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WO2013035677A1 - Panneau tactile, son procédé de fabrication et dispositif d'affichage - Google Patents

Panneau tactile, son procédé de fabrication et dispositif d'affichage Download PDF

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Publication number
WO2013035677A1
WO2013035677A1 PCT/JP2012/072393 JP2012072393W WO2013035677A1 WO 2013035677 A1 WO2013035677 A1 WO 2013035677A1 JP 2012072393 W JP2012072393 W JP 2012072393W WO 2013035677 A1 WO2013035677 A1 WO 2013035677A1
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WIPO (PCT)
Prior art keywords
electrode
unit
layer
electrodes
circuit prevention
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/072393
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English (en)
Japanese (ja)
Inventor
美崎　克紀
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Sharp Corp
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Sharp Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • the present invention relates to a touch panel, a touch panel manufacturing method, and a display device with a touch panel.
  • a touch panel implements a function that allows a finger or an input pen as an input means to touch a display surface and is selected according to the contact position.
  • Display devices have been generalized.
  • a resistance film method (a method in which an input position is detected by contact between an upper conductive substrate and a lower conductive substrate when pressed) or capacitance
  • the system (method of detecting the input position by detecting the change in the capacity of the touched place) has been mainly used.
  • the capacitive touch panel is capable of detecting the contact position with a simple operation and is capable of multi-touch (detecting multiple touch positions simultaneously). It has become.
  • FIG. 11 shows an example of a conventional capacitive touch panel.
  • the drive electrode line 101D and the sense electrode line 101S which are thin and have high detection performance, are on the same plane.
  • 1 is a diagram showing a schematic configuration of a formed single-layer mutual capacitance touch panel 100.
  • diamond-shaped unit electrodes 101U are arranged so as to be adjacent to each other in the left-right direction in the figure, and each unit electrode 101U is connected via a connecting portion 101C.
  • a plurality of electrically connected drive electrode lines 101D are formed in parallel with each other in the vertical direction in the figure, while the diamond-shaped unit electrodes 101U 'are adjacent to each other in the vertical direction in the figure.
  • a plurality of sense electrode lines 101S are arranged in parallel to each other in the left-right direction in the figure.
  • the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are provided so as to be electrically separated from each other and intersect each other.
  • the unit electrode 101U and the unit electrode 101U ′ are formed on the same plane so as not to overlap each other in a plan view.
  • the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the bridge electrode 104 are all formed of ITO (Indium Tin Oxide), which is a transparent conductive layer, and the unit electrode 101U and the unit electrode 101U ′ and the connecting portion 101C are formed in the same layer on the same plane.
  • ITO Indium Tin Oxide
  • the bridge electrode is interposed via the interlayer insulating film 103 formed on the connection portion 101C. Since 104 is formed, the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are electrically separated from each other.
  • a plurality of drive electrode lines 101D and a plurality of sense electrode lines 101S are connected to a plurality of terminal portions 101F via a metal wiring 102, respectively.
  • a wiring formation region R ⁇ b> 2 that is a region electrically connected to each of these is provided.
  • connection electrode 101E for electrically connecting the drive electrode line 101D or the sense electrode line 101S to the metal wiring 102 is provided.
  • connection electrode 101E and the terminal portion 101F are formed of an ITO layer that is the same layer as the unit electrodes 101U and 101U ′ and the connection portion 101C.
  • connection electrode 101E connected to the drive electrode line 101D or the sense electrode line 101S and the terminal portion 101F are directly electrically connected by the metal wiring 102, the drive The electrode line 101D or the sense electrode line 101S can be electrically connected to the terminal portion 101F.
  • FIG. 12 is a partial enlarged view of a portion where the drive electrode line 101D and the sense electrode line 101S intersect in the touch panel 100 shown in FIG.
  • the unit electrodes 101U and 101U ′ are separated at the portion where the drive electrode line 101D and the sense electrode line 101S intersect.
  • An interlayer insulating film 103 is formed on the connecting portion 101C formed of the same layer, and a bridge electrode 104 for electrically connecting adjacent unit electrodes 101U ′ is formed on the interlayer insulating film 103.
  • 13 (a) to 13 (e) show a cross section taken along line B1-B1 ', a cross section taken along line B2-B2', and a cross section taken along line B3-B3 'in FIG. 100 manufacturing steps are shown.
  • FIG. 13A shows a process of forming the unit electrode 101U, the unit electrode 101U ′, the connecting portion 101C, and the terminal portion 101F with the same ITO layer
  • FIG. 13B shows the MoNb / Al / MoNb.
  • the metal wiring 102 is provided on the terminal portion 101F. Further, the terminal portion 101F formed at one end portion outside the wiring forming region R2 is exposed for electrical connection with the outside as shown in the figure.
  • FIG. 13C shows a process of forming the interlayer insulating film 103.
  • a portion where the metal wiring 102 is provided on the terminal portion 101F and one end portion outside the wiring formation region R2.
  • the interlayer insulating film 103 is not formed on the formed terminal portion 101F.
  • FIG. 13D shows a process for forming the bridge electrode 104
  • FIG. 13E shows a process for forming the protective film 105.
  • the metal wiring 102 is provided on the terminal portion 101F.
  • the protective film 105 is formed in the part where the protective film 105 is formed, and the protective film 105 is not formed in the terminal portion 101F formed at one end portion outside the wiring formation region R2.
  • the unit electrode 101U of the illustrated drive electrode line 101D and the unit electrode 101U ′ of the sense electrode line 101S are formed so as to be adjacent to each other, and there is a capacitance C F between the adjacent unit electrodes 101U and 101U ′.
  • the capacitance C F is different between when the detection object such as a finger or a pen is not touched and when it is touched.
  • the non-touch capacity becomes larger than the touch capacity (C F_untouch > C F_touch ). Using this principle, the touch position can be detected.
  • a signal having a predetermined waveform is sequentially input from the terminal portion 101F electrically connected to the drive electrode line 101D, and a detection signal is output from the terminal portion 101F electrically connected to the sense electrode line 101S. It has come to be.
  • FIG. 14 is a diagram showing a schematic configuration of another conventional single-layer type mutual capacitance touch panel 110.
  • FIG. 15 is a partial enlarged view of a portion where the drive electrode line 101D and the sense electrode line 101S intersect in the touch panel 110 shown in FIG.
  • a bridge electrode 104 for electrically connecting adjacent unit electrodes 101 ⁇ / b> U ′ is provided at a portion where the drive electrode line 101 ⁇ / b> D and the sense electrode line 101 ⁇ / b> S intersect.
  • An interlayer insulating film 103 is formed on the lowermost layer so as to partially cover the bridge electrode 104, and a connection portion 101 ⁇ / b> C formed in the same layer as the unit electrodes 101 ⁇ / b> U and 101 ⁇ / b> U ′ is formed on the interlayer insulating film 103.
  • the adjacent unit electrodes 101U ′ are different from the configuration of the conventional single-layered mutual capacitive touch panel 100 shown in FIG. 11 in that the unit electrodes 101U ′ are formed in contact with the bridge electrode 104.
  • FIG. 110 shows the manufacturing process.
  • FIG. 16A shows a process of forming the bridge electrode 104 and the terminal portion 101F with the same ITO layer
  • FIG. 16B shows a metal wiring 102 having a three-layer structure of MoNb / Al / MoNb.
  • the metal wiring 102 is provided on the terminal portion 101F. Further, the terminal portion 101F formed at one end portion outside the wiring forming region R2 is exposed for electrical connection with the outside as shown in the figure.
  • FIG. 16C shows a process for forming the interlayer insulating film 103.
  • a portion where the metal wiring 102 is provided on the terminal portion 101F and one end portion outside the wiring formation region R2.
  • the interlayer insulating film 103 is not formed on the terminal portion 101F formed in the above.
  • FIG. 16D shows a process of forming the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C with the same ITO layer
  • FIG. 16E shows the process of forming the protective film 105.
  • a protective film 105 is formed on a portion where the metal wiring 102 is provided on the terminal portion 101F, and the terminal portion 101F formed at one end portion outside the wiring formation region R2. In this case, the protective film 105 is not formed.
  • the touch panels 100 and 110 manufactured in this way are thin and have high detection performance.
  • JP 2011-76155 A (published on April 14, 2011)”
  • the interlayer insulating film 103 has an isolated island pattern only at a portion where the drive electrode line 101D and the sense electrode line 101S intersect. Is formed.
  • the formation process of the conductive layer such as the metal wiring 102 and the bridge electrode 104 is performed by a film forming process, a photolithography process, an etching process, and a resist stripping process to form a pattern with a predetermined shape
  • patterning is performed using the foreign matter or particles as a mask, resulting in a pattern defect.
  • the resist thickness is increased due to the foreign matter or particles, and a pattern defect due to insufficient exposure occurs.
  • FIG. 17A is a plan view showing a case where the above-described pattern defect of the conductive layer occurs in the touch panel 100 shown in FIG. 11, and FIG. 17B shows the case shown in FIG. A sectional view taken along line AA ′ is shown.
  • the touch panel 110 shown in FIG. 14 similarly, due to the presence of conductive foreign matters due to pattern defects generated in the process of forming the conductive layer such as the metal wiring 102 and the bridge electrode 104, There is a possibility that a short circuit occurs between adjacent unit electrodes 101U and unit electrode 101U ′ formed in the same layer, causing a touch detection function failure.
  • Patent Document 1 describes a touch panel in which a second bridge wiring film is formed using a droplet discharge method which is a kind of printing method.
  • the X electrode film 210 electrically connects the plurality of first island electrode portions 212 arranged in the X axis direction and the first island electrode portions 212 adjacent in the X axis direction.
  • the first bridge wiring film 211 is connected to each other, and the Y electrode film 220 includes a plurality of second island-shaped electrode portions 222 arranged in the Y-axis direction and second island-shaped adjacent to the Y-axis direction. And a second bridge wiring film 221 that connects the electrode portions 222 to each other.
  • the second bridge wiring film 221 and the first bridge wiring film 211 intersect at the intersection K, and are electrically insulated by interposing an insulating film 230 formed on the first bridge wiring film 211. Is secured.
  • the film width W1 of the insulating film 230 is formed in the range of the interval W2 between the adjacent first island-shaped electrode portions 212, and the formation length L1 of the insulating film 230 in the Y-axis direction is also the second adjacent. It is formed in the range of the interval L2 between the island-like electrode portions 222.
  • a surface treatment process is performed before the process of forming the second bridge wiring film 221, and the formation range of the second bridge wiring film 221 becomes lyophilic, and the outside of the formation range of the second bridge wiring film 221 becomes lyophobic. .
  • the discharged functional liquid that becomes the second bridge wiring film 221 has a large contact angle in the liquid repellent treatment portion, it is possible to prevent the functional liquid from spreading out from the formation range of the insulating film 230, although it is described that an electrical short circuit between the second bridge wiring film 221 and the first bridge wiring film 211 can be prevented, in the case of using a droplet discharge method which is a kind of such a printing method. Since the materials that can be used are limited and it is difficult to flexibly control the film thickness and film quality, it is difficult to reduce the resistance of the conductive film formed by the droplet discharge method. For the above-described reason, it is difficult to control the transmittance of the conductive film formed by the droplet discharge method.
  • the present invention has been made in view of the above problems, and can prevent a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process, and has a high touch detection performance.
  • An object of the present invention is to provide a method for manufacturing such a touch panel and a display device including such a touch panel.
  • the touch panel of the present invention has a plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction.
  • a touch panel formed on an insulating substrate such that the electrodes cross each other, wherein the plurality of first electrodes and the plurality of second electrodes are electrically separated, and the first electrode
  • Each of the second electrodes is formed by electrically connecting a plurality of unit electrodes having a predetermined shape, and the unit electrode of the first electrode and the unit electrode of the second electrode overlap each other in plan view.
  • the unit electrode of the first electrode and the second electrode are formed on the same plane by the same layer so as to be adjacent to each other, and electrically connect adjacent unit electrodes in each of the first electrodes.
  • No Yu A unit electrode of the first electrode and a unit of the second electrode for electrically connecting the first connection part formed of a layer different from the first electrode and the adjacent unit electrodes in each of the second electrodes
  • a second connection part formed of the same layer as the electrode, and at the intersection of the first electrode and the second electrode, one of the first connection part and the second connection part is the other
  • a transparent short-circuit prevention layer is formed on each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion.
  • each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion is formed inside the transparent short-circuit prevention layer in a plan view. It is a feature.
  • the said structure is a transparent short circuit prevention layer on each formation layer of the unit electrode of the said 1st electrode which is the electroconductive film with which the touch panel was equipped, the unit electrode of the said 2nd electrode, and the said 2nd connection part.
  • the transparent short-circuit prevention layer is formed wider than the respective formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion in plan view. .
  • it is a process for forming another conductive film provided in the touch panel, for example, a process for forming the first connection part or a process for forming a wiring for electrically connecting adjacent unit electrodes in each of the first electrodes.
  • the transparent short-circuit prevention layer, the unit electrode of the first electrode, the unit electrode of the second electrode, and the second electrode Since there is a step between each forming layer and the connection portion, the remaining film of the conductive film is cut (disconnected) at this step portion. A short circuit between the provided conductive films can be prevented.
  • each said formation layer of the said transparent short circuit prevention layer with which the said touch panel was equipped, the unit electrode of the said 1st electrode, the unit electrode of the said 2nd electrode, and the said 2nd connection part Since there is a step between them, the remaining film portion of the conductive film is cut (disconnected) at this step portion, which is a process of forming another conductive film provided in the touch panel, for example,
  • the materials that can be used in the first connecting portion forming step and the wiring forming step for electrically connecting adjacent unit electrodes in each first electrode are limited, and the film thickness and film quality are flexible. Therefore, it is not necessary to perform a special method such as a droplet discharge method that is difficult to control.
  • the degree of freedom in selecting the type, film thickness, and film quality of the conductive film such as the first connection part and the wiring is high, the resistance of the conductive film provided in the touch panel and the high transmittance can be realized. it can.
  • the display device of the present invention is characterized by including the touch panel and a display panel in order to solve the above-described problems.
  • the touch panel manufacturing method of the present invention intersects each other on the insulating substrate and is electrically connected to each terminal portion through each wiring in the first direction.
  • a method of manufacturing a touch panel comprising a plurality of first electrodes arranged and a plurality of second electrodes arranged in a second direction different from the first direction, wherein the unit electrode of the first electrode and A first step of forming a conductive layer on the entire surface to form a connecting portion for electrically connecting unit electrodes of the second electrode and adjacent unit electrodes in the second electrode and the terminal portion; and on the conductive layer A second step of forming a transparent short-circuit prevention layer on the entire surface of the substrate, and patterning the transparent short-circuit prevention layer into a shape of the unit electrode of the first electrode, the unit electrode of the second electrode, the connection portion, and the terminal portion.
  • the conductive layer is etched, and the unit electrode of the first electrode, the unit electrode of the second electrode, the connection layer, and the formation layer of each of the terminal portions are viewed in plan view.
  • the fourth step of forming on the inner side of the transparent short-circuit prevention layer, the unit electrode of the first electrode and the terminal on the transparent short-circuit prevention layer formed on the unit electrode of the first electrode and on the terminal portion The transparent short-circuit preventing layer formed on the terminal portion, the fifth step of forming an opening so that the portion is exposed, and each of the first electrode and the second electrode and each of the terminal portions.
  • the above transparent short-circuit prevention layer A seventh step of forming an insulating layer so as to cover, and adjacent unit electrodes in each of the first electrodes, the opening of the transparent short-circuit prevention layer formed on the unit electrode of the first electrode and an eighth step of forming a bridge electrode to be electrically connected.
  • the conductive film is appropriately removed in the bridge electrode forming step and the wiring forming step for electrically connecting adjacent unit electrodes in each of the first electrodes provided in the touch panel.
  • the transparent short-circuit prevention layer provided on the touch panel, the unit electrode of the first electrode, the unit electrode of the second electrode, and the formation layer of each of the second connection portions Since there is a level difference between the gaps, the remaining film of the conductive film is cut (disconnected) at the level difference part, so that the bridge electrode formation process and the wiring formation process can be used.
  • a special method such as a droplet discharge method in which it is difficult to flexibly control the film thickness and film quality.
  • the degree of freedom in selecting the type, film thickness, and film quality of the conductive film such as the bridge electrode and the wiring is high, it is possible to realize low resistance and high transmittance of the conductive film provided in the touch panel.
  • the touch panel manufacturing method of the present invention intersects each other on the insulating substrate and is electrically connected to each terminal portion through each wiring in the first direction.
  • a method for manufacturing a touch panel comprising a plurality of first electrodes arranged and a plurality of second electrodes arranged in a second direction different from the first direction, wherein the adjacent first electrodes are adjacent to each other.
  • Forming an insulating layer on the bridge electrode at the intersection of the first electrode and the second electrode, and a first step of forming the bridge electrode and the terminal portion for electrically connecting the unit electrodes to each other Forming a conductive layer on the entire surface to form a second step, a unit electrode of the first electrode, a unit electrode of the second electrode, and a connecting portion for electrically connecting adjacent unit electrodes of the second electrode
  • the conductive layer is patterned using the patterned transparent short-circuit prevention layer as a mask, and a fifth step of forming the bridge electrode so that both ends of the bridge electrode and the transparent short-circuit prevention layer overlap in plan view.
  • the transparent short-circuit preventing layer and the first electrode are formed. Since there is a step between the unit electrode, the unit electrode of the second electrode, and each forming layer of the connection portion, the film residue of the conductive film is cut (disconnected) at the step portion. Therefore, it is possible to prevent a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process.
  • the degree of freedom in selecting the type, film thickness, and film quality of the conductive film used for forming the wiring is high, the resistance can be reduced relatively easily.
  • the touch panel manufacturing method of the present invention intersects each other on the insulating substrate and is electrically connected to each terminal portion through each wiring in the first direction.
  • a method of manufacturing a touch panel comprising a plurality of first electrodes arranged and a plurality of second electrodes arranged in a second direction different from the first direction, wherein the unit electrode of the first electrode and A first step of forming a conductive layer on the entire surface to form a connecting portion for electrically connecting unit electrodes of the second electrode and adjacent unit electrodes in the second electrode and the terminal portion; and on the conductive layer A second step of forming a transparent short-circuit prevention layer on the entire surface of the substrate, and patterning the transparent short-circuit prevention layer into a shape of the unit electrode of the first electrode, the unit electrode of the second electrode, the connection portion, and the terminal portion.
  • the third step Using the patterned transparent short-circuit prevention layer as a mask, the conductive layer is etched, and each formation layer of the unit electrode of the first electrode, the unit electrode of the second electrode, the connection portion, and the terminal portion is formed.
  • the fourth step formed inside the transparent short-circuit prevention layer, the fifth step for forming an insulating layer on the entire surface, and the unit electrode formed on the unit electrode and the terminal portion of the first electrode.
  • the insulating layer is formed together with the transparent short-circuit preventing layer on each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the connection portion, The step difference between the formation layer of the unit electrode of the first electrode, the unit electrode of the second electrode, and the connection portion and the insulating layer is relatively large.
  • the step of forming the bridge electrode and the step of forming the wiring even if the conductive film is not properly removed and the remaining film of the conductive film is generated, the insulating layer, the unit electrode of the first electrode, Since a relatively large step is formed between the unit electrode of the second electrode and each forming layer of the connection portion, the remaining film of the conductive film is cut (disconnected) at the step portion. Therefore, it is possible to prevent a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process.
  • the plurality of first electrodes and the plurality of second electrodes are electrically separated, and each of the first electrode and the second electrode includes a plurality of the first electrodes and the plurality of second electrodes.
  • the unit electrodes of the predetermined shape are electrically connected to each other, and the unit electrode of the first electrode and the unit electrode of the second electrode do not overlap each other in plan view and are adjacent to each other.
  • the first electrode unit electrode and the second electrode unit electrode are formed in different layers, which are formed on the same plane by one layer and electrically connect adjacent unit electrodes in each of the first electrodes.
  • the first connecting portion and the unit electrode of the first electrode and the unit electrode of the second electrode that electrically connect adjacent unit electrodes in each of the second electrodes Therefore, at the intersection of the first electrode and the second electrode, at least one of the first connection portion and the second connection portion is insulated on the other side.
  • a transparent short-circuit prevention layer is formed on each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion, Each formation layer of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion is configured to be formed inside the transparent short-circuit prevention layer in a plan view.
  • the display device of the present invention is configured to include the touch panel and the display panel.
  • the method for manufacturing a touch panel includes the connection unit that electrically connects the unit electrode of the first electrode, the unit electrode of the second electrode, and the adjacent unit electrodes of the second electrode; A first step of forming a conductive layer forming a terminal portion on the entire surface; a second step of forming a transparent short-circuit prevention layer on the entire surface of the conductive layer; and the transparent short-circuit prevention layer as a unit of the first electrode.
  • a fourth step of forming the unit electrode of the second electrode, the unit electrode of the second electrode, the connection layer, and the terminal layer on the inner side of the transparent short-circuit prevention layer in plan view, and the first step A fifth step of forming an opening so that the unit electrode of the first electrode and the terminal portion are exposed on the transparent short-circuit prevention layer formed on the electrode unit electrode and the terminal portion; Forming a wiring for electrically connecting each of the electrode and the second electrode and each of the terminal portions through an opening of the transparent short-circuit preventing layer formed on the terminal portion; And a seventh step of forming an insulating layer so as to cover the connecting portion and the transparent short-circuit preventing layer formed on the connecting portion at the intersection of the step and the first electrode and the second electrode And a bridge electrode that electrically connects adjacent unit electrodes in
  • the manufacturing method of the touch panel of the present invention includes the first step of forming the bridge electrode and the terminal portion that electrically connect the adjacent unit electrodes in the first electrodes, and the first step.
  • a second step of forming an insulating layer on the bridge electrode at the intersection of one electrode and the second electrode; the unit electrode of the first electrode; the unit electrode of the second electrode; and the adjacent second electrode A third step of forming a conductive layer on the entire surface to form a connection part for electrically connecting the unit electrodes to be performed, a fourth step of forming a transparent short-circuit preventing layer on the entire surface of the conductive layer, and the transparent short circuit
  • the prevention layer is patterned into a shape of the unit electrode of the first electrode, the unit electrode of the second electrode, and the connection portion, and in plan view, both ends of the bridge electrode and the transparent short
  • the method for manufacturing a touch panel includes the connection unit that electrically connects the unit electrode of the first electrode, the unit electrode of the second electrode, and the adjacent unit electrodes of the second electrode; A first step of forming a conductive layer forming a terminal portion on the entire surface; a second step of forming a transparent short-circuit prevention layer on the entire surface of the conductive layer; and the transparent short-circuit prevention layer as a unit of the first electrode. A third step of patterning the electrode, the unit electrode of the second electrode, the connection portion, and the terminal portion; and etching the conductive layer using the patterned transparent short-circuit prevention layer as a mask.
  • a fifth step of forming an insulating layer on the first electrode, the transparent short-circuit preventing layer formed on the unit electrode of the first electrode and the terminal portion, and the insulating layer, the unit electrode of the first electrode and the terminal A sixth step of forming an opening so that the portion is exposed, and each of the first electrode and the second electrode and each of the terminal portions via the opening formed on the terminal portion.
  • the seventh step of forming wirings for electrical connection and the adjacent unit electrodes in each of the first electrodes are connected to each other via the opening formed on the unit electrode of the first electrode.
  • a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process can be prevented, a touch panel with high touch detection performance, a manufacturing method of such a touch panel, and such a touch panel
  • the display device provided can be realized.
  • FIG. 1 It is a figure which shows schematic structure of the touchscreen of one embodiment of this invention. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. A short circuit between the unit electrode of the sense electrode line and the unit electrode of the drive electrode line that may occur in the manufacturing process by the transparent short circuit preventing layer provided in the touch panel of the embodiment of the present invention shown in FIG. It is a figure for demonstrating the mechanism which can prevent. It is a figure which shows an example of 2D liquid crystal display device provided with the touchscreen of one embodiment of this invention. It is a figure which shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention.
  • FIG. 1 It is a figure which shows an example of 3D liquid crystal display device provided with the touch panel of one embodiment of this invention. It is a figure which shows schematic structure of the touchscreen of other one Embodiment of this invention. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows schematic structure of the touchscreen of further another embodiment of this invention. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows schematic structure of the conventional touch panel. It is a figure which shows the cross section of the B1-B1 'line of the conventional touch panel shown in FIG. It is a figure which shows the manufacturing process of the conventional touch panel shown in FIG.
  • FIG. 1 It is a figure which shows schematic structure of another conventional touch panel. It is a figure which shows the cross section of the B1-B1 'line of the conventional touch panel shown in FIG. It is a figure which shows the manufacturing process of the conventional touch panel shown in FIG. It is a figure for demonstrating the problem of the conventional touch panel. It is a figure which shows schematic structure of the conventional touch panel described in patent document 1.
  • FIG. 1 shows schematic structure of another conventional touch panel.
  • FIG. 1 is a diagram showing a schematic configuration of the touch panel 1.
  • the plurality of drive electrode lines 101D arranged on the substrate 106 are formed on the substrate 106 so as to cross each other.
  • connection part 101C second connection part
  • sense electrode line 101D intersects each other
  • connection part 101C second connection part
  • sense electrode line An interlayer insulating film 103 (insulating layer) made of, for example, a photosensitive acrylic resin is formed between the adjacent unit electrodes 101U ′ in 101S and the bridge electrode 104 (first connecting portion) that electrically connects the unit electrodes 101U ′.
  • the sense electrode line 101S and the drive electrode line 101D are electrically separated.
  • the transparent short-circuit preventing layer 2 is provided on the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C formed in the same layer, as shown in FIGS. Is different from the conventional touch panel 100 described above, and the other configurations are as described in the touch panel 100.
  • members having the same functions as those shown in the drawing of the touch panel 100 are denoted by the same reference numerals and description thereof is omitted.
  • the respective formation layers of the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C are formed inside the transparent short-circuit prevention layer 2 in plan view.
  • FIG. 1 only the touch detection region R1 of the touch panel 1 is shown and the wiring formation region R2 is not shown, but the wiring formation region R2 is the same as the wiring formation region R2 shown in FIG.
  • the transparent short-circuit prevention layer 2 is formed using a positive photosensitive acrylic resin, but the present invention is not limited to this, and a silicon nitride film, a silicon oxide film, a silicon nitride oxide film, etc. Inorganic materials or hybrid materials in which organic materials and inorganic materials are mixed can also be used.
  • FIG. 2 shows a cross section taken along line B1-B1 'of the touch panel 1 shown in FIG. 11 shows a cross section taken along line B2-B2 ′ and a cross section taken along line B3-B3 ′ corresponding to the wiring formation region R2 shown in FIG.
  • the conductive layer is etched, and unit electrode 101U ′, unit electrode 101U, and connecting portion 1 are etched.
  • Each of the forming layer and 1C and the terminal portion 101F shows in a plan view, a step of forming on the inside of the transparent circuit
  • the third step there are portions where the opening 2c is formed in the transparent short-circuit prevention layer 2 and portions where the transparent short-circuit prevention layer 2 needs to be removed (on the terminal portion 101F). And halftone exposure.
  • the conductive layer is side-etched, unit electrode 101U ′, unit electrode 101U, connection portion 101C, and terminal portion 101F
  • the transparent short-circuit prevention layer 2 can be formed in an eaves shape on each of the formation layers.
  • FIG. 2B shows that the opening 2c is formed in the transparent short-circuit prevention layer 2 formed on the unit electrode 101U ′ and the transparent short-circuit prevention layer 2 formed on the terminal portion 101F is also provided with a terminal portion.
  • a step (fifth step) is shown in which an opening is formed so that 101F is exposed.
  • the transparent short-circuit prevention layer 2 that has been halftone exposed and thinly remains is ashed and removed, thereby forming an opening 2c in the transparent short-circuit prevention layer 2 and forming on the terminal portion 101F.
  • the transparent short-circuit prevention layer 2 thus formed can be removed.
  • the transparent short-circuit prevention layer 2 other than the halftone exposure part is also thinned but remains.
  • ashing method for example, photoexcited ashing or gas that irradiates light such as ultraviolet rays in a ashing chamber into which a gas such as ozone is introduced and peels the resist using a chemical reaction between the gas and the resist.
  • Plasma ashing or the like can be used in which plasma is generated with a high frequency or the like and the resist is stripped using the plasma.
  • FIG. 2C shows a step (sixth step) of forming a wiring 102 for electrically connecting each of the sense electrode line 101S and the drive electrode line 101D to each terminal portion 101F.
  • 2 (d) shows an interlayer insulating film 103 so as to cover the connection portion 101C and the transparent short-circuit prevention layer 2 formed on the connection portion 101C at the intersection of the sense electrode line 101S and the drive electrode line 101D.
  • the process (7th process) to form is shown.
  • an interlayer insulating film 103 is formed so as to cover the terminal portion 101F and the wiring 102 in the wiring formation region R2, as shown in the drawing.
  • the point that the interlayer insulating film 103 is formed in the wiring formation region R2 is different from the wiring formation region R2 in the touch panel 100 shown in FIG.
  • FIG. 2E shows a step of forming a bridge electrode 104 that electrically connects adjacent unit electrodes 101U ′ in the sense electrode line 101S through the opening 2c formed in the transparent short-circuit prevention layer 2. (Eighth step) is shown, and FIG. 2 (f) shows a portion other than the exposed portion for electrically connecting the terminal portion 101F formed at one end portion outside the wiring formation region R2 to the outside. The process of forming the protective film 105 on the entire surface is shown.
  • FIG. 3A shows a case where a conductive foreign material is present across the unit electrode 101U ′ of the adjacent sense electrode line 101S and the unit electrode 101U of the drive electrode line 101D in the touch panel 1 shown in FIG. FIG.
  • the conductive foreign matter is generated when the conductive film is not properly removed in the formation process of the wiring 102 and the bridge electrode 104 and the conductive film is left behind.
  • FIG. 3B is a view showing a cross section taken along line AA ′ of FIG.
  • a step is formed between the transparent short-circuit prevention layer 2 and the unit electrode 101U ′ of the sense electrode line 101S and the unit electrode 101U of the drive electrode line 101D.
  • the transparent short-circuit prevention layer 2 formed on each formation layer with the unit electrode 101U is formed in an eaves shape.
  • the film residue of the conductive film generated in the process of forming the wiring 102 and the bridge electrode 104 is cut (disconnected), so that sense that may occur in the manufacturing process is generated.
  • a short circuit between the unit electrode 101U ′ of the electrode line 101S and the unit electrode 101U of the drive electrode line 101D can be prevented.
  • the material that can be used for the formation process of the wiring 102 and the bridge electrode 104 is limited, and the film thickness and There is no need to use a special method such as a droplet discharge method in which it is difficult to control the film quality flexibly.
  • the wiring 102 and the bridge electrode 104 can be formed using IZO (Indium Zinc Oxide) other than ITO (Indium Tin Oxide), and further, for example, titanium (Ti), copper (Cu), gold (Au), aluminum (Al), tungsten (W), zinc (Zn), nickel (Ni), tin (Sn), chromium (Cr), molybdenum (Mo), tantalum (Ta), etc. It can also be formed of a metal having low resistance, a metal compound thereof, and a metal material such as metal silicide. Alternatively, a material in which the above metal materials are stacked can be used.
  • the touch panel 1 with high touch detection performance can be realized.
  • the method that can be used in the formation process of the wiring 102 and the bridge electrode 104 is not limited to a special method such as a droplet discharge method. Since the degree of freedom of selection is high, it is possible to easily realize low resistance and high transmittance of the conductive film provided in the touch panel 1, so that it is possible to realize the touch panel 1 having high touch detection performance and high transmittance.
  • each formation layer of the unit electrode 101 ⁇ / b> U and the unit electrode 101 ⁇ / b> U ′ is 0 from the end of the transparent short-circuit prevention layer 2 in a plan view. It is preferable to be formed inside 1 ⁇ m or more.
  • the transparent short-circuit prevention layer 2 formed on the respective formation layers of the unit electrode 101U and the unit electrode 101U ′ can be formed in a more complete eaves shape, and the wiring 102 and the bridge
  • the step of forming the electrode 104 even if the conductive film is not properly removed and the film residue of the conductive film is generated, the film residue of the conductive film is cut (disconnected) by the eaves-shaped stepped portion. Therefore, it is possible to prevent a short circuit between the unit electrode 101U ′ of the sense electrode line 101S and the unit electrode 101U of the drive electrode line 101D, which may occur in the manufacturing process.
  • a liquid crystal display device will be described as an example of the display device including the touch panel 1 described above.
  • FIG. 4 is a diagram illustrating an example of the 2D liquid crystal display device 10 including a touch panel.
  • a touch panel 61 corresponding to the touch panel described above includes a substrate 106, a substrate 61b provided so as to face the substrate 106, and between the substrates, and either of the substrates 106 and 61b. And a plurality of films 61a (a plurality of films provided in the touch panel 1) formed on one side.
  • the liquid crystal panel 62 includes a TFT substrate 62a, a color filter substrate 62b, a sealing material 62c for bonding the two substrates, a liquid crystal layer 62d sealed between the bonded substrates, and a TFT substrate 62a. And a polarizing plate 62e provided on the opposite side of the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f provided on the opposite side of the surface in contact with the liquid crystal layer 62d in the color filter substrate 62b.
  • touch panel 61 and the liquid crystal panel 62 are not shown, they can be bonded together using an adhesive layer (not shown) or the like to complete the 2D liquid crystal display device 10 with a touch panel.
  • FIG. 5 is a diagram illustrating an example of the liquid crystal display device 20 including an on-cell type touch panel.
  • a plurality of films 61a are formed on the color filter substrate 62b on the surface opposite to the surface in contact with the liquid crystal layer 62d. It is different from the 2D liquid crystal display device 10 provided with the touch panel shown in FIG. 4 in that a polarizing plate 62f is formed thereon and finally a substrate 61b is formed.
  • the liquid crystal display device 20 can be thinned by one less substrate provided on the touch panel side.
  • FIG. 6 is a diagram illustrating an example of a 3D liquid crystal display device 30 including a touch panel.
  • the 3D liquid crystal display device 30 is provided with a switch liquid layer panel 63 between the touch panel 61 and the liquid crystal panel 62 in addition to the touch panel 61 and the liquid crystal panel 62.
  • a lower switch substrate 63a and an upper switch substrate 63b are bonded together by a sealing material 63c, and a liquid crystal layer 63d is provided between the two substrates.
  • a common electrode 64 is formed on the surface of the lower switch substrate 63a that is in contact with the liquid crystal layer 63d, while a plurality of segment electrodes are formed on the surface of the upper switch substrate 63b that is in contact with the liquid crystal layer 63d. 65 is formed.
  • a polarizing plate 63e is provided on the surface in contact with the touch panel 61, and an adhesive layer 66 is formed on the surface in contact with the liquid crystal panel 62 in the lower switch substrate 63a. ing.
  • the switch liquid crystal panel 63 plays a role of alternately displaying a right image and a left image having binocular parallax displayed by the liquid crystal panel 62 at a predetermined cycle.
  • the liquid crystal display device provided with the touch panel has been described as an example.
  • the type of the display unit is not limited to the liquid crystal panel, and for example, an organic EL display provided with the touch panel. Of course, it may be a device or the like.
  • the bridge electrode 104 is formed in the lowermost layer, the formation layers of the unit electrode 101U ′, the unit electrode 101U, the connection portion 101C, and the terminal portion 101F, the transparent short-circuit prevention layer 2, and the like.
  • the order of lamination with the interlayer insulating film 103 is different from that of the first embodiment.
  • FIG. 7 is a diagram showing a schematic configuration of the touch panel 1a.
  • the bridge electrode 104 is formed on the lowermost layer of the substrate 106, and from above, the interlayer insulating film 103, the unit electrode 101U ′, the unit electrode 101U, the connection portion 101C, and the terminal portion 101F.
  • the formation layers and the transparent short-circuit prevention layer 2 are laminated in order.
  • the transparent short-circuit prevention layer 2 is provided on the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C formed of the same layer, as shown in FIG. Based on FIG. 16, it is different from the above-described conventional touch panel 110, and the other configuration is as described in the touch panel 110.
  • members having the same functions as those shown in the drawing of the touch panel 110 are denoted by the same reference numerals and description thereof is omitted.
  • FIG. 8 shows a cross section taken along line B1-B1 ′ of the touch panel 1a shown in FIG. 7, and a diagram of the touch panel 1a not shown in FIG. 14 shows a cross section taken along line B2-B2 ′ and a cross section taken along line B3-B3 ′ corresponding to the wiring formation region R2 shown in FIG.
  • FIG. 8A shows a step (first step) of forming the bridge electrode 104 and the terminal portion 101F that electrically connect adjacent unit electrodes 101U ′ in the sense electrode line 101S.
  • FIG. 6B shows a step (second step) of forming the interlayer insulating film 103 on the bridge electrode 104 at the intersection of the sense electrode line 101S and the drive electrode line 101D.
  • FIG. 8C shows the ITO that forms the unit electrode 101U ′ of the sense electrode line 101S, the unit electrode 101U of the drive electrode line 101D, and the connection portion 101C that connects the adjacent unit electrodes 101U in the drive electrode line 101D.
  • a step of forming a conductive layer comprising the entire surface (third step), a step of forming the transparent short-circuit prevention layer 2 on the entire surface of the conductive layer (fourth step), and the transparent short-circuit prevention layer 2 as unit electrodes.
  • the patterning is performed by exposing and developing the shape forming the 101U ′, the unit electrode 101U, and the connection portion 101C, and forming the both ends of the bridge electrode 104 and the transparent short-circuit prevention layer 2 so as to overlap in plan view.
  • each of the forming layer and the unit electrode 101U 'and the unit electrode 101U connecting portions 101C shows in a plan view, a step of forming on the inside of the transparent circuit preventing layer 2 (sixth step), the.
  • the terminal portion 101F is formed of the same layer as the bridge electrode 104, and the terminal portion 101F is patterned together when the bridge electrode 104 is patterned.
  • the electrical connection between the unit electrodes 101U ′ adjacent to each other in the bridge electrode 104 and the sense electrode line 101S is performed by forming the unit electrode 101U ′ in direct contact with the bridge electrode 104.
  • the opening 2c is formed in the transparent short-circuit prevention layer 2 formed on the unit electrode 101U ′ as in the first embodiment, and the transparent short-circuit prevention formed on the terminal portion 101F. Since it is not necessary to form an opening in the layer 2 so that the terminal portion 101F is exposed, halftone exposure is not necessary.
  • FIG. 8D shows a step (seventh step) of forming the wiring 102 for electrically connecting each of the sense electrode line 101S and the drive electrode line 101D and each terminal portion 101F.
  • the protective film 105 is formed on the entire surface other than the exposed portion of the terminal portion 101F formed at one end portion outside the wiring formation region R2 for electrical connection with the outside. The process is shown.
  • the transparent short-circuit prevention layer 2 Since there is a step between each of the forming layers of the connecting portion 101C and the connection portion 101C, the remaining film of the conductive film is cut (disconnected) at the step portion, which may occur in the manufacturing process.
  • a short circuit between the unit electrode 101U ′ of the sense electrode line 101S and the unit electrode 101U of the drive electrode line 101D can be prevented.
  • the touch panel 1a having high touch detection performance can be realized.
  • FIG. 9 is a diagram showing a schematic configuration of the touch panel 1b.
  • an interlayer insulating film 103 is formed on the entire surface of the transparent short-circuit prevention layer 2a, not only at a portion where the sense electrode line 101S and the drive electrode line 101D intersect with each other.
  • An opening 103c is provided in the portion.
  • a step is formed between the film in which the transparent short-circuit prevention layer 2a and the interlayer insulating film 103 are laminated and the respective formation layers of the unit electrode 101U ′, the unit electrode 101U, and the connection portion 101C. It has become.
  • the transparent short-circuit prevention layer 2a is formed using a silicon oxide film.
  • FIG. 10 is a cross-sectional view taken along line B1-B1 ′ of the touch panel 1b shown in FIG. 11 shows a cross section taken along line B2-B2 ′ and a cross section taken along line B3-B3 ′ corresponding to the wiring formation region R2 shown in FIG.
  • the unit electrode 101U ′ of the sense electrode line 101S, the unit electrode 101U of the drive electrode line 101D, and the connection portion 101C and the terminal portion 101F that connect the adjacent unit electrodes 101U in the drive electrode line 101D are formed.
  • a step of forming a conductive layer made of ITO or the like on the entire surface (first step), a step of forming a transparent short-circuit prevention layer 2a on the entire surface of the conductive layer (second step), and a transparent short-circuit prevention layer 2a, Etching the conductive layer using the patterned transparent short-circuit prevention layer 2a as a mask, and a patterning step (third step) to form the unit electrode 101U ′, the unit electrode 101U, the connection portion 101C, and the terminal portion 101F.
  • Unit electrode 101U ', unit electrode 101U, connecting portion 101C, and terminal portion Each of the forming layer and 01F, show in a plan view, a step of forming on the inside of the transparent circuit preventing layer 2a (step 4), the.
  • the transparent short-circuit prevention layer 2a is formed using a non-photosensitive silicon oxide film
  • the resist film is subjected to an exposure / development process and formed into a predetermined shape.
  • the transparent short-circuit prevention layer 2a is patterned using the resist film as a mask.
  • the conductive layer is side-etched, unit electrode 101U ′, unit electrode 101U, connection portion 101C, and terminal portion 101F
  • the transparent short-circuit prevention layer 2a can be formed in an eaves shape on each of the formation layers.
  • FIG. 10B shows a step (fifth step) of forming the interlayer insulating film 103 on the entire surface, and the transparent short-circuit preventing layer 2a and the interlayer insulating film 103 formed on the unit electrode 101U ′ and the terminal portion 101F.
  • a step of forming the openings 2c and 103c (sixth step).
  • an opening 103c of the interlayer insulating film 103 is formed on the unit electrode 101U ′ and the terminal portion 101F by performing a development / exposure process.
  • dry etching is performed to form the opening 2c of the transparent short-circuit prevention layer 2a on the unit electrode 101U ′ and the terminal portion 101F. Can do.
  • FIG. 10C shows a step (seventh step) of forming a wiring 102 for electrically connecting each of the sense electrode line 101S and the drive electrode line 101D to each terminal portion 101F.
  • the opening portion 2c formed on the terminal portion 101F since there is no step of removing the transparent short-circuit prevention layer 2a formed on the terminal portion 101F, as described with reference to FIG. 10B, the opening portion 2c formed on the terminal portion 101F.
  • the terminal portion 101F and the wiring 102 are electrically connected via 103c.
  • FIG. 10E shows a step of forming the bridge electrode 104 (eighth step).
  • FIG. 10E is for electrically connecting the terminal portion 101F formed at one end portion outside the wiring formation region R2 to the outside. The process of forming the protective film 105 on the entire surface other than the exposed portion is shown.
  • the interlayer insulating film 103 is formed together with the transparent short-circuit preventing layer 2a on each of the formation layers of the unit electrode 101U ′, the unit electrode 101U, the connection portion 101C, and the terminal portion 101F, The steps formed between the formation layers of the unit electrode 101U ′, the unit electrode 101U, the connection portion 101C, and the terminal portion 101F and the interlayer insulating film 103 are relatively large.
  • the conductive film is not properly removed, and even if a film residue of the conductive film occurs, the relatively large step portion exists.
  • the remaining film of the conductive film is cut (disconnected), so that a short circuit between the unit electrode 101U ′ of the sense electrode line 101S and the unit electrode 101U of the drive electrode line 101D that may occur in the manufacturing process. (Short circuit) can be prevented.
  • the touch panel 1b described above since the relatively large step portion exists, it is not necessary to perform the bridge electrode 104 formation process and the wiring 102 formation process by a special method such as a droplet discharge method. .
  • the touch panel 1b having high touch detection performance and high transmittance can be realized.
  • the first connection part is formed on the second connection part via the insulating layer and the transparent short-circuit prevention layer.
  • the opening of the transparent short-circuit prevention layer is formed on the unit electrode of the first electrode, and the adjacent unit electrodes in the first electrodes are openings of the transparent short-circuit prevention layer. It is preferable that they are electrically connected by the first connecting portion formed via the.
  • the conductive film is appropriately removed in the first connection portion forming step and the wiring forming step for electrically connecting adjacent unit electrodes in each of the first electrodes provided in the touch panel. Even if a film residue of the conductive film occurs, the transparent short-circuit preventing layer, the unit electrode of the first electrode, the unit electrode of the second electrode, and the formation layer of each of the second connection portions, In this step portion, the remaining film of the conductive film is cut (disconnected), and thus a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process. (Short circuit) can be prevented.
  • the second connection part is formed on the first connection part via the insulating layer,
  • the adjacent unit electrodes in the first electrode are preferably formed so as to be in contact with the first connection portion.
  • the transparent short-circuit preventing layer and the first electrode are formed. Since there is a step between the unit electrode, the unit electrode of the second electrode, and each of the formation layers of the second connection portion, the remaining film of the conductive film is cut off at this step portion ( Therefore, it is possible to prevent a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process.
  • the first connection part is formed on the second connection part via the insulating layer and the transparent short-circuit prevention layer.
  • the transparent short-circuit preventing layer and the insulating layer are formed on the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion, respectively.
  • the opening of the transparent short-circuit prevention layer and the opening of the insulating layer overlap at least partially in plan view, and are formed on the unit electrode of the first electrode. It is preferable that adjacent unit electrodes are electrically connected by the first connection part formed through the opening of the transparent short-circuit prevention layer and the opening of the insulating layer.
  • the transparent short circuit prevention is provided on each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion, which is a conductive film provided in the touch panel. Since the insulating layer is formed together with the layer, the step difference between the forming layer of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connecting portion and the insulating layer is compared. Become bigger.
  • a process for forming the first connection part for example, a process for forming the first connection part or a process for forming a wiring for electrically connecting adjacent unit electrodes in each of the first electrodes.
  • the insulating layer, the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion Since there is a relatively large step between each of the forming layers, the remaining portion of the conductive film is cut (disconnected) at this step portion, so that the touch panel that may occur in the manufacturing process It is possible to prevent a short circuit between the conductive films provided in the.
  • each of the formation layers of the unit electrode of the first electrode, the unit electrode of the second electrode, and the second connection portion is from an end of the transparent short-circuit prevention layer in a plan view. It is preferable to be formed inside 0.1 ⁇ m or more.
  • the said transparent short-circuit prevention layer formed on each formation layer of the unit electrode of the said 1st electrode, the unit electrode of the said 2nd electrode, and the said 2nd connection part is more complete eaves shape
  • the step of forming the first connection portion that electrically connects adjacent unit electrodes in each of the first electrodes is a step of forming another conductive film included in the touch panel. Even when the conductive film is not properly removed in the wiring formation process and the film residue of the conductive film is generated, the film residue of the conductive film is cut (disconnected) by the eaves-shaped stepped portion. Therefore, it is possible to prevent a short circuit between the conductive films provided in the touch panel that may occur in the manufacturing process.
  • the transparent short-circuit prevention layer is preferably formed of any one of a silicon nitride film, a silicon oxide film, and a silicon oxynitride film.
  • the display panel may be a liquid crystal panel including a liquid crystal layer.
  • the display panel may be an organic EL panel including an organic EL layer.
  • the transparent short-circuit prevention layer is a transparent resin layer having photosensitivity
  • the patterning of the transparent short-circuit prevention layer includes exposure and development including halftone exposure.
  • a transparent resin layer having photosensitivity can be used as the transparent short circuit preventing layer.
  • the present invention can be suitably used for a touch panel and a display device including the touch panel.
  • Liquid crystal display device 20 Liquid crystal display device (display device) 30 Liquid crystal display device (display device) 101D Drive electrode line (second electrode) 101S sense electrode line (first electrode) 101U, 101U ′ unit electrode 101C connection part (second connection part) 101E Connection electrode 101F Terminal portion 102 Wiring 103 Interlayer insulating film (insulating film) 103c opening 104 first bridge electrode (first connecting portion) 105 Protective film 106 Substrate (insulating substrate)

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

Selon l'invention, une couche de prévention de court-circuit transparente (2) est installée sur des électrodes unitaires (101U, 101U') et une partie de connexion (101C) qui sont formées sur la même couche. En vue plane, la couche respective dans laquelle les électrodes unitaires (101U, 101U') et la partie de connexion (101C) sont formées est formée dans la couche de prévention de court-circuit transparente (2). En conséquence, un court-circuit entre des films conducteurs d'un panneau tactile qui peut se produire durant un processus de fabrication peut être empêché, et le panneau tactile peut offrir des performances de détection tactile élevées.
PCT/JP2012/072393 2011-09-09 2012-09-03 Panneau tactile, son procédé de fabrication et dispositif d'affichage Ceased WO2013035677A1 (fr)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013279A1 (fr) * 2009-07-31 2011-02-03 シャープ株式会社 Substrat d'électrode, procédé de fabrication de substrat d'électrode et dispositif d'affichage d'image
JP2011128674A (ja) * 2009-12-15 2011-06-30 Sony Corp 静電容量型入力装置およびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013279A1 (fr) * 2009-07-31 2011-02-03 シャープ株式会社 Substrat d'électrode, procédé de fabrication de substrat d'électrode et dispositif d'affichage d'image
JP2011128674A (ja) * 2009-12-15 2011-06-30 Sony Corp 静電容量型入力装置およびその製造方法

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