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WO2013112761A3 - Planar motor with asymmetrical conductor arrays - Google Patents

Planar motor with asymmetrical conductor arrays Download PDF

Info

Publication number
WO2013112761A3
WO2013112761A3 PCT/US2013/023023 US2013023023W WO2013112761A3 WO 2013112761 A3 WO2013112761 A3 WO 2013112761A3 US 2013023023 W US2013023023 W US 2013023023W WO 2013112761 A3 WO2013112761 A3 WO 2013112761A3
Authority
WO
WIPO (PCT)
Prior art keywords
axis
assembly
along
conductor
planar motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2013/023023
Other languages
French (fr)
Other versions
WO2013112761A2 (en
Inventor
Michael B. Binnard
Yuichi Shibazaki
J. Kyle WELLS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Publication of WO2013112761A2 publication Critical patent/WO2013112761A2/en
Anticipated expiration legal-status Critical
Publication of WO2013112761A3 publication Critical patent/WO2013112761A3/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)

Abstract

A stage assembly (1 0) that moves a device (38) includes a stage mover (1 6) that moves the stage (14) along a first axis and along a second axis. The stage mover (16) includes a magnet assembly (20), and a conductor assembly (22). The conductor assembly (22) includes a plurality of first axis conductor units (24) and a plurality of second axis conductor units (26). The magnet assembly (20) includes a first axis magnet array (28A) and a second axis magnet array (30A). The first axis conductor units (24) are arranged in an alternating fashion with the second axis conductor units (26) along the first axis and along the second axis. The performance of the stage mover (16) can be different in the first and second axes. Either the conductor units (24) (26) and/or the magnet arrays (28A) (30A) can have a different geometry in the first and second axes.
PCT/US2013/023023 2012-01-25 2013-01-24 Planar motor with asymmetrical conductor arrays Ceased WO2013112761A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201261590687P 2012-01-25 2012-01-25
US61/590,687 2012-01-25
US201261591231P 2012-01-26 2012-01-26
US61/591,231 2012-01-26
US201261623201P 2012-04-12 2012-04-12
US61/623,201 2012-04-12

Publications (2)

Publication Number Publication Date
WO2013112761A2 WO2013112761A2 (en) 2013-08-01
WO2013112761A3 true WO2013112761A3 (en) 2015-06-18

Family

ID=48873919

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2013/023023 Ceased WO2013112761A2 (en) 2012-01-25 2013-01-24 Planar motor with asymmetrical conductor arrays
PCT/US2013/023020 Ceased WO2013112759A1 (en) 2012-01-25 2013-01-24 Planar motor with asymmetrical magnet arrays

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2013/023020 Ceased WO2013112759A1 (en) 2012-01-25 2013-01-24 Planar motor with asymmetrical magnet arrays

Country Status (1)

Country Link
WO (2) WO2013112761A2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013070568A2 (en) 2011-11-10 2013-05-16 Nikon Corporation System and method for controlling a temperature of a reaction assembly
US10084364B2 (en) 2013-10-05 2018-09-25 Nikon Research Corporation Of America Power minimizing controller for a stage assembly
US10261419B2 (en) 2014-05-22 2019-04-16 Nikon Corporation Magnet array for moving magnet planar motor
DE102014225317A1 (en) * 2014-12-09 2016-06-09 Robert Bosch Gmbh Electromagnetically driven conveyor
WO2017076561A1 (en) * 2015-11-05 2017-05-11 Asml Netherlands B.V. Magnet array, electric coil device, displacement system, lithographic apparatus and device manufacturing method
CN108604853B (en) * 2016-02-12 2020-12-11 Asml荷兰有限公司 Polyphase linear motor, polyphase planar motor, platform, lithography apparatus and device manufacturing method
WO2019233698A1 (en) 2018-06-05 2019-12-12 Asml Netherlands B.V. Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly
AT523217A1 (en) 2019-11-27 2021-06-15 B & R Ind Automation Gmbh Transport device
JP2023504039A (en) * 2019-11-27 2023-02-01 ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング transportation equipment
DE102020130795A1 (en) * 2020-11-20 2022-05-25 Beckhoff Automation Gmbh Method of controlling a planar propulsion system and planar propulsion system
DE102021108988A1 (en) * 2021-04-12 2022-10-13 Beckhoff Automation Gmbh Method for processing an object using a planar drive system
CN114825854B (en) * 2022-05-23 2025-08-22 华中科技大学 A magnetic levitation planar motor workbench with double-layer winding coarse and fine drive
CN118539701B (en) * 2024-04-10 2025-05-06 深圳德康威尔科技有限公司 A linear motor with integrated mover and slider

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856063B1 (en) * 2003-06-23 2005-02-15 Magnetic Power-Motion, Llc Electromotive devices using notched ribbon windings
US7355308B2 (en) * 2003-08-21 2008-04-08 Nikon Corporation Mover combination with two circulation flows
WO2010041771A2 (en) * 2008-10-09 2010-04-15 Nikon Corporation Planar motor with wedge shaped magnets and diagonal magnetization directions
US20100167556A1 (en) * 2007-04-19 2010-07-01 Nikon Corporation Three degree of movement mover and method for controlling a three degree of movement mover
US7923884B2 (en) * 2004-11-18 2011-04-12 Denso Corporation Rotary electric machine having stator coil with U-shaped segment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030209431A1 (en) * 2001-04-10 2003-11-13 Brown Jeffrey T. Magnetron sputtering source with improved target utilization and deposition rate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856063B1 (en) * 2003-06-23 2005-02-15 Magnetic Power-Motion, Llc Electromotive devices using notched ribbon windings
US7355308B2 (en) * 2003-08-21 2008-04-08 Nikon Corporation Mover combination with two circulation flows
US7923884B2 (en) * 2004-11-18 2011-04-12 Denso Corporation Rotary electric machine having stator coil with U-shaped segment
US20100167556A1 (en) * 2007-04-19 2010-07-01 Nikon Corporation Three degree of movement mover and method for controlling a three degree of movement mover
WO2010041771A2 (en) * 2008-10-09 2010-04-15 Nikon Corporation Planar motor with wedge shaped magnets and diagonal magnetization directions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KRONE ET AL.: "Investigation of the magnetization reversal of a magnetic dot array of Co/Pt multilayers", J NANOPART RES, vol. 13, 28 October 2010 (2010-10-28), pages 5587 - 5593, Retrieved from the Internet <URL:http://www.lpn.cnrs.fr/Documents/Production/JNR-Krone2011iot.pdf> [retrieved on 20130331] *

Also Published As

Publication number Publication date
WO2013112761A2 (en) 2013-08-01
WO2013112759A1 (en) 2013-08-01

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