WO2015188353A1 - Vacuum coating device - Google Patents

Abstract

A vacuum coating device. The vacuum coating device comprises a vapor deposition chamber, a bracket, and a magnetic rotation assembly connected with the bracket. The bracket is provided inside of the vapor deposition chamber and is used to place workpieces to be coated. The magnetic rotation assembly comprises a first rotation magnetic body placed outside of the vapor deposition chamber and a second rotation magnetic body placed inside of the vapor deposition chamber. The first rotation magnetic body and the second rotation magnetic body are magnetically coupled. The first rotation magnetic body is driven by a synchronous motor to rotate, and drives the second rotation magnetic body to rotate, which further drives the bracket to rotate. The device can prevent air leaks and can perform vacuum nano-coating in batches on workpieces to be coated, thereby effectively enhancing the efficiency and effectiveness of vacuum nano-coating on workpieces to be coated.

Description

Vacuum coating equipment

[Technical Field]

The invention relates to a vacuum coating apparatus.

 【Background technique】

After the polymer material is cleaved into nano-molecules, the nano-protective film is formed on the surface of the product without gaps in a vacuum environment, and is called a vacuum vapor deposition nano-coating film. The nano-coating and traditional coating or spray coating and painting of this process have the following characteristics: 1. Waterproof, moisture-proof and no pores, good sealing; 2. Coating acid and alkali resistance, high insulation grade, anti-static generation; 3. Smooth coating surface , anti-fouling dirt adhesion, low friction, easy to scrub; 4, appearance color, can be adjusted according to demand, from high transparency to other colors. 5, the coating thickness is from 0.1 micron to more than 50 microns; 6, the coating adhesion is good, no internal internal stress, bubble holes, coating film to adapt to the ambient temperature ± 200 ° C, does not fall off wrinkles.

In the nano-coating, the raw material is vaporized at 150 ° C to form a gaseous state in the material chamber, and then enters a cracking furnace at a high temperature of about 650 ° C to be decomposed into nano-sized molecules. It enters the coating chamber at normal temperature, and forms a film by vapor deposition in a vacuum state to uniformly cover the pinholes and gaps on the surface of the product. It differs from metallization and spray paint in that it can be vacuum-vapor deposited nano-coating on the surface of the product and uniformly covered to form a pinhole-free, dense, transparent film.

Because of the nano-coating, the surface of the product to be coated must be in contact with air. Therefore, how to improve the coating equipment to adapt to different product coatings is a technical problem to be solved.

 [Summary of the Invention]

The invention provides a vacuum coating device capable of performing batch vacuum nano-coating on a workpiece to be coated, thereby improving the efficiency of the vacuum nano-coating of the workpiece to be coated and the coating effect.

In order to solve the above technical problem, the present invention provides a vacuum coating apparatus including a vapor deposition chamber, a bracket, and a magnetic rotating component connected to the bracket, the bracket being disposed on a vapor deposition chamber for placing a workpiece to be coated, the magnetic rotating assembly comprising a first rotating magnet disposed on an outer side of the vapor deposition chamber and a second rotating magnet disposed on a side of the vapor deposition chamber, A rotating magnet is magnetically coupled to the second rotating magnet, and the first rotating magnet is rotated by the synchronous motor, and can drive the second rotating magnet to rotate, thereby driving the bracket to rotate.

Wherein the vacuum coating apparatus further includes an exhaust column disposed through the vapor deposition chamber, the first rotating magnet and the second rotating magnet being respectively rotatably supported on the exhaust column and Rotating around the exhaust column, thereby driving the bracket to rotate around the exhaust column.

The bracket includes a bracket column, and the bracket column is hollow. The exhaust column is inserted into the bracket column from one end of the bracket column, and the bracket column is nested outside the exhaust column. The exhaust column is disposed on a bottom wall of the vapor deposition chamber and extends in a vertical direction, and the bracket column is nested to the outside of the exhaust column in the vertical direction and is seated in the first The rotating magnet is rotated around the exhaust column by the second rotating magnet.

Wherein the top of the vapor deposition chamber is provided with an opening through which the support can be placed in or taken out of the vapor deposition chamber.

Wherein the vacuum coating apparatus further includes an inlet disposed at a sidewall of the vapor deposition chamber and a temperature reducing splitter baffle disposed in the vapor deposition chamber opposite the inlet, the inlet for introducing a polymer material The cracking gas is cooled by the cooling material splitting baffle and diffused in the vapor deposition chamber.

Wherein, the exhaust column is hollow and a plurality of first ventilation holes are disposed on a sidewall of the exhaust column, and a plurality of second ventilation holes are disposed on a sidewall of the support column, the height The molecular material cracking gas is uniformly diffused through the first vent hole and the second vent hole and deposited on the workpiece to be coated.

Wherein, the first vent hole is a strip hole provided in the longitudinal direction along the axial direction of the exhaust column.

The first vent holes disposed adjacent to each other in the axial direction of the exhaust column are staggered from each other in the axial direction of the exhaust column.

The second vent hole is a circular hole, and the length of the first vent hole is larger than the diameter of the second vent hole.

Wherein the vacuum coating apparatus further includes a cooling tower disposed on the outdoor side of the vapor deposition chamber and connected to the exhaust column, and the residual gas after vapor deposition passes through the second vent hole and the first vent hole The exhaust column is further introduced into the cooling tower through the exhaust column.

Wherein the bracket further comprises a top cover sealed to the other end of the bracket post.

The bracket further includes a main support ring and a plurality of main support bars, the main support ring and the support post are nested and fixed on the support post, and the plurality of main support bars are disposed on the bracket The main support ring extends radially outward of the main support ring.

The second vent hole is disposed between the main support bars disposed adjacent to each other along an axial direction of the bracket column.

Wherein, the bracket further includes an auxiliary support ring and a plurality of auxiliary support rods, wherein the auxiliary support ring is disposed on the main support rod and is nested with the main support ring in a radial direction of the support post The plurality of auxiliary support rods are disposed on the auxiliary support ring and extend radially outward of the auxiliary support ring.

The invention has the beneficial effects that: different from the prior art, a vacuum coating device includes a vapor deposition chamber, a bracket and a magnetic rotating component connected to the bracket, and the magnetic rotating component is disposed through the vacuum coating device. a first rotating magnet on the outdoor side of the vapor deposition and a second rotating magnet disposed on the side of the vapor deposition chamber, wherein the first rotating magnet is magnetically coupled to the second rotating magnet, and the first rotating magnet is rotated by the synchronous motor and drives the second The rotating magnet rotates, which in turn drives the vacuum coating device to rotate the bracket for placing the workpiece to be coated. Through such a design, leakage can be avoided, and batch vacuum nano-coating can be performed on the coated workpiece, thereby effectively improving the efficiency of the vacuum nano-coating of the workpiece to be coated and the coating effect.

 [Description of the Drawings]

1 is a schematic structural view of a vacuum coating apparatus according to an embodiment of the present invention;

2 is a schematic structural view of an exhaust column of a vacuum coating apparatus according to an embodiment of the present invention;

3 is a schematic structural view of a bracket column of a vacuum coating apparatus according to an embodiment of the present invention;

4 is a schematic structural view of a bracket of a vacuum coating apparatus according to an embodiment of the present invention;

FIG. 5 is a schematic structural view of another vacuum coating apparatus according to an embodiment of the present invention.

 【detailed description】

The invention will now be described in detail in conjunction with the drawings and embodiments.

Please refer to FIG. 1. FIG. 1 is a schematic structural diagram of a vacuum coating apparatus according to an embodiment of the present invention. The vacuum coating apparatus of the embodiment includes a vapor deposition chamber 1, a bracket 2, and a magnetic rotating component connected to the bracket 2, and the bracket 2 Provided in the vapor deposition chamber 1 for placing a workpiece to be coated, the magnetic rotating assembly includes a first rotating magnet 34 disposed outside the vapor deposition chamber 1 and a second rotating magnet 35 disposed inside the vapor deposition chamber 1, the first rotation The magnet 34 is magnetically coupled to the second rotating magnet 35. The rotary driving motor (not shown) drives the first rotating magnet 34 to rotate, and the first rotating magnet 34 drives the second rotating magnet 35 to rotate, thereby driving the bracket 2 to rotate.

The vacuum coating apparatus of the embodiment of the present invention further includes an exhaust column 32 disposed through the vapor deposition chamber 1 , and the first rotating magnet 34 and the second rotating magnet 35 are respectively rotatably supported on the exhaust column 32 and capable of being Rotating around the exhaust column 32, thereby driving the bracket 2 to rotate around the exhaust column 32.

The bracket 2 includes a bracket column 22, and the bracket column 22 is hollow. The exhaust column 32 is inserted into the bracket column 22 from one end of the bracket column 22. The bracket column 22 is nested outside the exhaust column 32, and the exhaust column 32 is disposed through. On the bottom wall of the vapor deposition chamber 1 and extending in the vertical direction, the support column 22 is nested in the vertical direction outside the exhaust column 32 and seated on the second rotating magnet 35, thereby being driven by the second rotating magnet 35. The lower exhaust column 32 is rotated.

Preferably, an opening 36 is provided on the top of the vapor deposition chamber 1 to allow the stent 2 to be placed in the vapor deposition chamber 1 through the opening 36 or to be removed from the vapor deposition chamber 1.

The vacuum coating apparatus of the present embodiment further includes an inlet 37 disposed at a sidewall of the vapor deposition chamber 1 and a temperature-reducing splitter baffle 38 disposed opposite the inlet 37 in the vapor deposition chamber, and the cracked polymer material gas is passed through the inlet. 37 is introduced and cooled by the cooling splitter baffle 38 to diffuse into the vapor deposition chamber 1.

The exhaust column 32 is hollow, and a plurality of first ventilation holes 321 are disposed on the sidewall of the exhaust column 32, and a plurality of second ventilation holes 221 are disposed on the sidewall of the support column 22 to further exhaust the exhaust holes. The polymer material cracking gas introduced by the column 32 enters the vapor deposition chamber 1 through the first vent hole 321 and the second vent hole 221 and is deposited on the workpiece to be coated.

2, FIG. 2 is a schematic structural diagram of an exhaust column of a vacuum coating apparatus according to an embodiment of the present invention. As shown in the figure, the first ventilation hole 321 is a longitudinal direction along the axis of the exhaust column 32. A strip hole that is oriented in the direction.

Preferably, the first vent holes 321 disposed adjacently in the axial direction of the exhaust column 32 are staggered from each other in the axial direction of the exhaust column 32.

FIG. 3 is a schematic structural diagram of a bracket column of a vacuum coating apparatus according to an embodiment of the present invention. As shown in the figure, the second vent hole 221 of the bracket column 22 is a circular hole, and the first pass The length of the air hole 321 is larger than the diameter of the second ventilation hole 221.

Referring to FIG. 1, the vacuum coating apparatus of the present embodiment further includes a cooling tower 39 disposed outside the vapor deposition chamber 1 and connected to the exhaust column 32, and the residual gas after vapor deposition passes through the second vent 221 and the first The vent 321 enters the exhaust column 32 and is further introduced into the cooling tower 39 through the exhaust column 32. In order to avoid the outflow of residual gas, a sensor is also installed in the cooling tower, and the content of the cracking gas of the polymer material in the residual gas can be detected by the sensor, and the inlet 37 is adjusted according to the content of the cracking gas of the polymer material in the residual gas to reduce or The amount of the polymer cracking gas introduced into the vapor deposition chamber 1 is increased.

Please refer to FIG. 4 for further reference. FIG. 4 is a schematic structural diagram of a bracket of a vacuum coating apparatus according to an embodiment of the present invention. The bracket 2 further includes a top cover 33 sealed on the other end of the bracket post 22 .

The bracket 2 further includes a main support ring 28 and a plurality of main support bars 231. The main support ring 28 is nested and fixed on the support post 22, and the plurality of main support bars 231 are disposed on the main support ring 28. And extending radially to the outside of the main support ring 28.

The second vent holes 221 are disposed between the main support bars 231 disposed adjacent to each other in the axial direction of the bracket column 22. The residual gas after vacuum deposition in the vapor deposition chamber 1 can be uniformly extracted from the exhaust column 32 through the first vent hole 321 and the second vent hole 221.

The bracket 2 further includes an auxiliary support ring 30 and a plurality of auxiliary support rods 232. The auxiliary support ring 30 is disposed on the main support rod 232 and spaced apart from the main support ring 30 along the radial direction of the support post 22, and a plurality of The auxiliary support bar 232 is disposed on the auxiliary support ring 30 and extends radially outward of the auxiliary support ring 30.

Through the first main support ring 28 and the second main support ring 29 on the bracket 2, the first auxiliary support ring 30 and the second auxiliary support ring 31 can be provided with as many support bars as possible.

Please refer to FIG. 5. FIG. 5 is another vacuum coating apparatus according to an embodiment of the present invention. As shown in the figure, the vacuum coating apparatus of the embodiment includes a raw material storage tank 3, a cracking furnace 4, a vapor deposition chamber 1 and a The holder 2 in the vapor deposition chamber, the temperature reducing splitter 38, the vacuum pump 5, the rotary drive motor 6, and the cooling tower 39.

Among them, the raw material storage tank 3 is used for storing a polymer material for a raw material, that is, for vacuum coating, such as Parylene. N (parylene), Parylene C (polychloro-p-xylene) and Parylene A cracking gas of at least one material of D (polydichloro-p-xylene), most preferably a parylene cracking gas. The raw material is heated to 150 degrees by using a first-stage heating furnace (not shown) to form a gaseous polymer material, which is introduced into a cracking furnace.

The cracking furnace 4 is connected to the raw material storage tank 3, receives the polymer material heated to the gaseous state by the first stage, and is subjected to secondary heating to 650 degrees, and then is cracked into a nanometer gas of the polymer material, and is passed through the inlet 37 of the side wall of the vapor deposition chamber 1. The polymer material nano gas is introduced into the vapor deposition chamber 1.

After the nano-gas of the polymer material enters from the inlet 37, the temperature is lowered by the cooling and splitting baffle 38 to prevent the 650-degree gas from directly hitting the product to be coated, and the cracked polymer material nano gas encounters the cooling and distributing baffle 38. Spread to the surrounding.

The vacuum coating apparatus further includes a discharge column 32, a rotating assembly 7, a vapor deposition chamber 1, and a support 2 disposed in the vapor deposition chamber 1. The specific composition and function of these components are described in detail in the above embodiments. Do not label the instructions one by one.

The vacuum coating apparatus of this embodiment further includes a cooling tower 39 disposed outside the vapor deposition chamber 1 and connected to the exhaust column 32, and the residual gas after vapor deposition passes through the second vent hole and the row on the support column of the bracket. The first vent of the gas column 32 enters the exhaust column and is further introduced into the cooling tower 39 through the exhaust column 32. The polymer material gas in the residual gas is rapidly solidified by the cooling tower 39 to prevent its outward diffusion.

The vacuum coating apparatus of the present embodiment further includes a vacuum pump 5 connected to the cooling tower 39 to evacuate the vapor deposition chamber through the exhaust column 32 to form a vacuum negative pressure in the vapor deposition chamber 1 to facilitate efficient gas phase realization. Deposition.

Further, the vacuum coating apparatus of the embodiment further includes a rotary drive motor 6 connected to the first rotating magnet through a timing belt for driving the rotation of the first rotating magnet to drive the second rotating magnet, thereby driving the bracket in the vapor deposition chamber. The column 32 is rotated.

It should be noted that the polymer material in the embodiment of the present invention may be Parylene N (parylene), Parylene. At least one material of C (polychloro-p-xylene) and Parylene D (polydichloro-p-xylene), most preferably parylene.

In the vacuum coating apparatus provided by the embodiment of the present invention, the vacuum coating apparatus includes a vapor deposition chamber, a bracket, and a magnetic rotating component connected to the bracket, and the magnetic rotating component passes through the first rotating magnet disposed on the outdoor side of the vapor deposition apparatus of the vacuum coating apparatus and a second rotating magnet disposed on the side of the vapor deposition chamber, wherein the first rotating magnet is magnetically coupled to the second rotating magnet, and the first rotating magnet is rotated by the synchronous motor to drive the second rotating magnet to rotate, thereby driving the vacuum coating device The holder for placing the workpiece to be coated is rotated. Through such a design, leakage can be avoided, and batch vacuum nano-coating can be performed on the coated workpiece, thereby effectively improving the efficiency of the vacuum nano-coating of the workpiece to be coated and the coating effect.

The above description is only the specific embodiment of the present invention, and is not intended to limit the scope of the invention, and the equivalent structure or equivalent process transformation of the present invention and the contents of the drawings may be directly or indirectly applied to other related The technical field is equally included in the scope of patent protection of the present invention.

Claims (14)

A vacuum coating apparatus, comprising: a vapor deposition chamber, a support, and a magnetic rotating component connected to the bracket, the bracket being disposed in the vapor deposition chamber and configured to place a workpiece to be coated, The magnetic rotating assembly includes a first rotating magnet disposed on an outer side of the vapor deposition chamber and a second rotating magnet disposed on a side of the vapor deposition chamber, the first rotating magnet being magnetically coupled to the second rotating magnet The first rotating magnet rotates under the driving of the synchronous motor, and can drive the second rotating magnet to rotate, thereby driving the bracket to rotate. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus further comprises a discharge column, the exhaust column being disposed through the vapor deposition chamber, the first rotating magnet and the second The rotating magnets are respectively rotatably supported on the exhaust column and rotatable around the exhaust column, thereby driving the bracket to rotate around the exhaust column. The vacuum coating apparatus according to claim 2, wherein the bracket comprises a bracket column, the bracket column is hollow, and the exhaust column is inserted into the bracket column from one end of the bracket column, a bracket column is nested outside the exhaust column, the exhaust column is disposed on a bottom wall of the vapor deposition chamber and extends in a vertical direction, and the bracket column is nested along the vertical direction to The exhaust column is externally supported on the second rotating magnet, and further rotated around the exhaust column by the second rotating magnet. A vacuum coating apparatus according to claim 3, wherein an opening is provided on a top portion of said vapor deposition chamber to allow said holder to be placed in said vapor phase deposition chamber or said gas phase through said opening The stent is removed from the deposition chamber. A vacuum coating apparatus according to claim 4, wherein said vacuum coating apparatus further comprises an inlet provided to a side wall of said vapor deposition chamber and a cooling chamber disposed in said vapor deposition chamber opposite said inlet a flow dividing baffle, the inlet is configured to introduce a polymer material cracking gas, and the polymer material cracking gas is cooled by the cooling splitter baffle and then diffused in the vapor deposition chamber. The vacuum coating apparatus according to claim 5, wherein the exhaust column is hollow and a plurality of first vent holes are provided on a side wall of the exhaust column, and a side wall of the support post A plurality of second vent holes are disposed, and the polymer material cracking gas is uniformly diffused through the first vent holes and the second vent holes and deposited on the workpiece to be coated. The vacuum coating apparatus according to claim 6, wherein the first vent hole is a strip hole provided in a longitudinal direction along an axial direction of the exhaust column. The vacuum coating apparatus according to claim 7, wherein the first vent holes disposed adjacent to each other in the axial direction of the exhaust column are staggered from each other in the axial direction of the exhaust column. The vacuum coating apparatus according to claim 8, wherein the second vent hole is a circular hole, and the length of the first vent hole is larger than a diameter of the second vent hole. The vacuum coating apparatus according to claim 6, wherein the vacuum coating apparatus further comprises a cooling tower disposed on the outdoor side of the vapor deposition chamber and connected to the exhaust column, and the residual gas after vapor deposition is passed through The second vent and the first vent enter the exhaust column and are further introduced into the cooling tower through the exhaust column. The vacuum coating apparatus according to claim 6, wherein the bracket further comprises a top cover sealed to the other end of the bracket post. The vacuum coating apparatus according to claim 6, wherein the bracket further comprises a main support ring and a plurality of main support bars, the main support ring being nested with the support post and fixed to the support post The plurality of main support rods are disposed on the main support ring and extend radially outward of the main support ring. The vacuum coating apparatus according to claim 12, wherein said second vent hole is provided between said main support bars disposed adjacently in the axial direction of said holder column. The vacuum coating apparatus according to claim 12, wherein the bracket further comprises an auxiliary support ring and a plurality of auxiliary support rods, the auxiliary support ring being disposed on the main support rod and along the support post The radial direction is nested with the main support ring, and the plurality of auxiliary support bars are disposed on the auxiliary support ring and extend radially outward of the auxiliary support ring.