[go: up one dir, main page]

WO2017018307A1 - Capteur à réseau de vibrateurs - Google Patents

Capteur à réseau de vibrateurs Download PDF

Info

Publication number
WO2017018307A1
WO2017018307A1 PCT/JP2016/071348 JP2016071348W WO2017018307A1 WO 2017018307 A1 WO2017018307 A1 WO 2017018307A1 JP 2016071348 W JP2016071348 W JP 2016071348W WO 2017018307 A1 WO2017018307 A1 WO 2017018307A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
internal electrode
electrode
main surface
type internal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2016/071348
Other languages
English (en)
Japanese (ja)
Inventor
雅史 齋藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2017018307A1 publication Critical patent/WO2017018307A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present invention relates to a vibrator array sensor that transmits or receives ultrasonic waves.
  • a vibrating body including a piezoelectric body and an acoustic matching layer is known.
  • the piezoelectric body is sandwiched between two electrodes, and the acoustic matching layer is joined to the piezoelectric body via one of the two electrodes.
  • This vibrating body can be used for both transmission and reception of ultrasonic waves.
  • this vibrating body When this vibrating body is used for transmitting ultrasonic waves, a voltage is applied to the piezoelectric body by two electrodes sandwiching the piezoelectric body, so that the piezoelectric body is deformed and longitudinal vibration is generated. This longitudinal vibration is transmitted to the acoustic matching layer through the electrodes, and ultrasonic waves are transmitted from the acoustic matching layer toward the space beyond.
  • the acoustic matching layer vibrates when the external ultrasonic waves reach the acoustic matching layer, and the vibration is transmitted from the acoustic matching layer to the piezoelectric body via the electrode.
  • the vibration is converted into a potential difference. This potential difference is extracted by the two electrodes, whereby a reception signal is obtained. These electrodes are drawn from the side surface of the piezoelectric body.
  • an array sensor in which a plurality of blocks of laminated piezoelectric elements are arranged close to each other can be considered in order to accurately detect the shape and position of an object.
  • an electrode cannot often be drawn from an arbitrary side surface.
  • each block of the laminated piezoelectric element has been required to draw out two electrodes from one side surface where the blocks do not face each other.
  • the electrode lead-out part is arranged on the different side in the width direction between the odd-numbered layer and the even-numbered layer on one end face, while the odd-numbered layer and the even-numbered layer are common to one end face.
  • an object of the present invention is to provide a vibrator array sensor that can suppress unnecessary vibration.
  • a vibrating body array sensor includes a support plate having a main surface and a plurality of piezoelectric layers stacked such that a direction perpendicular to the main surface is a stacking direction.
  • the piezoelectric multilayer body includes a plurality of internal electrodes that are planar conductors parallel to the main surface, and the plurality of internal electrodes face the one side surface.
  • Each of the poles is individually arranged at the interface between the piezoelectric layers so that the first type internal electrodes and the second type internal electrodes are alternately arranged along the stacking direction
  • the first side electrode electrically connects the top surface of the piezoelectric laminate and the first type internal electrode
  • the second side electrode comprises the bottom surface of the piezoelectric laminate and the second type internal electrode.
  • the electrode is electrically connected, the width of the internal electrode when viewed from the one side surface is W1, the depth is D1, the width obtained by subtracting the width of the notch from W1 is W, and
  • the length obtained by subtracting the depth of the notch from D1 is D
  • W / W1 ⁇ 0.26 and D / D1 ⁇ 0.91 0.26 ⁇ W / W1 ⁇ 0.48 and D / D1 ⁇ 0.87, 0.48 ⁇ W / W1 ⁇ 0.57 and D / D1 ⁇ 0.83 0.57 ⁇ W / W1 ⁇ 0.61 and D / D1 ⁇ 0.78, 0.61 ⁇ W / W1 ⁇ 0.65 and D / D1 ⁇ 0.70, 0.65 ⁇ W / W1 ⁇ 0.70 and D / D1 ⁇ 0.57, 0.70 ⁇ W / W1 ⁇ 0.74 and D / D1 ⁇ 0.43, 0.74 ⁇ W / W1 ⁇ 0.78 and D / D1 ⁇ 0.22
  • a vibrating body array sensor includes a support plate having a main surface and a plurality of piezoelectric layers stacked so that a direction perpendicular to the main surface is a stacking direction.
  • the piezoelectric laminate is a rectangular parallelepiped, and the piezoelectric laminate includes a first side electrode and a second side electrode that are electrically isolated from each other.
  • the piezoelectric laminate includes a plurality of internal electrodes that are planar conductors parallel to the main surface inside, and the plurality of internal electrodes face the one side surface.
  • a first type internal electrode having a first shape having a rectangular cutout at a first corner, and a rectangular cutout at a second corner facing the one side surface but different from the first corner.
  • a second type internal electrode having a second shape having Each of the internal electrodes is individually arranged at the interface between the piezoelectric layers so that the first type internal electrodes and the second type internal electrodes are alternately arranged along the stacking direction.
  • the first side electrode electrically connects the top surface of the piezoelectric laminate and the first type internal electrode, and the second side electrode comprises the bottom surface of the piezoelectric laminate and the second electrode.
  • a seed internal electrode is electrically connected, the width of the internal electrode when viewed from the one side is W1, the depth is D1, and the length obtained by subtracting the width of the notch from W1 is W.
  • the length obtained by subtracting the depth of the notch from D1 is D
  • W / W1 ⁇ 0.26 and D / D1 ⁇ 0.91 0.26 ⁇ W / W1 ⁇ 0.52 and D / D1 ⁇ 0.87, 0.52 ⁇ W / W1 ⁇ 0.61 and D / D1 ⁇ 0.83 0.61 ⁇ W / W1 ⁇ 0.65 and D / D1 ⁇ 0.78, 0.65 ⁇ W / W1 ⁇ 0.70 and D / D1 ⁇ 0.74, 0.70 ⁇ W / W1 ⁇ 0.74 and D / D1 ⁇ 0.70, 0.74 ⁇ W / W1 ⁇ 0.78 and D / D1 ⁇ 0.61 0.78 ⁇ W / W1 ⁇ 0.83 and D / D1 ⁇ 0.39
  • the vibrator array sensor includes a support plate having a main surface and a plurality of piezoelectric layers so that a direction perpendicular to the main surface is a stacking direction.
  • a first type internal electrode having a first shape having a rectangular cutout at a first corner facing the substrate, and a rectangular cutout at a second corner facing the one side surface but different from the first corner.
  • a second type internal electrode having a second shape having Each of the plurality of internal electrodes is individually arranged at the interface between the piezoelectric layers so that the first type internal electrode and the second type internal electrode are alternately arranged along the stacking direction.
  • the first side electrode electrically connects the uppermost surface of the piezoelectric laminate and the first type internal electrode, and the second side electrode connects the lowermost surface of the piezoelectric laminate and the above-described first electrode.
  • a second type internal electrode is electrically connected, and the width of the internal electrode when viewed from the one side is W1, the depth is D1, and the length of the notch is subtracted from W1.
  • W is set to D
  • the length obtained by subtracting the depth of the notch from D1 is set to D
  • the conditions are satisfied.
  • an acoustic matching layer is attached to a surface of the support plate opposite to the main surface so as to face the piezoelectric laminate with the support plate interposed therebetween.
  • FIG. 1 shows the vibrator array sensor 501 shown in FIG. 1 turned upside down.
  • the piezoelectric laminate 2 is attached to one surface of the support plate 1, and the acoustic matching layer 3 is attached to the other surface.
  • the piezoelectric laminate 2 and the acoustic matching layer 3 are both arranged in an array of two rows, and face each other with the support plate 1 interposed therebetween.
  • the vibrator array sensor 501 can transmit and receive ultrasonic waves, or both.
  • the vibrator array sensor 501 is an ultrasonic sensor and is used in a device for identifying a bill, that is, a device such as a banknote counter or an automated teller machine (ATM). It can be.
  • a device for identifying a bill that is, a device such as a banknote counter or an automated teller machine (ATM). It can be.
  • ATM automated teller machine
  • the piezoelectric laminate 2 and the acoustic matching layer 3 are arranged in an array, foreign matter such as a tape stuck on a banknote can be detected with high accuracy.
  • the lengths of the rows of the piezoelectric laminates 2 and the acoustic matching layers 3 arranged in an array are set to be longer than the short side of the bill.
  • FIG. 3 shows a cross-sectional view of the vibrator array sensor 501 in the present embodiment.
  • Support plate 1 has a main surface 1a.
  • the support plate 1 is made of stainless steel having high elasticity and light weight, for example.
  • the support plate 1 has a flat plate shape, for example.
  • the piezoelectric laminate 2 is disposed on the main surface 1a.
  • the piezoelectric laminate 2 is separated by a notch 9.
  • the acoustic matching layer 3 is separated by a notch 11.
  • the piezoelectric laminate 2 includes a plurality of piezoelectric layers 21, electrodes 17 that cover the uppermost surfaces of the plurality of piezoelectric layers 21, and electrodes 18 that cover the lowermost surfaces of the plurality of piezoelectric layers 21.
  • the piezoelectric layer 21 is made of, for example, a lead zirconate titanate ceramic.
  • the acoustic matching layer 3 is made of a low specific gravity material in which, for example, an epoxy resin is mixed with a
  • the first type internal electrode 5 or the second type internal electrode 6 is disposed between the piezoelectric layers 21.
  • the first type internal electrodes 5 and the second type internal electrodes 6 are alternately arranged.
  • the first type internal electrode 5 and the second type internal electrode 6 do not cover the entire interface between the piezoelectric layers 21.
  • the planar shapes of the first type internal electrode 5 and the second type internal electrode 6 will be described in detail later.
  • FIG. 4 shows the vibrating body array sensor 501 in the present embodiment as viewed from the piezoelectric laminate 2 side.
  • the piezoelectric laminate 2 for example, a structure as shown in FIG.
  • a plurality of piezoelectric layers 21 are stacked, and the internal electrodes 105 and 106 are arranged alternately.
  • the plurality of internal electrodes 105 are all connected to a common external electrode 115.
  • the plurality of internal electrodes 106 are all connected to a common external electrode 116.
  • each piezoelectric layer 21 is sandwiched between the internal electrode 105 and the internal electrode 106.
  • two side surfaces facing each other are required. However, if an external electrode is provided and an electrical connection is to be made there, as shown in FIGS.
  • the side surface that can be used that is, the side surface that is exposed to the extent that electrical connection can be made
  • FIG. 6 end faces of the first type internal electrode 5 and the second type internal electrode 6 are exposed on one side surface 10, but the first type internal electrode 5 and the second type internal electrode 6 at each interface are viewed in plan view.
  • the piezoelectric laminate 2 is rectangular (obviously including a square) in plan view, whereas the first type internal electrode 5 has a rectangular notch at the first corner 7 facing one side surface 10.
  • the first shape has 12.
  • the second type internal electrode 6 has a second shape having a rectangular notch 12 at a second corner 8 facing the one side surface 10 but different from the first corner 7.
  • FIG. 9 shows a side view when one piezoelectric laminate 2 is viewed from one side face 10. In FIG. 9, those attached to the opposite surface of the support plate 1 are not shown.
  • the width of the internal electrode is W1
  • the depth is D1
  • the width of the cutout 12 is subtracted from W1
  • the length is W.
  • D be the length obtained by subtracting the depth of D1 from D1.
  • the shapes of the first type internal electrode 5 and the second type internal electrode 6 on the surface of the piezoelectric layer 21 are expressed by W, W1, D, and D1.
  • W / W1 be a “W rate”.
  • D / D1 be the “D rate”. It is assumed that the first type internal electrode 5 and the second type internal electrode 6 are symmetrical.
  • the inventor verified how unnecessary vibration (spurious) occurs by simulation.
  • a simulation is performed to determine what impedance is obtained for each frequency. It was.
  • the internal electrode is disposed so as to cover the entire interface without any notch 12.
  • the shape of the internal electrode as in Sample 1 is not realistic, it was set and calculated as a reference for comparison.
  • the inventor uses the finite element method (FEM) to clarify the range of the W rate and D rate in which unnecessary vibration components are not generated for the vibrators arranged in an array.
  • FEM finite element method
  • Tables 1 to 3 are contents that should be displayed as a table of connections, but are divided into three for convenience of display space.
  • the vibrator array sensor 501 in the present embodiment includes a support plate 1 having a main surface 1a and a piezoelectric laminate 2.
  • the piezoelectric laminate 2 is formed by laminating a plurality of piezoelectric layers 21 so that the direction perpendicular to the main surface 1a is the lamination direction.
  • the piezoelectric laminate 2 is attached to the main surface 1a.
  • the piezoelectric laminate 2 is a rectangular parallelepiped.
  • the piezoelectric laminate 2 includes a first side surface electrode 15 and a second side surface electrode 16 that are electrically isolated from each other on one side surface 10.
  • the piezoelectric laminate 2 includes a plurality of internal electrodes that are planar conductors parallel to the main surface 1a.
  • the plurality of internal electrodes face the first type internal electrode 5 having the first shape having the rectangular notch 12 at the first corner 7 facing the one side face 10 and the first side face 10 but the first side face 10 faces the first side face 10.
  • a second type internal electrode 6 having a second shape having a rectangular notch 12 at a second corner 8 different from the corner 7 is included.
  • Each of the plurality of internal electrodes is individually disposed at the interface between the piezoelectric layers 21 so that the first type internal electrodes 5 and the second type internal electrodes 6 are alternately arranged along the stacking direction. Yes.
  • the first side electrode 15 electrically connects the uppermost surface of the piezoelectric laminate 2 and the first type internal electrode 5.
  • the second side surface electrode 16 electrically connects the lowermost surface of the piezoelectric laminate 2 and the second type internal electrode 6.
  • one piezoelectric laminate 2 includes five piezoelectric layers 21, but this is only an example.
  • the number of piezoelectric layers 21 included in one piezoelectric laminate 2 is not limited to this example, and may be three or more.
  • the number of piezoelectric layers 21 included in one piezoelectric laminate 2 may be an odd number or an even number.
  • Embodiment 2 A vibrator according to Embodiment 2 of the present invention will be described.
  • the basic configuration of the vibrator array sensor in the present embodiment is the same as that of the vibrator array sensor 501 described in the first embodiment, and the conditional expressions relating to W, W1, D, and D1 are different as follows. .
  • the change in vibration amplitude on the top surface is ⁇ 3.0 dB or more. That is, it is possible not only to suppress unnecessary vibration components but also to suppress a decrease in vibration amplitude. This can be read from Tables 1 to 3.
  • FIG. 11 shows the boundary of whether or not ⁇ 3.0 dB or more and the approximate expression corresponding to this boundary, that is, the curve by the above polynomial, superimposed.
  • the basic configuration of the vibrator array sensor in the present embodiment is the same as that of the vibrator array sensor 501 described in the first embodiment, and the conditional expressions relating to W, W1, D, and D1 are different as follows. .
  • the change in vibration amplitude on the top surface is ⁇ 3.0 dB or more. That is, it is possible not only to suppress unnecessary vibration components but also to suppress a decrease in vibration amplitude.
  • the electrode 17 is provided on the uppermost surface of the piezoelectric laminate 2 and the electrode 18 is provided on the lowermost surface.
  • the support plate 1 being a conductor
  • the support plate 1 can serve as an alternative to the electrode 18, the lowermost electrode 18 may not be provided.
  • the acoustic matching layer 3 is provided on the surface opposite to the main surface 1a of the support plate 1 so as to face the piezoelectric laminate 2 with the support plate 1 interposed therebetween. It is preferable that it is attached. This is true in any of the above embodiments. Since the acoustic matching layer 3 is attached in this manner, good transmission or reception can be performed.
  • the notch 9 may be formed so that there is no such uncut portion. That is, the notch 9 may be formed so as to completely divide the laminate to the lower end.
  • the cut 9 in the piezoelectric laminate 2 has been described as an example, but the same applies to the cut 11 in the acoustic matching layer 3.
  • the notches 9 and 11 may be formed to the extent that the support plate 1 is reached on both sides of the support plate 1.
  • FIG. 12 an example in which there is no uncut portion on both surfaces of the support plate 1 is shown, but there is no uncut portion on only one of the upper and lower surfaces of the support plate 1, and the remaining surface is left uncut
  • the structure with a part may be sufficient.
  • FIG. 4 is shown as an example when the vibrator array sensor is viewed from the piezoelectric laminated body 2 side, in FIG. 4, the notches 9 are vertically and horizontally, and there are uncut portions in any part. Although shown, a configuration as shown in FIG. 13 may be used.
  • the cuts 9 include cuts 9a in the longitudinal direction of the array of piezoelectric laminates 2 and cuts 9b in a direction perpendicular to the cuts 9a. In the notch 9a, there is no uncut part and the support plate 1 is exposed. There is an uncut portion in the cut 9b.
  • FIG. 14 may be used.
  • the vibrator array sensor may be configured as shown in FIG.
  • a slit 13 is provided in the support plate 1 in a part of the cut 9.
  • the slit 13 may be formed in the support plate at the position of the slit 13 as a result of forming the cut 9 deeply.
  • FIG. 15 shows an example in which the slits 13 are formed in all the cuts extending in the direction perpendicular to the longitudinal direction of the arrangement of the piezoelectric laminates 2.
  • every other slit 13 is formed as shown in FIG. It is good also as providing in incision. Instead of every other line, every other line or every other line may be used.
  • the piezoelectric laminate 2 is practically arranged in an array on the main surface 1a of the support plate 1. However, in practice, the piezoelectric laminate 2 may be arranged alone without being arranged in an array. A plurality of piezoelectric laminates 2 may be arranged on the main surface 1a of the support plate 1 in an arrangement other than the array.
  • the piezoelectric layer 21 is made of a lead zirconate titanate ceramic, but the material of the piezoelectric layer 21 is not limited to this.
  • it may be made of a lead-free piezoelectric ceramic piezoelectric material such as potassium sodium niobate or alkali niobate ceramic.
  • 1 support plate 1a main surface, 2 piezoelectric laminate, 3 acoustic matching layer, 5 type 1 internal electrode, 6 type 2 internal electrode, 7 first corner, 8 second corner, 9, 9a, 9b ( (Cut) of piezoelectric material, 10 one side, 11 (sound matching layer) cut, 12 notch, 13 slit, 15 first side electrode, 16 second side electrode, 17, 18 electrode, 21 piezoelectric layer, 31 First side electrode, 105, 106 internal electrode, 115, 116 external electrode, 501, 501i vibrator array sensor.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L'invention concerne un capteur à réseau de vibrateurs qui comprend une plaque de support (1), et un stratifié piézoélectrique (2) formé par stratification d'une pluralité de couches piézoélectriques (21), et le stratifié piézoélectrique (2) comprend une pluralité d'électrodes internes en son sein. La pluralité d'électrodes internes comprend une électrode interne de première classe (15) ayant une première forme ayant une découpe rectangulaire à un premier coin, et une électrode interne de seconde classe (16) ayant une seconde forme ayant la découpe rectangulaire à un second coin, et sont individuellement disposées à des interfaces entre les couches piézoélectriques (21) de telle sorte que les électrodes internes de première classe (15) et les électrodes internes de seconde classe (16) sont disposées en alternance. Lorsque la largeur de l'électrode interne est désignée par W1, la profondeur de cette dernière est désignée par D1, la longueur obtenue en soustrayant la largeur de la découpe par rapport à W1 est désignée par W, et la longueur obtenue en soustrayant la profondeur de la découpe par rapport à D1 est désignée par D, l'une quelconque des conditions de W/W1 ≤ 0,26 et D/D1 ≥ 0,91, 0,26 < W/W1 ≤ 0,48 et D/D1 ≥ 0,87, et analogues est satisfaite.
PCT/JP2016/071348 2015-07-24 2016-07-21 Capteur à réseau de vibrateurs Ceased WO2017018307A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-146550 2015-07-24
JP2015146550 2015-07-24

Publications (1)

Publication Number Publication Date
WO2017018307A1 true WO2017018307A1 (fr) 2017-02-02

Family

ID=57884842

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/071348 Ceased WO2017018307A1 (fr) 2015-07-24 2016-07-21 Capteur à réseau de vibrateurs

Country Status (1)

Country Link
WO (1) WO2017018307A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000117971A (ja) * 1998-10-13 2000-04-25 Ricoh Co Ltd 積層圧電型駆動体及びその製造方法並びにインクジェットヘッド
JP2004140762A (ja) * 2002-10-21 2004-05-13 Ueda Japan Radio Co Ltd 二次元アレイ超音波探触子の製造方法
JP2014068142A (ja) * 2012-09-25 2014-04-17 Teijin Ltd 圧電スピーカー

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000117971A (ja) * 1998-10-13 2000-04-25 Ricoh Co Ltd 積層圧電型駆動体及びその製造方法並びにインクジェットヘッド
JP2004140762A (ja) * 2002-10-21 2004-05-13 Ueda Japan Radio Co Ltd 二次元アレイ超音波探触子の製造方法
JP2014068142A (ja) * 2012-09-25 2014-04-17 Teijin Ltd 圧電スピーカー

Similar Documents

Publication Publication Date Title
US9184370B2 (en) Ultrasonic transducer device, ultrasonic measurement apparatus, head unit, probe, and ultrasonic imaging apparatus
CN104203109B (zh) 超声波换能器元件芯片、探测器、电子设备和超声波诊断装置
CN104954958A (zh) 压电元件、压电器件、探头、电子设备及超声波图像装置
JP5928151B2 (ja) 超音波トランスデューサー、超音波プローブ、診断装置および電子機器
EP2475189A2 (fr) Transducteur acoustique et son procédé de commande
JP6252280B2 (ja) 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置
CN104114097B (zh) 超声波探头以及使用了该超声波探头的超声波诊断装置
JP6299511B2 (ja) 超音波デバイス並びにプローブおよび電子機器
CN104205876B (zh) 超声波换能器元件芯片、探测器、电子设备和超声波诊断装置
JP6724502B2 (ja) 超音波装置
JPWO2012060235A1 (ja) 圧電振動装置
US9135906B2 (en) Ultrasonic generator
CN106175827B (zh) 压电器件、探测器、电子设备及超声波图像装置
JP2016033970A (ja) 超音波デバイスおよびその製造方法並びにプローブおよび電子機器
CN107409261B (zh) 超声波振子单元
JP6805630B2 (ja) 超音波デバイス、超音波モジュール、及び超音波測定装置
WO2016002971A1 (fr) Capteur ultrasonique
JP2018110360A (ja) 超音波デバイス、超音波プローブ、及び超音波装置
EP2772315A2 (fr) Dispositif transducteur à ultrasons, unité de tête, sonde et appareil d&#39;imagerie par ultrasons
CN110324769A (zh) 超声波传感器以及超声波装置
CN111084637B (zh) 超声波元件及超声波装置
US10363574B2 (en) Piezoelectric element, probe, and ultrasonic measurement apparatus
JPWO2009011089A1 (ja) 超音波探触子とこれを用いた超音波診断装置および超音波探傷装置
WO2017018307A1 (fr) Capteur à réseau de vibrateurs
US9853578B2 (en) Ultrasonic generator

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16830412

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: JP

122 Ep: pct application non-entry in european phase

Ref document number: 16830412

Country of ref document: EP

Kind code of ref document: A1