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WO2017043570A1 - Optical waveguide, and position sensor and optical circuit board using optical waveguide - Google Patents

Optical waveguide, and position sensor and optical circuit board using optical waveguide Download PDF

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Publication number
WO2017043570A1
WO2017043570A1 PCT/JP2016/076439 JP2016076439W WO2017043570A1 WO 2017043570 A1 WO2017043570 A1 WO 2017043570A1 JP 2016076439 W JP2016076439 W JP 2016076439W WO 2017043570 A1 WO2017043570 A1 WO 2017043570A1
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WO
WIPO (PCT)
Prior art keywords
width
core
curved portion
light
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2016/076439
Other languages
French (fr)
Japanese (ja)
Inventor
良真 吉岡
裕介 清水
柴田 直樹
直人 古根川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2016173429A external-priority patent/JP2017054113A/en
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to US15/757,482 priority Critical patent/US10288807B2/en
Priority to KR1020187006114A priority patent/KR102691678B1/en
Priority to CN201680050995.XA priority patent/CN107924026B/en
Publication of WO2017043570A1 publication Critical patent/WO2017043570A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045Light guides
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1228Tapered waveguides, e.g. integrated spot-size transformers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/138Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means

Definitions

  • the present invention provides an optical waveguide comprising a linear core for an optical path and a clad layer that sandwiches the core from above and below, and the core partially transmits light.
  • the first curved portion on the upstream side and the second curved portion on the downstream side bent in the opposite direction to the first curved portion are connected via a straight portion having a length of 0 (zero) mm or more and 30 mm or less.
  • One of the width of the outlet of the first curved portion and the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion.
  • the optical waveguide is a first gist.
  • the light is transmitted in the second curved portion as described above. Turned out to leak.
  • the length of the straight part exceeds 30 mm, it has been found that there is almost no light leakage at the second curved part. That is, in this case, the light that is biased toward the outer portion of the curve of the first curved portion repeats reflection on the side surface of the straight portion because the straight portion is sufficiently long, and near the exit of the straight portion. The bias is eliminated.
  • the width of the inlet of the second curved portion is narrower than the width of the core portion on the upstream side of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the first
  • the widths of the two curved portions are respectively constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, the width of the straight portion, The width of the second curved portion is equal, and the inlet of the straight portion is the portion of the outlet of the first curved portion corresponding to the outside of the bend of the first curved portion in the width direction.
  • the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion and the width of the second curved portion are ,
  • Each of the first curved portion is constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, and the width of the inlet of the straight portion is the first curved portion. Even when the exit width of the straight line portion is equal to the width of the second curved portion, the amount of light leaking in the second curved portion can be reduced, Light propagation can be made more appropriate. And in the position sensor of this invention, the light reception intensity
  • the width of the inlet of the second curved portion is narrower than the width of the core portion on the upstream side of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the first Even when the widths of the two curved portions are all constant and equal in the length direction, the amount of light leaking can be reduced in the second curved portion, and the light propagation in the core is made more appropriate. be able to. And in the position sensor of this invention, the light reception intensity
  • the width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the outlet of the first curved portion (B1: unit ⁇ m)
  • the radius of curvature (R1: unit mm) of the first curved portion, the refractive index (K1) of the core on which the S-shaped portion is formed, and the refractive index (K2) of the cladding layer covering the side surface of the core ) Also satisfies the following formula (3), the optical waveguide of the present invention can further reduce the amount of light that propagates in the second curved portion.
  • the width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion is the inlet of the first curved portion.
  • the width of the straight line portion and the width of the second curved portion are constant in the length direction, respectively, and the width of the outlet of the first curved portion, Even when the width of the straight line portion is equal to the width of the second curved portion, the amount of light leaking can be reduced in the second curved portion, and the light propagation in the core can be more appropriately performed. can do. Therefore, in the optical circuit board of the present invention, it is possible to suppress a decrease in the light receiving intensity of the light at the optical member. And proper operation
  • (A) is a plan view schematically showing a first embodiment of the position sensor of the present invention
  • (b) is an enlarged cross section schematically showing a central portion of the XX cross section of (a).
  • (c) is an enlarged plan view which shows typically the S-shaped part of the core currently formed in the part enclosed with the ellipse D1 of (a).
  • (A) to (f) are enlarged plan views schematically showing the crossing form of the cores of the lattice-like portion in the position sensor.
  • (A), (b) is an enlarged plan view which shows typically the course of the light in the cross
  • (A) is a plan view schematically showing a first embodiment of an optical circuit board of the present invention, and (b) is a sectional view schematically showing a YY section of (a).
  • (C) is an enlarged plan view schematically showing an S-shaped part of a core formed in a part surrounded by an ellipse D2 in (a).
  • FIG. 1A is a plan view showing a first embodiment of the position sensor of the present invention
  • FIG. 1B is an enlarged view of the central portion of the XX cross section of FIG. It is.
  • the position sensor of this embodiment is arranged in a rectangular sheet-shaped optical waveguide W and two rectangular corner portions of the optical waveguide W adjacent to each other (two upper corner portions in FIG. 1A).
  • Two light emitting elements 4 and two light receiving elements 5 arranged at the remaining two corner portions (the lower two corner portions in FIG. 1A) are provided.
  • a sheet-like core pattern member is formed on the surface of a rectangular sheet-like underclad layer 1, and the surface of the underclad layer 1 is covered with a rectangular sheet-like shape in a state of covering the core pattern member.
  • the over clad layer 3 is formed.
  • the core pattern member includes a lattice-shaped portion 2A formed by arranging a plurality of linear optical path cores 2 vertically and horizontally, one horizontal side and one vertical side of the outer peripheral portion of the lattice-shaped portion 2A [FIG. ) In the upper side and the right side, respectively, and face the first lateral side and the vertical side through the grid-like portion 2A, respectively, extending along the respective sides. It has a second outer peripheral core portion 2 ⁇ / b> C that is located on the other horizontal side and the other vertical side (the lower side and the left side in FIG. 1A) and extends along each other side.
  • the first outer core portion 2B is composed of one core 21, and the tip of each vertical core 2 (upper end in FIG. 1 (a)) and the tip of each horizontal core 2 (FIG. 1 (a)). ) Is optically connected to the right end].
  • each of the vertical cores 2 and the horizontal cores 2 is branched from the first outer peripheral core portion 2B.
  • 2 C of said 2nd outer periphery core parts are the core 22 extended from the rear end [lower end in FIG. 1 (a)] of each said vertical core 2, and the rear end [left end in FIG. 1 (a)] of each horizontal core 2.
  • the said light emitting element 4 is connected to the end surface of the said 1st outer periphery core part 2B
  • the said light receiving element 5 is connected to the end surface of the said 2nd outer periphery core part 2C.
  • the cores 2, 21, and 22 are indicated by chain lines, and the number of the cores 2 in the lattice-shaped portion 2 ⁇ / b> A and the cores 22 of the second outer peripheral core portion 2 ⁇ / b> C extending from the cores 2.
  • the numbers are abbreviated.
  • the arrow of the core 2 of Fig.1 (a) has shown the direction where light travels.
  • the width of the inlet of the S-shaped part (the inlet of the first curved part S1) is equal to the width B0 of the core part upstream of the S-shaped part.
  • the width of the first curved part S1 is gradually narrowed from the inlet of the first curved part S1 to the outlet, and the width of the outlet of the first curved part S1 is
  • the width B2 of the entrance of the two curved portions S2 is equal.
  • the width of the second curved portion S2 is constant in the length direction. Thereby, the width B2 of the entrance of the second curved portion S2 is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion.
  • the S-shaped part By setting the S-shaped part to a characteristic core width, leakage of the light L in the S-shaped part can be reduced (propagation loss of the light L can be reduced). . That is, in the S-shaped portion, the light L (indicated by a two-dot chain line) is biased to the outer portion of the curve of the first curved portion S1 on the upstream side, and the light L propagates to the second curved portion S2 on the downstream side. Then, the light L is propagated in the vicinity of the entrance of the second curved portion S2 while being biased toward the inside of the bend, and is concentrated on the side surface outside the bend of the second curved portion S2. .
  • the core width of the second curved portion S2 is narrowed by setting the characteristic core width of the S-shaped portion as described above, the light L that has reached the side surface has an incident angle. ⁇ becomes larger than the critical angle. Therefore, most of the light L is reflected by the side surface, and leakage of the light L can be reduced. Then, in the core 22 of the second outer peripheral core portion 2C, the light L reaches the light receiving element 5 in a state where leakage of the propagating light L is reduced.
  • the light emitted from the light emitting element 4 branches from the core 21 of the first outer peripheral core portion 2B to each core 2 of the lattice portion 2A.
  • the light receiving element 5 receives light through each core 22 of the second outer peripheral core portion 2C.
  • the surface portion of the over clad layer 3 corresponding to the lattice-like portion 2A of the core pattern member is an input region 3A.
  • Inputting characters or the like to the position sensor is performed by writing characters or the like in the input area 3A directly or via a resin film or paper with an input body such as a pen.
  • the input area 3A is pressed with a pen tip or the like, the core 2 of the pressed portion is deformed, and the light propagation amount of the core 2 is reduced.
  • the light receiving intensity of the light receiving element 5 is reduced, so that the pressing position (XY coordinate) can be detected.
  • the light reaches the light receiving element 5 in a state in which leakage of the propagating light is reduced.
  • the light receiving intensity of the light at the light receiving element 5 can be equalized in a state where it is not pressed. For this reason, when the input region 3A is pressed, a portion where the light receiving intensity of the light at the light receiving element 5 decreases can be clarified. As a result, the position sensor can accurately detect the pressed position in the input area 3A.
  • the amount of light that propagates can be further reduced, thereby further equalizing the light receiving intensity of the light at the light receiving element 5 and improving the accuracy of detecting the pressed position.
  • the width of the inlet of the second curved portion S2 (B2: unit ⁇ m), the radius of curvature of the second curved portion S2 (R2: unit mm), and the core formed with the S-shaped portion
  • the radius of curvature (R2) of the second curved portion S2 is the radius of curvature of the center line in the width direction of the second curved portion S2.
  • the light receiving element 5 since the light receiving element 5 is generally small, the light receiving element 5 has a narrow light receiving area connected to the core 22, and the number of the cores 22 connected to the light receiving area is limited.
  • the core width of the second curved portion S2 on the downstream side is narrow. If it is formed up to the tip of the core 22 with the reduced width, the number of cores 22 connected to the light receiving region can be increased. As a result, it is possible to increase the number of cores 2 of the grid-like portion 2A corresponding to the input area 3A, and it is possible to improve the position accuracy of the pressed position detected in the input area 3A.
  • the elastic modulus of the core 2 of the lattice-like portion 2A is set to be larger than the elastic modulus of the under cladding layer 1 and the over cladding layer 3.
  • the elastic modulus is set in the opposite direction, so that the periphery of the core 2 becomes hard, so that the optical waveguide having an area considerably larger than the area of the pen tip or the like that presses the input region 3A portion of the over clad layer 3 This is because the W portion is recessed and it is difficult to accurately detect the pressed position.
  • the value of the elastic modulus is a value of the tensile elastic modulus measured using a dynamic viscoelasticity measuring device RSAIII manufactured by TA Instruments.
  • each layer is, for example, in the range of 10 to 500 ⁇ m for the under cladding layer 1, in the range of 5 to 100 ⁇ m for the cores 2, 21, 22, and from the top surface of the over cladding layer 3 (from the top surfaces of the cores 2, 21, 22). Is set within a range of 1 to 200 ⁇ m.
  • a rubber sheet may be used as the under cladding layer 1 and the cores 2, 21, 22 may be formed on the rubber sheet.
  • the width of the connecting portion between the first curved portion S1 and the second curved portion S2 is narrowed to the outside of the bend of the first curved portion S1, it is the same as in the first embodiment.
  • the light L (indicated by a two-dot chain line) propagating through the first curved portion S1 is biased toward the outer portion of the curve, most of the light L is propagated to the second curved portion S2.
  • the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment,
  • the light receiving element 5 is reached in a state where leakage is reduced.
  • the position sensor of this embodiment also has the same operations and effects as the first embodiment.
  • connection part of 1st curve part S1 and the linear part T is formed in step shape, and the width
  • Other parts are the same as those in the third embodiment, and the same reference numerals are given to the same parts.
  • FIG. 5 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the fifth embodiment of the position sensor of the present invention.
  • the width of the first curved line portion S1 and the width of the straight line portion T are equal.
  • the entrance of the second curved portion S2 is disposed at a portion of the exit of the straight portion T corresponding to the outside of the bend of the first curved portion S1 in the width direction. That is, the connecting portion between the straight portion T and the second curved portion S2 is formed in a step shape, and the width of the connecting portion is narrowed to a portion corresponding to the outside of the bend of the first curved portion S1.
  • Other parts are the same as those in the fourth embodiment, and the same reference numerals are given to the same parts.
  • the light L (indicated by a two-dot chain line) that is biased and propagated to the outer portion of the bend of the first curved portion S1 is propagated to the portion corresponding to the outer portion even in the straight portion T as it is. Is done. Moreover, the light L propagating to the straight line portion T is propagated to the second curved line portion S2 with almost no reflection on the side surface of the straight line portion T, as in the fourth embodiment. Therefore, even if the width of the connecting portion between the straight portion T and the second curved portion S2 is narrowed to the outer portion of the straight portion T as described above, most of the light L propagating through the straight portion T is first. Propagated to the two curve portion S2.
  • FIG. 6 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the sixth embodiment of the position sensor of the present invention.
  • the width of the inlet of the straight portion T is equal to the width of the first curved portion S1
  • the width of the outlet of the straight portion T is the first width.
  • the width of the two curved portions S2 is equal. That is, the straight part T is formed in a tapered shape whose width gradually decreases from the entrance to the exit.
  • Other parts are the same as those in the fifth embodiment, and the same reference numerals are given to the same parts.
  • FIG. 7 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the seventh embodiment of the position sensor of the present invention.
  • the width of the first curved portion S1 is equal to the width of the second curved portion S2, and is narrowed. That is, the widths of the S-shaped portions are all constant and equal in the length direction, and are narrower than the width B0 of the core portion on the upstream side of the S-shaped portions.
  • Other parts are the same as those in the third embodiment, and the same reference numerals are given to the same parts.
  • the width of the S-shaped portion is constant and equal in the length direction, and is narrower than the width B0 of the core portion upstream of the S-shaped portion.
  • the light L (indicated by a two-dot chain line) propagating toward the outer portion of the curve of the first curved portion S1 is propagated as it is to the second curved portion S2.
  • the 2nd curve part S2 is the same as that of the said 1st Embodiment
  • the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment
  • the light receiving element 5 is reached in a state where leakage is reduced.
  • the position sensor of this embodiment also has the same operations and effects as the first embodiment.
  • FIG. 8 is an enlarged plan view (a diagram corresponding to FIG. 1C) showing the S-shaped portion in the eighth embodiment of the position sensor of the present invention.
  • the S-shaped portion in the seventh embodiment shown in FIG. 7, the S-shaped portion is such that the first curved portion S1 and the second curved portion S2 have a length exceeding 0 (zero) mm and 30 mm. It is formed in a connected state via the following straight line portion T.
  • the width of the straight line portion T is constant in the length direction and is equal to the width of the first curved portion S1 (the width of the second curved portion S2).
  • Other parts are the same as those in the seventh embodiment, and the same reference numerals are given to the same parts.
  • the leakage of the light L in the S-shaped portion is reduced by setting the characteristic core width (the propagation loss of the light L is reduced). )be able to. That is, in the S-shaped portion, as shown in FIG. 12C, the width B1 of the outlet of the first curved portion S1 on the upstream side is set to the width B0 of the core portion on the upstream side of the S-shaped portion.
  • the light L (indicated by a two-dot chain line) that propagates is propagated to the second curved line portion S2 on the downstream side in a state of being biased toward the outer portion of the bending of the first curved line portion S1 on the upstream side.
  • the light L propagates in the vicinity of the entrance of the second curved portion S2 while being biased toward the inside of the bend, and concentrates on the side surface outside the bend of the second curved portion S2.
  • the width B2 of the entrance of the second curved portion S2 is equal to and narrower than the width B1 of the exit of the first curved portion S1, and the width of the second curved portion S2 is constant in the length direction. Therefore, the incident angle ⁇ of the light L that has reached the outer side surface of the curve of the second curved portion S2 is larger than the critical angle. Therefore, most of the light L is reflected by the side surface, and leakage of the light L can be reduced.
  • the light L reaches the light receiving element 35 in a state where leakage of the propagating light L is reduced.
  • the width B1 of the outlet of the first curved portion S1 on the upstream side is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion. Accordingly, the propagating light L (indicated by a two-dot chain line) is propagated to the straight line portion T in a state of being biased toward the outer portion of the curve of the first curved line portion S1 on the upstream side. And since the length of the straight line portion T is as short as 30 mm or less, the light L propagated from the first curved line portion S1 to the straight line portion T is hardly reflected on the side surface of the straight line portion T, and remains biased.
  • FIG. 14 is a plan view showing a third embodiment of the optical circuit board of the present invention.
  • a large number of electronic components 50 such as an optical element 54, an IC chip interface, a resistor, a capacitor, and a coil are arranged on the surface of the insulating layer 61, and a plurality of the optical elements 54 are One end of the core 52 of the optical waveguide W3 is optically connected, and the other end of the core 52 is optically connected to the optical fiber connector 55. Since the core 52 is arranged and formed so as to avoid the electronic components 50 arranged in a distributed manner, a part thereof (a part surrounded by an ellipse D3 in FIG. 14) is formed in an S shape.
  • the width of the second curved portion S2 on the downstream side of the S-shaped portion is constant in the length direction. Since the light propagation loss at has a tendency to become lower as the width of the second curved portion S2 is narrower, it may be gradually reduced from the entrance to the exit of the second curved portion S2.
  • the optical waveguides W, W2, and W3 having the cores 22 and 32 having the S-shaped portions are used for the position sensor and the optical circuit board. It is good also as an optical waveguide of other uses.
  • Component a 60 parts by weight of an epoxy resin (Mitsubishi Chemical Corporation, YX7400).
  • Component b 40 parts by weight of epoxy resin (manufactured by Daicel, EHPE3150).
  • Component c 1 part by weight of a photoacid generator (manufactured by San Apro, CPI-101A).
  • Component d 100 parts by weight of epoxy resin (manufactured by Daicel, EHPE3150).
  • Component e 1 part by weight of a photoacid generator (manufactured by Adeka, SP-170).
  • Component f 50 parts by weight of ethyl lactate (manufactured by Wako Pure Chemical Industries, Ltd., solvent).
  • a light emitting element (XH85-S0603-2s, manufactured by Optowell) was connected to one end face of the core of the optical waveguide, and a light receiving element (s10226, manufactured by Hamamatsu Photonics) was connected to the other end face of the core. Then, the light propagation loss ( ⁇ ) is calculated from the light emission intensity (E) of the light emitting element and the light reception intensity (F) of the light receiving element according to the following formula (4), and is shown in Table 1 below. .
  • Example 1 has a smaller light propagation loss than Comparative Example 1. For this reason, the width B2 of the entrance of the second curved portion of the S-shaped portion is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion, thereby reducing the light propagation loss. It can be seen that this is effective. In addition, Example 1 satisfy

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

Provided are an optical waveguide capable of appropriate light propagation, and a position sensor and an optical circuit board using the optical waveguide. A core 32 of an optical waveguide W2 is partly formed into an S shape. In the S-shaped portion, a first curved line section S1 located on the upstream side in the light propagation direction is connected, via a straight line section having a length of 0-30 mm, to a second curved line section S2 which is located on the downstream side and of which the curving direction is opposite to that of the first curved line section S1. Further, either a width B1 of the exit of the first curved line section S1 or a width B2 of the entrance of the second curved line section is smaller than a width B0 of a portion of the core located on the upstream side of the S-shaped portion.

Description

光導波路およびそれを用いた位置センサならびに光回路基板Optical waveguide, position sensor using the same, and optical circuit board

 本発明は、光導波路およびそれを用いて押圧位置を光学的に検知する位置センサならびに上記光導波路を用いて光素子と光伝播する光回路基板に関するものである。 The present invention relates to an optical waveguide, a position sensor that optically detects a pressing position using the optical waveguide, and an optical circuit board that propagates light with an optical element using the optical waveguide.

 本出願人は、これまでに、光導波路を用いて押圧位置を光学的に検知する位置センサを提案している(例えば、特許文献1参照)。このものは、図17(a)に示すように、シート状のコアパターン部材を四角形シート状のアンダークラッド層11とオーバークラッド層13とで挟持した四角形シート状の光導波路W10を有している。上記コアパターン部材は、複数の線状の光路用のコア12を縦横に配置してなる格子状部分12Aと、この格子状部分12Aの外周部の一横辺および一縦辺に沿った状態で配置された第1外周コア部12Bと、上記格子状部分12Aを介して上記一横辺および一縦辺に対面する他横辺および他縦辺に沿った状態で配置された第2外周コア部12Cとを備えている。上記第1外周コア部12Bは、1本のコア26からなり、上記格子状部分12Aの縦横のコア12の先端は、その1本のコア26から分岐した状態になっている。上記第2外周コア部12Cは、上記格子状部分12Aの各コア12の後端から延設されたコア27からなっている。また、上記位置センサは、上記コアパターン部材の第1外周コア部12Bの端面に、発光素子14が接続され、第2外周コア部12Cの端面に、受光素子15が接続されている。 The present applicant has proposed a position sensor that optically detects a pressed position using an optical waveguide (see, for example, Patent Document 1). As shown in FIG. 17 (a), this has a rectangular sheet-shaped optical waveguide W10 in which a sheet-shaped core pattern member is sandwiched between a rectangular sheet-shaped under cladding layer 11 and an over cladding layer 13. . The core pattern member includes a lattice portion 12A formed by arranging a plurality of linear optical path cores 12 vertically and horizontally, and a state along one horizontal side and one vertical side of the outer periphery of the lattice portion 12A. The first outer peripheral core portion 12B arranged and the second outer peripheral core portion arranged along the other horizontal side and the other vertical side facing the one horizontal side and the one vertical side via the lattice-like portion 12A 12C. The first outer peripheral core portion 12 </ b> B includes a single core 26, and the leading ends of the vertical and horizontal cores 12 of the lattice-shaped portion 12 </ b> A are branched from the single core 26. The second outer peripheral core portion 12C includes a core 27 extending from the rear end of each core 12 of the lattice portion 12A. In the position sensor, the light emitting element 14 is connected to the end face of the first outer peripheral core portion 12B of the core pattern member, and the light receiving element 15 is connected to the end face of the second outer peripheral core portion 12C.

 このような光導波路を用いた位置センサでは、上記発光素子14から発光された光は、第1外周コア部12Bのコア26から格子状部分12Aの各コア12に分岐し第2外周コア部12Cの各コア27を経て、上記受光素子15で受光されるようになっている。そして、上記格子状部分12Aに対応するオーバークラッド層13の表面部分〔図17(a)の中央に一点鎖線で示す長方形部分〕が、位置センサの入力領域13Aとなっている。 In the position sensor using such an optical waveguide, the light emitted from the light emitting element 14 branches from the core 26 of the first outer peripheral core portion 12B to each core 12 of the lattice portion 12A, and the second outer peripheral core portion 12C. The light receiving element 15 receives light through each core 27. Then, the surface portion of the over clad layer 13 corresponding to the lattice portion 12A (rectangular portion indicated by a one-dot chain line in the center of FIG. 17A) is an input region 13A of the position sensor.

 上記位置センサへの入力は、上記入力領域13Aを、例えば入力用のペン先で押圧することにより行われる。それにより、その押圧部分のコア12が変形し、そのコア12の光伝播量が低下する。そのため、上記押圧部分のコア12では、上記受光素子15での光の受光強度が低下することから、上記押圧位置を検知できるようになっている。その位置検知を利用して、文字等の入力も検知できるようになっている。 The input to the position sensor is performed by pressing the input area 13A with, for example, an input pen tip. Thereby, the core 12 of the pressed portion is deformed, and the light propagation amount of the core 12 is reduced. Therefore, in the core 12 of the pressing portion, the light receiving intensity of the light receiving element 15 is reduced, so that the pressing position can be detected. Using this position detection, it is possible to detect input of characters and the like.

 一方、最近の電子機器等では、伝送情報量の増加に伴い、電気回路基板に加えて、光回路基板が採用されている。その一例を図18に示す。このものは、上記光回路基板が上記電気回路基板に積層された状態になっている。すなわち、上記電気回路基板80は、絶縁層81と、この絶縁層81の表面に形成された電気配線82とを備えている。上記光回路基板70は、上記絶縁層81の裏面(電気配線82の形成面と反対側の面)に積層された光導波路W20〔第1クラッド層71,コア(光路)72,第2クラッド層73〕と、上記絶縁層81の表面(電気配線82の形成面)のうち上記光導波路W20の両端部に対応する部分に実装された光素子(発光素子74および受光素子75)とを備えている(例えば、特許文献2参照)。この光回路基板70では、光導波路W20の両端部が、上記コア72の軸方向に対して45°傾斜した傾斜面に形成され、その傾斜面に位置するコア72の部分が光反射面72a,72bになっている。また、上記発光素子74および受光素子75に対応する上記絶縁層81の部分に、貫通孔81a,81bが形成され、上記発光素子74と一端部の光反射面72aとの間および上記受光素子75と他端部の光反射面72bとの間で、上記貫通孔81a,81bを通して光L(二点鎖線で示す)が伝播可能となっている(光接続されている)。 On the other hand, in recent electronic devices and the like, an optical circuit board is adopted in addition to an electric circuit board as the amount of transmission information increases. An example is shown in FIG. In this device, the optical circuit board is laminated on the electric circuit board. That is, the electric circuit board 80 includes an insulating layer 81 and electric wirings 82 formed on the surface of the insulating layer 81. The optical circuit board 70 includes an optical waveguide W20 [first cladding layer 71, core (optical path) 72, second cladding layer, which is laminated on the back surface of the insulating layer 81 (the surface opposite to the surface on which the electrical wiring 82 is formed). 73] and optical elements (light emitting element 74 and light receiving element 75) mounted on portions of the surface of the insulating layer 81 (formation surface of the electrical wiring 82) corresponding to both ends of the optical waveguide W20. (For example, refer to Patent Document 2). In this optical circuit board 70, both end portions of the optical waveguide W20 are formed on an inclined surface inclined by 45 ° with respect to the axial direction of the core 72, and the portions of the core 72 located on the inclined surface are light reflecting surfaces 72a, 72a, 72b. Further, through holes 81a and 81b are formed in the portion of the insulating layer 81 corresponding to the light emitting element 74 and the light receiving element 75, and between the light emitting element 74 and the light reflecting surface 72a at one end and the light receiving element 75. The light L (indicated by a two-dot chain line) can propagate through the through holes 81a and 81b (optically connected) between the light reflecting surface 72b at the other end.

 上記光回路基板70における光伝播は、つぎのようにして行われる。まず、発光素子74から発光された光Lは、上記絶縁層81の貫通孔81aを通過した後、第1クラッド層71の一端部(図18では右端部)を通り抜け、コア72の一端部の光反射面72aで反射して(光路を90°変換して)、コア72内を伝播する。そして、そのコア72内を伝播した光Lは、コア72の他端部(図18では左端部)の光反射面72bで反射し(光路を90°変換し)、第1クラッド層71の他端部を通り抜けて出射され、上記絶縁層81の貫通孔81bを通過した後、受光素子75で受光される。 The light propagation in the optical circuit board 70 is performed as follows. First, the light L emitted from the light emitting element 74 passes through the through hole 81 a of the insulating layer 81, passes through one end portion (the right end portion in FIG. 18) of the first cladding layer 71, and passes through one end portion of the core 72. The light is reflected by the light reflecting surface 72 a (the optical path is converted by 90 °) and propagates in the core 72. Then, the light L propagating through the core 72 is reflected by the light reflecting surface 72b at the other end portion (left end portion in FIG. 18) of the core 72 (the optical path is converted by 90 °). The light is emitted through the end portion, passes through the through hole 81 b of the insulating layer 81, and then received by the light receiving element 75.

 なお、上記光回路基板70の他端部では、上記受光素子75に代えて、光ファイバを用いる場合がある。この場合も、上記と同様にして、光伝播が行われる。 Note that an optical fiber may be used in place of the light receiving element 75 at the other end of the optical circuit board 70. Also in this case, light propagation is performed in the same manner as described above.

特開2014-197363号公報JP 2014-1973363 A 特開2014-29466号公報JP 2014-29466 A

 しかしながら、上記位置センサ〔図17(a)参照〕では、場合によって、押圧位置の検知が正確にできないことがあった。そこで、本発明者らがその原因を追究した結果、押圧位置の検知が正確にできないときは、入力領域13Aを押圧していない状態であっても、受光素子15での光の受光強度が低くなる部分があることがわかった。 However, in some cases, the position sensor [see FIG. 17A] cannot accurately detect the pressed position. Therefore, as a result of the investigation of the cause by the present inventors, when the pressed position cannot be detected accurately, the light receiving intensity of the light receiving element 15 is low even when the input region 13A is not pressed. I found that there is a part.

 このように入力領域13Aを押圧していなくても受光素子15での光の受光強度が低くなる部分がある状態で、文字等を入力すると、その入力による押圧部分でも、受光素子15での光の受光強度が低くなるため、上記押圧位置の検知が正確にできないのである。この点で上記光導波路を用いた位置センサは改善の余地がある。 In this way, even if the input region 13A is not pressed and there is a portion where the light receiving intensity of the light receiving element 15 is low, when a character or the like is input, the light received by the light receiving element 15 is also pressed by the input. Therefore, the pressed position cannot be detected accurately. In this respect, the position sensor using the optical waveguide has room for improvement.

 また、上記光回路基板70(図18参照)でも、場合によって、受光素子75での光の受光強度が低くなることがあった。その受光素子75に代えて、光ファイバを用いた場合は、その光ファイバへの光伝播量が少なくなることがあった。このような場合、適正な光伝播(情報の伝送)ができないため、その光回路基板70を組み込む電子機器等が適正に作動しないのである。 Also, in the optical circuit board 70 (see FIG. 18), the light receiving intensity of the light at the light receiving element 75 may be lowered in some cases. When an optical fiber is used instead of the light receiving element 75, the amount of light propagation to the optical fiber may be reduced. In such a case, since proper light propagation (information transmission) cannot be performed, an electronic device incorporating the optical circuit board 70 does not operate properly.

 本発明は、このような事情に鑑みなされたもので、適正な光伝播が可能な光導波路およびそれを用いた位置センサならびに光回路基板の提供をその目的とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide an optical waveguide capable of appropriate light propagation, a position sensor using the optical waveguide, and an optical circuit board.

 上記の目的を達成するため、本発明は、光路用の線状のコアと、このコアを上下から挟持するクラッド層とを備えた光導波路であって、上記コアが部分的に、光伝播の上流側の第1曲線部と、その第1曲線部と逆方向に曲がっている下流側の第2曲線部とが、長さ0(零)mm以上30mm以下の直線部を介して、接続されたS字状に形成され、上記第1曲線部の出口の幅および上記第2曲線部の入口の幅の一方が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっている光導波路を第1の要旨とする。 In order to achieve the above object, the present invention provides an optical waveguide comprising a linear core for an optical path and a clad layer that sandwiches the core from above and below, and the core partially transmits light. The first curved portion on the upstream side and the second curved portion on the downstream side bent in the opposite direction to the first curved portion are connected via a straight portion having a length of 0 (zero) mm or more and 30 mm or less. One of the width of the outlet of the first curved portion and the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion. The optical waveguide is a first gist.

 また、本発明は、複数の線状のコアからなる格子状部分と、この格子状部分の外周部の一横辺および一縦辺にそれぞれ位置し、上記格子状部分の各縦コアの先端および各横コアの先端に光接続する第1外周コア部と、上記格子状部分を介して上記一横辺および一縦辺にそれぞれ対面する他横辺および他縦辺に位置し、その各他辺に沿って延び、上記格子状部分の各縦コアの後端および各横コアの後端から延設されている第2外周コア部とを備えたシート状のコアパターン部材と、このコアパターン部材を上下から挟持するシート状のクラッド層とを有するシート状の光導波路と、この光導波路の上記第1外周コア部の端面に接続された発光素子と、上記第2外周コア部の端面に接続された受光素子とを備えた位置センサであって、上記第2外周コア部の少なくとも一部分に対応する光導波路の部分が、上記第1の要旨の光導波路であり、上記発光素子で発光された光が、上記第1外周コア部から上記格子状部分および上記第2外周コア部を経て、上記受光素子で受光され、上記コアパターン部材の格子状部分に対応する位置センサの表面部分を入力領域とし、その入力領域における押圧位置を、その押圧により変化したコアの光伝播量によって特定する位置センサを第2の要旨とする。 Further, the present invention is a lattice-shaped portion composed of a plurality of linear cores, and is positioned on one horizontal side and one vertical side of the outer peripheral portion of the lattice-shaped portion. A first outer peripheral core portion optically connected to the tip of each horizontal core, and the other horizontal side and the other vertical side respectively facing the one horizontal side and the one vertical side through the lattice-like portion; A sheet-like core pattern member including a second outer peripheral core portion extending along the rear end of each of the lattice-shaped portions and extending from the rear end of each vertical core and the rear end of each horizontal core, and the core pattern member A sheet-like optical waveguide having a sheet-like cladding layer sandwiching the substrate from above and below, a light emitting element connected to the end face of the first outer peripheral core portion of the optical waveguide, and an end face of the second outer peripheral core portion A position sensor including the second light receiving element, wherein the second sensor The portion of the optical waveguide corresponding to at least a part of the peripheral core portion is the optical waveguide according to the first aspect, and light emitted from the light emitting element is transmitted from the first outer peripheral core portion to the lattice-shaped portion and the first portion. 2 The light is received by the light receiving element through the outer peripheral core portion, and the surface portion of the position sensor corresponding to the lattice portion of the core pattern member is used as an input region, and the pressing position in the input region is changed by the pressing. The position sensor specified by the amount of light propagation is a second gist.

 さらに、本発明は、上記第1の要旨の光導波路と、この光導波路のコアの端部と光接続された光部材とを備えている光回路基板を第3の要旨とする。 Furthermore, the third aspect of the present invention is an optical circuit board including the optical waveguide according to the first aspect and an optical member optically connected to the end of the core of the optical waveguide.

 なお、本発明において、S字状とは、上記のように、第1曲線部と第2曲線部とが、長さ0(零)mm以上30mm以下の直線部を介して、接続された部分であり、逆S字状も含む意味である。また、第1曲線部と第2曲線部との間の直線部の長さが0(零)mmであるとは、その直線部がなく、第1曲線部と第2曲線部とが直接接続されている意味である。そして、上記第1曲線部および第2曲線部とは、僅かでも曲がっているものを含む意味である。 In the present invention, the S-shape is a portion in which the first curved portion and the second curved portion are connected via a straight portion having a length of 0 (zero) mm or more and 30 mm or less as described above. And also includes an inverted S-shape. In addition, if the length of the straight line portion between the first curved portion and the second curved portion is 0 (zero) mm, there is no straight portion, and the first curved portion and the second curved portion are directly connected. That is the meaning. And the said 1st curve part and the 2nd curve part are the meanings which include what is bent even a little.

 また、本発明の第3の要旨の光回路基板において、光部材とは、発光,受光または光伝播等を担うものであり、例えば、光電変換を行う光素子(発光素子,受光素子)、光伝播を担う光ファイバ、その光ファイバの接続に用いる光ファイバ接続用コネクタ等があげられる。 In the optical circuit board according to the third aspect of the present invention, the optical member is responsible for light emission, light reception, light propagation, and the like. For example, an optical element that performs photoelectric conversion (light-emitting element, light-receiving element), light Examples thereof include an optical fiber responsible for propagation, an optical fiber connector used for connecting the optical fiber, and the like.

 本発明者らは、位置センサにおいて、入力領域を押圧していない状態で、受光素子での光の受光強度が均等になっているようにすべく、まず、図17(a)に示す従来技術において、入力領域13Aを押圧していない状態で、受光素子15での光の受光強度が低くなる部分が発生する原因を追究した。その結果、格子状部分12Aと受光素子15との間の第2外周コア部12CのうちS字状のコア部分で、光の漏れが発生しており、それが原因であることが判明した。ここで、上記第2外周コア部12Cの端面に接続される上記受光素子15は、シート状の光導波路W10の周縁部に配置されるが、その受光素子15の配置位置により、その受光素子15の近傍部分〔図17(a)の楕円D0で囲む部分〕では、上記第2外周コア部12Cの少なくとも一部分のコア27が、部分的に上記S字状に形成される場合があるのである。 In order to make the light receiving intensity of the light receiving elements uniform in the position sensor in a state where the input area is not pressed in the position sensor, first, the prior art shown in FIG. In FIG. 5, the reason why a portion where the light receiving intensity of the light receiving element 15 is lowered is generated in a state where the input region 13A is not pressed is investigated. As a result, it was found that light leakage occurred in the S-shaped core portion of the second outer peripheral core portion 12C between the lattice-shaped portion 12A and the light receiving element 15, and this was the cause. Here, the light receiving element 15 connected to the end face of the second outer peripheral core portion 12C is arranged at the peripheral edge of the sheet-like optical waveguide W10. Depending on the arrangement position of the light receiving element 15, the light receiving element 15 is arranged. In the vicinity (the portion surrounded by the ellipse D0 in FIG. 17A), at least a part of the core 27 of the second outer peripheral core portion 12C may be partially formed in the S shape.

 そこで、本発明者らは、上記コア27のS字状の部分で光が漏れる原因を追究した。その追究の過程で、上記S字状の部分では、上流側の第1曲線部S11の曲がりの外側部分に光Lが偏ることが判明した〔図17(b)参照〕。一方、上記位置センサでは、コア12,26,27の幅が広いほど、そのコア12,26,27の光伝播量が多くなり、その伝播する光の、入力領域13Aの押圧による低下量も多くなることから、押圧位置の検知が容易になる。そのため、従来の位置センサでは、コア12,26,27の幅が広く形成されている。そして、図17(b)に示すように、上記S字状の部分において、コア27の幅が広い場合、上記のように上流側の第1曲線部S11の曲がりの外側部分に偏った光L(二点鎖線で示す)は、下流側の第2曲線部S12に伝播されると、その第2曲線部S12の入口付近では、その曲がりの内側に偏って伝播することとなり、その第2曲線部S12の曲がりの外側の側面に集中して到達する。ここで、上記のようにコア27の幅が広いと、上記側面に到達した光Lは、入射角θが臨界角よりも小さくなることから、その殆どがその側面で反射することなく、その側面を透過する(コア27から漏れる)ことが判明した。すなわち、上記S字状の部分での光Lの漏れの原因は、そのS字状の部分で、コア27の幅が広いことにあることが判明した。 Therefore, the present inventors investigated the cause of light leakage at the S-shaped part of the core 27. In the process of the pursuit, it was found that the light L is biased toward the outer portion of the curve of the first curved portion S11 on the upstream side in the S-shaped portion [see FIG. 17B]. On the other hand, in the position sensor, as the width of the cores 12, 26, 27 increases, the amount of light propagation of the cores 12, 26, 27 increases, and the amount of decrease in the propagating light due to pressing of the input region 13A increases. Therefore, the detection of the pressed position is facilitated. Therefore, in the conventional position sensor, the widths of the cores 12, 26 and 27 are formed wide. Then, as shown in FIG. 17B, when the core 27 is wide in the S-shaped portion, the light L biased toward the outer portion of the bending of the first curved portion S11 on the upstream side as described above. (Indicated by a two-dot chain line) propagates to the second curved line portion S12 on the downstream side, and propagates in the vicinity of the entrance of the second curved line portion S12 so as to be biased toward the inside of the curve. Concentrate on the outer side surface of the bend of the part S12. Here, when the width of the core 27 is wide as described above, the light L reaching the side surface has an incident angle θ smaller than the critical angle. It has been found that it penetrates (is leaked from the core 27). That is, it has been found that the cause of the leakage of the light L at the S-shaped part is that the width of the core 27 is wide at the S-shaped part.

 また、光回路基板でも、上記位置センサと同様の課題があることが判明した。すなわち、従来の光回路基板おいて、受光素子での光の受光強度が低くなる場合は、コアが部分的に上記S字状に形成されており、そのS字状の部分で、光の漏れが発生しているのである。そして、従来の光回路基板でも、コアの幅が広いほど、そのコアの光伝播量(伝送される情報量)が多くなることから、コアの幅が広く形成されており、このことが原因で、上記S字状の部分で、光Lが漏れることが判明した〔図17(b)参照〕。 Also, it has been found that the optical circuit board has the same problem as the position sensor. That is, in the conventional optical circuit board, when the light receiving intensity of the light receiving element is low, the core is partially formed in the S shape, and light leakage occurs in the S shape portion. Is occurring. Even in the conventional optical circuit board, the wider the core width, the greater the amount of light propagation (the amount of information transmitted) of the core. Therefore, the core width is widened. It was found that the light L leaked at the S-shaped part [see FIG. 17 (b)].

 また、第1曲線部と第2曲線部とが、直線部を介して、接続されている部分では、その直線部の長さが30mm以下の場合、上記と同様に、第2曲線部で光が漏れることが判明した。一方、上記直線部の長さが30mmを超える場合は、第2曲線部での光の漏れが殆どないことが判明した。すなわち、この場合、第1曲線部の曲がりの外側部分に偏った光は、上記直線部が充分に長いため、その直線部の側面で反射を繰り返し、その直線部の出口付近では、上記光の偏りが解消される。そのため、第2曲線部の入口付近でも、その曲がりの内側への光の偏りが殆どなく、その第2曲線部の曲がりの外側の側面への光の集中的な到達も殆どない。それにより、第2曲線部での光の漏れも殆どないのである。 Further, in the portion where the first curved portion and the second curved portion are connected via the straight portion, when the length of the straight portion is 30 mm or less, the light is transmitted in the second curved portion as described above. Turned out to leak. On the other hand, when the length of the straight part exceeds 30 mm, it has been found that there is almost no light leakage at the second curved part. That is, in this case, the light that is biased toward the outer portion of the curve of the first curved portion repeats reflection on the side surface of the straight portion because the straight portion is sufficiently long, and near the exit of the straight portion. The bias is eliminated. For this reason, even near the entrance of the second curved portion, there is almost no deviation of the light to the inside of the bend, and there is almost no concentrated light reaching the side surface outside the bend of the second curved portion. Thereby, there is almost no light leakage at the second curved portion.

 本発明者らは、このような知見を得て、上記S字状の部分で、下流側の第2曲線部のコアの幅を狭くすることを着想し、上記第1曲線部の出口の幅および上記第2曲線部の入口の幅の一方を、上記S字状の部分より上流側のコア部分の幅よりも狭くした。その結果、上記第2曲線部では、その第2曲線部の曲がりの外側の側面に到達した光は、入射角が臨界角よりも大きくなり、その殆どがその側面で反射し、光の漏れを低減できることを突き止めた。すなわち、上記位置センサにおいて、格子状部分と受光素子との間の第2外周コア部のコアが部分的にS字状に形成されていても、そのS字状の部分を上記のように特定の幅に設定することにより、その第2外周コア部のコアでは、伝播する光の漏れを低減させた状態で、その光が受光素子に到達することを突き止めた。それにより、入力領域を押圧していない状態で、受光素子での光の受光強度が均等になることを見出し、本発明に到達した。 The present inventors have obtained such knowledge and conceived of narrowing the core width of the second curved portion on the downstream side in the S-shaped portion, and the width of the outlet of the first curved portion. And one of the width | variety of the inlet_port | entrance of the said 2nd curve part was made narrower than the width | variety of the core part upstream from the said S-shaped part. As a result, in the second curved portion, the light that has reached the side surface outside the bend of the second curved portion has an incident angle larger than the critical angle, and most of the light is reflected on the side surface, thereby leaking light. I found out that it can be reduced. That is, in the position sensor, even if the core of the second outer peripheral core portion between the lattice-shaped portion and the light receiving element is partially formed in an S shape, the S shape portion is specified as described above. In the core of the second outer peripheral core portion, it was determined that the light reaches the light receiving element in a state where leakage of the propagating light is reduced. As a result, the inventors have found that the light receiving intensity of the light receiving element is equal in a state where the input region is not pressed, and have reached the present invention.

 また、上記光回路基板でも、上記位置センサと同様にして、コアのS字状の部分からの光の漏れを解決することができた。すなわち、上記光回路基板において、コアが部分的にS字状に形成されていても、そのS字状の部分を上記のように特定の幅に設定することにより、そのS字状の部分では、伝播する光の漏れを低減できることを突き止めた。それにより、受光素子での光の受光強度の低下または光ファイバへの光伝播量の低下が抑制されることを見出し、本発明に到達した。 Also, the optical circuit board was able to solve the light leakage from the S-shaped part of the core in the same manner as the position sensor. That is, even if the core is partially formed in an S-shape in the optical circuit board, by setting the S-shaped portion to a specific width as described above, the S-shaped portion It was found that leakage of propagating light can be reduced. As a result, it has been found that a decrease in the light receiving intensity of light at the light receiving element or a decrease in the amount of light propagation to the optical fiber is suppressed, and the present invention has been achieved.

 そして、上記位置センサおよび上記光回路基板に用いる光導波路だけでなく、光電気混載基板等の他の用途の光導波路においても、コアが部分的に上記S字状に形成されているものは、光伝播がより適正になされることを見出した。 And not only in the optical waveguide used for the position sensor and the optical circuit board, but also in an optical waveguide for other uses such as an opto-electric hybrid board, the core is partially formed in the S shape, It has been found that light propagation is made more appropriate.

 なお、上記位置センサにおいて「受光素子での光の受光強度が均等」とは、完全な均等を含むだけでなく、位置センサの入力領域における押圧位置を正確に検知できれば、その検知できる程度の略均等を含む意味である。 In the above position sensor, “the intensity of light received by the light receiving element is equal” not only includes complete equality, but is also an abbreviation that can be detected if the pressed position in the input area of the position sensor can be accurately detected. It is meant to include equality.

 本発明の光導波路は、コアが部分的にS字状に形成されており、そのS字状の部分は、上流側の第1曲線部の出口の幅および下流側の第2曲線部の入口の幅の一方が、そのS字状の部分より上流側のコア部分の幅よりも狭くなっている。そのため、第1曲線部を伝播する光が、第2曲線部の曲がりの外側の側面に到達した際に、入射角が臨界角よりも大きくなり、その殆どがその側面で反射し、光の漏れを低減できる。すなわち、本発明の光導波路は、コアでの光伝播をより適正にすることができる。 In the optical waveguide of the present invention, the core is partially formed in an S-shape, and the S-shaped portion includes the width of the outlet of the first curved portion on the upstream side and the inlet of the second curved portion on the downstream side. Is narrower than the width of the core portion on the upstream side of the S-shaped portion. Therefore, when the light propagating through the first curved portion reaches the outer side surface of the second curved portion, the incident angle becomes larger than the critical angle, most of which is reflected from the side surface, and light leakage occurs. Can be reduced. That is, the optical waveguide of the present invention can make light propagation in the core more appropriate.

 本発明の位置センサは、格子状部分と受光素子との間の第2外周コア部の少なくとも一部分に対応する光導波路の部分が、本発明の上記光導波路になっている。そのため、その光導波路の部分のコアでは、第1曲線部を伝播する光が、第2曲線部の曲がりの外側の側面に到達した際に、入射角が臨界角よりも大きくなり、その殆どがその側面で反射し、光の漏れを低減できる。すなわち、上記第2外周コア部のコアでは、伝播する光の漏れを低減させた状態で、その光が受光素子に到達し、入力領域を押圧していない状態で、受光素子での光の受光強度を均等にすることができる。そのため、入力領域を押圧した際に、受光素子での光の受光強度が低下する部分を明確にすることができる。その結果、本発明の位置センサは、入力領域における押圧位置を正確に検知することができる。 In the position sensor of the present invention, a portion of the optical waveguide corresponding to at least a part of the second outer peripheral core portion between the lattice portion and the light receiving element is the optical waveguide of the present invention. Therefore, in the core of the optical waveguide portion, when the light propagating through the first curved portion reaches the outer side surface of the second curved portion, the incident angle becomes larger than the critical angle, most of which Reflected by the side surface, light leakage can be reduced. That is, in the core of the second outer peripheral core portion, light reception by the light receiving element is performed in a state in which leakage of propagating light is reduced and the light reaches the light receiving element and does not press the input region. The strength can be made uniform. Therefore, when the input area is pressed, it is possible to clarify the portion where the light receiving intensity of the light receiving element decreases. As a result, the position sensor of the present invention can accurately detect the pressed position in the input area.

 本発明の光回路基板は、光部材と光接続する光導波路が、本発明の上記光導波路になっている。そのため、その光導波路のコアのS字状の部分では、第1曲線部を伝播する光が、第2曲線部の曲がりの外側の側面に到達した際に、入射角が臨界角よりも大きくなり、その殆どがその側面で反射し、光の漏れを低減できる。すなわち、上記光導波路のコアの端部から上記光部材が受光する場合において、上記光導波路のコアでは、伝播する光の漏れを低減できるため、上記光部材での光の受光強度の低下を抑制することができる。そして、コアに上記S字状の部分を形成することにより、コアの配置設計の自由度が向上し、光部材の配置に合わせてコアを配置設計することができる。また、本発明の光回路基板を組み込んだ電子機器等の適正な作動を、確実に実現することができる。 In the optical circuit board of the present invention, the optical waveguide optically connected to the optical member is the optical waveguide of the present invention. Therefore, in the S-shaped portion of the core of the optical waveguide, the incident angle becomes larger than the critical angle when the light propagating through the first curved portion reaches the outer side surface of the second curved portion. Most of the light is reflected from the side surface, and light leakage can be reduced. That is, when the optical member receives light from the end of the core of the optical waveguide, the core of the optical waveguide can reduce the leakage of propagating light, thereby suppressing the decrease in the light receiving intensity of the optical member. can do. Then, by forming the S-shaped part in the core, the degree of freedom in the core layout design is improved, and the core can be designed in accordance with the optical member layout. In addition, proper operation of an electronic device or the like incorporating the optical circuit board of the present invention can be reliably realized.

 特に、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第2曲線部の入口の幅(B2:単位μm)と、その第2曲線部の曲率半径(R2:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(1)を満たしている場合には、本発明の光導波路では、上記第2曲線部において、伝播する光の漏れる量をより減少させることができる。そのため、本発明の位置センサでは、受光素子での光の受光強度をより均等化することができ、押圧位置検知の正確性を向上させることができる。なお、上記第2曲線部の曲率半径(R2)は、その第2曲線部の幅方向の中心線の曲率半径である。 In particular, the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the inlet of the second curved portion (B2: unit μm) The radius of curvature (R2: unit mm) of the second curved portion, the refractive index (K1) of the core on which the S-shaped portion is formed, and the refractive index (K2) of the cladding layer covering the side surface of the core ) Satisfies the following formula (1), the amount of light leaking through the second curved portion can be further reduced in the optical waveguide of the present invention. Therefore, in the position sensor of the present invention, the light receiving intensity of the light at the light receiving element can be more equalized, and the accuracy of detecting the pressed position can be improved. The radius of curvature (R2) of the second curved portion is the radius of curvature of the center line in the width direction of the second curved portion.

Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004

 さらに、上記第2曲線部の入口の幅(B2:単位μm)と、その第2曲線部の曲率半径(R2:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(2)を満たしている場合には、本発明の光導波路では、上記第2曲線部において、伝播する光の漏れる量をさらに減少させることができる。そのため、本発明の位置センサでは、受光素子での光の受光強度をさらに均等化することができ、押圧位置検知の正確性をさらに向上させることができる。 Furthermore, the entrance width of the second curved portion (B2: unit μm), the radius of curvature of the second curved portion (R2: unit mm), and the refractive index of the core on which the S-shaped portion is formed ( When the relationship between K1) and the refractive index (K2) of the clad layer covering the side surface of the core satisfies the following equation (2), the second curved portion in the optical waveguide of the present invention , The amount of light leaking can be further reduced. Therefore, in the position sensor of the present invention, the light receiving intensity of the light at the light receiving element can be further equalized, and the accuracy of detecting the pressed position can be further improved.

Figure JPOXMLDOC01-appb-M000005
Figure JPOXMLDOC01-appb-M000005

 また、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅が、その第1曲線部の入口から出口にいくにつれて徐々に狭くなっており、上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の出口の幅と、上記直線部の幅と、上記第2曲線部の幅とが等しくなっている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そして、本発明の位置センサでは、受光素子での光の受光強度を均等化することができ、押圧位置を正確に検知することができる。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion is the inlet of the first curved portion. The width of the straight line portion and the width of the second curved portion are constant in the length direction, respectively, and the width of the outlet of the first curved portion, Even when the width of the straight line portion is equal to the width of the second curved portion, the amount of light leaking can be reduced in the second curved portion, and the light propagation in the core can be more appropriately performed. can do. And in the position sensor of this invention, the light reception intensity | strength in a light receiving element can be equalized, and a press position can be detected correctly.

 また、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記直線部の幅と、上記第2曲線部の幅とが等しくなっており、上記直線部の入口が、上記第1曲線部の出口のうち、その幅方向おいて、その第1曲線部の曲がりの外側に対応する部分に配置されている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そして、本発明の位置センサでは、受光素子での光の受光強度を均等化することができ、押圧位置を正確に検知することができる。 The width of the inlet of the second curved portion is narrower than the width of the core portion on the upstream side of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the first The widths of the two curved portions are respectively constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, the width of the straight portion, The width of the second curved portion is equal, and the inlet of the straight portion is the portion of the outlet of the first curved portion corresponding to the outside of the bend of the first curved portion in the width direction. Even in the case of the arrangement, in the second curved portion, the amount of light that propagates can be reduced, and light propagation in the core can be made more appropriate. And in the position sensor of this invention, the light reception intensity | strength in a light receiving element can be equalized, and a press position can be detected correctly.

 また、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記第1曲線部の幅と、上記直線部の幅とが等しくなっており、上記第2曲線部の入口が、上記直線部の出口のうち、その幅方向おいて、上記第1曲線部の曲がりの外側に対応する部分に配置されている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そして、本発明の位置センサでは、受光素子での光の受光強度を均等化することができ、押圧位置を正確に検知することができる。 The width of the inlet of the second curved portion is narrower than the width of the core portion on the upstream side of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the first The widths of the two curved portions are respectively constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, and the width of the first curved portion is , The width of the straight line portion is equal, and the inlet of the second curved portion is the portion of the outlet of the straight portion corresponding to the outside of the bend of the first curved portion in the width direction. Even in the case of the arrangement, in the second curved portion, the amount of light that propagates can be reduced, and light propagation in the core can be made more appropriate. And in the position sensor of this invention, the light reception intensity | strength in a light receiving element can be equalized, and a press position can be detected correctly.

 また、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記直線部の入口の幅が、上記第1曲線部の幅と等しく、その直線部の出口の幅が、上記第2曲線部の幅と等しくなっている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そして、本発明の位置センサでは、受光素子での光の受光強度を均等化することができ、押圧位置を正確に検知することができる。 In addition, the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion and the width of the second curved portion are , Each of the first curved portion is constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, and the width of the inlet of the straight portion is the first curved portion. Even when the exit width of the straight line portion is equal to the width of the second curved portion, the amount of light leaking in the second curved portion can be reduced, Light propagation can be made more appropriate. And in the position sensor of this invention, the light reception intensity | strength in a light receiving element can be equalized, and a press position can be detected correctly.

 また、上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、全て、長さ方向に一定で等しくなっている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そして、本発明の位置センサでは、受光素子での光の受光強度を均等化することができ、押圧位置を正確に検知することができる。 The width of the inlet of the second curved portion is narrower than the width of the core portion on the upstream side of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the first Even when the widths of the two curved portions are all constant and equal in the length direction, the amount of light leaking can be reduced in the second curved portion, and the light propagation in the core is made more appropriate. be able to. And in the position sensor of this invention, the light reception intensity | strength in a light receiving element can be equalized, and a press position can be detected correctly.

 一方、上記第1曲線部の出口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の出口の幅(B1:単位μm)と、その第1曲線部の曲率半径(R1:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(3)を満たしている場合にも、本発明の光導波路では、上記第2曲線部において、伝播する光の漏れる量をより減少させることができる。そのため、本発明の光回路基板では、上記光導波路のコアの端部から前記光部材が受光する場合において、その光部材での光の受光強度の低下をより抑制することができる。そして、その光回路基板を組み込んだ電子機器等の適正作動実現の確実性を向上させることができる。なお、上記第1曲線部の曲率半径(R1)は、その第1曲線部の幅方向の中心線の曲率半径である。 On the other hand, the width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the outlet of the first curved portion (B1: unit μm) The radius of curvature (R1: unit mm) of the first curved portion, the refractive index (K1) of the core on which the S-shaped portion is formed, and the refractive index (K2) of the cladding layer covering the side surface of the core ) Also satisfies the following formula (3), the optical waveguide of the present invention can further reduce the amount of light that propagates in the second curved portion. Therefore, in the optical circuit board of the present invention, when the optical member receives light from the end portion of the core of the optical waveguide, it is possible to further suppress a decrease in light reception intensity of the optical member. In addition, it is possible to improve the certainty of realizing proper operation of an electronic device or the like incorporating the optical circuit board. The radius of curvature (R1) of the first curved portion is the radius of curvature of the center line in the width direction of the first curved portion.

Figure JPOXMLDOC01-appb-M000006
Figure JPOXMLDOC01-appb-M000006

 また、上記第1曲線部の出口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅が、その第1曲線部の入口から出口にいくにつれて徐々に狭くなっており、上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の出口の幅と、上記直線部の幅と、上記第2曲線部の幅とが等しくなっている場合にも、上記第2曲線部において、伝播する光の漏れる量を低減でき、コアでの光伝播をより適正にすることができる。そのため、本発明の光回路基板では、上記光部材での光の受光強度の低下を抑制することができる。そして、その光回路基板を組み込んだ電子機器等の適正な作動を、確実に実現することができる。 In addition, the width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion is the inlet of the first curved portion. The width of the straight line portion and the width of the second curved portion are constant in the length direction, respectively, and the width of the outlet of the first curved portion, Even when the width of the straight line portion is equal to the width of the second curved portion, the amount of light leaking can be reduced in the second curved portion, and the light propagation in the core can be more appropriately performed. can do. Therefore, in the optical circuit board of the present invention, it is possible to suppress a decrease in the light receiving intensity of the light at the optical member. And proper operation | movement of the electronic device etc. which incorporated the optical circuit board can be implement | achieved reliably.

(a)は、本発明の位置センサの第1の実施の形態を模式的に示す平面図であり、(b)は、(a)のX-X断面の中央部を模式的に示す拡大断面図であり、(c)は、(a)の楕円D1で囲む部分に形成されているコアのS字状の部分を模式的に示す拡大平面図である。(A) is a plan view schematically showing a first embodiment of the position sensor of the present invention, and (b) is an enlarged cross section schematically showing a central portion of the XX cross section of (a). It is a figure and (c) is an enlarged plan view which shows typically the S-shaped part of the core currently formed in the part enclosed with the ellipse D1 of (a). 本発明の位置センサの第2の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 2nd Embodiment of the position sensor of this invention. 本発明の位置センサの第3の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 3rd Embodiment of the position sensor of this invention. 本発明の位置センサの第4の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 4th Embodiment of the position sensor of this invention. 本発明の位置センサの第5の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 5th Embodiment of the position sensor of this invention. 本発明の位置センサの第6の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 6th Embodiment of the position sensor of this invention. 本発明の位置センサの第7の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 7th Embodiment of the position sensor of this invention. 本発明の位置センサの第8の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 8th Embodiment of the position sensor of this invention. 上記位置センサを構成する光導波路の変形例を模式的に示す、その光導波路の中央部の拡大断面図である。It is an expanded sectional view of the central part of the optical waveguide which shows typically the modification of the optical waveguide which constitutes the above-mentioned position sensor. (a)~(f)は、上記位置センサにおける格子状部分のコアの交差形態を模式的に示す拡大平面図である。(A) to (f) are enlarged plan views schematically showing the crossing form of the cores of the lattice-like portion in the position sensor. (a),(b)は、上記格子状部分のコアの交差部における光の進路を模式的に示す拡大平面図である。(A), (b) is an enlarged plan view which shows typically the course of the light in the cross | intersection part of the core of the said lattice-shaped part. (a)は、本発明の光回路基板の第1の実施の形態を模式的に示す平面図であり、(b)は、(a)のY-Y断面を模式的に示す断面図であり、(c)は、(a)の楕円D2で囲む部分に形成されているコアのS字状の部分を模式的に示す拡大平面図である。(A) is a plan view schematically showing a first embodiment of an optical circuit board of the present invention, and (b) is a sectional view schematically showing a YY section of (a). (C) is an enlarged plan view schematically showing an S-shaped part of a core formed in a part surrounded by an ellipse D2 in (a). 本発明の光回路基板の第2の実施の形態における上記S字状の部分を模式的に示す拡大平面図である。It is an enlarged plan view which shows typically the said S-shaped part in 2nd Embodiment of the optical circuit board of this invention. 本発明の光回路基板の第3の実施の形態を模式的に示す平面図である。It is a top view which shows typically 3rd Embodiment of the optical circuit board of this invention. (a),(b)は、上記光回路基板を構成する光導波路の変形例を模式的に示す、その光導波路の拡大断面図である。(A), (b) is an expanded sectional view of the optical waveguide which shows typically the modification of the optical waveguide which constitutes the above-mentioned optical circuit board. 実験例1,2の結果を示すグラフである。It is a graph which shows the result of Experimental example 1 and 2. (a)は、従来の位置センサを模式的に示す平面図であり、(b)は、(a)の上記S字状の部分を模式的に示す拡大平面図である。(A) is a top view which shows typically the conventional position sensor, (b) is an enlarged plan view which shows typically the said S-shaped part of (a). 従来の光回路基板を模式的に示す縦断面図である。It is a longitudinal cross-sectional view which shows the conventional optical circuit board typically.

 つぎに、本発明の実施の形態を図面にもとづいて詳しく説明する。 Next, embodiments of the present invention will be described in detail with reference to the drawings.

 図1(a)は、本発明の位置センサの第1の実施の形態を示す平面図であり、図1(b)は、図1(a)のX-X断面の中央部を拡大した図である。この実施の形態の位置センサは、四角形シート状の光導波路Wと、この光導波路Wの四角形状の隣り合う二つの角部分〔図1(a)では上側の二つの角部分〕に配置された2個の発光素子4と、残りの二つの角部分〔図1(a)では下側の二つの角部分〕に配置された2個の受光素子5とを備えている。 FIG. 1A is a plan view showing a first embodiment of the position sensor of the present invention, and FIG. 1B is an enlarged view of the central portion of the XX cross section of FIG. It is. The position sensor of this embodiment is arranged in a rectangular sheet-shaped optical waveguide W and two rectangular corner portions of the optical waveguide W adjacent to each other (two upper corner portions in FIG. 1A). Two light emitting elements 4 and two light receiving elements 5 arranged at the remaining two corner portions (the lower two corner portions in FIG. 1A) are provided.

 上記光導波路Wは、四角形シート状のアンダークラッド層1の表面に、シート状のコアパターン部材が形成され、そのコアパターン部材を被覆した状態で、上記アンダークラッド層1の表面に、四角形シート状のオーバークラッド層3が形成されたものとなっている。上記コアパターン部材は、複数の線状の光路用のコア2を縦横に配置してなる格子状部分2Aと、この格子状部分2Aの外周部の一横辺および一縦辺〔図1(a)では上側の辺および右側の辺〕にそれぞれ位置し、その各辺に沿って延びる第1外周コア部2Bと、上記格子状部分2Aを介して上記一横辺および一縦辺にそれぞれ対面する他横辺および他縦辺〔図1(a)では下側の辺および左側の辺〕に位置し、その各他辺に沿って延びる第2外周コア部2Cとを備えている。 In the optical waveguide W, a sheet-like core pattern member is formed on the surface of a rectangular sheet-like underclad layer 1, and the surface of the underclad layer 1 is covered with a rectangular sheet-like shape in a state of covering the core pattern member. The over clad layer 3 is formed. The core pattern member includes a lattice-shaped portion 2A formed by arranging a plurality of linear optical path cores 2 vertically and horizontally, one horizontal side and one vertical side of the outer peripheral portion of the lattice-shaped portion 2A [FIG. ) In the upper side and the right side, respectively, and face the first lateral side and the vertical side through the grid-like portion 2A, respectively, extending along the respective sides. It has a second outer peripheral core portion 2 </ b> C that is located on the other horizontal side and the other vertical side (the lower side and the left side in FIG. 1A) and extends along each other side.

 上記第1外周コア部2Bは、1本のコア21からなり、上記格子状部分2Aの各縦コア2の先端〔図1(a)では上端〕および各横コア2の先端〔図1(a)では右端〕に光接続している。これにより、それら各縦コア2および各横コア2は、上記第1外周コア部2Bから分岐された状態になっている。上記第2外周コア部2Cは、上記各縦コア2の後端〔図1(a)では下端〕および各横コア2の後端〔図1(a)では左端〕から延設されたコア22からなっている。そして、上記第1外周コア部2Bの端面に、上記発光素子4が接続され、上記第2外周コア部2Cの端面に、上記受光素子5が接続されている。 The first outer core portion 2B is composed of one core 21, and the tip of each vertical core 2 (upper end in FIG. 1 (a)) and the tip of each horizontal core 2 (FIG. 1 (a)). ) Is optically connected to the right end]. Thereby, each of the vertical cores 2 and the horizontal cores 2 is branched from the first outer peripheral core portion 2B. 2 C of said 2nd outer periphery core parts are the core 22 extended from the rear end [lower end in FIG. 1 (a)] of each said vertical core 2, and the rear end [left end in FIG. 1 (a)] of each horizontal core 2. As shown in FIG. It is made up of. And the said light emitting element 4 is connected to the end surface of the said 1st outer periphery core part 2B, and the said light receiving element 5 is connected to the end surface of the said 2nd outer periphery core part 2C.

 なお、図1(a)では、コア2,21,22を鎖線で示しており、格子状部分2Aのコア2の数およびそれらコア2から延設された第2外周コア部2Cのコア22の数を略して図示している。また、図1(a)のコア2の矢印は、光の進む方向を示している。 In FIG. 1A, the cores 2, 21, and 22 are indicated by chain lines, and the number of the cores 2 in the lattice-shaped portion 2 </ b> A and the cores 22 of the second outer peripheral core portion 2 </ b> C extending from the cores 2. The numbers are abbreviated. Moreover, the arrow of the core 2 of Fig.1 (a) has shown the direction where light travels.

 この実施の形態の位置センサの特徴は、図1(c)に拡大平面図で示すように、上記第2外周コア部2Cの一部のコア22の、受光素子5の近傍部分〔図1(a)の楕円D1で囲む部分〕に形成されるS字状の部分のコア幅にある。すなわち、図1(c)に、上記第2外周コア部2Cの複数のコア22のうちの1本のコア22のS字状の部分を、拡大した平面図で示している。そのS字状の部分は、この実施の形態では、光伝播の上流側の第1曲線部S1と、その第1曲線部S1と逆方向に曲がっている下流側の第2曲線部S2とが、連続して接続された状態で形成されている。そして、上記S字状の部分の入口(第1曲線部S1の入口)の幅は、そのS字状の部分より上流側のコア部分の幅B0と等しくなっている。上記S字状の部分では、第1曲線部S1の幅が、その第1曲線部S1の入口から出口にいくにつれて徐々に狭くなっており、その第1曲線部S1の出口の幅は、第2曲線部S2の入口の幅B2とが等しくなっている。その第2曲線部S2の幅は、長さ方向に一定になっている。これにより、第2曲線部S2の入口の幅B2が、上記S字状の部分より上流側のコア部分の幅B0よりも狭くなっている。 As shown in the enlarged plan view of FIG. 1 (c), the position sensor of this embodiment is characterized by the vicinity of the light receiving element 5 of the core 22 that is a part of the second outer peripheral core 2C [FIG. a) the core width of the S-shaped part formed in the part surrounded by the ellipse D1]. That is, FIG. 1C shows an enlarged plan view of an S-shaped portion of one core 22 among the plurality of cores 22 of the second outer peripheral core portion 2C. In this embodiment, the S-shaped portion includes a first curved portion S1 on the upstream side of light propagation and a second curved portion S2 on the downstream side that is bent in the opposite direction to the first curved portion S1. , Formed in a continuously connected state. The width of the inlet of the S-shaped part (the inlet of the first curved part S1) is equal to the width B0 of the core part upstream of the S-shaped part. In the S-shaped part, the width of the first curved part S1 is gradually narrowed from the inlet of the first curved part S1 to the outlet, and the width of the outlet of the first curved part S1 is The width B2 of the entrance of the two curved portions S2 is equal. The width of the second curved portion S2 is constant in the length direction. Thereby, the width B2 of the entrance of the second curved portion S2 is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion.

 このように、上記S字状の部分を特徴的なコア幅に設定することにより、そのS字状の部分での光Lの漏れを低減する(光Lの伝播損失を低くする)ことができる。すなわち、上記S字状の部分では、上流側の第1曲線部S1の曲がりの外側部分に光L(二点鎖線で示す)が偏り、その光Lが下流側の第2曲線部S2に伝播されると、その光Lは、上記第2曲線部S2の入口付近では、その曲がりの内側に偏って伝播することとなり、その第2曲線部S2の曲がりの外側の側面に集中して到達する。ここで、上記のような、S字状の部分の特徴的なコア幅の設定により、上記第2曲線部S2のコア幅が狭くなっているため、上記側面に到達した光Lは、入射角θが臨界角よりも大きくなる。そのため、その光Lの殆どが上記側面で反射し、光Lの漏れを低減できるのである。そして、上記第2外周コア部2Cのコア22では、伝播する光Lの漏れを低減させた状態で、その光Lが受光素子5に到達する。 Thus, by setting the S-shaped part to a characteristic core width, leakage of the light L in the S-shaped part can be reduced (propagation loss of the light L can be reduced). . That is, in the S-shaped portion, the light L (indicated by a two-dot chain line) is biased to the outer portion of the curve of the first curved portion S1 on the upstream side, and the light L propagates to the second curved portion S2 on the downstream side. Then, the light L is propagated in the vicinity of the entrance of the second curved portion S2 while being biased toward the inside of the bend, and is concentrated on the side surface outside the bend of the second curved portion S2. . Here, since the core width of the second curved portion S2 is narrowed by setting the characteristic core width of the S-shaped portion as described above, the light L that has reached the side surface has an incident angle. θ becomes larger than the critical angle. Therefore, most of the light L is reflected by the side surface, and leakage of the light L can be reduced. Then, in the core 22 of the second outer peripheral core portion 2C, the light L reaches the light receiving element 5 in a state where leakage of the propagating light L is reduced.

 このような位置センサでは、図1(a)に示すように、上記発光素子4から発光された光は、第1外周コア部2Bのコア21から格子状部分2Aの各コア2に分岐し上記第2外周コア部2Cの各コア22を経て、上記受光素子5で受光されるようになっている。そして、上記コアパターン部材の格子状部分2Aに対応するオーバークラッド層3の表面部分〔図1(a)の中央に一点鎖線で示す長方形部分〕が、入力領域3Aとなっている。 In such a position sensor, as shown in FIG. 1 (a), the light emitted from the light emitting element 4 branches from the core 21 of the first outer peripheral core portion 2B to each core 2 of the lattice portion 2A. The light receiving element 5 receives light through each core 22 of the second outer peripheral core portion 2C. The surface portion of the over clad layer 3 corresponding to the lattice-like portion 2A of the core pattern member [rectangular portion indicated by a one-dot chain line in the center of FIG. 1A] is an input region 3A.

 上記位置センサへの文字等の入力は、上記入力領域3Aに、直接または樹脂フィルムもしくは紙等を介して、ペン等の入力体で文字等を書くことにより行われる。このとき、上記入力領域3Aがペン先等で押圧され、その押圧部分のコア2が変形し、そのコア2の光伝播量が低下する。そのため、上記押圧部分のコア2では、上記受光素子5での光の受光強度が低下することから、上記押圧位置(XY座標)を検知できるようになっている。 Inputting characters or the like to the position sensor is performed by writing characters or the like in the input area 3A directly or via a resin film or paper with an input body such as a pen. At this time, the input area 3A is pressed with a pen tip or the like, the core 2 of the pressed portion is deformed, and the light propagation amount of the core 2 is reduced. For this reason, in the core 2 of the pressing portion, the light receiving intensity of the light receiving element 5 is reduced, so that the pressing position (XY coordinate) can be detected.

 ここで、先に述べたように、上記第2外周コア部2Cのコア22では、伝播する光の漏れを低減させた状態で、その光が受光素子5に到達することから、入力領域3Aを押圧していない状態で、受光素子5での光の受光強度を均等にすることができる。そのため、入力領域3Aを押圧した際に、受光素子5での光の受光強度が低下する部分を明確にすることができる。その結果、上記位置センサは、入力領域3Aにおける押圧位置を正確に検知することができる。 Here, as described above, in the core 22 of the second outer peripheral core portion 2C, the light reaches the light receiving element 5 in a state in which leakage of the propagating light is reduced. The light receiving intensity of the light at the light receiving element 5 can be equalized in a state where it is not pressed. For this reason, when the input region 3A is pressed, a portion where the light receiving intensity of the light at the light receiving element 5 decreases can be clarified. As a result, the position sensor can accurately detect the pressed position in the input area 3A.

 さらに、上記第2曲線部S2において、伝播する光の漏れる量をより減少させることができ、それにより、受光素子5での光の受光強度をより均等化して、押圧位置検知の正確性を向上させる観点から、上記第2曲線部S2の入口の幅(B2:単位μm)と、その第2曲線部S2の曲率半径(R2:単位mm)と、上記S字状の部分が形成されたコア22の屈折率(K1)と、そのコア22の側面を被覆するオーバークラッド層3の屈折率(K2)との関係が、下記の式(1)を満たすように設定することが好ましい。より好ましくは、下記の式(2)を満たすように設定することである。なお、上記第2曲線部S2の曲率半径(R2)は、その第2曲線部S2の幅方向の中心線の曲率半径である。 Further, in the second curved line portion S2, the amount of light that propagates can be further reduced, thereby further equalizing the light receiving intensity of the light at the light receiving element 5 and improving the accuracy of detecting the pressed position. In view of the above, the width of the inlet of the second curved portion S2 (B2: unit μm), the radius of curvature of the second curved portion S2 (R2: unit mm), and the core formed with the S-shaped portion It is preferable to set the relationship between the refractive index (K1) of 22 and the refractive index (K2) of the over cladding layer 3 covering the side surface of the core 22 so as to satisfy the following formula (1). More preferably, it is set to satisfy the following formula (2). The radius of curvature (R2) of the second curved portion S2 is the radius of curvature of the center line in the width direction of the second curved portion S2.

Figure JPOXMLDOC01-appb-M000007
Figure JPOXMLDOC01-appb-M000007

Figure JPOXMLDOC01-appb-M000008
Figure JPOXMLDOC01-appb-M000008

 ところで、受光素子5は、一般に、小さいものであるため、その受光素子5では、上記コア22と接続する受光領域が狭く、その受光領域に接続される上記コア22の本数に限度がある。上記位置センサでは、先に述べたように、受光素子5の近傍部分に形成されるS字状の部分において、下流側の第2曲線部S2のコア幅が狭くなっていることから、その狭くなった幅のまま、上記コア22の先端まで形成すると、上記受光領域に接続されるコア22の本数を増加させることが可能となる。その結果、入力領域3Aに対応する格子状部分2Aのコア2の本数を増加させることが可能となり、その入力領域3Aにおいて検知する押圧位置の位置精度を向上させることが可能となる。 Incidentally, since the light receiving element 5 is generally small, the light receiving element 5 has a narrow light receiving area connected to the core 22, and the number of the cores 22 connected to the light receiving area is limited. In the above position sensor, as described above, in the S-shaped portion formed in the vicinity of the light receiving element 5, the core width of the second curved portion S2 on the downstream side is narrow. If it is formed up to the tip of the core 22 with the reduced width, the number of cores 22 connected to the light receiving region can be increased. As a result, it is possible to increase the number of cores 2 of the grid-like portion 2A corresponding to the input area 3A, and it is possible to improve the position accuracy of the pressed position detected in the input area 3A.

 また、上記光導波路Wでは、格子状部分2Aのコア2の弾性率がアンダークラッド層1およびオーバークラッド層3の弾性率よりも大きく設定されていることが好ましい。その理由は、弾性率の設定がその逆であると、コア2の周辺が硬くなるため、オーバークラッド層3の入力領域3Aの部分を押圧するペン先等の面積よりもかなり広い面積の光導波路Wの部分が凹み、押圧位置を正確に検知し難くなる傾向にあるからである。そこで、各弾性率としては、例えば、コア2の弾性率は、1GPa以上10GPa以下の範囲内に設定され、オーバークラッド層3の弾性率は、0.1GPa以上10GPa未満の範囲内に設定され、アンダークラッド層1の弾性率は、0.1MPa以上1GPa以下の範囲内に設定されることが好ましい。この場合、コア2の弾性率が大きいため、小さな押圧力では、コア2はつぶれない(コア2の断面積は小さくならない)ものの、押圧により光導波路Wが凹むため、その凹んだ部分に対応するコア2の曲がった部分から光の漏れ(散乱)が発生し、そのコア2では、受光素子5での光の受光強度が低下することから、押圧位置を検知することができる。なお、上記弾性率の値は、ティー・エイ・インスツルメント社製の動的粘弾性測定装置RSAIII を用いて測定した引張弾性率の値である。 In the optical waveguide W, it is preferable that the elastic modulus of the core 2 of the lattice-like portion 2A is set to be larger than the elastic modulus of the under cladding layer 1 and the over cladding layer 3. The reason is that if the elastic modulus is set in the opposite direction, the periphery of the core 2 becomes hard, so that the optical waveguide having an area considerably larger than the area of the pen tip or the like that presses the input region 3A portion of the over clad layer 3 This is because the W portion is recessed and it is difficult to accurately detect the pressed position. Therefore, as each elastic modulus, for example, the elastic modulus of the core 2 is set within a range of 1 GPa or more and 10 GPa or less, and the elastic modulus of the over clad layer 3 is set within a range of 0.1 GPa or more and less than 10 GPa, The elastic modulus of the under cladding layer 1 is preferably set within a range of 0.1 MPa to 1 GPa. In this case, since the elastic modulus of the core 2 is large, the core 2 is not crushed by a small pressing force (the cross-sectional area of the core 2 is not reduced), but the optical waveguide W is recessed by the pressing, and therefore corresponds to the recessed portion. Light leakage (scattering) occurs from the bent portion of the core 2, and the light receiving intensity of the light at the light receiving element 5 decreases in the core 2, so that the pressed position can be detected. The value of the elastic modulus is a value of the tensile elastic modulus measured using a dynamic viscoelasticity measuring device RSAIII manufactured by TA Instruments.

 上記アンダークラッド層1,コア2,21,22およびオーバークラッド層3の形成材料としては、感光性樹脂,熱硬化性樹脂等があげられ、その形成材料に応じた製法により、光導波路Wを作製することができる。また、コア2,21,22の屈折率は、アンダークラッド層1およびオーバークラッド層3の屈折率よりも大きく設定されている。その屈折率および上記弾性率の調整は、例えば、各形成材料の種類の選択や組成比率を調整して行うことができる。そして、各層の厚みは、例えば、アンダークラッド層1が10~500μmの範囲内、コア2,21,22が5~100μmの範囲内、オーバークラッド層3(コア2,21,22の頂面からの厚み)が1~200μmの範囲内に設定される。なお、上記アンダークラッド層1として、ゴムシートを用い、そのゴムシート上にコア2,21,22を形成するようにしてもよい。 Examples of the material for forming the under cladding layer 1, the cores 2, 21, 22 and the over cladding layer 3 include a photosensitive resin and a thermosetting resin. The optical waveguide W is manufactured by a manufacturing method corresponding to the forming material. can do. The refractive indexes of the cores 2, 21, and 22 are set to be larger than the refractive indexes of the under cladding layer 1 and the over cladding layer 3. The refractive index and the elastic modulus can be adjusted by, for example, selecting the type of each forming material and adjusting the composition ratio. The thickness of each layer is, for example, in the range of 10 to 500 μm for the under cladding layer 1, in the range of 5 to 100 μm for the cores 2, 21, 22, and from the top surface of the over cladding layer 3 (from the top surfaces of the cores 2, 21, 22). Is set within a range of 1 to 200 μm. A rubber sheet may be used as the under cladding layer 1 and the cores 2, 21, 22 may be formed on the rubber sheet.

 図2は、本発明の位置センサの第2の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図1(a)~(c)に示す上記第1の実施の形態において、S字状の部分が、第1曲線部S1と第2曲線部S2とが、長さ0(零)mmを超え30mm以下の直線部Tを介して、接続された状態で形成されている。その直線部Tの幅は、長さ方向に一定であり、第1曲線部S1の出口の幅(第2曲線部S2の入口の幅B2)と等しくなっている。それ以外の部分は、上記第1の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 2 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the second embodiment of the position sensor of the present invention. In this embodiment, in the first embodiment shown in FIGS. 1A to 1C, the S-shaped portion has the first curved portion S1 and the second curved portion S2, and the length is zero. It is formed in a connected state via a straight portion T that exceeds (zero) mm and is 30 mm or less. The width of the straight line portion T is constant in the length direction, and is equal to the width of the outlet of the first curved portion S1 (the width B2 of the inlet of the second curved portion S2). Other parts are the same as those of the first embodiment, and the same reference numerals are given to the same parts.

 この実施の形態では、第1曲線部S1と第2曲線部S2との間に直線部Tが形成されているものの、その直線部Tの長さが30mm以下と短いため、第1曲線部S1から直線部Tに伝播した光L(二点鎖線で示す)は、その直線部Tの側面で殆ど反射することなく、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 In this embodiment, although the straight part T is formed between the first curved part S1 and the second curved part S2, the length of the straight part T is as short as 30 mm or less, so the first curved part S1. The light L (shown by a two-dot chain line) propagated from the straight line T to the straight line part T is propagated to the second curved line part S2 with almost no reflection on the side surface of the straight line part T. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図3は、本発明の位置センサの第3の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図1(a)~(c)に示す上記第1の実施の形態において、上記S字状の部分の第1曲線部S1の幅が、長さ方向に一定であり、そのS字状の部分より上流側のコア部分の幅B0と等しくなっている。第2曲線部S2は、上記第1の実施の形態と同様であり、幅が長さ方向に一定であり、その第2曲線部S2の入口の幅B2が、上記S字状の部分より上流側のコア部分の幅B0よりも狭くなっている。上記第2曲線部S2の入口は、上記第1曲線部S1の出口のうち、その幅方向おいて、その第1曲線部S1の曲がりの外側に対応する部分に配置されている。すなわち、上記S字状の部分は、第1曲線部S1と第2曲線部S2との接続部が段状に形成され、その接続部の幅が、第1曲線部S1の曲がりの外側(第2曲線部S2の曲がりの内側)に一気に狭まっている。それ以外の部分は、上記第1の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 3 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the third embodiment of the position sensor of the present invention. In this embodiment, in the first embodiment shown in FIGS. 1A to 1C, the width of the first curved portion S1 of the S-shaped portion is constant in the length direction, It is equal to the width B0 of the core portion upstream from the S-shaped portion. The second curved portion S2 is the same as the first embodiment, the width is constant in the length direction, and the width B2 of the inlet of the second curved portion S2 is upstream of the S-shaped portion. It is narrower than the width B0 of the core portion on the side. The inlet of the second curved portion S2 is disposed in a portion of the outlet of the first curved portion S1 corresponding to the outside of the bend of the first curved portion S1 in the width direction. That is, the S-shaped portion is formed in a stepped shape at the connecting portion between the first curved portion S1 and the second curved portion S2, and the width of the connecting portion is outside the bend of the first curved portion S1 (first It is narrowed at a stretch to the inside of the bend of the two curved portion S2. Other parts are the same as those of the first embodiment, and the same reference numerals are given to the same parts.

 この実施の形態では、第1曲線部S1と第2曲線部S2との接続部の幅が、第1曲線部S1の曲がりの外側に一気に狭まっているものの、上記第1の実施の形態と同様に、第1曲線部S1を伝播する光L(二点鎖線で示す)は、その曲がりの外側部分に偏ることから、その光Lの殆どが、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 In this embodiment, although the width of the connecting portion between the first curved portion S1 and the second curved portion S2 is narrowed to the outside of the bend of the first curved portion S1, it is the same as in the first embodiment. Moreover, since the light L (indicated by a two-dot chain line) propagating through the first curved portion S1 is biased toward the outer portion of the curve, most of the light L is propagated to the second curved portion S2. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図4は、本発明の位置センサの第4の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図3に示す上記第3の実施の形態において、S字状の部分が、第1曲線部S1と第2曲線部S2とが、長さ0(零)mmを超え30mm以下の直線部Tを介して、接続された状態で形成されている。その直線部Tの入口は、上記第1曲線部S1の出口のうち、その幅方向おいて、その第1曲線部S1の曲がりの外側に対応する部分に配置されている。その直線部Tの幅は、長さ方向に一定であり、第2曲線部S2の入口の幅B2と等しくなっている。すなわち、第1曲線部S1と直線部Tとの接続部が段状に形成され、その接続部の幅が、第1曲線部S1の曲がりの外側に一気に狭まっている。それ以外の部分は、上記第3の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 4 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the fourth embodiment of the position sensor of the present invention. In this embodiment, in the third embodiment shown in FIG. 3, the S-shaped portion is such that the first curved portion S1 and the second curved portion S2 have a length exceeding 0 (zero) mm and 30 mm. It is formed in a connected state via the following straight line portion T. The entrance of the straight line portion T is disposed at a portion of the exit of the first curved portion S1 corresponding to the outside of the bend of the first curved portion S1 in the width direction. The width of the straight portion T is constant in the length direction and is equal to the width B2 of the entrance of the second curved portion S2. That is, the connection part of 1st curve part S1 and the linear part T is formed in step shape, and the width | variety of the connection part is narrowing to the outer side of the curve of 1st curve part S1 at a stretch. Other parts are the same as those in the third embodiment, and the same reference numerals are given to the same parts.

 この実施の形態では、第1曲線部S1と直線部Tとの接続部の幅が、第1曲線部S1の曲がりの外側に一気に狭まっているものの、上記第3の実施の形態と同様に、第1曲線部S1を伝播する光L(二点鎖線で示す)は、その曲がりの外側部分に偏ることから、その光Lの殆どが、直線部Tに伝播される。しかも、その光Lは、図2に示す上記第2の実施の形態と同様に、その直線部Tの側面で殆ど反射することなく、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 In this embodiment, the width of the connecting portion between the first curved portion S1 and the straight portion T is narrowed to the outside of the bend of the first curved portion S1, but as in the third embodiment, Since the light L (indicated by a two-dot chain line) propagating through the first curved line portion S1 is biased toward the outer portion of the curve, most of the light L is propagated to the straight line portion T. Moreover, the light L is propagated to the second curved line portion S2 with almost no reflection on the side surface of the straight line portion T, as in the second embodiment shown in FIG. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図5は、本発明の位置センサの第5の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図4に示す上記第4の実施の形態において、第1曲線部S1の幅と、直線部Tの幅とが等しくなっている。また、第2曲線部S2の入口が、上記直線部Tの出口のうち、その幅方向おいて、上記第1曲線部S1の曲がりの外側に対応する部分に配置されている。すなわち、直線部Tと第2曲線部S2との接続部が段状に形成され、その接続部の幅が、第1曲線部S1の曲がりの外側に対応する部分に一気に狭まっている。それ以外の部分は、上記第4の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 5 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the fifth embodiment of the position sensor of the present invention. In this embodiment, in the fourth embodiment shown in FIG. 4, the width of the first curved line portion S1 and the width of the straight line portion T are equal. In addition, the entrance of the second curved portion S2 is disposed at a portion of the exit of the straight portion T corresponding to the outside of the bend of the first curved portion S1 in the width direction. That is, the connecting portion between the straight portion T and the second curved portion S2 is formed in a step shape, and the width of the connecting portion is narrowed to a portion corresponding to the outside of the bend of the first curved portion S1. Other parts are the same as those in the fourth embodiment, and the same reference numerals are given to the same parts.

 この実施の形態では、第1曲線部S1の曲がりの外側部分に偏って伝播する光L(二点鎖線で示す)は、そのまま、直線部Tでも、上記外側部分に対応する部分に偏って伝播される。しかも、その直線部Tに伝播した光Lは、上記第4の実施の形態と同様に、その直線部Tの側面で殆ど反射することなく、第2曲線部S2に伝播される。そのため、直線部Tと第2曲線部S2との接続部の幅が、上記のように直線部Tの上記外側部分に一気に狭まっていても、直線部Tを伝播する光Lの殆どが、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 In this embodiment, the light L (indicated by a two-dot chain line) that is biased and propagated to the outer portion of the bend of the first curved portion S1 is propagated to the portion corresponding to the outer portion even in the straight portion T as it is. Is done. Moreover, the light L propagating to the straight line portion T is propagated to the second curved line portion S2 with almost no reflection on the side surface of the straight line portion T, as in the fourth embodiment. Therefore, even if the width of the connecting portion between the straight portion T and the second curved portion S2 is narrowed to the outer portion of the straight portion T as described above, most of the light L propagating through the straight portion T is first. Propagated to the two curve portion S2. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図6は、本発明の位置センサの第6の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図5に示す上記第5の実施の形態において、上記直線部Tの入口の幅が、第1曲線部S1の幅と等しく、その直線部Tの出口の幅が、第2曲線部S2の幅とが等しくなっている。すなわち、直線部Tは、その入口から出口にいくにつれて幅が徐々に狭くなるテーパ状に形成されている。それ以外の部分は、上記第5の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 6 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the sixth embodiment of the position sensor of the present invention. In this embodiment, in the fifth embodiment shown in FIG. 5, the width of the inlet of the straight portion T is equal to the width of the first curved portion S1, and the width of the outlet of the straight portion T is the first width. The width of the two curved portions S2 is equal. That is, the straight part T is formed in a tapered shape whose width gradually decreases from the entrance to the exit. Other parts are the same as those in the fifth embodiment, and the same reference numerals are given to the same parts.

 この実施の形態でも、第1曲線部S1の曲がりの外側部分に偏って伝播する光L(二点鎖線で示す)は、そのまま、直線部Tの上記外側部分に対応する部分に偏って伝播される。しかも、その直線部Tに伝播した光Lは、上記第5の実施の形態と同様に、その直線部Tの側面で殆ど反射することなく、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 Also in this embodiment, the light L (shown by a two-dot chain line) that is biased and propagated to the outer portion of the curve of the first curved portion S1 is propagated to the portion corresponding to the outer portion of the straight portion T as it is. The Moreover, the light L propagated to the straight line portion T is propagated to the second curved line portion S2 with almost no reflection on the side surface of the straight line portion T, as in the fifth embodiment. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図7は、本発明の位置センサの第7の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図3に示す上記第3の実施の形態において、第1曲線部S1の幅が、第2曲線部S2の幅と等しく、狭くなっている。すなわち、S字状の部分の幅は、全て、長さ方向に一定で等しく、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっている。それ以外の部分は、上記第3の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 7 is an enlarged plan view (corresponding to FIG. 1C) showing the S-shaped portion in the seventh embodiment of the position sensor of the present invention. In this embodiment, in the third embodiment shown in FIG. 3, the width of the first curved portion S1 is equal to the width of the second curved portion S2, and is narrowed. That is, the widths of the S-shaped portions are all constant and equal in the length direction, and are narrower than the width B0 of the core portion on the upstream side of the S-shaped portions. Other parts are the same as those in the third embodiment, and the same reference numerals are given to the same parts.

 この実施の形態では、S字状の部分の幅は、長さ方向に一定で等しく、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっているため、この実施の形態でも、第1曲線部S1の曲がりの外側部分に偏って伝播する光L(二点鎖線で示す)は、そのまま、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 In this embodiment, the width of the S-shaped portion is constant and equal in the length direction, and is narrower than the width B0 of the core portion upstream of the S-shaped portion. However, the light L (indicated by a two-dot chain line) propagating toward the outer portion of the curve of the first curved portion S1 is propagated as it is to the second curved portion S2. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 図8は、本発明の位置センサの第8の実施の形態における上記S字状の部分を示す拡大平面図〔図1(c)に相当する図〕である。この実施の形態では、図7に示す上記第7の実施の形態において、S字状の部分が、第1曲線部S1と第2曲線部S2とが、長さ0(零)mmを超え30mm以下の直線部Tを介して、接続された状態で形成されている。その直線部Tの幅は、長さ方向に一定であり、第1曲線部S1の幅(第2曲線部S2の幅)と等しくなっている。それ以外の部分は、上記第7の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 8 is an enlarged plan view (a diagram corresponding to FIG. 1C) showing the S-shaped portion in the eighth embodiment of the position sensor of the present invention. In this embodiment, in the seventh embodiment shown in FIG. 7, the S-shaped portion is such that the first curved portion S1 and the second curved portion S2 have a length exceeding 0 (zero) mm and 30 mm. It is formed in a connected state via the following straight line portion T. The width of the straight line portion T is constant in the length direction and is equal to the width of the first curved portion S1 (the width of the second curved portion S2). Other parts are the same as those in the seventh embodiment, and the same reference numerals are given to the same parts.

 この実施の形態でも、第1曲線部S1の曲がりの外側部分に偏って伝播する光L(二点鎖線で示す)は、そのまま、直線部Tの上記外側部分に対応する部分に偏って伝播される。しかも、その直線部Tに伝播した光Lは、図2に示す上記第2の実施の形態と同様に、その直線部Tの側面で殆ど反射することなく、第2曲線部S2に伝播される。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、その第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の位置センサも、上記第1の実施の形態と同様の作用・効果を奏する。 Also in this embodiment, the light L (shown by a two-dot chain line) that is biased and propagated to the outer portion of the curve of the first curved portion S1 is propagated to the portion corresponding to the outer portion of the straight portion T as it is. The In addition, the light L propagated to the straight line portion T is propagated to the second curved line portion S2 with almost no reflection on the side surface of the straight line portion T, as in the second embodiment shown in FIG. . And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, the light L propagated to the 2nd curve part S2 is the same as that of the said 1st Embodiment, The light receiving element 5 is reached in a state where leakage is reduced. In other words, the position sensor of this embodiment also has the same operations and effects as the first embodiment.

 なお、上記各実施の形態では、S字状の部分が形成されたコア22を、第2外周コア部2Cの一部分としたが、その全部のコア22に上記S字状の部分が形成されていてもよい。 In each of the above embodiments, the core 22 having the S-shaped portion is defined as a part of the second outer peripheral core portion 2C. However, the S-shaped portion is formed on all the cores 22. May be.

 さらに、上記各実施の形態では、光導波路Wの断面構造を、図1(b)に示すものとしたが、他でもよく、例えば、図9に断面図で示すように、図1(b)に示すものを上下逆さまにした構造のものとしてもよい。すなわち、その光導波路Wは、シート状のアンダークラッド層1の表面部分に、コア2が埋設されて、上記アンダークラッド層1の表面とコア2の頂面とが面一に形成され、それらアンダークラッド層1の表面とコア2の頂面とを被覆した状態で、シート状のオーバークラッド層3が形成されたものとなっている。 Further, in each of the above-described embodiments, the cross-sectional structure of the optical waveguide W is shown in FIG. 1B, but may be other, for example, as shown in the cross-sectional view of FIG. It is good also as a thing of the structure which turned upside down what is shown in. That is, in the optical waveguide W, the core 2 is embedded in the surface portion of the sheet-like underclad layer 1, and the surface of the underclad layer 1 and the top surface of the core 2 are formed flush with each other. A sheet-like over clad layer 3 is formed in a state where the surface of the clad layer 1 and the top surface of the core 2 are covered.

 そして、上記各実施の形態において、格子状部分のコア2の各交差部は、通常、図10(a)に拡大平面図で示すように、交差する4方向の全てが連続した状態に形成されているが、他でもよい。例えば、図10(b)に示すように、交差する1方向のみが、隙間Gにより分断され、不連続になっているものでもよい。上記隙間Gは、アンダークラッド層1またはオーバークラッド層3の形成材料で形成されている。その隙間Gの幅dは、0(零)を超え(隙間Gが形成されていればよく)、通常、20μm以下に設定される。それと同様に、図10(c),(d)に示すように、交差する2方向〔図10(c)は対向する2方向、図10(d)は隣り合う2方向〕が不連続になっているものでもよいし、図10(e)に示すように、交差する3方向が不連続になっているものでもよいし、図10(f)に示すように、交差する4方向の全てが不連続になっているものでもよい。さらに、図10(a)~(f)に示す上記交差部のうちの2種類以上の交差部を備えた格子状としてもよい。すなわち、本発明において、複数の線状のコア2により形成される「格子状」とは、一部ないし全部の交差部が上記のように形成されているものを含む意味である。 In each of the above-described embodiments, each of the intersecting portions of the core 2 of the lattice-like portion is normally formed in a state in which all of the four intersecting directions are continuous as shown in the enlarged plan view in FIG. Others are acceptable. For example, as shown in FIG. 10B, only one intersecting direction may be divided by the gap G and discontinuous. The gap G is formed of a material for forming the under cladding layer 1 or the over cladding layer 3. The width d of the gap G exceeds 0 (zero), and is usually set to 20 μm or less. Similarly, as shown in FIGS. 10 (c) and 10 (d), the two intersecting directions [FIG. 10 (c) is two opposing directions and FIG. 10 (d) is two adjacent directions] are discontinuous. As shown in FIG. 10 (e), the three intersecting directions may be discontinuous, or as shown in FIG. 10 (f), all the four intersecting directions may be discontinuous. It may be discontinuous. Furthermore, a lattice shape having two or more types of intersections among the intersections shown in FIGS. 10 (a) to 10 (f) may be used. That is, in the present invention, the “lattice shape” formed by the plurality of linear cores 2 means that a part or all of the intersections are formed as described above.

 なかでも、図10(b)~(f)に示すように、交差する少なくとも1方向を不連続とすると、光の交差損失を低減させることができる。すなわち、図11(a)に示すように、交差する4方向の全てが連続した交差部では、その交差する1方向〔図11(a)では上方向〕に注目すると、交差部に入射する光の一部は、その光が進んできたコア2と直交するコア2の側面2aに到達し、その側面2aでの入射角が臨界角よりも小さいことから、コア2を透過する〔図11(a)の二点鎖線の矢印参照〕。このような光の透過が、交差する上記と反対側の方向〔図11(a)では下方向〕でも発生する。これに対し、図11(b)に示すように、交差する1方向〔図11(b)では上方向〕が隙間Gにより不連続になっていると、上記隙間Gとコア2との界面が形成され、図11(a)においてコア2を透過する光の一部は、上記界面での入射角が臨界角よりも大きくなることから、その界面を透過することなく、その界面で反射し、コア2を進み続ける〔図11(b)の二点鎖線の矢印参照〕。このことから、先に述べたように、交差する少なくとも1方向を不連続とすると、光の交差損失を低減させることができるのである。その結果、ペン先等による押圧位置の検知感度を高めることができる。 In particular, as shown in FIGS. 10B to 10F, if at least one intersecting direction is discontinuous, the light crossing loss can be reduced. That is, as shown in FIG. 11 (a), at an intersection where all four intersecting directions are continuous, if one of the intersecting directions [upward in FIG. 11 (a)] is focused, the light incident on the intersection Part of the light reaches the side surface 2a of the core 2 orthogonal to the core 2 through which the light has traveled, and the incident angle at the side surface 2a is smaller than the critical angle, and thus passes through the core 2 [FIG. a) (See the two-dot chain line arrow). Such transmission of light also occurs in the direction opposite to the above (downward in FIG. 11A). On the other hand, as shown in FIG. 11 (b), when one intersecting direction (upward in FIG. 11 (b)) is discontinuous by the gap G, the interface between the gap G and the core 2 is Part of the light formed and transmitted through the core 2 in FIG. 11 (a) is reflected at the interface without transmitting through the interface because the incident angle at the interface is larger than the critical angle. Continue to advance the core 2 (see the two-dot chain arrow in FIG. 11B). From this, as described above, if at least one intersecting direction is discontinuous, the light crossing loss can be reduced. As a result, it is possible to increase the detection sensitivity of the pressed position by the pen tip or the like.

 また、上記各実施の形態では、光導波路Wを四角形シート状としたが、格子状のコア2を有するものであれば、他の多角形シート状としてもよい。 In each of the above embodiments, the optical waveguide W is formed in a rectangular sheet shape. However, as long as the optical waveguide W has a lattice-shaped core 2, it may be formed in another polygonal sheet shape.

 図12(a)は、本発明の光回路基板の第1の実施の形態を示す平面図であり、図12(b)は、図12(a)のコアの中心軸に沿う縦断面図(Y-Y断面図)である。この実施の形態の光回路基板30も、前記従来の光回路基板70(図18参照)と同様、電気回路基板40に積層されるものである。そして、その光回路基板30は、図12(a)の平面図に示すように、一端側(図では上端側)に、2個の発光素子34を備え、他端側(図では下端側)に、2個の受光素子35を備えている。そして、一端側の2個の発光素子34の間隔よりも、他端側の2個の受光素子35の間隔の方が広く設定されている。それにより、光回路基板70の幅が、一端側で狭く、他端側で広く形成されているとともに、発光素子34と受光素子35との間で光伝播する、隣り合うコア32の間隔が、発光素子34側よりも、受光素子35側の方が広く設定されている。それに伴って、上記コア32が、長さ方向の中央部分〔図12(a)の楕円D2で囲む部分〕において、S字状に曲がっている。なお、図12(a)では、コア32の幅を誇張して図示している。 FIG. 12A is a plan view showing the first embodiment of the optical circuit board of the present invention, and FIG. 12B is a longitudinal sectional view taken along the central axis of the core of FIG. (YY sectional view). The optical circuit board 30 of this embodiment is also laminated on the electric circuit board 40 in the same manner as the conventional optical circuit board 70 (see FIG. 18). Then, as shown in the plan view of FIG. 12A, the optical circuit board 30 includes two light emitting elements 34 on one end side (upper end side in the figure) and the other end side (lower end side in the figure). In addition, two light receiving elements 35 are provided. The interval between the two light receiving elements 35 on the other end side is set wider than the interval between the two light emitting elements 34 on the one end side. Thereby, the width of the optical circuit board 70 is narrow at one end side and wide at the other end side, and the interval between the adjacent cores 32 that propagate light between the light emitting element 34 and the light receiving element 35 is The light receiving element 35 side is set wider than the light emitting element 34 side. Along with this, the core 32 is bent in an S shape at the central portion in the length direction (portion surrounded by the ellipse D2 in FIG. 12A). In FIG. 12A, the width of the core 32 is exaggerated.

 そのコア32のS字状の部分は、この実施の形態では、図12(c)に拡大平面図で示すように、光伝播の上流側の第1曲線部S1と、その第1曲線部S1と逆方向に曲がっている下流側の第2曲線部S2とが、連続して接続された状態で形成されている。そして、上記S字状の部分の入口(第1曲線部S1の入口)の幅が、そのS字状の部分より上流側のコア部分の幅B0と等しくなっている。そして、第1曲線部S1の幅が、その第1曲線部S1の入口から出口にいくにつれて徐々に狭くなっており、その第1曲線部S1の出口の幅B1は、第2曲線部S2の入口の幅B2とが等しくなっている。その第2曲線部S2の幅は、長さ方向に一定になっている。 In this embodiment, the S-shaped portion of the core 32 includes, as shown in an enlarged plan view in FIG. 12C, a first curved portion S1 on the upstream side of light propagation and the first curved portion S1. The second curved portion S2 on the downstream side bent in the opposite direction is formed in a continuously connected state. The width of the inlet of the S-shaped part (the inlet of the first curved part S1) is equal to the width B0 of the core part upstream of the S-shaped part. And the width | variety of 1st curve part S1 becomes narrow gradually as it goes to the exit from the entrance of the 1st curve part S1, and width B1 of the exit of the 1st curve part S1 is 2nd curve part S2. The entrance width B2 is equal. The width of the second curved portion S2 is constant in the length direction.

 それ以外の部分は、図18に示す前記従来の電気回路基板80および光回路基板70と同様である。すなわち、図12(b)において、符号41は絶縁層、符号42はその絶縁層41の表面に形成された電気配線〔図12(a)では図示せず〕、符号41a,41bは上記絶縁層41に形成された貫通孔、符号W2は光導波路、符号32a,32bはコア32の両端部に形成された光反射面、符号31は第1クラッド層、符号33は第2クラッド層を示す。そして、コア32の一端部と発光素子34とが光接続されているとともに、コア32の他端部と受光素子35とが光接続されており、光L(二点鎖線で示す)は、発光素子34からコア32を介して受光素子35に伝播するようになっている。 Other portions are the same as those of the conventional electric circuit board 80 and optical circuit board 70 shown in FIG. That is, in FIG. 12B, reference numeral 41 is an insulating layer, reference numeral 42 is an electrical wiring formed on the surface of the insulating layer 41 (not shown in FIG. 12A), and reference numerals 41a and 41b are the above insulating layers. Reference numeral W2 denotes an optical waveguide, reference numerals 32a and 32b denote light reflecting surfaces formed at both ends of the core 32, reference numeral 31 denotes a first cladding layer, and reference numeral 33 denotes a second cladding layer. The one end of the core 32 and the light emitting element 34 are optically connected, and the other end of the core 32 and the light receiving element 35 are optically connected. The light L (indicated by a two-dot chain line) emits light. The light propagates from the element 34 to the light receiving element 35 through the core 32.

 そして、上記コア32のS字状の部分では、上記の特徴的なコア幅に設定することにより、そのS字状の部分での光Lの漏れを低減する(光Lの伝播損失を低くする)ことができる。すなわち、上記S字状の部分では、図12(c)に示すように、上流側の第1曲線部S1の出口の幅B1を、そのS字状の部分より上流側のコア部分の幅B0よりも狭くすることより、伝播する光L(二点鎖線で示す)は、上流側の第1曲線部S1の曲がりの外側部分に偏った状態で、下流側の第2曲線部S2に伝播される。そして、その光Lは、上記第2曲線部S2の入口付近では、その曲がりの内側に偏って伝播することとなり、その第2曲線部S2の曲がりの外側の側面に集中して到達する。ここで、第2曲線部S2の入口の幅B2は、第1曲線部S1の出口の幅B1と等しく狭くなっており、その第2曲線部S2の幅は、長さ方向に一定になっていることから、上記第2曲線部S2の曲がりの外側の側面に到達した光Lは、入射角θが臨界角よりも大きくなる。そのため、その光Lの殆どが上記側面で反射し、光Lの漏れを低減できるのである。このように、上記コア32では、伝播する光Lの漏れを低減させた状態で、その光Lが受光素子35に到達する。 In the S-shaped portion of the core 32, the leakage of the light L in the S-shaped portion is reduced by setting the characteristic core width (the propagation loss of the light L is reduced). )be able to. That is, in the S-shaped portion, as shown in FIG. 12C, the width B1 of the outlet of the first curved portion S1 on the upstream side is set to the width B0 of the core portion on the upstream side of the S-shaped portion. The light L (indicated by a two-dot chain line) that propagates is propagated to the second curved line portion S2 on the downstream side in a state of being biased toward the outer portion of the bending of the first curved line portion S1 on the upstream side. The Then, the light L propagates in the vicinity of the entrance of the second curved portion S2 while being biased toward the inside of the bend, and concentrates on the side surface outside the bend of the second curved portion S2. Here, the width B2 of the entrance of the second curved portion S2 is equal to and narrower than the width B1 of the exit of the first curved portion S1, and the width of the second curved portion S2 is constant in the length direction. Therefore, the incident angle θ of the light L that has reached the outer side surface of the curve of the second curved portion S2 is larger than the critical angle. Therefore, most of the light L is reflected by the side surface, and leakage of the light L can be reduced. Thus, in the core 32, the light L reaches the light receiving element 35 in a state where leakage of the propagating light L is reduced.

 さらに、上記第2曲線部S2において、伝播する光の漏れる量をより減少させることができ、それにより、受光素子5での光の受光強度の減少をより抑制する観点から、上記第1曲線部S1の出口の幅(B1:単位μm)と、その第1曲線部S1の曲率半径(R1:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコア32の側面を被覆する第2クラッド層33の屈折率(K2)との関係が、下記の式(3)を満たすように設定することが好ましい。なお、上記第1曲線部S1の曲率半径(R1)は、その第1曲線部S1の幅方向の中心線の曲率半径である。 Furthermore, in the second curved line portion S2, the amount of light that propagates can be further reduced, and thereby, from the viewpoint of further suppressing the decrease in the light receiving intensity of the light at the light receiving element 5, the first curved portion. The width of the exit of S1 (B1: unit μm), the radius of curvature of the first curved portion S1 (R1: unit mm), the refractive index of the core on which the S-shaped part is formed (K1), It is preferable to set the relationship with the refractive index (K2) of the second cladding layer 33 covering the side surface of the core 32 so as to satisfy the following formula (3). The radius of curvature (R1) of the first curved portion S1 is the radius of curvature of the center line in the width direction of the first curved portion S1.

Figure JPOXMLDOC01-appb-M000009
Figure JPOXMLDOC01-appb-M000009

 また、上記第1曲線部S1のコア幅は、入口も出口も含めて、例えば、1~80μmの範囲内に設定されることが好ましい。そして、上記第1曲線部S1の曲率半径(R1)は、例えば、0.5~5.0mmの範囲内に設定されることが好ましい。さらに、上記屈折率差(K1-K2)は、例えば、0.005~0.05の範囲内に設定されることが好ましい。 Further, the core width of the first curved portion S1 is preferably set within a range of 1 to 80 μm including the inlet and the outlet. The radius of curvature (R1) of the first curved part S1 is preferably set within a range of 0.5 to 5.0 mm, for example. Further, the refractive index difference (K1−K2) is preferably set within a range of 0.005 to 0.05, for example.

 図13は、本発明の光回路基板の第2の実施の形態における上記S字状の部分を示す拡大平面図〔図12(c)に相当する図〕である。この実施の形態では、図12(a)~(c)に示す上記第1の実施の形態において、S字状の部分が、第1曲線部S1と第2曲線部S2とが、長さ0(零)mmを超え30mm以下の直線部Tを介して、接続された状態で形成されている。その直線部Tの幅は、長さ方向に一定であり、第1曲線部S1の出口の幅B1(第2曲線部S2の入口の幅B2)と等しくなっている。それ以外の部分は、上記第1の実施の形態と同様であり、同様の部分には、同じ符号を付している。 FIG. 13 is an enlarged plan view (corresponding to FIG. 12C) showing the S-shaped portion in the second embodiment of the optical circuit board of the present invention. In this embodiment, in the first embodiment shown in FIGS. 12 (a) to 12 (c), the S-shaped portion has the first curved portion S1 and the second curved portion S2, and the length is zero. It is formed in a connected state via a straight portion T that exceeds (zero) mm and is 30 mm or less. The width of the straight line portion T is constant in the length direction and is equal to the width B1 of the outlet of the first curved portion S1 (the width B2 of the inlet of the second curved portion S2). Other parts are the same as those of the first embodiment, and the same reference numerals are given to the same parts.

 この実施の形態でも 上記S字状の部分では、上流側の第1曲線部S1の出口の幅B1が、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっていることより、伝播する光L(二点鎖線で示す)は、上流側の第1曲線部S1の曲がりの外側部分に偏った状態で、直線部Tに伝播される。そして、その直線部Tの長さが30mm以下と短いため、第1曲線部S1から直線部Tに伝播した光Lは、その直線部Tの側面で殆ど反射することなく、上記偏ったままの状態で、第2曲線部S2に伝播される。その光Lは、上記第1の実施の形態と同様、上記第2曲線部S2の入口付近では、その曲がりの内側に偏って伝播することとなり、その第2曲線部S2の曲がりの外側の側面に集中して到達する。そして、その第2曲線部S2は、上記第1の実施の形態と同様であることから、上記側面に到達した光Lの殆どが、その側面で反射し、光Lの漏れを低減できる。このように、上記第2曲線部S2に伝播された光Lは、上記第1の実施の形態と同様にして、漏れを低減させた状態で受光素子5に到達する。すなわち、この実施の形態の光回路基板も、上記第1の実施の形態と同様の作用・効果を奏する。 Also in this embodiment, in the S-shaped portion, the width B1 of the outlet of the first curved portion S1 on the upstream side is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion. Accordingly, the propagating light L (indicated by a two-dot chain line) is propagated to the straight line portion T in a state of being biased toward the outer portion of the curve of the first curved line portion S1 on the upstream side. And since the length of the straight line portion T is as short as 30 mm or less, the light L propagated from the first curved line portion S1 to the straight line portion T is hardly reflected on the side surface of the straight line portion T, and remains biased. In the state, it is propagated to the second curved line portion S2. As in the first embodiment, the light L propagates in the vicinity of the entrance of the second curved portion S2 while being biased to the inside of the bend, and the side surface outside the bend of the second curved portion S2. Concentrate on to reach. And since the 2nd curve part S2 is the same as that of the said 1st Embodiment, most of the light L which reached | attained the said side surface reflects on the side surface, and can reduce the leakage of the light L. As described above, the light L propagated to the second curved portion S2 reaches the light receiving element 5 in a state where leakage is reduced in the same manner as in the first embodiment. That is, the optical circuit board according to this embodiment also has the same operations and effects as those of the first embodiment.

 図14は、本発明の光回路基板の第3の実施の形態を示す平面図である。この実施の形態では、絶縁層61の表面に光素子54,ICチップインタフェース,抵抗,コンデンサ,コイル等の多数の電子部品50が分散された状態で配置され、そのうちの複数の光素子54に、光導波路W3のコア52の一端部が光接続され、それらコア52の他端部が光ファイバ接続用コネクタ55に光接続されている。上記コア52は、分散配置された電子部品50を回避するように配置形成されることから、その一部分(図14の楕円D3で囲む部分)がS字状に形成されている。そして、そのS字状の部分が、図12(c)に示す第1の実施の形態または図13に示す第2の実施の形態と同様に、特徴的なコア幅に設定されている。それ以外の部分は、上記第1または第2の実施の形態と同様である。そして、この実施の形態の光回路基板も、上記第1または第2の実施の形態と同様の作用・効果を奏する。 FIG. 14 is a plan view showing a third embodiment of the optical circuit board of the present invention. In this embodiment, a large number of electronic components 50 such as an optical element 54, an IC chip interface, a resistor, a capacitor, and a coil are arranged on the surface of the insulating layer 61, and a plurality of the optical elements 54 are One end of the core 52 of the optical waveguide W3 is optically connected, and the other end of the core 52 is optically connected to the optical fiber connector 55. Since the core 52 is arranged and formed so as to avoid the electronic components 50 arranged in a distributed manner, a part thereof (a part surrounded by an ellipse D3 in FIG. 14) is formed in an S shape. And the S-shaped part is set to the characteristic core width similarly to 1st Embodiment shown in FIG.12 (c), or 2nd Embodiment shown in FIG. Other parts are the same as those in the first or second embodiment. The optical circuit board according to this embodiment also has the same operations and effects as those of the first or second embodiment.

 なお、上記光回路基板の各実施の形態における光導波路W2,W3の断面構造〔図1(b),図9に相当する断面構造〕は、図15(a)に示す断面構造でもよいし、図15(b)に示す断面構造でもよい。すなわち、図15(a)に示す断面構造は、第1クラッド層31の下面に、コア32が突出形成され、そのコア32の側面および下面を被覆した状態で、上記第1クラッド層31の下面に、第2クラッド層33が形成された構造となっている。一方、図15(b)に示す断面構造は、図15(a)に示す断面構造を上下逆さまにしたものとなっている。すなわち、第1クラッド層31の下面部分に、コア32が埋設されて、上記第1クラッド層31の下面とコア32の下面とが面一に形成され、それら第1クラッド層31の下面とコア32の下面とを被覆した状態で、第2クラッド層33が形成された構造となっている。 The cross-sectional structure of the optical waveguides W2 and W3 in the respective embodiments of the optical circuit board (the cross-sectional structure corresponding to FIG. 1B and FIG. 9) may be the cross-sectional structure shown in FIG. The cross-sectional structure shown in FIG. That is, in the cross-sectional structure shown in FIG. 15A, the lower surface of the first cladding layer 31 is formed with the core 32 projecting from the lower surface of the first cladding layer 31 and covering the side surface and the lower surface of the core 32. In addition, the second cladding layer 33 is formed. On the other hand, the cross-sectional structure shown in FIG. 15B is an upside down version of the cross-sectional structure shown in FIG. That is, the core 32 is embedded in the lower surface portion of the first cladding layer 31, and the lower surface of the first cladding layer 31 and the lower surface of the core 32 are formed flush with each other. The second clad layer 33 is formed in a state where the lower surface of 32 is covered.

 また、上記位置センサおよび上記光回路基板の各実施の形態では、S字状の部分の下流側の第2曲線部S2の幅を、長さ方向に一定としたが、そのS字状の部分での光の伝播損失は、第2曲線部S2の幅が狭い程、低くなる傾向にあるため、第2曲線部S2の入口から出口にいくにつれて徐々に狭くしてもよい。 Further, in each of the embodiments of the position sensor and the optical circuit board, the width of the second curved portion S2 on the downstream side of the S-shaped portion is constant in the length direction. Since the light propagation loss at has a tendency to become lower as the width of the second curved portion S2 is narrower, it may be gradually reduced from the entrance to the exit of the second curved portion S2.

 そして、上記各実施の形態では、S字状の部分が形成されたコア22,32を有する光導波路W,W2,W3を、位置センサおよび光回路基板に用いたが、光電気混載基板等の他の用途の光導波路としてもよい。 In each of the above embodiments, the optical waveguides W, W2, and W3 having the cores 22 and 32 having the S-shaped portions are used for the position sensor and the optical circuit board. It is good also as an optical waveguide of other uses.

 つぎに、実施例について比較例と併せて説明する。但し、本発明は、実施例に限定されるものではない。 Next, examples will be described together with comparative examples. However, the present invention is not limited to the examples.

〔アンダークラッド層およびオーバークラッド層の形成材料〕
 成分a:エポキシ樹脂(三菱化学社製、YX7400)60重量部。
 成分b:エポキシ樹脂(ダイセル社製、EHPE3150)40重量部。
 成分c:光酸発生剤(サンアプロ社製、CPI-101A)1重量部。
 これら成分a~cを混合することにより、アンダークラッド層およびオーバークラッド層の形成材料を調製した。
[Formation material of under clad layer and over clad layer]
Component a: 60 parts by weight of an epoxy resin (Mitsubishi Chemical Corporation, YX7400).
Component b: 40 parts by weight of epoxy resin (manufactured by Daicel, EHPE3150).
Component c: 1 part by weight of a photoacid generator (manufactured by San Apro, CPI-101A).
By mixing these components a to c, materials for forming the under cladding layer and the over cladding layer were prepared.

〔コアの形成材料〕
 成分d:エポキシ樹脂(ダイセル社製、EHPE3150)100重量部。
 成分e:光酸発生剤(アデカ社製、SP-170)1重量部。
 成分f:乳酸エチル(和光純薬工業社製、溶剤)50重量部。
 これら成分d~fを混合することにより、コアの形成材料を調製した。
[Core forming material]
Component d: 100 parts by weight of epoxy resin (manufactured by Daicel, EHPE3150).
Component e: 1 part by weight of a photoacid generator (manufactured by Adeka, SP-170).
Component f: 50 parts by weight of ethyl lactate (manufactured by Wako Pure Chemical Industries, Ltd., solvent).
By mixing these components d to f, a core forming material was prepared.

〔実施例1〕
 上記各形成材料を用いて、コアの一部分がS字状に形成されている光導波路を作製した。そのS字状の部分は、第1曲線部S1の幅が、その第1曲線部S1の入口から出口にいくにつれて徐々に狭くなり、第2曲線部S2の入口の幅B2が、上記S字状の部分より上流側のコア部分の幅B0よりも狭くなっているものとした〔図1(c)参照〕。そして、第2曲線部S2の入口の幅B2を、下記の表1に示す様々な値に設定した。また、その表1には、それ以外の寸法,屈折率等を示した。なお、S字状の部分より上流側のコア部分の幅B0を200μmとした。また、アンダークラッド層の厚みを25μm、コアの厚みを30μm、オーバークラッド層の、コアの頂面からの厚みを70μmとした。
[Example 1]
Using each of the above forming materials, an optical waveguide in which a part of the core was formed in an S shape was produced. In the S-shaped portion, the width of the first curved portion S1 gradually becomes narrower as it goes from the inlet of the first curved portion S1 to the outlet, and the width B2 of the inlet of the second curved portion S2 becomes the S-shape. It is assumed that it is narrower than the width B0 of the core portion on the upstream side of the shape portion (see FIG. 1C). And the width | variety B2 of the entrance of 2nd curve part S2 was set to the various value shown in following Table 1. FIG. Table 1 shows other dimensions, refractive index, and the like. In addition, the width B0 of the core portion on the upstream side from the S-shaped portion was set to 200 μm. The thickness of the under cladding layer was 25 μm, the core thickness was 30 μm, and the thickness of the over cladding layer from the top surface of the core was 70 μm.

〔比較例1〕
 上記実施例1において、S字状の部分の幅を200μmと広く一定としたものを比較例1とした。それ以外の部分は、上記実施例1と同様とした。
[Comparative Example 1]
In Example 1, the width of the S-shaped part was as wide as 200 μm and was set as Comparative Example 1. The other parts were the same as in Example 1 above.

〔光伝播損失の測定〕
 上記光導波路のコアの一端面に、発光素子(Optowell社製、XH85-S0603-2s )を接続し、上記コアの他端面に、受光素子(浜松ホトニクス社製、s10226)を接続した。そして、上記発光素子の発光強度(E)と上記受光素子での受光強度(F)から、下記の式(4)にしたがって、光伝播損失(α)を算出し、下記の表1に示した。
(Measurement of light propagation loss)
A light emitting element (XH85-S0603-2s, manufactured by Optowell) was connected to one end face of the core of the optical waveguide, and a light receiving element (s10226, manufactured by Hamamatsu Photonics) was connected to the other end face of the core. Then, the light propagation loss (α) is calculated from the light emission intensity (E) of the light emitting element and the light reception intensity (F) of the light receiving element according to the following formula (4), and is shown in Table 1 below. .

Figure JPOXMLDOC01-appb-M000010
Figure JPOXMLDOC01-appb-M000010

Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000011

 上記表1の結果から、実施例1は、比較例1と比較して、光伝播損失が小さいことがわかる。このことから、S字状の部分の第2曲線部の入口の幅B2が、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっていることが、光伝播損失を小さくする点で有効であることがわかる。なお、実施例1は、前記の式(1)を満たしている。 From the results of Table 1 above, it can be seen that Example 1 has a smaller light propagation loss than Comparative Example 1. For this reason, the width B2 of the entrance of the second curved portion of the S-shaped portion is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion, thereby reducing the light propagation loss. It can be seen that this is effective. In addition, Example 1 satisfy | fills said Formula (1).

〔実施例2~4および比較例2,3〕
 上記実施例1および比較例1において、オーバークラッド層の形成材料を変えることにより、そのオーバークラッド層の屈折率を変え、それらを実施例2~4および比較例2,3とした。そして、上記実施例1と同様にして、光伝播損失を算出した。その結果を、下記の表2,3に示した。
[Examples 2 to 4 and Comparative Examples 2 and 3]
In Example 1 and Comparative Example 1, by changing the material for forming the overcladding layer, the refractive index of the overcladding layer was changed, and these were designated as Examples 2 to 4 and Comparative Examples 2 and 3. Then, the light propagation loss was calculated in the same manner as in Example 1. The results are shown in Tables 2 and 3 below.

Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000012

 上記表2,3の結果から、実施例2~4も、比較例2,3と比較して、光伝播損失が小さいことがわかる。このことからも、S字状の部分の第2曲線部の入口の幅B2が、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっていることが、光伝播損失を小さくする点で有効であることがわかる。なお、実施例2~4も、前記の式(1)を満たしている。 From the results shown in Tables 2 and 3, it can be seen that Examples 2 to 4 also have smaller light propagation loss than Comparative Examples 2 and 3. Also from this fact, the width B2 of the entrance of the second curved portion of the S-shaped portion is narrower than the width B0 of the core portion upstream of the S-shaped portion. It turns out that it is effective in making it small. Examples 2 to 4 also satisfy the above formula (1).

 また、図2~8に示すS字状の部分が形成されたコアを有する光導波路についても、上記実施例1~4と同様の傾向を示す結果が得られた。 Also, the results showing the same tendency as in Examples 1 to 4 were obtained for the optical waveguide having the core with the S-shaped portion formed as shown in FIGS.

〔位置センサ〕
 上記各S字状の部分が形成された第2外周コア部を有する、図1(a)に示す位置センサを作製した。なお、発光素子および受光素子は上記と同様のものを用いた。
[Position sensor]
A position sensor shown in FIG. 1A having a second outer peripheral core portion formed with the respective S-shaped portions was produced. The light emitting element and the light receiving element were the same as described above.

〔受光強度の測定〕
 上記位置センサにおいて、入力領域を押圧していない状態で、受光素子で受光する光の強度を測定すると、図1(c),図2~8に示すS字状の部分が形成された第2外周コア部を有する位置センサでは、入力領域全体で均等であった。それに対し、比較例1~3のS字状の部分が形成された第2外周コア部を有する位置センサでは、そのS字状の部分が形成されたコアに対応する部分で弱く、不均等になっていた。
[Measurement of received light intensity]
In the position sensor, when the intensity of light received by the light receiving element is measured without pressing the input area, the second portion in which the S-shaped portion shown in FIG. 1 (c) and FIGS. 2 to 8 is formed. In the position sensor having the outer peripheral core portion, the entire input region was uniform. On the other hand, in the position sensor having the second outer peripheral core portion in which the S-shaped portion of Comparative Examples 1 to 3 is formed, the portion corresponding to the core in which the S-shaped portion is formed is weak and uneven. It was.

〔実験例1〕
 上記実施例1と同様の形成材料を用い、コアの一部分がS字状に形成されている光導波路を作製した。そのS字状の部分は、第1曲線部の入口の幅を200μm、出口の幅を40μm、曲率半径を10mmとし、第2曲線部の入口の幅を40μm、出口の幅を15μm、曲率半径を10mmとした。なお、上記第1曲線部の入口の幅は、そのS字状の部分より上流側のコア部分の幅と同じとした。そして、第1曲線部と第2曲線部との間に直線部を設け、その直線部の長さを0(零)mmから1.2mmずつ長くし、各直線部の長さで、上記実施例1と同様にして、光伝播損失を算出した。その結果を図16のグラフに示した。
[Experimental Example 1]
Using the same forming material as in Example 1, an optical waveguide in which a part of the core was formed in an S shape was produced. The S-shaped part has an inlet width of the first curved portion of 200 μm, an outlet width of 40 μm, a radius of curvature of 10 mm, an inlet width of the second curved portion of 40 μm, an outlet width of 15 μm, and a radius of curvature. Was 10 mm. Note that the width of the inlet of the first curved portion is the same as the width of the core portion upstream of the S-shaped portion. Then, a straight line portion is provided between the first curve portion and the second curve portion, the length of the straight line portion is increased from 0 (zero) mm by 1.2 mm, and the length of each straight line portion is In the same manner as in Example 1, the light propagation loss was calculated. The results are shown in the graph of FIG.

〔実験例2〕
 上記実験例1において、第1曲線部の幅を200μmと広く一定とし、第2曲線部の入口の幅を200μm、出口の幅を15μm、曲率半径を10mmとした。そして、上記実験例1と同様にして、光伝播損失を算出した。その結果を上記図16のグラフに合わせて示した。
[Experiment 2]
In Experimental Example 1, the width of the first curved portion was set to be as wide as 200 μm, the width of the inlet of the second curved portion was 200 μm, the width of the outlet was 15 μm, and the radius of curvature was 10 mm. Then, the light propagation loss was calculated in the same manner as in Experimental Example 1. The results are shown together with the graph of FIG.

 上記図16のグラフから、実験例1では、直線部の長さに係わらず、光伝播損失が略一定であることがわかる。それに対し、実験例2では、直線部の長さが30mm以下の場合、直線部の長さが短いほど、光伝播損失が大きくなる傾向にあり、直線部の長さが30mmを超える場合は、光伝播損失が上記実験例1と略同じで略一定であることがわかる。これらのことから、直線部の長さが30mm以下の場合、光伝播損失を小さくするためには、第2曲線部の入口の幅を、上記S字状の部分より上流側のコア部分の幅よりも狭くすることが、有効であることがわかる。 From the graph of FIG. 16, it can be seen that in Experiment Example 1, the light propagation loss is substantially constant regardless of the length of the straight line portion. On the other hand, in Experimental Example 2, when the length of the straight portion is 30 mm or less, the light propagation loss tends to increase as the length of the straight portion is shorter. When the length of the straight portion exceeds 30 mm, It can be seen that the light propagation loss is substantially the same as Experimental Example 1 and is substantially constant. From these facts, when the length of the straight portion is 30 mm or less, in order to reduce the light propagation loss, the width of the inlet of the second curved portion is set to the width of the core portion on the upstream side of the S-shaped portion. It turns out that it is effective to make narrower than.

 また、電気回路基板に積層する光回路基板用の光導波路として、下記の新たな各形成材料を用いて、コアの一部分がS字状に形成されている光導波路を作製した〔図12(a),(b)参照〕。 Further, as an optical waveguide for an optical circuit board to be laminated on an electric circuit board, an optical waveguide in which a part of a core is formed in an S-shape is manufactured using the following new forming materials [FIG. ), See (b)].

〔第1クラッド層および第2クラッド層の形成材料〕
 成分g:エポキシ樹脂(三菱化学社製、jER1001)60重量部。
 成分h:エポキシ樹脂(ダイセル社製、EHPE3150)30重量部。
 成分i:エポキシ樹脂(DIC社製、EXA-4816)10重量部。
 成分j:光酸発生剤(サンアプロ社製、CPI-101A)0.5重量部。
 成分k:酸化防止剤(共同薬品社製、Songnox1010)0.5重量部。
 成分l:酸化防止剤(三光社製、HCA)0.5重量部。
 成分m:乳酸エチル(和光純薬工業社製、溶剤)50重量部。
 これら成分g~mを混合することにより、第1クラッド層および第2クラッド層の形成材料を調製した。
[Formation materials of the first cladding layer and the second cladding layer]
Component g: 60 parts by weight of an epoxy resin (manufactured by Mitsubishi Chemical Corporation, jER1001).
Component h: 30 parts by weight of an epoxy resin (manufactured by Daicel, EHPE3150).
Ingredient i: 10 parts by weight of an epoxy resin (manufactured by DIC, EXA-4816).
Component j: 0.5 part by weight of a photoacid generator (manufactured by Sun Apro, CPI-101A).
Component k: 0.5 part by weight of an antioxidant (Songnox 1010, manufactured by Kyodo Yakuhin Co., Ltd.).
Component l: 0.5 part by weight of an antioxidant (manufactured by Sanko Co., Ltd., HCA).
Component m: 50 parts by weight of ethyl lactate (manufactured by Wako Pure Chemical Industries, Ltd., solvent).
By mixing these components g to m, materials for forming the first cladding layer and the second cladding layer were prepared.

〔コアの形成材料〕
 成分n:エポキシ樹脂(新日鐵化学社製、YDCN-700-3)50重量部。
 成分o:エポキシ樹脂(三菱化学社製、jER1001)30重量部。
 成分p:エポキシ樹脂(大阪ガスケミカル社製、オグソールPG-100)20重量部。
 成分q:光酸発生剤(サンアプロ社製、CPI-101A)0.5重量部。
 成分r:酸化防止剤(共同薬品社製、Songnox1010)0.5重量部。
 成分s:酸化防止剤(三光社製、HCA)0.125重量部。
 成分t:乳酸エチル(和光純薬工業社製、溶剤)50重量部。
 これら成分n~tを混合することにより、コアの形成材料を調製した。
[Core forming material]
Component n: 50 parts by weight of epoxy resin (manufactured by Nippon Steel Chemical Co., Ltd., YDCN-700-3).
Component o: 30 parts by weight of an epoxy resin (manufactured by Mitsubishi Chemical Corporation, jER1001).
Component p: 20 parts by weight of epoxy resin (Ogsol PG-100, manufactured by Osaka Gas Chemical Company).
Component q: 0.5 part by weight of a photoacid generator (manufactured by Sun Apro, CPI-101A).
Ingredient r: 0.5 weight part of antioxidant (Kyodo Pharmaceutical Co., Ltd., Songnox 1010).
Ingredient s: 0.125 weight part of antioxidant (manufactured by Sanko Co., Ltd., HCA).
Component t: 50 parts by weight of ethyl lactate (manufactured by Wako Pure Chemical Industries, Ltd., solvent).
A core forming material was prepared by mixing these components n to t.

〔実施例5~9〕
 実施例5~9では、上記S字状の部分は、第1曲線部S1の幅が、その第1曲線部S1の入口から出口にいくにつれて徐々に狭く、第1曲線部S1の出口の幅B1が、上記S字状の部分より上流側のコア部分の幅B0よりも狭くなっているものとした〔図12(c),図13参照〕。そして、第1曲線部S1の出口の幅B1や曲率半径R1等を、下記の表4に示す様々な値に設定した。また、第1曲線部S1の入口の幅は、S字状の部分より上流側のコア部分の幅B0と同値とした。さらに、直線部T(実施例6~9)の幅および第2曲線部S2の幅は、長さ方向に一定であり、上記第1曲線部S1の出口の幅B1と同値とした。そして、第2曲線部S2の曲率半径は、いずれの実施例も0.5mmとした。なお、第1クラッド層の厚みを25μm、コアの厚み(第1クラッド層の下面からの突出高さ)を30μm、第2クラッド層の、コアの下面からの厚みを70μmとした。
[Examples 5 to 9]
In Examples 5 to 9, the width of the first curved portion S1 of the S-shaped portion is gradually narrowed from the inlet of the first curved portion S1 to the outlet, and the width of the outlet of the first curved portion S1. B1 is assumed to be narrower than the width B0 of the core portion on the upstream side of the S-shaped portion [see FIGS. 12 (c) and 13]. And the width | variety B1 of the exit of 1st curve part S1, radius of curvature R1, etc. were set to the various values shown in the following Table 4. In addition, the width of the inlet of the first curved line portion S1 is set to the same value as the width B0 of the core portion upstream of the S-shaped portion. Further, the width of the straight line portion T (Examples 6 to 9) and the width of the second curved line portion S2 are constant in the length direction, and the same value as the width B1 of the outlet of the first curved line portion S1. And the curvature radius of 2nd curve part S2 was 0.5 mm in any Example. The thickness of the first cladding layer was 25 μm, the core thickness (projection height from the lower surface of the first cladding layer) was 30 μm, and the thickness of the second cladding layer from the lower surface of the core was 70 μm.

〔比較例4~6〕
 下記の表4に示すように、比較例4では、第1曲線部の幅が、その第1曲線部の入口から出口にいくにつれて徐々に広くなるものとし、比較例5,6では、第1曲線部の幅が、その長さ方向に一定とした。そして、第1曲線部S1の曲率半径R1等を、下記の表4に示す様々な値に設定した。それ以外の部分は、実施例5~9と同様とした。
[Comparative Examples 4 to 6]
As shown in Table 4 below, in Comparative Example 4, the width of the first curved portion is gradually increased from the entrance to the outlet of the first curved portion, and in Comparative Examples 5 and 6, the first curved portion is widened. The width of the curved portion was constant in the length direction. And the curvature radius R1 etc. of 1st curve part S1 were set to the various values shown in following Table 4. FIG. The other parts were the same as in Examples 5 to 9.

〔光伝播損失の測定〕
 VCSEL光源(三喜社製、OP250-LS-850-MM-50-SC 、発光波長850nm)を接続したGI型直径50μmのマルチモード光ファイバ(三喜社製、FFP-GI20-0500 :第1の光ファイバ)と、受光器(アドバンテスト社製、光マルチメータ、Q8221 )を接続した上記と同じGI型直径50μmのマルチモード光ファイバ(第2の光ファイバ)とを準備した。そして、上記第1の光ファイバの先端と上記第2の光ファイバの先端とを突き合わせ、上記VCSEL光源からの光を上記受光器で受光し、その受光強度(H)を測定した。
(Measurement of light propagation loss)
GI type 50 μm diameter multimode optical fiber (manufactured by Miki Co., FFP-GI20-0500) connected with a VCSEL light source (Miki Co., OP250-LS-850-MM-50-SC, emission wavelength 850 nm): First light Fiber) and a multimode optical fiber (second optical fiber) having the same GI type diameter of 50 μm as described above, to which a light receiver (manufactured by Advantest, optical multimeter, Q8221) was connected. And the front-end | tip of the said 1st optical fiber and the front-end | tip of the said 2nd optical fiber were faced | matched, the light from the said VCSEL light source was received with the said light receiver, and the light reception intensity | strength (H) was measured.

 ついで、上記第1の光ファイバの先端を、上記実施例5~9および上記比較例4~6の光導波路における1本のコアの一端部の光反射面(光入射部)に光接続するとともに、上記第2の光ファイバの先端を、上記コアの他端部の光反射面(光出射部)に光接続した。
そして、その状態で上記受光器で受光し、その受光強度(I)を測定した。
Next, the tip of the first optical fiber is optically connected to a light reflecting surface (light incident portion) at one end of one core in the optical waveguides of Examples 5 to 9 and Comparative Examples 4 to 6. The tip of the second optical fiber was optically connected to the light reflecting surface (light emitting portion) at the other end of the core.
In this state, the light was received by the light receiver, and the received light intensity (I) was measured.

 そして、測定した上記受光強度(H,I)から、下記の式(5)にしたがって、光伝播損失(β)を算出し、下記の表4に示した。 The light propagation loss (β) was calculated from the measured received light intensity (H, I) according to the following equation (5), and is shown in Table 4 below.

Figure JPOXMLDOC01-appb-M000014
Figure JPOXMLDOC01-appb-M000014

Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000015

 上記表4の結果から、実施例5~9は、比較例4~6と比較して、光伝播損失が小さいことがわかる。このことから、S字状の部分の第1曲線部の出口の幅B1が、そのS字状の部分より上流側のコア部分の幅B0よりも狭くなっていることが、光伝播損失を小さくする点で有効であることがわかる。特に、前記の式(3)を満たしている実施例7~9は、光伝播損失がより小さくなっていることがわかる。 From the results in Table 4 above, it can be seen that Examples 5 to 9 have a smaller light propagation loss than Comparative Examples 4 to 6. For this reason, the width B1 of the exit of the first curved portion of the S-shaped portion is narrower than the width B0 of the core portion on the upstream side of the S-shaped portion, thereby reducing the light propagation loss. It can be seen that this is effective. In particular, it can be seen that in Examples 7 to 9 that satisfy the above-described expression (3), the light propagation loss is smaller.

 また、前記実施例1~4の、コアの一部分がS字状に形成されている光導波路を、上記実施例5~9と同様に、光回路基板用の光導波路として用いても、それら実施例5~9と同様の傾向を示す結果が得られた。 Also, the optical waveguides in which the core part of the first to fourth embodiments is formed in an S-shape can be used as an optical waveguide for an optical circuit board as in the fifth to ninth embodiments. Results showing the same tendency as in Examples 5 to 9 were obtained.

 上記実施例においては、本発明における具体的な形態について示したが、上記実施例は単なる例示にすぎず、限定的に解釈されるものではない。当業者に明らかな様々な変形は、本発明の範囲内であることが企図されている。 In the above embodiments, specific forms in the present invention have been described. However, the above embodiments are merely examples and are not construed as limiting. Various modifications apparent to those skilled in the art are contemplated to be within the scope of this invention.

 本発明の光導波路は、コアでの光伝播をより適正にする場合に利用可能であり、光通信用途として用いることができ、光通信用途での光伝播損失低減およびコア引き回しの省スペース化に有効である。そして、本発明の位置センサは、入力領域を押圧していない状態で、受光素子での光の受光強度を均等にする場合に利用可能である。また、本発明の光回路基板は、光素子での光の受光強度の低下を抑制する場合に利用可能である。 The optical waveguide of the present invention can be used for making the light propagation in the core more appropriate, and can be used as an optical communication application, for reducing the optical propagation loss in the optical communication application and saving the space for the core routing. It is valid. The position sensor of the present invention can be used when the received light intensity of the light receiving element is equalized in a state where the input area is not pressed. Further, the optical circuit board of the present invention can be used for suppressing a decrease in the light receiving intensity of the light in the optical element.

 W2 光導波路
 32 コア
 S1 第1曲線部
 S2 第2曲線部
 B0 上流側のコア部分の幅
 B1 第1曲線部の出口の幅
 B2 第2曲線部の入口の幅
W2 Optical waveguide 32 Core S1 First curve portion S2 Second curve portion B0 Width of upstream core portion B1 Width of exit of first curve portion B2 Width of entrance of second curve portion

Claims (12)

 光路用の線状のコアと、このコアを上下から挟持するクラッド層とを備えた光導波路であって、上記コアが部分的に、光伝播の上流側の第1曲線部と、その第1曲線部と逆方向に曲がっている下流側の第2曲線部とが、長さ0(零)mm以上30mm以下の直線部を介して、接続されたS字状に形成され、上記第1曲線部の出口の幅および上記第2曲線部の入口の幅の一方が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっていることを特徴とする光導波路。 An optical waveguide comprising a linear core for an optical path and a clad layer that sandwiches the core from above and below, the core partially including a first curved portion upstream of light propagation, and a first The second curved portion on the downstream side that is bent in the opposite direction to the curved portion is formed in an S-shape connected via a straight portion having a length of 0 (zero) mm to 30 mm, and the first curve One of the width of the outlet of the portion and the width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion.  上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第2曲線部の入口の幅(B2:単位μm)と、その第2曲線部の曲率半径(R2:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(1)を満たしている請求項1記載の光導波路。
Figure JPOXMLDOC01-appb-M000001
The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, the width of the inlet of the second curved portion (B2: unit μm), The radius of curvature (R2: unit mm) of the second curved portion, the refractive index (K1) of the core on which the S-shaped portion is formed, and the refractive index (K2) of the cladding layer covering the side surface of the core The optical waveguide according to claim 1, wherein the relationship satisfies the following expression (1).
Figure JPOXMLDOC01-appb-M000001
 上記第2曲線部の入口の幅(B2:単位μm)と、その第2曲線部の曲率半径(R2:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(2)を満たしている請求項2記載の光導波路。
Figure JPOXMLDOC01-appb-M000002
The entrance width (B2: unit μm) of the second curved portion, the radius of curvature (R2: unit mm) of the second curved portion, and the refractive index (K1) of the core on which the S-shaped portion is formed The optical waveguide according to claim 2, wherein the relationship between the refractive index (K2) of the cladding layer covering the side surface of the core satisfies the following formula (2).
Figure JPOXMLDOC01-appb-M000002
 上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅が、その第1曲線部の入口から出口にいくにつれて徐々に狭くなっており、上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の出口の幅と、上記直線部の幅と、上記第2曲線部の幅とが等しくなっている請求項1~3のいずれか一項に記載の光導波路。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion is the outlet from the inlet of the first curved portion. The width of the straight line portion and the width of the second curved portion are constant in the length direction, and the width of the outlet of the first curved portion and the straight line are gradually reduced. The optical waveguide according to any one of claims 1 to 3, wherein a width of the portion is equal to a width of the second curved portion.  上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記直線部の幅と、上記第2曲線部の幅とが等しくなっており、上記直線部の入口が、上記第1曲線部の出口のうち、その幅方向おいて、その第1曲線部の曲がりの外側に対応する部分に配置されている請求項1~3のいずれか一項に記載の光導波路。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the second curve The width of each of the portions is constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, and the width of the straight portion and the second portion The width of the curved portion is equal, and the inlet of the straight portion is arranged at a portion of the outlet of the first curved portion corresponding to the outside of the bend of the first curved portion in the width direction. The optical waveguide according to any one of claims 1 to 3.  上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記第1曲線部の幅と、上記直線部の幅とが等しくなっており、上記第2曲線部の入口が、上記直線部の出口のうち、その幅方向おいて、上記第1曲線部の曲がりの外側に対応する部分に配置されている請求項1~3のいずれか一項に記載の光導波路。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the second curve The width of each of the portions is constant in the length direction, the width of the first curved portion is wider than the width of the second curved portion, the width of the first curved portion, The width of the straight line portion is equal, and the inlet of the second curved portion is disposed in the width direction of the outlet of the straight portion corresponding to the outside of the bend of the first curved portion. The optical waveguide according to any one of claims 1 to 3.  上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の幅が、上記第2曲線部の幅よりも広くなっており、上記直線部の入口の幅が、上記第1曲線部の幅と等しく、その直線部の出口の幅が、上記第2曲線部の幅と等しくなっている請求項1~3のいずれか一項に記載の光導波路。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion and the width of the second curved portion are respectively The width of the first curved portion is wider than the width of the second curved portion, and the width of the inlet of the straight portion is the width of the first curved portion. The optical waveguide according to any one of claims 1 to 3, wherein an exit width of the straight line portion is equal to a width of the second curved portion.  上記第2曲線部の入口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅,上記直線部の幅および上記第2曲線部の幅が、全て、長さ方向に一定で等しくなっている請求項1~3のいずれか一項に記載の光導波路。 The width of the inlet of the second curved portion is narrower than the width of the core portion upstream of the S-shaped portion, the width of the first curved portion, the width of the straight portion, and the second curve The optical waveguide according to any one of claims 1 to 3, wherein all the widths of the portions are constant and equal in the length direction.  上記第1曲線部の出口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の出口の幅(B1:単位μm)と、その第1曲線部の曲率半径(R1:単位mm)と、上記S字状の部分が形成されたコアの屈折率(K1)と、そのコアの側面を被覆するクラッド層の屈折率(K2)との関係が、下記の式(3)を満たしている請求項1記載の光導波路。
Figure JPOXMLDOC01-appb-M000003
The width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, the width of the outlet of the first curved portion (B1: unit μm), and The radius of curvature (R1: unit mm) of the first curved portion, the refractive index (K1) of the core on which the S-shaped portion is formed, and the refractive index (K2) of the cladding layer covering the side surface of the core The optical waveguide according to claim 1, wherein the relationship satisfies the following expression (3).
Figure JPOXMLDOC01-appb-M000003
 上記第1曲線部の出口の幅が、上記S字状の部分より上流側のコア部分の幅よりも狭くなっており、上記第1曲線部の幅が、その第1曲線部の入口から出口にいくにつれて徐々に狭くなっており、上記直線部の幅および上記第2曲線部の幅が、それぞれ、長さ方向に一定になっており、上記第1曲線部の出口の幅と、上記直線部の幅と、上記第2曲線部の幅とが等しくなっている請求項1または9記載の光導波路。 The width of the outlet of the first curved portion is narrower than the width of the core portion upstream of the S-shaped portion, and the width of the first curved portion is from the inlet of the first curved portion to the outlet. The width of the straight line portion and the width of the second curved portion are constant in the length direction, and the width of the outlet of the first curved portion and the straight line are gradually reduced. The optical waveguide according to claim 1, wherein a width of the portion is equal to a width of the second curved portion.  複数の線状のコアからなる格子状部分と、この格子状部分の外周部の一横辺および一縦辺にそれぞれ位置し、上記格子状部分の各縦コアの先端および各横コアの先端に光接続する第1外周コア部と、上記格子状部分を介して上記一横辺および一縦辺にそれぞれ対面する他横辺および他縦辺に位置し、その各他辺に沿って延び、上記格子状部分の各縦コアの後端および各横コアの後端から延設されている第2外周コア部とを備えたシート状のコアパターン部材と、このコアパターン部材を上下から挟持するシート状のクラッド層とを有するシート状の光導波路と、この光導波路の上記第1外周コア部の端面に接続された発光素子と、上記第2外周コア部の端面に接続された受光素子とを備えた位置センサであって、上記第2外周コア部の少なくとも一部分に対応する光導波路の部分が、上記請求項1~8のいずれか一項に記載の光導波路であり、上記発光素子で発光された光が、上記第1外周コア部から上記格子状部分および上記第2外周コア部を経て、上記受光素子で受光され、上記コアパターン部材の格子状部分に対応する位置センサの表面部分を入力領域とし、その入力領域における押圧位置を、その押圧により変化したコアの光伝播量によって特定することを特徴とする位置センサ。 A lattice-shaped portion composed of a plurality of linear cores and one horizontal side and one vertical side of the outer peripheral portion of the lattice-shaped portion, respectively. The first outer peripheral core portion to be optically connected, and the other horizontal side and the other vertical side facing the one horizontal side and the one vertical side through the lattice portion, respectively, extend along each other side, A sheet-like core pattern member having a second outer peripheral core portion extending from the rear end of each vertical core and each horizontal core of the lattice-shaped portion, and a sheet sandwiching the core pattern member from above and below A sheet-like optical waveguide having a clad layer, a light-emitting element connected to the end face of the first outer core part of the optical waveguide, and a light-receiving element connected to the end face of the second outer core part A position sensor provided with a small amount of the second outer core portion. The portion of the optical waveguide corresponding to a part of the optical waveguide is the optical waveguide according to any one of claims 1 to 8, and light emitted from the light emitting element is emitted from the first outer core portion into the lattice shape. The surface portion of the position sensor corresponding to the lattice-shaped portion of the core pattern member is received by the light receiving element through the portion and the second outer peripheral core portion, and the pressing position in the input region is determined by the pressing. A position sensor characterized by being identified by a changed light propagation amount of a core.  上記請求項1,9,10のいずれか一項に記載の光導波路と、この光導波路のコアの端部と光接続された光部材とを備えていることを特徴とする光回路基板。 An optical circuit board comprising: the optical waveguide according to any one of claims 1, 9, and 10; and an optical member optically connected to an end of a core of the optical waveguide.
PCT/JP2016/076439 2015-09-09 2016-09-08 Optical waveguide, and position sensor and optical circuit board using optical waveguide Ceased WO2017043570A1 (en)

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