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WO2017007431A1 - Microsphère pour générer un nano-jet photonique - Google Patents

Microsphère pour générer un nano-jet photonique Download PDF

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Publication number
WO2017007431A1
WO2017007431A1 PCT/SG2016/050319 SG2016050319W WO2017007431A1 WO 2017007431 A1 WO2017007431 A1 WO 2017007431A1 SG 2016050319 W SG2016050319 W SG 2016050319W WO 2017007431 A1 WO2017007431 A1 WO 2017007431A1
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Prior art keywords
microsphere
μιη
illumination
ring
pnj
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English (en)
Inventor
Minghui Hong
Xudong Chen
Mengxue WU
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National University of Singapore
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National University of Singapore
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials

Definitions

  • the present invention relates to a microsphere for generating a photonic nanojet.
  • the present invention relates to the microsphere, its method of manufacture and a device for using the microsphere.
  • PNJ of the conventional microspheres finds a variety of applications. Combining micro-silica beads with the femtosecond laser illumination, optical nano- lithography with a feature size of 200 - 300 nm can be achieved. Microspheres can also enhance the backscattering intensity of the emitters which are located in the PNJ region. When combining microspheres with a solution of Rhodamine B dyes, two-photon fluorescence up to 30% has been demonstrated. Other applications include super-resolution imaging, enhanced optical detection, broadband low loss waveguide and high density optical data storage.
  • the characteristics of the PNJ includes: (a) the minimum value of the full-width at half- maximum (FWHM) can break the classical diffraction limit for microspheres; (b) the optical path length along propagation direction can extend longer than a few wavelength ( ⁇ ); and (c) it is a non-evanescent phenomenon that exists for a large range of diameters of microsphere and microcylinders.
  • FWHM full-width at half- maximum
  • An object of the present invention to provide for an engineered microsphere that is able to modulate the photonic nanoject generated under plane wave illumination.
  • An advantage of the present invention is to shrink the beam width of the photonic nanojets generated by such microsphere and facilitates various new applications.
  • a microsphere for generating a photonic nanojet at a shadow-side of the microsphere comprising an illumination-side opposite the shadow-side, wherein the surface of the illumination-side is modified.
  • microsphere it is meant to include any small spherical particles with diameters in the micrometer range. In an embodiment of the present invention, the diameter of the microsphere may be about between 4 ⁇ to 10 ⁇ .
  • the term may also be used to include any microsphere lens array that may be used over a substrate of a microfluidic device, and may be used as part of an optical detection method based on the photonic nanojet phenomenon which transports nano-objects in the microfluidic channel with a depth comparable to the longitudinal dimension of the photonic nanojet.
  • the microsphere may be a dielectric microsphere.
  • the surface modification comprises a pattern etched on the illumination-side surface of the microsphere.
  • the pattern comprises a ring structure that is etched on the surface of the microsphere.
  • a plurality of concentric rings are etched.
  • Concentric rings it is meant to include any rings, circles or other circular structures that share the same center.
  • the rings may have different radii but share the same center in a way that is similar to an archery target which features evenly spaced concentric circles that surround a "bullseye" (center).
  • 4 equally spaced apart concentric rings are etched onto the illumination-side surface of the microsphere.
  • the radius of the ring closest the center is about 0.5 ⁇
  • the radius of each of the subsequent rings is between 2.0 ⁇ to 2.25 ⁇ .
  • each ring has an inner and outer radii, the distance between the inner and outer radii of each ring is between 2.0 ⁇ and 2.25 ⁇ .
  • each ring has a width of about 0.25 ⁇ .
  • the depth of each of the ring etched on the surface is the same.
  • the pattern etched on the illumination-side surface of the microsphere is a spiral structure.
  • spiral it is meant to include any curve which emanates from a point and moving farther away as it revolves around the point.
  • the point may be similar to the center of the concentric rings described above.
  • the depth of the pattern etched on the surface is between 0.2 ⁇ to 1.6 ⁇ .
  • the microsphere is made from any material that is optically transparent or semi- transparent.
  • the photonic nanojet generated from the microsphere has a full-width at half- maximum (FWHM) value between 194.3 nm to 272.1 nm. More preferably, the photonic nanojet generated from the microsphere has a FWHM value of 247.1 nm.
  • FWHM full-width at half- maximum
  • a device for generating a photonic nanojet wherein the device comprises a microsphere according to the first aspect of the present invention.
  • the microsphere is supported by a holder.
  • the holder is a thin gold membrane.
  • the device further comprises an optical or objective lens for focusing the photonic nanojet generated at the shadow-side of the microsphere.
  • the microsphere is immersed in oil or water.
  • the device further comprises an illumination source for illuminating the illumination-side of the microsphere.
  • the illumination source is a laser beam.
  • a method for fabricating a microsphere comprising: (a) providing a microsphere, the microsphere having a shadow-side for generating a photonic nanojet and an illumination-side opposite the shadow- side for exposure to an illumination source; and (b) modifying the surface the of the illumination-side.
  • the illumination-side surface is modified by etching a pattern on the surface.
  • the patterns that may be etched on the surface are described above.
  • the pattern may be a ring structure or a spiral structure etched on the illumination-side surface by a focused ion beam, UV lithography or electrobeam lithography, or by any other etching process known to the skilled addressee.
  • a microsphere method for generating a photonic nanojet comprising: (a) providing a microsphere according to the first aspect of the invention; (b) illuminating the illumination-side of the microsphere.
  • the illumination-side is illuminated with a 405 nm laser.
  • the method further comprises focusing the photonic nanojet exiting the shadow- side of the microsphere.
  • the method further comprises manipulating the microsphere by a nano-stage at a movement step of about 50 nm in a z axis direction.
  • the method generates a photonic nanojet having a full-width at half-maximum (FWH M) value that is reduced by about 28% to 34% compared to photonic nanojets generated by conventional microspheres.
  • FWH M full-width at half-maximum
  • the present invention demonstrates a feasible design by decorating microsphere surfaces with functional micro-structures to modulate the photonic nanojets and achieve beam spot size beyond the diffraction limit.
  • FIG. 1 Configuration of the CRMS, (a) Schematic of observing PNJ by an optical microscope; (b) top and (c) side views of a 4 ring CRMS.
  • FIG. 2 Photonic nanojet generated by CRMS with 0 to 6 etched rings on the illumination side of CRMS, (a) Cross-section view of the CRMS; (b)-(d) light intensity distribution of CRMS with 0, 2 and 4 rings in the yz plane; (e) light intensity distribution along y axis at the highest intensity points of the PNJ. (f) Dependence of FWHM and working distance of the PNJ on ring number.
  • Figure 3 FDTD simulation of PNJs generated by CRMS with ring depth changed from 0 to 1.6 ⁇ on the illumination side of CRMS, (a) - (d): I ntensity distribution of CRMS with ring depth of 0, 0.8, 1.2 and 1.6 ⁇ in the yz plane; (e) Comparisons of the intensity along the y axis for different configurations at the highest intensity points of the PNJ. (f) FWHM and working distance versus ring depth.
  • Figure 4 Experimental results of the photonic nanojet produced under 405 nm laser illumination by (a) 4 ring, (b) single ring CRMS and (c) microsphere only. 10 raw images of light intensity distribution along z axis for (d) 4 ring microsphere; (e) 1 ring microsphere and (f) microsphere only are listed. The intensity distributions along horizontal direction are plotted in (g), (h) and (i), respectively.
  • Figure 5 Poynting vector plotted in FDTD software to show energy flow in the microspheres having with and without patterns etched on the surface.
  • Figure 6 E field distribution pattern of microsphere.
  • Figure 7 E field distribution pattern and data plotted in a graph for simulation results showing relationship of etching rings on microspheres and FWHM of PNJ generated.
  • Figure 8 The SEM image and E field distribution patterns showing relationship of position of ring structures on the microspheres and FWHM of PNJ generated.
  • Figure 9 E field distribution patterns.
  • Figure 10 shows the E field distribution patterns and comparison with the different FWHM values.
  • Figure 12 is a cross-section view of the experimental setup using the microsphere according to an embodiment of the present invention.
  • Figures 13 (a) shows the structure fabricated on the microsphere
  • Fig. 13(b) is the cross- section intensity distribution pattern and FWHM value at the highest intensity according to another embodiment of the present invention.
  • a novel engineered microsphere by etching concentric rings on the illumination side to improve the PNJ properties was devised.
  • Finite-difference time-domain (FDTD) technique was adopted for numerical simulations of the engineered microspheres.
  • Various parameters which contribute to the PNJ, such as ring number and depth, are analyzed. Experiments are carried out using an optical microscope with a high sensitivity CCD camera to verify the modulation effect of the concentric-ring microsphere (CRMS) 5 with a single ring and four rings being fabricated on the illumination side.
  • CRMS concentric-ring microsphere
  • the present invention relates to a microsphere 5 having a shadow-side 15 and an illumination-side 10.
  • the microsphere 5 may have a diameter between 4 ⁇ to 10 ⁇ , and may be made from any optically transparent or semi-transparent material.
  • a beam of any light source may be used to illuminate the illumination-side 10 of the microsphere 5 to generate a photonic nanojet (PNJ) on the shadow-side 15.
  • PNJ photonic nanojet
  • the surface of the illumination-side 10 of the microsphere 5 is modified. As described above, any form of modification may be made to the surface including any physical modification that affects the surface structure of the microsphere 5.
  • the surface of the illumination-side 10 is a pattern etched on it.
  • circular rings in the form of concentric circles or rings 20 are etched on the surface.
  • Figure 1(c) shows a cut-away portion of the microsphere 5 to reveal a partial cross-sectional view.
  • the microsphere 5 may be 1 ring etched on the surface, or a series of plurality of rings 20 etched on the surface.
  • 4 rings may be etched as is shown as an exemplary embodiment of the present invention.
  • Each ring may have a radius, a width (spanning a portion of the surface of the microsphere) and a depth (spanning an area etched into the microsphere) as will be set out in detail below.
  • Figure 2(a) is a cross sectional view of the microsphere 5 and shows how each ring is etched on the surface and into a portion of the microsphere 5.
  • the pattern that is etched on the surface of the illumination- side 10 of the microsphere 5 is a spiral structure (shown in Figure 13(a)).
  • a spiral structure shown in Figure 13(a)
  • Such a structure may be similar to a concentric ring structure but the curve that is etched on the surface of the microsphere is continuous.
  • the spiral structure may have a width and depth that is similar to those used for the concentric ring structure.
  • the spiral ring structure may have a ring width of about 250 nm, a ring depth of about 1.4 ⁇ from the top of the microsphere 5, and the illumination carried out in an x-axis linear polarisation with a 405 nm wavelength laser beam.
  • Figure 13(b) shows the intensity of the yz cross-section and the FWHM of the PNJ generated by the microsphere 5 along the y axis.
  • the FWHM value is 218 nm, which is corresponding to 0.54 ⁇ .
  • the etching may be carried out by any suitable lithography process.
  • the pattern etched onto the surface of the microsphere is a 3D pattern.
  • the microsphere 5 may be used as part of a device for generating a PNJ.
  • the microsphere may be held by a holder 25, for example a thin gold membrane or any other suitable structure or material.
  • An objective lens 30 may be placed on the shadow-side 15 of the microsphere 5 to focus the PNJ that is generated at the shadow-side 15.
  • the microsphere 5 may be immersed in oil or water.
  • the immersion may be carried out by adding either oil or water to the microsphere 5, i.e. exposing both the illumination-side 10 and the shadow-side 15 of the microsphere 5 to either oil or water to create a homogeneous ambient environment for the microsphere 5.
  • An advantage of such an immersion includes having the wavelength of the incident beam being reduced in the immersion medium which, in turn, results in a sharper focus of the PNJ that is generated by the microsphere 5. This is because the effective wavelength of the incident beam is shorter in an immersion medium, thus resulting in a sharper focus of the PNJ.
  • An illumination source such as a laser beam may be positioned on the side of the illumination- side 10 of the microsphere 5 to emit on the microsphere 5 a laser beam.
  • a high sensitivity CCD camera 35 is used to verify the modulation effect of the microsphere 5.
  • a further lens 32 which may be part of an optical system, may be placed intermediate the objective lens 30 and CCD camera 35 for further focusing.
  • the illumination may be carried out in an x-axis linear polarization with a 405 nm wavelength laser beam.
  • Figure 12 shows a cross-sectional view of the experimental setup with microsphere 5 when used for imaging.
  • a sample substrate 40 for imaging may be placed on the illumination-side 10 of the microsphere 5 either near or directly on the microsphere 5.
  • the sample substrate 40 may be a Blu-Ray disk.
  • Other samples that may be used include any substrates having a flat surface.
  • a quartz/Cr substrate 45 may be placed on the shadow-side 15 of the microsphere 5 for holding the microsphere 5.
  • the etching of the pattern 20 on the surface of the illumination-side 10 of the microsphere may be carried out by any suitable process known to the skilled addressee. Examples include etching using a focussed ion beam, UV lithography or electrobeam lithography.
  • the silica microspheres employed in this paper are brought commercially (Bangs Laboratories, Inc). As the size of the microsphere is small, the diameter of which may be between 4 ⁇ to 10 ⁇ , a thin gold membrane (about 5 ⁇ thick) was designed to carry or hold the microsphere during experiments. These home-made gold membranes were fabricated by conventional UV lithography and gold electroplating. The detailed fabrication process are listed as the follows: first, a soda lime blank (Nanofilm, Wetlake Village, Califormia) with 100 nm thick chromium and 530 nm thick layer of AZ1518 photoresist was patterned by a direct-write laser system (Heidelberg Instruments uPG 101).
  • a 500 ⁇ thick silicon wafer was cleaned and covered with thin layers of Cr/Au (100 nm/50 nm) as an adhesion and plating base. It was then deposited with 5 ⁇ thick AZ9260 resist by spin coating and then exposed by UV light in a Mask & Bond Aligner (Karl Suss, MA8/BA6). After resist developing, the remaining resist mold was used for gold electroplating to build the gold layer. The AZ 9260 resist and Au plating base were then removed by acetone and gold etchant. Finally, the whole gold membranes were released from the substrate by Cr etching.
  • the microspheres were dispersed onto the gold membrane by immersing the whole structure into diluted water. Then, the membrane was dried in ambient air.
  • the concentric ring structures were fabricated on the surface of the microspheres using FEI DA 300 Focus Ion Beam (FIB) system. Applying 30 KV and 50 nA of liquid metal Gallium ion sources, the rings at an average ring width (outer ring radius minus inner ring radius) of 0.25 ⁇ were milled. The inner radius of the first ring is 0.5 ⁇ and the distance between the adjacent rings is 0.25 ⁇ .
  • the dependence of the PNJ of the concentric ring microspheres (CRMS) on ring number and depth were studied with Lumerical 3D FDTD software.
  • FIG. 1 illustrates the configuration of the CRMS with Fig. 1(a) as the experimental setup used for capturing the images of the PNJ in the xy plane.
  • FIG. 1(b) and 1(c) show SEM images of the top and cross-section views of a 4-ring CRMS located in a gold membrane. It can be observed that uniformly distributed concentric rings with smooth edge and uniform depth were fabricated. The concentric rings have an average width of 0.25 ⁇ with a machining error of 10 nm.
  • the depth of the rings was around 1.2 ⁇ with a machining error of 0.2 ⁇ .
  • the engineered microspheres which were held on a gold membrane, were manipulated by a nano-stage at a movement step of 50 nm in the z direction.
  • Fig. 2(e) shows the light intensity distribution along the y axis at the highest intensity point of the PNJ for the rings number from 0 to 6. An obvious decrease in FWHM can be observed and there are no significant side lobes.
  • the simulation results show that the etched rings on microspheres can efficiently reduce the FWHM of the PNJ from 274.2 nm (no ring, 0.686 ⁇ ) to 182.8 nm (6 rings, 0.457 ⁇ ), which corresponds to a reduction of 33.3%.
  • a rapid decrease of FWHM values is observed when ring number changes from 0 to 3.
  • the FWHM of the PNJ is 194.3 nm (0.486 ⁇ ), corresponding to a reduction of 29.1%. It can be observed in Fig. 2(f) that the working distance and light intensity are also reduced with ring number.
  • Figure 5 shows the Poynting vector that is plotted in the FDTD software which indicates the energy flow in the microspheres without [Fig. 5(a)] and with [Fig. 5(b)] ring structures.
  • the lines were added by joining the Poynting vectors together to show the trend.
  • the incident beams in near the edge transmitted vertically as they were guided by the etched rings before they converged.
  • the rings functioned as small waveguides. After adding the rings, these beams focused near the same focal point in the center. Even when the incident wavelength is changed from 405 nm to 550 nm, the super-focusing effect of the concentric ring microsphere still existed.
  • the diameter of the microsphere was 10 ⁇ .
  • the inner radius of the first ring was 0.5 ⁇ .
  • the difference between outer and inner diameters for each ring was 0.25 ⁇ , and the distance between adjacent rings was also 0.25 ⁇ .
  • the FWHM of the nanojet was simulated as 353.3 nm (0.64 ⁇ ) at the maximum intensity, located 0.93 ⁇ away from the microsphere surface. This can be seen in the E field distribution pattern shown in Figure 6. Simulation results showed that etching rings on microspheres could indeed reduce the FWHM, as shown by the E field distribution pattern and data plotted in a graph in Figures 7(a) and (b).
  • the FWHM of the PNJ reduced from 353.3 nm to 292.0 nm for 17.2%.
  • Microsphere with 4 - 6 rings had similar FWHM.
  • simulations of one ring etched at different positions and their combined effect were also done to investigate the influence of ring position.
  • the wavelength of the incident light is 550 nm. 10 ⁇ diameter silica microspheres were used for focusing.
  • the inner radius is 0.5 ⁇ , 1 ⁇ , 1.5 ⁇ , and 2 ⁇ , respectively.
  • the difference between the outer and inner diameters for each ring was 0.25 ⁇ .
  • the etching depth is 0.8 ⁇ for all rings.
  • the SEM image and E field distribution patterns are shown in Figure 8. The results showed that the focusing property of microsphere with 1 ring was similar and was only slightly better than a pure microsphere with no ring structure on the surface.
  • Table 1 summarises the data obtained in the experiments and simulations showing the relationship of the FWHM generated by the microsphere of the present invention and the number of rings etched on the microsphere.
  • Figure 9 shows the E field distribution patterns when the microsphere diameter is 4 ⁇ ; depth of each ring is 0.8 ⁇ ; incident wavelength is 400 nm; and the ring numbers 0 to 4 to investigate the E field distribution and the different FWHM values.
  • Ring depth which is calculated as the distance from the surface of microsphere to the bottom of the rings, also exerts a significant impact on the PNJ.
  • the ring number is fixed at 4 to study the influence of ring depth on the FWHM and working distance of PNJ.
  • Figure 3 shows the FDTD simulation of PNJs generated by CRMS as ring depth is varied from 0 to 1.6 ⁇ on the illumination side of CRMS.
  • Figures 3(a) to 3(d) show the light intensity distribution in the yz plane. Without the rings, microspheres generate a FWHM of 274.2 nm (0.686 ⁇ ).
  • FWHM of the PNJ is large (about 260 nm) with a long working distance. I ncreasing the etching depth from 1.0 to 1.6 ⁇ results in the smaller FWHM (about 200 nm) and a shorter working distance.
  • the working distance of the microsphere 5 is defined as the distance between the shadow-side 15 surface of the microsphere 5 and the highest intensity point of the PNJ along the optical axis of the PNJ.
  • Figure 4 shows the experimental results obtained by the CRMS decorated with : (a) 4 rings, (b) single ring and (c) microsphere only. Inner and outer radii for the single ring in Fig. 4(b) are 2.0 and 2.25 ⁇ , respectively. The ring depth is 1.2 ⁇ and uniform for all the ring structures. The xy plane normal to the longitudinal direction of the PNJ were captured with 50 nm per step by a nano-stage. Ten raw images of each configuration are shown in Figs. 4(d) to 4(f), demonstrating the gradual change in light distribution along z axis.
  • the present invention is a novel way to tune the PNJ by decorating concentric ring structures on the microsphere surfaces. Significant reduction of about 30% in FWHM of the PNJ were achieved numerically and good agreements were found with experiment. This design facilitates applications which require nano-scale beams with high intensity.
  • the modulation of PNJ generated by the engineered microspheres was presented.
  • the dependence of PNJ and working distance on ring number and depth has been studied.
  • the ring depth of a 4-ring CRMS is varied from 0 to 1.6 ⁇ .

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Abstract

La présente invention concerne une microsphère pour générer un nano-jet photonique. La présente invention concerne la microsphère, son procédé de fabrication et un dispositif d'utilisation de la microsphère. Dans un aspect de la présente invention, l'invention concerne une microsphère permettant la génération d'un nano-jet photonique sur un côté d'ombre de la microsphère, la microsphère comprenant un côté d'éclairage opposé au côté d'ombre, la surface du côté d'éclairage étant modifiée.
PCT/SG2016/050319 2015-07-09 2016-07-08 Microsphère pour générer un nano-jet photonique Ceased WO2017007431A1 (fr)

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US62/231,542 2015-07-09

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RU181086U1 (ru) * 2017-11-01 2018-07-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Линза
EP3385219A1 (fr) * 2017-04-07 2018-10-10 Thomson Licensing Procédé de fabrication d'un dispositif de formation d'au moins un faisceau focalisé dans une zone proche
RU2694123C1 (ru) * 2018-07-27 2019-07-09 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" Способ формирования изображения объектов с субдифракционным разрешением в миллиметровом, терагерцевом, инфракрасном и оптическом диапазонах длин волн
RU195881U1 (ru) * 2019-11-06 2020-02-07 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Устройство формирования фотонной струи
CN110987731A (zh) * 2019-12-20 2020-04-10 江苏集萃深度感知技术研究所有限公司 纳米颗粒检测装置及方法
RU2744033C1 (ru) * 2020-06-01 2021-03-02 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" КВЧ варифокальная линза
US11061245B2 (en) 2016-03-24 2021-07-13 Interdigital Ce Patent Holdings Device for forming nanojet beams in a near zone, from incident electromagnetic waves
US11079523B2 (en) 2016-10-21 2021-08-03 Interdigital Ce Patent Holdings Device and method for shielding at least one sub-wavelength-scale object from an incident electromagnetic wave
US11275252B2 (en) 2016-10-21 2022-03-15 Interdigital Ce Patent Holdings Device for forming at least one tilted focused beam in the near zone, from incident electromagnetic waves
CN114815037A (zh) * 2022-03-08 2022-07-29 哈尔滨工程大学 一种双模光纤光子纳米喷射光场调控器件
CN115058322A (zh) * 2022-06-21 2022-09-16 中国科学院长春光学精密机械与物理研究所 单分子荧光激发装置及由其构成的基因测序芯片
RU2806895C1 (ru) * 2023-07-14 2023-11-08 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" Способ создания магнитных полей в мезоразмерных диэлектрических сферических двухслойных частицах
WO2025022138A1 (fr) * 2023-07-26 2025-01-30 Ruđer Bošković Institute Nouveau dispositif optique pour l'utilisation de l'effet synergique de nanojets photoniques et de plasmons pour amélioration de signal et de résolution en spectroscopie

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