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WO2018021464A1 - Dispositif d'oscillation d'ondes électromagnétiques comprenant un circuit survolteur - Google Patents

Dispositif d'oscillation d'ondes électromagnétiques comprenant un circuit survolteur Download PDF

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Publication number
WO2018021464A1
WO2018021464A1 PCT/JP2017/027212 JP2017027212W WO2018021464A1 WO 2018021464 A1 WO2018021464 A1 WO 2018021464A1 JP 2017027212 W JP2017027212 W JP 2017027212W WO 2018021464 A1 WO2018021464 A1 WO 2018021464A1
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WO
WIPO (PCT)
Prior art keywords
electromagnetic wave
amplitude
phase
waveform
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/027212
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English (en)
Japanese (ja)
Inventor
池田　裕二
誠士 神原
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Imagineering Inc
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Imagineering Inc
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Filing date
Publication date
Application filed by Imagineering Inc filed Critical Imagineering Inc
Priority to JP2018530382A priority Critical patent/JPWO2018021464A1/ja
Publication of WO2018021464A1 publication Critical patent/WO2018021464A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P23/00—Other ignition
    • F02P23/04—Other physical ignition means, e.g. using laser rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T15/00—Circuits specially adapted for spark gaps, e.g. ignition circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps

Definitions

  • the present invention relates to an electromagnetic wave oscillation device that supplies an electromagnetic wave to an ignition device or an electromagnetic wave irradiation antenna.
  • the present inventors have proposed an ignition device using electromagnetic waves as an ignition device for ignition of an internal combustion engine.
  • a plasma generator that can be used as an ignition device for a small internal combustion engine that can efficiently generate, expand, and maintain plasma using only electromagnetic waves
  • an electromagnetic wave oscillator that oscillates electromagnetic waves and an electromagnetic wave oscillator
  • an ignition device that integrally forms a control device to be controlled, a booster circuit including a resonance circuit capacitively coupled to an electromagnetic wave oscillator, and a discharge electrode that discharges a high voltage generated by the booster circuit (for example, Patent Document 1). reference.).
  • a plasma generating apparatus that maintains and expands plasma by irradiating the plasma of a general spark plug with microwaves has also been proposed.
  • an electromagnetic wave absorber that generates heat by absorbing electromagnetic waves is mixed into the purification catalyst disposed in the exhaust passage of the internal combustion engine, and the electromagnetic wave (microwave) is irradiated to the purification catalyst from the electromagnetic wave irradiation antenna.
  • a purification device that is activated in a short time has been proposed.
  • an apparatus using a semiconductor oscillator has been proposed from a magnetron in an electromagnetic wave cooking apparatus, a so-called microwave oven.
  • the electromagnetic wave supplied to the ignition device described in Patent Document 1 is oscillated in pulses from an electromagnetic wave oscillator.
  • the electromagnetic wave oscillated from the electromagnetic wave oscillator is an electromagnetic wave of several W, and this electromagnetic wave is amplified by an amplifier and supplied to an ignition device or an electromagnetic wave irradiation antenna.
  • a DC power source (12V or 24V) from a power source (battery) is supplied to an electromagnetic wave oscillator and an amplifier as continuous 32V by a booster circuit (for example, a DC / DC converter), and the electromagnetic wave oscillator controls
  • an electromagnetic wave oscillation signal for example, TTL signal
  • predetermined power for example, 1 kW
  • the present invention has been made in view of such a point, and the object thereof is to generate an electromagnetic wave oscillation that can cancel the reflected wave and automatically control impedance matching even when the electromagnetic wave oscillated from the electromagnetic wave oscillator is reflected. Is to provide a device.
  • the first invention made to solve the above problems is An electromagnetic wave oscillation device that supplies an electromagnetic wave to a resistance unit that receives supply of electromagnetic wave energy, An electromagnetic wave oscillator that oscillates an electromagnetic wave by a voltage applied from a power supply; A detector for detecting the phase and amplitude of the reflected wave from the resistance unit; A controller for controlling the electromagnetic wave oscillator and the detector, A modulator for modulating the phase and amplitude of the electromagnetic wave from the electromagnetic wave oscillator and an amplifier for amplifying the electromagnetic wave are disposed; The control device controls the modulator so that a waveform having a phase and amplitude taking conjugate values is added to the basic waveform by vector addition to the phase and amplitude of the reflected waveform detected by the detector. Like to do.
  • the electromagnetic wave oscillation device is a generated waveform obtained by vector addition (synthesis) of a waveform having a phase and amplitude taking conjugate values with respect to a phase and amplitude of a reflected wave waveform detected by a detector. By oscillating, the reflected wave can be canceled and impedance matching can be achieved.
  • the second invention made to solve the above problems is An electromagnetic wave oscillation device that supplies an electromagnetic wave to a resistance unit that receives supply of electromagnetic wave energy, An electromagnetic wave oscillator that oscillates an electromagnetic wave by a voltage applied from a power supply; A detector for detecting the phase and amplitude of the reflected wave from the resistance unit; A controller for controlling the electromagnetic wave oscillator and the detector,
  • the electromagnetic wave from the electromagnetic wave oscillator is branched, and a modulator that modulates the phase and amplitude of the electromagnetic wave and an amplifier that amplifies the electromagnetic wave are disposed on each line, and the branched line is connected to the resistance unit via a coupler.
  • the control device controls at least one of the modulators branched so as to obtain a phase and amplitude waveform that takes a conjugate value with respect to the phase and amplitude of the reflected wave waveform detected by the detector. Yes.
  • the path for oscillating the basic waveform and the waveform for oscillating the conjugate waveform taking the conjugate value of the reflected wave are separated.
  • the electromagnetic wave oscillating device of the present invention is a device for generating plasma with electromagnetic waves (microwaves), even if the plasma fluctuates due to pressure / flow and environmental pressure / flow / temperature when the plasma is generated, and reflection of electromagnetic waves occurs. It is possible to reduce the reflected wave on the line by generating a waveform that takes a conjugate value with respect to the amplitude and phase of the reflected wave and giving a signal that cancels the reflected wave, and by reducing the reflected wave, the connector -It is possible to suppress the discharge / overheating of the line and to effectively suppress the breakage of the equipment.
  • the first embodiment is an electromagnetic wave oscillation device 1 including a booster circuit according to the first invention.
  • the electromagnetic wave oscillation device 1 includes an electromagnetic wave oscillator 3 that oscillates an electromagnetic wave by a voltage applied from a power supply P, a resistance unit 2 that receives supply of electromagnetic wave energy from the electromagnetic wave oscillator 3, and this resistance
  • a detector 4 that detects the phase and amplitude of the reflected wave from the unit 2, and a controller 5 that controls the electromagnetic wave oscillator 3 and the detector 4 are provided.
  • a modulator 31 that modulates the phase and amplitude of the electromagnetic wave from the electromagnetic wave oscillator 3 and an amplifier 32 that amplifies the electromagnetic wave are disposed between the electromagnetic wave oscillator 3 and the detector 4.
  • the modulator 31 is set so that a waveform having a phase and amplitude taking a conjugate value is added to (combined with) the basic waveform oscillated by the electromagnetic wave oscillator 3 to be a generated waveform. I try to control it.
  • the detector 4 is not particularly limited as long as it can detect the phase and amplitude of the reflected wave from the resistance unit 2, but in this embodiment, the detector 4 and the 4-port directional coupler 41
  • the IQ demodulator 42 attached to the traveling wave extraction port and the IQ demodulator 43 attached to the reflected wave extraction port.
  • the resistance part 2 of this embodiment is an ignition device which raises the electromagnetic wave supplied by the resonance circuit and raises the potential difference of the discharge gap 2a to cause discharge as shown in the equivalent circuit of FIG.
  • This ignition device can be reduced in outer diameter as compared with a general spark plug, and the intake / exhaust valve of the internal combustion engine can be enlarged, so that the efficiency of the internal combustion engine can be improved. Further, it is possible to improve the combustion efficiency by performing multi-point ignition in which a plurality of cylinder heads are arranged and ignite the air-fuel mixture at a plurality of locations.
  • the detector 4 may detect the phase / amplitude of the reflected waveform W2 only with the IQ demodulator 43 by setting the line length to a predetermined value, but the IQ demodulator 42 and the IQ demodulator 43 It is preferable that the phase difference between the waveform W1 and the reflected waveform W2 be detected.
  • the resistance portion 2 may be an object to be heated that is irradiated with electromagnetic waves (microwaves) from an electromagnetic wave radiation antenna 7.
  • the resistance portion 2 can be a purification catalyst in which an electromagnetic wave absorber that is heated and heated by receiving electromagnetic waves is mixed.
  • the foodstuff etc. which are heated and cooked with an electromagnetic wave heating apparatus can also be used as the resistance part 2.
  • the electromagnetic wave oscillated from the electromagnetic wave oscillator 3 is amplified to a predetermined output (an electromagnetic wave of about several W is amplified to several kW) by an amplifier 32 through a modulator 31.
  • the amplifier 32 is an example of one stage, but the amplifier 32 may be configured in a multistage configuration in series with two stages and three stages.
  • the first stage is GAIN control, for example, 0 to 25 dBm (0 to about 398 mW)
  • the second stage is, for example, a preamplifier, for example, 45 dBM (about 32 W)
  • the third stage is, for example, a main amplifier. , 61 dBM (about 1.25 kW).
  • the electromagnetic wave oscillator 3 is always supplied with a predetermined voltage, for example, 12 V, from the DC power source P via a smoothing circuit (not shown).
  • a predetermined voltage for example, 12 V
  • the electromagnetic wave microwave
  • the electromagnetic wave is output in a continuous wave or a pattern in which a predetermined duty ratio, pulse time, and the like are set.
  • the modulator 31 receives a control signal from the control device 5 to which the phase / amplitude information of the reflected waveform W2 detected by the detector 4 is applied, and modulates the phase and amplitude of the electromagnetic wave oscillated from the electromagnetic wave oscillator 3. More specifically, as shown in FIG. 3, when the reflected waveform W2 reflected from the resistance unit 2 is used with respect to the basic waveform W1, the conjugate waveform W3 of the reflected waveform W2 is vector-added (synthesized) to the basic waveform. The phase and amplitude are modulated so that the generated waveform W0 is obtained. This control is performed in units of microseconds, the reflected waveform W2 is canceled with the generated waveform W0, and the basic waveform W1 is supplied to the resistance unit 2.
  • the oscillator 3 corresponds to the impedance Zr of the resistance unit 2.
  • the modulator 32 is controlled so that the impedance becomes Zs ′′ having a conjugate value. More specifically, the center of the Smith chart, for example, the amplitude of Z of 50 ⁇ is modulated, and Zs ′ is controlled to be Zs ′′ by modulating the phase and then the phase.
  • the second embodiment is an electromagnetic wave oscillation device 1 including a booster circuit according to the second invention.
  • the electromagnetic wave oscillation device 1 includes an electromagnetic wave oscillator 3 that oscillates an electromagnetic wave by a voltage applied from a power supply P, a resistance unit 2 that receives supply of electromagnetic wave energy from the electromagnetic wave oscillator 3, and this resistance
  • a detector 4 that detects the phase and amplitude of the reflected wave from the unit 2, and a controller 5 that controls the electromagnetic wave oscillator 3 and the detector 4 are provided.
  • the electromagnetic wave from the electromagnetic wave oscillator 3 is branched, and modulators 31a and 31b for modulating the phase and amplitude of the electromagnetic wave and amplifiers 32a and 32b for amplifying the electromagnetic wave are arranged on each line, and the branched line is a coupler.
  • the control unit 5 branches to a phase and amplitude waveform that takes conjugate values with respect to the phase and amplitude of the reflected wave waveform detected by the detector 4.
  • the at least one modulator 31a, 31b is controlled.
  • the second embodiment is different from the first embodiment in that the electromagnetic waves from the electromagnetic wave oscillator 3 are branched, and modulators 31a and 31b that modulate the phase and amplitude of the electromagnetic waves and amplifiers 32a and 32b that amplify the electromagnetic waves are provided in the respective lines.
  • the line that generates a waveform having a phase and amplitude that takes a conjugate value with respect to the phase and amplitude of the reflected wave waveform may be any one of the branched lines.
  • only the modulator 31b is controlled. Then, it is configured to cancel the reflected wave.
  • the basic waveform W1 shown in FIG. 3 is passed through the line of the modulator 31a, and the conjugate waveform W2 is passed through the line of the modulator 31b, via the coupler 33 (for example, a directional coupler), Both waves merge to form a waveform similar to the generated waveform W0 shown in FIG. 3 and cancel the reflected wave.
  • the coupler 33 for example, a directional coupler
  • the electromagnetic wave oscillating device is an ignition device for an internal combustion engine such as an automobile engine, which boosts an electromagnetic wave supplied by a resonance circuit and raises a potential difference of a discharge gap to generate a discharge. It is suitably used for the application of the electromagnetic wave and the electromagnetic wave supply to the antenna of the electromagnetic wave heating device and the catalyst heating / heating device.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma Technology (AREA)
  • Constitution Of High-Frequency Heating (AREA)

Abstract

La présente invention a pour but de fournir un dispositif d'oscillation d'ondes électromagnétiques qui permette d'annuler les ondes réfléchies et de commander automatiquement l'adaptation d'impédance même lorsqu'une onde électromagnétique émise par un oscillateur d'ondes électromagnétiques est réfléchie. Un dispositif d'oscillation d'ondes électromagnétiques est pourvu : d'un oscillateur d'ondes électromagnétiques (3) qui utilise la tension appliquée d'une source d'alimentation P pour émettre une onde électromagnétique ; une résistance (2) qui reçoit l'énergie d'ondes électromagnétiques provenant de l'oscillateur d'ondes électromagnétiques (3) ; un détecteur (4) qui détecte la phase et l'amplitude d'une onde réfléchie à partir de la résistance (2) ; et un dispositif de commande (5) qui commande l'oscillateur d'ondes électromagnétiques (3) et le détecteur (4). Un modulateur (31), qui permet de moduler la phase et l'amplitude des ondes électromagnétiques provenant de l'oscillateur d'ondes électromagnétiques, et un amplificateur (32), qui permet d'amplifier les ondes électromagnétiques, sont disposés entre l'oscillateur d'ondes électromagnétiques (3) et le détecteur (4). Le dispositif de commande (5) est utilisé pour commander le modulateur (31) de façon à obtenir une forme d'onde générée, dans laquelle une forme d'onde ayant une phase et une amplitude qui prennent des valeurs conjuguées par rapport à la phase et l'amplitude de la forme d'onde d'une onde réfléchie, détectée par le détecteur (4), est ajoutée par ajout vectoriel (combinée) à une forme d'onde de base émise par l'oscillateur d'ondes électromagnétiques (3).
PCT/JP2017/027212 2016-07-27 2017-07-27 Dispositif d'oscillation d'ondes électromagnétiques comprenant un circuit survolteur Ceased WO2018021464A1 (fr)

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JP2018530382A JPWO2018021464A1 (ja) 2016-07-27 2017-07-27 昇圧回路を含む電磁波発振装置

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JP2016-147692 2016-07-27
JP2016147692 2016-07-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019033434A (ja) * 2017-08-09 2019-02-28 イマジニアリング株式会社 電磁波発振装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289100A (ja) * 1995-03-06 1997-11-04 Applied Materials Inc 安定性向上のための技術と結合したｒｆプラズマ電源
JPH1187097A (ja) * 1997-09-10 1999-03-30 Adtec:Kk 高周波プラズマ処理装置のためのインピーダンス整合及び電力制御システム
JP2012174668A (ja) * 2011-02-24 2012-09-10 Mitsubishi Electric Corp 高周波電力供給装置、プラズマ処理装置、及び半導体薄膜の製造方法
JP2013515446A (ja) * 2009-12-22 2013-05-02 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 電力増幅器の有効アクティブ電源インピーダンス修正
WO2014084341A1 (fr) * 2012-11-30 2014-06-05 イマジニアリング株式会社 Dispositif de production de plasma

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289100A (ja) * 1995-03-06 1997-11-04 Applied Materials Inc 安定性向上のための技術と結合したｒｆプラズマ電源
JPH1187097A (ja) * 1997-09-10 1999-03-30 Adtec:Kk 高周波プラズマ処理装置のためのインピーダンス整合及び電力制御システム
JP2013515446A (ja) * 2009-12-22 2013-05-02 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 電力増幅器の有効アクティブ電源インピーダンス修正
JP2012174668A (ja) * 2011-02-24 2012-09-10 Mitsubishi Electric Corp 高周波電力供給装置、プラズマ処理装置、及び半導体薄膜の製造方法
WO2014084341A1 (fr) * 2012-11-30 2014-06-05 イマジニアリング株式会社 Dispositif de production de plasma

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019033434A (ja) * 2017-08-09 2019-02-28 イマジニアリング株式会社 電磁波発振装置
JP7030445B2 (ja) 2017-08-09 2022-03-07 ゼネラルソリューションズ株式会社 電磁波発振装置

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