WO2016068541A1 - Electrical connector including porous insulation sheet having through-hole and manufacturing method therefor - Google Patents
Electrical connector including porous insulation sheet having through-hole and manufacturing method therefor Download PDFInfo
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- WO2016068541A1 WO2016068541A1 PCT/KR2015/011128 KR2015011128W WO2016068541A1 WO 2016068541 A1 WO2016068541 A1 WO 2016068541A1 KR 2015011128 W KR2015011128 W KR 2015011128W WO 2016068541 A1 WO2016068541 A1 WO 2016068541A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
Definitions
- the present invention relates to an electrical connection device that can be used for inspection of an electrical element, and more particularly, to an electrical connection body for electrically connecting and connecting a device under test and an inspection device, and a manufacturing method thereof.
- test socket for connecting a device under test and an inspection device is frequently used.
- the test socket connects the connection terminal of the device under test and the pad of the test apparatus with each other so that an electric signal flows in both directions.
- An elastic conductive sheet or a pogo pin may be used as a contact means used in the test socket, and an example of an electrical connector using the elastic conductive sheet is shown in FIG. 1.
- the electrical connector 100 is mounted on the inspection apparatus 200, and is disposed below the support sheet 110 and the support sheet 110 on which the conductive pads 130 are formed. It is made of an elastic sheet 120, and is aligned and fixed to the inspection apparatus 200 by the frame 220 and the guide pin 230.
- the elastic sheet 120 enables electrical flow in the thickness direction and electrical flow in the plane direction perpendicular to the thickness direction, and is elastically compressed so that the connection terminal 310 of the device under test 300 is elastically compressed. It is designed to absorb the impact force from the.
- the elastic sheet 120 insulates and supports the conductive portion 121 disposed between the connection terminal 310 of the device under test 300 and the pad 210 of the inspection device 200, and the conductive portion 121. It consists of an insulating portion 122.
- the insulating part 122 is made of an elastic material such as silicone rubber, and the conductive part 121 is made of a shape in which a plurality of conductive particles are contained in the elastic material.
- the support sheet 110 is attached to the upper surface of the elastic sheet 120 to support the conductive pad 130.
- the support sheet 110 is made of a material such as polyimide having insulation.
- a porous insulating sheet 140 such as a mesh or a nonwoven fabric may be used.
- the porous insulating sheet 140 is integrally coupled to the conductive pad 130 as shown in FIG. 2 or has a structure inserted into the elastic sheet 120 as shown in FIG. 3.
- Patent Document 1 a mesh sheet having a porous mesh form and an electrode integrally connected to the mesh sheet are disclosed, and Korean Patent Registration No. 10-1204941 Patent Document 2 discloses a structure in which a conductive pad protrudes from an upper surface and a lower surface of a sheet member while filling a void in a porous insulating sheet and is integrally bonded to the sheet member.
- the conventional test socket using the porous insulating sheet has advantages in durability and ease of manufacture, but there is little utility of the porous insulating sheet in order to have a fine pitch or high current characteristics.
- the present invention is to improve the performance of the electrical connection for the test socket using the conventional porous insulating sheet described above, by using a porous insulating sheet having a through-hole, to improve the electrical characteristics and durability of the electrical connection, etc. For that purpose.
- the manufacturing method of the electrical connection body which concerns on this invention for solving the said technical problem is a manufacturing method of the electrical connection body which electrically connects a device under test and an inspection apparatus,
- the conductive particles may be made by curing the elastic material of the liquid disposed in a line.
- the electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
- Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
- a first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
- a second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
- a conductive part formed as an elastic material on the lower side of the second supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part.
- a second elastic sheet; The second elastic sheet is attached and disposed on the first support sheet such that the through holes of the first support sheet and the through holes of the second support sheet are arranged in a line.
- Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
- a first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
- a second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
- a third elastic sheet formed of an elastic material and including a conductive portion formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating portion formed adjacent to the conductive portion to insulate and support the conductive portion.
- the second elastic sheet is attached and disposed on the first support sheet so that the through holes of the first support sheet, the through holes of the second support sheet, and the conductive parts of the third elastic sheet are arranged in a line.
- the third elastic sheet is attached and disposed on the sheet.
- the conductive portion of the second elastic sheet of the electrical connectors according to the present invention is formed at a higher density than the conductive portion of the first elastic sheet.
- An electrical connector for a test socket and a method of manufacturing the same according to the present invention can expect the following effects.
- the through hole serves to align the conductive particles and the conductive particles are agglomerated between the through holes to form a high density conductive pad. Therefore, the electrical connector can exhibit excellent characteristics of high current.
- the support sheet by forming the support sheet with the porous insulating sheet, the bonding force between the sheet and the elastic material is strengthened, so that durability of the electrical connection body can be improved even when the gap between the connection terminals of the device under test is narrow.
- the electrical connection body can exhibit excellent high current characteristics.
- FIG. 1 is a cross-sectional view schematically showing a conventional electrical connection for a test socket.
- FIG. 2 is a cross-sectional view showing an example of a conventional electrical connection for a test socket using a porous insulating sheet.
- FIG 3 is a cross-sectional view showing another example of a conventional electrical connection for a test socket using a porous insulating sheet.
- Figure 4 is a plan view showing a porous insulating sheet formed with a through hole according to an embodiment of the present invention.
- 5 to 7 are cross-sectional views showing a process in which an electrical contact body is manufactured in a mold according to an embodiment of the present invention.
- FIG. 8 is a cross-sectional view showing an electrical connection body according to an embodiment of the present invention.
- FIG. 9 is a cross-sectional view showing an electrical connection body according to a modification of the present invention.
- FIG. 10 is a cross-sectional view showing an electrical connection body according to another modification of the present invention.
- 4 to 6 illustrate a method of manufacturing an electrical connector for a test socket according to an embodiment of the present invention.
- the support sheet 410 is formed by forming a plurality of through holes 411 at positions corresponding to the connection terminals 310 of the device under test 300 in the porous insulating sheet.
- the through hole 411 may be formed by laser or mechanical processing.
- the porous insulating sheet is formed in the form of a porous mesh, and is preferably formed of an organic fiber or a porous silicon film while having insulation.
- organic fibers include fluororesin fibers such as polytetrafluoroethylene resin, aramid fibers, and polyethylene fibers. , Polyarylate fibers, nylon fibers, polyester fibers and the like can be used.
- the supporting sheet 410 is inserted into the mold 500 having an empty internal space.
- Ferromagnetic layers 510 are formed at positions corresponding to the connection terminals 310 of the device under test 300, and the through holes 411 of the support sheet 410 are ferromagnetic layers. It is disposed at a position corresponding to 510.
- the liquid elastic material 424 containing the conductive particles 423 in the mold 500 is filled.
- the elastic material a heat resistant high molecular material having a crosslinked structure is preferable.
- liquid silicone rubber, high hardness urethane resin, epoxy resin, acrylic resin and the like can be used.
- a magnetic field is applied in the thickness direction of the mold 500 through the ferromagnetic layer 510 so that the conductive particles 423 are arranged in the thickness direction as shown in FIG. 7. That is, the conductive particles 423 are gathered to a position corresponding to the ferromagnetic layer 510 by the magnetic field and arranged in a line.
- the through hole 411 of the support sheet 410 shown in FIG. 4 serves to align the conductive particles 423, so that the conductive particles 423 can be aggregated with high density between the through holes 411. Can be.
- the liquid elastic material may be cured by heating or the like to manufacture an electrical connection including the support sheet 410 having the through hole 411 formed therein.
- the electrical connector according to the embodiment of the present invention includes a support sheet 410 made of a porous insulating sheet having a through hole 411, and an elastic material disposed below the support sheet 410. It includes an elastic sheet 420 made of.
- the through hole 411 of the support sheet 410 is formed at a position corresponding to the connection terminal 310 of the device under test 300.
- the elastic sheet 420 is formed adjacent to the conductive portion 421 and the conductive portion 421 formed by agglomeration of conductive particles at a position corresponding to the through hole 411, and insulates the conductive portion 421. It consists of an insulating part 422 supporting.
- the electrical connector 400 according to the present invention can maintain sufficient durability even when the conductive portions 421 are minute by using a porous insulating sheet, and conductive particles are agglomerated between the through holes 411 to achieve high density.
- a conductive pad can be formed.
- the content of the conductive particles between the conductive portion 421a of the first elastic sheet 420a and the conductive portion 421b of the second elastic sheet 420b may be different from each other. That is, by forming the conductive portion 421b of the second elastic sheet 420b to have a higher density than the conductive portion 421a of the first elastic sheet 420a, the conductivity is enhanced and the electrical connection force is increased.
- the conductive part 421b of the () may be formed at a high density. That is, it can be formed at a high density by reducing the gap of the conductive portion 421b of the second elastic sheet 420b.
- the elastic sheet 420c which does not include a support sheet made of a porous insulating sheet may be further formed on the two electrical connectors shown in FIG. 9. This is shown in FIG. 10.
- the electrical connector shown in FIG. 10 includes conductive portions 421a, 421b, and 421c made up of three layers divided by porous insulating sheets 410a and 410b, and the conductive portion 421b is more than the conductive portions 421a and 421c. It is formed at a high density.
- the electrical connector according to the present invention described above and a method of manufacturing the same may be most suitably applied to test sockets for inspection of semiconductor devices, etc., but are not limited to test sockets and require electrical connection between devices or devices. It can be applied to various technical fields.
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Abstract
Description
본 발명은 전기 소자의 검사 등에 이용될 수 있는 전기적 접속체(electrical connection device)에 관한 것으로서, 특히 피검사 디바이스와 검사 장치를 전기적으로 접속하여 연결하는 전기적 접속체와 그 제조 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical connection device that can be used for inspection of an electrical element, and more particularly, to an electrical connection body for electrically connecting and connecting a device under test and an inspection device, and a manufacturing method thereof.
반도체 소자 등의 전기적 특성 검사를 위해 피검사 디바이스와 검사 장치를 접속하는 테스트용 소켓이 많이 사용되고 있다. 이러한 테스트용 소켓은 피검사 디바이스의 접속단자와 검사 장치의 패드를 서로 연결시켜 전기적인 신호가 양방향으로 흐를 수 있도록 하는 것이다. For testing electrical characteristics of semiconductor devices and the like, a test socket for connecting a device under test and an inspection device is frequently used. The test socket connects the connection terminal of the device under test and the pad of the test apparatus with each other so that an electric signal flows in both directions.
테스트용 소켓의 내부에 사용되는 접촉 수단으로서는 탄성 도전시트 또는 포고 핀(pogo pin)이 이용될 수 있으며, 탄성 도전시트를 사용한 전기적 접속체의 일 례를 도 1에 나타내었다. An elastic conductive sheet or a pogo pin may be used as a contact means used in the test socket, and an example of an electrical connector using the elastic conductive sheet is shown in FIG. 1.
도 1에 나타낸 바와 같이, 전기적 접속체(100)는 검사 장치(200)의 위에 탑재되는 것으로서, 도전패드(130)가 형성된 지지시트(110)와, 상기 지지시트(110)의 하측에 배치되는 탄성시트(120)로 이루어지며, 프레임(220) 및 가이드 핀(230)에 의해 검사 장치(200)에 정렬 및 고정된다.As shown in FIG. 1, the
탄성시트(120)는 두께 방향으로는 전기적인 흐름이 가능하게 하고 두께 방향과 수직인 면 방향으로는 전기적인 흐름이 불가능하게 하는 것으로서, 탄성 압축되어 피검사 디바이스(300)의 접속단자(310)로부터 가해지는 충격력을 흡수할 수 있도록 설계된다. 탄성시트(120)는 피검사 디바이스(300)의 접속단자(310)와 검사 장치(200)의 패드(210) 사이에 배치되는 도전부(121)와, 상기 도전부(121)를 절연 및 지지하는 절연부(122)로 이루어진다. 절연부(122)는 실리콘 고무와 같은 탄성 물질로 이루어지고, 도전부(121)는 탄성 물질 내에 다수의 도전성 입자가 함유된 형태로 이루어진다. 한편, 지지시트(110)는 탄성시트(120)의 상면에 부착되어 도전패드(130)를 지지한다. 이러한 지지시트(110)는 절연성을 가지는 폴리이미드와 같은 소재로 이루어진다. The
최근에는 탄성시트(120)에 더욱 견고하게 고정되도록 하기 위하여 메쉬(mesh) 또는 부직포 등의 다공성 절연시트(140)를 사용하는 경우가 있다. 이 경우, 다공성 절연시트(140)는 도 2에 나타낸 바와 같이 도전패드(130)에 일체로 결합되거나, 도 3에 나타낸 바와 같이 탄성시트(120)의 내부에 삽입되는 구조로 이루어진다.Recently, in order to be more firmly fixed to the
일례로서, 한국등록특허 제10-1151880호(특허문헌 1)에 의하면, 다공성의 그물망 형태로 이루어지는 메쉬 시트와 메쉬 시트에 일체적으로 연결되는 전극에 대해 개시하고 있으며, 한국등록특허 제10-1204941호(특허문헌 2)에 의하면, 도전패드가 다공성 절연시트의 공극을 채우면서 시트부재의 상면과 하면으로부터 돌출되어 시트부재에 일체로 결합된 구조를 개시하고 있다.For example, according to Korean Patent Registration No. 10-1151880 (Patent Document 1), a mesh sheet having a porous mesh form and an electrode integrally connected to the mesh sheet are disclosed, and Korean Patent Registration No. 10-1204941 Patent Document 2 discloses a structure in which a conductive pad protrudes from an upper surface and a lower surface of a sheet member while filling a void in a porous insulating sheet and is integrally bonded to the sheet member.
그러나 다공성 절연시트를 이용한 종래의 테스트용 소켓의 경우, 내구성이나제작 용이성 등에서 장점이 있으나, 미세 피치나 고전류 특성을 갖도록 하는 데에있어서 다공성 절연시트의 활용도는 거의 없다.However, the conventional test socket using the porous insulating sheet has advantages in durability and ease of manufacture, but there is little utility of the porous insulating sheet in order to have a fine pitch or high current characteristics.
본 발명은 상기한 종래의 다공성 절연시트를 이용한 테스트 소켓용 전기적 접속체의 성능을 개선하기 위한 것으로서, 관통홀이 형성된 다공성 절연시트를 이용하여, 전기적 접속체의 전기적 특성과 내구성 등을 향상시키는 것을 그 목적으로 한다.The present invention is to improve the performance of the electrical connection for the test socket using the conventional porous insulating sheet described above, by using a porous insulating sheet having a through-hole, to improve the electrical characteristics and durability of the electrical connection, etc. For that purpose.
상기한 기술적 과제를 해결하기 위한 본 발명에 따른 전기적 접속체의 제조방법은, 피검사 디바이스와 검사 장치를 전기적으로 연결하는 전기적 접속체의 제조 방법으로서, The manufacturing method of the electrical connection body which concerns on this invention for solving the said technical problem is a manufacturing method of the electrical connection body which electrically connects a device under test and an inspection apparatus,
다공성 절연시트에 상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀을 형성하여 지지시트를 형성하는 단계;Forming a support sheet by forming a plurality of through holes in the porous insulating sheet at positions corresponding to the connection terminals of the device under test;
상기 지지시트를 금형 내부에 삽입하여 배치하는 단계;Inserting and placing the support sheet into a mold;
상기 금형 내부에 도전성 입자가 함유되어 있는 액상의 탄성 물질을 충전하는 단계;Filling a liquid elastic material containing conductive particles in the mold;
상기 금형에 자장을 가하여 상기 도전성 입자가 상기 피검사 디바이스의 접속단자와 대응되는 위치마다 일렬로 배치되도록 하는 단계; 및Applying a magnetic field to the mold so that the conductive particles are arranged in a line at each position corresponding to the connection terminal of the device under test; And
상기 도전성 입자가 일렬로 배치된 액상의 탄성 물질을 경화시키는 단계를 포함하여 이루어질 수 있다.The conductive particles may be made by curing the elastic material of the liquid disposed in a line.
상기한 기술적 과제를 해결하기 위한 본 발명에 따른 전기적 접속체는, 피검사 디바이스와 검사 장치를 전기적으로 연결하는 전기적 접속체로서, The electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀이 형성된 다공성 절연시트로 이루어진 지지시트; 및A support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test; And
상기 지지시트의 하측에 탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 탄성시트를 포함하여 이루어질 수 있다.An elastic sheet formed as an elastic material on the lower side of the support sheet, the conductive sheet formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating portion formed adjacent to the conductive portion to insulate and support the conductive portion. It may be made, including.
상기한 기술적 과제를 해결하기 위한 본 발명에 따른 또 다른 전기적 접속체는, 피검사 디바이스와 검사 장치를 전기적으로 연결하는 전기적 접속체로서, Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀이 형성된 다공성 절연시트로 이루어진 제1 지지시트;A first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
상기 제1 지지시트의 하측에 탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 제1 탄성시트;A conductive part formed as an elastic material on the lower side of the first supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part. First elastic sheet;
상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀이 형성된 다공성 절연시트로 이루어진 제2 지지시트; 및A second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test; And
상기 제2 지지시트의 하측에 탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 제2 탄성시트를 포함하고; 상기 제1 지지시트의 관통홀과 상기 제2 지지시트의 관통홀이 일렬로 배치되도록, 상기 제1 지지시트 위에 상기 제2 탄성시트가 부착되어 배치되어 있다.A conductive part formed as an elastic material on the lower side of the second supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part. A second elastic sheet; The second elastic sheet is attached and disposed on the first support sheet such that the through holes of the first support sheet and the through holes of the second support sheet are arranged in a line.
상기한 기술적 과제를 해결하기 위한 본 발명에 따른 또 다른 전기적 접속체는, 피검사 디바이스와 검사 장치를 전기적으로 연결하는 전기적 접속체로서,Another electrical connector according to the present invention for solving the above technical problem is an electrical connector for electrically connecting the device under test and the test device,
상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀이 형성된 다공성 절연시트로 이루어진 제1 지지시트;A first support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
상기 제1 지지시트의 하측에 탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 제1 탄성시트;A conductive part formed as an elastic material on the lower side of the first supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part. First elastic sheet;
상기 피검사 디바이스의 접속단자와 대응되는 위치마다 다수의 관통홀이 형성된 다공성 절연시트로 이루어진 제2 지지시트;A second support sheet made of a porous insulating sheet having a plurality of through holes formed at respective positions corresponding to the connection terminals of the device under test;
상기 제2 지지시트의 하측에 탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 제2 탄성시트; 및A conductive part formed as an elastic material on the lower side of the second supporting sheet and formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating part formed adjacent to the conductive part to insulate and support the conductive part. Second elastic sheet; And
탄성물질로서 형성되고, 상기 관통홀과 대응하는 위치에 도전성 입자가 응집되어 형성된 도전부와, 상기 도전부에 인접하게 형성되어 상기 도전부를 절연 및 지지하는 절연부로 이루어진 제3 탄성시트를 포함하여 이루어지고,And a third elastic sheet formed of an elastic material and including a conductive portion formed by agglomerating conductive particles in a position corresponding to the through hole, and an insulating portion formed adjacent to the conductive portion to insulate and support the conductive portion. under,
상기 제1 지지시트의 관통홀, 상기 제2 지지시트의 관통홀 및 제3 탄성시트의 도전부가 일렬로 배치되도록, 상기 제1 지지시트 위에 상기 제2탄성시트가 부착되어 배치되고, 제2 지지시트 위에 제3 탄성시트가 부착되어 배치된다.The second elastic sheet is attached and disposed on the first support sheet so that the through holes of the first support sheet, the through holes of the second support sheet, and the conductive parts of the third elastic sheet are arranged in a line. The third elastic sheet is attached and disposed on the sheet.
상기한 본 발명에 따른 전기적 접속체들의 제2 탄성시트의 도전부는, 상기 제1 탄성시트의 도전부보다 고밀도로 형성되는 것이 바람직하다.Preferably, the conductive portion of the second elastic sheet of the electrical connectors according to the present invention is formed at a higher density than the conductive portion of the first elastic sheet.
본 발명의 따른 테스트 소켓용 전기적 접속체와 그 제조 방법은 다음과 같은 효과를 기대할 수 있다.An electrical connector for a test socket and a method of manufacturing the same according to the present invention can expect the following effects.
먼저, 관통홀이 형성된 다공성 절연시트를 이용하여 전기적 접속체를 제작함으로써, 관통홀이 도전성 입자를 정렬시키는 역할을 하게 되고 관통홀 사이로 도전성 입자가 응집되어, 고밀도의 도전 패드를 형성할 수 있다. 따라서 전기적 접속체가 고전류의 우수한 특성을 나타낼 수 있다.First, by manufacturing an electrical connection using a porous insulating sheet having a through hole, the through hole serves to align the conductive particles and the conductive particles are agglomerated between the through holes to form a high density conductive pad. Therefore, the electrical connector can exhibit excellent characteristics of high current.
다음으로, 다공성 절연시트로 지지시트를 형성함으로써 시트와 탄성물질의 결합력이 강화되어, 피검사 디바이스의 접속단자 사이의 간격이 좁은 경우에도 전기적 접속체의 내구성이 향상될 수 있다.Next, by forming the support sheet with the porous insulating sheet, the bonding force between the sheet and the elastic material is strengthened, so that durability of the electrical connection body can be improved even when the gap between the connection terminals of the device under test is narrow.
또한, 다수의 다공성 절연시트를 적층하고, 탄성시트의 도전성 입자의 밀도를 위치에 따라 고밀도화함으로써, 전기적 접속체가 우수한 고전류의 특성을 나타낼 수 있다.In addition, by stacking a plurality of porous insulating sheets and increasing the density of the conductive particles of the elastic sheet according to the position, the electrical connection body can exhibit excellent high current characteristics.
도 1은 종래의 테스트 소켓용 전기적 접속체를 개략적으로 나타내는 단면도.1 is a cross-sectional view schematically showing a conventional electrical connection for a test socket.
도 2는 다공성 절연시트를 사용하는 종래의 테스트 소켓용 전기적 접속체의 일례를 나타내는 단면도.2 is a cross-sectional view showing an example of a conventional electrical connection for a test socket using a porous insulating sheet.
도 3은 다공성 절연시트를 사용하는 종래의 테스트 소켓용 전기적 접속체의 다른 일례를 나타내는 단면도.3 is a cross-sectional view showing another example of a conventional electrical connection for a test socket using a porous insulating sheet.
도 4는 본 발명의 실시예에 따른 관통홀이 형성된 다공성 절연시트를 나타내는 평면도.Figure 4 is a plan view showing a porous insulating sheet formed with a through hole according to an embodiment of the present invention.
도 5 내지 도 7는 본 발명의 실시예에 따른 전기적 접속체가 금형 내에서 제조되는 과정을 나타내는 단면도.5 to 7 are cross-sectional views showing a process in which an electrical contact body is manufactured in a mold according to an embodiment of the present invention.
도 8은 본 발명의 실시예에 따른 전기적 접속체를 나타내는 단면도.8 is a cross-sectional view showing an electrical connection body according to an embodiment of the present invention.
도 9는 본 발명의 변형예에 따른 전기적 접속체를 나타내는 단면도.9 is a cross-sectional view showing an electrical connection body according to a modification of the present invention.
도 10은 본 발명의 또 다른 변형예에 따른 전기적 접속체를 나타내는 단면도.10 is a cross-sectional view showing an electrical connection body according to another modification of the present invention.
이하, 첨부한 도면을 참고하여 본 발명의 바람직한 실시예에 대해 설명한다.Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention.
본 발명의 실시예에 따른 테스트 소켓용 전기적 접속체의 제조 방법을 도 4 내지 6에 나타내었다.4 to 6 illustrate a method of manufacturing an electrical connector for a test socket according to an embodiment of the present invention.
먼저, 도 4에 나타낸 바와 같이, 다공성 절연시트에 피검사 디바이스(300)의 접속단자(310)와 대응되는 위치마다 다수의 관통홀(411)을 형성하여 지지시트(410)를 형성한다. 이러한 관통홀(411)은 레이저 또는 기계적인 가공에 의하여 형성할 수 있다.First, as shown in FIG. 4, the
다공성 절연시트는 다공성의 그물망 형태로 이루어지는 것으로서, 절연성을 가지면서 유기섬유 또는 다공성 실리콘 필름으로 형성된 것이 바람직하며, 이러한 유기섬유로는 폴리테트라플루오로에틸렌 수지 등의 불소 수지 섬유, 아라미드 섬유, 폴리에틸렌 섬유, 폴리아릴레이트 섬유, 나일론 섬유, 폴리에스테르 섬유 등이 사용될 수 있다.The porous insulating sheet is formed in the form of a porous mesh, and is preferably formed of an organic fiber or a porous silicon film while having insulation. Such organic fibers include fluororesin fibers such as polytetrafluoroethylene resin, aramid fibers, and polyethylene fibers. , Polyarylate fibers, nylon fibers, polyester fibers and the like can be used.
다음으로, 도 5에 나타낸 바와 같이 내부 공간이 비어있는 금형(500) 내에 상기 지지시트(410)를 삽입하여 배치시킨다. 금형(500)의 상부 및 하부에는 피검사 디바이스(300)의 접속단자(310)와 대응되는 위치마다 강자성체층(510)이 형성되어 있으며, 지지시트(410)의 관통홀(411)은 강자성체층(510)과 대응되는 위치에 배치된다.Next, as shown in FIG. 5, the supporting
다음으로, 도 6에 나타낸 바와 같이 상기 금형(500) 내에 도전성 입자(423)가 함유되어 있는 액상의 탄성 물질(424)을 충전한다. 탄성 물질로는 가교 구조를 갖는 내열성의 고분자 물질이 바람직하다. 예를 들어, 액상 실리콘 고무, 고경도의 우레탄 수지, 에폭시계 수지 및 아크릴계 수지 등이 사용될 수 있다.Next, as shown in FIG. 6, the liquid
다음으로, 상기 강자성체층(510)을 통해 금형(500)의 두께 방향으로 자장(magnetic field)을 가하여, 도 7에 나타낸 바와 같이, 도전성 입자(423)가 두께 방향으로 배열되도록 한다. 즉, 자장에 의하여 도전성 입자(423)가 강자성체층(510)과 대응되는 위치로 모여들어 일렬로 배치되게 한다. 이때, 도 4에 나타낸 지지시트(410)의 관통홀(411)이 도전성 입자(423)를 정렬(align)시키는 역할을 하게 되어, 관통홀(411) 사이로 도전성 입자(423)가 고밀도로 응집될 수 있다.Next, a magnetic field is applied in the thickness direction of the
다음으로, 가열 등의 방법으로 액상의 탄성 물질을 경화시켜, 관통홀(411)이 형성된 지지시트(410)가 포함된 전기적 접속체를 제조할 수 있다.Next, the liquid elastic material may be cured by heating or the like to manufacture an electrical connection including the
도 8에 상기한 본 발명의 실시예에 따라 제조된 테스트 소켓용 전기적 접속체를 나타내었다. 도 8에 나타낸 바와 같이, 본 발명의 실시예에 따른 전기적 접속체는 관통홀(411)이 형성된 다공성 절연시트로 이루어진 지지시트(410)와, 상기 지지시트(410)의 하측에 배치되고 탄성물질로 이루어진 탄성시트(420)를 포함한다. 지지시트(410)의 관통홀(411)은 피검사 디바이스(300)의 접속단자(310)에 대응하는 위치에 형성된다.8 shows an electrical connection for a test socket manufactured according to the embodiment of the present invention described above. As shown in FIG. 8, the electrical connector according to the embodiment of the present invention includes a
탄성시트(420)는 상기 관통홀(411)에 대응하는 위치에 도전성 입자가 응집되어 형성되는 도전부(421)와, 상기 도전부(421)에 인접하게 형성되어 도전부(421)를 절연 및 지지하는 절연부(422)로 이루어진다.The
상기와 같은 본 발명의 전기적 접속체(400)는 다공성 절연시트를 이용함으로써 도전부(421) 사이가 미세한 경우에도 충분한 내구성을 유지할 수 있으며, 관통홀(411) 사이에 도전성 입자가 응집되어 고밀도의 도전성 패드를 형성할 수 있다.The electrical connector 400 according to the present invention can maintain sufficient durability even when the
한편, 상기한 본 발명의 실시예에 따라 제조된 전기적 접속체를 이용하여, 변형된 형태의 전기적 접속체를 제조할 수 있다.On the other hand, by using the electrical connector manufactured according to the embodiment of the present invention described above, it is possible to manufacture a modified electrical connector.
먼저, 도 9에 나타낸 바와 같이, 상기 실시예에 따라 제조된 2개의 전기적 접속체(400)를 접착하여, 2개의 지지시트(410a, 410b)와 2개의 탄성시트(420a, 430b)를 갖는 구조로 형성할 수 있다. 이때, 제1 탄성시트(420a)의 도전부(421a)와 제2 탄성시트(420b)의 도전부(421b)와의 도전성 입자의 함량을 서로 다르게 형성할 수 있다. 즉, 제2 탄성시트(420b)의 도전부(421b)를 제1 탄성시트(420a)의 도전부(421a)보다 고밀도로 형성함으로써, 도전성이 강화되어 전기적 접속력이 증가된다.이 경우, 제2 탄성시트(420b)의 도전부(421b)에 충전되는 도전성 입자를, 제1 탄성시트(420a)의 도전부(421a)에 충전되는 도전성 입자보다 직경이 작은 것으로 함으로써, 제2 탄성시트(420b)의 도전부(421b)를 고밀도로 형성할 수도 있다. 즉, 제2 탄성시트(420b)의 도전부(421b)의 공극을 줄임으로써 고밀도로 형성할 수도 있다.First, as shown in Figure 9, by bonding the two electrical connection member 400 prepared according to the embodiment, a structure having two support sheets (410a, 410b) and two elastic sheets (420a, 430b) It can be formed as. In this case, the content of the conductive particles between the
또 다른 형태로서, 도 9에 나타낸 2개 전기적 접속체 위에, 다공성 절연시트로 된 지지시트를 포함하지 않는 탄성시트(420c)를 추가로 부착한 형태로 형성할 수도 있다. 이를 도 10에 나타내었다. 도 10에 나타낸 전기적 접속체는, 다공성 절연시트(410a, 410b)에 의해 구분되는 3개의 층으로 이루어진 도전부(421a, 421b, 421c)를 포함하고 있으며, 도전부 421b가 도전부 421a 및 421c보다 고밀도로 형성된다.As another form, the
이상 설명한 본 발명에 따른 전기적 접속체 및 그 제조 방법은 반도체 소자 등의 검사를 위한 테스트용 소켓에 가장 적합하게 적용될 수 있으나, 테스트용 소켓으로 한정되는 것은 아니며, 소자 또는 장치 사이에서 전기적 연결을 필요로 하는 여러 기술 분야에 적용될 수 있다.The electrical connector according to the present invention described above and a method of manufacturing the same may be most suitably applied to test sockets for inspection of semiconductor devices, etc., but are not limited to test sockets and require electrical connection between devices or devices. It can be applied to various technical fields.
본 발명은 상기한 바람직한 실시예 및 변형예와 첨부한 도면을 참조하여 설명되었지만, 본 발명의 사상 및 범위 내에서 상이한 실시예를 구성할 수도 있다.Although the present invention has been described with reference to the above-described preferred embodiments and modifications and the accompanying drawings, different embodiments may be constructed within the spirit and scope of the invention.
따라서 본 발명의 범위는 첨부된 청구범위에 의해 정해지며, 본 명세서에 기재된 특정 실시예에 의해 한정되지 않는 것으로 해석되어야 한다.Therefore, the scope of the present invention is defined by the appended claims, and should be construed as not limited to the specific embodiments described herein.
Claims (10)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140148158A KR101606284B1 (en) | 2014-10-29 | 2014-10-29 | Electrical connection device having porous insulating sheet with through hole and test socket |
| KR10-2014-0148158 | 2014-10-29 |
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| Publication Number | Publication Date |
|---|---|
| WO2016068541A1 true WO2016068541A1 (en) | 2016-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| PCT/KR2015/011128 Ceased WO2016068541A1 (en) | 2014-10-29 | 2015-10-21 | Electrical connector including porous insulation sheet having through-hole and manufacturing method therefor |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101606284B1 (en) |
| TW (1) | TWI595719B (en) |
| WO (1) | WO2016068541A1 (en) |
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| KR101739536B1 (en) * | 2016-05-11 | 2017-05-24 | 주식회사 아이에스시 | Test socket and conductive particle |
| KR101739537B1 (en) * | 2016-05-11 | 2017-05-25 | 주식회사 아이에스시 | Test socket and conductive particle |
| KR101970697B1 (en) * | 2017-03-31 | 2019-04-22 | 주식회사 이노글로벌 | By-directional electrically conductive pattern module using carbon fiber and manufacturing method thereof to which laser processing technology is applied , by-directional electrically conductive socket |
| KR101985445B1 (en) * | 2018-07-25 | 2019-06-04 | 주식회사 아이에스시 | Conductive sheet for electrical test |
| KR102139946B1 (en) * | 2019-01-23 | 2020-08-12 | 주식회사 이노글로벌 | Test socket and method thereof |
| KR102139945B1 (en) * | 2019-01-23 | 2020-08-03 | 주식회사 이노글로벌 | Test socket and method thereof |
| KR102175797B1 (en) * | 2019-03-25 | 2020-11-06 | 주식회사 아이에스시 | Electrical test socket |
| KR102046283B1 (en) * | 2019-07-29 | 2019-11-18 | 주식회사 새한마이크로텍 | Anisotropic conductive sheet |
| KR102597496B1 (en) * | 2021-09-07 | 2023-11-02 | 주식회사 아이에스시 | Socket for electrical connector |
| KR102868587B1 (en) * | 2023-12-13 | 2025-10-02 | 주식회사 아이에스시 | Test Socket |
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| JPH10247536A (en) * | 1997-03-05 | 1998-09-14 | Jsr Corp | Anisotropic conductive sheet and method for producing the same |
| JP2000243485A (en) * | 1999-02-17 | 2000-09-08 | Jsr Corp | Anisotropic conductive sheet |
| JP2003021648A (en) * | 2002-04-04 | 2003-01-24 | Jsr Corp | Method for producing anisotropic conductive sheet |
| JP2008082983A (en) * | 2006-09-28 | 2008-04-10 | Jsr Corp | Anisotropic conductive connector and method for inspecting test object using this anisotropic conductive connector |
| KR101266124B1 (en) * | 2012-04-03 | 2013-05-27 | 주식회사 아이에스시 | Test socket with high density conduction section and fabrication method thereof |
-
2014
- 2014-10-29 KR KR1020140148158A patent/KR101606284B1/en active Active
-
2015
- 2015-10-21 WO PCT/KR2015/011128 patent/WO2016068541A1/en not_active Ceased
- 2015-10-28 TW TW104135318A patent/TWI595719B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10247536A (en) * | 1997-03-05 | 1998-09-14 | Jsr Corp | Anisotropic conductive sheet and method for producing the same |
| JP2000243485A (en) * | 1999-02-17 | 2000-09-08 | Jsr Corp | Anisotropic conductive sheet |
| JP2003021648A (en) * | 2002-04-04 | 2003-01-24 | Jsr Corp | Method for producing anisotropic conductive sheet |
| JP2008082983A (en) * | 2006-09-28 | 2008-04-10 | Jsr Corp | Anisotropic conductive connector and method for inspecting test object using this anisotropic conductive connector |
| KR101266124B1 (en) * | 2012-04-03 | 2013-05-27 | 주식회사 아이에스시 | Test socket with high density conduction section and fabrication method thereof |
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| KR101606284B1 (en) | 2016-03-25 |
| TW201630284A (en) | 2016-08-16 |
| TWI595719B (en) | 2017-08-11 |
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