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WO2016167383A1 - Système pour surveiller de multiples substances nocives - Google Patents

Système pour surveiller de multiples substances nocives Download PDF

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Publication number
WO2016167383A1
WO2016167383A1 PCT/KR2015/003748 KR2015003748W WO2016167383A1 WO 2016167383 A1 WO2016167383 A1 WO 2016167383A1 KR 2015003748 W KR2015003748 W KR 2015003748W WO 2016167383 A1 WO2016167383 A1 WO 2016167383A1
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WO
WIPO (PCT)
Prior art keywords
light source
cable
light
optical
optical cable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/003748
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English (en)
Korean (ko)
Inventor
박구락
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Individual
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Individual
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Priority to PCT/KR2015/003748 priority Critical patent/WO2016167383A1/fr
Publication of WO2016167383A1 publication Critical patent/WO2016167383A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/02—Alarms for ensuring the safety of persons
    • G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
    • G08B21/14—Toxic gas alarms
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/02—Alarms for ensuring the safety of persons
    • G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
    • G08B21/16—Combustible gas alarms

Definitions

  • the present invention relates to a multi-hazard monitoring system for real-time detection of contamination of various harmful chemicals, including gas and fire smoke, and to measure the concentration of pollution. More specifically, the present invention relates to a combination of spectral principles and light sources. It is a multi-hazard monitoring system that measures and alerts to environmentally harmful environmental substances in real time by measuring chemicals.
  • Light which is electromagnetic waves, includes invisible light, such as ultraviolet rays with shorter wavelengths and infrared rays with longer wavelengths, based on visible visible light.
  • Infrared, visible and ultraviolet light can be used for material composition analysis, and the advent of high quality light, such as laser beams, has made it possible to analyze fine dust and measure O2 using the 760 nanometer band.
  • Infrared rays have been used mainly for chemical composition and concentration analysis.
  • the FT-IR (Fourier Transform Infrared Spectroscopy) method is especially known as the mid-infrared region (MIR region, thermal region, finger print), which is characterized by the vibration and rotational motion of molecules.
  • MIR region Mid-infrared region
  • Near-infrared can measure chemicals by detecting fire and overtone of mid-infrared band absorbing wave, and compared to mid-infrared band, it is relatively moisture resistant and selects materials for optical devices such as reflectors and transmission windows that control these lights.
  • the absorption spectral characteristics of the finger print region band are highly valuable in terms of analytical chemistry, and the globa (a kind of ceramic heater), the only light source that can emit the mid infrared band at the same time, is limited in spectral quality.
  • the solution is to use the wavelength conversion laser as a light source and to develop one chip array light source. There are many ways to improve.
  • the targets of the monitoring system of hazardous chemical substances include various toxic gases, explosive gases, volatile organic compounds and carcinogens, which are mainly used in semiconductor factories, as well as greenhouse gases, fine dust, O2, O3, fire smoke, etc. to be.
  • These systems require exceptional responsibility, precision to measure lower concentrations (Sensitivity & Precision), less interfering materials and stability to withstand the various adverse conditions in the field. It is a standard.
  • Conventional harmful substance monitoring system has a type of analyzing the harmful substance by inhaling the harmful substance through the tube from each measuring point (process equipment of each semiconductor), and for such a hazardous substance monitoring system. It is disclosed in the call.
  • such a conventional hazardous substance monitoring system is a form in which samples from multiple measuring points are sampled through a tube and analyzed in one analysis device, and it is possible to apply an expensive and high performance analysis device, but such an analysis device is usually FT-IR.
  • the method is applied and causes malfunctions such as false alarms because accurate analysis cannot be performed due to spectral quality constraints of light source, chemical particle loss and neglect caused by sample sampling method, and interference by site environment. Had a problem.
  • a fire detector has been developed and used as a hazardous substance monitoring system, and is disclosed in Korean Patent Laid-Open Publication No. 10-2014-0128535 for such a fire detector.
  • Such a conventional fire detector is a case where malfunction is a problem and a useless material that does not respond to a fire. It is necessary to detect the occurrence of smoke in the early stage of full-scale fire development, and smoke detectors using infrared sensors sense only the energy level of some partial band centered on CO2 in the 4.3 micrometer band. There is always the possibility of false alarms being triggered and not detected, depending on the type of substance being burned or the type of substance being burned.
  • the conventional fire detector is a type in which a light emitting unit, a light receiving unit, and a Fourier transform infrared analyzer are installed in an open path shape at a point to be measured.
  • a light emitting unit a light receiving unit
  • a Fourier transform infrared analyzer are installed in an open path shape at a point to be measured.
  • the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a real-time multi-hazardous material monitoring system that is quick, verifiable and reliable.
  • Multi-hazardous material monitoring system of the present invention for achieving the above object is composed of six light source cables each consisting of three optical fiber bundles, one detection cable consisting of one optical fiber, the six light sources Six optical fiber front ends of the eighteen optical fibers of the cable are arranged on the outer first concentric circle centering on the light incidence plane of the one detection cable, and the remaining twelve optical fiber front ends are located on the first concentric circle outside the first concentric circle.
  • a plurality of probe devices to deceive And a light source module which is installed to be connected to the rear end of the optical cable, and supplies light sources having different wavelengths to each of the six light source cables, and analyzes the spectral signals detected by the one detection cable. And a measuring device having a spectrum analysis module for tracking the concentration and calculating the concentration.
  • the light source module includes four light emitting diodes connected to four light source cables among the six light source cables, and one light source cable.
  • It consists of a laser diode connected to the, and a tungsten halogen lamp connected to one light source cable, the probe device, the probe body of the cylindrical shape with the front and rear openings formed incision holes on both sides of the outer peripheral surface;
  • a cover plate coupled to a rear end of the probe body and having a cable connection tube connected to a front end of the optical cable at a center thereof;
  • a concave reflector installed at the front end of the probe body and reflecting the light irradiated from the front end of the optical cable to the inside of the probe body and converging to the detection cable disposed at the front end of the optical cable. It is done.
  • It is installed to enable communication through the network with the measuring device, and displays the analyzed analysis data of harmful substances from the spectrum analysis module through a monitor, and a siren or alarm broadcast through a speaker to alert a dangerous situation according to the analysis data. It may be configured to further include; a control device for outputting or sending a warning message to the mobile communication terminal of the worker.
  • the probe device the connector of the "b" shape that the rear end of the probe body is coupled in a fitting manner; And a vertical pipe coupled to the lower end of the connection pipe and installed to be supported on the ground of the measurement target point.
  • the front end of the optical cable may be configured to pass through the vertical pipe and the connection pipe.
  • the probe body may be disposed at a height between 150 and 170 cm with respect to the ground of the measurement target point.
  • the concave reflector has a diameter of 25.4 mm, and the distance between the front end of the optical cable and the center of the concave reflector may be 200 mm.
  • the present invention not only enables rapid, accurate and reliable analysis of harmful substances by overcoming fundamental limitations and malfunctions of existing multiple hazardous chemical monitoring systems, but also detects various harmful substances at the same time to quickly detect harmful gas spills in semiconductor processes. By grasping and dealing with it, it is possible to prevent human injury or loss of equipment.
  • the present invention is a structure that detects a combination of light sources in various wavelengths through a probe device, and adopts a multi-measurement method capable of measuring a variety of substances at the same time, various harmful chemicals, fire smoke, Misen dust, O2, O3 can be measured at the same time, and the spectrum information required for analysis can be obtained within a short time within 1 second.
  • the multiple hazardous chemical monitoring system of the present invention can significantly reduce the recognition time of dangerous substances by using an optical fiber instead of a sampling tube between the conventional measuring device and the measuring point, and can reduce the loss of the sample due to the adsorption of the sample tube. It can be excluded, the effect can be analyzed quickly and precisely harmful substances.
  • the light emitted from the optical fiber has a constant exit angle, and forms two convoluted volume paths on the path from the concave reflector to the light reception until it is received. Since length is secured, it is possible to measure a low concentration of substance, that is, to measure a small amount of harmful substances.
  • the present invention uses LD (laser diode), LED (light emitting diode), and tungsten halogen lamp as a light source, it is possible to obtain a high resolution, low noise spectrum, and to automatically display the characteristic peak according to the molecular structure type in the computer. It is possible to predict the structure of the molecule by tracking with.
  • LD laser diode
  • LED light emitting diode
  • tungsten halogen lamp tungsten halogen lamp
  • the present invention is effectively linked to the control system based on the fast and reliable analysis data, to provide a breakthrough user interface such as three-dimensional drawing display, automatic movement of the control point to the alarm point, smart reporting that has not been conventionally.
  • the probe device of the present invention is configured to have a structure that is easy to connect and disconnect the optical cable, it is necessary to connect only the front end of the optical cable to the probe device, just assembling the connection pipe and the vertical pipe, ensuring fastness and quick maintenance Has the possible effect.
  • FIG. 1 is a block diagram schematically showing a multiple hazardous substances monitoring system according to an embodiment of the present invention
  • FIG. 2 is a block diagram showing in detail the connection state of the optical cable in FIG.
  • Figure 3 is a perspective view of the probe device and the optical cable of the present invention
  • Figure 4 is an exploded perspective view of the probe device of Figure 3
  • FIG. 5 is a cross-sectional view of main parts of the probe device of FIG. 3;
  • FIG. 6 is a view showing the optical fiber arrangement of the six light source cables and one detection cable of the optical cable of the present invention
  • Figure 7a is a view showing a light exit surface formed in the front end of the optical cable of the present invention.
  • 7B is a view showing the arrangement of the light exit surfaces of the six light source cables and one detection cable of the optical cable of the present invention.
  • FIG. 8 is a main perspective view showing the conical volumetric path in the probe device of the present invention.
  • FIG. 10 is a view for explaining the angle of incidence and the exit angle of light in the optical fiber of the optical cable of the present invention.
  • Embodiments described herein will be described with reference to cross-sectional and / or plan views, which are ideal exemplary views of the present invention.
  • the thicknesses of films and regions are exaggerated for effective explanation of technical content. Therefore, the shape of the exemplary diagram may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in forms generated according to manufacturing processes.
  • the etched regions shown at right angles may be rounded or have a predetermined curvature.
  • the regions illustrated in the figures have properties, and the shape of the regions illustrated in the figures is intended to illustrate a particular form of region of the device and is not intended to limit the scope of the invention.
  • terms such as first and second are used to describe various components in various embodiments of the present specification, these components should not be limited by such terms. These terms are only used to distinguish one component from another.
  • the embodiments described and illustrated herein also include complementary embodiments thereof.
  • the multiple hazardous substance monitoring system of the present invention includes a probe device 100, an optical cable 200, a measuring device 300, the control device 400.
  • the probe device 100 is connected to the measuring device 300 and the optical cable 200, and is fixedly installed at the measurement target point that needs to be measured. For example, when used in the semiconductor factory (1), it can be installed in the inside / outside of each process equipment / equipment, each inside the exhaust duct (2, hereinafter referred to as "measurement point") that each semiconductor process is performed. .
  • Probe device 100 has a structure in which the front end 210 of the optical cable 200 is connected, the light is irradiated from the front end 210 of the optical cable 200, reflected and converged.
  • the probe device 100 includes a probe body 110, a cover plate 114, a reflector 120, and an angle adjustment unit 130.
  • Probe body 110 is formed in a cylindrical shape of the front and rear open, the incision hole 112 is formed on both sides of the outer peripheral surface is formed to allow air to pass through.
  • Probe body 110 may be made of a variety of materials, such as synthetic resin material, metal, of course.
  • the cover plate 114 is formed in a disc shape, and is coupled to the means of the probe body 110 through a coupling piece B1.
  • a cable connecting tube 114a is provided at the center of the cover plate 114, and the front end 210 of the optical cable 200 is connected to the cable connecting tube 114a by the SMA connector method in the form of a screwed connection. Light irradiated from the front end 210 of the 200 may be irradiated forward toward the inside of the probe body.
  • the concave reflector 120 is installed at the inner front end of the probe body 110, and reflects the light irradiated to the inner front of the probe body 110 from the front end 210 of the optical cable 200 so that the front end of the optical cable 200 ( 210) Converge to the center.
  • the concave reflector 120 has a diameter of 25.4 mm, and the distance from the front end 210 of the optical cable 200 to the central focal point of the concave surface of the cover plate 114 and the concave reflector is 200 mm. At this time, when the distance between the rear end of the concave reflector 120 and the center focal point of the concave surface is 0.4 mm, the rear end of the concave reflector 120 is 199.6 mm from the cover plate 115.
  • the concave reflector 120 of the present invention used a CM254-100-P01, Silver coated concave mirror manufactured by ThorLABS, and used all of 450 nanometer to 20 micrometer wavelength bands including all mid-infrared, near-infrared, and visible light regions. It is suitable for the following, and is configured to have excellent reflectivity (above 97.5% at 450 nanometer ⁇ 2 micrometer, 2 micrometer ⁇ 20 micrometer) in this ultra-wide wavelength band.
  • the concave reflector 120 of the present invention may be fixedly installed at the inner front end of the probe body 110, but the angle installed at the front end of the probe body 110 to finely adjust the angle of reflection of light by the concave reflector 120 It is installed in the adjusting unit 130.
  • the angle adjusting unit 130 includes a fixed plate 131, three adjustment screws 133, an elastic plate 134, and a movable plate 136.
  • Fixing plate 131 is formed in the shape of a disc is inserted and fixed in the form of fitting to the front end of the probe body (110).
  • the three adjustment screws 133 are inserted to penetrate the fixing plate 131 so as to be rotatable with respect to the fixing plate 131, and a male thread 133a is formed at the rear portion.
  • the elastic plate 134 is made of elastic and flexible materials, such as rubber, is formed in the shape of a disc, is inserted into the inner front end of the probe body 110, the adjustment screw 133 is penetrated, the rear of the fixing plate 131 Is placed.
  • the movable plate 136 is inserted into the inner front end of the probe body 110 in the form of a disc, the front of the concave reflector 120 is fixed to the adhesive by adhesive or the like, the adjustment screw 133 on the front of the movable plate 136 A female thread 136a is formed in which the male thread 133a of the screw) is screwed.
  • the probe device 100 further includes a connection pipe 116 and a vertical pipe 117 so that the probe body 110 can be installed at a height of 150 to 170 cm from the ground of the measurement target point 2. It can be provided.
  • connection pipe 116 is formed in the form of elbow pipe bent in the form of "a", the rear end of the probe body 110 is fitted is installed.
  • connection pipe 116 may include a rear cover 116a coupled by a coupling screw B2 to cover the open rear.
  • the vertical pipe 117 is approximately 150cm long and is fitted to the bottom of the connection pipe 116 to support the probe body 110 on the ground of the measurement target point (2).
  • the front end of the optical cable 200 passes through the interior of the connection pipe 116 and the vertical pipe 117, so that the front end 210 of the optical cable 200 is connected to the cable connection pipe 114a by the SMA connector method. Will be.
  • the connection pipe 116 and the vertical pipe 117 so that the probe body 110 can be installed at a height of 150 to 170 cm from the ground. If the measurement target point (2) to be measured is the inside of the device or the duct inside, only the probe body 110 except for the connection pipe 116 and the vertical pipe 117 is fixed to be installed Of course it can.
  • the optical cable 200 includes six light source cables 201 and one detection cable 203. Three optical fiber bundles are assigned to six light source cables 201, and one detection cable 203 is assigned to one optical fiber.
  • the rear end of the optical cable 200 is formed in a form in which six light source cables 201 and one detection cable 203 are separated from each other without being agglomerated and divided into six light source cables ( At the rear end 205 of 201, three optical fibers of each light source cable 201 are triangulated as shown in Figs. 6A, 6B, 6C, 6E, 6F, and 7G. It is formed in the shape adjacent to each other, and the optical fiber is arrange
  • the rear end 205 of the light source cable 210 and the rear end 207 of the detection cable 203 are connected to the light source module 330 and the spectrum analysis module 340 of the measuring device 310 to be described later.
  • optical cable 200 of the present invention is formed in a shape separated from each of the rear end (205, 207) of the six light source cable 201 and one detection cable 203 is separated, the remaining portion in the form of optical cable
  • the light source cable 201 and the detection cable 203 are bundled together in one sheath and formed in the form of one cable to the probe device 100 spaced apart from the measuring device 310 at a predetermined distance. .
  • the front end 210 of the optical cable 200 of the present invention as shown in Figure 7a, the front end of the six light source cables 201 consisting of 18 optical fibers are arranged around the front end of one detection cable 203 A light exit surface configured to be formed is formed.
  • six optical fiber front end of the total 18 optical fibers of the six light source cable 201 is configured to be disposed on the first concentric circle on the outer side around the detection cable 203, the remaining 12 optical fiber front end, And arranged on a second concentric circle outside the first concentric circle.
  • the light exit surface formed at the front end of the six light source cables 201 has an arrangement structure corresponding to the optical fiber at the front end (see FIG. 6A) of each light source cable 201.
  • the optical cable 200 has been described as being composed of six light source cables 201, but the present invention is not limited thereto, and the number thereof varies according to the number of types of light sources provided from the light source module 330. Of course it can be done.
  • the optical fiber applied to the optical cable 200 in the present invention is a low-OH (Low Hydroxyl Ion / FG200LEA, 12 dB / km Max. Attenuation) that can simultaneously transmit a light source of 400 ⁇ 2400 micrometer wavelength band among various kinds of optical fiber materials
  • the diameter of each optical fiber is 200 micrometers (Fiber core 200 micrometer + /-2%, Fiber cladding 220 + /-2 micrometer) to select 19 in the center of the light exit surface formed at the front end of the optical cable 200
  • the optical fiber bundle is formed in the form of focusing all inside the circle of 1 mm in diameter.
  • the measuring device 300 is installed to be connected to the rear end of the optical cable 200 to supply light sources having different wavelengths to each of the six light source cables 201. It includes a light source module 330 and a spectrum analysis module 340 for analyzing the spectral signal detected by one detection cable 203 to track the components of the pollutant and calculate the concentration.
  • the measuring device 300 may further include a display panel 310 displaying analysis data analyzed by the spectrum analysis module 340.
  • the measuring device 300 may include a light source module 330 and a spectrum analysis module 340.
  • the controller 320 may control the display panel 310.
  • the control unit 320 operates as a computer operating system, controls the light source module 330 by a program, and reads the spectral signal received through the detection cable 203 of the optical cable 200 through the spectrum analysis module 340.
  • the analysis generates real-time information and necessary alarms, and shows the operation state through the display panel 310.
  • the light source module 330 is composed of four LEDs (light emitting diodes 331,332,333,334), one LD (laser diode, 335), and one tungsten halogen lamp 336 (long wavelength lamp), and four LEDs have six light sources. It is connected to four of the cable 201, one LD is connected to one light source cable 201, one tungsten halogen lamp 336 is connected to one light source cable 201.
  • the four LEDs 331, 332, 333, and 334 generate light having different band wavelengths, respectively.
  • the spectrum analysis module 340 automatically analyzes the spectral signal by a computer program and displays the result.
  • the measuring device 300 of the present invention may be provided with an alarm light 315 on one surface of the casing.
  • the control device 400 is installed to enable data communication with the measuring device 300 through the network communication network 5, and displays the hazardous substance analysis data analyzed from the spectrum analysis module 340 on a monitor (not shown). It alerts you of dangerous situations in accordance with the analytical data.
  • the control device 400 may be provided with a speaker (not shown) to output the siren or output the alarm discharge, and also, the mobile communication terminal of the worker at the measurement target point (2) network communication network (5) A warning message can be sent to 500.
  • the control device 400 performs data communication with the control unit 320 of the measuring device 300 through the network communication network 5 to display a real-time display of the current situation, an alarm of an alarm situation, operation and setting of the device, and record the history. Archive function can be performed. It can perform information display and user interface function through its own monitor, share the same information with remote computer through network, and propagate necessary information to other devices such as mobile.
  • the control device 400 may be configured to issue an alarm alarm step by step when the contamination of the material to be measured is detected.
  • the six light sources are probe body 110 through the front end of the light source cable 201, that is, the light exit surface.
  • the light is irradiated to the front of the inside, and the irradiated light source is reflected through the concave reflector 120, and converges to the front end of the detection cable 203 disposed at the center of the six light source cables 201. .
  • the optical spectral signal converged on the detection cable 203 is transmitted to the spectrum analysis module 340 through the detection cable 203, and the spectrum analysis module 340 analyzes the received spectrum signal to remove harmful substances in the air.
  • Analytical data can be generated by analyzing the presence and concentration of substances.
  • the controller 320 displays the spectrum analysis data analyzed by the spectrum analysis module 340 on the display panel 310, and if the value is equal to or greater than a value set according to the spectrum analysis data, the controller 320 alarms through an alarm lamp 315 or a speaker (not shown). You can output the alarm sound through.
  • control device 400 wirelessly communicates with the control unit 320 of the measuring device 300, and outputs a siren or alarm broadcast through a speaker to alert a dangerous situation when the value is higher than a set value according to the spectrum analysis data, or the worker moves. Warning message can be sent to the communication terminal (500).
  • the control device 400 may be provided at a local fire station.
  • the present invention focuses light emission sources such as LEDs, LDs, and long-wavelength lamps (tungsten halogen lamps) of different wavelength bands on a single probe, thereby rapidly and precisely inciting infrared rays and visible rays at the same time or at different time intervals. Implementation of the wideband spectrum is possible.
  • the light is transmitted by the optical cable 200 composed of one optical fiber, irradiated through the probe device 100, and after reflecting the irradiated light, the converged spectral signal is analyzed. Therefore, the hazardous substances can be measured quickly and precisely to verify the presence of hazardous substances and to display an alarm.
  • a lamp or a heater such as a glow bar is used to implement a wideband wavelength, but the present invention improves the quality of a spectrum by using a combination of LEDs, LDs, and lamps for long wavelengths having different wavelength bands.
  • LD or LED as a light source
  • one light source is installed at a measurement target point, but in the present invention, using a fiber as a medium for transmitting light, a light source combining LEDs, LDs, and lamps is placed in a measuring device, and a probe device Placement to place the 100 at a remote location is possible.
  • the light irradiated through the front end of the light source cable 201 forms a single conical volume path, and is reflected on the concave reflector 120 once again.
  • Conical volume path (volume path) is formed, and converged to the detection cable (203) to detect the contaminants contained in the air in the volumetric light path of 270cm 3 that can ensure the accuracy of the measurement of the material.
  • the conventional device is a concept of a linear optical path distance, the volumetric optical path of the present invention can be improved the measurement accuracy.
  • the optical cable 200 is made of an optical fiber, and as such an optical fiber has a constant incidence angle, as shown in FIG. 10, light irradiated through the front end of the light source cable 201 by the concave reflector 120. Although it is possible to reflect and converge (light incidence) to the detection cable 203, it is impossible for the light or the like of the light installed in the surrounding ceiling to be incident on the detection cable 203, so that the probe device 100 It is not affected by lighting and will not cause malfunction.
  • the present invention relates to a multiple hazardous substance monitoring system, and can be applied to any place where a hazardous substance such as a semiconductor factory must be monitored and coped, and can be applied to the hazardous substance monitoring industry.

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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un système pour surveiller de multiples substances nocives. Le système selon l'invention, pour la surveillance de multiples substances nocives, comprend : un câble optique comprenant six câbles de source de lumière, chacun des six câbles comprenant un faisceau de fibres optiques à trois brins, et un câble de détection comprenant une fibre optique à un seul brin, les extrémités avant de six des 18 fibres optiques des six câbles de source de lumière étant agencées sur un premier cercle concentrique à l'extérieur autour de la surface d'incidence de lumière dudit un câble de détection, et les extrémités avant des 12 fibres optiques restantes ayant une surface de lumière de sortie agencée sur un second cercle concentrique plus à l'extérieur que le premier cercle concentrique ; une pluralité de dispositifs de sonde installés à des points à mesurer, au niveau desquels les substances nocives sont à mesurer, et reliés à la partie d'extrémité avant du câble optique de manière à émettre une source de lumière à partir de six câbles de source de lumière dans l'air des points à mesurer et reflètent cette dernière de façon à concentrer une source de lumière réfléchie sur ledit un câble détection ; et un dispositif de mesure comprenant un module de source de lumière, qui est installé de manière à être reliée à l'extrémité arrière du câble optique et qui fournit des sources de lumière de différentes longueurs d'onde pour chacun des six câbles de source de lumière, et un module d'analyse spectrale qui analyse un signal spectral détecté par ledit un câble de détection de manière à suivre des composants de polluants et à calculer les concentrations de ces derniers le module de source de lumière comprenant quatre diodes électroluminescentes reliées à quatre des six câbles de source de lumière, une diode laser reliée à un câble de source de lumière, et une lampe halogène au tungstène reliée à un câble de source de lumière, et le dispositif de sonde comprend : un corps de sonde de forme cylindrique, dont l'avant et l'arrière sont des ouverts et ayant des trous découpés formés aux deux côtés de la surface circonférentielle extérieure ; une plaque de recouvrement couplée à l'extrémité arrière du corps de sonde et ayant un tube de raccordement de câble dont l'extrémité avant du câble optique est relié au centre ; et un réflecteur concave installé à l'extrémité avant du corps de sonde de manière à réfléchir la lumière émise à partir de l'extrémité avant du câble optique vers l'intérieur du corps de sonde, pour ainsi faire converger la lumière réfléchie sur le câble de détection agencé au centre de l'extrémité avant du câble optique.
PCT/KR2015/003748 2015-04-15 2015-04-15 Système pour surveiller de multiples substances nocives Ceased WO2016167383A1 (fr)

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EP3907495A1 (fr) * 2020-05-08 2021-11-10 Kidde Technologies, Inc. Ensemble tête de capteur pour un système de mesure
CN114184563A (zh) * 2021-12-02 2022-03-15 复旦大学 大气成分超光谱移动测量系统

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US8759767B2 (en) * 2008-08-21 2014-06-24 Lawrence Livermore National Security, Llc Combined raman and IR fiber-based sensor for gas detection

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US8759767B2 (en) * 2008-08-21 2014-06-24 Lawrence Livermore National Security, Llc Combined raman and IR fiber-based sensor for gas detection
US20100259756A1 (en) * 2009-04-09 2010-10-14 Brian Powell Sensor head for a dry powder agent
JP2011089803A (ja) * 2009-10-20 2011-05-06 Kawasaki Heavy Ind Ltd 内燃機関のガス濃度計測装置およびセンサプラグ
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3907495A1 (fr) * 2020-05-08 2021-11-10 Kidde Technologies, Inc. Ensemble tête de capteur pour un système de mesure
US20210349000A1 (en) * 2020-05-08 2021-11-11 Kidde Technologies, Inc. Sensor head assembly for a measurement system
US12259306B2 (en) * 2020-05-08 2025-03-25 Kidde Technologies, Inc. Sensor head assembly for a measurement system
CN114184563A (zh) * 2021-12-02 2022-03-15 复旦大学 大气成分超光谱移动测量系统
CN114184563B (zh) * 2021-12-02 2024-03-29 复旦大学 大气成分超光谱移动测量系统

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