WO2016017299A1 - 回路基板の実装構造、それを用いたセンサ - Google Patents
回路基板の実装構造、それを用いたセンサ Download PDFInfo
- Publication number
- WO2016017299A1 WO2016017299A1 PCT/JP2015/067110 JP2015067110W WO2016017299A1 WO 2016017299 A1 WO2016017299 A1 WO 2016017299A1 JP 2015067110 W JP2015067110 W JP 2015067110W WO 2016017299 A1 WO2016017299 A1 WO 2016017299A1
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- WO
- WIPO (PCT)
- Prior art keywords
- circuit board
- resin
- printed circuit
- circuit module
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/181—Printed circuits structurally associated with non-printed electric components associated with surface mounted components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
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- H10W70/65—
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- H10W74/016—
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- H10W74/114—
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- H10W76/157—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10151—Sensor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
- H05K2201/10977—Encapsulated connections
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1316—Moulded encapsulation of mounted components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1327—Moulding over PCB locally or completely
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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- H10W42/121—
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- H10W70/63—
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- H10W70/682—
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- H10W72/01515—
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- H10W72/075—
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- H10W72/07552—
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- H10W72/527—
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- H10W72/5445—
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- H10W72/884—
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- H10W74/00—
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- H10W90/734—
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- H10W90/754—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a circuit board mounting structure and a sensor using the same.
- Patent Document 1 JP 2012-163504 (Patent Document 1) as background art in this technical field.
- a sensing element for measuring physical quantities such as temperature and humidity is provided on a circuit board on which an electronic circuit is formed, the electronic driving circuit is arranged in a housing, and the sensing element is sucked into the intake air.
- the air flow rate measuring device having a structure exposed to the air, at least one insulating layer is provided between the circuit board and the glass or resin coat layer, and a conductor wiring for connecting the sensing element and the electronic drive circuit is provided. It is disposed under the insulating layer ”.
- An object of the present invention is to provide a circuit board structure capable of reducing distortion of a circuit board in insert molding of the circuit board.
- the insert molded structure according to the present invention includes a printed board on which a semiconductor component is mounted, and is an insert molded article in which a region on which the semiconductor component is not mounted is covered with a first resin.
- the second resin having an elastic modulus smaller than the elastic modulus of the material of the printed circuit board is disposed outside the region where the main surface of the printed circuit board and the first resin overlap.
- distortion and cracking of the circuit board can be suppressed when insert molding is used.
- Insert molding is a method of fixing a circuit board by placing the circuit board in a mold and flowing resin around the circuit board to form a resin housing.
- the circuit board and the housing can be joined simultaneously with the solidification of the resin, and the joining process can be simplified.
- the housing resin comes into contact with the semiconductor component on the circuit board, a load due to the shrinkage of the resin is likely to be applied to the semiconductor component or a joint between the semiconductor component and the circuit board.
- the substrate since the resin is dammed by pressing the mold against the substrate, the substrate may be deformed by the stress from the mold, and the substrate may be distorted or cracked.
- an intake air amount sensor mounted on an internal combustion engine of an automobile will be described as an example of insert molding using a substrate.
- the intake air amount sensor is a flow rate sensor that measures the flow rate of gas (air), and is installed for use in intake air amount control by an electronically controlled fuel injection device mounted on an internal combustion engine.
- a sensor chip having a thin diaphragm is used for the intake air amount sensor, and the measurement data of the sensor chip is collected and corrected by the control chip and output to the outside.
- FIG. 1 shows a circuit module on which a semiconductor chip having a control circuit or the like is mounted
- FIG. 2 shows a mounting configuration of the circuit module obtained by cutting the semiconductor chip in FIG.
- the circuit module includes, for example, a first semiconductor chip 3 having a diaphragm 2 and a second semiconductor chip 4 having a control circuit on a printed board 1 made of a material in which glass fibers and a resin are laminated.
- the printed circuit board 1 and the first semiconductor chip 3 are assembled with a first adhesive 5, and the printed circuit board 1 and the second semiconductor chip 4 are assembled with a second adhesive 6.
- a conductor wiring 8 and a wiring pad 9 for the conductor wiring are formed, and the first semiconductor chip 3 and the second semiconductor chip 4 are connected via the wire 7, the conductor wiring 8, and the wiring pad 9.
- the second semiconductor chip 4 is connected to the conductor wiring 8 through the wire 7.
- a potting 10 is installed to protect the wire 7.
- thermosetting resin such as an epoxy resin or a polyurethane resin, or a thermoplastic resin such as polyimide or an acrylic resin
- a filler such as glass or mica can be mixed in the resin. it can.
- circuit module mounting structure For the circuit module mounting structure described above, a manufacturing method for joining the circuit module and the housing while the area where the semiconductor component is mounted is exposed will be described.
- FIG. 3 shows a mold structure for molding a circuit module while exposing a region where semiconductor components are mounted.
- the circuit module mounted on the mold provided with the upper mold 11 and the lower mold 12 and the connector lead 13 are inserted, and the cavity portion 14 is formed by holding the circuit module with the clamp portion 15 of the mold. Resin 16 is filled.
- the circuit module wiring pads 9 and connector leads 13 are connected via wires 17. Further, in order to protect the circuit chamber 18 that is a space including the wires 17, an upper cover 19 and a lower cover 20 are joined to the upper and lower sides, respectively.
- a sensor module capable of joining the circuit module and the housing with the semiconductor components on the circuit module exposed and outputting a detection signal from the circuit module to the outside is completed.
- the upper mold 11 and the lower mold 12 are used to suppress the area where the circuit module member 21 is installed in the clamp portion 15, and the cavity portion 14 is filled with the resin 17 to form the housing. At the same time as forming, the circuit module and the housing are joined.
- the elastic modulus of the member 21 and the elastic modulus of the printed circuit board 1 are desirably compared at a temperature of 25 ° C. (room temperature).
- the elastic modulus can be compared between the elastic coefficient of the member 21 and the elastic coefficient of the base material constituting the printed circuit board 1.
- the hardness referred to here can be compared by, for example, any of Vickers hardness at room temperature, micro Vickers hardness, Brinell hardness, or Rockwell hardness.
- the member 21 can be made of a thermosetting resin such as an epoxy resin or a phenol resin, or a thermoplastic resin such as polycarbonate or polyethylene terephthalate, and the resin can be filled with glass or mica. Materials can also be mixed.
- a thermosetting resin such as an epoxy resin or a phenol resin
- a thermoplastic resin such as polycarbonate or polyethylene terephthalate
- Example 2 Next, the case where the wiring protection resist is arranged on the wiring in the printed circuit board 1 of the first embodiment will be described.
- the wiring 8 embedded in the printed circuit board 1 in FIG. 1 is formed on the substrate, and a wiring protection resist 23 is disposed to protect the wiring 8.
- the member 21 described above can also be applied to the configuration of the circuit board shown in FIG. In this case, it is possible to use the same material as the wiring protection resist 23 as long as the member 21 satisfies the condition that the elastic coefficient is lower than that of the circuit board. In this embodiment, since the member 21 can be installed at the same time as the installation process of the wiring protection resist 23, the process can be simplified.
- FIG. 8 shows a mounting configuration of the circuit module according to the third embodiment.
- a significant difference from the first and second embodiments is that a member 24 corresponding to the member 21 in the first and second embodiments is also added to the region of the joint 27 shown in FIGS.
- the third semiconductor chip 25 is connected to the wiring pad 9 through the outer leads 26 led out from the third semiconductor chip 25.
- insert molding is performed in order to join the circuit module and the housing with the region where the semiconductor component of the circuit module is mounted exposed.
- a member 24 is installed on the main surface of the circuit board 1 in an area where the circuit board 1 and the mold clamp portion 15 overlap and an area including the circuit board / resin joint 27.
- the thermal stress generated after molding due to the difference in the linear expansion coefficient between the circuit board 1 and the resin 16 can be alleviated by the installation of the member 21 to the joint portion 27, so that the distortion of the circuit board and the prevention of separation of the joint portion are possible. It is.
- Example 4 This embodiment is an embodiment in which the present invention is applied to a circuit board in which the conductor wiring 22 is also arranged in the clamp portion 15 and the joint portion 27.
- not only the wiring protection resist 23 is provided in the region other than the wiring pad 9 of the conductor wiring 22 and the region 28 where the conductor wiring is exposed.
- the conductor wiring 22 is also arranged in the portion 27.
- a member 24 is also disposed on the conductor wiring 22 disposed at the clamp portion 15 and the joint portion 27.
- insert molding is performed to join the circuit module and the housing while exposing the region 28 where the semiconductor components of the circuit module are mounted.
- the procedure for insert molding using a mold is the same as in Examples 1 to 3.
- the member 24 is arranged in a wide range as in the third embodiment, it is not necessary to arrange the member 24 with high accuracy in the region where the mold contacts, and the arrangement of the member 24 is the first and second embodiments. It is easier than Therefore, it is possible to improve yield deterioration.
- the thermal stress generated after molding due to the difference in linear expansion coefficient between the printed circuit board 1 and the resin 16 can be relaxed, and the distortion of the circuit board can be reduced and the separation of the joint portion can be prevented.
- the above is an example of a component in which an intake air amount sensor is insert-molded.
- the present invention is not limited to this, and can be used for any component in which a circuit board, particularly a printed board, is insert-molded. .
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Geometry (AREA)
- Measuring Volume Flow (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
Description
以下の実施例は、基板を用いたインサートモールド成形の例として、自動車の内燃機関に搭載される吸入空気量センサを例に挙げて説明する。吸入空気量センサとは気体(空気)の流量を測定する流量センサであり、内燃機関に搭載されている電子制御燃料噴射装置による吸入空気量制御に利用するために設置されている。吸入空気量センサには薄肉のダイヤフラムを有するセンサチップが用いられており、センサチップでの計測データを、制御チップで収集・補正し、外部に出力する仕組みとなっている。
例えば、部材21の弾性係数と、プリント基板1の弾性係数の比較は、温度25℃(室温)で比較することが望ましい。また、弾性係数の比較は、部材21の弾性係数と、プリント基板1を構成する基材の弾性係数の間で行なうことができる。
以上では、部材21とプリント基板1の弾性係数の比較について説明したが、その基本理念は、プリント基板1よりも硬さが柔らかい部材21を使用する点にある。ここでいう硬さは、例えば、室温でのビッカース硬さ、マイクロビッカース硬さ、ブリネル硬さ、あるいは、ロックウェル硬さのいずれかで比較することができる。
次に、実施例1のプリント基板1において、配線の上に配線保護レジストを配置した場合について説明する。
上述の部材21は、図5に示す回路基板の構成においても適用が可能である。この場合、部材21が回路基板よりも弾性係数が低いという条件を満たしていれば、配線保護レジスト23と同一な材料を使用することも可能である。この実施例においては、配線保護レジスト23の設置工程で部材21の設置も同時にできるため、工程簡略化が可能となる。
実施の形態3の回路モジュールの実装構成を図8に示す。実施例1、2と大きく異なる点は、図8~11に示されている接合部27の領域にも、実施例1、2における部材21に相当する部材24が追加されている点である。
本実施例は、クランプ部15と接合部27にも導体配線22が配置されている回路基板について本発明を適用した実施例である。
Claims (6)
- 半導体部品が実装されたプリント基板を含み、該プリント基板上の前記半導体部品が搭載されていない領域が第一の樹脂で覆われたインサートモールド品において、
前記プリント基板の主面と前記第一の樹脂とが重なる領域の外側に、前記プリント基板の材料の弾性率よりも、小さい弾性率を有する第二の樹脂が設置されていることを特徴とするインサートモールド品構造。 - 請求項1記載のインサートモールド品構造であって、プリント基板に流量センシング用半導体を露出した状態で設置したことを特徴とするセンサ構造。
- 請求項1、2記載のセンサ構造であって、前記プリント基板に設置される前記第二の樹脂が、前記第一の樹脂と接していることを特徴とするセンサ構造。
- 請求項1、2記載のセンサ構造であって、前記プリント基板に設置される前記第二の樹脂は前記プリント基板上に形成された導体配線上に設置される材料と同一であることを特徴とするセンサ構造。
- 請求項1、2記載のセンサ構造であって、前記プリント基板に設置される前記第二の樹脂が前記第一の樹脂とプリント基板とが重なる領域に設置されていることを特徴とするセンサ構造。
- 請求項1記載のインサートモールド品構造を有するセンサ。
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201580031470.7A CN106461439B (zh) | 2014-07-30 | 2015-06-15 | 传感器及其制造方法 |
| JP2016538207A JP6357535B2 (ja) | 2014-07-30 | 2015-06-15 | センサおよびその製造方法 |
| US15/316,981 US10031006B2 (en) | 2014-07-30 | 2015-06-15 | Sensor including a printed circuit board with semiconductor parts having a first and second resin |
| EP15827155.1A EP3176543B1 (en) | 2014-07-30 | 2015-06-15 | Circuit board mounting structure and sensor using same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-154430 | 2014-07-30 | ||
| JP2014154430 | 2014-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2016017299A1 true WO2016017299A1 (ja) | 2016-02-04 |
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ID=55217204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2015/067110 Ceased WO2016017299A1 (ja) | 2014-07-30 | 2015-06-15 | 回路基板の実装構造、それを用いたセンサ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10031006B2 (ja) |
| EP (1) | EP3176543B1 (ja) |
| JP (1) | JP6357535B2 (ja) |
| CN (1) | CN106461439B (ja) |
| WO (1) | WO2016017299A1 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017056572A1 (ja) * | 2015-09-30 | 2017-04-06 | 日立オートモティブシステムズ株式会社 | 樹脂成形体およびセンサ装置 |
| JP2017150929A (ja) * | 2016-02-24 | 2017-08-31 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
| WO2018088141A1 (ja) * | 2016-11-14 | 2018-05-17 | 日立オートモティブシステムズ株式会社 | 半導体モジュール |
| JP2019158444A (ja) * | 2018-03-09 | 2019-09-19 | オムロン株式会社 | 電子装置およびその製造方法 |
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| US9967984B1 (en) | 2015-01-14 | 2018-05-08 | Vlt, Inc. | Power adapter packaging |
| US10264664B1 (en) | 2015-06-04 | 2019-04-16 | Vlt, Inc. | Method of electrically interconnecting circuit assemblies |
| US11336167B1 (en) | 2016-04-05 | 2022-05-17 | Vicor Corporation | Delivering power to semiconductor loads |
| US10158357B1 (en) | 2016-04-05 | 2018-12-18 | Vlt, Inc. | Method and apparatus for delivering power to semiconductors |
| US10903734B1 (en) | 2016-04-05 | 2021-01-26 | Vicor Corporation | Delivering power to semiconductor loads |
| US10785871B1 (en) * | 2018-12-12 | 2020-09-22 | Vlt, Inc. | Panel molded electronic assemblies with integral terminals |
| CN112236652B (zh) * | 2018-05-22 | 2024-08-23 | 日立安斯泰莫株式会社 | 物理量检测装置 |
| DE102020211142B4 (de) * | 2020-09-03 | 2022-08-18 | Vitesco Technologies GmbH | Gassensor für ein Fahrzeug |
| CN112802776B (zh) * | 2020-12-31 | 2023-10-20 | 苏州首肯机械有限公司 | 伺服半导体封装压机智能化压力控制系统及控制方法 |
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| JP2001012987A (ja) * | 1999-06-30 | 2001-01-19 | Hitachi Ltd | 熱式空気流量センサ |
| JP2007033411A (ja) * | 2005-07-29 | 2007-02-08 | Denso Corp | センサ装置の製造方法及びセンサ装置 |
| JP2010169460A (ja) * | 2009-01-21 | 2010-08-05 | Denso Corp | 流量式センサ |
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| JPH08236560A (ja) | 1995-03-01 | 1996-09-13 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017056572A1 (ja) * | 2015-09-30 | 2017-04-06 | 日立オートモティブシステムズ株式会社 | 樹脂成形体およびセンサ装置 |
| JPWO2017056572A1 (ja) * | 2015-09-30 | 2018-02-08 | 日立オートモティブシステムズ株式会社 | 樹脂成形体およびセンサ装置 |
| US10217684B2 (en) | 2015-09-30 | 2019-02-26 | Hitachi Automotive Systems, Ltd. | Resin molding and sensor device |
| JP2017150929A (ja) * | 2016-02-24 | 2017-08-31 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
| WO2018088141A1 (ja) * | 2016-11-14 | 2018-05-17 | 日立オートモティブシステムズ株式会社 | 半導体モジュール |
| JP2018081959A (ja) * | 2016-11-14 | 2018-05-24 | 日立オートモティブシステムズ株式会社 | 半導体モジュール |
| US10644423B2 (en) | 2016-11-14 | 2020-05-05 | Hitachi Automotive Systems, Ltd. | Semiconductor module |
| JP2019158444A (ja) * | 2018-03-09 | 2019-09-19 | オムロン株式会社 | 電子装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20170115144A1 (en) | 2017-04-27 |
| CN106461439B (zh) | 2019-08-16 |
| JP6357535B2 (ja) | 2018-07-11 |
| EP3176543A4 (en) | 2018-03-21 |
| EP3176543B1 (en) | 2020-11-18 |
| CN106461439A (zh) | 2017-02-22 |
| JPWO2016017299A1 (ja) | 2017-04-27 |
| US10031006B2 (en) | 2018-07-24 |
| EP3176543A1 (en) | 2017-06-07 |
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