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WO2014174750A1 - Drive apparatus and image pickup apparatus using same - Google Patents

Drive apparatus and image pickup apparatus using same Download PDF

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Publication number
WO2014174750A1
WO2014174750A1 PCT/JP2014/001260 JP2014001260W WO2014174750A1 WO 2014174750 A1 WO2014174750 A1 WO 2014174750A1 JP 2014001260 W JP2014001260 W JP 2014001260W WO 2014174750 A1 WO2014174750 A1 WO 2014174750A1
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WO
WIPO (PCT)
Prior art keywords
conversion element
elastic
electromechanical conversion
hollow columnar
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/001260
Other languages
French (fr)
Japanese (ja)
Inventor
小坂 明
豊年 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of WO2014174750A1 publication Critical patent/WO2014174750A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025Inertial sliding motors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism

Definitions

  • the present invention relates to a drive device using an electromechanical transducer that converts electrical energy into mechanical energy, and an imaging device using the drive device.
  • an actuator is usually incorporated to drive the movable part.
  • This actuator is a device that converts input energy into mechanical motion, one of which is referred to as SIDM (Smooth Impact Drive Mechanism, “SIDM” is a registered trademark), for example, an electromechanical conversion such as a piezoelectric element.
  • SIDM Smooth Impact Drive Mechanism
  • a driving device using an element is known.
  • This SIDM drive device is typically an electromechanical conversion element that converts electrical energy into mechanical energy, a drive member that is fixed to one end of the electromechanical conversion element and that transmits the mechanical energy, and the drive member.
  • a moving member and the like engaged with a predetermined friction force are provided.
  • the electromechanical transducer is, for example, a piezoelectric element in which a plurality of piezoelectric layers made of a piezoelectric material are stacked via internal electrodes between each piezoelectric layer.
  • a pair of external electrodes for supplying the electric energy is respectively formed on a pair of side surfaces facing each other along the stacking direction of the piezoelectric elements, and the pair of external electrodes is connected to the plurality of internal electrodes. They are connected alternately one after another.
  • the piezoelectric element expands and contracts in the stacking direction.
  • the drive member reciprocates in the longitudinal direction according to the expansion and contraction of the piezoelectric element.
  • the electromechanical conversion element here, the piezoelectric element
  • the piezoelectric element is repeatedly expanded and contracted so that the moving speed of the driving member is asymmetric between the forward path and the backward path
  • the moving member is moved by the asymmetric reciprocating motion of the driving member. It moves along the said longitudinal direction, and an electrical energy is converted into the motion of a moving member (for example, refer patent document 1).
  • the electromechanical conversion element and the drive member are usually bonded and fixed by an adhesive such as an epoxy adhesive. Since the electromechanical conversion element expands and contracts, a compressive force and a tensile force are alternately applied to the bonded portion. For this reason, when a drive device is used for a long time, even if it is a minute vibration, an adhesion part may loosen and peel in a long time. Therefore, as such a countermeasure, for example, there is an SIDM driving device disclosed in Patent Document 2.
  • the drive device disclosed in Patent Document 2 further includes a reinforcing member that integrally covers the base portion of the electromechanical conversion element and the base portion of the drive member at a fixed portion between the electromechanical conversion element and the drive member.
  • Such a SIDM driving device is usually formed long in the expansion / contraction direction of the piezoelectric element of the electromechanical transducer. For this reason, when an external force is applied from a direction orthogonal to the contraction direction of the piezoelectric element, the piezoelectric element is bent with respect to the drive shaft of the drive member, and the piezoelectric element may be damaged depending on the bent state. Therefore, as such a countermeasure, for example, there is an SIDM driving device disclosed in Patent Document 3.
  • the driving device disclosed in Patent Document 3 includes a piezoelectric element, a driving shaft that is fixed to one end surface of the piezoelectric element and moves according to expansion and contraction of the piezoelectric element, and a driven member that is frictionally engaged with the driving shaft.
  • a weight member fixed to the other end surface of the piezoelectric element, and the drive shaft and the weight member are supported by a housing.
  • the driving device disclosed in Patent Document 3 is made of an elastic material such as silicon rubber or an elastic adhesive such as a silicon-based adhesive, and is between the inner surface of the housing and the side surface of the piezoelectric element with respect to the expansion / contraction direction. And a support member that elastically supports the piezoelectric element laterally with respect to the expansion / contraction direction. According to Patent Document 3, with this configuration, it is possible to prevent breakage at each part and their joints by the elastic force of the support member.
  • the SIDM drive device is formed long in the expansion / contraction direction of the electromechanical conversion element, so that it is relatively weak to bending stress when subjected to an impact or the like. Even if the reinforcing member that covers the fixing portion between the electromechanical conversion element and the drive member disclosed in Patent Document 2 is used, the electromechanical conversion element that is weak against stress next to the fixing portion reinforced by the reinforcing member has the impact. There is a risk of breakage due to stress caused by the above.
  • the support member disclosed in Patent Document 3 is arranged between the housing and the piezoelectric element, the impact force received by the housing incorporating the SIDM driving device and the deformation of the housing are as follows: There is a possibility that the piezoelectric element is directly transmitted to the piezoelectric element via the support member and is damaged. In particular, when the support member is formed of an elastic member having a relatively high elastic modulus, there is a high possibility that the piezoelectric element receives a large stress and is damaged.
  • the support member is formed of an elastic member having a relatively low elastic modulus
  • the impact force received by the housing and the deformation of the housing are transmitted to the SIDM drive device by the elastic force of the support member. It becomes difficult.
  • vibration in the SIDM driving device due to inertia and the accompanying deflection cannot be suppressed, and eventually, the SIDM driving device is subjected to relatively large stress and may be damaged. .
  • the present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a drive device that can reduce damage caused by stress caused by an impact or the like with a relatively simple configuration, and an imaging device using the drive device. Is to provide.
  • the drive device and the imaging device include an electromechanical conversion element for moving a frictionally engaged moving member via a drive member connected to one end, and the other end of the electromechanical conversion element.
  • a hollow columnar member and an elastic member formed of an elastic material and disposed between a side surface of the electromechanical conversion element and an inner surface of the hollow columnar member.
  • the drive device and the imaging device according to the present invention can reduce breakage due to stress caused by an impact or the like with a relatively simple configuration.
  • FIG. 1 is a cross-sectional view illustrating a configuration of an imaging apparatus using the driving device of the embodiment.
  • the imaging apparatus S includes a driving device IM, an imaging element 30 that converts an optical image into an electrical signal, and one or a plurality of optical elements.
  • An imaging optical system LS that forms an image on the light receiving surface of the imaging element 30.
  • the driving device IM moves the optical element L1 that moves along the optical axis AX direction among the one or more optical elements in the imaging optical system LS, for example, for zooming or focusing.
  • Any of the driving devices IMa, IMb, and IMc in the first to third embodiments is used for such an imaging device S.
  • FIG. 2 is a perspective view showing the configuration of the drive device of the first embodiment used in the imaging device shown in FIG. 2A is a partially exploded perspective view, and FIG. 2B is an overall external perspective view.
  • FIG. 3 is a view for explaining an elastic member in the driving apparatus of the first embodiment used in the imaging apparatus shown in FIG.
  • FIG. 3A shows a state before filling the elastic member 15 (15 ′)
  • FIG. 3B shows a state of filling the elastic member 15 (15 ′)
  • FIG. 3C shows the filling of the elastic member 15 in the first mode
  • 3D shows the state after the elastic member 15 is filled
  • FIG. 3D shows the state after the elastic member 15 ′ filled with the elastic member 15 ′ in the second mode.
  • FIG. 4 is a diagram for explaining drive pulses supplied to a drive device used in the imaging apparatus shown in FIG.
  • the horizontal axis in FIG. 4 is time, and the vertical axis is voltage.
  • the imaging device Sa using the driving device IMa of the first embodiment includes an elastic adhesive fixing member 10, an electromechanical conversion element 11, a driving member 12, a base member 13, and a moving member. 14, the elastic member 15, the hollow columnar member 16, the pad 17, the spring 18, the drive circuit 20, the image pickup device 30, and the housing 40 (41, 42) (not shown) that accommodates them. 43).
  • the driving device IMa includes the elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, and the hollow columnar member. 16, a pad 17, and a spring 18.
  • the electromechanical transducer 11 is an element that converts input electrical energy into mechanical energy that expands and contracts, that is, mechanical motion.
  • a piezoelectric that converts input electrical energy into mechanical elastic motion by the piezoelectric effect.
  • Such a piezoelectric element includes, for example, a laminated body and a pair of external electrodes.
  • the laminated body is formed by alternately laminating a plurality of thin film (layered) piezoelectric layers made of a piezoelectric material and a conductive thin film (layered) internal electrode layer.
  • the laminate has a quadrangular prism shape, but is not limited to this, and may be, for example, a polygonal column shape or a cylindrical shape.
  • Each of the plurality of internal electrode layers is configured to face the outside with a pair of outer peripheral side surfaces facing each other.
  • the pair of external electrodes are formed along the stacking direction on the pair of outer peripheral side surfaces in the stacked body, and supply the electric energy to the stacked body, and are sequentially and alternately connected to the plurality of internal electrodes.
  • the piezoelectric material include so-called PZT, quartz, lithium niobate (LiNbO 3 ), potassium tantalate niobate (K (Ta, Nb) O 3 ), barium titanate (BaTiO 3 ), lithium tantalate (LiTaO 3 ).
  • inorganic piezoelectric materials such as strontium titanate (SrTiO 3 ).
  • the driving member 12 is fixedly connected to an end surface of one end in the expansion / contraction direction of the electromechanical transducer element (piezoelectric element in the present embodiment), and mechanical energy converted from electric energy is transmitted by the electromechanical transducer element 11. It is a member. More specifically, in this embodiment, the drive member 12 is a columnar (shaft-shaped) member that is bonded and fixed to the end surface of one end of the laminate in the piezoelectric element with an adhesive. The drive member 12 is supported by a pair of support pieces 41 and 42 extended from a housing 40 (not shown) so as to be movable in parallel with the axial direction a.
  • the pair of support pieces 41 and 42 are arranged at a predetermined interval, and define a moving range of the moving member 14 that frictionally engages the drive member 12 between the pair of support pieces 41 and 42.
  • the material of the drive member 12 for example, any material such as metal, resin, and carbon can be used.
  • the cross section orthogonal to the longitudinal direction of the drive member 12 may be any shape such as a rectangle, a polygon, an ellipse, and a circle, but in the present embodiment, the moving member 14 extends along the longitudinal direction of the drive member 12.
  • the cross section is circular so that it can be moved relatively easily.
  • this cross section is a rectangle or a polygon, it is preferable that it is chamfered from the said viewpoint.
  • the base member 13 is a member that is fixedly connected to the other end face of the electromechanical conversion element 11 in the expansion / contraction direction and is supported by the main body member 43 in the casing 40.
  • the base member 13 has an inertial mass greater than that of the drive member 12. More specifically, the base member 13 has a cylindrical shape having a diameter matched to the outer shape of the electromechanical conversion element 11, and is bonded and fixed to the electromechanical conversion element 11 with an adhesive at one end face thereof. Thus, the electromechanical conversion element 11 is supported.
  • the base member 13 is fixed by elastic bonding by the elastic bonding fixing member 10 to the arrangement surface of the main body member 43 in the housing 40 at the other end face where the electromechanical conversion element 11 is not fixed.
  • the base member 13 Since the base member 13 has an inertial mass that is larger than the inertial mass of the drive member 12, the base member 13 is fixed to the body member 43 of the housing 40, so that the base member 13 is stationary with respect to the expansion and contraction motion of the electromechanical transducer 11. Thus, the expansion and contraction motion of the electromechanical conversion element 11 is mainly transmitted to the drive member 12.
  • the elastic adhesive fixing member 10 is a member for elastically bonding and fixing the base member 13 to the main body member 43 of the housing 40, and is made of an elastic adhesive.
  • the main body member 43 of the housing 40 corresponds to an example of a predetermined support.
  • the elastic adhesive is, for example, a silicone rubber-based adhesive that cures by reacting with moisture in the air, or an acrylic rubber-based adhesive that cures when irradiated with ultraviolet rays. Since the base member 13 is fixed to the housing 40 by the elastic adhesive in this way, the impact force and deformation transmitted to the driving device IMa due to the impact or the like are alleviated, and compared with the bending force of the connecting portion of each member. The damage of the weak part can be reduced.
  • the moving member 14 is a member that is engaged with the driving member 12 with a predetermined frictional force, and slides with respect to the driving member 12.
  • the moving member 14 is a lens holding frame that supports and holds a lens L1, which is an example of an optical element.
  • the moving member 14 of the lens holding frame has a slider block 141 formed by extending a part of the outer periphery.
  • a through opening is formed in the slider block 141 along the direction of the optical axis AX, and the drive member 12 is inserted through the through opening.
  • the direction of the optical axis AX and the axial direction a of the drive member 12 are parallel to each other.
  • a notch 142 is formed at the center of the slider block 141, and the radial half of the drive member 12 is exposed at the notch 142.
  • a pad 17 that contacts the half of the driving member 12 in the radial direction is fitted into the notch 142, and a biasing force in the direction toward the driving member 12 is applied to the pad 17 by a spring 18. .
  • the moving member 14 including the pad 17 and the driving member 12 are pressed against each other by the urging force of the spring 18 and frictionally engaged with each other with a predetermined frictional force.
  • the structure that frictionally engages the moving member 14 and the driving member 12 is not limited to such a structure.
  • the hollow columnar member 16 is connected to the base member 13 at one end, and spaced apart from the side surface in the expansion / contraction direction of the electromechanical conversion element 11 by a predetermined distance so as to surround the periphery of the electromechanical conversion element 11 on the side surface. It is a member to be arranged.
  • the base member 13 includes a lower member having a first diameter (large diameter) short and high columnar shape, and a second diameter (small diameter) short and high column smaller than the first diameter.
  • An upper member having a shape, and the lower member and the upper member are integrally formed by being laminated with their axes aligned.
  • the base member 13 is an integrally sintered product of tungsten alloy.
  • the hollow columnar member 16 is generally a hollow columnar body (for example, a cylindrical body) having an inner shape corresponding to the outer shape of the electromechanical transducer 11.
  • the end surface of one end of the hollow columnar member 16 is in contact with and fixed to the flat surface of the lower member of the base member 13, and the inner peripheral surface of the one end is the peripheral surface of the upper member of the base member 13. It is covered and adhesively fixed.
  • the hollow columnar member 16 is formed of a material such as metal (including an alloy) or resin, for example.
  • the base member 13 is a columnar member
  • the hollow columnar member 16 is a hollow columnar body (for example, a cylindrical body) having an inner shape corresponding to the outer shape of the electromechanical transducer 11.
  • the end surface of one end of the hollow columnar member 16 is in contact with and fixed to the mounting surface of the main body member 43 of the housing 40, and the inner peripheral surface of the one end covers the peripheral surface of the base member 13. Then, it may be bonded and fixed.
  • the elastic member 15 is formed of an elastic material, and is disposed between the side surface of the electromechanical conversion element 11 with respect to the expansion / contraction direction and the inner surface of the hollow columnar member 16, and covers part or all of the side surface of the electromechanical conversion element 11. It is a member to do.
  • the elastic member 15 supports the electromechanical conversion element 11 with respect to the hollow columnar member 16.
  • Such an elastic member 15 is obtained by solidifying, for example, an epoxy adhesive or an acrylate adhesive, as will be described later.
  • the elastic member 15 is formed of a material having an elastic modulus smaller than that of the electromechanical transducer 11. Since the elastic member 15 is disposed so as to surround the electromechanical conversion element 11 on the side surface, the elastic member 15 works to prevent the electromechanical conversion element 11 from expanding and contracting.
  • the elastic modulus of the elastic member 15 is the electric machine. Since it is smaller than the elasticity modulus of the conversion element 11, it can suppress that the elastic member 15 prevents the expansion-contraction movement of the electromechanical conversion element 11 from occurring.
  • the drive device IMa of the first embodiment is manufactured as follows. First, as shown in FIG. 2A, the drive member 12 is bonded and fixed to the end surface of one end of the electromechanical conversion element 11, and the base member 13 is bonded and fixed to the end surface of the other end. Next, the hollow columnar member 16 is bonded and fixed to the base member 13 through the drive member 12 and the electromechanical conversion element 11.
  • an adhesive such as an epoxy adhesive or an acrylate adhesive is used.
  • an annular recess is formed in plan view with the upper surface of the upper member of the base member 13 as the bottom surface and an opening in the direction opposite to the bottom surface in the axial direction.
  • an adhesive such as an epoxy adhesive or an acrylate adhesive is discharged into the recess by an adhesive discharge device EF-1 or EF-2 that discharges a predetermined adhesive from the opening.
  • an adhesive discharge device EF-1 or EF-2 that discharges a predetermined adhesive from the opening.
  • the electromechanical conversion element 11 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in contact with the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16.
  • the elastic member 15 (15 ′) is formed, and the driving device IMa (IMa ′) of the first embodiment shown in FIG. 2B is manufactured.
  • the adhesive to the concave portion is filled up to a height in the axial direction of the electromechanical transducer 11 so as not to cover the driving member 12, and the elastic member 15
  • the electromechanical conversion element 11 may be disposed so as to surround a part of the side surface of the mechanical conversion element 11.
  • the driving member 12 is filled up to a height that covers the periphery of the driving member 12, and the elastic member 15 ′ is disposed so as to surround the periphery of the electromechanical conversion element 11 on the entire side surface of the electromechanical conversion element 11. May be.
  • the elastic member 15 needs to cover at least the vicinity of the base member 13 of the electromechanical transducer 11 as in the first mode shown in FIG. 3C.
  • the elastic member 15 since the elastic member 15 is arrange
  • the elastic member 15 ′ since the elastic member 15 ′ is disposed on all the side surfaces of the electromechanical transducer 11, the impact force received by the housing 40 due to, for example, dropping or the deformation of the housing 40 is reduced. Transmission to the electromechanical conversion element 11 can be further relaxed, damage can be further reduced, and impact resistance can be enhanced. Further, in the second mode shown in FIG. 3D, when the elastic member 15 ′ covers the drive member 12, the drive member 12 is also integrally covered with the electromechanical conversion element 11. The bending stress applied to the mechanical conversion element 11 can be further reduced.
  • the axial length of the hollow columnar member 16 may be up to the position where the elastic member 15 is filled.
  • the drive circuit 20 is a circuit that generates a predetermined drive pulse supplied to the electromechanical conversion element 11 in order to drive the electromechanical conversion element 11.
  • the drive circuit 20 for example, a known oscillation circuit that oscillates a sawtooth drive pulse shown in FIG. 4 can be used.
  • the frequency of the sawtooth drive pulse is about 20 to 30 kHz, the vibration frequency is out of the audible range, and the vibration sound that can be heard by the human ear can be reduced.
  • the frequency may be any frequency.
  • the drive pulse of the sawtooth wave shown in FIG. 4 is supplied from the drive circuit 20 to the electromechanical conversion element 11, the electromechanical conversion element 11 becomes loose at the gentle rising portion of the drive pulse of the sawtooth wave.
  • the drive member 12 that is extended and displaced in the expansion / contraction direction and is bonded and fixed to the electromechanical conversion element 11 is also gradually displaced in the axial direction a.
  • the slider block 141 of the moving member 14 that is frictionally engaged with the driving member 12 moves in the axial direction a together with the driving member 12 by the frictional force.
  • the electromechanical transducer 11 is rapidly contracted and displaced in the expansion / contraction direction, and the drive member 12 is also displaced in the direction opposite to the axial direction a.
  • the slider block 141 of the moving member 14 overcomes the frictional force by the inertial force, stays at that position, and does not substantially move.
  • the slider block 141 of the moving member 14 moves in the axial direction a. Then, by reversing the waveform of the sawtooth driving pulse and supplying the electromechanical transducer 11 with a sawtooth driving pulse composed of a rapid rising portion and a subsequent gentle falling portion, the moving member Fourteen slider blocks 141 move in the opposite direction.
  • the driving circuit 20 includes an H bridge circuit including four known switching elements that oscillate with a rectangular pulse having a predetermined duty ratio (for example, 3: 7 or 7: 3) as a driving pulse, or two switching elements.
  • a predetermined duty ratio for example, 3: 7 or 7: 3
  • the predetermined duty ratio is, for example, 3: 7 or 7: 3, and the traveling direction of the moving member 14 can be reversed by reversing the duty ratio in this way.
  • the image sensor 30 has R (red), G (green), and B (blue) components according to the amount of light in an optical image of an object (subject) imaged by an imaging optical system LS (not shown) as a whole. This is an element that performs photoelectric conversion to an image signal and outputs it to an image processing circuit (not shown) that performs predetermined image processing.
  • the image sensor 30 is, for example, a CCD image sensor, a CMOS image sensor, or the like.
  • the imaging optical system LS includes one or more optical elements, and forms an optical image of an object (subject) on the light receiving surface of the imaging element 30.
  • the above-described lens L1 attached to the moving member 14 of the lens holding frame is an optical element that moves along the optical axis AX among the one or more optical elements in the imaging optical system LS.
  • the lens L1 may be a single lens or a lens group including a plurality of lenses.
  • the lens L1 may be, for example, a lens that moves along the optical axis AX to perform focusing (focusing), and, for example, a lens that moves along the optical axis AX to perform zooming (magnification). It may be.
  • the optical image of the object is guided to the light receiving surface of the image sensor 30 along the optical axis AX by the imaging optical system LS including such a lens L1, and the optical image of the object is captured by the image sensor 30.
  • the driving device IMa is supported by the main body member 43 of the housing 40 by the base member 13, and the hollow columnar member 16 is connected to the base member 13.
  • the An elastic member 15 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16, and the electromechanical conversion element 11 is supported by the hollow columnar member 16 via the elastic member 15.
  • the elastic member 15 (15 ′) functions as a spring component and a viscous component disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in the dynamic model, so that the bending force is relatively low. The impact force and the deformation transmitted to the weak electromechanical conversion element 11 can be relaxed, and the breakage can be reduced.
  • the base member 13 and the hollow columnar member 16 have a function of supporting the driving device IMa with respect to the housing 40, and the impact force and the deformation.
  • the elastic member 15 has a function of suppressing the vibration and deflection of the electromechanical conversion element 11, supports the drive device IMa with respect to the housing 40, and the vibration of the electromechanical conversion element 11 due to the impact force and the deformation.
  • the function of suppressing the bending is divided into different members.
  • the hollow columnar member 16 preferably has a hardness (rigidity) that does not substantially deform and sway as the housing 40 sways with respect to the impact or the like, and supports the elastic member 15.
  • the elastic member 15 preferably has a softness (elasticity) enough to absorb the impact or the like.
  • the hollow columnar member 16 is preferably a metal (including alloy) material having a Young's modulus of about 200 GPa, for example, whereas the elastic member 15 has a Young's modulus (hollow columnar member 16 of, for example, about 10 MPa to 1 GPa). It is preferable that the resin material has a Young's modulus that is smaller by about 4 to 2 digits than the Young's modulus.
  • the imaging device Sa and the driving device IMa in the present embodiment as described above can reduce damage due to stress caused by an impact or the like with a relatively simple configuration of the base member 13, the hollow columnar member 16, and the elastic member 15. Can do.
  • the elastic member 15 (15 ′) has a function of preventing the electromechanical conversion element 11 from being damaged due to the impact or the like, and also has a function of preventing the electromechanical conversion element 11 from expanding and contracting. Yes. Therefore, the elastic modulus of the elastic member 15 (15 ') is appropriately set according to the performance required for the driving device IMa in consideration of the breakage preventing function and the expansion / contraction motion inhibiting function. For example, when the breakage prevention function is given priority over the expansion / contraction motion inhibiting function, the elastic member 15 (15 ′) is made of, for example, an epoxy adhesive or an acrylate adhesive other than a rubber adhesive having a relatively high elastic modulus.
  • the elastic member 15 (15 ′) is preferably a silicone rubber adhesive or an acrylic rubber adhesive having a relatively low elastic modulus. As described above, the elastic member 15 (15 ′) preferably has an elastic modulus smaller than that of the electromechanical transducer 11.
  • FIG. 5 is a perspective view illustrating a configuration of a driving device according to a second embodiment used in the imaging device illustrated in FIG. 1.
  • 5A and 5C are partially exploded perspective views
  • FIG. 5B is an overall external perspective view after the covering member 19 is mounted
  • FIG. 5D is an overall external perspective view.
  • FIG. 6 is a view for explaining an elastic member in the driving device of the second embodiment used in the imaging device shown in FIG. 1.
  • FIG. 6A shows a state before filling of the elastic member 15 (15 ′′)
  • FIG. 6B shows a state of filling of the elastic member 15 (15 ′′)
  • FIG. 6C shows the filling of the elastic member 15 in the third mode
  • 6D shows the state after the elastic member 15 is filled
  • FIG. 6D shows the state after the elastic member 15 ′′ filled with the elastic member 15 ′′ in the fourth embodiment.
  • the driving device IMb in the second embodiment further includes a covering member 19 that covers a fixed portion between the electromechanical conversion element 11 and the driving member 12 with respect to the driving device IMa in the first embodiment.
  • the imaging device Sb using the driving device IMb of the second embodiment includes an elastic adhesive fixing member 10, an electromechanical transducer 11, a driving member 12, a base member 13, and a moving member. 14, an elastic member 15, a hollow columnar member 16, a covering member 19 indicated by a broken line, a pad 17, a spring 18, a drive circuit 20, an image pickup device 30, and the whole housing these components. And a casing 40 (41, 42, 43) not provided.
  • the driving device IMb includes the elastic adhesive fixing member 10, the electromechanical transducer 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, and the hollow columnar member. 16, a covering member 19, a pad 17, and a spring 18.
  • the elastic adhesive fixing member 10 electromechanical conversion element 11, driving member 12, base member 13, moving member 14, elastic member 15, hollow columnar member 16, pad 17, spring 18, driving circuit 20, imaging
  • the element 30 and the housing 40 are respectively the elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, the hollow columnar member 16, and the pad 17 in the first embodiment. Since this is the same as the spring 18, the drive circuit 20, the image sensor 30, and the housing 40, description thereof is omitted.
  • the covering member 19 is a member that covers a fixed portion between the electromechanical conversion element 11 and the driving member 12. More specifically, the covering member 19 covers the base portion of the electromechanical conversion element 11 in the vicinity of the fixed portion, and has a first hollow short columnar portion having an inner shape corresponding to the outer shape of the electromechanical conversion element 11. 191, a second hollow short columnar portion 192 having an inner shape corresponding to the outer shape of the driving member 12 covering the base of the driving member 12 near the fixed portion, and a first hollow short columnar portion 191 And an annular connecting portion 193 that connects the one end and the other end of the second hollow short columnar portion 192 to each other.
  • the first hollow short high columnar portion 191 is a hollow short high columnar column member
  • the second hollow short high columnar portion 192 is a short high tubular member (a hollow short high columnar member).
  • the annular connecting portion 193 is an annular plate member in which a circular opening having a diameter corresponding to the outer diameter of the second hollow short columnar portion 192 is formed, and corresponds to the outer shape of the first hollow short columnar portion 191. This is an annular plate member having an outer shape of a certain size.
  • the covering member 19 is formed of a material such as metal or resin, for example.
  • the drive device IMb of the second embodiment is manufactured as follows. First, similarly to the drive device IMa of the first embodiment, as shown in FIG. 5A, the drive member 12 and the base member 13 are bonded and fixed to the end surfaces at both ends of the electromechanical transducer 11 respectively.
  • the driving member 12 is inserted into the second hollow short columnar portion 192 from the other end of the first hollow short columnar portion 191, and the inside is filled with an adhesive, so that the first hollow short columnar portion 191 is filled.
  • the base of the electromechanical conversion element 11 is fitted in For example, an adhesive such as an epoxy adhesive or an acrylate adhesive is used as the adhesive.
  • an adhesive such as an epoxy adhesive or an acrylate adhesive is used as the adhesive.
  • the electromechanical conversion element 11, the drive member 12, and the covering member 19 are integrally bonded and fixed so as to cover the fixed portion between the electromechanical conversion element 11 and the drive member 12. .
  • the driving member 12 and the base member 13 may be bonded to the electromechanical conversion element 11 and the covering member 19 may be bonded to the fixed portion at the same time.
  • the hollow columnar member 16 is bonded and fixed to the base member 13, and the adhesive discharge device EF-1 is discharged from the opening. , EF-2 fills the recess with an adhesive that becomes the elastic member 15, and is cured.
  • the electromechanical conversion element 11 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in contact with the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16.
  • the elastic member 15 (15 ′′) is formed, and the driving device IMb (IMb ′) of the second embodiment shown in FIG. 5D is manufactured.
  • the adhesive to the concave portion is filled up to the height of the middle position in the axial direction of the electromechanical transducer 11 so as not to cover the covering member 19, and the elastic member 15
  • the electromechanical conversion element 11 may be disposed so as to surround a part of the side surface of the mechanical conversion element 11.
  • the covering member 19 is filled up to a height that covers the periphery of the first hollow short columnar portion 191, and the elastic member 15 ′′ further includes the side surface of the covering member 19 and the hollow columnar member 16.
  • the hollow columnar member 16 is disposed so as to surround the periphery of the covering member 19 on the side surface of the covering member 19 while being separated from the side surface of the covering member 19.
  • the elastic member 15 ′′ is also arranged on the side surface of the covering member 19, so that the impact force and the deformation transmitted to the electromechanical conversion element 11 can be further alleviated, and damage is prevented. It can reduce more and can improve impact resistance.
  • the driving member 12 when the elastic member 15 ′′ covers the first hollow short columnar portion 191 of the covering member 19, the driving member 12 is also covered, and the driving member 12 also has the first hollow short height. Since the electromechanical conversion element 11 is integrally covered via the columnar portion 191, the bending stress applied to the electromechanical conversion element 11 when the impact occurs can be further reduced.
  • the axial length of the hollow columnar member 16 may be up to the position where the elastic member 15 is filled.
  • the imaging device Sb and the driving devices IMb and IMb ′ according to the second embodiment further include the third covering member 19, the area to be bonded by the adhesive is widened, and thus the electromechanical conversion element 11 and the driving member. 12 can be bonded and fixed more firmly. Therefore, the imaging device Sb and the driving devices IMb and IMb ′ according to the second embodiment can further reduce the breakage of the fixed portion due to the stress caused by the impact or the like with a relatively simple configuration.
  • FIG. 7 is a perspective view illustrating a configuration of a drive device according to a third embodiment used in the imaging device illustrated in FIG. 1.
  • the base member 13 and the hollow columnar member 16 are separate, but in the driving device IMc in the third embodiment.
  • the base member 13 and the hollow columnar member 16 are integrally formed.
  • the imaging device Sc using the driving device IMc of the third embodiment includes an elastic adhesive fixing member 10, an electromechanical conversion element 11, a driving member 12, a moving member 14, and an elastic member. 15, a hollow columnar base member 51, a pad 17, a spring 18, a drive circuit 20, an image sensor 30, and a housing 40 (41, 42, 43) that accommodates these and not shown in its entirety. It has.
  • the driving device IMc includes the elastic adhesive fixing member 10, the electromechanical transducer 11, the driving member 12, the moving member 14, the elastic member 15, the hollow columnar base member 51, and the pad. 17 and a spring 18.
  • the elastic adhesive fixing member 10, the electromechanical conversion element 11, the drive member 12, the moving member 14, the elastic member 15, the pad 17, the spring 18, the drive circuit 20, the image pickup element 30, and the housing 40 in the third embodiment are respectively The elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the moving member 14, the elastic member 15, the pad 17, the spring 18, the driving circuit 20, the imaging element 30, and the housing 40 in the first embodiment. Since there is, explanation is omitted.
  • the elastic member 15 is in the fourth mode shown in FIG. 6D, but may be in the third mode shown in FIG. 6C.
  • the driving device IMc of the third embodiment including the covering member 19 is illustrated.
  • the hollow columnar base member 51 is a member in which the above-described base member 13 and the hollow columnar member 16 are integrally formed, and is a member having both the function of the base member 13 and the function of the hollow columnar member 16. More specifically, as shown in FIG. 7, the hollow columnar base member 51 is a bottomed hollow columnar member with one end face closed. The bottom portion of the hollow columnar base member 51 is formed thicker than the thickness of the peripheral wall portion functioning as the hollow columnar member 16 described above in order to function as the above-described base member 13.
  • Such a hollow columnar base member 51 is integrally formed of metal (including an alloy), resin, or the like.
  • the imaging device Sc and the driving device IMc in the third embodiment use the hollow columnar base member 51 having both the function of the base member 13 and the function of the hollow columnar member 16, the number of assembling steps can be reduced. Can be assembled more easily.
  • the elastic member 15 may contain a thermally expandable microcapsule.
  • the heat-expandable microcapsule is a member that expands by heating, for example, about 4 to 5 times in diameter to increase its volume.
  • Thermally expandable microcapsules are, for example, lower aliphatic hydrocarbons such as isobutane, pentane, and hexane, low-boiling halogen hydrocarbons, and volatile organic solvents such as methylsilane as expansion agents, vinylidene chloride, acrylonitrile, acrylate esters.
  • Such an imaging device S (Sa, Sb, Sc) and a driving device IM IMa (IMa ′), IMb (IMb ′), IMc) are provided between the side surface of the electromechanical transducer 11 and the inner surface of the hollow columnar member 16.
  • IMa IMa ′
  • IMb IMb
  • IMc driving device
  • a drive device is coupled to an electromechanical conversion element that converts electrical energy into mechanical energy that expands and contracts, and one end of the electromechanical conversion element in a direction of expansion and contraction, and the mechanical energy is transmitted to the drive device.
  • An elastic member disposed between a side surface of the electromechanical conversion element and an inner surface of the hollow columnar member and supporting the electromechanical conversion element;
  • the drive device is supported on a predetermined support by a base member, a hollow columnar member is connected to the base member, and the side surface of the electromechanical transducer and the inner surface of the hollow columnar member are An elastic member that supports the electromechanical conversion element is disposed between them.
  • a driving device for example, the impact force received by the casing due to dropping or the like and the deformation of the casing are transmitted to the base member and the hollow columnar member, and thereby the base member and the hollow columnar member bend.
  • the base member and the hollow columnar member are connected to each other, the rigidity becomes high, and as a result, the impact force and the bending due to the deformation can be suppressed.
  • the elastic member functions as a spring component and a viscous component disposed between the side surface of the electromechanical transducer and the inner surface of the hollow columnar member, so that the impact transmitted to the electromechanical transducer is transmitted.
  • the force and the deformation can be relaxed, and the damage can be reduced.
  • the base member and the hollow columnar member have a function of supporting the drive device with respect to the support, and vibration and deflection of the electromechanical transducer due to the impact force and the deformation.
  • the elastic member is responsible for suppressing the vibration, and the function of supporting the driving device with respect to the support and the function of suppressing the vibration and deflection of the electromechanical transducer due to the impact force and the deformation are divided into separate members. It has been. Therefore, such a drive device can reduce damage caused by stress caused by an impact or the like with a relatively simple configuration of the base member, the hollow columnar member, and the elastic member.
  • the elastic member has an elastic modulus smaller than that of the electromechanical transducer.
  • the elastic member has an elastic modulus smaller than that of the electromechanical transducer, so that the elastic member can prevent the elastic member from expanding and contracting.
  • the elastic member contains a thermally expandable microcapsule.
  • the elastic member is thermally expanded by the thermal expansion microcapsule.
  • a mechanical conversion element and the said hollow columnar member can be pressed, and adhesiveness with them can be improved.
  • the elastic member is disposed so as to surround the electromechanical conversion element at a part of the side surface of the electromechanical conversion element.
  • the elastic member is arranged on a part of the side surface, and therefore it is possible to suppress the expansion and contraction of the electromechanical conversion element from being obstructed by the elastic member.
  • the elastic member is disposed so as to surround the electromechanical transducer at all of the side surfaces of the electromechanical transducer.
  • the above-described driving device further includes a covering member that covers a fixed portion between the electromechanical conversion element and the driving member.
  • Such a driving device further includes a covering member, it is possible to further reduce the breakage of the fixed portion due to stress caused by impact or the like with a relatively simple configuration.
  • the hollow columnar member is further disposed so as to be separated from the side surface of the covering member and surround the periphery of the covering member by the side surface of the covering member.
  • the member is further disposed between the side surface of the covering member and the inner surface of the hollow columnar member.
  • the elastic member is also arranged on the side surface of the covering member, the impact force and the deformation transmitted to the electromechanical conversion element can be further relaxed, and damage can be further reduced. Can improve impact resistance.
  • the base member and the hollow columnar member are integrally formed.
  • an imaging device includes an electric image obtained by driving any one of the above-described driving devices, a moving member engaged with the driving member of the driving device with a predetermined frictional force, and an optical image.
  • An image pickup device that converts the signal into a typical signal; and an image pickup optical system that forms an optical image of an object on a light receiving surface of the image pickup device.
  • An optical element that moves along the optical axis direction among the plurality of optical elements is attached to the moving member of the driving device.
  • Such an imaging apparatus includes any one of the above-described driving apparatuses, damage to the driving apparatus due to stress caused by impact or the like can be reduced with a relatively simple configuration. Therefore, such an imaging apparatus can improve impact resistance.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)

Abstract

These drive apparatus and image pickup apparatus are provided with: an electric machine conversion element for moving a frictionally engaged moving member via a drive member connected to one end; a base body member to be supported by means of a predetermined supporting body, said base body member being connected to the other end of the electric machine conversion element; a hollow columnar member, which has one end thereof connected to the base body member, and which is disposed such that the side surface thereof surrounds the circumference of the electric machine conversion element by having the circumference spaced apart from the side surface; and an elastic member, which is formed of an elastic material, and which is disposed between the side surface of the electric machine conversion element, and the inner surface of the hollow columnar member.

Description

駆動装置およびこれを用いた撮像装置DRIVE DEVICE AND IMAGING DEVICE USING THE SAME

 本発明は、電気エネルギーを機械エネルギーに変換する電気機械変換素子を用いた駆動装置およびこれを用いた撮像装置に関する。 The present invention relates to a drive device using an electromechanical transducer that converts electrical energy into mechanical energy, and an imaging device using the drive device.

 可動部分を含む機械装置には、通常、前記可動部分を駆動するためにアクチュエータが組み込まれている。このアクチュエータは、入力エネルギーを機械的な運動に変換する装置であり、その一つに、SIDM(Smooth Impact Drive Mechanism、「SIDM」は登録商標)と称される、例えば圧電素子等の電気機械変換素子を用いた駆動装置が知られている。 In a mechanical device including a movable part, an actuator is usually incorporated to drive the movable part. This actuator is a device that converts input energy into mechanical motion, one of which is referred to as SIDM (Smooth Impact Drive Mechanism, “SIDM” is a registered trademark), for example, an electromechanical conversion such as a piezoelectric element. A driving device using an element is known.

 このSIDMの駆動装置は、通常、電気エネルギーを機械エネルギーに変換する電気機械変換素子、前記電気機械変換素子の一方端部に固定され前記機械エネルギーが伝達される駆動部材、および、前記駆動部材に所定の摩擦力で係合される移動部材等を備えている。電気機械変換素子は、例えば、圧電材料から成る複数の圧電層を、各圧電層間に内部電極を介して積層した圧電素子である。この圧電素子の積層方向に沿った互いに対向する一対の側面には、前記電気エネルギーを供給するための一対の外部電極がそれぞれ形成されており、この一対の外部電極は、前記複数の内部電極と順次交互に接続されている。このようなSIDMの駆動装置では、外部の駆動回路から前記一対の外部電極を介して鋸歯状またはパルス状の駆動電圧が印加されると、前記圧電素子が積層方向に伸縮する。そして、この圧電素子の伸縮に従い前記駆動部材がその長手方向に往復動する。ここで、駆動部材を往路と復路とでその移動速度が非対称となるように電気機械変換素子(ここでは圧電素子)を繰り返し伸縮させると、この駆動部材の非対称な往復運動により、前記移動部材が前記長手方向に沿って移動し、電気エネルギーが移動部材の運動に変換される(例えば特許文献1参照)。 This SIDM drive device is typically an electromechanical conversion element that converts electrical energy into mechanical energy, a drive member that is fixed to one end of the electromechanical conversion element and that transmits the mechanical energy, and the drive member. A moving member and the like engaged with a predetermined friction force are provided. The electromechanical transducer is, for example, a piezoelectric element in which a plurality of piezoelectric layers made of a piezoelectric material are stacked via internal electrodes between each piezoelectric layer. A pair of external electrodes for supplying the electric energy is respectively formed on a pair of side surfaces facing each other along the stacking direction of the piezoelectric elements, and the pair of external electrodes is connected to the plurality of internal electrodes. They are connected alternately one after another. In such a SIDM drive device, when a sawtooth or pulsed drive voltage is applied from an external drive circuit via the pair of external electrodes, the piezoelectric element expands and contracts in the stacking direction. The drive member reciprocates in the longitudinal direction according to the expansion and contraction of the piezoelectric element. Here, when the electromechanical conversion element (here, the piezoelectric element) is repeatedly expanded and contracted so that the moving speed of the driving member is asymmetric between the forward path and the backward path, the moving member is moved by the asymmetric reciprocating motion of the driving member. It moves along the said longitudinal direction, and an electrical energy is converted into the motion of a moving member (for example, refer patent document 1).

 そして、このようなSIDMの駆動装置では、通常、電気機械変換素子と駆動部材とは、例えばエポキシ系接着剤等の接着剤によって接着固定されている。この接着部分には、電気機械変換素子が伸縮するため、圧縮力と引張力とが交互に加わる。このため、駆動装置が長時間使用されると、微小な振動であっても長期の間に接着部分が緩み、剥がれる可能性がある。そこで、このような対策として、例えば、特許文献2に開示されたSIDMの駆動装置がある。この特許文献2に開示の駆動装置は、電気機械変換素子と駆動部材との固定部分に、前記電気機械変換素子の基部と駆動部材の基部を一体に被覆する補強部材をさらに備えている。 In such a SIDM drive device, the electromechanical conversion element and the drive member are usually bonded and fixed by an adhesive such as an epoxy adhesive. Since the electromechanical conversion element expands and contracts, a compressive force and a tensile force are alternately applied to the bonded portion. For this reason, when a drive device is used for a long time, even if it is a minute vibration, an adhesion part may loosen and peel in a long time. Therefore, as such a countermeasure, for example, there is an SIDM driving device disclosed in Patent Document 2. The drive device disclosed in Patent Document 2 further includes a reinforcing member that integrally covers the base portion of the electromechanical conversion element and the base portion of the drive member at a fixed portion between the electromechanical conversion element and the drive member.

 一方、このようなSIDMの駆動装置は、通常、電気機械変換素子の圧電素子における伸縮方向に長く形成されている。このため、圧電素子の収縮方向に直交する方向から外力がかかると、圧電素子が駆動部材の駆動軸に対して屈曲され、その屈曲状態によっては圧電素子が破損する虞がある。そこで、このような対策として、例えば、特許文献3に開示されたSIDMの駆動装置がある。この特許文献3に開示の駆動装置は、圧電素子と、前記圧電素子の一方端面に固着され前記圧電素子の伸縮に応じて動く駆動軸と、前記駆動軸に摩擦係合された被駆動部材と、前記圧電素子の他方端面に固着された錘部材とを備え、前記駆動軸および前記錘部材が筐体によって支持されている。そして、この特許文献3に開示の駆動装置は、シリコンゴム等の弾性材料やシリコン系接着剤等の弾性接着剤から成り、前記筐体の内面と前記圧電素子における前記伸縮方向に対する側面との間に配置され、前記圧電素子を前記伸縮方向に対して側方で弾性支持する支持部材をさらに備えている。特許文献3によれば、この構成によって前記支持部材の弾性力によって各部位およびこれらの接合部における破損を防止できる。 On the other hand, such a SIDM driving device is usually formed long in the expansion / contraction direction of the piezoelectric element of the electromechanical transducer. For this reason, when an external force is applied from a direction orthogonal to the contraction direction of the piezoelectric element, the piezoelectric element is bent with respect to the drive shaft of the drive member, and the piezoelectric element may be damaged depending on the bent state. Therefore, as such a countermeasure, for example, there is an SIDM driving device disclosed in Patent Document 3. The driving device disclosed in Patent Document 3 includes a piezoelectric element, a driving shaft that is fixed to one end surface of the piezoelectric element and moves according to expansion and contraction of the piezoelectric element, and a driven member that is frictionally engaged with the driving shaft. A weight member fixed to the other end surface of the piezoelectric element, and the drive shaft and the weight member are supported by a housing. The driving device disclosed in Patent Document 3 is made of an elastic material such as silicon rubber or an elastic adhesive such as a silicon-based adhesive, and is between the inner surface of the housing and the side surface of the piezoelectric element with respect to the expansion / contraction direction. And a support member that elastically supports the piezoelectric element laterally with respect to the expansion / contraction direction. According to Patent Document 3, with this configuration, it is possible to prevent breakage at each part and their joints by the elastic force of the support member.

 ところで、SIDMの駆動装置では、上述したように、電気機械変換素子の伸縮方向に長く形成されているため、衝撃等を受けた場合に、曲げ応力に比較的弱い。特許文献2に開示された、電気機械変換素子と駆動部材との固定部分を覆う補強部材を用いたとしても、補強部材によって補強された固定部分の次に応力に弱い電気機械変換素子が前記衝撃等によって生じる応力によって破損してしまう虞がある。 By the way, as described above, the SIDM drive device is formed long in the expansion / contraction direction of the electromechanical conversion element, so that it is relatively weak to bending stress when subjected to an impact or the like. Even if the reinforcing member that covers the fixing portion between the electromechanical conversion element and the drive member disclosed in Patent Document 2 is used, the electromechanical conversion element that is weak against stress next to the fixing portion reinforced by the reinforcing member has the impact. There is a risk of breakage due to stress caused by the above.

 そこで、特許文献3に開示された支持部材を用いる対策が考えられる。しかしながら、特許文献3に開示された支持部材は、筐体と圧電素子との間に配置されているため、SIDMの駆動装置を組み込んだ筐体が受けた衝撃力および前記筐体の変形は、前記支持部材を介して直接的に圧電素子に伝達されてしまい、圧電素子を破損してしまう虞がある。特に、前記支持部材が比較的高弾性率の弾性部材で形成される場合には、圧電素子が大きな応力を受けてしまい、破損してしまう可能性が高い。一方、前記支持部材が比較的低弾性率の弾性部材で形成される場合には、前記筐体が受けた衝撃力および前記筐体の変形は、支持部材の弾性力によってSIDMの駆動装置に伝わり難くなる。しかしながら、この場合では、慣性によるSIDMの駆動装置における振動およびそれに伴う撓みを抑えることができず、結局、SIDMの駆動装置には、比較的大きな応力がかかってしまい、破損してしまう虞がある。 Therefore, a countermeasure using the support member disclosed in Patent Document 3 can be considered. However, since the support member disclosed in Patent Document 3 is arranged between the housing and the piezoelectric element, the impact force received by the housing incorporating the SIDM driving device and the deformation of the housing are as follows: There is a possibility that the piezoelectric element is directly transmitted to the piezoelectric element via the support member and is damaged. In particular, when the support member is formed of an elastic member having a relatively high elastic modulus, there is a high possibility that the piezoelectric element receives a large stress and is damaged. On the other hand, when the support member is formed of an elastic member having a relatively low elastic modulus, the impact force received by the housing and the deformation of the housing are transmitted to the SIDM drive device by the elastic force of the support member. It becomes difficult. However, in this case, vibration in the SIDM driving device due to inertia and the accompanying deflection cannot be suppressed, and eventually, the SIDM driving device is subjected to relatively large stress and may be damaged. .

特開平6-123830号公報JP-A-6-123830 特開平8-286093号公報JP-A-8-286093 特開2007-174882号公報JP 2007-174882 A

 本発明は、上述の事情に鑑みて為された発明であり、その目的は、衝撃等によって生じる応力による破損を比較的簡単な構成で低減することができる駆動装置およびこれを用いた撮像装置を提供することである。 The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a drive device that can reduce damage caused by stress caused by an impact or the like with a relatively simple configuration, and an imaging device using the drive device. Is to provide.

 本発明にかかる駆動装置および撮像装置は、摩擦係合された移動部材を、一方端に連結された駆動部材を介して移動させるための電気機械変換素子と、前記電気機械変換素子の他方端に連結され、所定の支持体によって支持されるための基体部材と、一方端を前記基体部材に連結し、前記電気機械変換素子の周囲をその側面から離隔して前記側面で囲むように配置される中空柱状部材と、弾性材料から形成され、前記電気機械変換素子の側面と前記中空柱状部材の内面との間に配置される弾性部材とを備える。 The drive device and the imaging device according to the present invention include an electromechanical conversion element for moving a frictionally engaged moving member via a drive member connected to one end, and the other end of the electromechanical conversion element. A base member to be connected and supported by a predetermined support, and one end thereof is connected to the base member, and the electromechanical conversion element is arranged so as to be separated from the side surface and surrounded by the side surface. A hollow columnar member and an elastic member formed of an elastic material and disposed between a side surface of the electromechanical conversion element and an inner surface of the hollow columnar member.

 上記並びにその他の本発明の目的、特徴及び利点は、以下の詳細な記載と添付図面から明らかになるであろう。 The above and other objects, features and advantages of the present invention will become apparent from the following detailed description and the accompanying drawings.

 本発明にかかる駆動装置および撮像装置は、衝撃等によって生じる応力による破損を比較的簡単な構成によって低減することができる。 The drive device and the imaging device according to the present invention can reduce breakage due to stress caused by an impact or the like with a relatively simple configuration.

第1実施形態の駆動装置を用いた撮像装置の構成を示す断面図である。It is sectional drawing which shows the structure of the imaging device using the drive device of 1st Embodiment. 図1に示す撮像装置に用いられる第1実施形態の駆動装置の構成を示す斜視図である。It is a perspective view which shows the structure of the drive device of 1st Embodiment used for the imaging device shown in FIG. 図1に示す撮像装置に用いられる第1実施形態の駆動装置における第1被覆部材を説明するための図である。It is a figure for demonstrating the 1st coating | coated member in the drive device of 1st Embodiment used for the imaging device shown in FIG. 図1に示す撮像装置に用いられる駆動装置に供給される駆動パルスを説明するための図である。It is a figure for demonstrating the drive pulse supplied to the drive device used for the imaging device shown in FIG. 図1に示す撮像装置に用いられる第2実施形態の駆動装置の構成を示す斜視図である。It is a perspective view which shows the structure of the drive device of 2nd Embodiment used for the imaging device shown in FIG. 図1に示す撮像装置に用いられる第2実施形態の駆動装置における充填材を説明するための図である。It is a figure for demonstrating the filler in the drive device of 2nd Embodiment used for the imaging device shown in FIG. 図1に示す撮像装置に用いられる第3実施形態の駆動装置の構成を示す斜視図である。It is a perspective view which shows the structure of the drive device of 3rd Embodiment used for the imaging device shown in FIG.

 以下、本発明にかかる実施の一形態を図面に基づいて説明する。なお、各図において同一の符号を付した構成は、同一の構成であることを示し、適宜、その説明を省略する。 Hereinafter, an embodiment according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted suitably.

 図1は、実施形態の駆動装置を用いた撮像装置の構成を示す断面図である。実施形態における撮像装置Sは、図1に示すように、駆動装置IMと、光学像を電気的な信号に変換する撮像素子30と、1または複数の光学素子を備え、物体(被写体)の光学像を撮像素子30の受光面上に結像する撮像光学系LSとを備える。そして、駆動装置IMは、撮像光学系LSにおける前記1または複数の光学素子のうちの光軸AX方向に沿って移動する光学素子L1を、例えば変倍や合焦のために移動する。このような撮像装置Sには、第1ないし第3実施形態における駆動装置IMa、IMb、IMcのいずれかが用いられる。 FIG. 1 is a cross-sectional view illustrating a configuration of an imaging apparatus using the driving device of the embodiment. As shown in FIG. 1, the imaging apparatus S according to the embodiment includes a driving device IM, an imaging element 30 that converts an optical image into an electrical signal, and one or a plurality of optical elements. An imaging optical system LS that forms an image on the light receiving surface of the imaging element 30. Then, the driving device IM moves the optical element L1 that moves along the optical axis AX direction among the one or more optical elements in the imaging optical system LS, for example, for zooming or focusing. Any of the driving devices IMa, IMb, and IMc in the first to third embodiments is used for such an imaging device S.

 (第1実施形態)
 図2は、図1に示す撮像装置に用いられる第1実施形態の駆動装置の構成を示す斜視図である。図2Aは、一部分解斜視図であり、図2Bは、全体外観斜視図である。図3は、図1に示す撮像装置に用いられる第1実施形態の駆動装置における弾性部材を説明するための図である。図3Aは、弾性部材15(15’)の充填前の様子を示し、図3Bは、弾性部材15(15’)の充填の様子を示し、図3Cは、第1態様で弾性部材15を充填した弾性部材15の充填後の様子を示し、そして、図3Dは、第2態様で弾性部材15’を充填した弾性部材15’の充填後の様子を示す。図4は、図1に示す撮像装置に用いられる駆動装置に供給される駆動パルスを説明するための図である。図4の横軸は、時間であり、その縦軸は、電圧である。
(First embodiment)
FIG. 2 is a perspective view showing the configuration of the drive device of the first embodiment used in the imaging device shown in FIG. 2A is a partially exploded perspective view, and FIG. 2B is an overall external perspective view. FIG. 3 is a view for explaining an elastic member in the driving apparatus of the first embodiment used in the imaging apparatus shown in FIG. FIG. 3A shows a state before filling the elastic member 15 (15 ′), FIG. 3B shows a state of filling the elastic member 15 (15 ′), and FIG. 3C shows the filling of the elastic member 15 in the first mode. 3D shows the state after the elastic member 15 is filled, and FIG. 3D shows the state after the elastic member 15 ′ filled with the elastic member 15 ′ in the second mode. FIG. 4 is a diagram for explaining drive pulses supplied to a drive device used in the imaging apparatus shown in FIG. The horizontal axis in FIG. 4 is time, and the vertical axis is voltage.

 この第1実施形態の駆動装置IMaを用いた撮像装置Saは、図1に示すように、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、基体部材13と、移動部材14と、弾性部材15と、中空柱状部材16と、パッド17と、ばね18と、駆動回路20と、撮像素子30と、これらを収容する、全体を図示していない筐体40(41、42、43)とを備えている。このような撮像装置Saにおいて、駆動装置IMaは、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、基体部材13と、移動部材14と、弾性部材15と、中空柱状部材16と、パッド17と、ばね18とを備える。 As shown in FIG. 1, the imaging device Sa using the driving device IMa of the first embodiment includes an elastic adhesive fixing member 10, an electromechanical conversion element 11, a driving member 12, a base member 13, and a moving member. 14, the elastic member 15, the hollow columnar member 16, the pad 17, the spring 18, the drive circuit 20, the image pickup device 30, and the housing 40 (41, 42) (not shown) that accommodates them. 43). In such an imaging device Sa, the driving device IMa includes the elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, and the hollow columnar member. 16, a pad 17, and a spring 18.

 電気機械変換素子11は、入力の電気エネルギーを、伸縮する機械エネルギー、すなわち、機械的な運動に変換する素子であり、例えば、入力の電気エネルギーを圧電効果によって機械的な伸縮運動に変換する圧電素子等である。このような圧電素子は、例えば、積層体と、一対の外部電極とを備えている。積層体は、圧電材料から成る薄膜状(層状)の圧電層と導電性を有する薄膜状(層状)の内部電極層とを交互に複数積層して成るものである。積層体は、本実施形態では、四角柱形状となっているが、これに限定されるものではなく、例えば、多角柱状や円柱形状等であってよい。複数の内部電極層は、その一部が互いに対向する一対の外周側面で外部に臨むようにそれぞれ構成されている。一対の外部電極は、積層体における前記一対の外周側面上に積層方向に沿って形成され、前記電気エネルギーを積層体に供給するものであり、前記複数の内部電極と順次交互に接続されている。圧電材料は、例えば、いわゆるPZT、水晶、ニオブ酸リチウム(LiNbO)、ニオブ酸タンタル酸カリウム(K(Ta,Nb)O)、チタン酸バリウム(BaTiO)、タンタル酸リチウム(LiTaO)およびチタン酸ストロンチウム(SrTiO)等の無機圧電材料である。 The electromechanical transducer 11 is an element that converts input electrical energy into mechanical energy that expands and contracts, that is, mechanical motion. For example, a piezoelectric that converts input electrical energy into mechanical elastic motion by the piezoelectric effect. Elements and the like. Such a piezoelectric element includes, for example, a laminated body and a pair of external electrodes. The laminated body is formed by alternately laminating a plurality of thin film (layered) piezoelectric layers made of a piezoelectric material and a conductive thin film (layered) internal electrode layer. In the present embodiment, the laminate has a quadrangular prism shape, but is not limited to this, and may be, for example, a polygonal column shape or a cylindrical shape. Each of the plurality of internal electrode layers is configured to face the outside with a pair of outer peripheral side surfaces facing each other. The pair of external electrodes are formed along the stacking direction on the pair of outer peripheral side surfaces in the stacked body, and supply the electric energy to the stacked body, and are sequentially and alternately connected to the plurality of internal electrodes. . Examples of the piezoelectric material include so-called PZT, quartz, lithium niobate (LiNbO 3 ), potassium tantalate niobate (K (Ta, Nb) O 3 ), barium titanate (BaTiO 3 ), lithium tantalate (LiTaO 3 ). And inorganic piezoelectric materials such as strontium titanate (SrTiO 3 ).

 駆動部材12は、電気機械変換素子(本実施形態では圧電素子)11における伸縮方向の一方端の端面に固定されて連結され、この電気機械変換素子11で電気エネルギーから変換された機械エネルギーが伝達される部材である。より具体的には、駆動部材12は、本実施形態では、圧電素子における前記積層体の一方端の端面に接着剤によって接着固定された柱状(軸状)の部材である。駆動部材12は、全体を図示していない筐体40から延長された一対の支持片41、42によって軸方向aに平行に移動自在に支持されている。これら一対の支持片41、42は、所定の間隔を空けて配置されており、これら一対の支持片41、42の間で駆動部材12に摩擦係合する移動部材14の移動範囲を規定している。駆動部材12の材料は、例えば、金属、樹脂およびカーボン等の任意の材料を用いることができる。駆動部材12の長手方向に直交する断面は、例えば、矩形、多角形、楕円および円形等の任意の形状でよいが、本実施形態では、前記移動部材14が駆動部材12の長手方向に沿って容易に相対移動可能となるように、この断面は、円形となっている。なお、この断面が矩形または多角形である場合には、前記観点から、面取りされていることが好ましい。 The driving member 12 is fixedly connected to an end surface of one end in the expansion / contraction direction of the electromechanical transducer element (piezoelectric element in the present embodiment), and mechanical energy converted from electric energy is transmitted by the electromechanical transducer element 11. It is a member. More specifically, in this embodiment, the drive member 12 is a columnar (shaft-shaped) member that is bonded and fixed to the end surface of one end of the laminate in the piezoelectric element with an adhesive. The drive member 12 is supported by a pair of support pieces 41 and 42 extended from a housing 40 (not shown) so as to be movable in parallel with the axial direction a. The pair of support pieces 41 and 42 are arranged at a predetermined interval, and define a moving range of the moving member 14 that frictionally engages the drive member 12 between the pair of support pieces 41 and 42. Yes. As the material of the drive member 12, for example, any material such as metal, resin, and carbon can be used. The cross section orthogonal to the longitudinal direction of the drive member 12 may be any shape such as a rectangle, a polygon, an ellipse, and a circle, but in the present embodiment, the moving member 14 extends along the longitudinal direction of the drive member 12. The cross section is circular so that it can be moved relatively easily. In addition, when this cross section is a rectangle or a polygon, it is preferable that it is chamfered from the said viewpoint.

 基体部材13は、電気機械変換素子11における伸縮方向の他方端の端面に固定されて連結され、前記筐体40における本体部材43によって支持されるための部材である。基体部材13は、駆動部材12の慣性質量より大きな慣性質量を持つ。より具体的には、基体部材13は、電気機械変換素子11の外形形状に合わせた直径を持つ円柱形状となっており、その一方端の端面で電気機械変換素子11に接着剤によって接着固定されることによって電気機械変換素子11を支持している。基体部材13は、その電気機械変換素子11が固定されていない他方端の端面で前記筐体40における本体部材43の配設面に弾性接着固定部材10によって弾性接着で固定される。このような基体部材13は、駆動部材12の慣性質量より大きいな慣性質量を持つため、前記筐体40の本体部材43に固定されることによって、電気機械変換素子11の伸縮運動に対して静止しており、電気機械変換素子11の伸縮運動は、主に、駆動部材12に伝達されることになる。 The base member 13 is a member that is fixedly connected to the other end face of the electromechanical conversion element 11 in the expansion / contraction direction and is supported by the main body member 43 in the casing 40. The base member 13 has an inertial mass greater than that of the drive member 12. More specifically, the base member 13 has a cylindrical shape having a diameter matched to the outer shape of the electromechanical conversion element 11, and is bonded and fixed to the electromechanical conversion element 11 with an adhesive at one end face thereof. Thus, the electromechanical conversion element 11 is supported. The base member 13 is fixed by elastic bonding by the elastic bonding fixing member 10 to the arrangement surface of the main body member 43 in the housing 40 at the other end face where the electromechanical conversion element 11 is not fixed. Since the base member 13 has an inertial mass that is larger than the inertial mass of the drive member 12, the base member 13 is fixed to the body member 43 of the housing 40, so that the base member 13 is stationary with respect to the expansion and contraction motion of the electromechanical transducer 11. Thus, the expansion and contraction motion of the electromechanical conversion element 11 is mainly transmitted to the drive member 12.

 弾性接着固定部材10は、上述したように、基体部材13を筐体40の本体部材43に弾性的に接着固定するための部材であり、弾性接着剤から成る。筐体40の本体部材43は、所定の支持体の一例に相当する。弾性接着剤は、例えば空気中の水分と反応して硬化するシリコーンゴム系の接着剤や、紫外線を照射することによって硬化するアクリルゴム系の接着剤である。このように基体部材13が弾性接着剤によって筐体40に固定されるため、前記衝撃等によって駆動装置IMaに伝達される衝撃力や変形が緩和され、各部材の連結部分等の曲げ力に比較的弱い部分の破損を低減できる。 As described above, the elastic adhesive fixing member 10 is a member for elastically bonding and fixing the base member 13 to the main body member 43 of the housing 40, and is made of an elastic adhesive. The main body member 43 of the housing 40 corresponds to an example of a predetermined support. The elastic adhesive is, for example, a silicone rubber-based adhesive that cures by reacting with moisture in the air, or an acrylic rubber-based adhesive that cures when irradiated with ultraviolet rays. Since the base member 13 is fixed to the housing 40 by the elastic adhesive in this way, the impact force and deformation transmitted to the driving device IMa due to the impact or the like are alleviated, and compared with the bending force of the connecting portion of each member. The damage of the weak part can be reduced.

 移動部材14は、駆動部材12に所定の摩擦力で係合される部材であり、駆動部材12に対して摺動するものである。本実施形態では、移動部材14は、光学素子の一例であるレンズL1を支持して保持するレンズ保持枠とされている。 The moving member 14 is a member that is engaged with the driving member 12 with a predetermined frictional force, and slides with respect to the driving member 12. In the present embodiment, the moving member 14 is a lens holding frame that supports and holds a lens L1, which is an example of an optical element.

 このレンズ保持枠の移動部材14には、外周の一部が延長されてスライダブロック141が形成されている。このスライダブロック141には、光軸AXの方向に沿って貫通開口が形成されており、この貫通開口に駆動部材12が挿通されている。この光軸AXの方向と駆動部材12の軸方向aとは、平行とされている。また、スライダブロック141の中央には、切り欠き部142が形成されており、この切り欠き部142において駆動部材12の径方向半分が露出している。そして、この切り欠き部142には、駆動部材12の径方向半分に当接するパッド17が嵌挿され、このパッド17には、ばね18によって駆動部材12へ向かう方向の付勢力が与えられている。このような構造によってパッド17を含む移動部材14と駆動部材12とは、ばね18の付勢力によって圧接され、所定の摩擦力で摩擦係合している。なお、移動部材14と駆動部材12とを摩擦係合させる構造は、このような構造に限定されない。 The moving member 14 of the lens holding frame has a slider block 141 formed by extending a part of the outer periphery. A through opening is formed in the slider block 141 along the direction of the optical axis AX, and the drive member 12 is inserted through the through opening. The direction of the optical axis AX and the axial direction a of the drive member 12 are parallel to each other. Further, a notch 142 is formed at the center of the slider block 141, and the radial half of the drive member 12 is exposed at the notch 142. A pad 17 that contacts the half of the driving member 12 in the radial direction is fitted into the notch 142, and a biasing force in the direction toward the driving member 12 is applied to the pad 17 by a spring 18. . With such a structure, the moving member 14 including the pad 17 and the driving member 12 are pressed against each other by the urging force of the spring 18 and frictionally engaged with each other with a predetermined frictional force. The structure that frictionally engages the moving member 14 and the driving member 12 is not limited to such a structure.

 中空柱状部材16は、一方端を基体部材13に連結し、電気機械変換素子11における伸縮方向に対する側面から所定の間隔を空けて離隔して前記側面で電気機械変換素子11の周囲を囲むように配置される部材である。図1に示す例では、まず、基体部材13は、第1直径の(大径な)短高円柱形状である下部部材と、前記第1直径より小さい第2直径の(小径な)短高円柱形状である上部部材とを備え、これら下部部材および上部部材は、各軸を一致させて積層されて一体に形成される。例えば、基体部材13は、タングステン合金の一体の焼結品である。したがって、基体部材13には、下部部材における上部部材を積層した面には、上部部材の周縁を囲む環状(リング状)の平坦面が形成される。基体部材13がこのような形状であるので、中空柱状部材16は、大略、電気機械変換素子11の外形形状に応じた内形形状を持つ中空の柱状体(例えば円筒体等)である。そして、中空柱状部材16における一方端の端面は、基体部材13の下部部材における前記平坦面に当接して接着固定され、前記一方端の内周面は、基体部材13の上部部材の周面を被覆して接着固定される。これによって電気機械変換素子11の側面(周面)と中空柱状部材16の内面(内周面)との間に、基体部材13の上部部材の主面を底面とする凹部が形成され、後述のように、この凹部(充填槽)に弾性部材15の充填が可能となる。中空柱状部材16は、例えば、金属(合金を含む)、樹脂等の材料によって形成される。 The hollow columnar member 16 is connected to the base member 13 at one end, and spaced apart from the side surface in the expansion / contraction direction of the electromechanical conversion element 11 by a predetermined distance so as to surround the periphery of the electromechanical conversion element 11 on the side surface. It is a member to be arranged. In the example shown in FIG. 1, first, the base member 13 includes a lower member having a first diameter (large diameter) short and high columnar shape, and a second diameter (small diameter) short and high column smaller than the first diameter. An upper member having a shape, and the lower member and the upper member are integrally formed by being laminated with their axes aligned. For example, the base member 13 is an integrally sintered product of tungsten alloy. Therefore, an annular (ring-shaped) flat surface surrounding the periphery of the upper member is formed on the base member 13 on the surface of the lower member on which the upper member is laminated. Since the base member 13 has such a shape, the hollow columnar member 16 is generally a hollow columnar body (for example, a cylindrical body) having an inner shape corresponding to the outer shape of the electromechanical transducer 11. The end surface of one end of the hollow columnar member 16 is in contact with and fixed to the flat surface of the lower member of the base member 13, and the inner peripheral surface of the one end is the peripheral surface of the upper member of the base member 13. It is covered and adhesively fixed. As a result, a recess whose bottom surface is the main surface of the upper member of the base member 13 is formed between the side surface (circumferential surface) of the electromechanical conversion element 11 and the inner surface (inner peripheral surface) of the hollow columnar member 16. As described above, the elastic member 15 can be filled in the recess (filling tank). The hollow columnar member 16 is formed of a material such as metal (including an alloy) or resin, for example.

 なお、基体部材13は、柱状形状の部材であって、中空柱状部材16は、大略、電気機械変換素子11の外形形状に応じた内形形状を持つ中空の柱状体(例えば円筒体等)であり、中空柱状部材16における一方端の端面は、前記筐体40における本体部材43の配設面に当接して接着固定され、前記一方端の内周面は、基体部材13の周面を被覆して接着固定されてもよい。 The base member 13 is a columnar member, and the hollow columnar member 16 is a hollow columnar body (for example, a cylindrical body) having an inner shape corresponding to the outer shape of the electromechanical transducer 11. Yes, the end surface of one end of the hollow columnar member 16 is in contact with and fixed to the mounting surface of the main body member 43 of the housing 40, and the inner peripheral surface of the one end covers the peripheral surface of the base member 13. Then, it may be bonded and fixed.

 弾性部材15は、弾性材料から形成され、電気機械変換素子11における伸縮方向に対する側面と中空柱状部材16の内面との間に配置され、電気機械変換素子11の前記側面の一部または全部を被覆する部材である。弾性部材15は、中空柱状部材16に対して電気機械変換素子11を支持する。このような弾性部材15は、後述するように、例えばエポキシ系接着剤やアクリレート系接着剤を固化したものである。そして、好ましくは、弾性部材15は、電気機械変換素子11の弾性率よりも小さな弾性率を持つ材料で形成される。弾性部材15は、側面で電気機械変換素子11の周囲を囲むように配置されるため、電気機械変換素子11の伸縮運動を妨げるように働くが、このように弾性部材15の弾性率が電気機械変換素子11の弾性率よりも小さいので、電気機械変換素子11の伸縮運動を弾性部材15によって妨げることを抑制できる。 The elastic member 15 is formed of an elastic material, and is disposed between the side surface of the electromechanical conversion element 11 with respect to the expansion / contraction direction and the inner surface of the hollow columnar member 16, and covers part or all of the side surface of the electromechanical conversion element 11. It is a member to do. The elastic member 15 supports the electromechanical conversion element 11 with respect to the hollow columnar member 16. Such an elastic member 15 is obtained by solidifying, for example, an epoxy adhesive or an acrylate adhesive, as will be described later. Preferably, the elastic member 15 is formed of a material having an elastic modulus smaller than that of the electromechanical transducer 11. Since the elastic member 15 is disposed so as to surround the electromechanical conversion element 11 on the side surface, the elastic member 15 works to prevent the electromechanical conversion element 11 from expanding and contracting. Thus, the elastic modulus of the elastic member 15 is the electric machine. Since it is smaller than the elasticity modulus of the conversion element 11, it can suppress that the elastic member 15 prevents the expansion-contraction movement of the electromechanical conversion element 11 from occurring.

 このような第1実施形態の駆動装置IMaは、例えば、次のように作製される。まず、図2Aに示すように、電気機械変換素子11における一方端の端面に駆動部材12が接着固定され、その他方端の端面に基体部材13が接着固定される。次に、中空柱状部材16が駆動部材12および電気機械変換素子11を挿通して基体部材13に接着固定される。これら各接着固定には、例えばエポキシ系接着剤やアクリレート系接着剤等の接着剤が用いられる。 For example, the drive device IMa of the first embodiment is manufactured as follows. First, as shown in FIG. 2A, the drive member 12 is bonded and fixed to the end surface of one end of the electromechanical conversion element 11, and the base member 13 is bonded and fixed to the end surface of the other end. Next, the hollow columnar member 16 is bonded and fixed to the base member 13 through the drive member 12 and the electromechanical conversion element 11. For each of these adhesive fixings, for example, an adhesive such as an epoxy adhesive or an acrylate adhesive is used.

 このように中空柱状部材16が所定の間隔を空けて電気機械変換素子11の側面を囲むように基体部材13に取り付けられると、図3Aに示すように、中空柱状部材16の内周面と電気機械変換素子11の側面との間には、基体部材13の上部部材の上面を底面とし、この底面に軸方向で対向する方向を開口した、平面視にて環状の凹部が形成される。そして、この凹部に、図3Bに示すように、前記開口から、所定の接着剤を吐出する接着剤吐出装置EF-1、EF-2によって例えばエポキシ系接着剤やアクリレート系接着剤等の接着剤が充填され、加熱硬化あるいは紫外線硬化される。これによって、図3CおよびDに示すように、電気機械変換素子11の側面と中空柱状部材16の内面との間に電気機械変換素子11の側面および中空柱状部材16の内面それぞれに接して配置される弾性部材15(15’)が形成され、図2Bに示す第1実施形態の駆動装置IMa(IMa’)が作製される。 When the hollow columnar member 16 is attached to the base member 13 so as to surround the side surface of the electromechanical conversion element 11 with a predetermined interval in this manner, as shown in FIG. Between the side surfaces of the mechanical conversion element 11, an annular recess is formed in plan view with the upper surface of the upper member of the base member 13 as the bottom surface and an opening in the direction opposite to the bottom surface in the axial direction. Then, as shown in FIG. 3B, an adhesive such as an epoxy adhesive or an acrylate adhesive is discharged into the recess by an adhesive discharge device EF-1 or EF-2 that discharges a predetermined adhesive from the opening. Are filled and heat-cured or UV-cured. Thus, as shown in FIGS. 3C and 3D, the electromechanical conversion element 11 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in contact with the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16. The elastic member 15 (15 ′) is formed, and the driving device IMa (IMa ′) of the first embodiment shown in FIG. 2B is manufactured.

 ここで、前記凹部への接着剤は、図3Cに示すように、駆動部材12を被覆しないように、電気機械変換素子11における軸方向の途中位置の高さまで充填され、弾性部材15は、電気機械変換素子11における側面の一部で電気機械変換素子11の周囲を囲むように配置されてよい。あるいは、図3Dに示すように、駆動部材12の周囲を被覆する高さまで充填され、弾性部材15’は、電気機械変換素子11における側面の全部で電気機械変換素子11の周囲を囲むように配置されてよい。例えば落下等による衝撃が生じると、電気機械変換素子11には曲げ応力が加わるが、この曲げ応力は、電気機械変換素子11の基体部材13近傍が最も大きい。このため、弾性部材15は、図3Cに示す第1態様のように、少なくとも、電気機械変換素子11の基体部材13近傍を被覆する必要がある。このような第1態様では、弾性部材15が電気機械変換素子11における側面の一部に配置されるので、電気機械変換素子11の伸縮を弾性部材15によって妨げることを抑制できる。そして、図3Dに示す第2態様では、弾性部材15’が電気機械変換素子11における側面の全部に配置されるので、例えば落下等によって筐体40が受けた衝撃力および筐体40の変形が電気機械変換素子11に伝達されることをより緩和することができ、破損をより低減でき、耐衝撃性を高めることができる。さらに、この図3Dに示す第2態様では、弾性部材15’が駆動部材12を被覆すると、駆動部材12も電気機械変換素子11と一体に被覆されるため、前記衝撃が生じた場合に、電気機械変換素子11に加わる曲げ応力をより低減できる。 Here, as shown in FIG. 3C, the adhesive to the concave portion is filled up to a height in the axial direction of the electromechanical transducer 11 so as not to cover the driving member 12, and the elastic member 15 The electromechanical conversion element 11 may be disposed so as to surround a part of the side surface of the mechanical conversion element 11. Alternatively, as illustrated in FIG. 3D, the driving member 12 is filled up to a height that covers the periphery of the driving member 12, and the elastic member 15 ′ is disposed so as to surround the periphery of the electromechanical conversion element 11 on the entire side surface of the electromechanical conversion element 11. May be. For example, when an impact due to dropping or the like occurs, bending stress is applied to the electromechanical conversion element 11, and this bending stress is greatest in the vicinity of the base member 13 of the electromechanical conversion element 11. Therefore, the elastic member 15 needs to cover at least the vicinity of the base member 13 of the electromechanical transducer 11 as in the first mode shown in FIG. 3C. In such a 1st aspect, since the elastic member 15 is arrange | positioned at a part of side surface in the electromechanical conversion element 11, it can suppress that the expansion / contraction of the electromechanical conversion element 11 is prevented by the elastic member 15. In the second mode shown in FIG. 3D, since the elastic member 15 ′ is disposed on all the side surfaces of the electromechanical transducer 11, the impact force received by the housing 40 due to, for example, dropping or the deformation of the housing 40 is reduced. Transmission to the electromechanical conversion element 11 can be further relaxed, damage can be further reduced, and impact resistance can be enhanced. Further, in the second mode shown in FIG. 3D, when the elastic member 15 ′ covers the drive member 12, the drive member 12 is also integrally covered with the electromechanical conversion element 11. The bending stress applied to the mechanical conversion element 11 can be further reduced.

 なお、図3Cに示す第1態様の場合では、中空柱状部材16における軸方向の長さは、弾性部材15が充填される位置まであってもよい。 In the case of the first mode shown in FIG. 3C, the axial length of the hollow columnar member 16 may be up to the position where the elastic member 15 is filled.

 図1に戻って、駆動回路20は、電気機械変換素子11を駆動するために、電気機械変換素子11に供給される所定の駆動パルスを生成する回路である。駆動回路20には、例えば、図4に示す鋸歯状波の駆動パルスを発振する公知の発振回路を使用することができる。この鋸歯状波の駆動パルスの周波数は、20ないし30kHz程度にすると振動周波数が可聴域を外れ、人間の耳に聞こえる振動音を少なくすることができるが、任意の周波数であってよい。このような駆動回路20から図4に示す鋸歯状波の駆動パルスが電気機械変換素子11に供給されると、鋸歯状波の駆動パルスにおける緩やかな立上り部分では、電気機械変換素子11が緩やかに伸縮方向に伸び変位し、電気機械変換素子11に接着固定されている駆動部材12も、軸方向aに緩やかに変位する。この場合に、駆動部材12に摩擦係合している移動部材14のスライダブロック141は、その摩擦力により駆動部材12と共に軸方向aに移動する。そして、鋸歯状波の駆動パルスにおける急速な立下り部分では、電気機械変換素子11が急速に伸縮方向に縮み変位し、駆動部材12も、軸方向aと反対方向に急速に変位する。この場合に、移動部材14のスライダブロック141は、慣性力により摩擦力に打ち勝ってその位置に留まり、実質的に移動しない。これを連続的に繰り返すことにより、移動部材14のスライダブロック141は、軸方向aに移動する。そして、鋸歯状波の駆動パルスの波形を逆転させ、急速な立上り部分とこれに続く緩やかな立下り部分とからなる鋸歯状波の駆動パルスを電気機械変換素子11に供給することによって、移動部材14のスライダブロック141は、上述と逆方向に移動する。 1, the drive circuit 20 is a circuit that generates a predetermined drive pulse supplied to the electromechanical conversion element 11 in order to drive the electromechanical conversion element 11. As the drive circuit 20, for example, a known oscillation circuit that oscillates a sawtooth drive pulse shown in FIG. 4 can be used. When the frequency of the sawtooth drive pulse is about 20 to 30 kHz, the vibration frequency is out of the audible range, and the vibration sound that can be heard by the human ear can be reduced. However, the frequency may be any frequency. When the drive pulse of the sawtooth wave shown in FIG. 4 is supplied from the drive circuit 20 to the electromechanical conversion element 11, the electromechanical conversion element 11 becomes loose at the gentle rising portion of the drive pulse of the sawtooth wave. The drive member 12 that is extended and displaced in the expansion / contraction direction and is bonded and fixed to the electromechanical conversion element 11 is also gradually displaced in the axial direction a. In this case, the slider block 141 of the moving member 14 that is frictionally engaged with the driving member 12 moves in the axial direction a together with the driving member 12 by the frictional force. At the rapid falling portion of the sawtooth drive pulse, the electromechanical transducer 11 is rapidly contracted and displaced in the expansion / contraction direction, and the drive member 12 is also displaced in the direction opposite to the axial direction a. In this case, the slider block 141 of the moving member 14 overcomes the frictional force by the inertial force, stays at that position, and does not substantially move. By repeating this continuously, the slider block 141 of the moving member 14 moves in the axial direction a. Then, by reversing the waveform of the sawtooth driving pulse and supplying the electromechanical transducer 11 with a sawtooth driving pulse composed of a rapid rising portion and a subsequent gentle falling portion, the moving member Fourteen slider blocks 141 move in the opposite direction.

 また例えば、駆動回路20には、所定のデューティー比(例えば3:7や7:3)を持つ矩形パルスを駆動パルスとして発振する公知の4個のスイッチング素子によるHブリッジ回路や、2個のスイッチング素子によるハーフブリッジ回路を使用することができる。前記所定のデューティー比は、例えば3:7や7:3であり、このようにデューティー比を逆転することによって移動部材14の進行方向を逆転することができる。 Further, for example, the driving circuit 20 includes an H bridge circuit including four known switching elements that oscillate with a rectangular pulse having a predetermined duty ratio (for example, 3: 7 or 7: 3) as a driving pulse, or two switching elements. A half-bridge circuit with elements can be used. The predetermined duty ratio is, for example, 3: 7 or 7: 3, and the traveling direction of the moving member 14 can be reversed by reversing the duty ratio in this way.

 撮像素子30は、全体を図示していない撮像光学系LSによって結像された物体(被写体)の光学像における光量に応じてR(赤)、G(緑)、B(青)の各成分の画像信号に光電変換して、所定の画像処理を行う画像処理回路(不図示)へ出力する素子である。撮像素子30は、例えば、CCD型のイメージセンサや、CMOS型のイメージセンサ等である。 The image sensor 30 has R (red), G (green), and B (blue) components according to the amount of light in an optical image of an object (subject) imaged by an imaging optical system LS (not shown) as a whole. This is an element that performs photoelectric conversion to an image signal and outputs it to an image processing circuit (not shown) that performs predetermined image processing. The image sensor 30 is, for example, a CCD image sensor, a CMOS image sensor, or the like.

 前記撮像光学系LSは、1または複数の光学素子を備え、物体(被写体)の光学像を撮像素子30の受光面上に結像する。レンズ保持枠の移動部材14に取り付けられている上述のレンズL1は、このような撮像光学系LSにおける前記1または複数の光学素子のうちの光軸AXに沿って移動する光学素子である。レンズL1は、1枚のレンズであってよく、また複数のレンズを備えるレンズ群であってもよい。レンズL1は、例えば、フォーカシング(合焦)を行うために光軸AXに沿って移動するレンズであってよく、また例えば、ズーミング(変倍)を行うために光軸AXに沿って移動するレンズであってよい。このようなレンズL1を備える撮像光学系LSによって物体の光学像が、その光軸AXに沿って撮像素子30の受光面まで導かれ、撮像素子30によって前記物体の光学像が撮像される。 The imaging optical system LS includes one or more optical elements, and forms an optical image of an object (subject) on the light receiving surface of the imaging element 30. The above-described lens L1 attached to the moving member 14 of the lens holding frame is an optical element that moves along the optical axis AX among the one or more optical elements in the imaging optical system LS. The lens L1 may be a single lens or a lens group including a plurality of lenses. The lens L1 may be, for example, a lens that moves along the optical axis AX to perform focusing (focusing), and, for example, a lens that moves along the optical axis AX to perform zooming (magnification). It may be. The optical image of the object is guided to the light receiving surface of the image sensor 30 along the optical axis AX by the imaging optical system LS including such a lens L1, and the optical image of the object is captured by the image sensor 30.

 このような第1実施形態における撮像装置Saおよび駆動装置IMaは、当該駆動装置IMaが基体部材13によって筐体40の本体部材43に支持され、該基体部材13には中空柱状部材16が連結される。そして、電気機械変換素子11の側面と中空柱状部材16の内面との間には弾性部材15が配置され、弾性部材15を介して電気機械変換素子11が中空柱状部材16に支持される。このため、このような撮像装置Saおよび駆動装置IMaでは、例えば落下等によって筐体40が受けた衝撃力および筐体40の変形は、基体部材13および中空柱状部材16に伝達され、これによって基体部材13および中空柱状部材16が一体的に撓むが、これら基体部材13および中空柱状部材16は、互いに連結されているため剛性が高くなり、この結果、前記衝撃力や前記変形による撓みを抑制することができる。そして、弾性部材15(15’)は、力学モデルでは電気機械変換素子11の側面と中空柱状部材16の内面との間に配置されたバネ成分および粘性成分として機能するため、曲げ力に比較的弱い電気機械変換素子11に伝達される前記衝撃力や前記変形を緩和することができ、その破損を低減できる。このように本実施形態における撮像装置Saおよび駆動装置IMaでは、前記筐体40に対し当該駆動装置IMaを支持する機能を基体部材13および中空柱状部材16が受け持つとともに、前記衝撃力や前記変形による電気機械変換素子11の振動および撓みを抑制する機能を弾性部材15が受け持ち、前記筐体40に対し当該駆動装置IMaを支持する機能と前記衝撃力や前記変形による電気機械変換素子11の振動および撓みを抑制する機能とが、別の部材に分けられている。中空柱状部材16は、前記衝撃等に対し筐体40の揺れに伴って揺れ、略変形しない程度の硬さ(剛性)を有していることが好ましく、弾性部材15を支持する。一方、弾性部材15は、前記衝撃等を吸収できる程度の軟らかさ(弾性)を有していることが好ましい。中空柱状部材16は、例えば、200GPa程度のヤング率を有する金属(合金を含む)材料であることが好ましく、これに対し、弾性部材15は、例えば10MPa~1GPa程度のヤング率(中空柱状部材16のヤング率に対し4桁~2桁程度小さいヤング率)を有する樹脂材料であることが好ましい。 In the imaging device Sa and the driving device IMa in the first embodiment, the driving device IMa is supported by the main body member 43 of the housing 40 by the base member 13, and the hollow columnar member 16 is connected to the base member 13. The An elastic member 15 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16, and the electromechanical conversion element 11 is supported by the hollow columnar member 16 via the elastic member 15. For this reason, in such an imaging device Sa and driving device IMa, for example, the impact force received by the housing 40 due to dropping or the like and the deformation of the housing 40 are transmitted to the base member 13 and the hollow columnar member 16, thereby The member 13 and the hollow columnar member 16 are integrally bent. However, since the base member 13 and the hollow columnar member 16 are connected to each other, the rigidity is increased. As a result, the bending due to the impact force or the deformation is suppressed. can do. The elastic member 15 (15 ′) functions as a spring component and a viscous component disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in the dynamic model, so that the bending force is relatively low. The impact force and the deformation transmitted to the weak electromechanical conversion element 11 can be relaxed, and the breakage can be reduced. As described above, in the imaging device Sa and the driving device IMa in the present embodiment, the base member 13 and the hollow columnar member 16 have a function of supporting the driving device IMa with respect to the housing 40, and the impact force and the deformation. The elastic member 15 has a function of suppressing the vibration and deflection of the electromechanical conversion element 11, supports the drive device IMa with respect to the housing 40, and the vibration of the electromechanical conversion element 11 due to the impact force and the deformation. The function of suppressing the bending is divided into different members. The hollow columnar member 16 preferably has a hardness (rigidity) that does not substantially deform and sway as the housing 40 sways with respect to the impact or the like, and supports the elastic member 15. On the other hand, the elastic member 15 preferably has a softness (elasticity) enough to absorb the impact or the like. The hollow columnar member 16 is preferably a metal (including alloy) material having a Young's modulus of about 200 GPa, for example, whereas the elastic member 15 has a Young's modulus (hollow columnar member 16 of, for example, about 10 MPa to 1 GPa). It is preferable that the resin material has a Young's modulus that is smaller by about 4 to 2 digits than the Young's modulus.

 以上から、このような本実施形態における撮像装置Saおよび駆動装置IMaは、基体部材13、中空柱状部材16および弾性部材15の比較的簡単な構成で、衝撃等によって生じる応力による破損を低減することができる。 From the above, the imaging device Sa and the driving device IMa in the present embodiment as described above can reduce damage due to stress caused by an impact or the like with a relatively simple configuration of the base member 13, the hollow columnar member 16, and the elastic member 15. Can do.

 なお、弾性部材15(15’)は、上述のように、前記衝撃等から電気機械変換素子11の破損を防止する機能を有する一方、電気機械変換素子11の伸縮運動を妨げる機能も有している。したがって、弾性部材15(15’)の弾性率は、これら破損防止機能と伸縮運動阻害機能とを勘案して、駆動装置IMaに要求される性能に応じて適宜に設定される。例えば、破損防止機能が伸縮運動阻害機能より優先される場合には、弾性部材15(15’)は、弾性率が比較的高いゴム系接着剤以外の例えばエポキシ系接着剤やアクリレート系接着剤が好ましく、また例えば、伸縮運動阻害機能が破損防止機能より優先される場合には、弾性部材15(15’)は、弾性率が比較的低いシリコーンゴム系接着剤やアクリルゴム系接着剤が好ましい。そして、上述したように、弾性部材15(15’)は、電気機械変換素子11の弾性率よりも小さい弾性率であることが好ましい。 As described above, the elastic member 15 (15 ′) has a function of preventing the electromechanical conversion element 11 from being damaged due to the impact or the like, and also has a function of preventing the electromechanical conversion element 11 from expanding and contracting. Yes. Therefore, the elastic modulus of the elastic member 15 (15 ') is appropriately set according to the performance required for the driving device IMa in consideration of the breakage preventing function and the expansion / contraction motion inhibiting function. For example, when the breakage prevention function is given priority over the expansion / contraction motion inhibiting function, the elastic member 15 (15 ′) is made of, for example, an epoxy adhesive or an acrylate adhesive other than a rubber adhesive having a relatively high elastic modulus. For example, in the case where the expansion / contraction inhibition function has priority over the damage prevention function, the elastic member 15 (15 ′) is preferably a silicone rubber adhesive or an acrylic rubber adhesive having a relatively low elastic modulus. As described above, the elastic member 15 (15 ′) preferably has an elastic modulus smaller than that of the electromechanical transducer 11.

 次に、別の実施形態について説明する。 Next, another embodiment will be described.

 (第2実施形態)
 図5は、図1に示す撮像装置に用いられる第2実施形態の駆動装置の構成を示す斜視図である。図5AおよびCは、一部分解斜視図であり、図5Bは、被覆部材19を装着後の全体外観斜視図であり、図5Dは、全体外観斜視図である。図6は、図1に示す撮像装置に用いられる第2実施形態の駆動装置における弾性部材を説明するための図である。図6Aは、弾性部材15(15”)の充填前の様子を示し、図6Bは、弾性部材15(15”)の充填の様子を示し、図6Cは、第3態様で弾性部材15を充填した弾性部材15の充填後の様子を示し、そして、図6Dは、第4態様で弾性部材15”を充填した弾性部材15”の充填後の様子を示す。
(Second Embodiment)
FIG. 5 is a perspective view illustrating a configuration of a driving device according to a second embodiment used in the imaging device illustrated in FIG. 1. 5A and 5C are partially exploded perspective views, FIG. 5B is an overall external perspective view after the covering member 19 is mounted, and FIG. 5D is an overall external perspective view. FIG. 6 is a view for explaining an elastic member in the driving device of the second embodiment used in the imaging device shown in FIG. 1. FIG. 6A shows a state before filling of the elastic member 15 (15 ″), FIG. 6B shows a state of filling of the elastic member 15 (15 ″), and FIG. 6C shows the filling of the elastic member 15 in the third mode. 6D shows the state after the elastic member 15 is filled, and FIG. 6D shows the state after the elastic member 15 ″ filled with the elastic member 15 ″ in the fourth embodiment.

 第2実施形態における駆動装置IMbは、第1実施形態の駆動装置IMaに対し、電気機械変換素子11と駆動部材12との固定部分を被覆する被覆部材19をさらに備えるものである。 The driving device IMb in the second embodiment further includes a covering member 19 that covers a fixed portion between the electromechanical conversion element 11 and the driving member 12 with respect to the driving device IMa in the first embodiment.

 この第2実施形態の駆動装置IMbを用いた撮像装置Sbは、図1に示すように、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、基体部材13と、移動部材14と、弾性部材15と、中空柱状部材16と、破線で示す被覆部材19と、パッド17と、ばね18と、駆動回路20と、撮像素子30と、これらを収容する、全体を図示していない筐体40(41、42、43)とを備えている。このような撮像装置Sbにおいて、駆動装置IMbは、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、基体部材13と、移動部材14と、弾性部材15と、中空柱状部材16と、被覆部材19と、パッド17と、ばね18とを備える。 As shown in FIG. 1, the imaging device Sb using the driving device IMb of the second embodiment includes an elastic adhesive fixing member 10, an electromechanical transducer 11, a driving member 12, a base member 13, and a moving member. 14, an elastic member 15, a hollow columnar member 16, a covering member 19 indicated by a broken line, a pad 17, a spring 18, a drive circuit 20, an image pickup device 30, and the whole housing these components. And a casing 40 (41, 42, 43) not provided. In such an imaging device Sb, the driving device IMb includes the elastic adhesive fixing member 10, the electromechanical transducer 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, and the hollow columnar member. 16, a covering member 19, a pad 17, and a spring 18.

 これら第2実施形態における弾性接着固定部材10、電気機械変換素子11、駆動部材12、基体部材13、移動部材14、弾性部材15、中空柱状部材16、パッド17、ばね18、駆動回路20、撮像素子30および筐体40は、それぞれ、第1実施形態における弾性接着固定部材10、電気機械変換素子11、駆動部材12、基体部材13、移動部材14、弾性部材15、中空柱状部材16、パッド17、ばね18、駆動回路20、撮像素子30および筐体40と同様であるので、その説明を省略する。 In these second embodiments, the elastic adhesive fixing member 10, electromechanical conversion element 11, driving member 12, base member 13, moving member 14, elastic member 15, hollow columnar member 16, pad 17, spring 18, driving circuit 20, imaging The element 30 and the housing 40 are respectively the elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the base member 13, the moving member 14, the elastic member 15, the hollow columnar member 16, and the pad 17 in the first embodiment. Since this is the same as the spring 18, the drive circuit 20, the image sensor 30, and the housing 40, description thereof is omitted.

 被覆部材19は、電気機械変換素子11と駆動部材12との固定部分を被覆する部材である。より具体的には、被覆部材19は、前記固定部分近傍の電気機械変換素子11の基部を被覆する、電気機械変換素子11の外形形状に応じた内形形状を持つ第1中空短高柱状部分191と、前記固定部分近傍の駆動部材12の基部を被覆する、駆動部材12の外形形状に応じた内形形状を持つ第2中空短高柱状部分192と、第1中空短高柱状部分191の一方端部と第2中空短高柱状部分192の他方端部とを互いに連結する環状連結部分193とを備える。図5に示す例では、第1中空短高柱状部分191は、中空短高の四角柱部材であり、第2中空短高柱状部分192は、短高の筒状部材(中空短高の円柱部材)であり、環状連結部分193は、第2中空短高柱状部分192の外直径に応じた直径の円形開口を形成した環状板部材であって、第1中空短高柱状部分191の外形に応じた大きさの外形四角形である環状板部材である。被覆部材19は、例えば、金属、樹脂等の材料によって形成される。 The covering member 19 is a member that covers a fixed portion between the electromechanical conversion element 11 and the driving member 12. More specifically, the covering member 19 covers the base portion of the electromechanical conversion element 11 in the vicinity of the fixed portion, and has a first hollow short columnar portion having an inner shape corresponding to the outer shape of the electromechanical conversion element 11. 191, a second hollow short columnar portion 192 having an inner shape corresponding to the outer shape of the driving member 12 covering the base of the driving member 12 near the fixed portion, and a first hollow short columnar portion 191 And an annular connecting portion 193 that connects the one end and the other end of the second hollow short columnar portion 192 to each other. In the example shown in FIG. 5, the first hollow short high columnar portion 191 is a hollow short high columnar column member, and the second hollow short high columnar portion 192 is a short high tubular member (a hollow short high columnar member). The annular connecting portion 193 is an annular plate member in which a circular opening having a diameter corresponding to the outer diameter of the second hollow short columnar portion 192 is formed, and corresponds to the outer shape of the first hollow short columnar portion 191. This is an annular plate member having an outer shape of a certain size. The covering member 19 is formed of a material such as metal or resin, for example.

 このような第2実施形態の駆動装置IMbは、例えば、次のように作製される。まず、第1実施形態の駆動装置IMaと同様に、図5Aに示すように、電気機械変換素子11における両端の各端面に駆動部材12および基体部材13がそれぞれ接着固定される。 For example, the drive device IMb of the second embodiment is manufactured as follows. First, similarly to the drive device IMa of the first embodiment, as shown in FIG. 5A, the drive member 12 and the base member 13 are bonded and fixed to the end surfaces at both ends of the electromechanical transducer 11 respectively.

 次に、第1中空短高柱状部分191の他方端部から、第2中空短高柱状部分192に駆動部材12が挿通され、その内側に接着剤が充填されて第1中空短高柱状部分191に電気機械変換素子11の基部が嵌め込まれる。この接着剤には、例えばエポキシ系接着剤やアクリレート系接着剤等の接着剤が用いられる。これによって、図5Bに示すように、電気機械変換素子11と駆動部材12との固定部分を被覆するように、電気機械変換素子11、駆動部材12および被覆部材19が一体的に接着固定される。なお、これら電気機械変換素子11に対する駆動部材12および基体部材13の接着と前記固定部分に対する被覆部材19の接着とが同時に実施されてもよい。 Next, the driving member 12 is inserted into the second hollow short columnar portion 192 from the other end of the first hollow short columnar portion 191, and the inside is filled with an adhesive, so that the first hollow short columnar portion 191 is filled. The base of the electromechanical conversion element 11 is fitted in For example, an adhesive such as an epoxy adhesive or an acrylate adhesive is used as the adhesive. As a result, as shown in FIG. 5B, the electromechanical conversion element 11, the drive member 12, and the covering member 19 are integrally bonded and fixed so as to cover the fixed portion between the electromechanical conversion element 11 and the drive member 12. . The driving member 12 and the base member 13 may be bonded to the electromechanical conversion element 11 and the covering member 19 may be bonded to the fixed portion at the same time.

 以下、図5C、図6Aおよび図6Bに示すように、第1実施形態の駆動装置IMaと同様に、中空柱状部材16が基体部材13に接着固定され、前記開口から接着剤吐出装置EF-1、EF-2によって弾性部材15となる接着剤が前記凹部に充填され、硬化される。これによって、図6CおよびDに示すように、電気機械変換素子11の側面と中空柱状部材16の内面との間に電気機械変換素子11の側面および中空柱状部材16の内面それぞれに接して配置される弾性部材15(15”)が形成され、図5Dに示す第2実施形態の駆動装置IMb(IMb’)が作製される。 Hereinafter, as shown in FIGS. 5C, 6A, and 6B, similarly to the driving device IMa of the first embodiment, the hollow columnar member 16 is bonded and fixed to the base member 13, and the adhesive discharge device EF-1 is discharged from the opening. , EF-2 fills the recess with an adhesive that becomes the elastic member 15, and is cured. As a result, as shown in FIGS. 6C and 6D, the electromechanical conversion element 11 is disposed between the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16 in contact with the side surface of the electromechanical conversion element 11 and the inner surface of the hollow columnar member 16. The elastic member 15 (15 ″) is formed, and the driving device IMb (IMb ′) of the second embodiment shown in FIG. 5D is manufactured.

 ここで、前記凹部への接着剤は、図6Cに示すように、被覆部材19を被覆しないように、電気機械変換素子11における軸方向の途中位置の高さまで充填され、弾性部材15は、電気機械変換素子11における側面の一部で電気機械変換素子11の周囲を囲むように配置されてよい。あるいは、図6Dに示すように、被覆部材19の第1中空短高柱状部分191の周囲を被覆する高さまで充填され、弾性部材15”は、さらに、被覆部材19の側面と中空柱状部材16の内面との間に配置されてよい。なお、この図6Dの場合、中空柱状部材16は、被覆部材19の側面から離隔して被覆部材19の側面で被覆部材19の周囲を囲むように配置されている。例えば落下等による衝撃が生じると、電気機械変換素子11には曲げ応力が加わるが、この曲げ応力は、電気機械変換素子11の基体部材13近傍が最も大きい。このため、弾性部材15は、図3Cに示す第1態様と同様に、図6Cに示す第3態様のように、少なくとも、電気機械変換素子11の基体部材13近傍を被覆する必要がある。このような第3態様では、上述の第1態様と同様に、弾性部材15が電気機械変換素子11における側面の一部に配置されるので、電気機械変換素子11の伸縮を弾性部材15によって妨げることを抑制できる。そして、図6Dに示す第4態様では、弾性部材15”が、被覆部材19の側面にも配置されるので、電気機械変換素子11に伝達される前記衝撃力や前記変形をより緩和することができ、破損をより低減でき、耐衝撃性を高めることができる。さらに、図6Dに示す第4態様では、弾性部材15”が被覆部材19の第1中空短高柱状部分191を被覆すると、駆動部材12も被覆することとなり、駆動部材12も第1中空短高柱状部分191を介して電気機械変換素子11と一体に被覆されるため、前記衝撃が生じた場合に、電気機械変換素子11に加わる曲げ応力をより低減できる。 Here, as shown in FIG. 6C, the adhesive to the concave portion is filled up to the height of the middle position in the axial direction of the electromechanical transducer 11 so as not to cover the covering member 19, and the elastic member 15 The electromechanical conversion element 11 may be disposed so as to surround a part of the side surface of the mechanical conversion element 11. Alternatively, as shown in FIG. 6D, the covering member 19 is filled up to a height that covers the periphery of the first hollow short columnar portion 191, and the elastic member 15 ″ further includes the side surface of the covering member 19 and the hollow columnar member 16. 6D, the hollow columnar member 16 is disposed so as to surround the periphery of the covering member 19 on the side surface of the covering member 19 while being separated from the side surface of the covering member 19. For example, when an impact due to dropping or the like occurs, bending stress is applied to the electromechanical conversion element 11, but this bending stress is the largest in the vicinity of the base member 13 of the electromechanical conversion element 11, and thus the elastic member 15. As in the first mode shown in Fig. 3C, it is necessary to cover at least the vicinity of the base member 13 of the electromechanical transducer 11 as in the third mode shown in Fig. 6C. ,Up Since the elastic member 15 is arrange | positioned in a part of side surface in the electromechanical transducer 11 like the 1st aspect of this, it can suppress that the expansion / contraction of the electromechanical transducer 11 is prevented by the elastic member 15. And FIG. In the fourth mode, the elastic member 15 ″ is also arranged on the side surface of the covering member 19, so that the impact force and the deformation transmitted to the electromechanical conversion element 11 can be further alleviated, and damage is prevented. It can reduce more and can improve impact resistance. Further, in the fourth embodiment shown in FIG. 6D, when the elastic member 15 ″ covers the first hollow short columnar portion 191 of the covering member 19, the driving member 12 is also covered, and the driving member 12 also has the first hollow short height. Since the electromechanical conversion element 11 is integrally covered via the columnar portion 191, the bending stress applied to the electromechanical conversion element 11 when the impact occurs can be further reduced.

 なお、図6Cに示す第3態様の場合では、中空柱状部材16における軸方向の長さは、弾性部材15が充填される位置まであってもよい。 In the case of the third mode shown in FIG. 6C, the axial length of the hollow columnar member 16 may be up to the position where the elastic member 15 is filled.

 このような第2実施形態における撮像装置Sbおよび駆動装置IMb、IMb’は、第3被覆部材19をさらに備えるので、接着剤によって接着される面積が広くなるから、電気機械変換素子11と駆動部材12をより強固に接着固定できる。したがって、このような第2実施形態における撮像装置Sbおよび駆動装置IMb、IMb’は、衝撃等によって生じる応力による前記固定部分の破損を比較的簡単な構成でより低減することができる。 Since the imaging device Sb and the driving devices IMb and IMb ′ according to the second embodiment further include the third covering member 19, the area to be bonded by the adhesive is widened, and thus the electromechanical conversion element 11 and the driving member. 12 can be bonded and fixed more firmly. Therefore, the imaging device Sb and the driving devices IMb and IMb ′ according to the second embodiment can further reduce the breakage of the fixed portion due to the stress caused by the impact or the like with a relatively simple configuration.

 次に、別の実施形態について説明する。 Next, another embodiment will be described.

 (第3実施形態)
 図7は、図1に示す撮像装置に用いられる第3実施形態の駆動装置の構成を示す斜視図である。
(Third embodiment)
FIG. 7 is a perspective view illustrating a configuration of a drive device according to a third embodiment used in the imaging device illustrated in FIG. 1.

 第1および第2実施形態における駆動装置IMa(IMa’)、IMb(IMb’)では、基体部材13と中空柱状部材16とは、別体であったが、第3実施形態の駆動装置IMcでは、基体部材13と中空柱状部材16とは、一体に形成されている。 In the driving devices IMa (IMa ′) and IMb (IMb ′) in the first and second embodiments, the base member 13 and the hollow columnar member 16 are separate, but in the driving device IMc in the third embodiment. The base member 13 and the hollow columnar member 16 are integrally formed.

 この第3実施形態の駆動装置IMcを用いた撮像装置Scは、図1に示すように、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、移動部材14と、弾性部材15と、中空柱状基体部材51と、パッド17と、ばね18と、駆動回路20と、撮像素子30と、これらを収容する、全体を図示していない筐体40(41、42、43)とを備えている。このような撮像装置Scにおいて、駆動装置IMcは、弾性接着固定部材10と、電気機械変換素子11と、駆動部材12と、移動部材14と、弾性部材15と、中空柱状基体部材51と、パッド17と、ばね18とを備える。 As shown in FIG. 1, the imaging device Sc using the driving device IMc of the third embodiment includes an elastic adhesive fixing member 10, an electromechanical conversion element 11, a driving member 12, a moving member 14, and an elastic member. 15, a hollow columnar base member 51, a pad 17, a spring 18, a drive circuit 20, an image sensor 30, and a housing 40 (41, 42, 43) that accommodates these and not shown in its entirety. It has. In such an imaging device Sc, the driving device IMc includes the elastic adhesive fixing member 10, the electromechanical transducer 11, the driving member 12, the moving member 14, the elastic member 15, the hollow columnar base member 51, and the pad. 17 and a spring 18.

 これら第3実施形態における弾性接着固定部材10、電気機械変換素子11、駆動部材12、移動部材14、弾性部材15、パッド17、ばね18、駆動回路20、撮像素子30および筐体40は、それぞれ、第1実施形態における弾性接着固定部材10、電気機械変換素子11、駆動部材12、移動部材14、弾性部材15、パッド17、ばね18、駆動回路20、撮像素子30および筐体40と同様であるので、その説明を省略する。 The elastic adhesive fixing member 10, the electromechanical conversion element 11, the drive member 12, the moving member 14, the elastic member 15, the pad 17, the spring 18, the drive circuit 20, the image pickup element 30, and the housing 40 in the third embodiment are respectively The elastic adhesive fixing member 10, the electromechanical conversion element 11, the driving member 12, the moving member 14, the elastic member 15, the pad 17, the spring 18, the driving circuit 20, the imaging element 30, and the housing 40 in the first embodiment. Since there is, explanation is omitted.

 なお、図7に示す例では、弾性部材15は、上述の図6Dに示す第4態様であるが、上述の図6Cに示す第3態様であってもよい。 In the example shown in FIG. 7, the elastic member 15 is in the fourth mode shown in FIG. 6D, but may be in the third mode shown in FIG. 6C.

 図1破線で示す被覆部材19は、第1実施形態のように備えなくてもよく、また、第2実施形態のように備えてもよい。図7に示す例では、耐衝撃性をより向上させるために、被覆部材19を備える第3実施形態の駆動装置IMcが図示されている。 1 may not be provided as in the first embodiment, and may be provided as in the second embodiment. In the example shown in FIG. 7, in order to further improve the impact resistance, the driving device IMc of the third embodiment including the covering member 19 is illustrated.

 この中空柱状基体部材51は、上述の基体部材13と中空柱状部材16とを一体に形成したものであり、基体部材13の機能と中空柱状部材16の機能とを合わせ持つ部材である。より具体的には、中空柱状基体部材51は、図7に示すように、一方端の端面を閉塞した有底中空柱状の部材である。中空柱状基体部材51の底部分は、上述の基体部材13として機能するために、上述の中空柱状部材16として機能する周壁部分の厚さよりも厚く形成されている。このような中空柱状基体部材51は、金属(合金を含む)や樹脂等によって一体に成形される。 The hollow columnar base member 51 is a member in which the above-described base member 13 and the hollow columnar member 16 are integrally formed, and is a member having both the function of the base member 13 and the function of the hollow columnar member 16. More specifically, as shown in FIG. 7, the hollow columnar base member 51 is a bottomed hollow columnar member with one end face closed. The bottom portion of the hollow columnar base member 51 is formed thicker than the thickness of the peripheral wall portion functioning as the hollow columnar member 16 described above in order to function as the above-described base member 13. Such a hollow columnar base member 51 is integrally formed of metal (including an alloy), resin, or the like.

 このような第3実施形態における撮像装置Scおよび駆動装置IMcは、基体部材13の機能と中空柱状部材16の機能とを合わせ持つ中空柱状基体部材51を用いるので、組み立て工数を低減することができ、より容易に組み立てることができる。 Since the imaging device Sc and the driving device IMc in the third embodiment use the hollow columnar base member 51 having both the function of the base member 13 and the function of the hollow columnar member 16, the number of assembling steps can be reduced. Can be assembled more easily.

 なお、これら上述の第1ないし第3実施形態において、弾性部材15は、熱膨張性マイクロカプセルを含有してもよい。熱膨張性マイクロカプセルは、加熱により、例えば直径で約4~5倍に膨張してその体積が増加する部材である。熱膨張性マイクロカプセルは、例えば、イソブタン、ペンタン、ヘキサン等の低級脂肪族炭化水素や、低沸点ハロゲン炭化水素や、メチルシラン等の揮発性有機溶剤を膨張剤として、塩化ビニリデン、アクリロニトリル、アクリル酸エステル、メタクリル酸エステル等の共重合体から成る熱可塑性樹脂で包み込んだ部材である。 In these first to third embodiments described above, the elastic member 15 may contain a thermally expandable microcapsule. The heat-expandable microcapsule is a member that expands by heating, for example, about 4 to 5 times in diameter to increase its volume. Thermally expandable microcapsules are, for example, lower aliphatic hydrocarbons such as isobutane, pentane, and hexane, low-boiling halogen hydrocarbons, and volatile organic solvents such as methylsilane as expansion agents, vinylidene chloride, acrylonitrile, acrylate esters. A member encased in a thermoplastic resin made of a copolymer such as methacrylic acid ester.

 このような撮像装置S(Sa、Sb、Sc)および駆動装置IM(IMa(IMa’)、IMb(IMb’)、IMc)は、電気機械変換素子11の側面と中空柱状部材16の内面との間に弾性部材15(15’、15”)を配置した後に前記熱膨張性マイクロカプセルを熱膨張させることによって、弾性部材15(15’、15”)が電気機械変換素子11および中空柱状部材16を押圧することができ、それらとの密着性を高めることができる。 Such an imaging device S (Sa, Sb, Sc) and a driving device IM (IMa (IMa ′), IMb (IMb ′), IMc) are provided between the side surface of the electromechanical transducer 11 and the inner surface of the hollow columnar member 16. After the elastic member 15 (15 ′, 15 ″) is disposed between the heat-expandable microcapsules, the elastic member 15 (15 ′, 15 ″) is converted into the electromechanical transducer 11 and the hollow columnar member 16. Can be pressed and adhesion with them can be improved.

 本明細書は、上記のように様々な態様の技術を開示しているが、そのうち主な技術を以下に纏める。 This specification discloses various modes of technology as described above, and the main technologies are summarized below.

 一態様にかかる駆動装置は、伸縮する機械エネルギーに電気エネルギーを変換する電気機械変換素子と、前記電気機械変換素子における伸縮方向の一方端に連結され、前記機械エネルギーが伝達されることで、所定の摩擦力で係合する移動部材を移動させるための駆動部材と、前記電気機械変換素子における前記伸縮方向の他方端に連結され、所定の支持体によって支持されるための基体部材と、一方端を前記基体部材に連結し、前記電気機械変換素子における伸縮方向に対する側面から離隔して前記側面で前記電気機械変換素子の周囲を囲むように配置される中空柱状部材と、弾性材料から形成され、前記電気機械変換素子の側面と前記中空柱状部材の内面との間に配置され、前記電気機械変換素子を支持する弾性部材とを備える。 A drive device according to one aspect is coupled to an electromechanical conversion element that converts electrical energy into mechanical energy that expands and contracts, and one end of the electromechanical conversion element in a direction of expansion and contraction, and the mechanical energy is transmitted to the drive device. A driving member for moving the moving member engaged by the frictional force of the base member, a base member connected to the other end in the expansion / contraction direction of the electromechanical transducer and supported by a predetermined support, and one end Is connected to the base member, and is formed of an elastic material and a hollow columnar member that is disposed so as to surround the electromechanical conversion element at the side surface apart from the side surface with respect to the expansion and contraction direction of the electromechanical conversion element. An elastic member disposed between a side surface of the electromechanical conversion element and an inner surface of the hollow columnar member and supporting the electromechanical conversion element;

 このような駆動装置では、当該駆動装置が基体部材によって所定の支持体に支持され、該基体部材には中空柱状部材が連結され、そして、電気機械変換素子の側面と前記中空柱状部材の内面との間には、前記電気機械変換素子を支持する弾性部材が配置される。このため、このような駆動装置では、例えば落下等によって筐体が受けた衝撃力および前記筐体の変形は、基体部材および中空柱状部材に伝達され、これによって基体部材および中空柱状部材が撓むが、これら基体部材および中空柱状部材は、互いに連結されているため剛性が高くなり、この結果、前記衝撃力や前記変形による撓みを抑制することができる。そして、前記弾性部材は、力学モデルでは電気機械変換素子の側面と前記中空柱状部材の内面との間に配置されたバネ成分および粘性成分として機能するため、電気機械変換素子に伝達される前記衝撃力や前記変形を緩和することができ、その破損を低減できる。このように本発明の駆動装置では、前記支持体に対し当該駆動装置を支持する機能を前記基体部材および前記中空柱状部材が受け持つとともに、前記衝撃力や前記変形による電気機械変換素子の振動および撓みを抑制する機能を弾性部材が受け持ち、前記支持体に対し当該駆動装置を支持する機能と前記衝撃力や前記変形による電気機械変換素子の振動および撓みを抑制する機能とが、別の部材に分けられている。したがって、このような駆動装置は、基体部材、中空柱状部材および弾性部材の比較的簡単な構成で、衝撃等によって生じる応力による破損を低減することができる。 In such a drive device, the drive device is supported on a predetermined support by a base member, a hollow columnar member is connected to the base member, and the side surface of the electromechanical transducer and the inner surface of the hollow columnar member are An elastic member that supports the electromechanical conversion element is disposed between them. For this reason, in such a driving device, for example, the impact force received by the casing due to dropping or the like and the deformation of the casing are transmitted to the base member and the hollow columnar member, and thereby the base member and the hollow columnar member bend. However, since the base member and the hollow columnar member are connected to each other, the rigidity becomes high, and as a result, the impact force and the bending due to the deformation can be suppressed. In the mechanical model, the elastic member functions as a spring component and a viscous component disposed between the side surface of the electromechanical transducer and the inner surface of the hollow columnar member, so that the impact transmitted to the electromechanical transducer is transmitted. The force and the deformation can be relaxed, and the damage can be reduced. As described above, in the drive device of the present invention, the base member and the hollow columnar member have a function of supporting the drive device with respect to the support, and vibration and deflection of the electromechanical transducer due to the impact force and the deformation. The elastic member is responsible for suppressing the vibration, and the function of supporting the driving device with respect to the support and the function of suppressing the vibration and deflection of the electromechanical transducer due to the impact force and the deformation are divided into separate members. It has been. Therefore, such a drive device can reduce damage caused by stress caused by an impact or the like with a relatively simple configuration of the base member, the hollow columnar member, and the elastic member.

 他の一態様では、上述の駆動装置において、前記弾性部材は、前記電気機械変換素子の弾性率よりも小さな弾性率を持つ。 In another aspect, in the above-described driving device, the elastic member has an elastic modulus smaller than that of the electromechanical transducer.

 このような駆動装置は、前記弾性部材の弾性率が前記電気機械変換素子の弾性率よりも小さいので、電気機械変換素子の伸縮を前記弾性部材によって妨げることを抑制できる。 In such a drive device, the elastic member has an elastic modulus smaller than that of the electromechanical transducer, so that the elastic member can prevent the elastic member from expanding and contracting.

 他の一態様では、上述の駆動装置において、前記弾性部材は、熱膨張性マイクロカプセルを含有する。 In another aspect, in the above-described driving device, the elastic member contains a thermally expandable microcapsule.

 このような駆動装置は、前記電気機械変換素子の側面と前記中空柱状部材の内面との間に弾性部材を配置した後に前記熱膨張性マイクロカプセルを熱膨張させることによって、前記弾性部材が前記電気機械変換素子および前記中空柱状部材を押圧することができ、それらとの密着性を高めることができる。 In such a driving device, after the elastic member is disposed between the side surface of the electromechanical transducer and the inner surface of the hollow columnar member, the elastic member is thermally expanded by the thermal expansion microcapsule. A mechanical conversion element and the said hollow columnar member can be pressed, and adhesiveness with them can be improved.

 他の一態様では、これら上述の駆動装置において、前記弾性部材は、前記電気機械変換素子における前記側面の一部で前記電気機械変換素子の周囲を囲むように配置される。 In another aspect, in the above-described driving device, the elastic member is disposed so as to surround the electromechanical conversion element at a part of the side surface of the electromechanical conversion element.

 このような駆動装置は、前記弾性部材が前記側面の一部に配置されるので、電気機械変換素子の伸縮を前記弾性部材によって妨げることを抑制できる。 In such a drive device, the elastic member is arranged on a part of the side surface, and therefore it is possible to suppress the expansion and contraction of the electromechanical conversion element from being obstructed by the elastic member.

 他の一態様では、これら上述の駆動装置において、前記弾性部材は、前記電気機械変換素子における前記側面の全部で前記電気機械変換素子の周囲を囲むように配置される。 In another aspect, in these above-described driving devices, the elastic member is disposed so as to surround the electromechanical transducer at all of the side surfaces of the electromechanical transducer.

 このような駆動装置は、前記弾性部材が前記側面の全部に配置されるので、電気機械変換素子に伝達される前記衝撃力や前記変形をより緩和することができ、破損をより低減でき、耐衝撃性を高めることができる。 In such a drive device, since the elastic member is disposed on all of the side surfaces, the impact force and the deformation transmitted to the electromechanical conversion element can be further reduced, damage can be further reduced, Impact properties can be increased.

 他の一態様では、これら上述の駆動装置において、前記電気機械変換素子と前記駆動部材との固定部分を被覆する被覆部材をさらに備える。 In another aspect, the above-described driving device further includes a covering member that covers a fixed portion between the electromechanical conversion element and the driving member.

 このような駆動装置は、被覆部材をさらに備えるので、衝撃等によって生じる応力による前記固定部分の破損を比較的簡単な構成でより低減することができる。 Since such a driving device further includes a covering member, it is possible to further reduce the breakage of the fixed portion due to stress caused by impact or the like with a relatively simple configuration.

 他の一態様では、これら上述の駆動装置において、前記中空柱状部材は、さらに、前記被覆部材の側面から離隔して前記被覆部材の側面で前記被覆部材の周囲を囲むように配置され、前記弾性部材は、さらに、前記被覆部材の側面と前記中空柱状部材の内面との間に配置される。 In another aspect, in the above-described driving device, the hollow columnar member is further disposed so as to be separated from the side surface of the covering member and surround the periphery of the covering member by the side surface of the covering member. The member is further disposed between the side surface of the covering member and the inner surface of the hollow columnar member.

 このような駆動装置は、前記弾性部材が前記被覆部材の側面にも配置されるので、電気機械変換素子に伝達される前記衝撃力や前記変形をより緩和することができ、破損をより低減でき、耐衝撃性を高めることができる。 In such a drive device, since the elastic member is also arranged on the side surface of the covering member, the impact force and the deformation transmitted to the electromechanical conversion element can be further relaxed, and damage can be further reduced. Can improve impact resistance.

 他の一態様では、これら上述の駆動装置において、前記基体部材と前記中空柱状部材とは、一体に形成されている。 In another aspect, in the above-described driving device, the base member and the hollow columnar member are integrally formed.

 このような駆動装置は、前記基体部材と第2被覆部材とが一体に形成されているので、組み立て工数を低減することができ、より容易に組み立てることができる。 In such a drive device, since the base member and the second covering member are integrally formed, the number of assembling steps can be reduced and the assembly can be performed more easily.

 また、他の一態様にかかる撮像装置は、これら上述の駆動装置のいずれかの駆動装置と、前記駆動装置の前記駆動部材に所定の摩擦力で係合される移動部材と、光学像を電気的な信号に変換する撮像素子と、1または複数の光学素子を備え、物体の光学像を前記撮像素子の受光面上に結像する撮像光学系とを備え、前記撮像光学系における前記1または複数の光学素子のうちの光軸方向に沿って移動する光学素子は、前記駆動装置の前記移動部材に取り付けられている。 Further, an imaging device according to another aspect includes an electric image obtained by driving any one of the above-described driving devices, a moving member engaged with the driving member of the driving device with a predetermined frictional force, and an optical image. An image pickup device that converts the signal into a typical signal; and an image pickup optical system that forms an optical image of an object on a light receiving surface of the image pickup device. An optical element that moves along the optical axis direction among the plurality of optical elements is attached to the moving member of the driving device.

 このような撮像装置は、これら上述の駆動装置のいずれかの駆動装置を備えるので、衝撃等によって生じる応力による駆動装置の破損を比較的簡単な構成によって低減することができる。したがって、このような撮像装置は、耐衝撃性を向上することができる。 Since such an imaging apparatus includes any one of the above-described driving apparatuses, damage to the driving apparatus due to stress caused by impact or the like can be reduced with a relatively simple configuration. Therefore, such an imaging apparatus can improve impact resistance.

 この出願は、2013年4月24日に出願された日本国特許出願特願2013-91106を基礎とするものであり、その内容は、本願に含まれるものである。 This application is based on Japanese Patent Application No. 2013-91106 filed on Apr. 24, 2013, the contents of which are included in the present application.

 本発明を表現するために、上述において図面を参照しながら実施形態を通して本発明を適切且つ十分に説明したが、当業者であれば上述の実施形態を変更および/または改良することは容易に為し得ることであると認識すべきである。したがって、当業者が実施する変更形態または改良形態が、請求の範囲に記載された請求項の権利範囲を離脱するレベルのものでない限り、当該変更形態または当該改良形態は、当該請求項の権利範囲に包括されると解釈される。 In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Therefore, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. To be construed as inclusive.

 本発明によれば、駆動装置およびこれを用いた撮像装置を提供できる。 According to the present invention, it is possible to provide a driving device and an imaging device using the driving device.

Claims (9)

 伸縮する機械エネルギーに電気エネルギーを変換する電気機械変換素子と、
 前記電気機械変換素子における伸縮方向の一方端に連結され、前記機械エネルギーが伝達されることで、所定の摩擦力で係合する移動部材を移動させるための駆動部材と、
 前記電気機械変換素子における前記伸縮方向の他方端に連結され、所定の支持体によって支持されるための基体部材と、
 一方端を前記基体部材に連結し、前記電気機械変換素子における伸縮方向に対する側面から離隔して前記側面で前記電気機械変換素子の周囲を囲むように配置される中空柱状部材と、
 弾性材料から形成され、前記電気機械変換素子の側面と前記中空柱状部材の内面との間に配置され、前記電気機械変換素子を支持する弾性部材とを備える、
 駆動装置。
An electromechanical transducer that converts electrical energy into elastic mechanical energy;
A driving member connected to one end of the electromechanical conversion element in the direction of expansion and contraction to move a moving member engaged with a predetermined frictional force by transmitting the mechanical energy;
A base member coupled to the other end of the electromechanical conversion element in the expansion / contraction direction and supported by a predetermined support;
A hollow columnar member connected at one end to the base member, and disposed so as to surround the electromechanical conversion element at the side surface apart from the side surface with respect to the stretching direction of the electromechanical conversion element;
An elastic member formed of an elastic material, disposed between a side surface of the electromechanical conversion element and an inner surface of the hollow columnar member, and an elastic member that supports the electromechanical conversion element;
Drive device.
 前記弾性部材は、前記電気機械変換素子の弾性率よりも小さな弾性率を持つ、
 請求項1に記載の駆動装置。
The elastic member has an elastic modulus smaller than that of the electromechanical transducer;
The drive device according to claim 1.
 前記弾性部材は、熱膨張性マイクロカプセルを含有する、
 請求項1または請求項2に記載の駆動装置。
The elastic member contains a thermally expandable microcapsule,
The drive device according to claim 1 or 2.
 前記弾性部材は、前記電気機械変換素子における前記側面の一部で前記電気機械変換素子の周囲を囲むように配置される、
 請求項1ないし請求項3のいずれか1項に記載の駆動装置。
The elastic member is arranged so as to surround the periphery of the electromechanical transducer at a part of the side surface of the electromechanical transducer.
The drive device according to any one of claims 1 to 3.
 前記弾性部材は、前記電気機械変換素子における前記側面の全部で前記電気機械変換素子の周囲を囲むように配置される、
 請求項1ないし請求項3のいずれか1項に記載の駆動装置。
The elastic member is arranged so as to surround the periphery of the electromechanical transducer with all of the side surfaces of the electromechanical transducer.
The drive device according to any one of claims 1 to 3.
 前記電気機械変換素子と前記駆動部材との固定部分を被覆する被覆部材をさらに備える、
 請求項1ないし請求項5のいずれか1項に駆動装置。
A covering member that covers a fixed portion of the electromechanical transducer and the driving member;
The driving device according to any one of claims 1 to 5.
 前記中空柱状部材は、さらに、前記被覆部材の側面から離隔して前記被覆部材の側面で前記被覆部材の周囲を囲むように配置され、
 前記弾性部材は、さらに、前記被覆部材の側面と前記中空柱状部材の内面との間に配置される、
 請求項6に記載の駆動装置。
The hollow columnar member is further disposed so as to surround the periphery of the covering member on the side surface of the covering member, spaced from the side surface of the covering member,
The elastic member is further disposed between a side surface of the covering member and an inner surface of the hollow columnar member.
The drive device according to claim 6.
 前記基体部材と前記中空柱状部材とは、一体に形成されている、
 請求項1ないし請求項7のいずれか1項に駆動装置。
The base member and the hollow columnar member are integrally formed.
The driving device according to any one of claims 1 to 7.
 請求項1ないし請求項8のいずれか1項に記載の駆動装置と、
 前記駆動装置の前記駆動部材に所定の摩擦力で係合される移動部材と、
 光学像を電気的な信号に変換する撮像素子と、
 1または複数の光学素子を備え、物体の光学像を前記撮像素子の受光面上に結像する撮像光学系とを備え、
 前記撮像光学系における前記1または複数の光学素子のうちの光軸方向に沿って移動する光学素子は、前記駆動装置の前記移動部材に取り付けられている、
 撮像装置。
A driving device according to any one of claims 1 to 8,
A moving member engaged with the driving member of the driving device with a predetermined frictional force;
An image sensor that converts an optical image into an electrical signal;
An imaging optical system that includes one or a plurality of optical elements, and that forms an optical image of an object on a light receiving surface of the imaging element;
An optical element that moves along the optical axis direction among the one or more optical elements in the imaging optical system is attached to the moving member of the drive device.
Imaging device.
PCT/JP2014/001260 2013-04-24 2014-03-06 Drive apparatus and image pickup apparatus using same Ceased WO2014174750A1 (en)

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JP2018181935A (en) * 2017-04-05 2018-11-15 Tdk株式会社 Piezoelectric actuator
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Cited By (9)

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Publication number Priority date Publication date Assignee Title
JP2018102100A (en) * 2016-12-21 2018-06-28 Tdk株式会社 Piezoelectric unit
CN108231994A (en) * 2016-12-21 2018-06-29 Tdk株式会社 Piezoelectric unit
CN108231994B (en) * 2016-12-21 2021-07-06 Tdk株式会社 Piezoelectric unit
JP2018181935A (en) * 2017-04-05 2018-11-15 Tdk株式会社 Piezoelectric actuator
WO2020149108A1 (en) * 2019-01-18 2020-07-23 パナソニックIpマネジメント株式会社 Optical device actuator and lens barrel provided with same
JPWO2020149108A1 (en) * 2019-01-18 2021-11-11 パナソニックIpマネジメント株式会社 Actuators for optical instruments and lens barrels equipped with them
EP3913415A4 (en) * 2019-01-18 2022-03-16 Panasonic Intellectual Property Management Co., Ltd. OPTICAL DEVICE ACTUATOR AND LENS BARREL COMPRISING THE SAME
JP7162188B2 (en) 2019-01-18 2022-10-28 パナソニックIpマネジメント株式会社 Actuator for optical equipment and lens barrel provided with the same
US12117665B2 (en) 2019-01-18 2024-10-15 Panasonic Intellectual Property Management Co., Ltd. Optical device actuator and lens barrel provided with same

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