WO2015141378A1 - Thrust measurement device and thrust measurement method - Google Patents

Abstract

A thrust detector which uses a leaf spring and a wire material and which is held in space is arranged opposite of a thrust generator. A thrust transmitter and the thrust generator are designed so as to use the magnetic force, the atomic force and the electrostatic force to perform the same operations. The thrust generated in the thrust generator is measured by measuring the force and the acceleration produced in the thrust transmitter.

Description

Thrust measuring device and thrust measuring method

This invention relates to a measuring apparatus and a measuring method for measuring the thrust of a thrust generator and measuring the characteristics of the thrust generator from the generated thrust.

Conventionally, there are the following two methods for measuring the thrust. In the conventional method (1), a thrust generator is installed on a horizontally moving stage such as a linear guide, and the thrust is detected using a force sensor. In the conventional method (2), a thrust generator is held in a space with a plate or a wire and the thrust is detected using a force sensor. In particular, the conventional method (2) is advantageous in that since the thrust generator and the force sensor are separated from each other, when the thrust generator generates heat or vibrates, these do not affect the measurement of the force sensor as noise. . Another feature is that the zero point adjustment of thrust measurement is easy. As an example, there is one in which a jet engine is suspended by a leaf spring to perform thrust measurement (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 6-50849 (FIG. 1)

However, in the conventional method (2), since it is necessary to hold the thrust generator to be measured in a space with a plate or a wire, it is necessary to manufacture a thrust measuring device (thrust transmitter) for each thrust generator. . Further, since the thrust generator to be measured is held in the space, there is a problem that the measuring device becomes large.

The thrust measuring device according to the present invention is:
A thrust generator installed in the moving mechanism to generate thrust,
A thrust transmitter supported by the structure via a structure holding body that is either one or both of a leaf spring and a wire, and disposed at a predetermined distance from the thrust generator;
A force sensor attached to the thrust transmitter for detecting a thrust generated between the thrust generator and the thrust transmitter;
The thrust generated in the thrust transmitter is measured by the force sensor.

According to the present invention, it is not necessary to hold the thrust generator in the space with a leaf spring or a wire, and the thrust generator and the force sensor are separated from each other as in the case of measuring the thrust while holding the thrust generator in the space. Therefore, even when the thrust generator generates heat or vibrations, the effect that these do not affect the force sensor as noise can be exhibited. For this reason, there are significant advantages such as downsizing and generalization of the thrust transmitter.

It is sectional drawing which shows the thrust measuring apparatus by Embodiment 1 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 2 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 3 of this invention. It is sectional drawing which shows the thrust measuring apparatus by Embodiment 4 of this invention. It is sectional drawing which shows the thrust measuring apparatus by Embodiment 5 of this invention. It is sectional drawing which shows the thrust measuring apparatus by Embodiment 6 of this invention. It is sectional drawing which shows the thrust measuring apparatus by Embodiment 7 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 8 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 9 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 10 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 11 of this invention. It is a model figure for demonstrating the principle of a measurement error. It is a figure for demonstrating the method of the calibration measurement using a load cell. It is a figure which shows an example of the calibration measurement result at the time of using the thrust measuring device by Embodiment 11 of this invention. It is a figure which shows the example of a measurement of a non-excitation thrust at the time of using the thrust measuring device by Embodiment 11 of this invention. It is sectional drawing which shows the thrust measuring device by Embodiment 12 of this invention. It is a figure which shows the example of a part of thrust measuring apparatus at the time of utilizing both a leaf | plate spring and a wire as the structure holding body 1. FIG.

Embodiment 1 FIG.
FIG. 1 is a cross-sectional view showing a thrust measuring apparatus according to Embodiment 1 of the present invention. The structural body 2 (a typical object has a ceiling or a wall, but is not limited to this as long as the apparatus can be installed), and the structure transmitter 1 which is a leaf spring or a wire is used for the thrust transmitter 3. Is held in space. In FIG. 1, the thrust transmitter 3 is held at two positions by the structure holder 1, but the holding number may be less than 2 or 2 or more. Further, the thrust transmitter 3 does not need to be held only by the structure holding body 1 and may have an auxiliary holding mechanism (for example, a moving mechanism). A thrust generator 4 is installed opposite to the thrust transmitter 3, a magnet 5 is attached to the thrust transmitter 3, and a magnetic body 6 is attached to the thrust generator 4. The magnet 5 and the magnetic body 6 are installed so that each other is attracted by a magnetic force. Here, as said structure holding body, either one of a leaf | plate spring or a wire may be sufficient, or both (after-mentioned) may be sufficient.
The structure holding body is metallic and has a characteristic that the spring coefficient in the left-right direction in FIG. 1 is smaller than the spring coefficient in the up-down direction and the front-rear direction. The spring coefficient in the left-right direction should be as small as possible. This is because the structure holding body 1 aims to move the thrust transmitter 3 in the left-right direction in FIG. Specifically, for example, a leaf spring made of brass or SUS304 having a thickness of 0.3 mm, a width of 300 mm, and a length of 600 mm, a high-strength piano wire, and the like are not limited thereto, but the thickness is compared with the width and length. It may be a metal having a short shape, a high carbon steel material, a plastic leaf spring, a high carbon steel wire which is a spring wire, or a plastic wire.

Here, the magnet 5 and the magnetic body 6 may be opposite to each other. A magnet may be used instead of the magnetic body 6. Moreover, the magnet described here shows the general thing which can generate | occur | produce a magnetic force, and the necessity of external energy (for example, electricity) does not ask | require. Moreover, the thrust generator 4 described here includes all devices capable of generating a thrust, and the operation mode is not limited. In addition, if thrust is generated as a result, a device not intended to generate thrust is included. Typical examples of the thrust generator 4 include a jet engine (which generates a thrust by a chemical reaction), an ion engine (which generates a thrust by an electric reaction), and a propeller (which generates a thrust by moving the surrounding fluid). ), Linear drive motor (thrust is generated by electromagnetic force), fan (thrust is generated by moving surrounding fluid), ball screw mechanism and rotary motor (rotational motion is converted into linear motion) And an inertial drive motor (which generates thrust using inertial force). The thrust generator 4 can be moved by a moving mechanism 8. Typical examples of the moving mechanism 8 include a linear guide, a caster, a tire, a hydraulic guide, and a pneumatic guide. A force sensor 7 is attached to the thrust transmitter 3. The force sensor 7 measures a force generated between a reference point or surface (for example, a lateral wall, a hole, or a bolt) of the structure 2 and the thrust transmitter 3. When thrust is generated in the direction of the arrow of the thrust generation direction 9 by the thrust generator 4, the force acts on the thrust transmitter 3 due to the attractive force acting between the magnetic body 6 and the magnet 5, and the force sensor 7 measures the thrust. It becomes possible.

Such a configuration makes it possible to measure the thrust without directly holding the thrust generator 4 in the space. Therefore, even when the measurement target thrust generator is replaced, the measurement target can be changed only by installing the thrust generator 4 to which the magnetic body 6 is attached in the moving mechanism 8. Further, since the size of the thrust transmitter 3 does not depend on the thrust generator 4, the thrust measuring device can be downsized.

Further, according to such a configuration, when the thrust generator 4 generates heat, when torsional force is generated, or when vibration is generated, the influence of these on the force sensor 7 can be eliminated, and precise thrust measurement can be performed. It becomes possible.

Embodiment 2. FIG.
Further, as shown in FIG. 2, either an atomic force or an electrostatic force 10 or both may be used instead of the electromagnetic force. When using electrostatic force, the voltage generator 11 may be connected as a device for applying a charge from the outside. If the thrust transmitter 3 and the thrust generator 4 have already accumulated electric charges or if there is a difference in the vacuum level between them, the thrust transmitter 3 and the thrust generator 4 are brought close to each other and the thrust transmitter 3 and the thrust generator 4 are generated. Since electrostatic force is generated between the generators 4, the voltage generator 11 need not be connected. The voltage generated by the voltage generator 11 may be direct current or alternating current. The signal generated by the voltage generator 11 may be for the purpose of modulating the interatomic force or the electrostatic force 10. The interatomic force is a force generated by bringing the thrust transmitter 3 and the thrust generator 4 close to each other. Typical examples include van der Waals force, interatomic attractive force, interatomic repulsive force, intermolecular attractive force, and intermolecular repulsive force. However, when the thrust transmitter 3 and the thrust generator 4 are brought close to each other, an electrostatic force is also generated at the same time. By modulating only the electrostatic force by the voltage generator 11 and detecting the modulation signal, only the electrostatic force from the atomic force or the electrostatic force 10 can be used. Further, by detecting only a component that does not include the modulation signal by modulating only the electrostatic force by the voltage generator 11, it is possible to use only the atomic force or the atomic force from the electrostatic force 10.

In FIG. 2, a cantilever is used as the structure holder 1, but a leaf spring or a wire may be used. Further, in FIG. 2, the thrust generator 4 itself is integrated with the moving mechanism, but may be installed on the external moving mechanism 8. Here, when a thrust is generated in the thrust generator 4, the force sensor 7 detects the force generated in the thrust transmitter 3 via the interatomic force or the electrostatic force 10. Here, a representative example of the force sensor 7 includes a sensor using a piezoelectric element or a resistance change element, but is not limited thereto. According to such a configuration, a very small thrust can be detected.

Embodiment 3 FIG.
Further, as shown in FIG. 3, a method using external detection may be used as the thrust transmitter 3 and the force sensor 7. Deflection of the thrust transmitter 3 is detected using a light generator 12 (laser, LED (light emitting diode), etc.) and a split photodiode 13. If the spring constant of the cantilever which is the thrust transmitter 3 is known, the thrust can be calculated from the amount of deflection. Further, if the cantilever beam which is the thrust transmitter 3 is excited at the resonance frequency, the vibration of the thrust transmitter 3 is modulated by the atomic force or the electrostatic force 10. By detecting this modulation component, the thrust can be calculated. According to such a configuration, the amount of deflection can be detected with high sensitivity, so that the thrust can be detected with high sensitivity.

Embodiment 4 FIG.
The thrust generator 4 capable of modulating the thrust may be configured to modulate the thrust from the outside as shown in FIG. The thrust modulation signal 14 is output by the thrust modulator 17 and the thrust generated by the thrust generator 4 is modulated. Representative examples of the method for modulating the thrust of the thrust generator 4 include, but are not limited to, an electrical method, a mechanical method, a method utilizing a chemical reaction, and a method utilizing a biological reaction. Further, representative examples of the modulation method include an amplitude modulation method, a frequency modulation method, a phase modulation method, and a combination thereof, but are not limited thereto. A component synchronized with the modulation synchronization signal 15 in the force detection signal 16 is detected by the modulation synchronization detector 18. The modulation synchronization detector 18 is also called a demodulator, and representative examples include a lock-in amplifier, an envelope detector, and a PLL (Phase Locked Loop) detector, but are not limited thereto. Here, the component to be synchronized is not limited to the first harmonic, and can be implemented by synchronization with the harmonic component and the subharmonic component. According to such a configuration, detection sensitivity can be improved.

Embodiment 5 FIG.
Moreover, as shown in FIG. 5, it is good also as a structure using the acceleration sensor 19 as a force sensor. By calculating (for example, time integration) the value of the acceleration sensor, the force value can be calculated. According to such a configuration, a reference point (for example, a lateral wall, a hole, or a bolt) does not exist in the structure 2, and a thrust can be detected even when a general force sensor cannot be used. Become.

Embodiment 6 FIG.
Moreover, as shown in FIG. 6, it is good also as a structure using the force sensor 20 which detects the force which acts on the structure holding body 1. As shown in FIG. In this configuration, the force sensor 7 is not essential. According to such a configuration, it is possible to detect a force (attraction or repulsion) acting between the thrust transmitter 3 and the thrust generator 4. Further, it is possible to detect the three-dimensional operation of the thrust transmitter 3 by the force generated by the thrust generator 4, and it is possible to detect the generated thrust three-dimensionally.

Embodiment 7 FIG.
Moreover, as shown in FIG. 7, it is good also as a structure which detects the twist of the structure holding body 1 with the twist detector 21. FIG. Although FIG. 7 shows a self-detection type using a piezoelectric element, a resistance change element, or the like as the torsion detector, an external detection method using an optical lever or laser interference may be used. In this configuration, the force sensor 7 is not essential. According to such a configuration, it is possible to detect the three-dimensional operation of the thrust transmitter 3 by the force generated by the thrust generator 4, and it is possible to detect the generated thrust three-dimensionally.

Embodiment 8 FIG.
Moreover, as shown in FIG. 8, it is good also as a structure which attaches force generation and the force detector 22. As shown in FIG. The force generation and force detector 22 is a device that can apply a force to the thrust transmitter 3 and measure the applied force. According to such a configuration, the apparatus can be calibrated in the thrust measurement. That is, in the state where the thrust generator 4 is not present, force is applied to the thrust transmitter 3 using the force generator and the force detector 22. At this time, in the ideal state, the force generated and the force applied by the force detector 22 and the force detected by the force sensor 7 are the same. On the other hand, if there is an error factor (for example, an error caused by the reaction force by the structure holder 1 or the movement of the thrust transmitter during measurement), the force generated by the force generator 22 and the force sensor 7 There is a difference in the force detected by. By measuring this difference in advance, it becomes possible to calibrate the influence of the apparatus when measuring the thrust of the thrust generator 4.

Embodiment 9 FIG.
Moreover, as shown in FIG. 9, it is good also as a structure which uses the primary side 23 of a linear drive type motor as a thrust transmitter, and uses the secondary side 24 of a linear drive type motor as a thrust generator. The primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor may be opposite to each other. According to such a configuration, it is possible to measure the thrust and the fluctuation of thrust without the influence of the attractive force acting between the primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor.

Embodiment 10 FIG.
Further, as shown in FIG. 10, the primary side 23 of the linear drive motor is used as the thrust transmitter, and the secondary side 24 of the linear drive motor is used as the thrust generator, and the secondary side 24 of the linear drive motor is used. May be configured to be moved by the external drive device 25. The primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor may be opposite to each other. According to such a configuration, the primary side 23 of the linear drive motor and the linear drive motor that eliminates the influence of the attractive force acting between the primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor. It is possible to measure a non-excited state thrust fluctuation acting between the secondary sides 24 of the two.

Embodiment 11 FIG.
FIG. 11 shows an apparatus configuration using both the tenth embodiment and the eighth embodiment. The secondary side (magnet side) of the linear drive motor is installed on the magnet base, and driven along the moving mechanism 8 (linear guide) by the external drive device 25 (AC motor). A load cell is used as the force sensor 7 and a “load generation and force detector” 22 is used here as a calibration load cell and a load cell position fine adjustment mechanism. In addition, a leaf spring is used here as the structure holding body 1.

Here, the leaf spring is not broken by the sum of the gravity acting on the primary side of the linear drive motor and the force (attraction force) acting between the primary side of the linear drive motor and the secondary side of the linear drive motor, and The amount of elongation needs to be smaller than a certain value. This constant value is a distance sufficiently smaller than the gap distance between the primary side of the linear drive motor and the secondary side of the linear drive motor. For example, although it is about 0.1 times the gap distance, a smaller value can be implemented.

On the other hand, the lateral stiffness of the leaf spring (the spring constant of the leaf spring) determines the minimum measurement value. If the spring coefficient of the leaf spring is k [N / m] and the deflection of the load cell is d [m], the measured minimum value of the device is kd [N]. Assuming that d is sufficiently small and the primary side of the linear drive motor and the secondary side of the linear drive motor move in parallel, the relationship between the force F applied to the leaf spring and the amount of movement y is expressed by the following equation (1). The

Here, L is the length of the leaf spring, E is the Young's modulus of the leaf spring, I is the moment of inertia of the section of the leaf spring, and if the section of the leaf spring is a rectangle of width b and thickness t, the section is secondary. The moment I is expressed by the following equation (2).

Further, as shown in the eighth embodiment, when the force sensor 7 bends along with the force measurement, the gravity acting on the primary side of the linear drive motor, and the primary side of the linear drive motor and the linear drive motor The combined force (suction force) acting between the secondary sides is a measurement error.

In order to explain the principle of measurement error, FIG. 12 shows a model diagram when the ball is suspended. 12A shows a case where a force g is applied from the left and right, FIG. 12B shows a case where the ball has moved, and FIG. 12C shows a case where a downward force is applied to the ball.

First, consider a model in which a ball suspended from a string as shown in FIG. Here, the ball simulates a coil, and the string simulates a suspension leaf spring. Even if the ball moves as shown in FIG. 12B, the balance of the right and left forces does not change if the angle θ is sufficiently small and the weight of the ball can be ignored.

　ここで、θはボールの移動角となっている。従って、ボールを右側から押す力はｇ－ｆである。 Next, consider a case where a downward force F is applied to the ball as shown in FIG. At this time, the horizontal component f of the downward force F is expressed by the following equation (3).

Here, θ is the movement angle of the ball. Therefore, the force pushing the ball from the right side is g−f.

In this apparatus, the force g pressed from the left side in FIG. 12C corresponds to the cogging thrust to be measured, the force gf pressed from the right side corresponds to the value measured by the load cell, and F corresponds to the force acting between the coil and the magnet. Here, if F = 25 kN, the ball movement amount d = 0.1 mm, and the string length L = 2 m, f = 1.25N.

In order to reduce f in FIG. 12C, there are methods of decreasing F, increasing L, and decreasing d, but F is determined by the motor specifications because of the attractive force between the coil and the magnet. It cannot be reduced. d is the amount of movement generated for measurement by the load cell, and cannot be reduced because of the specification value of the load cell. If the length of L is further increased, the apparatus becomes larger and the manufacturing cost increases.

On the other hand, according to the method shown in Embodiment 8, g and g−f can be measured to obtain f by calculation, and the f value can be calibrated.
As a calibration method, a method of obtaining the relationship between g and f in advance is effective. This is a method of estimating f by measuring the value measured by the right load cell when the ball is pushed from the left side with a known force g.

Fig. 13 shows the calibration measurement method using a load cell. In order to measure the known force g, a load cell is also installed on the left side of the ball, and the ball is pushed to the right side through the load cell. In the apparatus shown in FIG. 11, load cells are prepared on the left and right sides of the primary side 23 of the linear drive motor, and the left load cell is made movable by the load cell position fine adjustment mechanism, whereby calibration data is acquired in advance and calibrated after measurement. It was to be.

FIG. 14 shows an example of a result obtained by applying a force to the calibration load cell by the load cell position fine adjustment mechanism in the force generation and force detector 22 in FIG. 11 and measuring the value of the force sensor 7 at that time. In this example, the calibration line can be approximated by the following equation (4), where w is the value of the calibration load cell and x is the value of the force sensor.

This is measured by the force sensor 7 when the force generation and force detector 22 is removed and the non-excited state thrust (cogging) acting between the primary side of the linear drive motor and the secondary side of the linear drive motor is measured. When the calculated value is 12.41 [N], it indicates that the actual non-excited state thrust is 10 [N]. Thus, it has been confirmed that the measurement accuracy is improved by using the technique shown in the eighth embodiment.

FIG. 15 shows the results of measurement using the apparatus of FIG. FIG. 15A is a graph showing data showing the relationship between the moving distance and the non-excited state thrust, and FIG. 15B shows an example of the data in numerical values. Although the attractive force acting between the primary side of the linear drive motor and the secondary side of the linear drive motor is about 20 k [N], the non-excited state thrust fluctuation (cogging) of the linear drive motor is 0.1 [a. u. It can be seen that the measurement can be performed with high accuracy of 1 [N] or less per moving distance.

On the other hand, in the method in which the thrust generator shown in the conventional method (1) is installed on a horizontally moving stage such as a linear guide and the thrust is detected using a force sensor, the friction coefficient of the linear guide is 0.001. Then, since 20 [N] is the minimum detection sensitivity, the technique of the present invention contributes to accuracy improvement.

Embodiment 12 FIG.
Further, as a method of measuring the non-excited state thrust fluctuation acting between the primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor, as shown in FIG. A configuration in which the driving of the secondary side 24 of the motor is modulated by the drive modulation device 26 may be adopted. The drive modulation device is an external drive device 25, and the thrust modulator in FIG. 4 is a device that modulates the thrust to be measured. A component synchronized with the modulation synchronization signal 15 in the force detection signal 16 is detected by the modulation synchronization detector 18. The modulation synchronization detector 18 is also called a demodulator, and representative examples include a lock-in amplifier, an envelope detector, and a PLL (Phase Locked Loop) detector, but are not limited thereto. Here, the component to be synchronized is not limited to the first harmonic of the modulation synchronization signal 15, and can be implemented by synchronization with the harmonic component of the modulation synchronization signal 15 and the subharmonic component of the modulation synchronization signal 15.

As the modulation frequency by the drive modulation device 26, a frequency other than the frequency component of the non-excited state thrust fluctuation acting between the primary side 23 of the linear drive motor to be measured and the secondary side 24 of the linear drive motor is selected. For example, it is assumed that the distance between the north and south poles of the magnet in the linear drive motor measured by this apparatus is 5 mm, and the secondary drive 24 of the linear drive motor is driven at a speed of 10 mm per second by the external drive device 25. . In this case, the non-excited state thrust fluctuation acting between the primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor has a frequency component having a fundamental wave of 1 Hz. Here, if a non-excited state thrust fluctuation having a frequency component 20 times the fundamental wave is to be measured, a modulation frequency greater than 20 Hz is selected.

In addition, since the unexcited state thrust fluctuation is mainly composed of an integral multiple of the fundamental wave, it may be selected other than the integral multiple of the fundamental wave. For example, if the non-excited state thrust fluctuation has a fundamental wave of 1 Hz, and if the non-excited state thrust fluctuation having a frequency component 20 times that of the fundamental wave is to be measured, [1] is the fundamental wave frequency and n is An integer greater than 20 and m as an arbitrary natural number, a frequency that is ([1] * n + [1] / m) Hz is selected.

According to such a configuration, the primary side 23 of the linear drive motor and the linear drive motor that eliminates the influence of the attractive force acting between the primary side 23 of the linear drive motor and the secondary side 24 of the linear drive motor. It is possible to detect the non-excited state thrust fluctuation acting between the secondary sides 24 of the two with high sensitivity.

In the above description, the structure holding body 1 has been described mainly by using only the wire. However, the structure holding body 1 is not limited to this, and the same effect can be obtained even when both the leaf spring and the wire are used. Can do. For example, FIG. 17 is a diagram showing an example of a part of the thrust measuring device when both the leaf spring and the wire are used as the structure holding body 1. In this figure, a leaf spring is used on the left side and a wire is used on the right side as viewed in the drawing, but the left and right structures may be reversed. With such a configuration, it is possible to further obtain an effect of suppressing the movement of the thrust transmitter 3 in the torsional direction with a leaf spring in a configuration that requires a space between the wires. It should be noted that the present invention can be freely combined with each other within the scope of the present invention, or each embodiment can be appropriately modified and omitted.

1 structure holding body, 2 structure (ceiling or wall), 3 thrust transmitter, 4 thrust generator, 5 magnet, 6 magnetic body, 7, 20 force sensor, 8 moving mechanism, 9 thrust generation direction, 10, between atoms Force or electrostatic force, 11 voltage generator, 12 light generator, 13 split photodiode, 14 thrust modulation signal, 15 modulation synchronization signal, 16 force detection signal, 17 thrust modulator, 18 modulation synchronization detector, 19 acceleration sensor, 21 twist detector, 22 force generation and force detector, 23 linear drive motor primary side, 24 linear drive motor secondary side, 25 external drive device, 26 drive modulation device.

Claims (12)

A thrust generator installed in the moving mechanism to generate thrust,
A thrust transmitter supported by the structure via a structure holding body that is either one or both of a leaf spring and a wire, and disposed at a predetermined distance from the thrust generator;
A force sensor attached to the thrust transmitter for detecting a thrust generated between the thrust generator and the thrust transmitter;
A thrust measuring device, wherein the thrust generated in the thrust transmitter is measured by the force sensor. The thrust generator includes a magnetic body or a magnet,
When the thrust generator is provided with a magnetic body, a magnet is disposed on the surface facing the magnetic body, and when the thrust generator is provided with a magnet, the magnet is disposed on the surface facing the magnet. The thrust measuring device according to claim 1, wherein a body is disposed and the force sensor detects a magnetic force generated between the magnetic body and the magnet. The thrust measuring device according to claim 1, wherein the thrust generated in the thrust transmitter is measured by detecting either one or both of an atomic force and an electrostatic force. A thrust modulator that modulates the thrust generated by the thrust generator, modulates the thrust by the thrust modulator, detects the modulated signal by the force sensor, and measures the thrust generated in the thrust transmitter The thrust measuring device according to any one of claims 1 to 3, wherein The thrust measuring apparatus according to any one of claims 1 to 4, wherein an acceleration sensor is installed in the thrust transmitter and the thrust is measured by detecting the acceleration. 6. A force detector for detecting a force applied to the structure holding body for disposing the thrust transmitter at a predetermined distance from the thrust generator. The thrust measuring device according to item. 7. A torsion detector for detecting torsion applied to the structure holding body for disposing the thrust transmitter at a predetermined distance from the thrust generator. The thrust measuring device according to item. The thrust measuring device according to any one of claims 1 to 7, wherein a device for the thrust measurement is calibrated by installing a force generator and a force detector in the thrust transmitter. Instead of the thrust transmitter, a secondary side of the linear drive motor is installed, a primary side of the linear drive motor is substituted for the thrust generator, or a secondary side of the linear drive motor is installed, and the linear drive motor When the primary side is installed, the thrust generated on the secondary side of the linear drive motor is measured, and when the secondary side of the linear drive motor is installed, the thrust generated on the primary side of the linear drive motor The thrust measuring apparatus according to any one of claims 1 to 8, wherein the thrust is measured. The thrust measuring apparatus according to claim 9, wherein a non-excited state thrust fluctuation is measured by moving a secondary side of the linear drive motor by an external drive device. A thrust generator installed in the moving mechanism to generate thrust,
A thrust transmitter supported by the structure via a structure holding body that is either one or both of a leaf spring and a wire, and disposed at a predetermined distance from the thrust generator;
A thrust sensor, which is attached to the thrust transmitter and detects a thrust generated between the thrust generator and the thrust transmitter, measures a thrust generated in the thrust generator using a thrust measuring device. A thrust measurement method,
A thrust measuring method, comprising: transmitting a thrust generated in the thrust generator to the thrust transmitter; detecting the thrust with the force sensor; and measuring the thrust generated in the thrust transmitter. A thrust modulator that modulates the thrust generated by the thrust generator, modulates the thrust by the thrust modulator, detects the modulated signal by the force sensor, and measures the thrust generated in the thrust transmitter The thrust measuring method according to claim 11.

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