[go: up one dir, main page]

WO2017008780A1 - Procédé de balayage bidimensionnel et dispositif de balayage correspondant - Google Patents

Procédé de balayage bidimensionnel et dispositif de balayage correspondant Download PDF

Info

Publication number
WO2017008780A1
WO2017008780A1 PCT/DE2016/100206 DE2016100206W WO2017008780A1 WO 2017008780 A1 WO2017008780 A1 WO 2017008780A1 DE 2016100206 W DE2016100206 W DE 2016100206W WO 2017008780 A1 WO2017008780 A1 WO 2017008780A1
Authority
WO
WIPO (PCT)
Prior art keywords
light beam
deflection
wavelength
scanning method
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2016/100206
Other languages
German (de)
English (en)
Inventor
Gerit DRÖGE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heidelberg Engineering GmbH
Original Assignee
Heidelberg Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidelberg Engineering GmbH filed Critical Heidelberg Engineering GmbH
Publication of WO2017008780A1 publication Critical patent/WO2017008780A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/1025—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for confocal scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/106—Scanning systems having diffraction gratings as scanning elements, e.g. holographic scanners

Definitions

  • the invention is based on a scanning method in which a coherent light beam, in particular a laser beam, is deflected two-dimensionally, wherein the light beam is guided in a first deflection direction by a pivotable reflecting element.
  • a scanning method and a corresponding scanning device are in WO
  • optical mirrors are used both for the deflection of the light beam in a first deflection direction and in a second deflection direction different from the first deflection device, which mirrors are correspondingly adjusted by means of mechanical angle scanners , For example, galvanometer scanners, MEMS scanners or
  • the light beam is deflected across the diffraction grating in a second deflection direction different from the first one by varying the wavelength of the light beam in a wavelength range.
  • the deflection angle is varied by changing the wavelength of the light.
  • a tunable light source with a high sweep rate of, for example, 50 kHz-150 kHz can be used.
  • the sweep rate of the tunable light source precisely the frequency of the beam deflection, such as
  • Line frequency determined.
  • the maximum line frequency of the beam deflection is thus well above the frequencies that can be achieved by means of mechanically moving elements, such as mirrors or the like, which usually allow line frequencies of less than 10 kHz.
  • the diffraction grating may be the specular element, so that the diffraction grating and the specular element are formed as the same component.
  • the angle of scan deflection in the second deflection direction is only dependent on the wavelength of the incident light. Thus, if this wavelength is known or is measured during the sweep, the deflection angle can be determined unambiguously.
  • the instantaneous wavelength of the sweep can be continuously measured, for example, using a K-Clock, in conjunction with a Fiber Bragg grating as the wavelength reference.
  • the diffraction grating is the specular element
  • the diffraction grating may be mounted on a galvanometer scanner at 45 ° to the axis of rotation of the scanner. Then, the deflection direction of the grating due to optical diffraction is orthogonal to
  • the light beam can be provided, for example, by a light source, in particular a laser, with a tunable wavelength.
  • the deflection frequency of the light beam in the second deflection direction may correspond to a sweep rate of the tunable light source.
  • the sweep rate of the light source is, for example, between 50 kHz and 150 kHz.
  • the wavelength of the tunable light source can be, for example, in the VIS and / or in the NIR range, wherein it can be, for example, between 800 nm and 1400 nm.
  • the lattice constant of the diffraction grating 1 can be, for example, 1,200 lines / mm, and in principle also gratings with a lattice constant of 100 to 2,000 lines / mm depending on the light used are conceivable.
  • the wavelength of the light beam is measured during a scanning operation and the deflection angle in the second deflection direction is determined therefrom. This can be done, for example, such that the wavelengths are continuously measured using a K-Clock, in conjunction with a fiber Bragg grating as the wavelength reference. It is furthermore conceivable to perform an alienation of the different scan lines on the basis of determined values of the deflection angles of different scan lines. Furthermore, based on determined values of the deflection angle, an image width can be determined.
  • a first wavelength reference value can be determined as scan start and a second wavelength reference value as scan stop.
  • the diffraction grating may be mounted at an angle of 30 ° to 60 °, preferably 40 ° to 50 ° and in particular approximately 45 ° inclined to the rotationally adjustable axis of an angle scanner, preferably a galvanometer scanner.
  • the diffraction grating is mounted so that upon variation of the wavelength of the light beam, the light beam is deflected by the diffraction grating orthogonal to the deflection by the rotation of the angle scanner.
  • the invention relates to a scanning device for carrying out a scanning method of the type described above.
  • the scanning device has an angle scanner with a rotationally adjustable axis.
  • the scanning device further comprises a diffraction grating mounted on the rotationally adjustable axis, so that the
  • the Diffraction grating can be pivoted about the angle scanner in a first spatial direction.
  • the scanning device further comprises a light source for generating a coherent light beam with tunable wavelength, wherein the light beam to the
  • Diffraction grating is directed so that the light beam is deflected at a variation of the wavelength of the light beam in a second, different from the first spatial direction.
  • the angle scanner can be a galvanometer scanner, on whose axis of rotation the
  • the scanning device may comprise a K-clock and a fiber Bragg grating.
  • FIG. 1 schematically shows an embodiment of the scanning device according to the invention
  • FIG. 2 is a block diagram of a second embodiment of the invention.
  • Scan device essentially from an angle scanner 5, which may be formed for example as a galvanometer scanner and has a rotation axis z, to which a specular element 1, in particular a diffraction grating is mounted.
  • the rotation axis z of the angle scanner 5 is a coherent light beam L, for example, provided by a laser light source, directed to the diffraction grating, wherein between the normal of the angle scanner 5
  • Diffraction grating 1 and the direction of incidence of the light beam L is an angle of
  • the diffraction grating is mounted so that the two deflection directions x, y, which arise once by pivoting the diffraction grating 1 about the axis of rotation z and once by the wavelength variation of the incident light beam L, by 90 ° to each other. Consequently, with the aid of the diffraction grating 1, a line deflection in the y direction can thus be achieved by varying the wavelength of the incident light beam L, which is orthogonal to the column deflection in the x direction
  • Pivoting the diffraction grating 1 by means of the angle scanner 5 is aligned.
  • the tuning of the light source thus leads to a motionless, horizontal beam deflection.
  • the horizontal scanning position, the deflection angle is therefore only dependent on the wavelength of the incident light.
  • the instantaneous wavelength of the tunable light source can be measured during the sweep. This makes it possible to alienate the individual lines in 2D scans and to keep the image width constant.
  • the determination of the instantaneous wavelength can be made simply by using a Fiber Bragg Grating (FBG) as a wavelength reference and a K Clock as a wavelength counter.
  • FBG Fiber Bragg Grating
  • K Clock as a wavelength counter.
  • the deflection in the orthogonal, vertical direction is effected by tilting the optical grating with the aid of the angle scanner 5, for example by means of a
  • Sample rate is then at 100 MHz.
  • the described scanning method and the corresponding scanning device are particularly suitable for (confocal) laser scanning microscopy, for example for
  • Coherent light is provided by a tunable light source 2.
  • Light source 2 may be, for example, a laser light source. About a beam splitter 1 1, a portion of the light is forwarded to the optics 9, which forms the light of the light source 2 into a beam and directed to the diffraction grating 1, which via an angle scanner 5, for example, a galvanometer scanner, is pivotable about a Beam deflection in the vertical direction x to realize. If the wavelength of the tunable light source 2 is varied, a deflection takes place in the horizontal direction y due to the physical
  • the wavelength of the tunable light source 2 may be
  • the lattice constant of the diffraction grating 1 may be, for example, 1,200 lines / mm, where in principle lattice with a
  • Lattice constants of 100 to 2,000 lines / mm depending on the light used are conceivable. Consequently, with the aid of the light beam of the tunable light source 2 deflected in the x and y directions, an image B of, for example, a human eye A can be generated.
  • the light reflected from the eye A is detected by a detector 6 in order to be able to analyze it using conventional image processing methods.
  • the part of the light, the tunable light source 2, which is not passed through to the optical system 9, is forwarded to a signal divider 10, via which in turn a first light component is forwarded to a K clock 3.
  • the light component not supplied to the K-clock is forwarded to a fiber Bragg grating 4, which serves as a wavelength reference in order to determine the wavelength of the tunable light source 2 from the signals of K-Clock 3 and Fiber-Gragg-grating 4.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ophthalmology & Optometry (AREA)
  • Biophysics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lasers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne un procédé de balayage, un faisceau lumineux (L) cohérent, notamment un faisceau laser, étant dévié de manière bidimensionnelle, le faisceau lumineux (L) étant guidé dans une première direction de déflexion (x) par un élément réfléchissant pivotant. Le procédé de balayage se caractérise en ce que l'élément réfléchissant est un réseau de diffraction (1) et le faisceau lumineux est dévié dans une seconde direction de déflexion (y) différente de la première, par l'intermédiaire du réseau de diffraction (1), les ondes variant le long du faisceau lumineux (L) sur une plage de longueurs d'onde. L'invention concerne par ailleurs un dispositif de balayage correspondant.
PCT/DE2016/100206 2015-07-15 2016-05-06 Procédé de balayage bidimensionnel et dispositif de balayage correspondant Ceased WO2017008780A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015111473.9 2015-07-15
DE102015111473.9A DE102015111473A1 (de) 2015-07-15 2015-07-15 Zweidimensionales Scanverfahren und eine entsprechende Scanvorrichtung

Publications (1)

Publication Number Publication Date
WO2017008780A1 true WO2017008780A1 (fr) 2017-01-19

Family

ID=56120881

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2016/100206 Ceased WO2017008780A1 (fr) 2015-07-15 2016-05-06 Procédé de balayage bidimensionnel et dispositif de balayage correspondant

Country Status (2)

Country Link
DE (1) DE102015111473A1 (fr)
WO (1) WO2017008780A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113597563A (zh) * 2019-01-28 2021-11-02 法雷奥开关和传感器有限责任公司 用于捕获物体的光学测量设备的发射装置、光信号重定向装置、测量设备以及操作发射装置的方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018206679A1 (de) * 2018-04-30 2019-10-31 Robert Bosch Gmbh Ablenkeinheit für eine optoelektronische Sensoranordnung und ein Verfahren zur Ablenkung optischer Strahlen
DE102018219475B4 (de) * 2018-11-15 2025-10-30 Robert Bosch Gmbh Optische Anordnung zum Aussenden mehrerer Lichtstrahlen mit verschiedenen Ausbreitungsrichtungen und LiDAR-Sensor
DE102019207791A1 (de) * 2019-05-28 2020-08-20 Continental Automotive Gmbh Ablenkeinheit für einen Lidarsensor
DE102020207742A1 (de) 2020-06-23 2021-12-23 Robert Bosch Gesellschaft mit beschränkter Haftung LIDAR-Vorrichtung mit einem diffraktiven Gitterkoppler und Spiegelelement
DE102021209976A1 (de) 2021-09-09 2023-03-09 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-Sensor
DE102023201147A1 (de) * 2023-02-13 2024-08-14 Continental Autonomous Mobility Germany GmbH Neuartiges Kohärentes Lidarsystem zur Umgebungserfassung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204694A (en) * 1991-07-29 1993-04-20 Xerox Corporation Ros printer incorporating a variable wavelength laser
US6278538B1 (en) * 1997-05-16 2001-08-21 U.S. Philips Corporation Optical scanner
US20120310081A1 (en) * 2011-05-31 2012-12-06 Lightlab Imaging, Inc. Multimodal Imaging System, Apparatus, and Methods
DE102012017041A1 (de) * 2011-08-29 2013-02-28 Heidelberg Engineering Gmbh Scanvorrichtung und Scanverfahren

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204694A (en) * 1991-07-29 1993-04-20 Xerox Corporation Ros printer incorporating a variable wavelength laser
US6278538B1 (en) * 1997-05-16 2001-08-21 U.S. Philips Corporation Optical scanner
US20120310081A1 (en) * 2011-05-31 2012-12-06 Lightlab Imaging, Inc. Multimodal Imaging System, Apparatus, and Methods
DE102012017041A1 (de) * 2011-08-29 2013-02-28 Heidelberg Engineering Gmbh Scanvorrichtung und Scanverfahren
WO2013029784A1 (fr) 2011-08-29 2013-03-07 Heidelberg Engineering Gmbh Dispositif de balayage et procédé de balayage

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TREVOR CHAN ET AL: "2-Dimensional beamsteering using dispersive deflectors and wavelength tuning", IEEE PHOTON. TECHNOL. LETT. MONTANA IEEE J. QUANTUM ELECTRON J. LIGHTWAVE TECHNOL. IEEE PHOTON. TECHNOL. LETT. FUJITSU SCI. TECH. J, 1 January 2000 (2000-01-01), pages 687 - 688, XP055289556, Retrieved from the Internet <URL:http://psilab.ucsd.edu/publications/(journal_2008)_chan_(OptEx_2D_steering).pdf> *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113597563A (zh) * 2019-01-28 2021-11-02 法雷奥开关和传感器有限责任公司 用于捕获物体的光学测量设备的发射装置、光信号重定向装置、测量设备以及操作发射装置的方法

Also Published As

Publication number Publication date
DE102015111473A1 (de) 2017-01-19

Similar Documents

Publication Publication Date Title
WO2017008780A1 (fr) Procédé de balayage bidimensionnel et dispositif de balayage correspondant
DE68919078T2 (de) Vorrichtung zur ramanstrahlungsanalyse.
DE2256736C3 (de) Meßanordnung zur automatischen Prüfung der Oberflächenbeschaffenheit und Ebenheit einer Werkstückoberfläche
DE102009049932B4 (de) Vorrichtung und Verfahren zur interferometrischen Schwingungsmessung an einem Objekt
DE3603235A1 (de) Vorrichtung und verfahren zum analysieren von parametern eines faserigen substrats
DE2313439A1 (de) Profilbreite-messvorrichtung
DE112007002907T5 (de) Optisches auf Kohärenzfrequenzbereichreflektometrie basiertes Abbildungssystem
DE2935716A1 (de) Verfahren und vorrichtung zum messen der dicke eines films durch ausnutzung von infrarot-interferenzerscheinungen
EP3101385B1 (fr) Dispositif et procede de detection de topographies de surface
EP2504710B1 (fr) Filtre optique de position à base de micro-réseau, et dispositif et procédé de mesure des vitesses d&#39;objets en mouvement
EP3242107A1 (fr) Dispositif optique interférométrique de mesure d&#39;une structure 3d d&#39;un objet
DE2107334B2 (de) Lichtfleckabtasteinrichtung
EP2455710A2 (fr) Appareil à laser rotatif et procédé de commande d&#39;un rayon laser
EP3924764A1 (fr) Dispositif de mesure optique et ensemble à multiples miroirs
DE10013299C2 (de) Verfahren und Vorrichtung zur geometrischen Kalibrierung pixelorientierter photosensitiver Elemente
WO2012131085A1 (fr) Procédé de mesure thz par imagerie et dispositif
WO2018215399A1 (fr) Procédé et dispositif de balayage d&#39;un angle solide
DE102005023302B4 (de) Vorrichtung und Verfahren zur Messung der Krümmung einer Oberfläche
AT515139B1 (de) Vorrichtung und Verfahren zur Ermittlung spektraler Eigenschaften einer Oberfläche
DE2163200A1 (de) Einrichtung zur beruehrungslosen messung
DE60202435T2 (de) Optische Methode und Vorrichtung zur Messung geometrischer Grössen
WO2018215394A1 (fr) Procédé et dispositif lidar pour balayer une zone de balayage au moyen de rayons de longueur d&#39;onde adaptée
DE4404154C2 (de) Verfahren und Vorrichtung zum optischen Untersuchen einer Oberfläche
DE112015007133T5 (de) Lichtabtastendoskop und Verfahren zum Betreiben eines Lichtabtastendoskops
WO2020104362A1 (fr) Dispositif de déviation bidimensionnelle par balayage d&#39;un faisceau lumineux

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16728828

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
122 Ep: pct application non-entry in european phase

Ref document number: 16728828

Country of ref document: EP

Kind code of ref document: A1