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WO2014076078A3 - Device and method for the treatment of flat material to be treated - Google Patents

Device and method for the treatment of flat material to be treated Download PDF

Info

Publication number
WO2014076078A3
WO2014076078A3 PCT/EP2013/073617 EP2013073617W WO2014076078A3 WO 2014076078 A3 WO2014076078 A3 WO 2014076078A3 EP 2013073617 W EP2013073617 W EP 2013073617W WO 2014076078 A3 WO2014076078 A3 WO 2014076078A3
Authority
WO
WIPO (PCT)
Prior art keywords
treatment
treatment liquid
treated
discharge
flat material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2013/073617
Other languages
French (fr)
Other versions
WO2014076078A2 (en
Inventor
Ferdinand Wiener
Christian Thomas
Olaf Lorenz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Priority to CN201380051293.XA priority Critical patent/CN104781452B/en
Priority to US14/427,226 priority patent/US9394622B2/en
Priority to ATA9409/2013A priority patent/AT516668B1/en
Priority to JP2015542243A priority patent/JP5938530B2/en
Publication of WO2014076078A2 publication Critical patent/WO2014076078A2/en
Publication of WO2014076078A3 publication Critical patent/WO2014076078A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0621In horizontal cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/041Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • C23C18/1628Specific elements or parts of the apparatus
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1655Process features
    • C23C18/1664Process features with additional means during the plating process
    • C23C18/1669Agitation, e.g. air introduction
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1675Process conditions
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02Tanks; Installations therefor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06Suspending or supporting devices for articles to be coated
    • C25D17/08Supporting racks, i.e. not for suspending
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/10Agitating of electrolytes; Moving of racks
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/12Process control or regulation
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08Electroplating with moving electrolyte e.g. jet electroplating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Coating Apparatus (AREA)

Abstract

The device (1) according to the invention is suggested for gentle treatment of a flat material (B) to be treated with a treatment liquid (F). The device (1) has the following components: at least one treatment chamber (20), in which the treatment liquid (F) can be accumulated up to a bath level (M), at least one supply device (7) for the supply of the treatment liquid (F) into the at least one treatment chamber (20), at least one transport device (30), with which the material (B) to be treated can be transported in the horizontal position in a transport plane (E) below the bath level (M) through the at least one treatment chamber (20), at least one reception area (4) for the treatment liquid (F), and at least one discharge device (40) with, respectively, at least one discharge opening (41) for the treatment liquid (F) for conveying it from the at least one treatment chamber (20) with a respective discharge rate into the at least one reception area (4). The at least one discharge device (40) respectively has at least one regulating system (43), with which the discharge rate of the treatment liquid (F) is adjustable through the at least one discharge opening (41).
PCT/EP2013/073617 2012-11-16 2013-11-12 Device and method for the treatment of flat material to be treated Ceased WO2014076078A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201380051293.XA CN104781452B (en) 2012-11-16 2013-11-12 For processing the device and method of pending flat material
US14/427,226 US9394622B2 (en) 2012-11-16 2013-11-12 Device and method for the treatment of flat material to be treated
ATA9409/2013A AT516668B1 (en) 2012-11-16 2013-11-12 Apparatus and method for treating flat material to be treated
JP2015542243A JP5938530B2 (en) 2012-11-16 2013-11-12 Apparatus and method for processing flat workpieces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012221012.1 2012-11-16
DE102012221012.1A DE102012221012B4 (en) 2012-11-16 2012-11-16 Device and method for treating flat items to be treated

Publications (2)

Publication Number Publication Date
WO2014076078A2 WO2014076078A2 (en) 2014-05-22
WO2014076078A3 true WO2014076078A3 (en) 2014-12-04

Family

ID=49596273

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/073617 Ceased WO2014076078A2 (en) 2012-11-16 2013-11-12 Device and method for the treatment of flat material to be treated

Country Status (9)

Country Link
US (1) US9394622B2 (en)
JP (1) JP5938530B2 (en)
KR (1) KR101631420B1 (en)
CN (1) CN104781452B (en)
AT (1) AT516668B1 (en)
DE (1) DE102012221012B4 (en)
MY (1) MY177802A (en)
TW (1) TWI561681B (en)
WO (1) WO2014076078A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105590987B (en) * 2014-10-20 2022-06-14 苏州易益新能源科技有限公司 Method for horizontal electrochemical deposition of metal
CN105063709B (en) * 2015-09-18 2018-02-23 安捷利电子科技(苏州)有限公司 Use in printed circuit board electroplanting device
DE102015121349A1 (en) * 2015-12-08 2017-06-08 Staku Anlagenbau Gmbh Apparatus for surface treatment of a continuous material and its use
CN107513742B (en) * 2017-08-29 2019-01-04 重庆鑫盟精密模具有限公司 The galvanizing rig of precision die cutting electrode silk core material
JP6910600B2 (en) * 2018-07-05 2021-07-28 株式会社ケミトロン Plating equipment
JP7691416B2 (en) 2019-09-12 2025-06-11 アトテック ドイチュラント ゲー・エム・ベー・ハー ウント コー. カー・ゲー APPARATUS FOR THE WET PROCESSING OF FLAT WORKPIECES, DEVICE FOR A CELL OF THE APPARATUS AND METHOD FOR OPERATING THE APPARATUS - Patent application
CN111587018A (en) * 2020-06-08 2020-08-25 杭州浮瓦科技有限公司 Outdoor electromechanical device protection device capable of rapidly cleaning dust screen
NL2030054B1 (en) * 2021-12-07 2023-06-22 Meco Equipment Eng B V Device and method for the electrolytic treatment of substrates.

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05331687A (en) * 1992-06-01 1993-12-14 Kawasaki Steel Corp Electrolysis device for metal strips
US6068755A (en) * 1996-12-06 2000-05-30 Canon Kabushiki Kaisha Process for forming zinc oxide film and processes for producing semiconductor device plate and photo-electricity generating device using the film
JP2010037600A (en) * 2008-08-05 2010-02-18 Dainippon Screen Mfg Co Ltd Electrodeposition apparatus
US20120231574A1 (en) * 2011-03-12 2012-09-13 Jiaxiong Wang Continuous Electroplating Apparatus with Assembled Modular Sections for Fabrications of Thin Film Solar Cells

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US4459183A (en) 1981-10-07 1984-07-10 Chemcut Corporation Electroplating apparatus and method
FR2549336B1 (en) 1983-06-23 1986-11-21 Telmec Spa Tec Elett Mecc MACHINE FOR THE CONTINUOUS GOLDING OF LAMELLAR CONNECTORS OF PRINTED CIRCUITS, WITH A TRANSPORT GROUP WHICH CAN MAKE A TRANSLATION
DE3624481A1 (en) 1986-07-19 1988-01-28 Schering Ag ARRANGEMENT FOR THE ELECTROLYTIC TREATMENT OF PLATE-SHAPED OBJECTS
DE3864526D1 (en) 1987-01-26 1991-10-10 Siemens Ag GALVANIZATION DEVICE FOR PANEL-SHAPED WORKPIECES, ESPECIALLY PCB.
ATE66969T1 (en) 1987-01-26 1991-09-15 Siemens Ag GALVANIZING EQUIPMENT FOR PLATE-FORM WORKPIECES, ESPECIALLY CIRCUIT BOARDS.
JPH01252799A (en) * 1988-03-31 1989-10-09 Nkk Corp Method for circulating plating liquid in electroplating
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US5803984A (en) * 1996-02-09 1998-09-08 Danieli Wean, A Division Of Danieli Corporation Method and apparatus for rinsing steel product
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05331687A (en) * 1992-06-01 1993-12-14 Kawasaki Steel Corp Electrolysis device for metal strips
US6068755A (en) * 1996-12-06 2000-05-30 Canon Kabushiki Kaisha Process for forming zinc oxide film and processes for producing semiconductor device plate and photo-electricity generating device using the film
JP2010037600A (en) * 2008-08-05 2010-02-18 Dainippon Screen Mfg Co Ltd Electrodeposition apparatus
US20120231574A1 (en) * 2011-03-12 2012-09-13 Jiaxiong Wang Continuous Electroplating Apparatus with Assembled Modular Sections for Fabrications of Thin Film Solar Cells

Also Published As

Publication number Publication date
CN104781452B (en) 2016-07-13
AT516668A1 (en) 2016-07-15
TW201430176A (en) 2014-08-01
JP2015535038A (en) 2015-12-07
WO2014076078A2 (en) 2014-05-22
MY177802A (en) 2020-09-23
AT516668B1 (en) 2016-09-15
DE102012221012A1 (en) 2014-05-22
US9394622B2 (en) 2016-07-19
TWI561681B (en) 2016-12-11
JP5938530B2 (en) 2016-06-22
US20150252488A1 (en) 2015-09-10
CN104781452A (en) 2015-07-15
KR101631420B1 (en) 2016-06-16
KR20150084780A (en) 2015-07-22
DE102012221012B4 (en) 2023-01-19

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