[go: up one dir, main page]

WO2015005073A1 - Dispositif de spectroscopie raman - Google Patents

Dispositif de spectroscopie raman Download PDF

Info

Publication number
WO2015005073A1
WO2015005073A1 PCT/JP2014/066017 JP2014066017W WO2015005073A1 WO 2015005073 A1 WO2015005073 A1 WO 2015005073A1 JP 2014066017 W JP2014066017 W JP 2014066017W WO 2015005073 A1 WO2015005073 A1 WO 2015005073A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
sample
detection unit
raman spectroscopic
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/066017
Other languages
English (en)
Japanese (ja)
Inventor
森谷　直司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2015526231A priority Critical patent/JP6176327B2/ja
Publication of WO2015005073A1 publication Critical patent/WO2015005073A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering

Definitions

  • the present invention relates to a component analyzer using Raman scattered light.
  • the present invention relates to a Raman spectroscopic analyzer that detects light scattered backward from a sample.
  • An apparatus for analyzing components contained in a sample by performing Raman spectroscopic measurement includes a light source that emits light (excitation light) that irradiates the sample, an incident optical system that collects the excitation light and irradiates the sample, and the sample A spectroscopic optical system that condenses and separates light scattered by Raman scattering by interaction with a substance contained therein, and a detector that detects light separated in wavelength in the spectroscopic optical system.
  • Raman scattering spectra are obtained on both sides of the wavelength of the excitation light.
  • the longer wavelength side than the excitation light wavelength is called a Stokes line, and the shorter wavelength side is called an anti-Stokes line.
  • the energy corresponding to the difference between the wavelength of the excitation light and the wavelength of the Stokes line or anti-Stokes line reflects the energy of the natural vibration of the molecule. Therefore, the substance contained in the sample can be specified by obtaining the energy. Further, the substance corresponding to the Stokes line or anti-Stokes line can be quantified from the intensity of each Stokes line or anti-Stokes line appearing in the Raman scattering spectrum.
  • Patent Documents 1 and 2 describe gas component analyzers that measure components contained in a gas generated in a coal gasifier and the concentration of each component by performing Raman spectroscopic measurement.
  • excitation light emitted from a laser light source 101 is collected by a lens 102, passes through a beam splitter 103 and a sample chamber window 104, and is supplied to a predetermined gas in the sample gas introduced into the sample chamber 105. Irradiate the spot.
  • Light that has been Raman-scattered from the irradiated gas toward the irradiation side (backward) of the excitation light (hereinafter referred to as “backward Raman scattered light”) is extracted from the sample chamber window 104, reflected by the beam splitter 103, and collected by the lens 106.
  • the light is introduced into a detection unit 107 having a spectroscopic optical system.
  • a Raman scattering spectrum of the sample gas is created from the detection result of the Raman scattered light in the detection unit 107, the component contained in the sample gas is specified, and the concentration of each component is determined.
  • a material having a high light transmittance at the wavelength of the excitation light is used for the beam splitter 103 and the sample chamber window 104, but the light transmittance is not 100%, but reflection of about 1% occurs. Therefore, a part of the excitation light that has passed through the beam splitter 103 is reflected without passing through the sample chamber window 104, and a part of the excitation light is further reflected at the beam splitter 103 and travels toward the lens 106. Since the reflectance of the beam splitter 103 is also about 1%, light about 10 ⁇ 4 times the excitation light emitted from the light source is incident on the lens 106.
  • the lens used in the lens 106 and the detection unit 107 a material in which a plurality of glass types are combined is used in order to obtain good imaging performance in a wide wavelength band. Since these lens materials are often added with a large amount of metal ions, when the excitation light passes through these lenses, fluorescence having a wavelength different from the wavelength of the excitation light is generated.
  • the antireflection film provided on the lens surface also emits fluorescence depending on the constituent materials. This fluorescence is detected by the detection unit 107 together with the Raman scattered light. As described above, although the intensity of the excitation light incident on the lens 106 and the subsequent lenses is low, the intensity of the fluorescence excited in them is still not negligible with respect to the intensity of the Raman scattered light to be measured.
  • the beam splitter 103 also emits fluorescence depending on the coating constituent material. Constraining the coating design to use only materials that do not generate fluorescence can degrade the spectral performance of the coating. Since the intensity of the excitation light incident on the beam splitter is large, the intensity of the generated fluorescence is also strong and cannot be ignored with respect to the intensity of the Raman scattered light to be measured.
  • the sample is a gas (gas)
  • its scattering cross section is as small as 10 ⁇ 31 cm 2 .
  • the intensity of the Raman scattered light detected is low, and it is used in the lens 106 and the detection unit 107 by the light reflected by the sample chamber window 104 and the beam splitter 103.
  • the intensity of the fluorescence generated in the lens to be used is approximately the same. Therefore, the fluorescence becomes a noise factor in the Raman scattered light analysis, and there is a problem that the accuracy in determining the components contained in the sample gas and the concentration of each component is lowered.
  • the sample is a gas (gas)
  • the same problem occurs when the sample is a liquid or a solid.
  • the problem to be solved by the present invention is to reduce noise due to fluorescence in a Raman spectroscopic analyzer that detects backward Raman scattered light from a sample.
  • the Raman spectroscopic analyzer which has been made to solve the above problems, a) a reflecting member that reflects the light beam emitted from the light source toward the sample surface in a direction perpendicular to the sample surface; b) an irradiation condensing unit for condensing the luminous flux on the sample; c) a detection unit that detects scattered light emitted from the sample and backscattered around the reflection member.
  • the detection unit is disposed on the opposite side of the sample surface with the reflection member interposed therebetween.
  • sample When the sample is a gas or a liquid, the sample is generally introduced into a sample chamber having a light transmission window, and the sample is irradiated with a light beam through the light transmission window.
  • sample when the sample is solid, there are a case where the sample chamber is used and a case where the sample chamber is not used and the exposed sample is irradiated with a light beam. Therefore, the above-mentioned “sample surface” becomes a light transmission window of the sample chamber when the sample is introduced into the sample chamber, and incident light flux on the surface of the sample when the sample is exposed. Becomes the surface to be irradiated.
  • the reflecting member includes, for example, a reflecting mirror
  • the irradiation condensing unit includes, for example, a condensing lens disposed on the optical path from the light source to the reflecting unit.
  • the light beam emitted from the light source is incident on the sample surface from a direction perpendicular to the sample surface by the reflecting member, and is condensed on a predetermined site in the sample by the irradiation condensing unit.
  • Scattered light is generated from the portion of the sample irradiated with the light beam from the light source.
  • the detection unit outputs a signal corresponding to the detected light and sends it to an appropriate analysis device.
  • the analysis device creates a Raman scattering spectrum based on this detection signal, and analyzes it to identify and quantify the substance contained in the sample.
  • the Raman spectroscopic analyzer since the light beam is incident on the sample surface perpendicularly, the light beam reflected by the sample surface (reflected light beam) travels in the reverse direction of the optical path of the incident light beam and is detected by the reflecting member. Is reflected in a different direction (light source side). Therefore, the reflected light beam is incident on the detection unit and fluorescence is not generated by a lens or the like provided in the detection unit, and noise can be reduced as compared with the conventional Raman spectroscopic device.
  • the Raman spectroscopic analyzer further includes: It is desirable to provide a detection condensing unit that is disposed between the sample surface and the detection unit and guides the scattered light to the detection unit.
  • the detection condensing unit is an optical system that includes one or a plurality of lenses and reduces the divergence angle of scattered light that is emitted from the sample and diverges.
  • the detection condensing unit is disposed between the sample surface and the reflecting member, one having an opening on the optical path of a light beam incident on the sample surface is used. This prevents the detection condensing part from being irradiated with incident light flux or reflected light flux to generate fluorescence.
  • By disposing the detection condensing unit more scattered light emitted from the sample and diverging at a wide angle can be incident on the detector.
  • the light beam reflected by the sample surface (reflected light beam) is separated from the back scattered light from the sample so that only the back scattered light is incident on the detection unit. Noise can be reduced as compared with the spectroscopic device.
  • the schematic block diagram of the gas component analyzer of a prior art. 1 is a schematic configuration diagram of an optical system of a Raman spectroscopic analyzer that is one embodiment of the present invention.
  • the perspective view of the surface mirror type combine optical system used with the Raman spectroscopic analyzer of an Example.
  • the perspective view of the back mirror type combine optical system used with the Raman spectroscopic analyzer of an Example.
  • the perspective view of another example of the back mirror type combine optical system used with the Raman spectroscopic analyzer of an Example.
  • a laser light source 201 that generates visible light is used as a light source.
  • a solid-state laser such as a YAG laser or a YVO 4 laser, or a gas laser such as an Ar laser is used.
  • the light beam emitted from the laser light source 201 is condensed on a predetermined portion in the sample 205 by the irradiation condensing optical system 202 through the excitation optical fiber 208.
  • the light beam that has passed through the irradiation and condensing optical system 202 is reflected by the reflection unit 203 and enters the sample surface from a direction perpendicular to the sample surface.
  • the sample surface is a light transmission window 204 of the sample chamber when the sample 205 is introduced into the sample chamber, and is incident on the surface of the sample 205 when the sample is exposed. It is the surface that is irradiated with the luminous flux.
  • a quartz material is used for the light transmission window 204.
  • the sample surface When the sample surface is irradiated with a light beam (excitation light) from the laser light source 201, scattered light such as Rayleigh scattered light or Raman scattered light is generated from the sample 205. Further, a part of the incident light beam is reflected on the sample surface. Of the scattered light scattered (backscattered) in the direction opposite to the incident direction of the excitation light, that is, the direction in which the reflecting portion 203 is disposed, the light scattered around the reflecting portion 203 is supported to support the reflecting portion 203. The light passes through the body 210, is collected by the detection condensing optical system 206, and is received by the detection unit 207 through the spectral optical fiber 209.
  • the reflection unit 203 functions as a shielding unit that excludes a part of the detection range for the detection unit 207, and blocks the reflected light flux that reaches the reflection unit 203.
  • the reflecting portion 203 and the support 210 are constituted by a surface mirror type combine optical system 300 shown in FIG.
  • the surface mirror type combine optical system 300 is a combination of both optical systems in which the optical axes of the excitation light and the Raman scattered light coincide with each other.
  • the reflecting portion 203 having the reflecting surface 301 in FIG. 3 and the support 210 correspond to the reflecting member of the present invention.
  • a mirror such as a total reflection mirror is used as the reflection unit 203.
  • the support 210 in FIG. 3 is composed of a transparent parallel plate 303.
  • the support 210 is installed substantially perpendicular to the Raman scattered light receiving optical axis.
  • the reflection portion 203 has a cylindrical or quadrangular prism shape, and is joined to the support 210 so that the reflection surface 301 is installed at 45 degrees with respect to the Raman scattered light receiving optical axis with respect to the support 210. ing.
  • d the diameter of the mirror of the reflecting portion 203 and D is the diameter of the transparent parallel plate 303.
  • the reflection unit 203 can sufficiently receive the Raman scattered excitation light, and the signal loss of the Raman scattered light shielded by the reflection unit 203 is negligible.
  • the Raman scattered light that has passed through the support 210 is condensed by the detection condensing optical system 206 that guides the scattered light to the detection unit 207, and is received by the detection unit 207 via the spectral optical fiber 209.
  • the detection condensing optical system 206 includes a collimating unit 206A and a condensing unit 206B. These are optical systems that are composed of one or a plurality of lenses and reduce the divergence angle of scattered light emitted from the sample and diverge. For example, an achromatic lens is used. Further, as the detection unit 207, for example, a photoelectric conversion device such as a CCD detector is used.
  • the Raman spectroscopic analysis apparatus 200 since the light beam is incident on the sample surface perpendicularly, the light beam reflected by the sample surface (reflected light beam) travels in the opposite direction of the optical path of the incident light beam, and is reflected by the reflection unit 203. Reflected to the laser light source 201 side. Accordingly, the reflected light beam is incident on the detection unit 207 and fluorescence is not generated by a lens or the like provided in the detection unit 207, and noise can be reduced as compared with the conventional Raman spectroscopic device.
  • a Raman scattering spectrum is created and displayed as appropriate by the analysis device.
  • the substance contained in the sample 205 is specified and quantified.
  • the collimating portion 206A of the detection condensing optical system 206 is disposed between the reflecting portion 203 and the detecting portion 207 .
  • a gap between the sample surface and the reflecting portion 203 is described.
  • a collimating portion 206C of the detection condensing optical system 206 may be disposed.
  • the detection light collecting optical system 206 it is possible to prevent the detection light collecting optical system 206 from being irradiated with an incident light beam or a reflected light beam and generating fluorescence. Further, by arranging the detection condensing optical system 206 including the collimating portion 206C between the sample surface and the reflecting portion 203, more scattered light emitted from the sample and diverging at a wide angle can be incident on the detector. it can.
  • a surface mirror type combine optical system 400 shown in FIG. 4 is used instead of the surface mirror type combine optical system 300 shown in FIG.
  • the surface mirror type combine optical system 400 in FIG. 4 includes a mirror 402 having a reflecting surface 401 and a support 410 as in FIG.
  • the support 410 shown in FIG. 4 is made of a single plate, and includes three spokes (support bars) and a frame (outer frame) 404 having an annular structure.
  • the structure is not limited to the illustrated structure as long as the support body 410 is sufficiently strong in structure and has an opening area surrounded by a spoke and an annular structure having necessary transmission characteristics. Therefore, the spokes may be joined to the annular structure by means such as welding or adhesion, and the number of spokes may be two or four or more.
  • the back mirror type combine optical system 500 shown in FIG. 5 includes a rod 501 having a reflecting surface 502 and a transparent support plate 503 fixed to the back surface side (the side opposite to the sample surface). Excitation light enters the rod 501 from the direction of the arrow shown in the figure, and is emitted to the sample surface side by the reflecting surface 502 provided at a lower end of the rod 501 with an inclination of 45 degrees.
  • a fluorescent shielding film 504 functioning as a light reflecting film or a light absorbing film is provided on the surface (back surface) of the rod 501 in contact with the transparent support plate 503. Preferably it is formed.
  • the back mirror type combine optical system 600 in FIG. 6 is configured by only the rod 601 except for the transparent support plate 503 from the back mirror type combine optical system 500 in FIG.
  • the other configuration is the same as that of the back mirror type combine optical system of FIG. 5. Is formed on the fluorescent light shielding film 604 so as not to face the detection unit 207 side.
  • a fourth modification of the optical system of the Raman spectroscopic gas analyzer of the embodiment of the present invention will be described with reference to FIG. 2 and FIG.
  • a back mirror type combine optical system 700 shown in FIG. 7 is used in place of the front side mirror type combine optical system shown in FIG. 3 of the Raman spectroscopic analyzer of the above-described embodiment.
  • a back mirror type combine optical system 700 shown in FIG. 7 includes a transparent plate 701 having a first reflecting surface 702 and a second reflecting surface 704.
  • the first reflecting surface 702 is provided at one end of the transparent plate 701, and a window 703 is opened only in a portion where excitation light incident from the direction of the arrow shown in the drawing is incident.
  • the first reflecting surface 702 is provided to prevent unnecessary light from entering the transparent plate 701, but particularly when other measures are taken for that purpose. There is no need.
  • the second reflecting surface 704 is provided inside the transparent plate 701 with an inclination of 45 degrees, and the excitation light passing through the transparent plate 701 is bent at a right angle and emitted toward the sample surface.
  • a fluorescent shielding film that functions as a light reflection film or a light absorption film on the back surface of the transparent plate 701 (surface on the detection unit 207 side) corresponding to the window 703 705 is preferably formed.
  • DESCRIPTION OF SYMBOLS 100 Gas component analyzer 101 ... Laser light source 102 ... Lens 103 ... Beam splitter 104 ... Sample chamber window 105 ... Sample chamber 106 ... Lens 107 ... Detection part 108 ... Data analyzer 200 ... Raman spectroscopic analyzer 201 ... Laser light source 202 ... Irradiation condensing optical system 203... Reflecting section 204. Light transmitting window 205... Sample 206... Detection condensing optical system 206 A, 206 C. , 410, 610... Support 300, 400... Front mirror type combined optical system 301, 401, 502, 602... Reflecting surface 303. 501, 601 ... Rod 503 ... Transparent support plates 504, 604, 05 ... fluorescent shielding film 701 ... transparent plate 702 ... first reflecting surface 703 ... window 704 ... second reflecting surface

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

La présente invention concerne un dispositif de spectroscopie Raman avec lequel il est possible d'éviter qu'une lumière de fluorescence, provenant d'un élément émettant une lumière, tel qu'une lentille, et dérivant d'une lumière réfléchie provenant de la surface d'un échantillon, s'ajoute en tant que bruit à la lumière de diffusion Raman. Le dispositif de spectroscopie Raman selon l'invention comprend : une unité réfléchissante (203) qui réfléchit un faisceau de lumière d'excitation émis à partir d'une source de lumière (201) vers la surface d'un échantillon dans une direction perpendiculaire à la surface de l'échantillon ; un système optique de focalisation d'éclairage (202) qui focalise le faisceau de lumière sur l'échantillon ; une unité de détection (207) qui détecte la lumière de diffusion rétrodiffusée au voisinage de l'unité réfléchissante (203) et émise par l'échantillon. L'unité réfléchissante (203) fait écran à la partie du faisceau de lumière d'excitation réfléchie par la surface de l'échantillon et empêche donc la lumière d'excitation de se diriger vers l'unité de détection (207) et d'y entrer.
PCT/JP2014/066017 2013-07-11 2014-06-17 Dispositif de spectroscopie raman Ceased WO2015005073A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015526231A JP6176327B2 (ja) 2013-07-11 2014-06-17 ラマン分光分析装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-145358 2013-07-11
JP2013145358 2013-07-11

Publications (1)

Publication Number Publication Date
WO2015005073A1 true WO2015005073A1 (fr) 2015-01-15

Family

ID=52279759

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/066017 Ceased WO2015005073A1 (fr) 2013-07-11 2014-06-17 Dispositif de spectroscopie raman

Country Status (2)

Country Link
JP (1) JP6176327B2 (fr)
WO (1) WO2015005073A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU194268U1 (ru) * 2019-08-07 2019-12-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Детектор для обнаружения и контроля лекарственных, наркотических и токсических средств
KR20240058609A (ko) * 2022-10-26 2024-05-03 한국표준과학연구원 수소가스누출감지를 위해 가시도를 높인 가시화 장치

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10501071A (ja) * 1995-03-23 1998-01-27 ベックマン インスツルメンツ インコーポレーテッド 毛管内容物のラマン散乱を使用する自動化される光学アラインメント装置及び方法
JP2002525651A (ja) * 1998-09-15 2002-08-13 ライカ ミクロジュステムス ハイデルベルク ゲーエムベーハー 共焦点蛍光顕微鏡のビーム路における光学装置
JP2002543370A (ja) * 1999-02-26 2002-12-17 ジーエスアイ・ルモニクス，インコーポレイテッド 光学スキャナ用の画像形成システム
JP2007232374A (ja) * 2006-02-27 2007-09-13 Shikoku Res Inst Inc ラマン散乱光による水素ガス可視化方法及びシステム
JP2010156557A (ja) * 2008-12-26 2010-07-15 Horiba Ltd 入射光学系及びラマン散乱光測定装置
JP2011232107A (ja) * 2010-04-26 2011-11-17 Jasco Corp 分光測定方法、分光測定装置および筒状部材
WO2014077158A1 (fr) * 2012-11-15 2014-05-22 シャープ株式会社 Dispositif de détection de fluorescence

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4343076C2 (de) * 1993-12-16 1997-04-03 Phototherm Dr Petry Gmbh Vorrichtung zum photothermischen Prüfen einer Oberfläche eines insbesondere bewegten Gegenstandes
JP2007271529A (ja) * 2006-03-31 2007-10-18 Soma Kougaku:Kk 顕微蛍光観測装置
JP5425131B2 (ja) * 2011-03-29 2014-02-26 三菱電機株式会社 ラマン分光装置およびそれを用いた識別装置
JP5542789B2 (ja) * 2011-12-19 2014-07-09 三菱電機株式会社 リサイクルプラスチックの識別装置、分別装置、識別方法および製造方法
JP2013246030A (ja) * 2012-05-25 2013-12-09 Asahi Kasei Electronics Co Ltd 位置検出装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10501071A (ja) * 1995-03-23 1998-01-27 ベックマン インスツルメンツ インコーポレーテッド 毛管内容物のラマン散乱を使用する自動化される光学アラインメント装置及び方法
JP2002525651A (ja) * 1998-09-15 2002-08-13 ライカ ミクロジュステムス ハイデルベルク ゲーエムベーハー 共焦点蛍光顕微鏡のビーム路における光学装置
JP2002543370A (ja) * 1999-02-26 2002-12-17 ジーエスアイ・ルモニクス，インコーポレイテッド 光学スキャナ用の画像形成システム
JP2007232374A (ja) * 2006-02-27 2007-09-13 Shikoku Res Inst Inc ラマン散乱光による水素ガス可視化方法及びシステム
JP2010156557A (ja) * 2008-12-26 2010-07-15 Horiba Ltd 入射光学系及びラマン散乱光測定装置
JP2011232107A (ja) * 2010-04-26 2011-11-17 Jasco Corp 分光測定方法、分光測定装置および筒状部材
WO2014077158A1 (fr) * 2012-11-15 2014-05-22 シャープ株式会社 Dispositif de détection de fluorescence

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU194268U1 (ru) * 2019-08-07 2019-12-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Детектор для обнаружения и контроля лекарственных, наркотических и токсических средств
KR20240058609A (ko) * 2022-10-26 2024-05-03 한국표준과학연구원 수소가스누출감지를 위해 가시도를 높인 가시화 장치
KR102789601B1 (ko) 2022-10-26 2025-04-01 한국표준과학연구원 수소가스누출감지를 위해 가시도를 높인 가시화 장치

Also Published As

Publication number Publication date
JPWO2015005073A1 (ja) 2017-03-02
JP6176327B2 (ja) 2017-08-09

Similar Documents

Publication Publication Date Title
CN112414992A (zh) 拉曼光谱激发增强模块
US10458917B2 (en) Method of measuring Raman scattering and related spectrometers and laser sources
JP5975175B2 (ja) ラマン分光分析装置
JP5272965B2 (ja) 蛍光検出器
CN105651759A (zh) 一种表面增强拉曼光谱测试系统
JP2011013167A (ja) 分光蛍光光度計及び試料セル
JP2012037344A (ja) 光学式ガスセンサおよびガス濃度測定方法
KR20170052256A (ko) 라만 산란을 이용한 물질의 농도 측정 장치 및 방법
JP6176327B2 (ja) ラマン分光分析装置
CN114755187B (zh) 高分辨率拉曼光谱仪
US8525988B2 (en) Miniaturized confocal spectrometer
CN108037111A (zh) 手持式libs光学系统
JP7158004B2 (ja) ガス濃度測定装置およびガス濃度連続測定方法
JP7486178B2 (ja) 分光分析装置
CN212059104U (zh) 一种宽光谱高灵敏度拉曼光谱仪
JP2012526972A5 (fr)
JP6129014B2 (ja) 蛍光検出装置および蛍光検出方法
CN111442842A (zh) 一种高分辨率高灵敏度拉曼光谱仪
JP4141985B2 (ja) 分光蛍光光度計及び試料セル
JP2009294392A (ja) レーザー走査型顕微鏡
CN212059105U (zh) 一种高分辨率高灵敏度拉曼光谱仪
JP4013868B2 (ja) 蛍光検出装置
JP2008542771A (ja) シフト・スペクトル分布を測定する分光装置
JP2016114532A (ja) 光熱変換分光分析装置
JP2015175708A (ja) ラマン分光分析装置及びラマン分光分析方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14822652

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2015526231

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14822652

Country of ref document: EP

Kind code of ref document: A1