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WO2017034138A1 - Appareil de fabrication de film de graphène - Google Patents

Appareil de fabrication de film de graphène Download PDF

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Publication number
WO2017034138A1
WO2017034138A1 PCT/KR2016/006733 KR2016006733W WO2017034138A1 WO 2017034138 A1 WO2017034138 A1 WO 2017034138A1 KR 2016006733 W KR2016006733 W KR 2016006733W WO 2017034138 A1 WO2017034138 A1 WO 2017034138A1
Authority
WO
WIPO (PCT)
Prior art keywords
graphene
deposition chamber
metal film
roller
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2016/006733
Other languages
English (en)
Korean (ko)
Inventor
김용기
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charmtron Co Ltd
Original Assignee
Charmtron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020150121002A external-priority patent/KR101790565B1/ko
Priority claimed from KR1020150127075A external-priority patent/KR101801258B1/ko
Application filed by Charmtron Co Ltd filed Critical Charmtron Co Ltd
Publication of WO2017034138A1 publication Critical patent/WO2017034138A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/08—Web-winding mechanisms
    • B65H18/10—Mechanisms in which power is applied to web-roll spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/02—Advancing webs by friction roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/06—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/26—Registering, tensioning, smoothing or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/04—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of carbon-silicon compounds, carbon or silicon

Definitions

  • the present invention relates to a graphene film manufacturing apparatus, and more particularly, to maintain a constant tension in the manufacturing process of the graphene film to protect the graphene film, and to more effectively deposit graphene on the catalytic metal film, It relates to a graphene film manufacturing apparatus that is easy to cool the pin deposited film.
  • graphene is a material in which carbon is connected to each other in a hexagonal shape to form a honeycomb two-dimensional planar structure, and its thickness is very thin and transparent, and has great electrical conductivity. Attempts have been made to apply graphene to transparent displays or flexible displays using these features.
  • the transfer film is formed on one surface of the catalyst metal film on which graphene is formed while transferring the catalyst metal film in one direction in a roll-to-roll method for mass production. It is described with respect to the step of forming, and the mechanical configuration required for each step has been described.
  • a winding roller and a winding roller for winding and transporting a catalyst metal film, and a graphene formation space for supplying a carbon supply gas to the catalyst metal film and depositing graphene are described.
  • graphene is manufactured by chemical vapor deposition (CVD), thermochemical vapor deposition (TCVD), rapid thermal chemical vapor deposition (RTCVD), and the like, and the catalytic metal film passes through the graphene forming space and continuously produces graphene.
  • CVD chemical vapor deposition
  • TCVD thermochemical vapor deposition
  • RTCVD rapid thermal chemical vapor deposition
  • the vacuum state of the graphene formation space must be maintained, which is not mentioned in the above-mentioned patent configuration.
  • the problem to be solved by the present invention in view of the above problems, in the manufacturing apparatus for producing a graphene film in a roll-to-roll method, the movement of air or gas between the deposition chamber and the surrounding chamber for depositing graphene By minimizing, it is possible to maintain the vacuum state of each chamber, to provide a graphene film manufacturing apparatus that can prevent the foreign material from entering.
  • Another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus is attached to the protective film to prevent damage to the graphene deposited and to protect the graphene.
  • Another object of the present invention is to provide a graphene film manufacturing apparatus capable of dispersing the force acting between each chamber.
  • Another object of the present invention is to provide a graphene film production apparatus that can lower the temperature of the film in the process of discharging the film is deposited graphene.
  • Another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus that can prevent the phenomenon that the catalytic metal film on which graphene is deposited sag by its own weight.
  • Another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus for allowing the catalytic metal film to be wound while maintaining a constant tension.
  • the present invention is a graphene film manufacturing apparatus for depositing graphene while transferring the catalytic metal film in a roll-to-roll method, the catalyst metal film rolled on the unloading bobbin
  • An upper roll chamber for supplying to the deposition chamber;
  • a deposition chamber connected to the upper roll chamber and having graphene deposited on the catalyst metal film;
  • a lower roll chamber connected to the deposition chamber, in which a catalytic metal film on which graphene is deposited is rolled on a loading bobbin;
  • the upper roll chamber in the present invention the upper roll chamber body; An unloading bobbin seated on a rotating roller mounted inside the upper roll chamber body to unload a catalyst metal film; A first guide roller positioned in front of the unloading bobbin and configured to guide the catalytic metal film supplied from the unloading bobbin; A feed roller positioned in front of the first guide roller and configured to supply the catalyst metal film supplied from the first guide roller to the deposition chamber while maintaining a constant tension; And a vacuum pump mounted on an outer side of the upper roll chamber body to maintain a degree of vacuum inside the upper roll chamber body.
  • the feed roller is composed of a driving roller driven by a motor, and an adhesion roller for engaging the driving roller and giving a constant tension to the catalytic metal film.
  • the driving roller cools the catalyst metal film by introducing and discharging the coolant into the roller, and the contact roller may be in close contact with the driving roller by a constant elastic force to give a constant tension to the catalyst metal film.
  • Deposition chamber of the present invention the deposition chamber body connected to the upper roll chamber in the lower portion of the upper roll chamber;
  • a heater unit mounted inside the deposition chamber body and configured to deposit graphene on the catalyst metal film in front and rear of the catalyst metal film supplied from the upper roll chamber;
  • a shield plate mounted inside the deposition chamber to prevent heat generated from the heater part from being transferred to the chamber body;
  • a process gas supply pipe mounted to an outside of the deposition chamber body and configured to inject a process gas into the deposition chamber body;
  • a process gas exhaust pipe mounted to an outside of the deposition chamber body and configured to discharge the process gas from the inside of the deposition chamber body;
  • a vacuum pump mounted on an outside of the deposition chamber body to maintain a degree of vacuum inside the chamber body.
  • the heater portion of the deposition chamber may be formed of a zigzag heating plate and disposed on the front and rear surfaces of the catalytic metal film, or may be formed of a surface heating plate and disposed on the front and rear surfaces of the catalytic metal film.
  • the heating plate may be formed of tungsten, graphite, silicon carbide or carbon nanotubes.
  • the shield plate may be formed by overlapping the metal plate, it may be composed of a molybdenum plate adjacent to the catalytic metal film, and at least one stainless plate laminated at a predetermined interval from the rear surface of the molybdenum plate.
  • the outermost plate formed of the stainless plate may be formed by bending the edge of the plate to the inside or the outside.
  • the door is formed in front or rear of the deposition chamber body, it is possible to maintain the inside of the deposition chamber body.
  • a shield plate is formed inside the door.
  • the shield plate is composed of a molybdenum plate adjacent to the catalytic metal film and at least one stainless plate laminated at a predetermined interval from the rear surface of the molybdenum plate.
  • the deposition chamber body of the present invention is vertically connected to the upper roll chamber and the lower roll chamber, and the catalytic metal film is moved from the top to the bottom of the deposition chamber body to deposit graphene.
  • the lower roll chamber in the present invention the lower roll chamber body connected to the deposition chamber at the bottom of the deposition chamber;
  • a second guide roller mounted inside the lower roll chamber body to change a direction of the catalytic metal film supplied from the deposition chamber;
  • a third guide roller mounted below the second guide roller to prevent a sharp angle change by the second guide roller;
  • a protective film bobbin mounted on one side of the third guide roller and having a protective film wound around the graphene deposited on the catalytic metal film;
  • a first film attachment roller and a second film attachment roller for attaching the protective film to the catalytic metal film on which the graphene is deposited;
  • a winding bobbin on which the catalytic metal film on which the graphene is deposited is wound, and a winding roller for winding the catalytic metal film on the loading bobbin with a constant tension.
  • cooling water is introduced into and discharged from the inside of the roller to cool the catalytic metal film.
  • the winding roller of the present invention is mounted on the drive shaft of the drive motor and is driven, characterized in that it is a tension holding roller that does not rotate even when the drive motor is operated above a certain tension.
  • any one side of the upper roll chamber and the lower roll chamber is characterized in that the door is mounted.
  • the upper roll chamber or the lower roll chamber is characterized in that it is mounted to be elastically supported on the frame.
  • the present invention can maintain the degree of vacuum in each chamber to prevent the movement of air flow between each chamber can improve the process stability, there is an effect that can ensure the reliability of graphene manufacturing.
  • the present invention by maintaining a constant tension, has the effect of preventing damage to the catalytic metal film deposited graphene.
  • each chamber is supported by an elastic member, it is possible to minimize the load acting on each other, and has the effect of preventing the deformation or damage of the chamber due to the expansion of the volume due to the thermal change, and the like. .
  • the present invention by attaching a protective film on one surface of the deposited graphene film, there is an effect that can prevent the graphene is damaged during storage or transportation of the film.
  • the present invention has an effect that can prevent the damage to the graphene by preventing the catalyst metal film from sagging due to its own weight because the chamber is formed upright.
  • the present invention has the advantage that the heater portion of the deposition chamber can be formed in a zig-zag-shaped planar heating plate is easy to install and can be installed in close proximity to the catalytic metal film to increase the thermal efficiency.
  • the shield plate is formed in the deposition chamber body, heat is prevented from being radiated to the outside and heat is reflected from the inside, thereby increasing the deposition efficiency of graphene on the catalytic metal film.
  • the present invention has the advantage that the maintenance in the chamber body is easy because the door is formed in front or rear of the chamber body.
  • the present invention has an effect that can prevent the damage to the graphene by preventing the catalyst metal film from sagging due to its own weight because the chamber is formed upright.
  • FIG. 1 is an overall perspective view of a graphene film manufacturing apparatus according to a preferred embodiment of the present invention.
  • Figure 2 is a front side perspective view of the upper roll chamber which is a preferred embodiment of the present invention.
  • FIG. 3 is a rear side perspective view of FIG. 2;
  • FIG. 4 is a side perspective view of FIG. 2;
  • FIG. 5 is a perspective view of the fixing support of the upper roll chamber of FIG.
  • Figure 6 is a perspective view of the door opening of the deposition chamber of a preferred embodiment of the present invention.
  • Figure 7 is a rear side perspective view of the door of the deposition chamber of Figure 6 opened.
  • FIG. 8 is a perspective view of a state in which the door of FIG. 6 is removed.
  • FIG. 9 is a front side perspective view of a state in which the door of FIG. 6 is removed.
  • FIG. 10 is a front side perspective view of a lower roll chamber which is a preferred embodiment of the present invention.
  • FIG. 11 is a perspective view of a state in which the door of the lower roll chamber of FIG. 10 is removed.
  • FIG. 12 is a rear side perspective view of FIG. 10;
  • FIG. 13 is a perspective view of the fixing support of the lower roll chamber of FIG.
  • the catalytic metal rolled on an unloading bobbin
  • An upper roll chamber for supplying a film to the deposition chamber;
  • a deposition chamber connected to the upper roll chamber and having graphene deposited on the catalyst metal film;
  • a lower roll chamber connected to the deposition chamber, in which a catalytic metal film on which graphene is deposited is rolled on a loading bobbin;
  • FIG. 1 is an overall perspective view of a graphene film manufacturing apparatus according to a preferred embodiment of the present invention
  • Figure 2 is a front side perspective view of the upper roll chamber which is a preferred embodiment of the present invention
  • Figure 3 is a rear side perspective view of Figure 2
  • Figure 4 is a side perspective view of Figure 2
  • Figure 5 is a perspective view of the fixing support of the upper roll chamber of Figure 2
  • Figure 6 is a perspective view of the door of the deposition chamber of the preferred embodiment of the present invention opened
  • Figure 7 6 is a rear side perspective view of the door of the deposition chamber of FIG. 6
  • FIG. 8 is a perspective view of the door of FIG. 6
  • FIG. 9 is a front side perspective view of the door of FIG. 6, and FIG.
  • FIG. 11 is a perspective view of the lower roll chamber of FIG. 10 with the door removed
  • FIG. 12 is a rear side perspective view of FIG. 10
  • FIG. 13 is a lower roll of FIG. 10.
  • the graphene film manufacturing apparatus 1 includes an upper roll chamber 100 mounted on an upper portion of the frame 10 and a deposition chamber mounted on the frame 10 below the upper roll chamber 100. And a lower roll chamber 300 mounted on the lower frame 10 of the deposition chamber 200.
  • Frame 10 is a box-shaped configuration connected to the channel, each chamber is fixed to each chamber from the top to the bottom.
  • the upper roll chamber 100 includes a chamber body 101, a rotating roller 113 mounted inside the chamber body 101, and a catalyst metal rotated while being mounted on the rotating roller 113.
  • Unloading bobbin 112 for supplying the film 20, the rotary roller support 114 for supporting the rotation of the rotary roller 113, and the tension to the catalyst metal film 20 in front of the unloading bobbin 112 To supply the first guide roller 115 and the catalyst metal film 20 supplied from the first guide roller 115 to the deposition chamber in front of the first guide roller 115 to give a predetermined tension. It consists of a roller 120.
  • the door 130 is required to maintain the inner configuration of the chamber body 101 and to replace the unloading bobbin 112 on which the catalytic metal film 20 is rolled.
  • a fixing support 102 for fixing the upper roll chamber 100 to the frame 10 is attached to the outside of the chamber body 101.
  • holes 109a and 109b and service holes 109c and 109d connected to the vacuum pump are provided to maintain the inside of the chamber under vacuum.
  • the supply roller 120 is composed of a driving roller 121 and the contact roller 123.
  • the driving roller 121 is fixedly supported by the driving roller support 122, and the contact roller 123 is installed to push the contact roller 123 toward the driving roller 121 so as to be in close contact with the drive roller 121. .
  • the contact roller 123 is fixed on both sides of the roller rotation support 124, both ends of the rotation support 124 is fixed to the axis of rotation 126, the axis of rotation 126 is supported on both sides of the axis of rotation shaft 125 It is fixed to be able to rotate by the rotary shaft 126, the rotary shaft support 125 is fixed to the upper surface of the shaft fixing plate 127 to support the rotary shaft 126.
  • one side is connected to the shaft fixing plate 127 and the other side is equipped with an elastic member 128 connected to the contact roller rotating support 124, the contact roller 123 by the elastic member 128 drive roller 121 ) To make it more tight.
  • partition wall 111 may be installed between the first guide roller 115 and the supply roller 120 to block the supply of heat to some extent.
  • a hole is formed between the dividing walls 111, and the catalyst metal film 20 is supplied to the supply roller 120 through the first guide roller 115.
  • the back side of the upper roll chamber 100 is shown.
  • the motor 104 for driving the driving roller 121, the rotating disk 105 connected to the motor 104 and the belt, and the driving roller through the central portion of the rotating disk 105 A cooling water supply pipe 106 connected to the inside of the 121 and a driving roller support shaft 107 for supporting the driving roller 121 are provided.
  • the rotating disk 105 is mounted on the driving roller support shaft 107, and the rotating disk 105 is linked with the driving roller 121 to transmit the rotational force of the motor to the driving roller 105.
  • the rotation speed of the motor may be reduced according to the diameter of the rotating disk 105.
  • Cooling water is supplied into the driving roller 121 through the cooling water supply pipe 106, and the cooling water cools the driving roller 121, and the driving roller 121 contacts the driving roller 121 with a catalytic metal film ( 20) to cool.
  • the rotating roller support shaft 108 is formed on the rear side for supporting and easy replacement of the rotating roller 113 on which the unloading bobbin 112 is mounted.
  • FIG. 4 is a view seen from the rear side in the state in which the door is opened.
  • one side of the door 130 is fixed to the chamber body 101, the other side is connected to the hinge 134 is fixed to the door 130, the other side of the door 130 is a fastener
  • a formed lock knob 133 is provided to be fixed to the chamber body 101.
  • the front of the door 130, the sight glass (132a, 132b) is mounted so that the worker can see the inside. Since other configurations are the same as those described above, repeated descriptions will be omitted.
  • the fixed support 102 is mounted to the frame 10, and the fixed support 102 receives the load of the upper roll chamber 100 as it is. Therefore, the load acting on the fixed support 102 is transferred to the frame as it is, the fixed support 102 is fixed to the frame elastic to be elastically supported in consideration of the torsion caused by the load or deformation due to thermal stress, etc.
  • the member 102-1 is mounted together.
  • the fixing support 102 has a hole formed in the fixing support so that the bolt 102-2 is mounted. As the bolt 102-2 rotates, the upper roll chamber 100 is connected to the frame 10 by a screw thread. In the spaced apart state, the load is supported by the bolt 102-2 and the spring 102-1, which is an elastic member.
  • any one of the bolts may be mounted without being threaded to serve as a guide for the spring.
  • the figure shows a pair of bolts and a spring on both sides.
  • the deposition chamber 200 includes a chamber body 201, a catalyst metal film through hole 202 formed in an upper surface of the chamber body 201, and both sides of the chamber body 201.
  • FIG. 7 is a perspective view of the back side of the deposition chamber 200.
  • a pair of supply pipes 208a for injecting process gas into the back side of the chamber body 201 and process gas exhaust pipes 208b exhausted after being deposited on the catalytic metal film are provided. Accordingly, a plurality of process gas supply pipes and exhaust pipes may be formed.
  • a plurality of process gas supply pipes 208a and exhaust pipes 208b are formed.
  • a pair of vacuum exhaust holes 203a and 203b for exhausting the vacuum pump are formed, and a plurality of service holes 203c, 203d, 203e and 203f are formed.
  • a fixing support 206 for fixing to the frame 10 is mounted at the lower end of the chamber body 201, and the fixing support 206 is fixed to the frame using bolts or the like.
  • Cooling water flow pipes 204 are formed on the top and bottom and side surfaces of the chamber body 201. By forming the coolant flow pipe 204, the heat is transferred to the outside to prevent damage to the operator, such as burns.
  • the coolant flow pipe 204 is connected to the coolant supply pipe 204a and the discharge pipe 204b.
  • the doors 220a and 220b are formed at both sides of the chamber body 201. By forming the doors at both sides, maintenance in the chamber body can be made more smoothly. Looking at the configuration of the door 220a, the door body 221a, the sight glass (224-1a, 224-2a) formed up and down on the door body 221a, and one side is attached to the chamber body 201 and the other The sides of the hinges 225-1a and 225-2a attached to the door body 221a, the locking handle 223a for opening and closing the door body 221a to the chamber body 201, and the locking handle 223a. It consists of the clamps 222-1a and 222-2a formed in the edge part.
  • Said sight glasses 224-1a and 224-2a refer to glass that allows the inside to be viewed from the side.
  • the shield plate 230a is formed inside the door body 221a, and the shield plate 230b is formed on the door 220b on the other side.
  • FIG. 8 is a perspective view of a state in which a door is removed from the deposition chamber 200. Looking at the reference numerals that are not described as shown in the drawings, the lifting lug 205 attached to the side of the chamber body 201, and the clamping fasteners 207 to which the clamps 222-1 and 222-2 are fixed. Is further shown. Since other configurations have been described with reference to FIGS. 6 and 7, detailed descriptions thereof will be omitted.
  • the heater unit 250 includes a heater fixing rod 253 for supplying main power, power connection units 252a and 252b to which power is connected from the main power supply unit 253, and a power connection unit (
  • the heater 251 is connected to the 252a and 252b.
  • the heater fixing rod 253 may be formed of stainless or graphite (Graphite) rod.
  • the heater fixing rod 253 should be insulated with silicon (SiC). That is, the insulation should prevent the current flowing to the chamber body 201 through the heater fixing rod 253.
  • the heater 251 is formed on the front and rear surfaces of the catalytic metal film, and is formed up and down by a zig-zag type heating plate.
  • the heater 251 is configured as a zigzag heating plate having one end connected to the upper power connection part 252a in a plurality of forms and the other end connected to the lower power connection part 252b.
  • the heater 251 may also be formed in the form of a planar heating plate (not shown). That is, the heater 251 may be formed in the form of a planar heating plate to apply heat to the front and rear surfaces of the catalytic metal film 20.
  • the heating plate may be made of tungsten, graphite, graphite, silicon carbide, or carbon nanotubes.
  • the heater unit 250 is formed on both sides of the catalyst metal film 20 so that graphene from the process gas can be easily deposited on the catalyst metal film.
  • the heater 250 heats the inside of the deposition chamber at a temperature of 1000 to 1500 ° C.
  • the heater unit 250 heats the catalyst metal film 20 at a temperature of 1000 to 1500 ° C. in proximity to the front and rear surfaces of the catalyst metal film 20.
  • Shield plates 210a, 210b, 230a, 230b, 240a and 240b are formed on the top, bottom, left, and right sides of the zigzag heater 251 of the heater unit 250.
  • Shield plate supports 211a and 211b for supporting the shield plates 210a and 210b are mounted on the back side of the shield plates 210a and 210b, and the other side of the shield plate supports 211a and 211b is chamber body 201. It is mounted inside of.
  • the shield plates 210a, 210b, 230a, 230b, 240a, and 240b are configured in such a manner that a plurality of layers are stacked at predetermined intervals.
  • the shield plates 210a, 210b, 230a, 230b, 240a, and 240b include a molybdenum plate adjacent to the catalytic metal film and one or more stainless plates stacked at predetermined intervals on the rear surface of the molybdenum plate.
  • the outermost stainless plate can be bent inward or outward to prevent deformation by heat.
  • the chamber body fixing support 206 mounted at the bottom of the chamber body 201 is mounted to the frame, and thus the deposition chamber 200 is fixed to the frame.
  • the molybdenum plate it is also possible to use a metal having a high melting point as with molybdenum.
  • the lower roll chamber 300 includes a chamber body 301, a door 330 formed on the front surface of the chamber body 301, and a lower side formed on both sides of the chamber body 301.
  • the roll chamber fixing support 302, the hinge 334 is connected to the door 330 and the chamber body 301, and the sight glass 305 is formed on the side of the chamber body 301.
  • the door 330 is composed of a door body 331, the sight glass (332a, 332b) formed in the door body 331, the locking handle 333, the locking handle 333 is the chamber body 301
  • the lock handle is fixed to the fixing portion 303, the door 330 is opened when the lock is released.
  • a sight glass 304 may be further formed below the chamber body 301.
  • FIG. 11 illustrates a configuration mounted in the chamber body 301.
  • the second guide roller 311 for changing the direction of the catalytic metal film 20, the third guide roller 312 for preventing sudden change of direction by the second guide roller 311, and graphene are deposited.
  • Protective film bobbin 321, the protective film for protecting the catalytic metal film is rolled, the protective film bobbin roller 321 for the protective film bobbin 321 is mounted and rotated, the protective film rotary roller 320 And a support film 322 for supporting the rotation thereof, a first film attachment roller 313 and a second film attachment roller 315 for attaching the protective film 30 to the catalyst metal film 20, and a protective film 30.
  • the protective film rotating roller 320 is rotatably supported by the protective film rotating roller support 322, and the winding roller 323 is rotatably supported by the winding roller support 325.
  • vacuum tube connecting holes 305a and 305b are further formed to be connected to the vacuum pump for evacuating, and the remaining holes 305c and 305d serve as service holes.
  • FIG. 12 is a rear side view of the chamber body 301.
  • a cooling water supply pipe 307-1 through which the cooling water is supplied is inserted into the rear end of the second guide roller 311 to supply the cooling water to the second guide roller 311.
  • the supplied cooling water cools the catalytic metal film 20.
  • a second guide roller rotating support 307-2 that rotatably supports the second guide roller 311 to the outside of the cooling water supply pipe 307-1 is mounted outside the chamber body 301.
  • the motor 309-1 formed outside the center of the chamber body 301 drives the first film attachment roller 313, and the motor 309-1 is fixedly supported by the motor support 309-4.
  • the motor 309-1 is connected to the rotating disk 309-3, which is connected by a belt, and may perform a deceleration function according to the diameter of the rotating disk 309-3.
  • the first film attachment roller 313 is rotated by the rotation of the rotating disk 309-3.
  • the take-up roller 323 is mounted to the drive shaft of the drive motor is driven, but is configured as a tension holding roller that does not rotate even when the drive motor is operated above a certain tension.
  • the motor 308-1 is interlocked with the take-up roller 323 by the belt 308-2, and the tension holding device 308 to prevent the tension roller from acting on the take-up roller 323 above a certain level. -3) is mounted. That is, the tension holding device 308-3 rotates in conjunction with the motor 308-1 and the belt 308-2.
  • the motor 308-1 and the tension holding device 308-3 are fixed to the fixed support plate 308-4.
  • the fixed support 302 is mounted to the frame 10, and the fixed support 302 receives the load of the lower roll chamber 300 as it is. Therefore, the load acting on the fixed support 302 is transmitted to the frame as it is, the fixed support 302 is fixed to the frame 10 to be elastically supported in consideration of the torsion caused by the load or deformation due to thermal stress, etc.
  • the elastic member 302-1 is mounted together to be able to.
  • the fixing support 302 is a hole is formed in the fixing support 302 is mounted bolt 302-2, the lower roll chamber 300 by the thread as the bolt 302-2 rotates the frame ( 10), and in the spaced state, the load is supported by the bolt 302-2 and the spring 302-1 which is an elastic member.
  • any one of the bolts may be mounted without being threaded to serve as a guide for the spring.
  • the figure shows a pair of bolts and a spring on both sides.
  • the present invention is to protect the graphene film by maintaining a constant tension in the manufacturing process of the graphene film, it is possible to more effectively deposit the graphene on the catalytic metal film, graphene film is easy to cool the graphene film deposited
  • the present invention relates to a manufacturing apparatus and is an invention having high industrial applicability.

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

La présente invention concerne un appareil de fabrication d'un film de graphène, et plus particulièrement, un appareil de fabrication d'un film de graphène qui dépose du graphène pendant le transfert un film métallique catalytique dans un mode rouleau-à-rouleau, comprenant : une chambre de rouleau supérieure pour l'alimentation d'un film métallique catalytique enroulé sur une bobine de déchargement à une chambre de dépôt ; une chambre de dépôt reliée à la chambre de rouleau supérieure pour déposer le graphène sur le film métallique catalytique ; une chambre de rouleau inférieure reliée à la chambre de dépôt pour rouler le film métallique catalytique ayant le graphène déposé sur une bobine de chargement ; et un cadre sur lequel sont fixées chacune des chambres.
PCT/KR2016/006733 2015-08-27 2016-06-24 Appareil de fabrication de film de graphène Ceased WO2017034138A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2015-0121002 2015-08-27
KR1020150121002A KR101790565B1 (ko) 2015-08-27 2015-08-27 그래핀 필름 제조장치
KR10-2015-0127075 2015-09-08
KR1020150127075A KR101801258B1 (ko) 2015-09-08 2015-09-08 그래핀 필름 제조장치의 증착챔버

Publications (1)

Publication Number Publication Date
WO2017034138A1 true WO2017034138A1 (fr) 2017-03-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2016/006733 Ceased WO2017034138A1 (fr) 2015-08-27 2016-06-24 Appareil de fabrication de film de graphène

Country Status (1)

Country Link
WO (1) WO2017034138A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112340723A (zh) * 2020-09-30 2021-02-09 杭州乐可适新材料科技有限公司 一种用于处理装饰材料生产车间污水的石墨烯薄膜及其加工工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101629283B (zh) * 2009-07-16 2011-04-27 江苏双登集团有限公司 一种卷对卷等离子体增强化学气相沉积装置
KR20110092207A (ko) * 2010-02-08 2011-08-17 성균관대학교산학협력단 그래핀 롤투롤 코팅 장치 및 이를 이용한 그래핀 롤투롤 코팅 방법
KR20120061224A (ko) * 2010-12-03 2012-06-13 에스케이이노베이션 주식회사 수직형 롤투롤 화학 기상 증착법을 이용한 그래핀 필름 제조 장치 및 방법
KR20120106020A (ko) * 2011-03-17 2012-09-26 삼성테크윈 주식회사 그래핀 합성 장치
KR20150077050A (ko) * 2013-12-27 2015-07-07 삼성테크윈 주식회사 그래핀 제조 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101629283B (zh) * 2009-07-16 2011-04-27 江苏双登集团有限公司 一种卷对卷等离子体增强化学气相沉积装置
KR20110092207A (ko) * 2010-02-08 2011-08-17 성균관대학교산학협력단 그래핀 롤투롤 코팅 장치 및 이를 이용한 그래핀 롤투롤 코팅 방법
KR20120061224A (ko) * 2010-12-03 2012-06-13 에스케이이노베이션 주식회사 수직형 롤투롤 화학 기상 증착법을 이용한 그래핀 필름 제조 장치 및 방법
KR20120106020A (ko) * 2011-03-17 2012-09-26 삼성테크윈 주식회사 그래핀 합성 장치
KR20150077050A (ko) * 2013-12-27 2015-07-07 삼성테크윈 주식회사 그래핀 제조 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112340723A (zh) * 2020-09-30 2021-02-09 杭州乐可适新材料科技有限公司 一种用于处理装饰材料生产车间污水的石墨烯薄膜及其加工工艺

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