[go: up one dir, main page]

WO2013014321A3 - Magnetometer mems cmos device including a multiwire compass - Google Patents

Magnetometer mems cmos device including a multiwire compass Download PDF

Info

Publication number
WO2013014321A3
WO2013014321A3 PCT/ES2012/070569 ES2012070569W WO2013014321A3 WO 2013014321 A3 WO2013014321 A3 WO 2013014321A3 ES 2012070569 W ES2012070569 W ES 2012070569W WO 2013014321 A3 WO2013014321 A3 WO 2013014321A3
Authority
WO
WIPO (PCT)
Prior art keywords
resonating element
magnetometer
shielding electrode
multiwire
compass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/ES2012/070569
Other languages
Spanish (es)
French (fr)
Other versions
WO2013014321A8 (en
WO2013014321A2 (en
Inventor
Josep MONTANYÀ SILVESTRE
Juan José VALLE FRAGA
Laura BARRACHINA SARALEGUI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baolab Microsystems SL
Original Assignee
Baolab Microsystems SL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baolab Microsystems SL filed Critical Baolab Microsystems SL
Publication of WO2013014321A2 publication Critical patent/WO2013014321A2/en
Publication of WO2013014321A3 publication Critical patent/WO2013014321A3/en
Anticipated expiration legal-status Critical
Publication of WO2013014321A8 publication Critical patent/WO2013014321A8/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measuring Magnetic Variables (AREA)
  • Pressure Sensors (AREA)

Abstract

The systems and methods described provide for a magnetometer device that includes a resonating element having an inner wire enclosed in a shielding electrode. The shielding electrode decreases the effect of interference on the resonating element. A sensing electrode is disposed proximate to the resonating element. The device further includes a source for generating current that is connected to the resonating element. The current when applied through the inner wire causes a displacement of the resonating element. The magnetometer device measures a magnetic field of the resonating element as a capacitance variation between the shielding electrode and the sensing electrode. The systems and methods herein provide for an accelerometer device that includes a resonating element having an inner core of dielectric material enclosed in a shielding electrode. The accelerometer device measures an acceleration of the resonating element as a capacitance variation between the shielding electrode and the sensing electrode.
PCT/ES2012/070569 2011-07-25 2012-07-25 Methods and systems for mems cmos devices including a multiwire compass Ceased WO2013014321A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201161511324P 2011-07-25 2011-07-25
US61/511,324 2011-07-25
US201261606091P 2012-03-02 2012-03-02
US61/606,091 2012-03-02
US201261646664P 2012-05-14 2012-05-14
US61/646,664 2012-05-14

Publications (3)

Publication Number Publication Date
WO2013014321A2 WO2013014321A2 (en) 2013-01-31
WO2013014321A3 true WO2013014321A3 (en) 2013-08-08
WO2013014321A8 WO2013014321A8 (en) 2014-04-17

Family

ID=47018233

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES2012/070569 Ceased WO2013014321A2 (en) 2011-07-25 2012-07-25 Methods and systems for mems cmos devices including a multiwire compass

Country Status (2)

Country Link
TW (1) TW201319604A (en)
WO (1) WO2013014321A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI848200B (en) * 2020-01-08 2024-07-11 西班牙商奈努勝公司 Mems device built using the beol metal layers of a solid state semiconductor process

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040158439A1 (en) * 2002-12-10 2004-08-12 Kim Kyoung Soo Magnetic field and acceleration sensor and method for simultaneously detecting magnetism and acceleration
US20060076947A1 (en) * 2004-06-07 2006-04-13 General Electric Company Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
US20070030001A1 (en) * 2003-09-23 2007-02-08 Brunson Kevin M Resonant magnetometer device
US7639104B1 (en) * 2007-03-09 2009-12-29 Silicon Clocks, Inc. Method for temperature compensation in MEMS resonators with isolated regions of distinct material
US20100032789A1 (en) * 2008-08-07 2010-02-11 Infineon Technologies Ag Passive temperature compensation of silicon mems devices
US20100295138A1 (en) * 2009-05-20 2010-11-25 Baolab Microsystems Sl Methods and systems for fabrication of mems cmos devices
EP2267893A1 (en) * 2009-06-08 2010-12-29 STmicroelectronics SA Bulk acoustic wave resonator with partially filled cavities
DE102009046515A1 (en) * 2009-11-09 2011-05-12 Robert Bosch Gmbh Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate
EP2333572A1 (en) * 2009-12-10 2011-06-15 STMicroelectronics S.r.l. Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040158439A1 (en) * 2002-12-10 2004-08-12 Kim Kyoung Soo Magnetic field and acceleration sensor and method for simultaneously detecting magnetism and acceleration
US20070030001A1 (en) * 2003-09-23 2007-02-08 Brunson Kevin M Resonant magnetometer device
US20060076947A1 (en) * 2004-06-07 2006-04-13 General Electric Company Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities
US7639104B1 (en) * 2007-03-09 2009-12-29 Silicon Clocks, Inc. Method for temperature compensation in MEMS resonators with isolated regions of distinct material
US20100032789A1 (en) * 2008-08-07 2010-02-11 Infineon Technologies Ag Passive temperature compensation of silicon mems devices
US20100295138A1 (en) * 2009-05-20 2010-11-25 Baolab Microsystems Sl Methods and systems for fabrication of mems cmos devices
EP2267893A1 (en) * 2009-06-08 2010-12-29 STmicroelectronics SA Bulk acoustic wave resonator with partially filled cavities
DE102009046515A1 (en) * 2009-11-09 2011-05-12 Robert Bosch Gmbh Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate
EP2333572A1 (en) * 2009-12-10 2011-06-15 STMicroelectronics S.r.l. Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
DE LOS SANTOS H J ET AL: "RF MEMS for ubiquitous wireless connectivity: Part 1 - fabrication", IEEE MICROWAVE MAGAZINE, IEEESERVICE CENTER, PISCATAWAY, NJ, US, vol. 5, no. 4, 1 December 2004 (2004-12-01), pages 36 - 49, XP011124827, ISSN: 1527-3342, DOI: 10.1109/MMW.2004.1380277 *
FRANKLIN C CHIANG ET AL: "Microfabricated Flexible Electrodes for Multiaxis Sensing in the Large Plasma Device at UCLA", IEEE TRANSACTIONS ON PLASMA SCIENCE, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 39, no. 6, 1 June 2011 (2011-06-01), pages 1507 - 1515, XP011355079, ISSN: 0093-3813, DOI: 10.1109/TPS.2011.2129601 *
FUJIMORI T ET AL: "Above-IC integration of capacitive pressure sensor fabricated with CMOS interconnect processes", MICRO ELECTRO MECHANICAL SYSTEMS, 2007. MEMS. IEEE 20TH INTERNATIONAL CONFERENCE ON, IEEE, PI, 1 January 2007 (2007-01-01), pages 43 - 46, XP031203762, ISBN: 978-1-4244-0950-1, DOI: 10.1109/MEMSYS.2007.4433008 *

Also Published As

Publication number Publication date
TW201319604A (en) 2013-05-16
WO2013014321A8 (en) 2014-04-17
WO2013014321A2 (en) 2013-01-31

Similar Documents

Publication Publication Date Title
WO2014149416A3 (en) Magnetic field sensor having an externally accessible coil
WO2013008205A3 (en) Electrical current sensor with grounded magnetic core
EP2568298A3 (en) Sensor devices and methods for use in sensing current through a conductor
EP4152012A3 (en) Packaging for an electronic circuit
EP3087501A4 (en) Determining an active persona of a user device
EP2787411A3 (en) Electronic device having cover
EP2765491A3 (en) A touch pen, electronic device for recognizing the touch pen, and method of operating the electronic device
EP3032983A4 (en) Magnetic related features of a cover for an electronic device
WO2012150567A8 (en) A catheter with electromagnetic position sensors and a location system for catheters and guide wires
WO2014144261A3 (en) Electric field sensing and e field visualization
EP3058588A4 (en) Magnetic shielded integrated circuit package
EP2991066A4 (en) External compensation sensing circuit, sensing method of same, and display device
EP2752675A4 (en) MTJ TRIPLE AXIS MAGNETIC FIELD SENSOR AND ITS ENCAPSULATION METHOD
GB2517355A (en) Sensing the magnetic field of the earth
EP2568300A3 (en) Sensor devices and methods for use in sensing current through a conductor
MX2013015292A (en) System and method to measure or generate an electrical field downhole.
MX349278B (en) Sensor devices and methods for use in sensing current through a conductor.
MY185451A (en) Single magnet fluid densitometer
WO2013182160A3 (en) Wireless multifunctional apparatus and electronic device
WO2015076756A8 (en) An apparatus and method for tracking a device
WO2014055732A3 (en) Shieldings for metal detector heads and manufacturing methods thereof
AU2013408413A8 (en) Fiber optic current monitoring for electromagnetic ranging
EP2762835A3 (en) Travel mode determination devices and methods for controlling a travel mode determination device
EP3090474A4 (en) Retractable cord reel charging an electronic device
TW201612543A (en) Dual-functional resonant based magnetic field sensor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12772342

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12772342

Country of ref document: EP

Kind code of ref document: A2