WO2015170791A1 - Chip counting method of semiconductor tape reel, display system thereof, and chip counting device - Google Patents

Abstract

The present invention relates to a chip counting method of a semiconductor tape reel for instantly and exactly counting the number of chips arranged on a tape reel, and a display system thereof, and provides a chip counting method of a semiconductor tape reel, comprising the steps of: inputting an identification code of a tape reel by using a reader unit; determining whether the identification code is registered in a database; scanning a planar image of the tape reel through an X-ray generation unit and a detection unit; calling a counting algorithm for the corresponding tape reel registered in the database so as to count the number of chips spirally arranged on the tape reel; and outputting the number of chips counted in the counting step through a counting display unit.

Description

Chip Counting Method of Semiconductor Tape Reel, Display System, Chip Counting Device

The present invention relates to an inspection device for a semiconductor chip, and more particularly, to a chip counting method of a semiconductor tape reel capable of immediately and accurately counting the number of chips arranged on a tape reel.

Semiconductor chips are generally packaged in tape reels, shipped, used and stored for use in the bonding process.

1 is a conceptual diagram showing a state of use of a semiconductor tape reel of the prior art.

Since semiconductor chips are small and individually separated, they are difficult to work with and are unsuitable for mass production. Therefore, the semiconductor chips are attached to a plurality of substrates such as films before being bonded to a predetermined substrate. .

Recently, in the form of a tape reel for the efficiency of the work process, the semiconductor chip is coupled in a row arranged in a tape 20, the tape 20 is attached to the approximately circular tape reel (10) Winding up for storage and use.

As shown in the drawing, the tape 20 is drawn out from the tape reel 10 disposed to be rotatable, and thus inspection or bonding of the semiconductor chips is completed, and the tape 20 is wound on the dummy reel 30 disposed on the other side. Can be.

By the way, the number of semiconductor chips disposed in one tape reel 10 can be easily identified because they are combined in a standardized manner in the production stage, but when the bonding to the substrate is stopped during the production process, Knowing the number is a very difficult problem.

Recently, since the bonding process of the semiconductor chips is mostly automated, when the operation is performed without knowing the number of chips remaining in the tape reel 10 that is removed and stored during use, work problems are caused.

2 is an enlarged plan view showing a tape wound on a tape reel of the related art.

Generally, the holes 21 are formed in a row in one side of the tape, and the chips 22 are arranged in parallel with the arrangement of the holes 21.

The number of the chips 22 and the holes 21 is arranged at a constant ratio. For example, when the chips are arranged in a 1: 1 ratio, the number of chips remaining by counting each number with eyes is shown. Will be confirmed.

Since the arrangement ratio of the holes 21 and the chips 22 is different, it is common to determine the number of chips 22 through the number of holes 21 that are easier to count. However, since there are limitations in how to visually count the number, inaccurate work is inevitably performed in an automated process, and an improvement of a method of accurately identifying the number of chips is required.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the efficiency in the production process is remarkably improved by allowing the number of semiconductor chips to be counted immediately and accurately with the semiconductor chips arranged on a tape and wound on a reel. It is an object of the present invention to provide a chip counting method of a semiconductor tape reel and a display system thereof.

The present invention, the step of inputting the identification code of the tape reel using the reader unit; Determining whether the identification code is registered in a database; Scanning a planar image of the tape reel through the X-ray generator and the detector; Calling a counting algorithm for the tape reel registered in the database to count the number of chips spirally arranged on the tape reel; And outputting the number of chips counted in the counting step through a counting display unit. Therefore, it is possible to confirm the remaining number of chips accurately and quickly.

And determining whether the tape reel of the stored identification code is countable after the step of determining whether it is registered. If it is determined that the counting is not possible, the data display unit marks the count as impossible and scans the image. It is preferable to convey the said tape reel in the state which did not.

In addition, if it is determined that the registration is not registered in the step of determining whether it is registered, it may be determined whether it is countable after going through the reel information registration step for the tape reel.

In the outputting step, the data display unit may display an identification code for the corresponding tape reel, a result value for registration or counting, and the number of counted chips.

In addition, the counting algorithm preferably includes sensitivity information for distinguishing each chip from each chip image of the tape reel of the corresponding identification code, chip shape, and arrangement information.

On the other hand, the present invention, a display system for the chip counting of the semiconductor tape reel, the display unit for displaying a planar image of the tape reel scanned through the X-ray generator and the detection unit; Spiral arrangement of the image display unit by the reel information unit for outputting the identification code of the tape reel input through the reader unit, a judgment display unit indicating whether the identification code is registered in the database, and the counting algorithm of the identification code called from the database A data display unit including a counting display unit to display the number of chips counted from the captured chip image; And an operation control unit including a control unit and an end unit for starting and ending input of counting.

The determination display unit outputs a case in which the tape reel of the inputted identification code is registered and counting is possible under the first condition, outputs a case in which the tape reel of the inputted identification code is not registered as the second condition, and inputs the identified If the tape reel of the code is registered but stored as counting is not possible, and if the tape reel of the input identification code is not registered but it is determined that counting is not possible during the registration process, it may be output as the third condition.

The operation control unit preferably further includes a registration switching unit for switching to a registration control unit for registering the tape reel when the second condition is output.

The image display unit may include a reel image that is excluded when counting chips by the called counting algorithm, a chip image in which chips are arranged for chip counting, and a center image, which is a center region of a chip array at a center at which chips are arranged. It may include.

In addition, it may further include an output unit for displaying the total number of chips in the initial manufacturing state of the tape reel for the identification code.

The counting apparatus of the semiconductor tape reel of the present invention includes an X-ray generator, a detector, and a detector, which are transferred from one side to the other side with the tape reel to which the tape to which the semiconductor chip is coupled is horizontally transferred from one side to the other side. A main body unit having a counting unit for counting the number of chips in the image detected by the control unit; An inlet for introducing a tape reel into the main body; A discharge part which receives and discharges the tape reel from the main body part; And a display unit for displaying the image detected by the detection unit and the number counted by the counting unit, wherein the display unit provides a counting apparatus of a semiconductor tape reel that displays chip images arranged in a spiral manner. Thus, the number of chips remaining on the tape reel can be counted and managed accurately and efficiently.

The input unit may be coupled to one side of the main body, and the discharge unit may move the tape reel flowing out of the other side of the main body to one side. Therefore, the operator can insert and collect the tape reel on one side, thereby improving work efficiency.

The apparatus may further include a transmission unit disposed at the other side of the main body and transferring the tape reel flowing out from the main body at the rear side to the front side to be transferred to the other side of the discharge unit. Therefore, the transfer of the tape reel between the main body portion and the discharge portion and the transfer direction can be reliably made.

The display unit preferably comprises a main display disposed at the front side of the main body and a subdisplay disposed at one side of the main body. Therefore, it is possible to check the working status at all times depending on the working position.

The X-ray generation unit preferably irradiates a line beam having a long shape in the front and rear directions to prevent radial interference between the chip images arranged in a spiral shape. Therefore, accurate chip analysis is possible.

The apparatus may further include an input sensor unit disposed in the input unit and detecting the input of the tape reel, and a discharge sensor unit disposed in the discharge unit and detecting the discharge of the tape reel. Therefore, it is possible to check the input state and the discharge state.

The apparatus may further include an input side reader unit arranged to face the input unit side and reading an identification code displayed on the tape reel, wherein the counting unit may include one of a plurality of algorithms according to the type of tape reel recognized by the input side reader unit. You can choose to count the number of chips. Thus, the accuracy of counting and the efficiency of operation are improved.

The apparatus may further include a discharge side reader unit arranged to face the discharge unit side and reading the identification code of the tape reel for which the counting is completed, wherein the counting unit is the same as the tape reel recognized by the discharge side leader unit. If so, the analysis and counting for that tape reel can be ended. Therefore, accurate confirmation is possible in the continuous analysis and counting process.

In addition, the input portion may include a seating portion in which a part of the tape reel to be inserted is inserted to align with the input transfer portion. Therefore, it is possible to transfer to the correct position with respect to the X-ray generator that is fixedly arranged.

The seating portion may include a plurality of grooves stepped in an arc shape so as to correspond to radii of tape reels having different radii, and disposed to be inclined downward to the other side. Thus, a variety of tape reels can be made available and effective.

The transfer unit may include a plate on which a tape reel is disposed on an upper surface, a bracket portion for aligning the tape reel flowing out from the main body portion, and moving toward the front side, and a female portion extending forward and rearward to guide the transfer of the bracket portion. .

On the other hand, the present invention, a display system for registering the tape reel in the chip counting device, an image display unit for displaying a planar image of the tape reel scanned through the X-ray generating unit and the detection unit; And a sensitivity controller configured to set a sensitivity at which chips of the chip image are displayed and distinguished among the images of the tape reel, and a first mode portion corresponding to the atypical chip in the analysis algorithm or a second mode portion corresponding to the atypical chip. A selected algorithm selection unit, a chip information output unit displaying chip information, a test counting unit which initiates test counting and displays the number of chips counted under the set sensitivity and the selected mode condition, and the number of the counted chips. And a registration controller for storing the set sensitivity and the selected mode condition as a counting algorithm in a database when the total number of chips of the corresponding type of tape reel is matched. .

The chip counting method of the semiconductor tape reel and the display system according to the concept of the present invention can be dramatically improved in accuracy and speed by replacing the conventional manual counting method of the chip with the image processing method using the X-ray beam In addition, while the counting process can be effectively made corresponding to a variety of tape reel, the user can intuitively operate, and there is a convenient and efficient effect.

1 is a perspective view showing a conventional X-ray inspection equipment.

2 is a plan view showing a semiconductor chip tape of the prior art;

3 is a conceptual diagram illustrating a system for implementing a chip counting method of a semiconductor tape reel of the present invention.

Figure 4 is a conceptual diagram showing an image implemented in the chip counting method of the semiconductor tape reel of the present invention.

5 is a flowchart illustrating a chip counting method of a semiconductor tape reel of the present invention.

Fig. 6 shows an embodiment of a display system of chip counting of a semiconductor tape reel of the present invention.

FIG. 7 is a view illustrating a reel image implemented in the display system of FIG. 6.

8 is a view illustrating a state in which chips are counted in the display system of FIG. 6.

Fig. 9 is a diagram showing a display example of the judgment display section in the chip counting method of the semiconductor tape reel of the present invention.

FIG. 10 is a diagram illustrating an embodiment in which a chip is counted in the display system of FIG. 6. FIG.

Fig. 11 is a flowchart showing a semiconductor tape reel registration method of the present invention.

12 is a conceptual diagram showing an analysis algorithm in the registration method of the semiconductor tape reel of the present invention.

Fig. 13 shows a display system of the semiconductor tape reel registration method of the present invention.

14 is a view showing a chip image according to sensitivity in the display system of FIG.

15 is a perspective view showing a counting device of a semiconductor tape reel according to the concept of the present invention.

FIG. 16 is a front view of FIG. 15; FIG.

17 is a top view of FIG. 15.

FIG. 18 is a side view of FIG. 15 as viewed from one side; FIG.

19 is a plan view specifically showing a transmission unit of FIG.

20 is a perspective view illustrating a bracket unit provided in the transmission unit;

Fig. 21 is a plan view showing an alignment mechanism applied to the counting device of the semiconductor tape reel of the present invention.

Fig. 22 shows a state in which the alignment mechanism is used.

Fig. 23 is a side sectional view showing an alignment mechanism.

Hereinafter, a chip counting method of a semiconductor tape reel and a display system thereof according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a conceptual diagram illustrating an arrangement of equipment to which a chip counting method of a semiconductor tape reel according to a basic concept is applied to the present invention.

The present invention basically includes an X-ray generator 2210, a transfer means 200 seating the tape reel 100, and a detector (not shown) disposed to face the X-ray generator 2210.

The X-ray generator 2210 may selectively use a closed type high voltage X-ray generator or an open type X-ray generator, and various wavelengths for measuring the structure of a material by using radio waves. If the equipment can generate electromagnetic waves can be made selectively.

In addition, various devices may be used as long as the detection unit detects an X-ray beam transmitted from the X-ray generation unit 2210 and transmitted through the tape reel 100 that is the subject.

The tape reel 100 means a member on which the tape 20 to which the chip 22 is coupled can be wound around the periphery, which tape reel 100 is formed in a substantially disk shape and parallel on the conveying means 200. The counting of the chip may be made in a securely seated state.

The X-ray generator 2210 may radiate an X-ray beam downwardly from the upper side of the tape reel 100 and may be detected by a detector in which the X-ray beam passing therethrough is disposed below the chip reel. Since the X-ray beam transmittance of 22 is the lowest, the number of chips disposed on the tape wound on the tape reel 100 may be counted due to the difference in gray scale values.

More specifically, the chips 22 in the state of being wound on the tape reel 100 are coupled to the tape 20 by being spaced apart from each other by a predetermined interval, and the X-ray beam detected by the detector is an image in the image implementer as will be described later. In this case, the image corresponding to the portion where the chip 22 is arranged may be the darkest, and if the grayscale value of the image corresponding to the chip 22 is specified, the corresponding chips 22 may be dots. In the form of an image of a small area, the number of chips can be determined by counting these dots or images. However, in some cases, the image corresponding to the chip 22 may be brighter than other portions.

Conventionally, in order to determine the number of chips remaining when there is a need for storage or discontinuance between use of the tape reel 100, the tape 20 is inevitably drawn out of the tape reel 100. It was confirmed by manual bar, in the case of the concept of the present invention, it should be noted that the counting is possible in the wound state of the tape 20 has a convenient advantage while improving the accuracy.

4 is a view showing the image of the tape reel is implemented in the display system according to the basic concept of the present invention.

As described above, the tape reel 100 is horizontally disposed on the transfer means 200, and is sensed by the detector by the X-ray beam radiated from the upper side, so that the image may be realized by grayscale values due to different transmittances. .

As described above, the detection signal detected by the detection unit may be implemented through a predetermined image implementation unit as described below. It should be noted that such an image implementation unit does not necessarily mean a display device that can be visually confirmed. That is, since the main value of the present invention is in the number of chips detected by the transmission of X-rays, if the number of such chips can be counted, the image implementing unit may be a virtual form implemented in an algorithm, and in such an algorithm, It is sufficient to specify a range of grayscale values corresponding to (22) to count the number of dots represented by each chip 22 and provide it to the user.

As described above, the image implemented by the image implementing unit may be a reel image 4111 and a chip image 4110. In general, an image of the image detected by the X-ray beam may be further included in the chip image 4110 transmitted through the chip. It may appear dark, but is not necessarily limited thereto.

In the present invention, the predetermined controller designates a range of predetermined grayscale values through the image, and counts the number of dots corresponding to the grayscale values corresponding to the chip image 11 so as to count the number of chips. Can be provided to

Here, it should be noted that the meaning of the dot does not mean a dot implemented in one pixel, but is meant to mean an area of an image corresponding to one chip image 4110 that is distributed relatively continuously.

However, in an ideal case, when the X-ray beam is irradiated in a vertical direction with respect to the arrangement of the tape reel 100, the chip image 4110 may correspond to each chip, but in reality, one chip 22 and a radius are used. Overlapping distances of other chips arranged in the circumferential or circumferential direction are close and except for a specific portion, the X-ray beam is irradiated with a predetermined inclination with respect to the normal direction of the tape reel 10, that is, the axial direction. It may occur. This overlap of images is caused by the diffusion in the downward process of the beam.

Accordingly, there is a need to limit the irradiation area or sensing area of the X-ray beam. To this end, the X-ray generator 2210 may be irradiated as a line beam. Preferably, the X-ray generator 2210 is disposed in a radially long shape with respect to the tape reel 100, and the tape reel 100 and the X-ray generator 2210 relatively move the area of the beam. In the process of passing the tape reel 100, the image is collected.

5 is a flowchart illustrating a chip counting method of a semiconductor tape reel of the present invention.

The present invention basically includes the steps of receiving information of the tape reel, determining whether the received information of the tape reel is registered, scanning the image of the tape reel, and the number of chips arranged on the tape reel. And counting the number of chips and conveying the number of chips.

The chip counting method of the semiconductor tape reel may be visually implemented by a display apparatus to be described later and receive control information. In the concept of the present invention, each step is visually implemented by a display and disposed inside the main body. It should be understood that this includes both hardware and software cases operated by a microcomputer.

The reel information means information provided during the initial manufacture of the reel in which the chip is disposed. For example, the chip itself, such as the size of the tape reel 100 and / or the number of chips and / or the shape of the chip during manufacture The specification may be, but is not limited thereto.

This reel information may be directly input manually during the registration of the reel of the first type, but is preferably automatically recognized by the reader unit added to the counting device as will be described later.

In this case, the reader unit may perform a function of analyzing or storing the predetermined label information by scanning the label information, and the label may be a means such as a barcode or a QR code.

When the reel information is input (S100), it is determined whether the corresponding reel information is registered (S200). At this time, the reel information determines whether the reel tape is already recognized by the equipment when the reel tape is input from the transport equipment. Will work as a standard. Important factors for this recognition may be elements of the chip, such as the size, shape, material, or spacing of the chips, and elements of the reel, such as the diameter of the reel, and the center area as described below. The above-described elements of the chip serve as a criterion for adjusting the sensitivity in adjusting the conveyed speed or identifying the sensed image according to the shape as described below.

After the determination is made whether or not the registration of the reel information (S200), it may be determined whether additional counting is possible (S210). The impossibility of counting means that the accuracy of the X-ray image cannot be guaranteed when the tape is wound on the reel, depending on the shape of the chip or the degree of permeability of the X-ray. Can be used.

If it is determined that the reel information is not registered in the determination of whether to register (S200), it is subjected to the step of registering it (S300). Such registration includes scanning of an image for extracting the number of chips described below (S110). The difference is that the scan of the image (S110) is to measure the number of chips remaining in the tape reel (100) replaced during use, whereas the scan in the registration step (S300) is the first reel is It should be noted that in order to improve the accuracy of the reel standardized in the manufactured state, there is a meaning to predefine the elements of the chip and the elements of the reel.

If it is determined that the countable type in the determination (S210) of the counting or not, the tape reel is input to the counting device to scan the image through the X-ray generator 2210 and the detector as described above (S110).

The scan of the image is for acquiring an image of the basic tape reel 100. Since the radiation amount and the detection amount of the X-ray beam are basically fixed, the number of chips is obtained by adjusting the algorithm of the image itself. Here, the change in the mechanical operation according to the type of the tape reel 100 of the equipment itself may consider the adjustment of the conveying speed, which will be described later.

When the scanning of the image (S110) is completed as described above, the number of chips may be counted through the obtained image (S120), and the number of chips may be output (S130) through an image or a print so that the user may check this.

The counting of the number of chips (S120) means to calculate the division of the dot or chip area of the individual chip image through an algorithm according to the corresponding reel information in the detected chip image.

In addition, the counting device of the present invention can perform a function of basically checking the information and inputting a control signal through the display unit, and may include a printer device such as an additional label output device.

The printer device performs a function of outputting the number of chips remaining on the tape reel 100 that has been inspected and returned.

In addition, if it is determined that counting is impossible in the determination of counting or not (S210), an output S131 may be performed when counting is not possible in the display or printer apparatus. Here, even after the registration of the reel information (S300) as shown, the determination of the counting or not (S210) for the reel can be made, the tape reel 100 is input when it is determined that the registration (S200) This information is extracted from the database and counted against this.

6 illustrates an embodiment of a display system for implementing a chip counting method of a semiconductor tape reel of the present invention.

The present invention as described above is described as the center of the user environment, but it should be noted that this is connected to or provided with devices, algorithms, circuits or parts on each system to be implemented in the display. Such matters are apparent to those skilled in the art.

The present invention may be represented by a predetermined main display 2100, as will be described later. For the operation of the counting method, the main display 2100 functions as a means for receiving a predetermined control input and a means for outputting an image. Can be performed simultaneously, and in this case, it can be implemented as a touch panel.

In the counting method, the main display 2100 may be divided into an image display unit 4100, a data display unit 4200, and an operation control unit 4300.

The image display unit 4100 displays the image of the tape reel 100 detected by the detection unit as a whole, and the chip image 4110 is clearly displayed as an operation or an adjustment by an algorithm through the registration controller 4500 which will be described later. Function.

The data display unit 4200 functions to display the number of chips through the image mainly after the image of the tape reel 100 is detected as described above. As illustrated, the data display unit 4200 may include a reel information unit 4210, a counting display unit 4220, and a determination display unit 4230.

The reel information unit 4210 functions to display the reel information recognized through the reader unit described above, and displays and distinguishes the unique code of the tape reel 100 of a predetermined corresponding type implemented by a barcode as a preferred embodiment. . The display by the reel information unit 4210 functions to accurately distinguish each tape reel 100 during continuous and time series counting operations.

In addition, the counting display unit 4220 functions to display the number of chips by the chip image, which will be described later.

The decision display unit 4230 may function to output a result value in the determination of whether or not to register (S200) and / or the determination of counting or not (S210), which is more specifically described with reference to FIG. 9. Explain.

The operation control unit 4300 functions to input a control signal for basic operation, including a control unit 4310 for performing an input of counting start, an end unit 4321 for terminating, and operation of basic equipment. It may include a setup unit 4322 and the registration switching unit 4340 to set the setting values.

The functions of the control unit 4310 and the end unit 4321 may function as a general on / off button. Each of the above-mentioned 'units' may receive a user input by an input means such as a touch or a mouse. Make sure

The registration switching unit 4340 performs a function of switching the display for performing the step of reel information registration (S300), in which the basic setting as the initial manufacturing state of the tape reel (100) has a difference that is made. This will be described later.

Meanwhile, the operation controller 4300 may include an output unit 4330 capable of displaying the number of chip images 4110, and the output unit 4330 may include the same output value as the counting display unit 4220. It is also possible to output the total number of chips in the tape reel 100 of the original manufacturing state.

In addition, the control system implemented in the main display 2100 may further include a reel information input unit 4400, and this reel information input unit 4400 is inputted by supplementing the reel information input unit 4400 when it is difficult to recognize or has an error. Function to do so.

It should be noted that the embodiments shown in the drawings may be modified, repositioned, added, or exchanged if the respective concepts are applied.

FIG. 7 is a diagram illustrating a state where a chip image is displayed in the control system of FIG. 6.

As shown in the figure, the tape reel 100 detected by the detector is implemented as the reel image 4111 in the image display unit 4100. Here, a description overlapping with the description of FIG. 6 will be omitted.

In the images displayed on the image display unit 4100, a reel image 4111, which is an image of a reel itself, a chip image 4110 indicating an arrangement of chips, and a center image 4112, which is a central side region in which a tape is wound, is displayed. ) Can be separated.

In the case of chips, most of them contain heavy materials and are often provided with a metallic material. Therefore, since the transmittance of X-rays is generally lower than that of the resin reel itself, the chip may be displayed as a dark area as shown in the drawing. Note that this may be reversed.

In the concept of the present invention, the main purpose is to extract only the image of the chip from the image of the tape reel 100, so that the chip image 4110 itself is the most important factor. In addition, since the area of the center side where the tape is wound may have a meaning as the starting point of the chip counting, and the density of the chip is higher than the outer portion of the reel, the transmittance of the X-rays may be low, so there is a need to remove the counting algorithm during operation. Therefore, the center image 4112 becomes a significant element in the registration step for setting the algorithm, which will be described later.

The image of the tape reel 100, which can be implemented as an image, is stored in a temporary storage unit (not shown) as basic data for counting, and counting of chips is performed based on this.

Meanwhile, the size control unit 4310, which is added to the operation control unit 4300 in FIGS. 6 and 7, may function as an input unit capable of presetting an approximate size of the tape reel.

In the case of the general semiconductor tape reel 100 has a diameter standardized as a minimum of 180mm to a maximum of 380mm, in the present invention, it is possible to additionally control the mechanical operation according to the size.

For example, the output of the X-ray generator 2210 may be varied according to the size of the tape reel 100, or the transfer speed of the input transfer part (1110 of FIG. 15) as the transfer means may be varied. As a preferred embodiment, the size control unit 4310 may distinguish between the small and the large, where the small means the tape reel 100 of 180mm diameter and the larger may mean a size exceeding this. Thus, a smaller conveying speed may be made slower than a larger conveying speed, but is not necessarily limited thereto.

In addition, by setting the size of the tape reel 100 in advance can be temporarily set the area in which the tape reel 100 is present in the entire image area in addition to the advantage that can prevent the loss due to the operation of the counting algorithm that is operated unnecessarily Can have

8 is a diagram illustrating a state in which the number of chips is counted based on the above-described image.

As shown, the chip image 4110 is displayed on the image display unit 4100 under the condition that can be maximally identified by the operation of a predetermined counting algorithm. Accordingly, after selecting and counting the dot or chip area, the data display unit ( In 4200, there is an indication of the result.

Here, the reel information unit 4210 displays an identification code of 000-000000AAA and indicates that 10000 is counted as the number of chips.

On the other hand, in the case of the determination display unit 4230 may display information on whether the registration and / or counting value, it will be described in more detail with respect to FIG.

The display may include a main display (2100 of FIG. 15) and a sub display (2110 of FIG. 15) as described below.

When the image detection by the X-ray generator 2210 and the detector is completed, the counting unit (counter minute) counts the number of chips through an optimized algorithm. This counting is performed by calculating the number of chip images based on the grayscale value.

In the analyzing process, the screen of the display may be divided into an image display unit 4100 and a data display unit 4200, and the image display unit 4100 displays an image of the tape reel 100 detected by the detector 2220. The meaningful image is the chip image 4110. At this time, the outer region and the center region should be excluded from the analysis target, and since the center region 4120 on the inner circumference side has different specifications for each of the tape reels 100, accurate exclusion is required.

In use, the operator may store the exact size of the center area of each tape reel 100 by arbitrarily setting a predetermined radius from the center through visual confirmation while checking the chip image 4110 during the initial registration process. However, such a center area may be automatically analyzed and set. In this regard, the registration method will be described in more detail.

In addition, different counting algorithms may be applied to each tape reel 100 in order to improve the certainty of counting in the chip image 4110. As a variable for the counting algorithm, the diameter of the tape reel 100 and the distance between the chips may be applied. The spacing of the chips, the size of the chip, the material, the shape of the chip, etc. may be important. In one device, since the X-ray generator 2210 and the detector are fixed and the radiation dose is difficult to vary, the chip image may be classified by adjusting image conditions in a state where an image of a constant tape reel 100 is obtained. It is important to find the optimal state that is in place and prepare it as each algorithm. On the other hand, in order to improve the accuracy in the acquisition process of the image of the tape reel 100, the conveying speed of the transfer unit may be varied according to the diameter.

The data display unit 4200 may include a reel information unit 4210 indicating the type of the tape reel 100 and a counting display unit 4220 indicating the number of counted chips as shown in the enlarged view.

The reel information unit 4210 checks the basic information identified by the input side reader unit, and the counting display unit 4220 displays the number information of the chips analyzed in the chip image 4110.

9 illustrates an embodiment of a data display unit 4200 in a display system according to the inventive concept.

Looking sequentially from the column of the top, the first column is a case in which it is determined that the registration is determined in the determination of whether or not the registration (S200) and counting in the determination of whether or not counting (S210) as a first condition. Accordingly, the decision display unit 4230 indicates that counting is possible as a null value.

In addition, the second column indicates a case where it is determined that registration is not registered in the determination of registration (S200) as the second condition as a value of the registration request (NR), in which case the user switches the registration conversion unit 4340 described above. Through the operation of the) to go through the registration procedure of the first tape reel (100).

In addition, the third column is represented by the third condition, which is an indication (NC) when it is determined that counting is not possible in the determination of whether to count (S210), which is registered in the judgment of whether to register (S200), but counting is not possible. Or, it may include a case where the registration of the information is not possible at the time of reel information registration (S300). Therefore, in connection with FIG. 5, it may be understood that the determination of counting (S210) includes a case where registration of information is impossible or setting of a chip is impossible during the reel information registration (S300).

However, the values of the display (Null, NR, NC) may be implemented in various ways depending on the setting.

10 is a diagram illustrating a result of chip counting according to the example described above.

The chip image 4110 displayed on the image display unit 4100 shows a result adjusted according to a predetermined algorithm, and it is confirmed that the chip image 4110 can be distinguished more physically than in the case of FIG. 7.

This is called chip counting (S120) by calling the optimal counting algorithm by contrast with the value entered in the database by the predetermined reel information input (S100), the input of such reel information can be made by scanning the bar code. Yes is as described above.

As a result, the data display 4200 is displayed as an identification code in the reel information unit 4210, and is displayed as the number of chips counted in the counting display 4220.

Here, since the determination display part 4230 is displayed as a null value, it can be visually confirmed that counting is possible.

In the present embodiment, the values of the output unit 4330 of the operation controller 4300 and the counting display unit 4220 of the data display unit 4200 are displayed differently, that is, displayed as values of 3832 and 10000, respectively. Here, the output portion 4330 displays the total number of chips since the first manufacture of the corresponding type of tape reel 100, and the counting indicator 4220 displays the remaining amount for the individual tape reel 100 to be included in the type. It can be understood by dividing into.

This allows the user to quantitatively and visually understand the residual amount relative to the total number in the original initial stage.

The chip counting method of the semiconductor tape reel of the present invention according to the display system described above will be described in more detail.

After the reel information is input through the predetermined reader unit (S100), it is determined whether or not to register the corresponding type of tape reel 100 (S200), and it is determined whether the registered type of tape reel can be counted (S210). )do. When the two conditions are satisfied, the decision display unit 4230 may display a null value. The counting process scans an image through the detection unit (S110), stores it in a temporary storage unit, and displays it in the image display unit 4100. Then, the counting algorithm is called on the tape reel 100 of the type to perform the chip counting operation (S120) including the adjustment of the image.

In the data display unit 4200, the reel information unit 4210, the determination display unit 4230, and the counting display unit 4220 output the respective result values. Finally, the value of the counting display unit 4220 is determined by the corresponding tape reel 100. Accurately displays the remaining number after the operation of the semiconductor assembly process is stopped.

Here, if it is determined that it is not registered at the time of determining whether it is registered (S200), the counting should be performed after the reel information registration (S300) step. The system and the registration method for this will be described in more detail below. .

11 is a flowchart illustrating a method of registering reel information according to the present invention.

If it is determined that the identification code read by the reader unit is of a non-registered type, scanning of the image for registration (S310) is performed first. In this case, an image is acquired using the scan of the counting method (S110), the X-ray generator 2210, and the detector, but the scan of the image in the registration method is basically performed to store the counting algorithm in a database. Has a difference. Such basic registration is preferably performed after the initial manufacture of the tape reel 100, including the total number of chips. However, in some cases, the image is also recorded for the tape reel 100 in which some chips to start counting are already used. The scan may be made.

After the image scan (S310) to select whether to automatically register (S320), where the automatic registration means that the adjustment for the number of chips can be identified through a predetermined adjustment algorithm. Such adjustment may include adjusting a value such as contrast or contrast of an image.

In this case, as described above, it is preferable to input the total number of chips in the tape reel 100 after the initial manufacturing (S330) as described above, in order to minimize the range of error during counting. That is, distortion, reduction, or intersection of shadows may occur according to each adjustment value for identifying an image, which may cause a problem in distinguishing each dot or chip area. Therefore, if the total number of chips to be set is input in advance, the accuracy of the adjustment value is determined by comparing the total number and the number counted through the current adjustment value. If the values do not match, the adjustment value may be changed to repeat the test counting operation S350 to be described later.

After the input of the number of chips S330 is completed, the chip information is output (S340), which may include information such as length, width, thickness, chip spacing, radius, and tape thickness of individual chips.

Accordingly, when the test counting is performed (S350) and the test counting result is matched against the total number at the time of chip count input (S330) in the reel information match determination (S360), predetermined set adjustment values are optimal. Seen to be stored in the database (S370) can be used to call the corresponding adjustment value as a setting value for the tape reel 100 of the same type that needs later counting.

However, the chip number input (S330) is not essential and may be prepared as reel information by the user in some cases.

In this case, when the reel information and the test counting result do not match, the process may return to the step of selecting automatic registration (S320). In this case, the user may select whether to set manually or automatically.

Here, when manually selected in the automatic registration selection (S320), the sensitivity (S381) may be selected, and an analysis algorithm according to the tape reel 100 and the chip may be additionally selected. This analysis algorithm may be selected according to the type of chip, which will be described later in the description of FIG. 12.

In addition, as described above, the counting of the chip image 4110 on the counting algorithm may be affected by the center image 4112, and the same effect may be applied to the registration method. Accordingly, in the manual setting process, a range of the center image 4112 may be artificially set in the image on the image display unit 4100, which will be described later.

When the predetermined setting and adjustment is completed as described above, the test counting process (S350) is performed to determine whether the predetermined reel information is matched (S360), and the process may be repeated again or stored (S370) and may be selected. have.

12 is a conceptual diagram showing an example of the analysis algorithm described above.

Although the analysis algorithm 300 has been described as including only the case of manual setting in the above method, the analysis algorithm may be appropriately selected according to the chip image 4110 even in the process of automatic setting.

The analysis algorithm 300 may include a first mode 310 and a second mode 320. When the first mode 310 is easy to analyze and distinguish between a stereotyped form, that is, a cube or a polyhedron, It may be understood that the second mode 320 includes an irregular shape, that is, a star shape or a complex shape mixed with a curved surface and a straight line.

Here, the first mode 310 may include an auto mode 311, a small mode 312, a standard mode 313, and a large mode 314, which are generally projected on a plane of the chip. Depends on size The auto mode 311 may perform a function of automatically selecting the small mode 312, the standard mode 313, and the large mode 314 from an analysis algorithm.

In addition, it is understood that the second mode 320, which is an unstructured mode, includes all forms other than the first mode 310, and focuses more on fine adjustment by the user in the registered display system which will be described later.

FIG. 13 illustrates a preferred embodiment of a display system in which a registration method according to the inventive concept operates.

In such a registration display system, the user should be understood as a concept including an apparatus for visually confirming and inputting a control signal through the main display 2100 as well as a mechanism, a circuit, an algorithm, etc. for its operation.

Here, since the visual confirmation has a meaning, the registration display system may include the image display unit 4100 like the counting display system. The image display unit 4100 substantially displays the chip image 4110, the reel image 4111, and the center image 4112. However, the border line 4113 for the identification of the center image 4112 is further provided, which will be described later.

A registration controller 4500 is provided together with the image display unit 4100. The registration controller 4500 includes an automatic registration unit 4510 and other manual registration units for the automatic setting described above.

The automatic registration unit 4510 basically includes a chip number input unit 4511 and a start unit 4512 for inputting the total number, and the value of the chip number input unit 4511 is a test counting value by the test counting unit 4560. It is a value for contrast with. The chip number input unit 4511 allows the user to manually input the total number of chips to be initially set. In addition, the starter 4512 functions as an input button for predetermined setting for automatic registration, which may function to call or set the analysis algorithm 300 described above.

The sensitivity may be set by the sensitivity controller 4520 for the manual setting. The user may adjust the sensitivity at which the chip image 4110 may be optimally identified. Such adjustment of sensitivity may include adjustment of brightness or contrast.

14 shows an example of such sensitivity adjustment.

14A illustrates a case where the degree of sensitivity is low. For example, when 80 is set as the set value of the sensitivity controller 4520, the chip image 4110 is highlighted. At this time, as well as the chip image 4110, noise and shadows are highlighted together, so that overlaps of some chips appear, which causes a problem in that dots or chip areas are not clearly distinguished.

In addition, (b) of FIG. 14 illustrates a case where a value of 220 having a high sensitivity is input. At this time, the reel image 4111 and the noise are effectively eliminated, but the chip image 4110 is also lost. In this case, it is likely that some weakly displayed chips are not found.

Therefore, setting the optimum sensitivity has a significant meaning in the registration step, which is used as the basic setting value of the algorithm for counting.

15 illustrates a case where 150, which is a sensitivity at which the chip image 4110 is effectively displayed, is set. Here, the high and low or the degree of the sensitivity may be substituted or variously set according to the applied example. .

In addition, the display system of the present invention may further include a center area adjustment unit 4530 for area adjustment of the center image 4112.

Adjustment by the operation of the center area adjustment unit 4530 is performed through the adjustment of the border line 4113, and the center point for the entire reel image 4111 is set, and based on this, the diameter of the circular border line 4113 is determined. While adjusting, the area of the center image 4112 can be set as accurately as possible.

As described above, in the center area where the tape is wound, the permeability of X-rays is different and there is a high possibility of foreign matter or noise being interposed. Thus, setting of the border line 4113 is useful for determining the area to be counted.

It is possible for the user to manually adjust the size and / or position through an input means such as a touch panel or a mouse.

The algorithm selector 4540 included in the registration controller 4500 functions to select the analysis algorithm described above, and may include a first mode part 4451 and a second mode part 4452 for this classification. As described above, the first mode unit 4451 may include an auto mode, a small mode, a standard mode, and a large mode as a preferred embodiment. Repeated descriptions will be omitted.

The chip information output unit 4550 outputs the information of the identified chip through the above-described manual setting or automatic setting process (S340), and the output value includes the length, width, thickness, spacing, radius, and thickness of the tape. can do. Here, the thickness of the tape is not information of the chip itself, but can be used as a meaningful setting value because it sets the radial separation distance for counting the number of chips. In addition, the said interval means the distance of separation in the circumferential direction.

Here, a test counting unit 4560 for performing the test counting (S350) described above, and if there is an input operation, a predetermined counting value may be output.

This counting value is to determine whether the actual set value is accurate through the determination whether the reel information and the match (S360). If the result is not satisfied, the above process is repeated, and if the accuracy is satisfied, the storage unit 4570 can be used as basic information of the counting algorithm of the tape reel 100.

15 is a perspective view showing a preferred embodiment of a counting device that implements the counting method of a semiconductor tape reel according to the basic concept of the present invention described above.

The counting device of the semiconductor tape reel of the present invention is basically, the main body portion having an X-ray generating unit and a detection unit for generating X-rays to allow the counting of the chip while the tape reel 100 is horizontally disposed in the interior ( 2000), an input unit 1100 disposed at one side of the main body unit 2000, and an inlet unit 1100 for transferring the tape reel 100, and a discharge unit for discharging the tape reel 100 to the other side of the main body unit 2000. And a main display 2100 connected to the main body 2000 to display an X-ray image. In the above descriptions, the display may be understood to mean the main display 2100.

The main body 2000 has a high voltage generator and an X-ray generator 2210 for discharging X-rays by receiving power from the high voltage generator, and the X-ray generator is disposed with a portion of the tape reel 100 being transferred therebetween. A detection unit disposed to face the unit 2210 may be included, except for openings on both sides of the tape reel 100 to draw in and out of the tape reel 100.

Therefore, the main body part 2000 may be formed in a form surrounded by a housing (not shown), and may include a predetermined door that is opened and closed for maintenance, and the door may be disposed at the rear side.

The input unit 1100 may be formed in communication with an opening on one side of the main body 2000, and an input transfer unit 1110 is disposed to automatically move the tape reel 100 at the inlet side of the input unit 1100. (2000) works to flow into the interior.

The input transfer unit 1110 may be formed in a conveyor type, and a power unit (not shown) for providing power to the input transfer unit 1110 may be disposed in the input unit 1100 and / or the main body unit 2000. Can be.

In addition, the input transfer part 1110 is disposed in the form of extending into the main body 2000 for the continuous transfer of the tape reel 100 and, if necessary, made as a whole equipment with the discharge transfer unit 1210. It may be.

The inlet side of the inlet 1100 may be provided with an alignment mechanism 3000 for the alignment of the tape reel 100, such an alignment mechanism 3000 is tape in the front and rear direction about the center of the input transfer unit 1110 By positioning the reel 100, the tape reel 100 may be disposed between the X-ray generation unit 2210 and the detection unit at the correct position.

The discharge unit 1200 includes an discharge transfer unit 1210 to discharge the tape reel 100 after the inspection through the X-ray beam is discharged to the other side of the main body 2000 so as to be collected. In a state in which the 1110 and the discharge transfer unit 1210 are connected in series, input to one side and discharge to the other side may be performed.

However, in consideration of the fact that the collection during the input and discharge is made by the operator by hand, when the input unit 1100 is disposed on one side and the discharge unit 1200 is disposed on the other side based on the body portion 2000 When the inspection of the tape reel 100 of the two or more operators are arranged or one operator moves both sides are made. However, in this case, it is necessary to solve the problem because it causes additional manpower or additional work time.

To this end, the inlet of the inlet 1100 and the outlet of the outlet 1200 may be adjacent to the position. Specifically, when the input unit 1100 is disposed to one side, the discharge unit 1200 is connected to the other side of the main body 2000, so that the transport path of the tape reel 100 can be formed from one side to the other again It may be arranged, it is preferable that the discharge portion 1200 is formed in a form extending from the other side of the main body portion 2000 to one side in front of the main body portion as shown in the figure.

The discharge unit 1200 may be connected by the main body 2000 and the transmission unit as will be described later.

With the above structure, one operator is located adjacent to the corner of one front side of the main body 2000, and the operation of the input, operation and discharge is possible without moving the position.

The main body 2000 may include a main display 2100 on the front side to visually check the results and the operation state of the inspection by the X-ray equipment. The main display 2100 is preferably formed as an image display device having a touch panel in consideration of convenience in use, but is not necessarily limited thereto.

By the way, when the main display 2100 is provided only on the front side, there is a problem that the operator is difficult to check the current state of the equipment during the operation for input from one side of the main body 2000, for this purpose one side of the main body 2000 An additional subdisplay 2110 may be provided.

The sub display 2110 is basically provided to provide convenience of confirmation at the time of closing operation from one side, and may provide substantially the same information as the main display 2100. Accordingly, the sub display 2110 may not be provided with a touch panel, but only image output may be performed.

The sub-display 2110 is arranged to face one side, it is preferable that the operator is disposed so as to be able to rotate forward with respect to the main body portion 2000 in consideration of being located at the front one side corner portion. Accordingly, confirmation of the subdisplay 2110 may be possible to some extent from the side and the front during the operation.

On the other hand, the present invention is provided with a conveying unit of the conveyor type and because the tape reel (100) can be operated continuously, if there is an error in the inspection or equipment problems provided with means for emergency stop in the process of input or discharge Preferably, an emergency button may be provided for this purpose.

The emergency button may be made of a discharge side button 2010 provided on the front side of the main body portion 2000, as described above may be provided with an additional input side button (2011) adjacent to the input unit 1100 side. have.

In addition, the alarm unit 2020 made of light emitting or sound generating means may be further provided so as to check the working state or abnormal state externally or remotely.

The main body 2000 may include a predetermined controller (not shown) to enable the operation of the algorithm described above. The controller may substantially extract a chip from an image of a tape reel to count the number of chip regions. It may be made of a counting unit (not shown) including a. Here, it should be noted that the provision does not necessarily limit only what is included therein, but includes an electrically connected state.

This counting unit performs chip discrimination and counting by an optimal algorithm selected according to the type of tape reel 100 as will be described later.

When the input unit 1100, the main body unit 2000, and the discharge unit 1200 are connected in series, switching of the transfer path is unnecessary, so that the input unit 1100, the main body unit 2000, and the discharge unit 1200 may be operated by one conveyor device. Additional measures are needed.

Therefore, a transmission unit 1300 capable of transmitting the tape reel 100 on the other side of the main body 2000 and the other side of the discharge unit 1200 may be additionally disposed.

The transmission unit 1300 may be considered in the case of a conveyor form, such as the input transfer unit 1110 and the discharge transfer unit 1210, there is a possibility of inaccurate delivery, for this purpose the transmission unit 1300 ) Is preferably operated in a linear motion along the arm arranged in the front and rear direction to perform a predetermined alignment function. The operation of the transmitter will be described later in the description of FIG. 9.

The main body 2000 includes a high voltage applying unit 2200, an X-ray generating unit 2210, and a detecting unit. As described above, the X-ray generating unit emits a line beam in consideration of the possibility of interference of the image according to the arrangement of the chips. It is preferable that 2210 be disposed.

To this end, the X-ray generator 2210 may be formed in an elongated shape in front and rear, and the detector may be formed in a shape corresponding thereto.

The high voltage applying unit 2200 for applying a high voltage to the X-ray generating unit 2210 may be disposed at a selected position, and may be disposed at the rear side to minimize interference of electromagnetic waves.

In addition, an input sensor unit 1120 may be disposed on the input unit 1100 side so that the system can check whether the tape reel 100 is inserted. The input sensor unit 1120 may be a light generating means and a light sensing means disposed corresponding to the front and rear with the input transfer unit 1110 as a conveyor therebetween, and the light has various wavelengths such as infrared rays or visible light. It may include electromagnetic waves.

Similarly, the discharge sensor unit 1220 may be disposed on the discharge unit 1200 side so that the system can check whether the tape reel 100 is discharged, and may be disposed forward and backward with the discharge transfer unit 1210 serving as a conveyor therebetween. Can be.

The detection signals of the input sensor unit 1120 and / or the discharge sensor unit 1220 may be used as information for operating or stopping the input transfer unit 1110 and / or the discharge transfer unit 1210. For example, when the inspection of the continuous tape reel 100 is in progress, it may be necessary to delay a time for a process such as checking the operator and attaching a label when discharging, and when the tape reel 100 is detected by the discharge sensor unit 1220. The operation of the discharge transfer unit 1210 may be set to stop and wait until a predetermined time or operation input.

16 is a front view of the counting device for a semiconductor tape reel of the present invention.

The sub display 2110 may be disposed to face one side and may be disposed to be rotated forward with respect to the main body part 2000 in consideration of an operator located at one front corner portion. To this end, the sub display 2110 may be coupled to the main body 2000 by the rotating unit 2120.

The input part 1100 and the main body part 2000 are disposed at the rear side based on the front view, and the discharge part 1200 is disposed at the front side of the front side.

As described above, the main body part 2000 includes the sub display 2110 which is an additional image display means on the input part 1100 side, and the X-ray generating part 2210 is disposed symmetrically with respect to the feed path of the tape reel 100. And a detector 2220.

The input part 1100 is connected to an opening at one side of the main body part 2000 in a form mostly wrapped with a predetermined cover in consideration of the outflow or inflow of foreign matter or leakage of X-rays, and an input hole 1111 for input is formed at one side. The inlet 1111 side may be provided with an alignment mechanism 3000 for the alignment of the tape reel (100).

In addition, the discharge part 1200 is also connected to the opening or the transmission part 1300 of the other side of the main body part 2000 in a form that is mostly wrapped in a predetermined cover, the discharge port 1211 for discharge and collection is formed on one side do.

In the above description, the arrangement of the sensor unit for sensing input and discharge has been described. This function of the sensor unit is a means for checking whether the operation or the presence of the tape reel 100, it is useful for the chip counting of the tape reel (100) to accurately check the type and basic information of the tape reel (100) Do.

Therefore, the input side leader part (not shown) and the discharge side leader part (not shown) may be additionally arranged to direct the tape reel 100 to be injected, and the tape reel 100 to be discharged.

Basically, the present invention has a major significance in checking the number of chips in the state of being wound on a reel between use of a tape reel. The quantity of chips set individually exists on the reel before use. For this purpose, the production is carried out with an identification code such as a bar code indicating basic information such as the number of chips first placed during the manufacture of the first tape reel. You lose.

In accordance with the present disclosure, the type of the tape reel 100 to be input may be determined in advance by placing the input side leader part on the input part 1100 side. Since each tape reel 100 is different from each other in diameter, arrangement of chips, materials of chips, shapes and sizes of chips, there is a need for a counting algorithm optimized for each type.

When the input side leader part is arranged on the input part 1100 side, the type of the tape reel 100 can be grasped in advance before being transferred into the main body part 2000, so that the analysis and counting algorithm can be automatically optimized and prepared. Has The selection of analysis and counting algorithm in the counting part is basically made by the operator. However, when the input side leader part is arranged, an error case can be minimized and the time required for setting is shortened, thereby increasing the efficiency of the process. It should be noted that

On the other hand, as described above, the tape reel 100 may be continuously added to shorten the working time. The discharge side reader portion may not operate substantially for analysis and counting of the arrangement of chips, in which case the discharge side reader portion is useful for verifying that the tape reel 100 to be collected is the same as the tape reel 100 that has been analyzed. Do. Thus, the leader section described in the above method means an input side reader section.

When one tape reel 100 is input from the input unit 1100 and counting is completed in the main body 2000, the completed data is waited in the state displayed on the main display 2100. When transferred, if the checks in the input side reader unit, the counting is completed and the checks in the discharge side reader unit is consistent, the tape reel 100 can confirm that the check is completed.

When the same tape reel 100 is confirmed by the discharge side leader in this way it can be understood that the analysis and / or counting for the tape reel 100 is terminated, and further analysis and counting for the next tape reel 100 You are ready to work.

The concept of the present invention may further include a label output unit (not shown). The label output unit outputs the counting completed information and discharges the discharge reel at the discharge unit 1200 to confirm the tape reel at the discharge side leader unit ( 100).

Therefore, the tape reel stored in use can be analyzed and confirmed through the above-described process and can be operated with the number of remaining chips displayed.

On the other hand, the input side reader unit has a meaning in the initial registration process of the tape reel 100 as well as the analysis process. That is, when the tape reel 100 newly applied to the counting unit is applied in the system of the present invention, it is preferable to go through the registration process first to standardize it, and for this purpose, the registration process is performed while confirming and storing a predetermined identification code. Roughly, it works to select the best counting algorithm.

On the other hand, the concept of the prevention of interference by the adjacent chip described above will be described in more detail. This interference is related to the function of the sensitivity controller 4520 described above.

In this case, the chip has a predetermined thickness d and height h, and this value acts as a variable affecting the irradiation area of the beam.

In the area immediately below the vertical line extending from the X-ray source in the normal direction, the X-ray beam to be irradiated can be detected directly by the detector through the respective chips, but the X-ray beam penetrating one chip toward the outer circumferential side toward the outer circumferential side It is more likely to interfere with other adjacent chips, resulting in regions of overlapping regions.

Therefore, there is a need to limit the area of the beam radiated from the X-ray source, which can be defined as an angle to the normal direction from the X-ray source.

The chips are arranged in a circumferential direction from the center side of the tape reel 100 in a helical manner, and in general, since the radial distance is narrower than the distance in the circumferential direction, the angle θ defining this limit area m is It can be determined by the arrangement in the radial direction. However, when the spacing of the array in the circumferential direction is smaller, this limit angle θ can be determined from the circumferential arrangement, in which case the value representing the thickness of the tape or the spacing in the radial direction of the chip is It can be understood to mean a circumferential distance between approximately adjacent chips.

Therefore, as described above, the area of the image may be defined as the limit area m, and the irradiation range of the X-ray beam, which is meaningful in practical counting, may be defined as a beam.

The critical area m of this beam can be determined by the arc tangent of the ratio of the thickness of the tape to the height h of the chip. This description is equally applicable to chips arranged in the circumferential direction.

On the other hand, the shape of the beam transmitted through the tape reel 100 may be selectively applied to a variety of shapes, such as conical or square pyramid, but is made of a line beam form to minimize the range in both directions as described above will be. However, in some cases, the area of the beam diffused in the shape of a square pyramid may be set in a manner that is limited through a predetermined cutter member. Accordingly, the beam radiated from the X-ray generator may include a shutter for detecting an undesired exposure or an image from the accurate detector.

However, in the above description of the present invention, the case where a predetermined area is specified by limiting the area of the X-ray beam itself is given as an example, but the area detected by the detection unit may be limited by a predetermined algorithm or may be limited by a mechanical device. Of course. In this case, the analysis may form the image of the entire reel by combining the images for each inspection area.

Fig. 17 is a plan view showing the counting device of the semiconductor tape reel of the present invention, showing a rough internal structure together.

As described above, when the inlet of the inlet 1100 and the outlet of the outlet 1200 are positioned adjacent to one side, as shown, the inlet 1100 and the main body 2000 are provided at one side and the front side of the inlet 1100. The side is provided with a discharge unit 1200 extending from the other side to one side.

When the input unit 1100, the main body unit 2000, and the discharge unit 1200 are connected in series, switching of the transfer path is unnecessary, so that the input unit 1100, the main body unit 2000, and the discharge unit 1200 may be operated by one conveyor device. Additional measures are needed.

Therefore, a transmission unit 1300 capable of transmitting the tape reel 100 on the other side of the main body 2000 and the other side of the discharge unit 1200 may be additionally disposed.

The transmission unit 1300 may be considered in the case of a conveyor form, such as the input transfer unit 1110 and the discharge transfer unit 1210, there is a possibility of inaccurate delivery, for this purpose the transmission unit 1300 ) Is preferably operated in a linear motion along the arm arranged in the front and rear direction to perform a predetermined alignment function. The operation of the transmitter will be described later in the description of FIG. 9.

The main body 2000 includes a high voltage applying unit 2200, an X-ray generating unit 2210, and a detecting unit. As described above, the X-ray generating unit emits a line beam in consideration of the possibility of interference of the image according to the arrangement of the chips. It is preferable that 2210 be disposed.

To this end, the X-ray generator 2210 may be formed in an elongated shape in front and rear, and the detector may be formed in a shape corresponding thereto.

The high voltage applying unit 2200 for applying a high voltage to the X-ray generating unit 2210 may be disposed at a selected position, and may be disposed at the rear side to minimize interference of electromagnetic waves.

In addition, an input sensor unit 1120 may be disposed on the input unit 1100 side so that the system can check whether the tape reel 100 is inserted. The input sensor unit 1120 may be a light generating means and a light sensing means disposed corresponding to the front and rear with the input transfer unit 1110 as a conveyor therebetween, and the light has various wavelengths such as infrared rays or visible light. It may include electromagnetic waves.

Similarly, the discharge sensor unit 1220 may be disposed on the discharge unit 1200 side so that the system can check whether the tape reel 100 is discharged, and may be disposed forward and backward with the discharge transfer unit 1210 serving as a conveyor therebetween. Can be.

The detection signals of the input sensor unit 1120 and / or the discharge sensor unit 1220 may be used as information for operating or stopping the input transfer unit 1110 and / or the discharge transfer unit 1210. For example, when the inspection of the continuous tape reel 100 is in progress, it may be necessary to delay a time for a process such as checking the operator and attaching a label when discharging, and when the tape reel 100 is detected by the discharge sensor unit 1220. The operation of the discharge transfer unit 1210 may be set to stop and wait until a predetermined time or operation input.

FIG. 18 is a side view seen from one side of FIG. 15, and FIG. 19 is a diagram illustrating an embodiment of a transmitter.

The sub display 2110 is disposed to face one side, and it is preferable that the operator is disposed to be able to pivot forward with respect to the main body part 2000 in consideration of being located at one front corner portion. The sub display 2110 may be coupled to the main body 2000 by the rotating unit 2120.

The input part 1100 and the main body part 2000 are disposed at the rear side based on the front view, and the discharge part 1200 is disposed at the front side of the front side.

As described above, the main body part 2000 includes the sub display 2110 which is an additional image display means on the input part 1100 side, and the X-ray generating part 2210 is disposed symmetrically with respect to the feed path of the tape reel 100. And a detector 2220.

The input part 1100 is connected to an opening at one side of the main body part 2000 in a form mostly wrapped with a predetermined cover in consideration of the outflow or inflow of foreign matter or leakage of X-rays, and an input hole 1111 for input is formed at one side. The inlet 1111 side may be provided with an alignment mechanism 3000 for the alignment of the tape reel (100).

In addition, the discharge part 1200 is also connected to the opening or the transmission part 1300 of the other side of the main body part 2000 in a form that is mostly wrapped in a predetermined cover, the discharge port 1211 for discharge and collection is formed on one side do.

The transmission unit 1300 performs a function of transferring the tape reel 100 between the other side of the main body 2000 and the discharge unit 1200, and thus is formed in a long shape in the front and rear at the other side of the main body 2000. It can be divided into the inflow side of the rear side and the transmission side of the front side.

The transmission unit 1300 includes a plate having a flat bottom surface (not shown), an arm portion 1320 formed in the front and rear from the upper side of the plate, and a bracket portion 1400 transferred forward and backward along the arm portion 1320. It can be done by.

The bracket unit 1400 is repeatedly transported forward and backward along the arm unit 1320 by the power of the transmission driving unit 1310, when the tape reel 100 discharged through the transfer unit inside the main body 2000 is seated on the plate This function is to align and move downward to transfer to the discharge transport unit 1210, the structure of the bracket portion 1400 will be described later in the description of FIG.

The plate may be disposed to be stepped downward than the transfer portion of the main body 2000. Here, the conveying part of the main body part 2000 may be understood as the other side of the feeding part 1110 because it is preferable for the simplicity of the structure that the feeding part 1110 of the feeding part 1100 is disposed through the inside. Can be.

The discharge transfer unit 1210 is preferably a transfer member such as a conveyor disposed inside the front side of the transfer unit 1300, such that the transfer unit 1300 may be substantially formed as part of the discharge unit 1200. have.

On the other hand, the transmission unit 1300 may be provided with a window that can be opened and closed to the upper side for management in the event of a jam or transfer of the tape reel 100, the window portion is part of a transparent material to enable the operation of the inside Can be done.

In this case, the window portion may be divided into a transmission side window portion 1340 on the front side and an inflow side window portion 1330 on the rear side, but is not necessarily limited thereto.

20 is a perspective view showing in more detail the bracket provided in the above-described transmission unit.

The bracket unit 1400 functions to transfer the tape reel 100 that has been analyzed between the main body 2000 and the discharge unit 1200 while being transported back and forth in the transmission unit 1300 as described above. There is a possibility that the transfer to the correct position is not made between the conveying parts in the form of a conveyor. This problem of position causes a problem that is difficult to identify in the discharge side reader portion 2320 described above.

To this end, the bracket portion 1400 is to push the outer peripheral side of the tape reel 100 as well as to perform the function of alignment at the same time.

Specifically, the bracket portion 1400 includes an upper surface portion on which the fastening portion 1420 is formed, a side wall portion 1430 extending downward from the upper surface portion 1410 to the rear side, and the other end of the side wall portion 1430. It may be made to include a slope portion 1440 is formed to be inclined to the front and the other side extending from.

The fastening part 1420 may be coupled to a member moving along the arm part 1320 or moving along the arm part 1320, and the side wall part 1430 may substantially move the tape reel 100 toward the discharge part 1200. It transmits mechanical force to move.

In addition, the slope portion 1440 allows the tape reel 100 to be aligned at an accurate position on the upper surface of the plate together with the side wall portion 1430 in the pushing process, and the side wall portion 1430 and the slope portion 1440 The outer circumferential surface of the tape reel 100 is in close contact with the inner surface of the side wall portion 1430 and the inner surface of the slope portion 1440 around the connection portion.

11 is a perspective view showing the alignment mechanism of the input unit in the counting device of the semiconductor tape reel of the present invention.

Similar to the concept of alignment described above, alignment of the tape reel 100 at the time of loading is more meaningful for accurate analysis. That is, in the present invention, since the X-ray beam of a long line beam shape is used in front and rear to minimize the interference of the image, the center of the tape reel 100 which is fed in the horizontal direction is substantially aligned with the center line of the feed transfer unit 1110. The operation is requested. As described above, since the tape reels have different sizes and specifications, it is virtually impossible for the operator to place the tape reel 100 in the correct position by eyeball.

To this end, the alignment mechanism 3000 may have an arc-shaped groove corresponding to the outer circumference of the tape reel 100. The above-described grooves are arranged in a plurality of stages of inserts, which are grooves of various sizes corresponding to the diameter of the tape reel 100, and are preferably arranged in the order of inserts having a larger radius from the lower inserts toward the upper side.

In consideration of the specifications of the tape reel used in the art, the lowermost insert may correspond to 180 mm in diameter, and the uppermost insert may correspond to 380 mm in diameter. In addition, the step is preferably made of four, but is not necessarily limited thereto.

At this time, when each inserting portion is in close contact with the outer surface of the tape reel 100 to the inner surface of the arc shape on one side, the center is naturally aligned, and the other side of the tape reel 100 is in contact with the upper surface of the feed transfer unit 1110 Is started by the frictional force to the other side.

At this time, since each insertion portion forms a step, the alignment mechanism 3000, more precisely, each insertion portion is preferably disposed to be inclined downward to the other side for the efficiency of the transfer. That is, when the alignment mechanism is disposed to be inclined downward as described above, the tape reel 100 may be more naturally transferred to the other side by frictional force and self-weight with the input transfer part 1110.

It is a top view which shows the alignment mechanism of a tape reel.

The alignment mechanism is formed in a plate-shaped body portion 3100 and a multi-stage to one side of the body portion to form an appearance, the inner circumference of the inner part of the arc shape so as to correspond to the outer circumferential surface of the tape reel and the arc is a different radius It is provided with a some insertion part which consists of.

Based on the matters shown in the drawings, the alignment mechanism 3000 has an upper surface formed in a substantially flat form on one side and provided with a plurality of insertion portions stepped downward toward the other side, the other side of which the upper surface on which the tape reel is seated in the conveying means. Are arranged oriented.

The inserts have an arc-shaped step and an upper inserting portion 3400 including an outermost side, that is, an arc shape having one of the largest radiuses is disposed, and an innermost side, that is, an arc having the smallest radius on the other side. The lower inserting portion 3300 including the shape is disposed.

Looking at the shape of the inserts in more detail, each insert is arranged to be stepped downward so that each has a groove shape and the inner peripheral side has a predetermined stepped inner wall. The bottom of the groove is arranged to face the bottom of the tape reel corresponding to the shape of the inner wall, respectively, so that at least a part of the bottom of the other side of the tape reel inserted into the insertion portion is in contact with the upper surface of the conveying means to receive a frictional force.

In the concept of the present invention, the alignment mechanism 3000 is sufficient to align with the transfer means by inserting the other side of the tape reel so that when the alignment is completed, the alignment mechanism 3000 is moved to the other side by the frictional force with the transfer means and is introduced into the predetermined equipment.

In order to achieve the purpose of this alignment, the arc shapes of the respective insertion portions may be formed as part of the concentric circles, and thus the alignment mechanism 3000 is formed in a shape that is symmetrically forward and backward with respect to both centerlines of the body portion 3100 as a whole. .

However, the arc-shaped inserts may be arranged at predetermined intervals in both directions. If the distances are far or close to each other, they may not form concentric circles, and at least the virtual center lines in both directions require a matching condition. . Here, the center line means an imaginary straight line extending both sides from the center of the front-back direction with respect to each insertion part.

At this time, the arc shape is preferably formed in a semicircle or less, that is, the angle connecting the end side of the arc shape is 90 degrees or less so that the drawing to the other side can be performed smoothly.

In addition, it is more preferable that the step side, which is an inner wall, is formed in a straight line shape in both directions so that the guidance at the time of horizontal movement to the other side is possible.

According to the above concept, the insertion portion is formed in a shape in which an arc shape on one side and a rectangular shape on the other side are combined. That is, the arc shape of one side performs a function of centering the tape reel, and the rectangular shape of the other side serves as a guide when moving to the other side as the extension 3500.

When the inserts are formed only in an arc shape, the transfer is performed in a state in which only the other side of the bottom surface of the tape reel is substantially contacted during the transfer process by the frictional force with the transfer means before being completely separated from the alignment mechanism 3000. When the contact is released, the play is generated, which may cause a problem that accurate linear movement to both sides is difficult due to the subtle difference in frictional force. It should be noted that the extension 3500 has the advantage of holding the correct position until the tape reel is completely separated from the alignment mechanism 3000 and seated on the upper surface of the transfer means.

The operation of the alignment mechanism 3000 is first moved substantially downward by the operator to the inserting side, and horizontal alignment is performed by the conveying means after the alignment is completed, the inner peripheral surface of the insertion portion and the outer peripheral surface of the tape reel is almost If there is a match, a problem can arise which is virtually difficult to insert. To this end, the upper end side of each insertion portion, that is, the connection portion with the upper insertion portion is preferably formed in the form of a chamfer to form an inclined surface portion 3210.

The inclined surface portion 3210 allows for smooth insertion of the tape reel. A more detailed description thereof will be described later with reference to FIG. 4.

Meanwhile, the body part 3100 may have a predetermined fastening hole 3111 penetrating up and down, and the shape, number, and arrangement of the fastening holes 3111 may be selectively made. The fastening hole 3111 functions so that a predetermined fastening member is inserted and fixed to the conveying means side.

22 is a perspective view showing an operating state of the alignment mechanism of the input unit in the counting device of the semiconductor tape reel of the present invention.

The conveying means is defined as an input conveying part 1110, and in the example in which the conveying means is a conveyor, the alignment mechanism 3000 described above is disposed upward from one side of the input conveying part 1110.

In the illustration, the inserts are arranged in four different diameters and represent the aligned state at the smallest lower insert 3300. Orientation in the following description will be described uniformly with reference to FIG.

The operator naturally aligns the outer periphery of the tape reel 100 to the inner wall of the lower inserting portion 3300 in a state where a predetermined pressure is applied downward and one side while the tape reel 100 is lifted.

In this state, the bottom of the other side of the tape reel 100 is in contact with the top surface of the feed unit 1110, and when the pressure of the finger is released, the other side is pulled to the other side by the frictional force and completely detached from the alignment mechanism 3000. 100 may be completely seated along the centerline of the feed transfer unit 1110 to move to the predetermined equipment.

FIG. 23 is a side sectional view of the arrangement of FIG. 22 as viewed from the side. FIG.

As described above, the input transfer unit 1110 shows an example of a conveyor, and the alignment mechanism 3000 is disposed upward at one side thereof.

At this time, the alignment mechanism 3000 is preferably disposed to be inclined downward toward the other side, in which case the withdrawal after the alignment is completed is made by the frictional force with the input transfer unit 1110 and the weight of the tape reel 100 is more. It can be transferred smoothly.

In addition, the bottom surface of the other end of the alignment mechanism 3000 is preferably spaced apart upward from the conveying means. In the example of the present invention, since the respective insertion portions form an arc shape and are stepped, they have a predetermined height. In the case of simply placing horizontally, the contact with the conveying means is virtually impossible, and when the contact is arranged closely with the inclination, the contact between the insert and the tape reel 100 can only be made in a part of the inner wall of one side. For the sake of certainty, it is desirable that the bottom face of the tape reel be inclined and spaced apart so that the bottom face of the tape reel is completely in contact with the bottom of the insertion part in the correct insertion state of the tape reel into the insertion part.

It is as described above that each of the insertion portions has an inclined surface portion 3210. When explaining the structure on the side cross section more precisely, the insertion portion is inclined surface portion 3210 inclined downward from the upper side, the step portion 3220 extending downward from the lower end side of the inclined surface portion 3210 and forming an inner wall, the bottom portion In the tape reel 100 is made of a mounting surface portion 3230 is inserted and seated.

Here, it should be noted that the portion of the alignment mechanism 3000 corresponding to the radius of the tape reel 100 is the step portion 3220, not the inclined surface portion 3210. The inclined surface portion 3210 has a radius larger than that of the tape reel 100 inserted into the insertion portion.

According to the arrangement state of the tape reel 100, the seating surface portion 3230 is not in close contact with the bottom surface of the tape reel 100 as a whole.

Referring to FIG. 21, each of the seating surface portions 3230 has a form of a portion of a circle having a radius corresponding to the bottom surface of the tape reel, and the lower inserting portion 3300 has the seating surface portion 3230 in the front and rear directions. The cut surface and the rectangle are formed in a combined shape, but the other inserts including the upper insert 3400 may have an arc shape and two rectangular shapes disposed on the end side thereof. This form is a shape derived from the concept arranged in multiple stages of the present invention.

The body 3100 may include a predetermined fastening hole 3111, and the fastening member 3110 may be inserted into the body 3100 to be fixed to a portion of the transport means. However, the case in which the body 3100 has a predetermined protrusion or groove and has a groove or a protrusion coupled to the corresponding portion of the transfer means is also included in the concept of the present invention.

On the other hand, as described above, the alignment mechanism 3000 is inclined downward to the other side, but is preferably spaced apart from the upper surface of the transfer means as described above.

Therefore, the inclination providing part 3120 of the shape which becomes smaller in the other side on the side cross section may be interposed between the transfer means and the lower part of the body part 3100.

In addition, the inclination providing part 3120 may be formed as a part of the body part 3100. In this case, the body part 3100 is formed in a shape in which the height gradually decreases toward the other side, unlike the flat plate example described above. .

The multi-stage inserts of the alignment mechanism 3000 may be formed in a shape and a number according to a selection. In the case of the semiconductor tape reel to be described below, the lower insert may be used in consideration of the size of approximately 180 mm to 380 mm in the art. The radius of the arc of 3300 may be made to correspond to 90mm, the radius of the arc of the upper inserting portion 3400 may be made to correspond to 190mm. Here, the meaning of the correspondence is not the same as the radius of the tape reel 100, but having a play enough to be inserted, it is noted that it is understood that the concept including the same area and the area larger by about a few mm.

In addition, the number of the multi-stage in the semiconductor tape reel is preferably made of four, but is not necessarily limited thereto.

In addition, the inclined surface portion 3210 is preferably formed at an angle of 45 degrees in consideration of the relationship with the seating surface portion 3230 of the insertion portion disposed on the upper side, but is not necessarily limited thereto.

The alignment mechanism 3000 of the present invention has the advantage that the accuracy of the simplicity of the structure and the accuracy of the transfer is improved because the precise alignment is possible only by simply inserting the tape reels of various sizes while being arranged in a simple manner on the input side of the transfer means. Have

Meanwhile, in the related art, in the case of the semiconductor tape reel, there is only a method of quantitatively measuring the number or individually checking the process of unwinding and winding the tape reel as shown in FIG. A lot of non-economics occurred.

In recent years, electronic products produced in one process are diversified, and according to the trend of mass production, tape reel replacement and consumption are fast, and accurate identification of the remaining chip number is a challenge for overall process efficiency.

The chip counting method and the display system of the semiconductor tape reel according to the concept of the present invention, the accuracy and speed is dramatically improved by replacing the conventional manual counting method of the chip with the image processing method using the X-ray beam There is an advantage that can be.

In addition, while the counting process can be effectively made corresponding to a variety of tape reel, the user can intuitively operate, and there is an advantage that the efficiency is excellent.

In the above, the present invention has been described in detail based on the embodiment and the accompanying drawings. However, the scope of the present invention is not limited by the above embodiments and drawings, and the scope of the present invention will be limited only by the contents described in the claims below.

Claims (8)

A display system for chip counting of semiconductor tape reels, An image display unit displaying a planar image of the tape reel scanned through the X-ray generator and the detector; Spiral arrangement of the image display unit by the reel information unit for outputting the identification code of the tape reel input through the reader unit, a judgment display unit indicating whether the identification code is registered in the database, and the counting algorithm of the identification code called from the database A data display unit including a counting display unit to display the number of chips counted from the captured chip image; And Chip counting display system comprising a; operation control unit including a control unit and a termination unit for the start and end of the counting. The method of claim 1, The determination display unit, The first condition is output when the tape reel of the inputted identification code is registered and counting is possible, and the second condition is output when the tape reel of the inputted identification code is not registered. Chip counting display system, characterized in that the output in the third condition if the counting is stored as impossible but counting and the tape reel of the input identification code is not registered but counting is impossible in the registration process. The method of claim 2, The operation control unit, And a registration switching unit for switching to a registration control unit for registering the tape reel when the second condition is output. The method of claim 1, The image display unit, And a reel image excluded when the chip is counted by the called counting algorithm, a chip image in which the chip is arranged for chip counting, and a center image, which is the center area of the chip arrangement at the center where the chip is arranged. Chip counting display system. The method of claim 1, And an output unit for displaying the total number of chips in the first manufacturing state of the tape reel for the corresponding identification code. The method of claim 3, It is switched from the data display section through the input of the registration changeover section. Among the images of the tape reel, a sensitivity control unit for setting the sensitivity at which the chips of the chip image are displayed and distinguished from each other and a first mode unit corresponding to the atypical chip or the second mode unit corresponding to the atypical chip are selected in the analysis algorithm. An algorithm selector for displaying the information of the chip, a chip information output unit for displaying information of the chip, a test counting unit for starting test counting and displaying the number of chips counted under a set sensitivity and a selected mode condition, the number of the counted chips, And a registration control unit having a storage unit for storing the set sensitivity and the selected mode condition as a counting algorithm in a database when the total number of chips of the tape reel of the corresponding type is matched. The tape reel, in which the tape to which the semiconductor chip is coupled, is transferred from one side to the other side in a horizontal state, and counts the number of chips in the X-ray generator that irradiates the tape reel, the detector, and the image detected by the detector. A main body unit having a counting unit; An inlet for introducing a tape reel into the main body; A discharge part which receives and discharges the tape reel from the main body part; And And a display unit for displaying the image detected by the detector and the number counted by the counting unit. The display unit, A counting device for a semiconductor tape reel, characterized by displaying a chip image arranged in a spiral. The method of claim 7, wherein An input side reader unit arranged to face the input unit side and reading an identification code displayed on the tape reel; The counting unit, And counting the number of chips by selecting one of a plurality of algorithms according to the type of tape reel recognized by the input side reader unit.

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