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WO2016017720A1 - Manomètre à vide et procédé de diagnostic de contamination - Google Patents

Manomètre à vide et procédé de diagnostic de contamination Download PDF

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Publication number
WO2016017720A1
WO2016017720A1 PCT/JP2015/071563 JP2015071563W WO2016017720A1 WO 2016017720 A1 WO2016017720 A1 WO 2016017720A1 JP 2015071563 W JP2015071563 W JP 2015071563W WO 2016017720 A1 WO2016017720 A1 WO 2016017720A1
Authority
WO
WIPO (PCT)
Prior art keywords
cathode
charged particles
anode
vacuum gauge
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2015/071563
Other languages
English (en)
Japanese (ja)
Inventor
吉田　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to EP15828187.3A priority Critical patent/EP3196622A4/fr
Priority to US15/329,986 priority patent/US10094728B2/en
Publication of WO2016017720A1 publication Critical patent/WO2016017720A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Definitions

  • the present invention relates to a vacuum gauge and a method for diagnosing the degree of contamination of the vacuum gauge.
  • the pressure in a chamber is measured using a vacuum gauge, but it is generally known that the performance deteriorates when an ionization vacuum gauge is used in a contaminated environment. If the ionization gauge does not show a normal value due to the above-described deterioration, the semiconductor process proceeds under abnormal conditions, so that a large number of defective products can be produced. At this time, there is a problem that a failure is often not noticed particularly in a failure mode in which the value displayed on the ionization gauge is slightly shifted from the normal value. For this reason, it has been attempted to determine the deterioration by several methods.
  • Patent Document 1 the values output from two independent vacuum degree detection units based on the same type principle are compared, and when the difference becomes larger than a preset value, abnormality of the vacuum gauge is detected.
  • a method of detecting is disclosed.
  • the present invention has been made to solve the above-described problems.
  • a vacuum gauge capable of accurately diagnosing the degree of contamination of a vacuum gauge with a simple configuration and a degree of contamination of a vacuum gauge with a simple procedure can be accurately diagnosed.
  • An object of the present invention is to provide a contamination diagnosis method that can be used.
  • the present invention is a vacuum gauge having a normal operation mode and a contamination diagnosis mode, wherein the first pressure-sensitive means for measuring the vacuum pressure in the normal operation mode, and the vacuum in the contamination diagnosis mode.
  • a vacuum gauge comprising a second pressure sensing means for measuring pressure and a comparison means for comparing a measured value by the second pressure sensitive means with a measured value by the first pressure sensitive means.
  • the present invention provides a vacuum gauge having a contamination diagnosis mode and a normal operation mode for measuring a vacuum pressure according to the magnitude of a detected current, and the charged particles constituting the current Between the first anode and the first cathode, the second anode and the second cathode that send and receive charged particles constituting the current, and the first anode and the first cathode in the normal operation mode In the contamination diagnosis mode, charged particles are transferred between the second anode and the second cathode in the contamination diagnosis mode.
  • a vacuum gauge comprising control means for measuring the magnitude of the current flowing between the second anode and the second cathode and comparing it with the magnitude of the current measured between the first anode and the first cathode I will provide a.
  • the present invention is a vacuum gauge having a contamination diagnosis mode and a normal operation mode for measuring a vacuum pressure according to the magnitude of the detected current, and constitutes the current.
  • the contamination diagnosis mode the magnitude of the current is measured by collecting charged particles at the second electrode, and the measured current is collected by collecting charged particles at the first electrode.
  • a vacuum gauge having a control means for comparing with a size is provided.
  • the present invention is a contamination diagnostic method for a vacuum gauge that measures a vacuum pressure according to the magnitude of a detected current, and transfers charged particles constituting the current in normal operation.
  • the present invention is a contamination diagnosis method for a vacuum gauge that measures a vacuum pressure according to the magnitude of a detected current, and collects charged particles that constitute the current in normal operation.
  • the second step of comparing the current magnitude measured by collecting the charged particles and the ratio or difference between the two current magnitudes compared in the second step are within a predetermined range.
  • the fourth step to diagnose To provide a pollution diagnostic methods and a flop.
  • the present invention it is possible to provide a vacuum gauge that can accurately diagnose the degree of contamination of a vacuum gauge with a simple configuration, and a contamination degree diagnostic method that can accurately diagnose the degree of contamination of a vacuum gauge by a simple procedure.
  • FIG. 1 It is a figure which shows the structure of the cold cathode ionization vacuum gauge which concerns on embodiment of this invention. It is a flowchart which shows the contamination degree diagnostic method with respect to the cold cathode ionization vacuum gauge shown by FIG. It is a circuit diagram which shows the structure of the discharge switching circuit 30 contained in the controller 10 shown by FIG. It is a flowchart which shows the contamination degree diagnostic method using the discharge switching circuit 30 shown by FIG. It is a figure which shows the structure of the hot cathode ionization vacuum gauge which concerns on embodiment of this invention. It is a flowchart which shows the contamination degree diagnostic method with respect to the hot cathode ionization vacuum gauge shown by FIG.
  • FIG. 1 is a diagram showing a configuration of a cold cathode ionization vacuum gauge according to an embodiment of the present invention.
  • the cold cathode ionization gauge according to the embodiment of the present invention includes an anode 1, a partition plate 2, a cathode 3, an insulator 5, an anode 7, magnets 8 and 9, and a controller 10. Is provided.
  • the anode 1 and the anode 7 and the cathode 3 are arranged to face each other, and the cathode 3 facing both the anodes 1 and 7 is configured as a common electrode having the same potential.
  • the two anodes 7 and the anode 1 are electrically insulated from each other by an intervening insulator 5, and the two anodes 7 are connected to each other.
  • the anodes 1 and 7 and the cathode 3 are connected to the controller 10, and the controller 10 controls the potentials of the anodes 1 and 7 and the cathode 3.
  • a magnet 8 is disposed outside the cathode 3 corresponding to the first discharge region between the anode 1 and the cathode 3, and similarly corresponding to the second discharge region between the anode 7 and the cathode 3.
  • a magnet 9 is disposed outside the cathode 3.
  • Each of the pair of magnets 8 and 9 has a function of promoting discharge to the anodes 1 and 7 by applying a magnetic field to electrons emitted from the cathode 3.
  • the cold cathode ionization vacuum gauge has a normal operation mode and a contamination diagnosis mode.
  • the controller 10 discharges between the anode 1 and the cathode 3, and the anode 1 and the cathode 3
  • the vacuum pressure is determined by measuring the magnitude of the current flowing between them.
  • the anode 1 and the cathode 3 function as pressure-sensitive means in the normal operation mode.
  • step S1 the controller 10 discharges between the anode 7 and the cathode 3, and transfers electrons between the anode 7 and the cathode 3.
  • the anode 7 and the cathode 3 function as pressure sensitive means.
  • step S2 the controller 10 measures the magnitude of the current flowing between the anode 7 and the cathode 3, and compares it with the magnitude of the current measured between the anode 1 and the cathode 3.
  • step S3 the controller 10 determines whether the ratio or difference between the magnitudes of the two currents compared in step S2 is within a predetermined allowable range.
  • step S4 when it is determined that it is accommodated and diagnoses that the cold cathode ionization gauge is clean, and proceeds to step S5 when it is determined that it is not accommodated.
  • the cold cathode ionization gauge is diagnosed as being contaminated.
  • the vacuum pressure can be measured using the anode 7 and the cathode 3 that are less contaminated than the anode 1 and the cathode 3 constituting the first discharge region used in the normal operation mode.
  • the switching between the normal operation mode and the contamination diagnosis mode is performed by turning off the discharge in one of the first discharge region and the second discharge region and then turning on the other to discharge. obtain.
  • the normal operation mode and the contamination diagnosis mode can be smoothly switched by turning off the discharge in the one discharge region after the start of the discharge in the other discharge region.
  • FIG. 3 is a circuit diagram showing a configuration of the discharge switching circuit 30 included in the controller 10 shown in FIG. As shown in FIG. 3, the discharge switching circuit 30 includes switches SW1 and SW2 and high voltage relays r1 and r2.
  • one end of the switches SW1 and SW2 and one end of the coil portion of the high voltage relays r1 and r2 are respectively connected to the DC power supply DV.
  • the other end of the switch SW1 is connected to the other end of the coil portion of the high voltage relay r1, and the other end of the switch SW2 is connected to the other end of the coil portion of the high voltage relay r2.
  • a high voltage of about 2 kilovolts (kV) is supplied to one end of the switch portion of the high voltage relays r1 and r2.
  • the other end of the switch portion of the high voltage relay r1 is connected to the anode 1
  • the other end of the switch portion of the high voltage relay r2 is connected to the anode 7.
  • FIG. 4 is a flowchart showing a contamination degree diagnosis method using the discharge switching circuit 30 shown in FIG.
  • the contamination degree diagnosis method using the discharge switching circuit 30 will be described in detail with reference to FIG.
  • step S1 in the normal operation mode, by turning on the switch SW1, the high voltage relay r1 is turned on and a high voltage is supplied to the anode 1, thereby discharging between the anode 1 and the cathode 3.
  • step S2 while maintaining the discharge in step S1, the high voltage relay r2 is turned on by further turning on the switch SW2 to supply the high voltage to the anode 7, whereby the anode 7 and the cathode 3 are turned on. In between.
  • step S3 the switch SW1 is turned off and the high voltage relay r1 is turned off to enter the contamination diagnosis mode, so that only the anode 7 and the cathode 3 are discharged.
  • the discharge between the anode 7 and the cathode 3 in the contamination diagnosis mode is used, and the discharge state between the anode 1 and the cathode 3 in the normal operation mode is used. Can be switched smoothly between the two modes. Further, when returning from the contamination diagnosis mode to the normal operation mode after the contamination diagnosis, the discharge can be smoothly switched by performing the same operation.
  • the first discharge region is included in one vacuum gauge.
  • the second discharge region, and the discharge region is properly used by the controller 10 in the normal operation mode and the contamination diagnosis mode, so that a highly accurate contamination degree diagnosis can be realized with a simple configuration and a simple method. .
  • the soundness of the vacuum gauge can be determined only by the controller 10 switching to the contamination diagnosis mode without stopping the vacuum apparatus in which the vacuum gauge is installed.
  • the maintenance time of the whole vacuum apparatus including this vacuum gauge can be determined appropriately.
  • FIG. 5 is a diagram showing a configuration of the hot cathode ionization vacuum gauge according to the embodiment of the present invention.
  • the hot cathode ionization vacuum gauge according to the embodiment of the present invention includes a grid (anode) 11, a hot filament (cathode) 13, a shield 15, a first ion collector 17, and a second ion collector. 19 and a controller 20.
  • the grid 11 and the hot filament 13 are disposed to face each other, and the first ion collector 17 and the second ion collector 19 are both disposed on the opposite side of the grid 11 with the shield 15 therebetween.
  • the grid 11, the hot filament 13, the first ion collector 17, and the second ion collector 19 are connected to the controller 20.
  • the controller 20 uses the grid 11, the hot filament 13, the first ion collector 17, and the second ion collector 19. Is controlled.
  • the contamination degree diagnosis method for the hot cathode ionization vacuum gauge shown in FIG. 5 will be described in detail with reference to FIG.
  • positive ions are generated by colliding with gas molecules in the process in which electrons emitted from the hot filament 13 fly to the grid 11.
  • the vacuum gauge having the normal operation mode and the contamination diagnosis mode in the normal operation mode, the positive ions are collected by the first ion collector 17, the magnitude of the ion current is measured, and the vacuum pressure is obtained. .
  • the first ion collector 17 functions as a pressure sensitive means in the normal operation mode.
  • step S1 the controller 20 turns the first ion collector 17 to a positive potential to bend the path of the positive ions, and causes the second ion collector 19 to Collect positive ions.
  • the second ion collector 19 functions as a pressure sensitive means.
  • step S ⁇ b> 2 the controller 20 measures the magnitude of the ion current due to the positive ions collected by the second ion collector 19, and the positive ions are collected by the first ion collector 17. Compare with the magnitude of ion current.
  • step S3 the controller 20 determines whether or not the ratio or difference between the magnitudes of both ion currents compared in step S2 is within a predetermined allowable range.
  • step S4 when it is determined that it is accommodated and diagnoses that the hot cathode ionization gauge is clean, and proceeds to step S5 when it is determined that it is not accommodated.
  • the hot cathode ionization gauge is diagnosed as being contaminated.
  • the second ion collector 19 does not collect ions in the normal operation mode, but collects only in the contamination diagnosis mode.
  • the vacuum pressure can be measured using the second ion collector 19 having a lower degree of contamination than the surface of the first ion collector 17 used in the mode.
  • the first ion collector 17 is included in one vacuum gauge.
  • the second ion collector 19 is provided, and these are properly used by the controller 20 in the normal operation mode and the contamination diagnosis mode, whereby a highly accurate contamination degree diagnosis can be realized with a simple configuration and a simple method.
  • the controller 20 can determine the soundness of the vacuum gauge only by switching the controller 20 to the contamination diagnosis mode without stopping the vacuum device in which the vacuum gauge is installed, The maintenance time of the whole vacuum apparatus including this vacuum gauge can be determined appropriately.

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Engineering & Computer Science (AREA)
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  • Life Sciences & Earth Sciences (AREA)
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  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne : un manomètre à vide qui, avec une configuration simple, peut diagnostiquer avec précision le degré de contamination du manomètre à vide ; et un procédé de diagnostic de contamination qui, avec un procédé simple, permet de diagnostiquer avec précision le degré de contamination d'un manomètre à vide. L'invention porte sur un manomètre à vide d'ionisation à cathode froide qui a un mode de fonctionnement normal et un mode de diagnostic de contamination, le manomètre à vide d'ionisation à cathode froide comprenant : une anode 1 et une cathode 3 qui servent à mesurer la pression de vide dans le mode de fonctionnement normal ; une anode 7 et la cathode 3 qui servent à mesurer la pression de vide dans le mode de diagnostic de contamination ; et un contrôleur 10 qui compare la grandeur d'un courant mesuré entre l'anode 7 et la cathode 3 et la grandeur d'un courant mesuré entre l'anode 1 et la cathode 3.
PCT/JP2015/071563 2014-07-30 2015-07-29 Manomètre à vide et procédé de diagnostic de contamination Ceased WO2016017720A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15828187.3A EP3196622A4 (fr) 2014-07-30 2015-07-29 Manomètre à vide et procédé de diagnostic de contamination
US15/329,986 US10094728B2 (en) 2014-07-30 2015-07-29 Vacuum gauge and contamination diagnosis method

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-155291 2014-07-30
JP2014155291 2014-07-30
JP2015112612A JP2016033509A (ja) 2014-07-30 2015-06-02 真空計と汚染診断方法
JP2015-112612 2015-06-02

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Publication Number Publication Date
WO2016017720A1 true WO2016017720A1 (fr) 2016-02-04

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EP (1) EP3196622A4 (fr)
JP (1) JP2016033509A (fr)
WO (1) WO2016017720A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3443579B1 (fr) * 2016-05-02 2021-03-17 MKS Instruments, Inc. Jauge à vide à ionisation à cathode froide avec cathodes multiples
JP7195949B2 (ja) * 2019-01-24 2022-12-26 株式会社アルバック 熱陰極電離真空計、熱陰極電離真空計を備える圧力測定システム並びに熱陰極電離真空計を用いた圧力測定方法
KR102703191B1 (ko) * 2019-09-20 2024-09-04 인피콘 아크티엔게젤샤프트 압력을 결정하는 방법 및 압력 센서
TW202405424A (zh) * 2022-04-19 2024-02-01 美商英福康公司 使用光電離進行過程污染物檢測的分壓力計元件及相關方法

Citations (1)

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Publication number Priority date Publication date Assignee Title
JP5370329B2 (ja) * 2010-09-30 2013-12-18 株式会社デンソー センサ診断装置

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Publication number Priority date Publication date Assignee Title
JP3707522B2 (ja) * 1998-08-21 2005-10-19 日産自動車株式会社 蒸発燃料処理装置の診断装置
JP3935653B2 (ja) * 2000-02-04 2007-06-27 株式会社ニデック 灌流吸引装置
DE102005010716A1 (de) * 2005-03-09 2006-09-14 Inficon Gmbh Kaltkathoden-Drucksensor
JP2006344738A (ja) * 2005-06-08 2006-12-21 Renesas Technology Corp 半導体装置の製造方法
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
US9588004B2 (en) * 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5370329B2 (ja) * 2010-09-30 2013-12-18 株式会社デンソー センサ診断装置

Also Published As

Publication number Publication date
EP3196622A4 (fr) 2018-07-04
US20170254714A1 (en) 2017-09-07
EP3196622A1 (fr) 2017-07-26
JP2016033509A (ja) 2016-03-10
US10094728B2 (en) 2018-10-09

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