WO2014112795A1 - Back pressure blocking sliding valve - Google Patents

Abstract

The present invention relates to a back pressure blocking valve for quickly blocking an abrupt inflow of air or a back flow of a fluid in a piping system for maintaining a constant pressure and the forward flow of a fluid such as a gas in a process for manufacturing a semiconductor, an LCD, or a chemical, and more particularly to a back pressure blocking sliding valve comprising: a valve body consisting of a fluid inlet part, a fluid outlet part, and a fluid passing cavity; a moving body with an upper part having a blocking plate for blocking the flow of the fluid under a back pressure, the moving body being horizontally moved into the fluid passing cavity when blocking the back pressure; and a moving body shift means for horizontally shifting the moving body, wherein the fluid passing cavity of the valve is usually not blocked so as to normally flow the fluid, but when a back pressure is generated in the piping system, the moving body is horizontally and smoothly shifted to the blocking position so as to make the blocking plate of the moving body block the backflow of the fluid, even in a process generating powder.

Description

Sliding back pressure shutoff valve

According to the present invention, a sudden atmospheric inflow or a reverse flow of a fluid may occur in a piping system for maintaining a constant pressure applied to a semiconductor manufacturing process such as a semiconductor and an LCD or a chemical product manufacturing process, or for maintaining a flow of a fluid such as a gas in a forward direction. The present invention relates to a back pressure shut-off valve that can be quickly shut off and prevented. More specifically, a valve body composed of a fluid inlet, a fluid outlet, and a fluid passage space, and a shutoff that can block the flow of the fluid at the time of back pressure. It consists of a conveying body horizontally moved to the fluid passage space when the back pressure is blocked while the plate is placed on the upper portion, and a conveying body moving means for moving the conveying body horizontally. Like this, if a back pressure occurs in the pipe without disturbing the flow of the fluid, To body blocking position and moves horizontally in the closed position relates to the sliding back-pressure shut-off valve that is performing well in the process in which, by the blocking the flow of fluids while blocking the support plate is placed on the conveying member, the powder occurs.

In the semiconductor manufacturing line, etc., vacuum equipment is used. At this time, a vacuum pump is used to create a vacuum. The semiconductor manufacturing equipment performs a unit process such as deposition or etching in a vacuum state (or a very low atmospheric pressure state), and when the vacuum pump suddenly fails or stops operation, atmospheric pressure is reversed into the vacuum facility, thereby Particles are generated in the existing products, which causes great damage to the unit process operation.

In order to prevent this, a back pressure shutoff valve is used between the chamber and the vacuum pump. In the conventional back pressure shutoff valve, as described in Patent Registration No. 706661, a blocking plate for back pressure shutoff is operated by gravity, and the flow path is 1 It has a meander shape that is bent more than once, so there is a problem that it is very vulnerable when an instantaneous increase in flow rate and fluid flow occur.

In addition, Chemical Vapor Deposition (CVD) is a process of coating a thin film on a wafer by injecting a reaction gas in a vacuum state, in which silicon dioxide (SiO 2) and A lot of particulate matter such as alumina (Al2O3) (hereinafter referred to as 'powder') is generated, and since the blocking plate of the back pressure shutoff valve is always exposed to the flow path, deformation of the blocking plate is prevented by the powder. This results in problems with repeatability and accurate sealing at the correct pressure at shutoff.

In addition, when the powder is laminated on the blocking plate there is a problem that the powder is present between the blocking plate and the sealing material when the reverse pressure is blocked, and this prevents accurate sealing and leakage occurs to prevent the reverse pressure blocking function. .

In addition, the powder laminated on the blocking plate brings a change in the mass of the blocking plate, this phenomenon may increase the rising pressure of the blocking plate at the time of blocking, so that the blocking plate may not be supported, thereby causing a serious problem that cannot block back pressure. May be caused.

In addition, general gate valves that are commonly used cannot perform the function of reverse pressure blocking, and because of their structure, they do not have a meander shape in which the flow path is bent, so they are not susceptible to instantaneous increase in flow rate and flow of fluid, When the powder is laminated on the inner driving unit and the blocking plate, the powder is present between the blocking plate and the sealing material, and thus, there is a problem in that the sealing cannot be performed because the sealing cannot be performed accurately.

The present invention was devised to solve the conventional problems as described above, and when a sudden inflow or reverse flow of a fluid occurs in a piping system applied to a semiconductor manufacturing process or a chemical product manufacturing process such as a semiconductor and an LCD, etc. In the back pressure shutoff valve which can be blocked and prevented, it is equipped with a conveying body having a blocking plate.Therefore, there is no obstacle in the fluid passage space of the valve so that it does not obstruct the flow of fluid like a straight pipe, but when the back pressure occurs in the pipe, the transfer When the sieve is moved horizontally to the blocking position and the blocking plate placed on the conveying body is lifted at the blocking position to block the flow of fluid, a process that generates a lot of powder and a process requiring an increase in pumping speed, when installing a valve Even where it could not be applied because of the decrease in conductance of To improve the problems provides a sliding back-pressure shut-off valve having a new structure that the application it is an object.

In addition, the present invention is a valve body, and a blocking plate for closing the fluid inlet portion in the upper portion while the back pressure is generated when the moving body is moved to the position of the fluid passage space, and the conveying body moving means for moving the conveying body, etc. Further comprising a powder inflow prevention cylinder in the valve body in the reverse pressure shut-off valve configured, and the powder inflow prevention ring to be moved up and down by the compressed air supplied from the outside inside the powder inflow prevention cylinder, to prevent the powder inflow Another object of the present invention is to provide a sliding back pressure shutoff valve capable of blocking the inflow of powder introduced into a space accommodating the conveying member by a ring.

In the sliding back pressure shutoff valve according to the present invention for achieving the above object, the fluid inlet space and the fluid outlet is arranged up and down and the fluid passage space is formed between the fluid inlet and the fluid outlet space is formed A valve body including a portion, a transfer body moving to a position of the fluid passage space when the fluid is blocked while the blocking plate closing the fluid inlet part is placed thereon, and a transfer body moving means for moving the transfer body. When the back pressure generation signal is generated from the outside, the conveying member moving means transfers the conveying member to a position to close the fluid inlet portion, and the blocking plate placed on the conveying body is supported by the pressure difference due to the back pressure in the valve body. Closing the fluid inlet to block back pressure.

In addition, the present invention is characterized in that the conveying member moving means is coupled to the rotating shaft of the drive means such as a pneumatic cylinder or an electric motor to move the conveying body to a position to close the fluid inlet by the rotation of the rotating shaft. It is done.

In addition, the present invention is composed of a rotating shaft engaging portion and the conveying body for placing the blocking plate and the conveying body is coupled to the rotating shaft, the conveying body is an open circular space smaller than the diameter of the blocking plate is formed Characterized in that the blocking plate can be placed.

In addition, the present invention is that the conveying member moving means is connected to the driving means, such as a pneumatic cylinder or electric motor, one end of the link means and the other means of the linking means to couple the conveying body to the drive means is operated the link When the means is elongated, the conveying body is moved to a position for closing the fluid inlet.

In addition, the conveying body is composed of a conveying body and the link means coupling portion coupled to the link means for placing the blocking plate, the conveying body body is formed with an open circular space smaller than the diameter of the blocking plate is the blocking plate Characterized in that it can be placed.

In addition, the present invention is characterized in that the wheel is provided with a smooth movement to the conveying body.

In addition, the present invention is the blocking plate is a disk shape and its outer diameter is formed larger than the diameter of the fluid inlet portion, the lower surface of the blocking plate is formed with a projection is horizontal when the blocking plate is placed in the conveying body horizontal Characterized in that the movement is limited.

In addition, the present invention is to maintain the air tightness by installing the O-ring on the part of the valve body in contact with the blocking plate when the back pressure is blocked by the pressure difference due to the back pressure in the valve body to close the fluid inlet is blocked. It is characterized by.

In addition, the present invention, the height (D) between the surface (A) is installed in the valve body and the upper surface of the conveying body or the lower surface (D) protruding the projection is a thickness (B) of the blocking plate ) Is smaller than the sum of the height (C) of the protrusion formed on the lower surface of the blocking plate [A or D <(B + C)].

In addition, the present invention is further provided with a powder inflow prevention cylinder on the valve body,

The powder inflow prevention cylinder is provided with a powder inflow prevention ring which is moved up and down by compressed air and compressed gas supplied from the outside to the space for accommodating the carrier and the carrier moving means by the powder inflow prevention ring. It is characterized by blocking the inflow of powder to be introduced.

In addition, the present invention is characterized in that the powder inflow preventing ring is bent in two stages, it is moved up and down by the compressed air supplied to the compressed air inlet provided in the powder inflow prevention cylinder.

In addition, the present invention, when the back pressure from the outside is supplied with compressed air or compressed gas is supplied to the powder inlet prevention cylinder to first start the powder inlet ring to open and to move the carrier even before the powder inlet ring is completely open Means for forming a space of a predetermined thickness (t) in the lower portion of the conveying body for placing the blocking plate in the conveying body to transfer the conveying body to the position to close the fluid inlet.

In addition, the present invention is characterized in that the space having a predetermined thickness (t) formed in the lower portion of the carrier body is a space having a thickness of 1mm or more.

In addition, the present invention, the gas for supplying the powder adsorption prevention gas from the outside to the valve body in order to prevent the powder is adsorbed on the inner circumferential surface of the powder inflow prevention ring or the inner circumferential surface of the valve body and the gap formed inside the valve. And a gas outlet for flowing the powder adsorption preventing gas supplied from the gas inlet along the inner circumferential surface of the valve body.

In addition, the present invention is characterized in that the gas outlet is formed in a circular flow path so that the powder adsorption prevention gas flows along the inner peripheral surface of the valve body.

In addition, the present invention further includes a gas flow guide ring having a cylindrical shape having a diameter smaller than the inner diameter of the valve body in the valve body to further increase the adsorption preventing effect of the powder adsorption preventing gas flowing out of the gas outlet. In order to be guided to the inner peripheral surface of the valve body.

Sliding back pressure shutoff valve according to the present invention is normally there is no obstacle in the fluid passage space of the valve to maintain a high flow rate and improve the flow of fluid as a straight pipe, when the back pressure occurs in the pipe, the conveying body moves horizontally to the blocking position By blocking the flow of the fluid while supporting the blocking plate placed on the conveying body in the blocking position, there is an effect that can be smoothly blocked even in the process of generating the powder while being able to block the back pressure.

In addition, the present invention transforms the linear flow path into the flow path of the meander structure by moving the conveying body placed in the blocking plate by the conveying member moving means to the blocking position by the emergency blocking signal to delay the inflow of the back pressure primarily and By making a quick pressure difference with respect to the placed blocking plate, the blocking plate can be quickly supported, thereby enabling an accurate and accurate back pressure blocking.

In addition, the present invention is further provided with a powder inflow prevention cylinder on the valve body, by providing a powder inflow prevention ring which is moved up and down by the compressed air supplied from the outside inside the powder inflow prevention cylinder, preventing the powder inflow There is an effect that can be blocked at the source of the powder flowing into the space for accommodating the conveying body by the ring.

In addition, the present invention further comprises a gas flow guide ring having a cylindrical shape having a diameter smaller than the inner diameter of the valve body in the valve body to the powder adsorption preventing gas flowing out of the gas outlet to the inner peripheral surface of the valve body By inducing, there is an effect of preventing the adsorption of powder in the inner circumferential surface of the valve or the gap present in the valve.

In addition, the present invention, when the back pressure is generated from the outside, the compressed air or compressed gas is supplied to the powder prevention cylinder to start the powder inlet prevention ring first to open, even before the powder inlet prevention ring is completely opened, the carrier moving means By forming a space (t) of a predetermined thickness in the lower portion of the conveying body for placing the blocking plate in the conveying body to transfer the conveying body to a position to close the fluid inlet, the conveying body is introduced into the fluid Since the transfer time to the position of closing the part can be minimized, there is an effect of minimizing the back pressure blocking speed by the blocking plate.

In addition, the present invention is provided with a gas inlet for supplying the powder adsorption prevention gas from the outside to the valve body in order to prevent the powder is adsorbed to the inner circumferential surface of the valve body and the gap inside the valve, the supply from the gas inlet By providing a gas outlet for flowing the powder adsorption prevention gas along the inner circumferential surface of the valve body, the powder is adsorbed to the inner circumferential surface of the valve body, the inner circumferential surface of the powder inflow prevention ring, the gap present in the valve body It can be prevented that there is an effect that can be operated smoothly in the piping system in the process where the powder is generated.

1 is an external view of a first embodiment of a sliding back pressure shutoff valve according to the present invention;

2 is an exploded perspective view of a first embodiment of a sliding back pressure shutoff valve according to the present invention;

Figure 3 (a) to (d) is a view showing various embodiments of the blocking plate placed in the conveying body in the first embodiment of the sliding back pressure shut-off valve according to the present invention

4 (a) to (c) is a view for explaining the process of blocking the fluid inlet plate when the back pressure occurs in the first embodiment of the present invention

Figures 5a and 5b show a flow diagram of gas at normal and shut off in a first embodiment in a sliding back pressure shutoff valve according to the invention;

6 is an external view of a second embodiment of a sliding back pressure shutoff valve according to the present invention;

7 (a) and 7 (b) illustrate a process of blocking a fluid inlet by a blocking plate in a second embodiment of a sliding back pressure shutoff valve according to the present invention.

(A) and (b) of FIG. 8 are internal plan views of FIG.

9 is an external view of a conveying body in a second embodiment of a sliding back pressure shutoff valve according to the present invention;

10 (a) and (b) show a flow chart of gas in normal and shut-off in the second embodiment of the sliding back pressure shutoff valve according to the present invention.

11 (a) to (e) are views showing various embodiments of a blocking plate in a sliding back pressure shutoff valve according to the present invention.

12 (a) and 12 (b) are explanatory diagrams for setting the thickness of a barrier plate and the like in the sliding back pressure shutoff valve according to the present invention, (c) is an enlarged view of (a), and (d) is (b) Enlarged view of)

13 is an external view of a third embodiment including a powder inflow preventing cylinder in a fluid outlet in a first embodiment of the present invention;

14 is an external view of a fourth embodiment including a powder inflow prevention cylinder in a fluid outlet in a second embodiment of the present invention;

15 is an exploded perspective view of a third embodiment of a sliding back pressure shutoff valve according to the present invention;

16 (a) to (e) are views illustrating a process of blocking a fluid inlet part, etc. when a back pressure is generated in the third embodiment of the present invention;

17 (a) to 17 (e) are views illustrating a process of blocking a fluid inlet by the blocking plate when a back pressure is generated in the fourth embodiment of the present invention.

Figure 18 (a) and (b) is a view showing a space of a predetermined thickness (t) formed in the lower portion of the conveying body in the third and fourth embodiments of the present invention, respectively

19 is a view showing a gas inlet for supplying a powder adsorption preventing gas in a third embodiment of the present invention;

20 is a view showing a gas inlet for supplying a powder adsorption preventing gas in a fourth embodiment of the present invention;

21 (a) and 21 (b) are a cross-sectional view and a plan view for explaining a structure in which the powder adsorption preventing gas flows into the valve body in the present invention;

22 and 23 are cross-sectional views of a fluid shutoff valve having a gas flow guide ring inside the valve body as another embodiment of the present invention, respectively.

24 (a) and (b) illustrate another embodiment of the gas flow path induction ring provided in the valve body.

* Description of the sign *

10: valve body 11: fluid inlet

12: inlet cover 13: fluid outlet

14: outlet cover 15: side wall

16: coupling member 17: O-ring

20: conveying body 21: conveying body

22: rotary shaft coupling portion 22a: rotary shaft coupling hole

24, 25, 26: wheel 27: link means coupling portion

30: blocking plate 31: blocking plate

32: projection 40: conveying member moving means

41: drive means 42: rotating shaft

43: link means 50: powder inlet prevention cylinder

51: powder inflow prevention ring 52, 53: compressed air supply

55: space portion 56: gas flow guide ring

61: gas inlet 62: gas outlet

63: round euro 70: powder

Hereinafter, the sliding back pressure shutoff valve according to the present invention will be described in detail with reference to the accompanying drawings.

Sliding back pressure shutoff valve according to the present invention is a sudden atmospheric inflow or fluid in a piping system for maintaining a constant pressure applied to a semiconductor manufacturing process, such as semiconductor and LCD, or a chemical manufacturing process or to maintain the flow of the fluid, such as gas in the forward direction A reverse pressure shut-off valve that can be quickly blocked and prevented when a reverse flow occurs, as shown in FIGS. 1 to 9, and a fluid inlet portion 11 having a predetermined length in a direction in which the fluid flows, and the fluid inflow. An inlet part cover 12 covering the part 11, a fluid outlet part 13 having a predetermined length in a direction in which the fluid flows out, an outlet part cover 14 covering the fluid outlet part 13, A valve having a cylindrical shape or a square cylinder shape formed of side wall portions 15 so that a fluid passage space is formed between the inlet cover 12 and the outlet cover 14. The body 10 and the conveying body 20 is moved to the position of the fluid passage space when the back pressure is generated while placing the blocking plate 30 for closing the fluid inlet portion 11 in the valve body in the upper portion; It comprises a conveying body moving means 40 for moving the conveying body 20, when the back pressure generating signal indicating that the back pressure has been generated from the outside, the conveying body moving means 40 moves the conveying body 20 The blocking plate 30 placed in the conveying body 20 by being transported to the position in which the fluid inlet 11 is closed is supported by a pressure difference due to a back pressure in the valve body to close the fluid inlet to block back pressure. It is a sliding back pressure shutoff valve.

A first embodiment of a sliding back pressure shutoff valve according to the present invention will be described with reference to FIGS. 1 to 5.

The valve body 10 in the first embodiment of the sliding back pressure shutoff valve according to the present invention is integrally formed with the fluid inlet part 11 and the fluid inlet part 11 having a predetermined length in the direction in which the fluid is introduced, and thus have a constant diameter. An inlet cover 12 having a cover and a fluid outlet 13 having a predetermined length in a direction in which the fluid flows out, and an outlet cover 14 integrated with the fluid outlet 13 and having a predetermined diameter to cover it ) And a side wall portion 15 so that a fluid passage space is formed between the inlet cover 12 and the outlet cover 14 to have a cylindrical closed shape. The inlet cover 12 integrated with the fluid inlet part 11 and the upper surface of the side wall part 15 are assembled to be kept airtight by a coupling member 16 such as a plurality of bolts, and the fluid outlet part The outlet cover 14 and the lower surface of the side wall portion 15 integrated with the 13 are also assembled to maintain airtightness by a coupling member 16 such as a plurality of bolts, so that the valve body 10 has a hermetic structure. Have.

An upper portion of the inlet cover 12 on one side of the fluid inlet portion 11 is provided with the conveying member moving means 40, and the conveying member moving means 40 is driven by a pneumatic cylinder or an electric motor. Means 41 and the rotating shaft 42 of the driving means, the conveying body 20 having the blocking plate 30 is fixed to the rotating shaft 42 of the driving means 41 is fixed to the driving means ( 41, when a back pressure generating signal such as a stop of the vacuum pump or a back pressure in the pipe is generated in the piping system from the outside, electric or pneumatic or the like is supplied to the driving means 41 to operate. ) Rotates at an angle to move the conveying body 20 to a position for closing the fluid inlet (11).

The conveying body 20 is formed with an open circular space smaller than the diameter of the blocking plate 30 in the center thereof is formed, the conveying body 21 having a structure capable of placing the blocking plate 30 and And a rotating shaft coupling part 22 having the rotating shaft coupling hole 22a and coupled to the rotating shaft 42, and the rotating shaft 42 rotates at a predetermined angle in the lower portion of the conveying body 21. When the contact with the inner surface of the valve body 10 is provided with a wheel 24 to facilitate movement.

The blocking plate 30 placed in the conveying body 21 is in the shape of a disk having a relatively thin thickness with a flat blocking plate surface 31 as shown in FIGS. The outer diameter is slightly larger than the diameter of the fluid inlet portion 11, the lower surface is formed with a protrusion 32 protruding downward at a position close to the outer peripheral surface or the outer peripheral surface of the open circular space is the blocking plate When 30 is settled in the said conveyance body 20, the horizontal movement of the said blocking plate 30 is restrict | limited.

That is, as shown in (b) of FIG. 3, the protrusion 32 of the blocking plate 30 is placed on the protruding step when the blocking plate 30 is placed with the stepped protrusion protruding from the carrier body 21. Hanging right and left movement is limited, the projection 32 of the blocking plate 30 when the blocking plate 30 is placed on the stepped recessed in the carrier body 21 as shown in (c) of FIG. The left and right movement is restricted by the recessed step, and as shown in (d) of FIG. 3, the blocking plate 30 is placed when the blocking plate 30 is placed without placing the step on the carrier body 21. Protruding portion of 32 may be caught by the side portion of the conveying body 21 to be limited to the left and right movement.

In the first embodiment of the sliding back pressure shutoff valve according to the present invention, a process of blocking the fluid inlet by the blocking plate will be described with reference to FIGS. 4 (a) to (c) and FIGS. 5 (a) and 5 (b). Same as

Normally, the fluid flows from the fluid inlet 11 to the fluid outlet 13 in the valve body 10, that is, the fluid passage space as shown in FIGS. 4A and 5A as normal flows. Because there is no obstacle in the part, the flow of fluid is not disturbed like intuition.

On the other hand, when the vacuum pump is stopped in the piping system, when the back pressure in the pipe is generated, when a back pressure generation signal is generated from a sensor for detecting the same, electric or pneumatic or the like is supplied to the driving means 41 to operate. As the rotating shaft 42 of the means 41 is rotated at a predetermined angle, as shown in FIG. 4 (b), the transfer body 20 having the blocking plate 30 fixedly coupled to the rotating shaft 42 also rotates at a predetermined angle. It is moved to a position to close the fluid inlet (11). It is preferable that the conveying body 20 is moved to a position of closing the fluid inlet 11 within 0.5 seconds after the back pressure generation signal is generated. When the conveying body 20 having the blocking plate 30 moved to the blocking position, the linear flow path is deformed into the flow path of the meander structure (structure having the refraction portion) to delay the inflow of the back pressure primarily. .

The conveying body 20 in which the blocking plate 30 is moved to a position in which the fluid inlet 11 is closed is conveyed body 21 as shown in (c) of FIG. 4 and (b) of FIG. 5. The back pressure is concentrated in an open circular space formed at the center of the back plate, and the blocking plate 30 placed in the conveying body 20 is supported by the difference in the back pressure generated thereby, thereby providing the fluid inlet 11. To close the back pressure. Preferably, the blocking plate 30 supports the closing time of the fluid inlet portion 11 within 0.5 seconds.

When the blocking plate 30 is lifted to close the fluid inlet 11, the valve body 10 is closed when the back pressure is shut off by closing the fluid inlet 11 to maintain a more tight airtightness. The O-ring 17 is installed at a portion in contact with the blocking plate 30.

Next, a second embodiment of the sliding back pressure shutoff valve according to the present invention will be described with reference to FIGS. 6 to 10.

In the second embodiment of the sliding back pressure shutoff valve according to the present invention, the valve body 10 is integrally formed with the fluid inlet portion 11 and the fluid inlet portion 11 having a predetermined length in the direction in which the fluid is introduced, and thus has a constant diameter. An inlet part cover 12 having a cover, a fluid outlet part 13 having a predetermined length in a direction in which the fluid flows out, and an outlet part cover integrally covered with the fluid outlet part 13 and having a predetermined diameter; The side wall portion 15 is formed so that a fluid passage space is formed between the inlet cover 12 and the outlet cover, and has a rectangular cylindrical shape in a transverse direction. In FIG. 6, the inlet cover 12, the side wall part 15, and the outlet cover are integrally formed together with the fluid inlet part 11 and the fluid outlet part 13. By assembling it can also form a sealed structure.

As shown in FIGS. 7A and 7B, and FIGS. 8A and 8B, the conveying member moving means includes a driving means 41 and the conveying member installed at one side of the valve body 10. It is composed of a link means 43 for moving the fluid inlet portion 11 to the closed position and the open position while pushing and pulling the 20.

The driving means 41 may use a pneumatic cylinder or an electric motor. When the driving means 41 operates, the driving means 41 extends or extends the link means 43 composed of a plurality of links connected to the drive shaft of the driving means 41. It causes the contraction to push and pull the conveying body 20 coupled to the link means 43 to move the fluid inlet portion 11 to the closed position and the open position.

The conveying body 20 is composed of a conveying body 21 for placing the blocking plate 30 and a link means coupling portion 27 is coupled to the link means 43, the conveying body 21 Open circular space smaller than the diameter of the blocking plate 30 is formed to be able to settle the blocking plate 30.

When the drive means 41 receives a back pressure generation signal such as the stop of the vacuum pump, the back pressure in the pipe, etc. generated from the outside from the outside, the drive means 41 is supplied with electricity or pneumatic or the like, and accordingly the The link means 43 is elongated, which causes the transfer body 20 coupled to the other end of the link means 43 to move to the position of closing the fluid inlet 11.

As shown in FIG. 9, the conveying member 20 has an open circular space smaller than the diameter of the blocking plate 30 in the center thereof, and has a structure capable of placing the blocking plate 30 therein. Body 21 and the link means coupling portion 27 and the like coupled to the link means 43, the lower portion of the conveying body 21 when the rotary shaft 42 is rotated at a predetermined angle The wheel 25 is provided to abut the inner lower surface of the valve body 10 so as to move smoothly. The wheel 26 is provided to abut the inner side surface of the conveying body 21 to facilitate the movement. .

In the second embodiment of the sliding back pressure shutoff valve according to the present invention, a process of blocking the fluid inlet by the blocking plate is illustrated in FIGS. 7A and 7B, FIGS. 8A and 8B, and FIG. 10A. ) And (b) as follows.

Normally, fluid flows from the fluid inlet 11 to the fluid outlet 13 in the valve body 10 as shown in FIGS. 7A, 8A, and 10A as normal flows. There are no obstacles in the fluid passageway, ie the fluid passageway space, so that the flow of the fluid is not disturbed like intuition.

On the other hand, when the vacuum pump is stopped in the piping system, and a reverse pressure in the pipe is generated, a back pressure signal is generated from a sensor for detecting the same. When the driving means 41 is operated, the link means 43 coupled to the driving means 41 is operated. As a result of the stretching, the transfer body 20 having the blocking plate 30 fixedly coupled to the link means 43 as shown in FIGS. 7B, 8B and 10B is also horizontally fixed. It is moved to a position to close the fluid inlet (11). When the conveying body 20 having the blocking plate 30 moved to the blocking position, the linear flow path is deformed into the flow path of the meander structure (the structure having the refraction portion) to delay the inflow of the back pressure primarily. (Preferably within 0.5 seconds), the conveying body 20 in which the blocking plate 30 moved to the position for closing the fluid inlet portion 11 is opened in the center of the conveying body 21 The back pressure is concentrated in the circular space, and the blocking plate 30 placed in the conveying body 20 is floated due to the difference in back pressure generated thereby to close the fluid inlet 11 to block back pressure. (Preferably within 0.5 seconds). At this time, the valve body 10 when the back pressure is blocked by closing the fluid inlet 11 in order to maintain a more airtight when the blocking plate 30 is supported to close the fluid inlet 11. The O-ring 17 is installed at a portion in contact with the blocking plate 30.

The blocking plate 30 of the sliding back pressure shutoff valve according to the present invention is a projection having a predetermined length on the lower surface of the blocking plate surface 31 irrespective of the first embodiment and the second embodiment of Figure 11 (a) to (e It can be formed in various forms, such as). The protrusion 32 may add the protrusion 32 so that the blocking plate 30 is not bent in the case of a large diameter pipe according to the diameter size of the fluid inlet and the fluid outlet. The protrusion 32 is to prevent the occurrence of the bending of the blocking plate 30 while minimizing the weight of the blocking plate 30 in order to speed up the blocking speed. The blocking plate 30 may be used upside down the upper and lower in use.

Since the blocking plate 30 is to block the fluid inlet part 11 by raising a pressure difference due to the occurrence of a back pressure in the valve body 10, it is preferable that the weight is light for increasing the blocking speed and precisely blocking the back pressure. The weight is determined by the range of pressures that can be blocked between the fluid inlet and the fluid outlet.

12 (a) and 12 (b) are explanatory diagrams for setting the thickness of a barrier plate and the like in the sliding back pressure shutoff valve according to the present invention, (c) is an enlarged view of (a), and (d) is (b) ) Is an enlarged view.

As shown in (a) and (c) of FIG. 12, the height A between the surface on which the O-ring is installed in the valve body and the upper surface of the conveying body is determined by the thickness B of the blocking plate and the blocking. It is smaller than the sum of the heights C of the protrusions formed on the lower surface of the plate [A or D <(B + C)]. This is because the blocking plate 30 has a mounting form by the protrusion 32 of the blocking plate 30 without a fixing device on the upper surface of the carrier body 21, the blocking plate 30 is the transfer body ( In order to prevent deviation from

In addition, as shown in (b) and (d) of FIG. 12, the height D between the lower surfaces of the protrusions protrudes from the thickness B of the blocking plate and the height of the protrusions formed on the lower surface of the blocking plate. It is set smaller than the sum of (C) [D <(B + C)]. This is because the blocking plate 30 rises due to the pressure difference between the top and the bottom is kept airtight by the O-ring to block the flow path, because the length of the B + C is greater than the length of the protrusion of the blocking plate 30 ( 32 may be inserted into the conveying body 21 to prevent the blocking plate 30 from being separated.

By having the above configuration, in the piping system for maintaining the flow of the fluid in the forward direction, it is possible to quickly block the inflow of the back pressure when a sudden inflow of the air or the reverse flow of the fluid occurs, while obstructing the fluid space passage of the valve body normally It does not interfere with the flow of the fluid, such as the straight pipe does not have the advantage that works smoothly even in the process of generating powder.

Next, as a third embodiment and a fourth embodiment of the present invention, a powder inflow preventing cylinder is provided in the fluid outlet part 30 in the first and second embodiments of the present invention. .

The third embodiment of the present invention further includes a powder inflow preventing cylinder 50 at the fluid outlet 30 in the first embodiment of the sliding back pressure shutoff valve according to the present invention as shown in FIGS. 13 and 15. have.

In order to supply compressed air or compressed gas from the outside into the powder inflow prevention cylinder 50, two compressed air supply units 52 and 53 are installed to supply compressed air to the compressed air supply unit 52. Cylindrical powder inflow prevention ring 51 is moved up, and when the compressed air supply to the compressed air supply unit 53, the cylindrical powder inflow prevention ring 51 is moved downward. The compressed air supply unit 53 may move the powder inflow prevention ring 51 by supplying compressed gas instead of the compressed air.

When compressed air is supplied to the compressed air supply unit 52, when the cylindrical powder inflow prevention ring 51 is moved upward, the powder inflow prevention ring 51 is illustrated in FIGS. 16A and 16E. By blocking the space for accommodating the carrier 20 and the carrier moving means 40 by the inflow of powder that can be introduced into the space containing the carrier 20 and the carrier moving means 40 Can be blocked.

The powder inflow prevention ring 51 is a cylindrical bent in two stages, when the powder inflow prevention ring 51 is lowered to some extent by the compressed air as shown in (b) and (d) of FIG. Hanging on the step formed in the powder inlet prevention cylinder 50 has a structure to prevent further falling.

Referring to (a) to (e) of FIG. 16, a process of blocking a fluid inlet part, etc. when a back pressure occurs in a third embodiment of the present invention will be described.

FIG. 16A illustrates a case in which a flow of a fluid such as a gas flows in a normal state and a forward direction in a piping system. At this time, the powder inflow preventing ring 51 is raised to the transfer body 20. And to block the space for receiving the carrier moving means 40, thereby blocking the inflow of powder that can be introduced into the space for receiving the carrier 20 and the carrier moving means (40).

(B) to (e) of FIG. 16 shows that the fluid inlet part 11 is blocked when the back pressure generation signal is generated from a sensor such as a back pressure generated in the pipe due to the stop of the vacuum pump in the pipe system and the like. 30 shows the process of blocking.

When the back pressure generation signal is generated and the driving means 41 is operated, the compressed air is supplied to the compressed air supply unit 53 so that the conveying body 20 can move to the cutoff position as shown in FIG. The inflow prevention ring 51 is lowered, and then the blocking plate fixedly coupled to the rotating shaft 42 by rotating the rotary shaft 42 of the driving means 41 at an angle as shown in FIG. The conveying body 20 in which the 30 is placed is also rotated at an angle to be moved to a position for closing the fluid inlet 11. The conveying body 20 in which the blocking plate 30 is moved to a position for closing the fluid inlet part 11 is an open circle formed at the center of the conveying body 21 as shown in FIG. The back pressure is concentrated in the space, and due to the difference in back pressure generated by the space, the blocking plate 30 placed in the carrier 20 is supported to close the fluid inlet portion 11 to block back pressure. .

Next, as shown in (e) of FIG. 16, the compressed air is supplied to the compressed air supply unit 52 and raised until it comes into contact with the powder inflow prevention ring 51 dl and the blocking plate 30. ) And the space for accommodating the carrier body 40, thereby blocking the inflow of powder that can be introduced into the space that accommodates the carrier body 20 and the carrier body 40.

As shown in FIG. 14, the fourth embodiment of the present invention further includes a powder inflow preventing cylinder 50 at the fluid outlet 30 in the second embodiment of the sliding back pressure shutoff valve according to the present invention.

17A to 17E illustrate a process in which a blocking plate blocks a fluid inlet part and the like when a back pressure is generated in the fourth embodiment, the shape of the conveying body 10 and the blocking object 10 are blocked. Only in the shape or structure of the conveying member moving means for moving to the position, the operation process is substantially the same as that of Figs. 16A to 16E, which is a view for explaining the operation of the third embodiment. In the example, the description of the process of blocking the fluid inlet, etc. when the back pressure occurs will be omitted.

On the other hand, in the present invention, when the reverse pressure generation signal is generated from the outside, first, the powder inflow prevention ring 51 is lowered so that the transfer body 20 can move to a blocking position (see FIG. 16 (b)). 18 (see FIG. 18) so that the conveying member moving means 40 can convey the conveying body 20 to a position to close the fluid inlet 11 even before the inflow preventing ring 51 is completely lowered and fully opened. As shown in a) and (b) to form a space of a predetermined thickness (t) in the lower portion of the conveying body 21 for placing the blocking plate 30 in the conveying body (20). In this way, even if the powder inflow prevention ring 51 is not lowered by the thickness (t), it is possible to transfer the conveying body 20 to the blocking position so that the conveying body 20 is the fluid inlet 11 Since the transfer time to the closed position can be minimized, there is an advantage that the back pressure blocking speed by the blocking plate 30 can be minimized. In order to increase the blocking speed more effectively, the thickness t is preferably 1 mm or more.

In addition, the present invention as shown in Figure 19 and 21 from the outside to the fluid inlet 11 to prevent the powder is adsorbed in the inner peripheral surface of the valve body 10 or the gap formed in the valve. And a gas inlet 62 for supplying a powder adsorption preventing gas and allowing the powder adsorption prevention gas supplied from the gas inlet 61 to flow along an inner circumferential surface of the valve body 10. ).

The powder adsorption preventing gas supplied to the gas inlet 61 may be diversified as follows according to its type and process state.

1) When a small amount of nitrogen gas is injected into the gas inlet 61 during the process

Nitrogen gas N2 supplied to the gas inlet 61 is circular in the vertical direction through the gas outlet 62 having a circular flow path 63 shape as shown in FIGS. 21A and 21B. Will have the flow of. When the inner circumferential surface of the valve body and the powder inflow preventing ring 51 are provided along the inner circumferential surface of the inside of the valve, the nitrogen gas (N2) is formed together in the gap between the upper surface of the powder inflow preventing ring 51 and the contact portion When the gas flows to form a gas layer between the powder and the inner circumference prevents the powder is adsorbed on the inner circumferential surface, when the powder inlet prevention ring 51 is provided, the rising and falling of the powder inlet prevention ring 51 It is possible to prevent the malfunction of the lowering operation. When the powder inflow prevention ring 51 is not provided, it may be used for the purpose of preventing contamination of an O-ring or a sealing surface contacting the O-ring used for sealing in the valve.

At this time, the amount of nitrogen (N2) supplied to the gas inlet 61 is determined according to the capacity of the pump for maintaining the pressure in the piping system.

2) When N2 is injected at high pressure to the gas inlet 61 after the process is completed or stopped.

The high pressure N2 gas supplied to the gas inlet 61 has a circular jetted flow in the vertical direction through the gas outlet 62 having the circular flow path 63. It cleans the powder adsorbed on the inner surface and inner circumferential surface of the valve body 10 in contact with the upper surface and the upper surface of the powder inflow prevention ring 51 at high pressure to adsorb to the inner circumferential surface of the valve body 10 during the process. Remove the powder 70, and if the powder inlet ring 51 is provided to prevent the malfunction of the rising and falling operation of the powder inlet prevention ring 51 that may occur during the process again. do.

3) When a cleaning gas (fluorine series) is injected into the gas inlet 61 after the process is in progress or completed.

The fluorine (F2) gas supplied to the gas inlet 61 has a circular jet flow in the vertical direction through the gas outlet 62 having the circular flow path 63. It cleans the powder adsorbed on the inner surface and inner circumferential surface of the valve body 10 in contact with the upper surface and the upper surface of the powder inflow prevention ring 51 at high pressure to adsorb to the inner circumferential surface of the valve body 10 during the process. Remove the powder 70, and if the powder inlet ring 51 is provided to prevent the malfunction of the rising and falling operation of the powder inlet prevention ring 51 that may occur during the process again. do.

In addition, the present invention will be described with reference to FIGS. 23 and 24 with respect to the fluid shutoff valve provided with a gas flow path induction ring 56 in the valve body 10 as another embodiment.

A gas adsorption ring 56 having a cylindrical shape having a diameter smaller than the inner diameter of the valve body 10 is provided inside the valve body 10 to prevent the powder adsorption gas flowing out of the gas outlet 62. Is led to flow better to the inner peripheral surface of the valve body (10).

The gas flow path induction ring 56 has a diameter smaller than an inner diameter of the powder inflow prevention ring 51 when the powder inflow prevention ring 51 is provided inside the valve body 10. It is provided in the inner diameter part of 51.

When the gas flow path induction ring 56 is provided in the inner diameter portion of the powder inflow prevention ring 51, at least two or more supports are formed on the outer circumferential surface of the gas flow path induction ring 56 to prevent the powder inflow prevention ring ( It can be fixed to the inner diameter of 51).

In addition, when compressed air or compressed gas is supplied to the compressed air supply unit 52 formed below the powder inflow preventing cylinder 50, the powder inflow preventing ring 51 moves upward of the powder inflow preventing ring 51. Adsorption of the powder 70 to the space 55 and the inner circumferential surface of the valve body 10 formed due to the rise is easy, as shown in Figure 22 and 23 the gas flow path induction ring ( 56 is configured to induce the powder adsorption preventing gas supplied from the gas outlet 62 to flow into the space 55 to prevent the powder inflow preventing ring 51 from malfunctioning.

24A and 24B illustrate another embodiment of the gas flow path induction ring 56 provided in the valve body 10 according to the present invention. As shown, the gas inlet 61 to which the powder adsorption prevention gas is supplied is formed at the lower part of the valve body 10 or the fluid outlet part 13, and the gas flow path induction ring 56 is connected to the gas outlet part. When the powder adsorption prevention gas supplied from the gas inlet 61 is formed to be longer than the formed portion and flows out to the gas outlet 62, the gas flow induction ring 56 may be blocked to rise, thereby increasing the valve body 10. It flows into the space portion 55 between the inner circumferential surface and the gas flow path induction ring 56 to prevent the powder from being deposited or adsorbed on the space 55 or the gap.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art can be variously modified and changed without departing from the spirit and scope of the invention described in the claims below. It will be appreciated.

According to the present invention, a sudden atmospheric inflow or a reverse flow of a fluid may occur in a piping system for maintaining a constant pressure applied to a semiconductor manufacturing process such as a semiconductor and an LCD or a chemical product manufacturing process or maintaining a flow of a fluid such as a gas in a forward direction. As a reverse pressure shut-off valve that can be prevented by quickly shutting off. It can be applied in the semiconductor manufacturing process, such as semiconductor and LCD, or chemical manufacturing process.

Claims (17)

A valve body including a fluid passage space disposed above and below the fluid inlet and the fluid outlet, and having a space through which the fluid passes, and a blocking plate closing the fluid inlet. It is configured to include a conveying body to move to the position of the fluid passage space when the fluid is blocked while settled in, and a conveying body moving means for moving the conveying body, When a back pressure occurs, the conveying member moving means transfers the conveying member to a position to close the fluid inlet, and the blocking plate placed in the conveying body is lifted by a pressure difference caused by a back pressure in the valve body to close the fluid inlet. Breaking back pressure Sliding back pressure shutoff valve, characterized in that. The method of claim 1, The conveying member moving means is coupled to the rotating shaft of the drive means such as a pneumatic cylinder or an electric motor to move the conveying body to a position to close the fluid inlet by the rotation of the rotating shaft. Sliding back pressure shutoff valve, characterized in that. The method of claim 2, The conveying member is composed of a rotating shaft coupling portion coupled to the rotating shaft and the conveying body for placing the blocking plate, wherein the conveying body is formed with an open circular space smaller than the diameter of the blocking plate to settle the blocking plate. What can be done Sliding back pressure shutoff valve, characterized in that. The method of claim 1, The conveying member moving means connects one end of the link means to a driving means such as a pneumatic cylinder or an electric motor, and couples the conveying member to the other end of the link means so that the driving means is operated to extend the link means. For conveying bodies to be moved to a position in which the fluid inlet is closed Sliding back pressure shutoff valve, characterized in that. The method of claim 4, wherein The conveying body is composed of a conveying body for holding the blocking plate and a link means coupling portion coupled with the link means, the conveying body is formed with an open circular space smaller than the diameter of the blocking plate to form the blocking plate To be enshrined Sliding back pressure shutoff valve, characterized in that. The method according to claim 3 or 5, The transfer body body is provided with a wheel to facilitate movement Sliding back pressure shutoff valve, characterized in that. The method according to any one of claims 1, 3 and 5, The blocking plate is disc-shaped and its outer diameter is larger than the diameter of the fluid inlet, and the lower surface of the blocking plate is formed with a protrusion protruding downward so that the blocking plate is horizontally placed when the blocking plate is placed in the conveying member. To restrict movement Sliding back pressure shutoff valve, characterized in that. The method of claim 7, wherein When the blocking plate is buoyant by the pressure difference due to the back pressure in the valve body to close the fluid inlet to block the back pressure when the O-ring is installed in the area in contact with the blocking plate in the valve body to maintain airtightness Sliding back pressure shutoff valve, characterized in that. The method of claim 8, In the valve body, the height A between the surface on which the O-ring is installed and the upper surface of the conveying body or the height D between the lower surface on which the protrusion protrudes is the thickness B of the blocking plate and the blocking plate. Less than the sum of the heights (C) of the projections formed on the lower surface of the plane [A or D <(B + C)] Sliding back pressure shutoff valve, characterized in that. The method of claim 1, Further provided with a powder inflow prevention cylinder on the valve body, It is provided with a powder inlet prevention ring which is moved up and down by the compressed air or compressed gas supplied from the outside inside the powder inlet prevention cylinder, Blocking the inflow of powder introduced into the space accommodating the carrier and the carrier moving means by the powder inlet prevention ring  Sliding back pressure shutoff valve, characterized in that. The method of claim 10, The powder inflow prevention ring is a cylindrical bent in two stages, it is moved up and down by the compressed air or compressed gas supplied to the compressed air inlet provided in the powder inflow prevention cylinder Sliding back pressure shutoff valve, characterized in that. The method of claim 11, When a back pressure generation signal is generated from the outside, the powder inflow prevention ring first starts to open, and even before the powder inflow prevention ring is completely opened, the conveying member moving means can transfer the conveying member to a position in which the fluid inlet is closed. To form a space (t) of a predetermined thickness on the lower part of the conveying body for placing the blocking plate in the conveying body  Sliding back pressure shutoff valve, characterized in that. The method of claim 12, The space of a predetermined thickness (t) formed in the lower portion of the carrier body is a space having a thickness of 1mm or more Sliding back pressure shutoff valve, characterized in that. The method of claim 10, In order to prevent the powder is adsorbed on the inner circumferential surface of the powder inflow prevention ring or the inner circumferential surface of the valve body provided with a gas inlet for supplying the powder adsorption prevention gas from the outside, the powder supplied from the gas inlet With a gas outlet for flowing the anti-suction gas along the inner circumferential surface of the valve body Sliding back pressure shutoff valve, characterized in that. The method of claim 14, The gas outlet part is formed in a circular flow path so that the powder adsorption prevention gas flows along the inner peripheral surface of the valve body Sliding back pressure shutoff valve, characterized in that. The method of claim 14, Further comprising a gas flow guide ring of a cylindrical shape having a diameter smaller than the inner diameter of the valve body in the valve body to guide the powder adsorption preventing gas flowing out of the gas outlet to the inner peripheral surface of the valve body Sliding back pressure blocking valve, characterized in that. The method according to any one of claims 14 to 16, The gas flow path induction ring is formed longer than the portion where the gas outlet is formed Sliding back pressure shutoff valve, characterized in that.

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