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WO2014092060A1 - Élément de capteur et capteur composite - Google Patents

Élément de capteur et capteur composite Download PDF

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Publication number
WO2014092060A1
WO2014092060A1 PCT/JP2013/083021 JP2013083021W WO2014092060A1 WO 2014092060 A1 WO2014092060 A1 WO 2014092060A1 JP 2013083021 W JP2013083021 W JP 2013083021W WO 2014092060 A1 WO2014092060 A1 WO 2014092060A1
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WO
WIPO (PCT)
Prior art keywords
unit
acceleration
mass
detection
angular velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2013/083021
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English (en)
Japanese (ja)
Inventor
加藤良隆
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2014092060A1 publication Critical patent/WO2014092060A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0848—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

Definitions

  • the present invention relates to a sensor element that detects angular velocity and acceleration, and a composite sensor including the sensor element.
  • the sensor element of the composite sensor described in Patent Document 1 includes a mass portion supported by a support beam so as to have a gap with respect to the substrate.
  • the mass portion is supported so as to be displaceable in two axial directions (for example, the X-axis direction and the Y-axis direction) that are parallel to the substrate surface and orthogonal to each other.
  • This composite sensor detects the angular velocity in a state where the mass part is vibrated in the X-axis direction. In this state, when an angular velocity around the Z axis orthogonal to the X axis and the Y axis acts on the mass portion, a Coriolis force in the Y axis direction is generated. By detecting this Coriolis force with an electric signal, the angular velocity around the Z-axis is detected.
  • this composite sensor includes an acceleration detection unit that detects an acceleration in the Y-axis direction using an electric signal in a region different from the mass unit that detects the angular velocity.
  • the angular velocity detection unit that detects the angular velocity and the acceleration detection unit that detects the acceleration are formed in different regions on the substrate. Thereby, it is not easy to reduce the size of the sensor element.
  • the composite sensor disclosed in Patent Document 1 includes a damping unit that further reduces the Q value of the acceleration detection unit in addition to the angular velocity detection unit and the acceleration detection unit.
  • a damping unit that further reduces the Q value of the acceleration detection unit in addition to the angular velocity detection unit and the acceleration detection unit.
  • the angular velocity detection unit and the acceleration detection unit are provided in one mass unit.
  • the acceleration detection unit is caused by the relationship of the Q value described above. If it is detected excessively or if the Q value of the acceleration detection unit is lowered, the detection sensitivity of the angular velocity detection unit is lowered, and the detection performance is deteriorated.
  • an object of the present invention is to provide a sensor element that can be formed in a small size while detecting both angular velocity and acceleration with sufficient sensitivity, and a composite sensor using this sensor element.
  • the sensor element according to the present invention is arranged in a first direction parallel to the first surface of the substrate and with a gap between the substrate and the substrate, and is parallel to the first surface of the substrate and in the first direction. And a first mass part and a second mass part that vibrate in opposite phases along a second direction orthogonal to each other.
  • the first mass unit outputs an angular velocity detection unit that outputs a first angular velocity detection signal based on an angular velocity around an axis in a third direction orthogonal to the first direction and the second direction, and an acceleration detection signal based on acceleration parallel to the first direction.
  • At least one first mass unit side detection unit having an acceleration detection unit for outputting is provided.
  • the second mass unit includes at least an angular velocity detection unit that outputs a second angular velocity detection signal based on an angular velocity around an axis in the third direction, and an acceleration detection unit that outputs a second acceleration detection signal based on acceleration parallel to the first direction.
  • One second mass unit side detection unit is provided.
  • the angular velocity detection signal and the acceleration detection signal can be separated by adding or subtracting the output signals.
  • an angular velocity detection part and an acceleration detection part can be provided in one mass part.
  • the sensor element of the present invention preferably has the following configuration.
  • the first mass unit includes a first detection unit and a second detection unit which are first mass unit side detection units.
  • the second mass unit includes a third detection unit and a fourth detection unit, which are second mass unit side detection units.
  • the phase of the first detection signal obtained by adding the output signal of the first detection unit and the output signal of the third detection unit, and the phase of the second detection signal obtained by adding the output signal of the second detection unit and the output signal of the fourth detection unit.
  • the first to fourth detection units are configured so that the angular velocity detection signal has an opposite phase relationship and the acceleration detection signal has the same phase relationship.
  • This configuration shows a specific configuration example of the first mass portion and the second mass portion.
  • the sensor element of the present invention preferably has the following configuration.
  • the output terminal for the angular velocity detection signal and the output terminal for the acceleration detection signal are the same terminal.
  • the sensor element can be made smaller.
  • the sensor element of the present invention preferably has the following configuration.
  • the angular velocity detection unit and the acceleration detection unit include a movable side conductor provided in the first mass unit and the second mass unit, and a fixed side conductor that is disposed to face the movable side conductor and is fixed to the substrate.
  • the fixing part for fixing the fixed-side conductor to the substrate is disposed inside the first mass part and the second mass part.
  • the sensor element since the fixed portion fixed to the substrate is not formed outside the first mass portion and the second mass portion, the sensor element can be formed more compactly.
  • the angular velocity detection unit and the acceleration detection unit include a movable side conductor provided in the first mass unit and the second mass unit, and a fixed side conductor that is disposed to face the movable side conductor and is fixed to the substrate.
  • the fixing part for fixing the fixed-side conductor to the substrate is disposed inside the first mass part and the second mass part.
  • the fixed part is a terminal for outputting an angular velocity detection signal and an acceleration detection signal.
  • the fixed portion serves as an output terminal for the angular velocity detection signal and the acceleration detection signal, it is not necessary to form the output terminal separately from the fixed portion, and the sensor element can be miniaturized.
  • the angular velocity detection part of the sensor element of the present invention has a structure that attenuates the resonance amplitude of the first mass part and the second mass part due to acceleration.
  • the damping required at the time of detecting the acceleration can be suppressed by the angular velocity detection unit, and no additional damping suppression unit is required, and the sensor element can be downsized.
  • the movable-side conductor and the fixed-side conductor constituting the angular velocity detection unit have a long shape along the second direction and are arranged so as to face each other along the first direction. It is preferable.
  • This configuration shows a specific structural example of the angular velocity detection unit that can obtain the above-described damping effect.
  • the sensor element of the present invention supports the first mass portion and the second mass portion so as to vibrate so that their vibrations are in opposite phases along the second direction parallel to the main surface of the substrate.
  • Support beams may be provided.
  • the present invention also relates to a composite sensor and has the following characteristics.
  • the composite sensor includes any one of the sensor elements described above, a first detection signal including a first angular velocity detection signal and a first acceleration detection signal, and a second detection signal including a second angular velocity detection signal and a second acceleration detection signal. And an addition unit that calculates the difference between the first detection signal and the second detection signal.
  • This configuration utilizes the fact that the phase relationship between the first and second angular velocity detection signals output from the sensor element described above and the phase relationship between the first and second acceleration detection signals are opposite to each other. By adding or subtracting the detection signal and the second detection signal, either the first or second angular velocity detection signal or the first or second acceleration detection signal can be canceled. Thereby, only the angular velocity detection signal or only the acceleration detection signal can be output.
  • the composite sensor of the present invention preferably has the following configuration.
  • the composite sensor includes a drive unit that generates a drive signal that vibrates the first mass unit and the second mass unit, and a monitor that monitors vibration generated when the drive signal is applied to the first mass unit and the second mass unit.
  • a monitor unit that outputs a signal
  • a synchronous detection unit that synchronously detects the addition signal output from the addition unit and the difference signal output from the subtraction unit using the monitor signal.
  • This configuration shows a specific configuration example for extracting the angular velocity detection signal or acceleration detection signal, and the angular velocity detection signal or acceleration detection signal can be extracted by synchronous detection using a monitor signal.
  • the composite sensor of the present invention preferably has the following configuration.
  • the composite sensor includes a phase adjusting unit that adjusts the phase of the monitor signal by 90 °.
  • the synchronous detection unit synchronously detects the addition signal with the monitor signal, and synchronously detects the difference signal with the phase adjustment monitor signal output from the phase adjustment unit.
  • This configuration shows a more specific configuration of synchronous detection, in which the acceleration detection signal is in phase with the monitor signal (drive signal), and the angular velocity detection signal is delayed in phase by 90 ° with respect to the monitor signal (drive signal). I use that.
  • the angular velocity detection signal and the acceleration detection signal can be accurately synchronously detected.
  • the basic configurations of the acceleration detection and angular velocity detection detection circuits can be shared, it is not necessary to prepare detection circuits having different basic configurations for acceleration detection and angular velocity detection.
  • FIG. 1 is a plan view showing a configuration of a sensor element according to an embodiment of the present invention. Note that the sensor element is hermetically included in a casing (not shown), and the atmosphere in the casing in which the sensor element is arranged is maintained in a reduced-pressure atmosphere, for example.
  • the sensor element 1 includes a rectangular substrate 2.
  • the substrate 2 is formed of an insulating semiconductor such as silicon.
  • the short direction of the rectangular substrate 2 is defined as the X-axis direction
  • the long direction is defined as the Y-axis direction.
  • the sensor element 1 includes a first mass unit 10, a second mass unit 20, a third mass unit 300, and a fourth mass unit 400. These mass parts are made of a conductive semiconductor such as low-resistance silicon. Further, the portions other than the substrate 2 constituting the sensor element 1 are made of a conductive semiconductor such as low-resistance silicon, similarly to each mass portion.
  • the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged in the Y-axis direction at intervals. As a more specific arrangement order, the first mass unit 10 and the second mass unit 20 are arranged at the center along the arrangement direction (Y-axis direction).
  • the third mass unit 300 is disposed on the opposite side of the first mass unit 10 from the second mass unit 20 side.
  • the fourth mass unit 400 is disposed on the opposite side of the second mass unit 20 from the first mass unit 10 side.
  • the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are supported by the support beams 4A and 4B with a gap from the substrate 2.
  • the support beams 4A and 4B have a long shape extending along the Y-axis direction.
  • the width (length in the X-axis direction) of the support beams 4A and 4B is set so as to be strong enough to be bent while being partially displaced in the X-axis direction due to vibration described later.
  • the support beam 4A is disposed on one end side in the X-axis direction with respect to the region where the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged.
  • the support beam 4B is disposed on the other end side in the X-axis direction with respect to the region where the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged. That is, the support beams 4A and 4B are arranged so as to sandwich the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 along the X-axis direction.
  • the first mass part 10 and the support beam 4A are connected by a connecting part 5A.
  • the second mass part 20 and the support beam 4A are connected by a connecting part 5B.
  • the third mass part 300 and the support beam 4A are connected by a connecting part 5C.
  • the fourth mass part 400 and the support beam 4A are connected by a connecting part 5D.
  • the first mass part 10 and the support beam 4B are connected by a connecting part 5E.
  • the 2nd mass part 20 and support beam 4B are connected by connecting part 5F.
  • the third mass unit 300 and the support beam 4B are coupled by a coupling unit 5G.
  • the fourth mass part 400 and the support beam 4B are connected by a connecting part 5H.
  • the connecting part 5A and the connecting part 5E pass through the center of gravity G of the first mass part 10, the second mass part 20, the third mass part 300, and the fourth mass part 400 arranged in an array, and the Y axis is the axis of symmetry. It is arranged in a symmetrical position.
  • the connecting portion 5B and the connecting portion 5F are arranged at line-symmetric positions with the Y axis as an axis of symmetry.
  • the connecting portion 5C and the connecting portion 5G are arranged at line-symmetric positions with the Y axis as an axis of symmetry.
  • the connecting part 5D and the connecting part 5H are arranged in line-symmetric positions with the Y axis as the symmetry axis.
  • the support beam 4A is connected to the fixing portions 3A, 3B, 3C.
  • Each of the fixing portions 3A, 3B, 3C has a three-pronged shape, and has a shape in which one branch extends toward the support beam 4A and two branches extend in a direction opposite to the one branch.
  • Each of the fixing portions 3A, 3B, 3C has one branch connected to the support beam 4A and two branches connected to the substrate 2.
  • the support beam 4B is connected to the fixing portions 3D, 3E, and 3F.
  • the fixing portions 3D, 3E, and 3F have a three-pronged shape, and one branch extends toward the support beam 4B, and two branches extend in a direction opposite to the one branch.
  • Each of the fixing portions 3D, 3E, 3F has one branch connected to the support beam 4B and two branches connected to the substrate 2.
  • the positions where the fixing portions 3A to 3F are connected to the support beams 4A and 4B are points (nodes) where the displacement of the support beams 4A and 4B in the X-axis direction does not occur when each mass portion vibrates in the X-axis direction.
  • the fixed portions 3A to 3F are connected to the support beams 4A and 4B at positions where the vibration periods of the mass portions are the same.
  • the first mass unit 10 includes an inner frame portion 101A and an outer frame portion 102A.
  • the inner frame portion 101A is a rectangle that is long in the X-axis direction and short in the Y-axis direction, and has a space inside.
  • the outer frame portion 102A is also a rectangle that is long in the X-axis direction and short in the Y-axis direction, and has a space inside.
  • the outer frame portion 102A has a shape surrounding the inner frame portion 101A.
  • the outer frame portion 102A is connected to the support beams 4A and 4B by the connecting portions 5A and 5E described above.
  • the inner frame portion 101A is connected to the outer frame portion 102A at a substantially central position in the X-axis direction. More specifically, a long connecting member 103A is formed on the side on the center of gravity G side of the inner frame portion 101A.
  • the connecting member 103A has a shape extending along the X-axis direction, and is connected to the inner frame portion 101A at both ends in the X-axis direction.
  • a connecting member 104A is formed at the center of the connecting member 103A in the longitudinal direction.
  • the connecting member 104A has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102A, and the other end in the Y-axis direction is connected to the connecting member 103A.
  • the connecting member 104A has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the
  • a long connecting member 103B is formed on the side opposite to the center of gravity G side of the inner frame portion 101A.
  • the connecting member 103B has a shape extending along the X-axis direction, and is connected to the inner frame portion 101A at both ends in the X-axis direction.
  • a connecting member 104B is formed at the center of the connecting member 103B in the longitudinal direction.
  • the connecting member 104B has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102A, and the other end in the Y-axis direction is connected to the connecting member 103B.
  • the connecting member 104B has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the connecting member 103B.
  • the inner frame portion 101A includes a central axis 101C.
  • the central axis 101C has a shape extending along the Y-axis direction, and has a predetermined length (width) also in the X-axis direction.
  • the central axis 101C is disposed at the center in the X-axis direction of the inner frame 101A.
  • the central axis 101C is arranged at a position where the extending axis substantially coincides with the Y axis.
  • the inner space of the inner frame portion 101A is divided into two regions in the X-axis direction by the central axis 101C. These two regions are generally line symmetric with respect to the Y axis except for the arrangement order of the conductor portions described later.
  • a fixed portion 111, an acceleration detection portion 112, and an angular velocity detection portion 113 are formed in one inner space of the inner frame portion 101A.
  • the fixed portion 111 has substantially the same length in both the X-axis direction and the Y-axis direction, and has a shape having a relatively large plane area in the sensor element 1.
  • the fixing unit 111 is fixedly installed on the substrate 2.
  • the acceleration detection unit 112 and the angular velocity detection unit 113 include a conductor part connected to the fixed part 111 and a conductor part connected to the inner frame part 101A.
  • the first detection unit 11 is configured by the fixing unit 111, the first mass unit 10, and the conductor units that constitute the acceleration detection unit 112 and the angular velocity detection unit 113.
  • a fixed portion 121 In the other inner space of the inner frame portion 101A, a fixed portion 121, an acceleration detection portion 122, and an angular velocity detection portion 123 are formed.
  • the fixing portion 121 has substantially the same length in both the X-axis direction and the Y-axis direction, and has a shape having a relatively large plane area in the sensor element 1.
  • the fixing part 121 is fixedly installed on the substrate 2.
  • the fixed part 121 has a shape symmetrical with the fixed part 111 with respect to the Y axis.
  • the acceleration detection unit 122 and the angular velocity detection unit 123 include a conductor part connected to the fixed part 121 and a conductor part connected to the inner frame part 101A.
  • the acceleration detection unit 122 is generally symmetrical with the acceleration detection unit 112 with respect to the Y axis, but a conductor connected to the inner frame 101A for acceleration detection and a conductor connected to the fixed unit 121.
  • the arrangement order with respect to the parts is not line symmetric but the same order along the X-axis direction.
  • the angular velocity detection unit 123 has the same conductor extension direction as the angular velocity detection unit 113 with respect to the Y axis, but the arrangement order of the conductor parts is different from the angular velocity detection unit 113.
  • the second detection unit 12 is configured by the fixing unit 121, the first mass unit 10, and the conductor units that constitute the acceleration detection unit 122 and the angular velocity detection unit 123.
  • the second mass unit 20 includes an inner frame portion 101B and an outer frame portion 102B.
  • the inner frame portion 101B is a rectangle that is long in the X-axis direction and short in the Y-axis direction, and has a space inside.
  • the outer frame portion 102B is also a rectangle that is long in the X-axis direction and short in the Y-axis direction, and has a space inside.
  • the outer frame portion 102B has a shape surrounding the inner frame portion 101B.
  • the outer frame portion 102B is coupled to the support beams 4A and 4B by the coupling portions 5B and 5F described above.
  • the inner frame portion 101B passes through the center of gravity G and is arranged in a line-symmetrical position with respect to the inner frame portion 101A of the first mass unit 10 with respect to the X axis, and has a line-symmetric shape.
  • the outer frame portion 102B passes through the center of gravity G and is arranged at a line-symmetrical position with respect to the outer frame portion 102A of the first mass unit 10 with respect to the X axis, and has a line-symmetric shape.
  • the inner frame portion 101B is connected to the outer frame portion 102B at a substantially central position in the X-axis direction. More specifically, a long connecting member 103C is formed on the side of the inner frame portion 101B on the center of gravity G side.
  • the connecting member 103C has a shape extending along the X-axis direction, and is connected to the inner frame portion 101B at both ends in the X-axis direction.
  • a connecting member 104C is formed at the center of the connecting member 103C in the longitudinal direction.
  • the connecting member 104C has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102B, and the other end in the Y-axis direction is connected to the connecting member 103C.
  • the connecting member 104C has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the connecting member 103C.
  • the connecting member 103C and the connecting member 104C are symmetrical with the connecting member 103A and the connecting member 104A, respectively, with respect to the X axis.
  • a long connecting member 103D is formed on the side opposite to the center of gravity G side of the inner frame portion 101B.
  • the connecting member 103D has a shape extending along the X-axis direction, and is connected to the inner frame portion 101B at both ends in the X-axis direction.
  • a connecting member 104D is formed at the center of the connecting member 103D in the longitudinal direction.
  • the connecting member 104D has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102B, and the other end in the Y-axis direction is connected to the connecting member 103D.
  • the connecting member 104D has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the long direction (X-axis direction) of the connecting member 103D.
  • the connecting member 103D and the connecting member 104D are symmetrical with the connecting member 103B and the connecting member 104B, respectively, with respect to the X axis.
  • the inner frame portion 101B includes a central axis 101D.
  • the central axis 101D has a shape extending along the Y-axis direction, and has a predetermined length (width) also in the X-axis direction.
  • the center axis 101D is disposed at the center of the inner frame 101B in the X-axis direction.
  • the central axis 101D is disposed at a position where the extending axis substantially coincides with the Y axis.
  • the inner space of the inner frame portion 101B is divided into two regions in the X-axis direction by the central axis 101D. These two regions are generally symmetrical with respect to the Y axis except for the arrangement order of the conductor portions.
  • the central axis 101D has a shape symmetrical with the central axis 101C with respect to the X axis.
  • a fixed part 131, an acceleration detection part 132, and an angular velocity detection part 133 are formed in one inner space of the inner frame part 101B.
  • the fixed portion 131 has substantially the same length in both the X-axis direction and the Y-axis direction, and has a shape having a relatively large plane area in the sensor element 1.
  • the fixing part 131 is fixedly installed on the substrate 2.
  • the fixed part 131 has a shape symmetrical with the fixed part 111 with respect to the X axis.
  • the acceleration detection unit 132 and the angular velocity detection unit 133 include a conductor portion connected to the fixed portion 131 and a conductor portion connected to the inner frame portion 101B.
  • the acceleration detection unit 132 has a shape symmetrical with the acceleration detection unit 112 with respect to the X axis.
  • the angular velocity detection unit 133 is generally symmetrical with the angular velocity detection unit 113 with respect to the X axis, but an angular velocity detector connected to the inner frame portion 101B and an angular velocity detector connected to the fixing unit 131 Are not line-symmetric and are arranged in the same order along the Y-axis direction.
  • the third detection unit 13 is configured by the fixing unit 131, the second mass unit 20, and the conductors that form the acceleration detection unit 132 and the angular velocity detection unit 133.
  • a fixed portion 141 In the other inner space of the inner frame portion 101B, a fixed portion 141, an acceleration detection portion 142, and an angular velocity detection portion 143 are formed.
  • the fixed portion 141 has substantially the same length in both the X-axis direction and the Y-axis direction, and has a shape having a relatively large plane area in the sensor element 1.
  • the fixing portion 141 is fixedly installed on the substrate 2.
  • the fixed portion 141 has a shape symmetrical with the fixed portion 131 with respect to the Y axis, and has a shape symmetrical with the fixed portion 121 with respect to the X axis.
  • the acceleration detection unit 142 and the angular velocity detection unit 143 include a conductor part connected to the fixed part 141 and a conductor part connected to the inner frame part 101B.
  • the angular velocity detection unit 143 has a shape symmetrical to the angular velocity detection unit 133 with respect to the Y axis.
  • the acceleration detection unit 142 is arranged at a position symmetrical to the acceleration detection unit 132 with respect to the Y axis.
  • the schematic shape of the acceleration detection unit 142 is symmetrical with the acceleration detection unit 132 with respect to the Y axis, but the projection connected to the inner frame 101B for acceleration detection and the projection connected to the fixing unit 141.
  • the arrangement order with respect to the parts is not line symmetric but the same order along the X-axis direction.
  • 4th detection part 14 is constituted by fixed part 141, 2nd mass part 20, and a conductor part which constitutes acceleration detection part 142 and angular velocity detection part 143.
  • the third mass unit 300 is disposed away from the first mass unit 10.
  • the third mass unit 300 has a rectangular shape extending along the X-axis direction.
  • One end of the third mass part 300 in the longitudinal direction is connected to the support beam 4A by a connecting part 5C.
  • the other end in the longitudinal direction of the third mass unit 300 is connected to the support beam 4B by a connecting part 5G.
  • the fixing unit 31 is disposed between the third mass unit 300 and the first mass unit 10.
  • the fixing part 31 has a shape having a predetermined area, like the fixing parts 111, 121, 131, 141, and is fixed to the substrate 2.
  • the fixed portion 31 is disposed at the center position in the X-axis direction.
  • the support member 32 has a substantially rectangular shape extending along the X-axis direction with the fixed portion 31 as the center.
  • a plurality of comb teeth 33 ⁇ / b> A are formed on the outer frame 102 ⁇ / b> A side of the first mass unit 10 in the support member 32.
  • a plurality of comb teeth 34 ⁇ / b> A are formed between the support member 32 and the outer frame portion 102 ⁇ / b> A of the first mass unit 10.
  • the plurality of comb teeth portions 34A are connected to the outer frame portion 102A.
  • the comb tooth portion 33A and the comb tooth portion 34A are arranged so as to mesh with each other.
  • a plurality of comb teeth portions 33B are formed on the third mass portion 300 side of the support member 32.
  • a plurality of comb teeth portions 34 ⁇ / b> B are formed between the support member 32 and the third mass portion 300.
  • the comb tooth portion 33B and the comb tooth portion 34B are arranged so as to mesh with each other.
  • the first drive unit 30 is configured by the comb teeth 33A and the comb teeth 34A, and the comb teeth 33B and the comb teeth 34B that mesh with each other.
  • the fixed part 500 is arranged on the opposite side of the third mass part 300 from the first mass part 10.
  • the fixing unit 500 is disposed away from the third mass unit 300.
  • the fixed part 500 has a rectangular shape extending along the X-axis direction. One end in the extending direction of the fixing portion 500 is connected to the substrate 2.
  • the fixing unit 500 is fixed to the substrate 2 in the same manner as the fixing units 111, 121, 131, 141, and 31.
  • a plurality of comb teeth portions 51 and 52 are formed on the third mass portion 300 side of the fixing portion 500.
  • the plurality of comb teeth portions 51 are connected to the third mass portion 300, and the plurality of comb teeth portions 52 are connected to the fixed portion 500.
  • the comb-tooth part 51 and the comb-tooth part 52 are arrange
  • the comb-tooth portion 51 and the comb-tooth portion 52 that mesh with each other constitute a first monitor unit 50.
  • the fourth mass unit 400 is disposed away from the second mass unit 20.
  • the fourth mass unit 400 has a rectangular shape extending along the X-axis direction.
  • One end of the fourth mass part 400 in the longitudinal direction is connected to the support beam 4A by a connecting part 5D.
  • the other end in the longitudinal direction of the fourth mass part 400 is connected to the support beam 4B by the connecting part 5H.
  • the fixed part 41 is disposed between the fourth mass part 400 and the second mass part 20.
  • the fixing portion 41 has a shape having a predetermined area, like the fixing portion 31, and is fixed to the substrate 2.
  • the fixed portion 41 is disposed at the center position in the X-axis direction.
  • the support member 42 has a substantially rectangular shape extending along the X-axis direction with the fixed portion 41 as the center.
  • a plurality of comb-tooth portions 43A are formed on the support member 42 on the outer frame portion 102B side of the second mass portion 20.
  • a plurality of comb teeth 44 ⁇ / b> A are formed between the support member 42 and the outer frame 102 ⁇ / b> B of the second mass unit 20.
  • the plurality of comb-tooth portions 44A are connected to the outer frame portion 102B.
  • the comb tooth portion 43A and the comb tooth portion 44A are arranged so as to mesh with each other.
  • a plurality of comb-tooth portions 43B are formed on the support member 42 on the fourth mass portion 400 side.
  • a plurality of comb teeth 44 ⁇ / b> B are formed between the support member 42 and the fourth mass part 400.
  • the comb tooth portion 43B and the comb tooth portion 44B are disposed so as to mesh with each other.
  • the second drive unit 40 is configured by the comb teeth 43A and the comb teeth 44A, and the comb teeth 43B and the comb teeth 44B that mesh with each other.
  • the fixed part 600 is arranged on the opposite side of the fourth mass part 400 from the second mass part 20.
  • the fixed part 600 is disposed away from the fourth mass part 400.
  • the fixed part 600 has a rectangular shape extending along the X-axis direction. One end in the extending direction of the fixing portion 600 is connected to the substrate 2. Thereby, the fixing part 600 is fixed to the substrate 2 in the same manner as the fixing part 500.
  • a plurality of comb teeth portions 61 and 62 are formed on the fourth mass portion 400 side of the fixed portion 600.
  • the plurality of comb teeth portions 61 are connected to the fourth mass portion 400, and the plurality of comb teeth portions 62 are connected to the fixing portion 600.
  • the comb-tooth part 61 and the comb-tooth part 62 are arrange
  • the comb-tooth portion 61 and the comb-tooth portion 62 that mesh with each other constitute a second monitor portion 60.
  • FIG. 2 is an enlarged plan view showing the configuration of the first detection unit 11 according to the embodiment of the present invention.
  • FIG. 3 is an enlarged plan view showing configurations of the acceleration detection unit and the angular velocity detection unit of the first detection unit 11 according to the embodiment of the present invention.
  • the fixed portion 111 is disposed in one internal space divided by the central axis 101C in the internal space of the inner frame portion 101A.
  • the length of the fixed portion 111 in the X-axis direction is shorter than the length of the internal space in the X-axis direction.
  • the fixed portion 111 is located near the second mass portion 20 side (the connecting members 103A and 104A), and is shifted from the center of the internal space along the Y-axis direction so as to be separated from the third mass portion 300 side. Is arranged.
  • predetermined spaces are formed on the support beam 4A side, the central axis 101C side, and the third mass unit 300 side (the coupling portions 103B and 104B side) of the fixed portion 111.
  • Acceleration detectors 202A1, 202B1, 202C1, 202D1, 202E1, 202F1, 202G1, 202H1, 202I1, 202J1, 202K1, 202L1, 202M1, 202N1 and acceleration detectors 204A1, 204B1, 204C1, 204D1, 204E1, 204F1, 204G1, 204H1 , 204I1 and 204J1 are arranged in a space on the third mass unit 300 side of the fixed part 111 including the vicinity of the end of the fixed part 111 on the third mass unit 300 side.
  • the acceleration detectors 202A1 to 202N1 correspond to the fixed-side conductor for acceleration detection of the present invention
  • the acceleration detectors 204A1 to 204J1 correspond to the movable-side conductor for acceleration detection of the present invention.
  • the fixing part 111 includes long detector holding parts 201A1 and 201B1 that protrude toward the third mass part 300 side.
  • the detector holding part 201A1 is disposed at a corner where the end of the fixed part 111 on the support beam 4A side and the end of the third mass part 300 intersect.
  • the detector holding part 201B1 is disposed at a corner where the end of the fixed part 111 on the central axis 101C side and the end of the third mass part 300 intersect.
  • the side of the inner frame portion 101A on the third mass unit 300 side includes a long detector holding portion 2051 that protrudes toward the fixed portion 111 side.
  • the detector holding unit 2051 is arranged at an intermediate position between the detector holding units 201A1 and 201B1 along the X-axis direction.
  • the acceleration detectors 202A1, 202B1, 202C1, 202D1 are connected to the support beam 4A side of the detector holding portion 201A1 and have a shape protruding to the support beam 4A side.
  • the acceleration detector 202A1 includes a main shaft portion for detection 220A1 and a plurality of protrusions 222A1.
  • the detection main shaft portion 220A1 has a long shape extending along the X-axis direction, and one end thereof is connected to the detector holding portion 201A1.
  • the plurality of protrusions 222A1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 222A1 are arranged at predetermined intervals along the direction (X-axis direction) in which the main shaft portion 220A1 extends on the side on the second mass portion 20 side of the main shaft portion 220A1.
  • the acceleration detector 202B1 includes a detection main shaft 220B1, a plurality of protrusions 221B1, and a plurality of protrusions 222B1.
  • the detection main shaft portion 220B1 has a long shape extending along the X-axis direction, and one end thereof is connected to the detector holding portion 201A1.
  • the plurality of protrusions 221B1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 221B1 are arranged on the side of the detection main shaft portion 220B1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection main shaft portion 220B1 extends (X-axis direction).
  • the plurality of protrusions 222B1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 222B1 are arranged at predetermined intervals along the direction (X-axis direction) in which the detection main shaft portion 220B1 extends on the side of the detection main shaft portion 220B1 on the second mass unit 20 side.
  • the acceleration detector 202C1 includes a detection main shaft 220C1, a plurality of protrusions 221C1, and a plurality of protrusions 222C1.
  • the main shaft portion for detection 220C1 has a long shape extending along the X-axis direction, and one end thereof is connected to the detector holding portion 201A1.
  • the plurality of protrusions 221C1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 221C1 are arranged on the side of the detection main shaft portion 220C1 on the third mass unit 300 side at predetermined intervals along the direction in which the detection main shaft portion 220C1 extends (X-axis direction).
  • the plurality of protrusions 222C1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 222C1 are arranged at predetermined intervals along the direction in which the main shaft portion for detection 220C1 extends (X-axis direction) on the second mass portion 20 side of the main shaft portion for detection 220C1.
  • the acceleration detector 202D1 includes a main shaft portion for detection 220D1 and a plurality of protrusion portions 221D1.
  • the detection main shaft portion 220D1 has an elongated shape extending along the X-axis direction, and one end thereof is connected to the detector holding portion 201A1.
  • the plurality of protrusions 221D1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 221D1 are arranged on the side of the detection main shaft 220D1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection main shaft 220D1 extends (X-axis direction).
  • the plurality of protrusions 222D1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the acceleration detectors 204A1, 204B1, 204C1 are connected to the fixed portion 111 side of the inner frame 101A and have a shape protruding to the fixed portion 111 side.
  • the acceleration detector 204A1 includes a detection main shaft 240A1, a plurality of protrusions 241A1, and a plurality of protrusions 242A1.
  • the main shaft portion for detection 240A1 has a long shape extending along the X-axis direction, and one end thereof is connected to the inner frame portion 101A.
  • the plurality of protrusions 241A1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 241A1 are arranged on the side of the detection main shaft portion 240A1 on the third mass unit 300 side at predetermined intervals along the direction in which the detection main shaft portion 240A1 extends (X-axis direction).
  • the plurality of protrusions 242A1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 242A1 are arranged at predetermined intervals along the direction in which the detection main shaft portion 240A1 extends (X-axis direction) on the side of the detection main shaft portion 240A1 on the second mass unit 20 side.
  • the acceleration detector 204B1 includes a detection main shaft 240B1, a plurality of protrusions 241B1, and a plurality of protrusions 242B1.
  • the main shaft portion for detection 240B1 has a long shape extending along the X-axis direction, and one end thereof is connected to the inner frame portion 101A.
  • the plurality of protrusions 241B1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 241B1 are arranged on the side of the detection main shaft portion 240B1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection main shaft portion 240B1 extends (X-axis direction).
  • the plurality of protrusions 242B1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 242B1 are arranged at predetermined intervals along the direction in which the detection main shaft portion 240B1 extends (X-axis direction) on the second mass portion 20 side of the detection main shaft portion 240B1.
  • the acceleration detector 204C1 includes a detection main shaft 240C1, a plurality of protrusions 241C1, and a plurality of protrusions 242C1.
  • the main shaft portion for detection 240C1 has a long shape extending along the X-axis direction, and one end thereof is connected to the inner frame portion 101A.
  • the plurality of protrusions 241C1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 241C1 are arranged on the side of the detection main shaft portion 240C1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection main shaft portion 240C1 extends (X-axis direction).
  • the plurality of protrusions 242C1 have a rectangular shape having a predetermined width in the X-axis direction.
  • the plurality of protrusions 242C1 are arranged at predetermined intervals along the direction (X-axis direction) in which the detection main shaft portion 240C1 extends on the side of the detection main shaft portion 240C1 on the second mass unit 20 side.
  • the acceleration detectors 202A1, 202B1, 202C1, 202D1 and the acceleration detectors 204A1, 204B1, 204C1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204A1 is disposed between the acceleration detectors 202A1 and 202B1. The acceleration detector 204B1 is disposed between the acceleration detectors 202B1 and 202C1. The acceleration detector 204C1 is disposed between the acceleration detectors 202C1 and 202D1.
  • the projections of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 and the projections of the acceleration detectors 204A1, 204B1, and 204C1 are arranged to face each other with a predetermined area.
  • the protrusion 222A1 of the acceleration detector 202A1 and the protrusion 241A1 of the acceleration detector 204A1 face each other.
  • the protrusion 242A1 of the acceleration detector 204A1 and the protrusion 221B1 of the acceleration detector 202B1 face each other.
  • the protrusion 222B1 of the acceleration detector 202B1 and the protrusion 241B1 of the acceleration detector 204B1 face each other.
  • the protrusion 242B1 of the acceleration detector 204B1 and the protrusion 221C1 of the acceleration detector 202C1 face each other.
  • the protrusion 222C1 of the acceleration detector 202C1 and the protrusion 241C1 of the acceleration detector 204C1 face each other.
  • the protrusion 242C1 of the acceleration detector 204C1 and the protrusion 221D1 of the acceleration detector 202D1 face each other.
  • the projections of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 and the projections of the acceleration detectors 204A1, 204B1, and 204C1 do not face each other, but each of the projections that face each other has an X axis. Opposite in the direction. At this time, the protrusions of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 are displaced in different directions in the X-axis direction with respect to the protrusions of the acceleration detectors 204A1, 204B1, and 204C1 that are sandwiched therebetween.
  • each protrusion 222A1 of the fixed-side acceleration detector 202A1 is positioned on the detector holding portion 201A1 side along the X-axis direction with respect to each protrusion 241A1 of the movable-side acceleration detector 204A1.
  • the protrusions 221B1 of the fixed-side acceleration detector 202B1 are shifted toward the inner frame 101A adjacent to the protrusions 242A1 of the movable-side acceleration detector 204A1 along the X-axis direction.
  • each protrusion is formed so that the amount of deviation is the same. More preferably, each protrusion is formed such that the amount of deviation is half of the protrusion in the X-axis direction.
  • the acceleration sensors 204A1, 204B1, 204C1 on the movable side vibrate in the X-axis direction by adding these capacitances. Even so, it is possible to prevent a change in capacitance due to the vibration.
  • the acceleration detectors 202E1, 202F1, 202G1 are connected to the center axis 101C side of the detector holding portion 201A1 and have a shape projecting toward the center axis 101C side.
  • the acceleration detector 202E1 is formed symmetrically with the acceleration detector 202A1 with respect to the detector holder 201A1.
  • the acceleration detector 202F1 is formed symmetrically with the acceleration detector 202B1 with respect to the detector holder 201A1.
  • the acceleration detector 202G1 is formed at a position symmetrical to the acceleration detector 202C1 with respect to the detector holder 201A1, and the shape of the acceleration detector 202G1 is the same as that of the acceleration detector 202D1 projected in line symmetry. .
  • the acceleration detectors 204D1 and 204E1 are connected to the detector holding unit 201A1 side of the detector holding unit 2051 and have a shape protruding to the detector holding unit 201A1 side.
  • the acceleration detector 204D1 has a shape symmetrical with the acceleration detector 204A1 with respect to the detector holder 201A1.
  • the acceleration detector 204E1 has a shape symmetrical with the acceleration detector 204B1 with respect to the detector holder 201A1.
  • Acceleration detectors 202E1, 202F1, 202G1 and acceleration detectors 204D1, 204E1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204D1 is disposed between the acceleration detectors 202E1 and 202F1. An acceleration detector 204E1 is disposed between the acceleration detectors 202F1 and 202G1. The projections of the acceleration detectors 202E1, 202F1, 202G1 and the projections of the acceleration detectors 204D1, 204E1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, 202D1, and the acceleration detectors 204A1, 204B1, 204C1. As in the projections of FIG. 2, they face each other in a state shifted in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.
  • the acceleration detectors 204F1 and 204G1 are connected to the detector holding unit 201B1 side of the detector holding unit 2051 and have a shape protruding to the detector holding unit 201B1 side.
  • the acceleration detector 204F1 has a shape symmetrical with the acceleration detector 204D1 with respect to the detector holder 2051.
  • the acceleration detector 204G1 has a shape symmetrical with the acceleration detector 204E1 with respect to the detector holder 2051.
  • the acceleration detectors 202H1, 202I1, and 202J1 are connected to the detector holding unit 2051 side of the detector holding unit 201B1 and have a shape protruding to the detector holding unit 2051 side.
  • the acceleration detector 202H1 is formed symmetrically with the acceleration detector 202E1 with respect to the detector holder 2051.
  • the acceleration detector 202I1 is formed symmetrically with the acceleration detector 202F1 with respect to the detector holder 2051.
  • the acceleration detector 202J1 is formed symmetrically with the acceleration detector 202G1 with respect to the detector holder 2051.
  • Acceleration detectors 202H1, 202I1, 202J1 and acceleration detectors 204F1, 204G1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204F1 is disposed between the acceleration detectors 202H1 and 202I1. An acceleration detector 204G1 is disposed between the acceleration detectors 202I1 and 202J1.
  • the projections of the acceleration detectors 202H1, 202I1, 202J1 and the projections of the acceleration detectors 204F1, 204G1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, 202D1, and the acceleration detectors 204A1, 204B1, 204C1. As in the projections of FIG. 2, they face each other in a state shifted in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.
  • the acceleration detectors 202K1, 202L1, 202M1, and 202N1 are connected to the center axis 101C side of the detector holding portion 201B1 and have a shape protruding toward the center axis 101C side.
  • the acceleration detector 202K1 is formed symmetrically with the acceleration detector 202A1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction.
  • the acceleration detector 202L1 is formed in line symmetry with the acceleration detector 202B1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction.
  • the acceleration detector 202M1 is formed in line symmetry with the acceleration detector 202C1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction.
  • the acceleration detector 202N1 is formed in line symmetry with the acceleration detector 202D1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction.
  • the acceleration detectors 204H1, 204I1, and 204J1 are connected to the fixed portion 111 side of the central axis 101C and have a shape that protrudes toward the fixed portion 111 side.
  • the acceleration detector 204H1 is formed in line symmetry with the acceleration detector 204A1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction.
  • the acceleration detector 204I1 is formed in line symmetry with the acceleration detector 204B1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction.
  • the acceleration detector 204J1 is formed in line symmetry with the acceleration detector 204C1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction.
  • Acceleration detectors 202K1, 202L1, 202M1, 202N1 and acceleration detectors 204H1, 204I1, 204J1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204H1 is disposed between the acceleration detectors 202K1 and 202L1. An acceleration detector 204I1 is disposed between the acceleration detectors 202L1 and 202M1. An acceleration detector 204J1 is disposed between the acceleration detectors 202M1 and 202N1.
  • the projections of the acceleration detectors 202K1, 202L1, 202M1, and 202N1 and the projections of the acceleration detectors 204H1, 204I1, and 204J1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, and 202D1, and the acceleration detector 204A1.
  • 204B1 and 204C1 are opposed to each other while being displaced in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.
  • the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 are vibrated.
  • the opposing distance of the protrusions of the slab changes. Since the capacitance changes when the facing distance changes in this way, the acceleration can be detected by detecting the amount of change. Since the direction of change in capacitance (capacitance from large to small, or from small to large) varies depending on the direction of acceleration, the direction of acceleration can also be detected.
  • a plurality of angular velocity detectors 3011 and 3021 are formed in the space on the support beam 4A side and the space on the central axis 101C side of the fixed portion 111.
  • the angular velocity detector 3011 has a long shape with one end connected to the fixed portion 111.
  • the angular velocity detector 3021 has a long shape with one end connected to the central axis 101C.
  • the angular velocity detector 3011 on the support beam 4 ⁇ / b> A side and the angular velocity detector 3011 on the central axis 101 ⁇ / b> C side are arranged at symmetrical positions via the fixing portion 111.
  • the angular velocity detector 3011 corresponds to the fixed-side conductor for detecting the angular velocity of the present invention
  • the angular velocity detector 3021 corresponds to the movable-side conductor for detecting the angular velocity of the present invention.
  • the angular velocity detectors 3011 and 3021 are alternately arranged along the Y-axis direction. At this time, the distance to the angular velocity detector 3021 on the second mass unit 20 side is set wider than the interval to the angular velocity detector 3021 on the third mass unit 300 side based on one angular velocity detector 3011. .
  • the angular velocity detectors 3011 and 3021 By configuring the angular velocity detectors 3011 and 3021 in such a structure, the angular velocity ⁇ with the Z-axis direction (the direction orthogonal to the X-axis and the Y-axis) as an axis is applied to the sensor element 1 in a state of vibrating in the X-axis direction.
  • the Coriolis force in the Y-axis direction is applied to the inner frame portion 101A of the first mass unit 10, and the capacitance between the angular velocity detectors 3011 and 3021 changes. By detecting this amount of change, the angular velocity ⁇ can be detected.
  • the Y axis If the Coriolis force is applied in the negative direction, the capacitance decreases, and if the Coriolis force is applied in the positive direction of the Y axis, the capacitance increases. Therefore, the direction of the angular velocity ⁇ can also be detected.
  • the angular velocity detectors 3011 and 3021 are elongated in the X-axis direction, have a large area with respect to the Y-axis direction, and have a large area facing each other, so that the mechanical Q value in the acceleration application direction is reduced. be able to. Thereby, the damping effect with respect to acceleration detection can be obtained.
  • FIG. 4 is an enlarged plan view showing the configuration of the second detection unit 12 according to the embodiment of the present invention.
  • the second detector 12 includes a fixed part 121, acceleration detectors 202A2, 202B2, 202C2, 202D2, 202E2, 202F2, 202G2, 202H2, 202I2, 202J2, 202K2, 202L2, 202M2, 202N2, and acceleration detectors 204A2, 204B2.
  • the fixing part 121 is arranged in the other internal space divided by the central axis 101C in the internal space of the inner frame part 101A.
  • the fixed part 121 has a shape symmetrical with the fixed part 111 with respect to the Y axis passing through the center of gravity G.
  • the detector holders 201A2 and 201B2 connected to the fixed part 121 are symmetrical with the detector holders 201A1 and 201B1, respectively, with respect to the Y axis.
  • the detector holding unit 2052 connected to the inner frame 103B has a shape symmetrical with the detector holding unit 2051 with respect to the Y axis.
  • Acceleration detectors 202A2 to 202N2 have line-symmetric shapes with respect to the acceleration detectors 202A1 to 202N1 with respect to the Y axis, respectively, except for the arrangement order of the protruding conductor portions.
  • the acceleration detectors 204A2 to 204J2 have shapes symmetrical to the acceleration detectors 204A1 to 204J1 with respect to the Y axis, respectively.
  • the protrusions of the acceleration detectors 202A2 to 202N2 and the acceleration detectors 204A2 to 204J2 The arrangement order of the protrusions is not symmetrical with the arrangement order of the protrusions of the acceleration detectors 202A1 to 202N1 and the protrusions of the acceleration detectors 204A1 to J1, but is the same order along the X-axis direction. .
  • acceleration detection signals having the same amplitude and the same phase as the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 can be obtained.
  • the arrangement group of the plurality of angular velocity detectors 3012 and 3022 is substantially symmetrical with the arrangement group of the plurality of angular velocity detectors 3011 and 3021 with respect to the Y axis, but the arrangement order along the arrangement direction is reversed. It is.
  • an angular velocity detection signal having the same amplitude as that of the angular velocity detectors 3011 and 3021 can be obtained.
  • FIG. 5 is an enlarged plan view showing the configuration of the third detection unit 13 according to the embodiment of the present invention.
  • the third detector 13 includes a fixed portion 131, acceleration detectors 202A3, 202B3, 202C3, 202D3, 202E3, 202F3, 202G3, 202H3, 202I3, 202J3, 202K3, 202L3, 202M3, 202N3 and acceleration detectors 204A3, 204B3.
  • 204C3, 204D3, 204E3, 204F3, 204G3, 204H3, 204I3, 204J3 are provided.
  • the fixed portion 131 is disposed in one internal space divided by the central axis 101D in the internal space of the inner frame portion 101B.
  • the fixed portion 131 has a shape symmetrical with the fixed portion 111 with respect to the X axis passing through the center of gravity G.
  • the detector holders 201A3 and 201B3 connected to the fixed part 131 are symmetrical with the detector holders 201A1 and 201B1, respectively, with respect to the X axis.
  • the detector holding unit 2053 connected to the inner frame portion 103D has a shape symmetrical with the detector holding unit 2051 with respect to the X axis.
  • the acceleration detectors 202A3 to 202N3 each have a shape symmetrical with the acceleration detectors 202A1 to 202N1 with respect to the X axis.
  • the acceleration detectors 204A3 to 204J3 have line-symmetric shapes with respect to the acceleration detectors 204A1 to 204J1, respectively, with respect to the X axis.
  • the projections of the acceleration detectors 202A3 to 202N3 and the projections of the acceleration detectors 204A3 to 204J3 are similar to the projections of the acceleration detectors 202A1 to 202N1 and the projections of the acceleration detectors 204A1 to J1, respectively. Opposing in a state shifted in the X-axis direction.
  • acceleration detection signals having the same amplitude and the same phase as the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 can be obtained.
  • the plurality of angular velocity detectors 3013 and 3023 have line-symmetric shapes with the plurality of angular velocity detectors 3011 and 3021, respectively, with respect to the X axis.
  • an angular velocity detection signal having the same amplitude and the same phase as the angular velocity detectors 3011 and 3021 can be obtained.
  • FIG. 6 is an enlarged plan view showing the configuration of the fourth detection unit 14 according to the embodiment of the present invention.
  • the fourth detector 14 includes a fixed portion 141, acceleration detectors 202A4, 202B4, 202C4, 202D4, 202E4, 202F4, 202G4, 202H4, 202I4, 202J4, 202K4, 202L4, 202M4, 202N4 and acceleration detectors 204A4, 204B4.
  • 204C4, 204D4, 204E4, 204F4, 204G4, 204H4, 204I4, 204J4 are provided.
  • the fixed portion 141 is disposed in the other internal space divided by the central axis 101D in the internal space of the inner frame portion 101B.
  • the fixed portion 141 has a shape symmetrical to the fixed portion 113 with respect to the Y axis passing through the center of gravity G.
  • the detector holders 201A4 and 201B4 connected to the fixed part 141 have line-symmetric shapes with respect to the detector holders 201A3 and 201B3, respectively, with respect to the Y axis.
  • the detector holding unit 2054 connected to the inner frame portion 103D has a shape symmetrical with the detector holding unit 2053 with respect to the Y axis.
  • the acceleration detectors 202A4 to 202N4 generally have a shape symmetrical with the acceleration detectors 202A3 to 202N3 with respect to the Y axis.
  • the acceleration detectors 204A4 to 204J4 generally have a shape symmetrical to the acceleration detectors 204A3 to 204J3 with respect to the Y axis, but the protrusions of the acceleration detectors 202A4 to 202N4 and the acceleration detectors.
  • the arrangement order of the projections 204A4 to 204J4 is not symmetrical with the arrangement order of the projections of the acceleration detectors 202A3 to 202N3 and the projections of the acceleration detectors 204A3 to J3, but along the X-axis direction. The order is the same.
  • acceleration detection signal having the same amplitude and the same phase as the acceleration detectors 202A3 to 202N3 and 204A3 to 204J3 can be obtained.
  • the arrangement group of the plurality of angular velocity detectors 3014 and 3024 is substantially symmetrical to the arrangement group of the plurality of angular velocity detectors 3013 and 3023 with respect to the Y axis, but the arrangement order along the arrangement direction is reversed. It is. By configuring the plurality of angular velocity detectors 3014 and 3024 in such a configuration, an angular velocity detection signal having the same amplitude as that of the angular velocity detectors 3013 and 3023 can be obtained.
  • FIG. 7 is an enlarged plan view showing the configuration of the drive unit and the monitor unit according to the embodiment of the present invention.
  • FIG. 7 only the portions of the second drive unit 40 and the second monitor unit 60 that are close to the third detection unit 13 are enlarged and displayed.
  • the structure of a drive part and a monitor part is demonstrated to this part as an example.
  • the basic detailed structure of each of the comb teeth adjacent to the other detectors (the first detector 11, the second detector 12, and the fourth detector 14) is comb teeth 43A, 44A, 43B described below. 44B, the description is omitted.
  • the plurality of comb teeth 43A are connected to the support member 42.
  • the comb tooth portion 43A includes a shaft portion 431A and a plurality of tooth portions 432A.
  • the shaft portion 431A has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 432A are arranged at intervals along the axial direction of the shaft portion 431A.
  • the plurality of tooth portions 432A are formed on the shaft portion 431A so as to protrude toward the comb tooth portion 44A.
  • the plurality of comb tooth portions 44A are connected to the outer frame portion 102B.
  • the comb tooth portion 44A includes a shaft portion 441A and a plurality of tooth portions 442A.
  • the shaft portion 441A has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 442A are arranged at intervals along the axial direction of the shaft portion 441A.
  • the plurality of tooth portions 442A are formed on the shaft portion 441A so as to protrude toward the comb tooth portion 43A.
  • the plurality of tooth portions 432A and the plurality of tooth portions 442A are alternately arranged in the Y-axis direction at intervals. At this time, the plurality of tooth portions 432A and the plurality of tooth portions 442A are arranged so that the surfaces orthogonal to the Y-axis direction face each other.
  • the plurality of comb teeth 43B are connected to the support member 42.
  • the comb tooth portion 43B includes a shaft portion 431B and a plurality of tooth portions 432B.
  • the shaft portion 431B has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 432B are arranged at intervals along the axial direction of the shaft portion 431B.
  • the plurality of tooth portions 432B are formed on the shaft portion 431B so as to protrude toward the comb tooth portion 44B.
  • the plurality of comb teeth portions 44B are connected to the fourth mass portion 400.
  • the comb tooth portion 44B includes a shaft portion 441B and a plurality of tooth portions 442B.
  • the shaft portion 441B has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 442B are arranged at intervals along the axial direction of the shaft portion 441B.
  • the plurality of tooth portions 442B are formed on the shaft portion 441B so as to protrude toward the comb tooth portion 43B.
  • the plurality of tooth portions 432B and the plurality of tooth portions 442B are alternately arranged in the Y-axis direction at intervals. At this time, the plurality of tooth portions 432B and the plurality of tooth portions 442B are arranged so that the surfaces orthogonal to the Y-axis direction face each other.
  • the comb-tooth portions 43A and 44A are attracted or separated along the X-axis direction according to the amplitude of the drive signal, and the comb-tooth portion 43B. 44B are attracted or separated along the X-axis direction.
  • the movement between the comb teeth 43A and 44A and the movement between the comb teeth 43B and 44B are the same.
  • the fourth mass unit 400 and the second mass unit 20 vibrate in the opposite phases in the X-axis direction.
  • the same operation also occurs in the third mass unit 300 and the first mass unit 10.
  • the support beams 4A and 4B are distorted by setting the vibration of the third mass unit 300, the vibration of the fourth mass unit 400, and the vibration of the first mass unit 10 and the vibration of the second mass unit 20 to opposite phases.
  • the first mass unit 10 vibrates in phase with the fourth mass unit 400
  • the second mass unit 20 vibrates in phase with the third mass unit 300. In this way, vibration along the X-axis direction can be applied to the first mass unit 10 and the second mass unit 20.
  • the plurality of comb tooth portions 61 are connected to the fourth mass portion 400.
  • the comb tooth portion 61 includes a shaft portion 611 and a plurality of tooth portions 612.
  • the shaft portion 611 has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 612 are arranged at intervals along the axial direction of the shaft portion 611.
  • the plurality of tooth portions 612 are formed on the shaft portion 611 so as to protrude toward the comb tooth portion 62 side.
  • the plurality of comb teeth portions 62 are connected to the fixed portion 600.
  • the comb tooth portion 62 includes a shaft portion 621 and a plurality of tooth portions 622.
  • the shaft portion 621 has a long shape extending along the Y-axis direction.
  • the plurality of tooth portions 622 are arranged at intervals along the axial direction of the shaft portion 621.
  • the plurality of tooth portions 622 are formed on the shaft portion 621 so as to protrude toward the comb tooth portion 61 side.
  • the plurality of tooth portions 612 and the plurality of tooth portions 622 are arranged alternately at intervals in the Y-axis direction. At this time, the plurality of tooth portions 612 and the plurality of tooth portions 622 are arranged so that the surfaces orthogonal to the Y-axis direction face each other.
  • the sensor element 1 having the above configuration functions as a composite sensor when combined with a detection IC 8 shown below, and detects angular velocity and acceleration separately.
  • FIG. 8 is a block diagram showing the configuration of the composite sensor according to the embodiment of the present invention.
  • the composite sensor includes a sensor element 1 and a detection IC 8.
  • the circuit includes the first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the first 2 drive part 40, the 1st monitor part 50, and the 2nd monitor part 60 are comprised.
  • the first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the second drive unit 40, the first and second monitor units 50 and 60 are variable. It consists of a capacitive element.
  • the first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the second drive unit 40, and the first and second monitor units 50 and 60 are connected in common.
  • the terminal to be connected is connected to the ground. This ground is also connected to the ground of the detection IC 8.
  • the detection IC 8 includes a control unit 80, a filter 81, a driving non-inverting amplifier 82A, a driving inverting amplifier 82B, monitoring amplifiers 83A and 83B, a differential amplifier 840, a filter 84, a phase shifter 85, amplifiers 91A and 91B, and addition. And a subtractor 93, filters 94A and 94B, detectors 95A and 95B, output circuits 96A and 96B, and output terminals OUTa and OUT ⁇ .
  • a drive voltage Vcc is applied to the detection IC 8.
  • the control unit 80 generates an alternating drive voltage signal and outputs it to the filter 81. At this time, the control unit 80 drives the drive voltage signal so that the vibration amplitude of each mass part of the sensor element 1 becomes a specified value according to the voltage value of the monitor voltage signal output from the filter 84 formed of a high-pass filter. Set the voltage value of.
  • the filter 81 is formed of, for example, a low-pass filter, and in combination with the high-pass filter 84, functions as a band-pass filter that selectively passes the element vibration frequency (for example, noise cut), and the phase of the monitor output is approximately 90.
  • the output is output to the driving non-inverting amplifier 82A and the driving inverting amplifier 82B with a delay.
  • the driving non-inverting amplifier 82A amplifies the driving voltage signal with a predetermined gain and outputs the amplified signal to the driving unit 30.
  • the driving inverting amplifier 82B amplifies the driving voltage signal with a predetermined gain (the same gain as the driving non-inverting amplifier 82A) and inverts it to output it to the driving unit 40.
  • the gain of the driving non-inverting amplifier 82A and the driving inverting amplifier 82B may be 1, and in this case, the driving non-inverting amplifier 82A and the driving inverting amplifier 82B are synchronized with the driving units 30 and 40. Functions as a buffer circuit for inputting a driving voltage signal having a reverse phase.
  • the electrostatic capacity of the first and second monitor units 50 and 60 changes due to this vibration. At this time, the polarities of the two capacitance changes are different from each other.
  • the capacitance changes of the first and second monitor units 50 and 60 are input to the amplifiers 83A and 83B.
  • the amplifiers 83A and 83B are capacitance / voltage conversion circuits (so-called C / V circuits) and output monitor voltage signals corresponding to the capacitance.
  • the two monitor voltage signals are added by the differential amplifier 840. Thereby, the amplitude of the monitor signal can be increased.
  • the monitor signal that is added to form one signal is input to the filter 84.
  • the monitor signal filtered by the filter 84 is fed back to the control unit 80 and output to the detector 95A and the phase shifter 85.
  • the phase shifter 85 delays the phase of the monitor voltage signal by 90 ° and outputs it to the detector 95B.
  • each acceleration of the first detection unit 11, the second detection unit 12, the third detection unit 13, and the fourth detection unit 14 changes.
  • the capacitance changes of the first detection unit 11 and the third detection unit 13 due to application of angular velocity or acceleration are the same.
  • the first detection unit 11 and the third detection unit 13 are connected by electrodes outside the sensor element. Therefore, the capacitance change obtained by adding the capacitance change of the first detection unit 11 and the capacitance change of the third detection unit 13 is twice that of the first or third detection unit 11 or 13. A change in capacitance can be obtained.
  • the capacitance changes of the first and third detectors 11 and 13 are input to the amplifier 91A.
  • the amplifier 91A is a capacitance / voltage conversion circuit (so-called C / V circuit) and outputs a first detection signal corresponding to the capacitance.
  • the first detection signal is output to the adder 92 and the subtracter 93.
  • the capacitance changes of the second detection unit 12 and the fourth detection unit 14 due to application of angular velocity or acceleration are the same.
  • the second detection unit 12 and the fourth detection unit 14 are connected by electrodes outside the sensor element. Therefore, the capacitance change obtained by adding the capacitance change of the second detection unit 12 and the capacitance change of the fourth detection unit 14 is 2 of either the second or fourth detection unit 12 or 14. Double capacitance change is obtained.
  • the capacitance changes of the second and fourth detection units 12 and 14 are input to the amplifier 91B.
  • the amplifier 91B is a capacitance / voltage conversion circuit (so-called C / V circuit) and outputs a second detection signal corresponding to the capacitance.
  • the second detection signal is output to the adder 92 and the subtracter 93.
  • the adder 92 adds the first detection signal and the second detection signal, and outputs the result to the filter 94A.
  • the subtractor 93 calculates the difference between the first detection signal and the second detection signal and outputs the difference to the filter 94B.
  • the filter 94A is composed of, for example, a high-pass filter, filters the added signal, and outputs it to the detector 95A.
  • the filter 94B is composed of, for example, a high-pass filter, filters the difference signal (subtraction signal), and outputs the filtered signal to the detector 95B.
  • the detector 95A synchronously detects the addition signal with the monitor voltage signal and outputs the first detection signal to the output circuit 96A.
  • the output circuit 96A includes an amplitude adjustment circuit and a low-pass filter, performs predetermined processing on the first detection signal, and outputs it to the output terminal OUTa.
  • the detector 95B synchronously detects the addition signal with the monitor voltage signal and outputs the second detection signal to the output circuit 96B.
  • the output circuit 96B has the same circuit configuration as the output circuit 96A and includes an amplitude adjustment circuit and a low-pass filter.
  • the output circuit 96B performs predetermined processing on the second detection signal and outputs the second detection signal to the output terminal OUT ⁇ .
  • FIG. 9 is a diagram showing the behavior when the angular velocity ⁇ is applied to the sensor element according to the embodiment of the present invention.
  • FIG. 9A shows a state in which the drive voltage signal is not applied
  • FIGS. 9B and 9C show a state in which the drive voltage signal is applied.
  • FIG. 9B shows that the first mass unit 10 and the fourth mass unit 400 move in the positive direction of the X axis, and the second mass unit 20 and the third mass unit 300 move in the negative direction of the X axis. It shows the state.
  • FIG. 9C shows that the first mass unit 10 and the fourth mass unit 400 move in the negative direction of the X axis, and the second mass unit 20 and the third mass unit 300 move in the positive direction of the X axis. It shows the state.
  • a Coriolis force is applied, and displacement occurs in the negative direction of the Y axis.
  • the electrostatic capacity decreases in the angular velocity detectors 113 and 133 in the first and second mass units 10 and 20, and the electrostatic capacity increases in the angular velocity detectors 123 and 143.
  • Each angular velocity detecting unit 113, 133 is electrically connected outside the sensor element before circuit input.
  • the angular velocity detection units 123 and 143 are also electrically connected outside the sensor element before circuit input.
  • the capacitance change of the angular velocity detection units 113 and 133 in the first and second mass units 10 and 20 and the capacitance change of the angular velocity detection units 123 and 143 are added.
  • the change in capacitance between the two is opposite to each other and cancels out, so that the change in capacitance due to the angular velocity ⁇ becomes zero.
  • the difference in capacitance between the angular velocity detectors 113 and 133 in the first and second mass units 10 and 20 is different from the capacitance change in the angular velocity detectors 123 and 143.
  • the capacitance change between the two is added, so that the capacitance change due to the angular velocity ⁇ is doubled.
  • FIG. 11 is a waveform diagram of each signal when only the angular velocity ⁇ is applied to the sensor element 1 according to the embodiment of the present invention.
  • the first output in FIG. 11 is a voltage conversion of the capacitance change of each angular velocity detection unit 113, 133 in the first and second mass units 10, 20, and the second output is the first,
  • the capacitance change of each angular velocity detection part 123,143 in the 2nd mass part 10,20 is voltage-converted. As shown in FIG. 11, the first output and the second output are always in reverse phase.
  • a signal obtained by adding the first output and the second output that is, the first detection signal is a signal obtained by canceling the first output and the second output, and OUT1 (addition output) is 0 (or reference potential).
  • a signal obtained by subtracting the first output and the second output that is, the second detection signal is a signal obtained by adding the first output and the second output, and OUT2 (addition output) is the first output or the second output. Twice as much. Thereby, the angular velocity ⁇ can be detected by the second detection signal. At this time, since the amplitude increases, the angular velocity ⁇ can be detected reliably and accurately.
  • FIG. 10 is a diagram showing the behavior when the acceleration a is applied to the sensor element according to the embodiment of the present invention.
  • FIG. 10A shows a state in which the drive voltage signal is not applied
  • FIGS. 10B and 10C show a state in which the drive voltage signal is applied.
  • FIG. 10B the first mass part 10 and the fourth mass part 400 have moved in the positive direction of the X axis
  • the second mass part 20 and the third mass part 300 have moved in the negative direction of the X axis.
  • FIG. 10C the first mass unit 10 and the fourth mass unit 400 move in the negative direction of the X axis
  • the second mass unit 20 and the third mass unit 300 move in the positive direction of the X axis.
  • each acceleration detection part 112,122,132,142 in the 1st, 2nd mass parts 10 and 20 the space
  • the capacitance changes in synchronization with the monitor signal.
  • the phases of the acceleration detectors 112, 122, 132, 142 are all equal.
  • Each acceleration detector 112, 132 is electrically connected outside the sensor element before circuit input.
  • the acceleration detection units 122 and 142 are also electrically connected outside the sensor element before circuit input.
  • the capacitance change of the acceleration detection units 112 and 132 in the first and second mass units 10 and 20 and the capacitance change of the acceleration detection units 122 and 142 are added.
  • the phase of both is equal, and the capacitance change due to the acceleration a is doubled by adding the capacitance change.
  • the difference in capacitance between the acceleration detection units 112 and 132 in the first and second mass units 10 and 20 is different from the capacitance change in the acceleration detection units 122 and 142.
  • the change in capacitance between the two cancels out, and the change in capacitance due to acceleration a becomes zero.
  • FIG. 12 is a waveform diagram of each signal when only the acceleration a is applied to the sensor element 1 according to the embodiment of the present invention. Note that the first output in FIG. 12 is obtained by voltage-converting the capacitance change of each acceleration detection unit 112, 132 in the first and second mass units 10, 20, and the second output is the first, The capacitance change of each acceleration detection part 122,142 in the 2nd mass part 10,20 is voltage-converted.
  • the first output and the second output are always in phase. Therefore, a signal obtained by adding the first output and the second output, that is, the first detection signal is a signal obtained by adding the first output and the second output, and OUT1 (addition output) is the first output or the second output. Twice as much.
  • a signal obtained by subtracting the first output and the second output that is, the second detection signal is a signal obtained by canceling the first output and the second output, and OUT2 (addition output) is 0 (or reference potential). Become. Thereby, the acceleration a can be detected by the first detection signal. At this time, since the amplitude increases, the acceleration a can be detected reliably and accurately.
  • the capacitance change obtained from the first detection unit 11 and the third detection unit 13 and the capacitance change obtained from the second detection unit 12 and the fourth detection unit 14 are both accelerations.
  • the component due to a and the component due to angular velocity ⁇ are mixed.
  • the adder 92 and subtracter 93 the component caused by the acceleration a and the component caused by the angular velocity ⁇ can be reliably separated and output.
  • the signal due to the acceleration a and the angular velocity can be detected and output more reliably.
  • FIG. 13 is a waveform diagram of each signal when acceleration a and angular velocity ⁇ are applied to the sensor element 1 according to the embodiment of the present invention.
  • the 1st output of FIG. 13 converts the electrostatic capacitance change of each acceleration detection part 112,132 and each angular velocity detection part 113,133 in the 1st, 2nd mass parts 10 and 20, into voltage
  • the second output is obtained by voltage-converting the capacitance changes of the acceleration detection units 122 and 142 and the angular velocity detection units 123 and 143 in the first and second mass units 10 and 20.
  • the capacitance change due to the acceleration a and the capacitance change due to the angular velocity ⁇ are the same is shown.
  • the first output and the second output have a predetermined phase shift with respect to the drive voltage signal according to the ratio of the capacitance change due to the acceleration a and the capacitance change due to the angular velocity ⁇ . .
  • OUT1 additional output
  • OUT2 difference output

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)

Abstract

La présente invention porte sur un élément (1) de capteur qui comporte une première masse (10) et une seconde masse (20) qui oscillent en antiphase l'une par rapport à l'autre. Les première et seconde masses (10, 20) comportent chacune une unité de détection d'accélération et une unité de détection de vitesse angulaire. L'unité de détection d'accélération et l'unité de détection de vitesse angulaire sont formées au niveau des première et seconde masses (10, 20) d'une manière de telle sorte que des changements d'indexation de capacitance de l'accélération (a) dans un premier signal de détection obtenu à partir des première et seconde masses (10, 20) et des changements d'indexation de capacitance de l'accélération (a) dans un second signal de détection obtenu à partir des première et seconde masses (10, 20) de la même manière sont en phase et au même niveau, et des changements d'indexation de capacitance de la vitesse angulaire (ω) dans le premier signal de détection obtenu à partir des première et seconde masses (10, 20) et des changements d'indexation de capacitance de la vitesse angulaire (ω) dans le second signal de détection obtenu à partir des première et seconde masses (10, 20) de la même manière sont en antiphase et au même niveau.
PCT/JP2013/083021 2012-12-10 2013-12-10 Élément de capteur et capteur composite Ceased WO2014092060A1 (fr)

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JP2012-268931 2012-12-10
JP2012268931 2012-12-10

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WO2014092060A1 true WO2014092060A1 (fr) 2014-06-19

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110308308A (zh) * 2019-06-27 2019-10-08 深迪半导体(上海)有限公司 一种带补偿电极的面内平动式加速度计
JP2022108717A (ja) * 2021-01-13 2022-07-26 株式会社村田製作所 蛇行電極を有するｍｅｍｓデバイス

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004163376A (ja) * 2002-01-10 2004-06-10 Murata Mfg Co Ltd 角速度センサ
JP2007333467A (ja) * 2006-06-13 2007-12-27 Hitachi Ltd 慣性センサ
JP2010085313A (ja) * 2008-10-01 2010-04-15 Murata Mfg Co Ltd 複合センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004163376A (ja) * 2002-01-10 2004-06-10 Murata Mfg Co Ltd 角速度センサ
JP2007333467A (ja) * 2006-06-13 2007-12-27 Hitachi Ltd 慣性センサ
JP2010085313A (ja) * 2008-10-01 2010-04-15 Murata Mfg Co Ltd 複合センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110308308A (zh) * 2019-06-27 2019-10-08 深迪半导体(上海)有限公司 一种带补偿电极的面内平动式加速度计
CN110308308B (zh) * 2019-06-27 2021-07-13 深迪半导体(绍兴)有限公司 一种带补偿电极的面内平动式加速度计
JP2022108717A (ja) * 2021-01-13 2022-07-26 株式会社村田製作所 蛇行電極を有するｍｅｍｓデバイス

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