WO2015075972A1 - 表示装置 - Google Patents
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- WO2015075972A1 WO2015075972A1 PCT/JP2014/070029 JP2014070029W WO2015075972A1 WO 2015075972 A1 WO2015075972 A1 WO 2015075972A1 JP 2014070029 W JP2014070029 W JP 2014070029W WO 2015075972 A1 WO2015075972 A1 WO 2015075972A1
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- Prior art keywords
- wiring
- insulating film
- opening
- film
- intersecting
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
- H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
Definitions
- the present invention relates to a display device.
- a liquid crystal panel which is a main component constituting a liquid crystal display device has the following configuration. That is, the liquid crystal panel seals the liquid crystal by sandwiching the liquid crystal between the pair of glass substrates and forming a seal portion around the liquid crystal. Both substrates are composed of an array substrate on which TFTs as switching elements, pixel electrodes, and wirings are formed, and a CF substrate on which color filters and the like are formed. As an example of this type of liquid crystal panel, one described in Patent Document 1 below is known.
- a circuit portion such as a gate driver circuit is monolithically formed in a non-display portion arranged around a display portion for displaying an image. Since this circuit part is arranged near the seal part as compared with the TFT arranged in the display part, when moisture existing outside permeates the seal part, it is easily affected by the moisture. ing. Specifically, for example, an electric field is generated at the crossing portion of the wiring portion that intersects with each other via an insulating film in the circuit portion.
- ion migration electrochemical migration
- the arrangement area of the non-display part and the circuit part is also narrow, so that the distribution density of the wiring part is high, resulting in ion migration at the intersection of the wiring part. It tends to occur more easily.
- the present invention has been completed based on the above circumstances, and an object thereof is to improve operational reliability.
- the display device of the present invention is capable of displaying an image and has a display unit arranged on the center side, a substrate having a non-display unit arranged on the outer peripheral side so as to surround the display unit, and the non-display unit A circuit portion to be arranged, a first wiring portion constituting the circuit portion, and a second wiring portion constituting the circuit portion and arranged on the upper layer side so as to intersect the first wiring portion And an insulating film disposed in a form interposed between the first wiring part and the second wiring part, and disposed on an upper layer side of the second wiring part, and at least the first wiring part and the An organic insulating film made of an organic resin material and having an opening that opens in a range overlapping with a portion intersecting with the second wiring portion.
- the first wiring part and the second wiring part arranged on the upper layer side thereof are arranged so as to intersect with each other via an insulating film. It is assumed that an electric field can be generated with energization.
- the circuit portion arranged in the non-display portion has moisture existing outside compared to the display portion. It is easy to be affected.
- an organic insulating film is disposed on the upper layer side of the second wiring portion, and the organic resin material forming the organic insulating film generally has a property of easily absorbing moisture.
- ion migration electrochemical migration
- the metal ions are pulled and moved by the electric field.
- ion migration electrochemical migration
- the display frame is narrowed and the arrangement area of the non-display portion and the circuit portion is narrowed or when high definition is advanced, the distribution density of each wiring portion is increased. There is a greater concern about the occurrence of ion migration at the intersections of the wiring portions.
- the organic insulating film since the organic insulating film has an opening that opens in a range that overlaps with the intersection of the first wiring portion and the second wiring portion, the moisture contained in the organic insulating film is in both wirings. It becomes difficult to influence the intersection part of the part. This makes it difficult for ion migration to occur at the intersections of both wiring parts, and makes it difficult for a short circuit to occur between the intersections. As a result, malfunctions are unlikely to occur in the circuit portion, so that the operation reliability can be improved. This is particularly suitable when the display device is narrowed and the definition is increased.
- the following configuration is preferable.
- the said organic insulating film is provided so that the said opening part may open over a wide range rather than the range which overlaps with the said cross
- the intersection of the wiring portions from the opening edge of the opening in the organic insulating film. Therefore, the moisture contained in the organic insulating film is less likely to be affected by the intersecting portion of both wiring portions.
- the deviation can be absorbed, so that the situation where the organic insulating film overlaps with the intersecting portion occurs. It becomes difficult and the certainty that the opening is arranged in a range where the opening overlaps with the intersecting portion of both wiring portions is high. As a result, ion migration is less likely to occur at the intersections of the two wiring portions, so that the operation reliability of the circuit portion can be further increased.
- At least one of the first wiring part and the second wiring part is arranged so that a plurality of the intersecting parts are arranged at intervals, and the organic insulating film has the opening part.
- the opening is provided over a range extending over at least a plurality of the intersecting portions.
- the operation reliability of the circuit part can be further improved.
- the organic insulating film is As the opening, at least the first opening that opens over a range that spans the two intersections with relatively small intervals, and the first opening of the two intersections with at least the relatively large intervals Is provided so as to have at least a non-overlapping crossing portion and a second opening that opens in the overlapping range.
- the opening edge of the first opening portion in the organic insulating film is arranged so as to collectively surround the two intersecting portions having a relatively small interval, and thus is between the two intersecting portions.
- the organic insulating film does not exist at the position.
- the moisture is less likely to be affected by two intersecting portions having a relatively small interval.
- a shift occurs in the formation position of the first opening in the organic insulating film, and, for example, a part of the opening edge of the first opening overlaps two intersecting portions having a relatively small interval. Even when the arrangement is such that the amount of overlap is small. As described above, since ion migration is less likely to occur at two intersecting portions having a relatively small interval, the operation reliability of the circuit unit can be further increased.
- the organic insulating film is provided with a second opening so as to open in a range overlapping with a crossing portion that does not overlap with the first opening portion of two crossing portions having a relatively large interval. Therefore, the organic insulating film is disposed at a position between two intersecting portions having a relatively large interval. Thereby, since it is avoided that an organic insulating film is removed excessively, the planarization function by an organic insulating film and the function which protects each wiring part are hardly damaged.
- a counter substrate facing the substrate a liquid crystal sandwiched between the substrate and the counter substrate, and interposed between the substrate and the counter substrate and surrounding the liquid crystal. And a sealing portion that seals the liquid crystal, and the circuit portion is disposed closer to the sealing portion than the display portion.
- the liquid crystal sandwiched between the substrate and the counter substrate is sealed by the seal portion that is interposed between the substrate and the counter substrate and is disposed so as to surround the liquid crystal. Since the circuit part is arranged closer to the seal part than the display part, when external moisture permeates the seal part, it is easily affected by the moisture.
- the intersection of the second wiring part with the first wiring part is covered with the first interlayer insulating film, so that the waterproofness (moisture permeability resistance) at the intersection is higher. .
- the waterproofness moisture permeability resistance
- ion migration is less likely to occur at the intersections of the two wiring portions, so that the operation reliability of the circuit portion can be further increased.
- a transparent electrode film is provided on the upper layer side of the organic insulating film and at least in a range overlapping with the opening. In this way, the crossing portion of the second wiring portion with the first wiring portion is covered with the transparent electrode film in addition to the first interlayer insulating film, so that the waterproofness at the crossing portion is even higher. It becomes. As a result, ion migration is more unlikely to occur at the intersections of the two wiring portions, so that the operation reliability of the circuit portion can be further increased.
- the transparent electrode film includes a first transparent electrode film relatively disposed on a lower layer side and a second transparent electrode film relatively disposed on an upper layer side, and the first A second interlayer insulating film is provided between the transparent electrode film and the second transparent electrode film and disposed at least in a range overlapping with the opening.
- the intersection of the second wiring portion with the first wiring portion is covered with the first transparent electrode film, the second interlayer insulating film, and the second transparent electrode film in addition to the first interlayer insulating film. Therefore, the waterproofness at the intersection is further increased. As a result, ion migration is more unlikely to occur at the intersections of the two wiring portions, so that the operation reliability of the circuit portion can be further increased.
- a protective film is provided between the second wiring part and the insulating film and disposed at least in a range overlapping with the opening.
- the first wiring part and the second wiring part contain at least copper.
- the organic insulating film has an opening that opens in a range overlapping with the intersection of the first wiring portion and the second wiring portion, and moisture contained in the organic insulating film It is difficult to affect the crossing part of both wiring parts, and ion migration is difficult to occur at the crossing part of both wiring parts, so that the operation reliability of the circuit part is kept high while improving the conductivity of both wiring parts. I'm leaning.
- the display portion includes a thin film transistor using an oxide semiconductor as a semiconductor film, and the semiconductor film is interposed between the second wiring portion and the insulating film in the circuit portion. It is provided in the form.
- An oxide semiconductor that forms a semiconductor film has higher electron mobility than, for example, an amorphous semiconductor. Therefore, when a circuit element that forms a circuit portion using the semiconductor film is provided, circuit elements having various functions should be provided. Can do. Thereby, it is suitable for increasing the number of functions of the circuit unit.
- the oxide semiconductor contains indium (In), gallium (Ga), zinc (Zn), and oxygen (O). In this way, it is more suitable for increasing the functionality of the circuit section.
- FIG. 1 is a schematic plan view showing a connection configuration of a liquid crystal panel, a flexible substrate, and a control circuit board on which a driver according to Embodiment 1 of the present invention is mounted.
- Schematic cross-sectional view showing a cross-sectional configuration along the long side direction of the liquid crystal display device Schematic cross-sectional view showing the cross-sectional configuration of the entire liquid crystal panel
- the top view which shows planar arrangement
- positioning with the 1st wiring part and 2nd wiring part with which the row control circuit part which concerns on the modification 1 of Embodiment 1 is equipped, and the opening part of an organic insulating film The top view which shows planar arrangement
- positioning with the 1st wiring part and 2nd wiring part with which the row control circuit part which concerns on the modification 4 of Embodiment 1 is equipped, and the opening part of an organic insulating film The top view which shows planar arrangement
- FIG. 1 Figure The top view which shows planar arrangement
- FIGS. 1 A first embodiment of the present invention will be described with reference to FIGS.
- the liquid crystal display device 10 is illustrated.
- a part of each drawing shows an X axis, a Y axis, and a Z axis, and each axis direction is drawn to be a direction shown in each drawing.
- FIGS. 2 to 4 are used as a reference, and the upper side of the figure is the front side and the lower side of the figure is the back side.
- the liquid crystal display device 10 is capable of displaying an image, and a display unit AA arranged on the center side and a non-display unit NAA arranged on the outer peripheral side so as to surround the display unit AA.
- a liquid crystal panel (display device, display panel) 11 having a driver, a driver (panel drive unit) 21 for driving the liquid crystal panel 11, and a control circuit board (external signal supply) for supplying various input signals to the driver 21 from the outside.
- Source 12
- a flexible substrate (external connection component) 13 that electrically connects the liquid crystal panel 11 and the external control circuit board 12
- a backlight device (illumination device) that is an external light source that supplies light to the liquid crystal panel 11. ) 14.
- the liquid crystal display device 10 also includes a pair of front and back exterior members 15 and 16 for housing and holding the liquid crystal panel 11 and the backlight device 14 assembled to each other.
- an opening 15a for allowing an image displayed on the display unit AA of the liquid crystal panel 11 to be visually recognized from the outside is formed.
- the liquid crystal display device 10 according to the present embodiment includes a mobile phone (including a smartphone), a notebook computer (including a tablet notebook computer), a portable information terminal (including an electronic book, a PDA, etc.), a digital photo frame, It is used for various electronic devices (not shown) such as portable game machines and electronic ink paper. For this reason, the screen size of the liquid crystal panel 11 constituting the liquid crystal display device 10 is set to about several inches to several tens of inches, and is generally classified into a small size and a small size.
- the backlight device 14 includes a chassis 14a having a substantially box shape that opens toward the front side (the liquid crystal panel 11 side), and a light source (not shown) disposed in the chassis 14a (for example, a cold cathode tube, LED, organic EL, etc.) and an optical member (not shown) arranged to cover the opening of the chassis 14a.
- the optical member has a function of converting light emitted from the light source into a planar shape.
- the liquid crystal panel 11 has a vertically long rectangular shape (rectangular shape) as a whole, and is displayed at a position offset toward one end side (the upper side shown in FIG. 1) in the long side direction.
- a portion (active area) AA is arranged, and a driver 21 and a flexible substrate 13 are respectively attached at positions offset toward the other end side (the lower side shown in FIG. 1) in the long side direction.
- an area outside the display area AA is a non-display area (non-active area) NAA in which no image is displayed.
- the non-display area NAA is a substantially frame-shaped area (CF described later) surrounding the display area AA.
- the area secured on the other end side in the long side direction includes the mounting area (mounting area) for the driver 21 and the flexible substrate 13.
- the width dimension (frame width) at the other three end portions (non-mounting side end portions) excluding the mounting region of the driver 21 and the flexible substrate 13 is, for example, 1.9 mm or less, more preferably 1.3 mm or less, and a narrow frame structure with an extremely narrow frame is adopted.
- the short side direction in the liquid crystal panel 11 coincides with the X-axis direction of each drawing, and the long side direction coincides with the Y-axis direction of each drawing.
- a frame-shaped one-dot chain line that is slightly smaller than the CF substrate 11a represents the outer shape of the display portion AA, and an area outside the one-dot chain line is the non-display portion NAA. It has become.
- the control circuit board 12 is attached to the back surface of the chassis 14a (the outer surface opposite to the liquid crystal panel 11 side) of the backlight device 14 with screws or the like.
- the control circuit board 12 is mounted with electronic components for supplying various input signals to the driver 21 on a board made of paper phenol or glass epoxy resin, and wiring (conductive path) of a predetermined pattern (not shown) is provided. Routed formation.
- One end (one end side) of the flexible substrate 13 is electrically and mechanically connected to the control circuit board 12 via an ACF (Anisotropic Conductive Film) (not shown).
- the flexible substrate (FPC substrate) 13 includes a base material made of a synthetic resin material (for example, polyimide resin) having insulating properties and flexibility, and a large number of wirings are provided on the base material. It has a pattern (not shown), and one end in the length direction is connected to the control circuit board 12 arranged on the back side of the chassis 14a as described above, while the other end Since the portion (the other end side) is connected to the array substrate 11 b in the liquid crystal panel 11, the liquid crystal display device 10 is bent in a folded shape so that the cross-sectional shape is substantially U-shaped.
- a synthetic resin material for example, polyimide resin
- the wiring pattern is exposed to the outside to form terminal portions (not shown), and these terminal portions are respectively connected to the control circuit board 12 and the liquid crystal panel 11. Are electrically connected to each other. Thereby, an input signal supplied from the control circuit board 12 side can be transmitted to the liquid crystal panel 11 side.
- the driver 21 is composed of an LSI chip having a drive circuit therein, and operates based on a signal supplied from a control circuit board 12 that is a signal supply source. An input signal supplied from the control circuit board 12 is processed to generate an output signal, and the output signal is output to the display unit AA of the liquid crystal panel 11.
- the driver 21 has a horizontally long rectangular shape when viewed in a plan view (having a long shape along the short side of the liquid crystal panel 11), and with respect to the non-display portion NAA of the liquid crystal panel 11 (an array substrate 11b described later). It is mounted directly, that is, COG (Chip On Glass).
- the long side direction of the driver 21 coincides with the X-axis direction (the short side direction of the liquid crystal panel 11), and the short side direction coincides with the Y-axis direction (the long side direction of the liquid crystal panel 11).
- the liquid crystal panel 11 includes a pair of substrates 11 a and 11 b and a liquid crystal layer including liquid crystal molecules that are interposed between the substrates 11 a and 11 b and that are substances whose optical characteristics change with application of an electric field ( Liquid crystal) 11c, and a seal portion 11j that seals the liquid crystal layer 11c while maintaining a gap corresponding to the thickness of the liquid crystal layer 11c by being interposed between the substrates 11a and 11b.
- the front side (front side) of the pair of substrates 11a and 11b is a CF substrate (counter substrate) 11a
- the back side (back side) is an array substrate (substrate) 11b.
- the seal portion 11j is arranged in the non-display portion NAA of the liquid crystal panel 11 and has a vertically long substantially frame shape that follows the non-display portion NAA when viewed in plan (viewed from the normal direction to the plate surface of the array substrate 11b). ( Figure 2).
- the portions arranged on the other three side ends (non-mounting side end portions) excluding the mounting area of the driver 21 and the flexible substrate 13 in the liquid crystal panel 11 are the outermost portions in the non-display portion NAA. It is arranged at the end position (FIG. 2).
- polarizing plates 11f and 11g are attached to the outer surfaces of both the substrates 11a and 11b, respectively.
- the liquid crystal panel 11 is an FFS (Fringe Field Switching) mode in which the operation mode is further improved from the IPS (In-Plane Field Switching) mode, and as shown in FIG.
- a pixel electrode part (second transparent electrode part) 18 and a common electrode part (first transparent electrode part) 22 which will be described later are formed on the array substrate 11b side, and the pixel electrode part 18 and the common electrode part 22 are different from each other. It is arranged in layers.
- the CF substrate 11a and the array substrate 11b include a substantially transparent (highly translucent) glass substrate GS, and are formed by laminating various films on the glass substrate GS.
- the CF substrate 11a has a short side dimension substantially equal to that of the array substrate 11b as shown in FIGS. 1 and 2, but the long side dimension is smaller than that of the array substrate 11b. It is bonded to 11b with one end (upper side shown in FIG. 1) in the long side direction aligned. Therefore, the other end (the lower side shown in FIG. 1) of the array substrate 11b in the long side direction is in a state in which the CF substrate 11a does not overlap over a predetermined range and both the front and back plate surfaces are exposed to the outside. Here, a mounting area for the driver 21 and the flexible board 13 is secured. Note that alignment films 11d and 11e for aligning liquid crystal molecules contained in the liquid crystal layer 11c are formed on the inner surfaces of both the substrates 11a and 11b, respectively (FIG. 4).
- the array substrate 11b includes a first metal film (gate metal film) 34, a gate insulating film (insulating film) 35, a semiconductor film 36, a protective film (etching) in order from the lower layer (glass substrate GS) side. (Stopper film, ES film) 37, second metal film (source metal film) 38, first interlayer insulating film 39, organic insulating film 40, first transparent electrode film 23, second interlayer insulating film 41, second transparent electrode film 24.
- An alignment film 11e is laminated.
- the first metal film 34 is formed of a laminated film of titanium (Ti) and copper (Cu), for example. Thereby, compared with the case where the first metal film has a laminated structure of, for example, titanium and aluminum (Al), the wiring resistance is low and the conductivity is good.
- the gate insulating film 35 is laminated at least on the upper layer side of the first metal film 34 and is made of, for example, silicon oxide (SiO 2) that is an inorganic material.
- the semiconductor film 36 is laminated on the upper layer side of the gate insulating film 35 and is made of a thin film using an oxide semiconductor as a material.
- an In—Ga—Zn—O-based semiconductor containing indium (In), gallium (Ga), zinc (Zn), and oxygen (O) (indium gallium oxide) Zinc) is used.
- an In—Ga—Zn—O-based semiconductor containing In, Ga, and Zn at a ratio of 1: 1: 1 is used.
- the protective film 37 is laminated at least on the upper layer side of the semiconductor film 36 and is made of, for example, silicon oxide (SiO 2) that is an inorganic material.
- the second metal film 38 is laminated on the upper layer side of the protective film 37 and is formed of a laminated film of titanium (Ti) and copper (Cu). Thereby, compared with the case where the second metal film has a laminated structure of, for example, titanium and aluminum (Al), the wiring resistance is low and the conductivity is good.
- the first interlayer insulating film 39 is laminated at least on the upper layer side of the second metal film 38 and is made of, for example, silicon oxide (SiO 2) that is an inorganic material.
- the organic insulating film 40 is laminated on the upper layer side of the first interlayer insulating film 39, and is made of, for example, an acrylic resin material (for example, polymethyl methacrylate resin (PMMA)) that is an organic resin material. Since the organic resin material forming the organic insulating film 40 has photosensitivity, it is patterned by a known photolithography method in the manufacturing process of the array substrate 11b.
- the first transparent electrode film 23 is laminated on the upper layer side of the organic insulating film 40 and is made of a transparent electrode material such as ITO (Indium Tin Oxide) or ZnO (Zinc Oxide).
- the second interlayer insulating film 41 is laminated at least on the upper layer side of the first transparent electrode film 23 and is made of silicon nitride (SiNx) which is an inorganic material.
- the second transparent electrode film 24 is laminated on the upper layer side of the second interlayer insulating film 41 and, like the first transparent electrode film 23, a transparent electrode such as ITO (Indium (Tin Oxide) or ZnO (Zinc Oxide). Made of material.
- the alignment film 11e is disposed so as to face the liquid crystal layer 11c by being laminated on at least the upper layer side of the second transparent electrode film 24.
- the alignment film 11e is made of, for example, polyimide, and is irradiated with light in a specific wavelength region (for example, ultraviolet light) in the manufacturing process, so that the liquid crystal molecules can be aligned along the light irradiation direction. It is made a film.
- the organic insulating film 40 is thicker than the other inorganic insulating films 37, 39, and 41 and functions as a planarizing film.
- the gate insulating film 35, the protective film 37, the first interlayer insulating film 39, and the second interlayer insulating film 41 excluding the organic insulating film 40 are each made of an inorganic material.
- the insulating film is thinner than the organic insulating film 40. Further, each of the insulating films 37 and 39 to 41 is formed as a solid pattern (having an opening in a part) over almost the entire surface of the array substrate 11b.
- the first metal film 34, the semiconductor film 36, and the second metal film 38 are formed with a predetermined pattern in both the display area AA and the non-display area NAA of the array substrate 11b.
- the display unit AA of the array substrate 11b is provided with a large number of display unit TFTs (thin film transistors) 17 and pixel electrode units 18 which are switching elements arranged in a matrix.
- TFTs thin film transistors
- pixel electrode units 18 which are switching elements arranged in a matrix.
- a gate wiring (scanning signal line, row control line) 19 and a source wiring (column control line, data line) 20 in a lattice shape are disposed so as to surround.
- the display portion TFTs 17 and the pixel electrode portions 18 are arranged in parallel in a matrix at intersections of the gate lines 19 and the source lines 20 that form a lattice.
- the gate wiring 19 is made of the first metal film 34
- the source wiring 20 is made of the second metal film 38
- the gate insulating film 35 and the protective film 37 are interposed between the intersecting portions.
- the gate line 19 and the source line 20 are connected to the gate electrode part 17a and the source electrode part 17b of the display part TFT 17, respectively
- the pixel electrode part 18 is connected to the drain electrode part 17c of the display part TFT 17 ( FIG. 8). Among these, as shown in FIG.
- the gate electrode portion 17a is constituted by a branch portion branched in a manner protruding along the Y-axis direction from the gate wiring 19 extending linearly along the X-axis direction.
- the source electrode portion 17b is constituted by a branch portion branched in a form protruding from the source wiring 20 extending linearly along the Y-axis direction along the X-axis direction.
- the display portion TFT 17 includes a gate electrode portion 17 a made of the first metal film 34, a channel portion 17 d made of the semiconductor film 36 and overlapping the gate electrode portion 17 a in plan view, and a protective film 37.
- a protective part 17e formed by penetrating two channel openings 17e1 and 17e2 at a position overlapping with the channel part 17d in plan view, and two channel openings 17e1 made of the second metal film 38. , 17e2, the source electrode portion 17b connected to the channel portion 17d through the channel opening portion 17e1, and the other channel opening portion of the two channel opening portions 17e1 and 17e2 made of the second metal film 38.
- a drain electrode portion 17c connected to the channel portion 17d through the portion 17e2.
- the channel portion 17d extends along the X-axis direction and bridges the source electrode portion 17b and the drain electrode portion 17c, thereby enabling charge movement between the electrode portions 17b and 17c.
- the source electrode portion 17b and the drain electrode portion 17c are arranged to face each other with a predetermined interval in the extending direction (X-axis direction) of the channel portion 17d.
- the gate electrode portion 17 a has a structure branched from the gate wiring 19, and the formation range of the gate electrode portion 17 a overlaps with the source electrode portion 17 b over almost the entire area in plan view.
- the part 17c is set so as to be superimposed in a plan view only on a part thereof (near the connection part with the channel part 17d).
- the gate electrode portion 17a, the source electrode portion 17b, the drain electrode portion 17c, and the channel portion are compared with the case where the gate electrode portion is formed in a formation range that overlaps the substantially entire area of the drain electrode portion 17c in plan view.
- the parasitic capacitance (hereinafter referred to as “Cgd capacitance”) formed between the pixel and the capacitor 17d can be reduced, the ratio of the Cgd capacitance to the total capacitance of the display pixel is reduced. Therefore, the Cgd capacitance is less likely to affect the voltage value applied to the pixel electrode unit 18, which is more preferable when the liquid crystal panel 11 has a higher definition and the area and total capacity of the display pixel are reduced.
- the channel portion 17d extends along the X-axis direction from the position where the drain electrode portion 17c is connected, as shown in FIGS. Extending toward the side opposite to the source electrode part 17b side (the right side shown in FIGS.
- the tip part (part) thereof is not overlapped with the gate electrode part 17a in a plan view. It has an extension part 17d1.
- the semiconductor film 36 forming the channel portion 17d is an oxide semiconductor thin film as described above, and this oxide semiconductor thin film has an electron mobility of, for example, about 20 to 50 times that of an amorphous silicon thin film or the like. Therefore, the display unit TFT 17 can be easily miniaturized to maximize the amount of light transmitted through the pixel electrode unit 18, thereby increasing the definition and reducing the power consumption of the backlight device 14. It is suitable.
- the off characteristics of the display portion TFT 17 are higher and the off-leakage current is, for example, 1/100, compared with the case where amorphous silicon is used as the material of the channel portion. Therefore, the voltage holding ratio of the pixel electrode portion 18 is high, which is useful for reducing the power consumption of the liquid crystal panel 11.
- the display portion TFT 17 having such an oxide semiconductor thin film has an inverted stagger type in which a gate electrode portion 17a is arranged in the lowermost layer and a channel portion 17d is laminated on the upper layer side with a gate insulating film 35 interposed therebetween. Therefore, it has a laminated structure similar to that of a TFT having a general amorphous silicon thin film.
- the pixel electrode portion 18 is composed of the second transparent electrode film 24, and at least in a region surrounded by the gate wiring 19 and the source wiring 20 in the display portion AA of the array substrate 11b, the pixel electrode portion 18 has a vertically long rectangular shape as a whole as viewed in plan (Rectangular shape) and a plurality of vertically long slits (not shown) are provided to form a substantially comb-like shape. As shown in FIG. 8, the pixel electrode portion 18 is formed on the second interlayer insulating film 41, and the second interlayer insulating film 41 is interposed between the common electrode portion 22 described below.
- a contact hole CH is provided at a position overlapping the drain electrode portion 17c in plan view. Are formed so as to penetrate vertically, and the pixel electrode portion 18 is connected to the drain electrode portion 17c through the contact hole CH.
- the contact hole CH is disposed at a position where the contact hole CH does not overlap with both the gate electrode portion 17a and the channel portion 17d made of the semiconductor film 36 in a plan view.
- the common electrode portion 22 is composed of the first transparent electrode film 23, and is formed as a substantially solid pattern at least on the display portion AA of the array substrate 11b. As shown in FIG. 8, the common electrode portion 22 is disposed so as to be sandwiched between the organic insulating film 40 and the second interlayer insulating film 41. Since the common potential (reference potential) is applied to the common electrode portion 22 from a common wiring (not shown), the potential applied to the pixel electrode portion 18 by the display portion TFT 17 is controlled as described above, whereby both electrode portions A predetermined potential difference can be generated between 18 and 22.
- the liquid crystal layer 11c When a potential difference is generated between the two electrode portions 18 and 22, the liquid crystal layer 11c has a normal direction to the plate surface of the array substrate 11b in addition to the component along the plate surface of the array substrate 11b by the slits of the pixel electrode portion 18. Since a fringe electric field (an oblique electric field) including a component is applied, among the liquid crystal molecules included in the liquid crystal layer 11c, those existing on the pixel electrode unit 18 in addition to those present in the slit are appropriately aligned. Can be switched to. Accordingly, the aperture ratio of the liquid crystal panel 11 is increased, and a sufficient amount of transmitted light can be obtained, and a high viewing angle performance can be obtained.
- a fringe electric field an oblique electric field
- the gate insulating film 35, the protective film 37, the first interlayer insulating film 39, the organic insulating film 40, and the second interlayer insulating film 41 are provided on the array substrate 11 b in parallel with the gate wiring 19 and across the pixel electrode portion 18. It is also possible to provide a capacitor wiring (not shown) that overlaps with each other.
- An alignment film 11d for aligning liquid crystal molecules contained in the liquid crystal layer 11c is provided on the surfaces of the color filter 11h and the light shielding layer 11i.
- the alignment film 11d is made of, for example, polyimide, and is irradiated with light in a specific wavelength region (for example, ultraviolet rays) in the manufacturing process, so that the liquid crystal molecules can be aligned along the light irradiation direction. It is made a film.
- one display which is a display unit, is formed by a set of three colored portions of R (red), G (green), and B (blue) and three pixel electrode portions 18 facing the colored portions. Pixels are configured.
- the display pixel includes a red pixel having an R colored portion, a green pixel having a G colored portion, and a blue pixel having a B colored portion. These display pixels of each color are arranged repeatedly along the row direction (X-axis direction) on the plate surface of the liquid crystal panel 11 to form a pixel group. This pixel group is arranged in the column direction (Y-axis direction). ) Are arranged side by side along (FIGS. 4 and 5).
- a column control circuit portion 27 is provided at a position adjacent to the short side portion of the display portion AA, as shown in FIG.
- a row control circuit section (circuit section) 28 is provided at a position adjacent to the long side section.
- the column control circuit unit 27 and the row control circuit unit 28 can perform control for supplying an output signal from the driver 21 to the display unit TFT 17.
- the column control circuit unit 27 and the row control circuit unit 28 are monolithically formed on the array substrate 11b based on the same semiconductor film 36 as the display unit TFT 17, and thereby supply output signals to the display unit TFT 17.
- the circuit elements forming the control circuit include, for example, a non-display portion TFT (non-display portion thin film transistor) using a semiconductor film 36 as a channel portion.
- the column control circuit unit 27 and the row control circuit unit 28 are arranged at the center side of the seal portion 11j in the non-display portion NAA, that is, on the display portion AA side. It can be said that it is arranged closer to the seal portion 11j than the display portion TFT 17 arranged in the display portion AA.
- the seal portion 11j is shown by a two-dot chain line
- the seal portion 11j is shown by a solid line.
- the column control circuit unit 27 and the row control circuit unit 28 are simultaneously patterned on the array substrate 11b by a known photolithography method when patterning the display portion TFT 17 and the like in the manufacturing process of the array substrate 11b.
- the column control circuit unit 27 is located between the display unit AA and the driver 21 in the position adjacent to the lower short side portion shown in FIG. It is arranged at an intermediate position, and is formed in a horizontally long, substantially rectangular range extending along the X-axis direction.
- the column control circuit unit 27 is connected to the source wiring 20 arranged in the display unit AA, and converts the image signal included in the output signal from the driver 21 to each source wiring.
- 20 has a switch circuit (RGB switch circuit) that distributes to 20.
- the column control circuit unit 27 distributes the image signal from the driver 21 to the R, G, and B source wirings 20 by the switch circuit, while the column control circuit unit 27 distributes the image signals from the driver 21 to the display unit TFTs 17 that form display pixels. Supply.
- the column control circuit unit 27 can include an attached circuit such as a level shifter circuit or an ESD protection circuit.
- the row control circuit unit 28 is arranged at a position adjacent to the left long side portion shown in FIG. 5 in the display unit AA and extends along the Y-axis direction. It is formed in a vertically long and substantially rectangular shape.
- the row control circuit section 28 is connected to the gate wiring 19 disposed in the display section AA, and sends the scanning signal included in the output signal from the driver 21 to each gate wiring 19. And a scanning circuit that sequentially scans each gate wiring 19 by supplying them at a predetermined timing.
- a large number of gate wirings 19 are arranged in parallel along the Y-axis direction in the display unit AA of the array substrate 11b, whereas the row control circuit unit 28 is connected from the driver 21 by the scanning circuit.
- the scanning of the gate wiring 19 is performed by sequentially supplying the control signal (scanning signal) from the gate wiring 19 at the upper end position to the gate wiring 19 at the lower end position shown in FIG.
- the scanning circuit provided in the row control circuit section 28 includes a buffer circuit section (not shown) that is connected to the gate wiring 19 and amplifies the scanning signal and outputs the amplified scanning signal to the gate wiring 19.
- the row control circuit unit 28 can be provided with an attached circuit such as a level shifter circuit or an ESD protection circuit.
- the column control circuit unit 27 and the row control circuit unit 28 are connected to the driver 21 by connection wiring (not shown) formed on the array substrate 11b.
- the row control circuit unit 28 includes a first wiring unit 29 and a second wiring unit 30 arranged on the upper layer side so as to intersect the first wiring unit 29. ing. Similar to the gate wiring 19, the first wiring portion 29 is arranged in the row control circuit portion 28 of the non-display portion NAA in a form extending linearly along the X-axis direction, and the first metal film 34. (Refer to FIG. 10 and FIG. 11). A plurality of first wiring sections 29 (two illustrated in FIG. 9) are arranged in parallel with each other with a predetermined arrangement interval P3 in the Y-axis direction.
- the second wiring part 30 is arranged in the row control circuit part 28 of the non-display part NAA so as to extend linearly along the Y-axis direction, and the second metal film 38. (Refer to FIG. 10 and FIG. 11).
- the 1st wiring part 29 and the 2nd wiring part 30 cross
- a plurality of second wiring parts 30 (five examples in FIG. 9) are arranged in parallel with each other with a predetermined arrangement interval P1, P2 in the X-axis direction. There are two arrangement intervals P1 and P2 of the second wiring part 30, and the arrangement interval P1 between the two second wiring parts 30 on the left side shown in FIG. 9 and the second two on the right side shown in FIG.
- the arrangement interval P1 between the wiring portions 30 is substantially equal, whereas the arrangement interval P2 between the second second wiring portion 30 and the third second wiring portion 30 from the left end shown in FIG. Is relatively wider (larger) than the array interval P1.
- the arrangement interval P1 between the second wiring portions 30 that is relatively narrow (small) is a dimension that approximates the arrangement interval P3 between the first wiring portions 29, and the difference (
- each of the second wiring portions 30 except for the second wiring portion 30 at the right end shown in FIG. 9 intersects each first wiring portion 29, whereas the second wiring portion 30 at the right end shown in FIG.
- the wiring portion 30 intersects only with the upper first wiring portion 29 shown in FIG.
- the intersections 29a and 30a between the first wiring portion 29 and the second wiring portion 30 that are arranged in a plurality are arranged in a matrix (matrix) in a plurality of predetermined arrangement intervals P1 to P3.
- the plane is arranged with a gap.
- the intersecting portions 29a and 30a are arranged with the same arrangement intervals P1 and P2 as the second wiring portion 30 in the X-axis direction (the extending direction of the first wiring portion 29 and the arrangement direction of the second wiring portion 30).
- the intersecting portions 29a and 30a are arranged with the same arrangement intervals P1 and P2 as the second wiring portion 30 in the X-axis direction (the extending direction of the first wiring portion 29 and the arrangement direction of the second wiring portion 30).
- the same arrangement interval P3 as the first wiring part 29 in the Y-axis direction (the extending direction of the second wiring part 30, the arrangement direction of the first wiring part 29).
- the intersecting portions 29a and 30a arranged along the X-axis direction are arranged in a form having two arrangement intervals P1 and P2.
- the intersecting portions 29a and 30a arranged in a matrix form are arranged in groups of four intersecting portions 29a and 30a (hereinafter referred to as a first intersecting portion group CG1) arranged together in the left region shown in FIG. ) And five groups of intersections 29a and 30a (hereinafter referred to as second intersection part group CG2) arranged together in the right region of the figure, with a relatively wide arrangement interval P2 being separated.
- the gate insulating film 35 and the protective film 37 are disposed so that the crossing portions 29a and 30a are kept in an insulating state.
- a first interlayer insulating film 39, an organic insulating film 40, and a second interlayer insulating film 41 are sequentially stacked on the upper layer side of the second wiring part 30.
- 9 to 11 illustrate the wiring structure in a part of the row control circuit unit 28, and the wiring structure in the other part of the row control circuit unit 28 is a modification of the first embodiment to be described later. This will be explained in detail with an example.
- an electric field is generated around the intersections 29a and 30a of the first wiring unit 29 and the second wiring unit 30 provided in the row control circuit unit 28 as the wiring units 29 and 30 are energized. It will be.
- the row control circuit unit 28 arranged in the non-display portion NAA has the display portion AA. Compared to the display portion TFT 17 and the like, it is easily affected by moisture existing outside.
- an organic insulating film 40 is disposed on the upper layer side of the second wiring section 30, and the organic resin material forming the organic insulating film 40 generally has a property of easily absorbing moisture.
- the organic insulating film 40 disposed on the upper layer side of the second wiring part 30 has at least crossing portions 29a and 30a between the first wiring part 29 and the second wiring part 30, as shown in FIG.
- An opening 31 is provided in the overlapping range.
- the organic insulating film 40 has a structure in which the organic insulating film 40 is not stacked immediately above the intersecting portions 29 a and 30 a of the wiring portions 29 and 30. Even if the moisture is desorbed, it is difficult to reach the intersecting portions 29a and 30a of the wiring portions 29 and 30.
- the opening 31 can be simultaneously formed in the step of forming the contact hole CH of the display unit TFT 17 in the display unit AA in the organic insulating film 40 in the manufacturing process of the array substrate 11b.
- a photomask used for patterning the organic insulating film 40 by a photolithography method is used to expose or shield the formation site of the contact hole CH in the organic insulating film 40 of the display portion AA.
- a pattern and a pattern for exposing or shielding a portion where the opening 31 is to be formed in the organic insulating film 40 of the non-display portion NAA may be provided.
- FIG. 9 the formation range of the opening 31 viewed in a plane (viewed along the normal direction of the plate surface of the array substrate 11 b) is illustrated by a two-dot chain line.
- the opening 31 has a first opening 31A that opens in a range that overlaps the first intersection part group CG1 and a range that overlaps the second intersection part group CG2. And a second opening 31B that opens to the center.
- the first crossing site group CG1 and the second crossing site group CG2 each include a plurality of crossing sites 29a and 30a having a relatively narrow arrangement interval P1 in the X-axis direction. That is, the first opening 31A and the second opening 31B forming the opening 31 are provided so as to open over a range extending over the plurality of intersecting portions 29a and 30a where the arrangement interval P1 in the X-axis direction is relatively narrow. It can be said that.
- the first opening portion 31A has intersection portions 29a and 30a (specifically, non-overlapping with the second opening portion 31B among the intersection portions 29a and 30a having a relatively large arrangement interval P2 in the X-axis direction).
- 9 is overlapped with the second intersection part 29a, 30a) from the left end shown in FIG. 9, and the intersection part 29a, which is adjacent to the intersection part 29a, 30a with a relatively narrow arrangement interval P1 in the X-axis direction.
- 30a is also opened so as to overlap.
- the second opening 31B has crossing portions 29a and 30a (specifically, non-overlapping with the first opening 31A among the crossing portions 29a and 30a having a relatively wide arrangement interval P2 in the X-axis direction).
- the organic insulating film 40 has a portion SP that partitions the first opening 31A and the second opening 31B in a plan view, and a portion SP that partitions the openings 31A and 31B.
- the arrangement interval P2 in the X-axis direction is arranged between the two intersecting portions 29a and 30a that are relatively wide.
- the organic insulating film 40 is disposed between the two intersecting portions 29a and 30a having a relatively large arrangement interval P2 in the X-axis direction. This prevents the organic insulating film 40 from being excessively removed as compared with the case where the opening is formed so as to collectively surround all the intersecting portions 29a and 30a.
- the function of protecting the wiring portions 29 and 30 and the function of protecting the wiring portions 29 and 30 are unlikely to be impaired.
- the first opening 31A is formed so as to open over a range spanning four intersecting portions 29a and 30a included in the first intersecting portion group CG1. Accordingly, the opening edge of the first opening portion 31A is arranged so as to collectively surround the four intersecting portions 29a and 30a included in the first intersecting portion group CG1. For this reason, the organic insulating film 40 does not exist at a position between the intersecting portions 29a and 30a included in the first intersecting portion group CG1 when seen in a plan view. Thereby, even if moisture is contained in the organic insulating film 40, the moisture hardly affects each of the intersecting portions 29a and 30a included in the first intersecting portion group CG1.
- the formation position of the first opening 31A in the organic insulating film 40 is shifted in the X-axis direction and the Y-axis direction. Even when a part of the opening edge of the first opening portion 31A overlaps with this, the amount of overlap is small. As described above, since ion migration is less likely to occur in each of the intersecting sites 29a and 30a included in the first intersecting site group CG1, the operation reliability of the row control circuit unit 28 can be further increased.
- the first opening 31 ⁇ / b> A is formed so as to open over a wider range than the range overlapping with each of the intersecting sites 29 a and 30 a included in the first intersecting site group CG ⁇ b> 1. . That is, the opening edge of the first opening 31A does not intersect with each outer edge of each of the intersecting sites 29a and 30a included in the first intersecting site group CG1 in a plan view (non-overlapping). It is arranged outside the first intersection site group CG1. In other words, the formation range of the first opening 31A viewed in the plane is slightly larger than that of the first intersection part group CG1, and is extended to a region outside the first intersection part group CG1.
- the first opening in the organic insulating film 40 is compared to the case where the first opening is only opened in a range overlapping with the crossing portions 29a and 30a included in the first crossing portion group CG1. Since the distance from the opening edge of 31A to each intersection part 29a, 30a included in the first intersection part group CG1 is ensured longer, each moisture included in the organic insulating film 40 is included in the first intersection part group CG1. It becomes difficult to be affected by the intersections 29a and 30a. Moreover, even if the formation position of the first opening 31A in the organic insulating film 40 is shifted in the X-axis direction or the Y-axis direction for manufacturing reasons, the shift can be absorbed.
- the first opening 31A has a horizontally long rectangular shape when seen in a plan view.
- the second opening 31B is formed so as to open over a range extending over five intersecting sites 29a and 30a included in the second intersecting site group CG2. Accordingly, the opening edge of the second opening 31B is arranged so as to collectively surround the five intersecting portions 29a and 30a included in the second intersecting portion group CG2. For this reason, the organic insulating film 40 does not exist at a position between the intersecting portions 29a and 30a included in the second intersecting portion group CG2 when viewed in a plan view. Thereby, even if moisture is contained in the organic insulating film 40, the moisture does not easily affect each of the intersecting portions 29a and 30a included in the second intersecting portion group CG2.
- the formation position of the second opening 31B in the organic insulating film 40 is shifted in the X-axis direction and the Y-axis direction. Even when a part of the opening edge of the second opening 31B is overlapped with this, the amount of overlap is small. As described above, since ion migration is less likely to occur in each of the intersecting sites 29a and 30a included in the second intersecting site group CG2, the operation reliability of the row control circuit unit 28 can be further increased.
- the second opening 31 ⁇ / b> B is formed so as to open over a wider range than the range overlapping with the intersections 29 a and 30 a included in the second intersection part group CG ⁇ b> 2. . That is, the opening edge of the second opening 31B does not intersect with each outer edge of each intersection part 29a, 30a included in the second intersection part group CG2 in a plane (non-overlapping). It is arranged outside the second intersection site group CG2. In other words, the formation range of the second opening 31B viewed in the plane is slightly larger than that of the second intersection part group CG2, and is extended to a region outside the second intersection part group CG2.
- the second opening in the organic insulating film 40 is compared with the case where the second opening is opened only in a range overlapping with each of the intersections 29a and 30a included in the second intersection part group CG2. Since the distance from the opening edge of 31B to each cross site 29a, 30a included in the second cross site group CG2 is ensured longer, each moisture included in the organic insulating film 40 is included in the second cross site group CG2. It becomes difficult to be affected by the intersections 29a and 30a. Moreover, even if the formation position of the second opening 31B in the organic insulating film 40 is shifted in the X-axis direction or the Y-axis direction for manufacturing reasons, the shift can be absorbed.
- the second opening 31B has a shape in which a corner portion of a horizontally long rectangle is cut out in a plan view.
- a protective film 37 is interposed between the intersecting portion 30 a of the second wiring part 30 and the gate insulating film 35. That is, since the protective film 37 is disposed in addition to the gate insulating film 35 between the intersection part 29a of the first wiring part 29 and the intersection part 30a of the second wiring part 30, both It is difficult for the intersections 29a and 30a to be short-circuited by metal ions that can be generated by ion migration.
- a first interlayer insulating film 39 and a second interlayer insulating film 41 are stacked on the upper layer side of the intersecting portion 30a of the second wiring section 30, and the first interlayer insulating film 39 and the second interlayer insulating film 41 are stacked.
- the intersection part 30a of the 2nd wiring part 30 is covered by.
- the first interlayer insulating film 39 and the second interlayer insulating film 41 have a solid shape so as to straddle a range that overlaps the openings 31A and 31B and a range that does not overlap the openings 31A and 31B. Therefore, the waterproofness (moisture permeability resistance) at the intersecting portion 30a of the second wiring portion 30 is higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- Contact holes are formed in the first and second layers of the first and second interlayer insulating films 39 and 41 to form a contact hole that communicates with the opening 31.
- the first transparent electrode film 23 and the second transparent electrode film 24 are connected to the intersecting portions 29a and 30a so that the charges accumulated in the pixel electrode unit 18 composed of the second transparent electrode film 24 are shared. It is also possible to escape to the electrode part 22 or both wiring parts 29 and 30.
- the liquid crystal panel (display device) 11 is capable of displaying an image and has a display unit AA arranged on the center side and a non-circular arrangement arranged around the display unit AA.
- An array substrate (substrate) 11b having a display unit NAA, a row control circuit unit (circuit unit) 28 disposed in the non-display unit NAA, a first wiring unit 29 constituting the row control circuit unit 28, and a row control circuit
- the portion 28 is configured, and is interposed between the first wiring portion 29 and the second wiring portion 30, and the second wiring portion 30 disposed on the upper layer side so as to intersect the first wiring portion 29.
- the gate insulating film 35 (insulating film) 35 and the second wiring part 30 are arranged on the upper layer side of the first wiring part 29 and the second wiring part 30 at least at intersections 29a and 30a. And an organic tree having an opening 31 that opens in the overlapping area includes an organic insulating film 40 made of a material, the.
- the row control circuit portion 28 the first wiring portion 29 and the second wiring portion 30 arranged on the upper layer side thereof are arranged so as to intersect with each other via the gate insulating film 35. , 30a, an electric field can be generated as the wiring portions 29, 30 are energized.
- the non-display portion NAA is arranged on the outer peripheral side so as to surround the center-side display portion AA, and therefore, the row control circuit unit 28 arranged in the non-display portion NAA has the display portion AA. Compared to, it is more susceptible to moisture present outside.
- an organic insulating film 40 is disposed on the upper layer side of the second wiring section 30, and the organic resin material forming the organic insulating film 40 generally has a property of easily absorbing moisture. For this reason, metal ions are generated at the intersections 29a and 30a of the wiring portions 29 and 30 due to the influence of moisture contained in the organic insulating film 40, and the metal ions are pulled by the electric field and move, so-called ion migration (electro Chemical migration) occurs, and in some cases, there is a concern that a short circuit may occur between the intersections 29a and 30a.
- ion migration electro Chemical migration
- the wiring portions 29 and 30 Since the distribution density increases, there is a greater concern about the occurrence of ion migration at the intersections 29a and 30a of the wiring portions 29 and 30.
- the organic insulating film 40 has the opening 31 that opens in a range overlapping with the intersections 29 a and 30 a of the first wiring portion 29 and the second wiring portion 30. Moisture contained in is less likely to affect the intersecting portions 29a, 30a of both wiring portions 29, 30.
- the organic insulating film 40 is provided so that the opening 31 is opened over a wider range than at least the range where it overlaps with the intersecting portions 29a and 30a.
- the opening 31 of the organic insulating film 40 has a configuration in which the opening 31 opens only in a range where the opening 31 overlaps the intersecting portions 29a and 30a of the wiring portions 29 and 30. Since the distance from the opening edge to the intersecting portions 29a, 30a of both wiring portions 29, 30 is secured longer, the moisture contained in the organic insulating film 40 is affected by the intersecting portions 29a, 30a of both wiring portions 29, 30. It becomes difficult.
- first wiring portion 29 and the second wiring portion 30 are provided with at least one of the plurality of intersection portions 29a, 30a so that a plurality of the intersection portions 29a, 30a are arranged at intervals of the arrangement intervals (intervals) P1 to P3.
- the film 40 is provided such that the opening 31 opens over a range extending over at least the plurality of intersecting portions 29a and 30a.
- the opening edge of the opening 31 in the organic insulating film 40 is arranged so as to collectively surround the plurality of intersecting portions 29a and 30a arranged at intervals, so that the plurality of intersecting portions 29a and 30a are arranged.
- the organic insulating film 40 does not exist at a position between the two.
- the organic insulating film 40 contains moisture, the moisture is less likely to be affected by the plurality of intersecting portions 29a and 30a. Moreover, due to manufacturing reasons, the formation position of the opening 31 in the organic insulating film 40 is shifted, and for example, a part of the opening edge of the opening 31 is overlapped with the intersecting portions 29a and 30a. However, the amount of overlap is small. As described above, since ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, the operation reliability of the row control circuit portion 28 can be further increased.
- the first wiring part 29 and the second wiring part 30 are arranged in a plurality of at least one so that at least three intersecting portions 29a and 30a are arranged at different arrangement intervals P1 to P3.
- the insulating film 40 includes, as the opening 31, at least two first openings 31 ⁇ / b> A that open over a range that spans at least two intersecting portions 29 a and 30 a having a relatively small arrangement interval P ⁇ b> 1, and Of the intersecting portions 29a and 30a, the first opening portion 31A is provided so as to have at least a second opening portion 31B that opens in a range overlapping with the intersecting portions 29a and 30a that do not overlap with the first opening portion 31A.
- the opening edge of the first opening 31A in the organic insulating film 40 is arranged so as to collectively surround the two intersecting portions 29a and 30a having a relatively small arrangement interval P1.
- the organic insulating film 40 does not exist at a position between the two intersecting portions 29a and 30a. Thereby, even if the organic insulating film 40 contains moisture, the moisture is less likely to be affected by the two intersecting portions 29a and 30a having a relatively small arrangement interval P1.
- a shift occurs in the formation position of the first opening 31A in the organic insulating film 40. For example, the first opening 31A with respect to the two intersecting portions 29a and 30a having a relatively small arrangement interval P1.
- the organic insulating film 40 has an opening in a range that overlaps the intersecting portions 29a and 30a that do not overlap the first opening 31A among the two intersecting portions 29a and 30a having a relatively large arrangement interval P2. Since the second opening 31B is provided, the organic insulating film 40 is disposed at a position between the two intersecting portions 29a and 30a having a relatively large arrangement interval P2. Thereby, since it is avoided that the organic insulating film 40 is removed excessively, the flattening function by the organic insulating film 40 and the function of protecting the wiring portions 29 and 30 are hardly damaged.
- a CF substrate (counter substrate) 11a facing the array substrate 11b a liquid crystal layer (liquid crystal) 11c sandwiched between the array substrate 11b and the CF substrate 11a, and the array substrate 11b and the CF substrate 11a
- a seal portion 11j that is disposed so as to surround the liquid crystal layer 11c and seals the liquid crystal layer 11c.
- the row control circuit portion 28 is closer to the seal portion 11j than the display portion AA. It is arranged in. In this way, the liquid crystal layer 11c sandwiched between the array substrate 11b and the CF substrate 11a is interposed between the array substrate 11b and the CF substrate 11a and is disposed so as to surround the liquid crystal layer 11c. Sealed by the portion 11j.
- the row control circuit unit 28 Since the row control circuit unit 28 is disposed closer to the seal unit 11j than the display unit AA, when the external moisture permeates the seal unit 11j, the row control circuit unit 28 is easily affected by the moisture. As described above, since the organic insulating film 40 has the opening 31 that opens in a range that overlaps the intersecting portions 29a and 30a of the first wiring portion 29 and the second wiring portion 30, the organic insulating film 40 is transmitted through the seal portion 11j. Even if the moisture is taken into the organic insulating film 40, the moisture hardly affects the intersecting portions 29a and 30a of the wiring portions 29 and 30, and ion migration is hardly generated at the intersecting portions 29a and 30a. This makes it difficult for the row control circuit unit 28 to malfunction.
- first interlayer insulating film 39 interposed between the organic insulating film 40 and the second wiring portion 30 and disposed in a range overlapping at least the opening 31.
- first interlayer insulating film 39 interposed between the organic insulating film 40 and the second wiring portion 30 and disposed in a range overlapping at least the opening 31.
- the intersection part 30a of the second wiring part 30 with the first wiring part 29 is covered with the first interlayer insulating film 39, so that the waterproof property (moisture permeability resistance) at the intersection part 30a is provided. It will be higher.
- ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- a protective film 37 is provided between the second wiring part 30 and the gate insulating film 35 and disposed in a range overlapping at least the opening 31. In this way, since the protective film 37 is interposed in addition to the gate insulating film 35 between the intersecting portions 29a and 30a of the first wiring portion 29 and the second wiring portion 30, these intersecting portions 29a. , 30a is less likely to cause a short circuit due to ion migration. Thereby, the operation reliability of the row control circuit unit 28 can be further improved.
- the first wiring part 29 and the second wiring part 30 contain at least copper.
- the organic insulating film 40 has the opening 31 that opens in a range overlapping with the intersecting portions 29 a and 30 a of the first wiring portion 29 and the second wiring portion 30. Moisture contained in the insulating film 40 hardly affects the intersecting portions 29a and 30a of both wiring portions 29 and 30, and ion migration is less likely to occur in the intersecting portions 29a and 30a of both wiring portions 29 and 30.
- the operation reliability of the row control circuit section 28 is kept high while the conductivity of the sections 29 and 30 is good.
- the display portion AA is provided with a display portion TFT (thin film transistor) 17 using an oxide semiconductor for the semiconductor film 36, and the row control circuit portion 28 includes the semiconductor film 36 and the second wiring portion 30.
- the gate insulating film 35 is provided so as to be interposed therebetween.
- the oxide semiconductor that forms the semiconductor film 36 has higher electron mobility than, for example, an amorphous semiconductor, and thus has various functions in providing a circuit element that forms the row control circuit portion 28 using the semiconductor film 36. Circuit elements can be provided. Thereby, it is suitable for increasing the number of functions of the row control circuit section 28 and the like.
- the oxide semiconductor contains indium (In), gallium (Ga), zinc (Zn), and oxygen (O). In this way, it is more suitable for increasing the number of functions of the row control circuit section 28 and the like.
- the wiring structure in a part of the row control circuit unit 28 is illustrated as a representative. However, in other parts of the row control circuit unit 28, a wiring structure different from that in the first embodiment exists. Therefore, the wiring structures in other parts of the row control circuit unit 28 will be described in the following modifications 1 to 7. In the following modifications, members similar to those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and illustration and description thereof may be omitted.
- the second transparent electrode film 24 Since the second transparent electrode film 24 is arranged so as to straddle the range overlapping with the opening 31 and the range non-overlapping with the opening 31, the second transparent electrode film 24 intersects the second wiring portion 30.
- the waterproofness (moisture permeability resistance) in the part 30a becomes higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- the second transparent electrode film (transparent electrode film) 24 is provided on the upper layer side of the organic insulating film 40 and at least in a range overlapping with the opening 31. .
- the intersecting portions 29a and 30a of the second wiring portion 30 with the first wiring portion 29 are covered with the second transparent electrode film 24 in addition to the first interlayer insulating film 39.
- the waterproofness in the parts 29a and 30a is further increased. As a result, ion migration is more unlikely to occur at the intersecting portions 29a, 30a of the wiring portions 29, 30, so that the operation reliability of the row control circuit portion 28 can be further enhanced.
- the first transparent electrode film 23 Since the first transparent electrode film 23 is arranged in a solid form so as to straddle a range overlapping with the opening 31 and a range non-overlapping with the opening 31, the first transparent electrode film 23 intersects the second wiring portion 30.
- the waterproofness (moisture permeability resistance) in the part 30a becomes higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- the transparent electrode films 23 and 24 include the first transparent electrode film 23 relatively disposed on the lower layer side and the second transparent film relatively disposed on the upper layer side. And a second interlayer insulating film 41 disposed between the first transparent electrode film 23 and the second transparent electrode film 24 and disposed in a range overlapping at least the opening 31. .
- the intersections 29a, 30a of the second wiring part 30 with the first wiring part 29 are added to the first interlayer insulating film 39, the first transparent electrode film 23, the second interlayer insulating film 41, and the second wiring part 30. Since it is covered with the transparent electrode film 24, the waterproofness at the intersections 29a and 30a is further enhanced. As a result, ion migration is more unlikely to occur at the intersections 29a and 30a of the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- first transparent electrode film 23 and the second transparent electrode film 24 are arranged in a solid shape so as to straddle a range overlapping with the opening 31 and a range where the opening 31 is not overlapped.
- the waterproofness (moisture permeability resistance) at the intersection part 30a of the second wiring part 30 is higher.
- ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- a semiconductor film 36 is further interposed between the gate insulating film 35 and the protective film 37 interposed between the intersecting portions 29 a and 30 a of the wiring portions 29 and 30. It is arranged in a form. That is, in addition to the gate insulating film 35 and the protective film 37, the semiconductor film 36 is disposed between the intersection part 29 a of the first wiring part 29 and the intersection part 30 a of the second wiring part 30. Yes.
- the semiconductor film 36 is disposed in a manner straddling a range that overlaps the opening 31 and a range that does not overlap the opening 31.
- FIG. 16 A fifth modification of the first embodiment will be described with reference to FIG.
- a semiconductor film 36 is further interposed between the gate insulating film 35 and the protective film 37 interposed between the intersecting portions 29 a and 30 a of the wiring portions 29 and 30.
- a second transparent electrode film 24 is laminated.
- the semiconductor film 36 is disposed between the intersection part 29 a of the first wiring part 29 and the intersection part 30 a of the second wiring part 30.
- the intersecting portion 30 a of the second wiring part 30 is covered with the second transparent electrode film 24 in addition to the first interlayer insulating film 39 and the second interlayer insulating film 41.
- the semiconductor film 36 makes it more difficult for the crossing portions 29a and 30a to be short-circuited by metal ions that can be generated by ion migration, so that the operation reliability of the row control circuit unit 28 can be further improved. .
- the semiconductor film 36 is disposed in a manner straddling a range that overlaps the opening 31 and a range that does not overlap the opening 31.
- the second transparent electrode film 24 is arranged in a solid shape so as to straddle the range overlapping the opening 31 and the range non-overlapping the opening 31.
- the water-proof property (moisture permeability resistance) at the intersection 30a is higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- FIG. 17 A sixth modification of the first embodiment will be described with reference to FIG.
- a semiconductor film 36 is further interposed between the gate insulating film 35 and the protective film 37 that are interposed between the intersecting portions 29 a and 30 a of the wiring portions 29 and 30.
- the first interlayer insulating film 39 and the second interlayer insulating film 41 stacked on the upper layer side of the intersection 30a of the second wiring part 30 with the first wiring part 29.
- the first transparent electrode film 23 is interposed.
- the semiconductor film 36 is disposed between the intersection part 29 a of the first wiring part 29 and the intersection part 30 a of the second wiring part 30.
- the intersecting portion 30 a of the second wiring part 30 is covered with the first transparent electrode film 23 in addition to the first interlayer insulating film 39 and the second interlayer insulating film 41.
- the semiconductor film 36 makes it more difficult for the crossing portions 29a and 30a to be short-circuited by metal ions that can be generated by ion migration, so that the operation reliability of the row control circuit unit 28 can be further improved. .
- the semiconductor film 36 is disposed in a manner straddling a range that overlaps the opening 31 and a range that does not overlap the opening 31.
- the first transparent electrode film 23 is arranged in a solid shape so as to straddle a range that overlaps the opening 31 and a range that does not overlap the opening 31.
- the water-proof property (moisture permeability resistance) at the intersection 30a is higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- a semiconductor film 36 is further interposed between the gate insulating film 35 and the protective film 37 interposed between the intersecting portions 29 a and 30 a of the wiring portions 29 and 30.
- a semiconductor film 36 is further interposed between the gate insulating film 35 and the protective film 37 interposed between the intersecting portions 29 a and 30 a of the wiring portions 29 and 30.
- the first interlayer insulating film 39 and the second interlayer insulating film 41 stacked on the upper layer side of the intersection 30a of the second wiring part 30 with the first wiring part 29.
- the first transparent electrode film 23 is disposed in an intervening manner, and the second transparent electrode film 24 is laminated on the upper layer side of the second interlayer insulating film 41.
- the semiconductor film 36 is disposed between the intersection part 29 a of the first wiring part 29 and the intersection part 30 a of the second wiring part 30.
- the intersection 30a of the second wiring part 30 is covered with the first transparent electrode film 23 and the second transparent electrode film 24 in addition to the first interlayer insulating film 39 and the second interlayer insulating film 41.
- the semiconductor film 36 makes it more difficult for the crossing portions 29a and 30a to be short-circuited by metal ions that can be generated by ion migration, so that the operation reliability of the row control circuit unit 28 can be further improved. .
- the semiconductor film 36 is disposed in a manner straddling a range that overlaps the opening 31 and a range that does not overlap the opening 31.
- the first transparent electrode film 23 and the second transparent electrode film 24 are arranged in a solid shape so as to straddle a range that overlaps the opening 31 and a range that does not overlap the opening 31. Therefore, the waterproofness (moisture permeability resistance) at the intersection part 30a of the second wiring part 30 is higher. As a result, ion migration is less likely to occur at the intersecting portions 29a and 30a of both the wiring portions 29 and 30, so that the operation reliability of the row control circuit portion 28 can be further increased.
- the protective film 37 (see FIG. 8) described in the first embodiment is not interposed between the semiconductor film 136 and the second metal film 138. It is supposed to be configured. Therefore, in the display portion AA of the array substrate 111b, the display portion TFT 117 is formed, and the end portion of the source electrode portion 117b made of the second metal film 138 and the drain electrode portion 117c also made of the second metal film 138 are formed. The end portions are stacked directly on both ends of the channel portion 117d made of the semiconductor film 136 (without the protective film 37), thereby achieving mutual connection. On the other hand, in the non-display portion NAA of the array substrate 111b, as shown in FIGS.
- the row control circuit portion 128 and the first wiring portion 129 made of the first metal film 134 and the second metal are formed. Only the gate insulating film 135 is interposed between the intersections 129a and 130a with the second wiring part 130 made of the film 138.
- the process of patterning the protective film 37 required by the first embodiment can be omitted, so that the tact time can be shortened and the manufacturing equipment can be simplified. It is possible to reduce the manufacturing cost accompanying the downsizing.
- 19 to 21 illustrate a wiring structure in a part of the row control circuit unit 128.
- a wiring structure in a part of the row control circuit unit 128 is illustrated as an example, but a wiring structure different from that in the second embodiment exists in other parts of the row control circuit unit 128. Therefore, a wiring structure in another part of the row control circuit unit 128 will be described in Modifications 1 to 7 shown below.
- the same members as those in the second embodiment are denoted by the same reference numerals as those in the second embodiment, and illustration and description thereof may be omitted.
- Modification 1 of Embodiment 2 will be described with reference to FIG.
- the first interlayer insulating film 139 and the second interlayer insulating film 141 stacked on the upper layer side of the intersection part 130 a of the second wiring part 130 with the first wiring part 129 are formed.
- a second transparent electrode film 124 is further laminated on the upper layer side. That is, the intersecting portion 130 a of the second wiring part 130 is covered with the second transparent electrode film 124 in addition to the first interlayer insulating film 139 and the second interlayer insulating film 141.
- the second transparent electrode film 124 Since the second transparent electrode film 124 is arranged so as to straddle the range where the opening 131 is overlapped and the range where the opening 131 is not overlapped, the second transparent electrode film 124 intersects the second wiring portion 130.
- the waterproofness (moisture permeability resistance) in the part 130a becomes higher. As a result, ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- the first transparent electrode film 123 Since the first transparent electrode film 123 is arranged so as to straddle the range where the opening 131 is overlapped and the range where the opening 131 is not overlapped, the first transparent electrode film 123 intersects the second wiring portion 130.
- the waterproofness (moisture permeability resistance) in the part 130a becomes higher. As a result, ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- first transparent electrode film 123 and the second transparent electrode film 124 are arranged in a solid shape so as to straddle a range overlapping with the opening 131 and a range where the opening 131 is not overlapped.
- the waterproofness (moisture permeability resistance) at the intersection part 130a of the second wiring part 130 is higher.
- ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- a semiconductor film 136 is further stacked on the upper layer side of the gate insulating film 135 interposed between the intersecting portions 129a and 130a of the wiring portions 129 and 130. That is, in addition to the gate insulating film 135, the semiconductor film 136 is interposed between the intersecting portion 129a of the first wiring portion 129 and the intersecting portion 130a of the second wiring portion 130. Thereby, since it is more difficult to short-circuit between the intersections 129a and 130a due to metal ions that can be generated by ion migration, the operation reliability of the row control circuit unit 128 can be further improved.
- the semiconductor film 136 is arranged in such a manner as to straddle a range that overlaps the opening 131 and a range that does not overlap the opening 131.
- the semiconductor film 136 is interposed between the intersecting part 129 a of the first wiring part 129 and the intersecting part 130 a of the second wiring part 130.
- the intersecting portion 130 a of the second wiring part 130 is also covered with the second transparent electrode film 124. Because the semiconductor film 136 makes it difficult for the crossing portions 129a and 130a to be short-circuited by metal ions that can be generated by ion migration, the operation reliability of the row control circuit unit 128 can be made higher. .
- the semiconductor film 136 is arranged in such a manner as to straddle a range that overlaps the opening 131 and a range that does not overlap the opening 131.
- the second transparent electrode film 124 is arranged in a solid shape so as to straddle a range overlapping with the opening 131 and a range non-overlapping with the opening 131.
- the waterproofness (moisture permeability resistance) at the intersection 130a is higher. As a result, ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- Modification 6 of Embodiment 2 A sixth modification of the second embodiment will be described with reference to FIG.
- Modification 6 as shown in FIG. 27, in addition to the semiconductor film 136 being further laminated on the upper layer side of the gate insulating film 135 interposed between the intersecting portions 129a and 130a of the wiring portions 129 and 130,
- a first transparent electrode film 123 is further provided between the first interlayer insulating film 139 and the second interlayer insulating film 141 stacked on the upper layer side of the intersection 130a of the second wiring part 130 with the first wiring part 129. It is arranged in an intervening form.
- the semiconductor film 136 is interposed between the intersecting part 129 a of the first wiring part 129 and the intersecting part 130 a of the second wiring part 130.
- the intersecting portion 130 a of the second wiring part 130 is also covered with the first transparent electrode film 123. Because the semiconductor film 136 makes it difficult for the crossing portions 129a and 130a to be short-circuited by metal ions that can be generated by ion migration, the operation reliability of the row control circuit unit 128 can be made higher. .
- the semiconductor film 136 is arranged in such a manner as to straddle a range that overlaps the opening 131 and a range that does not overlap the opening 131.
- the first transparent electrode film 123 is arranged in a solid shape so as to straddle the range where the opening 131 is overlapped and the range where the opening 131 is not overlapped.
- the waterproofness (moisture permeability resistance) at the intersection 130a is higher. As a result, ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- the semiconductor film 136 is interposed between the intersecting part 129 a of the first wiring part 129 and the intersecting part 130 a of the second wiring part 130.
- the intersecting portion 130 a of the second wiring part 130 is also covered with the first transparent electrode film 123 and the second transparent electrode film 124. Because the semiconductor film 136 makes it difficult for the crossing portions 129a and 130a to be short-circuited by metal ions that can be generated by ion migration, the operation reliability of the row control circuit unit 128 can be made higher. .
- the semiconductor film 136 is arranged in such a manner as to straddle a range that overlaps the opening 131 and a range that does not overlap the opening 131.
- the first transparent electrode film 123 and the second transparent electrode film 124 are arranged in a solid shape so as to straddle a range that overlaps the opening 131 and a range that does not overlap the opening 131. Therefore, the waterproofness (moisture permeability resistance) at the intersecting portion 130a of the second wiring portion 130 is higher. As a result, ion migration is less likely to occur at the intersecting portions 129a and 130a of both wiring portions 129 and 130, so that the operation reliability of the row control circuit portion 128 can be further increased.
- Embodiment 3 of the present invention will be described with reference to FIG.
- movement, and effect as above-mentioned Embodiment 1 is abbreviate
- the opening 231 according to the present embodiment has a smaller formation range in a plan view than the opening 31 described in the first embodiment.
- the first opening portion 231A forming the opening portion 231 is provided such that the opening edge thereof overlaps with the outer edge of each of the intersection portions 229a and 230a included in the first intersection portion group CG1 in a plan view. Yes. That is, the first opening 231A is formed over a range extending over a plurality (four) of the intersecting portions 229a and 230a included in the first intersecting portion group CG1, so that the opening edge defines the intersecting portions 229a and 230a.
- the second opening 231 ⁇ / b> B is provided such that the opening edge thereof overlaps with the outer edge of each of the intersecting sites 229 a and 230 a included in the second intersecting site group CG ⁇ b> 2 in a plan view. That is, the second opening 231B is formed over a range extending over a plurality (five) of the intersection portions 229a and 230a included in the second intersection portion group CG2, so that the opening edge defines the intersection portions 229a and 230a.
- the formation range is not extended to the area
- the occurrence of ion migration is preferably suppressed, and a short circuit is unlikely to occur between the intersecting portion 229a of the first wiring portion 229 and the intersecting portion 230a of the second wiring portion 230. it can.
- Embodiment 4 A fourth embodiment of the present invention will be described with reference to FIG. In this Embodiment 4, what changed the formation range seen in the plane in the opening part 331 from above-mentioned Embodiment 1 is shown. In addition, the overlapping description about the same structure, operation
- the opening 331 has a wider range of formation in plan view than the opening 31 described in the first embodiment. Specifically, the opening 331 is formed over a range spanning the intersecting sites 329a and 330a included in the first intersecting site group CG1 and the intersecting sites 329a and 330a included in the second intersecting site group CG2. Accordingly, the opening edge of the opening 331 is arranged so as to collectively surround the intersection sites 329a and 330a included in the first intersection site group CG1 and the intersection sites 329a and 330a included in the second intersection site group CG2. ing.
- the arrangement interval P4 between the first intersection part group CG1 and the second intersection part group CG2 in the X-axis direction is the same as that of the first intersection part group CG1 in the X-axis direction described in the first embodiment. It is relatively narrower than the arrangement interval P2 (see FIG. 9) between the two intersecting site groups CG2. In such a configuration, if the organic insulating film is left between the first intersecting site group CG1 and the second intersecting site group CG2 in the X-axis direction as in the first embodiment described above (see FIG. 9).
- the formation range of the opening 331 is configured to straddle the first crossing site group CG1 and the second crossing site group CG2, so that moisture from the organic insulating film moves to the crossing sites 329a and 330a. It can be suitably avoided.
- the occurrence of ion migration can be suitably suppressed, and a short circuit can be hardly caused between the intersecting portion 329a of the first wiring portion 329 and the intersecting portion 330a of the second wiring portion 330.
- a fifth embodiment of the present invention will be described with reference to FIG.
- a change in the formation range viewed from the plane in the opening 431 from the first embodiment is shown.
- movement, and effect as above-mentioned Embodiment 1 is abbreviate
- the opening 431 is arranged separately for each of the intersecting portions 429a and 430a arranged along the X-axis direction. Specifically, each opening 431 is formed so as to open over a range extending over a plurality (two) of intersecting portions 429a and 430a aligned along the Y-axis direction and over a wider range than those intersecting portions 429a and 430a. . In addition, about the opening part 431 located in the right end shown in FIG. 31, it forms so that it may open over a wide range rather than one intersection part 429a and 430a one by one.
- the partitioning portion SP is arranged in the intersection portions 429a, 430a.
- the relatively narrow arrangement interval P5 between the intersecting portions 429a and 430a in the X axis direction is a relatively narrow arrangement between the intersecting portions 29a and 30a in the X axis direction described in the first embodiment. It is relatively wider than the interval P1 (see FIG. 9).
- the organic insulating film is excessively removed.
- the flattening function and the protective function may be impaired.
- the partitioning portion SP that is a part of the organic insulating film is left between the intersecting portions 429a and 430a arranged in the X-axis direction, so that the planarization function and the protection function can be suitably maintained.
- the first opening 531A and the second opening 531B forming the opening 531 according to the present embodiment are arranged separately for each of the intersecting portions 529a and 530a arranged along the Y-axis direction. .
- the first opening 531A and the second opening 531B extend over a range extending over a plurality of (two or three) intersections 529a and 530a arranged along the X-axis direction and from the intersections 529a and 530a. Is also formed to open over a wide range.
- the organic insulating film there are left portions SP that partition between the first openings 531A and the second openings 531B that are adjacent in the Y-axis direction when viewed in a plan view.
- the arrangement interval P6 between the intersecting portions 529a and 530a in the Y-axis direction is the arrangement interval P3 between the intersecting portions 29a and 30a in the Y-axis direction described in the first embodiment (see FIG. 9). It is relatively wider than.
- the organic insulating film is excessively removed.
- the flattening function and the protective function may be impaired.
- the partitioning portion SP that is a part of the organic insulating film is left between the intersecting portions 529a and 530a arranged in the Y-axis direction, so that the planarization function and the protection function can be suitably maintained.
- Embodiment 7 A seventh embodiment of the present invention will be described with reference to FIG. In this Embodiment 7, what changed the formation range seen in the plane in the opening part 631 from above-mentioned Embodiment 6 is shown. In addition, the overlapping description about the same structure, operation
- the opening 631 according to the present embodiment is arranged separately for each of the intersecting portions 629a and 630a arranged along the Y-axis direction, and in addition, the first intersecting portion in the X-axis direction.
- the crossing portions 629a and 630a included in the group CG1 and the crossing portions 629a and 630a included in the second crossing portion group CG2 are formed over a range. Therefore, the opening edge of each opening 631 is arranged so as to collectively surround the intersection sites 629a and 630a included in the first intersection site group CG1 and the intersection sites 629a and 630a included in the second intersection site group CG2. Has been.
- the arrangement interval P4 between the first intersecting site group CG1 and the second intersecting site group CG2 in the X-axis direction is the same as that in the above-described fourth embodiment (see FIG. 30).
- the organic insulating film is left between the first intersecting site group CG1 and the second intersecting site group CG2 in the X-axis direction as in the first embodiment described above (see FIG. 9).
- the planarization function and the protective function can be sufficiently exhibited, but also there is a concern that moisture from the remaining organic insulating film may move to the intersections 629a and 630a. .
- each opening 631 extends over the first crossing site group CG1 and the second crossing site group CG2, so that moisture from the organic insulating film moves to the crossing sites 629a and 630a. Can be suitably avoided. As described above, the occurrence of ion migration can be suitably suppressed, and a short circuit can be hardly caused between the intersecting portion 629a of the first wiring portion 629 and the intersecting portion 630a of the second wiring portion 630.
- the opening 731 is individually arranged for each of the intersecting portions 729a and 730a arranged along the X-axis direction and the Y-axis direction. Specifically, since the opening 731 is formed so as to open over a wider range than the range overlapping with the intersections 729a and 730a, the opening 731 does not extend over the plurality of intersections 729a and 730a. Accordingly, the organic insulating film is left with a portion SP that partitions the openings 731 adjacent to each other in the X-axis direction and the Y-axis direction when viewed in a plan view.
- the organic insulating film May be removed excessively, and the planarization function and the protection function may be impaired.
- the partitioning portion SP which is a part of the organic insulating film, is left between the intersecting portions 729a and 730a arranged in the X-axis direction and the Y-axis direction, so that the planarization function and the protection function are preferably maintained. be able to.
- the present invention is not limited to the embodiments described with reference to the above description and drawings.
- the following embodiments are also included in the technical scope of the present invention.
- the arrangement interval can be changed as appropriate. Specifically, for example, an arrangement in which three or more first wiring parts are arranged along the Y-axis direction, or an arrangement in which six or more or four or less second wiring parts are arranged along the X-axis direction may be used. Is possible. It is also possible to adopt a configuration in which only one of the first wiring part and the second wiring part is arranged, whereas a plurality of the other are arranged.
- the specific size of the formation range viewed in the plane of the opening can be changed as appropriate.
- the number of crossing sites spanned by one opening (the number of crossing sites surrounded by the opening edge of one opening) can be changed as appropriate.
- the opening portion is configured to open over a range extending over three or more intersecting sites arranged along the Y-axis direction, or opened over a range extending over six or more intersecting sites aligned along the X-axis direction. It is possible to make it the structure to do.
- between crossing parts between 1st wiring parts, between 2nd wiring parts
- the first crossing site group and the second crossing site group are arranged adjacent to each other in the X-axis direction.
- the first wiring portion extends in the Y-axis direction. 3 or more are arranged side by side along the Y-axis direction in the first wiring portion so that there are two arrangement intervals in the Y-axis direction, and the first crossing site group and the second crossing site group are in the Y-axis direction.
- the present invention can also be applied to a configuration arranged in an adjacent form. In that case, when the configuration of the first embodiment is applied, the first opening that opens over the plurality of intersections included in the first intersection group and the plurality of intersections included in the second intersection are spanned.
- the second openings that are open in a shape are arranged with a relatively wide arrangement interval in the Y-axis direction.
- the configuration described in Embodiments 2 to 8 can be appropriately combined with the configuration in which the first crossing site group and the second crossing site group are arranged adjacent to each other in the Y-axis direction. .
- the first wiring portion and the second wiring portion are in the Y-axis direction and X-direction, respectively.
- Three or more pieces are arranged side by side along the axial direction, and there are two arrangement intervals in the Y-axis direction and the X-axis direction in the first wiring portion and the second wiring portion.
- the present invention can also be applied to a configuration in which two crossing sites are adjacent in the Y-axis direction and two crossing sites are adjacent in the X-axis direction.
- the configuration described in Embodiments 1 to 8 can be appropriately combined with this configuration.
- the first interlayer insulating film and the second interlayer insulating film are formed over at least the range overlapping with the opening, but the first interlayer insulating film and the second interlayer insulating film are shown. Or an opening that communicates with the opening of the organic insulating film.
- each opening is formed individually for each intersection, and each opening is formed only in a range that overlaps each intersection. Will be.
- the wiring structure of the row control circuit unit arranged in the non-display part of the array substrate has been exemplified.
- the wiring structure of the column control circuit unit arranged in the non-display part of the array substrate The present invention is also applicable in the same manner.
- the present invention can be applied to such a circuit portion.
- the arrangement and the number of row control circuit units in the array substrate can be changed as appropriate.
- the row control circuit unit is arranged adjacent to the right side shown in FIG. 5 with respect to the display unit in the array substrate, or a pair of row control circuit units are arranged at positions where the display unit is sandwiched on the left and right in the array substrate.
- the present invention is also included in the present invention.
- the gate insulating film is a single-layer film.
- films made of different materials can be stacked.
- the gate insulating film is, for example, a stacked structure of a lower gate insulating film made of silicon nitride (SiNx) and an upper gate insulating film made of silicon oxide (SiO 2), that is, a first interlayer insulating film is stacked vertically.
- SiNx silicon nitride
- SiO 2 silicon oxide
- an In—Ga—Zn—O-based semiconductor is exemplified as the oxide semiconductor used for the semiconductor film, but other oxide semiconductors may be used.
- Zn—O based semiconductor ZnO
- In—Zn—O based semiconductor IZO (registered trademark)
- ZTO Zn—Ti—O based semiconductor
- Cd—Ge—O based semiconductor Cd—Pb—O based
- It may contain a semiconductor, CdO (cadmium oxide), Mg—Zn—O based semiconductor, In—Sn—Zn—O based semiconductor (eg In 2 O 3 —SnO 2 —ZnO), In—Ga—Sn—O based semiconductor, etc.
- amorphous silicon or polycrystalline silicon can be used as the material of the semiconductor film. In the case of using polycrystalline silicon, it is preferable to use CG silicon (Continuous GrainconSilicon).
- first metal film and the second metal film are formed of a laminated film of titanium (Ti) and copper (Cu) is shown.
- Ti titanium
- Cu copper
- molybdenum (Mo ), Molybdenum nitride (MoN), titanium nitride (TiN), tungsten (W), niobium (Nb), molybdenum-titanium alloy (MoTi), molybdenum-tungsten alloy (MoW), or the like can also be used.
- Mo molybdenum
- MoN Molybdenum nitride
- TiN titanium nitride
- tungsten (W) niobium
- MoTi molybdenum-titanium alloy
- MoW molybdenum-tungsten alloy
- the liquid crystal panel in which the operation mode is set to the FFS mode is illustrated, but other than that, there are other modes such as an IPS (In-Plane Switching) mode and a VA (Vertical Alignment) mode.
- the present invention can also be applied to a liquid crystal panel in the operation mode.
- the common electrode portion (counter electrode portion) may be formed on the CF substrate side instead of the array substrate.
- the liquid crystal panel has a display unit that is arranged in the center with respect to the short side direction but is arranged to be offset toward one end side with respect to the long side direction.
- the display unit is arranged in the center in the long side direction, but the display unit is arranged to be shifted to one end side in the short side direction.
- the present invention includes a liquid crystal panel in which the display unit is arranged so as to be offset toward one end in the long side direction and the short side direction.
- a liquid crystal panel in which the display unit is arranged at the center in the long side direction and the short side direction is also included in the present invention.
- the driver is mounted directly on the array substrate by COG, but the driver is mounted on a flexible substrate connected to the array substrate via the ACF. It is included in the present invention.
- the present invention includes a configuration in which a functional panel such as a touch panel or a parallax barrier panel (switch liquid crystal panel) is attached to the liquid crystal panel described in each embodiment.
- a liquid crystal panel in which a touch panel pattern is directly formed is also included in the present invention.
- the edge light type is exemplified as the backlight device included in the liquid crystal display device, but the present invention includes a backlight device of a direct type.
- a transmissive liquid crystal display device including a backlight device that is an external light source is exemplified.
- the present invention is a reflective liquid crystal display device that performs display using external light.
- the backlight device can be omitted.
- the present invention can also be applied to a transflective liquid crystal display device.
- a TFT is used as a switching element of a liquid crystal display device.
- the present invention can be applied to a liquid crystal display device for monochrome display in addition to a liquid crystal display device for color display.
- the liquid crystal display device using the liquid crystal panel as the display panel has been exemplified.
- the display device using another type of display panel PDP (plasma display panel), organic EL panel, or the like).
- the present invention is applicable. In that case, the backlight device can be omitted.
- the gate electrode portion is branched from the gate wiring in the display portion TFT, and the channel portion extends so as not to overlap with the gate electrode portion in a plan view.
- a configuration having a portion is shown, it is also possible to adopt an arrangement configuration in which the entire region of the channel portion overlaps the gate electrode portion having a structure branched from the gate wiring in a plan view.
- liquid crystal panels used for various electronic devices such as electronic ink paper are exemplified, but the present invention is also applicable to liquid crystal panels classified into medium-sized or large-sized (super-large) screens having a screen size of, for example, 20 inches to 90 inches. Applicable. In that case, the liquid crystal panel can be used for an electronic device such as a television receiver, an electronic signboard (digital signage), or an electronic blackboard.
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Abstract
Description
上記した特許文献1に記載された液晶パネルのアレイ基板には、画像を表示する表示部の周囲に配された非表示部に、ゲートドライバ回路などの回路部がモノリシックに形成されている。この回路部は、表示部内に配されたTFTに比べると、シール部の近くに配されているため、外部に存在する水分がシール部を透過した場合には、その水分の影響を受け易くなっている。具体的には、例えば回路部において絶縁膜を介して互いに交差する配線部の交差部位では、通電に伴って電界が生じるため、上記交差部位において水分の影響によって金属イオンが生じると、その金属イオンが電界に引っ張られて移動する、いわゆるイオンマイグレーション(エレクトロケミカルマイグレーション)が発生するおそれがある。そうなると、例えば配線部の交差部位間に短絡が生じる可能性があり、回路部の動作信頼性が悪化する可能性があった。特に、例えば狭額縁化された液晶パネルにおいては、非表示部及び回路部の配置領域も狭くなっているため、配線部の分布密度が高く、それに起因して配線部の交差部位にイオンマイグレーションがより生じ易くなる傾向となっていた。
本発明の表示装置は、画像を表示可能とされ且つ中央側に配される表示部、及び前記表示部を取り囲む形で外周側に配される非表示部を有する基板と、前記非表示部に配される回路部と、前記回路部を構成する第1配線部と、前記回路部を構成するとともに、前記第1配線部に対して交差する形でその上層側に配される第2配線部と、前記第1配線部と前記第2配線部との間に介在する形で配される絶縁膜と、前記第2配線部の上層側に配されるとともに、少なくとも前記第1配線部と前記第2配線部との交差部位に対して重畳する範囲に開口する開口部を有し且つ有機樹脂材料からなる有機絶縁膜と、を備える。
(1)前記有機絶縁膜は、前記開口部が、少なくとも前記交差部位と重畳する範囲よりも広範囲にわたって開口するよう設けられている。このようにすれば、仮に、開口部が両配線部の交差部位と重畳する範囲にのみ開口する形態とされた場合に比べると、有機絶縁膜における開口部の開口縁から両配線部の交差部位までの距離がより長く確保されるので、有機絶縁膜に含まれる水分が両配線部の交差部位により影響し難くなる。しかも、製造上の理由により、有機絶縁膜における開口部の形成位置にずれが生じた場合であっても、そのずれを吸収することができるので、有機絶縁膜が交差部位と重畳する事態が生じ難くなるとともに開口部が両配線部の交差部位に対して重畳する範囲に開口する配置となる確実性が高いものとなる。これにより、両配線部の交差部位にイオンマイグレーションがより生じ難くなるので、回路部の動作信頼性をより高いものとすることができる。
本発明によれば、動作信頼性を向上させることができる。
本発明の実施形態1を図1から図11によって説明する。本実施形態では、液晶表示装置10について例示する。なお、各図面の一部にはX軸、Y軸及びZ軸を示しており、各軸方向が各図面で示した方向となるように描かれている。また、上下方向については、図2から図4などを基準とし、且つ同図上側を表側とするとともに同図下側を裏側とする。
実施形態1の変形例1について図12を用いて説明する。この変形例1では、図12に示すように、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39及び第2層間絶縁膜41の上層側に、さらに第2透明電極膜24が積層されている。つまり、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第2透明電極膜24によっても覆われている。第2透明電極膜24は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
実施形態1の変形例2について図13を用いて説明する。この変形例2では、図13に示すように、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39と第2層間絶縁膜41との間に、さらに第1透明電極膜23が介在する形で配されている。つまり、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第1透明電極膜23によっても覆われている。第1透明電極膜23は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
実施形態1の変形例3について図14を用いて説明する。この変形例3では、図14に示すように、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39と第2層間絶縁膜41との間に第1透明電極膜23が介在する形で配されるとともに、第2層間絶縁膜41の上層側に第2透明電極膜24が積層された構成とされる。つまり、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第1透明電極膜23及び第2透明電極膜24によっても覆われている。第1透明電極膜23及び第2透明電極膜24は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
実施形態1の変形例4について図15を用いて説明する。この変形例4では、図15に示すように、両配線部29,30の交差部位29a,30aの間に介在するゲート絶縁膜35と保護膜37との間に、さらに半導体膜36が介在する形で配されている。つまり、第1配線部29の交差部位29aと、第2配線部30の交差部位30aとの間には、ゲート絶縁膜35及び保護膜37に加えて半導体膜36が介在する形で配されている。これにより、両交差部位29a,30a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部28の動作信頼性をより高いものとすることができる。また、半導体膜36は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形で配されている。
実施形態1の変形例5について図16を用いて説明する。この変形例5では、図16に示すように、両配線部29,30の交差部位29a,30aの間に介在するゲート絶縁膜35と保護膜37との間に、さらに半導体膜36が介在する形で配されているのに加え、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39及び第2層間絶縁膜41の上層側に、さらに第2透明電極膜24が積層されている。つまり、第1配線部29の交差部位29aと、第2配線部30の交差部位30aとの間には、ゲート絶縁膜35及び保護膜37に加えて半導体膜36が介在する形で配されているのに対し、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第2透明電極膜24によっても覆われている。半導体膜36により、両交差部位29a,30a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部28の動作信頼性をより高いものとすることができる。また、半導体膜36は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形で配されている。一方、第2透明電極膜24は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
実施形態1の変形例6について図17を用いて説明する。この変形例6では、図17に示すように、両配線部29,30の交差部位29a,30aの間に介在するゲート絶縁膜35と保護膜37との間に、さらに半導体膜36が介在する形で配されているのに加え、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39と第2層間絶縁膜41との間に、さらに第1透明電極膜23が介在する形で配されている。つまり、第1配線部29の交差部位29aと、第2配線部30の交差部位30aとの間には、ゲート絶縁膜35及び保護膜37に加えて半導体膜36が介在する形で配されているのに対し、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第1透明電極膜23によっても覆われている。半導体膜36により、両交差部位29a,30a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部28の動作信頼性をより高いものとすることができる。また、半導体膜36は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形で配されている。一方、第1透明電極膜23は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
実施形態1の変形例7について図18を用いて説明する。この変形例7では、図18に示すように、両配線部29,30の交差部位29a,30aの間に介在するゲート絶縁膜35と保護膜37との間に、さらに半導体膜36が介在する形で配されているのに加え、第2配線部30における第1配線部29との交差部位30aの上層側に積層された第1層間絶縁膜39と第2層間絶縁膜41との間に第1透明電極膜23が介在する形で配されるとともに、第2層間絶縁膜41の上層側に第2透明電極膜24が積層された構成とされる。つまり、第1配線部29の交差部位29aと、第2配線部30の交差部位30aとの間には、ゲート絶縁膜35及び保護膜37に加えて半導体膜36が介在する形で配されているのに対し、第2配線部30の交差部位30aは、第1層間絶縁膜39及び第2層間絶縁膜41に加えて第1透明電極膜23及び第2透明電極膜24によっても覆われている。半導体膜36により、両交差部位29a,30a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部28の動作信頼性をより高いものとすることができる。また、半導体膜36は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形で配されている。一方、第1透明電極膜23及び第2透明電極膜24は、開口部31と重畳する範囲と、開口部31とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部30の交差部位30aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部29,30の交差部位29a,30aにイオンマイグレーションがより生じ難くなるので、行制御回路部28の動作信頼性をより高いものとすることができる。
本発明の実施形態2を図19から図21によって説明する。この実施形態2では、上記した実施形態1に記載した保護膜37を省略したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
実施形態2の変形例1について図22を用いて説明する。この変形例1では、図22に示すように、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139及び第2層間絶縁膜141の上層側に、さらに第2透明電極膜124が積層されている。つまり、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第2透明電極膜124によっても覆われている。第2透明電極膜124は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
実施形態2の変形例2について図23を用いて説明する。この変形例2では、図23に示すように、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139と第2層間絶縁膜141との間に、さらに第1透明電極膜123が介在する形で配されている。つまり、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第1透明電極膜123によっても覆われている。第1透明電極膜123は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
実施形態2の変形例3について図24を用いて説明する。この変形例3では、図24に示すように、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139と第2層間絶縁膜141との間に第1透明電極膜123が介在する形で配されるとともに、第2層間絶縁膜141の上層側に第2透明電極膜124が積層された構成とされる。つまり、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第1透明電極膜123及び第2透明電極膜124によっても覆われている。第1透明電極膜123及び第2透明電極膜124は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
実施形態2の変形例4について図25を用いて説明する。この変形例4では、図25に示すように、両配線部129,130の交差部位129a,130aの間に介在するゲート絶縁膜135の上層側に、さらに半導体膜136が積層されている。つまり、第1配線部129の交差部位129aと、第2配線部130の交差部位130aとの間には、ゲート絶縁膜135に加えて半導体膜136が介在する形で配されている。これにより、両交差部位129a,130a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部128の動作信頼性をより高いものとすることができる。また、半導体膜136は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形で配されている。
実施形態2の変形例5について図26を用いて説明する。この変形例5では、図26に示すように、両配線部129,130の交差部位129a,130aの間に介在するゲート絶縁膜135の上層側に、さらに半導体膜136が積層されるのに加え、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139及び第2層間絶縁膜141の上層側に、さらに第2透明電極膜124が積層されている。つまり、第1配線部129の交差部位129aと、第2配線部130の交差部位130aとの間には、ゲート絶縁膜135に加えて半導体膜136が介在する形で配されているのに対し、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第2透明電極膜124によっても覆われている。半導体膜136により、両交差部位129a,130a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部128の動作信頼性をより高いものとすることができる。また、半導体膜136は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形で配されている。一方、第2透明電極膜124は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
実施形態2の変形例6について図27を用いて説明する。この変形例6では、図27に示すように、両配線部129,130の交差部位129a,130aの間に介在するゲート絶縁膜135の上層側に、さらに半導体膜136が積層されるのに加え、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139と第2層間絶縁膜141との間に、さらに第1透明電極膜123が介在する形で配されている。つまり、第1配線部129の交差部位129aと、第2配線部130の交差部位130aとの間には、ゲート絶縁膜135に加えて半導体膜136が介在する形で配されているのに対し、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第1透明電極膜123によっても覆われている。半導体膜136により、両交差部位129a,130a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部128の動作信頼性をより高いものとすることができる。また、半導体膜136は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形で配されている。一方、第1透明電極膜123は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
実施形態2の変形例7について図28を用いて説明する。この変形例7では、図28に示すように、両配線部129,130の交差部位129a,130aの間に介在するゲート絶縁膜135の上層側に、さらに半導体膜136が積層されるのに加え、第2配線部130における第1配線部129との交差部位130aの上層側に積層された第1層間絶縁膜139と第2層間絶縁膜141との間に第1透明電極膜123が介在する形で配されるとともに、第2層間絶縁膜141の上層側に第2透明電極膜124が積層された構成とされる。つまり、第1配線部129の交差部位129aと、第2配線部130の交差部位130aとの間には、ゲート絶縁膜135に加えて半導体膜136が介在する形で配されているのに対し、第2配線部130の交差部位130aは、第1層間絶縁膜139及び第2層間絶縁膜141に加えて第1透明電極膜123及び第2透明電極膜124によっても覆われている。半導体膜136により、両交差部位129a,130a間がイオンマイグレーションに伴って生じ得る金属イオンによってより短絡され難くなっているので、行制御回路部128の動作信頼性をより高いものとすることができる。また、半導体膜136は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形で配されている。一方、第1透明電極膜123及び第2透明電極膜124は、開口部131と重畳する範囲と、開口部131とは非重畳とされる範囲とに跨る形でいわばベタ状に配されているので、第2配線部130の交差部位130aにおける防水性(透湿耐性)がより高いものとなる。これにより、両配線部129,130の交差部位129a,130aにイオンマイグレーションがより生じ難くなるので、行制御回路部128の動作信頼性をより高いものとすることができる。
本発明の実施形態3を図29によって説明する。この実施形態3では、上記した実施形態1から開口部231における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
本発明の実施形態4を図30によって説明する。この実施形態4では、上記した実施形態1から開口部331における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
本発明の実施形態5を図31によって説明する。この実施形態5では、上記した実施形態1から開口部431における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
本発明の実施形態6を図32によって説明する。この実施形態6では、上記した実施形態1から開口部531における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
本発明の実施形態7を図33によって説明する。この実施形態7では、上記した実施形態6から開口部631における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態6と同様の構造、作用及び効果について重複する説明は省略する。
本発明の実施形態8を図34によって説明する。この実施形態8では、上記した実施形態1から開口部731における平面に視た形成範囲を変更したものを示す。なお、上記した実施形態1と同様の構造、作用及び効果について重複する説明は省略する。
本発明は上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も本発明の技術的範囲に含まれる。
(1)上記した各実施形態以外にも、第1配線部及び第2配線部におけるX軸方向及びY軸方向についての配列数、交差部位間(第1配線部間、第2配線部間)の配列間隔などは適宜に変更可能である。具体的には、例えば第1配線部がY軸方向に沿って3本以上並ぶ配列としたり、第2配線部がX軸方向に沿って6本以上または4本以下並ぶ配列としたりすることが可能である。また、第1配線部と第2配線部とのいずれか一方が1本のみ配されるのに対し、他方が複数本配される構成とすることも可能である。
Claims (12)
- 画像を表示可能とされ且つ中央側に配される表示部、及び前記表示部を取り囲む形で外周側に配される非表示部を有する基板と、
前記非表示部に配される回路部と、
前記回路部を構成する第1配線部と、
前記回路部を構成するとともに、前記第1配線部に対して交差する形でその上層側に配される第2配線部と、
前記第1配線部と前記第2配線部との間に介在する形で配される絶縁膜と、
前記第2配線部の上層側に配されるとともに、少なくとも前記第1配線部と前記第2配線部との交差部位に対して重畳する範囲に開口する開口部を有し且つ有機樹脂材料からなる有機絶縁膜と、を備える表示装置。 - 前記有機絶縁膜は、前記開口部が、少なくとも前記交差部位と重畳する範囲よりも広範囲にわたって開口するよう設けられている請求項1記載の表示装置。
- 前記第1配線部及び前記第2配線部は、前記交差部位が間隔を空けて複数並ぶよう、少なくともいずれか一方が複数本配されており、
前記有機絶縁膜は、前記開口部が、少なくとも複数の前記交差部位に跨る範囲にわたって開口するよう設けられている請求項1または請求項2記載の表示装置。 - 前記第1配線部及び前記第2配線部は、前記交差部位が互いに異なる間隔を空けて少なくとも3つ並ぶよう、少なくともいずれか一方が複数本配されており、
前記有機絶縁膜は、前記開口部として、少なくとも前記間隔が相対的に小さな2つの前記交差部位に跨る範囲にわたって開口する第1開口部と、少なくとも前記間隔が相対的に大きな2つの前記交差部位のうち前記第1開口部とは非重畳となる前記交差部位と重畳する範囲に開口する第2開口部とを少なくとも有するよう設けられている請求項1から請求項3のいずれか1項に記載の表示装置。 - 前記基板と対向状をなす対向基板と、前記基板と前記対向基板との間に挟持される液晶と、前記基板と前記対向基板との間に介在するとともに前記液晶を取り囲む形で配されて前記液晶を封止するシール部と、を備えており、
前記回路部は、前記表示部に比べて前記シール部の近くに配されている請求項1から請求項4のいずれか1項に記載の表示装置。 - 前記有機絶縁膜と前記第2配線部との間に介在し且つ少なくとも前記開口部と重畳する範囲に配される第1層間絶縁膜を備える請求項1から請求項5のいずれか1項に記載の表示装置。
- 前記有機絶縁膜の上層側に配されるとともに、少なくとも前記開口部と重畳する範囲に配される透明電極膜を備える請求項6記載の表示装置。
- 前記透明電極膜には、相対的に下層側に配される第1透明電極膜と、相対的に上層側に配される第2透明電極膜とが含まれており、
前記第1透明電極膜と前記第2透明電極膜との間に介在し且つ少なくとも前記開口部と重畳する範囲に配される第2層間絶縁膜を備える請求項7記載の表示装置。 - 前記第2配線部と前記絶縁膜との間に介在し且つ少なくとも前記開口部と重畳する範囲に配される保護膜を備える請求項1から請求項8のいずれか1項に記載の表示装置。
- 前記第1配線部及び前記第2配線部は、少なくとも銅を含有している請求項1から請求項9のいずれか1項に記載の表示装置。
- 前記表示部には、半導体膜に酸化物半導体を用いた薄膜トランジスタが設けられており、
前記回路部には、前記半導体膜が前記第2配線部と前記絶縁膜との間に介在する形で設けられている請求項1から請求項10のいずれか1項に記載の表示装置。 - 前記酸化物半導体は、インジウム(In)、ガリウム(Ga)、亜鉛(Zn)、酸素(O)を含んでいる請求項11記載の表示装置。
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| EP2857894A4 (en) * | 2012-05-25 | 2015-06-17 | Sharp Kk | LIQUID CRYSTAL DISPLAY DEVICE |
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- 2014-07-30 JP JP2015549008A patent/JP6193401B2/ja active Active
- 2014-07-30 CN CN201480063249.5A patent/CN105793772B/zh active Active
- 2014-07-30 US US15/035,263 patent/US9971215B2/en active Active
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| JP2010134428A (ja) * | 2008-12-02 | 2010-06-17 | Samsung Electronics Co Ltd | 液晶表示装置及びその製造方法 |
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| US11927860B2 (en) | 2021-04-23 | 2024-03-12 | Sharp Display Technology Corporation | Active matrix substrate, method for manufacturing active matrix substrate, and liquid crystal display device with touch sensor using active matrix substrate |
| JP2024001482A (ja) * | 2022-06-22 | 2024-01-10 | シャープディスプレイテクノロジー株式会社 | アクティブマトリクス基板および表示装置 |
| JP7461988B2 (ja) | 2022-06-22 | 2024-04-04 | シャープディスプレイテクノロジー株式会社 | アクティブマトリクス基板および表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105793772A (zh) | 2016-07-20 |
| JPWO2015075972A1 (ja) | 2017-03-16 |
| US20160291366A1 (en) | 2016-10-06 |
| US9971215B2 (en) | 2018-05-15 |
| CN105793772B (zh) | 2019-03-12 |
| JP6193401B2 (ja) | 2017-09-06 |
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