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WO2017163792A1 - Method for manufacturing concentrated target gas - Google Patents

Method for manufacturing concentrated target gas Download PDF

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Publication number
WO2017163792A1
WO2017163792A1 PCT/JP2017/008077 JP2017008077W WO2017163792A1 WO 2017163792 A1 WO2017163792 A1 WO 2017163792A1 JP 2017008077 W JP2017008077 W JP 2017008077W WO 2017163792 A1 WO2017163792 A1 WO 2017163792A1
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WIPO (PCT)
Prior art keywords
gas
adsorption tower
tower
adsorption
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2017/008077
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French (fr)
Japanese (ja)
Inventor
充 岸井
康一 志摩
光利 中谷
三宅 正訓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
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Sumitomo Seika Chemicals Co Ltd
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Priority to JP2018507171A priority Critical patent/JP6905508B2/en
Publication of WO2017163792A1 publication Critical patent/WO2017163792A1/en
Anticipated expiration legal-status Critical
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02Preparation of oxygen

Definitions

  • the present invention relates to a method for producing a product gas in which a target gas is concentrated by a pressure fluctuation adsorption method from a mixed gas containing a target gas and an unnecessary gas.
  • a pressure fluctuation adsorption method is known as a method of separating and recovering oxygen as a target gas from a mixed gas containing oxygen (target gas) such as air and nitrogen (unnecessary gas).
  • target gas such as air and nitrogen (unnecessary gas).
  • Concentrated oxygen gas (product gas) obtained by the PSA method is used in fields that consume large amounts of oxygen such as electric furnace steelmaking, nonferrous metal refining, garbage incineration, papermaking, oxygen aeration in water treatment facilities, ozone generators, etc. Besides being used, small ones are also used for home medical care.
  • adsorption towers As a technique for concentrating and recovering oxygen by the PSA method, a plurality of (for example, 2 to 4) adsorption towers are used, for example, a cycle including adsorption, depressurization, desorption, and pressurization is repeated in each adsorption tower to concentrate oxygen. What was devised so that gas can be obtained with a high recovery rate is known.
  • the gas mixture is supplied to the adsorption tower by a blower during the adsorption and pressurization operations, and the inside of the adsorption tower is decompressed by a vacuum pump during the depressurization and desorption operations.
  • adsorption is performed using concentrated oxygen gas as a product.
  • a system for cleaning the adsorbent see, for example, Patent Document 1
  • a system for cleaning the adsorbent using the residual concentrated oxygen gas in the adsorption tower for example, see Example 3 of Patent Document 2 are known.
  • the PSA gas separation device is not supposed to be unusable in a few years, and it is assumed that it will be used for a long period of 10 years or longer. For this reason, both the reduction of the power consumption rate and the reduction of the device manufacturing cost are useful, but the reduction of the power consumption rate is particularly strongly desired.
  • the mixed gas is always supplied and the vacuum pump is continuously operated to try to reduce the power consumption, but because the product is cleaned using the concentrated oxygen gas as the product, There was a problem that the concentrated oxygen gas was wasted and the oxygen recovery rate was reduced.
  • Example 3 of Patent Document 2 the mixed gas is always supplied and the vacuum pump is continuously operated to perform cleaning using the residual concentrated oxygen gas in the adsorption tower.
  • the vacuum pump air volume and the blower air volume are the same, there is a problem that the concentrated oxygen gas generation amount is smaller than that of Example 1 in which the cleaning is not performed and the concentrated oxygen gas cannot be obtained efficiently.
  • the oxygen concentration is low when the residual concentrated oxygen gas is supplied into the adsorption tower by constantly supplying the mixed gas and continuously using the vacuum pump. Since the mixed gas and the residual concentrated oxygen gas are mixed, it is conceivable that the oxygen concentration of the cleaning gas is lowered and the regeneration effect of the adsorbent by cleaning is reduced.
  • Patent Document 2 in which a mixed gas is always charged and a vacuum pump is continuously used to perform cleaning with residual concentrated oxygen gas in the adsorption tower is provided with a blower attached to the adsorption tower having a high pressure. Since the mixed gas is supplied and used, the blower is loaded and considered to be undesirable from the viewpoint of reducing the power consumption rate.
  • JP 11-179133 A Japanese Patent Laid-Open No. 2-119915
  • the present invention has been conceived under such circumstances, and in producing a product gas in which a target gas is concentrated by a PSA method from a mixed gas containing a target gas and an unnecessary gas, the target gas is recovered.
  • the main object is to provide a method suitable for reducing the power consumption while suppressing the decrease in efficiency.
  • a method for producing a target gas according to an embodiment of the present invention includes a first adsorption tower and a second adsorption packed with an adsorbent that selectively adsorbs the unnecessary gas from a mixed gas containing the target gas and the unnecessary gas.
  • the above-described problems are solved in producing a product gas in which the above target gas is concentrated by a pressure fluctuation adsorption method performed using a tower.
  • the mixed gas is supplied to the first adsorption tower in a state where the first adsorption tower and the second adsorption tower are in communication with each other, while the gas in the tower is supplied from the second adsorption tower.
  • step 4 for exhausting the gas in the tower, and in the state where the first adsorption tower and the second adsorption tower are in communication, the gas in the tower is exhausted from the second adsorption tower, In step 5 for supplying the mixed gas to the first a
  • At least a part of the supply of the mixed gas to the first adsorption tower and the second adsorption tower is performed using a turbo blower.
  • the pressure drop in the adsorption tower on the mixed gas introduction side at the start and end of the step is caused by the adsorption through the steps 1 to 6. It is in the range of -5 to 25%, in particular 0 to 15%, of the pressure difference between the highest and lowest pressures in the column.
  • the time ratio occupied by each step of step 1 and step 4 with respect to the time of one cycle according to steps 1 to 6 is 2 to 18%, particularly 6 to 14%.
  • the pressure difference between the first adsorption tower and the second adsorption tower is within 5 kPa.
  • the product gas derived from the adsorption tower in each of the steps 3 and 6 is temporarily stored in a storage tank.
  • the adsorbing tower into which the mixed gas is introduced and the storage tank are communicated with each other in addition to the introduction of the mixed gas. And the operation of increasing the pressure by sending the product gas in the storage tank to the adsorption tower.
  • the introduction of the mixed gas is not performed at the initial stage of the steps without connecting the adsorption tower into which the mixed gas is introduced and the storage tank. Includes an operation for boosting the adsorption tower.
  • the optimum duration for performing Step 3 and Step 6 is calculated according to the temperature of the mixed gas, and the duration of each step of Step 3 and Step 6 is updated.
  • the target gas is oxygen and the unnecessary gas is nitrogen.
  • the discharge pressure of the turbo blower is set higher than atmospheric pressure.
  • the method for producing a product gas of the present invention even when a mixed gas is always charged and a vacuum pump is continuously used, cleaning using the residual concentration target gas (gas containing a lot of product gas) in the adsorption tower is performed. In addition, even when the mixed gas is supplied to a relatively high pressure during the cleaning, the power consumption can be reduced.
  • FIG. 1 shows a schematic configuration of a product gas production apparatus X1 that can be used to execute a method for producing concentrated oxygen gas according to an embodiment of the present invention.
  • the product gas production apparatus X1 includes two adsorption towers 10A and 10B, a turbo blower 21, a vacuum pump 22, a storage tank 23, and pipes 31 to 37.
  • the product gas production apparatus X1 is configured to be capable of concentrating and separating oxygen from a mixed gas (usually air) containing oxygen and nitrogen using a pressure fluctuation adsorption method (PSA method).
  • PSA method pressure fluctuation adsorption method
  • Each of the adsorption towers 10A and 10B has gas passages 11 and 12 at both ends, and is filled with a filler for selectively adsorbing nitrogen contained in the mixed gas between the gas passages 11 and 12. Yes.
  • the adsorbent include LiX-type zeolite, CaA-type zeolite, and CaX-type zeolite, and these may be used alone or in combination.
  • the turbo blower 21 is for sending the mixed gas to the adsorption towers 10A and 10B.
  • the vacuum pump 22 is for depressurizing the inside of the adsorption towers 10A and 10B.
  • a roots type is used as the vacuum pump 22.
  • the storage tank 23 is an empty container for temporarily storing gas (product oxygen gas described later) derived from the adsorption towers 10A and 10B.
  • the pipe 31 has a main line 31 'having a mixed gas introduction end E1, and branch lines 31A and 31B each connected to the gas passage 11 side of the adsorption towers 10A and 10B.
  • a turbo blower 21 and an automatic valve 31c are provided in the main line 31 '.
  • the branch lines 31A and 31B are provided with automatic valves 31a and 31b that can switch between an open state and a closed state.
  • a thermometer 40 is attached to the main line 31 ′ of the pipe 31.
  • the pipe 32 has a main line 32 ′ having a gas discharge end E ⁇ b> 2 and branch lines 32 ⁇ / b> A and 32 ⁇ / b> B each connected to the gas passage 11 side of the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B.
  • a vacuum pump 22 is provided in the main line 32 '.
  • the branch lines 32A and 32B are provided with automatic valves 32a and 32b capable of switching between an open state and a closed state.
  • the pipe 33 has a main line 33 ′ having a storage tank connection end E ⁇ b> 3 and branch lines 33 ⁇ / b> A and 33 ⁇ / b> B each connected to the gas passage 12 side of the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B.
  • the branch lines 33A and 33B are provided with automatic valves 33a and 33b capable of switching between an open state and a closed state.
  • the pipe 34 is connected to the branch lines 33A and 33B of the pipe 33 in a bridge shape. Thereby, the gas passage ports 12 of the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B communicate with each other via the pipe 34.
  • the pipe 34 is provided with an automatic valve 34a capable of switching between an open state and a closed state, and a flow rate adjusting valve 34b (flow rate adjusting means).
  • the piping 35 has one end connected to the storage tank 23 and the other end has a product gas extraction end E4. Thereby, the product oxygen gas temporarily stored in the storage tank 23 is taken out via the pipe 35.
  • the pipe 36 is connected to the main line 31 ′ of the pipe 31 at both ends. More specifically, one end of the pipe 36 is connected to the main line 31 ′ upstream of the suction port of the turbo blower 21, and the other end is connected to the main line 31 ′ downstream of the discharge port of the turbo blower 21.
  • the pipe 36 functions as a bypass line for bypassing the mixed gas introduced into the main line 31 ′ without passing through the turbo blower 21 and supplying the mixed gas to the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B.
  • the pipe 37 has one end connected in a branched manner to the main line 31 ′ of the pipe 31 and the other end open to the atmosphere. Specifically, one end of the pipe 37 is connected to the main line 31 ′ between the discharge port side of the turbo blower 21 and the downstream connection end to the main line 31 ′ in the bypass pipe 36.
  • the pipe 37 is provided with a flow rate adjustment valve 37a. Further, the automatic valve 31c provided in the main line 31 'is between the connection end of the pipe 37 to the main line 31' and the downstream side connection end to the main line 31 'in the pipe 36.
  • the product gas production method can be executed.
  • the automatic valve 31a, 31b, 31c, 32a, 32b, 33a, 33b, 34a, 36a, and the flow rate control valve 34b are appropriately switched, and a desired gas flow state in the apparatus. And one cycle consisting of the following steps 1 to 6 can be repeated.
  • FIG. 2 schematically shows a gas flow state in the product gas production apparatus X1 in steps 1 to 6.
  • step 3 includes sub-step 3-1 and sub-step 3-2
  • step 6 includes sub-step 6-1 and sub-step 6-2.
  • step 1 the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and a gas flow state as shown in FIG. 2A is achieved.
  • the mixed gas is supplied from the gas passage port 11 through the pipe 31. Since the adsorption tower 10A has been previously adsorbed (AS) (see sub-step 6-2 shown in FIG. 2 (h)), it is in a relatively high pressure state at the start of step 1 and is in the tower. In this case, gas containing a large amount of product oxygen gas remains.
  • the maximum pressure inside the adsorption tower 10A in the sub-step 6-2 for performing adsorption is, for example, 5 to 40 kPaG (gauge pressure: the same applies hereinafter), and preferably 10 to 30 kPaG.
  • desorption is performed first (see sub-step 6-2 shown in FIG. 2 (h)), and the gas in the tower is continuously passed through the gas passage port 11 by the vacuum pump 22. It is led out of the tower as off-gas. The off-gas is discharged out of the system via the branch line 32B and the main trunk line 32 '.
  • the minimum pressure inside the adsorption tower 10B in the sub-step 6-2 for performing desorption is, for example, ⁇ 80 to ⁇ 45 kPaG, and preferably ⁇ 75 to ⁇ 55 kPaG.
  • Step 1 the gas passage ports 12 of the adsorption towers 10A and 10B communicate with each other via the pipe 34.
  • the internal pressure of the adsorption tower 10A at the start of Step 1 is substantially the same as the maximum pressure in Sub-Step 6-2 where the adsorption was performed previously.
  • the adsorption tower 10A depressurizes while releasing the residual concentrated oxygen gas (gas containing a large amount of product oxygen gas) from the gas passage port 12, while the adsorption tower 10B releases from the adsorption tower 10A.
  • the residual concentrated oxygen gas thus introduced is introduced from the gas passage port 12, and pressure increase / cleaning (PR / RS) having a cleaning effect is performed.
  • Step 1 the internal pressure of the adsorption tower 10A is controlled, for example, by appropriately adjusting the flow rate adjustment valve 34b or by adjusting the duration of Step 1.
  • the internal pressure of the adsorption tower 10A is lower at the end of step 1 than at the start (pressure reduction: DP), substantially the same as the start (pressure keep: PK), or higher than at the start. (Pressure: PR) can occur.
  • the internal pressure of the adsorption tower 10A at the end of step 1 is, for example, 5 to 40 kPaG.
  • the change in pressure in the adsorption tower 10A on the mixed gas introduction side from the start to the end of step 1 is, for example, a ratio of ⁇ 5 to 25% with respect to the pressure difference between the maximum pressure and the minimum pressure in the adsorption tower 10A. Preferably, it is 0 to 15%.
  • the internal pressure of the adsorption tower 10A is higher than the internal pressure of the adsorption tower 10B. The above step 1 is continued for 4 seconds, for example.
  • the storage tank 23 is filled with product oxygen gas (concentrated oxygen gas).
  • product oxygen gas concentrated oxygen gas
  • the product oxygen gas derived from the adsorption tower 10B in sub-step 3-1 to be described later is sent to the storage tank 23, and the product oxygen gas derived from the adsorption tower 10A in sub-step 6-1 to be described later is stored in the storage tank 23. Is sent out.
  • the product oxygen gas in the storage tank 23 is taken out through the pipe 35 and used after the flow rate is adjusted.
  • product oxygen gas is continuously acquired from the storage tank 23 at a constant flow rate.
  • step 2 the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 2B is achieved.
  • the inside of the tower is depressurized by the vacuum pump 22 and nitrogen is desorbed from the adsorbent (decompression / desorption: DP / DS), and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11.
  • the off-gas is discharged out of the system through the branch line 32A and the main line 32 '.
  • the adsorption tower 10 ⁇ / b> B the mixed gas is supplied from the gas passage port 11 via the pipe 31.
  • Step 2 the gas passages 12 and 12 of the adsorption towers 10A and 10B are communicated with each other through the pipe 34, following Step 1.
  • the adsorption tower 10A is in a relatively high pressure state as compared to the adsorption tower 10B.
  • the concentrated oxygen gas remaining in the vicinity of the gas passage port 12 is decompressed while being released from the gas passage port 12.
  • the adsorption tower 10B the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage 12 following step 1, and pressure increase / recovery (PR / RC) is performed.
  • Step 2 the opening degree of the flow rate adjusting valve 34b is adjusted so that the pressure difference between the adsorption tower 10A and the adsorption tower 10B is within a predetermined range.
  • the internal pressure of the adsorption tower 10A and the internal pressure of the adsorption tower 10B are approximate or the same pressure.
  • the pressure difference between the adsorption tower 10A and the adsorption tower 10B at the end of step 2 is within 5 kPaG.
  • the internal pressure of the adsorption tower 10B is lower than the internal pressure of the storage tank 23.
  • the above step 2 is continued for 4 seconds, for example.
  • step 3 includes sub-step 3-1 that continues from the start of step 3 (immediately after the end of step 2) to the elapse of a predetermined time, and sub-step 3-2 that is performed after sub-step 3-1. Including.
  • sub-step 3-1 the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 2 (c) is achieved.
  • the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11.
  • the off-gas is discharged out of the system.
  • the adsorption tower 10 ⁇ / b> B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 2.
  • sub-step 3-1 the communication between the adsorption towers 10A and 10B is cut off, while the gas passage port 12 and the storage tank 23 of the adsorption tower 10B communicate with each other via the main line 33 'and the branch line 33B. Yes.
  • the adsorption tower 10B is in a relatively low pressure state as compared with the storage tank 23. Accordingly, after the start of sub-step 3-1, the product oxygen gas in the storage tank 23 is released to the main line 33 '.
  • the product oxygen gas released from the storage tank 23 is introduced from the gas passage port 12, and pressure increase (PR) is performed.
  • PR pressure increase
  • the internal pressure of the adsorption tower 10B and the internal pressure of the storage tank 23 are substantially the same pressure.
  • the sub-step 3-1 is continued for 2 seconds, for example.
  • sub-step 3-2 the automatic valves 31b, 32a, and 33b are continuously opened, and the gas flow state as shown in FIG. 2D is achieved.
  • the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. Is done. The off-gas is discharged out of the system.
  • the adsorption tower 10B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1.
  • the internal pressure continues to decrease, and at the end of the sub-step 3-2, the inside of the adsorption tower 10A reaches the minimum pressure.
  • the minimum pressure is, for example, ⁇ 80 to ⁇ 45 kPaG, and preferably ⁇ 75 to ⁇ 55 kPaG.
  • the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B.
  • the adsorption tower 10B and the storage tank 23 have substantially the same pressure.
  • the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35.
  • the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 ⁇ / b> B toward the storage tank 23.
  • the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2, the internal pressure of the adsorption tower 10B reaches the maximum pressure.
  • the maximum pressure is, for example, 5 to 40 kPaG, and preferably 10 to 30 kPaG.
  • the sub-step 3-2 is continued for 15 seconds, for example.
  • the operation performed on the adsorption tower 10A in steps 1 to 3 is performed on the adsorption tower 10B, and the operation performed on the adsorption tower 10B is performed. It carries out for the adsorption tower 10A.
  • step 4 the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and a gas flow state as shown in FIG. 2 (e) is achieved.
  • step 5 the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 2 (f) is achieved.
  • sub-step 6-1 the automatic valves 31a, 32b, 33a are opened, and the gas flow state as shown in FIG. 2 (g) is achieved.
  • sub-step 6-2 the automatic valves 31a, 32b, and 33a are continuously opened, and the gas flow state as shown in FIG. 2 (h) is achieved.
  • the adsorption tower 10B is in the same state as the adsorption tower 10A in steps 1 and 2 and sub-steps 3-1 and 3-2.
  • the adsorption tower 10A is in the same state as the adsorption tower 10B in steps 1 and 2 and sub-steps 3-1 and 3-2.
  • the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously acquired by repeatedly performing the cycle including the above steps 1 to 6 in each of the adsorption towers 10A and 10B.
  • the time of one cycle (cycle time) in steps 1 to 6 is 50 seconds.
  • the recovery rate of the product oxygen gas can be increased by reducing or eliminating the cleaning with the product oxygen gas in the storage tank 23.
  • the mixed gas is supplied to the adsorption towers 10 ⁇ / b> A and 10 b using a turbo blower 21.
  • the turbo blower 21 consumes less power when the discharge pressure is higher than atmospheric pressure. Therefore, by using the turbo blower 21 to supply the mixed gas, the mixed gas is supplied to a relatively high pressure state during cleaning using the residual concentrated oxygen gas in the adsorption towers 10A and 10B ( In addition to efficiently supplying the mixed gas, the power consumption can be reduced efficiently.
  • the decrease The ratio is controlled to 25% or less, preferably 15% or less of the pressure difference between the maximum pressure and the minimum pressure in each adsorption tower.
  • the time ratio occupied by each step of Step 1 and Step 4 is, for example, 2 to 18% with respect to the time of one cycle (50 seconds) according to Steps 1 to 6, and preferably 6 ⁇ 14%.
  • the pressure difference between the 10A adsorption tower and the adsorption tower 10B is within 5 kPaG.
  • the time ratio occupied by steps 1 and 4 is 2 to 18%, preferably 6 to 14% of the cycle time of steps 1 to 6, and at the end of steps 2 and 5, the adsorption tower Adjusting the opening of the flow rate control valve 34b so that the pressure difference between 10A and 10B is within 5 kPaG enables the product oxygen gas (concentrated oxygen gas) to be recovered efficiently, and the necessary adsorption while reducing the power consumption rate. The dosage can be reduced.
  • the optimum duration for performing steps 3 and 6 is calculated according to the outside air temperature, and the duration of steps 3 and 6 is repeated in the process of repeating the manufacturing cycle. May be updated.
  • product oxygen gas concentrated oxygen gas
  • the oxygen content per unit volume varies depending on the change in temperature.
  • the nitrogen adsorption capacity of the adsorbent varies with changes in temperature. Therefore, in order to maintain the oxygen concentration of the product oxygen gas and the product flow rate at the set values, it is necessary to shorten the cycle time when the temperature rises and lengthen the cycle time when the temperature falls.
  • thermometer 40 temperature measuring means
  • the optimum duration time for performing Step 3 and Step 6 is calculated, and the duration time of Step 3 and Step 6 is updated, The oxygen concentration and product flow rate can be automatically maintained at the set values.
  • sub-step 3-1 in step 3 is to open the automatic valve 33b while the internal pressure of the storage tank 23 is higher than the internal pressure of the adsorption tower 10B, and to connect the adsorption tower 10B and the storage tank 23.
  • the pressure in the adsorption tower 10B is increased with the oxygen-enriched gas in the storage tank 23 as a product.
  • the sub-step 3-1 is omitted, and the automatic valve 33b is opened at the sub-step 3-2 to delay the timing for communicating the adsorption tower 10B and the storage tank 23, so that the adsorption is performed with the oxygen-enriched gas as the product. It is not necessary to boost the tower 10B.
  • step 2 is continued until the internal pressure of the adsorption tower 10B becomes equal to the internal pressure of the storage tank 23, and then step 3 (sub-step 3-2) is performed. That is, sub-step 3-1 in step 3 may be omitted. Similarly, sub-step 6-1 in step 6 may be omitted.
  • the discharge pressure of the turbo blower 21 is always higher than the atmospheric pressure.
  • supplying the mixed gas when supplying the mixed gas to the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B having a pressure lower than the atmospheric pressure, mixing is performed using the supply pressure of the mixed gas itself from the bypass pipe 36 bypassing the turbo blower 21. Gas can be supplied. Further, instead of the bypass pipe 36, a means for separately supplying a mixed gas using its own supply pressure may be employed. Thus, when supplying mixed gas using the supply pressure of mixed gas itself, the turbo blower 21 will be in an idle operation state.
  • the discharge pressure of the turbo blower 21 during the idling operation of the turbo blower 21 is effective for reducing the power consumption (atmospheric pressure).
  • the discharge pressure of the turbo blower 21 can be adjusted, for example, by closing the automatic valve 31c on the downstream side of the turbo blower 21 and adjusting the opening of the flow rate adjustment valve 37a provided in the pipe 37.
  • the cleaning using the residual concentrated oxygen gas in the adsorption towers 10A and 10B is effectively performed. Can be done. Further, by limiting the pressure drop in the adsorption tower (the adsorption tower 10A in Step 1 and the adsorption tower 10B in Step 4) on the mixed gas supply side during cleaning, the reduction in the oxygen concentration of the cleaning gas is suppressed and efficiently performed. The adsorbent can be regenerated. This is preferable for recovering the product oxygen gas at a high concentration and a high recovery rate.
  • FIG. 3 shows another example of a product gas manufacturing method configured to repeat one cycle consisting of steps 1 to 6 in which a part of the steps is different from the case described above with reference to FIG.
  • the automatic valves 31b and 32a are opened, and the gas flow state as shown in FIG.
  • the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11.
  • the off-gas is discharged out of the system.
  • the adsorption tower 10 ⁇ / b> B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 2.
  • sub-step 3-1 the communication between the adsorption towers 10A and 10B is cut off, and the communication between the gas passage 12 of the adsorption tower 10B and the storage tank 23 is also cut off (automatically).
  • the valve 33b is closed). Therefore, in the adsorption tower 10B, the pressure is increased only by supplying the mixed gas, and the pressure is not increased by the product oxygen gas.
  • the internal pressure of the adsorption tower 10B is substantially the same as the internal pressure of the storage tank 23 or higher than the internal pressure of the storage tank 23. This sub-step 3-1 is continued for 4 seconds, for example.
  • sub-step 3-2 the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 3D is achieved.
  • the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system.
  • the adsorption tower 10B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1.
  • the internal pressure continues to decrease, and at the end of sub-step 3-2, the inside of the adsorption tower 10A reaches the minimum pressure.
  • the minimum pressure is, for example, ⁇ 80 to ⁇ 45 kPaG, and preferably ⁇ 75 to ⁇ 55 kPaG.
  • the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B.
  • the internal pressure of the adsorption tower 10B is substantially the same as the internal pressure of the storage tank 23 or higher than the internal pressure of the storage tank 23.
  • the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35.
  • the internal pressure of the storage tank 23 decreases.
  • a gas flow is generated from the adsorption tower 10 ⁇ / b> B toward the storage tank 23.
  • the internal pressure rises and nitrogen contained in the mixed gas is adsorbed by the adsorbent.
  • product oxygen gas enriched with oxygen is led out from the gas passage port 12.
  • the product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '.
  • the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2, the internal pressure of the adsorption tower 10B reaches the maximum pressure.
  • the maximum pressure is, for example, 5 to 40 kPaG, and preferably 10 to 30 kPaG.
  • the substep 3-2 is continued for 13 seconds, for example.
  • the operation performed on the adsorption tower 10A in steps 1 to 3 is performed on the adsorption tower 10B, and the operation performed on the adsorption tower 10B is performed. It carries out for the adsorption tower 10A.
  • the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously acquired by repeatedly performing the cycle including the above steps 1 to 6 in each of the adsorption towers 10A and 10B.
  • the time of one cycle (cycle time) in steps 1 to 6 is 50 seconds.
  • the communication between the storage tank 23 and the adsorption towers 10B and 10A is interrupted in the sub-step 3-1 and the sub-step 6-1.
  • the pressure in the adsorption towers 10B and 10A is increased only by supplying the mixed gas, and the pressure is not increased by the product oxygen gas.
  • the timing for switching to the next sub-steps 3-2 and 6-2 is 2 seconds later than in the case shown in FIG. (Sub-steps 3-1 and 6-1 shown in FIG. 2 take 2 seconds, whereas sub-steps 3-1 and 6-1 shown in FIG. 3 take 4 seconds), and the next sub-step 3-2 And the duration of 6-2 is shortened by 2 seconds.
  • a cycle composed of a plurality of steps that is repeatedly performed in each of the adsorption towers 10A and 10B by the PSA method is not limited to the above embodiment.
  • the method for producing a product gas according to the present invention is not limited to the application to the oxygen PSA that concentrates and separates oxygen as in the above embodiment, but is applied to the gas separation by the PSA method using other gas components as target gases. May be.
  • Example 1 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • adsorption towers 10A and 10B cylindrical ones having a capacity of about 2 L (2 dm 3 ) were used, and each of the adsorption towers 10A and 10B was filled with 1.2 kg of LiX type zeolite as an adsorbent.
  • the same adsorption towers 10A and 10B and adsorbent used in this example were used.
  • each step is 4 seconds for Step 1, 4 seconds for Step 2, 2 seconds for Sub Step 3-1, 15 seconds for Sub Step 3-2, 4 seconds for Step 4, 4 seconds for Step 5, Step 6-1 was 2 seconds, sub-step 6-2 was 15 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds.
  • the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG
  • the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to -65 kPaG.
  • the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 15 kPaG. At this time, the internal pressures of the adsorption towers 10A and 10B at the end of steps 2 and 5 were the same.
  • the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure ( ⁇ 65 kPaG) of the adsorption towers 10A and 10B. ) And a pressure difference (85 kPa) with respect to 5.9).
  • the mixed gas supply amount is 827 NL / h (N indicates a standard state, and the same applies hereinafter), and the product oxygen gas flow rate is 102 NL / h. h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16372m 3 / h, required air volume of the turbo blower 21 became 8887Nm 3 / h.
  • Roots type vacuum pump (model number: TLIF-400WP) manufactured by Otsuchi Machine Industry Co., Ltd. (Kumage-gun, Yamaguchi, Japan, URL: https://www.taiko-kk.com/) as a vacuum pump 22 and a turbo blower 21
  • a turbo blower model number: 12A112XY
  • Niji Gi Co., Ltd. Hatenji, Hyogo, Japan, URL: http://www.kogi.co.jp/
  • the power intensity was calculated with the efficiency constant at 95% and the motor efficiency of the turbo blower 21 at constant 65%.
  • Example 2 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the product oxygen gas production method including the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • each step is 4 seconds for Step 1, 4 seconds for Step 2, 4 seconds for Sub Step 3-1, 13 seconds for Sub Step 3-2, 4 seconds for Step 4, and Step 5 Is 4 seconds
  • sub-step 6-1 is 4 seconds
  • sub-step 6-2 is 13 seconds
  • the time cycle of one cycle consisting of steps 1 to 6 is 50 seconds.
  • the pressure of the adsorption towers 10B and 10A using the product oxygen gas in the storage tank 23 was not increased.
  • the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG
  • the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to -65 kPaG.
  • the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 15 kPaG.
  • the internal pressures of the adsorption towers 10A and 10B at the end of steps 2 and 5 were the same.
  • the mixed gas supply amount was 824 NL / h and the product oxygen gas flow rate was 99 NL / h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16582m 3 / h, required air volume of the turbo blower 21 became 8987Nm 3 / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (per unit of power) per 1 Nm 3 of oxygen was 0.290 kWh.
  • Example 3 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 20 kPaG.
  • the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure ( ⁇ 65 kPaG) of the adsorption towers 10A and 10B. ) And 0% of the pressure difference (85 kPa).
  • Other operating conditions were the same as in Example 1 above.
  • the mixed gas supply amount was 882 NL / h and the product oxygen gas flow rate was 102 NL / h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16963m 3 / h, required air volume of the turbo blower 21 became 9269Nm 3 / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.296 kWh.
  • Example 4 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • the flow rate control valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side became 10 kPaG.
  • the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure ( ⁇ 65 kPaG) of the adsorption towers 10A and 10B. ) And 11.8% of the pressure difference (85 kPa).
  • Other operating conditions were the same as in Example 1 above.
  • the mixed gas supply amount was 788 NL / h
  • the product oxygen gas flow rate was 97 NL / h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion
  • required air volume of the vacuum pump 22 is 16324m 3 / h
  • required air volume of the turbo blower 21 became 8756Nm 3 / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.289 kWh.
  • Example 5 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • the duration of each step is as follows: Step 1 is 6 seconds, Step 2 is 4 seconds, Sub-step 3-1 is 2 seconds, Sub-step 3-2 is 13 seconds, Step 4 is 6 seconds, Step 5 4 seconds, sub-step 6-1 was 2 seconds, sub-step 6-2 was 13 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds.
  • Other operating conditions were the same as in Example 1 above.
  • the mixed gas supply amount was 923 NL / h
  • the product oxygen gas flow rate was 110 NL / h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion
  • required air volume of the vacuum pump 22 is 16862m 3 / h
  • required air volume of the turbo blower 21 became 9016Nm 3 / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.296 kWh.
  • Example 6 the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.
  • each step is as follows: step 1 is 2 seconds, step 2 is 4 seconds, sub-step 3-1 is 2 seconds, sub-step 3-2 is 17 seconds, step 4 is 2 seconds, step 5 4 seconds, sub-step 6-1 was 2 seconds, sub-step 6-2 was 17 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds.
  • step 1 is 2 seconds
  • step 2 is 4 seconds
  • sub-step 3-1 is 2 seconds
  • sub-step 3-2 17 seconds
  • step 4 is 2 seconds
  • sub-step 6-1 was 2 seconds
  • sub-step 6-2 was 17 seconds
  • the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds.
  • Other operating conditions were the same as in Example 1 above.
  • the mixed gas supply amount was 750 NL / h
  • the product oxygen gas flow rate was 90 NL / h.
  • oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion
  • required air volume of the vacuum pump 22 is 16749m 3 / h
  • required air volume of the turbo blower 21 became 9146Nm 3 / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.293 kWh.
  • Example 7 the product gas production apparatus X1 shown in FIG. 1 is used to concentrate the product gas from the air as the mixed gas by the product oxygen gas production method including the steps described with reference to FIG. Obtained oxygen gas.
  • the flow rate of the turbo blower 21 is adjusted by the flow rate adjustment valve 37a of the pipe 37 to increase the discharge pressure, and the discharge pressure of the turbo blower 21 is increased.
  • the operating conditions of the other steps were the same as in Example 1 above, and the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in Example 1 above.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.278 kWh.
  • step 1 ' the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 4A is achieved.
  • the adsorption tower 10A the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system.
  • the adsorption tower 10 ⁇ / b> B the mixed gas is supplied from the gas passage port 11 via the pipe 31.
  • step 1 ′ the gas passage ports 12 of the adsorption towers 10 ⁇ / b> A and 10 ⁇ / b> B communicate with each other through the pipe 34.
  • the concentrated oxygen gas remaining in the vicinity of the gas passage port 12 is decompressed (DP) while being released from the gas passage port 12.
  • the adsorption tower 10B the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage port 12, and pressure increase / recovery (PR / RC) is performed.
  • PR pressure increase / recovery
  • step 2 ' the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 4B is achieved.
  • the adsorption tower 10A following the step 1 ′, the inside of the tower is decompressed by the vacuum pump 22, nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. .
  • the off-gas is discharged out of the system.
  • the adsorption tower 10 ⁇ / b> B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 1 ′.
  • Step 2 ' the communication between the adsorption towers 10A and 10B is closed, while the gas passage port 12 of the adsorption tower 10B and the storage tank 23 are communicated with each other via the main line 33' and the branch line 33B.
  • the adsorption tower 10 ⁇ / b> B is in a relatively low pressure state as compared to the storage tank 23. Therefore, after the start of step 2 ′, the product oxygen gas in the storage tank 23 is released to the main line 33.
  • the product oxygen gas released from the storage tank 23 is introduced from the gas passage port 12, and pressure increase (PR) is performed.
  • PR pressure increase
  • step 3 ′ is performed after sub-step 3-1 ′ that continues from the start of step 3 ′ (immediately after the end of step 2 ′) until the elapse of a predetermined time, and after sub-step 3-1 ′.
  • Sub-step 3-2 ′ is included.
  • sub-step 3-1 ' the automatic valves 31b, 32a and 33b are continuously opened, and the gas flow state as shown in FIG. 4C is achieved.
  • the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. .
  • the off-gas is discharged out of the system.
  • the adsorption tower 10B the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the step 2 '.
  • the internal pressure continues to decrease, and at the end of sub-step 3-1 ', the inside of the adsorption tower 10A reaches the minimum pressure.
  • sub-step 3-1 ′ following the step 2 ′, the adsorption tower 10 B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33 B.
  • the adsorption tower 10B and the storage tank 23 have substantially the same pressure.
  • the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35.
  • the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 ⁇ / b> B toward the storage tank 23.
  • sub-step 3-2 ' the automatic valves 31b, 32a, 33b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 4 (d) is achieved.
  • the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1 '.
  • the internal pressure is increased, and nitrogen contained in the mixed gas is adsorbed (AS) by the adsorbent.
  • product oxygen gas enriched with oxygen is led out from the gas passage port 12.
  • the product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '.
  • sub-step 3-2 ' the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2', the internal pressure of the adsorption tower 10B reaches the maximum pressure.
  • sub-step 3-2 ′ part of the product oxygen gas derived from the adsorption tower 10B is introduced as a cleaning gas into the adsorption tower 10A via the pipe 34, and the adsorbent in the adsorption tower 10A is washed (RS). Is done.
  • the inside of the tower is depressurized by the vacuum pump 22, and the gas in the tower is discharged outside the tower.
  • steps 4 ′ to 6 ′ as shown in FIGS. 4E to 4H, the operation performed on the adsorption tower 10A in steps 1 ′ to 3 ′ is performed on the adsorption tower 10B, and the adsorption tower 10B is performed.
  • the performed operation is performed on the adsorption tower 10A.
  • the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously obtained by repeatedly performing the cycle including the above steps 1 'to 6' in each of the adsorption towers 10A and 10B.
  • the duration of each step is 4 seconds for Step 1 ′, 2 seconds for Step 2 ′, 12 seconds for Sub-Step 3-1 ′, 7 seconds for Sub-Step 3-2 ′, and Step 4 ′ 4 seconds
  • step 5 ′ is 2 seconds
  • sub-step 6-1 ′ is 12 seconds
  • sub-step 6-2 ′ is 7 seconds
  • the time cycle of one cycle consisting of steps 1 ′ to 6 ′ is 50 seconds.
  • the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation is set to 20 kPaG
  • the adsorption tower 10A during the desorption operation is set.
  • 10B minimum pressure was -65 kPaG.
  • the flow rate adjustment valve 34b was adjusted so that the internal pressures of the adsorption towers 10B and 10A on the mixed gas supply side were the same.
  • the amount of product oxygen gas used as the cleaning gas was 180 NL / h.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.308 kWh.
  • step 1 the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 5A is achieved.
  • the adsorption tower 10 ⁇ / b> A the mixed gas is supplied from the gas passage port 11 through the pipe 31. Since the adsorption tower 10A has been previously adsorbed (see step 6 ′′ shown in FIG. 5 (f)), it is in a relatively high pressure state at the start of step 1, and product oxygen gas is introduced into the tower.
  • step 6 ′′ shown in FIG. 5 (f) desorption is performed first (see step 6 ′′ shown in FIG. 5 (f)), and the gas in the tower is continuously removed by the vacuum pump 22. It is led out of the tower as off-gas through the passage port 11. The off-gas is discharged out of the system via the branch line 32B and the main trunk line 32 '.
  • Step 1 ′′ the gas passages 12 and 12 of the adsorption towers 10A and 10B communicate with each other through the pipe 34.
  • the pressure is reduced (DP) with the release of the residual concentrated oxygen gas (the gas containing a large amount of product oxygen gas).
  • the adsorption tower 10B the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage port 12.
  • pressurization / recovery (PR / RC) having a cleaning effect is performed.
  • Step 2 ′′ the automatic valves 31b, 32a, and 33b are opened, and the gas flow state as shown in FIG. 5B is achieved.
  • the inside of the tower is depressurized by the vacuum pump 22 and adsorbed.
  • Nitrogen is desorbed (DS) from the agent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11.
  • the off-gas is discharged out of the system. It is supplied from the gas passage port 11 via the pipe 31.
  • step 2 ′′ the communication between the adsorption towers 10A and 10B is closed, while the gas passage port 12 and the storage tank 23 of the adsorption tower 10B communicate with each other via the main line 33 ′ and the branch line 33B.
  • the adsorption tower 10B is in a relatively low pressure state compared to the storage tank 23. Therefore, after the start of step 2 ′′, the product oxygen gas in the storage tank 23 is released to the main line 33.
  • the product oxygen gas released from the storage tank 23 is discharged from the gas passage port 12.
  • the pressure is increased (PR).
  • the internal pressure of the adsorption tower 10B and the internal pressure of the storage tank 23 are substantially the same pressure.
  • step 3 ′′ the automatic valves 31b, 32a, 33b are continuously opened, and the gas flow state as shown in FIG. 5C is achieved.
  • the vacuum pump 22 continues the tower with the vacuum pump 22 following step 2 ′′.
  • the inside is depressurized and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11.
  • the off-gas is discharged out of the system.
  • the adsorption tower 10B following step 2 ′′, the mixed gas is supplied from the gas passage port 11 through the pipe 31, and nitrogen contained in the mixed gas is adsorbed (AS).
  • AS adsorbed
  • Step 3 ′′ following Step 2 ′′, the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B.
  • the adsorption tower 10B and the storage tank 23 have substantially the same pressure.
  • the mixed gas is supplied to the adsorption tower 10B, so that the adsorption tower 10B While the internal pressure rises, the product oxygen gas is taken out from the storage tank 23 through the pipe 35, so that the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 ⁇ / b> B toward the storage tank 23.
  • the internal pressure of the adsorption tower 10B continues to rise, and at the end of step 3 ′′, the inside of the adsorption tower 10B reaches the maximum pressure.
  • steps 4 ′′ to 6 ′′ as shown in FIGS. 5D to 5F, the operations performed on the adsorption tower 10A in steps 1 ′′ to 3 ′′ are performed on the adsorption tower 10B, and the adsorption tower 10B is performed.
  • the performed operation is performed on the adsorption tower 10A.
  • the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously obtained by repeatedly performing the cycle including the above steps 1 "to 6" in each of the adsorption towers 10A and 10B.
  • Step 1 ′′ is 4 seconds
  • Step 2 ′′ is 2 seconds
  • Step 3 ′′ is 19 seconds
  • Step 4 ′′ is 4 seconds
  • Step 5 ′′ is 2 seconds
  • Step 6 ′′. was 19 seconds
  • the time cycle of one cycle consisting of steps 1 "to 6" was 50 seconds.
  • steps 3 ′′ and 6 ′′ the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG, and the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to ⁇ 65 kPaG.
  • the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10B and 10A on the mixed gas supply side became 1 kPaG.
  • the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment.
  • the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.318 kWh.
  • Table 1 shows the relationship between the amount of product oxygen gas generated per unit time (product oxygen gas flow rate) and the power intensity for the above examples and comparative examples.
  • the electricity price is 15 yen / kWh
  • the annual apparatus operating time is 8000 hours
  • the adsorbent price is 1700 yen / kg.
  • Table 2 shows a list of annual electricity charges and the price of the adsorbent used.
  • the power intensity can be reduced (less than about 0.3 kwh / Nm 3 ).

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Abstract

A method is disclosed for manufacturing a product gas that is a target gas that was concentrated from a mixed gas containing the target gas and an unnecessary gas by the pressure swing adsorption method. This method includes: a step 1 to supply a mixed gas to an adsorption tower (10A) and discharge gas from an adsorption tower (10B), and to have both adsorption towers communicate with each other; a step 2 to discharge gas from the adsorption tower (10A) and supply the mixed gas to the adsorption tower (10B), and to have both adsorption towers communicate with each other; a step 3 to discharge gas from the adsorption tower 10A and supply the mixed gas to the adsorption tower 10B, and to recover a product gas from the adsorption tower 10B; a step 4 to supply the mixed gas to the adsorption tower 10B and discharge gas from the adsorption tower 10A, and to have both adsorption towers communicate with each other; a step 5 to discharge gas from the adsorption tower 10B and supply the mixed gas to the adsorption tower 10A, and to have both adsorption towers communicate with each other; and a step 6 to discharge gas from the adsorption tower 10B and supply the mixed gas to the adsorption tower 10A, and to recover the product gas from the adsorption tower 10A.

Description

濃縮された目的ガスの製造方法Method for producing concentrated target gas

 本発明は、目的ガスおよび不要ガスを含む混合ガスから、圧力変動吸着法により目的ガスが濃縮された製品ガスを製造するための方法に関する。 The present invention relates to a method for producing a product gas in which a target gas is concentrated by a pressure fluctuation adsorption method from a mixed gas containing a target gas and an unnecessary gas.

 空気などの酸素(目的ガス)および窒素(不要ガス)を含む混合ガスから目的ガスとしての酸素を分離回収する方法として、圧力変動吸着法(PSA法)が知られている。PSA法により得られる濃縮酸素ガス(製品ガス)は、例えば、電炉製鋼、非鉄金属の精錬、ゴミ焼却、製紙、水処理施設での酸素曝気、オゾン発生装置などの酸素を多量に消費する分野において使用される他、小型のものは在宅医療用としても使用される。 A pressure fluctuation adsorption method (PSA method) is known as a method of separating and recovering oxygen as a target gas from a mixed gas containing oxygen (target gas) such as air and nitrogen (unnecessary gas). Concentrated oxygen gas (product gas) obtained by the PSA method is used in fields that consume large amounts of oxygen such as electric furnace steelmaking, nonferrous metal refining, garbage incineration, papermaking, oxygen aeration in water treatment facilities, ozone generators, etc. Besides being used, small ones are also used for home medical care.

 PSA法により酸素を濃縮回収する技術としては、複数の(例えば2~4)の吸着塔をを利用して、例えば吸着、減圧、脱着、昇圧を含むサイクルを各吸着塔で繰り返すことにより濃縮酸素ガスが高い回収率で得られるように工夫したものが知られている。吸着および昇圧の操作時にはブロワにより混合ガスが吸着塔へ供給され、減圧および脱着の操作時には真空ポンプにより吸着塔の内部が減圧される。複数の吸着塔を用いて行うPSA法の中でも、2塔の吸着塔を用いる場合において、電力原単位(単位酸素発生量あたりのガス分離操作に係る消費電力)や装置製造コスト等について、様々な改良が試みられており、電力原単位低減の観点から、ブロワと真空ポンプを効率良く使用する方法が以前から提案されている。 As a technique for concentrating and recovering oxygen by the PSA method, a plurality of (for example, 2 to 4) adsorption towers are used, for example, a cycle including adsorption, depressurization, desorption, and pressurization is repeated in each adsorption tower to concentrate oxygen. What was devised so that gas can be obtained with a high recovery rate is known. The gas mixture is supplied to the adsorption tower by a blower during the adsorption and pressurization operations, and the inside of the adsorption tower is decompressed by a vacuum pump during the depressurization and desorption operations. Among the PSA methods carried out using a plurality of adsorption towers, when two adsorption towers are used, there are various power unit consumption (power consumption related to gas separation operation per unit oxygen generation amount), apparatus manufacturing costs, etc. Improvements have been attempted, and a method of efficiently using a blower and a vacuum pump has been proposed from the viewpoint of reducing power consumption.

 具体的には、2塔式のPSA法で、連続的に混合ガスの供給を行ない、且つ真空ポンプを連続的に使用して吸引排気を行なうシステムにおいて、製品となる濃縮酸素ガスを用いて吸着剤を洗浄するシステム(例えば特許文献1参照)や、吸着塔内の残留濃縮酸素ガスを用いて吸着剤を洗浄するシステム(例えば特許文献2の実施例3参照)が知られている。 Specifically, in a system in which a mixed gas is continuously supplied by the two-column PSA method and suction and exhaust are performed continuously using a vacuum pump, adsorption is performed using concentrated oxygen gas as a product. A system for cleaning the adsorbent (see, for example, Patent Document 1) and a system for cleaning the adsorbent using the residual concentrated oxygen gas in the adsorption tower (for example, see Example 3 of Patent Document 2) are known.

 一般的に、PSAガス分離装置は数年で使用不可になるようなものではなく、10年以上の長期使用が前提である。このため、電力原単位の低減と装置製造コストの低減はどちらも有用であるが、特に電力原単位の低減が強く望まれている。特許文献1に開示された技術では、混合ガスを常に投入し且つ真空ポンプを連続稼動して電力原単位低減を試みているが、製品となる濃縮酸素ガスを用いて洗浄をしているため、濃縮酸素ガスを無駄に消費し、酸素の回収率が低下するという問題があった。 Generally, the PSA gas separation device is not supposed to be unusable in a few years, and it is assumed that it will be used for a long period of 10 years or longer. For this reason, both the reduction of the power consumption rate and the reduction of the device manufacturing cost are useful, but the reduction of the power consumption rate is particularly strongly desired. In the technique disclosed in Patent Document 1, the mixed gas is always supplied and the vacuum pump is continuously operated to try to reduce the power consumption, but because the product is cleaned using the concentrated oxygen gas as the product, There was a problem that the concentrated oxygen gas was wasted and the oxygen recovery rate was reduced.

 また、特許文献2の実施例3の技術では、混合ガスを常に投入し且つ真空ポンプを連続稼動しており、吸着塔内の残留濃縮酸素ガスを用いた洗浄を行なっている。しかし、真空ポンプ風量とブロワ風量が同じ条件では、洗浄を行わない同文献の実施例1よりも濃縮酸素ガス発生量が少なくなっており効率よく濃縮酸素ガスを得ることができないという問題があった。 Further, in the technique of Example 3 of Patent Document 2, the mixed gas is always supplied and the vacuum pump is continuously operated to perform cleaning using the residual concentrated oxygen gas in the adsorption tower. However, when the vacuum pump air volume and the blower air volume are the same, there is a problem that the concentrated oxygen gas generation amount is smaller than that of Example 1 in which the cleaning is not performed and the concentrated oxygen gas cannot be obtained efficiently. .

 上記のように濃縮酸素ガスを効率よく発生できない問題の原因としては、混合ガスを常に投入し且つ真空ポンプを連続して使用して吸着塔内に残留濃縮酸素ガスを供給すると、酸素濃度が低い混合ガスと残留濃縮酸素ガスとが混ざってしまうため、洗浄ガスの酸素濃度が低くなり、洗浄による吸着剤の再生効果が低下してしまうことが考えられる。 As a cause of the problem that the concentrated oxygen gas cannot be efficiently generated as described above, the oxygen concentration is low when the residual concentrated oxygen gas is supplied into the adsorption tower by constantly supplying the mixed gas and continuously using the vacuum pump. Since the mixed gas and the residual concentrated oxygen gas are mixed, it is conceivable that the oxygen concentration of the cleaning gas is lowered and the regeneration effect of the adsorbent by cleaning is reduced.

 また、特許文献2の技術である、混合ガスを常に投入し且つ真空ポンプを連続使用して吸着塔内の残留濃縮酸素ガスでの洗浄を実施するシステムは、高い圧力を有する吸着塔にブロワを用いて混合ガスを供給することになるため、ブロワでは負荷がかかり電力原単位低減の観点からは好ましくないと考えられていた。 In addition, the system of Patent Document 2 in which a mixed gas is always charged and a vacuum pump is continuously used to perform cleaning with residual concentrated oxygen gas in the adsorption tower is provided with a blower attached to the adsorption tower having a high pressure. Since the mixed gas is supplied and used, the blower is loaded and considered to be undesirable from the viewpoint of reducing the power consumption rate.

特開平11-179133号公報JP 11-179133 A 特開平2-119915号公報Japanese Patent Laid-Open No. 2-119915

 本発明は、このような事情の下で考え出されたものであって、目的ガスおよび不要ガスを含む混合ガスからPSA法により目的ガスが濃縮された製品ガスを製造するにあたり、目的ガスの回収効率の低下を抑制しつつ電力原単位の低減を図るのに適した方法を提供することを主たる課題とする。 The present invention has been conceived under such circumstances, and in producing a product gas in which a target gas is concentrated by a PSA method from a mixed gas containing a target gas and an unnecessary gas, the target gas is recovered. The main object is to provide a method suitable for reducing the power consumption while suppressing the decrease in efficiency.

 本発明の実施形態に係る目的ガスの製造方法は、目的ガスおよび不要ガスを含む混合ガスから、上記不要ガスを選択的に吸着する吸着剤が充填された第1の吸着塔および第2の吸着塔を用いて行う圧力変動吸着法により、上記目的ガスが濃縮された製品ガスを製造するにあたって、上記課題を解決する。上記方法は、上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第1の吸着塔に上記混合ガスを供給する一方、上記第2の吸着塔から塔内ガスの排気を行うステップ1と、上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第1の吸着塔から塔内ガスの排気を行う一方、上記第2の吸着塔に上記混合ガスを供給するステップ2と、上記第1の吸着塔と上記第2の吸着塔とを連通させない状態にて、上記第1の吸着塔から塔内ガスの排気を行う一方、上記第2の吸着塔に上記混合ガスを供給し、上記第2の吸着塔からの製品ガスの回収を少なくとも一部の時間において行うステップ3と、上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第2の吸着塔に上記混合ガスを供給する一方、上記第1の吸着塔から塔内ガスの排気を行うステップ4と、上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第2の吸着塔から塔内ガスの排気を行う一方、上記第1の吸着塔に上記混合ガスを供給するステップ5と、上記第1の吸着塔と上記第2の吸着塔とを連通させない状態にて、上記第2の吸着塔から塔内ガスの排気を行う一方、上記第1の吸着塔に上記混合ガスを供給し、上記第1の吸着塔からの製品ガスの回収を少なくとも一部の時間において行うステップ6と、を含むサイクルを繰り返し行う。 A method for producing a target gas according to an embodiment of the present invention includes a first adsorption tower and a second adsorption packed with an adsorbent that selectively adsorbs the unnecessary gas from a mixed gas containing the target gas and the unnecessary gas. The above-described problems are solved in producing a product gas in which the above target gas is concentrated by a pressure fluctuation adsorption method performed using a tower. In the method, the mixed gas is supplied to the first adsorption tower in a state where the first adsorption tower and the second adsorption tower are in communication with each other, while the gas in the tower is supplied from the second adsorption tower. In a state where the first adsorption tower and the second adsorption tower are in communication with each other, the gas in the tower is exhausted from the first adsorption tower, while the second adsorption is performed. The step of supplying the mixed gas to the tower, and exhausting the gas in the tower from the first adsorption tower in a state where the first adsorption tower and the second adsorption tower are not communicated, Supplying the mixed gas to the second adsorption tower and recovering the product gas from the second adsorption tower in at least a part of the time; the first adsorption tower and the second adsorption tower; In the state where the two are connected, the mixed gas is supplied to the second adsorption tower, while the first adsorption tower In step 4 for exhausting the gas in the tower, and in the state where the first adsorption tower and the second adsorption tower are in communication, the gas in the tower is exhausted from the second adsorption tower, In step 5 for supplying the mixed gas to the first adsorption tower, and in a state where the first adsorption tower and the second adsorption tower are not communicated with each other, the gas in the tower is exhausted from the second adsorption tower. On the other hand, a cycle including step 6 of supplying the mixed gas to the first adsorption tower and recovering the product gas from the first adsorption tower in at least a part of time is repeated.

 好ましくは、上記第1の吸着塔および第2の吸着塔への上記混合ガスの供給の少なくとも一部は、ターボブロワを用いて行う。 Preferably, at least a part of the supply of the mixed gas to the first adsorption tower and the second adsorption tower is performed using a turbo blower.

 好ましくは、上記ステップ1および上記ステップ4の各ステップにおいて、当該ステップの開始時と終了時との上記混合ガス導入側である上記吸着塔の圧力低下が、上記ステップ1ないしステップ6を通じた当該吸着塔の最高圧力と最低圧力との圧力差の-5~25%、特に0~15%の範囲とされる。 Preferably, in each of the steps 1 and 4, the pressure drop in the adsorption tower on the mixed gas introduction side at the start and end of the step is caused by the adsorption through the steps 1 to 6. It is in the range of -5 to 25%, in particular 0 to 15%, of the pressure difference between the highest and lowest pressures in the column.

 好ましくは、上記ステップ1~6による1サイクルの時間に対して上記ステップ1および上記ステップ4の各ステップの占める時間比率が、2~18%、特に6~14%である。 Preferably, the time ratio occupied by each step of step 1 and step 4 with respect to the time of one cycle according to steps 1 to 6 is 2 to 18%, particularly 6 to 14%.

 好ましくは、上記ステップ2および上記ステップ5の各ステップの終了時において、上記第1の吸着塔と上記第2の吸着塔との圧力差が5kPa以内である。 Preferably, at the end of each step of step 2 and step 5, the pressure difference between the first adsorption tower and the second adsorption tower is within 5 kPa.

 好ましくは、上記ステップ3および上記ステップ6の各ステップにおいて上記吸着塔から導出される上記製品ガスは、貯留タンクに一時的に貯留される。 Preferably, the product gas derived from the adsorption tower in each of the steps 3 and 6 is temporarily stored in a storage tank.

 好ましくは、上記ステップ3および上記ステップ6の各ステップは、当該各ステップの初期において、上記混合ガスを導入している上記吸着塔と上記貯留タンクとを連通させて、上記混合ガスの導入に加えて、上記貯留タンク内の上記製品ガスを当該吸着塔に送ることにより昇圧を行う操作を含む。 Preferably, in each of the steps 3 and 6, the adsorbing tower into which the mixed gas is introduced and the storage tank are communicated with each other in addition to the introduction of the mixed gas. And the operation of increasing the pressure by sending the product gas in the storage tank to the adsorption tower.

 好ましくは、上記ステップ3および上記ステップ6の各ステップは、当該各ステップの初期において、上記混合ガスを導入している上記吸着塔と上記貯留タンクとを連通させずに、上記混合ガスの導入のみによって当該吸着塔の昇圧を行う操作を含む。 Preferably, in each of the steps 3 and 6, the introduction of the mixed gas is not performed at the initial stage of the steps without connecting the adsorption tower into which the mixed gas is introduced and the storage tank. Includes an operation for boosting the adsorption tower.

 好ましくは、上記混合ガスの温度に応じて、上記ステップ3および上記ステップ6を行うのに最適な継続時間を算出し、上記ステップ3および上記ステップ6の各ステップの継続時間を更新する。 Preferably, the optimum duration for performing Step 3 and Step 6 is calculated according to the temperature of the mixed gas, and the duration of each step of Step 3 and Step 6 is updated.

 好ましくは、上記目的ガスは酸素であり、上記不要ガスは窒素である。 Preferably, the target gas is oxygen and the unnecessary gas is nitrogen.

 好ましくは、上記ターボブロワの吐出圧力を大気圧よりも高くする。 Preferably, the discharge pressure of the turbo blower is set higher than atmospheric pressure.

 本発明の製品ガスの製造方法によれば、混合ガスを常に投入し且つ真空ポンプを連続して使用する場合でも、吸着塔内の残留濃縮目的ガス(製品ガスを多く含むガス)を用いた洗浄を有効に行うことが可能となり、また、上記洗浄中の相対的に高い圧力に混合ガスを供給しても、電力原単位の低減が可能となる。 According to the method for producing a product gas of the present invention, even when a mixed gas is always charged and a vacuum pump is continuously used, cleaning using the residual concentration target gas (gas containing a lot of product gas) in the adsorption tower is performed. In addition, even when the mixed gas is supplied to a relatively high pressure during the cleaning, the power consumption can be reduced.

 本発明のその他の特徴および利点は、添付図面を参照して以下に行う詳細な説明によって、より明らかとなろう。 Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

本発明の実施形態に係る製品ガスの製造方法を実現するための製品ガス製造装置の概略構成図である。It is a schematic block diagram of the product gas manufacturing apparatus for implement | achieving the manufacturing method of the product gas which concerns on embodiment of this invention. 本発明の実施形態に係る製品ガスの製造方法の各ステップに対応するガスの流れ図である。It is a gas flow chart corresponding to each step of a manufacturing method of product gas concerning an embodiment of the present invention. 本発明の他の実施形態に係る製品ガスの製造方法の各ステップに対応するガスの流れ図である。It is a gas flow chart corresponding to each step of a manufacturing method of product gas concerning other embodiments of the present invention. 本発明の比較例に係る製品ガスの製造方法の各ステップに対応するガスの流れ図である。It is a gas flow chart corresponding to each step of a manufacturing method of product gas concerning a comparative example of the present invention. 本発明の他の比較例に係る製品ガスの製造方法の各ステップに対応するガスの流れ図である。It is a gas flow chart corresponding to each step of a manufacturing method of product gas concerning other comparative examples of the present invention.

 以下、本発明の好ましい実施の形態として、目的ガスとしての酸素および不要ガスとしての窒素を含む混合ガスから濃縮酸素ガス(製品酸素ガス)を製造する方法について、図面を参照して具体的に説明する。 Hereinafter, as a preferred embodiment of the present invention, a method for producing concentrated oxygen gas (product oxygen gas) from a mixed gas containing oxygen as a target gas and nitrogen as an unnecessary gas will be specifically described with reference to the drawings. To do.

 図1は、本発明の実施形態に係る濃縮酸素ガスの製造方法を実行するのに使用することができる製品ガス製造装置X1の概略構成を示している。 FIG. 1 shows a schematic configuration of a product gas production apparatus X1 that can be used to execute a method for producing concentrated oxygen gas according to an embodiment of the present invention.

 製品ガス製造装置X1は、2つの吸着塔10A,10Bと、ターボブロワ21と、真空ポンプ22と、貯留タンク23と、配管31~37と、を含む。製品ガス製造装置X1は、圧力変動吸着法(PSA法)を利用して、酸素および窒素を含む混合ガス(通常は空気)から酸素を濃縮分離することが可能なように構成されている。 The product gas production apparatus X1 includes two adsorption towers 10A and 10B, a turbo blower 21, a vacuum pump 22, a storage tank 23, and pipes 31 to 37. The product gas production apparatus X1 is configured to be capable of concentrating and separating oxygen from a mixed gas (usually air) containing oxygen and nitrogen using a pressure fluctuation adsorption method (PSA method).

 吸着塔10A,10Bのそれぞれは、両端にガス通過口11,12を有し、ガス通過口11,12の間において混合ガスに含まれる窒素を選択的に吸着するための充填剤が充填されている。当該吸着剤としては、例えば、LiX型ゼオライト、CaA型ゼオライト、およびCaX型ゼオライトが挙げられ、これらは単独で使用しても複数種を併用してもよい。 Each of the adsorption towers 10A and 10B has gas passages 11 and 12 at both ends, and is filled with a filler for selectively adsorbing nitrogen contained in the mixed gas between the gas passages 11 and 12. Yes. Examples of the adsorbent include LiX-type zeolite, CaA-type zeolite, and CaX-type zeolite, and these may be used alone or in combination.

 ターボブロワ21は、混合ガスを吸着塔10A,10Bに送出するためのものである。真空ポンプ22は、吸着塔10A,10Bの内部を減圧するためのものである。真空ポンプ22としては、例えばルーツ式が用いられる。貯留タンク23は、吸着塔10A,10Bから導出されるガス(後述の製品酸素ガス)を一時的に貯留するための空容器である。 The turbo blower 21 is for sending the mixed gas to the adsorption towers 10A and 10B. The vacuum pump 22 is for depressurizing the inside of the adsorption towers 10A and 10B. For example, a roots type is used as the vacuum pump 22. The storage tank 23 is an empty container for temporarily storing gas (product oxygen gas described later) derived from the adsorption towers 10A and 10B.

 配管31は、混合ガス導入端E1を有する主幹ライン31’、および、吸着塔10A,10Bの各ガス通過口11側に各々が接続された分枝ライン31A,31Bを有する。主幹ライン31’には、ターボブロワ21および自動弁31cが設けられている。分枝ライン31A,31Bには、開状態と閉状態との間を切替可能な自動弁31a,31bが付設されている。詳細は後述するが、本実施形態において、配管31の主幹ライン31’には温度計40が取り付けられている。 The pipe 31 has a main line 31 'having a mixed gas introduction end E1, and branch lines 31A and 31B each connected to the gas passage 11 side of the adsorption towers 10A and 10B. A turbo blower 21 and an automatic valve 31c are provided in the main line 31 '. The branch lines 31A and 31B are provided with automatic valves 31a and 31b that can switch between an open state and a closed state. Although details will be described later, in the present embodiment, a thermometer 40 is attached to the main line 31 ′ of the pipe 31.

 配管32は、ガス排出端E2を有する主幹ライン32’、および、吸着塔10A,10Bの各ガス通過口11側に各々が接続された分枝ライン32A,32Bを有する。主幹ライン32’には、真空ポンプ22が設けられている。分枝ライン32A,32Bには、開状態と閉状態との間を切替可能な自動弁32a,32bが付設されている。 The pipe 32 has a main line 32 ′ having a gas discharge end E <b> 2 and branch lines 32 </ b> A and 32 </ b> B each connected to the gas passage 11 side of the adsorption towers 10 </ b> A and 10 </ b> B. A vacuum pump 22 is provided in the main line 32 '. The branch lines 32A and 32B are provided with automatic valves 32a and 32b capable of switching between an open state and a closed state.

 配管33は、貯留タンク接続端E3を有する主幹ライン33’、および、吸着塔10A,10Bの各ガス通過口12側に各々が接続された分枝ライン33A,33Bを有する。分枝ライン33A,33Bには、開状態と閉状態との間を切替可能な自動弁33a,33bが付設されている。 The pipe 33 has a main line 33 ′ having a storage tank connection end E <b> 3 and branch lines 33 </ b> A and 33 </ b> B each connected to the gas passage 12 side of the adsorption towers 10 </ b> A and 10 </ b> B. The branch lines 33A and 33B are provided with automatic valves 33a and 33b capable of switching between an open state and a closed state.

 配管34は、配管33の分枝ライン33A,33Bに橋架け状に接続されている。これにより、吸着塔10A,10Bそれぞれのガス通過口12は、配管34を介して連通している。配管34には、開状態と閉状態との間を切替可能な自動弁34aと、流量調節弁34b(流量調節手段)とが設けられている。 The pipe 34 is connected to the branch lines 33A and 33B of the pipe 33 in a bridge shape. Thereby, the gas passage ports 12 of the adsorption towers 10 </ b> A and 10 </ b> B communicate with each other via the pipe 34. The pipe 34 is provided with an automatic valve 34a capable of switching between an open state and a closed state, and a flow rate adjusting valve 34b (flow rate adjusting means).

 配管35は、一端が貯留タンク23に接続されるとともに、他端に製品ガス取り出し端E4を有する。これにより、貯留タンク23内に一時的に蓄えられた製品酸素ガスが配管35を介して外に取り出される。 The piping 35 has one end connected to the storage tank 23 and the other end has a product gas extraction end E4. Thereby, the product oxygen gas temporarily stored in the storage tank 23 is taken out via the pipe 35.

 配管36は、両端が配管31の主幹ライン31'に接続されている。より具体的には、配管36の一端がターボブロワ21の吸入口の上流において主幹ライン31'に接続され、他端がターボブロワ21の吐出口の下流において主幹ライン31'に接続されている。配管36は、主幹ライン31'に導入される混合ガスを、ターボブロワ21を通らずに迂回させて吸着塔10A,10Bへ供給するためのバイパスラインとして機能する。 The pipe 36 is connected to the main line 31 ′ of the pipe 31 at both ends. More specifically, one end of the pipe 36 is connected to the main line 31 ′ upstream of the suction port of the turbo blower 21, and the other end is connected to the main line 31 ′ downstream of the discharge port of the turbo blower 21. The pipe 36 functions as a bypass line for bypassing the mixed gas introduced into the main line 31 ′ without passing through the turbo blower 21 and supplying the mixed gas to the adsorption towers 10 </ b> A and 10 </ b> B.

 配管37は、一端が配管31の主幹ライン31'に対して分岐状に接続されており、他端が大気中に開放している。具体的には、配管37の一端は、主幹ライン31'に対して、ターボブロワ21の吐出口側と、バイパス配管36における主幹ライン31’への下流側接続端との間において接続されている。配管37には、流量調節弁37aが設けられている。また、主幹ライン31'に設けられた自動弁31cは、主幹ライン31'に対する配管37の接続端と、配管36における主幹ライン31'への下流側接続端との間にある。 The pipe 37 has one end connected in a branched manner to the main line 31 ′ of the pipe 31 and the other end open to the atmosphere. Specifically, one end of the pipe 37 is connected to the main line 31 ′ between the discharge port side of the turbo blower 21 and the downstream connection end to the main line 31 ′ in the bypass pipe 36. The pipe 37 is provided with a flow rate adjustment valve 37a. Further, the automatic valve 31c provided in the main line 31 'is between the connection end of the pipe 37 to the main line 31' and the downstream side connection end to the main line 31 'in the pipe 36.

 以上のような構成を有する製品ガス製造装置X1を使用して、本発明の実施形態に係る製品ガス製造方法を実行することができる。製品ガス製造装置X1の稼働時において、自動弁31a,31b,31c,32a,32b,33a,33b,34a,36a、および流量調節弁34bを適宜切り替えることにより、装置内において所望のガスの流れ状態を実現し、以下のステップ1~6からなる1サイクルを繰り返すことができる。図2は、ステップ1~6における製品ガス製造装置X1でのガスの流れ状態を模式的に表したものである。詳細は後述するが、ステップ3はサブステップ3-1およびサブステップ3-2を含み、ステップ6はサブステップ6-1およびサブステップ6-2を含む。 Using the product gas production apparatus X1 having the above configuration, the product gas production method according to the embodiment of the present invention can be executed. When the product gas production apparatus X1 is in operation, the automatic valve 31a, 31b, 31c, 32a, 32b, 33a, 33b, 34a, 36a, and the flow rate control valve 34b are appropriately switched, and a desired gas flow state in the apparatus. And one cycle consisting of the following steps 1 to 6 can be repeated. FIG. 2 schematically shows a gas flow state in the product gas production apparatus X1 in steps 1 to 6. Although details will be described later, step 3 includes sub-step 3-1 and sub-step 3-2, and step 6 includes sub-step 6-1 and sub-step 6-2.

 ステップ1では、自動弁31a,32b,34aおよび流量調節弁34bが開かれ、図2(a)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、混合ガスが配管31を介してガス通過口11から供給される。吸着塔10Aについては、先に吸着(AS)を行っていたので(図2(h)に示されるサブステップ6-2参照)、ステップ1の開始時には相対的に高圧状態にあり、塔内には製品酸素ガスを多く含むガスが残留している。なお、吸着を行うサブステップ6-2での吸着塔10Aの内部の最高圧力は、例えば5~40kPaG(ゲージ圧:以下同じ)であり、好ましくは10~30kPaGである。 In step 1, the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and a gas flow state as shown in FIG. 2A is achieved. In the adsorption tower 10 </ b> A, the mixed gas is supplied from the gas passage port 11 through the pipe 31. Since the adsorption tower 10A has been previously adsorbed (AS) (see sub-step 6-2 shown in FIG. 2 (h)), it is in a relatively high pressure state at the start of step 1 and is in the tower. In this case, gas containing a large amount of product oxygen gas remains. Note that the maximum pressure inside the adsorption tower 10A in the sub-step 6-2 for performing adsorption is, for example, 5 to 40 kPaG (gauge pressure: the same applies hereinafter), and preferably 10 to 30 kPaG.

 一方、吸着塔10Bにおいては、先に脱着(DS)を行っており(図2(h)に示されるサブステップ6-2参照)、引き続き真空ポンプ22により塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは、分枝ライン32B、主幹ライン32’を介して系外へ排出される。なお、脱着を行うサブステップ6-2での吸着塔10Bの内部の最低圧力は、例えば-80~-45kPaGであり、好ましくは-75~-55kPaGである。 On the other hand, in the adsorption tower 10B, desorption (DS) is performed first (see sub-step 6-2 shown in FIG. 2 (h)), and the gas in the tower is continuously passed through the gas passage port 11 by the vacuum pump 22. It is led out of the tower as off-gas. The off-gas is discharged out of the system via the branch line 32B and the main trunk line 32 '. Note that the minimum pressure inside the adsorption tower 10B in the sub-step 6-2 for performing desorption is, for example, −80 to −45 kPaG, and preferably −75 to −55 kPaG.

 また、ステップ1では、吸着塔10A,10Bそれぞれのガス通過口12が配管34を介して相互に連通している。ステップ1の開始時の吸着塔10Aの内部圧力は、先に吸着を行っていたサブステップ6-2の最高圧力と実質的に同じである。ステップ1の開始後において、吸着塔10Aでは、ガス通過口12からの残留濃縮酸素ガス(製品酸素ガスを多く含むガス)の放出を伴いながら減圧する一方、吸着塔10Bでは、吸着塔10Aから放出された残留濃縮酸素ガスがガス通過口12から導入されて、洗浄効果を有する昇圧・洗浄(PR/RS)が行われる。 In Step 1, the gas passage ports 12 of the adsorption towers 10A and 10B communicate with each other via the pipe 34. The internal pressure of the adsorption tower 10A at the start of Step 1 is substantially the same as the maximum pressure in Sub-Step 6-2 where the adsorption was performed previously. After the start of step 1, the adsorption tower 10A depressurizes while releasing the residual concentrated oxygen gas (gas containing a large amount of product oxygen gas) from the gas passage port 12, while the adsorption tower 10B releases from the adsorption tower 10A. The residual concentrated oxygen gas thus introduced is introduced from the gas passage port 12, and pressure increase / cleaning (PR / RS) having a cleaning effect is performed.

 ステップ1において、吸着塔10Aの内部圧力は、例えば流量調節弁34bを適宜調節するか、あるいはステップ1の継続時間を調節することによって制御される。吸着塔10Aの内部圧力は、ステップ1の終了時において、開始時よりも低下する場合(減圧:DP)、開始時と実質的に同一の場合(圧力キープ:PK)、あるいは開始時よりも上昇する場合(昇圧:PR)のいずれも起こり得る。ステップ1の終了時における吸着塔10Aの内部圧力は、例えば5~40kPaGである。ステップ1の開始時から終了時までの、混合ガス導入側である吸着塔10Aの圧力変化は、吸着塔10Aの最高圧力と最低圧力との圧力差に対して、例えば-5~25%の割合であり、好ましくは0~15%である。なお、ステップ1の終了時において、吸着塔10Aの内部圧力は吸着塔10Bの内部圧力よりも高い。上記ステップ1は、例えば4秒間継続される。 In Step 1, the internal pressure of the adsorption tower 10A is controlled, for example, by appropriately adjusting the flow rate adjustment valve 34b or by adjusting the duration of Step 1. The internal pressure of the adsorption tower 10A is lower at the end of step 1 than at the start (pressure reduction: DP), substantially the same as the start (pressure keep: PK), or higher than at the start. (Pressure: PR) can occur. The internal pressure of the adsorption tower 10A at the end of step 1 is, for example, 5 to 40 kPaG. The change in pressure in the adsorption tower 10A on the mixed gas introduction side from the start to the end of step 1 is, for example, a ratio of −5 to 25% with respect to the pressure difference between the maximum pressure and the minimum pressure in the adsorption tower 10A. Preferably, it is 0 to 15%. At the end of step 1, the internal pressure of the adsorption tower 10A is higher than the internal pressure of the adsorption tower 10B. The above step 1 is continued for 4 seconds, for example.

 貯留タンク23には、製品酸素ガス(濃縮酸素ガス)が充填されている。後述のサブステップ3-1にて吸着塔10Bから導出された製品酸素ガスが貯留タンク23に送出され、後述のサブステップ6-1にて吸着塔10Aから導出された製品酸素ガスが貯留タンク23に送出される。貯留タンク23内の製品酸素ガスは、流量調整がなされたうえで配管35を介して取り出され、使用される。なお、ステップ1を含めたすべてのステップ1~6において、貯留タンク23から製品酸素ガスが一定流量にて連続的に取得される。 The storage tank 23 is filled with product oxygen gas (concentrated oxygen gas). The product oxygen gas derived from the adsorption tower 10B in sub-step 3-1 to be described later is sent to the storage tank 23, and the product oxygen gas derived from the adsorption tower 10A in sub-step 6-1 to be described later is stored in the storage tank 23. Is sent out. The product oxygen gas in the storage tank 23 is taken out through the pipe 35 and used after the flow rate is adjusted. In all steps 1 to 6 including step 1, product oxygen gas is continuously acquired from the storage tank 23 at a constant flow rate.

 ステップ2では、自動弁31b,32a,34aおよび流量調節弁34bが開かれ、図2(b)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着され(減圧/脱着:DP/DS)、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは、分枝ライン32A、主幹ライン32’を介して系外へ排出される。一方、吸着塔10Bにおいては、混合ガスが配管31を介してガス通過口11から供給される。 In step 2, the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 2B is achieved. In the adsorption tower 10A, the inside of the tower is depressurized by the vacuum pump 22 and nitrogen is desorbed from the adsorbent (decompression / desorption: DP / DS), and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The The off-gas is discharged out of the system through the branch line 32A and the main line 32 '. On the other hand, in the adsorption tower 10 </ b> B, the mixed gas is supplied from the gas passage port 11 via the pipe 31.

 また、ステップ2では、ステップ1に引き続き吸着塔10A,10Bそれぞれのガス通過口12,12が配管34を介して連通している。ステップ2の開始時において、吸着塔10Aは吸着塔10Bと比べて相対的に高圧状態にある。 In Step 2, the gas passages 12 and 12 of the adsorption towers 10A and 10B are communicated with each other through the pipe 34, following Step 1. At the start of step 2, the adsorption tower 10A is in a relatively high pressure state as compared to the adsorption tower 10B.

 ステップ2の開始後において、吸着塔10Aでは、ガス通過口12付近に残存する濃縮酸素ガスが当該ガス通過口12から放出されつつ減圧する。一方、吸着塔10Bでは、ステップ1に引き続き吸着塔10Aから放出された残留濃縮酸素ガスがガス通過口12から導入されて、昇圧/回収(PR/RC)が行われる。 After the start of Step 2, in the adsorption tower 10A, the concentrated oxygen gas remaining in the vicinity of the gas passage port 12 is decompressed while being released from the gas passage port 12. On the other hand, in the adsorption tower 10B, the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage 12 following step 1, and pressure increase / recovery (PR / RC) is performed.

 ステップ2では、吸着塔10Aと吸着塔10Bとの圧力差が所定範囲となるように、流量調節弁34bの開度が調節される。ステップ2の終了時において、吸着塔10Aの内部圧力および吸着塔10Bの内部圧力は近似するか、あるいは同圧である。例えば、ステップ2の終了時における吸着塔10Aと吸着塔10Bとの圧力差は5kPaG以内である。なお、ステップ2の終了時において、吸着塔10Bの内部圧力は貯留タンク23の内部圧力よりも低い。上記ステップ2は、例えば4秒間継続される。 In Step 2, the opening degree of the flow rate adjusting valve 34b is adjusted so that the pressure difference between the adsorption tower 10A and the adsorption tower 10B is within a predetermined range. At the end of step 2, the internal pressure of the adsorption tower 10A and the internal pressure of the adsorption tower 10B are approximate or the same pressure. For example, the pressure difference between the adsorption tower 10A and the adsorption tower 10B at the end of step 2 is within 5 kPaG. At the end of step 2, the internal pressure of the adsorption tower 10B is lower than the internal pressure of the storage tank 23. The above step 2 is continued for 4 seconds, for example.

 本実施形態において、ステップ3は、当該ステップ3の開始時(ステップ2の終了直後)から所定時間経過時まで継続するサブステップ3-1と、サブステップ3-1の後に行うサブステップ3-2とを含む。 In the present embodiment, step 3 includes sub-step 3-1 that continues from the start of step 3 (immediately after the end of step 2) to the elapse of a predetermined time, and sub-step 3-2 that is performed after sub-step 3-1. Including.

 サブステップ3-1では、自動弁31b,32a,33bが開かれ、図2(c)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、ステップ2に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、ステップ2に引き続き混合ガスが配管31を介してガス通過口11から供給される。 In sub-step 3-1, the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 2 (c) is achieved. In the adsorption tower 10A, following the step 2, the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10 </ b> B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 2.

 また、サブステップ3-1では、吸着塔10A,10Bの連通を遮断する一方、吸着塔10Bのガス通過口12と貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。サブステップ3-1の開始時において、吸着塔10Bは貯留タンク23と比べて相対的に低圧状態にある。したがって、サブステップ3-1の開始後において、貯留タンク23内の製品酸素ガスが主幹ライン33’に放出される。一方、吸着塔10Bでは、貯留タンク23から放出された製品酸素ガスがガス通過口12から導入されて、昇圧(PR)が行われる。サブステップ3-1の終了時において、吸着塔10Bの内部圧力と貯留タンク23の内部圧力とは、実質的に同圧である。上記サブステップ3-1は、例えば2秒間継続される。 Further, in sub-step 3-1, the communication between the adsorption towers 10A and 10B is cut off, while the gas passage port 12 and the storage tank 23 of the adsorption tower 10B communicate with each other via the main line 33 'and the branch line 33B. Yes. At the start of sub-step 3-1, the adsorption tower 10B is in a relatively low pressure state as compared with the storage tank 23. Accordingly, after the start of sub-step 3-1, the product oxygen gas in the storage tank 23 is released to the main line 33 '. On the other hand, in the adsorption tower 10B, the product oxygen gas released from the storage tank 23 is introduced from the gas passage port 12, and pressure increase (PR) is performed. At the end of sub-step 3-1, the internal pressure of the adsorption tower 10B and the internal pressure of the storage tank 23 are substantially the same pressure. The sub-step 3-1 is continued for 2 seconds, for example.

 サブステップ3-2では、引き続き自動弁31b,32a,33bが開かれ、図2(d)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、サブステップ3-1に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、サブステップ3-1に引き続き混合ガスが配管31を介してガス通過口11から供給される。脱着を行う吸着塔10Aでは内部圧力が低下し続け、サブステップ3-2の終了時には吸着塔10Aの内部が最低圧力に到達する。当該最低圧力は、例えば-80~-45kPaGであり、好ましくは-75~-55kPaGである。 In sub-step 3-2, the automatic valves 31b, 32a, and 33b are continuously opened, and the gas flow state as shown in FIG. 2D is achieved. In the adsorption tower 10A, following the sub-step 3-1, the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. Is done. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1. In the adsorption tower 10A that performs desorption, the internal pressure continues to decrease, and at the end of the sub-step 3-2, the inside of the adsorption tower 10A reaches the minimum pressure. The minimum pressure is, for example, −80 to −45 kPaG, and preferably −75 to −55 kPaG.

 また、サブステップ3-2では、サブステップ3-1に引き続き、吸着塔10Bと貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。サブステップ3-2の開始時において、吸着塔10Bと貯留タンク23とは実質的に同圧である。サブステップ3-2の開始後において、吸着塔10Bへ混合ガスが供給されることで当該吸着塔10Bの内部圧力が上昇する一方、貯留タンク23から製品酸素ガスが配管35を介して取り出されることで当該貯留タンク23の内部圧力は低下する。このため、吸着塔10Bから貯留タンク23に向けてガスの流れが生じる。吸着塔10Bでは内部圧力が上昇し、混合ガスに含まれる窒素が吸着剤によって吸着(AD)される。そして、ガス通過口12から酸素が濃縮された製品酸素ガスが導出される。当該製品酸素ガスは、分枝ライン33Bおよび主幹ライン33’を介して貯留タンク23に送出される。サブステップ3-2では吸着塔10Bの内部圧力が上昇し続け、サブステップ3-2の終了時には吸着塔10Bの内部が最高圧力に到達する。当該最高圧力は、例えば5~40kPaGであり、好ましくは10~30kPaGである。上記サブステップ3-2は、例えば15秒間継続される。 Further, in the sub-step 3-2, following the sub-step 3-1, the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B. At the start of sub-step 3-2, the adsorption tower 10B and the storage tank 23 have substantially the same pressure. After the start of sub-step 3-2, the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35. Thus, the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 </ b> B toward the storage tank 23. In the adsorption tower 10B, the internal pressure rises, and nitrogen contained in the mixed gas is adsorbed (AD) by the adsorbent. Then, product oxygen gas enriched with oxygen is led out from the gas passage port 12. The product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '. In sub-step 3-2, the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2, the internal pressure of the adsorption tower 10B reaches the maximum pressure. The maximum pressure is, for example, 5 to 40 kPaG, and preferably 10 to 30 kPaG. The sub-step 3-2 is continued for 15 seconds, for example.

 以降のステップ4~6では、図2(e)~(h)に示したように、ステップ1~3において吸着塔10Aについて行った操作を吸着塔10Bについて行い、吸着塔10Bについて行った操作を吸着塔10Aについて行う。 In subsequent steps 4 to 6, as shown in FIGS. 2E to 2H, the operation performed on the adsorption tower 10A in steps 1 to 3 is performed on the adsorption tower 10B, and the operation performed on the adsorption tower 10B is performed. It carries out for the adsorption tower 10A.

 ステップ4では、自動弁31b,32a,34aおよび流量調節弁34bが開かれ、図2(e)に示すようなガス流れ状態が達成される。ステップ5では、自動弁31a,32b,34aおよび流量調節弁34bが開かれ、図2(f)に示すようなガス流れ状態が達成される。サブステップ6-1では、自動弁31a,32b,33aが開かれ、図2(g)に示すようなガス流れ状態が達成される。サブステップ6-2では、引き続き自動弁31a,32b,33aが開かれ、図2(h)に示すようなガス流れ状態が達成される。詳細な説明は省略するが、ステップ4,5及びサブステップ6-1,6-2では、吸着塔10Bは、ステップ1,2及びサブステップ3-1,3-2における吸着塔10Aと同じ状態となっており、吸着塔10Aは、ステップ1,2及びサブステップ3-1,3-2における吸着塔10Bと同じ状態となっている。 In step 4, the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and a gas flow state as shown in FIG. 2 (e) is achieved. In step 5, the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 2 (f) is achieved. In sub-step 6-1, the automatic valves 31a, 32b, 33a are opened, and the gas flow state as shown in FIG. 2 (g) is achieved. In sub-step 6-2, the automatic valves 31a, 32b, and 33a are continuously opened, and the gas flow state as shown in FIG. 2 (h) is achieved. Although detailed explanation is omitted, in steps 4 and 5 and sub-steps 6-1 and 6-2, the adsorption tower 10B is in the same state as the adsorption tower 10A in steps 1 and 2 and sub-steps 3-1 and 3-2. The adsorption tower 10A is in the same state as the adsorption tower 10B in steps 1 and 2 and sub-steps 3-1 and 3-2.

 そして、以上のステップ1~6からなるサイクルを各吸着塔10A,10Bにおいて繰り返し行うことにより、混合ガスから窒素が有意に除去された製品酸素ガスが連続的に取得される。なお、ステップ1~6による1サイクルの時間(サイクルタイム)は、50秒間である。 Then, the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously acquired by repeatedly performing the cycle including the above steps 1 to 6 in each of the adsorption towers 10A and 10B. Note that the time of one cycle (cycle time) in steps 1 to 6 is 50 seconds.

 本実施形態の製品酸素ガスの製造においては、貯留タンク23内の製品酸素ガスによる洗浄を減らし、あるいは無くすことにより、製品酸素ガスの回収率を高めることができる。また、吸着塔10A,10bへの混合ガスの供給はターボブロワ21を用いて行う。ターボブロワ21は、吐出圧が大気圧よりも高い状態の時に消費電力が小さくなる。そのため上記混合ガスの供給にターボブロワ21を使用することで、吸着塔10A,10B内の残留濃縮酸素ガスを用いた洗浄中の相対的に高い圧力状態のところに混合ガスの供給を行なっても(ステップ1,4参照)、効率よく混合ガスを供給できるだけではなく、効率よく消費電力を低減することができる。 In the production of the product oxygen gas according to the present embodiment, the recovery rate of the product oxygen gas can be increased by reducing or eliminating the cleaning with the product oxygen gas in the storage tank 23. The mixed gas is supplied to the adsorption towers 10 </ b> A and 10 b using a turbo blower 21. The turbo blower 21 consumes less power when the discharge pressure is higher than atmospheric pressure. Therefore, by using the turbo blower 21 to supply the mixed gas, the mixed gas is supplied to a relatively high pressure state during cleaning using the residual concentrated oxygen gas in the adsorption towers 10A and 10B ( In addition to efficiently supplying the mixed gas, the power consumption can be reduced efficiently.

 本実施形態において、上記ステップ1およびステップ4の各々において、当該ステップの開始時から終了時までの間に、混合ガス導入側である吸着塔10A,10Bの圧力が低下する場合でも、その低下の割合を、各吸着塔における最高圧力と最低圧力の圧力差の25%以下、好ましくは15%以下に抑えるようにしている。このように吸着塔10A,10B内の残留濃縮酸素ガスを用いた洗浄において、混合ガス供給側吸着塔の圧力変化を抑制することで洗浄ガスの酸素濃度低下を抑制し、効率よく吸着剤の再生を行うことができる。 In this embodiment, in each of the above steps 1 and 4, even if the pressure of the adsorption towers 10A and 10B on the mixed gas introduction side decreases from the start to the end of the step, the decrease The ratio is controlled to 25% or less, preferably 15% or less of the pressure difference between the maximum pressure and the minimum pressure in each adsorption tower. Thus, in the cleaning using the residual concentrated oxygen gas in the adsorption towers 10A and 10B, the decrease in the oxygen concentration of the cleaning gas is suppressed by suppressing the pressure change of the mixed gas supply side adsorption tower, and the adsorbent is efficiently regenerated. It can be performed.

 本実施形態においては、ステップ1~6による1サイクルの時間(50秒間)に対して、上記ステップ1および上記ステップ4の各ステップの占める時間比率は、例えば2~18%とされ、好ましくは6~14%とされる。また、ステップ2とステップ5の終了時において、10A吸着塔と吸着塔10Bの圧力差は5kPaG以内である。 In the present embodiment, the time ratio occupied by each step of Step 1 and Step 4 is, for example, 2 to 18% with respect to the time of one cycle (50 seconds) according to Steps 1 to 6, and preferably 6 ~ 14%. At the end of step 2 and step 5, the pressure difference between the 10A adsorption tower and the adsorption tower 10B is within 5 kPaG.

 製品酸素ガスの取得に際して電力原単位を低減するには、吸着塔内の最低圧力を上げることで真空ポンプの負荷を少なくする方法などもあるが、この方法では吸着と脱着の圧力幅(スイング幅)が小さくなるため、窒素吸着量が減少し、必要吸着剤が増加する。このように電力原単位と必要吸着剤量は通常トレードオフの関係にある。これに対し、上記ステップ1とステップ4の占める時間比率が上記ステップ1~6によるサイクルタイムの2~18%、好ましくは6~14%とし、上記ステップ2とステップ5の終了時において、吸着塔10A,10Bの圧力差が5kPaG以内となるように流量調節弁34bの開度を調節すると、効率よく製品酸素ガス(濃縮酸素ガス)を回収できるようになり、電力原単位を低減しながら必要吸着剤量を削減することができる。 There is a method to reduce the load of the vacuum pump by increasing the minimum pressure in the adsorption tower to reduce the unit of electric power when obtaining the product oxygen gas, but with this method the pressure width of the adsorption and desorption (swing width) ) Decreases, the amount of nitrogen adsorbed decreases and the necessary adsorbent increases. Thus, the power intensity and the necessary amount of adsorbent are usually in a trade-off relationship. In contrast, the time ratio occupied by steps 1 and 4 is 2 to 18%, preferably 6 to 14% of the cycle time of steps 1 to 6, and at the end of steps 2 and 5, the adsorption tower Adjusting the opening of the flow rate control valve 34b so that the pressure difference between 10A and 10B is within 5 kPaG enables the product oxygen gas (concentrated oxygen gas) to be recovered efficiently, and the necessary adsorption while reducing the power consumption rate. The dosage can be reduced.

 上記ステップ1~6の進行中、外気温に応じて、上記ステップ3とステップ6を行うのに最適な継続時間を算出し、上記製造サイクルを繰り返す過程において、当該ステップ3とステップ6の継続時間を更新してもよい。主として窒素および酸素を含む混合ガスとして空気を使用して製品酸素ガス(濃縮酸素ガス)を製造する場合、気温の変化により単位容積あたりの酸素含有量が異なる。また、気温の変化により吸着剤の窒素吸着容量が変化する。そのため製品酸素ガスの酸素濃度と製品流量を設定値に維持するには、気温が高くなるとサイクルタイムを短くし、気温が低くなるとサイクルタイムを長くする必要がある。本実施形態においては、混合ガスを吸着塔10A,10Bへ供給するための配管31の主幹ライン31’には、温度計40(温度測定手段)が設けられている。そして、温度計40によって測定される混合ガスの温度に応じて、上記ステップ3とステップ6を行うのに最適な継続時間を算出し、当該ステップ3とステップ6の継続時間を更新することで、自動で酸素濃度と製品流量を設定値に維持することができる。 During the course of steps 1 to 6, the optimum duration for performing steps 3 and 6 is calculated according to the outside air temperature, and the duration of steps 3 and 6 is repeated in the process of repeating the manufacturing cycle. May be updated. When product oxygen gas (concentrated oxygen gas) is produced using air as a mixed gas mainly containing nitrogen and oxygen, the oxygen content per unit volume varies depending on the change in temperature. In addition, the nitrogen adsorption capacity of the adsorbent varies with changes in temperature. Therefore, in order to maintain the oxygen concentration of the product oxygen gas and the product flow rate at the set values, it is necessary to shorten the cycle time when the temperature rises and lengthen the cycle time when the temperature falls. In the present embodiment, a thermometer 40 (temperature measuring means) is provided in the main line 31 'of the pipe 31 for supplying the mixed gas to the adsorption towers 10A and 10B. Then, according to the temperature of the mixed gas measured by the thermometer 40, the optimum duration time for performing Step 3 and Step 6 is calculated, and the duration time of Step 3 and Step 6 is updated, The oxygen concentration and product flow rate can be automatically maintained at the set values.

 また、上記ステップ3におけるサブステップ3-1は、貯留タンク23の内部圧力が吸着塔10Bの内部圧力よりも高い間に自動弁33bを開いて、吸着塔10Bと貯留タンク23とを連通させることにより、製品となる貯留タンク23内の酸素富化ガスで吸着塔10B昇圧を行なうようにしたものである。しかしながら、サブステップ3-1を省略して、サブステップ3-2に自動弁33bを開いて吸着塔10Bと貯留タンク23とを連通させるタイミングを遅くして、製品となる酸素富化ガスで吸着塔10Bの昇圧を行なわなくてもよい。この場合、先行するステップ2は、吸着塔10Bの内部圧力が貯留タンク23の内部圧力に等しくなるまで継続され、その後にステップ3(サブステップ3-2)を行うことになる。すなわち、ステップ3におけるサブステップ3-1は省略してもよいものである。同様に、ステップ6におけるサブステップ6-1も省略してもよい。 Further, sub-step 3-1 in step 3 is to open the automatic valve 33b while the internal pressure of the storage tank 23 is higher than the internal pressure of the adsorption tower 10B, and to connect the adsorption tower 10B and the storage tank 23. Thus, the pressure in the adsorption tower 10B is increased with the oxygen-enriched gas in the storage tank 23 as a product. However, the sub-step 3-1 is omitted, and the automatic valve 33b is opened at the sub-step 3-2 to delay the timing for communicating the adsorption tower 10B and the storage tank 23, so that the adsorption is performed with the oxygen-enriched gas as the product. It is not necessary to boost the tower 10B. In this case, the preceding step 2 is continued until the internal pressure of the adsorption tower 10B becomes equal to the internal pressure of the storage tank 23, and then step 3 (sub-step 3-2) is performed. That is, sub-step 3-1 in step 3 may be omitted. Similarly, sub-step 6-1 in step 6 may be omitted.

 本実施形態では、ターボブロワ21の吐出圧力を常に大気圧よりも高くする。上記混合ガスの供給において、大気圧未満である吸着塔10A,10Bへ混合ガスを供給する場合には、ターボブロワ21を迂回したバイパス用の配管36より、混合ガス自体の供給圧を利用して混合ガスの供給を行うことができる。また、バイパス用の配管36に代えて、別途混合ガスをそれ自体の供給圧を利用して供給する手段を採用してもよい。このように混合ガス自体の供給圧を利用して混合ガスを供給する際、ターボブロワ21は空運転状態となる。ここで、ターボブロワ21においては吐出圧が大気圧よりも高い状態の時に消費電力が小さくなるため、ターボブロワ21の空運転時に当該ターボブロワ21の吐出圧力を消費電力の低減に有効な吐出圧力(大気圧より高い吐出圧力)に調節することで、電力原単位を低減することができる。ターボブロワ21の吐出圧力の調節は、例えばターボブロワ21の下流側にある自動弁31cを閉じるとともに配管37に設けられた流量調節弁37aの開度を調節することにより、行うことができる。 In this embodiment, the discharge pressure of the turbo blower 21 is always higher than the atmospheric pressure. In supplying the mixed gas, when supplying the mixed gas to the adsorption towers 10 </ b> A and 10 </ b> B having a pressure lower than the atmospheric pressure, mixing is performed using the supply pressure of the mixed gas itself from the bypass pipe 36 bypassing the turbo blower 21. Gas can be supplied. Further, instead of the bypass pipe 36, a means for separately supplying a mixed gas using its own supply pressure may be employed. Thus, when supplying mixed gas using the supply pressure of mixed gas itself, the turbo blower 21 will be in an idle operation state. Here, in the turbo blower 21, since the power consumption becomes small when the discharge pressure is higher than the atmospheric pressure, the discharge pressure of the turbo blower 21 during the idling operation of the turbo blower 21 is effective for reducing the power consumption (atmospheric pressure). By adjusting to a higher discharge pressure, the power consumption can be reduced. The discharge pressure of the turbo blower 21 can be adjusted, for example, by closing the automatic valve 31c on the downstream side of the turbo blower 21 and adjusting the opening of the flow rate adjustment valve 37a provided in the pipe 37.

 本実施形態の製品酸素ガスの製造によれば、混合ガスを常に投入し且つ真空ポンプ22を連続して使用する場合でも、吸着塔10A,10B内の残留濃縮酸素ガスを用いた洗浄を有効に行うことが可能となる。また、洗浄中における混合ガス供給側の吸着塔(ステップ1での吸着塔10Aおよびステップ4での吸着塔10B)の圧力低下を制限することで、洗浄ガスの酸素濃度低下を抑制し、効率よく吸着剤の再生を行うことができる。このことは、製品酸素ガスを高濃度且つ高回収率で回収するうえでも好ましい。 According to the production of the product oxygen gas of this embodiment, even when the mixed gas is always supplied and the vacuum pump 22 is continuously used, the cleaning using the residual concentrated oxygen gas in the adsorption towers 10A and 10B is effectively performed. Can be done. Further, by limiting the pressure drop in the adsorption tower (the adsorption tower 10A in Step 1 and the adsorption tower 10B in Step 4) on the mixed gas supply side during cleaning, the reduction in the oxygen concentration of the cleaning gas is suppressed and efficiently performed. The adsorbent can be regenerated. This is preferable for recovering the product oxygen gas at a high concentration and a high recovery rate.

 図3は、ステップ1~6からなる1サイクルを繰り返す構成の製品ガス製造方法において、図2を参照して上述した場合とステップの一部の構成が異なる他の例を示している。 FIG. 3 shows another example of a product gas manufacturing method configured to repeat one cycle consisting of steps 1 to 6 in which a part of the steps is different from the case described above with reference to FIG.

 図3に示したステップ1~6からなるサイクルにおいて、サブステップ3-1、サブステップ6-1の構成が図2に示した場合と異なっている。サブステップ3-1,6-1以外の他のステップ1,2,3-2,4,5,6-2の構成は図2に示した場合と実質的に同じなので、その説明を適宜省略する。 In the cycle consisting of steps 1 to 6 shown in FIG. 3, the configuration of sub-step 3-1 and sub-step 6-1 is different from the case shown in FIG. Since the configuration of steps 1, 2, 3, 2, 4, 5, and 6-2 other than sub-steps 3-1 and 6-1 is substantially the same as that shown in FIG. To do.

 図3に示した実施形態において、サブステップ3-1では、自動弁31b,32aが開かれ、同図(c)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、ステップ2に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、ステップ2に引き続き混合ガスが配管31を介してガス通過口11から供給される。また、本実施形態の場合、サブステップ3-1では、吸着塔10A,10Bの連通を遮断するとともに、吸着塔10Bのガス通過口12と貯留タンク23との連通についても遮断されている(自動弁33bが閉じている)。したがって、吸着塔10Bにおいては、混合ガスの供給のみによって昇圧され、製品酸素ガスによる昇圧は行われない。なお、サブステップ3-1の終了時において、吸着塔10Bの内部圧力は、貯留タンク23の内部圧力と実質的に同じ、あるいは貯留タンク23の内部圧力よりも高い。このサブステップ3-1は、例えば4秒間継続される。 In the embodiment shown in FIG. 3, in the sub-step 3-1, the automatic valves 31b and 32a are opened, and the gas flow state as shown in FIG. In the adsorption tower 10A, following the step 2, the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10 </ b> B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 2. In the present embodiment, in sub-step 3-1, the communication between the adsorption towers 10A and 10B is cut off, and the communication between the gas passage 12 of the adsorption tower 10B and the storage tank 23 is also cut off (automatically). The valve 33b is closed). Therefore, in the adsorption tower 10B, the pressure is increased only by supplying the mixed gas, and the pressure is not increased by the product oxygen gas. At the end of sub-step 3-1, the internal pressure of the adsorption tower 10B is substantially the same as the internal pressure of the storage tank 23 or higher than the internal pressure of the storage tank 23. This sub-step 3-1 is continued for 4 seconds, for example.

 サブステップ3-2では、自動弁31b,32a,33bが開かれ、図3(d)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、サブステップ3-1に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、サブステップ3-1に引き続き混合ガスが配管31を介してガス通過口11から供給される。脱着を行う吸着塔10Aでは内部圧力が低下し続け、サブステップ3-2の終了時には吸着塔10Aの内部が最低圧力に到達する。当該最低圧力は、例えば-80~-45kPaGであり、好ましくは-75~-55kPaGである。 In sub-step 3-2, the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 3D is achieved. In the adsorption tower 10A, following the sub-step 3-1, the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1. In the adsorption tower 10A that performs desorption, the internal pressure continues to decrease, and at the end of sub-step 3-2, the inside of the adsorption tower 10A reaches the minimum pressure. The minimum pressure is, for example, −80 to −45 kPaG, and preferably −75 to −55 kPaG.

 また、サブステップ3-2では、サブステップ3-1とは異なり、吸着塔10Bと貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。サブステップ3-2の開始時において、吸着塔10Bの内部圧力は、貯留タンク23の内部圧力と実質的に同じか、あるいは貯留タンク23の内部圧力よりも高い。サブステップ3-2の開始後において、吸着塔10Bへ混合ガスが供給されることで当該吸着塔10Bの内部圧力が上昇する一方、貯留タンク23から製品酸素ガスが配管35を介して取り出されることで当該貯留タンク23の内部圧力は低下する。このため、吸着塔10Bから貯留タンク23に向けてガスの流れが生じる。吸着塔10Bでは内部圧力が上昇し、混合ガスに含まれる窒素が吸着剤によって吸着される。そして、ガス通過口12から酸素が濃縮された製品酸素ガスが導出される。当該製品酸素ガスは、分枝ライン33Bおよび主幹ライン33’を介して貯留タンク23に送出される。サブステップ3-2では吸着塔10Bの内部圧力が上昇し続け、サブステップ3-2の終了時には吸着塔10Bの内部が最高圧力に到達する。当該最高圧力は、例えば5~40kPaGであり、好ましくは10~30kPaGである。上記サブステップ3-2は、例えば13秒間継続される。 Further, in the sub-step 3-2, unlike the sub-step 3-1, the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B. At the start of sub-step 3-2, the internal pressure of the adsorption tower 10B is substantially the same as the internal pressure of the storage tank 23 or higher than the internal pressure of the storage tank 23. After the start of sub-step 3-2, the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35. Thus, the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 </ b> B toward the storage tank 23. In the adsorption tower 10B, the internal pressure rises and nitrogen contained in the mixed gas is adsorbed by the adsorbent. Then, product oxygen gas enriched with oxygen is led out from the gas passage port 12. The product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '. In sub-step 3-2, the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2, the internal pressure of the adsorption tower 10B reaches the maximum pressure. The maximum pressure is, for example, 5 to 40 kPaG, and preferably 10 to 30 kPaG. The substep 3-2 is continued for 13 seconds, for example.

 以降のステップ4~6では、図3(e)~(h)に示したように、ステップ1~3において吸着塔10Aについて行った操作を吸着塔10Bについて行い、吸着塔10Bについて行った操作を吸着塔10Aについて行う。 In subsequent steps 4 to 6, as shown in FIGS. 3E to 3H, the operation performed on the adsorption tower 10A in steps 1 to 3 is performed on the adsorption tower 10B, and the operation performed on the adsorption tower 10B is performed. It carries out for the adsorption tower 10A.

 そして、以上のステップ1~6からなるサイクルを各吸着塔10A,10Bにおいて繰り返し行うことにより、混合ガスから窒素が有意に除去された製品酸素ガスが連続的に取得される。なお、ステップ1~6による1サイクルの時間(サイクルタイム)は、50秒間である。 Then, the product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously acquired by repeatedly performing the cycle including the above steps 1 to 6 in each of the adsorption towers 10A and 10B. Note that the time of one cycle (cycle time) in steps 1 to 6 is 50 seconds.

 図3に示した本実施形態の製品酸素ガスの製造においても、図2に示した上記実施形態の場合と同様の効果を奏することができる。 Also in the production of the product oxygen gas of the present embodiment shown in FIG. 3, the same effects as in the case of the above-described embodiment shown in FIG. 2 can be obtained.

 また、本実施形態では、サブステップ3-1およびサブステップ6-1において、貯留タンク23と吸着塔10B,10Aとの連通が遮断されている。これにより、吸着塔10B,10Aは、混合ガスの供給のみによって昇圧され、製品酸素ガスによる昇圧は行われない。そして、本実施形態におけるサブステップ3-1および6-1では、次のサブステップ3-2および6-2に切り換えるタイミングが上述の図2に示した場合と比べて2秒遅くなっており、(図2で示したサブステップ3-1,6-1は2秒間であるのに対し、図3に示したサブステップ3-1,6-1は4秒間)、次のサブステップ3-2および6-2の継続時間が2秒短くなっている。 In the present embodiment, the communication between the storage tank 23 and the adsorption towers 10B and 10A is interrupted in the sub-step 3-1 and the sub-step 6-1. As a result, the pressure in the adsorption towers 10B and 10A is increased only by supplying the mixed gas, and the pressure is not increased by the product oxygen gas. In sub-steps 3-1 and 6-1 in the present embodiment, the timing for switching to the next sub-steps 3-2 and 6-2 is 2 seconds later than in the case shown in FIG. (Sub-steps 3-1 and 6-1 shown in FIG. 2 take 2 seconds, whereas sub-steps 3-1 and 6-1 shown in FIG. 3 take 4 seconds), and the next sub-step 3-2 And the duration of 6-2 is shortened by 2 seconds.

 以上、本発明の実施形態を説明したが、本発明の範囲は上記した実施形態に限定されるものではない。例えば、PSA法により各吸着塔10A,10Bにて繰り返し行われる、複数ステップからなるサイクルについては、上記実施形態に限定されない。 The embodiment of the present invention has been described above, but the scope of the present invention is not limited to the above-described embodiment. For example, a cycle composed of a plurality of steps that is repeatedly performed in each of the adsorption towers 10A and 10B by the PSA method is not limited to the above embodiment.

 また、本発明に係る製品ガスの製造方法は、上記実施形態のような酸素を濃縮分離する酸素PSAへの適用に限定されず、他のガス成分を目的ガスとするPSA法によるガス分離に適用してもよい。 In addition, the method for producing a product gas according to the present invention is not limited to the application to the oxygen PSA that concentrates and separates oxygen as in the above embodiment, but is applied to the gas separation by the PSA method using other gas components as target gases. May be.

 次に、本発明の有用性を実施例および比較例により説明する。 Next, the usefulness of the present invention will be described with reference to examples and comparative examples.

 〔実施例1〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
[Example 1]
In this embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 吸着塔10A,10Bとしては容量が約2L(2dm3)の円筒型のものを用い、各吸着塔10A,10Bには、吸着剤としてLiX型ゼオライトを1.2kg充填した。なお、後述の他の実施例および比較例においても、本実施例で用いた吸着塔10A,10B、および吸着剤と同じものを用いた。 As the adsorption towers 10A and 10B, cylindrical ones having a capacity of about 2 L (2 dm 3 ) were used, and each of the adsorption towers 10A and 10B was filled with 1.2 kg of LiX type zeolite as an adsorbent. In the other examples and comparative examples described later, the same adsorption towers 10A and 10B and adsorbent used in this example were used.

 各ステップの継続時間は、ステップ1が4秒間、ステップ2が4秒間、サブステップ3-1が2秒間、サブステップ3-2が15秒間、ステップ4が4秒間、ステップ5が4秒間、サブステップ6-1が2秒間、サブステップ6-2が15秒間であり、ステップ1~6からなる1サイクルの時間サイクルは50秒とした。サブステップ3-2,6-2において、吸着操作時の吸着塔10B,10A内部の最高圧力を20kPaGとし、脱着操作時の吸着塔10A,10B内部の最低圧力を-65kPaGとした。また、ステップ1,4の終了時において、混合ガス供給側である吸着塔10A,10Bの内部圧力が15kPaGとなるように流量調節弁34bを調節した。このとき、ステップ2,5の終了時における吸着塔10A,10Bの内部圧力は同一となった。 The duration of each step is 4 seconds for Step 1, 4 seconds for Step 2, 2 seconds for Sub Step 3-1, 15 seconds for Sub Step 3-2, 4 seconds for Step 4, 4 seconds for Step 5, Step 6-1 was 2 seconds, sub-step 6-2 was 15 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds. In sub-steps 3-2 and 6-2, the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG, and the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to -65 kPaG. At the end of steps 1 and 4, the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 15 kPaG. At this time, the internal pressures of the adsorption towers 10A and 10B at the end of steps 2 and 5 were the same.

 本実施例において、ステップ1,4の開始時と終了時との混合ガス導入側である吸着塔10A,10Bの圧力低下は、吸着塔10A,10Bの最高圧力(20kPaG)と最低圧力(-65kPaG)との圧力差(85kPa)に対して5.9%であった。 In this embodiment, the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure (−65 kPaG) of the adsorption towers 10A and 10B. ) And a pressure difference (85 kPa) with respect to 5.9).

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が827NL/h(Nは標準状態を示し、以下も同じ。)、製品酸素ガス流量が102NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16372m3/h、ターボブロワ21の必要風量は8887Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be acquired is 93%, the mixed gas supply amount is 827 NL / h (N indicates a standard state, and the same applies hereinafter), and the product oxygen gas flow rate is 102 NL / h. h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16372m 3 / h, required air volume of the turbo blower 21 became 8887Nm 3 / h.

 真空ポンプ22としての大晃機械工業株式会社(日本国山口県熊毛郡、URL:https://www.taiko-kk.com/)製ルーツ型真空ポンプ(型番:TLIF-400WP)と、ターボブロワ21としての虹技株式会社(日本国兵庫県姫路市、URL:http://www.kogi.co.jp/)製ターボ型ブロワ(型番:12A112X-Y)の性能曲線を用い、真空ポンプ22のモーター効率を95%一定とし、且つターボブロワ21のモーター効率を65%一定として電力原単位を算出した。また、大気圧未満の吸着塔に混合ガスを供給する場合、ターボブロワ21を迂回してバイパス用の配管36からの混合ガスの供給を想定し、ターボブロワ21の吐出圧力を0kPaGとして電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.286kWhとなった。 Roots type vacuum pump (model number: TLIF-400WP) manufactured by Otsuchi Machine Industry Co., Ltd. (Kumage-gun, Yamaguchi, Japan, URL: https://www.taiko-kk.com/) as a vacuum pump 22 and a turbo blower 21 Using the performance curve of a turbo blower (model number: 12A112XY) manufactured by Niji Gi Co., Ltd. (Himeji, Hyogo, Japan, URL: http://www.kogi.co.jp/) The power intensity was calculated with the efficiency constant at 95% and the motor efficiency of the turbo blower 21 at constant 65%. In addition, when supplying mixed gas to an adsorption tower below atmospheric pressure, it is assumed that mixed gas is supplied from the bypass pipe 36 by bypassing the turbo blower 21, and the basic unit of electric power is calculated by setting the discharge pressure of the turbo blower 21 to 0 kPaG. did. As a result, the power consumption (per unit of power) per 1 Nm 3 of oxygen was 0.286 kWh.

 〔実施例2〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図3を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
[Example 2]
In the present embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the product oxygen gas production method including the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 本実施例では、各ステップの継続時間は、ステップ1が4秒間、ステップ2が4秒間、サブステップ3-1が4秒間、サブステップ3-2が13秒間、ステップ4が4秒間、ステップ5が4秒間、サブステップ6-1が4秒間、サブステップ6-2が13秒間であり、ステップ1~6からなる1サイクルの時間サイクルは50秒とした。サブステップ3-1,6-1では、貯留タンク23内の製品酸素ガスを用いた吸着塔10B,10Aの昇圧は行わなかった。サブステップ3-2,6-2において、吸着操作時の吸着塔10B,10A内部の最高圧力を20kPaGとし、脱着操作時の吸着塔10A,10B内部の最低圧力を-65kPaGとした。また、ステップ1,4の終了時において、混合ガス供給側である吸着塔10A,10Bの内部圧力が15kPaGとなるように流量調節弁34bを調節した。このとき、ステップ2,5の終了時における吸着塔10A,10Bの内部圧力は同一となった。 In this embodiment, the duration of each step is 4 seconds for Step 1, 4 seconds for Step 2, 4 seconds for Sub Step 3-1, 13 seconds for Sub Step 3-2, 4 seconds for Step 4, and Step 5 Is 4 seconds, sub-step 6-1 is 4 seconds, sub-step 6-2 is 13 seconds, and the time cycle of one cycle consisting of steps 1 to 6 is 50 seconds. In sub-steps 3-1 and 6-1, the pressure of the adsorption towers 10B and 10A using the product oxygen gas in the storage tank 23 was not increased. In sub-steps 3-2 and 6-2, the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG, and the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to -65 kPaG. At the end of steps 1 and 4, the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 15 kPaG. At this time, the internal pressures of the adsorption towers 10A and 10B at the end of steps 2 and 5 were the same.

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が824NL/h、製品酸素ガス流量が99NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16582m3/h、ターボブロワ21の必要風量は8987Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be obtained was 93%, the mixed gas supply amount was 824 NL / h and the product oxygen gas flow rate was 99 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16582m 3 / h, required air volume of the turbo blower 21 became 8987Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.290kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (per unit of power) per 1 Nm 3 of oxygen was 0.290 kWh.

 〔実施例3〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
Example 3
In this embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 本実施例では、ステップ1,4の終了時において、混合ガス供給側である吸着塔10A,10Bの内部圧力が20kPaGとなるように流量調節弁34bを調節した。 In this example, at the end of steps 1 and 4, the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side was 20 kPaG.

 本実施例において、ステップ1,4の開始時と終了時との混合ガス導入側である吸着塔10A,10Bの圧力低下は、吸着塔10A,10Bの最高圧力(20kPaG)と最低圧力(-65kPaG)との圧力差(85kPa)に対して0%であった。その他の操作条件は上記の実施例1と同様とした。 In this embodiment, the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure (−65 kPaG) of the adsorption towers 10A and 10B. ) And 0% of the pressure difference (85 kPa). Other operating conditions were the same as in Example 1 above.

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が882NL/h、製品酸素ガス流量が102NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16963m3/h、ターボブロワ21の必要風量は9269Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be obtained was 93%, the mixed gas supply amount was 882 NL / h and the product oxygen gas flow rate was 102 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16963m 3 / h, required air volume of the turbo blower 21 became 9269Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.296kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.296 kWh.

 〔実施例4〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
Example 4
In this embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 本実施例では、ステップ1,4の終了時において、混合ガス供給側である吸着塔10A,10Bの内部圧力が10kPaGとなるように流量調節弁34bを調節した。本実施例において、ステップ1,4の開始時と終了時との混合ガス導入側である吸着塔10A,10Bの圧力低下は、吸着塔10A,10Bの最高圧力(20kPaG)と最低圧力(-65kPaG)との圧力差(85kPa)に対して11.8%であった。その他の操作条件は上記の実施例1と同様とした。 In this example, at the end of steps 1 and 4, the flow rate control valve 34b was adjusted so that the internal pressure of the adsorption towers 10A and 10B on the mixed gas supply side became 10 kPaG. In this embodiment, the pressure drop in the adsorption towers 10A and 10B on the mixed gas introduction side at the start and end of steps 1 and 4 is the maximum pressure (20 kPaG) and the minimum pressure (−65 kPaG) of the adsorption towers 10A and 10B. ) And 11.8% of the pressure difference (85 kPa). Other operating conditions were the same as in Example 1 above.

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が788NL/h、製品酸素ガス流量が97NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16324m3/h、ターボブロワ21の必要風量は8756Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be obtained was 93%, the mixed gas supply amount was 788 NL / h, and the product oxygen gas flow rate was 97 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16324m 3 / h, required air volume of the turbo blower 21 became 8756Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.289kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.289 kWh.

 〔実施例5〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
Example 5
In this embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 本実施例では、各ステップの継続時間は、ステップ1が6秒間、ステップ2が4秒間、サブステップ3-1が2秒間、サブステップ3-2が13秒間、ステップ4が6秒間、ステップ5が4秒間、サブステップ6-1が2秒間、サブステップ6-2が13秒間であり、ステップ1~6からなる1サイクルの時間サイクルは50秒とした。その他の操作条件は上記の実施例1と同様とした。 In this embodiment, the duration of each step is as follows: Step 1 is 6 seconds, Step 2 is 4 seconds, Sub-step 3-1 is 2 seconds, Sub-step 3-2 is 13 seconds, Step 4 is 6 seconds, Step 5 4 seconds, sub-step 6-1 was 2 seconds, sub-step 6-2 was 13 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds. Other operating conditions were the same as in Example 1 above.

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が923NL/h、製品酸素ガス流量が110NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16862m3/h、ターボブロワ21の必要風量は9016Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be obtained was 93%, the mixed gas supply amount was 923 NL / h, and the product oxygen gas flow rate was 110 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16862m 3 / h, required air volume of the turbo blower 21 became 9016Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.296kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.296 kWh.

 〔実施例6〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、以下に示す条件下で、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。
Example 6
In this embodiment, the product gas production apparatus X1 shown in FIG. 1 is used as a mixed gas under the following conditions by the production method of product oxygen gas comprising the steps described with reference to FIG. Concentrated oxygen gas was obtained as product gas from air.

 本実施例では、各ステップの継続時間は、ステップ1が2秒間、ステップ2が4秒間、サブステップ3-1が2秒間、サブステップ3-2が17秒間、ステップ4が2秒間、ステップ5が4秒間、サブステップ6-1が2秒間、サブステップ6-2が17秒間であり、ステップ1~6からなる1サイクルの時間サイクルは50秒とした。その他の操作条件は上記の実施例1と同様とした。 In this embodiment, the duration of each step is as follows: step 1 is 2 seconds, step 2 is 4 seconds, sub-step 3-1 is 2 seconds, sub-step 3-2 is 17 seconds, step 4 is 2 seconds, step 5 4 seconds, sub-step 6-1 was 2 seconds, sub-step 6-2 was 17 seconds, and the time cycle of one cycle consisting of steps 1 to 6 was 50 seconds. Other operating conditions were the same as in Example 1 above.

 本実施例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が750NL/h、製品酸素ガス流量が90NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は16749m3/h、ターボブロワ21の必要風量は9146Nm3/hとなった。 In this example, when the average concentration of the product oxygen gas to be obtained was 93%, the mixed gas supply amount was 750 NL / h, and the product oxygen gas flow rate was 90 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 16749m 3 / h, required air volume of the turbo blower 21 became 9146Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.293kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.293 kWh.

 〔実施例7〕
 本実施例では、図1に示した製品ガス製造装置X1を用いて、図2を参照して説明した各ステップからなる製品酸素ガスの製造方法により、混合ガスとしての空気から製品ガスとしての濃縮酸素ガスを取得した。本実施例では、大気圧未満の吸着塔に混合ガスを供給する場合、配管37の流量調節弁37aにてターボブロワ21の流量調節を行ない吐出圧力を高くすることを想定し、ターボブロワ21の吐出圧力を20kPaGとして電力原単位を算出した。それ以外の各ステップの操作条件は上記の実施例1と同様とし、また真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.278kWhとなった。
Example 7
In the present embodiment, the product gas production apparatus X1 shown in FIG. 1 is used to concentrate the product gas from the air as the mixed gas by the product oxygen gas production method including the steps described with reference to FIG. Obtained oxygen gas. In this embodiment, when supplying the mixed gas to the adsorption tower below atmospheric pressure, it is assumed that the flow rate of the turbo blower 21 is adjusted by the flow rate adjustment valve 37a of the pipe 37 to increase the discharge pressure, and the discharge pressure of the turbo blower 21 is increased. Was calculated as 20 kPaG. The operating conditions of the other steps were the same as in Example 1 above, and the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in Example 1 above. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.278 kWh.

 〔比較例1〕
 本比較例では、図1に示した製品ガス製造装置X1を用いて、特開平11-179133号公報(上記特許文献1)に開示された方法を本発明の実施例とできるだけ条件を揃えて行った。本比較例では、図4に示した各ステップからなるサイクルを繰り返し、以下に示す条件下で、混合ガスとしての空気から濃縮酸素ガスを取得した。
[Comparative Example 1]
In this comparative example, using the product gas production apparatus X1 shown in FIG. 1, the method disclosed in Japanese Patent Application Laid-Open No. 11-179133 (the above-mentioned Patent Document 1) is performed with the conditions of the present invention as uniform as possible. It was. In this comparative example, the cycle comprising the steps shown in FIG. 4 was repeated, and concentrated oxygen gas was obtained from air as a mixed gas under the following conditions.

 本比較例において、ステップ1’~6’からなる1サイクルを繰り返し行った。ステップ1’では、自動弁31b,32a,34aおよび流量調節弁34bが開かれ、図4(a)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、混合ガスが配管31を介してガス通過口11から供給される。 In this comparative example, one cycle consisting of steps 1 'to 6' was repeated. In step 1 ', the automatic valves 31b, 32a, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 4A is achieved. In the adsorption tower 10A, the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10 </ b> B, the mixed gas is supplied from the gas passage port 11 via the pipe 31.

 また、ステップ1’では、吸着塔10A,10Bそれぞれのガス通過口12が配管34を介して連通している。ステップ1’の開始後において、吸着塔10Aでは、ガス通過口12付近に残存する濃縮酸素ガスが当該ガス通過口12から放出されつつ減圧(DP)する。一方、吸着塔10Bでは、吸着塔10Aから放出された残留濃縮酸素ガスがガス通過口12から導入されて、昇圧/回収(PR/RC)が行われる。 Further, in step 1 ′, the gas passage ports 12 of the adsorption towers 10 </ b> A and 10 </ b> B communicate with each other through the pipe 34. After the start of step 1 ′, in the adsorption tower 10 </ b> A, the concentrated oxygen gas remaining in the vicinity of the gas passage port 12 is decompressed (DP) while being released from the gas passage port 12. On the other hand, in the adsorption tower 10B, the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage port 12, and pressure increase / recovery (PR / RC) is performed.

 ステップ2’では、自動弁31b,32a,33bが開かれ、図4(b)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、ステップ1’に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、ステップ1’に引き続き混合ガスが配管31を介してガス通過口11から供給される。 In step 2 ', the automatic valves 31b, 32a and 33b are opened, and the gas flow state as shown in FIG. 4B is achieved. In the adsorption tower 10A, following the step 1 ′, the inside of the tower is decompressed by the vacuum pump 22, nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. . The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10 </ b> B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following Step 1 ′.

 また、ステップ2’では、吸着塔10A,10Bの連通を閉じる一方、吸着塔10Bのガス通過口12と貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。ステップ2’の開始時において、吸着塔10Bは貯留タンク23と比べて相対的に低圧状態にある。したがって、ステップ2’の開始後において、貯留タンク23内の製品酸素ガスが主幹ライン33に放出される。一方、吸着塔10Bでは、貯留タンク23から放出された製品酸素ガスがガス通過口12から導入されて、昇圧(PR)が行われる。ステップ2’の終了時において、吸着塔10Bの内部圧力と貯留タンク23の内部圧力とは、実質的に同圧である。 In Step 2 ', the communication between the adsorption towers 10A and 10B is closed, while the gas passage port 12 of the adsorption tower 10B and the storage tank 23 are communicated with each other via the main line 33' and the branch line 33B. At the start of step 2 ′, the adsorption tower 10 </ b> B is in a relatively low pressure state as compared to the storage tank 23. Therefore, after the start of step 2 ′, the product oxygen gas in the storage tank 23 is released to the main line 33. On the other hand, in the adsorption tower 10B, the product oxygen gas released from the storage tank 23 is introduced from the gas passage port 12, and pressure increase (PR) is performed. At the end of step 2 ', the internal pressure of the adsorption tower 10B and the internal pressure of the storage tank 23 are substantially the same pressure.

 本比較例において、ステップ3’は、当該ステップ3’の開始時(ステップ2’の終了直後)から所定時間経過時まで継続するサブステップ3-1’と、サブステップ3-1’の後に行うサブステップ3-2’と含む。 In this comparative example, step 3 ′ is performed after sub-step 3-1 ′ that continues from the start of step 3 ′ (immediately after the end of step 2 ′) until the elapse of a predetermined time, and after sub-step 3-1 ′. Sub-step 3-2 ′ is included.

 サブステップ3-1’では、引き続き自動弁31b,32a,33bが開かれ、図4(c)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、ステップ2’に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、ステップ2’に引き続き混合ガスが配管31を介してガス通過口11から供給される。脱着を行う吸着塔10Aでは内部圧力が低下し続け、サブステップ3-1’の終了時には吸着塔10Aの内部が最低圧力に到達する。 In sub-step 3-1 ', the automatic valves 31b, 32a and 33b are continuously opened, and the gas flow state as shown in FIG. 4C is achieved. In the adsorption tower 10A, following the step 2 ', the inside of the tower is decompressed by the vacuum pump 22 and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. . The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the step 2 '. In the adsorption tower 10A that performs desorption, the internal pressure continues to decrease, and at the end of sub-step 3-1 ', the inside of the adsorption tower 10A reaches the minimum pressure.

 また、サブステップ3-1’では、ステップ2’に引き続き、吸着塔10Bと貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。サブステップ3-1’の開始時において、吸着塔10Bと貯留タンク23とは実質的に同圧である。サブステップ3-1’の開始後において、吸着塔10Bへ混合ガスが供給されることで当該吸着塔10Bの内部圧力が上昇する一方、貯留タンク23から製品酸素ガスが配管35を介して取り出されることで当該貯留タンク23の内部圧力は低下する。このため、吸着塔10Bから貯留タンク23に向けてガスの流れが生じる。吸着塔10Bでは内部圧力が上昇し、混合ガスに含まれる窒素が吸着剤によって吸着(AS)される。そして、ガス通過口12から酸素が濃縮された製品酸素ガスが導出される。当該製品酸素ガスは、分枝ライン33Bおよび主幹ライン33’を介して貯留タンク23に送出される。 In sub-step 3-1 ′, following the step 2 ′, the adsorption tower 10 B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33 B. At the start of sub-step 3-1 ', the adsorption tower 10B and the storage tank 23 have substantially the same pressure. After the start of sub-step 3-1 ′, the mixed gas is supplied to the adsorption tower 10B to increase the internal pressure of the adsorption tower 10B, while the product oxygen gas is taken out from the storage tank 23 through the pipe 35. As a result, the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 </ b> B toward the storage tank 23. In the adsorption tower 10B, the internal pressure rises and nitrogen contained in the mixed gas is adsorbed (AS) by the adsorbent. Then, product oxygen gas enriched with oxygen is led out from the gas passage port 12. The product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '.

 サブステップ3-2’では、自動弁31b,32a,33b,34aおよび流量調節弁34bが開かれ、図4(d)に示すようなガス流れ状態が達成される。吸着塔10Bにおいては、サブステップ3-1’に引き続き混合ガスが配管31を介してガス通過口11から供給される。吸着塔10Bでは内部圧力が昇圧し、混合ガスに含まれる窒素が吸着剤によって吸着(AS)される。そして、ガス通過口12から酸素が濃縮された製品酸素ガスが導出される。当該製品酸素ガスは、分枝ライン33Bおよび主幹ライン33’を介して貯留タンク23に送出される。サブステップ3-2’では吸着塔10Bの内部圧力が上昇し続け、サブステップ3-2’の終了時には吸着塔10Bの内部が最高圧力に到達する。 In sub-step 3-2 ', the automatic valves 31b, 32a, 33b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 4 (d) is achieved. In the adsorption tower 10B, the mixed gas is supplied from the gas passage port 11 through the pipe 31 following the sub-step 3-1 '. In the adsorption tower 10B, the internal pressure is increased, and nitrogen contained in the mixed gas is adsorbed (AS) by the adsorbent. Then, product oxygen gas enriched with oxygen is led out from the gas passage port 12. The product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '. In sub-step 3-2 ', the internal pressure of the adsorption tower 10B continues to rise, and at the end of sub-step 3-2', the internal pressure of the adsorption tower 10B reaches the maximum pressure.

 また、サブステップ3-2’では、吸着塔10Bから導出された製品酸素ガスの一部が洗浄ガスとして配管34を介して吸着塔10Aに導入され、吸着塔10Aの吸着剤が洗浄(RS)される。それと共に、吸着塔10Aにおいては、真空ポンプ22により塔内が減圧されて塔内のガスが塔外へ排出される。 In sub-step 3-2 ′, part of the product oxygen gas derived from the adsorption tower 10B is introduced as a cleaning gas into the adsorption tower 10A via the pipe 34, and the adsorbent in the adsorption tower 10A is washed (RS). Is done. At the same time, in the adsorption tower 10A, the inside of the tower is depressurized by the vacuum pump 22, and the gas in the tower is discharged outside the tower.

 以降のステップ4’~6’では、図4(e)~(h)に示したように、ステップ1’~3’において吸着塔10Aについて行った操作を吸着塔10Bについて行い、吸着塔10Bについて行った操作を吸着塔10Aについて行う。そして、以上のステップ1’~6’からなるサイクルを各吸着塔10A,10Bにおいて繰り返し行うことにより、混合ガスから窒素が有意に除去された製品酸素ガスが連続的に取得される。 In subsequent steps 4 ′ to 6 ′, as shown in FIGS. 4E to 4H, the operation performed on the adsorption tower 10A in steps 1 ′ to 3 ′ is performed on the adsorption tower 10B, and the adsorption tower 10B is performed. The performed operation is performed on the adsorption tower 10A. The product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously obtained by repeatedly performing the cycle including the above steps 1 'to 6' in each of the adsorption towers 10A and 10B.

 本比較例では、各ステップの継続時間は、ステップ1’が4秒間、ステップ2’が2秒間、サブステップ3-1’が12秒間、サブステップ3-2’が7秒間、ステップ4’が4秒間、ステップ5’が2秒間、サブステップ6-1’が12秒間、サブステップ6-2’が7秒間であり、ステップ1’~6’からなる1サイクルの時間サイクルは50秒とした。サブステップ3-2’,6-2’において、吸着操作時の吸着塔10B,10A内部の最高圧力を20kPaGとし、サブステップ3-1’,6-1’において、脱着操作時の吸着塔10A,10B内部の最低圧力を-65kPaGとした。ステップ1’,4’の終了時において、混合ガス供給側である吸着塔10B,10Aの内部圧力が同一となるように流量調節弁34bを調節した。また、サブステップ3-2’,6-2’において、洗浄ガスとして使用される製品酸素ガスの量は180NL/hとした。 In this comparative example, the duration of each step is 4 seconds for Step 1 ′, 2 seconds for Step 2 ′, 12 seconds for Sub-Step 3-1 ′, 7 seconds for Sub-Step 3-2 ′, and Step 4 ′ 4 seconds, step 5 ′ is 2 seconds, sub-step 6-1 ′ is 12 seconds, sub-step 6-2 ′ is 7 seconds, and the time cycle of one cycle consisting of steps 1 ′ to 6 ′ is 50 seconds. . In substeps 3-2 ′ and 6-2 ′, the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation is set to 20 kPaG, and in substeps 3-1 ′ and 6-1 ′, the adsorption tower 10A during the desorption operation is set. , 10B minimum pressure was -65 kPaG. At the end of Steps 1 'and 4', the flow rate adjustment valve 34b was adjusted so that the internal pressures of the adsorption towers 10B and 10A on the mixed gas supply side were the same. In sub-steps 3-2 'and 6-2', the amount of product oxygen gas used as the cleaning gas was 180 NL / h.

 本比較例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が807NL/h、製品酸素ガス流量が95NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は17283m3/h、ターボブロワ21の必要風量は8964Nm3/hとなった。 In this comparative example, when the average concentration of the obtained product oxygen gas was 93%, the mixed gas supply amount was 807 NL / h, and the product oxygen gas flow rate was 95 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 17283m 3 / h, required air volume of the turbo blower 21 became 8964Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.308kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.308 kWh.

 〔比較例2〕
 本比較例では、図1に示した製品ガス製造装置X1を用いて、特開平2-119915号公報(上記特許文献2)の実施例3に開示された方法を本発明の実施例とできるだけ条件を揃えて行った。本比較例では、図5に示した各ステップからなるサイクルを繰り返し、以下に示す条件下で、混合ガスとしての空気から濃縮酸素ガスを取得した。
[Comparative Example 2]
In this comparative example, using the product gas production apparatus X1 shown in FIG. 1, the method disclosed in Example 3 of Japanese Patent Laid-Open No. Hei 2-119915 (Patent Document 2) is compared with the example of the present invention as much as possible. I went with all of them. In this comparative example, the cycle consisting of each step shown in FIG. 5 was repeated, and concentrated oxygen gas was obtained from air as a mixed gas under the following conditions.

 本比較例において、ステップ1”~6”からなる1サイクルを繰り返し行った。ステップ1’では、自動弁31a,32b,34aおよび流量調節弁34bが開かれ、図5(a)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、混合ガスが配管31を介してガス通過口11から供給される。吸着塔10Aについては、先に吸着を行っていたので(図5(f)に示されるステップ6”参照)、ステップ1の開始時には相対的に高圧状態にあり、塔内には製品酸素ガスを多く含むガスが残留している。一方、吸着塔10Bにおいては、先に脱着を行っており(図5(f)に示されるステップ6”参照)、引き続き真空ポンプ22により塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは、分枝ライン32B、主幹ライン32’を介して系外へ排出される。 In this comparative example, one cycle consisting of steps 1 "to 6" was repeated. In step 1 ', the automatic valves 31a, 32b, 34a and the flow rate adjusting valve 34b are opened, and the gas flow state as shown in FIG. 5A is achieved. In the adsorption tower 10 </ b> A, the mixed gas is supplied from the gas passage port 11 through the pipe 31. Since the adsorption tower 10A has been previously adsorbed (see step 6 ″ shown in FIG. 5 (f)), it is in a relatively high pressure state at the start of step 1, and product oxygen gas is introduced into the tower. On the other hand, in the adsorption tower 10B, desorption is performed first (see step 6 ″ shown in FIG. 5 (f)), and the gas in the tower is continuously removed by the vacuum pump 22. It is led out of the tower as off-gas through the passage port 11. The off-gas is discharged out of the system via the branch line 32B and the main trunk line 32 '.

 また、ステップ1”では、吸着塔10A,10Bそれぞれのガス通過口12,12が配管34を介して連通している。ステップ1”の開始後において、吸着塔10Aでは、ガス通過口12からの残留濃縮酸素ガス(製品酸素ガスを多く含むガス)の放出を伴いながら減圧(DP)し、一方、吸着塔10Bでは、吸着塔10Aから放出された残留濃縮酸素ガスがガス通過口12から導入されて、洗浄効果を有する昇圧/回収(PR/RC)が行われる。 In Step 1 ″, the gas passages 12 and 12 of the adsorption towers 10A and 10B communicate with each other through the pipe 34. After the start of Step 1 ″, The pressure is reduced (DP) with the release of the residual concentrated oxygen gas (the gas containing a large amount of product oxygen gas). On the other hand, in the adsorption tower 10B, the residual concentrated oxygen gas released from the adsorption tower 10A is introduced from the gas passage port 12. Thus, pressurization / recovery (PR / RC) having a cleaning effect is performed.

 ステップ2”では、自動弁31b,32a,33bが開かれ、図5(b)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、混合ガスが配管31を介してガス通過口11から供給される。 In Step 2 ″, the automatic valves 31b, 32a, and 33b are opened, and the gas flow state as shown in FIG. 5B is achieved. In the adsorption tower 10A, the inside of the tower is depressurized by the vacuum pump 22 and adsorbed. Nitrogen is desorbed (DS) from the agent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. It is supplied from the gas passage port 11 via the pipe 31.

 また、ステップ2”では、吸着塔10A,10Bの連通を閉じる一方、吸着塔10Bのガス通過口12と貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。ステップ2”の開始時において、吸着塔10Bは貯留タンク23と比べて相対的に低圧状態にある。したがって、ステップ2”の開始後において、貯留タンク23内の製品酸素ガスが主幹ライン33に放出される。一方、吸着塔10Bでは、貯留タンク23から放出された製品酸素ガスがガス通過口12から導入されて、昇圧(PR)が行われる。ステップ2”の終了時において、吸着塔10Bの内部圧力と貯留タンク23の内部圧力とは、実質的に同圧である。 In step 2 ″, the communication between the adsorption towers 10A and 10B is closed, while the gas passage port 12 and the storage tank 23 of the adsorption tower 10B communicate with each other via the main line 33 ′ and the branch line 33B. At the start of 2 ″, the adsorption tower 10B is in a relatively low pressure state compared to the storage tank 23. Therefore, after the start of step 2 ″, the product oxygen gas in the storage tank 23 is released to the main line 33. On the other hand, in the adsorption tower 10B, the product oxygen gas released from the storage tank 23 is discharged from the gas passage port 12. The pressure is increased (PR). At the end of step 2 ″, the internal pressure of the adsorption tower 10B and the internal pressure of the storage tank 23 are substantially the same pressure.

 ステップ3”では、引き続き自動弁31b,32a,33bが開かれ、図5(c)に示すようなガス流れ状態が達成される。吸着塔10Aにおいては、ステップ2”に引き続き真空ポンプ22により塔内が減圧されて吸着剤から窒素が脱着(DS)され、塔内のガスがガス通過口11を通じてオフガスとして塔外へ導出される。当該オフガスは系外へ排出される。一方、吸着塔10Bにおいては、ステップ2”に引き続き混合ガスが配管31を介してガス通過口11から供給され、混合ガスに含まれる窒素が吸着(AS)される。脱着を行う吸着塔10Aでは内部圧力が低下し続け、ステップ3”の終了時には吸着塔10Aの内部が最低圧力に到達する。 In step 3 ″, the automatic valves 31b, 32a, 33b are continuously opened, and the gas flow state as shown in FIG. 5C is achieved. In the adsorption tower 10A, the vacuum pump 22 continues the tower with the vacuum pump 22 following step 2 ″. The inside is depressurized and nitrogen is desorbed (DS) from the adsorbent, and the gas in the tower is led out of the tower as an off-gas through the gas passage port 11. The off-gas is discharged out of the system. On the other hand, in the adsorption tower 10B, following step 2 ″, the mixed gas is supplied from the gas passage port 11 through the pipe 31, and nitrogen contained in the mixed gas is adsorbed (AS). In the adsorption tower 10A that performs desorption. The internal pressure continues to drop, and at the end of step 3 ″, the inside of the adsorption tower 10A reaches the minimum pressure.

 また、ステップ3”では、ステップ2”に引き続き、吸着塔10Bと貯留タンク23とが主幹ライン33'、分枝ライン33Bを介して連通している。ステップ3”の開始時において、吸着塔10Bと貯留タンク23とは実質的に同圧である。ステップ3”の開始後において、吸着塔10Bへ混合ガスが供給されることで当該吸着塔10Bの内部圧力が上昇する一方、貯留タンク23から製品酸素ガスが配管35を介して取り出されることで当該貯留タンク23の内部圧力は低下する。このため、吸着塔10Bから貯留タンク23に向けてガスの流れが生じる。吸着塔10Bでは内部圧力が上昇し、混合ガスに含まれる窒素が吸着剤によって吸着される。そして、ガス通過口12から酸素が濃縮された製品酸素ガスが導出される。当該製品酸素ガスは、分枝ライン33Bおよび主幹ライン33’を介して貯留タンク23に送出される。ステップ3”では吸着塔10Bの内部圧力が上昇し続け、ステップ3”の終了時には吸着塔10Bの内部が最高圧力に到達する。 In Step 3 ″, following Step 2 ″, the adsorption tower 10B and the storage tank 23 communicate with each other via the main line 33 ′ and the branch line 33B. At the start of step 3 ″, the adsorption tower 10B and the storage tank 23 have substantially the same pressure. After the start of step 3 ″, the mixed gas is supplied to the adsorption tower 10B, so that the adsorption tower 10B While the internal pressure rises, the product oxygen gas is taken out from the storage tank 23 through the pipe 35, so that the internal pressure of the storage tank 23 decreases. For this reason, a gas flow is generated from the adsorption tower 10 </ b> B toward the storage tank 23. In the adsorption tower 10B, the internal pressure rises and nitrogen contained in the mixed gas is adsorbed by the adsorbent. Then, product oxygen gas enriched with oxygen is led out from the gas passage port 12. The product oxygen gas is sent to the storage tank 23 via the branch line 33B and the main line 33 '. At step 3 ″, the internal pressure of the adsorption tower 10B continues to rise, and at the end of step 3 ″, the inside of the adsorption tower 10B reaches the maximum pressure.

 以降のステップ4”~6”では、図5(d)~(f)に示したように、ステップ1”~3”において吸着塔10Aについて行った操作を吸着塔10Bについて行い、吸着塔10Bについて行った操作を吸着塔10Aについて行う。そして、以上のステップ1”~6”からなるサイクルを各吸着塔10A,10Bにおいて繰り返し行うことにより、混合ガスから窒素が有意に除去された製品酸素ガスが連続的に取得される。 In subsequent steps 4 ″ to 6 ″, as shown in FIGS. 5D to 5F, the operations performed on the adsorption tower 10A in steps 1 ″ to 3 ″ are performed on the adsorption tower 10B, and the adsorption tower 10B is performed. The performed operation is performed on the adsorption tower 10A. The product oxygen gas from which nitrogen is significantly removed from the mixed gas is continuously obtained by repeatedly performing the cycle including the above steps 1 "to 6" in each of the adsorption towers 10A and 10B.

 本比較例では、各ステップの継続時間は、ステップ1”が4秒間、ステップ2”が2秒間、ステップ3”が19秒間、ステップ4”が4秒間、ステップ5”が2秒間、ステップ6”が19秒間であり、ステップ1”~6”からなる1サイクルの時間サイクルは50秒とした。ステップ3”,6”において、吸着操作時の吸着塔10B,10A内部の最高圧力を20kPaGとし、脱着操作時の吸着塔10A,10B内部の最低圧力を-65kPaGとした。また、ステップ1”,4”の終了時において、混合ガス供給側である吸着塔10B,10Aの内部圧力が1kPaGとなるように流量調節弁34bを調節した。 In this comparative example, the duration of each step is as follows: Step 1 ″ is 4 seconds, Step 2 ″ is 2 seconds, Step 3 ″ is 19 seconds, Step 4 ″ is 4 seconds, Step 5 ″ is 2 seconds, Step 6 ″. Was 19 seconds, and the time cycle of one cycle consisting of steps 1 "to 6" was 50 seconds. In steps 3 ″ and 6 ″, the maximum pressure inside the adsorption towers 10B and 10A during the adsorption operation was set to 20 kPaG, and the minimum pressure inside the adsorption towers 10A and 10B during the desorption operation was set to −65 kPaG. At the end of steps 1 ″ and 4 ″, the flow rate adjustment valve 34b was adjusted so that the internal pressure of the adsorption towers 10B and 10A on the mixed gas supply side became 1 kPaG.

 本比較例では、取得する製品酸素ガスの平均濃度が93%の条件の時、混合ガス供給量が814NL/h、製品酸素ガス流量が90NL/hであった。また、酸素取得量が100%濃度換算で1000Nm3/hを想定した場合、真空ポンプ22の必要風量は18047m3/h、ターボブロワ21の必要風量は9677Nm3/hとなった。 In this comparative example, when the average concentration of the product oxygen gas to be acquired was 93%, the mixed gas supply amount was 814 NL / h and the product oxygen gas flow rate was 90 NL / h. Further, when oxygen acquired amount is assumed 1000 Nm 3 / h at a concentration of 100% conversion, required air volume of the vacuum pump 22 is 18047m 3 / h, required air volume of the turbo blower 21 became 9677Nm 3 / h.

 そして、真空ポンプ22およびターボブロワ21について上記実施例1と同じ稼働条件で電力原単位を算出した。その結果、酸素1Nm3あたりの消費電力(電力原単位)は0.318kWhとなった。 Then, the power intensity was calculated for the vacuum pump 22 and the turbo blower 21 under the same operating conditions as in the first embodiment. As a result, the power consumption (unit power consumption) per 1 Nm 3 of oxygen was 0.318 kWh.

 上記実施例および上記比較例に関して、単位時間あたりの製品酸素ガス発生量(製品酸素ガス流量)と電力原単位の関係を表1に示す。 Table 1 shows the relationship between the amount of product oxygen gas generated per unit time (product oxygen gas flow rate) and the power intensity for the above examples and comparative examples.

Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001

 次に、流量5000Nm3/h(100%酸素濃度換算)の装置を想定し、電気価格を15円/kWh、年間の装置稼働時間を8000時間、吸着剤価格を1700円/kgとした場合の、年間電気料金と、使用する吸着剤の価格の一覧を表2に示す。 Next, assuming an apparatus with a flow rate of 5000 Nm 3 / h (100% oxygen concentration conversion), the electricity price is 15 yen / kWh, the annual apparatus operating time is 8000 hours, and the adsorbent price is 1700 yen / kg. Table 2 shows a list of annual electricity charges and the price of the adsorbent used.

Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002

 表1から明らかなように、本発明の製品酸素ガス(製品ガス)の製造方法によると、電力原単位を低減(0.3kwh/Nm3未満程度)することが出来る。 As is apparent from Table 1, according to the method for producing product oxygen gas (product gas) of the present invention, the power intensity can be reduced (less than about 0.3 kwh / Nm 3 ).

 また、吸着塔内の残留濃縮酸素ガスを用いた洗浄時間(上記実施例1~4におけるステップ1およびステップ4の各ステップの時間)をサイクルタイムの6~14%にすることで、高い製品酸素ガス発生量が実現でき、必要となる吸着剤量が削減される。したがって、電力原単位を低減しながら装置製造コストも削減可能となる。 In addition, by setting the cleaning time using the residual concentrated oxygen gas in the adsorption tower (the time of each step of steps 1 and 4 in Examples 1 to 4 above) to 6 to 14% of the cycle time, high product oxygen The amount of gas generated can be realized, and the amount of adsorbent required is reduced. Accordingly, it is possible to reduce the device manufacturing cost while reducing the power consumption rate.

Claims (13)

 目的ガスおよび不要ガスを含む混合ガスから、上記不要ガスを選択的に吸着する吸着剤が充填された第1の吸着塔および第2の吸着塔を用いて行う圧力変動吸着法により、上記目的ガスが濃縮された製品ガスを製造する方法であって、
 上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第1の吸着塔に上記混合ガスを供給する一方、上記第2の吸着塔から塔内ガスの排気を行うステップ1と、
 上記第1の吸着塔と上記第2の吸着塔とを連通させた状態にて、上記第1の吸着塔から塔内ガスの排気を行う一方、上記第2の吸着塔に上記混合ガスを供給するステップ2と、
 上記第1の吸着塔と上記第2の吸着塔とを連通させない状態にて、上記第1の吸着塔から塔内ガスの排気を行う一方、上記第2の吸着塔に上記混合ガスを供給し、上記第2の吸着塔からの製品ガスの回収を少なくとも一部の時間において行うステップ3と、
 上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第2の吸着塔に上記混合ガスを供給する一方、上記第1の吸着塔から塔内ガスの排気を行うステップ4と、
 上記第1の吸着塔と第2の吸着塔とを連通させた状態にて、上記第2の吸着塔から塔内ガスの排気を行う一方、上記第1の吸着塔に上記混合ガスを供給するステップ5と、
 上記第1の吸着塔と上記第2の吸着塔とを連通させない状態にて、上記第2の吸着塔から塔内ガスの排気を行う一方、上記第1の吸着塔に上記混合ガスを供給し、上記第1の吸着塔からの製品ガスの回収を少なくとも一部の時間において行うステップ6と、
を含むサイクルを繰り返し行う、製品ガスの製造方法。
From the mixed gas containing the target gas and the unnecessary gas, the target gas is obtained by a pressure fluctuation adsorption method using a first adsorption tower and a second adsorption tower filled with an adsorbent that selectively adsorbs the unnecessary gas. Is a method for producing a concentrated product gas,
While the first adsorption tower and the second adsorption tower are in communication with each other, the mixed gas is supplied to the first adsorption tower, and the gas in the tower is exhausted from the second adsorption tower. Step 1 and
While the first adsorption tower and the second adsorption tower are in communication, the gas in the tower is exhausted from the first adsorption tower, and the mixed gas is supplied to the second adsorption tower. Step 2 to
While the first adsorption tower and the second adsorption tower are not in communication with each other, the gas in the tower is exhausted from the first adsorption tower, while the mixed gas is supplied to the second adsorption tower. Step 3 for recovering the product gas from the second adsorption tower in at least part of the time;
While the first adsorption tower and the second adsorption tower are in communication with each other, the mixed gas is supplied to the second adsorption tower, and the gas in the tower is exhausted from the first adsorption tower. Step 4 and
While the first adsorption tower and the second adsorption tower are in communication, the gas in the tower is exhausted from the second adsorption tower, while the mixed gas is supplied to the first adsorption tower. Step 5 and
While the first adsorption tower and the second adsorption tower are not in communication with each other, the gas in the tower is exhausted from the second adsorption tower, while the mixed gas is supplied to the first adsorption tower. Step 6 for recovering the product gas from the first adsorption tower in at least part of the time;
A method for producing a product gas, comprising repeatedly performing a cycle including
 上記第1の吸着塔および第2の吸着塔への上記混合ガスの供給の少なくとも一部は、ターボブロワを用いて行う、請求項1に記載の製品ガスの製造方法。 The method for producing a product gas according to claim 1, wherein at least part of the supply of the mixed gas to the first adsorption tower and the second adsorption tower is performed using a turbo blower.  上記ステップ1および上記ステップ4の各ステップにおいて、当該ステップの開始時と終了時との上記混合ガス導入側である上記吸着塔の圧力低下が、上記ステップ1ないしステップ6を通じた当該吸着塔の最高圧力と最低圧力との圧力差の-5~25%の範囲とされる、請求項1または2に記載の製品ガスの製造方法。 In each of the steps 1 and 4, the pressure drop of the adsorption tower on the mixed gas introduction side at the start and end of the step is the maximum of the adsorption tower through the steps 1 to 6. The method for producing a product gas according to claim 1 or 2, wherein the pressure difference is in the range of -5 to 25% of the pressure difference between the pressure and the minimum pressure.  上記ステップ1および上記ステップ4の各ステップにおいて、当該ステップの開始時と終了時との上記混合ガス導入側である上記吸着塔の圧力低下が、上記ステップ1ないしステップ6を通じた当該吸着塔の最高圧力と最低圧力との圧力差の0~15%の範囲とされる、請求項3に記載の製品ガスの製造方法。 In each of the steps 1 and 4, the pressure drop of the adsorption tower on the mixed gas introduction side at the start and end of the step is the maximum of the adsorption tower through the steps 1 to 6. The method for producing a product gas according to claim 3, wherein the pressure difference is in the range of 0 to 15% of the pressure difference between the pressure and the minimum pressure.  上記ステップ1~6による1サイクルの時間に対して上記ステップ1および上記ステップ4の各ステップの占める時間比率が、2~18%である、請求項1ないし4のいずれかに記載の製品ガスの製造方法。 The product gas according to any one of claims 1 to 4, wherein a time ratio occupied by each step of the step 1 and the step 4 is 2 to 18% with respect to a cycle time of the steps 1 to 6. Production method.  上記ステップ1~6による1サイクルの時間に対して上記ステップ1および上記ステップ4の各ステップの占める時間比率が、6~14%である、請求項5に記載の製品ガスの製造方法。 6. The method for producing a product gas according to claim 5, wherein a time ratio occupied by each step of the step 1 and the step 4 is 6 to 14% with respect to one cycle time of the steps 1 to 6.  上記ステップ2および上記ステップ5の各ステップの終了時において、上記第1の吸着塔と上記第2の吸着塔との圧力差が5kPa以内である、請求項1ないし6のいずれかに記載の製品ガスの製造方法。 The product according to any one of claims 1 to 6, wherein a pressure difference between the first adsorption tower and the second adsorption tower is within 5 kPa at the end of each of the steps 2 and 5. Gas production method.  上記ステップ3および上記ステップ6の各ステップにおいて上記吸着塔から導出される上記製品ガスは、貯留タンクに一時的に貯留される、請求項1ないし7のいずれかに記載の製品ガスの製造方法。 The product gas production method according to any one of claims 1 to 7, wherein the product gas derived from the adsorption tower in each of the steps 3 and 6 is temporarily stored in a storage tank.  上記ステップ3および上記ステップ6の各ステップは、当該各ステップの初期において、上記混合ガスを導入している吸着塔と上記貯留タンクとを連通させて、上記混合ガスの導入に加えて、上記貯留タンク内の上記製品ガスを当該吸着塔に送ることにより昇圧を行う操作を含む、請求項8に記載の製品ガスの製造方法。 In each of the steps 3 and 6, the adsorbing tower into which the mixed gas is introduced communicates with the storage tank in the initial stage of each step, and in addition to the introduction of the mixed gas, the storage The method for producing a product gas according to claim 8, comprising an operation of increasing the pressure by sending the product gas in the tank to the adsorption tower.  上記ステップ3および上記ステップ6の各ステップは、当該各ステップの初期において、上記混合ガスを導入している吸着塔と上記貯留タンクとを連通させずに、上記混合ガスの導入のみによって当該吸着塔の昇圧を行う操作を含む、請求項8に記載の製品ガスの製造方法。 In each of the steps 3 and 6, the adsorption tower is introduced only by introducing the mixed gas without communicating the adsorption tower into which the mixed gas is introduced and the storage tank at the initial stage of each step. The method for producing a product gas according to claim 8, comprising an operation of increasing the pressure.  上記混合ガスの温度に応じて、上記ステップ3および上記ステップ6を行うのに最適な継続時間を算出し、上記ステップ3および上記ステップ6の各ステップの継続時間を更新する、請求項1ないし10のいずれかに記載の製品ガスの製造方法。 11. The optimum duration for performing the step 3 and the step 6 is calculated according to the temperature of the mixed gas, and the duration of each step of the step 3 and the step 6 is updated. A method for producing a product gas according to any one of the above.  上記目的ガスは酸素であり、上記不要ガスは窒素である、請求項1ないし11のいずれかに記載の製品ガスの製造方法。 12. The method for producing a product gas according to claim 1, wherein the target gas is oxygen and the unnecessary gas is nitrogen.  上記ターボブロワの吐出圧力を大気圧よりも高くする、請求項2に記載の製品ガスの製造方法。 The method for producing a product gas according to claim 2, wherein the discharge pressure of the turbo blower is made higher than the atmospheric pressure.
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JPH06254334A (en) * 1993-01-06 1994-09-13 Kanebo Ltd Gaseous nitrogen separation method
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