WO2015180403A1 - Flexible display panel and manufacturing method therefor, and display device - Google Patents
Flexible display panel and manufacturing method therefor, and display device Download PDFInfo
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- WO2015180403A1 WO2015180403A1 PCT/CN2014/089819 CN2014089819W WO2015180403A1 WO 2015180403 A1 WO2015180403 A1 WO 2015180403A1 CN 2014089819 W CN2014089819 W CN 2014089819W WO 2015180403 A1 WO2015180403 A1 WO 2015180403A1
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- Embodiments of the present invention relate to a flexible display panel, a method of fabricating the same, and a display device.
- the substrate of the display panel of the flexible display device is a flexible substrate.
- the flexible display panel is mainly produced by carrying a flexible substrate on a carrier substrate (generally a glass substrate), then forming a display component on the flexible substrate, and finally the flexible The substrate and the glass substrate are separated to obtain a flexible display panel.
- a flexible substrate 11 is formed on a glass substrate 10
- a protective layer 12 is formed over the flexible substrate 11, and then a display component 13 is formed on the protective layer 12, and finally The flexible substrate 11 is separated from the glass substrate 10 to obtain a flexible display panel.
- the protective layer is mainly used to prevent penetration of water and oxygen, thereby avoiding negatively affecting performance and service life of the display component.
- the existing separation method of the flexible substrate and the glass substrate is usually performed by laser irradiation. As shown in FIG. 1, the separation interface between the flexible substrate and the glass substrate is broken by the laser to achieve the separation effect, but long-time laser high-temperature irradiation is possible. Damage to the display components, affecting the stability of the process, and high equipment costs.
- a debonding process can also be used to separate the flexible substrate and the glass substrate.
- the adhesive used in the degumming technique is an acrylic curing resin, but the adhesive is not suitable for a high temperature process of 200 ° C or higher.
- Embodiments of the present invention provide a flexible display panel, a manufacturing method thereof, and a display device, wherein a separation process of the flexible display panel and the glass substrate is simple in the manufacturing process of the flexible display panel, and the yield is high, and the separation process is avoided.
- the negative effects of display panel performance on the display panel are simple in the manufacturing process of the flexible display panel, and the yield is high, and the separation process is avoided.
- an embodiment of the present invention provides a flexible display panel including a first protective layer, a second protective layer, a flexible substrate, and a display component, wherein the flexible substrate is located on the first protective layer and Between the second protective layers, the display component is formed on the second protective layer.
- the flexible substrate is covered by the first protective layer and the second protective layer.
- an embodiment of the present invention provides a method for fabricating a flexible display panel, comprising: sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate; The underlying layer is separated from the carrier substrate to obtain the flexible display panel, wherein the flexible display panel comprises a first protective layer, a flexible substrate, a second protective layer, and a display component.
- the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
- removing the underlayer comprises: dissolving the underlayer with an alkali solution.
- the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
- Ammonium aqueous solution is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
- the primer layer is dissolved with an alkali solution at a temperature of 15-80 °C.
- the flexible substrate is covered by the first protective layer and the second protective layer.
- dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer, or immersing the carrier substrate in the alkali solution.
- an embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention.
- FIG. 1 is a schematic cross-sectional view of a conventional flexible display panel
- FIG. 2 is a schematic cross-sectional view of a flexible display panel according to an embodiment of the present invention.
- FIG. 3 is a schematic cross-sectional view of another flexible display panel according to an embodiment of the present invention.
- FIG. 4 is a schematic cross-sectional view showing a method of manufacturing a flexible display panel according to an embodiment of the present invention, before the underlayer is separated from the carrier substrate.
- the embodiment of the present invention provides a flexible display panel, as shown in FIG. 2, including a first protective layer 121, a second protective layer 122, a flexible substrate 11, and a display component 13, wherein the flexible substrate 11 is located
- the display component 13 is formed on the second protective layer 122 between the first protective layer 121 and the second protective layer 122.
- a flexible display panel includes a first protective layer and a second protective layer, and the second protective layer is located between the flexible substrate and the display component for preventing water and oxygen Infiltration, to avoid negatively affecting the performance and service life of the display component; a first protective layer is also disposed under the flexible substrate to protect the flexible substrate from damage.
- the "upper” and “lower” in the embodiment of the present invention are based on the order in which the display panel is manufactured.
- the upper pattern refers to a pattern formed later
- the lower pattern refers to a pattern formed earlier. .
- the flexible substrate 11 is covered by the first protective layer 121 and the second protective layer 122 . Avoid damage to the flexible substrate during the fabrication of the flexible display panel.
- the flexible display panel generally has an encapsulation layer on the display component, and the encapsulation layer is used to isolate the display component from the air to prevent water oxygen and other fine dust from adversely affecting the display component. Work performance.
- the flexible display panel may also include other thin film or layer structures, such as a flexible display panel having a touch function, and a touch electrode layer or the like is further disposed on the carrier substrate, which is not enumerated herein.
- the invention of the embodiment of the present invention is taken as an example.
- the display component according to the embodiment of the present invention may be a thin film transistor, a gate line, a data line, a pixel electrode, etc., which is not limited by the embodiment of the present invention, and any component that realizes the display function of the display panel is It can be disposed on the flexible substrate 11 as a display component.
- An embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention.
- the display device may be a display device such as an electronic paper, an OLED (Organic Light-Emitting Diode) display, or any display product or component such as a television, a digital camera, a mobile phone, a tablet, or the like including the display device.
- OLED Organic Light-Emitting Diode
- An embodiment of the present invention provides a flexible display panel, which can be used to fabricate a flexible display panel according to an embodiment of the present invention.
- the method includes:
- Step 101 sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate.
- a primer layer 14, a first protective layer 121, a flexible substrate 11, a second protective layer 122, and a display element 13 are sequentially formed on a glass substrate (carrier substrate) 10.
- the flexible substrate 11 is located between the first protective layer 121 and the second protective layer 122, and the display component 13 is formed on the second protective layer 122.
- the step 101 further includes forming an encapsulation layer on the carrier substrate, the encapsulation layer covering the display component 13 for isolating the display component from the air.
- the encapsulation layer covering the display component 13 for isolating the display component from the air.
- other thin film or layer structures such as a flexible display panel with a touch function, may also be formed on the carrier substrate, and a touch electrode layer or the like may be formed on the carrier substrate.
- the embodiments of the present invention are merely illustrative of the inventions of the embodiments of the present invention.
- the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
- a polyimide film can be formed on a glass substrate, and after the polyimide film is cured to form a primer layer, a silicon nitride layer or a silicon oxide layer is formed by plasma enhanced chemical vapor deposition to form a first A protective layer is further formed on the first protective layer to form a polyimide film. After the polyimide film is cured to form a flexible substrate, a second protective layer and a display component are sequentially formed on the flexible substrate.
- the underlayer is the same as the material of the flexible substrate, which is advantageous for the fabrication of the flexible substrate.
- the material of the underlayer and the flexible substrate may also be different.
- the embodiment of the present invention is only described in detail by taking the above as an example.
- the flexible substrate is covered by the first protective layer and the second protective layer.
- the flexible substrate is covered by the first protective layer and the second protective layer.
- Step 102 Removing the underlayer to separate the first protective layer from the carrier substrate.
- removing the primer layer includes dissolving the primer layer with an alkali solution.
- the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
- Ammonium aqueous solution here, in an aqueous solution of KOH and NaOH mixed, KOH and NaOH can be used Proportional mixing.
- the primer layer is dissolved using an alkali solution at a temperature of 15-80 °C.
- the lye may also be other solutions, such as NaOH solution or the like. The embodiment of the present invention will be described in detail only by taking the above-mentioned alkali solution and the above solution concentration as an example.
- the dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer. That is, the lye is used to start from the edge of the primer layer, and the primer layer is gradually dissolved.
- dissolving the underlying layer by using an alkali solution includes: forming a hit thereon
- the underlayer, the first protective layer, the flexible substrate, the second protective layer, and the carrier substrate of the display component are immersed in the lye. Since the flexible substrate and the underlying material are the same, when the flexible substrate is covered by the first protective layer and the second protective layer, a primer layer, a first protective layer, and a flexible substrate may be formed thereon.
- the second protective layer and the carrier substrate of the display component are immersed in the alkali solution, and the alkali solution can only dissolve the underlayer, and does not damage the flexible substrate, thereby improving production efficiency.
- the underlayer may be formed by other substances, and the solution corresponding to the solution of the underlayer may be other solutions according to the chemical properties.
- the embodiments of the present invention are not enumerated here, and only the above description is taken as an example. Description.
- a flexible display panel can be obtained by using a mechanical action such as vacuum or electrostatic adsorption of the flexible display panel.
- a method for fabricating a flexible display panel according to an embodiment of the present invention by forming a primer layer on a carrier substrate, and then forming respective functional layers of the flexible display panel on the underlayer (including a flexible substrate, a protective layer, and a display component) After each functional layer of the flexible display panel is formed, the underlying layer is dissolved to separate the flexible display panel from the carrier substrate, the manufacturing process is simple, the yield is high, the manufacturing cost is low, and high temperature is not required. It is non-polluting and can guarantee the performance quality of the display components of the flexible display panel.
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Abstract
Description
本发明的实施例涉及一种柔性显示面板及其制作方法、显示装置。Embodiments of the present invention relate to a flexible display panel, a method of fabricating the same, and a display device.
柔性显示装置的显示面板的衬底为柔性衬底，柔性显示面板的制作主要是以载体基板(一般为玻璃基板)承载着柔性衬底，然后在柔性衬底上形成显示元器件，最后将柔性衬底和玻璃基板分离得到柔性显示面板。The substrate of the display panel of the flexible display device is a flexible substrate. The flexible display panel is mainly produced by carrying a flexible substrate on a carrier substrate (generally a glass substrate), then forming a display component on the flexible substrate, and finally the flexible The substrate and the glass substrate are separated to obtain a flexible display panel.
示例性地，如图1所示，在玻璃基板10上形成柔性衬底11，在所述柔性衬底11之上形成保护层12，然后在所述保护层12上形成显示元器件13，最后将柔性衬底11与玻璃基板10分离，得到柔性显示面板。其中，所述保护层主要用于防止水氧的渗透，从而避免负面地影响显示元器件的性能及使用寿命。Illustratively, as shown in FIG. 1, a
现有的柔性衬底和玻璃基板的分离方法常采用激光照射，如图1所示，利用激光破坏柔性衬底与玻璃基板的接着界面从而达到分离的效果，但长时间的激光高温照射有可能造成显示元器件的损伤，影响工艺的稳定性，且设备成本高。另外，还可以采用脱胶工艺来分离柔性衬底和玻璃基板，脱胶技术使用的粘合剂为丙烯酸类固化树脂，但这种粘合剂不适用于200℃以上的高温制程。The existing separation method of the flexible substrate and the glass substrate is usually performed by laser irradiation. As shown in FIG. 1, the separation interface between the flexible substrate and the glass substrate is broken by the laser to achieve the separation effect, but long-time laser high-temperature irradiation is possible. Damage to the display components, affecting the stability of the process, and high equipment costs. In addition, a debonding process can also be used to separate the flexible substrate and the glass substrate. The adhesive used in the degumming technique is an acrylic curing resin, but the adhesive is not suitable for a high temperature process of 200 ° C or higher.
发明内容Summary of the invention
本发明的实施例提供一种柔性显示面板及其制作方法、显示装置，其中在柔性显示面板的制作过程中柔性显示面板和玻璃基板的分离工艺简单，且成品率高，避免了分离工艺对柔性显示面板的显示元器件性能的负面影响。Embodiments of the present invention provide a flexible display panel, a manufacturing method thereof, and a display device, wherein a separation process of the flexible display panel and the glass substrate is simple in the manufacturing process of the flexible display panel, and the yield is high, and the separation process is avoided. The negative effects of display panel performance on the display panel.
一方面，本发明的实施例提供了一种柔性显示面板，包括第一保护层、第二保护层、柔性衬底以及显示元器件，其中，所述柔性衬底位于所述第一保护层和第二保护层之间，所述显示元器件形成在所述第二保护层上。In one aspect, an embodiment of the present invention provides a flexible display panel including a first protective layer, a second protective layer, a flexible substrate, and a display component, wherein the flexible substrate is located on the first protective layer and Between the second protective layers, the display component is formed on the second protective layer.
可选的，所述柔性衬底被所述第一保护层和所述第二保护层包覆。 Optionally, the flexible substrate is covered by the first protective layer and the second protective layer.
另一方面，本发明的实施例提供了一种柔性显示面板的制作方法，包括：在载体基板上依次形成打底层、第一保护层、柔性衬底、第二保护层以及显示元器件；去除所述打底层，使得所述第一保护层和载体基板分离，从而获得所述柔性显示面板，其中所述柔性显示面板包括第一保护层、柔性衬底、第二保护层以及显示元器件。In another aspect, an embodiment of the present invention provides a method for fabricating a flexible display panel, comprising: sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate; The underlying layer is separated from the carrier substrate to obtain the flexible display panel, wherein the flexible display panel comprises a first protective layer, a flexible substrate, a second protective layer, and a display component.
可选的，形成所述打底层的材料与所述柔性衬底的材料可以相同，例如，可以为聚酰亚胺。Alternatively, the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
可选的，去除所述打底层包括：利用碱液溶解所述打底层。Optionally, removing the underlayer comprises: dissolving the underlayer with an alkali solution.
可选的，所述碱液为质量百分比为0.01％-10％的KOH、质量百分比为0.01％-10％的KOH和NaOH混合的水溶液或质量百分比为0.01％-10％的四甲基氢氧化铵水溶液。Optionally, the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide. Ammonium aqueous solution.
可选的，在15-80℃的条件下利用碱液溶解所述打底层。Alternatively, the primer layer is dissolved with an alkali solution at a temperature of 15-80 °C.
可选的，所述柔性衬底被所述第一保护层和所述第二保护层包覆。Optionally, the flexible substrate is covered by the first protective layer and the second protective layer.
可选的，利用碱液溶解所述打底层包括：在打底层的边缘喷洒碱液，或者将载体基板浸泡在碱液中。Optionally, dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer, or immersing the carrier substrate in the alkali solution.
再一方面，本发明的实施例提供了一种显示装置，包括本发明实施例提供的任一所述的柔性显示面板。In another aspect, an embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention.
为了更清楚地说明本发明实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例，而非对本发明的限制。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below. It is obvious that the drawings in the following description relate only to some embodiments of the present invention, and are not intended to limit the present invention. .
图1为现有的柔性显示面板截面示意图；1 is a schematic cross-sectional view of a conventional flexible display panel;
图2为本发明实施例提供的一种柔性显示面板截面示意图；2 is a schematic cross-sectional view of a flexible display panel according to an embodiment of the present invention;
图3为本发明实施例提供的另一种柔性显示面板截面示意图；以及3 is a schematic cross-sectional view of another flexible display panel according to an embodiment of the present invention;
图4为本发明实施例提供的柔性显示面板的制造方法中打底层与载体基板分离前的截面示意图。FIG. 4 is a schematic cross-sectional view showing a method of manufacturing a flexible display panel according to an embodiment of the present invention, before the underlayer is separated from the carrier substrate.
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发 明实施例的附图，对本发明实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本发明的一部分实施例，而不是全部的实施例。基于所描述的本发明的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the following will be combined with the present invention. The technical solutions of the embodiments of the present invention are clearly and completely described in the accompanying drawings. It is apparent that the described embodiments are part of the embodiments of the invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the described embodiments of the present invention without departing from the scope of the invention are within the scope of the invention.
本发明实施例提供了一种柔性显示面板，如图2所示，包括第一保护层121、第二保护层122、柔性衬底11以及显示元器件13，其中，所述柔性衬底11位于所述第一保护层121和第二保护层122之间，所述显示元器件13形成在所述第二保护层122上。The embodiment of the present invention provides a flexible display panel, as shown in FIG. 2, including a first
本发明实施例提供的一种柔性显示面板，所述柔性显示面板包括第一保护层和第二保护层，所述第二保护层位于柔性衬底和显示元器件之间，用于防止水氧的渗透，避免负面地影响显示元器件的性能及使用寿命；在所述柔性衬底的下面还设置有第一保护层，以保护柔性衬底不受损伤。A flexible display panel includes a first protective layer and a second protective layer, and the second protective layer is located between the flexible substrate and the display component for preventing water and oxygen Infiltration, to avoid negatively affecting the performance and service life of the display component; a first protective layer is also disposed under the flexible substrate to protect the flexible substrate from damage.
本发明实施例中的“上”、“下”以制造显示面板时的先后顺序为准，例如，在上的图案是指相对在后形成的图案，在下的图案是指相对在先形成的图案。The "upper" and "lower" in the embodiment of the present invention are based on the order in which the display panel is manufactured. For example, the upper pattern refers to a pattern formed later, and the lower pattern refers to a pattern formed earlier. .
可选的，如图3所示，所述柔性衬底11被所述第一保护层121和所述第二保护层122包覆。避免在柔性显示面板制作过程中，对柔性衬底的损伤。Optionally, as shown in FIG. 3 , the
需要说明的是，柔性显示面板一般在显示元器件的上面还制作有封装层，所述封装层用于使得显示元器件与空气隔绝，防止水氧以及其他微尘等不利地影响显示元器件的工作性能。当然，柔性显示面板还可以包括其他的薄膜或层结构，例如具有触摸功能的柔性显示面板，在所述载体基板上还设置有触摸电极层等，本发明实施例在此不一一列举，仅以说明本发明实施例的发明点为例。It should be noted that the flexible display panel generally has an encapsulation layer on the display component, and the encapsulation layer is used to isolate the display component from the air to prevent water oxygen and other fine dust from adversely affecting the display component. Work performance. Of course, the flexible display panel may also include other thin film or layer structures, such as a flexible display panel having a touch function, and a touch electrode layer or the like is further disposed on the carrier substrate, which is not enumerated herein. The invention of the embodiment of the present invention is taken as an example.
示例性地，根据本发明实施例的显示元器件可以为薄膜晶体管、栅线、数据线、像素电极等，本发明的实施例对此不做限定，任何实现显示面板的显示功能的元器件都可以设置在柔性衬底11上作为显示元器件。Illustratively, the display component according to the embodiment of the present invention may be a thin film transistor, a gate line, a data line, a pixel electrode, etc., which is not limited by the embodiment of the present invention, and any component that realizes the display function of the display panel is It can be disposed on the
本发明实施例提供了一种显示装置，包括本发明实施例提供的任一所述的柔性显示面板。所述显示装置可以为电子纸、OLED(Organic Light-Emitting Diode,有机发光二极管)显示器等显示器件以及包括这些显示器件的电视、数码相机、手机、平板电脑等任何具有显示功能的产品或者部件。 An embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention. The display device may be a display device such as an electronic paper, an OLED (Organic Light-Emitting Diode) display, or any display product or component such as a television, a digital camera, a mobile phone, a tablet, or the like including the display device.
本发明实施例提供了一种柔性显示面板的制作方法，可用于制作本发明实施例提供的柔性显示面板，所述方法包括：An embodiment of the present invention provides a flexible display panel, which can be used to fabricate a flexible display panel according to an embodiment of the present invention. The method includes:
步骤101、在载体基板上依次形成打底层、第一保护层、柔性衬底、第二保护层以及显示元器件。Step 101: sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate.
例如，如图4所示，在玻璃基板(载体基板)10上依次形成打底层14、第一保护层121、柔性衬底11、第二保护层122以及显示元器件13。这里，所述柔性衬底11位于所述第一保护层121和第二保护层122之间，所述显示元器件13形成在所述第二保护层122上。For example, as shown in FIG. 4, a
可选的，步骤101还包括在载体基板上形成封装层，所述封装层覆盖在所述显示元器件13的上面，用于使得所述显示元器件与空气隔绝。当然，根据不同的柔性显示面板，还可以在载体基板上形成其他的薄膜或层结构，例如具有触摸功能的柔性显示面板，在所述载体基板上还可以形成触摸电极层等。本发明实施例仅以说明本发明实施例的发明点为例。Optionally, the step 101 further includes forming an encapsulation layer on the carrier substrate, the encapsulation layer covering the
可选的，形成所述打底层的材料与所述柔性衬底的材料可以相同，例如，可以为聚酰亚胺。Alternatively, the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
示例性地，可以在玻璃基板上形成聚酰亚胺薄膜，且待聚酰亚胺薄膜固化形成打底层后，利用等离子体增强化学气相沉积法形成氮化硅层或氧化硅层，从而形成第一保护层，再在第一保护层上形成聚酰亚胺薄膜，待聚酰亚胺薄膜固化形成柔性衬底后，再依次在柔性衬底上形成第二保护层以及显示元器件。Illustratively, a polyimide film can be formed on a glass substrate, and after the polyimide film is cured to form a primer layer, a silicon nitride layer or a silicon oxide layer is formed by plasma enhanced chemical vapor deposition to form a first A protective layer is further formed on the first protective layer to form a polyimide film. After the polyimide film is cured to form a flexible substrate, a second protective layer and a display component are sequentially formed on the flexible substrate.
打底层与柔性衬底的材料相同，有利于柔性基板的制作。当然，打底层与柔性衬底的材料也可以不同，本发明实施例仅以上述为例进行详细说明。The underlayer is the same as the material of the flexible substrate, which is advantageous for the fabrication of the flexible substrate. Of course, the material of the underlayer and the flexible substrate may also be different. The embodiment of the present invention is only described in detail by taking the above as an example.
可选的，所述柔性衬底被所述第一保护层和所述第二保护层包覆。例如，如图5所示，在形成第一保护层、柔性衬底以及第二保护层的时候，使得柔性衬底被所述第一保护层和所述第二保护层包覆。Optionally, the flexible substrate is covered by the first protective layer and the second protective layer. For example, as shown in FIG. 5, at the time of forming the first protective layer, the flexible substrate, and the second protective layer, the flexible substrate is covered by the first protective layer and the second protective layer.
步骤102、去除所述打底层，以使得第一保护层和载体基板分离。Step 102: Removing the underlayer to separate the first protective layer from the carrier substrate.
示例性地，去除所述打底层包括：利用碱液溶解掉所述打底层。可选的，所述碱液为质量百分比为0.01％-10％的KOH、质量百分比为0.01％-10％的KOH和NaOH混合的水溶液或质量百分比为0.01％-10％的四甲基氢氧化铵水溶液，这里，在KOH和NaOH混合的水溶液中，KOH和NaOH可以以任 意比例混合。可选的，在15-80℃的条件下利用碱液溶解掉所述打底层。当然，所述碱液也可以是其他溶液，例如也可以是NaOH溶液等。本发明实施例仅以上述碱液以及上述溶液浓度为例进行详细说明。Illustratively, removing the primer layer includes dissolving the primer layer with an alkali solution. Optionally, the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide. Ammonium aqueous solution, here, in an aqueous solution of KOH and NaOH mixed, KOH and NaOH can be used Proportional mixing. Alternatively, the primer layer is dissolved using an alkali solution at a temperature of 15-80 °C. Of course, the lye may also be other solutions, such as NaOH solution or the like. The embodiment of the present invention will be described in detail only by taking the above-mentioned alkali solution and the above solution concentration as an example.
可选的，所述利用碱液溶解所述打底层包括：在打底层的边缘喷洒碱液。即利用碱液从打底层的边缘开始，逐渐将打底层溶解掉。Optionally, the dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer. That is, the lye is used to start from the edge of the primer layer, and the primer layer is gradually dissolved.
或者，当所述柔性衬底被所述第一保护层和所述第二保护层包覆，例如如图5所示，这时利用碱液溶解所述打底层包括：将其上形成有打底层、第一保护层、柔性衬底、第二保护层以及显示元器件的载体基板浸泡在碱液中。由于柔性衬底和打底层的材料相同，当柔性衬底被所述第一保护层和所述第二保护层包覆，则可以将其上形成有打底层、第一保护层、柔性衬底、第二保护层以及显示元器件的载体基板浸泡在碱液中，碱液仅能将打底层溶解，且不会损伤柔性衬底，提高了生产效率。Alternatively, when the flexible substrate is covered by the first protective layer and the second protective layer, for example, as shown in FIG. 5, at this time, dissolving the underlying layer by using an alkali solution includes: forming a hit thereon The underlayer, the first protective layer, the flexible substrate, the second protective layer, and the carrier substrate of the display component are immersed in the lye. Since the flexible substrate and the underlying material are the same, when the flexible substrate is covered by the first protective layer and the second protective layer, a primer layer, a first protective layer, and a flexible substrate may be formed thereon. The second protective layer and the carrier substrate of the display component are immersed in the alkali solution, and the alkali solution can only dissolve the underlayer, and does not damage the flexible substrate, thereby improving production efficiency.
需要说明的是，打底层还可以是其他物质形成，则对应溶解打底层的溶液根据化学性能也可以是其他溶液，本发明实施例在此不一一列举，仅以上述所述为例进行详细说明。It should be noted that the underlayer may be formed by other substances, and the solution corresponding to the solution of the underlayer may be other solutions according to the chemical properties. The embodiments of the present invention are not enumerated here, and only the above description is taken as an example. Description.
第一保护层和载体基板分离之后，可以采用机械动作例如真空或静电吸附柔性显示面板，得到柔性显示面板。After the first protective layer and the carrier substrate are separated, a flexible display panel can be obtained by using a mechanical action such as vacuum or electrostatic adsorption of the flexible display panel.
本发明实施例提供的一种柔性显示面板的制作方法，通过在载体基板上设置打底层，再在打底层上形成柔性显示面板的各个功能层(包括柔性衬底、保护层以及形成显示元器件的各层薄膜等)，待柔性显示面板的各个功能层形成之后，将打底层溶解，以将柔性显示面板与载体基板分离，其制作工艺简单，成品率高；制作成本低，且无需高温，无污染，可保证柔性显示面板的显示元器件的性能质量。A method for fabricating a flexible display panel according to an embodiment of the present invention, by forming a primer layer on a carrier substrate, and then forming respective functional layers of the flexible display panel on the underlayer (including a flexible substrate, a protective layer, and a display component) After each functional layer of the flexible display panel is formed, the underlying layer is dissolved to separate the flexible display panel from the carrier substrate, the manufacturing process is simple, the yield is high, the manufacturing cost is low, and high temperature is not required. It is non-polluting and can guarantee the performance quality of the display components of the flexible display panel.
以上所述，仅为本发明的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应以所述权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the appended claims.
本申请要求于2014年5月27日递交的中国专利申请第201410228437.0号的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。 The present application claims the priority of the Chinese Patent Application No. 201410228437.0 filed on May 27, 2014, the entire disclosure of which is hereby incorporated by reference.
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| KR102494730B1 (en) | 2018-02-01 | 2023-02-01 | 삼성디스플레이 주식회사 | Djsplay device and manufacturing method of base film |
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| US20100203296A1 (en) * | 2009-02-10 | 2010-08-12 | Industrial Technology Research Institute | Transferring structure for flexible electronic device and method for fabricating flexible electronic device |
| CN102738078A (en) * | 2012-06-21 | 2012-10-17 | 京东方科技集团股份有限公司 | Method for manufacturing flexible display substrate |
| CN103325731A (en) * | 2013-05-20 | 2013-09-25 | Tcl集团股份有限公司 | Manufacturing method of flexible display device |
| CN104022125A (en) * | 2014-05-27 | 2014-09-03 | 京东方科技集团股份有限公司 | Flexible display panel, manufacturing method thereof, and display device |
| CN203850300U (en) * | 2014-05-27 | 2014-09-24 | 京东方科技集团股份有限公司 | Flexible display panel and display apparatus |
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| US20100203296A1 (en) * | 2009-02-10 | 2010-08-12 | Industrial Technology Research Institute | Transferring structure for flexible electronic device and method for fabricating flexible electronic device |
| CN102738078A (en) * | 2012-06-21 | 2012-10-17 | 京东方科技集团股份有限公司 | Method for manufacturing flexible display substrate |
| CN103325731A (en) * | 2013-05-20 | 2013-09-25 | Tcl集团股份有限公司 | Manufacturing method of flexible display device |
| CN104022125A (en) * | 2014-05-27 | 2014-09-03 | 京东方科技集团股份有限公司 | Flexible display panel, manufacturing method thereof, and display device |
| CN203850300U (en) * | 2014-05-27 | 2014-09-24 | 京东方科技集团股份有限公司 | Flexible display panel and display apparatus |
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