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WO2013125864A1 - Dispositif d'inspection de configuration d'électrode - Google Patents

Dispositif d'inspection de configuration d'électrode Download PDF

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Publication number
WO2013125864A1
WO2013125864A1 PCT/KR2013/001352 KR2013001352W WO2013125864A1 WO 2013125864 A1 WO2013125864 A1 WO 2013125864A1 KR 2013001352 W KR2013001352 W KR 2013001352W WO 2013125864 A1 WO2013125864 A1 WO 2013125864A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode pattern
sensor unit
probe
electrode
electrical signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2013/001352
Other languages
English (en)
Korean (ko)
Inventor
김철주
박지군
박준희
김진열
야마오카슈지
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rorze Systems Corp
Original Assignee
Rorze Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Systems Corp filed Critical Rorze Systems Corp
Publication of WO2013125864A1 publication Critical patent/WO2013125864A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/04—Structural and physical details of display devices
    • G09G2300/0421—Structural details of the set of electrodes
    • G09G2300/0426—Layout of electrodes and connections

Definitions

  • the present invention relates to an electrode pattern inspection apparatus, and more particularly, to the electrical inspection of the electrode pattern formed on the glass panel for flat-panel TV, that is, whether the opening (OPEN) and the short (SHORT) and the position can be inspected It relates to an electrode pattern inspection apparatus.
  • an electrode pattern is formed on a surface of a flat panel glass panel such as a PDP or LED.
  • a flat panel glass panel such as a PDP or LED.
  • the line width and pitch of one electrode pattern are 50 ⁇ m and 300 ⁇ m, respectively, and the length reaches 1 m.
  • the line is frequently disconnected or shorted with the adjacent line. Therefore, inspecting whether the electrode pattern is shorted in the middle of the manufacturing process is an essential process for increasing the yield of the finished product.
  • FIG. 1 is a diagram illustrating an electrode pattern formed on a general glass panel.
  • a general electrode pattern 200 may include a plurality of pads 210 for contacting a probe, an active area 220 connected to the pads 210, and an active area ( And a fan out area 230 for distributing output to another location.
  • the plurality of electrode patterns 200 formed in the active area 220 are formed horizontally with each other, but the electrode patterns 200 formed in the fan out area 230 have a glass panel 20 for distributing output to other places.
  • the gap between the electrode patterns 200 adjacent to each other by a predetermined distance toward the end side of the c) is gradually reduced, and then the electrode patterns 200 adjacent to each other extend horizontally to each other.
  • the electrode pattern 200 of the general glass panel 20 is formed to be divided into the active area 220 and the fan out area 230 to perform electrical inspection of the electrode pattern 200 using a general electrode pattern inspection device.
  • a general electrode pattern inspection device In order to perform the electrical inspection of the active area 220 and the fan out area 230, each has to perform a separate electrode pattern inspection time takes a long time.
  • the general electrode pattern inspection apparatus can detect whether the electrode pattern is open or shorted, but there is a problem in that it is not able to detect the position of the open or shorted electrode pattern.
  • an object of the present invention is to provide an electrode pattern inspection apparatus capable of simultaneously detecting whether the electrode patterns formed in the active area and the fan out area are open and short, as well as the open and short positions, in one scan operation.
  • An electrode pattern inspection apparatus includes a probe for applying an electrical signal to an electrode pattern formed on a glass panel, and moved from the probe while moving in a direction perpendicular to the electrode pattern to be formed in an active area.
  • a first sensor unit capable of receiving an electrical signal transmitted through an electrode pattern in a non-contact manner and detecting whether an electrode pattern formed in the active area is opened or shorted; and the first sensor unit in a direction perpendicular to the electrode pattern
  • a second sensor capable of detecting whether the electrode pattern formed in the fan-out area is opened or shorted by receiving an electrical signal applied from the probe and transmitted through an electrode pattern formed in the fan-out area while moving in association with the probe; Contains wealth.
  • the first sensor unit is installed to be movable in a direction parallel to the electrode pattern.
  • the first sensor unit is formed by an array sensor in which a plurality of sensors are arranged along the length direction of the electrode pattern, each sensor receives the electrical signal transmitted through the electrode pattern for each position of the electrode pattern active area The open and short positions of the electrode patterns formed therein can also be detected.
  • the second sensor unit is installed to be movable in a direction parallel to the electrode pattern.
  • the second sensor unit is formed by an array sensor in which a plurality of sensors are arranged along the length direction of the electrode pattern, and each sensor receives fan by the position of the electrode pattern and receives an electrical signal transmitted through the electrode pattern. Even open and short positions of the electrode pattern formed in the area can be detected.
  • the electrode pattern inspection apparatus may be applied from a probe while being interlocked with the first sensor unit and the second sensor unit to be transmitted through electrode patterns formed in the active area and the fan out area.
  • the electrode pattern inspection apparatus may be applied from a probe while being interlocked with the first sensor unit and the second sensor unit to be transmitted through electrode patterns formed in the active area and the fan out area.
  • the first sensor and the second sensor are formed by an array sensor arranged along the length direction of the electrode pattern so that each sensor receives an electrical signal for each position of the electrode pattern so that the active area and the fan are executed in one scan operation.
  • the electrode pattern inspection apparatus can significantly shorten the electrical inspection time of the electrode pattern formed on the glass panel, thereby greatly improving the production efficiency of the glass panel.
  • FIG. 1 is a view showing an electrode pattern formed on a typical glass panel
  • Figure 2 is a schematic diagram for explaining the electrode pattern inspection apparatus according to an embodiment of the present invention
  • Figure 3 is a schematic diagram showing an example of performing an electrical inspection of the electrode pattern by the inspection apparatus according to an embodiment of the present invention
  • first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
  • the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
  • FIG. 2 is a schematic diagram illustrating an electrode pattern inspection apparatus according to an embodiment of the present invention
  • Figure 3 is a schematic diagram showing an example of performing an electrical inspection of the electrode pattern by the inspection apparatus according to an embodiment of the present invention. to be.
  • the electrode pattern inspection apparatus includes a moving block 110, a probe 120, a first sensor unit 130, and a second sensor unit 140. do.
  • the moving block 110 is installed to be located above the glass panel 20.
  • the moving block 110 may be installed in a three-axis moving means (not shown) that can move in the three-axis direction.
  • the three-axis moving means capable of moving the moving block 110 in the three-axis direction is generally applied to an electrode pattern inspection device, and for the convenience of description, the schematic and description of the configuration thereof will be omitted. .
  • the probe 120 applies an electrical signal to the electrode patterns 200 formed on the glass panel 20.
  • the probe 120 may be in contact with the pad portion 210 of the electrode patterns 200 formed on the glass panel 20 to apply an electrical signal to the electrode patterns 200.
  • Probe 120 may be used.
  • the probe 120 may be a non-contact probe 120 that can apply an electrical signal to the electrode patterns 200 formed on the glass panel 20 in a non-contact manner.
  • the probe 120 is installed in the test pin block 150 installed to be movable in the three axis direction next to one side of the first sensor unit 130.
  • the probe 120 may be directly installed in the first sensor unit 130 so that the probe 120 may move in association with the first sensor unit 130.
  • the probe 120 may be attached to the test pin block 150 or the first sensor unit 130 by a wire bonding method, or may be fixed by a plurality of fixing members.
  • the first sensor unit 130 is installed in the moving block 110 and moves together with the moving block 110 as the moving block 110 moves in a direction perpendicular to the electrode pattern 200.
  • the active area 220 receives an electrical signal applied from the probe 120 and transmitted through the electrode patterns 200 formed in the active area 220 in a non-contact manner while moving in a direction perpendicular to the electrode pattern 200.
  • the first sensor unit 130 is installed in the moving block 110 that is movable in the three axis direction can be moved in a direction perpendicular to the electrode patterns 200 in the scan direction, the electrode The pattern 200 may also move in a horizontal direction.
  • the first sensor unit 130 is a plurality of sensors 131 is formed by an array sensor disposed along the longitudinal direction of the electrode pattern 200 to form the electrode patterns 200 formed in the active area 220
  • Each sensor 131 may receive the electrical signals transmitted through the positions of the electrode patterns 200. Therefore, when it is detected whether the electrode pattern 200 formed in the active area 220 is opened or shorted by the first sensor unit 130, the electrode formed in the active area 220 by the first sensor unit 130 is detected. Even open and short positions of the pattern 200 are detected.
  • the second sensor unit 140 is installed in the first sensor unit 130 to be moved in conjunction with the first sensor unit 130.
  • the second sensor unit 140 may be installed in the first sensor unit 130 to form a 'T' shape with the first sensor unit 130.
  • the second sensor unit 140 is installed in the first sensor unit 130 and interlocked with the first sensor unit 130 to move in a direction perpendicular to the electrode patterns 200. Opening of the electrode patterns 200 formed in the fan out area 230 by receiving in a non-contact manner an electrical signal applied from the probe 120 and transmitted through the electrode patterns 200 formed in the fan out area 230. And whether or not a short is detected.
  • the second sensor unit 140 may be moved independently of the first sensor unit 130 so as to be movable in a horizontal direction with the electrode patterns 200 independently.
  • the first sensor unit 130 may be installed in the first sensor unit 130.
  • the second sensor unit 140 also includes a plurality of sensors 141 formed by an array sensor disposed along a length direction of the electrode pattern 200, thereby providing the fan out area.
  • Each sensor 141 may receive the electrical signals transmitted through the electrode patterns 200 formed in the 230 by positions of the electrode patterns 200. Therefore, when it is detected whether the electrode patterns 200 formed in the fan out area 230 are opened or shorted by the second sensor unit 140, the fan out area 230 is detected by the second sensor unit 140. Also, the open and short positions of the electrode patterns 200 formed in FIG. 2 are also detected.
  • the electrode pattern inspection apparatus according to an embodiment of the present invention, the alignment of the probe 120 and the first sensor unit 130 on one side of the probe 120 and the electrode patterns 200 and the probe ( Camera 160 for checking the alignment of the 120 may be further installed.
  • a test pin By moving the block 150, the probe 120 installed in the test pin block 150 contacts the pad part 210 to apply an electrical signal to the electrode pattern 200.
  • the probe 120 is installed in the first sensor unit 130 by moving the moving block 110 so that the probe 120 is in contact with the pad portion 210 of the electrode pattern 200. An electrical signal is applied to the electrode pattern.
  • the first sensor unit 130 may include an electrode pattern formed in the active area 220.
  • the electrical signal applied to the 200 is received in a non-contact manner to detect whether the electrode pattern 200 formed in the active area 220 is open or short.
  • the first sensor unit 130 is formed by an array sensor in which a plurality of sensors 131 are disposed along the length direction of the electrode pattern 200, thereby being active by the first sensor unit 130.
  • each sensor 131 transmits an electrical signal applied by the probe 120 and transmitted through the electrode pattern 200.
  • the first sensor unit 130 detects even the open and short positions of the electrode pattern 200 formed in the active area 220 by receiving the electrode pattern 200 for each position. For example, when the electrode pattern 200 formed in the active area 220 is opened, electrical signals are no longer applied along the electrode pattern 200 from the open position of the electrode pattern 200. Therefore, the sensor 131 provided from the pad portion 210 to which the probe 120 is in contact with the position before the electrode pattern 200 is opened may detect an electrical signal, but is provided at the open position. Electrical signals are not detected from the sensor 131. Accordingly, the position of the electrode pattern 200 where the sensor 131 on which the electrical signal is not detected is first detected is an open portion, so that even the open position of the electrode pattern 200 can be detected quickly and accurately.
  • the first sensor unit 130 moves along the probe 120 in the scan direction, that is, the direction perpendicular to the electrode pattern 200, to form the respective electrode patterns formed in the active area 220. Perform an electrical inspection of 200).
  • the first sensor unit 130 checks whether the electrode patterns 200 formed in the active area 220 are opened and shorted, and at the same time, the second sensor unit 140 has a fan out area.
  • the electrical signal applied to the electrode pattern 200 formed in the 230 is received in a non-contact manner to detect whether the electrode pattern 200 formed in the fan out area 230 is open or short.
  • the second sensor unit 140 is also formed by an array sensor disposed along the length direction of the electrode pattern 200, similarly to the first sensor unit 130, thereby providing the second sensor unit 140 with the second sensor unit 140.
  • the electrical signal applied by the probe 120 and transmitted through the electrode pattern 200 is transferred to each sensor (
  • the second sensor unit 140 detects the open and short positions of the electrode pattern 200 formed in the fan out area 230 by receiving the 141 by the position of the electrode pattern 140.
  • the sensor 141 provided from the electrode pattern 200 to which the probe 120 is in contact with the position before the electrode pattern 200 is opened may detect an electrical signal, but the sensor provided at the open position ( From 141, no electrical signal is detected. Accordingly, the position of the electrode pattern 200 in which the sensor 141 in which the electrical signal is not detected is first detected is an open portion, so that even the open position of the electrode pattern 200 can be detected quickly and accurately.
  • the second sensor unit 140 as described above is interlocked with the first sensor unit 130 to move in a scan direction, that is, a direction perpendicular to the electrode pattern 200, and each electrode formed in the fan out area 230. Electrical inspection of the patterns 200 is performed.
  • the electrode pattern inspection apparatus is applied from the probe 120 while the first sensor unit 130 and the second sensor unit 140 are interlocked with each other to move the active area 220. And the electrode patterns formed in the active area 220 and the fan out area 230 by only one scan operation by simultaneously receiving an electrical signal transmitted through the electrode patterns 200 formed in the fan out area 230 in a non-contact manner. Whether the field 200 is open or short may be detected at the same time.
  • first sensor unit 130 and the second sensor unit 140 are formed by an array sensor disposed along the length direction of the electrode pattern 200, so that each sensor ( 131 and 141 may receive an electrical signal and detect open and short positions of the electrode pattern 200 formed in the active area 220 and the fan out area 230 in one scan operation.
  • the electrode pattern inspection apparatus can significantly shorten the electrical inspection time of the electrode pattern 200 formed on the glass panel 20, thereby greatly improving the production efficiency of the glass panel 20. have.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
PCT/KR2013/001352 2012-02-24 2013-02-21 Dispositif d'inspection de configuration d'électrode Ceased WO2013125864A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120018991A KR101259350B1 (ko) 2012-02-24 2012-02-24 Ｔ형 센서를 가지는 전극패턴 검사장치
KR10-2012-0018991 2012-02-24

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Publication Number Publication Date
WO2013125864A1 true WO2013125864A1 (fr) 2013-08-29

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WO (1) WO2013125864A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103698648A (zh) * 2013-12-23 2014-04-02 合肥京东方光电科技有限公司 线路检测装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101537563B1 (ko) * 2013-11-06 2015-07-20 마이크로 인스펙션 주식회사 비접촉 프로브를 이용한 패턴전극의 결함 위치 검출 방법
CN109545115A (zh) * 2018-12-04 2019-03-29 深圳市华星光电半导体显示技术有限公司 电性测试设备及电性测试设备十字线缺陷精确定位方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
KR100471782B1 (ko) * 1997-10-23 2005-08-10 삼성전자주식회사 액정표시장치의불량검출방법
KR20070111330A (ko) * 2006-05-16 2007-11-21 니혼덴산리드가부시키가이샤 기판 검사 장치 및 기판 검사 방법
KR20100028275A (ko) * 2008-09-04 2010-03-12 엘지전자 주식회사 평판 디스플레이의 전극라인 검사 장치 및 방법
KR20110125400A (ko) * 2010-05-13 2011-11-21 삼성모바일디스플레이주식회사 액정 표시장치 및 그의 검사방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100471782B1 (ko) * 1997-10-23 2005-08-10 삼성전자주식회사 액정표시장치의불량검출방법
KR20070111330A (ko) * 2006-05-16 2007-11-21 니혼덴산리드가부시키가이샤 기판 검사 장치 및 기판 검사 방법
KR20100028275A (ko) * 2008-09-04 2010-03-12 엘지전자 주식회사 평판 디스플레이의 전극라인 검사 장치 및 방법
KR20110125400A (ko) * 2010-05-13 2011-11-21 삼성모바일디스플레이주식회사 액정 표시장치 및 그의 검사방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103698648A (zh) * 2013-12-23 2014-04-02 合肥京东方光电科技有限公司 线路检测装置
CN103698648B (zh) * 2013-12-23 2016-04-06 合肥京东方光电科技有限公司 线路检测装置

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