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WO2014038012A1 - Appareil d'inspection de piles solaires - Google Patents

Appareil d'inspection de piles solaires Download PDF

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Publication number
WO2014038012A1
WO2014038012A1 PCT/JP2012/072601 JP2012072601W WO2014038012A1 WO 2014038012 A1 WO2014038012 A1 WO 2014038012A1 JP 2012072601 W JP2012072601 W JP 2012072601W WO 2014038012 A1 WO2014038012 A1 WO 2014038012A1
Authority
WO
WIPO (PCT)
Prior art keywords
visible light
solar battery
battery cell
cell
solar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/072601
Other languages
English (en)
Japanese (ja)
Inventor
高見　芳夫
豊之 橋本
北原　大
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2014534080A priority Critical patent/JP5900628B2/ja
Priority to PCT/JP2012/072601 priority patent/WO2014038012A1/fr
Publication of WO2014038012A1 publication Critical patent/WO2014038012A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/894—Pinholes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • the present invention relates to a solar cell inspection apparatus for inspecting solar cells after the formation of an antireflection film, for example.
  • Patent Document 1 laser light is emitted to a semiconductor wafer by a laser light source, an optical image reflected on the surface of the semiconductor wafer is picked up by an image pickup device, and image data of the semiconductor wafer picked up by a defect detection unit A defect inspection apparatus that inspects defects existing on the surface of a semiconductor wafer by extracting defects is disclosed.
  • Patent Document 2 discloses an infrared inspection apparatus that irradiates a semiconductor wafer with infrared rays from an infrared light source and picks up infrared rays transmitted through the semiconductor wafer with an infrared camera.
  • This infrared inspection apparatus is configured to detect minute cracks inside a semiconductor wafer by utilizing the fact that infrared transmission states are different between an abnormal portion such as a crack and a polycrystalline silicon substrate portion.
  • the solar cell is inspected after the antireflection film is formed. And the printing and baking of an electrode are performed with respect to the photovoltaic cell judged to be non-defective by the test
  • the inspection of the solar battery cell the inspection of the shape for inspecting the crack or chip of the solar battery cell, the particles on the solar battery cell, the pinhole of the antireflection film, the uneven thickness of the antireflection film, the electrode after the generation of the electrode
  • photographing is performed by illuminating visible light from the back side of the solar battery cell. Moreover, at the time of the inspection of the surface state described above, photographing is performed by illuminating visible light from the surface side of the solar battery cell. Furthermore, at the time of the above-described microcrack inspection, infrared light that has been transmitted through the solar cell by irradiating infrared rays from the back side of the solar cell is photographed.
  • an inspection apparatus for inspecting a shape and a surface condition and an inspection apparatus for inspecting a microcrack are configured as separate apparatuses because the wavelengths of illumination light to be used are different. For this reason, in order to perform the inspection of the shape using visible light or the inspection of the surface condition, and the inspection of micro cracks using infrared light, a plurality of devices are required, so the inspection is costly. In addition, there is a problem that not only the area occupied by the apparatus increases, but also the inspection takes time.
  • the present invention has been made to solve the above problems, and provides a solar cell inspection device capable of executing inspection using visible light and inspection using infrared light by a single device.
  • the purpose is to do.
  • a second image measuring unit that measures a passing image by visible light that has been irradiated and passed without being blocked by the solar cell, and the light irradiating unit is arranged in a region facing the solar cell.
  • LED element and said A visible light shift mechanism that irradiates the peripheral portion of the solar cell with the visible light by shifting visible light emitted from the plurality of LED elements that emit light toward the outer peripheral portion of the solar cell. It is characterized by having.
  • the invention according to claim 2 is the invention according to claim 1, wherein the visible light shift mechanism is disposed in a region facing an outer peripheral portion of the solar battery cell and emits the visible light.
  • a reflective member that reflects visible light emitted from an element toward the outer peripheral portion of the solar battery cell, and a plurality of LED elements that are disposed in a region facing the solar battery cell and emit infrared light.
  • a synthetic member that radiates the visible light to the peripheral portion of the solar battery cell by transmitting the infrared light and reflecting the visible light reflected by the first reflecting member.
  • the composite member reflects a visible light and a wedge prism that deflects an irradiation direction of infrared light toward an edge of the solar battery cell. And a dielectric film that transmits infrared light.
  • an arrangement interval of the plurality of LED elements that emit infrared light is large in a region facing the vicinity of the center of the solar battery cell, and Small in the area facing the peripheral edge of the battery cell.
  • the invention according to claim 5 is the invention according to claim 2, wherein the reflecting member is a half mirror.
  • the invention according to claim 6 is the invention according to any one of claims 1 to 5, further comprising a visible light irradiator that irradiates the solar cell with visible light from a side opposite to the light irradiator.
  • the second image measurement unit measures a reflected image by visible light that is irradiated from the visible light irradiation unit and reflected by the solar battery cell.
  • the invention according to claim 7 is the invention according to claim 6, wherein the light irradiation unit irradiates infrared light to the entire area of the solar battery cell and the light irradiation part to the peripheral part of the solar battery cell.
  • the visible light and the irradiation of visible light to the solar cell from the opposite side of the light irradiation unit by the visible light irradiation unit and infrared light that has passed through the solar cell
  • visible light that has passed through the solar battery cell without being blocked and visible light reflected by the solar battery cell and guides infrared light that has passed through the solar battery cell to the first image measurement unit.
  • a beam splitter is provided that guides visible light that has passed through the solar battery cell without being blocked and visible light reflected by the solar battery cell to the second image measurement unit.
  • region facing a photovoltaic cell is arrange
  • the shape inspection, the surface state inspection, and the microcrack inspection can be performed by a single device, and the cost and time required for the inspection are minimized. Is possible.
  • the infrared light transmitted through the solar battery cell is guided to the first image measurement unit, and is reflected by the solar battery cell and visible light that has passed without being blocked by the solar battery cell. Since the beam splitter that guides visible light to the second image measurement unit is provided, it is possible to simultaneously perform shape inspection, surface state inspection, and microcrack inspection.
  • FIG. 1 is a schematic diagram of a solar cell inspection device 1.
  • FIG. FIG. 4 is a plan view showing the arrangement of a plurality of visible light sources 11 supported by a support portion 18. It is a schematic diagram of the light irradiation part.
  • FIG. 4 is a partially enlarged view showing a positional relationship between the half mirror 21 and the composite member 22 and the solar battery cell 100.
  • FIG. 3 is a plan view showing a positional relationship between the half mirror 21 and the synthesis member 22 and the solar battery cell 100. It is a block diagram which shows the main control systems of the test
  • FIG. 4 is a partially enlarged view showing the arrangement relationship between the mirror 25 and the composite member 22 and the solar battery cell 100.
  • FIG. 3 is a plan view showing a positional relationship between the mirror 25 and a composite member 22 and the solar battery cell 100.
  • FIG. 1 is a schematic diagram of a solar cell inspection apparatus 1 according to the present invention.
  • FIG. 2 is a plan view showing the arrangement of the plurality of visible light sources 11 supported by the support portion 18.
  • the opening 17 of the reflective diffuser 12 is shown by a solid line.
  • the solar cell inspection apparatus 1 includes a plurality of visible light sources 11 that emit visible light having a wavelength of about 640 nm supported by a support portion 18, and reflects visible light emitted from the visible light sources 11 to produce solar light.
  • a visible light irradiating unit including a dome-shaped reflective diffusion plate 12 connected to a support unit 18 for irradiating the upper surface of the battery cell 100 is provided. Visible light emitted from the visible light source 11 is reflected by the reflective diffusion plate 12 and irradiated on the surface of the solar battery cell 100.
  • the solar cell inspection apparatus 1 irradiates the entire solar cell 100 with infrared light from the back surface side of the solar cell 100 and irradiates visible light on the peripheral portion of the solar cell 100.
  • An irradiation unit 13 is provided.
  • the solar cell inspection apparatus 1 measures a flat beam splitter 14, a CCD camera 16 as a first image measuring unit for measuring an image by infrared light, and an image by visible light.
  • CCD camera 15 as a second image measuring unit.
  • the beam splitter 14 can receive infrared light that has passed through the solar battery cell 100, visible light that has passed without being blocked by the solar battery cell 100, and visible light that has been reflected by the solar battery cell 100. It is arranged in the position.
  • the beam splitter 14 has a configuration that reflects visible light and transmits infrared light.
  • Visible light emitted from the visible light irradiation unit including the visible light source 11 is reflected by the surface of the solar battery cell 100, then passes through the rectangular opening 17 in the reflective diffusion plate 12, and further in the beam splitter 14. The light is reflected and enters the CCD camera 15.
  • the infrared light emitted from the light irradiation unit 13 passes through the solar battery cell 100, passes through the beam splitter 14, and enters the CCD camera 16.
  • the visible light emitted from the light irradiation unit 13 is irradiated to the peripheral portion of the solar battery cell 100, and the visible light that has passed without being blocked by the solar battery cell 100 is reflected by the beam splitter 14, and the CCD camera 15. Is incident on.
  • FIG. 3 is a schematic diagram of the light irradiation unit 13.
  • FIG. 4 is a partially enlarged view showing the arrangement relationship between the half mirror 21 and the composite member 22 and the solar battery cell 100.
  • FIG. 5 is a plan view showing the positional relationship between the half mirror 21 and the synthesis member 22 and the solar battery cell 100.
  • the light irradiation unit 13 includes a plurality of LED elements 31 that emit infrared light arranged in a region facing the solar battery cell 100, and outside the plurality of LED elements 31 that emit these infrared lights. It comprises a plurality of LED elements 32 that emit visible light arranged in a region facing the outer periphery of the battery cell 100, a diffusion plate 26, a half mirror 21 as a reflecting member, and a composite member 22, and emits visible light. And a visible light shift mechanism that irradiates the peripheral portion of the solar battery cell 100 with the visible light by shifting the visible light emitted from the plurality of LED elements 32 toward the outer periphery of the solar battery cell 100.
  • the plurality of LED elements 31 that emit infrared light are arranged in a region facing the solar battery cell 100 while being arranged on the substrate 33.
  • the “region facing the solar battery cell 100” means that, for example, when the LED element 31 is disposed below the solar battery cell 100, the LED element 31 and the solar battery cell 100 overlap in plan view. Means state. That is, the “region facing the solar battery cell 100” is a state in which a surface region formed by the plurality of LED elements 31 arranged on the substrate 33 faces the surface region of the solar battery cell 100. means.
  • the arrangement interval of these LED elements 31 increases in a region facing the vicinity of the center of the solar battery cell 100, and the solar battery cell
  • the substrate 100 is disposed on the substrate 33 in a state of being small in a region facing the peripheral edge portion.
  • These LED elements 31 emit infrared light having a wavelength of about 940 nm. The wavelength of the infrared light is determined based on the material of the solar battery cell 100 so that the infrared light can be easily transmitted through the solar battery cell 100.
  • the plurality of LED elements 32 that emit visible light for example, emit visible light having a wavelength of about 640 nm
  • the plurality of LED elements 31 that emit infrared light while being arranged on the substrate 34.
  • the solar cells 100 are arranged in a region facing the outer peripheral portion.
  • the “region facing the outer peripheral portion of the solar battery cell 100” means, for example, the outer periphery of the LED element 32 and the solar battery cell 100 when the LED element 32 is disposed below the solar battery cell 100. This means that the region (region immediately outside the solar battery cell 100) overlaps in plan view. That is, the “region facing the outer peripheral portion of the solar battery cell 100” means that the surface region formed by the plurality of LED elements 32 arranged on the substrate 34 is the surface region immediately outside the solar battery cell 100. It means a state of facing each other.
  • the half mirror 21 functions as a reflecting member that reflects 50% of visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer peripheral portion of the solar battery cell 100. The remaining 50% of the visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer peripheral portion of the solar battery cell 100 passes through the half mirror 21 as it is.
  • the half mirror 21 is disposed in a region facing the outer peripheral portion of the solar battery cell 100.
  • the region facing the outer peripheral portion of the solar battery cell 100 is the same as the case of the LED element 32, for example, when the half mirror 21 is arranged below the solar battery cell 100, It means a state in which the region of the outer peripheral portion of the solar battery cell 100 (the region immediately outside the solar battery cell 100) overlaps in plan view. That is, the “region facing the outer peripheral portion of the solar battery cell 100” means a state in which the surface region formed by the half mirror 21 faces the surface region just outside the solar battery cell 100.
  • the composite member 22 is reflected by the half mirror 21 and the function of transmitting the infrared light emitted from the plurality of LED elements 31 that emit infrared light after being deflected in the direction of the edge of the solar battery cell 100.
  • the visible light is reflected to shift the visible light and irradiate the peripheral portion of the solar battery cell 100.
  • the composite member 22 is a cold mirror that reflects visible light and transmits infrared light on a wedge prism 24 that deflects the irradiation direction of infrared light toward the edge of the solar battery cell 100.
  • a dielectric film 23 called “etc.” is laminated.
  • the synthetic member 22 is disposed in a region facing the solar battery cell 100.
  • the “region facing the solar battery cell 100” is the same as in the case of the LED element 31, for example, when the composite member 22 is disposed below the solar battery cell 100, the composite member 22 and the solar battery cell. 100 means overlapping in plan view. That is, the “region facing the solar battery cell 100” means a state in which the surface region formed by the composite member 22 faces the surface region of the solar battery cell 100.
  • FIG. 6 is a block diagram showing a main control system of the solar cell inspection apparatus 1.
  • This solar cell inspection device 1 has a ROM in which an operation program necessary for controlling the device is stored, a RAM in which data and the like are temporarily stored at the time of control, and a CPU that executes logical operations, and controls the entire device.
  • the control part 7 is provided.
  • the control unit 7 is connected to the above-described visible light source 11, LED element 31, LED element 32, CCD camera 15, and CCD camera 16.
  • the control unit 7 controls lighting of the visible light source 11, the LED element 31, and the LED element 32, and also controls image capturing and measurement by the CCD camera 15 and the CCD camera 16.
  • the solar battery cell 100 is transported to the inspection position by a transport mechanism (not shown) as shown in FIG. To do.
  • the light irradiation unit 13 irradiates the entire lower surface of the solar battery cell 100 with infrared light, while the light irradiation unit 13 irradiates the lower peripheral edge of the solar battery cell 100 with visible light or the visible light irradiation unit.
  • the irradiation of visible light to the entire surface of the solar battery cell 100 is sequentially switched and executed.
  • the visible light emitted from the visible light source 11 is reflected by the reflective diffusion plate 12 and irradiated on the surface of the solar battery cell 100.
  • the visible light is reflected by the surface of the solar battery cell 100, then passes through the rectangular opening 17 in the reflective diffusion plate 12, is further reflected by the beam splitter 14, and enters the CCD camera 15. Then, based on the reflection image measured by the CCD camera 15, the surface state of the solar battery cell 100 is inspected.
  • the infrared light emitted from the plurality of LED elements 31 that emit infrared light passes through the diffusion plate 26 in the vicinity of the central portion of the solar battery cell 100.
  • the back surface of the solar battery cell 100 is irradiated.
  • a part of the infrared light emitted from the plurality of LED elements 31 that emit infrared light passes through the diffusion plate 26, and then the edge of the solar battery cell 100 by the action of the wedge prism 24 in the composite member 22.
  • the back surface of the solar battery cell 100 is irradiated.
  • these infrared lights pass through the beam splitter 14 and enter the CCD camera 16. Then, based on the transmission image measured by the CCD camera 16, the micro crack of the solar battery cell 100 is inspected.
  • the arrangement interval of these LED elements 31 increases in a region facing the vicinity of the center of the solar battery cell 100, and the solar battery. It is disposed on the substrate 33 so as to be small in a region facing the peripheral edge of the cell 100. A part of the infrared light emitted from the plurality of LED elements 31 that emit infrared light is slightly deflected toward the edge of the solar battery cell 100 by the action of the wedge prism 24.
  • 50% of the visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer periphery of the solar battery cell 100 passes through the half mirror 21 as it is. Then, the outer peripheral portion of the back surface of the solar battery cell 100 is irradiated. Further, the remaining 50% of the visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer peripheral portion of the solar battery cell 100 is reflected by the half mirror 21, and the visible light reflected by the half mirror 21. Shifts by being further reflected by the dielectric film 23 and is irradiated to the peripheral edge portion of the back surface of the solar battery cell 100.
  • the visible light irradiated to the peripheral edge of the back surface of the solar battery cell 100 and passed without being blocked by the solar battery cell 100 is reflected by the beam splitter 14 and enters the CCD camera 15. Then, based on the passing image measured by the CCD camera 15, the shape of the solar battery cell 100 is inspected.
  • the CCD camera 15 passes through the reflected image emitted from the visible light source 11 and reflected from the surface of the solar battery cell 100 and the plurality of LED elements 32 that emit visible light without being blocked by the solar battery cell 100. Both of the passed images thus obtained will be measured.
  • the control unit 7 turns on the visible light source 11 and the plurality of LED elements 32 alternately, and synchronizes with the lighting of the visible light source 11 and the plurality of LED elements 32, thereby causing the CCD camera 15 to display an image. By controlling the capture, the reflection image data and the passing image data are identified and acquired.
  • the solar cell inspection apparatus 1 As described above, in the solar cell inspection apparatus 1 according to the present invention, a plurality of LEDs that emit infrared light to a region facing the solar cell 100 by the action of a visible light shift mechanism that shifts visible light. It becomes possible to install the element 31 and to install a plurality of LED elements 32 that emit visible light in a region outside the element 31. For this reason, it is possible to uniformly irradiate the entire area of the solar battery cell 100 with infrared rays, and it is possible to more accurately execute the microcrack inspection.
  • the shape inspection using visible light and infrared light are possible. Inspection of microcracks using can be performed by a single device, and the cost and time required for inspection can be reduced. Further, by irradiating the surface of the solar battery cell 100 with visible light, the surface state of the solar battery cell 100 can be inspected at the same time.
  • FIG. 7 is a partially enlarged view showing the positional relationship between the mirror 25 and the composite member 22 of the solar cell inspection apparatus 1 according to the second embodiment and the solar cell 100.
  • FIG. 8 is a plan view showing an arrangement relationship between the solar cell 100 and the mirror 25 and the composite member 22 of the solar cell inspection apparatus 1 according to the second embodiment.
  • a mirror 25 is used instead of the half mirror 21 according to the first embodiment.
  • the mirror 25 functions as a reflecting member that reflects 100% of the visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer peripheral portion of the solar battery cell 100.
  • the mirror 25 is disposed in a region facing the outer peripheral portion of the solar battery cell 100.
  • combination member 22 similar to 1st Embodiment is used.
  • the composite member 22 is disposed in a region where a part thereof faces the solar battery cell 100 and the remaining part faces the outer peripheral part of the solar battery cell 100.
  • the visible light emitted from the plurality of LED elements 32 that emit visible light toward the outer peripheral portion of the solar battery cell 100 is reflected by the mirror 25 and is further reflected by the dielectric film 23. It is shifted by being reflected and irradiated to the peripheral edge of the back surface of the solar battery cell 100. Then, the visible light irradiated to the peripheral edge of the back surface of the solar battery cell 100 and passed without being blocked by the solar battery cell 100 is reflected by the beam splitter 14 and enters the CCD camera 15. Then, based on the passing image measured by the CCD camera 15, the shape of the solar battery cell 100 is inspected.
  • the LED element 31 that emits infrared light is disposed in a region facing the solar battery cell 100, and visible light is emitted in a region facing the outer peripheral portion of the solar battery cell 100.
  • Only the LED element 32 to be arranged is arranged. However, only a part of the LED element 31 may be arranged in the area of the LED element 32, or only a part of the LED element 32 may be arranged in the area of the LED element 31.
  • the diffusion plate 26 diffuses the light transmitted through the LED elements 31 or 32 while illuminating the solar cells 100 uniformly. If the LED elements 31 and the LED elements 32 are arranged in a sufficiently large number and can be illuminated uniformly, the diffusion plate 26 may be omitted.

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PCT/JP2012/072601 2012-09-05 2012-09-05 Appareil d'inspection de piles solaires Ceased WO2014038012A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014534080A JP5900628B2 (ja) 2012-09-05 2012-09-05 太陽電池セルの検査装置
PCT/JP2012/072601 WO2014038012A1 (fr) 2012-09-05 2012-09-05 Appareil d'inspection de piles solaires

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/072601 WO2014038012A1 (fr) 2012-09-05 2012-09-05 Appareil d'inspection de piles solaires

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WO2014038012A1 true WO2014038012A1 (fr) 2014-03-13

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Cited By (6)

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JP2019060703A (ja) * 2017-09-26 2019-04-18 シーシーエス株式会社 光照射装置
WO2019117228A1 (fr) * 2017-12-13 2019-06-20 パナソニックＩｐマネジメント株式会社 Système de traitement d'image, système d'inspection, procédé de traitement d'image et programme
JP2019529914A (ja) * 2016-09-19 2019-10-17 ティアマ 成形機械から出ていくガラス容器の光学検査のための装置
CN111397596A (zh) * 2020-04-02 2020-07-10 西安因诺航空科技有限公司 一种固定轴光伏场景的无人机巡检目标定位方法
CN111397595A (zh) * 2020-04-02 2020-07-10 西安因诺航空科技有限公司 一种平单轴光伏场景无人机巡检目标定位方法
JP2023026881A (ja) * 2021-08-16 2023-03-01 リンテック株式会社 位置決め装置および位置決め方法

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JP2019060703A (ja) * 2017-09-26 2019-04-18 シーシーエス株式会社 光照射装置
JP7015132B2 (ja) 2017-09-26 2022-02-02 シーシーエス株式会社 光照射装置
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CN111397595B (zh) * 2020-04-02 2022-04-01 西安因诺航空科技有限公司 一种平单轴光伏场景无人机巡检目标定位方法
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