WO2017003241A1 - 물품 검사장치 - Google Patents
물품 검사장치 Download PDFInfo
- Publication number
- WO2017003241A1 WO2017003241A1 PCT/KR2016/007081 KR2016007081W WO2017003241A1 WO 2017003241 A1 WO2017003241 A1 WO 2017003241A1 KR 2016007081 W KR2016007081 W KR 2016007081W WO 2017003241 A1 WO2017003241 A1 WO 2017003241A1
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- WIPO (PCT)
- Prior art keywords
- article
- inspection
- information
- feature
- reference data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8874—Taking dimensions of defect into account
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10024—Color image
Definitions
- the present invention relates to an article inspection device, and more particularly to an article inspection device for inspecting whether an article is defective.
- CNC Computerized Numerical Control
- the method currently used in the industrial field is to take an image using the photographing equipment for the object to be inspected.
- this method not only incurs excessive costs for the inspection, but also the quality is easily influenced by various external factors such as the skill and fatigue of the individual workers and the working environment as in the production process of the conventional goods. The speed of execution is also not sufficient, which is likely to affect the productivity of the article.
- the article inspection apparatus includes an image acquisition unit and a control unit.
- the image acquisition unit acquires a photographed image of at least a portion of the article.
- the controller determines whether the article is defective by using the photographed image of the article.
- the control unit may include at least one of a first element having a predetermined shape and at least one of a second element formed in the article and at least one of an opening, a recess, and a through-hole formed in the article.
- a first inspection of at least one of position, shape and size and a second inspection of at least one of adhering foreign substances, scratches and surface stains to the article are performed.
- control unit shape-based characteristic of the first element and the second element received or automatically extracted from the outside with respect to at least one of the first element and the second element.
- the first inspection may be performed by comparing the photographed image with reference data of the article corresponding to the photographed image based on a feature defined by.
- the feature may include at least one of information on a feature object corresponding to at least one of the first element and the second element and relationship information between a plurality of feature objects.
- the information about the feature object may include at least one of dimension information of the feature object, location information of the feature object, and geometric shape information of the feature object.
- the relationship information between the plurality of feature objects may include at least one of relative distance information between the feature objects, offset information between the feature objects, and geometric shape information between the feature objects.
- the controller may set an inspection area for the feature object and set a quality reference for the feature object.
- the controller may set correlations between the feature objects and set a quality standard for the correlations.
- the controller may be configured to compare the photographed image with reference data of the article corresponding to the photographed image based on at least one of a height, brightness, and color obtained from the photographed image of the article, and the second inspection. Can be performed.
- the controller may be configured to set a region corresponding to at least one of an opening, a depression, and a through hole formed in the article as a masking region, and wherein the masking region is configured as the masking region. Only the first test can be performed.
- the article may correspond to a part of the final finished product, and the control unit may exclude from the second inspection a portion where the article is covered from external exposure by assembling with another part.
- An article inspection apparatus includes an image acquisition unit and a control unit.
- the image acquisition unit acquires a photographed image of at least a portion of the article.
- the controller determines whether the article is defective by using the photographed image of the article.
- the image acquisition unit acquires a good-quality photographing image by photographing a good-quality article corresponding to the article.
- the controller generates reference data using the good photographing image, and compares the reference data with the photographed image obtained from the article to inspect the article.
- control unit has a predetermined shape, the position, shape and at least one of the first element formed in the article and the second element including at least one of an opening, a depression and a through hole formed in the article and A test may be performed on at least one of the sizes, and on at least one of the first element and the second element, the shape characteristic of the first element and the second element received from the outside or automatically extracted. An inspection may be performed by comparing the photographed image with reference data of the article corresponding to the photographed image based on the feature defined by the feature.
- the article inspection apparatus may further include an input unit for receiving correction information for correcting the feature.
- the correction information may be generated based on the statistical processing result for the inspection result obtained by the inspection of the article.
- the reference data may be generated using a statistical method based on a plurality of good-quality images obtained from a plurality of good-quality items.
- the reference data may be generated by averaging the good images.
- the controller may automatically set or receive defect information including a type of a defect for inspecting the article and a tolerance value for each type of defect.
- the type of defect may include at least one of overcut, undercut, scratch, color, imprint, protrusion, and flatness.
- the inspection apparatus can automatically and efficiently perform inspection on an article to be inspected.
- the inspection criteria of the inspection target article can be changed according to the state of the article.
- the inspection may be performed by generating information about reference data and defects for inspection.
- the defect inspection it is determined whether the article is defective by using the photographed image of the article, the defect inspection of the processing due to the processing error in the manufacturing process of the article and the appearance defect inspection according to the defect of the appearance of the article.
- the defect inspection can be performed more precisely and effectively.
- the defect inspection by performing the defect inspection on the foreign matter adhesion, scratches, surface stains and the like of the article, and by performing the inspection based on the height, brightness, color, etc. obtained from the photographed image of the article, the defect inspection more precisely and effectively Can be done.
- the article inspection apparatus Through the article inspection apparatus according to the present invention, a manufacturer can automatically and efficiently perform inspection on an article to be inspected.
- the inspection criteria of the inspection target article can be changed according to the state of the article.
- the inspection can be performed by generating information about reference data and defects for inspection by itself.
- defect inspection can be performed more precisely and effectively.
- correction information necessary for correcting the feature information which is the basis of the comparison, may be input, and the correction information may be generated based on the statistical processing result of the inspection result, thereby more accurately and effectively performing the defect inspection. Can be.
- the defect inspection can be performed more precisely and effectively.
- FIG. 1 is a front view showing the article inspection apparatus according to an embodiment of the present invention.
- FIG. 2 is a plan view illustrating an area excluded from the external inspection of an article of the article inspection apparatus of FIG. 1.
- FIG. 3 is a plan view for explaining the designation of the masking area for performing only the defective inspection of the article of the article inspection apparatus of FIG.
- FIG. 4 is a flowchart illustrating a method of generating reference data by the article inspection apparatus of FIG. 1.
- FIG. 5 is a plan view illustrating a method of setting a feature for inspecting an article in a process of generating reference data of FIG. 4.
- FIG. 6 is a plan view illustrating a form in which a reference position is designated to reference data in the process of generating reference data of FIG. 5, and the reference position is utilized when inspecting an article.
- first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
- the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
- the rear case for a mobile phone is an empty rectangular box-shaped part, which may be formed of metal, plastic, glass, or the like, and includes large and small openings arranged for various purposes such as sound output of a switch, a camera, and a speaker. It also includes an internal structure for accommodating various components such as batteries, communication and control circuit boards therein.
- FIG. 1 is a front view showing the article inspection apparatus according to an embodiment of the present invention.
- the article inspection apparatus 100 includes a transfer unit 110, a measurement unit 120, and a control unit 130.
- a component such as an article supply unit (not shown) or a buffer 150 may be added to drive the article inspecting apparatus 100.
- the transfer unit 110 may transfer the object to be inspected, and the measurement unit 120 may measure the object to obtain a photographed image, and the controller 130 may determine whether the object is defective by using the measured image.
- the transfer unit 110 has a configuration for transferring an article, and as described above, in the article inspection apparatus 100 according to an embodiment of the present invention, a rear case for a mobile phone is assumed as an inspection target part. In connection with this embodiment, an example regarding the operation of the transfer unit 110 will be described by explaining a method of transferring the rear case for a mobile phone.
- the transfer unit 110 transfers it to a predetermined position 112.
- the predetermined position may be a position stopped by the necessity such as assembly, etc.
- the predetermined position 112 is a position for the measurement unit 120 to measure the photographed image of the inspection object article 160. Can be.
- the transfer unit 110 After the measurement unit 120 measures and acquires the photographed image of the inspection object article 160, the transfer unit 110 continuously conveys the inspection object article 160.
- the transfer unit 110 is an additional device such as a flipping device unit for flipping the inspection object 160 to support the image measurement in various aspects of the inspection object 160. It may include components.
- the measurement unit basically measures the upper surface of the object to be inspected.
- the corresponding surface can be measured by rotating the surface 90 ° or 270 ° in addition to the upper surface of the object to be inspected, and by using the measured image, various aspects of the object to be inspected can be measured. It is possible to obtain information in.
- the intermediate buffer 150 may be transferred to an apparatus or an apparatus for the next process of the production of the article, such as assembly after inspection. ) Can be transported the goods to be tested.
- the transfer unit 110 temporarily stops the transfer of the inspection target article 160 based on the inspection result performed by the control unit 130 and determines the inspection result automatically or by the user, or the inspection target article 160. You can wait until you issue a command to process.
- the control unit 130 determines that the inspected article 160 is inferior, the transfer unit 110 may transfer the article to a separate path from the articles determined to be of good quality in order to discard the articles.
- the measurement unit 120 includes a configuration for obtaining a photographed image of the inspection object article 160.
- the four buttons on the top, bottom, left, and right sides have a power button or the like. Openings for volume control, input switches, speakers, microphones, etc. are included.
- an opening for protruding the camera lens may be included in the rear side. It may further include a structure such as a step for assembling the various components. In addition, it may be necessary to check whether the assembly is correctly performed in a state where various components such as various buttons and internal components as described above are assembled, as well as the rear case component itself for a mobile phone.
- the photographed image may include a two-dimensional planar image or a pattern image of the object to be inspected according to the irradiation light source.
- a two-dimensional plane image may be obtained by irradiating non-patterned light such as monochromatic light, and a pattern image may be obtained by irradiating patterned light.
- the pattern image obtained as described above may generate a 3D image by the controller 130.
- various conventional methods may be used to acquire a three-dimensional image, but in the present invention, as an embodiment of the image acquisition method, a predetermined pattern of light is irradiated to the object while being irradiated, and irradiated with the target surface.
- a method of obtaining a 3D image from the height of each point of the image by changing the pattern pattern generated according to the step may be utilized. For example, a bucket algorithm may be used.
- the measurement unit 120 may include an irradiation unit for irradiating unpatterned or patterned light onto an object and a photographing unit for capturing an image of the object.
- the article inspection apparatus 100 may be provided with a photographed image provided from an external device, instead of directly acquiring a photographed image by the photographing unit 120. That is, the article inspection apparatus 100 may include an image acquisition unit, and the image acquisition unit may acquire a captured image by directly measuring an image of the inspection target article 160 like the measurement unit 120, or photographing from an external device. You may be provided with an image.
- the controller 130 determines whether the article is defective by using the photographed image of the article. Specifically, the controller 130 performs a defect inspection according to the machining error in the manufacturing process of the article and the appearance defect inspection according to the defect of the appearance of the article.
- the photographed image of the article may include a two-dimensional planar image of at least a portion of the article, a pattern image of at least a portion of the article, and the like.
- the information and color, brightness, and saturation of the two-dimensional or three-dimensional shape of the article may include an image including information on various attributes such as.
- the defect inspection may include inspecting at least one of the position, shape, and size of at least one of the first element of the article and the second element of the article.
- the first element means an element formed in the article having a predetermined shape, and for example, at least a part of a circuit pattern formed in the article, a protrusion protruding from the body of the article, a part attached to the article, and the like. It may include.
- the second element means an element whose shape is defined by removing a body of the article or a part of the first element, or an element whose shape is relatively defined by the surrounding shape or the first element, for example, The openings, depressions, through-holes, etc. may be formed.
- control unit 130 for at least one of the first element and the second element, the shape-based characteristic of the first element and the second element received or automatically extracted from the outside;
- the processing defect of the article may be inspected by comparing the photographed image with reference data of the article corresponding to the photographed image based on the feature defined by the feature.
- the feature may include at least one of information about a feature object corresponding to at least one of the first element and the second element and relationship information between the plurality of feature objects.
- the information about the feature object may include at least one of dimension information of the feature object, location information of the feature object, and geometric shape information of the feature object.
- the feature may include information about the protrusion 420 (see FIG. 4) corresponding to the first element, that is, size information (horizontal, vertical, and protrusion height information) of the protrusion 420, and the position of the protrusion 420. Information, geometric information of the protrusion 420 (fillet, slope, etc.) may be included. Further, the feature may include size information (radius, long radius, short radius, etc.) of the opening 410 (see FIG. 4) corresponding to the second element, position information of the opening 410, geometric information of the opening 410 (curvature, Eccentricity, etc.).
- the relationship information between the plurality of feature objects may include at least one of relative distance information between feature objects, offset information between feature objects, and geometric shape information between feature objects.
- the feature includes at least one of relative distance information, offset information, or geometric shape information between the protrusions 420, between the openings 410, or between the protrusions 420 and the opening 410. can do.
- the controller 130 may set an inspection area for the feature object and set a quality standard for the feature object.
- the controller 130 may set an inspection area for the first element or the second element and set a quality standard for the first element or the second element.
- the controller 130 sets an inspection area for the protrusion 420 or the opening 410, and based on the size information, the position information, the geometric shape information, etc. of the protrusion 420 or the opening 410.
- a good quality standard can be set and processing defect inspection can be performed according to the good quality standard.
- the controller 130 may set correlations between the feature objects and set a quality standard for the correlations.
- the controller 130 may set correlations between the first elements, the second elements, or the first element and the second element, and set a quality standard for the correlation.
- the controller 130 sets correlations between the protrusions 420, between the openings 410, between the protrusions 420 and the openings 410, and between the protrusions 420 and the openings.
- a quality standard can be set based on the relative distance information or offset information, geometrical shape information, etc. between the 410 or between the protrusion 420 and the opening 410, and can perform a defect inspection according to the quality standard. Can be.
- the appearance defect inspection may include inspection of at least one of foreign material adhesion, scratch and surface stains on the article.
- the article may adhere to or adhere to the adherent foreign matter in the manufacturing process, may form a stain during the anodizing (anodeizing) process, thereby resulting in such a poor appearance.
- the appearance defect As described above, it may be checked whether there is a region having a brightness distribution and / or a height distribution different from the surroundings in the inspection region.
- the controller 130 may inspect the appearance defect of the article by comparing the photographed image with reference data of the article corresponding to the photographed image based on at least one of height, brightness, and color obtained from the photographed image of the article. can do.
- the image acquisition unit may include a measurement unit 120 for directly measuring the image of the inspection target article 160 to obtain a photographed image, the measurement unit 120 is a good quality corresponding to the article It is also possible to obtain a good photographic image by photographing the article.
- the controller 130 may generate reference data by using a good photographing image, and compare the reference data with a photographed image obtained from the article to inspect the article.
- the reference data may be generated using a statistical method based on a plurality of good-quality images obtained from a plurality of good-quality items.
- the article when the article is produced, the article is produced based on a design drawing made by CAD software. Therefore, in the case of inspecting the article, it is possible to proceed with the inspection based on such a design drawing or an ideal form of the article obtained from the design drawing.
- a manufacturer preparing a supply contract may not be able to directly disclose the design drawings due to the high level of security required by the manufacturer making the request. have.
- reference data can be generated from which sample articles are directly compared.
- the manufacturer can simply inspect the goods in the above situation, and the inspection of the various types of goods can be performed even if the form and the criteria are not determined in advance. There is also an advantage to making progress.
- the user After the user acquires the photographed image of the sample article, the user prepares the reference data from the photographed image, so that the sample article without a predetermined external standard such as a design drawing You can generate reference data from your own, and you can create a new inspection standard by comparing the reference data with the actual sample goods, or reviewing the reference data itself to refer to the production of the goods, and to determine whether the goods are defective directly or automatically. You can do that.
- a predetermined external standard such as a design drawing
- the controller 130 basically sets the inspection conditions based on the reference data when there is reference data that can be input from the outside, such as a design drawing through CAD, and sets the inspection condition data and the two-dimensional image of the object to be inspected. And / or inspection may be performed by comparing three-dimensional images.
- the inspection apparatus directly stores the reference data from the specimen inspection object. The method of generating the can also be utilized.
- the controller 130 may display the inspection result on a display unit (not shown) of the inspection apparatus.
- the inspection result may include two-dimensional and / or three-dimensional images of the inspection object, and position and shape of defects of the object identified in the inspection process and numerical data related thereto.
- control unit 130 is located in the next step of the article inspection device 100 of the buffer 150 or the production equipment, if it is determined that the inspection object article 160 has a good quality without defects
- the transfer unit 110 may be controlled to be transferred to the equipment. Meanwhile, in the case of a defective article, the transfer unit 110 may be controlled to stop the transfer of the inspection target article 160 and wait for the user's judgment.
- FIG. 2 is a plan view for explaining a region excluded from appearance defect inspection of an article of the article inspection apparatus of FIG. 1.
- the article inspection apparatus may be excluded from the appearance defect inspection of the article.
- the article to be inspected may correspond to a part such as a rear case which is employed in a mobile phone which is a final product.
- the controller 130 may exclude a portion of the article covered from external exposure by assembling with other components in the appearance defect inspection.
- a poor appearance such as a scratch 512 in the first area 510 of the surface of the article, may significantly degrade the value of the article, while in the second region 520 If the scratch 522 is hidden from external exposure by a subsequent assembly process or the like and does not affect the value of the final article, the reference data and the two-dimensional image of the measured article only for the first region 510 and By setting the comparison area to compare the corresponding areas of the 3D image, it is possible to quickly perform a defect inspection.
- FIG. 3 is a plan view for explaining the designation of the masking area for performing only the defective inspection of the article of the article inspection apparatus of FIG.
- a masking area may be set in a specific portion of an article for inspecting the article.
- a photographed image of the article is obtained, there is a case where it is not necessary to perform inspection on a specific area such as an area where an opening is formed. In such a case, the area can be excluded from the comparison by masking the area.
- control unit 130 may set an area corresponding to at least one of an opening, a depression, and a through hole formed in the article as a masking area, and inspect the processing defect and the appearance defect of the masking area. Only defect inspections can be carried out during the inspection.
- the openings, depressions, through holes, etc. formed in the article are parts corresponding to the second element, and elements whose shape is defined by removing a body or a part of the first element of the article, or the surrounding shape or the first Since it means an element whose shape is relatively defined by the element, it does not have a substantial shape. Therefore, by setting the masking area on at least part of the second element, unnecessary computational load can be reduced and inspection speed can be improved.
- the portion of the opening 610 in which the battery is mounted occupies a large part of the article to be inspected, but by masking the opening 610 620, the computational load can be greatly reduced. It can greatly improve the inspection speed.
- the machining defect inspection of the machining defect inspection and appearance defect inspection for the masking area can be performed. That is, even in the case of a part corresponding to the second element such as the opening 610, the machining defect inspection during the machining defect inspection and the appearance defect inspection may be performed.
- the opening 610 may appear different in size, position, geometric shape, etc. than the reference data due to poor processing, and also the relationship information between the opening 610 and other feature objects, that is, relative distance information, Since offset information, geometric shape information, and the like may appear different from the reference data, the inspection of the appearance defect associated with the opening 610 may be omitted, and the inspection of the processing defect may be performed.
- FIG. 4 is a flowchart illustrating a method of generating reference data by the article inspection apparatus of FIG. 1.
- the reference data may include image data of an ideal article, which is a reference for comparison, and additional data for comparing and inspecting image data of an ideal article and image data of an actual inspection target article.
- image data and the comparison inspection do not necessarily have to group additional data together, and those skilled in the art can separate the data into separate processes for the convenience of generation, processing, and management. You'll see that you can create and manage them as a whole and view them as baseline data.
- the procedure of generating reference data begins by instructing the first user to perform reference data generation with respect to the article inspection apparatus 100 according to an embodiment of the present invention (210). According to the reference data generation performing command, the article inspection apparatus starts a job for generating reference data.
- Generation of the reference data begins with a step 220 of generating a photographed image of a sample article corresponding to the good article.
- the sample article is transferred by the transfer unit 110 and, if necessary, after the photographed image is obtained by the measurement unit 120, the control unit ( 3D image data may be generated.
- the sample article may be one, or may be a plurality, and in the case of a plurality of sample items, each photographed image for several can be obtained.
- the ideal reference data it is also possible to perform the image measurement on the sample article several times and thereby to obtain the reference data.
- the reference data may be generated from the remaining images except for an image having a range outside of some deviation in the distribution of the measured images.
- the data measured from each sample article may be somewhat different from each other, but may be used as a criterion for determining the failure of the article to be inspected in inspecting all these articles. That is, if the reference data is obtained for a plurality of sample articles, all of them are used as reference data, and compared to any one of them, and if the quality of the inspected article is good, the inspected article may be compared with the reference data from another sample article. It can also be determined to be good without the need.
- setting 230 of additional data required as reference data may be continued.
- the setting of additional data 230 may first include displaying the reference data 231 to allow the user to identify and modify the reference data, and to establish a criterion for performing the inspection.
- the method may include setting a reference position for reference data (232), setting a feature for inspection (233), and setting the inspection area (234) and setting a masking area.
- Step 235 may be further included, and the method may further include setting up information 236 regarding defects or defects that may occur in the inspection object.
- the generated reference data may be displayed to allow a user to check an image through a display unit (not shown) of the article inspection apparatus 100 (231). Through the displayed reference data, the user can confirm the photographed image of the sample item currently obtained, and if necessary, make some modifications to the photographed image of the sample item.
- the user can correct the defects with reference data of the deleted sample article by performing appropriate image processing on the corresponding portions.
- the defect is automatically deleted or through proper image processing of the user. This may be displayed on the display unit of the inspection apparatus to enable deletion.
- a step 232 of setting a reference position for the photographed image of the sample article may be performed.
- the reference position corresponds to a reference point for comparing the reference data with the photographed image generated by measuring the inspection object, and the reference position may be one point or a specific shape of the photographed image.
- the reference position may be set by the user directly designating a specific shape or the like in the captured image displayed on the display unit through the input device.
- FIG. 5 is a plan view illustrating a method of setting features for inspecting articles in the process of generating reference data of FIG. 4.
- a specific shape 310 may be set in advance to designate a reference position, and the specific shape 310 may correspond to the feature object described above.
- the control unit 130 of the article inspection apparatus 100 may automatically set a reference position 320 for the corresponding portion by automatically searching for a portion having the corresponding shape in the photographed image of the sample article.
- a plurality of reference positions can be set for accurate comparison of the object to be inspected with the reference data.
- the previously described feature may be set for article inspection (233).
- the inspection of the article may be basically performed by comparing the entire photographed image of the reference data and the entire photographed image of the inspected article in pixel units. This can lead to excessive load on the configuration that performs the calculation.
- it may be an efficient inspection process to first inspect such a portion.
- the inspection may be performed only on the main features of the article to be inspected, and the features may correspond to these features.
- FIG. 6 is a plan view illustrating a form in which a reference position is designated to reference data in the process of generating reference data of FIG. 5, and the reference position is utilized when inspecting an article.
- the feature when there is an opening 410 disposed in a circular shape in a portion of the article to be inspected, the feature may be the position and the diameter of the center point of the opening.
- a configuration 420 such as a protrusion having a specific height and width should be present at a specific location of the article to be inspected, it may be information about this configuration.
- the information may be information about the two points and the distance between the two points.
- features may include features that maintain the quality of the inspection while improving the inspection speed of the article.
- the step of generating the reference data has the purpose of generating the reference data through the sample article when the reference data is not transmitted from the outside.
- the reference data to be transmitted from the outside may include so-called gerber information including not only the shape of the article but also the position, size, or arrangement direction of detailed parts to be disposed in the article.
- the user can designate the approximate shape and size of each part via the interface shown on the display and play the role of gerber by arranging the location and orientation of the part on the photographed image of the sample item displayed on the screen. Information can be generated.
- An inspection area may be set up for the article inspection (234). As described above, it is not desirable to perform the inspection of the article over the entire area in terms of time and resources, and thus to check whether the condition is met for the main features of the article. You can set the information about the same as described above.
- a masking area may be set up for the article inspection (235).
- the article inspection 235
- the area can be excluded from the comparison by masking the area.
- the type of failure and the allowance for it can be set for the article inspection (236).
- these types of failures can vary.
- the user's preference for the case of a mobile phone recently manufactured with a metal material is high.
- Many attempts have been made to manufacture the present invention, and as a method for manufacturing a case with a flexible design, a method of mass-producing parts through computer numerical control has been utilized.
- parts produced in the manufacturing process may have scratches, such as scratches or stamps, and defects in the product itself due to errors in the manufacturing process itself, such as over cut or under cut, The same defect may also occur.
- the rear case for a mobile phone which is an inspection target article for the purpose of the present invention
- defects such as scratches, stamps, undercuts, overcuts, and protrusions.
- the type of fault on the rear case for a mobile phone will not be limited to the items listed above, and if the item being inspected is anything other than the rear case for a mobile phone, some of the above defects will be faulty. It will be apparent to one skilled in the art that any defects other than those listed above, or otherwise, may be a criterion for determining a defective part.
- there are defects of this type in the article to be inspected but also to the extent that such defects can be judged not to affect the quality of the actual product, i.e. information such as tolerance for each type of defects Can be set.
- the information about the generated reference data may be displayed on the display unit of the inspection apparatus (240).
- the display unit may display additional information set for the 3D image and inspection of the reference data. The user may check whether the settings for performing the inspection are correctly made from the displayed information, and if necessary, the user may modify a corresponding information by inputting a command to correct specific information through the input device.
- the article inspection apparatus 100 may further include an input unit (not shown) that receives correction information for modifying the aforementioned feature.
- the input unit may employ a conventional input device such as a keyboard, a keypad, a touch pad, and the like, and for example, an interface such as a graphical user interface (GUI) may be provided in order for a user to easily perform input through the input unit.
- GUI graphical user interface
- the correction information may be generated based on the statistical processing result for the inspection result obtained by the inspection of the article.
- the statistical processing may be performed by the controller 130 or a separate processing device provided from the outside.
- the article inspection apparatus is to perform the inspection by using the sample data, even if the reference data which can be the basis of the comparison is not prepared in advance or cannot be prepared. It is possible.
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Abstract
Description
Claims (17)
- 물품의 적어도 일부에 대한 촬영 이미지를 획득하는 이미지 획득부; 및상기 물품의 촬영 이미지를 이용하여 상기 물품의 불량 여부를 판정하는 제어부를 포함하고,상기 제어부는,소정의 형상을 갖고 상기 물품에 형성된 제1 요소 및 상기 물품에 형성된 개구부, 함몰부 및 쓰루홀(through-hole) 중 적어도 하나를 포함하는 제2 요소 중 적어도 하나의 위치, 형상 및 크기 중 적어도 하나에 대한 제1 검사 및 상기 물품에 대한 이물질 부착, 스크래치(scratch) 및 표면 얼룩 중 적어도 하나에 대한 제2 검사를 수행하는 것을 특징으로 하는 물품 검사장치.
- 제1항에 있어서,상기 제어부는,상기 제1 요소 및 상기 제2 요소 중 적어도 하나에 대하여, 외부로부터 입력받거나 자동으로 추출된 상기 제1 요소 및 상기 제2 요소의 형상적 특성(shape-based characteristic)에 의해 정의되는 피처(feature)를 기초로 상기 촬영 이미지와 상기 촬영 이미지에 대응하는 상기 물품의 기준 데이터를 비교하여 상기 제1 검사를 수행하는 것을 특징으로 하는 물품 검사장치.
- 제2항에 있어서,상기 피처는 상기 제1 요소 및 상기 제2 요소 중 적어도 하나에 해당하는 특징객체(feature object)에 관한 정보 및 복수의 특징객체들 사이의 관계 정보 중 적어도 하나를 포함하는 것을 특징으로 하는 물품 검사장치.
- 제3항에 있어서,상기 특징객체에 관한 정보는 상기 특징객체의 크기(dimension) 정보, 상기 특징객체의 위치 정보 및 상기 특징객체의 기하학적 형상 정보 중 적어도 하나를 포함하고,상기 복수의 특징객체들 사이의 관계 정보는 상기 특징객체들 사이의 상대적 거리 정보, 상기 특징객체들 사이의 오프셋(offset) 정보 및 상기 특징객체들 사이의 기하학적 형상 정보 중 적어도 하나를 포함하는 것을 특징으로 하는 물품 검사장치.
- 제3항에 있어서,상기 제어부는,상기 특징객체에 대한 검사영역을 설정하고, 상기 특징객체에 대한 양품기준을 설정하는 것을 특징으로 하는 물품 검사장치.
- 제3항에 있어서,상기 제어부는,상기 특징객체들 사이의 상관관계를 설정하고, 상기 상관관계에 대한 양품기준을 설정하는 것을 특징으로 하는 물품 검사장치.
- 제1항에 있어서,상기 제어부는,상기 물품의 촬영 이미지로부터 획득된 높이, 밝기 및 컬러 중 적어도 하나를 기초로 상기 촬영 이미지와 상기 촬영 이미지에 대응하는 상기 물품의 기준 데이터를 비교하여 상기 제2 검사를 수행하는 것을 특징으로 하는 물품 검사장치.
- 제1항에 있어서,상기 제어부는,상기 물품에 형성된 개구부, 함몰부 및 쓰루홀 중 적어도 하나에 대응하는 영역을 마스킹 영역으로 설정하고, 상기 마스킹 영역에 대해서 상기 제1 검사 및 상기 제2 검사 중 상기 제1 검사만을 수행하는 것을 특징으로 하는 물품 검사장치.
- 제1항에 있어서,상기 물품은 최종 완제품의 부품에 해당하고,상기 제어부는,상기 물품이 다른 부품과의 조립에 의해 외부 노출로부터 가려지는 부분을 상기 제2 검사에서 제외하는 것을 특징으로 하는 물품 검사장치.
- 물품의 적어도 일부에 대한 촬영 이미지를 획득하는 이미지 획득부; 및상기 물품의 촬영 이미지를 이용하여 상기 물품의 불량 여부를 판정하는 제어부를 포함하고,상기 이미지 획득부는, 상기 물품에 대응하는 양품 물품을 촬영하여 양품촬영 이미지를 획득하고,상기 제어부는,상기 양품촬영 이미지를 이용하여 기준 데이터를 생성하고, 상기 기준 데이터와 상기 물품으로부터 획득된 상기 촬영 이미지를 비교하여 상기 물품을 검사하는 것을 특징으로 하는 물품 검사장치.
- 제10항에 있어서,상기 제어부는,소정의 형상을 갖고 상기 물품에 형성된 제1 요소 및 상기 물품에 형성된 개구부, 함몰부 및 쓰루홀 중 적어도 하나를 포함하는 제2 요소 중 적어도 하나의 위치, 형상 및 크기 중 적어도 하나에 대한 검사를 수행하되,상기 제1 요소 및 상기 제2 요소 중 적어도 하나에 대하여, 외부로부터 입력받거나 자동으로 추출된 상기 제1 요소 및 상기 제2 요소의 형상적 특성에 의해 정의되는 피처를 기초로 상기 촬영 이미지와 상기 촬영 이미지에 대응하는 상기 물품의 기준 데이터를 비교하여 검사를 수행하는 것을 특징으로 하는 물품 검사장치.
- 제11항에 있어서,상기 피처를 수정하기 위한 수정 정보를 입력받는 입력부를 더 포함하는 것을 특징으로 하는 물품 검사장치.
- 제12항에 있어서,상기 수정 정보는,상기 물품의 검사에 의해 획득된 검사 결과에 대한 통계적 처리 결과에 기초하여 생성되는 것을 특징으로 하는 물품 검사장치.
- 제10항에 있어서,상기 기준 데이터는 복수의 양품 물품들로부터 획득된 복수의 양품촬영 이미지들을 기초로 통계적 방법을 이용하여 생성된 것을 특징으로 하는 물품 검사장치.
- 제14항에 있어서,상기 기준 데이터는 상기 양품촬영 이미지들을 평균하여 생성된 것을 특징으로 하는 물품 검사장치.
- 제10항에 있어서,상기 제어부는,상기 물품을 검사하기 위한 불량의 유형 및 각 유형별 불량에 대한 허용치를 포함하는 불량 정보를 자동으로 또는 입력받아 설정하는 것을 특징으로 하는 물품 검사장치.
- 제16항에 있어서,상기 불량의 유형은,오버컷, 언더컷, 스크래치, 색상, 찍힘, 돌출, 평평함 중 적어도 하나를 포함하는 것을 특징으로 하는 물품 검사장치.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/741,027 US10713775B2 (en) | 2015-06-30 | 2016-06-30 | Item inspecting device |
| KR1020177030634A KR102567861B1 (ko) | 2015-06-30 | 2016-06-30 | 물품 검사장치 |
| CN201690000935.2U CN208678394U (zh) | 2015-06-30 | 2016-06-30 | 物品检查装置 |
| DE112016003012.6T DE112016003012T5 (de) | 2015-06-30 | 2016-06-30 | Gegenstandsprüfvorrichtung |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0093769 | 2015-06-30 | ||
| KR20150093731 | 2015-06-30 | ||
| KR20150093769 | 2015-06-30 | ||
| KR10-2015-0093731 | 2015-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2017003241A1 true WO2017003241A1 (ko) | 2017-01-05 |
Family
ID=57608653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2016/007081 Ceased WO2017003241A1 (ko) | 2015-06-30 | 2016-06-30 | 물품 검사장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10713775B2 (ko) |
| KR (1) | KR102567861B1 (ko) |
| CN (1) | CN208678394U (ko) |
| DE (2) | DE112016003012T5 (ko) |
| WO (1) | WO2017003241A1 (ko) |
Cited By (1)
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| US11498713B2 (en) * | 2019-06-26 | 2022-11-15 | Dongguan University Of Technology | Integrated device for detecting and packaging 3D printed phone case |
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| WO2018034057A1 (ja) * | 2016-08-18 | 2018-02-22 | 富士フイルム株式会社 | 欠陥検査装置、欠陥検査方法、およびプログラム |
| JP7062434B2 (ja) * | 2017-12-21 | 2022-05-06 | アンリツ株式会社 | 物品検査装置 |
| KR102148192B1 (ko) * | 2019-08-30 | 2020-08-26 | 이정석 | 빅데이터를 이용한 자동차 조향장치용 볼 조인트의 실시간 비전 검사방법 |
| KR102195501B1 (ko) * | 2019-08-30 | 2020-12-28 | 이정석 | 볼 조인트 회전촬영 및 확대 재촬영 기능을 갖는 자동차 조향장치용 볼 조인트의 불량설정등급을 위한 비전 검사장치 |
| KR102120128B1 (ko) * | 2019-09-11 | 2020-06-08 | 이성기 | 차량 제조 공정 모니터링 시스템 |
| KR102120127B1 (ko) * | 2019-09-11 | 2020-06-08 | 이성기 | 차량 제조 공정 모니터링 장치 및 방법 |
| US11361152B2 (en) * | 2020-07-20 | 2022-06-14 | Labelbox, Inc. | System and method for automated content labeling |
| US11836912B2 (en) * | 2020-09-22 | 2023-12-05 | Future Dial, Inc. | Grading cosmetic appearance of a test object based on multi-region determination of cosmetic defects |
| US11900581B2 (en) | 2020-09-22 | 2024-02-13 | Future Dial, Inc. | Cosmetic inspection system |
| US20250076211A1 (en) * | 2022-10-21 | 2025-03-06 | Kabushiki Kaisha Toshiba | Judgment apparatus |
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| KR101483956B1 (ko) * | 2013-07-02 | 2015-01-19 | 현대오토에버 주식회사 | 조립품질 검증장치 및 그 방법 |
| KR101457040B1 (ko) * | 2013-09-03 | 2014-10-31 | 주식회사 고영테크놀러지 | 3차원 기판검사장치의 그래픽 유저 인터페이스 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11498713B2 (en) * | 2019-06-26 | 2022-11-15 | Dongguan University Of Technology | Integrated device for detecting and packaging 3D printed phone case |
Also Published As
| Publication number | Publication date |
|---|---|
| CN208678394U (zh) | 2019-04-02 |
| US20190035066A1 (en) | 2019-01-31 |
| DE202016008484U1 (de) | 2018-02-20 |
| DE112016003012T5 (de) | 2018-03-15 |
| KR20180014685A (ko) | 2018-02-09 |
| US10713775B2 (en) | 2020-07-14 |
| KR102567861B1 (ko) | 2023-08-17 |
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