WO2014015485A1 - Device bearing apparatus - Google Patents

Abstract

A device bearing apparatus (300) comprises: a bearing table (10), a vacuum system (80), a gas supply system (20), and a discharge system (30). The bearing table (10) has a bearing surface (11), a bottom surface (12), and at least one through hole (13), and the through hole (13) connects the bearing surface (11) to the bottom surface (12); the vacuum system (80) provides a vacuum suction to the through hole (13); the gas supply system (20) is used to output gas of at least one kind to the through hole (13); and the discharge system (30) discharges electricity to the gas, so that the gas is ionized into an ionic liquid. Therefore, the through hole (13) can be used to provide the vacuum suction to bear and suck a device (50), or used to provide the ionic liquid when the device (50) is vacuum-released, so as to eliminate static on the surface of the device (50) more efficiently, evenly, and rapidly.

Description

 Device carrier Technical field

The present invention relates to a device carrying device, and more particularly to a device carrying device capable of removing static electricity from a surface of a device.

Background technique

In Liquid Crystal Display (LCD), Plasma Display (Plasma) In the Display Panel (PDP) and semi-conducting processes, many static phenomena are often generated, resulting in product damage or defects. The main hazards caused by static electricity are: electrostatic damage (Electro Static Damage; ESD) and Electrostatic Static Attraction; ESA). Electrostatic damage is caused by electrostatic discharge and lattice breakdown and transistor breakdown. Electrostatic adsorption is the adsorption of fine dust caused by static electricity. Two kinds of electrostatic problems often occur at the same time, which causes damage to the product and makes the product yield greatly. Lowering, which leads to an increase in manufacturing costs.

Referring to FIG. 1A, a schematic diagram of a carrier 10 of a conventional first substrate processing apparatus 100 is disclosed. The carrier 10 is configured to carry a substrate 40 (as shown in FIG. 1C) and to maintain the position of the substrate 40 for subsequent processing. The loading platform 10 mainly includes a bearing surface 11 , a bottom surface 12 , a plurality of through holes 13 , and a plurality of ejector pins 14 . The through holes 13 extend through the bottom surface 12 from the bearing surface 11 .

Referring to FIG. 1B, a cross-sectional view of the conventional stage 10 cut away from the A-A line in FIG. 1A is disclosed. In the manufacturing process, the first substrate processing apparatus 100 firstly extends the ejector pin 14 from the bottom surface 12, and then the substrate 40 is placed in the chassis by a transfer arm (not shown). The ejector pin 14 is retracted into the carrier 10 so that the substrate 40 can be placed flat on the bottom surface 12 of the carrier 10.

Referring to FIG. 1C, a cross-sectional view of the substrate 40 placed on the carrier 10 of FIG. 1B is disclosed. After the substrate 40 is placed on the bottom surface 12, a process of position confirmation is performed to ensure that the substrate 40 is placed in the correct position, and then the through hole 13 is evacuated. In order to secure the substrate 40 to the bottom surface 12, the substrate 40 is subsequently processed (for example, an alignment film is printed on a glass substrate). Once the processing is completed, the vacuum of the through hole 13 is released, and the ejector pin 14 is again extended from the bottom surface 12 to lift the substrate 40, and the transfer arm is used to remove the The substrate 40 is used to complete the processing of the substrate. However, in the above process, the substrate 40 and the stage 10 achieve the action of contact and separation. When the substrate 40 is separated from the stage 10, a large amount of stripping static electricity and friction static electricity are easily generated, and a potential difference is generated between the substrate 40 and the bottom surface 12, if the substrate is not immediately taken. The static elimination on 40 is easy to cause the substrate 40 to be damaged by static electricity.

Referring to FIG. 2, a cross-sectional view of a conventional second substrate processing apparatus 200 is disclosed. In order to eliminate the problem of static electricity, an existing method is to further provide an ion wind bar 60 and/or an x-ray device 70 to the second substrate processing device 200, wherein the ion wind bar 60 is located above the substrate 40. The ion wind bar 60 removes static electricity by means of corona discharge, and mainly discharges with a tip of a discharge needle (not shown) to generate an ion wind with charged plural ions, and blows the ions by The manner of the substrate 40 is such that the ions and the static electricity generate a charge neutralization effect; and the x-ray device 70 is located on the side of the substrate 40, and is destaticized by soft x-rays, mainly by soft x The gas is ionized by the radiation in the vicinity of the substrate 40, and the ionized gas is used to neutralize the static electricity on the surface of the substrate 40.

Specifically, as shown in FIG. 2, the ion wind bar 60 is often composed of a plurality of discharge needles, and the overall volume is large, and the scope of eliminating static electricity is small, and can only be installed on the upper or side of the machine, so that Eliminating static electricity at a short distance, however, the ion wind of the ion blower 60 cannot reach the bottom surface of the substrate 40 at all due to a large amount of static electricity generated by the substrate 40 and the stage 10 due to the instantaneous peeling, so that it cannot be effective. The X-ray device 70 is quickly eliminated because the equipment is too expensive, the generated X-rays are harmful to the human body, and after performing static elimination, it is easy to cause an imbalance of ions in the environment, and it is difficult to be widely applied. In the electronics industry. Further, the soft x-rays generated by the X-ray device 70 are easily absorbed by the air and cannot pass through the substrate 40, and the substrate 40 and the bottom surface are instantaneous when the substrate 40 and the stage 10 are peeled off. The gas between 12 is difficult to ionize, so that a large amount of static electricity on the substrate 40 is still difficult to be eliminated, so that the substrate 40 will still be destroyed by static electricity thereafter.

Therefore, it is indeed necessary to provide a processing device capable of effectively eliminating static electricity to solve the static problem existing in the prior art.

technical problem

SUMMARY OF THE INVENTION It is an object of the present invention to provide a device carrying device that provides a device for removing static electricity to the device to solve the electrostatic problems existing in the prior art.

Technical solution

The main object of the present invention is to provide a device carrying device comprising a carrying platform, a vacuum system, a gas supply system and a discharge system. The loading platform has a bearing surface and at least one through hole, and the through hole is defined in the bearing surface and the bottom surface; the vacuum system provides a vacuum suction to the through hole; the air supply system is used for Outputting at least one gas to the through hole; the discharge system ionizing the gas into an ionic fluid; wherein the through hole is for providing the vacuum suction to carry and attract a device; or The ionic fluid is provided when the device is depressurized to eliminate static electricity from the surface of the device. Thus the device carrier can more effectively, more uniformly and more quickly eliminate static electricity on the surface of a device.

A secondary object of the present invention is to provide a device carrying device comprising a carrier, a vacuum system, a gas supply system and a discharge system. The loading platform has a bearing surface, at least one through hole and a plurality of ejector pins, the through hole is defined in the bearing surface, and the ejector pin is received in the loading platform or extends upward from the bearing surface The vacuum system provides a vacuum suction to the through hole; the gas supply system outputs at least one gas at a pressure; and the discharge system includes at least one discharge tube and a power supply, the discharge tube Discharging the gas to ionize an ion wind, the power supply for providing an electrical signal to the discharge tube; wherein the through hole is for providing the vacuum suction to carry and attract a device; Or to provide the ionic fluid when the device is relieved of vacuum to eliminate static electricity from the surface of the device. The discharge system simultaneously performs a monitoring action to reduce the amount of ionization of the gas while continuously reducing the static electricity on the surface of the device, so as to ensure that the static electricity on the surface of the device is eliminated, the production can be stopped. The ionic fluid does not cause excessive accumulation of the ionic fluid on the device.

Another object of the present invention is to provide a device carrying device wherein the gas supply system includes a gas supply, a conduit, and a screen. The conduit is connected to the bearing surface and the through hole, and filters the gas by using the screen disposed between the gas supply and the through hole, which can not only pass through the The gas of the screen is cleaner to produce a cleaner ion fluid, and may also filter dust or impurities from the gas supply to help ensure that no electrostatic particles remain on the surface of the device or dust.

To achieve the foregoing objects of the present invention, the present invention provides a device carrying device including a carrier, a vacuum system, a gas supply system, and a discharge system. The loading platform has a bearing surface and at least one through hole, and the through hole is defined in the bearing surface and the bottom surface; the vacuum system provides a vacuum suction to the through hole; the air supply system is used for Outputting at least one gas to the through hole; the discharge system ionizing the gas into an ionic fluid; wherein the through hole is for providing the vacuum suction to carry and attract a device; or The ionic fluid is provided when the device is depressurized to eliminate static electricity from the surface of the device.

Furthermore, the present invention provides another device carrying device comprising: a carrying platform, a vacuum system, a gas supply system and a discharge system. The loading platform has a bearing surface, at least one through hole and a plurality of ejector pins, the through hole is defined in the bearing surface, and the ejector pin is received in the loading platform or extends upward from the bearing surface The vacuum system provides a vacuum suction to the through hole; the gas supply system outputs at least one gas at a pressure; and the discharge system includes at least one discharge tube and a power supply, the discharge tube Discharging the gas to ionize an ion wind, the power supply for providing an electrical signal to the discharge tube; wherein the through hole is for providing the vacuum suction to carry and attract a device; Or to provide the ionic fluid when the device is relieved of vacuum to eliminate static electricity from the surface of the device.

In an embodiment of the invention, the discharge system includes: at least one discharge tube that ionizes the gas to form the ionic fluid having a plurality of positive or negative ions; and a power supply that supplies an electrical signal to the discharge And a monitor, wherein the monitor monitors an electrode polarity of the discharge end and a potential difference between the discharge end and the device when the device is disposed on the ejector pin, The electrical signal is then modulated.

In an embodiment of the invention, the electrical signal is a pulsed alternating current signal.

In an embodiment of the invention, the discharge tube includes a discharge end, the discharge end is disposed in the through hole, and the discharge end ionizes the gas into a plurality of positive or negative ions according to the electrical signal. .

In an embodiment of the invention, the vacuum system includes: a vacuum generator, at least a first conduit, and a first valve. The vacuum generator is configured to generate the vacuum suction; the at least one first conduit is connected to the through hole; and the first valve is located between the first conduit and the through hole.

In an embodiment of the invention, the gas supply system includes: a gas supply for outputting the gas; at least one second conduit connected to the through hole; and a second valve located at the first Between the two conduits and the through holes; and at least one screen having a plurality of screen openings disposed between the gas supply and the second conduit.

In an embodiment of the invention, the gas supply unit outputs the gas at a pressure of 0.5 MPa (micropascal), and the pore size of the mesh is 0.01 μm (micrometer).

In an embodiment of the invention, the through hole has a diameter of 4 mm (mm), and a hole wall of the through hole is coated with a silicone layer.

In an embodiment of the invention, the carrying platform further includes a plurality of ejector pins, which are received in the loading platform or protrude from the bearing surface.

In an embodiment of the invention, the device is a glass substrate of a liquid crystal display semi-finished product.

Beneficial effect

Compared with the prior art, the device carrying device of the present invention can more effectively, more uniformly and more quickly eliminate the static electricity on the surface of the bundled device, and can simultaneously perform the monitoring action to continuously reduce the static electricity on the surface of the device. At the same time, the amount of ionization of the gas is also reduced to ensure that the generation of the ionic fluid is stopped after the static electricity on the surface of the device is eliminated, so that excessive accumulation of the ionic fluid in the device is not caused. Therefore, it can ensure that the device no longer retains electrostatic particles or dust, so as to achieve the goal of improving product yield.

DRAWINGS

1A is a schematic view of a carrier of a conventional first processing apparatus.

Figure 1B is a cross-sectional view of the prior art carrier taken from line A-A of Figure 1A.

Figure 1C is a cross-sectional view of the substrate placed on the carrier of Figure 1B.

2 is a cross-sectional view of a conventional second substrate processing apparatus.

Figure 3 is a cross-sectional view of a device carrying device in accordance with an embodiment of the present invention.

3A is a partial enlarged view of a device carrying device according to an embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The above described objects, features, and advantages of the present invention will become more apparent from the aspects of the invention. Furthermore, the directional terms mentioned in the present invention, such as "upper", "lower", "before", "after", "left", "right", "inside", "outside", "side", etc. Just refer to the direction of the additional schema. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention.

The device carrying device proposed by the invention is mainly used in the field of insulator manufacturing, in particular in the field of semiconductor or optoelectronic product manufacturing. It is mainly used to remove static electricity generated on the surface of the device when the device is separated from the processing platform, and to prevent residual static electricity from damaging the device during subsequent processing.

Referring to FIG. 3, a cross-sectional view of the device carrying device 300 of the embodiment of the present invention is disclosed. The device carrying device 300 mainly comprises a carrying platform 10, a gas supply system 20, a discharge system 30 and a vacuum system 80 for processing a device 50, which will be described in detail below.

FIG. 3A discloses a partial enlarged view of a device carrying device 300 in accordance with an embodiment of the present invention. Referring to FIG. 3 and FIG. 3A, the device carrying device 300 of the first embodiment of the present invention may be a glass substrate processing device of a liquid crystal display, and the device 50 may be a workpiece or a substrate, and the carrying platform 10 may be a processing platform for printing an alignment film, which is not limited thereto, and the carrier 10 may also be a platform for processing any insulator material, semiconductor substrate or optoelectronic product. The loading platform 10 includes a bearing surface 11 , a bottom surface 12 , and at least one through hole 13 , wherein the through hole 13 is electrically connected to the bearing surface 11 and the bottom surface 12 , but not limited thereto. 13 may also be that the bearing surface 11 and at least one side of the carrying platform 10 are turned on. In practice, if the length, width, and height of the device 50 are 1300 mm, 1100 mm, and 0.7 mm, respectively, the carrier 10 can be uniformly opened 30 and 25 diameters respectively corresponding to the length and the width. The through hole 13 of 4 mm, but is not intended to limit the invention. In addition, the carrier 10 can further comprise a plurality of ejector pins 14 that are received in the movable platform in the movable platform 10 and extend from the bearing surface 11 as necessary. .

Referring again to FIGS. 3 and 3A, the vacuum system 80 is configured to provide a vacuum suction to the through hole 13 to carry and attract the device 50. The vacuum system 80 includes a vacuum generator 81, a plurality of first conduits 82, and a first valve 83, wherein the first conduit 82 is located between the vacuum generator 81 and the through hole 13, and the a first conduit 82 is connected to the interface between the through hole 13 and the bearing surface 11, so that the vacuum generator 81 pulls out the gas in the through hole 13 to make the through hole 13 form a vacuum state. The first valve 83 is located between the vacuum generator 81 and the through hole 13 for controlling the vacuum suction of the vacuum generator 81 to the through hole 13.

As shown in FIGS. 3 and 3A, the air supply system 20 outputs a clean and dry plurality of gases to the through holes 13 at a pressure to release the vacuum state of the through holes 13. The gas supply system 20 includes a gas supply 21, a plurality of second conduits 22, at least one screen 23, and a second valve 24, wherein the gas supply 21 outputs the gas according to the gas pressure; a second duct 22 is disposed between the gas supply 21 and the through hole 13, and the second duct 22 is connected to a boundary between the through hole 13 and the bottom surface 12; the second valve 24 is located Between the second conduit 22 and the through hole 13 for receiving and controlling the gas from the gas supply 21, the gas is transmitted to the through hole by the second conduit 22 13; the screen 23 has a plurality of mesh holes (not shown) for making the gas passing through the screen 23 cleaner, and the screen 23 is disposed on the gas supplier 21 and the Between the through holes 13. Furthermore, the gas pressure may be 0.5 MPa, and the pore size of the mesh may be 0.01 μm, but not limited thereto.

As further shown in FIGS. 3 and 3A, the discharge system 30 is configured to excite the gas to ionize the gas into an ionic fluid having a plurality of positive or negative ions, and based on the gas supply system 20 at the gas pressure output. The gas, in turn, causes the ionic fluid to form an ionic wind to eliminate static electricity from the surface of the device 50. The discharge system 30 includes at least one discharge tube 31, a power supply unit 32, and a monitor 33. The discharge tube 31 includes a discharge end 311, and the discharge end 311 is disposed in the through hole 13; The power supply 32 provides an electrical signal to the discharge tube 31, so that the discharge end 311 performs a tip discharge in the through hole 13 according to the electrical signal, thereby ionizing the gas into the ionic fluid, and The ion wind is blown from the through hole 13 toward the device 50; the monitor 33 is configured to monitor an polarity of the discharge end 311 and a gap between the discharge end 311 and the device 50. a potential difference, thereby calculating a charge amount and an electrode property of the device 50, and modulating the electrical signal of the power supply 32 by using the charge amount of the device 50 and the polarity of the device 50. The discharge end 311 can ionize the ion wind that is equal to the charge amount of the device 50 and the polarity is opposite. The discharge end 311 may be disposed on the shaft center of the through hole 13, the discharge tube 31 may be a discharge needle having conductivity, and the discharge end 311 is one of the discharge needles. At the tip of the needle, the charge amount may be an electrostatic charge amount of the surface of the device 50, and the electrical signal may be a pulsed alternating current signal. In addition, a hole in the wall of the through hole 13 may be covered with a silicone resin to prevent ozone generated by the discharge of the discharge end 311 from corroding the hole wall.

Specifically, referring to FIG. 3 and FIG. 3A, after the ejector pin 14 protrudes from the bottom surface 12, a transport arm (not shown) places the device 50 on the ejector pin 14. The ejector pin 14 is again slowly received into the carrier 10 so that the device 50 is disposed on the bottom surface 12, but the ejector pin 14 may be received in the carrier 10 The device 50 is placed directly on the bottom surface 12; thereafter, the device 50 is aligned to ensure placement in the correct position and the through hole is utilized by the vacuum system 80 13 is evacuated to form a vacuum state, so that the device 50 is closely attached to the bottom surface 12, and then the device 50 can be printed or surface-processed with an alignment film. However, it is not limited thereto; after the processing of the device 50 is finished, the gas is introduced into the second conduit 22 by the gas supply system 20, and the discharge system 30 is activated. Once the gas passes through the discharge end 311, a portion of the gas is ionized into the electron or the ion and mixed with the non-ionized gas to form the ion wind. At this time, since the ion wind passes into the through hole 13, the through hole 13 returns to the atmospheric state from a vacuum state, which helps the ejector pin 14 to lift the device 50, so that the Device 50 exits the bottom surface 12. It should be noted that the ion wind is not only to return the through hole 13 to the atmospheric state, so that the device 50 can be easily separated from the bundled platform 10, and more importantly, the device carrying device 300 may also utilize the positively charged ions or the negatively charged electrons in the ion wind to purge the device 50, thereby causing electrostatic particles and ions dispersed on the surface of the device 50. The wind is electrically neutralized.

Furthermore, as shown in FIGS. 3 and 3A, the gas supply system 20 continues to output the gas from the end of the processing of the device 50 until the device 50 is carried away from the ejector pin 14. And the discharge system 30 continues to ionize the gas. During this period, the monitor 32 also continuously monitors the polarity of the discharge end 311, and the potential difference between the discharge end 311 and the device 50, and regulates the pulsed AC signal. The discharge end 311 is ionized out of the ion wind that is equal to the charge amount of the device 50 and opposite in polarity.

As shown in FIGS. 3 and 3A, an advantage of the above features of the embodiments of the present invention is that the device carrying device 300 eliminates static electricity to the device 50 by the carrier 10, the gas supply system 20, and the discharge system 30. And evacuating the through hole by the vacuum system 80. It mainly uses the gas supply system 20 to output the gas at the gas pressure, and ionizes the gas to include the electron or the ion by the discharge end 311 disposed in the through hole 13. The ionic fluid, and because the gas supply system 20 continues to supply the gas at the gas pressure, causing the ionic fluid to blow the surface of the device 50 in the form of the ion wind, and the device 50 Electrical neutralization is performed to achieve the purpose of more efficient, more uniform and more rapid elimination of static electricity. Furthermore, when the device 50 is disposed on the ejector pin 14, the monitor 33 simultaneously monitors the polarity of the discharge end 311 and between the discharge end 311 and the device 50. a potential difference, and modulating the pulsed alternating current signal of the electrical signal to ensure that the device carrying device 300 can provide an equal amount of electrical power to the static electricity accumulated on the surface of the device 50, and the electrical opposite The ionic fluid, and since the monitor 33 is continuously monitoring, the monitor 33 also modulates the pulsed AC as the static electricity on the surface of the device 50 continues to decrease. Signals to ensure that the static electricity on the surface of the device 50 is eliminated, the generation of the ionic fluid can be stopped without causing excessive accumulation of the ionic fluid on the device 50. In addition, the second duct 22 of the air supply system 20 is connected to the boundary between the through hole 13 and the bottom surface 12, and utilizes a space disposed between the gas supply 21 and the through hole 13. Screening the screen 23, filtering the gas to not only make the gas passing through the screen hole cleaner, so as to produce a purer ionic fluid, and also filter the dust output from the gas supply unit 21. Or impurities, which helps to ensure that the device 50 no longer retains electrostatic particles or dust to achieve the goal of improving product yield.

The present invention has been described by the above related embodiments, but the above examples do not limit the scope of the present invention. Rather, modifications and equivalent arrangements are intended to be included within the scope of the invention.

Embodiments of the invention

Industrial applicability

Sequence table free content

Claims (18)

A device carrying device, characterized in that: the device carrying device comprises: a carrying platform having a bearing surface and at least one through hole, and the through hole is opened on the bearing surface; a vacuum system providing a vacuum suction to the through hole, the vacuum system comprising: a vacuum generator for generating the vacuum suction; at least one first conduit connected to the through hole; and a first a valve located between the first conduit and the through hole; a gas supply system, outputting at least one gas to the through hole, the gas supply system comprising: a gas supply for outputting the gas; at least one second conduit connected to the through hole; a second valve between the first conduit and the through hole; and at least one screen having a plurality of meshes disposed between the gas supply and the second conduit; a discharge system that discharges the gas to ionize the gas into an ionic fluid, the discharge system comprising: at least one discharge tube ionizing the gas to form the ionic fluid having a plurality of positive or negative ions; Providing an electrical signal to the discharge tube; and a monitor, wherein the monitor monitors an electrode polarity of the discharge end and a potential difference between the discharge end and the device, and further modulates Electric signal Wherein the through hole is for providing the vacuum suction to carry and attract a device; or to provide the ionic fluid when the device is relieved of vacuum to eliminate static electricity on the surface of the device. The device carrying device of claim 1 wherein said electrical signal is a pulsed alternating current signal. The device carrying device according to claim 1, wherein said discharge tube comprises a discharge end, said discharge end is disposed in said through hole, and said discharge end causes said gas according to said electrical signal Ionization into the positive or negative ions. The device carrying device according to claim 1, wherein said through hole has a diameter of 4 mm. The device carrying device according to claim 1, wherein a hole of a hole of the through hole is coated with a silicone layer. The device carrying device of claim 1 wherein said carrier further comprises a plurality of ejector pins received in said tray or extending upwardly from said carrier surface. The device carrying device of claim 1 wherein said device is a glass substrate of a semi-finished liquid crystal display. A device carrying device, characterized in that: the device carrying device comprises: a carrying platform having a bearing surface and at least one through hole, and the through hole is opened on the bearing surface; a vacuum system providing a vacuum suction to the through hole; a gas supply system that outputs at least one gas to the through hole; a discharge system that discharges the gas to ionize the gas into an ionic fluid; Wherein the through hole is for providing the vacuum suction to carry and attract a device; or to provide the ionic fluid when the device is relieved of vacuum to eliminate static electricity on the surface of the device. The device carrying device of claim 8 wherein said discharge system comprises: At least one discharge tube ionizing the gas to form the ionic fluid having a plurality of positive or negative ions; a power supply providing an electrical signal to the discharge tube; A monitor, wherein the monitor monitors an electrode polarity of the discharge end and a potential difference between the discharge end and the device to modulate the electrical signal. The device carrying device of claim 9 wherein said electrical signal is a pulsed alternating current signal. A device carrying device according to claim 9, wherein said discharge tube comprises a discharge end, said discharge end is disposed in said through hole, and said discharge end causes said gas in accordance with said electrical signal Ionization into the positive or negative ions. The device carrying device of claim 8 wherein said vacuum system comprises: a vacuum generator for generating the vacuum suction; At least one first conduit coupled to the through hole; A first valve is located between the first conduit and the through hole. The device carrying device of claim 12 wherein said gas supply system comprises: a gas supply for outputting the gas; At least one second conduit connected to the through hole; a second valve located between the first conduit and the through hole; At least one screen having a plurality of screen openings disposed between the gas supply and the second conduit. The device carrying device according to claim 8, wherein said through hole has a diameter of 4 mm. The device carrying device according to claim 8, wherein a hole of the hole of the through hole is covered with a silicone layer. The device carrying device of claim 8 wherein said carrier further comprises a plurality of ejector pins received in said tray or extending upwardly from said carrier surface. The device carrying device according to claim 8, wherein said device is a glass substrate of a liquid crystal display semi-finished product. A device carrying device, characterized in that: the device carrying device comprises: a loading platform having a bearing surface, at least one through hole and a plurality of ejector pins, the through hole being defined in the bearing surface, the ejector pin being received in the loading platform or extending from the bearing surface ; a vacuum system providing a vacuum suction to the through hole; a gas supply system that outputs at least one gas at a pressure; A discharge system comprising: Disposing at least one discharge tube, discharging the gas to ionize the gas into an ion wind; and a power supply, providing an electrical signal to the discharge tube; Wherein the through hole is for providing the vacuum suction to carry and attract a device; or to provide the ionic fluid when the device is relieved of vacuum to eliminate static electricity on the surface of the device.

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