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WO2013095062A1 - Procédé de fabrication d'un diviseur de faisceau de polarisation - Google Patents

Procédé de fabrication d'un diviseur de faisceau de polarisation Download PDF

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Publication number
WO2013095062A1
WO2013095062A1 PCT/KR2012/011313 KR2012011313W WO2013095062A1 WO 2013095062 A1 WO2013095062 A1 WO 2013095062A1 KR 2012011313 W KR2012011313 W KR 2012011313W WO 2013095062 A1 WO2013095062 A1 WO 2013095062A1
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Prior art keywords
light
particles
polarization splitting
light absorbing
coating solution
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PCT/KR2012/011313
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English (en)
Korean (ko)
Inventor
박정호
김태수
김재진
이종병
정진미
신부건
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LG Chem Ltd
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LG Chem Ltd
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Priority to CN201280064182.8A priority Critical patent/CN104011570A/zh
Priority to JP2014548681A priority patent/JP2015502581A/ja
Priority claimed from KR1020120151109A external-priority patent/KR101377296B1/ko
Publication of WO2013095062A1 publication Critical patent/WO2013095062A1/fr
Priority to US13/971,561 priority patent/US20140009823A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements

Definitions

  • the present application relates to a method of manufacturing a polarization splitting element, a polarization splitting element, a light irradiation apparatus, a light irradiation method, and a method of manufacturing the aligned photoalignment film.
  • a liquid crystal alignment film used to arrange liquid crystal molecules in a certain direction has been applied to various fields.
  • a photo-alignment film which can arrange
  • a photo-alignment film may be prepared by orientationally ordering the photosensitive material by irradiating a layer of photosensitive material with light, for example, linearly polarized light.
  • polarization splitting elements In order to irradiate linearly polarized light onto the optical alignment layer, various kinds of polarization splitting elements may be used, and the polarization splitting elements may be manufactured by various methods.
  • an antireflection layer is formed on a substrate, a photoresist layer is formed on the antireflection layer, and the photosensitive agent layer is selectively exposed using a laser and then developed.
  • a method of manufacturing an ultraviolet polarization splitting device by forming a grid pattern and depositing a metal on the grid pattern is disclosed.
  • the present application provides a method of manufacturing a polarization splitting element, a polarization splitting element, a light irradiation apparatus, a light irradiation method, and a method of manufacturing the aligned photoalignment film.
  • An exemplary method of manufacturing a polarization splitting device may include forming irregularities on a substrate by a solution process, and the polarization splitting device thus produced may generate linearly polarized light in an ultraviolet region wavelength band.
  • the term "ultraviolet region” as used herein refers to a region of light having a wavelength of, for example, 250 to 350 nm, 270 to 330 nm, and 290 to 310 nm.
  • the method of manufacturing the ultraviolet polarization splitting device may include forming an iron part including a light absorbing material by a solution process.
  • the solution process refers to a coating process using a solution, and in one exemplary form, the solution process may include a Sol-Gel process.
  • a solution in a sol (Sol) state that is, a solution in which fine colloidal particles generated through hydrolysis and poly / condensation reactions using an organic metal precursor as a starting material are dispersed on an organic dispersant.
  • the sol is thickened to a certain concentration or more to form a solid network structure to gel the gel (Gel) of the solidified state
  • the process of coating As the coating solution in a sol state containing the light-absorbing nanoparticles or the precursor of the light-absorbing material may be applied, it may mean a coating process of forming a silicon coating layer by adding water to gel.
  • the iron part including the light absorbing material can be formed by a solution process without vacuum depositing the light absorbing material on the substrate, expensive vacuum deposition equipment is not required, and thus the economic efficiency of the process is improved, and the large area of the process can be improved. It can be implemented more efficiently.
  • FIG. 1 is a view sequentially showing a method of manufacturing an exemplary ultraviolet polarization splitting device
  • FIG. 2 is a view sequentially showing another embodiment of a method of manufacturing an exemplary ultraviolet polarizing splitting device.
  • the convex portion 141 forms a resist 120 in the form of a lattice having a predetermined gap on the substrate 110, and the coating solution is formed in the gap of the lattice. It can form by apply
  • the concave portion 142 formed by the convex portion 141 is coated with a thickness not exceeding the height of the convex portion 141. Since it is possible, the formation of the unevenness 140 having a desired pitch or height is easy, and since the etching process is not additionally necessary, efficiency can be increased in terms of economics of the process.
  • the term "lattice” has two or more grooves in the plane at regular intervals, whereby a plurality of concave portions 142 and convex portions 141 are formed in a stripe-shaped pattern arranged in parallel with each other. 140 means a structure.
  • the convex portion 241 includes a light absorbing material by applying the coating solution 220 to the substrate 210 by the above-described solution process.
  • a layer 220 of the coating solution may be formed, and a resist 230 may be formed on the layer 220 of the coating solution, and then formed by etching.
  • resist refers to an organic polymer material or a metal thin film coated on a portion where etching is not desired in order to etch only a desired portion.
  • the coating solution 130, 220 may include light absorbing particles or precursors of the light absorbing material, and preferably include both light absorbing particles and precursors of the light absorbing material.
  • the average particle diameter of the light absorbing particles may vary depending on the pitches, widths, or heights of the convex portions 141 and 241 and the concave portions 142 and 242 of the ultraviolet polarization splitting element 100 and 200 to be desired. However, for example, it may be particles having an average particle diameter of 100 nm or less. When the average particle diameter of the particles exceeds 100 nm, the size of the average particle diameter of the particles is similar to or larger than the width and width of the recesses and convex portions of the resists 120 and 230, and thus may not form a desirable pattern. Since the scattering phenomenon of light with respect to the ultraviolet wavelength becomes worse in the polarized light splitting elements 100 and 200, effective ultraviolet separation characteristics cannot be expected.
  • the lower limit of the average particle diameter of the particles is preferably used because the particles having a smaller particle size than the widths of the convex portions 141 and 241 of the manufactured polarization splitting elements 100 and 200 are not particularly limited, but are considered in view of manufacturability. For example, it may be 3 nm.
  • the light absorbing particles are particularly limited as long as they are particles that can absorb light in the ultraviolet region, for example, particles having a refractive index of 1 to 10 and a extinction coefficient of 0.5 to 10 for a wavelength of 300 nm.
  • One or two or more alloys selected from the group consisting of particles may be used, and preferably titanium dioxide (TiO 2 ) particles may be used, but is not limited thereto.
  • the absorption coefficient is excellent in the ultraviolet region of 1 or more, so that the polarization degree may be excellent in the ultraviolet region. Since degradation is reduced, durability can also be improved.
  • Exemplary particles may have a spherical shape or a polyhedron close to a pyramid (tetrahedron), cube (hexahedron) or more spheres, and as another exemplary form, may be disc-shaped, elliptic-shaped, rod-shaped. However, it is not particularly limited.
  • the density of the light absorbing particles is relatively low so that the lower portion of the gap of the uniform film or lattice may not be uniformly filled. This may make it difficult to control in the process of filling the gaps of the lattice or obtaining a uniform thin film.
  • the solvent used to disperse the light absorbing particles may be used a variety of solvents depending on the type of light absorbing particles, it is not particularly limited.
  • distilled water alcohol solvents such as methanol, ethanol, butanol, isopropyl alcohol, ethoxy acetate, etc. may be used as the polar solvent, and toluene, xylene, hexane, octane, etc. may be used as the nonpolar solvent. have.
  • the precursor of the light absorbing material may form fine particles having a small particle size by the hydrolysis and condensation reaction, using the fine particles formed by the precursor of the light absorbing material as described above
  • the precursor of the light absorbing material may be used in the sol-gel process to form a pattern.
  • the precursor of the light-absorbing material is a film of the light-absorbing material or the light-absorbing particles of the light-absorbing material satisfying the above-described range of refractive index and absorption coefficient range by the hydrolysis and condensation reaction during the sol-gel process. If it is a precursor which can be formed, it will not specifically limit, For example, 1 or more types chosen from the group which consists of a titanium alkoxide, a zirconium alkoxide, tungsten alkoxide, tin alkoxide, zinc alkoxide, cesium alkoxide, iridium alkoxide, and a silicon alkoxide. It may be used, preferably titanium alkoxide or silicon alkoxide may be used, but is not limited thereto.
  • the precursor of the light absorbing material in the coating solution (130,220), for example, 1 to 40 parts by weight, 5 to 30 parts by weight, 20 to 35 parts by weight, 10 to 25 parts by weight based on 100 parts by weight of the coating solution May be included.
  • the precursor of the light absorbing material is included in less than 1 part by weight, the amount of the organic compound in the coating solution is relatively increased, so that the volume shrinkage is very large in the sintering process for removing the organic compound in the coating solution during the solution process using the precursor.
  • the coating solution 130 and 220 may be a sol-gel solution including an alcohol solvent and an acid or base catalyst, in addition to the precursor of the light absorbing material described above.
  • the alcohol solvent may include one or more alcohols selected from the group consisting of isopropanol, methanol, ethanol, butanol, and the like.
  • the alcohol-based solvent may be included, for example, 50 to 90 parts by weight, 60 to 80 parts by weight, 70 to 75 parts by weight based on 100 parts by weight of the sol-gel coating solution.
  • the alcoholic solvent is included in less than 50 parts by weight, it is difficult to generate a precipitate and a film or a lattice having a uniform film.
  • the finally formed absorbing material that is, the content of solid content is small, thus the continuous pattern Or it may be difficult to form a lattice.
  • the acid or base catalyst is not particularly limited, but may include, for example, at least one selected from the group consisting of hydrochloric acid, nitric acid, acetic acid, ammonia, potassium hydroxide, an amine compound, and the like.
  • an acid catalyst can be used because the metal oxide precursor can increase the stability of the oxide derivative under acidic conditions, thereby preventing precipitation and inducing uniform gelation, in which case the sol-gel solution above
  • the pH of the appropriate pH value may vary depending on the type of precursor of the light absorbing material. For example, stability of the precursor solution at pH 2 to 5 can be obtained.
  • the acid or base catalyst may be included in, for example, 1 to 30 parts by weight, 5 to 20 parts by weight, and 10 to 15 parts by weight based on 100 parts by weight of the sol-gel coating solution. If the content is less than 1 part by weight, the solution may have a problem of rapid increase in viscosity due to rapid hydration and condensation reaction with moisture in the air. If the content is more than 30 parts by weight, gelation by the hydration reaction and condensation reaction may be delayed, thereby causing A thin film cannot be obtained or the content of organic compounds in the coating solution becomes relatively large, which can make it difficult to obtain the desired film and lattice shapes due to large volume shrinkage after the sintering process.
  • the coating solution (130, 220) is also a precursor of the light-absorbing material and in order to relatively alleviate the volume shrinkage due to the removal of the precursor of the light-absorbing material or the organic compound of the light-absorbing material in the sintering process to be described later It may include all of the light absorbing particles.
  • the coating solution 130 and 220 may include light absorbing particles including a material which is the same as or different from the light absorbing material formed by the dehydration and condensation reaction between the precursor of the light absorbing material and the precursor of the light absorbing material.
  • the mixed solution may be used, preferably, the light absorbing particles may include the same material as the light absorbing material formed by the precursor of the light absorbing material.
  • the light absorbing particles include the same kind of material as the light absorbing material formed by the precursor of the light absorbing material, the phase separation phenomenon between the heterogeneous light absorbing particles and the light absorbing precursor mixture in the high temperature sintering process. This can minimize the non-uniform composition.
  • the weight ratio of the light absorbing particles to the precursor of the light absorbing material is, for example, 0.1 to 50 parts by weight, 1 to 30 parts by weight, preferably 5 to 20 parts by weight based on 0.1 to 50 parts by weight of the precursor of the light absorbing material. It may be included in parts by weight.
  • the light absorbing particles are included in an amount exceeding 50 parts by weight, the content of solids in the finally formed light absorbing material becomes relatively large, so that it may be difficult to effectively fill the gaps in the gap between the resist gratings, and the uniform thin film and the highly reliable fine pattern Can be difficult to form.
  • the particles when the particles are included in less than 0.1 part by weight it may be difficult to obtain the effect by the relaxation of the volume shrinkage.
  • the particles may have a core shell structure.
  • the particles may comprise a core comprising a metal or metal alloy and a shell that is external to the core and that includes a metal or metal alloy that is different from the organic compound, metal oxide or metal or metal alloy of the core.
  • the core-shell particles may have a large specific surface area, thereby preventing aggregation or condensation between the particles and increasing dispersibility of the particles.
  • the organic compound may be a ligand or a polymer compound bonded to the outside of the core.
  • oleic acid oleic acid
  • stearic acid stearic acid
  • palmaic acid palmic acid
  • 2-hexadecanone 2-hexadecanone
  • 1-octanol 1-octanol
  • span 80 Span 80
  • dodecylaldehyde 1,2-epoxydodecane, 1,2-epoxyhexane, 1,2-epoxyhexane, arachidyl dodecanoate
  • the polymer compound may be a fluoropolymer, polyethylene glycol, polymethyl methacrylate, polylactic acid, polyacrylic acid, polysulfide, or polyethylene oxide. (polyethylene oxide), at least one selected from block copolymers containing at least one functional group and nitrocellulose may be exemplified, but is not limited thereto.
  • the coating solutions 130 and 220 may be applied to the gaps of the lattice or the substrates 110 and 210 using, for example, coating methods well known in the art, such as spin coating, dip coating, spray coating, and bar coating. ) May be applied on, but is not limited thereto.
  • the solution process may further include a sintering process for removing the solvent in the coating solution (130,220).
  • the coating solution 130 or 220 may be applied to a gap between the lattice of the resist 120 or by applying the coating solution 130 and 210 on the substrate 110 and 210, and then heating the coating solution 130 or 220 at a predetermined temperature condition.
  • the temperature conditions for heating the coating solution (130,220) in the above may vary depending on the type of the solvent to form the solution, the temperature range of 60 °C to 300 °C, for example, 80 °C to 250 °C, 100 °C to 200 It may be heated at a temperature of °C, 80 °C to 300 °C, 100 °C to 250 °C, 150 °C to 300 °C.
  • the solvent in the lattice or film formed by the gelation of the precursor is not completely removed, it is difficult to form a lattice or film having a uniform shape in the sintering process, if the temperature exceeds 300 °C sudden evaporation of the solvent Defects such as local pores may be formed in the formed film or lattice.
  • the gap between the light absorbing particles can be narrowed, the density of the light absorbing material in the convex portions (141, 241) can be increased, and the bonding degree between the light absorbing particles can be improved. Increase the physical stability.
  • the precursor of the light absorbing material or the organic material bound to the light absorbing particles may be completely removed by the sintering process, and a crystal structure having excellent absorbance may be formed in the ultraviolet wavelength band.
  • the resists 120 and 230 may be formed by various methods known in the art, for example, photo lithography, nano imprint lithography, soft lithography. lithography or interference lithography may be used.
  • a mask may be applied after applying a resist material on the substrates 110 and 220 or the layer 220 of the coating solution including the light absorbing material. It may be formed by a method of developing after exposure to a desired pattern using a, but is not limited thereto.
  • the convex portion 241 is formed by an etching process such as dry or wet etching using the resist 230 formed on the layer 220 of the coating solution as a mask as described above. can do.
  • the wet etching means a method of etching the layer 220 of the coating solution by using an etching solution, for example, a strong basic solution such as potassium hydroxide (KOH), tetramethylammonium hydroxide (TMAH), HF and The method may be performed by immersing the layer 220 of the coating solution in an etching solution using the same strong acid solution or a mixture of hydrofluoric acid (HF), nitric acid (HNO 3), acetic acid (CH 3 COOH), and the like.
  • an additive such as IPA (Isopropylalcohol) or a surfactant may be added to the etching solution.
  • the polarization splitting device 100 and 200 has a polarization degree even though it is not suitable to form a pattern having a high aspect ratio. Since the aspect ratio is not high because it includes a light absorbing material having the above-described refractive index and the extinction coefficient required to obtain the concave-convex (140,240) can be formed using wet etching. In this case, the process cost is significantly reduced and the process speed may be faster than dry etching.
  • the layer 220 of the coating solution may selectively use isotropic etching or anisotropic etching according to the crystal direction. For example, when wet etching is performed on the layer 220 of the coating solution having a crystal orientation of 100, isotropic etching is performed with the same etching rate in all directions. However, in the case where the crystallographic direction of the layer 220 of the coating solution is 110, when the strong base such as potassium hydroxide (KOH) is used, the 111 direction becomes virtually non-etched, and as a result, the anisotropy is performed in only one direction. Etching can be implemented. Therefore, by using such a characteristic, anisotropic etching having a high aspect ratio can be realized even through wet etching.
  • KOH potassium hydroxide
  • the dry etching is a method of etching the layer 220 of the coating solution using a gaseous gas, for example, ion beam etching, RF sputter etching, reactive ion etching or plasma etching
  • a gaseous gas for example, ion beam etching, RF sputter etching, reactive ion etching or plasma etching
  • Known dry etching may be used, but is not limited thereto.
  • the resist 220 may be formed before forming the layer 220 of the coating solution and forming the resist 230 in order to increase the ease of etching.
  • a hard mask layer may be further formed between 230 and the layer 220 of coating solution.
  • the hard mask layer is not particularly limited as long as the resist 230 is well etched but is less etched than the layer 220 of the coating solution.
  • Cr, Ni, SiN, SiO 2, etc. may be used. Can be used.
  • the hard mask layer is additionally inserted, since the etching rate is significantly higher than when only the resist 230 is used as the etching mask, a pattern having a high aspect ratio can be easily manufactured.
  • the resist 230 may be removed.
  • the hard mask layer may also be removed after the unevenness 240 is formed.
  • the resist 230 or the hard mask layer is not particularly limited.
  • the resist 230 or the hard mask layer may be removed through a resist burning process or a dry etching process through heating.
  • the heating temperature may vary depending on the light absorbing material or the precursor of the light absorbing material to be used, for example, 250 ° C. to 900 ° C., 300 ° C. to 800 ° C., and 350 ° C. to 700 ° C. It may be carried out in a temperature range of °C, 300 °C to 500 °C, 350 °C to 600 °C, 400 °C to 800 °C, or 450 °C to 900 °C.
  • the heating temperature is less than 250 °C the removal of the organic material is not completed may cause a decrease in durability, if it exceeds 900 °C the light absorption characteristics in the ultraviolet region may be reduced by the change in the metal oxide crystal phase, in particular the heating temperature is In the case of 350 ° C. to 700 ° C., the sol-gel coating solution 130 and 220 may effectively remove the precursor of the light absorbing material and the organic compound bound to the light absorbing nanoparticles, thereby activating light absorption in the ultraviolet region. have.
  • the surface absorbing material introduced to disperse the light absorbing material or the precursor of the light absorbing material may be removed together with the resist 230.
  • the convex portion may be formed such that the dielectric material is present in the recessed portion formed by the convex portion.
  • the dielectric material present in the convex portion and the recess portion may be formed such that a in Formula 1 is 0.74 to 10 and b is 0.5 to 10.
  • Equation 1 i is an imaginary unit
  • n 1 is the refractive index for light of any length of wavelength of 250 nm to 350 nm of the dielectric material, for example, 300 nm wavelength
  • n 2 is a refractive index of light having a wavelength of any length among the wavelengths of the 250 nm to 350 nm ultraviolet region of the convex portions 141 and 241, for example, a wavelength of 300 nm
  • W is the width of the convex portions 141 and 241. Is the pitch of the convex portions 141 and 241.
  • Polarization splitting elements 100 and 200 having high polarization degrees of 0.6 or more, 0.7 or more and 0.9 or more can be obtained.
  • the upper limit of the polarization degree value is not particularly limited, but may have a value of 0.98 or less, 0.95 or less, or 0.93 or less in consideration of economical efficiency of the manufacturing process.
  • the term "polarization degree” means the intensity of polarized light with respect to the intensity of light to be irradiated, and is calculated as in Equation 3 below.
  • Tc is the transmittance of the polarization splitting element (100,200) of the light of the wavelength of 250 nm to 350 nm polarized in the direction orthogonal to the convex portions (141,241), Tp in a direction parallel to the convex portions (141,241)
  • parallel means substantially parallel
  • vertical means substantially vertical.
  • the irregularities 140 and 240 may be formed such that c in the following Equation 2 is 1.3 to 10 and d is 0.013 to 0.1.
  • Equation 2 i is an imaginary unit, n 1 is the refractive index for light of any length of wavelength of 250 nm to 350 nm of the dielectric material, for example, 300 nm wavelength, n 2 is a refractive index with respect to light having a length of one of wavelengths in the ultraviolet region of 250 nm to 350 nm of the convex portions 141 and 241, for example, 300 nm wavelength, and W is the width of the convex portions 141 and 241, P is the pitch of the convex portions 141 and 241.
  • the concave and convex portions 140 and 240 may have an appropriate transmittance for excellent polarization separation characteristics.
  • the height of can be made low.
  • the unevenness (140,240) is a of 0.74 to a is 0.74 to 10
  • b is 0.5 to 10
  • c of the formula 2 is 1.3 to 10
  • d may be formed to be 0.013 to 0.1.
  • Equations 1 and 2 i is an imaginary unit
  • n 1 is the refractive index of the light of any length of the wavelength of the ultraviolet region of 250 nm to 350 nm, for example, 300 nm wavelength of the dielectric material
  • n 2 is the refractive index of light of any length among wavelengths of 250 nm to 350 nm of the convex portions 141 and 241, for example, 300 nm wavelength
  • W is the width of the convex portions 141 and 241.
  • P is the pitch of the convex portions 141 and 241.
  • the pitch P of the convex portions 141 and 241 is not particularly limited, but, for example, 50 nm to 200 nm, 100 nm to 180 nm, 110 nm to 150 nm, 120 nm to 150 nm , 130 nm to 150 nm or 140 nm to 150 nm.
  • the ratio H / P of the height H of the convex portions 141 and 241 to the pitch P of the convex portions 141 and 241 is the pitch of the lattice of the polarization splitting elements 100 and 200 implemented in the ultraviolet region.
  • the line width for example, it can be formed to 0.3 to 1.5, 0.4 to 1, 0.5 to 1.2, 0.6 to 1.3 or 0.8 to 1.5.
  • the ratio (H / P) of the height H of the convex portion to the pitch P of the convex portions 141 and 241 is less than 0.6, a problem of insufficient light absorption may occur. Not only is it difficult, but even in actual fabrication, the degree of polarization is excellent while the light transmission, which has the greatest effect on the speed of the photoalignment process, can be significantly reduced.
  • the height H of the convex portions 141 and 241 is not particularly limited, but for example, 20 nm to 300 nm, 50 nm to 200 nm, 100 nm to 150 nm, 150 nm to 250 nm or 200 nm to 280 nm It can be formed as.
  • the height H of the convex portions 141 and 241 exceeds 300 nm, the amount of light absorbed increases, so that the absolute amount of light required for photo alignment may be lowered.
  • the height (H) of the convex portions (141, 241) is formed within the above-mentioned range, the amount of light absorbed is not much, it is possible to manufacture a suitable polarization separation element (100,200), the polarization separation element (100,200) excellent ultraviolet While maintaining the transmittance, it is possible to implement a smooth polarization separation performance.
  • the aspect ratio may be increased to prevent the ease of pattern fabrication.
  • the width W of the convex portions 141 and 241 is not particularly limited, but may be, for example, 10 nm to 160 nm.
  • the pitch of the convex portions 141 and 241 is 50 nm to 150 nm.
  • it may be formed from 10 nm to 120 nm, 30 nm to 100 nm, 50 nm to 80 nm.
  • the irregularities 140 and 240 may be formed so that the fill-factor satisfies 0.2 to 0.8, for example, satisfies 0.3 to 0.6, 0.4 to 0.7, 0.5 to 0.75, or 0.45. It can be formed to.
  • the fill factor of the unevenness 140 and 240 satisfies the numerical range, smooth polarization separation performance may be realized, and the amount of light absorbed may not be much, thereby preventing the polarization characteristics of the polarization separation elements 100 and 200 from being lowered.
  • the term "fill-factor" of the irregularities 140 and 240 is a ratio (W / P) of the width W of the convex portions 141 and 241 to the pitch P of the convex portions 141 and 241.
  • said "polarization characteristic” means the characteristic in which P polarization is transmitted among the components of the light irradiated to the polarization separation elements 100 and 200, and S polarization is absorbed or reflected by the polarization separation elements 100 and 200.
  • S polarized light means a component having an electric field vector parallel to the grating among incident light incident on the absorption type polarizing plate, and "P polarized light” has an electric field vector orthogonal to the grating among the incident light. Means an ingredient.
  • the present application also relates to a polarization splitting element.
  • FIG. 3 is a diagram schematically showing a cross section of an exemplary polarization splitting element 100
  • FIG. 4 is a diagram schematically showing an upper surface of an exemplary polarization splitting element 100
  • the polarization splitting element 100 may include an uneven portion 140 having a convex portion 141 including a light absorbing material and a concave portion 142 having a dielectric material therein.
  • the term “concave-convex” refers to a structure (see FIG. 4) in which a plurality of stripe-shaped patterns in which a plurality of concave portions 142 and convex portions 141 are formed are arranged in parallel with each other, and used herein.
  • P means the distance which added the width W of the said convex part 141, and the width of the recessed part 142 (refer FIG. 4), and the term “height” used in this specification is said Mean height (H) of the convex portion 141 (see Fig. 3).
  • the exemplary polarization splitting element 100 may include the unevenness 140, and the unevenness 140 may have the uneven portion 142 and the uneven portion 141.
  • the convex portion 141 may include a light absorbing material.
  • the light absorbing material has a refractive index of 1 to 10, for example, 1.3 to a wavelength of any one of wavelengths in the ultraviolet region of 250 nm to 350 nm, for example, a wavelength of 300 nm. 8, 1.5 to 9, 2 to 7 or 3 to 4.
  • the polarization splitting element 100 formed of a light absorbing material having a refractive index of less than 1 may not have an excellent extinction ratio.
  • the term "Extinction Ratio" means Tc / Tp, and the higher the extinction ratio, the better the polarization plate.
  • Tc is the transmittance of the light of the wavelength polarized in the direction orthogonal to the convex portion 141 to the polarization splitting element 100
  • Tp is the polarization separation of light polarized in the direction parallel to the convex portion 141 It means the transmittance to the device 100.
  • the light absorbing material has an absorption coefficient of 0.5 to 10, for example, 1 to 5, 1.2 to 7, 1.3 to 5, for light having a wavelength of 250 nm to 310 nm, for example, a wavelength of 300 nm. Or 1.5 to 3.
  • the convex portion 141 is formed using a material having the absorbance coefficient within the numerical range, the extinction ratio of the polarization splitting element 100 may be increased and the total transmittance may be excellent.
  • the light absorbing material having a refractive index of 250 nm to 310 nm, for example, 300 nm of light, having a refractive index of 1 to 10 and satisfying an absorption coefficient of 0.5 to 10 is included in the convex portion 141.
  • the light in the ultraviolet region may be polarized without being limited to the pitch of the convex portion 141. That is, since the convex portion 141 includes the light absorbing material, the refractive index of the light wavelength region of 250 nm to 350 nm, for example, 300 nm is 1 to 10, and the absorption coefficient is 0.5 to 10.
  • the dependence on the pitch P may be lower than that of the reflective material such as aluminum.
  • the pitch of the convex portion 141 formed of the light absorbing material in order to polarize light in the ultraviolet region having a short wavelength is, for example, 50 nm to 200 nm, 100 nm to 180 nm, 110 nm to 150 nm, 120 nm. To 150 nm, 130 nm to 150 nm, or 140 nm to 150 nm.
  • the pitch P exceeds 200 nm, which is about 1/2 of the 400 nm light wavelength region, polarization separation in the ultraviolet region may not occur.
  • the convex portion 141 also has a refractive index and an extinction coefficient in the above-described range, and thus has excellent ultraviolet absorbing ability and excellent extinction ratio even at a shorter wavelength than aluminum. 100) can be prepared.
  • the oxidation temperature of the light absorbing material may be 400 °C or more, for example, 500 °C or more, 600 °C or more, 700 °C or more, 800 °C or more.
  • the polarization splitting element 100 can maintain the excellent polarization degree without being deformed. There is.
  • the light absorbing material has a refractive index and an extinction coefficient in the above-described range
  • various materials known in the art may be used, and for example, silicon, titanium oxide, zinc oxide, zirconium oxide, tungsten, Tungsten oxide, gallium arsenide, gallium antimonide, aluminum gallium arsenide, cadmium telluride, chromium, molybdenum, nickel, gallium phosphide, indium gallium arsenide, indium phosphide, indium antimonide, cadmium zinc telluride, tin oxide, Cesium oxide, titanium strontium oxide, silicon carbide, iridium, iridium oxide or zinc selenium telluride may be used, but is not limited thereto.
  • a dielectric material may be present in the recessed portion 142 of the unevenness 140.
  • An exemplary refractive index of the dielectric material for light of 250 nm to 350 nm wavelength may be 1 to 3.
  • the dielectric material is not particularly limited as long as it has a refractive index in the above-described range, and examples thereof include silicon oxide, magnesium fluoride, silicon nitride, air, and the like. In one example, when the dielectric material is air, the recessed portion 142 of the unevenness 140 may be substantially empty.
  • the substrate 110 included in the polarization splitting element 100 and supporting the unevenness 140 may be, for example, quartz, UV-transparent glass, or polyvinyl alcohol (PVA). It may be a substrate formed from a material such as poly carbonate (Poly Carbonate), ethyl vinyl acetate (Ethylene Vinyl Acetate, EVA). Exemplary UV transmittance of the substrate 110 may be, for example, 70% or more, 80% or more, 90% or more. When the light transmittance is in the above-described range, the UV transmittance of the polarization splitting element is also improved to increase the optical orientation. It is possible to produce a photo-alignment film having excellent qualities.
  • the substrate 110 has excellent light transmittance of not only visible light but also an ultraviolet wavelength band of 200 nm in a range of 85% to 90% or more, and quartz (Quartz) resistant to heat emitted from a lamp for a long time is emitted from the lamp 110. Can be used).
  • Exemplary extinction ratio of the polarization splitting device 100 may be 2 or more, for example, may have a value of 5 or more, 10 or more, 50 or more, 100 or more or 500 or more.
  • the upper limit of the extinction ratio is not particularly limited, but may be, for example, 2000 or less, 1500 or less, or 1000 or less in consideration of manufacturing processes and economic aspects.
  • the polarization splitting device 100 has an extinction ratio of 2 to 2000, for example, 5 to 1500, 10 to 1500, 50 to 2000, 500 to 1500, or 100 in a wavelength range of 250 nm to 350 nm having a short wavelength. To 2000.
  • the polarization splitting element 100 can exhibit excellent polarization performance in the visible region as well as the ultraviolet region.
  • the extinction ratio can be improved to more than 2000.
  • the polarization splitting device having an extinction ratio of 2000 or more is not practical in meaning. Increasing the height at the pitch increases aspect ratio, which can significantly reduce productivity in terms of processing.
  • the present application also relates to an apparatus including the polarization splitting element, for example, a light irradiation apparatus.
  • the exemplary device may include equipment in which the polarization splitting element and the irradiated object are mounted.
  • the polarization splitting element may be a polarizing plate.
  • the polarizing plate can be used, for example, to produce light polarized in a straight line from light emitted from a light source.
  • the polarizing plate may be included in the device such that light irradiated from the light source is incident on the polarizing plate so that light transmitted through the polarizing plate may be irradiated back to the mask.
  • the polarizing plate may be present at a position where the light irradiated from the light source can be incident on the polarizing plate after being collected by the light collecting plate.
  • any one capable of producing linearly polarized light from light emitted from the light source can be used without particular limitation.
  • a polarizing plate any one capable of producing linearly polarized light from light emitted from the light source can be used without particular limitation.
  • a polarizing plate a glass plate, a wire grid polarizing plate, etc. which are arrange
  • the apparatus may further include a photoalignment mask between the equipment to which the irradiated object is mounted and the polarization splitting element.
  • the mask for example, may be installed so that the distance to the surface of the subject mounted on the equipment is about 50 mm or less.
  • the distance may be, for example, greater than 0 mm, or greater than 0.001 mm, greater than 0.01 mm, greater than 0.1 mm, or greater than 1 mm.
  • the distance may be 40 mm or less, 30 mm or less, 20 mm or less, or 10 mm or less.
  • the distance between the surface of the object and the mask can be designed in various combinations of the above upper and lower limits.
  • the type of equipment to which the subject is mounted is not particularly limited, and may include all kinds of equipment designed to stably maintain the subject during light irradiation.
  • the apparatus may further include a light source capable of irradiating light with a mask.
  • a light source capable of irradiating light with a mask.
  • the light source may be a light source capable of irradiating ultraviolet light, and a high pressure mercury ultraviolet lamp, a metal halide. Lamps or gallium ultraviolet lamps and the like can be used.
  • the light source may comprise one or a plurality of light irradiation means.
  • the number or arrangement of the irradiation means is not particularly limited.
  • the light irradiation means forms two or more rows, and the light irradiation means positioned in any one of the two or more rows and the other adjacent to any one of the rows.
  • the light irradiation means located in the rows may be arranged so as to overlap each other.
  • the overlap between the light irradiation means means that the line connecting the center of the light irradiation means in one column and the light irradiation means in another column adjacent to one column is not parallel to the direction perpendicular to each column. While being formed in a direction (direction inclined at a predetermined angle), it may mean that the irradiation area of the light irradiation means overlaps with each other in a direction perpendicular to each column.
  • FIG. 5 is a diagram for illustratively explaining the arrangement of the above light irradiation means.
  • the some light irradiation means 10 is arrange
  • the center of the first and second light irradiation means is determined.
  • the line P to connect is formed so as not to be parallel to the line C formed in the direction perpendicular
  • the irradiation area of the 1st light irradiation means and the irradiation area of the 2nd light irradiation means overlap by the range of Q in the direction perpendicular
  • the light amount of light irradiated by the light source can be kept uniform.
  • the extent to which any one of the above light irradiation means and the other light irradiation means overlap, for example, the length of Q in Fig. 5 is not particularly limited.
  • the degree of overlap may be about 1/3 to 2/3 of the diameter of the light irradiation means, for example, L in FIG. 5.
  • the apparatus may further comprise one or more light collecting plates for the adjustment of the amount of light emitted from the light source.
  • the light collecting plate may be included in the apparatus, for example, after the light irradiated from the light source is incident and collected by the light collecting plate, the collected light can be irradiated with the polarization splitting element and the mask.
  • the light collecting plate if it is formed so as to collect light irradiated from the light source, a constitution commonly used in this field can be used.
  • As the light collecting plate a lenticular lens layer and the like can be exemplified.
  • FIG. 6 is a diagram illustrating an example of a light irradiation apparatus.
  • the apparatus of FIG. 8 includes the equipment 60 which mounts the light source 10, the light condensing plate 20, the polarizing plate 30, the mask 40, and the to-be-irradiated object 50 which were arrange
  • light irradiated from the light source 10 first enters the light collecting plate 20, is collected, and then enters the polarizing plate 30 again.
  • the light incident on the polarizing plate 30 may be generated as light linearly polarized, incident to the mask 40, guided by the opening, and irradiated onto the surface of the irradiated object 50.
  • This application relates to a light irradiation method.
  • An exemplary method may be performed using the above-described light irradiation apparatus.
  • the method may include mounting the object to the equipment on which the object is mounted, and irradiating light to the object through the polarization splitting element and the mask.
  • the irradiated object may be an optical alignment layer.
  • the light irradiation method may be a method of manufacturing an aligned photoalignment film.
  • the photoalignment layer having an orientation is expressed by aligning a photosensitive material included in the photoalignment layer in a predetermined direction by irradiating linearly polarized light through a polarization separation element and a mask while the photoalignment layer is fixed to the equipment. Can be prepared.
  • the kind of the photo-alignment film that can be applied to the method is not particularly limited.
  • various kinds of photo-alignment compounds are known which can be used for forming a photo-alignment layer as a compound including a photosensitive residue, and all of these known materials can be used for forming the photo-alignment layer.
  • Photo-alignment compounds include, for example, compounds aligned by trans-cis photoisomerization; Compounds aligned by photo-destruction, such as chain scission or photo-oxidation; Compounds ordered by photocrosslinking or photopolymerization such as [2 + 2] addition cyclization ([2 + 2] cycloaddition), [4 + 4] addition cyclization or photodimerization; Compounds aligned by photo-Fries rearrangement or compounds aligned by ring opening / closure reaction may be used.
  • the compound aligned by trans-cis photoisomerization for example, azo compounds or stilbenes, such as sulfated diazo dyes or azo polymers, may be exemplified.
  • cyclobutane tetracarboxylic dianhydride cyclobutane-1,2,3,4-tetracarboxylic dianhydride
  • aromatic polysilane or polyester polystyrene or polyimide and the like
  • polystyrene or polyimide and the like can be exemplified.
  • a compound aligned by photocrosslinking or photopolymerization a cinnamate compound, a coumarin compound, a cinnanam compound, a tetrahydrophthalimide compound, a maleimide compound , Benzophenone compounds, diphenylacetylene compounds, compounds having chalconyl residues (hereinafter referred to as chalconyl compounds) or compounds having anthracenyl residues (hereinafter referred to as anthracenyl compounds) as photosensitive residues;
  • chalconyl compounds compounds having chalconyl residues
  • anthracenyl compounds compounds having anthracenyl residues
  • examples of the compounds aligned by the optical freeze rearrangement include aromatic compounds such as benzoate compounds, benzoamide compounds, and methacrylamidoaryl methacrylate compounds.
  • the compound aligned by the ring-opening / ring-closure reaction such as a spiropyran compound A [4 + 2] ⁇ - electron system ([4 + 2] ⁇ -electronic system), but may be exemplified by compounds such as sorting by a ring opening / ring-closure reaction of, without being limited thereto.
  • the photoalignment film can be formed through a known method using such a photoalignment compound.
  • the photo-alignment film can be formed on a suitable supporting substrate using the compound, and the photo-alignment film can be applied to the method while being transported by equipment capable of mounting the subject, for example, a roll. .
  • the photoalignment film to which light is irradiated through the polarization splitting element and the mask may be a photoalignment film subjected to a primary alignment treatment.
  • the primary alignment treatment can be carried out by irradiating the entire surface of the photoalignment film, for example, the photoalignment film, before irradiating light through a mask with ultraviolet light linearly polarized in a predetermined direction through a polarization splitting element. have.
  • the light When the light is irradiated to the primary alignment-treated photoalignment film through a mask, but irradiated with polarized light in a different direction than the first alignment treatment, the light is irradiated only to the region of the photo-alignment film corresponding to the opening, The photo-alignment compound is rearranged, and thus the photo-alignment layer in which the alignment direction of the photo-alignment compound is patterned can be manufactured.
  • the orientation of the alignment layer is determined by the polarization direction of the light finally irradiated. Accordingly, after the primary alignment is performed by irradiating linearly polarized ultraviolet rays in a predetermined direction through the polarization splitting element through the polarization splitting element, the photoalignment layer is exposed to linearly polarized light in a direction different from that used in the primary alignment treatment only through a mask. In this case, the orientation of the alignment layer may be changed in a direction different from the direction at the time of the primary alignment treatment only at a predetermined portion to which light is irradiated. Accordingly, a pattern including at least a first alignment region having a first alignment direction and a second alignment region having a second alignment direction different from the first alignment direction, or two or more kinds of alignment regions having different alignment directions are formed on the optical alignment layer. Can be formed.
  • the angle formed by the polarization axis of the linearly polarized ultraviolet light irradiated during the primary alignment and the polarization axis of the linearly polarized ultraviolet radiation irradiated during the secondary orientation performed through the mask after the first alignment may be vertical.
  • vertical may mean substantially vertical.
  • the optical alignment film manufactured by controlling the polarization axes of the light irradiated at the primary and secondary orientations may be used, for example, in an optical filter capable of realizing a stereoscopic image.
  • an optical filter may be manufactured by forming a liquid crystal layer on the optical alignment film formed as described above.
  • the method for forming the liquid crystal layer is not particularly limited, and for example, after coating and orienting a liquid crystal compound capable of crosslinking or polymerization by light on the photoalignment film, the layer of the liquid crystal compound is irradiated with light to be crosslinked or polymerized to be formed. can do.
  • the layer of the liquid crystal compound is aligned and fixed according to the alignment of the photoalignment film, so that a liquid crystal film including two or more kinds of regions having different alignment directions can be produced.
  • the kind of liquid crystal compound applied to the photo-alignment film is not particularly limited and may be appropriately selected according to the use of the optical filter.
  • the liquid crystal compound may be aligned in accordance with the alignment pattern of the alignment layer existing below, and the phase difference characteristic of ⁇ / 4 by photocrosslinking or photopolymerization It may be a liquid crystal compound capable of forming a liquid crystal polymer layer.
  • phase difference characteristic of ⁇ / 4" may refer to a characteristic capable of retarding incident light by a quarter of its wavelength.
  • an optical filter capable of dividing incident light into left circularly polarized light and right circularly polarized light can be produced.
  • polymerizing the aligned liquid crystal compound are not specifically limited.
  • the alignment may be performed in such a manner as to maintain the liquid crystal layer at an appropriate temperature at which the compound may exhibit liquid crystallinity according to the kind of liquid crystal compound.
  • crosslinking or polymerization may be carried out by irradiating the liquid crystal layer with light at a level at which appropriate crosslinking or polymerization may be induced depending on the type of liquid crystal compound.
  • the manufacturing method of the polarization splitting device of the present application may be easy to manufacture the ultraviolet polarization splitting device in a large area as well as a simple manufacturing process and low manufacturing cost.
  • the polarization splitting device of the present application has excellent durability against ultraviolet rays and heat, and has low pitch dependence of polarization characteristics, thereby facilitating a manufacturing process and excellent polarization degree and extinction ratio even in a short wavelength region.
  • FIG. 1 is a view sequentially showing a method of manufacturing an exemplary ultraviolet polarization splitting device.
  • FIG. 2 is a view sequentially showing another embodiment of the method of manufacturing an exemplary ultraviolet polarization splitting device.
  • FIG 3 is a cross-sectional view illustrating an exemplary polarization splitting element.
  • FIG. 4 is a diagram schematically illustrating an upper surface of an exemplary polarization splitting element.
  • FIG. 5 is a diagram illustrating an arrangement of exemplary light irradiation means.
  • FIG. 6 is a view showing an exemplary light irradiation apparatus.
  • FIG. 7 and 8 are SEM photographs taken of exemplary polarization splitting elements manufactured according to Example 1 and Example 2.
  • FIG. 7 and 8 are SEM photographs taken of exemplary polarization splitting elements manufactured according to Example 1 and Example 2.
  • FIG. 9 is a graph comparing polarization characteristics of exemplary polarization splitting devices manufactured according to Examples 1 and 2 and Comparative Examples.
  • An acrylic resist (MR8010R, manufactured by Microresist) was coated on a 5 mm thick quartz substrate to form a 100 nm thick resist layer. After contacting the stamper formed with a 75 nm gap formed in advance on the resist layer, and heated to 160 °C temperature for 20 minutes, pressurized at a pressure of 40 bar to transfer the lattice of the stamper to the resist layer It was. Thereafter, the remaining film of the resist layer present in the recessed portion of the imprinted pattern was removed to prepare a resist having a lattice of 150 nm pitch.
  • the sol-gel coating solution prepared in Preparation Example 1 was spin-coated at 2000 rpm to uniformly fill the gap of the resist lattice with the sol-gel coating solution.
  • titanium oxide titanium dioxide, TiO 2
  • an acrylic resist MR8010R manufactured by Microresist
  • FIG. 8 is an SEM photograph showing the shape of an absorption type polarization split device manufactured in Example 2.
  • FIG. 8 is an SEM photograph showing the shape of an absorption type polarization split device manufactured in Example 2.
  • An aluminum layer was vacuum deposited to a thickness of 150 nm through a sputtering method on a 5 mm thick quartz substrate. Then, an acrylic resist (MR8010R manufactured by Microresist) was applied on the aluminum layer to form a resist layer having a thickness of 100 nm.
  • the lattice having a 75 nm gap prepared in advance on the resist layer was contacted with a stamper formed therein, and then heated to 160 ° C. for 20 minutes, and a pressure of 40 bar was applied to transfer the lattice of the stamper to the resist layer. Thereafter, the remaining film of the resist layer existing in the recessed portion of the imprinted pattern was removed to prepare a resist having a lattice of 150 nm pitch.
  • the patterning is performed to include aluminum in the convex portion, the height (H) of the convex portion is 50 nm, the width (W) is 75 nm, and the pitch (P).
  • UV polarization splitting device having a 150 nm) was prepared.
  • the refractive index and the extinction coefficient of the convex portion of the polarization splitting device were measured by irradiating light having a wavelength of 300 nm to the polarization splitting devices manufactured in Examples and Comparative Examples using spectroscopic ellipsometry equipment and oscillation modeling. Same as 1.
  • the transmittances of P-polarized light and S-polarized light of the ultraviolet polarization splitting device according to Examples 1 to 3 and Comparative Example were measured in the wavelength band of 200 to 400 nm using an Axo-scan polarized light transmission spectrometer. The measurement results are shown graphically in FIG. In FIG. 9, the x axis represents the wavelength of light (200 nm to 400 nm) and the y axis represents the light transmittance.
  • the convex portion of the polarization splitting element formed by depositing aluminum of Comparative Example showed a refractive index of less than 1 because the refractive index of the light having a wavelength of 300 nm is 0.28 and the absorption coefficient is 3.64.
  • the iron portion formed by titanium dioxide has a refractive index of 3.51 for light having a wavelength of 300 nm and an absorption coefficient of 1.07. Therefore, the refractive index of light having a wavelength of 300 nm has a refractive index of 1 to 10 and an absorption coefficient of 0.5 to 10. Appeared to meet the range of.
  • the polarization splitters manufactured according to Experimental Examples 1 and 2 have superior polarization characteristics in the ultraviolet region compared to the polarization splitters manufactured according to the comparative example.
  • the polarization splitting device according to the comparative example does not appear polarization characteristics, it can be seen that the polarization splitting devices manufactured according to Experimental Examples 1 and 2 have excellent polarization properties.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

La présente invention se rapporte à un procédé de fabrication d'un diviseur de faisceau de polarisation, à un diviseur de faisceau de polarisation, à un dispositif d'exposition à la lumière, à un procédé permettant une exposition à la lumière ainsi qu'à un procédé de fabrication d'un film de photo-alignement aligné. Le procédé de fabrication du diviseur de faisceau de polarisation de la présente invention présente un procédé de fabrication simple, des coûts de fabrication faibles et facilite la fabrication d'un diviseur de faisceau de polarisation ultraviolet à grande échelle. En outre, le diviseur de faisceau de polarisation de la présente invention présente une excellente durabilité contre les rayons ultraviolets et la chaleur, présente un procédé de fabrication simple en raison d'une faible dépendance du pas des propriétés de polarisation et peut mettre en œuvre un degré de polarisation supérieur même dans une zone à courte longueur d'onde.
PCT/KR2012/011313 2011-12-22 2012-12-21 Procédé de fabrication d'un diviseur de faisceau de polarisation Ceased WO2013095062A1 (fr)

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CN201280064182.8A CN104011570A (zh) 2011-12-22 2012-12-21 制备偏振分离器的方法
JP2014548681A JP2015502581A (ja) 2011-12-22 2012-12-21 偏光分離素子の製造方法
US13/971,561 US20140009823A1 (en) 2011-12-22 2013-08-20 Method of manufacturing polarized light splitting element

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CN104749676A (zh) * 2013-12-26 2015-07-01 优志旺电机株式会社 栅偏振元件、紫外线偏振光照射方法及装置、光取向装置
JP2015210416A (ja) * 2014-04-28 2015-11-24 日本電気硝子株式会社 光学素子及びその製造方法
JP2016027356A (ja) * 2014-07-08 2016-02-18 大日本印刷株式会社 偏光子、積層基板、および光配向装置
JP2016066023A (ja) * 2014-09-26 2016-04-28 東芝ライテック株式会社 紫外線照射装置

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CN104749676A (zh) * 2013-12-26 2015-07-01 优志旺电机株式会社 栅偏振元件、紫外线偏振光照射方法及装置、光取向装置
JP2015125280A (ja) * 2013-12-26 2015-07-06 ウシオ電機株式会社 グリッド偏光素子、紫外線偏光光照射方法、紫外線偏光光照射装置、光配向層付き基板の製造方法及び光配向装置
US9354375B2 (en) 2013-12-26 2016-05-31 Ushio Denki Kabushiki Kaisha Grid polarizing element and apparatus for emitting polarized UV light
CN104749676B (zh) * 2013-12-26 2018-08-14 优志旺电机株式会社 栅偏振元件、紫外线偏振光照射方法及装置、光取向装置
JP2015210416A (ja) * 2014-04-28 2015-11-24 日本電気硝子株式会社 光学素子及びその製造方法
JP2016027356A (ja) * 2014-07-08 2016-02-18 大日本印刷株式会社 偏光子、積層基板、および光配向装置
JP2016066023A (ja) * 2014-09-26 2016-04-28 東芝ライテック株式会社 紫外線照射装置

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