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WO2013018235A1 - Procédé et système permettant de déterminer les défauts de surface d'un modèle d'objet - Google Patents

Procédé et système permettant de déterminer les défauts de surface d'un modèle d'objet Download PDF

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Publication number
WO2013018235A1
WO2013018235A1 PCT/JP2011/068338 JP2011068338W WO2013018235A1 WO 2013018235 A1 WO2013018235 A1 WO 2013018235A1 JP 2011068338 W JP2011068338 W JP 2011068338W WO 2013018235 A1 WO2013018235 A1 WO 2013018235A1
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WO
WIPO (PCT)
Prior art keywords
rate
change
determining
pixel
threshold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/068338
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English (en)
Inventor
Alan Sullivan
Arun R. Yoganandan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Mitsubishi Electric Research Laboratories Inc
Original Assignee
Mitsubishi Electric Corp
Mitsubishi Electric Research Laboratories Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Mitsubishi Electric Research Laboratories Inc filed Critical Mitsubishi Electric Corp
Priority to PCT/JP2011/068338 priority Critical patent/WO2013018235A1/fr
Priority to JP2013542708A priority patent/JP5666013B2/ja
Priority to CN201180072612.6A priority patent/CN103733223B/zh
Priority to DE112011105499.8T priority patent/DE112011105499T5/de
Publication of WO2013018235A1 publication Critical patent/WO2013018235A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4069—Simulating machining process on screen
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35303—Dry run, compare simulated output with desired finished profile, alarm, inhibit
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention relates generally to a simulation of a machining process, and more particularly to identifying defects of a surface of an object from a model of the object rendered during the simulation.
  • NC machining is of fundamental importance in computer aided design (CAD) and computer aided manufacturing (CAM).
  • CAD computer aided design
  • CAM computer aided manufacturing
  • a computer model of a workpiece is edited with a computer representation of an NC machining tool and a set of NC machining tool motions to simulate the machining process.
  • the workpiece model and tool representation can be visualized during the simulation to detect potential collisions between parts, such as the workpiece and the tool holder, and to verify the final shape of the workpiece after the simulation.
  • the final shape of the workpiece is affected by the selection of the tool and the tool motions. Instructions for controlling these motions are typically generated using a computer aided manufacturing (CAM) system from a graphical representation of the desired final shape of the workpiece.
  • CAM computer aided manufacturing
  • the motions are typically implemented using numerical control programming language, also known as preparatory code or G-Code, see the following standards RS274D and DIN 66025/ISO 6983.
  • the G-Code generated by the CAM system may not produce an exact replication of the desired shape.
  • the movement of the NC tool is governed by motors of the NC machining system, which have limited speeds, ranges of motion, and abilities to accelerate and decelerate, so that the actual tool motions may not exactly follow the NC machining instructions.
  • Discrepancies between the actual final shape of the workpiece and the desired final shape of the workpiece can be very small, and difficult to see. In some situations, these discrepancies result in undesirable gouges or nicks in the surface of the final shape of the workpiece with sizes on the order of a few micrometers in depth and width, and tens of micrometers in length.
  • a set of NC machining instructions is tested by machining a test workpiece made of a softer, less expensive material prior to machining the desired part. If visual inspection of the test workpiece locates undesirable discrepancies in the test workpiece, then the NC machining instructions are modified accordingly.
  • NC machining A particularly important application of NC machining is the fabrication of molds and dies. Molds and dies are produced in a relative low volume by NC machining for later use in high volume manufacturing. Thus, the defects in molds and dies can be undesirably transferred to the manufactured parts. Molds and dies are frequently used to form parts that have smooth, slowly varying "free-form" surfaces that have a high quality aerodynamic, tactile or aesthetic finish. For example, a modern tooth brush is cast from plastic using a mold and has a complex free-form shape that provides both aesthetic and tactile advantages. Likewise a die for stamping automobile body panels has a smooth free-form shape that can greatly affect aerodynamic drag and hence fuel economy, as well as the aesthetic appeal of the vehicle to consumers.
  • a die to stamp large parts that have a free-form shape can be very time consuming to produce due to both its size (1000's of millimeters) and because free-form surface are milled using relatively small tools (order of millimeters) requiring a large number of machining instructions (often millions).
  • the mold is typically large to enable the simultaneous production of many parts to improve manufacturing efficiency.
  • the NC machining simulator is capable of reproducing very small defects, e.g., 10s to 100s of microns, in very large simulated parts, e.g., 1000s of millimeters.
  • very small defects e.g., 10s to 100s of microns
  • very large simulated parts e.g., 1000s of millimeters.
  • the problem of locating these small defects is quite challenging. For example, a human operator must painstakingly explore the entire simulated mold at a fine scale, which is time consuming and prone to errors.
  • One method determines the NC machining defects by analyzing the path of the machining tool.
  • a vector is computed for a point on the path that is normal to the plane containing two vectors joining the point to the previous point and next point, respectively.
  • the orientation of the normal vector relative to a side of the plane is determined by the sign of the curvature the path.
  • the normal vector from consecutive points should be nearly parallel with the same sign of curvature.
  • that method is limited only to defects caused by local variations in the tool path because that method only considers the relationship between consecutive points on the machining path, and does not consider defects caused by adjacent paths of the machining tools and/or adjacent regions on the surface.
  • Embodiments of the invention are based on the realization that the dependency of cusp angle on cut depth is reflected in an orientation of a surface of the object and/or a model of the object rendered during the simulation.
  • the orientation of the surface and, in particularly, a rate of changes in the orientation, can be used to determine defects of the model of the object. For example, regions of the simulated surface that are less smooth can be identified and highlighted.
  • Embodiments of the invention determine defects of a surface of an object based on orientations and rate of change in the orientation of the surface.
  • the rate of change is determined based on normal vectors to the surface and the defects of the surface are identified based on the rate of change and a threshold.
  • one embodiment discloses a method for determining a defect of a surface of an object due to a machining process applied to the object, wherein the surface is generated from a model of the object by a simulation of the machining process, comprising the steps of: determining, at each pixel of the model of the surface, orientations of the surface; determining, for each pixel of the model of the surface, a rate of change in the orientations of the surface; and comparing the rate of change to at least one threshold to identify the defects of the surface.
  • the threshold is determined based on the machining process
  • Another embodiment discloses a method for determining a defect of a surface of an object due to a machining process applied to the object, wherein the surface is generated from a model of the object by a simulation of the machining process, comprising the steps of: determining normal vectors at each pixel of the surface; determining, for each pixel of the surface, a rate of change in an orientation of the surface based on differences between a normal vector at a pixel and normal vectors at neighboring pixels, wherein defect of the surface is identified by a value of the rate of change; and highlighting the defect on a display.
  • Yet another embodiment discloses a system for determining a defect of a surface of a model of an object, comprising: means for generating the surface by a simulation of a machining process; means for determining, at each pixel of the model of the surface, orientations of the surface based on a normal vector at a pixel; means for determining, for each pixel of the model of the surface, a rate of change in the orientations of the surface; and means for comparing the rate of change to at least one threshold to identify the defects of the surface.
  • the threshold is determined based on the machining process
  • Figure 1A shows a ball end milling cutter used to fabricate free-form surfaces during numerically controlled (NC) machining
  • Figure IB shows an object milled by the ball end milling cutter of Figure 1A
  • Figure 2 is a side view of the object milled by the ball end milling cutter
  • Figure 3 is a graph of dependencies of cusp angle on a depth of the cut
  • Figure 4 is a block diagram of a method for determining defects of a surface of the object according to an embodiment of an invention
  • Figure 5 is a block diagram of a method for highlighting defects of the surface while rendering the surface of the object according an embodiment of the invention
  • Figure 6 is a block diagram of an example of determining a rate of change of orientations of the surface according an embodiment of the invention.
  • FIG. 7 is a block diagram of an example of determining a rate of change of orientations of the surface according an embodiment of the invention.
  • Figure 7 is an isometric view of an example of a model of the object with highlighted portions of the surface with defects.
  • Figure 8 is a block diagram of an example of an embodiment of the invention.
  • Figure 1A shows a ball end milling cutter 100 commonly used to fabricate free-form surfaces during numerically controlled (NC) machining.
  • a smooth hemispheric bottom 101 of a cutter 100 is capable of machining smooth surfaces.
  • Figure IB shows an object 102 milled by three linear cuts 103, 104 and 105 of the ball end milling cutter 100 producing semi-cylindrical surfaces. Between each of the cuts there is a triangular cusp formed by an intersection of each pair of cuts. For example between cuts 103 and 104 there is a cusp 106.
  • Figure 2 is a side view of an object 201 milled by four cuts 202-205 of the ball end milling cutter.
  • the cuts 202, 203 and 205 have an identical depth indicated by a dashed line 206.
  • the cut 204 is deeper than the cuts 202, 203 and 205.
  • Each pair of the cuts meets at the cusp.
  • the cut 202 and the cut 203 meet at the cusp 207 and the cut 203 and the cut 204 meet at the cusp 208.
  • an angle 220 of cusp 208 is greater than an angle 222 of the cusp 207.
  • a distance between adjacent cuts is a step over distance 230, typically determined by an operator of the CAM system during generation of the machining instructions.
  • Figure 3 shows dependency of the angle of cusps on the depth of the cut.
  • the angle of cusps is determined between two cuts 0.2 mm apart, i.e., the tool moves in incremental distance steps of 0.2 mm, using a ball end mill cutting tool with a diameter of 4 mm. The angle increases with an increase of the depth of the cut.
  • Embodiments of the invention are based on the realization that the dependency of cusp angle on cut depth depends on an orientation of a surface of the object and/or a model of the object rendered during the simulation.
  • the orientation of the surface and, in particularly, a rate of changes in the orientation, can be used to determine defects of the model of the object. For example, regions of the simulated surface that are rougher can be identified and highlighted.
  • Figure 4 shows a block diagram of a method 400 for determining defects of the surface of the model of the object.
  • the surface is a whole surface of the object, a portion of the whole surface of the object, a visible surface from a particular point of view, regions of the object having high probability of defects, and/or combinations thereof.
  • the model of the object is produced from a model of original object based on a set of machining instruction. Steps of the method are performed by a processor 401, as known in the art.
  • the surface 425 of the model of the object is simulated by a rendering module 420 based on underlying representation 410 of the surface of the object.
  • a surface orientation module 430 determines orientations 435 of the surface at each pixel of the surface.
  • An orientation comparison module 440 determines and compares a rate of change 446 in the orientations of the surface to one or more thresholds 445 to determine defects of the surface.
  • One embodiment compares the rate of change to a minimal threshold, i.e., portions of the surface corresponding to the rate of change in the orientations of the surface with values above the minimum threshold are identified. Additionally or alternatively, another embodiment compares the rate of changes to a maximal threshold, i.e., portions of the surface corresponding to the rate of change in the orientations of the surface with the values below the maximal threshold are identified.
  • the minimal and/or maximal thresholds are determined based on a shape of the original surface, a size of the tool, the machining instructions and/or a desired accuracy.
  • the minimal threshold facilitates differentiation between the cusps of the smooth regions over a majority of the surface of the simulated model of the object and the actual defects of the surface that typically occur more infrequently.
  • the angle of the cusp is a function of dimension, e.g., a diameter, of the tool and the step over distance.
  • the step over distance is selected based on the diameter of the tool and desired smoothness of the surface, i.e., a height of the cusp.
  • a desired angle of the cusp is known in advance of a machining process.
  • the machining process includes, but not limited to, turning, milling, and drilling operations. Depending on an operation, the machining process further includes selecting a machining tool, e.g., a type of the tool such as a single point tool or a multiple-cutting-edge tool, shape, materials, and dimensions of the tools, determining directions of the motion of the tools, the step over distance of the tools, and determining machining instructions for the operation. In turn, the machining instructions include an order of operations and a path for the tool.
  • a machining tool e.g., a type of the tool such as a single point tool or a multiple-cutting-edge tool, shape, materials, and dimensions of the tools.
  • the machining instructions include an order of operations and a path for the tool.
  • the machining process controls the desired accuracy of the surface.
  • the step over distance for roughing cuts can be greater than the step over distance for finishing cuts.
  • a value of the step over distance is just a one example of controlling the smoothness of the surface by the machining process. Accordingly, several embodiments of the invention determine the minimal and/or the maximal threshold based on the machining process that generates the surface of the object. Similarly, some embodiments determine the thresholds based on the simulation of the machining process that generates the surface of the model of the object.
  • one embodiment determines the minimal threshold based on a value of the desired angle of the cusp.
  • One variation of this embodiment determines the minimal threshold by increasing the value of the desired angle of the cusp by a margin dependent on a magnitude of tolerable variations in the angle of the cusp.
  • the minimal threshold can be determined based on a fact that the defects of the surface are relatively infrequent. For example, one embodiment determines a histogram of a number of pixels versus the rate of change of normal vectors, described below, and selects the minimal threshold such that the majority of pixels have the rate of change less than the threshold.
  • Output 455 of the method is processed by an output module 450.
  • the output module stores indentified portions of the surface with defects in a memory (not shown). Additionally or alternatively, the output module displays the model of the object on a display device highlighting the portions 701 of the surface with defects, as shown in Figure 7.
  • a normal vector at a pixel has a length equal one and is perpendicular to the surface at a location corresponding to the pixel.
  • a vector 209 is the normal vector associated with the cut 203 adjacent to the cusp 208
  • a vector 210 is the normal vector associated with the cut 204 adjacent to the cusp 208.
  • the cusp angle is then determined by computing the vector dot product of the normal vectors of the surfaces on each edge of the cusp.
  • the dot product is a cosine of the cusp angle.
  • On-Line Processing Figure 5 shows a method for highlighting defects of the surface of the model of the object while rendering the surface of the object.
  • the rendering 502 of the simulated surface of the object depends in the underlying representation of the surface 501.
  • the surface may be represented by Boolean difference between distance fields that represent an original surface and distance fields that represent the volume swept by the machining tool during the cutting.
  • the surface is rendered by a conventional ray casting method where mathematical rays associated with each pixel are projected onto the simulated surface from the viewing direction.
  • the color and brightness of each ray that intersects the surface is determined by the surface color and the normal vector at a point of intersection.
  • Another representation of the surface 501 is a mesh of geometric primitives such as triangles.
  • the triangle mesh is rendered using a graphics application programming interface (API) such as OpenGL.
  • API graphics application programming interface
  • the color and the normal vector are defined at each vertex of a triangle interpolated by the graphics implementation across the pixels spanned by the triangle according to viewing conditions.
  • the normal vectors are used to compute the brightness of the pixel as though the surface was lit by a light located at a position above the surface.
  • one conventional computer lighting technique determines the brightness of the pixel as a sum of an ambient component independent of the normal vectors, a diffuse component proportional to the vector dot product between the normal vector and a vector from the surface to the light position, and a specular component proportional to the dot product between the surface normal vector and a vector halfway between the viewing direction and the light direction, raised to a power determined by the shininess of the surface.
  • the normal vector for each pixel in the image of the surface is used to compute the brightness of the pixel, and then discarded.
  • the resultant pixel values are stored in a memory called a color framebuffer, and ultimately are displayed, stored or transmitted.
  • one embodiment of the invention instead of discarding the normal vectors determined to compute the brightness of the pixels, reuses the normal vectors for indentifying and/or highlighting the defects of the surface.
  • the normal vectors 503 for every pixel in the image of the surface are stored into a normal framebuffer 504. After all of the normal vectors have been stored, the normal vectors are processed to indentify and/or highlight defects.
  • the rates of change 446 of the normal vectors are determined based on central differences between the normal vectors. Specifically, the rate of change in the orientation of the surface at a pixel is determined as the difference between the normal vector at the pixel and the normal vectors at neighbor pixels, e.g., the normal vectors at pixels adjacent to the pixel.
  • Figure 6 shows an example of determining the rate of change of the orientation of the surface at a pixel 602, e.g., a central pixel 602 in a window 601, based on the central difference between the normal vector at the pixel 602 and the normal vectors at the adjacent pixels 602-610.
  • the window 601 moves vertically 620 and/or horizontally 630 over all pixels of the model of the surface to determine the rate of change for each pixel.
  • the window 601 covers a 3x3 grid of normal vectors selected from the normal framebuffer.
  • the normal vector at pixel 602 is
  • i is an index of the normal vectors in the window ranging, e.g., from 1 to 8
  • x, y, and z identify three dimensional (3D) components of the normal vectors along the axes x, y, and z. Then the rate of change RQ of the normal vector components at pixel location 602 is determined by
  • j indicates the component of the vector, i.e., x, y, or z.
  • the rate of change of the normal vector is, e.g., a square root of the sum of the squares
  • Various embodiments of the invention use different thresholds to identify defects of the surface.
  • the regions of the surface with the rate of change values below the minimal threshold 507 correspond to a smooth surface and/or to a surface with cusps between non-defective cuts.
  • the regions of the surface with the rate of change values above the maximal threshold 508 correspond to edges of the object and/or to deep cuts associated with non-freeform regions of the surface. Therefore, in one embodiment, only pixels corresponding to values of the rate of change in a defect range, i.e., between the minimal and the maximal thresholds, are identified as possible defect regions of the surface.
  • one embodiment changes 509 colors of pixels, e.g., in a red color, corresponding to values of the rate of change in the defect range, while colors of other pixels are computed normally 506 using the values stored in the normal framebuffer.
  • Another embodiment sets the color of pixels based on the rate of change using a look-up table. For example, pixels with rate of change below the minimal threshold are colored blue, pixels with the rate of change within the defective range are colored red, and pixels with rate of change above the maximal threshold are colored green.
  • look-up table can be applied to enhance visual identification of the defects.
  • Off-Line Processing Some embodiments identify defects of the surface in a process separate from the process of rendering and/or determining the brightness of the pixels. Those embodiments account for a fact that in some applications the density of pixels is insufficient to detect small defects unless the surface is enlarged during the rendering. Similarly, the insufficient density of the pixels can cause defects to be missed because of insufficient sampling of the surface.
  • some defects of the surface are not visible from the direction of view in the rendered model.
  • this limitation is overcome by observing the simulated surface over a wide range of angles at a close scale.
  • another embodiment identifies the defects of the surface after the simulation is complete and independent of the viewing of the simulation results.
  • the embodiment renders portions of the surface into an off-screen normal buffer at a high resolution sufficient to guarantee the defects larger than a minimal size can be identified.
  • the embodiment examines the simulated surface from a range of points of view, e.g. along each of the +x, -x, +y, -y, +z and -z axis.
  • one embodiment renders a portion of the surface coarsely to determine a dominant orientation of that portion of the surface, and renders the surface from the dominant orientation.
  • not all pixels with the rate of change of the orientation of the surface between the minimal and the maximal thresholds correspond to the defects of the surface.
  • Some pixels can correspond to defects in the rendering process, such that the surface normal for a pixel is incorrectly determined. Therefore, one embodiment of the invention initially renders a portion of the surface coarsely and performs low resolution defect detection. The regions of the surface where defects are identified at low resolution are then locally re-rendered at high resolution to improve the detection of the defects identified by a line of pixels along edge s of the machining cut.
  • one embodiment uses the normal framebuffer to hold information about the high resolution rendering of the surface.
  • Alternative embodiments partition the surface into overlapping or adjacent patches to reduce memory requirements without compromising the quality of defect identification.
  • the defect list is presented in a text format describing location and character of the possible defect. It is advantageous to use a user interface such that the user can selects an entry in the defect list to have the simulated image reorient, center and zoom into the defect region.
  • Figure 8 shows an example of another embodiment of the invention.
  • a set of machining instructions 801 is provided to an NC machining controller 802 either as a file over a network, from a CD or DVD, or by other means known in the art.
  • the controller 802 includes of a processor 803, memory 804 and a display 805 for showing the operation of the machine.
  • the processor perform a machining simulation and executes a method according to embodiments of the invention, e.g., the method 400, to produce an image 507 identifying the defects of the machining simulation on the display 505.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
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  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
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Abstract

Des modes de réalisation de l'invention concernent un procédé permettant de déterminer les défauts d'une surface d'un modèle d'un objet générés à partir d'un modèle d'un objet original par une simulation d'un processus d'usinage. Le procédé détermine des orientations et un taux de changement dans l'orientation de la surface sur la base de vecteur normaux à la surface et identifie les défauts de la surface sur la base du taux de changement et d'un seuil. Le seuil est déterminé sur la base du processus d'usinage.
PCT/JP2011/068338 2011-08-04 2011-08-04 Procédé et système permettant de déterminer les défauts de surface d'un modèle d'objet Ceased WO2013018235A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2011/068338 WO2013018235A1 (fr) 2011-08-04 2011-08-04 Procédé et système permettant de déterminer les défauts de surface d'un modèle d'objet
JP2013542708A JP5666013B2 (ja) 2011-08-04 2011-08-04 物体のモデルの表面の欠陥を判断するための方法およびシステム
CN201180072612.6A CN103733223B (zh) 2011-08-04 2011-08-04 用于确定对象模型的表面缺陷的方法和系统
DE112011105499.8T DE112011105499T5 (de) 2011-08-04 2011-08-04 Verfahren und System zum Bestimmen von Defekten einer Oberfläche eines Modells eines Objekts

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PCT/JP2011/068338 WO2013018235A1 (fr) 2011-08-04 2011-08-04 Procédé et système permettant de déterminer les défauts de surface d'un modèle d'objet

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WO2013018235A1 true WO2013018235A1 (fr) 2013-02-07

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JP7525259B2 (ja) 2019-12-26 2024-07-30 ファナック株式会社 シミュレーション装置、数値制御装置、及びシミュレーション方法
CN114372965B (zh) * 2021-12-29 2025-07-04 精芯智能装备(苏州)有限公司 晶圆预对位方法和装置、电子设备、存储介质
CN116977268A (zh) * 2023-04-12 2023-10-31 深圳市创势互联科技有限公司 设备缺陷的检测方法、装置、设备及存储介质

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