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WO2014010286A1 - Élément de conversion thermoélectrique et son procédé de fabrication - Google Patents

Élément de conversion thermoélectrique et son procédé de fabrication Download PDF

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Publication number
WO2014010286A1
WO2014010286A1 PCT/JP2013/061213 JP2013061213W WO2014010286A1 WO 2014010286 A1 WO2014010286 A1 WO 2014010286A1 JP 2013061213 W JP2013061213 W JP 2013061213W WO 2014010286 A1 WO2014010286 A1 WO 2014010286A1
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WIPO (PCT)
Prior art keywords
thermoelectric conversion
electromotive
conversion unit
layer
conversion element
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Ceased
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PCT/JP2013/061213
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English (en)
Japanese (ja)
Inventor
明宏 桐原
石田　真彦
滋 河本
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NEC Corp
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NEC Corp
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Priority to JP2014524669A priority Critical patent/JPWO2014010286A1/ja
Publication of WO2014010286A1 publication Critical patent/WO2014010286A1/fr
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/85—Thermoelectric active materials
    • H10N10/851—Thermoelectric active materials comprising inorganic compositions
    • H10N10/853—Thermoelectric active materials comprising inorganic compositions comprising arsenic, antimony or bismuth
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/85—Thermoelectric active materials
    • H10N10/851—Thermoelectric active materials comprising inorganic compositions
    • H10N10/855—Thermoelectric active materials comprising inorganic compositions comprising compounds containing boron, carbon, oxygen or nitrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/85—Thermoelectric active materials
    • H10N10/857—Thermoelectric active materials comprising compositions changing continuously or discontinuously inside the material

Definitions

  • the present invention relates to a thermoelectric conversion element based on a spin Seebeck effect and an inverse spin Hall effect, and a manufacturing method thereof.
  • spintronics In recent years, an electronic technology called “spintronics” has been in the spotlight. Conventional electronics have used only “charge”, which is one property of electrons, while spintronics also actively uses “spin”, which is another property of electrons. In particular, the “spin-current”, which is the flow of electron spin angular momentum, is an important concept. Since the energy dissipation of the spin current is small, there is a possibility that highly efficient information transfer can be realized by using the spin current. Therefore, generation, detection and control of spin current are important themes.
  • spin-Hall effect spin-Hall effect
  • inverse spin-Hall effect an electromotive force is generated when a spin current flows.
  • the spin current can be detected.
  • both the spin Hall effect and the reverse spin Hall effect are significantly expressed in a substance (eg, Pt, Au) having a large “spin orbit coupling”.
  • the spin Seebeck effect is a phenomenon in which when a temperature gradient is applied to a magnetic material, a spin current is induced in a direction parallel to the temperature gradient (see, for example, Patent Document 1, Non-Patent Document 1, and Non-Patent Document 2). ). That is, heat is converted into a spin current by the spin Seebeck effect (thermal spin current conversion).
  • membrane which is a ferromagnetic metal is reported.
  • Non-Patent Documents 1 and 2 report the spin Seebeck effect at the interface between a magnetic insulator such as yttrium iron garnet (YIG, Y 3 Fe 5 O 12 ) and a metal film.
  • the spin current induced by the temperature gradient can be converted into an electric field (current, voltage) using the above-described inverse spin Hall effect. That is, by using the spin Seebeck effect and the inverse spin Hall effect in combination, “thermoelectric conversion” that converts a temperature gradient into electricity becomes possible.
  • FIG. 1 shows a configuration of a thermoelectric conversion element disclosed in Patent Document 1.
  • a thermal spin current conversion unit 102 is formed on the sapphire substrate 101.
  • the thermal spin current conversion unit 102 has a stacked structure of a Ta film 103, a PdPtMn film 104, and a NiFe film 105.
  • the NiFe film 105 has in-plane magnetization.
  • a Pt electrode 106 is formed on the NiFe film 105, and both ends of the Pt electrode 106 are connected to terminals 107-1 and 107-2, respectively.
  • the NiFe film 105 plays a role of generating a spin current from the temperature gradient by the spin Seebeck effect, and the Pt electrode 106 generates an electromotive force from the spin current by the reverse spin Hall effect. Play a role. Specifically, when a temperature gradient is applied in the in-plane direction of the NiFe film 105, a spin current is generated in a direction parallel to the temperature gradient due to the spin Seebeck effect. Then, a spin current flows from the NiFe film 105 to the Pt electrode 106 or a spin current flows from the Pt electrode 106 to the NiFe film 105.
  • an electromotive force is generated in a direction orthogonal to the spin current direction and the NiFe magnetization direction by the inverse spin Hall effect.
  • the electromotive force can be taken out from terminals 107-1 and 107-2 provided at both ends of the Pt electrode 106.
  • thermoelectric conversion element Higher output of thermoelectric conversion element is desired.
  • thermoelectric conversion element in one aspect of the present invention, includes a plurality of stacked thermoelectric conversion unit structures.
  • Each of the plurality of thermoelectric conversion unit structures includes a magnetic layer and an electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction.
  • Each thermoelectric conversion unit structure is folded so that the electromotive layer is exposed to the outside. Moreover, the electromotive layers are in contact between adjacent thermoelectric conversion unit structures.
  • thermoelectric conversion element in another aspect of the present invention, includes the step of (A) providing a thermoelectric conversion sheet.
  • the thermoelectric conversion sheet includes a magnetic layer and an electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction.
  • the manufacturing method further includes (B) a step of creating a thermoelectric conversion unit structure by folding the thermoelectric conversion sheet so that the electromotive layer is exposed to the outside, and (C) so that the electromotive layers are in contact with each other. Laminating a plurality of thermoelectric conversion unit structures.
  • thermoelectric conversion element further increase in output of the thermoelectric conversion element is realized.
  • FIG. 1 is a perspective view schematically showing a thermoelectric conversion element described in Patent Document 1.
  • FIG. 2 is a perspective view schematically showing the thermoelectric conversion element according to the embodiment of the present invention.
  • FIG. 3 is a perspective view schematically showing a thermoelectric conversion unit structure in the embodiment of the present invention.
  • FIG. 4 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example.
  • FIG. 5 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example.
  • FIG. 6 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example.
  • FIG. 7 is a cross-sectional view showing the structure of the thermoelectric conversion element in the first example.
  • FIG. 1 is a perspective view schematically showing a thermoelectric conversion element described in Patent Document 1.
  • FIG. 2 is a perspective view schematically showing the thermoelectric conversion element according to the embodiment of the present invention.
  • FIG. 3 is a perspective
  • FIG. 8 is a cross-sectional view showing another structure of the thermoelectric conversion element in the first example.
  • FIG. 9 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the first example.
  • FIG. 10 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the first example.
  • FIG. 11 is a cross-sectional view illustrating a method for manufacturing a thermoelectric conversion element in the second example.
  • FIG. 12 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example.
  • FIG. 13 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example.
  • FIG. 14 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example.
  • FIG. 14 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example.
  • FIG. 15 is a cross-sectional view showing the structure of the thermoelectric conversion element in the second example.
  • FIG. 16 is a cross-sectional view showing another structure of the thermoelectric conversion element in the second example.
  • FIG. 17 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the second example.
  • FIG. 2 is a perspective view schematically showing a thermoelectric conversion element 1 according to the present embodiment.
  • the thermoelectric conversion element 1 has a laminated structure in which a plurality of thermoelectric conversion unit structures 10 are laminated.
  • the stacking direction is the Z direction, and the in-plane directions orthogonal to the Z direction are the X direction and the Y direction.
  • the X direction and the Y direction are orthogonal to each other.
  • a first conductive structure 51 is formed on the first side surface 11 of the laminated structure.
  • a second conductive structure 52 is formed on the second side surface 12 of the laminated structure. Both the first conductive structure 51 and the second conductive structure 52 are conductors.
  • the first side surface 11 and the second side surface 12 face each other in the X direction. That is, the first conductive structure 51 and the second conductive structure 52 face each other in the X direction.
  • FIG. 3 schematically shows a single thermoelectric conversion unit structure 10.
  • the thermoelectric conversion unit structure 10 includes a magnetic layer 30 and an electromotive layer (conductive layer) 40.
  • the electromotive layer 40 is formed on the magnetic layer 30.
  • the electromotive layer 40 is in contact with the magnetic layer 30.
  • the magnetic layer 30 is formed of a material that exhibits a spin Seebeck effect.
  • the material of the magnetic layer 30 may be a ferromagnetic metal or a magnetic insulator.
  • the ferromagnetic metal include NiFe, CoFe, and CoFeB.
  • magnetic insulators include yttrium iron garnet (YIG, Y 3 Fe 5 O 12 ), YIG doped with bismuth (Bi) (Bi: YIG), and YIG added with lanthanum (La) (LaY 2 Fe 5 O 12 ).
  • yttrium gallium iron garnet Y 3 Fe 5-x Ga x O 12 . From the viewpoint of suppressing heat conduction by electrons, it is desirable to use a magnetic insulator.
  • the electromotive layer (conductive layer) 40 is formed of a material that exhibits a reverse spin Hall effect (spin orbit interaction). More specifically, the material of the electromotive layer 40 contains a metal material having a large spin orbit interaction. For example, Au, Pt, Pd, Ir, other metal materials having f orbitals having a relatively large spin-orbit interaction, or alloy materials containing them are used. Further, the same effect can be obtained by simply doping a general metal film material such as Cu with a material such as Au, Pt, Pd, or Ir by about 0.5 to 10%. Alternatively, the electromotive layer 40 may be an oxide such as ITO.
  • thermoelectric conversion unit structure 10 has a function as a “thermoelectric conversion portion” using the spin Seebeck effect and the inverse spin Hall effect. More specifically, the magnetic body 30 generates (drives) a spin current from the temperature gradient ⁇ T by the spin Seebeck effect. The direction of the spin current is parallel or antiparallel to the direction of the temperature gradient ⁇ T.
  • the electromotive layer 40 generates an electromotive force from the spin current by the reverse spin Hall effect.
  • the direction of the generated electromotive force is given by the outer product of the direction of the magnetization M of the magnetic layer 30 and the direction of the temperature gradient ⁇ T (E, J // M ⁇ ⁇ T).
  • the thermoelectric conversion unit structure 10 is configured such that the direction of the electromotive force in the electromotive layer 40 is the in-plane direction for efficient power generation.
  • the direction of the magnetization M of the magnetic layer 30 is the ⁇ Y direction
  • the direction of the temperature gradient ⁇ T is the ⁇ Z direction
  • the direction of the electromotive force is the + X direction.
  • the magnetization M of the magnetic layer 30 only needs to include at least a Y-direction component, thereby generating at least an electromotive force in the X direction.
  • the end portion of the electromotive layer 40 on the first side surface 11 side is a first end portion 41.
  • an end portion of the electromotive layer 40 on the second side surface 12 side (+ X direction side) is a second end portion 42.
  • the first end portion 41 and the second end portion 42 face each other in the X direction.
  • the first end 41 of the electromotive layer 40 is physically connected to the first conductive structure 51 shown in FIG.
  • the second end portion 42 of the electromotive layer 40 is physically connected to the second conductive structure 52 shown in FIG.
  • “physically connected” includes the case where the electromotive layer 40 and the first conductive structure 51 or the second conductive structure 52 are integrally formed. That is, the electromotive layer 40 and the first conductive structure 51 or the second conductive structure 52 may be formed separately or integrally.
  • thermoelectric conversion unit structure 10 When the first end 41 (second end 42) of the electromotive layer 40 of each thermoelectric conversion unit structure 10 is physically connected to the first conductive structure 51 (second conductive structure 52), a plurality of stacked layers The electromotive layers 40 of the thermoelectric conversion unit structure 10 are electrically connected to each other.
  • the first conductive structure 51 and the second conductive structure 52 are preferably formed of a low resistance material.
  • the material of the first conductive structure 51 and the second conductive structure 52 is Pt.
  • thermoelectric conversion element 1 As described above, in the thermoelectric conversion element 1 according to the present embodiment, a plurality of thermoelectric conversion unit structures 10 are laminated.
  • the electromotive layer 40 of each thermoelectric conversion unit structure 10 is commonly connected to the first conductive structure 51 and the second conductive structure 52. Therefore, by using the first conductive structure 51 and the second conductive structure 52, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.
  • the resistance value between the first end 41 and the second end 42 of the single electromotive layer 40 is “R1”, and the entire first conductive structure 51 (second conductive structure 52) in the Z direction.
  • the resistance value is “R2”
  • the condition “R1> R2” is preferably satisfied.
  • thermoelectric conversion element 1 which concerns on this Embodiment is demonstrated.
  • the magnetic layer 30 is formed on the substrate 20, and the electromotive layer 40 is formed on the magnetic layer 30. Further, the lamination of the substrate 20, the magnetic layer 30 and the electromotive layer 40 is taken as one unit, and the lamination is repeated a plurality of times.
  • the laminated structure shown in FIG. 5 is obtained.
  • the side surface on the ⁇ X direction side of the stacked structure is the first side surface 11, and the side surface on the + X direction side is the second side surface 12.
  • the laminated structure of the substrate 20, the magnetic layer 30 and the electromotive layer 40 corresponds to a single thermoelectric conversion unit structure 10.
  • the end of the electromotive layer 40 on the first side surface 11 side ( ⁇ X direction side) is the first end portion 41
  • the end of the electromotive layer 40 on the second side surface 12 side (+ X direction side) is the first end portion 41.
  • Two end portions 42 is provided.
  • a conductive film is formed from the lateral direction.
  • the first conductive structure 51 is formed so as to be in contact with the first side surface 11
  • the second conductive structure 52 is formed so as to be in contact with the second side surface 12.
  • a first external terminal 61 and a second external terminal 62 are attached to the first conductive structure 51 and the second conductive structure 52, respectively.
  • the first external terminal 61 and the second external terminal 62 are used for taking out electric power.
  • the magnetization process of the magnetic layer 30 may be performed at any timing.
  • the electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) are electrically connected by being in physical contact. Therefore, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.
  • electromotive layers 40 may be formed above and below the magnetic layer 30.
  • the side surface 11 may be formed in a slope shape.
  • the first electrode 45 and the second electrode 46 may be formed on both ends of the electromotive layer 40.
  • the first electrode 45 and the second electrode 46 are made of a low resistance material (eg, Cu) and extend in the Y direction.
  • the side surface of the first electrode 45 is in contact with the first conductive structure 51 together with the first end 41 of the electromotive layer 40.
  • the side surface of the second electrode 46 is in contact with the second conductive structure 52 together with the second end portion 42 of the electromotive layer 40.
  • Such a structure also increases the contact area with the first conductive structure 51 and the second conductive structure 52 (that is, the contact resistance is reduced).
  • the insulating film 47 may be formed on the electromotive layer 40 so as to fill the space between the first electrode 45 and the second electrode 46.
  • the insulating film 47 is made of a material having high thermal conductivity (low thermal resistance), for example, polyimide. Such an insulating film 47 prevents generation of spaces in the laminated structure and improves power generation efficiency.
  • thermoelectric conversion element 1 Second Example Next, a second example of the manufacturing method of the thermoelectric conversion element 1 according to the present embodiment will be described.
  • the thickness of the electromotive layer 40 is set to about the “spin diffusion length (spin relaxation length)” depending on the material.
  • the film thickness is preferably set to about 10 to 30 nm.
  • the electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) are formed by separate processes. In this case, the contact resistance between the thin electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) is inevitably increased. That is, the contact portions (the first end portion 41 and the second end portion 42) with respect to the thin electromotive layer 40 are increased in resistance.
  • the second example is for solving such a problem.
  • thermoelectric conversion sheet 70 as shown in FIG. 11 is provided.
  • This thermoelectric conversion sheet 70 also has a laminated structure of the substrate 20, the magnetic layer 30 and the electromotive layer 40.
  • the thermoelectric conversion sheet 70 has flexibility.
  • flexibility includes the concepts of both plasticity and elasticity. That is, the thermoelectric conversion sheet 70 can be bent.
  • the substrate 20 is a polyimide substrate (thickness: 25 ⁇ m)
  • the magnetic layer 30 is a ferrite magnetic body (thickness: 3 ⁇ m)
  • the electromotive layer 40 is a Pt film (thickness: 10 nm).
  • the ferrite magnetic body is formed by, for example, a ferrite plating method.
  • the Pt film is formed by sputtering, for example.
  • thermoelectric conversion sheet 70 is folded so that the electromotive layer 40 is exposed to the outside.
  • the thermoelectric conversion sheet 70 is bent at two locations.
  • the bent portions corresponding to these two locations in the electromotive layer 40 are the “first side surface conductive portion 40S1” and the “second side surface conductive portion 40S2”.
  • the first side surface conductive portion 40S1 and the second side surface conductive portion 40S2 face each other in the X direction.
  • the first side surface conductive portion 40S1 is located on the ⁇ X direction side
  • the second side surface conductive portion 40S2 is located on the + X direction side.
  • the portion of the electromotive layer 40 exposed in the upward direction (+ Z direction) is hereinafter referred to as “upper electromotive layer 40U”.
  • the portion of the electromotive layer 40 that is exposed in the downward direction ( ⁇ Z direction) is hereinafter referred to as a “lower electromotive layer 40L”. That is, the upper electromotive layer 40U is formed on the upper surface side, and the lower electromotive layer 40L is formed on the lower surface side.
  • Each of the upper electromotive layer 40U and the lower electromotive layer 40L corresponds to the single electromotive layer 40 shown in FIG.
  • the upper electromotive layer 40U (lower electromotive layer 40L) and the first side surface conductive portion 40S1 are integrally formed.
  • a transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the first side surface conductive portion 40S1 corresponds to the first end portion 41 shown in FIG. That is, the first side conductive portion 40S1 is integrated with the upper electromotive layer 40U (lower electromotive layer 40L) so as to extend from the first end 41 of the upper electromotive layer 40U (lower electromotive layer 40L). Is formed.
  • the transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the first side surface conductive portion 40S1 has a certain radius of curvature.
  • the upper electromotive layer 40U (lower electromotive layer 40L) and the second side surface conductive portion 40S2 are integrally formed.
  • a transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the second side surface conductive portion 40S2 corresponds to the second end portion 42 shown in FIG. That is, the second side conductive portion 40S2 is formed integrally with the upper electromotive layer 40U (lower electromotive layer 40L) so as to extend from the second end portion 42.
  • the transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the second side surface conductive portion 40S2 has a certain radius of curvature.
  • thermoelectric conversion unit structure 10 corresponds to the thermoelectric conversion unit structure 10 according to the present embodiment.
  • the thermoelectric conversion unit structure 10 shown in FIG. 12 in the electromotive layer 40 excluding the first side surface conductive portion 40S1 and the second side surface conductive portion 40S2 (that is, the upper electromotive layer 40U and the lower electromotive layer 40L), An electromotive force in the direction is generated.
  • thermoelectric conversion unit structure 10 As shown in FIG. 13, as a result of bending, a gap 15 may exist on the lower surface side of the thermoelectric conversion unit structure 10.
  • thermoelectric conversion unit structure 10 shown in FIG. 12 (or FIG. 13) is laminated in a plurality of stages.
  • the electromotive layers 40 are in contact with each other over a wide area between the thermoelectric conversion unit structures 10 that are vertically adjacent to each other. More specifically, the lower electromotive layer 40L of the upper thermoelectric conversion unit structure 10 and the upper electromotive layer 40U of the lower thermoelectric conversion unit structure 10 are in contact with each other.
  • first side surface conductive portions 40S1 are physically connected to each other between the thermoelectric conversion unit structures 10 adjacent to each other in the vertical direction.
  • the “first conductive structure 51” shown in FIG. 2 is formed by connecting the first side surface conductive portions 40S1 of the plurality of thermoelectric conversion unit structures 10 stacked.
  • the second side surface conductive portions 40S2 are physically connected to each other between the thermoelectric conversion unit structures 10 that are vertically adjacent to each other.
  • the second side conductive portions 40S2 of the plurality of laminated thermoelectric conversion unit structures 10 are connected to form the “second conductive structure 52” shown in FIG.
  • a first external terminal 61 and a second external terminal 62 are attached to the first conductive structure 51 and the second conductive structure 52, respectively.
  • the first external terminal 61 and the second external terminal 62 are used for taking out electric power.
  • the magnetization process of the magnetic layer 30 may be performed at any timing.
  • the electromotive layers 40 of the plurality of laminated thermoelectric conversion unit structures 10 are electrically connected to each other. Therefore, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.
  • thermoelectric conversion unit structure 10 is formed by bending the thermoelectric conversion sheet 70. Furthermore, the thermoelectric conversion element 1 is formed by laminating the thermoelectric conversion unit structure 10 in a plurality of stages. At this time, the electromotive layers 40 of the thermoelectric conversion unit structures 10 adjacent to each other in the vertical direction are in contact with each other over a wide area. Therefore, a portion having a high contact resistance as generated in the first example is eliminated. That is, according to the second example, it is possible to further increase the output as compared with the first example.
  • FIG. 16 shows a lamination example in which the lower electromotive layers 40L of the thermoelectric conversion unit structure 10 shown in FIG. 13 are in contact with each other as a modification.
  • the positions of the gaps 15 of the upper and lower thermoelectric conversion unit structures 10 coincide with each other, the current in the X direction is interrupted at that portion. In this case, the effect is not completely lost, but is reduced. Therefore, it is preferable to stack the upper electromotive layer 40U and the lower electromotive layer 40L in contact with each other.
  • the thermoelectric conversion sheet 70 is bent so that the gap 15 is not formed.
  • FIG. 17 shows another modification.
  • the thermoelectric conversion sheet 70 may be bent so as to be wound around the support 80. In this case, breakage of the thermoelectric conversion sheet 70 is suppressed, and the strength of the thermoelectric conversion element 1 as a whole increases.
  • thermoelectric conversion unit 1 It has a plurality of laminated thermoelectric conversion unit structures, Each of the plurality of thermoelectric conversion unit structures is A magnetic layer; An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and Each thermoelectric conversion unit structure is folded so that the electromotive layer is exposed to the outside, A thermoelectric conversion element in which the electromotive layers are in contact with each other between adjacent thermoelectric conversion unit structures.
  • thermoelectric conversion element (Appendix 2) The thermoelectric conversion element according to attachment 1, wherein The electromotive layer of each thermoelectric conversion unit structure is bent at the first side surface conductive portion and the second side surface conductive portion, The thermoelectric conversion element in which the first side surface conductive parts are physically connected to each other between the adjacent thermoelectric conversion unit structures and the second side surface conductive parts are physically connected to each other.
  • thermoelectric conversion element (Appendix 3) The thermoelectric conversion element according to appendix 1 or 2, The first side surface conductive portion and the second side surface conductive portion are opposed to each other in the first in-plane direction, Each of the thermoelectric conversion unit structures is configured such that an electromotive force is generated in the first in-plane direction in the electromotive layer excluding the first side surface conductive portion and the second side surface conductive portion. .
  • thermoelectric conversion element (Appendix 4) The thermoelectric conversion element according to attachment 3, wherein The thermoelectric conversion element, wherein the magnetization of the magnetic layer includes a component in a second in-plane direction orthogonal to the first in-plane direction.
  • thermoelectric conversion unit 5 A laminated structure in which a plurality of thermoelectric conversion unit structures are laminated; A first conductive structure formed on a first side surface of the laminated structure; A second conductive structure formed on the second side surface of the laminated structure, Each of the plurality of thermoelectric conversion unit structures is A magnetic layer; An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and A first end that is an end of the electromotive layer on the first side surface is physically connected to the first conductive structure; The thermoelectric conversion element in which the 2nd edge part which is an edge part of the said 2nd side surface side of the said electromotive layer is physically connected with the said 2nd conductive structure.
  • thermoelectric conversion element according to appendix 5
  • the first side surface and the second side surface are opposed in the first in-plane direction
  • Each of the thermoelectric conversion unit structures is configured to generate an electromotive force in the first in-plane direction in the electromotive layer.
  • thermoelectric conversion element (Appendix 7) The thermoelectric conversion element according to attachment 6, wherein The thermoelectric conversion element, wherein the magnetization of the magnetic layer includes a component in a second in-plane direction orthogonal to the first in-plane direction.
  • thermoelectric conversion element The thermoelectric conversion element according to any one of appendices 5 to 7, Each thermoelectric conversion unit structure further includes: A first side surface conductive portion formed integrally with the electromotive layer so as to extend from the first end of the electromotive layer to the first side surface; A second side surface conductive portion formed integrally with the electromotive layer so as to extend from the second end portion of the electromotive layer to the second side surface; The first conductive structure is formed by physically connecting the first side surface conductive portions between adjacent thermoelectric conversion unit structures, The thermoelectric conversion element in which the second conductive structure is formed by physically connecting the second side-surface conductive portions between adjacent thermoelectric conversion unit structures.
  • thermoelectric conversion element (Appendix 9) The thermoelectric conversion element according to attachment 8, wherein The electromotive layer of each thermoelectric conversion unit structure is: An upper electromotive layer formed on the upper surface side of each thermoelectric conversion unit structure; A lower electromotive layer formed on the lower surface side of each thermoelectric conversion unit structure, The thermoelectric conversion element in which the upper electromotive layer and the lower electromotive layer are in contact between adjacent thermoelectric conversion unit structures.
  • thermoelectric conversion element (Appendix 10) The thermoelectric conversion element according to appendix 8 or 9, Each of the thermoelectric conversion unit structures is a thermoelectric conversion element formed of a flexible material.
  • thermoelectric conversion sheet (A) providing a thermoelectric conversion sheet;
  • the thermoelectric conversion sheet is A magnetic layer;
  • An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
  • thermoelectric conversion unit structure by folding the thermoelectric conversion sheet so that the electromotive layer is exposed to the outside;
  • C A step of laminating the thermoelectric conversion unit structures in a plurality of stages so that the electromotive layers are in contact with each other.
  • thermoelectric conversion element 12 A method of manufacturing a thermoelectric conversion element according to appendix 11, In the step of creating the thermoelectric conversion unit structure, the electromotive layer is bent at the first side surface conductive portion and the second side surface conductive portion, The method of manufacturing a thermoelectric conversion element, wherein in the step of laminating the thermoelectric conversion unit structures in a plurality of stages, the first side surface conductive parts are physically connected to each other, and the second side surface conductive parts are physically connected to each other.

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  • Inorganic Chemistry (AREA)
  • Hall/Mr Elements (AREA)
PCT/JP2013/061213 2012-07-09 2013-04-15 Élément de conversion thermoélectrique et son procédé de fabrication Ceased WO2014010286A1 (fr)

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JP2015142048A (ja) * 2014-01-29 2015-08-03 日本電気株式会社 熱電変換素子およびその製造方法
WO2015115056A1 (fr) * 2014-01-29 2015-08-06 日本電気株式会社 Transducteur thermoélectrique, module de transducteur thermoélectrique, et procédé de fabrication de transducteur thermoélectrique
JP2016009838A (ja) * 2014-06-26 2016-01-18 日本電気株式会社 熱電変換構造およびその製造方法
WO2016039022A1 (fr) * 2014-09-08 2016-03-17 富士フイルム株式会社 Élément et module de conversion thermoélectrique

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WO2015115056A1 (fr) * 2014-01-29 2015-08-06 日本電気株式会社 Transducteur thermoélectrique, module de transducteur thermoélectrique, et procédé de fabrication de transducteur thermoélectrique
JPWO2015115056A1 (ja) * 2014-01-29 2017-03-23 日本電気株式会社 熱電変換素子、熱電変換素子モジュールおよび熱電変換素子の製造方法
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US10461238B2 (en) 2014-06-26 2019-10-29 Nec Corporation Thermoelectric conversion structure and method for making the same
WO2016039022A1 (fr) * 2014-09-08 2016-03-17 富士フイルム株式会社 Élément et module de conversion thermoélectrique
JPWO2016039022A1 (ja) * 2014-09-08 2017-06-01 富士フイルム株式会社 熱電変換素子および熱電変換モジュール
US10243128B2 (en) 2014-09-08 2019-03-26 Fujifilm Corporation Thermoelectric conversion element and thermoelectric conversion module

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