WO2016045989A1 - Lifting system, method for electrical testing, vibration damper, and machine assembly - Google Patents

Abstract

The invention relates to a lifting system comprising a piezoelectric actuator (5), a support (15), and a hydraulic stroke multiplier (10) having an input and an output side, wherein with the input side of the hydraulic stroke multiplier said hydraulic stroke multiplier is tied to the piezoelectric actuator (5), and with the output side of the hydraulic stroke multiplier said hydraulic stroke multiplier is tied to the support. In the method for electrically testing an electronic component, the component is placed on the support (15) of said type of lifting system, and is lifted for positioning relative to a test contact. The vibration damper comprises said type of lifting system. The machine assembly comprises a machine and a vibration damper of said type.

Description

description

Lifting system, electrical testing method, vibration damper and machine unit

The invention relates to a lifting system, a method for electrical testing, a vibration damper and a machine unit. A first aspect of the present invention relates to

Lifting system and a method for electrical testing: In the electrical testing of electronic components, in particular in the testing of LEDs are often lifting systems Benö ^¬ Untitled which raise the electronic component on a support. When lifting the electronic component, a contact is applied to this, so that the electronic Komponen ^¬ te can be acted upon with a measuring voltage for the electrical test. For the necessary lifting systems actuator concepts are he ^¬ required, which have both a high dynamics and a high positioning accuracy. Piezoactuators typically combine these two properties. However, disadvantageous piezoactuators only have a stroke range of about 1.5% with respect to their length in the stroke direction; this means that for common piezo actuators the stroke range is only about 40 to 50 ym.

Against this background of prior art, it is therefore an object of the invention to provide an improved lifting system to sheep ^¬ fen, by means of which can be carried out electrical testing of electronic components suitable. It is another object of the invention to provide an improved method for electrical testing of an electronic component.

Another aspect of the present invention relates to a vibration damper and a machine assembly: When operating machines, in particular large, electric motors, tre- Frequently oscillations, such as excited by imbalance, or magnetically excited by a rotating magnetic flux between the rotor and stator. Disadvantageously, such oscillations can be coupled into a foundation and bring about surrounding installations to vibrate. On the other hand, the vibrations can be transmitted via the rotor to a system to be driven (eg compressor). In addition to comfort problems (volume, human vibrations) this often leads to damage due to fatigue fractures.

It is known to avoid vibrations in the operation of electric motors by eliminating the causing asymmetries, such as by balancing or by a good magnetic Ausläge of the electric motor. However, balancing quality and Ho ^¬ homogeneity of the magnetic guide are technically limited or very expensive.

Furthermore, a passive vibration reduction is known:.. Thus, viscoelastic damping elements can be schinenfuß provided ( "rubber damper") at the Ma ^¬ However, the disadvantage may also be quasi-stationary forces, such as those applied in the construction of torques lead to deformations Furthermore, it , in particular, to use hyd ^¬ raulische damper in vehicle construction, known who took active Stabilisationsmaß- means of hydraulic throttles, that is passively damped. However, quasi-steady forces can be applied by building up form, so that, for example in vehicles are possible (Electronically controlled active Sus ^¬ pension System (ECASS) eg Active Body Control at Mercedes Benz, Active Roll Stabilization at BMW) However, in traditional systems that use hydraulic pumps, the response time is quite long or the cutoff frequency is low (a few Hz). , Furthermore, magnetorheological dampers are known. However Normalerwei ^¬ se achieve these only one adjustable damping saddle ^¬ rakteristik, no active introduction of Vorkräften. Furthermore, in buildings, especially high-rise buildings, or bridges, overhead lines and internal combustion engines

Vibration damper used to reduce vibrations. Vibration dampers consist of an absorber mass, which is connected to the system to be damped with a damper spring and a damper. At their natural frequency, the vibration absorber absorbs vibration energy from the structure to be damped. Disadvantageously, all vibration absorbers require an additional mass and are therefore expensive and heavy. It is therefore also an object of the invention to provide an improved vibration damper and an improved machine unit.

These objects are achieved with a lifting system having the features specified in claim 1, with a method for electrical testing of an electronic component having the features specified in claim 8, with a vibration damper having the features specified in claim 10 and with a machine assembly with the in claim 15 specified characteristics. Preferred embodiments of the invention are set forth in the appended subclaims, the following description and the drawing.

The lifting system according to the invention has at least one

Piezosteller on. Furthermore, the lifting system has a support so ^¬ as a hydraulic path translator with an input and an output side, wherein the hydraulic path translator is connected with its input side to the at least one piezoelectric actuator and with its output side to the support. The lifting system according to the invention thus advantageously combines, on the one hand, the high dynamics and the high positioning accuracy of a piezo actuator as well as, on the other hand, the possibility of achieving long stroke distances by means of hydraulic displacement transducers. chen. Compared to conventional piezo actuators significantly longer stroke distances can be made in this way. At the same time, the lifting system according to the invention has a very high system rigidity, which is significantly higher than in the case of lifting systems in which piezo-actuator paths are translated by means of solid-body joints. The necessary stroke of the lifting system according to the invention can be achieved therefore particularly fast and reli ^¬ casual. Especially in time-critical applications, the lifting system according to the invention can therefore be used particularly advantageously. Furthermore, the stroke ^¬ system according to the invention is hardly resonant to mechanical resonances

excitable. Also in this regard, the lifting system according to the invention is largely unaffected. Preferably, in the lifting system according to the invention

 Piezosteller a piezo plate with a direction of adjustment. Suitably, in the lifting system according to the invention, the hydraulic path translator is connected with its input side in the direction of adjustment to the piezoelectric actuator. Preferably, the

Piezo plate a multilayer piezoelectric actuator. Multilagen-

Piezo actuators can provide high power density with comparatively ^¬ as low supply voltages.

Advantageously, the support is formed with a plate, which extends in particular with its planar extent transversely to the direction of adjustment, wherein the Hubsys ^¬ tem invention preferably forms a lifting table.

Expediently, in the case of the lifting system according to the invention, the hydraulic travel translator comprises on each side at least one piston chamber with a piston guided therein and on the output side. In this case, the cross sections of the at least one piston chamber / the piston chambers on the inlet side and the at least one output-side piston chamber / of the piston chambers preferably deviate from one another. It is understood that under egg nem cross section of a piston chamber, a section of Kolbenkam mer transverse, that is perpendicular to a guide direction of each piston in the chamber guided piston is to be understood.

Alternatively and also preferably, in the case of the lifting system according to the invention, the hydraulic path translator has at least one bellows on the input and output side, the cross sections of the at least one input side and the at least one output side bellows preferably differing from one another. Under a cross section of a pleated bellows in each case a section is present transversely, ie perpendicular ^¬ right to a folding direction of the bellows, di a direction along which the bellows is collapsible to understand. In particular, the cross section runs parallel to a preferably provided fold or crease line or along a circumferentially extending wave crest of an alternative and also preferably provided wave profile of the bellows.

Preferably, in the lifting system according to the invention, the hydraulic path translator on the input side two or three or four or more elements from the group comprising a bellows and a piston chamber with piston guided therein, the hydraulic path translator on the other hand, on the output side less elements from the aforementioned group, preferably exactly an element having.

In a preferred further development of the lifting system according to the invention, the input-side / n-piston chamber / n with the / the output-side piston chamber / s, in particular hydraulically, connected, or it is the input-side bellows or the input-side bellows with the output-side bellows or the output-side bellows, insbesonde ^¬ re hydraulically connected, preferably by means of a respective hydraulic throttle. The design of the hydraulic throttle, the damping behavior of the lifting system according to the invention can be easily adjusted. The at least one input side and the at least one output side piston chamber, cooperating with the respectively guided therein piston or the at least one input side bellows and the at least one output side bellows each suitably form fluid volumes, the fluid volumes coupled together, preferably connected, are. Suitably, the fluid volumes with incompressible siblem fluid, in particular a hydraulic fluid, fills ge ^¬.

According to the aforementioned developments of the invention, the hydraulic transmission of the hydraulic path translator by means of the input and output side piston chambers or by means of the input and output side bellows realized, which have different hydraulic cross-sections and are fluidly interconnected. Due to the requirement that the hydraulic volume must remain constant within the path translator of the lifting system according to the invention, the path ratio of the hydraulic Wegüberset- zer as the ratio of the input side and from ^¬ gangsseitigen hydraulic cross section (approximately their cross-sections transverse to the respective guide direction of the piston or transverse to the folding direction). In the event that a plurality of bellows and / or piston chambers are provided on the input side, naturally their sum of the hydraulic cross sections occurs in place of the aforementioned input-side hydraulic cross section. Analogously, in the case of several bellows and / or piston chambers provided on the output side, the sum of hydraulic cross sections is to be understood as the output-side hydraulic cross section. In this way, by the input side piston movement occurring volume changes of the input side piston chamber or by input side folding of the bellows occurring Vo ^¬ lumen changes the input side bellows via the hydraulic connection corresponding volume changes of the output side piston chamber or the output side bellows cause. Consequently, a particularly precise result se coupling of input and output side of the hydraulic path translator of the lifting system according to the invention.

In those developments of the lifting system according to the invention, in which the respective fluid volumes are realized by means of inlet and outlet side bellows, the respective fluid volumes are moreover metallically sealed. Leakage problems such fluid volumes are therefore avoided from the outset. Path translation is achieved in these developments by flexible waves in the bellows and the associated low axial rigidity. The fluid volume is preferably as small as possible reali ^¬ Siert, so that the rigidity of Hubsys ^¬ tems invention is maximized. Advantageously, the fluid volumes are completed and consequently are not contaminated. Consequently, the lifting system according to the invention can be designed to be particularly durable and low-maintenance.

Suitably, displacement bodies, in particular of metal, are provided in the hydraulic volumes of piston chambers or bellows. In this case, the Ge ^¬ samtsteifigkeit the lifting system according to the invention is particularly increased. Suitably, the cross-section of the piston chamber on the inlet side is greater than the cross section of the piston chamber on the output side, or the cross-section of the bellows on the entrance side is big ^¬ SSER than the cross section of the bellows on the output side in the inventive lifting system. In this development, a translation of travel ranges of the piezoelectric actuator is guaranteed in comparison with these larger travel ranges of the lifting system according to the invention.

In the method according to the invention for the electrical testing of an electronic component, the component is placed on the support of a lifting system according to the invention as described ^above and suitably raised or lowered for positioning relative to a test contact. By means of the invention According to the invention Hubsystem as described above, a very high system rigidity is achieved at the same time as well as a required stroke accomplished very quickly. By means of the method according to the invention can therefore be a

Shorten test time of an electronic component significantly because both the time and the reliability of the necessary for Che ^¬ fung hubs is improved. Further lifting system according to the invention is strongly damped by the hydraulic and there is a "soft" lift curve, by means of which the electronic component particularly gently lifted or ge ^¬ can be lowered. Positioning of an electronic component relative to a test contact is thus possible by means of the method according to the invention particularly adapted to the needs. Ideally, the inventive method for testing an electronic component in the form of a light emitting diode (LED) is performed.

The vibration damper according to the invention comprises an inventive lifting system as described above.

In contrast to traditional vibration absorbers (with additional masses), the vibration damper according to the invention allows installation directly between a foundation and about one foot of a machine to be damped. In terms of design and control, this is a particularly simple, efficient and robust approach.

The use of piezo actuators for vibration reduction in the past has often been due to the low deflections of

Piezo controllers failed. By means of the here presented microhydraulic principle with the use of Hubübersetzern invention and the coupling of any number of piezo actuators to an output side bellows or an output side piston chamber with piston guided therein this limit effectively lifted: According to the invention can be almost any deflection of the lifting system according to the invention and the invention Achieve vibration damper at almost any level of force. In the case of the vibration damper according to the invention, the support for positive and / or material and / or non-positive connection with a part of a machine, in particular a machine base, is preferably set up.

In an advantageous further development of the vibration dampers according to the invention comprises a connection pieces as well as a second hydraulic displacement transducer having an input and an output side, which is connected with its input side to ei ^¬ NEN other linear actuator and with its output side to the connection part on. In this way not only vertical vibrations can be damped, as is the case by means of the vibration damper according to the invention with the lifting system according to the invention, but it can additionally vibrations in other degrees of freedom, such as vibrations in horizontal Raumrich- lines by means of the second hydraulic path translator with the other linear actuator be steamed.

Suitably, the shock absorber according to the invention comprises a control unit which is designed to drive the piezoelectric actuator in a first mode such that the IMP EXP ^¬ including acting on the lifting system power remains constant

and / or in a second mode to control such that the support oscillates with the least possible deflection. At least one other actuator, in particular at least one magnetic and / or magnetostrictive and / or electrostrictive actuator and / or one actuator, which is based on the shape memory principle, preferably the principle of the magnetic shape memory, is preferred in the case of the vibration damper according to the invention instead of the at least one piezoelectric actuator , available. The machine assembly according to the invention comprises a machine, in particular an electric motor, and at least one

Vibration damper as described above, which, preferably by means of a connection part, to the machine, preferably at least one foot of the machine, is connected.

The machine unit according to the invention can be easily and compactly formed, for example, by providing a typical machine base with a vibration damper, which requires little or no changes in space or weight. So machine units according to the invention can be designed with small amendments ^¬ balances due from non-dampened machines. In particular, it is not necessary to provide space for large absorber masses. This can significantly improve customer acceptance. The reduction of vibrations of the machine is possible in different variants. The decoupling of the engine of the machine unit of the invention and a foundation on which the machine is oniert positive prevents oscillating forces are introduced into the Fun ^¬ dation. The sedative directs the forces ^¬ art into the machine so that they (or one or several ^¬ re its parts) is prevented from vibrations. In mixed forms, there is a combination of the above features, so that the vibration of the machine or parts of the machine is reduced, but at the same time an application of force into the foundation is kept within an acceptable range.

In particular, on which the machine positio ned each ^¬ a vibration damper according to the invention between a base of the machine and a foundation is provided. In a machine, such as in the form of a typical electric motor, with four feet thus four vibration dampers are advantageously used according to the invention; Accordingly, it is a distributed vibration damping system.

In the case of the vibration damper according to the invention and the machine aggregate according to the invention, it is preferred that the invention The corresponding lifting system with frequencies from static operation (0 Hz) up to a maximum frequency, preferably at least 5000 1 / min, in particular at least 10000 1 / min, deflected. Suitably, the lifting system within the aforementioned frequency range with a deflection of up to 200 Mikrome ^¬ tern, in particular with a deflection of up to 800 micro ^¬ meters, deflected.

Periodically, the maximum frequency is determined by the frequency of the machine Maximalbetriebs- (suitably at least 5000 1 / min), multiplied by the number of pole pairs (suitably Minim ^¬ least 2) as a (electric) motor of the machine is determined. The necessary maximum deflection results from the dynamic system design and depends primarily on the type of foundation, above all on the (missing) rigidity of the foundation.

Typically, the maximum deflection needed to Be is ^¬ range from 200 micrometers to 800 micrometers. By deflecting the lifting system according to the invention of the vibration damper according to the invention, a control or controllable deflection or force is set between the foundation and the machine. In this manner in particular the possibilities are described in more detail by the Schwingungsre- ^¬ following production of the machine unit available, which are suitably implemented in the above-described control means comprises:

1. decoupling:

 The vibration of the machine is decoupled from the foundation, i. the foundation becomes only quasi-stationary forces

(Weight of the machine and / or quasistationärer Drehmomentbe ^¬ load) exposed. For this, the deflection of the

Piezo plate expediently so controlled and / or gere ^¬ gelt that the force on the piezo plate and / or on the output side of the hydraulic path translator as possible kon ^¬ stant. For this purpose, force sensors are advantageously integrated into the piezoelectric actuator and / or the hydraulic displacement transducers. The machine can swing so almost free. The engine vibration is thus not reduced compared to the undamped system. However, the vibrations coupled into the environment are suppressed or considerably reduced, which is advantageous with regard to noise pollution or human vibrations.

2. reassurance:

The deflections of the piezoelectric actuator are controlled so that the machine or parts of the machine, in particular a motor block or a motor shield or an engine bearing or a rotor or an axis of an electric motor, prevented from their vibrations, that is, as it were "tied" or will. to this end, forces must be coupled opposite the excitation forces in the Wesentli ^¬ chen, but are selected to be equal in size. Advantageously, this mounted sensors on the parts to be quieted, and the amplitude, frequency and phase position is suitable algorithms

(see below). The machine vibrations are greatly reduced in this way. However, some large forces are introduced into the foundation that this - can stimulate re ^¬ rum to vibrations - depending on the design.

3. Mixed forms:

 A suitable quality function is used to determine an advantageous combination of decoupling and reassurance. For example, it may be the goal to keep a machine vibration amplitude below a certain limit, but with the least possible force introduction into a foundation of the machine. This can be done depending on the operating point (such as rotational frequency, applied torque), either by a suitable adaptive algorithm or feedforward.

As a rule, a plurality of piezo plates are connected to inlet-side bellows or piston chambers with pistons guided therein. All piezocells are preferably uniformly controllable, so that in sum with n piezo actuators a n-fold deflection of the lifting system according to the invention with the same rather power can be achieved. This arrangement makes it possible to pursue a common-part concept for a whole series of lifting systems according to the invention and vibration dampers according to the invention, ie to use the same piezo-actuators. In addition, the reliability of the inventive ^¬ Shen lifting system and the vibration damper according to the invention is increased, as in case of failure of a single piezoelectric actuator, the ge ^¬ entire lifting system or the entire vibration damper, albeit with reduced power, continues to work.

For controlling a plurality of existing inventive

Vibration damper of a machine assembly according to the invention is generally a distributed control necessary. Well-known algorithms such as the skyhook algorithm or the filtered-x LMS algorithm are suitable for this.

As a simple alternative, it is possible to use measured values to create a machine model which enables a prediction of the vibration ^{behavior to be} expected at a specific frequency. On this basis, it is possible to calculate amplitudes and ^{phases of} the individual vibration dampers, which then only need to be controlled in synchronous rotation. The angle of rotation of the motor can be taken from the control (inverter) of the motor, so that in this way a simple and robust control of the vibration damper can be realized.

The invention will be explained in more detail with reference to an embodiment shown in the drawing:

Show it:

1 shows a lifting system according to the invention, which has a hydraulic path translator with hydraulically interconnected piston chambers up, in a schematic diagram in longitudinal section,

2 shows a vibration damper according to the invention, which is used for vibration damping of an electric is formed in a schematic diagram in longitudinal section as well as

Fig. 3 shows a conventional machine (a) and a he ^¬ invention according to (b) machine unit with egg nem inventive vibration damper gem.

Fig. 2 in a schematic diagram in longitudinal section.

The lifting system according to the invention shown in Figure 1 has a piezoelectric actuator 5, which is designed to position a travel in the direction of a positioning direction S. For this purpose, the piezoelectric actuator 5 is clamped fixedly on one side R. From this side R, the piezoelectric actuator 5 extends in the direction of adjustment S with an electrically influenceable longitudinal dimension in the longitudinal direction. The piezoelectric actuator 5 thus has from its clamped side facing away from a free end R M on which is variably spaced from a ^¬ R tensioned side in the longitudinal direction. The free end M of the piezoelectric actuator 5 is connected to a Eingangssei ^¬ te E a hydraulic Wegübersetzers 10th The path translator 10 has an output side A, which is connected to a support in the form of a lifting table plate 15. The lifting table plate 15 is in Fig. 1 only hinteu ^¬ tet (as a dashed, vertical line). The hydraulic travel translator 10 comprises an input-side piston chamber 20 and an output-side piston chamber 25 hydraulically coupled thereto. In the input-side piston chamber 20, a piston 30 is guided on the input side, ie a handle 32 is led out of the piston chamber 20 on the input side. In the output-side piston chamber 25, a piston 35 is also guided. The piston 35 has a handle 37, which is the output side of the piston chamber 25 executed. Both the piston 30 of the input-side piston chamber 20 and the piston 35 in the output-side piston chamber 25 are each movably guided in and opposite to the adjustment direction S in the respective piston chamber 20, 25. The input-side piston chamber 20 and the output-side piston chamber 25 are mitei ^¬ nander hydraulically connected via a hydraulic throttle 40 and thus coupled. The lifting system according to the invention shown in FIG. 1 is operated as follows:

The piezoelectric actuator 5 is acted upon in a conventional manner with a voltage, so that the free end of the M

Piezostellers 5 deflects in the direction S out. The free

End M of the piezoelectric actuator 5 is rigidly coupled with the handle 32 of the guided in the input-side piston chamber 20 piston 30. As a result, in the deflection of the free end M of the piezoelectric actuator 5, the piston 30 is moved in the direction of adjustment S within the input-side piston chamber 20.

In the input-side piston chamber 20 is connected to the of the

Piezo plate 5 facing away from the piston 30 a

Hydraulic oil is located. The piston 30 consequently limits in the input-side piston chamber 20 the volume which occupies the hydraulic oil in the input-side piston chamber 20. During the movement of the piston 30 in the eingangsseiti ^¬ gene piston chamber 20 in the direction of adjustment S lending succession lends for the hydraulic oil within the input side

Piston chamber 20 available volume. As a result, hydraulic oil is displaced from the input-side piston chamber 20 and passes through the hydraulic throttle 40 in the output-side piston chamber 25 of the hydraulic Wegüberset- zers 10. Also in the output-side piston chamber 25, the volume available for the hydraulic oil by a piston, here in the the output side piston chamber 25 guided piston 35, limited. As a result of the in ^¬ outgoing piston chamber 25, which also with

Hydraulic oil is filled, in addition inflowing hydraulic oil, consequently, the guided in the output-side piston chamber 25 piston 35 is moved in the direction of adjustment S. On the handle 37 of the guided in the output side piston chamber 25 piston 35, which is moved in the direction of adjustment S, the lifting table plate 15 is rigidly coupled movement and indeed directly attached in the illustrated embodiment. As a result, the lifting table plate 15 moves in the direction of adjustment S.

As a result of the significantly larger cross section perpendicular to the direction of adjustment S of the input side piston chamber 20 compared to the output side piston chamber 25, the lifting table plate 15 does not move about that travel to wel ^¬ Chen, the free end of the piezoelectric actuator 5 moves in Stellrich ^¬ device S ( in the illustrated embodiment about 50 ym). Rather, the hydraulic path translator 10 has a much larger translation. As a result, the lifting table plate 15 moves by a distance in the adjusting direction S, wel ^¬ cher from the travel of the free end M of the piezoelectric actuator 5 by multiplication with a translation factor> 1, in the illustrated embodiment, a factor of 100 (the dimensions of in Fig. 1 shown piston chambers 20, 25 are not shown to scale). In this way can be achieved by appropriate control of the piezoelectric actuator 5, a corresponding adjustment path of the Hubtischplatte 15, in ^¬ represent provided Embodiment 5 millimeters achieve. If, however, the free end M of the piezoelectric actuator 5 is moved counter to the setting direction S, then the lifting table plate 15 moves about this with the translation factor 100 scaled travel counter to the direction of adjustment S. In the inventive method for electrical testing of a light-emitting diode is shown in Figure 1 Positioning system positioned so that the adjustment direction S parallel or in anti-parallel to the direction along which the weight acts, is oriented. That is, the lifting system illustrated in FIG. 1 is oriented vertically with its adjusting direction S, for example in such a way that the lifting table plate 15 is located above the piezo-actuator 5. To test the light emitting diode, the LED is placed on the Hub ^¬ table top 15. For electrical testing of

LED is a not shown in Figure 1 test contact, which is rigid to the clamped end R of

Piezo actuator 5 is arranged, used. The light-emitting diode not explicitly shown in FIG. 1 is suitably raised or lowered for positioning relative to this test contact by means of the lifting table plate 15. In this way, the light emitting diode is brought into contact with the test contact and thereby acted upon with a test voltage. Subsequently, an electrical test of the LED can be done.

It is understood that instead of the input-side piston chamber 20 with the piston 30 guided therein and the output-side piston chamber 25 with the piston 35 guided therein also an inlet-side bellows and an output-side bellows, comparable to the arrangement shown in FIG a hydraulic throttle 40 mitei ^¬ nander are hydraulically coupled, can be present. Instead of the coupling of the free end M of the piezoelectric actuator 5 to the handle 32 of the guided in the input side piston chamber 20 piston 30, the free end of the piezoelectric actuator 5 is instead coupled to the free end of the piezoelectric actuator 5 to ^¬ facing end of the input side bellows. The inlet-side bellows has a folding direction, which along the direction of adjustment S gem. Fig. 1 runs. Accordingly, one of the lifting table plate 15 facing the end of the output side bellows is connected to this. The folding direction of the output side bellows runs opposite to the direction of adjustment S gem. Fig. 1. It is further understood that in the above-explained inventive method instead of a light-emitting diode, other electronic components can be electrically tested. The vibration damper 200 shown in Fig. 2 is used for damping vibrations of a machine, according to the illustration. Fig. 3 of an electric motor 300th The vibration damper 200 comprises four piezo-actuators 5, which are each clamped fixedly on one side R (in the illustration according to FIG. 2, 2 piezo-actuators 5 are shown). From this side R, the piezoelectric actuator 5 extends in each case in the direction of adjustment S with an electrically influenceable longitudinal dimension in the longitudinal direction. The piezoelectric actuator 5 thus has a free end M away from its clamped side R, which is variably spaced from the clamped side R in the longitudinal direction. The free end of each of the M time jewei- piezoelectric actuator 5 is connected to an input side 10 ^λ e ^¬ a hyd raulischen Wegübersetzers. The four

Piezosteller 5 are deflected synchronously by means of a control device. In contrast to in Fig. 1 shown Ausführungsbei ^¬ game that shown in Fig. 2 hydraulic way comprises ^¬ translator 10 ^λ to a place of an input-side piston chamber 20 with guided therein pistons 30 an input-side bellows 220 and instead of a output-side piston chamber 25 with guided therein piston 35 an output-side bellows 225, which are hydraulically coupled to one another with the arrangement shown in Figure 1 via a hydraulic throttle 40. . In a further contrast to the shown in Figure 1 hydraulic displacement transducer 10 hydraulic displacement transducer shown 2 are in Fig 10 ^λ, not only one, but rather four input-side bellows 220 hydraulically each with a single output-side bellows 225 lisch connected. The output-side bellows 225 is to move in the vertical direction, ie, the output side bellows 225 is collapsible in the vertical direction. The vertically upwardly extending side of the output-side bellows 225 terminates at the front end with a machine support 230. The machine support 230 serves as a bearing surface of a motor base F of the electric motor 300 (see in particular FIG. 3). Furthermore, the machine support 230 has a thread (not specifically shown), which with a thread of the Motorfoot F corresponds to. By means of this thread of the motor foot F can be on the machine pad 230 fixie ^¬ ren. The input-side bellows 220 are in contrast to the output-side bellows 225 horizontally movable, ie, the input-side bellows 220 are collapsible in the horizontal direction. The four input-side bellows 220 extend with their horizontal directions in which they are each movable / collapsible, viewed in the horizontal plane star-like radially away from the output ^¬ side bellows 225 away.

The output side bellows 220 are based on a foundation B from.

The Maschinenaggre ^¬ invention shown in Fig. 3 b (in contrast to a conventional machine a)) comprises the electric motor 300 with four motor bases F and the four vibration damper 200, to which each of the four motor feet of the electric motor 300 is connected.

The electric motor 300 comprises a stator and a rotor (not shown in detail), which rotate relative to the stator (not shown in detail) at a frequency up to a maximum operating frequency of 5000 revolutions per minute about an axis A. The electric motor 300 has 2 pole pairs (not explicitly shown), so that the maximum frequency of vibrations that occurs during operation is 10000 1 / min. During engine operation in the frequency furthermore occur ^¬ frequency range from 0 to 10,000 1 / min Maximalauslenkungen of 800 microns.

For this purpose, the vibration damper 200 according to the invention has force sensors (not specifically shown), which are arranged on the input side of the bellows 225 on the output side and detect forces acting there. By means of the force sensors, the respective acting force is detected and a control unit direction (not shown). By means of the control device, the piezoelectric actuator 5 are controlled in their temporal deflection in such a way that the respectively acting force disappears as far as possible.

Alternatively, in a further, not specifically illustrated embodiment instead of the force sensors acceleration ^¬ nigungssensoren be provided, which are each arranged on the motor feet F or on the rotor of the electric motor 300 and which the vibrations of the electric motor 300 in

Capture amplitude, frequency and phase. The sensors übermit ^¬ stuffs the collected data to a control device which drives the piezoelectric actuator 5, such that the (spatial) amplitude of the engine vibrations disappear as possible.

In a further embodiment, mixed forms of the two above-mentioned controls are also possible: Thus, a suitable quality function can be provided, the consideration leads to, for example, an amplitude of the engine vibrations is kept below a certain threshold, while this takes place at the lowest possible force into the foundation B.

In a further, not specifically shown Ausführungsbei- game, which otherwise corresponds to the Ausführungsbei ^¬ game shown, a connection piece for connection to the electric motor 30 and an additional, second hydraulic path translator is additionally provided, which has an input side to a another linear actuator, as well as an output side, which is connected to the connection part has.

The control of the four vibration dampers 200 is carried out in the aforementioned embodiments by means of a distributed control: for example, while the Skyhook algorithm or the filtered-x LMS algorithm is used. Alternatively, in a further embodiment, a machine model for the electric motor 300 is used, which allows a prediction of the expected vibration behavior at a certain frequency. On this basis, it is possible to calculate the amplitudes and phases to be set of the individual vibration dampers, which then need only be controlled in synchronism with the operating frequency of the electric motor 300. The angle of rotation of the electric motor 300 can be taken from the drive, such as an inverter (not shown) of the electric motor 300, so that in this way a simple and robust control of

Piezosteller 5 can be realized.

Claims

claims 1. lifting system, comprising at least one piezoelectric actuator (5), a support (15) and a hydraulic displacement transducer (10) having an input and an output side, which with its input side to the piezoelectric actuator (5) and with its output side to the support ( 15) is connected. 2. Lifting system according to claim 1, wherein the hydraulic path translator (10) on the input and output side at least one piston chamber (20, 25) and a piston guided therein (30, 35), wherein the cross sections of the input and the output side piston chamber / n (30, 35) preferably differ from one another. 3. Lifting system according to one of the preceding claims, wherein the hydraulic path translator (10) on the input and output side each comprises at least one bellows, wherein the cross sections of the / of the input and the output side bellows bellows / bellows differ from each other. 4. Lifting system according to one of the preceding claims, wherein the hydraulic path translator on the input side two or three or four or more elements comprising a bellows and a piston chamber with piston guided therein comprehensive group, said hydraulic path translator ^¬ side fewer elements from the above Group, preferably exactly one element having. 5. Lifting system according to one of the preceding claims, wherein the input and output side piston chamber / s (20, 25) or inlet and outlet side bellows / bellows are hydraulically connected to each other. 6. Lifting system according to one of the preceding claims, in which inlet and outlet side bellows / bellows or inlet and outlet side piston chamber (s) (20, 25) together mit- one or more hydraulic throttle (s) (40) are connected. 7. Lifting system according to one of the preceding claims, wherein the cross section of the input-side piston chamber (20) is greater than the cross section of the output side piston chamber (25) or in which the cross section of the input ^¬ side bellows is greater than the cross section of the ^¬ gangsseitigen bellows. 8. A method for electrical testing of an electronic component, wherein the component is placed on the support (15) of a lifting system according to one of the preceding claims on ^¬ and is lifted or lowered for positioning relative to a Prüfkon- tact. 9. A method for electrical testing according to the preceding claim, which is carried out for testing an electronic component in the form of a light emitting diode (LED). 10. Vibration damper, which has a lifting system according to one of claims 1 to 6. 11. Vibration damper according to the preceding claim, wherein the support for positive and / or material and / or force ^¬ conclusive connection with a part of a machine, in particular a machine base, is set up. 12. Vibration damper, in particular according to claim 9, which also has a linear actuator, a connecting piece and a second hydraulic path translator (10) having an input and an output side, which is connected with its input side to the linear actuator and with its output side to the connection part , 13. Vibration damper according to one of the preceding claims, comprising a control unit, which is designed to control the piezoelectric actuator in a first operating mode, that the force acting overall on the lifting system remains constant and / or such to steu ^¬ ren in a second mode in that the support oscillates with the least possible deflection. 14. Vibration damper according to one of the preceding claims, wherein instead of a piezoelectric actuator another actuator, in particular a magnetic and / or magnetostrictive and / or electrostrictive actuator and / or an actuator which is based on the shape memory principle, preferably the principle of magnetic shape memory, is present. 15. Machine unit, comprising a machine, in particular an electric motor, and at least one vibration damper according to one of the preceding claims, which, preferably by means of a connection part, to the machine, preferably ^¬ at least one foot of the machine is connected.