

The first stopper part 160a and the second stopper part 160b may be disposed to face the first tilting driver 150a and the second tilting driver 150b, respectively. For example, the first stopper part 160a may be arranged in parallel with the first tilting driving part 150a, and the second stopper part 160b may be arranged in parallel with the second tilting driving part 150b.

The first stopper part 160a and the second stopper part 160b may prevent the seating stage 140 from moving. In this case, the first stopper part 160a applies a force to the seating stage 140 in a direction opposite to the force applied by the first tilting driver 150a to the seating stage 140 according to the operation of the first tilting driver 150a. Can be. In addition, the second stopper 160b may apply a force to the seating stage 140 in a direction opposite to the force applied by the second tilting driver 150b to the seating stage 140 according to the operation of the second tilting driver 150b. Can be.

Since the first stopper part 160a and the second stopper part 160b are the same or similar to each other, the first stopper part 160a will be described in detail with reference to the first stopper part 160a.

The first stopper part 160a includes a first stopper driving part 161a, a first stopper coupling 162a, a first stopper eccentric cam 163a, a first stopper brake 164a, and a first stopper cam follower guide part 161a. 165a).

The first stopper driver 161a may include a motor or a rotary cylinder. Hereinafter, for convenience of description, the first stopper driver 161a will be described in detail with reference to a case including a rotary cylinder.

The first stopper coupling 162a may be connected to the first stopper driver 161a and the first stopper eccentric cam 163a. The first stopper eccentric cam 163a may be connected to be eccentric to the first stopper coupling 162a. In this case, the rotation center of the first stopper eccentric cam 163a and the center of the first stopper eccentric cam 163a may be spaced apart by several mm. In addition, the rotation center of the first stopper eccentric cam 163a may be connected to the first stopper coupling 162a.

The first stopper brake 164a may be connected to the rotation center of the first stopper eccentric cam 163a. At this time, the first stopper brake 164a may prevent the first stopper eccentric cam 163a from further rotating. In particular, the first stopper brake 164a may have various forms such as an electromagnetic brake, a hydraulic brake, a pneumatic brake, a pad type brake, and the like.

The first stopper cam follower guide part 165a may be installed to be fixed to the moving part 120. In this case, the first stopper cam follower 147 may be disposed in the first stopper cam follower guide part 165a. The first stopper cam follower guide unit 165a may limit the movement of the first stopper cam follower 147 while guiding the movement of the first stopper cam follower 147. For example, the first stopper cam follower 147 may contact one of the inner side surfaces of the first stopper cam follower guide part 165a. In this case, the first stopper cam follower 147 may move up and down along the first stopper cam follower guide part 165a according to the operation of the first tilting driver 150a and the first stopper driver 161a. While the first stopper cam follower 147 is exercising as described above, the first stopper cam follower 147 may only move up and down due to the first stopper cam follower guide part 165a. In particular, in this case, the seating stage 140 may not be rotated about the Z axis of FIG. 4 by being connected to the first stopper cam follower 147.

The seating stage 140 may include a seating plate 141, a seating stage body 142, a temperature measuring unit 143, a connecting portion 144, a first tilting cam follower 145, a second tilting cam follower 146, The first stopper cam follower 147 and the second stopper cam follower 148 may be included.

The seating plate 141 may be formed in a plate shape so that an object such as a wafer is seated. At this time, the seating plate 141 may be formed in a circular shape. The suction plate 141 may have a suction hole 141a for fixing a wafer or the like. In this case, the suction hole 141a may be connected to an external vacuum pump (not shown), and the wafer or the like may be fixed to the seating plate 141 by selectively maintaining the inside of the suction hole 141a in a vacuum.

The mounting stage body 142 may be connected to the mounting plate 141. Inside the seating stage body portion 142 may be provided with a separate heater (not shown). In this case, the heater may heat at least one of the seating stage body portion 142 and the seating plate 141.

The temperature measuring part 143 may be installed to be inserted into the seating stage body part 142. In this case, the temperature measuring unit 143 may measure at least one temperature of the mounting stage body 142 and the mounting plate 141.

The connection part 144 may connect the moving part 120 and the seating stage body part 142. At this time, the connecting portion 144 may include a self-aligning bearing.

The first tilting cam follower 145 may be disposed to correspond to the first tilting driving part 150a. In this case, the first tilting cam follower 145 may be in contact with the first tilting cam 154a and may rotate in a direction opposite to the rotation direction of the first tilting cam 154a when the first tilting cam 154a is operated. Can be.

Each of the second tilting cam follower 146, the first stopper cam follower 147, and the second stopper cam follower 148 is respectively the second tilting cam 154b, the first stopper eccentric cam 163a, and the second stopper eccentric cam. It may be arranged to correspond to (not shown). In this case, each of the second tilting cam follower 146, the first stopper cam follower 147, and the second stopper cam follower 148 is a second tilting cam 154b, a first stopper eccentric cam 163a, and the second stopper cam follower 148. Can be rotated when the stopper eccentric cam is rotated.

The elastic part 181 may be disposed between the moving part 120 and the seating stage body part 142 to connect the moving part 120 and the seating stage body part 142. At this time, the elastic portion 181 may be in a state in which a tensile force is applied to pull the moving portion 120 and the seating stage body portion 142 to each other.

The elastic portion 181 may be provided in plurality. In this case, the plurality of elastic parts 181 may form a pair, and the two elastic parts 181 constituting the pair may be disposed to face each other. In this case, a first tilting cam follower 145, a second tilting cam follower 146, a first stopper cam follower 147, and a second stopper cam follower 148 may be disposed between the two elastic parts 181, respectively. Can be. In this case, the elastic part 181 may always maintain contact between the first tilting cam 154a and the first tilting cam follower 145. In addition, the elastic part 181 may include a second tilting cam 154b, a second tilting cam follower 146, a first stopper eccentric cam 163a, a first stopper cam follower 147, and the second stopper eccentric cam. The contact of each of the second stopper cam followers 148 may be maintained at all times.

On the other hand, looking at the operation of the seating stage 140 as described above, the seating stage 140 may set the initial position. In more detail, the preset position of the seating stage 140 may be checked through the sensor unit 182 or the like. At this time, when it is determined that the position of the seating stage 140 is not a preset position, the second tilting cam adjustment of the first tilting cam adjusting unit 155a and the second tilting driving unit 150b of the first tilting driving unit 150a is performed. The position of the mounting stage 140 may be finely adjusted through the unit 155b. In particular, the lower surface of the seating stage body 142 may maintain the first tilting detection unit 171 and the second tilting detection unit 172 by fully pressing as described above.

When the above process is completed, the moving unit 120 may be raised or lowered or the lift unit 190 may be raised and lowered to seat the wafer on the seating plate 141. Thereafter, the wafer (not shown) may be fixed to the seating plate 141 through the suction hole 141a.

After the fixing of the wafer as described above, the operation such as picking up the component on the wafer can be performed. In particular, the seating stage 140 may not have a flatness initially set during this operation.

In this case, the first tilting detection unit 171 and the second tilting detection unit 172 may detect the flatness of the seating stage 140. Specifically, the first tilting detection unit 171 and the second tilting detection unit 172 may measure the degree of pressing the seating stage 140. For example, when the first tilting detection unit 171 initially sets the amount of pressing of the seating stage 140 to zero, the seating stage 140 indicates a negative value when pressed further than the initial stage, and the seating stage 140 If you press less than the initial value, it can represent a positive value.

The tilting degree of the seating stage 140 may be determined based on the values of the first tilting sensing unit 171 and the second tilting sensing unit 172 measured as described above. At this time, the determination of the tilted degree of the seating stage 140 may be provided with a separate controller (not shown) may be calculated in the controller. For example, the control unit presets the tilting degree of the seating stage 140 based on the difference between the value measured by the first tilting sensing unit 171 and the value measured by the second tilting sensing unit 172. It can be calculated by substituting on or by comparing with a previously stored table.

After the tilting degree of the seating stage 140 is calculated as described above, the upper surface of the seating stage 140 may be flattened by operating at least one of the first tilting driving part 150a and the second tilting driving part 150b. In this case, when the first tilting driver 150a or the second tilting driver 150b is driven, the first stopper 160a or the second stopper 160b corresponding thereto may also be driven. In this case, since the case in which the first tilting driver 150a operates and the case in which the second tilting driver 150b operates are the same or similar, the first tilting driver 150a will be described in detail.

When the first tilting power generating unit 151a is operated, the rotational force of the first tilting power generating unit 151a is sequentially transmitted to the first tilting gear unit 152a and the first tilting coupling 153a, thereby providing the first tilting. The cam 154a can be rotated. In this case, as the first tilting cam follower 145 rotates according to the movement of the first tilting cam 154a, the height of the seating stage body portion 142 on which the first tilting cam follower 145 is disposed may vary.

In the case of operating as described above, the first stopper driver 161a may also operate to rotate the first stopper coupling 162a to rotate the first stopper eccentric cam 163a. In this case, the rotation direction, the degree of rotation, and the like of the first stopper eccentric cam 163a may be determined by the operation degree of the first stopper driver 161a preset in response to the operation of the first tilting power generation unit 151a.

As described above, after the operation of the first tilting power generating unit 151a and the first stopper driving unit 161a is completed by a predetermined value, the operation of the first tilting power generating unit 151a and the first stopper driving unit 161a is stopped. Can be. At this time, the first tilting power generating unit 151a may be prevented from operating through the brake provided in the first tilting power generating unit 151a.

As described above, when the operation of the first tilting power generating unit 151a is stopped, the first stopper driving unit 161a is operated to move the seating stage body unit 142 with the first stopper eccentric cam 163a to the first tilting cam ( Force may be exerted slightly to the side of 154a).

In detail, the first stopper eccentric cam 163a may be rotated through the first stopper driver 161a to allow the first stopper eccentric cam 163a to exert the first stopper cam follower 147. At this time, the first stopper cam follower 147 is applied while the seating stage body portion 142 may be applied upward. In this case, since the first tilting power generating unit 151a is in a stopped state, the first tilting cam 154a no longer moves, and the first tilting cam 154a moves the seating stage body 142 upward. The first stopper eccentric cam 163a may be fixed so that the seating stage body portion 142 does not rotate about the connecting portion 144 by applying the seating stage body portion 142 upward.

As described above, after the fine adjustment of the first stopper eccentric cam 163a, the operation of the first stopper driver 161a may be stopped. In addition, when the operation of the first stopper driver 161a is stopped, the first stopper brake 164a may be operated to fix the position of the first stopper eccentric cam 163a.

As described above, while the first tilting driving unit 150a and the first stopper unit 160a are operated, the second tilting driving unit 150b and the second stopper unit 160b may also operate in the same or similar manner.

The first tilting detection unit 171 and the second tilting detection unit 172 may continuously detect the tilting degree of the seating stage 140 and based on the detected value, the first tilting driving unit 150a and the first tilting detection unit 171. The stopper part 160a, the second tilting driving part 150b, and the second stopper part 160b may continuously operate. Thereafter, the first tilting driver 150a and the second tilting driver 150b may be operated until the values sensed by the first tilting detector 171 and the second tilting detector 172 reach a preset value. have. In addition, when the values detected by the first tilting detector 171 and the second tilting detector 172 reach a preset value, the first stopper 160a and the second stopper 160b are operated as described above. The fixing stage 140 can be fixed.

While the above operation is in progress, the elastic part 181 may include the first tilting cam 154a, the first tilting cam follower 145, the second tilting cam 154b, the second tilting cam follower 146, and the first. The stopper eccentric cam 163a, the first stopper cam follower 147, and the second stopper eccentric cam and the second stopper cam follower 148 may be prevented from falling from each other.

In addition to the above, the tilting stage system 100 may further include an alarm unit (not shown) that displays an alarm to the outside when the seating stage 140 is determined to be different from the preset tilting degree. In this case, the alarm unit may display an alarm to the outside through light, an image, a sound, and the like.

Therefore, the tilting stage system 100 can adjust the balance of the mounting stage 140 through a simple structure by having a mounting stage 140 rotated to one center.

In addition, the tilting stage system 100 may stably fix the member by sensing the tilting degree of the seating stage 140 in real time, and may improve the precision of the system.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications or variations without departing from the spirit and scope of the invention. Accordingly, the appended claims will include such modifications and variations as long as they fall within the spirit of the invention.

Claims (20)

A first support; A second support disposed to be spaced apart from the first support; A moving part disposed to be movable between the first support part and the second support part; A seating stage disposed in the second support, the seating stage being rotatably connected to the moving part at a center thereof; A driving part connected to the moving part to move the moving part in a first direction; A first tilting driver installed in the moving part to force the first portion of the seating stage eccentrically from the center of the seating stage in the first direction; And A tilting stage comprising: a second tilting driver installed on the moving part to form a predetermined angle with the first tilting driving part, the second tilting driving part for biasing the seating stage second portion eccentrically from the center of the seating stage in the first direction; system. The method of claim 1, And a first tilting sensing part installed on the first tilting driving part and measuring an amount of movement of the first part in the first direction. The method of claim 2, And the first tilting driving part tilts the seating stage based on the value measured by the first tilting sensing part. The method of claim 1, And a second tilting sensing part installed on the second tilting driving part and configured to measure an amount of movement of the second part in the second direction. The method of claim 4, wherein And the second tilting driving part operates to tilt the seating stage based on the value measured by the second tilting detecting part. The method of claim 1, And a first stopper part disposed in the moving part so as to face the first tilting driving part. The method of claim 6, The first stopper part, A first stopper driver; A first stopper coupling connected to the first stopper driver; And And a first stopper eccentric cam connected to be eccentrically connected to the first stopper coupling. The method of claim 7, wherein The first stopper portion, And a first stopper brake connected to the first stopper eccentric cam. The method of claim 7, wherein The first stopper portion, And a first stopper cam follower guide unit installed in the moving unit. The method of claim 6, And the moving part comprises a first stopper cam follower in contact with the first stopper part. The method of claim 1, And a second stopper part disposed on the moving part so as to face the second tilting driving part. The method of claim 11, The second stopper part, A second stopper driver; A second stopper coupling connected to the second stopper driver; And And a second stopper eccentric cam which is eccentrically connected to the second stopper coupling. The method of claim 12, The second stopper part, And a second stopper brake connected to the second stopper eccentric cam. The method of claim 12, The second stopper part, And a second stopper cam follower guide unit installed on the moving unit. The method of claim 11, And the moving part comprises a first stopper cam follower in contact with the first stopper part. The method of claim 1, And a resilient portion disposed between the moving portion and the seating stage. The method of claim 1, The first tilting driving unit, A first tilting power generating unit; A first tilting coupling connected to the first tilting power generation unit; And a first tilting cam connected with the first tilting coupling. The method of claim 17, The first tilting driving unit, And a first tilting cam control unit connected to the first tilting cam. The method of claim 1, The second tilting driving unit, A second tilting power generating unit; A second tilting coupling connected to the second tilting power generation unit; And a second tilting cam connected to the second tilting coupling. The method of claim 19, The second tilting driving unit, And a second tilting cam control unit connected to the second tilting cam.

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